KR20260039895A - 멀티 존 세라믹 히터 - Google Patents

멀티 존 세라믹 히터

Info

Publication number
KR20260039895A
KR20260039895A KR1020247020214A KR20247020214A KR20260039895A KR 20260039895 A KR20260039895 A KR 20260039895A KR 1020247020214 A KR1020247020214 A KR 1020247020214A KR 20247020214 A KR20247020214 A KR 20247020214A KR 20260039895 A KR20260039895 A KR 20260039895A
Authority
KR
South Korea
Prior art keywords
zone
heater circuit
ceramic
ceramic plate
outer zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247020214A
Other languages
English (en)
Korean (ko)
Inventor
유타카 운노
Original Assignee
엔지케이 인슐레이터 엘티디
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엔지케이 인슐레이터 엘티디 filed Critical 엔지케이 인슐레이터 엘티디
Publication of KR20260039895A publication Critical patent/KR20260039895A/ko
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/0033—Heating devices using lamps
    • H05B3/0038—Heating devices using lamps for industrial applications
    • H05B3/0047—Heating devices using lamps for industrial applications for semiconductor manufacture
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/02—Details
    • H05B3/03—Electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
    • H05B2203/005—Heaters using a particular layout for the resistive material or resistive elements using multiple resistive elements or resistive zones isolated from each other
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/016—Heaters using particular connecting means

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
  • Furnace Details (AREA)
  • Manufacturing & Machinery (AREA)
KR1020247020214A 2023-08-18 2023-08-18 멀티 존 세라믹 히터 Pending KR20260039895A (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/029889 WO2025041202A1 (ja) 2023-08-18 2023-08-18 マルチゾーンセラミックヒータ

Publications (1)

Publication Number Publication Date
KR20260039895A true KR20260039895A (ko) 2026-03-23

Family

ID=94609155

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247020214A Pending KR20260039895A (ko) 2023-08-18 2023-08-18 멀티 존 세라믹 히터

Country Status (6)

Country Link
US (1) US20250063636A1 (cg-RX-API-DMAC7.html)
JP (1) JP7642159B1 (cg-RX-API-DMAC7.html)
KR (1) KR20260039895A (cg-RX-API-DMAC7.html)
CN (1) CN121730018A (cg-RX-API-DMAC7.html)
TW (1) TW202510629A (cg-RX-API-DMAC7.html)
WO (1) WO2025041202A1 (cg-RX-API-DMAC7.html)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6352663B2 (ja) * 2014-03-28 2018-07-04 日本特殊陶業株式会社 積層発熱体
JP6251461B1 (ja) * 2016-03-29 2017-12-20 日本碍子株式会社 静電チャックヒータ
JP6758143B2 (ja) * 2016-09-29 2020-09-23 日本特殊陶業株式会社 加熱装置
WO2019008889A1 (ja) * 2017-07-07 2019-01-10 住友電気工業株式会社 半導体基板加熱用の基板載置台
JP6987995B2 (ja) * 2018-07-31 2022-01-05 京セラ株式会社 ヒータ
JP7252825B2 (ja) * 2019-05-20 2023-04-05 日本特殊陶業株式会社 保持装置

Also Published As

Publication number Publication date
JP7642159B1 (ja) 2025-03-07
JPWO2025041202A1 (cg-RX-API-DMAC7.html) 2025-02-27
US20250063636A1 (en) 2025-02-20
WO2025041202A1 (ja) 2025-02-27
TW202510629A (zh) 2025-03-01
CN121730018A (zh) 2026-03-24

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St.27 status event code: A-1-2-D10-D13-srh-X000

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301