AU2451897A - Process for providing a glass-ceramic dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process - Google Patents

Process for providing a glass-ceramic dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process

Info

Publication number
AU2451897A
AU2451897A AU24518/97A AU2451897A AU2451897A AU 2451897 A AU2451897 A AU 2451897A AU 24518/97 A AU24518/97 A AU 24518/97A AU 2451897 A AU2451897 A AU 2451897A AU 2451897 A AU2451897 A AU 2451897A
Authority
AU
Australia
Prior art keywords
glass
providing
dielectric layer
electrically conductive
conductive substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU24518/97A
Inventor
Jaecheol Bang
Guo-Quan Lu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Virginia Tech Intellectual Properties Inc
Original Assignee
Virginia Tech Intellectual Properties Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Virginia Tech Intellectual Properties Inc filed Critical Virginia Tech Intellectual Properties Inc
Publication of AU2451897A publication Critical patent/AU2451897A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
AU24518/97A 1996-04-10 1997-04-10 Process for providing a glass-ceramic dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process Abandoned AU2451897A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US63233696A 1996-04-10 1996-04-10
US08632336 1996-04-10
US69058696A 1996-07-31 1996-07-31
US08690586 1996-07-31
PCT/US1997/005926 WO1997038481A1 (en) 1996-04-10 1997-04-10 Process for providing a glass-ceramic dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process

Publications (1)

Publication Number Publication Date
AU2451897A true AU2451897A (en) 1997-10-29

Family

ID=27091603

Family Applications (1)

Application Number Title Priority Date Filing Date
AU24518/97A Abandoned AU2451897A (en) 1996-04-10 1997-04-10 Process for providing a glass-ceramic dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process

Country Status (2)

Country Link
AU (1) AU2451897A (en)
WO (1) WO1997038481A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998047176A1 (en) * 1997-04-11 1998-10-22 The Morgan Crucible Company Plc Composite ceramic dielectrics
US6641939B1 (en) 1998-07-01 2003-11-04 The Morgan Crucible Company Plc Transition metal oxide doped alumina and methods of making and using
CN101982868B (en) * 2010-09-27 2012-06-27 友达光电股份有限公司 Electrode structure
CN105225997B (en) * 2014-06-12 2018-01-23 中微半导体设备(上海)有限公司 A kind of manufacture method of electrostatic chuck and electrostatic chuck
CN114804301B (en) * 2022-04-11 2023-06-27 贵州大学 Electroosmosis composite doped manganese oxide coated electrode and preparation method thereof

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3298936A (en) * 1961-04-17 1967-01-17 North American Aviation Inc Method of providing high temperature protective coatings
US3473999A (en) * 1968-11-05 1969-10-21 Owens Illinois Inc Glass or metal surfaces sealed by sio2-al2o3-mgo compositions and method of making
US4681656A (en) * 1983-02-22 1987-07-21 Byrum James E IC carrier system
US4794048A (en) * 1987-05-04 1988-12-27 Allied-Signal Inc. Ceramic coated metal substrates for electronic applications
EP0339903B1 (en) * 1988-04-26 1993-10-06 Toto Ltd. Method of making dielectric ceramics for electrostatic chucks

Also Published As

Publication number Publication date
WO1997038481A1 (en) 1997-10-16

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