TW202330085A - Medicament infusion system, pure water production system & pure water production method - Google Patents

Medicament infusion system, pure water production system & pure water production method Download PDF

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TW202330085A
TW202330085A TW111134302A TW111134302A TW202330085A TW 202330085 A TW202330085 A TW 202330085A TW 111134302 A TW111134302 A TW 111134302A TW 111134302 A TW111134302 A TW 111134302A TW 202330085 A TW202330085 A TW 202330085A
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injection
path
flow path
flow
flow rate
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TW111134302A
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鈴木規彦
鳥村修平
鬼頭貴次
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日商野村微科學工程股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D61/00Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/02Reverse osmosis; Hyperfiltration ; Nanofiltration
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D65/00Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/08Prevention of membrane fouling or of concentration polarisation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00Feed or outlet devices; Feed or outlet control devices
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/44Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A20/00Water conservation; Efficient water supply; Efficient water use
    • Y02A20/124Water desalination
    • Y02A20/131Reverse-osmosis

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Water Supply & Treatment (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Environmental & Geological Engineering (AREA)
  • Nanotechnology (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Abstract

A medicament infusion system includes: a housing part in which a medication is accommodated; an infusion path for infusing the medicament in the housing part with respect to a flow path through which water to be treated flows, at an upstream side relative to a reverse osmosis membrane device provided in the flow path; and an imparting part provided at the infusion path, which imparts an impact to the medicament.

Description

藥劑注入系統、純水製造系統及純水製造方法Chemical injection system, pure water production system, and pure water production method

本案係關於一種藥劑注入系統、純水製造系統及純水製造方法。This case relates to a chemical injection system, a pure water manufacturing system and a pure water manufacturing method.

日本特開2021-126624號公報揭露一種對於被處理水流動之管道,在逆滲透膜分離裝置之上游側,將黏泥控制劑及防垢劑通過注入管來注入之超純水製造系統。Japanese Patent Application Laid-Open No. 2021-126624 discloses an ultrapure water production system in which a slime control agent and an anti-scaling agent are injected through an injection pipe on the upstream side of a reverse osmosis membrane separation device in a pipe through which treated water flows.

黏泥控制劑及防垢劑之注入係在槽中將黏泥控制劑及防垢劑稀釋,並以注入管將其注入。此方法主要適用於小型的純水製造系統。另一方面,大型的純水製造系統中,將黏泥控制劑及防垢劑之原液儲存在槽中,並以注入管將其注入為一般性的。The injection of slime control agent and anti-scaling agent is to dilute the slime control agent and anti-scaling agent in the tank, and inject it through the injection pipe. This method is mainly suitable for small pure water manufacturing systems. On the other hand, in a large-scale pure water production system, it is common to store the stock solution of the slime control agent and anti-scaling agent in the tank, and inject it with the injection pipe.

[發明所要解決的課題] 在像日本特開2021-126624號公報所揭露之超純水製造系統這樣的,對於被處理水流動之流路,相對於設在該流路之逆滲透膜裝置之上游側,通過注入路徑來注入藥劑之構成中,當包含於藥劑之成分附著在注入路徑內時,會有注入路徑阻塞,而變為無法注入藥劑的情況。尤其是,黏泥控制劑及防垢劑等係黏度高,會有包含於藥劑之成分沉澱,容易附著於注入路徑內的情況。 [Problem to be Solved by the Invention] In the ultrapure water production system disclosed in Japanese Patent Application Laid-Open No. 2021-126624, for the flow path where the water to be treated flows, with respect to the upstream side of the reverse osmosis membrane device installed in the flow path, the water is injected through the injection path. In the configuration of injecting the medicine, if the components contained in the medicine adhere to the injection path, the injection path may be blocked, and the medicine may not be injected. In particular, slime control agents and anti-fouling agents have high viscosity, and components contained in the agents may precipitate and easily adhere to the injection path.

本揭露之目的為對於被處理水流動之流路,相對於設在該流路之逆滲透膜裝置之上游側,通過注入路徑來注入藥劑之情況中,抑制注入路徑之阻塞。The purpose of the present disclosure is to suppress clogging of the injection path in the case of injecting chemicals through the injection path on the upstream side of the reverse osmosis membrane device provided in the flow path where the water to be treated flows.

[為了解決課題之手段] 本揭露之藥劑注入系統係包含:容置部,其容置藥劑;注入路徑,其對於流動被處理水之流路,在相對於設置於前述流路之逆滲透膜裝置的上游側,注入前述容置部之前述藥劑;及施加部,其設置於前述注入路徑,並施加衝擊至前述藥劑。 [Means to solve the problem] The chemical injection system of the present disclosure includes: a housing part, which accommodates the chemical agent; an injection path, for the flow path of the treated water, on the upstream side relative to the reverse osmosis membrane device arranged in the aforementioned flow path, to inject the aforementioned The said medicine of the accommodation part; and the application part, which is provided in the said injection path, and applies impact to the said medicine.

本揭露之純水製造方法係包含:對於流動被處理水之流路,在相對於設置於前述流路之逆滲透膜裝置的上游側,通過注入路徑注入藥劑之步驟;及施加衝擊至前述注入路徑內之前述藥劑之步驟。The pure water manufacturing method of the present disclosure includes: the step of injecting the agent through the injection path on the upstream side of the reverse osmosis membrane device installed in the flow path of the flow path of the water to be treated; and applying an impact to the aforementioned injection The steps of the aforementioned medicines in the route.

[發明之效果] 本揭露由於上述構成,具有對於被處理水流動之流路,相對於設在該流路之逆滲透膜裝置之上游側,通過注入路徑來注入藥劑之情況中,可抑制注入路徑之阻塞的優良功效。 [Effect of Invention] Due to the above configuration, the present disclosure has the advantage of suppressing clogging of the injection path in the case of injecting chemicals through the injection path on the upstream side of the reverse osmosis membrane device provided in the flow path for the water to be treated. effect.

以下,依據圖面說明本揭露之實施態樣之一例。Hereinafter, an example of an embodiment of the present disclosure will be described with reference to the drawings.

(超純水製造系統10) 以下說明有關本實施態樣之超純水製造系統10。圖1為表示本實施態樣之超純水製造系統10之一例之概略圖。 (ultrapure water production system 10) The ultrapure water production system 10 related to this embodiment will be described below. FIG. 1 is a schematic diagram showing an example of an ultrapure water production system 10 according to this embodiment.

超純水製造系統10係純水製造系統之一例,製造超純水之系統。該超純水製造系統10如圖1所示,具備一次純水裝置12及二次純水裝置112。The ultrapure water production system 10 is an example of a pure water production system, and is a system for producing ultrapure water. This ultrapure water production system 10 includes a primary pure water device 12 and a secondary pure water device 112 as shown in FIG. 1 .

(一次純水裝置12) 一次純水裝置12如圖1所示,具備主流路100、被處理水區域(pit)14、第一幫浦18、流量計(FIQ)20、熱交換器(HEX)22、活性碳裝置(AC)24、紫外線氧化裝置(UV)26、及過濾裝置30。再者,一次純水裝置12亦具備第二幫浦34、第一逆滲透膜裝置(RO)38、去離子水區域40、電析式去離子裝置(EDI)42、離子交換樹脂裝置(MB)44、純水槽46。 (Primary pure water device 12) As shown in Figure 1, the primary pure water device 12 is provided with a main channel 100, a treated water area (pit) 14, a first pump 18, a flow meter (FIQ) 20, a heat exchanger (HEX) 22, an activated carbon device ( AC) 24, an ultraviolet oxidation device (UV) 26, and a filter device 30. Furthermore, the primary pure water device 12 also includes a second pump 34, a first reverse osmosis membrane device (RO) 38, a deionized water area 40, an electrolytic deionization device (EDI) 42, an ion exchange resin device (MB ) 44, pure water tank 46.

主流路100為流路的一例,被處理水流動之路徑。該主流路100係經由被處理水流動之管道來構成。接著,從主流路100中之被處理水之流動方向(以下亦稱為「水流動方向」)之上游側沿著主流路100,依序排列被處理水區域14、第一幫浦18、流量計20、熱交換器22、活性碳裝置24、及紫外線氧化裝置26、過濾裝置30、第二幫浦34、第一逆滲透膜裝置38、去離子水區域40、電析式去離子裝置42、離子交換樹脂裝置44、及純水槽46。尚,第一逆滲透膜裝置38為逆滲透膜裝置之一例。The main channel 100 is an example of a channel, and is a path through which treated water flows. The main channel 100 is constituted by a pipe through which treated water flows. Next, from the upstream side of the flow direction of treated water in the main flow path 100 (hereinafter also referred to as "water flow direction") along the main flow path 100, the treated water area 14, the first pump 18, the flow rate Meter 20, heat exchanger 22, activated carbon device 24, and ultraviolet oxidizing device 26, filter device 30, second pump 34, first reverse osmosis membrane device 38, deionized water area 40, electrolytic deionization device 42 , ion exchange resin device 44, and pure water tank 46. Also, the first reverse osmosis membrane device 38 is an example of a reverse osmosis membrane device.

又,一次純水裝置12具備配置於從第一逆滲透膜裝置38分岐之分岐流路102之第二逆滲透膜裝置(RO)48、注入藥劑至主流路100之藥劑注入系統60。有關於藥劑注入系統60之具體構成如下述。In addition, the primary pure water device 12 includes a second reverse osmosis membrane device (RO) 48 arranged in a branch flow path 102 branched from the first reverse osmosis membrane device 38 , and a chemical injection system 60 for injecting chemical into the main flow path 100 . The specific configuration of the drug injection system 60 is as follows.

以下,說明各裝置。 被處理水區域14係儲存被處理水。被處理水係用於製造超純水之被執行各種處理之水,為原水(成為用於製造超純水之原料之水)。作為被處理水,例如可使用工業用水、自來水、地下水及河川水等。第一幫浦18係將儲存在被處理水區域14之被處理水,沿主流路100流往水流動方向之下游側。 Each device will be described below. The treated water area 14 stores treated water. The water to be treated refers to the water that has been subjected to various treatments for the production of ultrapure water, and is the raw water (water that becomes the raw material for the production of ultrapure water). As the water to be treated, for example, industrial water, tap water, ground water, river water and the like can be used. The first pump 18 is to store the treated water stored in the treated water area 14 and flow along the main channel 100 to the downstream side of the water flow direction.

流量計20係測量流動於主流路100之被處理水之流量。熱交換器22經由熱交換調整被處理水之溫度。活性碳裝置24經由吸附處理從被處理水去除天然有機物、殘留氯、及三鹵甲烷(trihalomethane)等。紫外線氧化裝置26係經由紫外線照射分解被處理水所包含之生菌、細菌等來做殺菌處理。The flow meter 20 measures the flow rate of the treated water flowing in the main channel 100 . The heat exchanger 22 adjusts the temperature of the treated water through heat exchange. The activated carbon device 24 removes natural organic matter, residual chlorine, trihalomethane, and the like from the water to be treated through adsorption treatment. The ultraviolet oxidizing device 26 decomposes bacteria, bacteria, etc. contained in the water to be treated through ultraviolet irradiation to perform sterilizing treatment.

過濾裝置30中設有過濾被處理水之過濾器(預濾器,pre-filter)。接著,過濾裝置30經由過濾處理來除去殘留氯、游離氯、及微粒子等之懸浮物質。The filter device 30 is provided with a filter (pre-filter, pre-filter) for filtering the water to be treated. Next, the filtering device 30 removes suspended matter such as residual chlorine, free chlorine, and particulates through filtering.

第二幫浦34為高壓幫浦,將經由過濾裝置30除去不純物之被處理水流往第一逆滲透膜裝置38。The second pump 34 is a high-pressure pump, and flows the treated water from which impurities have been removed through the filter device 30 to the first reverse osmosis membrane device 38 .

第一逆滲透膜裝置38中設有被處理水滲透過之逆滲透膜,第一逆滲透膜裝置38經由逆滲透膜處理,於除去離子、鹽類之透過水與濃縮水將被處理水分離。像這樣,藉由被處理水透過逆滲透膜,於逆滲透膜有附著未透過逆滲透膜之二氧化矽、鈣等之水垢的疑慮。又,於逆滲透膜有附著因未透過逆滲透膜之細菌或藻類等之微生物而生成之黏泥(汙濁物)的疑慮。尚,水垢係溶解於被處理水中之鈣或二氧化矽等沉澱出來者。The first reverse osmosis membrane device 38 is provided with a reverse osmosis membrane through which the treated water permeates. The first reverse osmosis membrane device 38 is treated by the reverse osmosis membrane to separate the treated water from the permeated water and concentrated water that remove ions and salts. . In this way, when the water to be treated permeates the reverse osmosis membrane, scales such as silica and calcium that have not passed through the reverse osmosis membrane may adhere to the reverse osmosis membrane. In addition, there is a possibility that slime (fouling) generated by microorganisms such as bacteria and algae that have not passed through the reverse osmosis membrane will adhere to the reverse osmosis membrane. In addition, scale is precipitated from calcium or silicon dioxide dissolved in the water to be treated.

去離子水區域40係暫時儲存滲透過第一逆滲透膜裝置38之逆滲透膜之透過水。電析式去離子裝置42係一邊電性再生被處理水(透過水),一邊進行去離子處理。離子交換樹脂裝置44係從被處理水將無機離子去除。純水槽46係儲存經由一次純水裝置12製造之一次純水。The deionized water area 40 temporarily stores the permeated water permeated through the reverse osmosis membrane of the first reverse osmosis membrane device 38 . The electrolytic deionization device 42 performs deionization while electrically regenerating the water to be treated (permeated water). The ion exchange resin device 44 removes inorganic ions from the water to be treated. The pure water tank 46 stores the primary pure water produced by the primary pure water device 12 .

第二逆滲透膜裝置48如圖1所示,配置於從第一逆滲透膜裝置38分岐之分岐流路102之中途。分岐流路102係經第一逆滲透膜裝置38分離之濃縮水所流動之流路,一端連接於第一逆滲透膜裝置38,另一端連接於被處理水區域14。分岐流路102係由被處理水流動之管道所構成。As shown in FIG. 1 , the second reverse osmosis membrane device 48 is arranged in the middle of the branch flow path 102 branched from the first reverse osmosis membrane device 38 . The branch flow path 102 is a flow path through which the concentrated water separated by the first reverse osmosis membrane device 38 flows. One end is connected to the first reverse osmosis membrane device 38 and the other end is connected to the treated water area 14 . The branch flow path 102 is composed of pipes through which the treated water flows.

第二逆滲透膜裝置48設有濃縮水滲透過之逆滲透膜,第二逆滲透膜裝置48經由逆滲透膜處理,將從經第一逆滲透膜裝置38分離之濃縮水除去離子、鹽類之處理水、與廢水(氧化水)分離。廢水儲存於廢水區域52,處理水回到被處理水區域14。The second reverse osmosis membrane device 48 is provided with a reverse osmosis membrane through which the concentrated water permeates, and the second reverse osmosis membrane device 48 is treated by the reverse osmosis membrane to remove ions and salts from the concentrated water separated by the first reverse osmosis membrane device 38 The treated water is separated from the waste water (oxidized water). The waste water is stored in the waste water area 52 , and the treated water returns to the treated water area 14 .

像這樣,藉由濃縮水滲透過第二逆滲透膜裝置48之逆滲透膜,於第二逆滲透膜裝置48之逆滲透膜有附著未透過逆滲透膜之二氧化矽、鈣等之水垢的疑慮。再者,於第二逆滲透膜裝置48之逆滲透膜有附著因未透過逆滲透膜之細菌或藻類等之微生物而生成之黏泥(汙濁物)的疑慮。Like this, when the concentrated water permeates through the reverse osmosis membrane of the second reverse osmosis membrane device 48, the reverse osmosis membrane of the second reverse osmosis membrane device 48 has scales such as silicon dioxide and calcium that have not passed through the reverse osmosis membrane. doubt. Furthermore, the reverse osmosis membrane of the second reverse osmosis membrane device 48 may adhere to slime (filth) generated by microorganisms such as bacteria and algae that have not passed through the reverse osmosis membrane.

(二次純水裝置112) 二次純水裝置112如圖1所示,在水流方向上,配置於純水槽46之下游側。 (Secondary pure water device 112) The secondary pure water device 112 is arranged on the downstream side of the pure water tank 46 in the direction of water flow as shown in FIG. 1 .

在該構成中,二次純水裝置112從一次純水更去除不純物。接著,經由二次純水裝置112得到之超純水被送至使用場所之使用點120。被送至使用點120之超純水中,未使用之超純水係不改變地送回純水槽46,與一次純水一起儲存於純水槽46。In this configuration, the secondary pure water device 112 further removes impurities from the primary pure water. Next, the ultrapure water obtained through the secondary pure water device 112 is sent to the use point 120 of the use place. The ultrapure water sent to the point of use 120, the unused ultrapure water system is sent back to the pure water tank 46 unchanged, and stored in the pure water tank 46 together with the primary pure water.

(藥劑注入系統60) 藥劑注入系統60係對於主流路100注入藥劑之系統。藥劑注入系統60具體如圖1所示,具備分岐流路104、第三幫浦50、第一注入部62、第二注入部82、及控制裝置160。 (medicine injection system 60) The medicine injection system 60 is a system for injecting medicine into the main channel 100 . Specifically, as shown in FIG. 1 , the drug injection system 60 includes a branch channel 104 , a third pump 50 , a first injection unit 62 , a second injection unit 82 , and a control device 160 .

分岐流路104係從去離子水區域40分岐之流路,一端連接於去離子水區域40。分岐流路104係用於取出儲存在去離子水區域40之被處理水之一部分的流路。該分岐流路104係由被處理水流動之管道所構成。第三幫浦50配置於分岐流路104。該第三幫浦50係將被處理水從去離子水區域40送往分岐流路104之下游。The branched channel 104 is a channel branched from the deionized water area 40 , and one end is connected to the deionized water area 40 . The branch channel 104 is a channel for taking out a part of the water to be treated stored in the deionized water area 40 . The branch flow path 104 is formed by a pipe through which the treated water flows. The third pump 50 is arranged in the branch channel 104 . The third pump 50 sends the water to be treated from the deionized water area 40 to the downstream of the branch channel 104 .

(第一注入部62) 第一注入部62具有將黏泥控制劑注入至主流路100的功能。具體而言,第一注入部62具備第一槽70、第一注入路徑63、第一射出器(ejector)64、第一流量計(FIQ)66、及第一流量調整閥(FCV)68。 (first injection part 62) The first injection part 62 has a function of injecting the slime control agent into the main passage 100 . Specifically, the first injection unit 62 includes a first tank 70 , a first injection path 63 , a first ejector (ejector) 64 , a first flow meter (FIQ) 66 , and a first flow control valve (FCV) 68 .

第一槽70係容置部的一例,容置液狀之黏泥控制劑。容置於第一槽70之黏泥控制劑為藥劑的一例,具有抑制在第一逆滲透膜裝置38之逆滲透膜、及第二逆滲透膜裝置48之逆滲透膜之黏泥的產生的功能。The first tank 70 is an example of a container, and houses a liquid slime control agent. The slime control agent contained in the first tank 70 is an example of a chemical agent, and has a function of suppressing the generation of slime on the reverse osmosis membrane of the first reverse osmosis membrane device 38 and the reverse osmosis membrane of the second reverse osmosis membrane device 48 Function.

黏泥控制劑的使用沒有特別的限制。具體而言,作為黏泥控制劑之主成分可使用2,2-二溴-3-次氮基丙醯胺(2,2-dibromo-3-nitrilopropionamide)、5-氯-2-甲基-4-異噻唑啉-3-酮(5-chloro-2-methyl-4-isothiazolin-3-one,C1-MIT)、2-甲基-4-異噻唑啉-3-酮(2-methyl-4-isothiazolin-3-one,MIT)、4,5-二氯-1,2-二硫戊環-3-酮(4,5-dichloro-1,2-dithiolane-3-one)、2-溴-2-硝基丙烷-1,3-二醇(2-bromo-2-nitropropane-1,3-diol)、苯并異噻唑啉-3-酮(benzisothiazoline-3-one)、戊二醛(glutaraldehyde)、氯胺(Chloramine)、氯胺T、氯胺B、氨基磺(Sulfamic)、氨基磺酸等之胺基磺化合物、硝酸銀、硫酸銀等之銀化合物、硫酸銅、硝酸銅等之銅化合物、氯化鎳、硫酸鎳等之鎳化合物等。又,黏泥控制劑中有包含安定劑的情況。作為該安定劑,可例舉pH調整劑、無機鹽、氧化防止劑等。The use of the slime control agent is not particularly limited. Specifically, 2,2-dibromo-3-nitrilopropionamide (2,2-dibromo-3-nitrilopropionamide), 5-chloro-2-methyl- 4-isothiazolin-3-one (5-chloro-2-methyl-4-isothiazolin-3-one, C1-MIT), 2-methyl-4-isothiazolin-3-one (2-methyl- 4-isothiazolin-3-one, MIT), 4,5-dichloro-1,2-dithiolane-3-one (4,5-dichloro-1,2-dithiolane-3-one), 2- Bromo-2-nitropropane-1,3-diol (2-bromo-2-nitropropane-1,3-diol), benzisothiazoline-3-one (benzisothiazoline-3-one), glutaraldehyde (glutaraldehyde), chloramine (Chloramine), chloramine T, chloramine B, sulfamic acid, sulfamic acid and other sulfamic acid compounds, silver nitrate, silver sulfate and other silver compounds, copper sulfate, copper nitrate, etc. Nickel compounds such as copper compounds, nickel chloride, nickel sulfate, etc. Moreover, a stabilizer may be contained in a slime control agent. As this stabilizer, a pH adjuster, an inorganic salt, an oxidation inhibitor, etc. are mentioned.

黏泥控制劑在25℃的黏度從使用性的觀點來說,例如10mPa・s以上5000mPa・s以下較佳。更佳為,例如100mPa・s以上至2000mPa・s。尚,黏泥控制劑的情況,主成分為不安定之物質的情況較多,在第一槽70中有從保存中一點一點產生分解的可能性。又,安定劑在黏泥控制劑中有以高濃度存在的情況,其會發生沉澱等,而有在第一注入路徑63產生問題的情況。The viscosity of the slime control agent at 25°C is preferably, for example, 10 mPa・s or more and 5000 mPa・s or less from the viewpoint of usability. More preferably, it is, for example, 100 mPa・s or more to 2000 mPa・s. In addition, in the case of the slime control agent, the main component is often an unstable substance, and there is a possibility that the first tank 70 gradually decomposes during storage. In addition, the stabilizer may exist in a high concentration in the slime control agent, and it may precipitate or the like, which may cause problems in the first injection path 63 .

第一注入路徑63為注入路徑之一例,對於主流路100將第一槽70之黏泥控制劑注入之流路。第一注入路徑63具體而言具有注入流路63A及注入流路63B。The first injection path 63 is an example of the injection path, and is a flow path for injecting the slime control agent in the first tank 70 into the main flow path 100 . Specifically, the first injection path 63 has an injection channel 63A and an injection channel 63B.

注入流路63A係一端連接在分岐流路104之另一端,另一端在主流路100上連接在相對於第一逆滲透膜裝置38之上游側。具體而言,注入流路63A之另一端在主流路100上,連接於過濾裝置30與第二幫浦34之間的部分。注入流路63A係從分岐流路104之另一端,將被處理水流往主流路100上之過濾裝置30與第二幫浦34之間的流路。One end of the injection flow path 63A is connected to the other end of the branch flow path 104 , and the other end is connected to the upstream side of the first reverse osmosis membrane device 38 on the main flow path 100 . Specifically, the other end of the injection channel 63A is on the main channel 100 and is connected to a portion between the filter device 30 and the second pump 34 . The injection flow path 63A is a flow path between the filter device 30 on the main flow path 100 and the second pump 34 from the other end of the branch flow path 104 .

注入流路63B係一端連接於第一槽70,另一端連接於第一射出器64之吸入口64A。該注入流路63B係將容置於第一槽70之黏泥控制劑從第一槽70流往第一射出器64之流路。One end of the injection channel 63B is connected to the first groove 70 , and the other end is connected to the suction port 64A of the first injector 64 . The injection channel 63B is a channel for flowing the slime control agent contained in the first tank 70 from the first tank 70 to the first injector 64 .

第一注入路徑63係至少注入流路63B之流路徑長比主流路100之流路徑長小。尚,第一注入路徑63中,注入流路63A係經由被處理水流動之管道(注入管)所構成,注入流路63B係經由黏泥控制劑流動之管道(注入管)所構成。In the first injection path 63 , at least the flow path length of the injection flow path 63B is shorter than the flow path length of the main flow path 100 . Furthermore, in the first injection path 63, the injection flow path 63A is constituted by a pipe (injection pipe) through which the treated water flows, and the injection flow path 63B is constituted by a pipe (injection pipe) through which the slime control agent flows.

第一射出器64配置於注入流路63A。該第一射出器64例如經由因壓力差之吸引力,將流動於注入流路63B之黏泥控制劑通過吸入口64A吸入。藉此,黏泥控制劑被供給至流動於注入流路63A之被處理水。接著,被供給黏泥控制劑之被處理水通過注入流路63A,對於主流路100被注入至過濾裝置30與第二幫浦34之間。The first injector 64 is arranged in the injection channel 63A. The first injector 64 sucks the slime control agent flowing in the injection channel 63B through the suction port 64A, for example, through the suction force due to the pressure difference. Thereby, the slime control agent is supplied to the to-be-processed water which flows through 63 A of injection channels. Next, the treated water supplied with the slime control agent passes through the injection channel 63A and is injected into the main channel 100 between the filter device 30 and the second pump 34 .

第一流量計66及第一流量調整閥68係從第一槽70朝向第一射出器64以此順序配置於注入流路63B。The first flow meter 66 and the first flow rate adjustment valve 68 are arranged in this order in the injection channel 63B from the first tank 70 toward the first injector 64 .

第一流量計66為測量部之一例,測量注入流路63B中之黏泥控制劑之流量。尚,第一流量計66所測量之黏泥控制劑之流量之資訊被送至控制裝置160。The first flowmeter 66 is an example of a measuring part, and measures the flow rate of the slime control agent injected into the flow path 63B. Furthermore, the flow information of the slime control agent measured by the first flow meter 66 is sent to the control device 160 .

第一流量調整閥68為調整閥之一例,具有經開度調整黏泥控制劑之流量的調整功能。第一流量調整閥68亦為施加部的一例,亦具有施加衝擊至黏泥控制劑的施加功能。第一流量調整閥68如下所述,其動作經控制裝置160被控制。第一流量調整閥68經控制裝置160被控制,來進行調整黏泥控制劑之流量之調整動作、及施加衝擊至黏泥控制劑之施加動作。經由第一流量調整閥68之具體調整動作及施加動作如下所述。The first flow rate adjustment valve 68 is an example of an adjustment valve, and has an adjustment function for adjusting the flow rate of the slime control agent through an opening. The first flow rate adjustment valve 68 is also an example of an application unit, and also has a function of applying a shock to the slime control agent. The first flow rate adjustment valve 68 is described below, and its operation is controlled by the control device 160 . The first flow rate adjustment valve 68 is controlled by the control device 160 to perform the adjustment action of adjusting the flow rate of the slime control agent and the action of applying impact to the slime control agent. The specific adjustment action and application action through the first flow rate adjustment valve 68 are as follows.

