TW202137353A - 半導體晶片之製造方法 - Google Patents
半導體晶片之製造方法 Download PDFInfo
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- TW202137353A TW202137353A TW109146463A TW109146463A TW202137353A TW 202137353 A TW202137353 A TW 202137353A TW 109146463 A TW109146463 A TW 109146463A TW 109146463 A TW109146463 A TW 109146463A TW 202137353 A TW202137353 A TW 202137353A
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- semiconductor wafer
- aforementioned
- resin film
- wafer
- meth
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Classifications
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- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/6834—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to protect an active side of a device or wafer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68377—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support with parts of the auxiliary support remaining in the finished device
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Dicing (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019239012 | 2019-12-27 | ||
JP2019-239012 | 2019-12-27 |
Publications (1)
Publication Number | Publication Date |
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TW202137353A true TW202137353A (zh) | 2021-10-01 |
Family
ID=76574518
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW109146463A TW202137353A (zh) | 2019-12-27 | 2020-12-28 | 半導體晶片之製造方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPWO2021132678A1 (ja) |
KR (1) | KR20220122641A (ja) |
CN (1) | CN114902377A (ja) |
TW (1) | TW202137353A (ja) |
WO (1) | WO2021132678A1 (ja) |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3664432B2 (ja) * | 2000-05-18 | 2005-06-29 | カシオ計算機株式会社 | 半導体装置およびその製造方法 |
US7727875B2 (en) * | 2007-06-21 | 2010-06-01 | Stats Chippac, Ltd. | Grooving bumped wafer pre-underfill system |
JP5830250B2 (ja) | 2011-02-15 | 2015-12-09 | 日東電工株式会社 | 半導体装置の製造方法 |
US9508623B2 (en) * | 2014-06-08 | 2016-11-29 | UTAC Headquarters Pte. Ltd. | Semiconductor packages and methods of packaging semiconductor devices |
TWI657510B (zh) * | 2014-10-02 | 2019-04-21 | 日商住友電木股份有限公司 | 半導體裝置之製造方法及半導體裝置 |
JP2015092594A (ja) | 2014-12-10 | 2015-05-14 | 日東電工株式会社 | 保護層形成用フィルム |
WO2017077957A1 (ja) * | 2015-11-04 | 2017-05-11 | リンテック株式会社 | 半導体装置の製造方法 |
JP7098221B2 (ja) * | 2017-09-08 | 2022-07-11 | 株式会社ディスコ | ウェーハの加工方法 |
TWI783082B (zh) * | 2017-11-17 | 2022-11-11 | 日商琳得科股份有限公司 | 熱硬化性樹脂膜及第一保護膜形成用片材 |
JP7064184B2 (ja) * | 2017-12-11 | 2022-05-10 | 日東電工株式会社 | ダイシングテープ一体型封止用シート及び半導体装置の製造方法 |
JP2021002625A (ja) * | 2019-06-24 | 2021-01-07 | 株式会社ディスコ | パッケージデバイスチップの製造方法 |
-
2020
- 2020-12-25 WO PCT/JP2020/049013 patent/WO2021132678A1/ja active Application Filing
- 2020-12-25 CN CN202080090603.9A patent/CN114902377A/zh active Pending
- 2020-12-25 JP JP2021567736A patent/JPWO2021132678A1/ja active Pending
- 2020-12-25 KR KR1020227021694A patent/KR20220122641A/ko unknown
- 2020-12-28 TW TW109146463A patent/TW202137353A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
KR20220122641A (ko) | 2022-09-02 |
CN114902377A (zh) | 2022-08-12 |
WO2021132678A1 (ja) | 2021-07-01 |
JPWO2021132678A1 (ja) | 2021-07-01 |
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