TW202236695A - 受光裝置及測距裝置 - Google Patents

受光裝置及測距裝置 Download PDF

Info

Publication number
TW202236695A
TW202236695A TW110138806A TW110138806A TW202236695A TW 202236695 A TW202236695 A TW 202236695A TW 110138806 A TW110138806 A TW 110138806A TW 110138806 A TW110138806 A TW 110138806A TW 202236695 A TW202236695 A TW 202236695A
Authority
TW
Taiwan
Prior art keywords
circuit
chip
pixel
light receiving
light
Prior art date
Application number
TW110138806A
Other languages
English (en)
Chinese (zh)
Inventor
小木純
Original Assignee
日商索尼半導體解決方案公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商索尼半導體解決方案公司 filed Critical 日商索尼半導體解決方案公司
Publication of TW202236695A publication Critical patent/TW202236695A/zh

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483Details of pulse systems
    • G01S7/486Receivers
    • G01S7/4861Circuits for detection, sampling, integration or read-out
    • G01S7/4863Detector arrays, e.g. charge-transfer gates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/199Back-illuminated image sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only
    • G01S17/10Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4816Constructional features, e.g. arrangements of optical elements of receivers alone
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/77Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
    • H04N25/772Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components comprising A/D, V/T, V/F, I/T or I/F converters
    • H04N25/773Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components comprising A/D, V/T, V/F, I/T or I/F converters comprising photon counting circuits, e.g. single photon detection [SPD] or single photon avalanche diodes [SPAD]
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/79Arrangements of circuitry being divided between different or multiple substrates, chips or circuit boards, e.g. stacked image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/811Interconnections
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/812Arrangements for transferring the charges in the image sensor perpendicular to the imaging plane, e.g. buried regions used to transfer generated charges to circuitry under the photosensitive region
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/95Circuit arrangements
    • H10F77/953Circuit arrangements for devices having potential barriers
    • H10F77/959Circuit arrangements for devices having potential barriers for devices working in avalanche mode
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88Lidar systems specially adapted for specific applications
    • G01S17/93Lidar systems specially adapted for specific applications for anti-collision purposes
    • G01S17/931Lidar systems specially adapted for specific applications for anti-collision purposes of land vehicles
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/809Constructional details of image sensors of hybrid image sensors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Light Receiving Elements (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
TW110138806A 2020-10-27 2021-10-20 受光裝置及測距裝置 TW202236695A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020179608 2020-10-27
JP2020-179608 2020-10-27

Publications (1)

Publication Number Publication Date
TW202236695A true TW202236695A (zh) 2022-09-16

Family

ID=81382319

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110138806A TW202236695A (zh) 2020-10-27 2021-10-20 受光裝置及測距裝置

Country Status (6)

Country Link
US (1) US20230384431A1 (https=)
JP (1) JPWO2022091607A1 (https=)
CN (1) CN116547820A (https=)
DE (1) DE112021005742T5 (https=)
TW (1) TW202236695A (https=)
WO (1) WO2022091607A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230124908A (ko) * 2021-01-06 2023-08-28 소니 세미컨덕터 솔루션즈 가부시키가이샤 수광 소자 및 측거 시스템
JP2024004798A (ja) * 2022-06-29 2024-01-17 キヤノン株式会社 光電変換装置、光電変換システム
US20260033026A1 (en) * 2022-07-29 2026-01-29 Sony Semiconductor Solutions Corporation Photodetection device and ranging system
WO2024084792A1 (ja) * 2022-10-17 2024-04-25 ソニーセミコンダクタソリューションズ株式会社 光検出装置、測距装置、および、光検出装置の制御方法
WO2024150531A1 (ja) * 2023-01-13 2024-07-18 ソニーセミコンダクタソリューションズ株式会社 光検出装置
CN119335509A (zh) * 2023-07-19 2025-01-21 上海禾赛科技有限公司 芯片模组及激光雷达
CN121795114A (zh) * 2023-09-27 2026-04-03 索尼半导体解决方案公司 半导体装置和光检测装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102553553B1 (ko) * 2015-06-12 2023-07-10 가부시키가이샤 한도오따이 에네루기 켄큐쇼 촬상 장치, 및 그 동작 방법 및 전자 기기
CN117558738A (zh) * 2017-04-04 2024-02-13 索尼半导体解决方案公司 固态摄像装置和电子设备
EP3570534B1 (en) * 2017-10-31 2021-12-01 Sony Semiconductor Solutions Corporation Imaging device and imaging system
JP2019158806A (ja) * 2018-03-16 2019-09-19 ソニーセミコンダクタソリューションズ株式会社 受光装置及び測距装置
CN117080233A (zh) * 2019-03-29 2023-11-17 索尼半导体解决方案公司 固态摄像装置和电子设备
JP7269787B2 (ja) 2019-04-26 2023-05-09 グンゼ株式会社 ポリプロピレン系延伸フィルムおよび包装用袋

Also Published As

Publication number Publication date
CN116547820A (zh) 2023-08-04
US20230384431A1 (en) 2023-11-30
DE112021005742T5 (de) 2023-08-31
JPWO2022091607A1 (https=) 2022-05-05
WO2022091607A1 (ja) 2022-05-05

Similar Documents

Publication Publication Date Title
US12474451B2 (en) Light reception device and distance measurement device
TW202236695A (zh) 受光裝置及測距裝置
CN113228306B (zh) 光接收元件、固态成像装置和测距装置
JP7407734B2 (ja) 光検出装置及び光検出装置の制御方法、並びに、測距装置
JP7673049B2 (ja) 受光装置及び測距装置
JP2022047438A (ja) 固体撮像装置及び電子機器
JP2023066297A (ja) 光検出装置および測距システム
US20250160023A1 (en) Light receiving device and electronic apparatus
WO2023068210A1 (ja) 光検出装置、撮像装置および測距装置
JP7426347B2 (ja) 受光素子、固体撮像装置及び測距装置
WO2025234314A1 (ja) 光検出装置および測距装置
WO2026083816A1 (ja) 光検出装置
TWI916350B (zh) 受光裝置及測距裝置
WO2024057471A1 (ja) 光電変換素子、固体撮像素子、測距システム
WO2023219045A1 (ja) 受光装置、制御方法、及び測距システム
WO2022270110A1 (ja) 撮像装置および電子機器
JP2023182874A (ja) 固体撮像装置