如上所述,第一注入部62將黏泥控制劑注入至主流路100上,相對於第一逆滲透膜裝置38之上游側(具體而言,過濾裝置30與第二幫浦34之間)。本實施態樣中,作為一例,對於流動於主流路100之被處理水之黏泥控制劑之濃度,以1ppm以上100ppm以下的方式,對於主流路100注入黏泥控制劑。As mentioned above, the first injection part 62 injects the slime control agent into the main flow path 100, on the upstream side of the first reverse osmosis membrane device 38 (specifically, between the filter device 30 and the second pump 34). . In this embodiment, as an example, the concentration of the sludge control agent in the water to be treated flowing in the main channel 100 is injected into the main channel 100 at a concentration of not less than 1 ppm and not more than 100 ppm.

尚,在本實施例中,黏泥控制劑在第一射出器64稀釋後,通過注入流路63A注入至主流路100,但將第一射出器64設置於主流路100,不經過注入流路63A來注入的構成亦可。Still, in this embodiment, the slime control agent is injected into the main flow path 100 through the injection flow path 63A after being diluted by the first injector 64, but the first injector 64 is arranged in the main flow path 100 without passing through the injection flow path. 63A to inject the composition is also possible.

尚,被注入至被處理水之黏泥控制劑流動於主流路100,並到達第一逆滲透膜裝置38。到達第一逆滲透膜裝置38之黏泥控制劑,不滲透過第一逆滲透膜裝置38之逆滲透膜,被含有於濃縮水,流動於分岐流路102。於此,不滲透過第一逆滲透膜裝置38之逆滲透膜而含有於濃縮水之黏泥控制劑的濃度,與到達第一逆滲透膜裝置38前之狀態之黏泥控制劑的濃度相比變得較高。Furthermore, the sludge control agent injected into the water to be treated flows through the main channel 100 and reaches the first reverse osmosis membrane device 38 . The slime control agent that reaches the first reverse osmosis membrane device 38 does not permeate through the reverse osmosis membrane of the first reverse osmosis membrane device 38 , is contained in the concentrated water, and flows in the branch flow channel 102 . Here, the concentration of the slime control agent contained in the concentrated water without passing through the reverse osmosis membrane of the first reverse osmosis membrane device 38 is the same as the concentration of the slime control agent in the state before reaching the first reverse osmosis membrane device 38. ratio becomes higher.

再者,含有變為高濃度之黏泥控制劑之濃縮水流動於分岐流路102,到達第二逆滲透膜裝置48。到達第二逆滲透膜裝置48之黏泥控制劑,不滲透過第二逆滲透膜裝置48之逆滲透膜,被含有於廢水,被排出至廢水區域52。Furthermore, the concentrated water containing the slime control agent having a high concentration flows through the branch flow channel 102 and reaches the second reverse osmosis membrane device 48 . The slime control agent that has reached the second reverse osmosis membrane device 48 is contained in the wastewater without permeating through the reverse osmosis membrane of the second reverse osmosis membrane device 48 , and is discharged to the wastewater region 52 .

尚,在本實施態樣中,將注入流路63B理解為注入路徑的一例,將主流路100、分岐流路104及注入流路63A理解為流路的一例亦可。在這個情況下,第一注入部62被理解為將黏泥控制劑注入至注入流路63A之構成部。Also, in this embodiment, the injection channel 63B is considered as an example of the injection channel, and the main channel 100, the branch channel 104, and the injection channel 63A may be considered as an example of the channel. In this case, the first injection part 62 can be understood as a component part that injects the slime control agent into the injection channel 63A.

(第二注入部82) 第二注入部82具有將防垢劑注入至主流路100的功能。具體而言,第二注入部82具備第二槽90、第二注入路徑83、第二射出器84、第二流量計(FIQ)86、及第二流量調整閥(FCV)88。 (second injection part 82) The second injection part 82 has a function of injecting the anti-fouling agent into the main passage 100 . Specifically, the second injection unit 82 includes a second tank 90 , a second injection path 83 , a second injector 84 , a second flow meter (FIQ) 86 , and a second flow control valve (FCV) 88 .

第二槽90係容置部的一例,容置液狀之防垢劑。容置於第二槽90之防垢劑為藥劑的一例,具有抑制在第一逆滲透膜裝置38之逆滲透膜、及第二逆滲透膜裝置48之逆滲透膜之水垢的產生的功能。The second tank 90 is an example of an accommodating part, and accommodates a liquid antifouling agent. The anti-scaling agent contained in the second tank 90 is an example of a chemical agent, and has a function of suppressing the generation of scale on the reverse osmosis membrane of the first reverse osmosis membrane device 38 and the reverse osmosis membrane of the second reverse osmosis membrane device 48 .

防垢劑從主成分之種類,主要為膦酸(phosphonic acid)系、多羧酸(polycarboxylic acid)系、丙烯酸(acrylic acid)系等大分類。具體而言,作為防垢劑可例舉Organo股份有限公司製的「ORPERSION」系列,BWA Water Additives公司製的「Flocon(註冊商標)」系列、Nalco公司製的「PermaTreat(註冊商標)」系列、奇異公司製的「Hypersperse(註冊商標)」系列、栗田工業股份有限公司製的「KURIVERTE(註冊商標)」系列。防垢劑中有包含安定劑的情況。作為該安定劑,可例舉pH調整劑、無機鹽、氧化防止劑等。Antifouling agents are mainly classified into phosphonic acid-based, polycarboxylic acid-based, acrylic acid-based, etc. based on the type of main components. Specifically, examples of antifouling agents include "ORPERSION" series manufactured by Organo Co., Ltd., "Flocon (registered trademark)" series manufactured by BWA Water Additives, "PermaTreat (registered trademark)" series manufactured by Nalco, The "Hypersperse (registered trademark)" series manufactured by Singularity Corporation, and the "KURIVERTE (registered trademark)" series manufactured by Kurita Industry Co., Ltd. Antiscalants may contain stabilizers. As this stabilizer, a pH adjuster, an inorganic salt, an oxidation inhibitor, etc. are mentioned.

防垢劑在25℃的黏度從使用性的觀點來說,例如1mPa・s以上5000mPa・s以下較佳。更佳為,例如100mPa・s以上至2000mPa・s。像這樣,防垢劑之黏度至少高於被處理水之黏度。一般而言,防垢劑包含高濃度,依情況,接近飽和溶解度之濃度之主成分的情況較多,因此在注入第二注入路徑83有產生沉澱的可能性。The viscosity of the antifouling agent at 25°C is preferably, for example, 1 mPa・s or more and 5000 mPa・s or less from the viewpoint of usability. More preferably, it is, for example, 100 mPa・s or more to 2000 mPa・s. Like this, the viscosity of the antiscalant is at least higher than that of the treated water. Generally speaking, the anti-scaling agent contains a high concentration, depending on the situation, the concentration of the main component close to the saturation solubility is often the case, so there is a possibility of precipitation when it is injected into the second injection path 83 .

第二注入路徑83為注入路徑之一例,對於主流路100將第二槽90之防垢劑注入之流路。第二注入路徑83具體而言具有注入流路83A及注入流路83B。The second injection path 83 is an example of the injection path, and is a flow path for injecting the antiscalant agent of the second tank 90 into the main flow path 100 . Specifically, the second injection path 83 has an injection channel 83A and an injection channel 83B.

注入流路83A係一端連接在分岐流路104之另一端,另一端在主流路100上連接在相對於第一逆滲透膜裝置38之上游側。具體而言,注入流路83A之另一端在主流路100上,連接於過濾裝置30與第二幫浦34之間的部分。注入流路83A係從分岐流路104之另一端,將被處理水流往主流路100上之過濾裝置30與第二幫浦34之間的流路。One end of the injection flow path 83A is connected to the other end of the branch flow path 104 , and the other end is connected to the upstream side of the first reverse osmosis membrane device 38 on the main flow path 100 . Specifically, the other end of the injection channel 83A is on the main channel 100 and is connected to a part between the filter device 30 and the second pump 34 . The injection flow path 83A is a flow path between the filter device 30 on the main flow path 100 and the second pump 34 from the other end of the branch flow path 104 .

注入流路83B係一端連接於第二槽90,另一端連接於第二射出器84之吸入口84A。該注入流路83B係將容置於第二槽90之防垢劑從第二槽90流往第二射出器84之流路。One end of the injection channel 83B is connected to the second tank 90 , and the other end is connected to the suction port 84A of the second injector 84 . The injection channel 83B is a channel through which the antiscalant agent accommodated in the second tank 90 flows from the second tank 90 to the second injector 84 .

第二注入路徑83係至少注入流路83B之流路徑長比主流路100之流路徑長小。尚,第二注入路徑83中,注入流路83A係經由被處理水流動之管道(注入管)所構成,注入流路83B係經由防垢劑流動之管道(注入管)所構成。In the second injection path 83 , at least the flow path length of the injection flow path 83B is shorter than the flow path length of the main flow path 100 . Furthermore, in the second injection path 83, the injection flow path 83A is constituted by a pipe (injection pipe) through which the water to be treated flows, and the injection flow path 83B is constituted by a pipe (injection pipe) through which the antiscalant agent flows.

第二射出器84配置於注入流路83A。該第二射出器84例如經由因壓力差之吸引力,將流動於注入流路83B之防垢劑通過吸入口84A吸入。藉此,防垢劑被供給至流動於注入流路83A之被處理水。接著,被供給防垢劑之被處理水通過注入流路83A,對於主流路100被注入至過濾裝置30與第二幫浦34之間。The second injector 84 is arranged in the injection channel 83A. The second injector 84 sucks the anti-fouling agent flowing in the injection flow path 83B through the suction port 84A, for example, through the suction force due to the pressure difference. Thereby, the anti-scaling agent is supplied to the water to be treated flowing in the injection channel 83A. Next, the water to be treated to which the antiscalant is supplied passes through the injection channel 83A and is injected into the main channel 100 between the filter device 30 and the second pump 34 .

第二流量計86及第二流量調整閥88係從第二槽90朝向第二射出器84以此順序配置於注入流路83B。The second flow meter 86 and the second flow rate adjustment valve 88 are arranged in this order in the injection channel 83B from the second tank 90 toward the second injector 84 .

第二流量計86為測量部之一例,測量注入流路83B中之防垢劑之流量。尚,第二流量計86所測量之防垢劑之流量之資訊被送至控制裝置160。The second flow meter 86 is an example of a measuring unit, and measures the flow rate of the anti-scaling agent injected into the flow path 83B. Furthermore, the flow information of the anti-fouling agent measured by the second flow meter 86 is sent to the control device 160 .

第二流量調整閥88為調整閥之一例,具有經開度調整防垢劑之流量的調整功能。第二流量調整閥88亦為施加部的一例,亦具有施加衝擊至防垢劑的施加功能。第二流量調整閥88如下所述,其動作經控制裝置160被控制。第二流量調整閥88經控制裝置160被控制,來進行調整防垢劑之流量之調整動作、及施加衝擊至防垢劑之施加動作。經由第二流量調整閥88之具體調整動作及施加動作如下所述。The second flow rate adjustment valve 88 is an example of an adjustment valve, and has an adjustment function for adjusting the flow rate of the anti-scaling agent through the opening degree. The second flow rate adjustment valve 88 is also an example of an application unit, and also has a function of applying a shock to the anti-scaling agent. The operation of the second flow rate adjustment valve 88 is controlled through the control device 160 as described below. The second flow adjustment valve 88 is controlled by the control device 160 to perform the adjustment action of adjusting the flow rate of the anti-fouling agent and the action of applying impact to the anti-fouling agent. The specific adjustment action and application action through the second flow rate adjustment valve 88 are as follows.

如上所述,第二注入部82將防垢劑注入至主流路100上,相對於第一逆滲透膜裝置38之上游側(具體而言,過濾裝置30與第二幫浦34之間)。本實施態樣中,作為一例,對於流動於主流路100之被處理水之防垢劑之濃度,以1ppm以上100ppm以下的方式,對於主流路100注入防垢劑。As mentioned above, the second injection part 82 injects the anti-fouling agent into the main flow path 100 , on the upstream side relative to the first reverse osmosis membrane device 38 (specifically, between the filter device 30 and the second pump 34 ). In this embodiment, as an example, the antiscalant agent is injected into the main channel 100 so that the concentration of the antiscalant agent in the water to be treated flowing in the main channel 100 is not less than 1 ppm and not more than 100 ppm.

尚,在本實施例中,防垢劑在第二射出器84稀釋後,通過注入流路83A注入至主流路100,但將第二射出器84設置於主流路100,不經過注入流路83A來注入的構成亦可。Still, in this embodiment, after the anti-fouling agent is diluted by the second injector 84, it is injected into the main flow path 100 through the injection flow path 83A, but the second injector 84 is arranged in the main flow path 100 without passing through the injection flow path 83A. The composition of injection is also possible.

