TW202210266A - Resin sealing device capable of suppressing a temperature drop of a resin sealing mold and preventing degradation of molding quality and lowering of productivity caused by the temperature drop even when a large number of resin sheets are put into a resin sealing mold - Google Patents

Resin sealing device capable of suppressing a temperature drop of a resin sealing mold and preventing degradation of molding quality and lowering of productivity caused by the temperature drop even when a large number of resin sheets are put into a resin sealing mold Download PDF

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TW202210266A
TW202210266A TW110119885A TW110119885A TW202210266A TW 202210266 A TW202210266 A TW 202210266A TW 110119885 A TW110119885 A TW 110119885A TW 110119885 A TW110119885 A TW 110119885A TW 202210266 A TW202210266 A TW 202210266A
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resin
holder
small piece
resin sealing
chip
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TW110119885A
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TWI814009B (en
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内山茂行
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日商山田尖端科技股份有限公司
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67098Apparatus for thermal treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/6715Apparatus for applying a liquid, a resin, an ink or the like
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67248Temperature monitoring

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)

Abstract

The present invention realizes a resin sealing device capable of suppressing a temperature drop of a resin sealing mold and preventing degradation of molding quality and lowering of productivity caused by the temperature drop even when a large number of resin sheets are put into a resin sealing mold. A resin sealing device 10 of the present invention includes a resin sheet supply mechanism 60 for arranging and sending out a plurality of resin sheets R from a container 64 that contains the plurality of resin sheets R; and a sheet transport mechanism 72 for transporting and delivering the plurality of resin sheets R to a loader 44 while holding the plurality of the resin sheets R sent from the resin sheet supply mechanism 60. The sheet transport mechanism 72 has a sheet holder 76 for loading and holding a plurality of resin sheets R in a plurality of holding holes 78 provided at a predetermined interval. The sheet holder 76 is provided with a heater 96 for preheating the resin sheets R at a predetermined temperature lower than the resin sealing temperature.

Description

樹脂密封裝置Resin sealing device

本發明涉及一種對工件進行樹脂密封的樹脂密封裝置。The present invention relates to a resin sealing device for resin sealing a workpiece.

作為對工件進行樹脂密封的樹脂密封裝置,已知有轉移模制裝置。As a resin sealing apparatus for resin sealing a workpiece, a transfer molding apparatus is known.

所述轉移模制裝置是利用上模與下模夾緊工件,並利用柱塞將熔融樹脂從樹脂密封模具的罐中擠出,將樹脂填充至模腔中來進行樹脂密封的裝置。The transfer molding apparatus is a device that clamps a workpiece with an upper die and a lower die, and uses a plunger to extrude molten resin from a tank of a resin-sealing die, and fill the cavity with resin for resin sealing.

例如,在專利文獻1(日本專利特開2005-246709號公報)中,記載了一種樹脂密封裝置,所述樹脂密封裝置在將從利用零件送料器供給方式甚至小片料盒供給方式的樹脂小片供給機構送出的樹脂小片由小片保持器保持的同時加以搬送並交接至裝載機之後,由裝載機搬送至樹脂密封模具中進行樹脂密封。For example, Patent Document 1 (Japanese Patent Laid-Open No. 2005-246709 ) describes a resin sealing device that supplies resin chips from a parts feeder supply method or even a chip magazine supply method The resin pellets sent out by the mechanism are conveyed while being held by the pellet holder and delivered to the loader, and then conveyed by the loader to the resin sealing mold for resin sealing.

[現有技術文獻][Prior Art Literature]

[專利文獻][Patent Literature]

[專利文獻1]日本專利特開2005-246709號公報[Patent Document 1] Japanese Patent Laid-Open No. 2005-246709

[發明所要解決的問題][Problems to be Solved by Invention]

在專利文獻1所例示的樹脂密封裝置中,當向樹脂密封模具投入樹脂小片時,熱從升溫後的樹脂密封模具被所述樹脂吸取,產生投入部(罐)及其周圍的溫度下降的現象。迄今為止,能夠使用直徑20mm左右且長度20mm左右的樹脂小片成形比較小型的工件,因此即便產生溫度下降,也能夠比較早地使溫度恢復來進行成形。In the resin sealing device exemplified in Patent Document 1, when the resin small pieces are put into the resin sealing mold, heat is absorbed from the resin sealing mold after the temperature rise, and the temperature of the input part (tank) and its surroundings decreases. . Until now, a relatively small workpiece can be molded using a resin pellet with a diameter of about 20 mm and a length of about 20 mm. Therefore, even if a temperature drop occurs, the temperature can be recovered relatively early to perform molding.

然而,近年來,例如在成形功率半導體、電子控制單元(ElectronicControlUnit,ECU)、絕緣柵雙極型電晶體(InsulatedGateBipolarTransistor,IGBT)等比較大的產品的情況下需要大容量的樹脂。在此種情況下,需要例如使用大直徑的樹脂小片的情況、或使樹脂從兩個甚至三個等多個罐流入至一個成形品,進而在一個罐重疊多個樹脂小片而使用。因此,樹脂密封模具的溫度下降變大,而導致恢復成形溫度來開始成形為止需要時間,從而有生產率下降之虞。另外,若在模具的溫度未充分恢復的狀態下開始成形,則容易發生由熱量不足引起的成形不良狀況(未填充、空隙、硬化不足等)而有成形品質下降之虞。However, in recent years, high-capacity resins have been required to mold relatively large products such as power semiconductors, electronic control units (ECUs), and insulated gate bipolar transistors (IGBTs). In this case, for example, it is necessary to use large-diameter resin chips, or to flow resin from two or three tanks into one molded product, and to stack a plurality of resin chips on one tank for use. Therefore, the temperature drop of the resin-sealing mold becomes large, and it takes time until the molding temperature is recovered to start molding, and there is a possibility of a decrease in productivity. In addition, if molding is started in a state where the temperature of the mold is not sufficiently recovered, molding defects (unfilling, voids, insufficient hardening, etc.) due to insufficient heat are likely to occur, and molding quality may be degraded.

[解決問題的技術手段][Technical means to solve the problem]

本發明是鑒於所述情況而成,其目的在於實現一種樹脂密封裝置,其即便在向樹脂密封模具投入了大容量的樹脂小片的情況下,也可抑制樹脂密封模具的溫度下降而防止溫度下降引起的成形品質的下降及生產率的下降。The present invention has been made in view of the above-mentioned circumstances, and an object of the present invention is to realize a resin sealing device capable of suppressing the temperature drop of the resin sealing mold and preventing the temperature drop even when a large volume of resin chips is put into the resin sealing mold The resulting drop in molding quality and productivity.

本發明通過以下所記載那樣的解決手段來解決所述問題。The present invention solves the above-mentioned problems by means of solving the problems described below.

本發明的樹脂密封裝置是利用裝載機將樹脂小片搬入至樹脂密封模具中進行樹脂密封的樹脂密封裝置,其中,包括:樹脂小片供給機構,從收容許多樹脂小片的收容容器將樹脂小片排布並送出;以及小片搬送機構,在保持多個從所述樹脂小片供給機構送出的樹脂小片的狀態下進行搬送,並交接至所述裝載機,所述小片搬送機構具有將多個樹脂小片裝填並保持於以規定間距設置的保持孔中的小片保持器,在所述小片保持器設置有以比樹脂密封溫度低的規定溫度對樹脂小片進行預熱的加熱器。The resin sealing apparatus according to the present invention is a resin sealing apparatus for carrying resin chips into a resin sealing mold by a loader for resin sealing, and includes a resin chip supply mechanism for arranging and arranging the resin chips from a storage container for accommodating a large number of resin chips. sending out; and a small piece conveying mechanism that conveys a plurality of resin small pieces sent out from the resin small piece supply mechanism while holding the plurality of resin small pieces, and transfers it to the loader, the small piece conveying mechanism has the function of loading and holding the plurality of resin small pieces A heater for preheating the resin chips at a predetermined temperature lower than the resin sealing temperature is provided in the chip holder in the holding holes provided at predetermined intervals.

據此,可在將從樹脂小片供給機構供給的樹脂小片交接至裝載機之前的期間進行預熱。因此,可減小樹脂密封模具與所投入的樹脂小片的溫度差,因此可抑制樹脂小片向樹脂密封模具的投入時產生的樹脂密封模具的溫度下降。According to this, preheating can be performed before the resin chips supplied from the resin chip supply mechanism are delivered to the loader. Therefore, the temperature difference between the resin-sealing mold and the injected resin small pieces can be reduced, so that the temperature drop of the resin-sealing mold that occurs when the resin small pieces are put into the resin-sealing mold can be suppressed.

另外,優選為所述樹脂小片保持器被設置為交接小片保持器,所述交接小片保持器將多個樹脂小片裝填並保持於設置成與所述樹脂密封模具的罐間距為相同間距且與所述樹脂密封模具的罐數為相同數量的所述保持孔中,所述小片搬送機構包括小片升降器機構,所述小片升降器機構將裝填於所述交接小片保持器的所述保持孔中的樹脂小片從下方多個同時交接至所述裝載機,在所述交接小片保持器設置有所述加熱器。據此,在將樹脂小片交接至裝載機的小片保持器(交接小片保持器)中,通常保持一次樹脂密封所需的樹脂小片並成批地交接至裝載機,因此可使樹脂小片各自的溫度條件(預熱條件)相同,且可使成形品質穩定。In addition, it is preferable that the resin chip holder is provided as a transfer chip holder that loads and holds a plurality of resin chips in a tank provided at the same pitch as the resin sealing mold and with the In the holding holes in which the number of cans of the resin-sealing mold is the same, the chip conveying mechanism includes a chip lifter mechanism, and the chip lifter mechanism fills the holding holes of the transfer chip holder. A plurality of resin chips are simultaneously transferred to the loader from below, and the heater is provided in the transfer chip holder. According to this, in the die holder (handover die holder) for transferring the resin chips to the loader, the resin chips required for the primary resin sealing are generally held and transferred to the loader in batches, so that the temperature of each resin chip can be adjusted. The conditions (preheating conditions) are the same, and the molding quality can be stabilized.

另外,優選為所述小片保持器被設置為搬送小片保持器、及所述交接小片保持器,所述搬送小片保持器將多個樹脂小片裝填並保持於以規定間距設置的所述保持孔中,所述小片搬送機構包括小片保持器搬送機構,所述小片保持器搬送機構搬送在所述保持孔中裝填有從所述樹脂小片供給機構送出的樹脂小片的所述搬送小片保持器,並將裝填於所述搬送小片保持器的所述保持孔中的樹脂小片交接至所述交接小片保持器,至少在所述交接小片保持器設置有所述加熱器。據此,可在距樹脂密封模具近的地方對樹脂小片進行預熱。因此,可在維持升溫效果的狀態下向樹脂密封模具中搬入,且也可容易地進行溫度管理。In addition, it is preferable that the small piece holder is provided as a transfer small piece holder and the transfer small piece holder which loads and holds a plurality of resin small pieces in the holding holes provided at predetermined intervals, and the transfer small piece holder and the small piece conveying mechanism includes a small piece holder conveying mechanism that conveys the conveying small piece holder in which the resin small pieces sent from the resin small piece supply mechanism are loaded in the holding holes, and transfers the small piece holder to the holding hole. The resin chips loaded in the holding holes of the transfer chip holder are transferred to the transfer chip holder, and at least the transfer chip holder is provided with the heater. According to this, the resin chips can be preheated near the resin sealing mold. Therefore, it can be loaded into the resin-sealed mold while maintaining the effect of temperature increase, and temperature management can also be easily performed.

另外,優選為在所述交接小片保持器或所述搬送小片保持器設置溫度感測器,將所述加熱器的預熱溫度維持在規定溫度。據此,可更穩定地對樹脂小片進行預熱。Moreover, it is preferable to provide a temperature sensor in the said delivery die holder or the said conveyance die holder, and it is preferable to maintain the preheating temperature of the said heater at a predetermined temperature. Accordingly, the resin chips can be preheated more stably.

另外,優選為所述交接小片保持器的預熱溫度被設定為比所述搬送小片保持器的預熱溫度高的規定溫度。據此,可使樹脂小片根據搬送路徑的行進而階段性地升溫而在向裝載機交接時以規定的預熱溫度進行預熱。Moreover, it is preferable that the preheating temperature of the said delivery die holder is set to a predetermined temperature higher than the preheating temperature of the said conveyance die holder. According to this, the temperature of the resin small piece can be increased in steps according to the travel of the conveyance path, and can be preheated at a predetermined preheating temperature at the time of delivery to the loader.

另外,所述加熱器可設置於以規定間距設置於形成為框體狀的所述小片保持器上的所述保持孔的排列方向兩側、或者設置於將以規定間距設置於形成為框體狀的所述小片保持器上的所述保持孔分隔的位置上。如此,通過在保持孔的周圍或之間配設加熱器,可對各樹脂小片均等地進行預熱。In addition, the heaters may be provided on both sides in the arrangement direction of the holding holes provided at predetermined intervals in the small piece holder formed in the frame shape, or may be provided at predetermined intervals in the frame body formed at a predetermined interval. The retaining holes on the chip holder in the shape of a separate location. In this way, by arranging the heater around or between the holding holes, it is possible to uniformly preheat each resin chip.

另外,優選為所述樹脂小片供給機構通過被蓋覆蓋而與所述小片搬送機構區別地隔離,且設置有以使所述樹脂小片供給機構內的環境溫度成為規定溫度的方式進行溫度管理的冷卻裝置。據此,通過將收容有多個供給前的樹脂小片的樹脂小片供給機構與周邊環境隔離,可抑制樹脂小片的溫度上升而防止樹脂的硬化。進而,可利用冷卻裝置積極地將樹脂小片冷卻而更可靠地防止硬化的加劇。In addition, it is preferable that the resin chip supply mechanism is covered with a cover so as to be separated from the chip conveyance mechanism, and a cooling for temperature management is provided so that the ambient temperature in the resin chip supply mechanism becomes a predetermined temperature. device. According to this, by isolating the resin small piece supply mechanism that accommodates the plurality of pre-supplied resin small pieces from the surrounding environment, the temperature rise of the resin small pieces can be suppressed and the hardening of the resin can be prevented. Furthermore, it is possible to more reliably prevent the progress of hardening by actively cooling the resin chips by the cooling device.

[發明的效果][Effect of invention]

根據本發明,即便在向樹脂密封模具投入了大容量的樹脂小片的情況下,也可抑制樹脂密封模具的溫度下降。其結果,能夠在不使生產率下降的情況下,防止在樹脂密封時模具的溫度下降引起的成形品質的下降。According to the present invention, even when a large-capacity resin tablet is put into the resin-sealing mold, the temperature drop of the resin-sealing mold can be suppressed. As a result, it is possible to prevent a decrease in molding quality due to a decrease in the temperature of the mold at the time of resin sealing without reducing productivity.

以下,參照附圖對本發明的實施方式進行詳細說明。圖1是表示樹脂密封裝置10的佈局結構的概略平面圖。另外,圖2是表示圖1所示的樹脂密封裝置10的壓制部20特別是樹脂密封模具22及裝載機44的結構例的主要部分剖面圖。Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a schematic plan view showing the layout structure of the resin sealing device 10 . In addition, FIG. 2 is a main part cross-sectional view showing a configuration example of the press section 20 of the resin sealing device 10 shown in FIG. 1 , in particular, the resin sealing mold 22 and the loader 44 .

本實施方式的樹脂密封裝置10是對工件(被成形品)W進行樹脂密封的裝置。以下,舉轉移模制裝置為例進行說明。The resin sealing apparatus 10 of the present embodiment is an apparatus for resin sealing a workpiece (a product to be molded) W. Hereinafter, a transfer molding apparatus will be described as an example.

首先,關於作為成形物件的工件W,對一般的結構例進行說明。工件W包括在作為基材的第一構件Wa上主要搭載有作為電子零件的第二構件Wb的結構(參照圖2)。更具體而言,作為第一構件Wa,例如可列舉形成為細條狀的樹脂基板、陶瓷基板、金屬基板、引線框架、載體、晶片等各種包圍構件為例。進而,形狀並不限於細條狀,也可為圓形、四邊形。另外,作為第二構件Wb,可列舉半導體晶片(有時簡稱為“晶片”)、微機電系統(Micro-Electro-MechanicalSystem,MEMS)、電子零件、散熱板、用於配線/散熱的引線框架、用於電連接的凸塊等各種構件為例。即,本發明中的工件W是指在這些第一構件Wa上搭載(管芯(die)安裝、倒裝晶片安裝、打線接合安裝等)並重合有第二構件Wb的狀態的工件。因此,所述工件W也包括:在基板上搭載有一層或多層晶片的工件、在基板上搭載有半導體裝置的工件、在基板上搭載有攝像元件並在攝像元件的受光面接合透光玻璃而成的工件等。此處,作為樹脂密封的形態,假定了將安裝於基板的多個搭載零件收容在一個模腔34中來成批地進行樹脂密封的情況。此外,也可適用於按照各個搭載零件個別地收容在模腔34中來進行樹脂密封的情況。First, a general configuration example of the workpiece W as a molded article will be described. The workpiece W includes a structure in which a second member Wb as an electronic component is mainly mounted on a first member Wa as a base material (see FIG. 2 ). More specifically, as the first member Wa, for example, various surrounding members such as a resin substrate, a ceramic substrate, a metal substrate, a lead frame, a carrier, and a wafer formed in a thin strip shape can be exemplified. Furthermore, the shape is not limited to a strip shape, and may be a circle or a quadrangle. In addition, as the second member Wb, a semiconductor wafer (sometimes simply referred to as a "wafer"), a Micro-Electro-Mechanical System (MEMS), an electronic component, a heat sink, a lead frame for wiring/heat dissipation, Various members such as bumps for electrical connection are taken as an example. That is, the workpiece W in the present invention refers to a workpiece in a state where the second members Wb are stacked on these first members Wa (die mounting, flip chip mounting, wire bonding mounting, etc.). Therefore, the workpiece W also includes a workpiece on which one or more layers of wafers are mounted on a substrate, a workpiece on which a semiconductor device is mounted on a substrate, an imaging element mounted on the substrate, and light-transmitting glass is bonded to the light-receiving surface of the imaging element. finished workpieces, etc. Here, as a form of resin sealing, it is assumed that a plurality of mounted components mounted on the board are housed in one cavity 34 and resin-sealed in batches. In addition, it is also applicable to the case where each mounted component is individually accommodated in the cavity 34 for resin sealing.

另一方面,用於樹脂密封的模制樹脂(有時簡稱為“樹脂”)R例如是熱硬化性樹脂(例如為含有填料的環氧類樹脂)。狀態是固體形狀的樹脂小片R,此處列舉圓柱狀的情況為例進行說明,但不限定於所述形狀。On the other hand, the molding resin (sometimes abbreviated as "resin") R used for resin sealing is, for example, a thermosetting resin (eg, an epoxy resin containing a filler). The state is the resin small piece R of a solid shape, and the case where a cylindrical shape is mentioned as an example is demonstrated here, but it is not limited to the said shape.

繼而,對樹脂密封裝置10的概要進行說明。如圖1所示,樹脂密封裝置10包括供給模制樹脂R及工件W的供給單元10A、對工件W進行樹脂密封的壓制單元10B、收納樹脂密封後的成形品Wp的成形品收納單元10C作為主要結構。以下,對各單元進行說明,但設置於各單元的結構的配置為一例,且可採用各種各樣的配置。Next, the outline of the resin sealing apparatus 10 is demonstrated. As shown in FIG. 1 , the resin sealing apparatus 10 includes a supply unit 10A for supplying the molding resin R and the workpiece W, a pressing unit 10B for resin-sealing the workpiece W, and a molded article storage unit 10C for storing the resin-sealed molded article Wp as The main structure. Hereinafter, each unit will be described, but the arrangement of the structure provided in each unit is an example, and various arrangements can be adopted.

[供給單元10A][Supply unit 10A]

首先,在圖1中,供給單元10A包括供給工件W的工件供給部12及供給樹脂小片R的樹脂小片供給部14。工件供給部12具有儲料器(stocker)16,所述儲料器16收容收納有工件W的料盒(magazine)(未圖示)。利用推杆(未圖示)從各料盒送出的工件W例如以兩片為一組而與安置台18相向地排列。安置台18的工件W由後述的搬送機構的裝載機44保持並向壓制單元10B搬送。First, in FIG. 1 , the supply unit 10A includes a workpiece supply unit 12 for supplying workpieces W and a resin small piece supply unit 14 for supplying resin small pieces R. The workpiece supply unit 12 includes a stocker 16 that accommodates a magazine (not shown) in which the workpiece W is accommodated. The workpieces W sent out from the respective magazines by the push rods (not shown) are arranged, for example, in a set of two pieces so as to face the placement table 18 . The workpiece W on the placement table 18 is held by a loader 44 of a transfer mechanism to be described later, and is transferred to the pressing unit 10B.

另一方面,樹脂小片供給部14包括樹脂小片供給機構(此處是後述的零件送料器60),所述樹脂小片供給機構從收容許多樹脂小片R的收容容器將樹脂小片R排布並送出。從樹脂小片供給機構送出的樹脂小片R保持在小片保持器76,並經由後述的小片保持器搬送機構73及小片升降器機構74而交接至裝載機44。此外,符號78為用來裝填樹脂小片R的保持孔。交接後的樹脂小片R由裝載機44保持並向壓制單元10B搬送。關於樹脂小片供給部14的詳細情況將在後面敘述。On the other hand, the resin small piece supply unit 14 includes a resin small piece supply mechanism (here, a parts feeder 60 to be described later) that arranges and sends out the resin small pieces R from a storage container that accommodates a large number of resin small pieces R. The resin small pieces R fed from the resin small piece supply mechanism are held by the small piece holder 76 and transferred to the loader 44 via a small piece holder conveying mechanism 73 and a small piece lifter mechanism 74 which will be described later. In addition, the reference numeral 78 is a holding hole for filling the resin chip R. As shown in FIG. The transferred resin chips R are held by the loader 44 and transferred to the pressing unit 10B. Details of the resin chip supply unit 14 will be described later.

[壓制單元10B][Press unit 10B]

接著,壓制單元10B包括壓制部20,所述壓制部20對樹脂密封模具22進行打開/關閉驅動,並夾緊工件W進行樹脂密封。圖2所示的樹脂密封模具22包含下模24與上模26,且為通過公知的合模機構將至少任一個模具向開模/閉模方向按壓來進行開模/閉模的結構。另外,在上模26的夾緊面,形成有收容工件W的被樹脂密封的部位(搭載有第二構件Wb的部位)並供樹脂R填充的模腔34、及與模腔34連通的樹脂流路(剔料池(cull)、流道等)36。另一方面,在下模24的夾緊面,形成有支撐工件W的工件支撐部28、及用來收容樹脂小片R的筒狀的罐30。在本實施方式中,以規定的間距(稱為“罐間距”)設置有多個(此處為六個,但不限定於六個)罐30,在罐30的排列方向兩側(此處為左右側)設置有工件支撐部28。在各罐30內配設有由公知的轉移機構(未圖示)按壓的柱塞32。所述柱塞32受到按壓,而將罐30內的樹脂R供給至模腔34內。Next, the pressing unit 10B includes a pressing portion 20 that drives the resin sealing mold 22 to open/close, and clamps the workpiece W for resin sealing. The resin-sealed mold 22 shown in FIG. 2 includes a lower mold 24 and an upper mold 26, and has a structure in which mold opening/closing is performed by pressing at least one of the molds in the mold opening/closing direction by a known mold clamping mechanism. In addition, on the clamping surface of the upper mold 26 , a cavity 34 that accommodates the resin-sealed portion of the workpiece W (the portion where the second member Wb is mounted) and is filled with the resin R, and a resin that communicates with the cavity 34 are formed. Flow path (cull, runner, etc.) 36 . On the other hand, on the clamping surface of the lower mold|type 24, the workpiece|work support part 28 which supports the workpiece|work W, and the cylindrical tank 30 which accommodates the resin chip|tip R are formed. In the present embodiment, a plurality of (here, six, but not limited to) cans 30 are provided at a predetermined pitch (referred to as “can pitch”), and on both sides (here, six) in the arrangement direction of the cans 30 . A workpiece support portion 28 is provided. A plunger 32 pressed by a known transfer mechanism (not shown) is arranged in each tank 30 . The plunger 32 is pressed to supply the resin R in the tank 30 into the cavity 34 .

另外,上模26及下模24包括:加熱器23(例如電熱絲加熱器)、溫度感測器、控制部、電源等(除加熱器23以外未圖示),進行加熱及其控制。具體而言,上模26的加熱器23對上模26整體施加熱,另一方面,下模24的加熱器23除了對下模24整體施加熱以外還對工件W及樹脂R施加熱。由此,下模24及上模26被調整為規定溫度(根據樹脂的種類而不同,例如120℃~180℃)而被加熱。另外,收容於罐30中的固體形狀的樹脂小片R以能夠流動的狀態熔融。在包括以上結構的壓制部20中,將上模26與下模24合模來夾緊工件W,當樹脂密封模具22的罐30內的樹脂R在被施加熱與壓力的狀態下熔融並由柱塞32壓送以填充至模腔34時,熔融樹脂R在被加熱加壓的狀態下硬化,由此將工件W樹脂密封。In addition, the upper mold 26 and the lower mold 24 include heaters 23 (eg, heating wire heaters), temperature sensors, control units, power sources, and the like (except for the heaters 23 , not shown), and perform heating and control. Specifically, the heater 23 of the upper mold 26 applies heat to the entire upper mold 26 , while the heater 23 of the lower mold 24 applies heat to the workpiece W and the resin R in addition to the entire lower mold 24 . Thereby, the lower mold|type 24 and the upper mold|type 26 are adjusted to predetermined temperature (it differs according to the kind of resin, for example, 120 degreeC - 180 degreeC), and is heated. In addition, the solid-shaped resin small pieces R accommodated in the tank 30 are melted in a flowable state. In the pressing section 20 including the above structure, the upper mold 26 and the lower mold 24 are clamped to clamp the workpiece W, and when the resin R in the tank 30 of the resin sealing mold 22 is melted in a state where heat and pressure are applied, and When the plunger 32 is press-fed to fill the cavity 34 , the molten resin R is hardened in a heated and pressurized state, whereby the workpiece W is resin-sealed.

[成形品收納單元10C][Molded product storage unit 10C]

接著,在圖1中,成形品收納單元10C包括:取出部38,通過後述的作為搬送機構的卸載機52取出樹脂密封後的成形品Wp;澆口切斷部40,從成形品Wp去除澆口等無用樹脂;以及儲料器42,收納去除了無用樹脂的成形品Wp。成形品Wp被收納至收納用的料盒(未圖示)中,收納有成形品Wp的料盒依次被收容於儲料器42中。Next, in FIG. 1 , the molded product storage unit 10C includes a take-out unit 38 for taking out a resin-sealed molded product Wp by an unloader 52 serving as a conveyance mechanism, which will be described later, and a gate cutting unit 40 for removing a gate from the molded product Wp. Useless resin such as a mouth; and a stocker 42 for accommodating the molded product Wp from which the waste resin has been removed. The molded article Wp is accommodated in a magazine (not shown) for storage, and the magazine in which the molded article Wp is accommodated is sequentially accommodated in the stocker 42 .

接著,本實施方式的樹脂密封裝置10中,作為跨越各單元間進行搬送的機構,包括將樹脂小片R與工件W向壓制單元10B的樹脂密封模具22內搬入的裝載機44、及將成形品Wp與無用樹脂(成形後的剔料池、流道)從壓制單元10B的樹脂密封模具22內搬出的卸載機52。在裝載機44的下表面,設置有對工件W進行保持的卡盤爪46及對樹脂小片R進行保持的樹脂小片保持部48(參照圖2及圖4)。樹脂小片保持部48為以能夠收容樹脂小片R的方式形成的凹部,且設置成與樹脂密封模具22的罐間距為相同間距且與樹脂密封模具22的罐數為相同數量。另外,在所述凹部的入口甚至其附近設置有限制樹脂小片R的落下的開閉器50。開閉器50能夠通過開閉器驅動部(未圖示)進行開閉。由此,可在對樹脂小片R與工件W進行保持的同時搬送至壓制部20為止,並向樹脂密封模具22(此處為下模24)的工件支撐部28投入工件W,向罐30投入樹脂小片R。Next, the resin sealing apparatus 10 of the present embodiment includes, as a mechanism for conveying across the units, a loader 44 for conveying the resin chips R and the workpieces W into the resin sealing mold 22 of the press unit 10B, and a molded product An unloader 52 that unloads Wp and waste resin (reject pool after molding, runner) from the resin-sealed mold 22 of the press unit 10B. On the lower surface of the loader 44 , chuck claws 46 that hold the workpiece W and resin small piece holding portions 48 that hold the resin small pieces R are provided (see FIGS. 2 and 4 ). The resin small piece holding portion 48 is a concave portion formed so as to be able to accommodate the resin small piece R, and is provided at the same pitch as the tank pitch of the resin sealing mold 22 and the same number as the number of tanks in the resin sealing mold 22 . Moreover, the shutter 50 which restricts the fall of the resin small piece R is provided at the entrance of the said recessed part, and even its vicinity. The shutter 50 can be opened and closed by a shutter drive unit (not shown). Thereby, the workpiece W can be loaded into the workpiece support portion 28 of the resin-sealed mold 22 (here, the lower mold 24 ) and into the tank 30 while the resin small piece R and the workpiece W are held while being conveyed to the pressing portion 20 . Resin chip R.

另外,供給單元10A、壓制單元10B及成形品收納單元10C通過經單元化的台架彼此連結而裝配出樹脂密封裝置10。在各單元的裝置內側分別設置有引導部54,通過將引導部54彼此以呈直線狀連結的方式組裝而形成了導軌。裝載機44及卸載機52可分別沿著共用的導軌移動,裝載機44被設置成能夠在供給單元10A與壓制單元10B之間移動,卸載機52被設置成能夠在壓制單元10B與成形品收納單元10C之間移動。In addition, the supply unit 10A, the pressing unit 10B, and the molded product storage unit 10C are connected to each other by the unitized stage, and the resin sealing device 10 is assembled. A guide portion 54 is provided on the inside of the device of each unit, and a guide rail is formed by assembling the guide portions 54 to be linearly connected to each other. The loader 44 and the unloader 52 are respectively movable along a common guide rail, the loader 44 is provided so as to be movable between the supply unit 10A and the pressing unit 10B, and the unloader 52 is provided so as to be able to be accommodated in the pressing unit 10B and the molded product move between cells 10C.

因此,通過改變各單元的結構,可在維持使引導部54彼此連結的狀態的同時,變更樹脂密封裝置10的構成形態。例如,圖1是將壓制部20設置於兩處的例子,但也能夠構成壓制部20設置於一處或三處以上的多個壓制部20的樹脂密封裝置(未圖示)。此外,也可設為關於各單元而不存在一部分機構的樹脂密封裝置。Therefore, by changing the structure of each unit, the configuration form of the resin sealing device 10 can be changed while maintaining the state in which the guide portions 54 are connected to each other. For example, FIG. 1 shows an example in which the pressing parts 20 are provided at two places, but a resin sealing device (not shown) in which the pressing parts 20 are provided at one or three or more places can also be constituted. In addition, it is also possible to use a resin sealing device in which a part of the mechanism does not exist for each unit.

[樹脂小片供給部14][Resin chip supply unit 14]

繼而,對設置於樹脂密封裝置10的供給單元10A上的樹脂小片供給部14的結構進行說明。Next, the structure of the resin chip supply part 14 provided in the supply unit 10A of the resin sealing apparatus 10 is demonstrated.

首先,在圖3中,樹脂小片供給部14包括從收容許多樹脂小片R的收容容器將樹脂小片R排布並送出的零件送料器60(樹脂小片供給機構)。零件送料器60在激振器62上設置有小片收容容器64。當由激振器62激振時,小片收容容器64內的樹脂小片R在樹脂小片排布路65上排布成一行並朝向供給口65a送出(參照圖6)。但是,不限定於所述結構,例如也可包括設置收容許多樹脂小片R的小片料盒,利用推杆從小片料盒將樹脂小片R排布並送出的小片料盒方式的供給機構(未圖示)。此外,在供給口65a的前端部設置有止動件65b,所述止動件65b防止以台球狀送出的樹脂小片R的落下。First, in FIG. 3 , the resin small piece supply unit 14 includes a parts feeder 60 (resin small piece supply mechanism) that arranges and sends out the resin small pieces R from a storage container that accommodates a large number of resin small pieces R. The parts feeder 60 is provided with a chip storage container 64 on the exciter 62 . When excited by the vibration exciter 62, the resin chips R in the chip storage container 64 are arranged in a line on the resin chip arrangement path 65 and sent out toward the supply port 65a (see FIG. 6). However, it is not limited to the above-described structure, and may include, for example, a small-chip magazine type of supply mechanism (not shown in the figure) in which a small-chip magazine for accommodating a large number of resin chips R is provided, and the resin chips R are arranged and sent out from the small-chip magazine by a push rod. Show). Moreover, the stopper 65b which prevents the drop of the resin small piece R sent out in the billiard ball shape is provided in the front-end part of the supply port 65a.

此外,在本實施方式中,包括覆蓋零件送料器60的蓋66,零件送料器60與後述的小片搬送機構72等區別地隔離。由此,通過抑制收容於收容容器(此處為小片收容容器64)的樹脂小片R的溫度上升,使得不加劇樹脂R的硬化。另外,在蓋66內部設置冷卻裝置68,樹脂小片供給機構(此處為零件送料器60)內的環境溫度被溫度管理在規定溫度(例如,大致室溫即20℃~25℃)。由此,更可靠地防止硬化的加劇。此外,作為一例,在蓋66設置能夠開閉的開閉器66a,在從零件送料器60送出樹脂小片R時開放。In addition, in this embodiment, the cover 66 which covers the parts feeder 60 is included, and the parts feeder 60 is separated from the small piece conveyance mechanism 72 etc. which are mentioned later. Thereby, by suppressing the temperature rise of the resin small pieces R accommodated in the accommodating container (here, the small piece accommodating container 64), the hardening of the resin R is not accelerated. In addition, a cooling device 68 is provided inside the cover 66, and the ambient temperature in the resin chip supply mechanism (here, the parts feeder 60) is temperature-controlled at a predetermined temperature (for example, approximately room temperature, 20°C to 25°C). Thereby, the progress of hardening can be prevented more reliably. In addition, as an example, the cover 66 is provided with a shutter 66a which can be opened and closed, and is opened when the resin chips R are sent out from the parts feeder 60 .

另外,在圖4中,在供給口65a的附近設置有拾取/壓制機構70(樹脂小片裝填機構)。拾取/壓制機構70握持從供給口65a送出的樹脂小片R並裝填至後述的搬送小片保持器76a上所設置的保持孔78a中。在本實施方式中,作為一例,在供給口65a的上方附近,設置能夠在零件送料器60(供給口65a)與搬送小片保持器76a之間移動的拾取/壓制機構70,若對在顛倒的狀態下送出的圓柱狀的樹脂小片R進行保持,則以支撐軸70a為軸旋轉90°,使樹脂小片R沿鉛垂方向立起,移動至待機的搬送小片保持器76a的規定的孔上為止,並裝填至朝向鉛垂方向的保持孔78a中(參照箭頭A)。但是,不限定於所述結構,例如也可包括從供給口65a將樹脂小片R插入至旋轉工作臺的一個孔中,通過旋轉工作臺旋轉90°而依次裝填至搬送小片保持器76a的保持孔78a中的結構(未圖示)。將樹脂小片R從供給口65a裝填至搬送小片保持器76a的保持孔78a中的結構可從現有技術中選擇各種。In addition, in FIG. 4, the pick-up/press mechanism 70 (resin chip loading mechanism) is provided in the vicinity of the supply port 65a. The pick-up/press mechanism 70 holds the resin small chips R sent out from the supply port 65a and loads them into holding holes 78a provided in a conveyance chip holder 76a described later. In the present embodiment, as an example, a pick-up/press mechanism 70 that can move between the parts feeder 60 (supply port 65a ) and the conveying chip holder 76a is provided in the vicinity of the upper side of the supply port 65a. When the cylindrical resin small piece R sent out in the state is held, it is rotated by 90° about the support shaft 70a to make the resin small piece R stand up in the vertical direction and move to the predetermined hole of the waiting conveying small piece holder 76a. , and is loaded into the holding hole 78a facing the vertical direction (see arrow A). However, it is not limited to the above-described configuration, and for example, the resin chips R may be inserted into one hole of the rotary table from the supply port 65a, and the rotary table may be rotated by 90° to sequentially fill the holding holes of the transfer chip holder 76a. Structure in 78a (not shown). Various structures can be selected from the related art for the structure of loading the resin small pieces R into the holding holes 78a of the conveying small piece holder 76a from the supply port 65a.

[小片搬送機構72][Small piece transfer mechanism 72]

接著,樹脂小片R在被搬送小片保持器76a保持的狀態下由小片保持器搬送機構73搬送至小片升降器機構74,並交接至交接小片保持器76b,進而由小片升降器機構74從交接小片保持器76b交接至裝載機44的樹脂小片保持部48。以下,進行具體說明。Next, the resin chips R are transferred by the chip holder transfer mechanism 73 to the chip lifter mechanism 74 while being held by the transfer chip holder 76a, and are transferred to the transfer chip holder 76b, and are further transferred from the chip lifter mechanism 74 to the chip lifter mechanism 74. The holder 76b is handed over to the resin chip holder 48 of the loader 44 . Hereinafter, it demonstrates concretely.

圖4所示的小片保持器搬送機構73構成為在載置有搬送小片保持器76a的狀態下在零件送料器60側與小片升降器機構74側之間往復移動(參照箭頭B)。作為一例,搬送小片保持器76a載置於沿著搬送軌道移動的移動體,通過帶等驅動而往復移動。The die holder conveyance mechanism 73 shown in FIG. 4 is configured to reciprocate between the parts feeder 60 side and the die lifter mechanism 74 side with the conveyance die holder 76 a mounted thereon (see arrow B). As an example, the transport small piece holder 76a is placed on a moving body that moves along the transport rail, and is driven by a belt or the like to reciprocate.

圖7的(a)~圖7的(c)所示的搬送小片保持器76a形成為以規定間距(此處為與罐間距相同的間距)排列成一行地設置有多個(此處為與罐數為相同數量的六個)能夠裝填樹脂小片R的保持孔78a的框體狀(此處為長方體)。The conveyance small-piece holder 76a shown in FIG.7(a)-FIG.7(c) is formed so that a plurality of (here, the same pitch as the tank pitch) are arranged in a row at a predetermined pitch (here, the same pitch as the tank pitch). The number of cans is the same number of six) in a frame shape (here, a rectangular parallelepiped) in which the holding holes 78a of the resin small pieces R can be filled.

此處,保持孔78a形成為與樹脂小片R為相同形狀的圓筒狀,但不限定於此,例如也可形成為長方體狀。另外,保持孔78a的數量也無限定。因此,根據保持孔78a的數量,搬送小片保持器76a的形狀也可形成為縱橫比率各種各樣的長方體或立方體。此外,搬送小片保持器76a可以比罐間距窄或寬的間距裝填樹脂小片R,在交接至交接小片保持器76b之前間距變換為與罐間距相同的間距,也可設置交接小片保持器76b的兩倍數量的保持孔78a並分成兩次交接樹脂小片R。Here, the holding hole 78a is formed in a cylindrical shape having the same shape as the resin small piece R, but it is not limited to this, and may be formed in a rectangular parallelepiped shape, for example. In addition, the number of the holding holes 78a is also not limited. Therefore, depending on the number of the holding holes 78a, the shape of the transport small piece holder 76a may be formed into a rectangular parallelepiped or a cube having various aspect ratios. In addition, the transfer chip holder 76a may be filled with the resin chips R at a pitch narrower or wider than the tank pitch, and the pitch may be changed to the same pitch as the tank pitch before handover to the transfer chip holder 76b, or two pieces of the transfer chip holder 76b may be provided. The number of holding holes 78a is doubled and the resin chips R are divided into two transfers.

另外,保持孔78a沿鉛垂方向貫通搬送小片保持器76a,在保持孔78a的下端甚至其附近設置有限制樹脂小片R的落下的開閉器80。在搬送小片保持器76a設置有開閉器驅動部82,開閉器80能夠開閉。據此,可將樹脂小片R裝填並保持於保持孔78a中。In addition, the holding hole 78a penetrates the conveying small piece holder 76a in the vertical direction, and a shutter 80 for restricting the drop of the resin small piece R is provided at the lower end of the holding hole 78a and even in the vicinity thereof. A shutter drive unit 82 is provided in the transport small piece holder 76a, and the shutter 80 can be opened and closed. Accordingly, the resin small pieces R can be loaded and held in the holding holes 78a.

圖4及圖5所示的小片升降器機構74設置於在上方待機的裝載機44的下方,構成為能夠升降交接小片保持器76b(參照箭頭C)。交接小片保持器76b也成為與搬送小片保持器76a同樣的結構,但在交接小片保持器76b未設置可動的開閉器80,通過保持孔78b的下端部的內徑形成得相對小的結構,而能夠對樹脂小片R進行保持(參照圖5)。但是,也可在交接小片保持器76b設置可動的開閉器80,在樹脂小片R的上升時使開閉器80可動地退避。此外,不限定於所述結構,也可為在後述的上推杆92直接搭載樹脂小片R來代替開閉器80的結構等。The die lifter mechanism 74 shown in FIGS. 4 and 5 is provided below the loader 44 that is waiting above, and is configured to be capable of raising and lowering the die holder 76b (see arrow C). The delivery small piece holder 76b also has the same structure as the conveying small piece holder 76a, but the movable shutter 80 is not provided in the delivery small piece holder 76b, and the inner diameter of the lower end portion of the holding hole 78b is relatively small. The resin small pieces R can be held (see FIG. 5 ). However, a movable shutter 80 may be provided in the delivery chip holder 76b, and the shutter 80 may be movably retracted when the resin chip R is raised. In addition, it is not limited to the said structure, The structure etc. in which the resin small piece R is directly mounted on the push rod 92 mentioned later instead of the shutter 80 may be sufficient.

小片升降器機構74包括沿著設置於升降器本體74a的搬送軌道上下移動的升降部90。在升降部90的上部,設置有交接小片保持器76b。另一方面,在升降部90的下部,以能夠上下移動的方式設置有以與交接小片保持器76b的各保持孔78b的位置對應的間距形成的梳齒狀的上推杆92(參照箭頭D)。因此,當升降部90進行升降運行時,交接小片保持器76b及上推杆92能夠升降,且進而能夠相對於裝填於交接小片保持器76b的保持孔78b中的樹脂小片R從下方將上推杆92上推。此外,作為一例,升降部90由伺服馬達等驅動源88及滾珠絲杠機構等驅動傳遞部件(未圖示)驅動。另外,上推杆92也同樣地由滾珠絲杠機構等驅動部(未圖示)驅動。The die lifter mechanism 74 includes a lifter 90 that moves up and down along a conveyance rail provided in the lifter body 74a. In the upper part of the lift part 90, the delivery die holder 76b is provided. On the other hand, on the lower part of the lift portion 90, a comb-shaped upper push rod 92 formed at a pitch corresponding to the position of each holding hole 78b of the delivery and delivery die holder 76b is provided so as to be movable up and down (see arrow D). ). Therefore, when the elevating part 90 performs the elevating operation, the delivery die holder 76b and the push-up rod 92 can be raised and lowered, and further, the resin pellet R loaded in the holding hole 78b of the delivery die holder 76b can be pushed up from below. Rod 92 is pushed up. In addition, as an example, the raising/lowering part 90 is driven by the drive source 88, such as a servomotor, and a drive transmission member (not shown), such as a ball screw mechanism. In addition, the upper push rod 92 is similarly driven by a drive unit (not shown) such as a ball screw mechanism.

根據以上的結構,樹脂小片R在保持於搬送小片保持器76a上所設置的保持孔78a中的狀態下,由小片保持器搬送機構73搬送至在裝載機44的下方待機的交接小片保持器76b的上表面附近為止(箭頭B)。接下來,在搬送小片保持器76a的保持孔78a與交接小片保持器76b的保持孔78b在鉛垂方向上同軸且一致的狀態下開閉器80開放,樹脂小片R落下而交接至交接小片保持器76b(保持孔78b)。在本實施方式中,將樹脂小片R從搬送小片保持器76a交接至交接小片保持器76b,但未必限定於所述結構,作為一例,也可為拾取/壓制機構70直接將樹脂小片R裝填在交接小片保持器76b的保持孔78b中的結構。繼而,樹脂小片R在保持於交接小片保持器76b的狀態下,由升降部90從升降器本體74a的下部上升至在上方待機的裝載機44的下表面附近為止(箭頭C)。接下來,在交接小片保持器76b的保持孔78b與裝載機44的樹脂小片保持部48在鉛直方向上同軸且一致的狀態下,由上推杆92將樹脂小片R上推,裝載機44(樹脂小片保持部48)的開閉器50可動關閉,然後上推杆92下降,由此進行交接(箭頭D)。According to the above configuration, the resin small piece R is conveyed by the small piece holder conveying mechanism 73 to the delivery small piece holder 76b waiting under the loader 44 while being held in the holding hole 78a provided in the conveying small piece holder 76a near the upper surface (arrow B). Next, the shutter 80 is opened in a state in which the holding hole 78a of the transfer small piece holder 76a and the holding hole 78b of the delivery small piece holder 76b are coaxial in the vertical direction, and the shutter 80 is opened, and the resin small piece R is dropped and handed over to the delivery small piece holder. 76b (retaining hole 78b). In the present embodiment, the resin chips R are transferred from the transfer chip holder 76a to the transfer chip holder 76b, but the configuration is not necessarily limited to the above-mentioned configuration. As an example, the pickup/press mechanism 70 may directly load the resin chips R in The structure in the holding hole 78b of the die holder 76b is handed over. Next, the resin chip R is lifted by the lifter 90 from the lower part of the lifter body 74a to the vicinity of the lower surface of the loader 44 waiting above by the lifter 90 while being held by the delivery chip holder 76b (arrow C). Next, in a state in which the holding hole 78b of the transfer die holder 76b and the resin small piece holding portion 48 of the loader 44 are coaxial and aligned in the vertical direction, the resin small piece R is pushed up by the push-up rod 92, and the loader 44 ( The shutter 50 of the resin small piece holding portion 48) is movably closed, and then the upper push rod 92 is lowered, whereby the handover is performed (arrow D).

另外,在本實施方式中,設為以下結構,即,在小片搬送機構72設置小片保持器搬送機構73及小片升降器機構74並以兩層的搬送線將樹脂小片R交接至裝載機44,但不限定於所述結構。例如未必需要小片保持器搬送機構73,也可為拾取/壓制機構70直接將樹脂小片R裝填至交接小片保持器76b的保持孔78b中的結構。進而,也可為以三層以上的搬送線進行交接的結構。此外,在搬送線呈多層構成的情況下,設置於最終的搬送線並將樹脂小片R交接至裝載機44的小片保持器76b被限制為保持孔78b與罐間距為相同間距且與樹脂密封模具22的罐30為相同數量,但設置於比此更靠上游側的搬送線的小片保持器76a未必需要配設成與罐間距為相同間距,或者與罐數為相同數量。在此情況下,作為一例,只要設置罐間距變換機構等、或者作為相對於小片保持器76b具有整數倍的保持孔78a的小片保持器76a,設為分成多次交接樹脂小片R的結構即可。另一方面,例如作為將小片搬送機構72沿鉛垂方向來搬送樹脂小片R,也可設置為從零件送料器60分別直接送出樹脂小片R並裝填至小片保持器76b,沿90°垂直方向變更姿勢並交接至裝載機44。In addition, in the present embodiment, a configuration is adopted in which the die holder conveyance mechanism 73 and the die lifter mechanism 74 are provided in the die conveyance mechanism 72, and the resin pellets R are delivered to the loader 44 by two conveyance lines, However, it is not limited to the above structure. For example, the die holder conveyance mechanism 73 is not necessarily required, and the pickup/press mechanism 70 may directly load the resin die R into the holding holes 78b of the delivery die holder 76b. Furthermore, it is good also as the structure which transfers by three or more layers of conveyance lines. In addition, when the conveying line has a multi-layered structure, the small-piece holder 76b provided on the final conveying line and delivering the resin chips R to the loader 44 is restricted to hold the hole 78b at the same pitch as the tank pitch and seal the mold with the resin. Although the number of tanks 30 of 22 is the same, the chip holders 76a provided on the conveying line further upstream are not necessarily required to be arranged at the same pitch as the tank pitch or the same number as the number of tanks. In this case, as an example, a tank pitch changing mechanism or the like may be provided, or a structure in which the resin small pieces R are divided into multiple times as a small piece holder 76a having an integral multiple of the holding holes 78a with respect to the small piece holder 76b may be provided. . On the other hand, for example, as the small piece conveying mechanism 72 to convey the resin small pieces R in the vertical direction, the resin small pieces R may be directly fed out from the parts feeder 60 and loaded into the small piece holder 76b, and changed in the 90° vertical direction. pose and hand over to the loader 44 .

[加熱器96][Heater 96]

此處,在本實施方式的搬送小片保持器76a及交接小片保持器76b,設置有對裝填於保持孔78a、保持孔78b中的樹脂小片R進行預熱的加熱器96(圖3~圖7的(c))。據此,可在將從零件送料器60供給的樹脂小片R交接至裝載機44之前的期間進行預熱,進而,通過在裝載機44也設置加熱器(未圖示),可從零件送料器60至樹脂密封模具22對樹脂小片R進行預熱。由於在小片保持器76b通常保持一次樹脂密封所需的樹脂小片R並成批地交接至裝載機44,因此可使樹脂小片R各自的溫度條件(預熱條件)相同,且可使成形品質穩定。在使用搬送小片保持器76a及交接小片保持器76b作為將樹脂小片R交接至工件W時的結構的情況下,至少需要在即將向裝載機44交接之前的交接小片保持器76b設置加熱器96。Here, in the transport small piece holder 76a and the delivery small piece holder 76b of the present embodiment, heaters 96 for preheating the resin small pieces R loaded in the holding holes 78a and 78b are provided ( FIGS. 3 to 7 ). of (c)). According to this, preheating can be performed before the resin chips R supplied from the parts feeder 60 are delivered to the loader 44, and furthermore, by providing a heater (not shown) in the loader 44, the parts feeder can From 60 to the resin sealing mold 22, the resin chips R are preheated. Since the resin chips R required for primary resin sealing are usually held in the chip holder 76b and transferred to the loader 44 in batches, the temperature conditions (preheating conditions) of the resin chips R can be made the same, and the molding quality can be stabilized . When using the conveying die holder 76a and the delivery die holder 76b as a structure for delivering the resin die R to the workpiece W, at least the heater 96 needs to be provided in the delivery die holder 76b immediately before the delivery to the loader 44.

此外,如上所述,向零件送料器60的小片收容容器64投入了許多樹脂小片R,但根據周邊溫度環境的不同,有與投入時的狀態相比,伴隨時間的經過而依次加劇硬化之虞。因此,作為通過利用蓋66覆蓋零件送料器60而與周邊環境隔離的結構,通過抑制樹脂小片R的溫度上升而使得不加劇樹脂R的硬化。進而,也可利用冷卻裝置68積極地將供給前的樹脂小片R冷卻。In addition, as described above, a large number of resin small pieces R are put into the small piece storage container 64 of the parts feeder 60. However, depending on the surrounding temperature environment, there is a possibility that the hardening will gradually increase with the passage of time compared with the state at the time of insertion. . Therefore, as the structure to be isolated from the surrounding environment by covering the parts feeder 60 with the cover 66 , the hardening of the resin R is not accelerated by suppressing the temperature rise of the resin chips R. Furthermore, it is also possible to actively cool the resin small pieces R before supply by the cooling device 68 .

作為本實施方式的結構例,在以規定間距設置於形成為框體狀的小片保持器76a、小片保持器76b上的保持孔78a、保持孔78b的排列方向兩側,內置有一個或多個管狀的加熱器96(圖7的(a))。但是,不限定於所述結構,作為其他例子,也可在將以規定間距設置的保持孔78a、保持孔78b分隔的位置內置一個或多個管狀的加熱器96(圖7的(b))。如此,通過在保持孔78a、保持孔78b的周圍或之間配設加熱器96,可對各樹脂小片R均等地進行預熱。當然,加熱器96不限於管狀,可採用各種各樣的形狀,而且,不限於小片保持器76a、小片保持器76b的內部,也可設置於外部。因此,作為本實施方式的變形例,例如可為在位於保持孔78a、保持孔78b的排列方向兩側的小片保持器76a、小片保持器76b的外部設置板狀的加熱器96的結構(圖7的(c))。As a configuration example of the present embodiment, one or a plurality of small piece holders 76a formed in a frame shape, holding holes 78a in the small piece holder 76b, and holding holes 78b provided at predetermined intervals in the arrangement direction of the holding holes 78b are built-in one or more A tubular heater 96 ( FIG. 7( a )). However, it is not limited to the above-described structure, and as another example, one or more tubular heaters 96 may be built in positions separating the holding holes 78 a and the holding holes 78 b provided at a predetermined pitch ( FIG. 7( b )). . In this way, by arranging the heaters 96 around or between the holding holes 78a and the holding holes 78b, each of the resin small pieces R can be preheated equally. Of course, the heater 96 is not limited to a tubular shape, and various shapes can be employed, and the heater 96 is not limited to the inside of the chip holder 76a and the chip holder 76b, but may be provided outside. Therefore, as a modification of the present embodiment, for example, a structure in which plate-shaped heaters 96 are provided outside the chip holders 76a and 76b located on both sides in the arrangement direction of the holding holes 78a and the holding holes 78b (Fig. 7(c)).

此外,在本實施方式中,使用電熱絲加熱器作為加熱器96,但並不限定於此,可使用鎧裝加熱器、碳加熱器等各種各樣的公知的加熱機構。In addition, in this Embodiment, although the heating wire heater was used as the heater 96, it is not limited to this, Various well-known heating means, such as a sheathed heater and a carbon heater, can be used.

另外,加熱器96的預熱溫度被設定為比樹脂密封溫度低的規定溫度,但進而作為本實施方式中的預熱溫度的設定例,交接小片保持器76b的預熱溫度被設定為比搬送小片保持器76a的預熱溫度高的規定溫度。作為一例,在樹脂密封溫度為130℃~150℃的模制樹脂R的情況下,搬送小片保持器76a的預熱溫度被設定為50℃~60℃左右,交接小片保持器76b的預熱溫度被設定為60℃~70℃左右。據此,可使樹脂小片R根據搬送路徑的行進而階段性地升溫,在向裝載機44交接時以規定的預熱溫度進行預熱。此外,在本例中在裝載機44包括加熱器的情況下,裝載機44的預熱溫度被設定為70℃~80℃左右。但是,不限定於分別例示的規定溫度。In addition, the preheating temperature of the heater 96 is set to a predetermined temperature lower than the resin sealing temperature, but further as a setting example of the preheating temperature in the present embodiment, the preheating temperature of the delivery die holder 76b is set to be higher than the conveyance temperature The preheating temperature of the die holder 76a is a predetermined temperature high. As an example, in the case of the molding resin R whose resin sealing temperature is 130°C to 150°C, the preheating temperature of the transfer die holder 76a is set to about 50°C to 60°C, and the preheating temperature of the die holder 76b is set to be handed over. It is set to about 60 degreeC - 70 degreeC. Thereby, the temperature of the resin small piece R can be increased in steps according to the travel of the conveyance path, and it can be preheated at a predetermined preheating temperature at the time of delivery to the loader 44 . In addition, in this example, when the loader 44 includes a heater, the preheating temperature of the loader 44 is set to about 70°C to 80°C. However, it is not limited to the predetermined temperature exemplified separately.

另外,在本實施方式的小片保持器76a、小片保持器76b,與加熱器96一併設置有溫度感測器98(參照圖7的(a)~圖7的(c)),因此能夠將加熱器96的預熱溫度維持在所述的規定溫度。因此,可更穩定地對樹脂小片R進行預熱。In addition, since the temperature sensor 98 (refer FIG. 7( a ) to FIG. 7( c )) is provided in the die holder 76 a and the die holder 76 b of the present embodiment together with the heater 96 , the temperature sensor 98 can be The preheating temperature of the heater 96 is maintained at the aforementioned predetermined temperature. Therefore, the resin chips R can be preheated more stably.

此外,在小片搬送機構72以多層(兩層以上)的搬送線交接的結構的情況下,並非必須在所有的小片保持器76均設置加熱器96。即,根據樹脂小片R的種類、尺寸、裝填於小片保持器76的容量等而在適宜需要的小片保持器76設置加熱器96即可。在此情況下,加熱器96優選為設置於相對下游側(裝載機44側)的小片保持器76,更適合的是優選為設置於最終的搬送線上所設置的將樹脂小片R交接至裝載機44的小片保持器76(此處為交接小片保持器76b)。據此,可在距樹脂密封模具22近的地方對樹脂小片R進行預熱。因此,可在維持升溫效果的狀態下向樹脂密封模具22中搬入,且也可容易地進行溫度管理。In addition, in the case of the structure in which the die conveyance mechanism 72 is delivered by multiple (two or more) conveyance lines, it is not necessary to provide the heaters 96 in all the die holders 76 . That is, the heater 96 may be provided in the die holder 76 as appropriate depending on the type and size of the resin die R, the capacity to be loaded in the die holder 76 , and the like. In this case, the heater 96 is preferably provided on the opposite downstream side (the side of the loader 44 ) to the die holder 76 , and more preferably provided on the final transfer line for delivering the resin die R to the loader. 44 of die holder 76 (here, handover die holder 76b). According to this, the resin small piece R can be preheated near the resin sealing mold 22 . Therefore, it is possible to carry in the resin sealing mold 22 while maintaining the effect of temperature increase, and it is also possible to easily perform temperature management.

如以上說明那樣,根據本發明,可在將從樹脂小片供給機構供給的樹脂小片交接至裝載機之前的期間進行預熱。因此,即便在向樹脂密封模具(罐)投入了大容量的樹脂小片的情況下,也可減小樹脂密封模具與所投入的樹脂小片的溫度差,因此可抑制樹脂小片向罐投入引起的溫度下降。其結果,樹脂密封模具的加熱時間不會變長,可防止生產率的下降及成形品質的下降。As described above, according to the present invention, preheating can be performed before the resin chips supplied from the resin chip supply mechanism are delivered to the loader. Therefore, even when large-capacity resin chips are put into the resin-sealing mold (tank), the temperature difference between the resin-sealing mold and the put-in resin chips can be reduced, so that the temperature caused by the introduction of the resin chips into the tank can be suppressed. decline. As a result, the heating time of the resin-sealed mold does not increase, and it is possible to prevent a decrease in productivity and a decrease in molding quality.

此外,本發明並不限定於以上說明的實施例,能夠在不脫離本發明的範圍內進行各種變更。In addition, this invention is not limited to the Example demonstrated above, Various changes can be added in the range which does not deviate from this invention.

10:樹脂密封裝置 10A:供給單元 10B:壓制單元 10C:成形品收納單元 12:工件供給部 14:樹脂小片供給部 16、42:儲料器 18:安置台 20:壓制部 22:樹脂密封模具 23:樹脂密封模具內加熱器 24:下模 26:上模 28:工件支撐部 30:罐 32:柱塞 34:模腔 36:樹脂流路(剔料池、流道) 38:取出部 40:澆口切斷部 44:裝載機(樹脂小片保持部) 46:卡盤爪 48:樹脂小片保持部 50、66a:開閉器 52:卸載機 54:引導部 60:零件送料器(樹脂小片供給機構) 62:激振器 64:收容容器(小片收容容器) 65:樹脂小片排布路 65a:供給口 65b:止動件 66:蓋 68:冷卻裝置 70:拾取/壓制機構(樹脂小片裝填機構) 70a:支撐軸 72:小片搬送機構 73:小片保持器搬送機構 74:小片升降器機構 74a:升降器本體 76:小片保持器 76a:搬送小片保持器(小片保持器) 76b:交接小片保持器(小片保持器) 78:保持孔 78a:搬送小片保持器的保持孔 78b:交接小片保持器的保持孔 80:小片保持器內開閉器 82:開閉器驅動部 88:驅動源 90:升降部 92:上推杆 96:加熱器 98:溫度感測器 A、B、C、D:箭頭 R:模制樹脂(樹脂小片、樹脂、熔融樹脂) W:工件(被成形品) Wa:第一構件 Wb:第二構件 Wp:成形品10: Resin sealing device 10A: Supply unit 10B: Pressing unit 10C: Molded product storage unit 12: Workpiece supply department 14: Resin chip supply part 16, 42: Stocker 18: Placement table 20: Press Department 22: Resin sealing mold 23: Resin-sealed in-mold heater 24: Lower die 26: Upper die 28: Workpiece support 30: Cans 32: Plunger 34: Cavity 36: Resin flow path (reject pool, runner) 38: Take out part 40: Gate cutting part 44: Loader (resin chip holder) 46: Chuck jaws 48: Resin small piece holding part 50, 66a: switch 52: Unloader 54: Guidance Department 60: Parts feeder (resin chip supply mechanism) 62: Shaker 64: Storage Container (Small Piece Storage Container) 65: resin chip arrangement 65a: Supply port 65b: Stopper 66: Cover 68: Cooling device 70: Picking/Pressing Mechanism (Resin Chip Loading Mechanism) 70a: Support shaft 72: Small piece transfer mechanism 73: Small piece holder conveying mechanism 74: Small piece lifter mechanism 74a: Lifter body 76: Small piece holder 76a: Transporting the small piece holder (small piece holder) 76b: handover die holder (die holder) 78: Hold Holes 78a: Holding hole for conveying small piece holder 78b: Retaining hole for handing over the small holder 80: Shutter in small piece holder 82: Switch driver 88: drive source 90: Lifting part 92: Putting up 96: Heater 98: temperature sensor A, B, C, D: Arrow R: Molding resin (resin chips, resin, molten resin) W: Workpiece (formed product) Wa: first component Wb: Second component Wp: Molded product

圖1是表示本發明實施方式的樹脂密封裝置的佈局結構的概略平面圖。 圖2是表示圖1的壓制部及裝載機的結構例的主要部分剖面圖。 圖3是關於圖1的樹脂小片供給部的結構及動作的例子的平面圖。 圖4是關於圖1的樹脂小片供給部及小片搬送機構的結構及動作的例子的說明圖。 圖5是關於圖4的小片搬送機構中所包括的小片升降器機構的結構及動作的例子的說明圖。 圖6是關於圖1的樹脂小片供給部的結構及動作的例子的說明圖。 圖7的(a)~圖7的(c)是關於圖1所示的樹脂密封裝置中的小片保持器及設置於小片保持器的加熱器的配置結構例的說明圖。FIG. 1 is a schematic plan view showing a layout structure of a resin sealing device according to an embodiment of the present invention. FIG. 2 is a cross-sectional view of a main part showing a configuration example of a press section and a loader of FIG. 1 . FIG. 3 is a plan view of an example of the configuration and operation of the resin chip supply unit of FIG. 1 . FIG. 4 is an explanatory diagram of an example of the configuration and operation of the resin chip supply unit and the chip conveying mechanism of FIG. 1 . FIG. 5 is an explanatory diagram of an example of the configuration and operation of a small piece lifter mechanism included in the small piece conveying mechanism of FIG. 4 . FIG. 6 is an explanatory diagram of an example of the configuration and operation of the resin chip supply unit of FIG. 1 . FIGS. 7( a ) to 7 ( c ) are explanatory diagrams of an arrangement configuration example of the die holder and the heater provided in the die holder in the resin sealing device shown in FIG. 1 .

14:樹脂小片供給部14: Resin chip supply part

44:裝載機(樹脂小片保持部)44: Loader (resin chip holder)

60:零件送料器(樹脂小片供給機構)60: Parts feeder (resin chip supply mechanism)

64:收容容器(小片收容容器)64: Storage container (small piece storage container)

65:樹脂小片排布路65: resin chip arrangement

65a:供給口65a: Supply port

65b:止動件65b: Stopper

66:蓋66: Cover

66a:開閉器66a: Switches

68:冷卻裝置68: Cooling device

70:拾取/壓制機構(樹脂小片裝填機構)70: Picking/Pressing Mechanism (Resin Chip Loading Mechanism)

72:小片搬送機構72: Small piece transfer mechanism

73:小片保持器搬送機構73: Small piece holder conveying mechanism

74:小片升降器機構74: Small piece lifter mechanism

74a:升降器本體74a: Lifter body

76a:搬送小片保持器(小片保持器)76a: conveying the small piece holder (small piece holder)

76b:交接小片保持器(小片保持器)76b: handover die holder (die holder)

78a:搬送小片保持器的保持孔78a: Holding hole for conveying small piece holder

78b:交接小片保持器的保持孔78b: Retaining hole for handing over the small holder

80:小片保持器內開閉器80: Shutter in small piece holder

82:開閉器驅動部82: Switch driver

88:驅動源88: drive source

90:升降部90: Lifting part

96:加熱器96: Heater

W:工件(被成形品)W: Workpiece (formed product)

Claims (8)

一種樹脂密封裝置,利用裝載機將樹脂小片搬入至樹脂密封模具中進行樹脂密封,且所述樹脂密封裝置的特徵在於,包括: 樹脂小片供給機構,從收容許多樹脂小片的收容容器將樹脂小片排布並送出;以及 小片搬送機構,在保持多個從所述樹脂小片供給機構送出的樹脂小片的狀態下進行搬送,並交接至所述裝載機, 所述小片搬送機構具有將多個樹脂小片裝填並保持於以規定間距設置的保持孔中的小片保持器, 在所述小片保持器設置有以比樹脂密封溫度低的規定溫度對樹脂小片進行預熱的加熱器。A resin sealing device, using a loader to carry resin chips into a resin sealing mold for resin sealing, and the resin sealing device is characterized by comprising: a resin chip feeding mechanism that arranges and sends out the resin chips from a storage container that houses a plurality of resin chips; and The small piece conveying mechanism conveys the plurality of resin small pieces sent out from the resin small piece supply mechanism while holding the plurality of resin small pieces, and transfers them to the loader, The chip conveying mechanism includes a chip holder for loading and holding a plurality of resin chips in holding holes provided at predetermined intervals, The die holder is provided with a heater that preheats the resin die at a predetermined temperature lower than the resin sealing temperature. 根據權利要求1所述的樹脂密封裝置,其特徵在於, 所述小片保持器被設置為交接小片保持器,所述交接小片保持器將多個樹脂小片裝填並保持於設置成與所述樹脂密封模具的罐間距為相同間距且與所述樹脂密封模具的罐數為相同數量的所述保持孔中, 所述小片搬送機構包括小片升降器機構,所述小片升降器機構將裝填於所述交接小片保持器的所述保持孔中的樹脂小片從下方多個同時交接至所述裝載機, 在所述交接小片保持器設置有所述加熱器。The resin sealing device according to claim 1, wherein The die holder is provided as a handover die holder that loads and holds a plurality of resin die at the same pitch as the tank pitch of the resin-sealing mold and is spaced apart from the resin-sealing mold. The number of canisters is the same as the number of said holding holes, The small piece conveying mechanism includes a small piece lifter mechanism that simultaneously transfers a plurality of resin small pieces loaded in the holding holes of the transfer small piece holder to the loader from below, The heater is provided in the handover die holder. 根據權利要求2所述的樹脂密封裝置,其特徵在於, 所述小片保持器被設置為搬送小片保持器、及所述交接小片保持器,所述搬送小片保持器將多個樹脂小片裝填並保持於以規定間距設置的所述保持孔中, 所述小片搬送機構包括小片保持器搬送機構,所述小片保持器搬送機構搬送在所述保持孔中裝填有從所述樹脂小片供給機構送出的樹脂小片的所述搬送小片保持器,並將裝填於所述搬送小片保持器的所述保持孔中的樹脂小片交接至所述交接小片保持器, 至少在所述交接小片保持器設置有所述加熱器。The resin sealing device according to claim 2, wherein The small piece holder is provided as a transfer small piece holder and the transfer small piece holder which loads and holds a plurality of resin small pieces in the holding holes provided at predetermined intervals, and the transfer small piece holder, The small piece conveying mechanism includes a small piece holder conveying mechanism that conveys the conveying small piece holder in which the resin small pieces sent from the resin small piece supplying mechanism are loaded in the holding holes, and loads the small piece holder. The resin chips in the holding holes of the transfer chip holder are handed over to the transfer chip holder, The heater is provided at least in the handover die holder. 根據權利要求3所述的樹脂密封裝置,其特徵在於, 在所述交接小片保持器或所述搬送小片保持器設置溫度感測器,將所述加熱器的預熱溫度維持在規定溫度。The resin sealing device according to claim 3, wherein: A temperature sensor is provided in the transfer die holder or the transfer die holder, and the preheating temperature of the heater is maintained at a predetermined temperature. 根據權利要求3或4所述的樹脂密封裝置,其特徵在於, 所述交接小片保持器的預熱溫度被設定為比所述搬送小片保持器的預熱溫度高的規定溫度。The resin sealing device according to claim 3 or 4, wherein: The preheating temperature of the transfer die holder is set to a predetermined temperature higher than the preheating temperature of the transport die holder. 根據權利要求1至4中任一項所述的樹脂密封裝置,其特徵在於, 所述加熱器設置於以規定間距設置於形成為框體狀的所述小片保持器上的所述保持孔的排列方向兩側。The resin sealing device according to any one of claims 1 to 4, wherein: The heaters are provided on both sides in the arrangement direction of the holding holes provided in the frame-shaped small-piece holder at a predetermined pitch. 根據權利要求1至4中任一項所述的樹脂密封裝置,其特徵在於, 所述加熱器設置於將以規定間距設置於形成為框體狀的所述小片保持器上的所述保持孔分隔的位置上。The resin sealing device according to any one of claims 1 to 4, wherein: The heater is provided at a position separating the holding holes provided in the frame-shaped small-piece holder at a predetermined pitch. 根據權利要求1至4中任一項所述的樹脂密封裝置,其特徵在於, 所述樹脂小片供給機構通過被蓋覆蓋而與所述小片搬送機構區別地隔離,且設置有以使所述樹脂小片供給機構內的環境溫度成為規定溫度的方式進行溫度管理的冷卻裝置。The resin sealing device according to any one of claims 1 to 4, wherein: The resin chip feeding mechanism is covered with a cover to be separated from the chip conveying mechanism, and is provided with a cooling device that performs temperature management so that the ambient temperature in the resin chip feeding mechanism becomes a predetermined temperature.
TW110119885A 2020-09-11 2021-06-01 Resin sealing device TWI814009B (en)

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