KR960012638B1 - Mounting method of semiconducter wafer - Google Patents

Mounting method of semiconducter wafer Download PDF

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Publication number
KR960012638B1
KR960012638B1 KR93005958A KR930005958A KR960012638B1 KR 960012638 B1 KR960012638 B1 KR 960012638B1 KR 93005958 A KR93005958 A KR 93005958A KR 930005958 A KR930005958 A KR 930005958A KR 960012638 B1 KR960012638 B1 KR 960012638B1
Authority
KR
South Korea
Prior art keywords
glass substrate
mounting method
semiconductor wafer
wafer
semiconducter
Prior art date
Application number
KR93005958A
Other languages
Korean (ko)
Inventor
Jae-Kyung Moon
Sung-Jae Maeng
Jong-Ram Lee
Kwang-Joon Yun
Original Assignee
Korea Electronics Telecomm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Electronics Telecomm filed Critical Korea Electronics Telecomm
Priority to KR93005958A priority Critical patent/KR960012638B1/en
Application granted granted Critical
Publication of KR960012638B1 publication Critical patent/KR960012638B1/en

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  • Dicing (AREA)

Abstract

A semiconductor wafer(1) is equipped on a mounting glass substrate(4) by using bonding wax(3). After a certain processes, the semiconductor wafer is separated from the glass substrate(4). The method includes the steps of: forming auxiliary layer(5) by spreading photoresist film on the mounting glass substrate(4); uniting the semiconductor wafer(1) and the mounting glass substrate(4) by the bonding wax(3).
KR93005958A 1993-04-09 1993-04-09 Mounting method of semiconducter wafer KR960012638B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR93005958A KR960012638B1 (en) 1993-04-09 1993-04-09 Mounting method of semiconducter wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR93005958A KR960012638B1 (en) 1993-04-09 1993-04-09 Mounting method of semiconducter wafer

Publications (1)

Publication Number Publication Date
KR960012638B1 true KR960012638B1 (en) 1996-09-23

Family

ID=19353697

Family Applications (1)

Application Number Title Priority Date Filing Date
KR93005958A KR960012638B1 (en) 1993-04-09 1993-04-09 Mounting method of semiconducter wafer

Country Status (1)

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KR (1) KR960012638B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140059762A (en) * 2011-05-17 2014-05-16 덴마크스 텍니스케 유니버시테트 Reflectivity-modulated grating mirror

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140059762A (en) * 2011-05-17 2014-05-16 덴마크스 텍니스케 유니버시테트 Reflectivity-modulated grating mirror

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