TW202239691A - Pickup collet, pickup apparatus and mounting apparatus capable of picking up electronic parts in a non-contact manner - Google Patents

Abstract

The present invention provides a pickup collet capable of picking up electronic parts in a non-contact manner, a pickup apparatus, and a mounting apparatus. The pickup collet ( 200 ) according to an embodiment is such a pickup collet ( 200 ) that sucks and holds an electronic part ( 2 ) and picks it up. The pickup collet has a porous member ( 201 ). The porous member (201) has the air permeability and ejects the supplied gas into the interior in a planar manner through the pores of a facing surface (201a) facing the electronic part (2). A suction hole (201c) is disposed in the porous member (201). The suction hole (201c) has an opening (201d) on the facing surface (201a) and sucks the electronic part (2) by a negative pressure. A guide portion (201e) that restricts the movement of the electronic part (2) is disposed along the outer edge of the facing surface (201a).

Description

Pick-up collet, pick-up device and installation device

The invention relates to a pickup collet, a pickup device and an installation device.

When mounting electronic components such as logic, memory, and image sensors on a substrate, the wafer on which the semiconductor elements are formed is cut to form individual wafers. Then, the wafers are picked up one by one and transferred to a substrate for mounting.

One surface of the wafer is a functional surface on which fine circuits are formed. When the wafer is picked up from the wafer, if the picked-up member comes into direct contact with the functional surface, circuits and the like may be damaged, so there is a need to avoid contact.

In addition, the connection terminals on the surface of the wafer and the connection terminals on the substrate are joined to face each other. At this time, in order to ensure and improve the bondability of the connection terminals, the surface of the wafer may be subjected to surface treatment such as plasma treatment or surface activation treatment. In order to maintain the surface state of the wafer subjected to such processing, there is also a requirement to avoid direct contact of picked-up members with the surface of the wafer.

In order to meet the requirement that the member does not come into contact with the surface of the wafer, conventionally, in the collet as a member for picking up the wafer, the surface holding the wafer is used as a tapered surface, so that not the surface of the wafer but only the peripheral portion and the tapered surface of the collet The contact state is maintained (see Patent Document 1). [Prior art literature] [Patent Document]

[Patent Document 1] Japanese Patent Application Publication No. 63-124746

[Problem to be Solved by the Invention]

However, in the prior art as described above, there is also contact with the collet at the peripheral portion of the wafer. Therefore, chipping and cracking of the wafer may occur due to contact with the peripheral portion of the surface of the wafer. In addition, the contact between the wafer and the collet inherently results in the generation of particles. Therefore, there is a demand for a collet that can hold even the periphery of the surface of the wafer without contact.

The present invention was made to solve the above-mentioned problems, and an object of the present invention is to provide a pickup collet capable of picking up electronic components without contact, a pickup device, and a mounting device. [Means to solve the problem]

The present invention is a pick-up collet for sucking and holding electronic components and picking them up. The porous member is provided with a gas permeable surface through which the supplied gas passes through the pores on the surface facing the electronic components. The porous member is provided with a suction hole which has an opening on the facing surface and sucks the electronic component by negative pressure, along the outer surface of the facing surface. The edge is provided with a guide that restricts movement of the electronic parts.

In addition, the present invention is a pick-up device for picking up the electronic component from a sheet to which the electronic component is attached, comprising: the pick-up collet; and a collet moving mechanism for bringing the pick-up collet close to the A position in the sheet where the electronic component can be suction-held, and the electronic component held by suction can be peeled off from the sheet and transferred.

In addition, the mounting device of the present invention has: the pick-up device; a bonding head provided so as to be relatively movable with respect to the pick-up collet, and receives the electronic component from the pick-up collet; The electronic components of the bonding head are transferred to the substrate and mounted. [Effect of the invention]

According to the picking collet, picking device and mounting device of the present invention, electronic parts can be picked up in a non-contact manner.

Embodiments of the present invention will be described with reference to the drawings. In addition, the drawings are schematic diagrams, and the dimensions, ratios, etc. of each part include exaggerated parts for easy understanding. As shown in FIGS. 1 and 2 , the pickup collet 200 of this embodiment is used in the transfer device 1 of the electronic component 2 . The transfer device 1 includes a pick-up device 20 , a mounting device 30 , and a control device 50 , and is a device that transfers the electronic component 2 to the mounting device 30 through the pick-up device 20 .

Electronic component 2 is, for example, a wafer-shaped component. In this embodiment, the electronic component 2 is a semiconductor wafer obtained by dividing a wafer into individual pieces. Moreover, the mounting apparatus 100 is an apparatus which mounts the electronic component 2 supplied from the supply apparatus 10 on a board|substrate via transfer by the transfer apparatus 1. As shown in FIG. That is, the mounting apparatus 100 includes the supply apparatus 10 and the substrate stage 60 for supporting the substrate in addition to the structure of the transfer apparatus 1 .

The supply device 10 is a device that supplies the electronic components 2 to the pickup device 20 . The supply apparatus 10 moves the electronic component 2 which is a pick-up object to supply position P1. The supply position P1 is a position where the pick-up device 20 picks up the electronic component 2 as a pick-up object. The supply device 10 includes a supply stage 12 that supports the sheet 11 on which the electronic component 2 is attached, and a stage moving mechanism 13 that moves the supply stage 12 . As the stage moving mechanism 13, for example, a linear guide that moves a slider on a guide rail by a ball screw mechanism driven by a servo motor can be used.

Here, the sheet 11 to which the electronic component 2 is attached is an adhesive wafer sheet attached to a wafer ring not shown. Electronic components 2 are arranged in a matrix on the sheet 11 . In this embodiment, the electronic component 2 is arrange|positioned in the upward state which exposed the functional surface upward.

The supply stage 12 is a stage for horizontally supporting the wafer ring to which the sheet 11 is attached. That is, the supply stage 12 supports the sheet 11 on which the electronic component 2 is attached via the wafer ring. The supply stage 12 is provided so as to be movable in the horizontal direction by an overload stage moving mechanism 13 . Since the sheet 11 is supported horizontally by the supply stage 12 and the stage moving mechanism 13 , the sheet 11 and the electronic components 2 placed on the sheet 11 are also separately provided so as to be movable in the horizontal direction.

In addition, as shown in FIG. 1 , the direction in which the supply device 10 and the mounting device 30 are arranged in the horizontal direction is called the X-axis direction, and the direction perpendicular to the X-axis is called the Y-axis direction. In addition, the direction orthogonal to the plane of the sheet|seat 11 is called Z-axis direction or an up-down direction. The so-called upward direction is the direction of the side on which the electronic component 2 is placed, which is bounded by the plane of the sheet 11, and the direction of the side where the electronic component 2 is not placed is defined by the plane of the sheet 11 direction.

[pickup device] The pick-up device 20 is a device that picks up the electronic components 2 from the supply device 10 and delivers the picked-up electronic components 2 to the mounting device 30 . The pick-up device 20 includes a pick-up collet 200 , a collet moving mechanism 22 , a direction changing part 23 , and a push-up pin 24 .

As shown in FIG. 3(A) and FIG. 3(B) to FIG. 5 , the pickup collet 200 is a member that suction-holds the electronic component 2 and releases the suction-holding to release the electronic component 2 . The pickup collet 200 has a porous member 201 and a base 202 .

The porous member 201 is a member that has air permeability and supplies the gas supplied inside through the pores of the facing surface 201 a facing the electronic component 2 . The porous member 201 of the present embodiment has a rectangular parallelepiped plate shape, and fine spaces connected thereto are formed densely and substantially uniformly as a whole. The porous member 201 has air permeability due to the above-mentioned structure, but its flow conductivity is very small. Either surface of the porous member 201 serves as the facing surface 201a, and when gas is supplied to the inside from the back surface 201b opposite to the facing surface 201a, the gas is ejected from the dense and uniform pores of the facing surface 201a. The discharge is a substantially planar discharge that spreads over the entire surface of the discharge-facing surface 201a. The ejection is extremely slow, so to speak, so to speak, and it is to the extent that a slight airflow is felt close to the fingers. Furthermore, the pores may be blocked on surfaces other than the facing surface 201a and the back surface 201b.

The porous member 201 is a continuous structure in which pores, which are internal micro spaces, communicate with each other and gas can pass between the pores as described above. As such a porous member 201, sintered metal, ceramics, resin, or the like can be used. From the viewpoint that internal particles are difficult to separate and flow out, it is preferable to use a sintered metal.

Furthermore, as shown in FIG. 3(A), FIG. 3(B) and FIG. 4 , the porous member 201 is provided with a suction hole 201c having an opening 201d on the facing surface 201a and The through hole of the electronic component 2 is sucked by negative pressure. The suction hole 201c of this embodiment penetrates linearly from the center of the back surface 201b to the center of the opposing surface 201a.

The susceptor 202 is a member covering the surface of the porous member 201 other than the facing surface 201a. The base 202 of the present embodiment is a rectangular parallelepiped box with an open bottom. The porous member 201 is inserted from the opening of the base 202 so that the bottom surface is exposed as the facing surface 201 a , assembled into the base 202 , and fixed.

As shown in FIG. 3(A), FIG. 3(B) and FIG. 5 , an air supply hole 202 a , an exhaust hole 202 b , and an installation hole 202 c are provided on the top surface of the base 202 . The air supply holes 202 a are through holes for supplying air to the porous member 201 . The air supply hole 202a is formed at a position close to the outer edge of the base 202 due to piping connected to the air supply hole 202a. The exhaust hole 202b is a through hole for generating a negative pressure in the opening 201d via the suction hole 201c. The exhaust holes 202 b extend downward and are formed so as to coincide with the suction holes 201 c of the porous member 201 . A space where gas stays is formed between the inner surface of the susceptor 202 around the exhaust hole 202 b and the porous member 201 . Furthermore, the exhaust hole 202b may also pass through the suction hole 201c to reach the opposite surface 201a. In this case, the suction hole 201c and the opening 201d of the porous member 201 are provided in close contact with the outside of the exhaust hole 202b reaching the facing surface 201a of the porous member 201 . The mounting holes 202c are a pair of recessed holes for preventing misalignment when the collet moving mechanism 22 is connected.

The gas supply hole 202a is connected to a gas supply circuit through a pipe not shown. The supply circuit includes a gas supply source, a pump, a valve, and the like. Here, the gas supplied to the porous member 201 through the gas supply hole 202a is an inert gas. The exhaust hole 202b communicates with a negative pressure generating circuit including a vacuum pump, a valve, and the like through piping not shown.

The collet moving mechanism 22 is a mechanism that reciprocates the pickup head 21 on which the pickup collet 200 is mounted between the supply position P1 and the delivery position P2 and lifts up and down between the supply position P1 and the delivery position P2. In addition, delivery position P2 is a position where the pick-up device 20 delivers the electronic component 2 picked up at the supply position P1 to the bonding head 31 which functions as the receiving part mentioned later. The supply position P1 and the delivery position P2 mainly refer to positions in the XY direction, and do not necessarily refer to positions in the Z-axis direction.

In addition, even when referring to the position (height) in the Z-axis direction, the height has a predetermined width. The predetermined width includes the thickness of the electronic component 2 , the distance for pushing the electronic component 2 up, the distance for the electronic component 2 to be sucked, and the like. In particular, when referring to the position (height) in the Z-axis direction, at the supply position P1, the height at the approaching position is H1, and the height at the peeling position is H2 (see (A) to Fig. 8 ). 8(D)).

The collet moving mechanism 22 has an arm 222a on which the pick-up head 21 is installed, and the pick-up collet 200 mounted on the pick-up head 21 is moved by the moving arm 222a. A detachable part 222b is provided at the front end of the pick-up head 21, and the detachable part 222b includes a magnet inside, and uses the suction force of the magnet to attract and hold the base 202 of the pick-up collet 200. As shown in FIGS. 4 and 5 , a pair of pins 222c are provided on the contact surface of the detachable portion 222b with the base 202 . The pin 222c is fitted into the attachment hole 202c provided in the base 202, thereby preventing the pickup collet 200 from being shifted relative to the detachable portion 222b. In addition, although not shown in figure, the piping connected to the exhaust hole 202b passes through the inside of the detachable part 222b, and the piping connected to the air supply hole 202a is supported by the detachable part 222b.

The collet moving mechanism 22 includes a sliding mechanism 221 and a lifting mechanism 222 . The slide mechanism 221 reciprocates the pickup collet 200 between the supply position P1 and the delivery position P2 by moving the arm 222a on which the pickup head 21 is mounted. Here, the slide mechanism 221 has the guide rail 221b extended parallel to the X-axis direction, and fixed to the support frame 221a, and the slider 221c which runs on the guide rail 221b. Although not shown, the slider 221c is driven by a ball screw driven by a rotary motor, a linear motor, or the like.

The lift mechanism 222 moves the pickup collet 200 in the up-down direction by moving the arm 222a to which the pickup head 21 is attached. Specifically, the lift mechanism 222 may use a linear guide that moves a slider on a guide rail by a ball screw mechanism driven by a servo motor. That is, the pickup collet 200 moves up and down along the Z-axis direction by the drive of the servo motor. Furthermore, the pick-up collet 200 is elastically supported by the pick-up head 21 via the detachable portion 222b, and is provided so as to be able to slide up and down in the Z-axis direction relative to the pick-up head 21 . Furthermore, the pickup head 21 has a sensor for detecting the movement of the slider.

The direction changing part 23 is provided between the pickup collet 200 and the collet moving mechanism 22 . Here, the direction changing unit 23 is an actuator including a driving source such as a motor for changing the orientation of the pickup collet 200 and a rotating guide such as a ball bearing. The orientation of the pick-up collet 200 is the direction from the base 202 side of the pick-up collet 200 toward the facing surface 201 a. The so-called change of direction means to rotate 0° to 180° in the vertical direction. For example, the pick-up collet 200 with the opposing surface 201a facing the supply stage 12 absorbs and holds the electronic component 2 at the supply position P1. Thereafter, the direction changing unit 23 changes the direction of the pickup collet 200 so that the suction surface faces upward. At this time, the rotation angle is 180°.

The push-up pin 24 is provided below the sheet 11 of the supply device 10 . The push-up pin 24 is a needle-like member with a sharp tip. The push-up pin 24 is disposed inside the support body 241 such that its length direction is parallel to the Z-axis direction.

The support body 241 has a drive mechanism for moving the push-up pin 24 in and out from the inside or withdrawing therein. The entry and exit or retraction is performed in the up and down direction. The drive mechanism includes, for example, a slider that moves while being guided by vertical guide rails, and an air cylinder or a cam mechanism that drives the slider.

[installation device] The mounting device 30 is a device that conveys the electronic component 2 received from the pickup device 20 to the mounting position P3 and mounts it on the board. The mounting position P3 is a position where the electronic component 2 is mounted on the board. The mounting device 30 has a bonding head 31 and a head moving mechanism 32 .

The bonding head 31 is a device that functions as a receiving unit that receives the electronic component 2 from the pickup collet 200 at the delivery position P2 and mounts the electronic component 2 on the substrate at the mounting position P3. The bonding head 31 holds the electronic component 2 , and releases the holding state to release the electronic component 2 after mounting.

Specifically, the bonding head 31 includes a nozzle 31a. The nozzle 31 a holds the electronic component 2 and releases the electronic component 2 from the held state. The nozzle 31a includes a nozzle hole. The nozzle hole opens on the adsorption surface at the tip of the nozzle 31a. The nozzle hole communicates with a negative pressure generating circuit (not shown) such as a vacuum pump, and the negative pressure is generated by the circuit, and the electronic component 2 is adsorbed and held on the adsorption surface of the nozzle 31a. In addition, by releasing the negative pressure, the held state of the electronic component 2 is released from the suction surface.

The head moving mechanism 32 is a mechanism that reciprocates the bonding head 31 between the delivery position P2 and the mounting position P3, and lifts and lowers the bonding head 31 between the delivery position P2 and the mounting position P3. Specifically, the head moving mechanism 32 includes a slide mechanism 321 and a lift mechanism 322 .

The slide mechanism 321 reciprocates the bonding head 31 between the delivery position P2 and the installation position P3. Here, the slide mechanism 321 has two guide rails 321b extending parallel to the X-axis direction and fixed to the support frame 321a, and a slider 321c running on the guide rails 321b. Although not shown, the slider 321c is driven by a ball screw driven by a rotary motor, a linear motor, or the like.

In addition, although not shown in figure, the slide mechanism 321 has a slide mechanism which slides and moves the bonding head 31 in the Y-axis direction. The sliding mechanism may also include a guide rail in the Y-axis direction and a slider traveling on the guide rail. The slider is driven by a ball screw driven by a rotary motor, a linear motor, or the like. The elevating mechanism 322 moves the bonding head 31 in the vertical direction. Specifically, the lift mechanism 322 may use a linear guide that moves a slider on a guide rail by a ball screw mechanism driven by a servo motor. That is, the bonding head 31 is raised and lowered in the Z-axis direction by the drive of the servo motor.

The substrate stage 60 is a stage for supporting a substrate on which the electronic component 2 is mounted. The substrate stage 60 is provided on a stage moving mechanism 61 . The stage moving mechanism 61 is a movement mechanism that slides the substrate stage 60 on the XY plane and positions the planned mounting position of the electronic component 2 on the substrate at the mounting position P3. As the stage moving mechanism 61 , for example, a linear guide that moves a slider on a guide rail by a ball screw mechanism driven by a servo motor can be used.

[control device] The control device 50 controls the start, stop, speed, operation timing, etc. of the supply device 10 , the pickup device 20 , the mounting device 30 , and the substrate stage 60 . That is, the control device 50 is a control device of the transfer device 1 and the mounting device 100 . The control device 50 can be realized by, for example, a dedicated electronic circuit or a computer operating with a predetermined program. An input device for an operator to input instructions or information necessary for control, and an output device for checking the state of the device are connected to the control device 50 . The input device may use a switch, a touch screen, a keyboard, a mouse, and the like. As the output device, a display unit such as liquid crystal or organic electroluminescence (EL) can be used.

FIG. 6 is a functional block diagram of the control device 50 . The control device 50 has a supply device control unit 51 for controlling the supply device 10 , a push pin control unit 52 and a pick-up control unit 53 for controlling the pickup device 20 , a bonding head control unit 54 for controlling the mounting device 30 , and a substrate control unit for controlling the substrate stage 60 . stage control unit 56 and memory unit 57 .

The supply device control unit 51 controls the movement of the supply stage 12 . That is, the movement of the electronic component 2 as a pick-up object placed on the sheet 11 is controlled. The push-up pin control unit 52 controls the movement of the push-up pin 24 , that is, the movement of the support body 241 .

The pick-up control unit 53 controls the movement of the pick-up collet 200 . That is, the pickup control unit 53 controls the operations of the collet moving mechanism 22 and the direction changing unit 23 . Moreover, the pick-up control part 53 controls the supply circuit which communicates with the air supply hole 202a, and the negative pressure generation circuit which communicates with the exhaust hole 202b, and controls holding and releasing of the electronic component 2.

The bonding head control unit 54 controls the movement of the bonding head 31 , that is, the operation of the head moving mechanism 32 . In addition, the bonding head control unit 54 controls a negative pressure generating circuit communicated with the nozzle hole of the bonding head 31 to control holding and releasing of the electronic component 2 . The substrate stage control unit 56 controls the movement of the substrate stage 60 , that is, the operation of the stage moving mechanism 61 .

The memory unit 57 is a memory device including various memories (hard disk drives (HDD) or solid state drives (SSD)) as recording media, recording media, and external interfaces. The data and programs required for the operation of the transfer device 1 are stored in advance in the storage unit 57 , and the data required for the operation of the transfer device 1 is stored therein. The required data are, for example, the supply amount of gas, exhaust pressure, position coordinates of supply position P1, transfer position P2, installation position P3, and position coordinates of each moving mechanism. Each of the movement mechanisms performs movement control of each structure based on these coordinates.

[Principle of Suction Holding by Pickup Collet] Next, the principle by which the electronic component 2 can be suction-held by the pickup collet 200 as described above will be described. As shown in FIG. 3(A) , the gas G supplied from the gas supply hole 202 a is blown out from the pores of the opposing surface 201 a in a planar manner, thereby forming a layer of gas between the electronic component 2 and the electronic component 2 . The layer is, for example, 2 μm to 10 μm. Then, the electronic component 2 is sucked and held by bringing the opposing surface 201a close to the electronic component 2 in a state where a negative pressure is applied to the suction hole 201c by the negative pressure generating circuit. At this time, since a layer of gas is formed between the facing surface 201a and the electronic component 2, the state where the facing surface 201a and the electronic component 2 are not in contact is maintained. In addition, by releasing the negative pressure generated by the negative pressure generating circuit, the negative pressure does not act on the suction hole 201c, so the electronic component 2 is released from the pickup collet 200 .

[action] Regarding the operation of picking up the electronic component 2 from the supply device 10 by the pick-up device 20 in the transfer device 1 as above and delivering the electronic component 2 to the mounting device 30, in addition to referring to FIGS. 1 to 6 , refer to FIG. The flowchart of FIG. 7 and the explanatory diagrams of FIG. 8(A) to FIG. 8(D) will be described below.

First, the pick-up collet 200 is moved to the supply position P1 where the push pin 24 is located by the pick-up device 20 and the supply device 10, and the facing surface 201a of the pick-up collet 200 faces the push pin 24 (step S01). At this time, the pressurized gas is supplied to the porous member 201 through the gas supply hole 202a, and the gas is blown out from the opposing surface 201a. In addition, at this time, exhaust is not exhausted from the exhaust hole 202b, and suction is not performed from the opening 201d.

On the other hand, the supply apparatus 10 moves the supply stage 12, as shown in FIG. 8(A), and locates the electronic component 2 which is a pick-up object at the supply position P1 (step S02). Thereafter, the pickup collet 200 supplied with the gas G from the facing surface 201 a descends together with the pickup head 21 and approaches the electronic component 2 . When the picking collet 200 approaches the electronic component 2 , the gas G on the facing surface 201 a is clamped by the facing surface 201 a and the electronic component 2 to form a gas layer. The trapped gas layer at this time is considered to be a viscous flow layer. Therefore, the fluidity of the gas G in the gas layer itself is very poor, and the suction by the exhaust from the exhaust hole 202b described later or the outflow from the outer edge of the gas layer hardly occurs. Then, as shown in (B) of FIG. 8 , the pickup collet 200 stops falling relative to the electronic component 2 with the gas layer that is not further compressed (step S03 ).

Here, when the pickup collet 200 comes into contact with the electronic component 2, the pickup collet 200 itself stops. Wherein, the pick-up collet 200 is elastically supported by the pick-up head 21 , so even if the pick-up collet 200 stops, the pick-up head 21 continues to descend, and the pick-up head 21 slides relative to the pick-up collet 200 . When the sensor detects the sliding, the pick-up control unit 53 recognizes that the pick-up collet 200 is in contact with the electronic component 2 , and stops the descent of the pick-up head 21 . At this time, the pickup collet 200 is not in contact with the electronic component 2 . However, since the gas layer is formed between the opposing surface 201a and the electronic component 2, the opposing surface 201a stops without approaching the electronic component 2 any further. The height position of the pickup collet 200 at this time is the approach position H1. That is, the approach position H1 is not set in advance as a specific stop position.

In this way, in a state where the pickup collet 200 is stopped through the gas layer and the pickup head 21 is stopped, the suction through the suction hole 201c is started by the exhaust from the exhaust hole 202b (step S04 ). That is, in a state where the pickup collet 200 pushes the electronic component 2 against the sheet 11 supported by the support 241 through the gas layer, that is, the state of holding the sheet 11 and the electronic component 2 between the support 241 Down, start pumping.

In this state, as shown in (C) of FIG. 8 , the pickup collet 200 rises, and in synchronization with this, the push-up caused by the rise of the push-up pin 24 starts (step S05 ). Thereby, the sheet|seat 11 starts peeling from the back surface of the electronic component 2. Furthermore, as shown in (D) of FIG. 8 , the push-up pin 24 stops when raised by a predetermined amount set in advance. Then, by the further rising pickup collet 200, the electronic component 2 sucked to the pickup collet 200 by negative pressure is peeled off from the sheet 11 while maintaining the gap created by the gas layer, thereby is picked up (step S06). In this way, the height position at which the electronic component 2 is completely peeled off is the peeling position H2, but it is not set as a specific stop position in advance.

The pick-up device 20 reverses the pick-up collet 200 using the direction changer 23 (step S07 ). That is, the orientation of the pick-up collet 200 is rotated 180° in the vertical direction, and the facing surface 201 a of the pick-up collet 200 is directed upward. In addition, here, the reverse operation of step S07 is performed immediately after the electronic component 2 is picked up, but it may be performed at any point between the supply position P1 and the delivery position P2.

The pick-up device 20 moves the picked-up electronic component 2 to the delivery position P2 by using the collet moving mechanism 22 (step S08 ). At the delivery position P2 , the bonding head 31 of the mounting device 30 is on standby, and faces the facing surface 201 a of the pickup collet 200 via the electronic component 2 .

After the bonding head 31 is lowered to the pickup collet 200 located at the transfer position P2 and the electronic component 2 is held by the bonding head 31 , the negative pressure is released from the pickup collet 200 , whereby the electronic component 2 is delivered from the pickup collet 200 to the bonding head 31 (step S09). In addition, after that, the bonding head 31 moves up to separate from the pickup collet 200, moves to the mounting position P3, and mounts the electronic component 2 on the board.

[Effect] (1) The pick-up collet 200 of this embodiment is a pick-up collet 200 for picking up and holding the electronic component 2 by suction, and has a porous member 201 having air permeability through which the electronic component 2 faces. The pores of the facing surface 201a supply the gas supplied to the inside, and the porous member 201 is provided with a suction hole 201c having an opening 201d in the facing surface 201a to suck the electronic component 2 to the facing surface 201a by negative pressure.

In addition, the pick-up device 20 of the present embodiment has a collet moving mechanism 22 that brings the pick-up collet 200 close to a position on the sheet 11 where the electronic component 2 can be sucked and held, and can suction and hold the electronic component 2 . The electronic components 2 are peeled off from the sheet 11 and transferred.

Furthermore, the mounting device 100 of the present embodiment has: a bonding head 31 disposed relatively movable with respect to the picking collet 200 and receiving the electronic component 2 from the front end of the picking collet 200; The electronic components 2 are transferred to the substrate and mounted.

Therefore, when the electronic component 2 is picked up by suction from the suction hole 201c, the electronic component 2 and the opposing surface 201a can be prevented from contacting by the layer of gas discharged from the pores of the porous member 201, and the impact on the electronic component 2 can be suppressed. Electronic part 2 is damaged. Moreover, even when the electronic component 2 is being transferred, the electronic component 2 can be held and prevented from falling while reducing the possibility of contacting the facing surface 201 a to damage the electronic component 2 .

Here, it is considered that the gas exhausted from the space flows between the electronic component 2 and the surface facing the electronic component 2, thereby generating primary suction force by utilizing negative pressure generated by a large amount of airflow. Use suction cups to hold electronic parts2. In this case, the suction force is very weak, and even if the electronic component 2 can be held at a certain distance from the collet, the suction force for peeling off the electronic component 2 adhering to the sheet 11 cannot be obtained. In addition, in order to obtain the Bernoulli effect, it is necessary to increase the flow rate of the gas per unit time very much, so it is very difficult to adjust the suction force for maintaining non-contact. Furthermore, since a large amount of gas is blown around the pick-up site, there is a possibility that particles may be generated.

In addition, on the surface of the collet facing the electronic component 2, a gas ejection hole of the same size as the suction hole is provided without fine holes like the porous member 201, and the gas is injected to the electronic component 2 to make the electronic component 2 float. , in the case where the electronic component 2 is to be sucked through the suction hole to counteract the floating force of the electronic component 2 caused by the above-mentioned jetting, it is also used to carry out while maintaining non-contact (floating) in the same way as described above. It is very difficult to adjust the holding suction force, and there is a possibility of particle generation because a large amount of air is blown around the pick-up area.

On the other hand, in the present embodiment, the flow rate of the gas blown out from the whole of the opposing surface 201a in a planar shape through the micropores of the opposing surface 201a is extremely small. Therefore, there is no concern of particle generation. The blowing from the facing surface 201 a does not actively float the electronic component 2 , but forms a layer of gas with a viscous flow when the facing surface 201 a approaches the electronic component 2 . Therefore, the stronger the suction force is, the easier it is to keep the facing surface 201a and the electronic component 2 in a non-contact state, even if the suction force caused by the negative pressure from the suction hole 201c is set for peeling off the sheet 11. Sufficient force of the electronic component 2 can also be prevented from contact by the layer of gas between the opposing surface 201a and the electronic component 2, so whether it is obtaining a strong suction force or adjusting the suction force becomes easy.

As a result of studies conducted by the inventors of the present application, for example, under the following conditions, the following result can be obtained, that is, by picking up the collet 200, it is possible to perform suction holding while maintaining non-contact with the electronic component 2 result. First, as the porous member 201 , a member having a gas flow rate of about 0.7 L/min when the supply pressure is 0.3 MPa, for example, is used. The pressure of the gas (nitrogen) supplied to the porous member 201 may be in the range of about 0.1 MPa to 0.7 MPa. At this time, the flow rate of the gas flowing through the porous member 201 is about 0.3 L/min to 1.5 L/min. Within the range, the pickup collet 200 and the electronic component 2 can be reliably kept out of contact. In addition, the suction pressure is in the range of -10 kPa to -90 kPa, and the electronic component 2 can be reliably picked up from the sheet 11 . At this time, the pressure in the gas layer between the electronic component 2 and the facing surface 201a can be 0.1 MPa to 0.5 MPa.

As a comparative example, a collet made of stainless steel (steel use stainless, SUS) having the same size as the pickup collet 200 and having no pores as a material was used. In the collet, 50 holes with a diameter of 0.3 mm are arranged in a matrix. When the gas supplied at a pressure of 0.02 MPa is ejected from the holes, the suction pressure is -50 kPa, and the electronic parts 2 and the The pressure between the electronic component 2 not in contact with the facing surface 201a and the facing surface 201a is extremely small at 0.025 MPa to 0.035 MPa, and its width is also small. That is, it was found that, unlike the pores of the porous member 201, in blowing out the gas through the plurality of holes formed in the collet, even a slight pressing force or suction force, and even a slight pressing force or suction force When the suction force is slightly changed, the electronic component 2 is likely to come into contact with the facing surface. Furthermore, when the supply pressure is increased in order to increase the pressure between the electronic component 2 and the facing surface 201a, the electronic component 2 is likely to come off.

(2) The opening 201 d is provided in a projection plane of the electronic component 2 , that is, at a position overlapping the electronic component 2 in a state where the opposing surface 201 a faces the electronic component 2 . In this embodiment, one opening 201d communicating with the suction hole 201c is provided at the center of the facing surface 201a. Therefore, gas does not flow in from the outer edge of the electronic component 2, and a strong suction force can be secured by utilizing the atmospheric pressure. In addition, the opening 201d may be plural, and its position is not limited to the center as long as it is a position where the facing surface 201a overlaps with the electronic component 2 .

[modified example] This invention is not limited to the said embodiment. The basic structure is the same as that of the above-mentioned embodiment, and the following modified examples are also applicable. (1) In the case of picking up the collet 200 as described above, the held electronic component 2 easily moves within the horizontal facing surface 201 a. In particular, when the acceleration and deceleration of the operation is increased when the electronic component 2 is reversed, transferred, and handed over, positional displacement may occur. Furthermore, there is also a possibility that the maintenance cannot be maintained and the product may fall off.

In order to cope with this, a guide portion that restricts movement of the electronic component 2 may be provided along the outer edge of the facing surface 201a. For example, as shown in FIGS. 9 , 10 , and 11 , the guide portion 201 e is a rectangular plate-shaped body provided on four side surfaces of the base 202 . Each guide portion 201e has a protruding portion protruding from the facing surface 201a. The distance (protrusion amount) of the guide portion 201e protruding from the facing surface 201a is sufficient as long as the movement of the electronic component 2 held on the facing surface 201a through the gas layer can be restricted, and it is at least as long as it is from the facing surface 201a to the distance held through the gas layer. It is sufficient that the electronic component 2 is applied or more. Wherein, when the protruding portion of the guide portion 201e becomes a distance beyond the protruding distance of the electronic component 2 held on the opposing surface 201a via the gas layer, it is necessary to consider the surroundings of the picked-up electronic component 2 when picking up from the wafer. The electronic parts 2 do not touch. Therefore, it is preferable that the distance by which the protruding portion of the guide portion 201e protrudes from the facing surface 201a is within the side surface of the electronic component 2 held on the facing surface 201a via the gas layer. Furthermore, as will be described later, by controlling the push-up pin 24 at the time of picking up, it is possible to correspond to various protrusion amounts without contacting the surrounding electronic components 2 .

In this modified example, even if the electronic component 2 moves horizontally on the opposing surface 201a held in a non-contact manner due to the inertial force accompanying the movement of the electronic component 2 when it is reversed, etc., Clip 200 is off. In addition, even if the position of the electronic component 2 is shifted in the area surrounded by the guide portion 201e, if the suction generated by the opening 201d is within the projection plane of the electronic component 2, the suction can be performed regardless of the position of the opening 201d. Keep.

However, when the electronic component 2 comes into contact with the guide portion 201e, the electronic component 2 may be affected. Therefore, the gas is ejected from the guide part 201e so as not to contact the electronic component 2, thereby avoiding the occurrence of damage to the electronic component 2 due to contact with the guide part 201e while preventing detachment from the pickup collet 200.

For example, as shown in FIG. 12 , a guiding porous member 201f is provided at a position facing the side surface of the electronic component 2 in the protruding portion of the guiding portion 201e. Inside the guide portion 201e, an air passage 201g is provided that communicates with the outside and the guiding porous member 201f. The ventilation path 201g is connected to a gas supply circuit through piping not shown.

The guide part 201e ejects the gas G through the guide porous member 201f. As a result, a layer of gas G is formed along the side surface of the electronic component 2, so that the electronic component 2 can be suppressed from shifting or shifting, and the electronic component 2 can also be kept out of contact with the guide portion 201e. Therefore, chipping and cracking of the electronic component 2 can also be reduced, and generation of particles due to contact can be suppressed. Since the ejection amount of the gas G is also small, the generation of particles due to the air flow can also be suppressed. Furthermore, deviation and drop of the electronic component 2 at the time of transfer can also be reduced.

In addition, as shown in FIG. 13 , by ejecting the gas G toward the side surface of the electronic component 2 from the discharge port 201h communicating with the air passage 201g without providing the guiding porous member 201f, it is also possible to suppress the deviation or deviation of the electronic component 2. , Contact with electronic parts 2. In such a case, it is only necessary to form a layer that avoids the gas G coming into contact with the electronic component 2 , so the discharge amount is also small.

Furthermore, as described above, when there is guide portion 201e protruding from facing surface 201a, it is necessary to keep guide portion 201e from contacting electronic components 2 around the picked-up object on sheet 11 during pickup. Therefore, the electronic component 2 can be pushed up in advance at the time of picking up. That is, as shown in FIG. 14, according to the protruding amount of the guide portion 201e from the facing surface 201a, at the same time when the pickup collet 200 starts to descend, the push-up pin 24 rises to push up the electronic component 2 as the pick-up object, thereby rising to The guide part 201e does not hit the height of the surrounding electronic components 2 so that the guide part 201e does not collide with the surrounding electronic components 2. In this state, the pickup collet 200 approaches, passes through the gas layer, stops, and then starts suction, whereby pickup can be performed as described above.

Furthermore, the guide part 201e does not need to protrude from the facing surface 201a. For example, as shown in FIG. 15 , the lower end of the guide portion 201e is set to be on the same plane as the base 202 and the facing surface 201a or above, and the ejection port 201h is provided on the lower surface of the guide portion 201e. Then, the gas G is ejected from the ejection port 201h. In this way, the guide portion 201e ejects the gas G in the up-and-down direction along the side surface of the electronic component 2, whereby the gas G whose ejection direction of the gas G of the guide portion 201e becomes downward forms a wall, so that the deviation of the electronic component 2 can be suppressed. or deviate. In addition, since there is no protruding portion at the position facing the side surface of the electronic component 2, it does not contact the side surface of the electronic component 2, and does not contact other electronic components 2 at the time of picking up.

In addition, as shown in FIG. 16, you may incline the ventilation path 201g so that the discharge direction of the gas G from the discharge port 201h may become the direction toward the side surface of the electronic component 2. In this case, the gas G can be made to collide more strongly with the side surface of the electronic component 2 , so that the ejection amount of the gas G can be suppressed.

The guide part 201e as mentioned above should just be provided along the outer edge of the facing surface 201a so that movement of the electronic component 2 can be restricted. Therefore, it may not be provided on the entire circumference of the facing surface 201a, but may be partly provided. For example, by arranging the guide portion 201e along the corners as shown in (A) of FIG. 17 or sandwiching the corners as shown in (B) of FIG. Therefore, the positioning effect can be improved.

(2) The number and size of the suction hole 201c and the opening 201d are not limited to the above-mentioned embodiment. On the facing surface 201a of the porous member 201, the maintenance of the suction holding state and the non-contact state can be realized by the balance between the area of the electronic component 2 supported by the gas layer and the total area of the opening 201d.

(3) The positions and shapes of the suction hole 201c and the opening 201d are not limited to the above-described embodiment, either. For example, as mentioned above, the shape of the opening 201d may be circular, rectangular, or other oval, polygonal, polygonal with rounded corners, star, etc.

(4) The pick-up collet 200 is provided interchangeably so that it can be replaced according to the shape and size of the electronic component 2 . As the replaceable structure, the structure that can be sucked and held by the magnet is simple, and the replacement work is also easy. Among them, any configuration is required as long as the pickup collet 200 can be replaced. For example, suction holding using negative pressure or mechanical holding may be possible.

[Other Embodiments] The present invention is not limited to the above-described embodiments, and includes other embodiments described below. In addition, the present invention also includes all or arbitrary combinations of the aforementioned embodiments and other embodiments described below. Furthermore, various omissions, substitutions, and changes can be made to these embodiments without departing from the scope of the invention, and the modifications are also included in the present invention.

100: Electronic device 1: transfer device 2: Electronic parts 10: Supply device 11: sheet 12: Supply carrier 13: Stage moving mechanism 20: Pickup device 21: Pickup head 22: collet moving mechanism 23: Direction conversion department 24: Upsell 30: Mounting device 31:Joint head 31a: Nozzle 32: Head moving mechanism 50: Control device 51: Supply device control department 52: Upsell control department 53: Pick up control unit 54: joint head control unit 56: Substrate carrier control unit 57: memory department 60: Substrate carrier 61: Stage moving mechanism 100: Installation device 200: Pick up Collet 201: Porous components 201a: opposite side 201b: back 201c: suction hole 201d: opening 201e: Guidance Department 201f: Porous member for guidance 201g: ventilation path 201h: Jet outlet 202: base 202a: air supply hole 202b: exhaust hole 202c: Mounting hole 221: sliding mechanism 221a, 321a: Support frame 221b, 321b: guide rail 221c, 321c: slider 222, 322: lifting mechanism 222a: arm 222b: loading and unloading department 222c: pin 241: support body 321: sliding mechanism H1: near position H2: peeling position G: gas P1: supply position P2: handover position P3: Installation position S01～S09: Steps

Fig. 1 is a front view showing a transfer device and a mounting device according to the embodiment. Fig. 2 is a plan view showing a transfer device and a mounting device according to the embodiment. FIG. 3(A) is a schematic cross-sectional view showing the principle of holding electronic components by a pick-up collet, and FIG. 3(B) is a perspective view showing the base from the bottom side. Fig. 4 is a bottom perspective view showing a pickup collet and a detachable part. Fig. 5 is a perspective view showing the upper surface side of the pickup collet and the detachable part. Fig. 6 is a block diagram showing a control device for the transfer device and the mounting device. Fig. 7 is a flowchart showing the procedure of a pickup operation according to the embodiment. FIG. 8(A) to FIG. 8(D) are explanatory diagrams showing a pickup operation according to the embodiment. Fig. 9 is a perspective view from the bottom side showing a modified example in which a guide portion is provided. Fig. 10 is a perspective view from the upper side showing a modified example in which a guide portion is provided. Fig. 11 is a schematic cross-sectional view showing a modified example in which a guide portion is provided. Fig. 12 is a schematic cross-sectional view showing a modified example in which a guide portion having a guiding porous member is provided. FIG. 13 is a schematic cross-sectional view showing a modified example in which a guide portion having a discharge port is provided. FIG. 14 is an explanatory view showing a pick-up operation when the guide portion protrudes. 15 is a schematic cross-sectional view showing a modified example in which the gas ejection direction of the guide part is set downward. 16 is a schematic cross-sectional view showing a modified example in which the direction in which the gas is ejected from the guide portion is inclined. FIG. 17(A) and FIG. 17(B) are bottom views showing a modified example of the arrangement of the guide portion.

200: Pick up Collet

201: Porous components

201a: opposite side

201d: opening

201e: Guidance Department

202: base

222b: loading and unloading department

222c: pin

Claims (8)

A pick-up collet that sucks and holds electronic parts and picks them up, wherein It has a porous member that is air permeable and ejects the supplied gas into the inside in planar form through the pores on the surface facing the electronic component, A suction hole is provided in the porous member, the suction hole has an opening on the facing surface and sucks the electronic component by negative pressure, A guide portion that restricts movement of the electronic component is provided along an outer edge of the facing surface. Pick up collet as described in claim item 1, wherein The guide part is provided so as to be able to eject gas. Pick up collet as described in claim item 2, wherein The guide part ejects gas toward a side surface of the electronic component. The pickup collet as described in claim 2 or claim 3, wherein The guide part ejects gas in a vertical direction along a side surface of the electronic component. The pickup collet as described in claim 2 or claim 3, wherein The guide part ejects gas through the porous guide member. Pick up collet as described in any one of claim item 1 to claim item 3, claim item 5, wherein The guide portion has a protruding portion protruding from the facing surface. A pick-up device that picks up the electronic parts from a sheet on which the electronic parts are attached, comprising: The picking collet as described in any one of claim 1 to claim 6; and The collet moving mechanism brings the pick-up collet close to a position in the sheet where the electronic component can be held by suction, and is capable of peeling and transferring the electronic component held by suction from the sheet. A mounting device, characterized in that it has: The pickup device as described in claim 7; a bonding head configured to be relatively movable with respect to the pick collet from which the electronic part is received; and The mounting unit transfers and mounts the electronic component held by the bonding head to a substrate.

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