TW202510629A - 多分區陶瓷加熱器 - Google Patents

多分區陶瓷加熱器 Download PDF

Info

Publication number
TW202510629A
TW202510629A TW113115607A TW113115607A TW202510629A TW 202510629 A TW202510629 A TW 202510629A TW 113115607 A TW113115607 A TW 113115607A TW 113115607 A TW113115607 A TW 113115607A TW 202510629 A TW202510629 A TW 202510629A
Authority
TW
Taiwan
Prior art keywords
zone
heater
ceramic
heater circuit
ceramic plate
Prior art date
Application number
TW113115607A
Other languages
English (en)
Chinese (zh)
Inventor
海野豊
Original Assignee
日商日本碍子股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日本碍子股份有限公司 filed Critical 日商日本碍子股份有限公司
Publication of TW202510629A publication Critical patent/TW202510629A/zh

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
    • H05B2203/005—Heaters using a particular layout for the resistive material or resistive elements using multiple resistive elements or resistive zones isolated from each other
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/016—Heaters using particular connecting means

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
  • Furnace Details (AREA)
  • Manufacturing & Machinery (AREA)
TW113115607A 2023-08-18 2024-04-26 多分區陶瓷加熱器 TW202510629A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
WOPCT/JP2023/029889 2023-08-18
PCT/JP2023/029889 WO2025041202A1 (ja) 2023-08-18 2023-08-18 マルチゾーンセラミックヒータ

Publications (1)

Publication Number Publication Date
TW202510629A true TW202510629A (zh) 2025-03-01

Family

ID=94609155

Family Applications (1)

Application Number Title Priority Date Filing Date
TW113115607A TW202510629A (zh) 2023-08-18 2024-04-26 多分區陶瓷加熱器

Country Status (6)

Country Link
US (1) US20250063636A1 (cg-RX-API-DMAC7.html)
JP (1) JP7642159B1 (cg-RX-API-DMAC7.html)
KR (1) KR20260039895A (cg-RX-API-DMAC7.html)
CN (1) CN121730018A (cg-RX-API-DMAC7.html)
TW (1) TW202510629A (cg-RX-API-DMAC7.html)
WO (1) WO2025041202A1 (cg-RX-API-DMAC7.html)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6352663B2 (ja) * 2014-03-28 2018-07-04 日本特殊陶業株式会社 積層発熱体
JP6251461B1 (ja) * 2016-03-29 2017-12-20 日本碍子株式会社 静電チャックヒータ
JP6758143B2 (ja) * 2016-09-29 2020-09-23 日本特殊陶業株式会社 加熱装置
WO2019008889A1 (ja) * 2017-07-07 2019-01-10 住友電気工業株式会社 半導体基板加熱用の基板載置台
JP6987995B2 (ja) * 2018-07-31 2022-01-05 京セラ株式会社 ヒータ
JP7252825B2 (ja) * 2019-05-20 2023-04-05 日本特殊陶業株式会社 保持装置

Also Published As

Publication number Publication date
JP7642159B1 (ja) 2025-03-07
JPWO2025041202A1 (cg-RX-API-DMAC7.html) 2025-02-27
US20250063636A1 (en) 2025-02-20
WO2025041202A1 (ja) 2025-02-27
CN121730018A (zh) 2026-03-24
KR20260039895A (ko) 2026-03-23

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