尚,被注入至被處理水之防垢劑流動於主流路100,並到達第一逆滲透膜裝置38。到達第一逆滲透膜裝置38之防垢劑,不滲透過第一逆滲透膜裝置38之逆滲透膜,被含有於濃縮水,流動於分岐流路102。於此,不滲透過第一逆滲透膜裝置38之逆滲透膜而含有於濃縮水之防垢劑的濃度,與到達第一逆滲透膜裝置38前之狀態之防垢劑的濃度相比變得較高。Still, the antiscalant injected into the water to be treated flows through the main channel 100 and reaches the first reverse osmosis membrane device 38 . The anti-scaling agent that reaches the first reverse osmosis membrane device 38 does not permeate through the reverse osmosis membrane of the first reverse osmosis membrane device 38 , is contained in the concentrated water, and flows in the branch flow channel 102 . Here, the concentration of the antiscaling agent contained in the concentrated water without permeating through the reverse osmosis membrane of the first reverse osmosis membrane device 38 is changed compared with the concentration of the antiscaling agent in the state before reaching the first reverse osmosis membrane device 38. higher.

再者,含有變為高濃度之防垢劑之濃縮水流動於分岐流路102,到達第二逆滲透膜裝置48。到達第二逆滲透膜裝置48之防垢劑,不滲透過第二逆滲透膜裝置48之逆滲透膜,被含有於廢水,被排出至廢水區域52。Furthermore, the concentrated water containing the antiscalant at a high concentration flows through the branch flow channel 102 and reaches the second reverse osmosis membrane device 48 . The anti-scaling agent that has reached the second reverse osmosis membrane device 48 is contained in the wastewater without permeating through the reverse osmosis membrane of the second reverse osmosis membrane device 48 , and is discharged to the wastewater region 52 .

尚,在本實施態樣中,將注入流路83B理解為注入路徑的一例,將主流路100、分岐流路104及注入流路83A理解為流路的一例亦可。在這個情況下,第二注入部82被理解為將防垢劑注入至注入流路83A之構成部。Furthermore, in this embodiment, the injection channel 83B is considered as an example of the injection channel, and the main channel 100, the branch channel 104, and the injection channel 83A may be considered as an example of the channel. In this case, the second injection part 82 is understood as a constituent part that injects the anti-scaling agent into the injection channel 83A.

(控制裝置160) 控制裝置160具有控制第一流量調整閥68及第二流量調整閥88之動作的控制功能。具體而言,控制裝置160如圖2所示,具有處理器161、記憶體162、儲存器163、及計時器164。 (control device 160) The control device 160 has a control function of controlling the operations of the first flow rate adjustment valve 68 and the second flow rate adjustment valve 88 . Specifically, the control device 160 has a processor 161 , a memory 162 , a storage 163 , and a timer 164 as shown in FIG. 2 .

作為處理器161,例如使用通用的處理器即CPU(Central Processing Unit)。尚,作為處理器之一例,亦可是為了執行特定之處理,設計為專用之電路所構成之專用處理器。As the processor 161, for example, a CPU (Central Processing Unit) that is a general-purpose processor is used. Furthermore, as an example of a processor, it may be a special-purpose processor constituted by a dedicated circuit designed to execute a specific process.

儲存器163保存包含控制程式163A(請參照圖3)之各種程式、及各種資料。儲存器163具體而言,經由HDD(Hard Disk Drive)、SSD(Solid State Drive)及快閃記憶體等之記錄裝置來實現。The memory 163 stores various programs including the control program 163A (see FIG. 3 ), and various data. Specifically, the storage 163 is realized via recording devices such as HDD (Hard Disk Drive), SSD (Solid State Drive), and flash memory.

記憶體162是處理器161用於執行各種程式之作業區域,處理器161執行處理時,暫時地記錄各種程式或各種資料。處理器161從儲存器163將控制程式163A之各種程式讀出至記憶體162,以記憶體162作為作業區域執行程式。計時器164為用於測量超純水製造系統10之運轉時間等之時間的測量部。The memory 162 is an operating area for the processor 161 to execute various programs, and when the processor 161 executes processing, various programs or various data are temporarily recorded. The processor 161 reads various programs of the control program 163A from the storage 163 to the memory 162, and executes the programs using the memory 162 as a work area. The timer 164 is a measuring unit for measuring time such as the operating time of the ultrapure water production system 10 .

在控制裝置160中,處理器161經由執行控制程式163A,實現各種功能。以下,說明有關經由作為硬體資源之處理器161及作為軟體資源之控制程式163A之協作來實現之功能構成。圖3為表示處理器161之功能構成的方塊圖。In the control device 160, the processor 161 realizes various functions by executing the control program 163A. Hereinafter, the functional structure realized by the cooperation of the processor 161 as a hardware resource and the control program 163A as a software resource will be described. FIG. 3 is a block diagram showing the functional configuration of the processor 161. As shown in FIG.

如圖3所示,在控制裝置160中,處理器161經由執行控制程式163A,作為取得部161A、流量控制部161B、及施加控制部161C產生功能。As shown in FIG. 3 , in the control device 160 , the processor 161 functions as an acquisition unit 161A, a flow rate control unit 161B, and an application control unit 161C by executing a control program 163A.

取得部161A取得第一流量計66所量測之黏泥控制劑之流量的資訊(以下,稱為第一流量資訊)。又,取得部161A取得第二流量計86所量測之防垢劑之流量的資訊(以下,稱為第二流量資訊)。再者,取得部161A取得計時器164所量測之超純水製造系統10之運轉時間等之時間的資訊(以下,稱為時間資訊)。The acquisition part 161A acquires the information of the flow rate of the slime control agent measured by the 1st flowmeter 66 (it is called 1st flow rate information hereafter). In addition, the obtaining unit 161A obtains information on the flow rate of the anti-fouling agent measured by the second flow meter 86 (hereinafter referred to as second flow rate information). Furthermore, the acquisition unit 161A acquires time information (hereinafter referred to as time information) such as the operation time of the ultrapure water production system 10 measured by the timer 164 .

流量控制部161B依據取得部161A所取得之第一流量資訊,以將注入流路63B中之黏泥控制劑之流量維持在預設流量的方式,控制第一流量調整閥68之開度。換言之,流量控制部161B依據第一流量計66之測量結果,控制第一流量計66之開度,將注入流路63B中之黏泥控制劑之流量維持在預設流量。The flow control unit 161B controls the opening of the first flow adjustment valve 68 in a manner to maintain the flow of the slime control agent injected into the flow path 63B at a preset flow rate according to the first flow information obtained by the obtaining unit 161A. In other words, the flow control unit 161B controls the opening of the first flow meter 66 according to the measurement result of the first flow meter 66 to maintain the flow of the slime control agent injected into the flow path 63B at a preset flow.

又,流量控制部161B依據取得部161A所取得之第二流量資訊,以將注入流路83B中之防垢劑之流量維持在預設流量的方式,控制第二流量調整閥88之開度。換言之,流量控制部161B依據第二流量計86之測量結果,控制第二流量計86之開度,將注入流路83B中之防垢劑之流量維持在預設流量。Moreover, the flow control unit 161B controls the opening of the second flow regulating valve 88 in a manner to maintain the flow of the anti-fouling agent injected into the channel 83B at a preset flow rate according to the second flow information obtained by the obtaining unit 161A. In other words, the flow control unit 161B controls the opening of the second flow meter 86 according to the measurement result of the second flow meter 86 to maintain the flow rate of the anti-scaling agent injected into the flow path 83B at a preset flow rate.

施加控制部161C對於第一流量調整閥68進行施加衝擊至注入流路63B中之黏泥控制劑的控制(以下,稱為施加控制)。其結果,第一流量調整閥68係執行施加衝擊至注入流路63B中之黏泥控制劑的動作(以下,稱為施加動作)。作為施加衝擊之對象的黏泥控制劑係包含含有於黏泥控制劑之成分所沉澱之沉澱物、及黏度變高之黏泥控制劑(換言之,妨礙注入流路63B中之流動者)。The application control unit 161C controls (hereinafter, referred to as application control) the application of the slime control agent impacted into the injection channel 63B with respect to the first flow rate adjustment valve 68 . As a result, the first flow rate adjustment valve 68 executes an operation of applying a shock to the slime control agent injected into the flow path 63B (hereinafter, referred to as an application operation). The slime control agent to which the impact is applied includes sediments in which the components contained in the slime control agent precipitate, and a slime control agent with a high viscosity (in other words, one that hinders the flow in the injection channel 63B).

本實施態樣中,第一流量調整閥68以變化為全閉狀態及全開狀態,來執行施加動作。第一流量調整閥68以變化為全閉狀態及全開狀態,閥體等之移動的構成要素與黏泥控制劑或其他構成要素等衝突,將藉此發生的衝擊(具體而言,振動)施加於黏泥控制劑。本實施態樣中,第一流量調整閥68對於注入流路63B及構成注入流路63B之管道(注入管)亦施加衝擊(具體而言,振動)。In this embodiment, the first flow rate adjustment valve 68 performs the applying action by changing between the fully closed state and the fully open state. The first flow rate adjustment valve 68 is changed to a fully closed state and a fully open state, and the moving components such as the valve body collide with the slime control agent or other components, and the impact (specifically, vibration) generated thereby is applied. For slime control agent. In this embodiment, the first flow rate adjustment valve 68 also applies impact (specifically, vibration) to the injection channel 63B and the piping (injection pipe) constituting the injection channel 63B.

於此,含有於黏泥控制劑之成分即使不產生沉澱,變為高黏度之黏泥控制劑在注入流路63B中,特別是會停留於第一流量調整閥68,有產生流路阻塞(變狹窄)之問題的情況。該問題產生的情況,由於注入流路63B之流速一般較低,因此無法洗去問題物質,在該位置流路之阻塞會惡化。流路之阻塞容易產生的地方係在藥劑之原液流動之流路,尤其是第一流量調整閥68等之流路變窄的位置。因此,作為施加衝擊的位置,黏泥控制劑之原液被供給的流路(換言之,黏泥控制劑之原液接觸的部分),特別是第一流量調整閥68之配置部分較佳。Here, even if the components contained in the slime control agent do not precipitate, the high-viscosity slime control agent will stay in the injection flow path 63B, especially the first flow rate adjustment valve 68, and flow path blockage may occur ( stenosis) in the case of the problem. When this problem arises, since the flow rate of the injection flow path 63B is generally low, the problematic substance cannot be washed away, and the clogging of the flow path will worsen at this position. The place where flow path blockage is likely to occur is the flow path where the raw liquid of the drug flows, especially the position where the flow path of the first flow rate adjustment valve 68 and the like is narrowed. Therefore, the flow path where the stock solution of the slime control agent is supplied (in other words, the portion where the stock solution of the slime control agent contacts), especially the location where the first flow rate adjustment valve 68 is placed, is preferable as the location where the impact is applied.

本實施態樣中,經由第一流量調整閥68之開閉施加衝擊的情況下,由於附著於第一流量調整閥68之異物經由開閉動作亦有直接去除的效果,因此最有效果。其原因為,由黏泥控制劑來的異物並非單純微粒子,有具有黏著性,形成例如糊狀之物質的情況。尚,經由該開閉動作被除去之異物雖然最後會流入主流路100,但因會由預濾器(圖未表示)或者第一逆滲透膜裝置38被除去,不會影響製造之純水或超純水。In this embodiment, when a shock is applied through the opening and closing of the first flow rate adjustment valve 68, foreign matter adhering to the first flow rate adjustment valve 68 can be directly removed through the opening and closing action, so it is most effective. The reason for this is that the foreign matter from the slime control agent is not a simple particle, but may be sticky and form, for example, a paste-like substance. Still, although the foreign matter removed through the opening and closing action will finally flow into the main flow path 100, it will be removed by the prefilter (not shown) or the first reverse osmosis membrane device 38, which will not affect the produced pure water or ultrapure water. water.

第一流量調整閥68具體而言,以交替連續地複數次變化為全閉狀態及全開狀態,來執行施加動作。例如,第一流量調整閥68以短時間(例如,超過0秒且5秒以下)切換為全閉狀態及全開狀態,來連續地變化為全閉狀態及全開狀態。再者,第一流量調整閥68以最初為全開狀態後變化為全閉狀態,來執行施加動作。Specifically, the first flow rate adjustment valve 68 performs an application operation by alternately and continuously changing to a fully closed state and a fully open state a plurality of times. For example, the first flow rate adjustment valve 68 is switched between the fully closed state and the fully open state within a short period of time (for example, more than 0 seconds and less than 5 seconds), and continuously changes to the fully closed state and the fully open state. In addition, the first flow rate adjustment valve 68 changes to the fully closed state from the fully open state at first, and executes the application operation.

再者,本實施態樣中,施加控制部161C在第一流量調整閥68之開度成為預設開度以上的情況下,對第一流量調整閥68進行施加控制。預設開度作為一例,被設定為從70%~90%之範圍中預設的值。Furthermore, in the present embodiment, the application control unit 161C controls the application of the first flow rate adjustment valve 68 when the opening degree of the first flow rate adjustment valve 68 is greater than or equal to a preset opening degree. As an example, the preset opening degree is set to a preset value within a range of 70% to 90%.

又,施加控制部161C在超純水製造系統10之運轉時間進行預設時間的情況下,對於第一流量調整閥68進行施加控制。換言之,施加控制部161C在第一槽70之黏泥控制劑通過第一注入路63往主流路100之注入進行預設時間的情況下,對於第一流量調整閥68進行施加控制。預設時間係與因黏泥控制劑之注入在注入流路63B產生阻塞之時間相比較短的時間,作為一例,從24小時以上500小時以下之範圍中設定為預設的值。該預設時間係24小時以上500小時以下較佳,100小時以上200小時以下更佳。In addition, the application control unit 161C performs application control on the first flow rate adjustment valve 68 when the operation time of the ultrapure water production system 10 has reached the preset time. In other words, the application control unit 161C controls the application of the first flow rate adjustment valve 68 when the slime control agent in the first tank 70 is injected into the main channel 100 through the first injection channel 63 for a preset time. The preset time is shorter than the time when the injection channel 63B is clogged due to the injection of the slime control agent, and as an example, it is set as a preset value within the range of 24 hours to 500 hours. The preset time is preferably not less than 24 hours and not more than 500 hours, more preferably not less than 100 hours and not more than 200 hours.

