TW227545B - - Google Patents

Info

Publication number
TW227545B
TW227545B TW082100102A TW82100102A TW227545B TW 227545 B TW227545 B TW 227545B TW 082100102 A TW082100102 A TW 082100102A TW 82100102 A TW82100102 A TW 82100102A TW 227545 B TW227545 B TW 227545B
Authority
TW
Taiwan
Application number
TW082100102A
Other languages
Chinese (zh)
Inventor
Murata Masanao
Original Assignee
Shinko Denki Kabushiri Kaisha
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Denki Kabushiri Kaisha filed Critical Shinko Denki Kabushiri Kaisha
Application granted granted Critical
Publication of TW227545B publication Critical patent/TW227545B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Ventilation (AREA)
  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW082100102A 1992-01-27 1993-01-09 TW227545B (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04012311A JP3082389B2 (ja) 1992-01-27 1992-01-27 クリーンルーム用保管庫

Publications (1)

Publication Number Publication Date
TW227545B true TW227545B (ja) 1994-08-01

Family

ID=11801776

Family Applications (1)

Application Number Title Priority Date Filing Date
TW082100102A TW227545B (ja) 1992-01-27 1993-01-09

Country Status (3)

Country Link
JP (1) JP3082389B2 (ja)
KR (1) KR100236273B1 (ja)
TW (1) TW227545B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100446220C (zh) * 2005-08-16 2008-12-24 力晶半导体股份有限公司 半导体元件的制造方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0530081U (ja) * 1991-09-25 1993-04-20 新明和工業株式会社 フツク格納式クレーン
AU699013B2 (en) * 1995-03-27 1998-11-19 Toyo Umpanki Co. Ltd. Container handling apparatus and management system
US5980183A (en) * 1997-04-14 1999-11-09 Asyst Technologies, Inc. Integrated intrabay buffer, delivery, and stocker system
US6379096B1 (en) * 1999-02-22 2002-04-30 Scp Global Technologies, Inc. Buffer storage system
JP5160541B2 (ja) * 2006-06-19 2013-03-13 インテグリス・インコーポレーテッド レチクル保管庫をパージするためのシステム
KR100958793B1 (ko) * 2007-09-28 2010-05-18 주식회사 실트론 웨이퍼 쉽핑박스의 세정을 위한 박스 크리너
JP4412391B2 (ja) * 2007-11-16 2010-02-10 村田機械株式会社 搬送車システム
JP2009196748A (ja) * 2008-02-20 2009-09-03 Murata Mach Ltd 載置台
JP6607314B2 (ja) * 2016-06-08 2019-11-20 村田機械株式会社 容器保管装置及び容器保管方法
CN111365957B (zh) * 2020-04-16 2023-05-09 重庆电力高等专科学校 镀铬管清洗烘干生产线
KR102709447B1 (ko) * 2021-12-27 2024-09-26 세메스 주식회사 세정 모듈, 보관 시스템 및 보관 장치의 세정 방법
CN115215030B (zh) * 2022-07-14 2024-03-19 深圳市创新特科技有限公司 一种用于无尘室的立体仓储系统

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6036205A (ja) * 1983-08-08 1985-02-25 Hitachi Ltd 収納装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100446220C (zh) * 2005-08-16 2008-12-24 力晶半导体股份有限公司 半导体元件的制造方法

Also Published As

Publication number Publication date
JP3082389B2 (ja) 2000-08-28
JPH05201506A (ja) 1993-08-10
KR100236273B1 (ko) 1999-12-15
KR930016317A (ko) 1993-08-26

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees