TW202429089A - 用於探針卡之探針 - Google Patents

用於探針卡之探針 Download PDF

Info

Publication number
TW202429089A
TW202429089A TW112134918A TW112134918A TW202429089A TW 202429089 A TW202429089 A TW 202429089A TW 112134918 A TW112134918 A TW 112134918A TW 112134918 A TW112134918 A TW 112134918A TW 202429089 A TW202429089 A TW 202429089A
Authority
TW
Taiwan
Prior art keywords
probe
deformation
row
aforementioned
shape
Prior art date
Application number
TW112134918A
Other languages
English (en)
Chinese (zh)
Inventor
向井英樹
Original Assignee
日商日本電子材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日本電子材料股份有限公司 filed Critical 日商日本電子材料股份有限公司
Publication of TW202429089A publication Critical patent/TW202429089A/zh

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/0675—Needle-like
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW112134918A 2022-09-21 2023-09-13 用於探針卡之探針 TW202429089A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
WOPCT/JP2022/035187 2022-09-21
PCT/JP2022/035187 WO2024062558A1 (ja) 2022-09-21 2022-09-21 プローブカード用プローブ

Publications (1)

Publication Number Publication Date
TW202429089A true TW202429089A (zh) 2024-07-16

Family

ID=90454058

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112134918A TW202429089A (zh) 2022-09-21 2023-09-13 用於探針卡之探針

Country Status (6)

Country Link
US (1) US20260098876A1 (https=)
JP (1) JP7847658B2 (https=)
KR (1) KR20250048474A (https=)
CN (1) CN119923568A (https=)
TW (1) TW202429089A (https=)
WO (1) WO2024062558A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20260050010A1 (en) * 2022-09-21 2026-02-19 Japan Electronic Materials Corporation Probe for probe card

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5192232B2 (ja) * 2004-06-21 2013-05-08 カプレス・アクティーゼルスカブ プローブの位置合せを行なう方法
JP4823617B2 (ja) * 2005-09-09 2011-11-24 日本発條株式会社 導電性接触子および導電性接触子の製造方法
TWI369498B (en) * 2008-06-18 2012-08-01 Star Techn Inc Probe and probe card for integrated circiut devices using the same
WO2016156003A1 (en) * 2015-03-31 2016-10-06 Technoprobe S.P.A. Vertical contact probe and corresponding testing head with vertical contact probes, particularly for high frequency applications
KR101962644B1 (ko) * 2017-08-23 2019-03-28 리노공업주식회사 검사프로브 및 이를 사용한 검사장치

Also Published As

Publication number Publication date
WO2024062558A1 (ja) 2024-03-28
KR20250048474A (ko) 2025-04-08
CN119923568A (zh) 2025-05-02
JP7847658B2 (ja) 2026-04-17
JPWO2024062558A1 (https=) 2024-03-28
US20260098876A1 (en) 2026-04-09

Similar Documents

Publication Publication Date Title
TWI814277B (zh) 探針卡用探針及其製造方法
US6293808B1 (en) Contact sheet
TWI828410B (zh) 電性連接裝置
US3803709A (en) Test probe for integrated circuit chips
US20060170440A1 (en) Vertical probe card, probes for vertical probe card and method of making the same
US11733267B2 (en) Probe head and probe card
TW202429089A (zh) 用於探針卡之探針
US20080134502A1 (en) Connector having staggered contact architecture for enhanced working range
JP4434371B2 (ja) プローブユニット及びプローブカード
JP2023091901A (ja) 半導体製造装置および半導体装置の製造方法
KR101423376B1 (ko) 정열편이 형성된 프로브핀을 포함하는 프로브헤드.
TWI880346B (zh) 用於探針卡之探針
US20190212368A1 (en) Probe card
CN111863755A (zh) 一种半导体结构及其制备方法
JP5453642B2 (ja) リードフレームの製造方法
KR101317612B1 (ko) 전기적 접속체
JP4954492B2 (ja) プローブおよびその製造方法
JP2024041465A (ja) 電気的接続装置
JP7853431B2 (ja) プローブカード用プローブ
US20180017596A1 (en) Low force wafer test probe with variable geometry
KR102954615B1 (ko) 프로브 카드용 캔틸레버형 프로브
US20240371805A1 (en) Wafer structure
KR102934774B1 (ko) 스태거형으로 배열된 전극 패드를 갖는 프로브카드
KR102842330B1 (ko) 프로브와 그 제조방법
WO2024062559A1 (ja) プローブカード用カンチレバー型プローブ