JP7642159B1 - マルチゾーンセラミックヒータ - Google Patents

マルチゾーンセラミックヒータ Download PDF

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Publication number
JP7642159B1
JP7642159B1 JP2024531409A JP2024531409A JP7642159B1 JP 7642159 B1 JP7642159 B1 JP 7642159B1 JP 2024531409 A JP2024531409 A JP 2024531409A JP 2024531409 A JP2024531409 A JP 2024531409A JP 7642159 B1 JP7642159 B1 JP 7642159B1
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JP
Japan
Prior art keywords
zone
heater circuit
ceramic
heater
outer zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2024531409A
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English (en)
Japanese (ja)
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JPWO2025041202A1 (cg-RX-API-DMAC7.html
JPWO2025041202A5 (cg-RX-API-DMAC7.html
Inventor
豊 海野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
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Publication date
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Publication of JPWO2025041202A1 publication Critical patent/JPWO2025041202A1/ja
Application granted granted Critical
Publication of JP7642159B1 publication Critical patent/JP7642159B1/ja
Publication of JPWO2025041202A5 publication Critical patent/JPWO2025041202A5/ja
Active legal-status Critical Current
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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
    • H05B2203/005—Heaters using a particular layout for the resistive material or resistive elements using multiple resistive elements or resistive zones isolated from each other
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/016—Heaters using particular connecting means

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
  • Furnace Details (AREA)
  • Manufacturing & Machinery (AREA)
JP2024531409A 2023-08-18 2023-08-18 マルチゾーンセラミックヒータ Active JP7642159B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/029889 WO2025041202A1 (ja) 2023-08-18 2023-08-18 マルチゾーンセラミックヒータ

Publications (3)

Publication Number Publication Date
JPWO2025041202A1 JPWO2025041202A1 (cg-RX-API-DMAC7.html) 2025-02-27
JP7642159B1 true JP7642159B1 (ja) 2025-03-07
JPWO2025041202A5 JPWO2025041202A5 (cg-RX-API-DMAC7.html) 2025-07-30

Family

ID=94609155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024531409A Active JP7642159B1 (ja) 2023-08-18 2023-08-18 マルチゾーンセラミックヒータ

Country Status (6)

Country Link
US (1) US20250063636A1 (cg-RX-API-DMAC7.html)
JP (1) JP7642159B1 (cg-RX-API-DMAC7.html)
KR (1) KR20260039895A (cg-RX-API-DMAC7.html)
CN (1) CN121730018A (cg-RX-API-DMAC7.html)
TW (1) TW202510629A (cg-RX-API-DMAC7.html)
WO (1) WO2025041202A1 (cg-RX-API-DMAC7.html)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015191837A (ja) * 2014-03-28 2015-11-02 日本特殊陶業株式会社 積層発熱体
WO2017170374A1 (ja) * 2016-03-29 2017-10-05 日本碍子株式会社 静電チャックヒータ
JP2018056332A (ja) * 2016-09-29 2018-04-05 日本特殊陶業株式会社 加熱装置
WO2019008889A1 (ja) * 2017-07-07 2019-01-10 住友電気工業株式会社 半導体基板加熱用の基板載置台
WO2020027047A1 (ja) * 2018-07-31 2020-02-06 京セラ株式会社 ヒータ
JP2020191315A (ja) * 2019-05-20 2020-11-26 日本特殊陶業株式会社 保持装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015191837A (ja) * 2014-03-28 2015-11-02 日本特殊陶業株式会社 積層発熱体
WO2017170374A1 (ja) * 2016-03-29 2017-10-05 日本碍子株式会社 静電チャックヒータ
JP2018056332A (ja) * 2016-09-29 2018-04-05 日本特殊陶業株式会社 加熱装置
WO2019008889A1 (ja) * 2017-07-07 2019-01-10 住友電気工業株式会社 半導体基板加熱用の基板載置台
WO2020027047A1 (ja) * 2018-07-31 2020-02-06 京セラ株式会社 ヒータ
JP2020191315A (ja) * 2019-05-20 2020-11-26 日本特殊陶業株式会社 保持装置

Also Published As

Publication number Publication date
JPWO2025041202A1 (cg-RX-API-DMAC7.html) 2025-02-27
US20250063636A1 (en) 2025-02-20
WO2025041202A1 (ja) 2025-02-27
TW202510629A (zh) 2025-03-01
CN121730018A (zh) 2026-03-24
KR20260039895A (ko) 2026-03-23

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