CN121730018A - 多区段陶瓷加热器 - Google Patents

多区段陶瓷加热器

Info

Publication number
CN121730018A
CN121730018A CN202380014933.3A CN202380014933A CN121730018A CN 121730018 A CN121730018 A CN 121730018A CN 202380014933 A CN202380014933 A CN 202380014933A CN 121730018 A CN121730018 A CN 121730018A
Authority
CN
China
Prior art keywords
ceramic
heater circuit
segment
heater
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380014933.3A
Other languages
English (en)
Chinese (zh)
Inventor
海野丰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of CN121730018A publication Critical patent/CN121730018A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
    • H05B2203/005—Heaters using a particular layout for the resistive material or resistive elements using multiple resistive elements or resistive zones isolated from each other
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/016—Heaters using particular connecting means

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
  • Furnace Details (AREA)
  • Manufacturing & Machinery (AREA)
CN202380014933.3A 2023-08-18 2023-08-18 多区段陶瓷加热器 Pending CN121730018A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/029889 WO2025041202A1 (ja) 2023-08-18 2023-08-18 マルチゾーンセラミックヒータ

Publications (1)

Publication Number Publication Date
CN121730018A true CN121730018A (zh) 2026-03-24

Family

ID=94609155

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380014933.3A Pending CN121730018A (zh) 2023-08-18 2023-08-18 多区段陶瓷加热器

Country Status (6)

Country Link
US (1) US20250063636A1 (cg-RX-API-DMAC7.html)
JP (1) JP7642159B1 (cg-RX-API-DMAC7.html)
KR (1) KR20260039895A (cg-RX-API-DMAC7.html)
CN (1) CN121730018A (cg-RX-API-DMAC7.html)
TW (1) TW202510629A (cg-RX-API-DMAC7.html)
WO (1) WO2025041202A1 (cg-RX-API-DMAC7.html)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6352663B2 (ja) * 2014-03-28 2018-07-04 日本特殊陶業株式会社 積層発熱体
JP6251461B1 (ja) * 2016-03-29 2017-12-20 日本碍子株式会社 静電チャックヒータ
JP6758143B2 (ja) * 2016-09-29 2020-09-23 日本特殊陶業株式会社 加熱装置
WO2019008889A1 (ja) * 2017-07-07 2019-01-10 住友電気工業株式会社 半導体基板加熱用の基板載置台
JP6987995B2 (ja) * 2018-07-31 2022-01-05 京セラ株式会社 ヒータ
JP7252825B2 (ja) * 2019-05-20 2023-04-05 日本特殊陶業株式会社 保持装置

Also Published As

Publication number Publication date
JP7642159B1 (ja) 2025-03-07
JPWO2025041202A1 (cg-RX-API-DMAC7.html) 2025-02-27
US20250063636A1 (en) 2025-02-20
WO2025041202A1 (ja) 2025-02-27
TW202510629A (zh) 2025-03-01
KR20260039895A (ko) 2026-03-23

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