TW283252B - Semiconductor manufacturing method - Google Patents

Semiconductor manufacturing method

Info

Publication number
TW283252B
TW283252B TW82110520A TW82110520A TW283252B TW 283252 B TW283252 B TW 283252B TW 82110520 A TW82110520 A TW 82110520A TW 82110520 A TW82110520 A TW 82110520A TW 283252 B TW283252 B TW 283252B
Authority
TW
Taiwan
Prior art keywords
coating
semiconductor manufacturing
dummy
etching
polysilicon
Prior art date
Application number
TW82110520A
Other languages
Chinese (zh)
Inventor
Ming-Jong Yang
Horng-Syh Pan
Cherng-Hann Hwang
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW82110520A priority Critical patent/TW283252B/en
Application granted granted Critical
Publication of TW283252B publication Critical patent/TW283252B/en

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

A semiconductor manufacturing method by using dummy coating to prevent PR residue, includes: Depositing polysilicon; Coating a dummy coating above the polysilicon to fill the concave area; Coating PR/photo mask exposure; Etching dummy coating; Etching polysilicon; Removing PR and re-etching the dummy coating; Through adding the dummy coating to plainarize the surface for PR exposure.
TW82110520A 1993-12-11 1993-12-11 Semiconductor manufacturing method TW283252B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW82110520A TW283252B (en) 1993-12-11 1993-12-11 Semiconductor manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW82110520A TW283252B (en) 1993-12-11 1993-12-11 Semiconductor manufacturing method

Publications (1)

Publication Number Publication Date
TW283252B true TW283252B (en) 1996-08-11

Family

ID=51397756

Family Applications (1)

Application Number Title Priority Date Filing Date
TW82110520A TW283252B (en) 1993-12-11 1993-12-11 Semiconductor manufacturing method

Country Status (1)

Country Link
TW (1) TW283252B (en)

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Legal Events

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MK4A Expiration of patent term of an invention patent