TW202124304A - Dividing method and dividing device the present invention provides dividing method and dividing device that can easily and well divide a waste material portion along a scribed line formed on a substrate - Google Patents

Abstract

To provide dividing method and dividing device that can easily and well divide a waste material portion along a scribed line formed on a substrate. The method of dividing the waste material portion 30 from the substrate 10 includes: a scribing step (S11), forming a main scribed line L and a sub-scribed line S1 formed along the shape of the waste material portion 30; In dividing step (S12), the substrate 10 is divided along the main scribed line L and the sub-scribed line S1; in the scribing step (S11), the sub-scribing line S1 is extended in the direction crossing the main scribed line L. In the width direction, the method of dividing the waste material portion 30 is formed; the dividing step (S12) includes a dividing step, which is to bend the area containing the sub-scribed line S1 to extend the vertical crack C1 along the sub-scribed line S1, The waste material part 30 is divided into a plurality of areas divided by the sub-scribed line S1.

Description

Division method and division device

The present disclosure relates to a dividing method and a dividing device for dividing a substrate on which scribe lines have been formed.

In the past, the division of brittle material substrates such as glass substrates was constituted by the following steps. The scribing step is to form a scribe line on the surface of the substrate; and the break step is to follow the formed scribe line, and A predetermined force is applied to the surface opposite to the surface forming the scribe line. In the scribing step, the scribing wheel is pressed against the surface of the substrate while moving along a predetermined line.

Patent Document 1 discloses a method of removing waste material portions recessed from the edge of the substrate toward the inner side of the substrate along the scribe line. The waste material part removal method disclosed in Patent Document 1 includes: a scribe line forming step, which is to form a scribe line along the outer edge of the waste material part; The line forms a secondary scribe line in the waste material part; the removing step is to remove the main body part from the waste material part; and the moving step is to move the two ends of the belt-shaped part close to each other. [Prior Patent Document] [Patent Literature]

Patent Document 1: Japanese Patent Application Publication No. 2015-174804

[The problem to be solved by the invention]

In the method described in Patent Document 1, the two ends of the belt-shaped part are moved close to each other, and the belt-shaped part is separated from the product part. However, when the waste material part contains a complicated shape such as an acute-angled part, the belt is tied The shape is difficult to separate. Furthermore, in this method, in addition to forming the scribe line, an auxiliary scribe line is also formed in the waste material portion. Furthermore, when dividing the waste material part, it is necessary to divide the main body part and the band-shaped part separately. However, depending on the size of the waste material part, it may be difficult to form the band-shaped part.

In view of this problem, an object of the present invention is to obtain a dividing method and a dividing device that can easily and well divide the waste material portion along the scribe line formed on the substrate. [Means to solve the problem]

The first aspect of the present invention relates to a method of dividing a waste material portion from a substrate. The division method of this form includes: the step of scribing, forming: the main scribing line is formed along the contour shape of the waste material part; And the dividing step is to divide the substrate along the main scribing line and the sub-scribing line; in the scribing step, the sub-scribing line extends in the direction intersecting the main scribing line, and in the The waste material part is divided in the width direction; the dividing step includes a dividing step, and the dividing step is to bend the area containing the sub-scribing line to extend the vertical crack along the sub-scribing line, and The waste material part is divided in a manner of being divided into a plurality of areas divided by the sub-line.

According to the dividing method of this form, when the waste material portion bends the area including the sub-scribing line, the vicinity of the sub-scribing line is displaced in the thickness direction of the substrate. Therefore, the vertical crack formed in the secondary scribe line penetrates, and the penetration of the vertical crack extends along the secondary scribe line. The vertical crack system extending along the secondary scribe line is connected with the main scribe line, and the vertical crack penetrates and extends along the main scribe line. Therefore, the waste material part can be easily divided in each area divided by the sub-line. At this time, because the vertical crack penetrates and stretches along the sub-scribing line and the main scribing line, it is possible to suppress chipping or fine damage called "twist" generated on the substrate after the division. . Therefore, high-quality products can be obtained from the substrate.

Particularly, when the corner portion inside the substrate in the waste material part is divided from the substrate, the waste material part rubs against the product part and tends to be twisted. However, according to the above configuration, since the vertical cracks penetrate and extend well along the sub-scribing line and the main scribing line, when the waste material part is divided, the distortion generated in the corner portion of the waste material part is reduced.

In the dividing method of this form, the dividing step is to push the side opposite to the side of the waste material portion forming the auxiliary scribing line toward the auxiliary scribing line, and press at least two places across the auxiliary scribing line The surface of the waste material portion that forms the secondary scribe line.

According to the division method of this form, the vertical crack penetrates and stretches well along the sub-scribing line because of the force that opens the sub-scribing line to the outside.

In addition, because the waste material is applied in the same direction from the position separated by the sub-scribing line, when the vertical cracks that penetrate and extend along the sub-scribing line are connected to the main scribing line, they are perpendicular to the entire circumference of the main scribing line The cracks penetrate and stretch smoothly. Therefore, the area divided by the sub-scribing line can be easily and well divided from the waste material part.

In the dividing method of this aspect, the waste material portion is a concave shape from the outer periphery of the substrate to the inner side of the substrate, and can be formed to have an outline shape including a straight portion and a curved portion.

According to the dividing method of this form, because the waste material part is bent and the waste material part is divided, it is a waste material part of the shape shown above, and the quality of the product part can be divided from the substrate. .

In this case, the dividing step may include a separating step that separates the waste material portion from the substrate in a state where the vertical crack is extended along the sub-scribing line.

Therefore, the waste material part can be divided without contacting the product part.

In the dividing method of this form, the sub-scribing line can be formed in such a way that the end of the sub-scribing line facing the main scribing line is separated from the main scribing line by a predetermined distance.

According to the division method of this form, because the end of the secondary scribe line is separated from the main scribe line by only a predetermined distance, it can prevent vertical cracks that penetrate and extend toward the main scribe line and penetrate along the secondary scribe line and enter beyond the main scribe line. In the product department. Therefore, when the waste material part is divided, damage to the product part can be suppressed more reliably, and the quality of the product part can be improved.

In addition, the sub-scribing line may include a first sub-scribing line formed in the vicinity of the center of the waste material portion in the width direction.

According to the dividing method of this aspect, when the waste material part is bent, the waste material part is bent substantially uniformly with the first sub-scribed line as the center. Therefore, the force of opening to the outside of the substrate acts on the first sub-scribing line substantially uniformly. Therefore, the vertical crack penetrates and spreads more smoothly along the first auxiliary scribe line. On the other hand, according to the above-mentioned configuration, the force of deformation is generated substantially uniformly in the thickness direction of the substrate over the entire circumference of the main scribing line. Therefore, when the vertical cracks penetrating and extending along the first auxiliary scribing line are continuous with the main scribing line, the vertical cracks evenly infiltrating and extending along the main scribing line. Therefore, the waste material part can be divided more smoothly and well along the first sub-scribing line and the main scribing line.

In the dividing method of this form, the sub-line includes the second sub-line and the third sub-line formed at a position separated from the first sub-line, and the division step includes: a vertical crack extension step , Is to push the vicinity of the center of the waste material portion from the side opposite to the surface of the waste material portion on which the first sub-scribing line is formed toward the first sub-scribing line; and the first dividing step is to form the first sub-scribing line The side of the one side of the scribe line pushes the two places of the waste material part, and the area sandwiched by the second scribe line and the third scribe line is divided. The two places of the waste material part are divided by the second part The line and the third sub-line are sandwiched by the first sub-line.

According to the division method of this form, in the crack extension step, since the force of opening the first secondary scribe line to the outside acts on the waste material part, the vertical crack penetrates and extends along the first secondary scribe line.

Furthermore, in the first dividing step, the force of displacement in the thickness direction of the substrate is exerted by pressing two places of the scrap part sandwiched by the second and third sub-scribing lines, and the first sub-scribing line Underline the 2nd and 3rd sublines. Therefore, the vertical crack penetrates and extends along the second and third auxiliary scribe lines.

In this way, the first sub-line, the second sub-line, and the third sub-line are because the vertical cracks penetrate and spread well, so the area is easy and good with the first sub-line as the center. The ground is divided into 2 areas.

In the division method of this form, the sub-line includes: the second sub-line and the third sub-line, which are formed at a position separated from the first sub-line; and the fourth sub-line, which is It is formed by intersecting each of the first sub-line, the second sub-line, and the third sub-line; The side of the side opposite to the side of the waste material portion of the auxiliary scribing line pushes the intersection of the first auxiliary scribing line and the fourth auxiliary scribing line toward the first auxiliary scribing line; and the first dividing step is to form the first auxiliary scribing line The surface side of one sub-scribing line pushes two areas and divides the two areas. The two areas are divided by the first sub-scribing line, the outer periphery of the substrate, the second sub-scribing line, and the third sub-scribing line Surrounded.

According to the dividing method of this aspect, in the crack extension step, the waste material portion is bent by being pushed from below the first sub-line toward the first sub-line. Therefore, the vertical cracks extend radially from the intersection of the first and fourth subscribed lines being pressed as a starting point.

Furthermore, in the first dividing step, by pushing two places of the scrap part sandwiched by the second and third sub-scribe lines and the first sub-scribe line, the force of displacement in the thickness direction of the substrate acts on the second and The third underline. Therefore, the vertical crack penetrates and spreads along the second and third auxiliary scribe lines.

In this way, the first sub-line, the second sub-line, and the third sub-line are because the vertical cracks penetrate and spread well, so the area is easy and good with the first sub-line as the center. The ground is divided into 2 areas.