又,施加控制部161C對於第二流量調整閥88進行施加衝擊至注入流路83B中之防垢劑的控制(以下,稱為施加控制)。其結果,第二流量調整閥88係執行施加衝擊至注入流路83B中之防垢劑的動作(以下,稱為施加動作)。作為施加衝擊之對象的防垢劑係包含含有於防垢劑之成分所沉澱之沉澱物、及黏度變高之防垢劑(換言之,妨礙注入流路83B中之流動者)。In addition, the application control unit 161C controls the second flow rate adjustment valve 88 to apply the anti-scaling agent impacted into the injection channel 83B (hereinafter referred to as application control). As a result, the second flow rate adjustment valve 88 performs an operation of applying a shock to the anti-scaling agent in the injection channel 83B (hereinafter referred to as an application operation). The antiscalant to which the impact is applied includes sediments in which components contained in the antiscalant precipitate, and an antiscalant with a high viscosity (in other words, one that hinders the flow in the injection channel 83B).

本實施態樣中,第二流量調整閥88以變化為全閉狀態及全開狀態,來執行施加動作。第二流量調整閥88以變化為全閉狀態及全開狀態,閥體等之移動的構成要素與防垢劑或其他構成要素等衝突,將藉此發生的衝擊(具體而言,振動)施加於防垢劑。本實施態樣中,第二流量調整閥88對於注入流路83B及構成注入流路83B之管道(注入管)亦施加衝擊(具體而言,振動)。In this embodiment, the second flow rate adjustment valve 88 performs the applying action by changing between the fully closed state and the fully open state. The second flow rate adjustment valve 88 is changed into a fully closed state and a fully open state, and the components of the movement of the valve body and the like collide with the anti-fouling agent or other components, and the impact (specifically, vibration) generated thereby is applied to the valve body. Antiscalant. In this embodiment, the second flow rate adjustment valve 88 also applies impact (specifically, vibration) to the injection channel 83B and the piping (injection pipe) constituting the injection channel 83B.

於此,含有於防垢劑之成分即使不產生沉澱,變為高黏度之防垢劑在注入流路83B中,特別是會停留於第二流量調整閥88,有產生流路阻塞(變狹窄)之問題的情況。該問題產生的情況,由於注入流路83B之流速一般較低,因此無法洗去問題物質,在該位置流路之阻塞會惡化。流路之阻塞容易產生的地方係在藥劑之原液流動之流路,尤其是第二流量調整閥88等之流路變窄的位置。因此,作為施加衝擊的位置,防垢劑之原液被供給的流路(換言之,防垢劑之原液接觸的部分),特別是第二流量調整閥88之配置部分較佳。Here, even if the components contained in the antiscalant agent do not precipitate, the antiscalant agent with high viscosity will stay in the injection flow path 83B, especially the second flow rate adjustment valve 88, and the flow path may be clogged (narrowed). ) in the case of the problem. When this problem arises, since the flow rate of the injection flow path 83B is generally low, the problematic substance cannot be washed away, and the clogging of the flow path will worsen at this position. The place where the blockage of the flow path is likely to occur is the flow path where the raw solution of the drug flows, especially the position where the flow path of the second flow rate adjustment valve 88 and the like is narrowed. Therefore, as a location where the impact is applied, the flow path where the stock solution of the antiscalant agent is supplied (in other words, the portion where the stock solution of the antiscalant agent contacts), especially the location where the second flow rate adjustment valve 88 is disposed, is preferable.

本實施態樣中,經由第二流量調整閥88之開閉施加衝擊的情況下,由於附著於第二流量調整閥88之異物經由開閉動作亦有直接去除的效果,因此最有效果。其原因為,由防垢劑來的異物並非單純微粒子,有具有黏著性,形成例如糊狀之物質的情況。尚,經由該開閉動作被除去之異物雖然最後會流入主流路100,但因會由預濾器(圖未表示)或者第一逆滲透膜裝置38被除去,不會影響製造之純水或超純水。In this embodiment, when a shock is applied through the opening and closing of the second flow rate adjustment valve 88, the foreign matter adhering to the second flow rate adjustment valve 88 can be directly removed through the opening and closing action, so it is most effective. The reason for this is that the foreign matter from the antifouling agent is not a simple particle, but may be sticky and form, for example, a paste-like substance. Still, although the foreign matter removed through the opening and closing action will finally flow into the main flow path 100, it will be removed by the prefilter (not shown) or the first reverse osmosis membrane device 38, which will not affect the produced pure water or ultrapure water. water.

第二流量調整閥88具體而言,以交替連續地複數次變化為全閉狀態及全開狀態,來執行施加動作。例如,第二流量調整閥88以短時間(例如,超過0秒且5秒以下)切換為全閉狀態及全開狀態,來連續地變化為全閉狀態及全開狀態。再者,第二流量調整閥88以最初為全開狀態後變化為全閉狀態,來執行施加動作。Specifically, the second flow rate adjustment valve 88 performs an application operation by alternately and continuously changing to a fully closed state and a fully open state a plurality of times. For example, the second flow rate adjustment valve 88 is switched between the fully closed state and the fully open state within a short period of time (for example, more than 0 seconds and less than 5 seconds), and continuously changes to the fully closed state and the fully open state. In addition, the second flow rate adjustment valve 88 changes from the fully open state to the fully closed state at first, and executes the application operation.

再者,本實施態樣中,施加控制部161C在第二流量調整閥88之開度成為預設開度以上的情況下,對第二流量調整閥88進行施加控制。預設開度作為一例,被設定為從70%~90%之範圍中預設的值。Furthermore, in the present embodiment, the application control unit 161C controls the application of the second flow rate adjustment valve 88 when the opening degree of the second flow rate adjustment valve 88 is greater than or equal to a preset opening degree. As an example, the preset opening degree is set to a preset value within a range of 70% to 90%.

又,施加控制部161C在超純水製造系統10之運轉時間進行預設時間的情況下,對於第二流量調整閥88進行施加控制。換言之,施加控制部161C在第二槽90之防垢劑通過第二注入路83往主流路100之注入進行預設時間的情況下,對於第二流量調整閥88進行施加控制。預設時間係與經防垢劑之注入在注入流路83B產生阻塞之時間相比較短的時間,作為一例,從100小時以上200小時以下之範圍中設定為預設的值。In addition, the application control unit 161C performs application control on the second flow rate adjustment valve 88 when the operation time of the ultrapure water production system 10 reaches the preset time. In other words, the application control unit 161C controls the application of the second flow rate adjustment valve 88 when the anti-fouling agent in the second tank 90 is injected into the main channel 100 through the second injection channel 83 for a preset time. The preset time is shorter than the time when the injection channel 83B is clogged by the injection of the antiscalant agent, and is set as a preset value within a range of 100 hours to 200 hours, for example.

尚,本實施態樣中,經由第一流量調整閥68及第二流量調整閥88之施加動作係在超純水製造系統10之運轉中被執行。換言之,不停止超純水製造系統10之運轉,經由第一流量調整閥68及第二流量調整閥88之施加動作被執行。Still, in this embodiment, the action of applying via the first flow rate adjustment valve 68 and the second flow rate adjustment valve 88 is performed during the operation of the ultrapure water production system 10 . In other words, without stopping the operation of the ultrapure water production system 10 , the application operation via the first flow rate adjustment valve 68 and the second flow rate adjustment valve 88 is executed.

又,依超純水製造系統10之使用者,通過操作面板等之操作部來變更上述之預設開度及預設時間亦可。In addition, depending on the user of the ultrapure water production system 10, the above-mentioned preset opening degree and preset time may be changed through an operation portion such as an operation panel.

又,第一流量調整閥68之開度、第一流量計66測量之流量、及黏泥控制劑之注入流路63A或主流路100之濃度,在顯示異常值的情況下,對於使用者進行警告動作之構成中,於施加動作中、及施加動作執行後之預設期間,解除警告動作亦可。其原因為,於施加動作中、及施加動作執行後之預設期間,有該開度、該流量及該濃度變為異常值的情況。In addition, the opening of the first flow rate adjustment valve 68, the flow rate measured by the first flow meter 66, and the concentration of the injection channel 63A of the slime control agent or the concentration of the main channel 100 are displayed to the user if abnormal values are displayed. In the configuration of the warning action, the warning action may be canceled during the action and within a preset period after the action is executed. The reason is that the opening, the flow rate, and the concentration may become abnormal values during the application operation and a predetermined period after the application operation is performed.

再者,第二流量調整閥88之開度、第二流量計86測量之流量、及防垢劑之注入流路83A或主流路100之濃度,在顯示異常值的情況下,對於使用者進行警告動作之構成中,於施加動作中、及施加動作執行後之預設期間,解除警告動作亦可。其原因為,於施加動作中、及施加動作執行後之預設期間,有該開度、該流量及該濃度變為異常值的情況。Furthermore, the opening degree of the second flow rate adjustment valve 88, the flow rate measured by the second flow meter 86, and the concentration of the injection channel 83A of the antiscalant agent or the concentration of the main channel 100 are displayed to the user when abnormal values are displayed. In the configuration of the warning action, the warning action may be canceled during the action and within a preset period after the action is executed. The reason is that the opening, the flow rate, and the concentration may become abnormal values during the application operation and a predetermined period after the application operation is performed.

(本實施態樣之控制處理) 接著,說明有關本實施態樣之控制處理之一例。圖4為表示經由控制裝置160執行之控制處理之流程之一例的流程圖。尚,圖4為表示第一注入部62中之控制處理者,以下雖說明有關第一注入部62中之控制處理,但第二注入部82中亦執行與第一注入部62相同之控制處理。 (Control processing of this embodiment) Next, an example of control processing related to this embodiment will be described. FIG. 4 is a flowchart showing an example of the flow of control processing executed via the control device 160 . Still, FIG. 4 shows the control process in the first injection unit 62. Although the control process in the first injection unit 62 will be described below, the same control process as the first injection unit 62 is also executed in the second injection unit 82. .

本控制處理係處理器161從儲存器163讀出控制程式163A,經由執行來進行。本控制處理,作為一例,以超純水製造系統10開始運轉而開始執行。This control process is performed by the processor 161 reading the control program 163A from the memory 163 and executing it. This control process is executed when the operation of the ultrapure water production system 10 is started, as an example.

處理器161如圖4所示,當開始本控制處理時,首先於第一注入部62使黏泥控制劑的注入開始(步驟S101),並移往步驟102。黏泥控制劑的注入中,處理器161依據第一流量計66之測量結果,以將注入流路63B中之黏泥控制劑之流量維持在預設流量的方式,控制第一流量調整閥68之開度。As shown in FIG. 4 , the processor 161 starts the injection of the slime control agent in the first injection unit 62 when starting this control process (step S101 ), and then proceeds to step 102 . During the injection of the slime control agent, the processor 161 controls the first flow adjustment valve 68 according to the measurement result of the first flow meter 66 to maintain the flow rate of the slime control agent in the injection channel 63B at a preset flow rate. The opening.

在步驟S102中,處理器161係判斷超純水製造系統10之運轉時間是否經過預設時間(步驟S102)。預設時間如前述,與因黏泥控制劑之注入在注入流路63B產生阻塞之時間相比較短的時間,作為一例,從100小時以上200小時以下之範圍中設定為預設的值。In step S102, the processor 161 determines whether the operation time of the ultrapure water manufacturing system 10 has passed a preset time (step S102). As mentioned above, the preset time is shorter than the time when the injection channel 63B is clogged due to the injection of the slime control agent. For example, it is set to a preset value within the range of 100 hours to 200 hours.

處理器161判斷超純水製造系統10之運轉時間經過預設時間的情況下(步驟S102:YES),對第一流量調整閥68執行施加衝擊於注入流路63B中之黏泥控制劑的施加動作(步驟S104),並重置超純水製造系統10之運轉時間之量測(步驟S106),回到步驟S102。When the processor 161 judges that the operating time of the ultrapure water production system 10 has passed the preset time (step S102: YES), the application of the slime control agent that impacts the injection flow path 63B is performed on the first flow regulating valve 68 Action (step S104), and reset the measurement of the running time of the ultrapure water manufacturing system 10 (step S106), and return to step S102.

處理器161判斷超純水製造系統10之運轉時間沒有經過預設時間的情況下(步驟S102:NO),移往步驟S108。When the processor 161 judges that the operation time of the ultrapure water production system 10 has not passed the preset time (step S102: NO), it moves to step S108.

在步驟S108中,處理器161判斷第一流量調整閥68之開度是否為預設開度以上。預設開度如前述,作為一例,被設定為從70%~90%之範圍中預設的值。In step S108 , the processor 161 determines whether the opening of the first flow regulating valve 68 is greater than or equal to a preset opening. As mentioned above, the preset opening degree is set to a preset value in the range of 70% to 90% as an example.

處理器161判斷第一流量調整閥68之開度為預設開度以上的情況下(步驟S108:YES),對第一流量調整閥68執行施加衝擊於注入流路63B中之黏泥控制劑的施加動作(步驟S104),並重置超純水製造系統10之運轉時間之量測(步驟S106),回到步驟S102。When the processor 161 judges that the opening degree of the first flow regulating valve 68 is greater than the preset opening degree (step S108: YES), the first flow regulating valve 68 is executed to inject the slime control agent into the injection channel 63B. (step S104), and reset the measurement of the running time of the ultrapure water manufacturing system 10 (step S106), and return to step S102.

處理器161判斷第一流量調整閥68之開度小於預設開度的情況下(步驟S108:NO),不經過步驟S104、S106,回到步驟S102。When the processor 161 judges that the opening degree of the first flow regulating valve 68 is smaller than the preset opening degree (step S108: NO), it returns to step S102 without going through steps S104 and S106.

尚,本實施態樣中,超純水製造系統10之運轉停止的情況下,無關於正在執行任一步驟,終止本控制處理。本控制處理之上述順序為一例,作為本控制處理可使用各種之順序。本控制處理中,例如僅進行步驟S102之判斷及步驟S108之判斷任一方的構成亦可。Also, in this embodiment, when the operation of the ultrapure water production system 10 is stopped, this control process is terminated regardless of whether any step is being executed. The above-mentioned procedure of this control process is an example, and various procedures can be used as this control process. In this control process, for example, only one of the determination in step S102 and the determination in step S108 may be performed.

(純水製造方法中之藥劑注入方法) 本實施態樣中,經由執行前述之控制處理,如下所述,來執行製造純水之純水製造方法中之藥劑注入方法。本藥劑注入方法構成純水製造方法之一部分程序,具有注入程序及施加程序。 (Pharmaceutical injection method in pure water production method) In this embodiment, by executing the aforementioned control process, the chemical injection method in the pure water production method for producing pure water is performed as follows. This chemical injection method constitutes a part of the pure water production method, and has an injection process and an application process.

在注入程序中,對於被處理水流動之主流路100,在相對於設在主流路100之第一逆滲透膜裝置38之上游側,通過第一注入路徑63及第二注入路徑83注入藥劑(黏泥控制劑及防垢劑)。該藥劑之注入中,依據第一流量計66及第二流量計86之測量結果,以將注入流路63B、83B中之藥劑之流量維持在預設流量的方式,控制第一流量調整閥68及第二流量調整閥88之開度。In the injection process, for the main channel 100 where the water to be treated flows, on the upstream side relative to the first reverse osmosis membrane device 38 arranged in the main channel 100, the medicament is injected through the first injection path 63 and the second injection path 83 ( slime control agent and anti-fouling agent). During the injection of the medicine, the first flow rate adjustment valve 68 is controlled in such a way that the flow rate of the medicine in the injection channels 63B, 83B is maintained at a preset flow rate based on the measurement results of the first flowmeter 66 and the second flowmeter 86 And the opening degree of the second flow regulating valve 88.

在施加程序中,執行施加衝擊於第一注入路徑63及第二注入路徑83內之藥劑(黏泥控制劑及防垢劑)的施加動作。在本實施態樣中,第一流量調整閥68及第二流量調整閥88以變化為全閉狀態及全開狀態,如前述,來執行施加動作。In the application process, the action of applying the chemicals (sludge control agent and anti-fouling agent) impacted in the first injection path 63 and the second injection path 83 is performed. In this embodiment, the first flow rate adjustment valve 68 and the second flow rate adjustment valve 88 are changed into a fully closed state and a fully open state, as described above, to perform the applying operation.

(本實施態樣之作用功效) 如上述,若經由本實施態樣之藥劑注入系統60,對於主流路100,在相對於第一逆滲透膜裝置38之上游側,通過第一注入路63及第二注入路83注入藥劑(黏泥控制劑及防垢劑)。接著,在藥劑注入系統60中,第一流量調整閥68及第二流量調整閥88施加衝擊於第一注入路徑63及第二注入路徑83內之藥劑(黏泥控制劑及防垢劑)。藉此,即使在該藥劑之成分附著於第一注入路徑63及第二注入路徑83內之情況,該成分也容易從第一注入路徑63及第二注入路徑83剝離。因此,可抑制第一注入路徑63及第二注入路徑83之阻塞。 (Efficacy of this embodiment) As mentioned above, if through the drug injection system 60 of this embodiment, the main channel 100 is on the upstream side relative to the first reverse osmosis membrane device 38, and the drug (viscosity) is injected through the first injection channel 63 and the second injection channel 83. mud control agent and anti-fouling agent). Next, in the chemical injection system 60 , the first flow regulating valve 68 and the second flow regulating valve 88 apply impact to the chemical (sludge control agent and anti-fouling agent) in the first injection path 63 and the second injection path 83 . Thereby, even when a component of the drug adheres to the first injection path 63 and the second injection path 83 , the component is easily peeled off from the first injection path 63 and the second injection path 83 . Therefore, clogging of the first injection path 63 and the second injection path 83 can be suppressed.

又,在藥劑注入系統60中,第一流量調整閥68及第二流量調整閥88以變化為全閉狀態及全開狀態,來施加衝擊於藥劑(黏泥控制劑及防垢劑)。藉此,第一流量調整閥68及第二流量調整閥88相比於分別設置施加衝擊於藥劑之施加部的構成,可減少部件數。In addition, in the chemical injection system 60, the first flow rate adjustment valve 68 and the second flow rate adjustment valve 88 are changed to a fully closed state and a fully open state to apply impact to the chemical agent (sludge control agent and anti-fouling agent). Thereby, the number of parts can be reduced in the first flow rate adjustment valve 68 and the second flow rate adjustment valve 88 compared with the structure in which the application part which applies impact to the medicine is respectively provided.

又,在藥劑注入系統60中,第一流量調整閥68及第二流量調整閥88交替連續地複數次變化為全閉狀態及全開狀態,因此相比於第一流量調整閥68及第二流量調整閥88一次變化為全閉狀態及全開狀態的情況,對於藥劑(黏泥控制劑及防垢劑)可施加有效的衝擊。In addition, in the medicine injection system 60, the first flow rate adjustment valve 68 and the second flow rate adjustment valve 88 alternately and continuously change to the fully closed state and the fully open state multiple times, so compared with the first flow rate adjustment valve 68 and the second flow rate When the adjustment valve 88 is changed to the fully closed state and the fully open state at one time, an effective impact can be applied to the chemicals (sludge control agent and anti-fouling agent).

又,在藥劑注入系統60中,由於第一流量調整閥68及第二流量調整閥88最初為全開狀態,可讓藥劑(黏泥控制劑及防垢劑)最初在第一注入路徑63及第二注入路徑83之流量較多。藉此,即使在該藥劑之成分附著於第一注入路徑63及第二注入路徑83內之情況,該成分也容易從第一注入路徑63及第二注入路徑83剝離。因此,可抑制第一注入路徑63及第二注入路徑83之阻塞。Also, in the chemical injection system 60, since the first flow regulating valve 68 and the second flow regulating valve 88 are fully open initially, the chemical (sludge control agent and anti-fouling agent) can initially flow through the first injection path 63 and the second flow regulating valve. Second, the flow rate of the injection path 83 is relatively large. Thereby, even when a component of the drug adheres to the first injection path 63 and the second injection path 83 , the component is easily peeled off from the first injection path 63 and the second injection path 83 . Therefore, clogging of the first injection path 63 and the second injection path 83 can be suppressed.

又,在藥劑注入系統60中,第一流量調整閥68及第二流量調整閥88之開度為預設開度以上的情況,對於第一流量調整閥68及第二流量調整閥88進行施加衝擊於藥劑(黏泥控制劑及防垢劑)之施加控制。In addition, in the medicine injection system 60, when the opening degrees of the first flow rate regulating valve 68 and the second flow rate regulating valve 88 are greater than or equal to the preset opening degrees, the first flow rate regulating valve 68 and the second flow rate regulating valve 88 are applied. Impact on the application control of chemicals (slime control agent and anti-fouling agent).

藉此,在第一流量調整閥68及第二流量調整閥88中,注入流路63B、83B之阻塞開始產生而開度變大時,施加衝擊於藥劑(黏泥控制劑及防垢劑),可抑制該阻塞。In this way, when the first flow rate adjustment valve 68 and the second flow rate adjustment valve 88 start to be clogged and the openings of the injection channels 63B and 83B become larger, an impact is applied to the chemicals (sludge control agent and antifouling agent). , which suppresses the blockage.

又,在藥劑注入系統60中,在超純水製造系統10之運轉時間進行預設時間的情況下,對於第一流量調整閥68及第二流量調整閥88進行施加衝擊於藥劑(黏泥控制劑及防垢劑)之施加控制。In addition, in the chemical injection system 60, when the operating time of the ultrapure water production system 10 is set for a predetermined time, the first flow rate adjustment valve 68 and the second flow rate adjustment valve 88 are impacted on the chemical agent (slime control). agent and antiscalant) application control.

藉此,通過注入路徑63、83注入藥劑(黏泥控制劑及防垢劑),注入流路63B、83B之阻塞經時地開始產生時,施加衝擊於該藥劑,可抑制該阻塞。Thereby, when the chemicals (sludge control agent and anti-scaling agent) are injected through the injection paths 63 and 83 and clogging of the injection flow paths 63B and 83B starts to occur over time, impact can be applied to the chemicals to suppress the clogging.

又,在藥劑注入系統60中,第一注入路徑63係至少注入流路63B之流路徑長比主流路100之流路徑長小。又,第二注入路徑83係至少注入流路83B之流路徑長比主流路100之流路徑長小。In addition, in the drug injection system 60 , the flow path length of at least the injection flow path 63B of the first injection path 63 is smaller than the flow path length of the main path 100 . In addition, in the second injection path 83 , at least the flow path length of the injection flow path 83B is smaller than the flow path length of the main flow path 100 .

像這樣,注入流路63B、83B之流路徑長比主流路100之流路徑長小,在注入流路63B、83B容易產生阻塞的構成中,施加衝擊於藥劑(黏泥控制劑及防垢劑),可抑制注入流路63B、83B之阻塞。In this way, the flow path length of the injection flow paths 63B and 83B is shorter than the flow path length of the main flow path 100, and in the configuration in which the injection flow paths 63B and 83B are prone to clogging, an impact is applied to the chemicals (sludge control agent and anti-fouling agent). ), can suppress the clogging of injection channel 63B, 83B.

如上述,在超純水製造系統10中,於藥劑注入系統60,藉由施加衝擊於藥劑,可抑制注入流路63B、83B之阻塞。其結果,藥劑對於主流路100適切地被注入,可抑制純水之品質低下。As described above, in the ultrapure water production system 10 , in the chemical injection system 60 , the clogging of the injection channels 63B and 83B can be suppressed by applying an impact to the chemical. As a result, the chemical is appropriately injected into the main flow path 100, and it is possible to suppress the deterioration of the quality of pure water.

(評價) 在本評價中,進行有關以下實施例1及比較例1之「注入流路63B、83B之阻塞之抑制效果」之評價。 (evaluate) In this evaluation, the evaluation of "the effect of suppressing the clogging of the injection channel 63B, 83B" of the following Example 1 and Comparative Example 1 was performed.

(實施例1) 在實施例1中,一邊執行如圖4所示之前述控制處理,一邊進行超純水製造系統10之運轉。在實施例1中,步驟S102中之預設時間為168小時。步驟S108中之預設開度為90%之開度。在實施例1中,以交替連續地十次變化第一流量調整閥68及第二流量調整閥88為全閉狀態及全開狀態,來執行施加動作。此時,每三秒切換全閉狀態及全開狀態之各者。 (Example 1) In Embodiment 1, the operation of the ultrapure water production system 10 is performed while executing the aforementioned control processing as shown in FIG. 4 . In Embodiment 1, the preset time in step S102 is 168 hours. The preset opening degree in step S108 is 90% opening degree. In Embodiment 1, the applying operation is performed by alternately and continuously changing the first flow rate adjustment valve 68 and the second flow rate adjustment valve 88 to the fully closed state and the fully open state ten times. At this time, each of the fully closed state and the fully open state is switched every three seconds.

(比較例1) 在比較例1中,不執行如圖4所示之前述控制處理,進行超純水製造系統10之運轉。因此,在比較例1中,沒有執行第一流量調整閥68及第二流量調整閥88之施加動作。 (comparative example 1) In Comparative Example 1, the operation of the ultrapure water production system 10 was performed without executing the aforementioned control process as shown in FIG. 4 . Therefore, in Comparative Example 1, the application operation of the first flow rate adjustment valve 68 and the second flow rate adjustment valve 88 was not performed.

(評價結果) 在實施例1中,進行超純水製造系統10之運轉,至少三年間,注入流路63B、83B、第一流量調整閥68、及第二流量調整閥88中,沒有發生阻塞之問題。 (Evaluation results) In Example 1, the operation of the ultrapure water production system 10 was carried out. For at least three years, there was no problem of clogging in the injection channels 63B, 83B, the first flow regulating valve 68, and the second flow regulating valve 88.

相對於此,在比較例1中,進行超純水製造系統10之運轉,大約三個月的程度,在注入流路63B、83B中之第一流量調整閥68及第二流量調整閥88之任一者的位置發生阻塞的問題,第一流量調整閥68及第二流量調整閥88之至少一方的維護變為必要。On the other hand, in Comparative Example 1, the operation of the ultrapure water production system 10 was carried out for about three months. The clogging of any one position requires maintenance of at least one of the first flow rate adjustment valve 68 and the second flow rate adjustment valve 88 .

(變形例) 在本實施態樣中,第一流量調整閥68及第二流量調整閥88作為施加衝擊於藥劑之施加部的一例來產生功能,但其非限制性。作為施加部的一例,例如具有與第一流量調整閥68及第二流量調整閥88分開設置之施加部亦可。作為該施加部,例如可使用產生超音波等之振動的產生器、或密接部件於構成注入流路63B、83B之管道的機器等。該產生器或機器例如連接於構成注入流路63B、83B之管道。 (Modification) In the present embodiment, the first flow rate adjustment valve 68 and the second flow rate adjustment valve 88 function as an example of an application unit that applies impact to the medicine, but this is not limiting. As an example of an application part, you may have the application part provided separately from the 1st flow rate adjustment valve 68 and the 2nd flow rate adjustment valve 88, for example. As the application unit, for example, a generator that generates vibrations such as ultrasonic waves, or a device in which members are in close contact with pipes constituting the injection channels 63B and 83B, or the like can be used. This generator or machine is connected, for example, to the pipes constituting the injection channels 63B, 83B.

又,在本實施態樣中,施加衝擊於藥劑(黏泥控制劑及防垢劑)之施加動作,在第一流量調整閥68及第二流量調整閥88執行,但其非限制性。例如,超純水製造系統10之使用者,經由手動,敲擊構成注入流路63B、83B之管道等,來執行施加動作亦可。尚,在這些方法中,雖不期望經由第一流量調整閥68及第二流量調整閥88之開閉來直接地解除阻塞,但可利用振動藥劑或沉澱物等來去除。Also, in this embodiment, the action of applying impact to the chemicals (sludge control agent and anti-fouling agent) is performed at the first flow rate adjustment valve 68 and the second flow rate adjustment valve 88, but this is not limiting. For example, the user of the ultrapure water production system 10 may perform the application operation by manually tapping the pipes constituting the injection channels 63B and 83B. Still, in these methods, although it is not expected to directly unblock through the opening and closing of the first flow rate adjustment valve 68 and the second flow rate adjustment valve 88, it can be removed by vibrating chemicals or sediment.

又,在本實施態樣中,藥劑注入系統60係作為藥劑之一例,注入黏泥控制劑及防垢劑,但其非限制性。藥劑注入系統60例如為注入黏泥控制劑及防垢劑之一方的構成亦可。藥劑注入系統60除了注入黏泥控制劑及防垢劑之至少一方、或替代地注入其他藥劑(例如,pH調整劑)之構成亦可。注入其他藥劑的情況,亦可使用與第一注入部62及第二注入部82相同之構成。Also, in this embodiment, the chemical injection system 60 is used as an example of the chemical to inject the slime control agent and anti-fouling agent, but it is not limiting. For example, the chemical injection system 60 may be configured to inject one of the slime control agent and the anti-fouling agent. The chemical injection system 60 may be configured to inject at least one of the sludge control agent and the anti-fouling agent, or to inject other chemical agents (for example, a pH adjuster) instead. When injecting other medicines, the same configuration as that of the first injection part 62 and the second injection part 82 can also be used.

又,在本實施態樣中,第一流量調整閥68及第二流量調整閥88以交替連續地複數次變化為全閉狀態及全開狀態,來執行施加動作,但其非限制性。第一流量調整閥68及第二流量調整閥88例如以一次變化為全閉狀態及全開狀態,來執行施加動作亦可,若能施加衝擊於藥劑即可。Also, in this embodiment, the first flow rate regulating valve 68 and the second flow rate regulating valve 88 alternately and continuously change to the fully closed state and the fully open state multiple times to perform the application operation, but this is not restrictive. The first flow rate adjustment valve 68 and the second flow rate adjustment valve 88 may be changed to a fully closed state and a fully open state at one time, for example, to execute the application operation, as long as the impact can be applied to the medicine.

又,在本實施態樣中,第一流量調整閥68及第二流量調整閥88以最初為全開狀態後變化為全閉狀態,來執行施加動作,但其非限制性。第一流量調整閥68及第二流量調整閥88例如以最初為全閉狀態後變化為全開狀態,來執行施加動作亦可,若能施加衝擊於藥劑即可。Also, in this embodiment, the first flow rate adjustment valve 68 and the second flow rate adjustment valve 88 are initially fully open and then changed to a fully closed state to perform the application operation, but this is not restrictive. For example, the first flow rate adjustment valve 68 and the second flow rate adjustment valve 88 may be initially fully closed and then changed to a fully open state to perform the application operation, as long as the impact can be applied to the medicine.

又,在本實施態樣中,第一注入路徑63係注入流路63A之另一端在主流路100上,連接於過濾裝置30與第二幫浦34之間的部分,但其非限制性。注入流路63A之另一端在主流路100上,連接在相對於第一逆滲透膜裝置38之上游側亦可。換言之,第一注入部62至少若為在相對於第一逆滲透膜裝置38之上游側注入黏泥控制劑之構成亦可。Also, in this embodiment, the other end of the first injection path 63A is the part between the filter device 30 and the second pump 34 on the main flow path 100 , but it is not limited thereto. The other end of the injection channel 63A may be connected to the upstream side of the first reverse osmosis membrane device 38 on the main channel 100 . In other words, the first injection part 62 may be configured to inject the slime control agent at least upstream of the first reverse osmosis membrane device 38 .

又,在本實施態樣中,第二注入路徑83係注入流路83A之另一端在主流路100上,連接於過濾裝置30與第二幫浦34之間的部分,但其非限制性。注入流路83A之另一端在主流路100上,連接在相對於第一逆滲透膜裝置38之上游側亦可。換言之,第二注入部82至少若為在相對於第一逆滲透膜裝置38之上游側注入防垢劑之構成亦可。Also, in this embodiment, the second injection path 83 is the part where the other end of the injection flow path 83A is on the main flow path 100 and connected between the filter device 30 and the second pump 34 , but it is not limiting. The other end of the injection channel 83A may be connected to the upstream side of the first reverse osmosis membrane device 38 on the main channel 100 . In other words, the second injection part 82 may be at least as long as it injects the anti-fouling agent on the upstream side with respect to the first reverse osmosis membrane device 38 .

本揭露之技術不限於上述之實施態樣,不背離其主旨之範圍內之各種變形、變更、改良為可能的。例如,上述所示之變形例,組合合適、複數之構成亦可。The technology disclosed in this disclosure is not limited to the above-mentioned embodiments, and various modifications, changes, and improvements are possible within the range not departing from the gist thereof. For example, the modified examples shown above may be combined appropriately or plurally configured.

2021年10月13日申請之日本特許出願2021-168348號之揭示係經由參照其整體而被包含於本說明書。本說明書所載全部文獻、專利申請、及技術規格,與各個文獻、專利申請及技術規格具體且分別記載情形相同的,經由參照包含於本說明書。The disclosure of Japanese Patent Application No. 2021-168348 filed on October 13, 2021 is incorporated herein by reference in its entirety. All documents, patent applications, and technical specifications contained in this specification are included in this specification by reference, as they are specifically and separately described in each document, patent application, and technical specification.

第一態樣之藥劑注入系統包含容置藥劑之容置部;對於流動被處理水之流路,在相對於設置於前述流路之逆滲透膜裝置的上游側,注入前述容置部之前述藥劑之注入路徑;及設置於前述注入路徑,並施加衝擊至前述藥劑之施加部。The chemical injection system of the first aspect includes a container part for containing the chemical agent; for the flow channel where the water to be treated flows, on the upstream side relative to the reverse osmosis membrane device installed in the aforementioned flow channel, the aforementioned an injection path of the medicine; and an application part arranged in the injection path and applying impact to the medicine.

經由第一態樣之藥劑注入系統,對於被處理水流動之流路,相對於設在該流路之逆滲透膜裝置之上游側,通過注入路徑來注入藥劑。接著,第一態樣之藥劑注入系統中,設置於注入路之施加部施加衝擊於藥劑。藉此,即使藥劑之成分附著於注入路徑內的情況,該成分容易從注入路徑剝離。因此,可抑制注入路徑之阻塞。In the chemical injection system of the first aspect, the chemical is injected through the injection path on the upstream side of the reverse osmosis membrane device provided in the flow path in which the water to be treated flows. Next, in the drug injection system of the first aspect, the impact is applied to the drug by the application portion provided in the injection path. Thereby, even if a component of the medicine adheres to the injection path, the component is easily peeled off from the injection path. Therefore, clogging of the injection path can be suppressed.

第二態樣之藥劑注入系統,在第一態樣中,前述施加部係設置於前述注入路徑,經由開度來調整前述藥劑之流量之調整閥,以變化為全閉狀態與全開狀態,來施加衝擊至前述藥劑。In the second aspect of the drug injection system, in the first aspect, the aforementioned application part is provided in the aforementioned injection path, and the adjustment valve that adjusts the flow rate of the aforementioned drug through the opening degree can be changed into a fully closed state and a fully open state. A shock is applied to the aforementioned dose.

在第二態樣中,作為經由開度來調整藥劑之流量之施加部的調整閥,以變化為全閉狀態與全開狀態,來施加衝擊至藥劑。藉此,調整閥與單獨設置施加部之構成相比,可減少部件數。In the second aspect, the adjustment valve, which is an application part that adjusts the flow rate of the medicine through the opening degree, is changed between a fully closed state and a fully open state to apply a shock to the medicine. Thereby, the adjustment valve can reduce the number of parts compared with the structure which separately provided the application part.

第三態樣之藥劑注入系統,在第二態樣中,前述施加部以交替連續地複數次變化為前述全閉狀態與前述全開狀態,來施加衝擊至前述藥劑。In the medicine injection system according to a third aspect, in the second aspect, the application unit alternately and continuously changes to the fully closed state and the fully opened state multiple times to apply impact to the medicine.

像這樣,在第三態樣中,由於施加部以交替連續地複數次變化為全閉狀態與全開狀態,相比於施加部以一次變化為全閉狀態與全開狀態的情況,可對於藥劑施加有效的衝擊。Like this, in the third aspect, since the application part alternately and continuously changes to the fully closed state and the fully open state a plurality of times, compared with the case where the application part changes to the fully closed state and the fully open state once, it is possible to apply the medicine. effective shock.

第四態樣之藥劑注入系統,在第二態樣或第三態樣中,前述施加部以最初為前述全開狀態後變化為前述全閉狀態,來施加衝擊至前述藥劑。In the drug injection system according to a fourth aspect, in the second aspect or the third aspect, the application unit is initially in the fully open state and then changes to the fully closed state to apply an impact to the drug.

在第四態樣中,由於施加部最初為全開狀態,可讓藥劑最初在注入路徑之流量較多。藉此,即使藥劑之成分附著於注入路徑內的情況,該成分容易從注入路徑剝離。因此,可抑制注入路徑之阻塞。In the fourth aspect, since the applicator is initially fully opened, the initial flow of the medicine in the injection path is large. Thereby, even if a component of the medicine adheres to the injection path, the component is easily peeled off from the injection path. Therefore, clogging of the injection path can be suppressed.

第五態樣之藥劑注入系統,在第二態樣~第四態樣任一者中,更包含量測前述注入路徑中之前述藥劑之流量之量測部;根據前述量測部之量測結果,控制前述調整閥之前述開度,來將前述注入路徑中之前述藥劑之流量維持於預設流量之流量控制部;在前述開度為預設開度以上的情況下,對於前述施加部進行施加衝擊至前述藥劑之控制之施加控制部。The drug injection system of the fifth aspect, in any one of the second to fourth aspects, further includes a measurement unit for measuring the flow rate of the aforementioned drug in the aforementioned injection path; according to the measurement of the aforementioned measurement unit As a result, the flow control unit that controls the opening of the regulating valve to maintain the flow of the medicament in the injection path at a preset flow rate; An application control unit for controlling the application of impact to the aforementioned medicine.

經由第五態樣,作為施加部之調整閥中,注入流路之阻塞開始產生而開度變大時,施加衝擊於藥劑,可抑制該阻塞。According to the fifth aspect, when the opening of the injection flow path starts to be blocked in the regulating valve as the application unit, the drug can be impacted to suppress the blockage.

第六態樣之藥劑注入系統,在第一態樣~第五態樣任一者中,更包含在預設時間進行前述容置部之前述藥劑中通過前述注入路徑往前述流路之注入後的情況下,對於前述施加部進行施加衝擊至前述藥劑之控制之施加控制部。The drug injection system of the sixth aspect, in any one of the first aspect to the fifth aspect, further includes performing injection of the aforementioned drug in the aforementioned accommodating portion through the aforementioned injection path into the aforementioned flow path at a predetermined time. In the case of , an application control unit that controls the application of an impact on the drug to the application unit.

經由第六態樣,通過注入路徑注入藥劑,注入流路之阻塞經時地開始產生時,施加衝擊於藥劑,可抑制該阻塞。According to the sixth aspect, when the medicine is injected through the injection channel and clogging of the injection channel starts to occur over time, the clogging can be suppressed by applying an impact to the medicine.

第七態樣之藥劑注入系統,在第一態樣~第六態樣任一者中,前述注入路徑之流路徑長係小於前述流路之流路徑長。In the drug injection system of the seventh aspect, in any one of the first aspect to the sixth aspect, the flow path length of the injection path is shorter than the flow path length of the flow path.

如第七態樣,以注入路徑之流路徑長小於流路之流路徑長,在注入路徑容易產生阻塞之構成中,施加衝擊於藥劑,可抑制該阻塞。As in the seventh aspect, the flow path length of the injection path is smaller than the flow path length of the flow path, and in a configuration in which the injection path is prone to clogging, the clogging can be suppressed by applying an impact to the medicine.

第八態樣之純水製造系統係包含流動被處理水之流路;設於前述流路之逆滲透膜裝置;對於前述流路,在相對於前述逆滲透膜裝置之上游側,注入前述容置部之前述藥劑之如第一態樣~第七態樣任一者所述的藥劑注入系統。The pure water production system of the eighth aspect includes a flow channel for flowing water to be treated; a reverse osmosis membrane device installed in the aforementioned flow channel; The medicine injection system described in any one of the first aspect to the seventh aspect of the medicine mentioned above.

在第八態樣,藥劑注入系統中,藉由施加衝擊於藥劑,可抑制注入路之阻塞。其結果,藥劑對於流路適切地被注入,可抑制純水之品質低下。In the eighth aspect, in the drug injection system, by applying an impact to the drug, it is possible to suppress clogging of the injection path. As a result, the chemical agent is appropriately injected into the flow path, and it is possible to suppress the deterioration of the quality of pure water.

第九態樣之純水製造方法係包含對於流動被處理水之流路,在相對於設置於前述流路之逆滲透膜裝置的上游側,通過注入路徑注入藥劑之步驟;及施加衝擊至前述注入路徑內之前述藥劑之步驟。The pure water production method of the ninth aspect includes the steps of injecting a chemical agent through the injection path on the upstream side of the reverse osmosis membrane device installed in the flow path of the flow path of the water to be treated; and applying impact to the aforementioned flow path. The step of injecting the aforementioned medicines in the path.

經由第九態樣之純水製造方法,對於流動被處理水之流路,在相對於設置於流路之逆滲透膜裝置的上游側,通過注入路徑注入藥劑。接著,施加衝擊至注入路徑內之藥劑。藉此,即使藥劑之成分附著於注入路徑內的情況,該成分容易從注入路徑剝離。因此,可抑制注入路徑之阻塞。According to the pure water production method of the ninth aspect, the chemical agent is injected through the injection path on the upstream side with respect to the reverse osmosis membrane device provided in the flow path through which the water to be treated flows. Then, an impact is applied to the medicine in the injection path. Thereby, even if a component of the medicine adheres to the injection path, the component is easily peeled off from the injection path. Therefore, clogging of the injection path can be suppressed.

以上概述了數個實施例的部件、使得在本發明所屬技術領域中具有通常知識者可以更理解本發明實施例的概念。在本發明所屬技術領域中具有通常知識者應該理解、可以使用本發明實施例作為基礎、來設計或修改其他製程和結構、以實現與在此所介紹的實施例相同的目的及/或達到相同的好處。在本發明所屬技術領域中具有通常知識者也應該理解、這些等效的結構並不背離本發明的精神和範圍、並且在不背離本發明的精神和範圍的情況下、在此可以做出各種改變、取代和其他選擇。因此、本發明之保護範圍當視後附之申請專利範圍所界定為準。The components of several embodiments are outlined above, so that those skilled in the art of the present invention can better understand the concepts of the embodiments of the present invention. Those with ordinary knowledge in the technical field of the present invention should understand that the embodiments of the present invention can be used as a basis to design or modify other processes and structures to achieve the same purpose and/or achieve the same as the embodiments described herein. the benefits of. Those skilled in the art to which the present invention pertains should understand that these equivalent constructions do not depart from the spirit and scope of the present invention, and that various modifications can be made herein without departing from the spirit and scope of the present invention. Changes, substitutions and other options. Therefore, the scope of protection of the present invention should be defined by the scope of the appended patent application.

10:超純水製造系統(純水製造系統之一例) 12:一次純水裝置 14:被處理水區域 18:第一幫浦 20:流量計 22:熱交換器 24:活性碳裝置 26:紫外線氧化裝置 30:過濾裝置 34:第二幫浦 38:第一逆滲透膜裝置(逆滲透膜裝置之一例) 40:去離子水區域 42:電析式去離子裝置 44:離子交換樹脂裝置 46:純水槽 48:第二逆滲透膜裝置 50:第三幫浦 52:廢水區域 60:藥劑注入系統 62:第一注入部 63:第一注入路徑(注入路徑之一例) 63A:注入流路 63B:注入流路 64:第一射出器 64A:吸入口 66:第一流量計(量測部之一例) 68:第一流量調整閥(施加部之一例、調整閥之一例) 70:第一槽(容置部之一例) 82:第二注入部 83:第二注入路徑(注入路徑之一例) 83A:注入流路 83B:注入流路 84:第二射出器 84A:吸入口 86:第二流量計(量測部之一例) 88:第二流量調整閥(施加部之一例、調整閥之一例) 90:第二槽(容置部之一例) 100:主流路 102:分岐流路 104:分岐流路 112:二次純水裝置 120:使用點 160:控制裝置 161:處理器 161A:取得部 161B:流量控制部 161C:施加控制部 162:記憶體 163:儲存器 163A:控制程式 164:計時器 10: Ultrapure water manufacturing system (an example of a pure water manufacturing system) 12: Primary pure water device 14: Treated water area 18: The first pump 20: flow meter 22: Heat exchanger 24: Activated carbon device 26: Ultraviolet oxidation device 30: Filtration device 34:Second pump 38: The first reverse osmosis membrane device (an example of a reverse osmosis membrane device) 40: Deionized water area 42: Electrolytic deionization device 44: Ion exchange resin device 46: pure sink 48: The second reverse osmosis membrane device 50: The third pump 52: Waste water area 60: Drug injection system 62: The first injection part 63: The first injection path (an example of the injection path) 63A: injection flow path 63B: injection flow path 64: The first injector 64A: suction port 66: The first flowmeter (an example of the measurement department) 68: First flow rate adjustment valve (an example of an application part, an example of an adjustment valve) 70: the first tank (an example of accommodating part) 82: The second injection part 83: Second injection path (an example of injection path) 83A: injection flow path 83B: injection flow path 84:Second injector 84A: suction port 86: The second flow meter (an example of the measurement part) 88: Second flow rate adjustment valve (an example of an application part, an example of an adjustment valve) 90: Second tank (an example of accommodating part) 100: main flow 102: branch flow path 104: branch flow path 112: Secondary pure water device 120: point of use 160: Control device 161: Processor 161A: Acquisition Department 161B: Flow Control Department 161C: Applied control part 162: Memory 163: Storage 163A: Control program 164: timer

在以下附圖以及說明中闡述了本說明書中所描述之主題之一或多個實施例的細節。從說明、附圖和申請專利範圍,本說明書之主題的其他特徵、態樣與優點將顯得明瞭,其中: [圖1]為表示本實施態樣之超純水製造系統之概略圖。 [圖2]為表示本實施態樣之超純水製造系統之控制裝置之一例之方塊圖。 [圖3]為表示本實施態樣之超純水製造系統之控制裝置中之處理功能構成一例之方塊圖。 [圖4]為表示經由本實施態樣之控制裝置執行之控制處理之流程之一例的流程圖。 The details of one or more implementations of the subject matter described in this specification are set forth in the accompanying drawings and the description below. Other features, aspects and advantages of the subject matter of this specification will be apparent from the description, drawings and claims, wherein: [ Fig. 1 ] is a schematic diagram showing an ultrapure water production system according to this embodiment. [FIG. 2] It is a block diagram which shows an example of the control apparatus of the ultrapure water manufacturing system of this embodiment. [FIG. 3] It is a block diagram which shows an example of the structure of the processing function in the control apparatus of the ultrapure water manufacturing system of this embodiment. [ Fig. 4 ] is a flowchart showing an example of the flow of control processing executed by the control device of the present embodiment.

10:超純水製造系統(純水製造系統之一例) 10: Ultrapure water manufacturing system (an example of a pure water manufacturing system)

12:一次純水裝置 12: Primary pure water device

14:被處理水區域 14: Treated water area

18:第一幫浦 18: The first pump

20:流量計 20: flow meter

22:熱交換器 22: Heat exchanger

24:活性碳裝置 24: Activated carbon device

26:紫外線氧化裝置 26: Ultraviolet oxidation device

30:過濾裝置 30: Filtration device

34:第二幫浦 34:Second pump

38:第一逆滲透膜裝置(逆滲透膜裝置之一例) 38: The first reverse osmosis membrane device (an example of a reverse osmosis membrane device)

40:去離子水區域 40: Deionized water area

42:電析式去離子裝置 42: Electrolytic deionization device

44:離子交換樹脂裝置 44: Ion exchange resin device

46:純水槽 46: pure sink

48:第二逆滲透膜裝置 48: The second reverse osmosis membrane device

50:第三幫浦 50: The third pump

52:廢水區域 52: Waste water area

60:藥劑注入系統 60: Drug injection system

62:第一注入部 62: The first injection part

63:第一注入路徑(注入路徑之一例) 63: The first injection path (an example of the injection path)

63A:注入流路 63A: injection flow path

63B:注入流路 63B: injection flow path

64:第一射出器 64: The first injector

64A:吸入口 64A: suction port

66:第一流量計(量測部之一例) 66: The first flowmeter (an example of the measurement department)

68:第一流量調整閥(施加部之一例、調整閥之一例) 68: First flow rate adjustment valve (an example of an application part, an example of an adjustment valve)

70:第一槽(容置部之一例) 70: the first tank (an example of accommodating part)

82:第二注入部 82: The second injection part

83:第二注入路徑(注入路徑之一例) 83: Second injection path (an example of injection path)

83A:注入流路 83A: injection flow path

83B:注入流路 83B: injection flow path

84:第二射出器 84:Second injector

84A:吸入口 84A: suction port

86:第二流量計(量測部之一例) 86: The second flow meter (an example of the measurement part)

88:第二流量調整閥(施加部之一例、調整閥之一例) 88: Second flow rate adjustment valve (an example of an application part, an example of an adjustment valve)

90:第二槽(容置部之一例) 90: Second tank (an example of accommodating part)

100:主流路 100: main flow

102:分岐流路 102: branch flow path

104:分岐流路 104: branch flow path

112:二次純水裝置 112: Secondary pure water device

120:使用點 120: point of use

160:控制裝置 160: Control device

Claims (9)

一種藥劑注入系統,其包含: 容置部,其容置藥劑; 注入路徑,其對於流動被處理水之流路,在相對於設置於前述流路之逆滲透膜裝置的上游側,注入前述容置部之前述藥劑;及 施加部,其設置於前述注入路徑,並施加衝擊至前述藥劑。 A medicament injection system comprising: a housing part, which accommodates medicine; An injection path for injecting the chemical agent into the accommodating part on the upstream side of the reverse osmosis membrane device provided in the flow path for the flow path of the water to be treated; and The applying part is arranged in the injection path and applies impact to the medicine. 如請求項1所述的藥劑注入系統,其中前述施加部係設置於前述注入路徑,經由開度來調整前述藥劑之流量之調整閥,以變化為全閉狀態與全開狀態,來施加衝擊至前述藥劑。The drug injection system according to claim 1, wherein the applying part is installed in the injection path, and the adjustment valve that adjusts the flow rate of the drug through the opening is changed to a fully closed state and a fully open state to apply an impact to the aforementioned potion. 如請求項2所述的藥劑注入系統,其中前述施加部以交替連續地複數次變化為前述全閉狀態與前述全開狀態,來施加衝擊至前述藥劑。The drug injection system according to claim 2, wherein the application unit applies an impact to the drug by changing alternately and continuously to the fully closed state and the fully opened state a plurality of times. 如請求項2或3所述的藥劑注入系統,其中前述施加部以最初為前述全開狀態後變化為前述全閉狀態,來施加衝擊至前述藥劑。The drug injection system according to claim 2 or 3, wherein the application unit is initially in the fully open state and then changes to the fully closed state to apply an impact to the drug. 如請求項2或3所述的藥劑注入系統,更包含: 量測部,其量測前述注入路徑中之前述藥劑之流量; 流量控制部,其根據前述量測部之量測結果,控制前述調整閥之前述開度,來將前述注入路徑中之前述藥劑之流量維持於預設流量; 施加控制部,其在前述開度為預設開度以上的情況下,對於前述施加部進行施加衝擊至前述藥劑之控制。 The drug injection system as described in claim 2 or 3, further comprising: a measuring unit, which measures the flow rate of the aforementioned medicament in the aforementioned injection path; a flow control unit, which controls the opening of the adjustment valve according to the measurement result of the measurement unit, so as to maintain the flow of the medicament in the injection path at a preset flow; The application control unit controls the application unit to apply an impact to the medicine when the opening degree is equal to or greater than a preset opening degree. 如請求項1~3任一項所述的藥劑注入系統,更包含: 施加控制部,在預設時間進行前述容置部之前述藥劑中通過前述注入路徑往前述流路之注入後的情況下,對於前述施加部進行施加衝擊至前述藥劑之控制。 The drug injection system as described in any one of claim items 1-3, further comprising: The application control unit controls the application unit to apply an impact to the medicine when the medicine in the storage unit is injected into the flow path through the injection path at a predetermined time. 如請求項1~3任一項所述的藥劑注入系統,其中前述注入路徑之流路徑長係小於前述流路之流路徑長。The drug injection system according to any one of claims 1 to 3, wherein the flow path length of the injection path is smaller than the flow path length of the flow path. 一種純水製造系統,其包含: 流路,其流動被處理水; 逆滲透膜裝置,其設於前述流路;及 如請求項1~3任一項所述的藥劑注入系統,其對於前述流路,在相對於前述逆滲透膜裝置之上游側,注入前述容置部之前述藥劑。 A pure water production system comprising: a flow path through which the treated water flows; A reverse osmosis membrane device installed in the aforementioned flow path; and The agent injection system according to any one of claims 1 to 3, wherein the agent is injected into the accommodating part on the upstream side relative to the reverse osmosis membrane device in the flow path. 一種純水製造方法,其包含: 對於流動被處理水之流路,在相對於設置於前述流路之逆滲透膜裝置的上游側,通過注入路徑注入藥劑之步驟;及 施加衝擊至前述注入路徑內之前述藥劑之步驟。 A method for producing pure water, comprising: For the flow path where the water to be treated flows, on the upstream side relative to the reverse osmosis membrane device provided in the aforementioned flow path, the step of injecting the chemical agent through the injection path; and A step of applying an impact to the aforementioned medicament in the aforementioned injection path.
TW111134302A 2021-10-13 2022-09-12 Medicament infusion system, pure water production system & pure water production method TW202330085A (en)

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