TW202339960A - 保護膜形成膜、保護膜形成用複合片、套件、以及保護膜形成膜之使用 - Google Patents

保護膜形成膜、保護膜形成用複合片、套件、以及保護膜形成膜之使用 Download PDF

Info

Publication number
TW202339960A
TW202339960A TW111150780A TW111150780A TW202339960A TW 202339960 A TW202339960 A TW 202339960A TW 111150780 A TW111150780 A TW 111150780A TW 111150780 A TW111150780 A TW 111150780A TW 202339960 A TW202339960 A TW 202339960A
Authority
TW
Taiwan
Prior art keywords
protective film
film
forming
forming film
meth
Prior art date
Application number
TW111150780A
Other languages
English (en)
Chinese (zh)
Inventor
小橋力也
Original Assignee
日商琳得科股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商琳得科股份有限公司 filed Critical 日商琳得科股份有限公司
Publication of TW202339960A publication Critical patent/TW202339960A/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67132Apparatus for placing on an insulating substrate, e.g. tape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/52Encapsulations
    • H01L33/56Materials, e.g. epoxy or silicone resin
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/52Amides or imides
    • C08F220/54Amides, e.g. N,N-dimethylacrylamide or N-isopropylacrylamide
    • C08F220/58Amides, e.g. N,N-dimethylacrylamide or N-isopropylacrylamide containing oxygen in addition to the carbonamido oxygen, e.g. N-methylolacrylamide, N-(meth)acryloylmorpholine
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F222/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical and containing at least one other carboxyl radical in the molecule; Salts, anhydrides, esters, amides, imides, or nitriles thereof
    • C08F222/10Esters
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/40High-molecular-weight compounds
    • C08G18/62Polymers of compounds having carbon-to-carbon double bonds
    • C08G18/6216Polymers of alpha-beta ethylenically unsaturated carboxylic acids or of derivatives thereof
    • C08G18/622Polymers of esters of alpha-beta ethylenically unsaturated carboxylic acids
    • C08G18/6225Polymers of esters of acrylic or methacrylic acid
    • C08G18/6229Polymers of hydroxy groups containing esters of acrylic or methacrylic acid with aliphatic polyalcohols
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D175/00Coating compositions based on polyureas or polyurethanes; Coating compositions based on derivatives of such polymers
    • C09D175/04Polyurethanes
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/40Adhesives in the form of films or foils characterised by release liners
    • C09J7/401Adhesives in the form of films or foils characterised by release liners characterised by the release coating composition
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/552Protection against radiation, e.g. light or electromagnetic waves
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2423/00Presence of polyolefin
    • C09J2423/10Presence of homo or copolymers of propene
    • C09J2423/106Presence of homo or copolymers of propene in the substrate
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2467/00Presence of polyester
    • C09J2467/005Presence of polyester in the release coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Polymers & Plastics (AREA)
  • Medicinal Chemistry (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Toxicology (AREA)
  • Electromagnetism (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Paints Or Removers (AREA)
  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Dicing (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
TW111150780A 2022-03-30 2022-12-30 保護膜形成膜、保護膜形成用複合片、套件、以及保護膜形成膜之使用 TW202339960A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022056435A JP2023148426A (ja) 2022-03-30 2022-03-30 保護膜形成フィルム、保護膜形成用複合シート、キット、及び、保護膜形成フィルムの使用
JP2022-056435 2022-03-30

Publications (1)

Publication Number Publication Date
TW202339960A true TW202339960A (zh) 2023-10-16

Family

ID=88288313

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111150780A TW202339960A (zh) 2022-03-30 2022-12-30 保護膜形成膜、保護膜形成用複合片、套件、以及保護膜形成膜之使用

Country Status (4)

Country Link
JP (1) JP2023148426A (ja)
KR (1) KR20230141435A (ja)
CN (1) CN116891700A (ja)
TW (1) TW202339960A (ja)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010031183A (ja) 2008-07-30 2010-02-12 Furukawa Electric Co Ltd:The エネルギー線硬化型チップ保護用フィルム
TWI772293B (zh) 2016-04-28 2022-08-01 日商琳得科股份有限公司 附有保護膜的半導體晶片的製造方法以及半導體裝置的製造方法
JP6963024B2 (ja) 2017-10-27 2021-11-05 リンテック株式会社 保護膜形成用フィルム、保護膜形成用複合シート、及び半導体チップの製造方法

Also Published As

Publication number Publication date
CN116891700A (zh) 2023-10-17
JP2023148426A (ja) 2023-10-13
KR20230141435A (ko) 2023-10-10

Similar Documents

Publication Publication Date Title
KR102587310B1 (ko) 경화성 수지 필름 및 제1 보호막 형성용 시트
JP6298226B1 (ja) 保護膜形成用複合シート
TW201837136A (zh) 保護膜形成用複合片
TWI704996B (zh) 第一保護膜形成用片
JP6659308B2 (ja) 第1保護膜形成用シート
KR102637275B1 (ko) 보호막 형성용 시트, 보호막 형성용 시트의 제조 방법 및 반도체 장치의 제조 방법
WO2017078056A1 (ja) 硬化性樹脂フィルム及び第1保護膜形成用シート
WO2019082974A1 (ja) 保護膜形成用フィルム、保護膜形成用複合シート、及び半導体チップの製造方法
KR102538766B1 (ko) 경화성 수지 필름 및 제1 보호막 형성용 시트
TW201907491A (zh) 樹脂膜形成用膜以及樹脂膜形成用複合片
CN108260356B (zh) 固化性树脂膜及第1保护膜形成用片
KR102596665B1 (ko) 보호막 형성용 필름, 보호막 형성용 복합 시트, 검사 방법 및 식별 방법
WO2017078042A1 (ja) 保護膜形成用シート
TWI796297B (zh) 保護膜形成用複合片
TW202339960A (zh) 保護膜形成膜、保護膜形成用複合片、套件、以及保護膜形成膜之使用
JP7465099B2 (ja) 保護膜形成用複合シート、及び保護膜付きチップの製造方法
TW202405915A (zh) 保護膜形成膜、輥體、以及保護膜形成膜之使用
KR102534931B1 (ko) 지지 시트 및 보호막 형성용 복합 시트
TWI770021B (zh) 保護膜形成用複合片
TW202409227A (zh) 保護膜形成膜、保護膜形成用複合片、套件、以及保護膜形成膜之用途
TW202410168A (zh) 保護膜形成膜、保護膜形成用複合片、套件、以及保護膜形成膜之用途
TW202239895A (zh) 保護膜形成膜、保護膜形成用複合片、以及具保護膜之晶片的製造方法
TW202409235A (zh) 保護膜形成膜、保護膜形成用複合片、套件、以及保護膜形成膜之用途
TW202239924A (zh) 保護膜形成膜、保護膜形成用複合片、以及具保護膜之晶片的製造方法
TW202141598A (zh) 膜狀接著劑以及切割黏晶片