TW344139B - Process for producing nonvolatile memory device - Google Patents

Process for producing nonvolatile memory device

Info

Publication number
TW344139B
TW344139B TW086115104A TW86115104A TW344139B TW 344139 B TW344139 B TW 344139B TW 086115104 A TW086115104 A TW 086115104A TW 86115104 A TW86115104 A TW 86115104A TW 344139 B TW344139 B TW 344139B
Authority
TW
Taiwan
Prior art keywords
forming
layer
conductive
insulation
line
Prior art date
Application number
TW086115104A
Other languages
English (en)
Inventor
Chol Woong-Lim
Man Ra Kyeong
Original Assignee
Lg Semicon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lg Semicon Co Ltd filed Critical Lg Semicon Co Ltd
Application granted granted Critical
Publication of TW344139B publication Critical patent/TW344139B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H01L29/42324—Gate electrodes for transistors with a floating gate
    • H01L29/42328—Gate electrodes for transistors with a floating gate with at least one additional gate other than the floating gate and the control gate, e.g. program gate, erase gate or select gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H01L29/4234—Gate electrodes for transistors with charge trapping gate insulator

Landscapes

  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)
TW086115104A 1997-07-09 1997-10-15 Process for producing nonvolatile memory device TW344139B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019970031838A KR100244278B1 (ko) 1997-07-09 1997-07-09 비휘발성 메모리 소자의 제조 방법

Publications (1)

Publication Number Publication Date
TW344139B true TW344139B (en) 1998-11-01

Family

ID=19513923

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086115104A TW344139B (en) 1997-07-09 1997-10-15 Process for producing nonvolatile memory device

Country Status (5)

Country Link
JP (1) JP2887128B2 (zh)
KR (1) KR100244278B1 (zh)
CN (1) CN1127760C (zh)
DE (1) DE19813457C2 (zh)
TW (1) TW344139B (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100466979B1 (ko) * 1997-12-26 2005-04-06 삼성전자주식회사 반도체 메모리 장치 및 그 장치의 프로그램 검증 방법
KR100317318B1 (ko) * 1998-04-23 2001-12-22 김영환 비휘발성 메모리 소자 및 그의 제조방법
JP4012341B2 (ja) * 1999-07-14 2007-11-21 株式会社ルネサステクノロジ 半導体集積回路装置
JP4117998B2 (ja) * 2000-03-30 2008-07-16 シャープ株式会社 不揮発性半導体記憶装置、その読み出し、書き込み方法及び消去方法、その製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0936257A (ja) * 1995-07-14 1997-02-07 Matsushita Electron Corp 半導体記憶装置およびその製造方法
JP2734433B2 (ja) * 1995-10-31 1998-03-30 日本電気株式会社 不揮発性半導体記憶装置の製造方法

Also Published As

Publication number Publication date
CN1127760C (zh) 2003-11-12
KR100244278B1 (ko) 2000-02-01
JPH1140783A (ja) 1999-02-12
DE19813457C2 (de) 2001-09-27
DE19813457A1 (de) 1999-01-14
CN1204870A (zh) 1999-01-13
KR19990009425A (ko) 1999-02-05
JP2887128B2 (ja) 1999-04-26

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees