TW221318B - - Google Patents

Info

Publication number
TW221318B
TW221318B TW080105643A TW80105643A TW221318B TW 221318 B TW221318 B TW 221318B TW 080105643 A TW080105643 A TW 080105643A TW 80105643 A TW80105643 A TW 80105643A TW 221318 B TW221318 B TW 221318B
Authority
TW
Taiwan
Application number
TW080105643A
Other languages
Chinese (zh)
Original Assignee
Tokyo Electron Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP20315690A external-priority patent/JPH0487331A/ja
Application filed by Tokyo Electron Co Ltd filed Critical Tokyo Electron Co Ltd
Application granted granted Critical
Publication of TW221318B publication Critical patent/TW221318B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW080105643A 1990-07-31 1991-07-20 TW221318B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP20315690A JPH0487331A (ja) 1990-07-31 1990-07-31 処理装置
JP20315590 1990-07-31

Publications (1)

Publication Number Publication Date
TW221318B true TW221318B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1994-02-21

Family

ID=26513770

Family Applications (1)

Application Number Title Priority Date Filing Date
TW080105643A TW221318B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-07-31 1991-07-20

Country Status (4)

Country Link
US (1) US5203958A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0469469B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR0167473B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW221318B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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US5673750A (en) * 1990-05-19 1997-10-07 Hitachi, Ltd. Vacuum processing method and apparatus
KR0165898B1 (ko) * 1990-07-02 1999-02-01 미다 가쓰시게 진공처리방법 및 장치
JPH0613196A (ja) * 1992-06-25 1994-01-21 Matsushita Electric Ind Co Ltd プラズマ発生方法および発生装置
US6242111B1 (en) * 1992-09-17 2001-06-05 Applied Materials, Inc. Anodized aluminum susceptor for forming integrated circuit structures and method of making anodized aluminum susceptor
JPH06204323A (ja) * 1992-10-27 1994-07-22 Applied Materials Inc ウェハプロセスチャンバ内のドーム状加熱ペディスタルのためのクランプリング
US5427670A (en) * 1992-12-10 1995-06-27 U.S. Philips Corporation Device for the treatment of substrates at low temperature
JPH06188184A (ja) * 1992-12-21 1994-07-08 Nec Corp レジスト膜の加熱方法およびパターン形成方法
US5342476A (en) * 1993-01-21 1994-08-30 Vlsi Technology, Inc. Reduction of polycide residues through helium backside pressure control during dry etching
US5439524A (en) * 1993-04-05 1995-08-08 Vlsi Technology, Inc. Plasma processing apparatus
JPH0786247A (ja) * 1993-09-16 1995-03-31 Hitachi Ltd 減圧雰囲気内における被処理物の処理方法及び処理装置
DE657918T1 (de) * 1993-11-12 1996-02-29 Semiconductor Systems Inc Verfahren und Vorrichtung zum Einbrennen und Kühlen von Halbleiterscheiben und dergleichen.
JPH07249586A (ja) * 1993-12-22 1995-09-26 Tokyo Electron Ltd 処理装置及びその製造方法並びに被処理体の処理方法
US5437757A (en) * 1994-01-21 1995-08-01 Applied Materials, Inc. Clamp ring for domed pedestal in wafer processing chamber
JPH07221076A (ja) * 1994-02-07 1995-08-18 Nec Corp エッチング方法及びこれに用いられる装置
JPH08130207A (ja) * 1994-10-31 1996-05-21 Matsushita Electric Ind Co Ltd プラズマ処理装置
JPH08148431A (ja) * 1994-11-24 1996-06-07 Mitsubishi Electric Corp Ｍｂｅ装置、及びガス分岐配管装置
US5605600A (en) * 1995-03-13 1997-02-25 International Business Machines Corporation Etch profile shaping through wafer temperature control
JPH0936198A (ja) * 1995-07-19 1997-02-07 Hitachi Ltd 真空処理装置およびそれを用いた半導体製造ライン
US5609720A (en) * 1995-09-29 1997-03-11 Lam Research Corporation Thermal control of semiconductor wafer during reactive ion etching
US5894887A (en) * 1995-11-30 1999-04-20 Applied Materials, Inc. Ceramic dome temperature control using heat pipe structure and method
US5828070A (en) * 1996-02-16 1998-10-27 Eaton Corporation System and method for cooling workpieces processed by an ion implantation system
US5810933A (en) * 1996-02-16 1998-09-22 Novellus Systems, Inc. Wafer cooling device
GB2311651A (en) * 1996-03-27 1997-10-01 Surface Tech Sys Ltd Clamping device
JP3852980B2 (ja) 1996-05-21 2006-12-06 キヤノンアネルバ株式会社 薄膜作成方法及びスパッタリング装置
US6602348B1 (en) * 1996-09-17 2003-08-05 Applied Materials, Inc. Substrate cooldown chamber
JPH10240356A (ja) 1997-02-21 1998-09-11 Anelva Corp 基板処理装置の基板温度制御法と基板温度制御性判定法
