TW350996B - Puncture resistant electrostatic chuck - Google Patents

Puncture resistant electrostatic chuck

Info

Publication number
TW350996B
TW350996B TW086117660A TW86117660A TW350996B TW 350996 B TW350996 B TW 350996B TW 086117660 A TW086117660 A TW 086117660A TW 86117660 A TW86117660 A TW 86117660A TW 350996 B TW350996 B TW 350996B
Authority
TW
Taiwan
Prior art keywords
electrostatic chuck
puncture resistant
resistant electrostatic
puncture
sort
Prior art date
Application number
TW086117660A
Other languages
Chinese (zh)
Inventor
Arik Donde
Hyman J Levinstein
Robert W Wu
Andreas Hegedus
Edwin C Weldon
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of TW350996B publication Critical patent/TW350996B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/23—Chucks or sockets with magnetic or electrostatic means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Laminated Bodies (AREA)
  • Jigs For Machine Tools (AREA)

Abstract

A sort of puncture resistant electrostatic chuck, including a compound insulation covering an electrode, including the compound insulation a sort of substrate material including at least one fiber layer on top of the electrode, being rigid enough to raise the resistance to puncture of the compound insulator.
TW086117660A 1996-11-25 1997-11-25 Puncture resistant electrostatic chuck TW350996B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/755,716 US5729423A (en) 1994-01-31 1996-11-25 Puncture resistant electrostatic chuck

Publications (1)

Publication Number Publication Date
TW350996B true TW350996B (en) 1999-01-21

Family

ID=25040344

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086117660A TW350996B (en) 1996-11-25 1997-11-25 Puncture resistant electrostatic chuck

Country Status (5)

Country Link
US (2) US5729423A (en)
EP (1) EP0844659A3 (en)
JP (1) JPH10247683A (en)
KR (1) KR19980042710A (en)
TW (1) TW350996B (en)

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US20130260123A1 (en) * 2012-03-30 2013-10-03 Sabic Innovative Plastics Ip B.V. Electrical insulation paper, methods of manufacture, and articles manufactured therefrom
US20130260124A1 (en) * 2012-03-30 2013-10-03 Sabic Innovative Plastics Ip B.V. Electrical insulation paper, methods of manufacture, and articles manufactured therefrom
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JP6202111B2 (en) * 2014-11-20 2017-09-27 住友大阪セメント株式会社 Electrostatic chuck device
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Also Published As

Publication number Publication date
US5986875A (en) 1999-11-16
EP0844659A3 (en) 1999-11-17
EP0844659A2 (en) 1998-05-27
KR19980042710A (en) 1998-08-17
JPH10247683A (en) 1998-09-14
US5729423A (en) 1998-03-17

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