TW202217543A - 顯示方法及基板處理裝置 - Google Patents

顯示方法及基板處理裝置 Download PDF

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Publication number
TW202217543A
TW202217543A TW110124572A TW110124572A TW202217543A TW 202217543 A TW202217543 A TW 202217543A TW 110124572 A TW110124572 A TW 110124572A TW 110124572 A TW110124572 A TW 110124572A TW 202217543 A TW202217543 A TW 202217543A
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TW
Taiwan
Prior art keywords
measured values
parameters
sampling
measurement value
information
Prior art date
Application number
TW110124572A
Other languages
English (en)
Chinese (zh)
Inventor
松治志
Hibiki Imai
Original Assignee
日商東京威力科創股份有限公司
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Publication date
Application filed by 日商東京威力科創股份有限公司 filed Critical 日商東京威力科創股份有限公司
Publication of TW202217543A publication Critical patent/TW202217543A/zh

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T1/00—General purpose image data processing
    • G06T1/20—Processor architectures; Processor configuration, e.g. pipelining
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0208—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the configuration of the monitoring system
    • G05B23/0216—Human interface functionality, e.g. monitoring system providing help to the user in the selection of tests or in its configuration
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0221—Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/30—Monitoring
    • G06F11/3058—Monitoring arrangements for monitoring environmental properties or parameters of the computing system or of the computing system component, e.g. monitoring of power, currents, temperature, humidity, position, vibrations
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/14—Digital output to display device ; Cooperation and interconnection of the display device with other functional units
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/14—Digital output to display device ; Cooperation and interconnection of the display device with other functional units
    • G06F3/1407—General aspects irrespective of display type, e.g. determination of decimal point position, display with fixed or driving decimal point, suppression of non-significant zeros
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T11/00—2D [Two Dimensional] image generation
    • G06T11/20—Drawing from basic elements, e.g. lines or circles
    • G06T11/206—Drawing of charts or graphs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • General Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Quality & Reliability (AREA)
  • Computing Systems (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Drying Of Semiconductors (AREA)
  • Controls And Circuits For Display Device (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
TW110124572A 2020-07-17 2021-07-05 顯示方法及基板處理裝置 TW202217543A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020123266A JP7390990B2 (ja) 2020-07-17 2020-07-17 表示方法及び基板処理装置
JP2020-123266 2020-07-17

Publications (1)

Publication Number Publication Date
TW202217543A true TW202217543A (zh) 2022-05-01

Family

ID=79327375

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110124572A TW202217543A (zh) 2020-07-17 2021-07-05 顯示方法及基板處理裝置

Country Status (4)

Country Link
JP (1) JP7390990B2 (ja)
KR (1) KR102511296B1 (ja)
CN (1) CN113947517A (ja)
TW (1) TW202217543A (ja)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003344113A (ja) * 2002-05-27 2003-12-03 Mitsubishi Electric Corp グラフの表示方法およびグラフの表示方法が格納された記憶媒体
JP2006090727A (ja) 2004-09-21 2006-04-06 Nec Engineering Ltd オンチップ・ロジックアナライザ
JP5105399B2 (ja) * 2006-08-08 2012-12-26 東京エレクトロン株式会社 データ収集方法，基板処理装置，基板処理システム
JP2010028097A (ja) * 2008-06-18 2010-02-04 Renesas Technology Corp 半導体製造装置および半導体製造システム
JP5276489B2 (ja) 2009-03-24 2013-08-28 大日本スクリーン製造株式会社 基板処理装置ならびに基板処理装置におけるグラフ描画周期決定方法およびグラフ描画方法
JP5874895B2 (ja) * 2011-06-29 2016-03-02 横河電機株式会社 測定装置
CN103988137B (zh) * 2012-06-26 2016-09-07 东芝三菱电机产业系统株式会社 数据收集系统、数据收集装置、以及数据收集方法
JP2020176308A (ja) * 2019-04-19 2020-10-29 株式会社神戸製鋼所 炉況表示方法および炉況表示装置

Also Published As

Publication number Publication date
JP2022019434A (ja) 2022-01-27
KR20220010433A (ko) 2022-01-25
JP7390990B2 (ja) 2023-12-04
CN113947517A (zh) 2022-01-18
KR102511296B1 (ko) 2023-03-20

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