US6303045B1 (en) * 1997-03-20 2001-10-16 Lam Research Corporation Methods and apparatus for etching a nitride layer in a variable-gap plasma processing chamber
US5830330A (en) * 1997-05-22 1998-11-03 Tokyo Electron Limited Method and apparatus for low pressure sputtering
US6054688A (en) * 1997-06-25 2000-04-25 Brooks Automation, Inc. Hybrid heater with ceramic foil serrated plate and gas assist
US6274459B1 (en) 1998-02-17 2001-08-14 Silicon Genesis Corporation Method for non mass selected ion implant profile control
JP3507331B2 (ja) * 1998-05-20 2004-03-15 松下電器産業株式会社 基板温度制御方法及び装置
US6073577A (en) * 1998-06-30 2000-06-13 Lam Research Corporation Electrode for plasma processes and method for manufacture and use thereof
US6277235B1 (en) 1998-08-11 2001-08-21 Novellus Systems, Inc. In situ plasma clean gas injection
KR100408259B1 (ko) * 1998-11-04 2004-01-24 엘지.필립스 엘시디 주식회사 공정챔버_
US6720261B1 (en) * 1999-06-02 2004-04-13 Agere Systems Inc. Method and system for eliminating extrusions in semiconductor vias
US6458723B1 (en) 1999-06-24 2002-10-01 Silicon Genesis Corporation High temperature implant apparatus
US6228438B1 (en) * 1999-08-10 2001-05-08 Unakis Balzers Aktiengesellschaft Plasma reactor for the treatment of large size substrates
JP2001127041A (ja) * 1999-10-26 2001-05-11 Matsushita Electric Ind Co Ltd 基板のプラズマ処理装置およびプラズマ処理方法
US6391804B1 (en) * 2000-06-09 2002-05-21 Primaxx, Inc. Method and apparatus for uniform direct radiant heating in a rapid thermal processing reactor
US6652655B1 (en) * 2000-07-07 2003-11-25 Applied Materials, Inc. Method to isolate multi zone heater from atmosphere
US20020083897A1 (en) * 2000-12-29 2002-07-04 Applied Materials, Inc. Full glass substrate deposition in plasma enhanced chemical vapor deposition
US20050061444A1 (en) * 2003-09-24 2005-03-24 Yoshiaki Noda Plasma cleaning device
US8580585B2 (en) * 2009-12-18 2013-11-12 Micrel, Inc. Method and system for controlled isotropic etching on a plurality of etch systems
JP5700806B2 (ja) * 2011-03-04 2015-04-15 株式会社日立国際電気 基板支持台、基板処理装置及び半導体装置の製造方法
US9219051B2 (en) * 2013-06-05 2015-12-22 Globalfoundries Inc. Laminate peripheral clamping to control microelectronic module BSM warpage
US9305894B2 (en) 2013-06-05 2016-04-05 Globalfoundries Inc. Constrained die adhesion cure process
CN103646840A (zh) * 2013-11-29 2014-03-19 上海华力微电子有限公司 用于离子注入机预冷腔的晶片固定装置
CN106298621A (zh) * 2015-05-28 2017-01-04 北京北方微电子基地设备工艺研究中心有限责任公司 机械卡盘及半导体加工设备
US11447869B2 (en) * 2015-10-20 2022-09-20 Mitsubishi Electric Corporation Manufacturing method for solar cell, solar cell, and solar cell manufacturing apparatus
CN107403750B (zh) * 2016-05-20 2020-04-28 北京北方华创微电子装备有限公司 基座组件及反应腔室
US11232971B2 (en) * 2019-12-18 2022-01-25 Taiwan Semiconductor Manufacturing Company, Ltd. Workpiece holding mechanism, process system and manufacturing method of semiconductor structure
CN111424260B (zh) * 2020-06-09 2020-09-11 上海陛通半导体能源科技股份有限公司 具有高效清洁能力的化学气相沉积设备及半导体工艺方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4508161A (en) * 1982-05-25 1985-04-02 Varian Associates, Inc. Method for gas-assisted, solid-to-solid thermal transfer with a semiconductor wafer
JPS6372877A (ja) * 1986-09-12 1988-04-02 Tokuda Seisakusho Ltd 真空処理装置
KR970003885B1 (ko) * 1987-12-25 1997-03-22 도오교오 에레구토론 가부시끼 가이샤 에칭 방법 및 그 장치
US4832781A (en) * 1988-01-07 1989-05-23 Varian Associates, Inc. Methods and apparatus for thermal transfer with a semiconductor wafer in vacuum
US5078851A (en) * 1989-07-26 1992-01-07 Kouji Nishihata Low-temperature plasma processor
JPH0670986B2 (ja) * 1989-09-27 1994-09-07 株式会社日立製作所 真空処理装置の試料保持方法
JPH0670985B2 (ja) * 1989-09-27 1994-09-07 株式会社日立製作所 試料の温度制御方法及び装置
JP2580791B2 (ja) * 1989-09-27 1997-02-12 株式会社日立製作所 真空処理装置
KR0157990B1 (ko) * 1990-06-18 1999-02-01 이노우에 키요시 처리 장치
KR0165898B1 (ko) * 1990-07-02 1999-02-01 미다 가쓰시게 진공처리방법 및 장치

Also Published As

Publication number Publication date
KR0167473B1 (ko) 1999-02-01
US5203958A (en) 1993-04-20
EP0469469A2 (en) 1992-02-05
EP0469469B1 (en) 1998-10-07
KR920003428A (ko) 1992-02-29
EP0469469A3 (en) 1994-09-14

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Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent