TW263600B - Process for implementing etching - Google Patents
Process for implementing etchingInfo
- Publication number
- TW263600B TW263600B TW84105706A TW84105706A TW263600B TW 263600 B TW263600 B TW 263600B TW 84105706 A TW84105706 A TW 84105706A TW 84105706 A TW84105706 A TW 84105706A TW 263600 B TW263600 B TW 263600B
- Authority
- TW
- Taiwan
- Prior art keywords
- implementing
- layer
- photoresist layer
- etching
- mask
- Prior art date
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
A process of implementing etching with photoresist as mask, that is applicable to form semiconductor material with at least one etched layer, comprises the steps of: covering photoresist layer on the above etched layer; aligning mask with predetermined pattern, and implementing exposure to the above photoresist layer; implementing developing the above photoresist layer; implementing baking to the above photoresist layer; and with the above photoresist layer as mask, implementing etching to the above etched layer; It features that implementing ion implantation to the above photoresist layer is done before implementing etching to the above etched layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW84105706A TW263600B (en) | 1995-06-06 | 1995-06-06 | Process for implementing etching |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW84105706A TW263600B (en) | 1995-06-06 | 1995-06-06 | Process for implementing etching |
Publications (1)
Publication Number | Publication Date |
---|---|
TW263600B true TW263600B (en) | 1995-11-21 |
Family
ID=51402039
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW84105706A TW263600B (en) | 1995-06-06 | 1995-06-06 | Process for implementing etching |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW263600B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202016104198U1 (en) | 2016-07-29 | 2016-08-11 | E-Lead Electronic Co., Ltd. | Car radio with removable panel |
-
1995
- 1995-06-06 TW TW84105706A patent/TW263600B/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202016104198U1 (en) | 2016-07-29 | 2016-08-11 | E-Lead Electronic Co., Ltd. | Car radio with removable panel |
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