This area is an area located on the outer peripheral side of the waste material part. Therefore, when the region is divided by performing the first division step, there is no influence on the product portion. Also, for example, when the shape of the waste material portion is a shape whose width widens from the outer periphery of the substrate toward the inner side of the substrate, if the area on the outer periphery side of the substrate is divided first, after the area is divided, the waste can be divided. The deformation of the area on the deep side of the material part becomes larger. Therefore, after dividing the area, the remaining area can be easily divided.

In addition, such a division system is particularly effective when, for example, the waste material portion has a large area. By forming a plurality of sub-scribing lines in the waste material part, the waste material part is divided into a plurality of parts, and can be partially divided from the easily divided area.

In the division method of this form, the sub-line includes: the second sub-line and the third sub-line, which are formed at a position separated from the first sub-line; and the fourth sub-line, which is It is formed by intersecting each of the first sub-line, the second sub-line, and the third sub-line; The side opposite to the side of the waste material portion of the auxiliary scribing line pushes the intersection of the first auxiliary scribing line and the fourth auxiliary scribing line toward the first auxiliary scribing line; and the first dividing step is to form the first auxiliary scribing line The surface side of the scribing line presses two areas to divide the areas. The two areas are divided by the first sub-scribing line, the outer periphery of the substrate, the second sub-scribing line, the third sub-scribing line, and the Surrounded by the fourth underline.

According to the dividing method of this aspect, in the crack extension step, the waste material portion is bent by being pushed from below the first sub-line toward the first sub-line. Therefore, the vertical cracks extend radially from the intersection of the first and fourth subscribed lines being pressed as a starting point.

Moreover, in the first dividing step, the force of displacement in the thickness direction of the substrate is achieved by pressing two places located in the area on the outer peripheral edge side of the waste material portion surrounded by the second, third, and fourth subscribed lines Acts on the 1st to 4th sub-line. Therefore, the vertical crack penetrates and spreads along the second and third auxiliary scribe lines.

In this way, the first sub-line, the second sub-line, the third sub-line, and the fourth sub-line are because the vertical cracks penetrate and extend well, so the area is along each sub-line. The line is easily and well divided into a plurality of regions.

This area is an area located on the outer peripheral side of the waste material part. Therefore, when the region is divided by performing the first division step, there is no influence on the product portion. Also, for example, when the shape of the waste material portion is a shape whose width widens from the outer periphery of the substrate toward the inside of the substrate, if the area on the outer peripheral edge side of the substrate is divided first, after the area is divided, the waste material portion is divided When it enters the area on the deep side, the area on the deep side of the waste material section can be greatly deformed. Therefore, after dividing the area, the remaining area can be easily divided.

In addition, such a division system is particularly effective when, for example, the waste material portion has a large area. By forming a plurality of sub-scribing lines in the waste material part, the waste material part is divided into a plurality of parts, and can be partially divided from the easily divided area.

In the dividing method of this aspect, the second sub-scribing line and the third sub-scribing line can be formed so as to be inclined from a state perpendicular to the main scribing line.

According to the division method of this form, when the waste material part is pushed, the waste material part bends with the first sub-line as the center. Therefore, the vertical crack penetrates and spreads along the second auxiliary scribe line and the third auxiliary scribe line. At this time, compared to the case where the main scribing line is perpendicular to the main scribing line, when the second subscribing line and the third subscribing line are inclined from the state perpendicular to the main scribing line, follow the second subscribing line and The crack extended by the third auxiliary scribe line is more smoothly connected with the main scribe line. Therefore, when the vertical cracks of the second and third auxiliary scribe lines reach the main scribe line, the vertical cracks are easy to penetrate and extend along the main scribe line. Therefore, the waste material part can be divided easily and well.

In the dividing method of this form, the second sub-scribing line can be formed in such a way that the respective ends of the second sub-scribing line and the third sub-scribing line are separated from the main scribing line by a predetermined distance. Line and the third underline.

According to the division method of this form, because the ends of the second and third sub-scribing lines are separated from the main scribing line by only a predetermined distance, vertical cracks that penetrate and extend toward the main scribing line and extend along the sub-scribing line can be prevented from exceeding The main line is drawn into the product department. Therefore, when the waste material part is divided, damage to the product part can be suppressed more reliably, and the quality of the product part can be improved.

In the dividing method of this form, the fourth sub-scribing line is formed such that the end of the fourth sub-scribing line facing the main scribing line is separated from the main scribing line by a predetermined distance.

According to the division method of this form, because the end of the fourth sub-line is separated from the main line by a predetermined distance, vertical cracks that penetrate and extend toward the main line and extend along the sub-line can be prevented from exceeding the main line And enter the product department. Therefore, when the waste material part is divided, damage to the product part can be suppressed more reliably, and the quality of the product part can be improved.

In the dividing method of the present aspect, the dividing step may include a second dividing step, which is after the first dividing step, for areas other than the area divided by the first dividing step in the waste material section , Pressing at least two of the surface of the waste material portion forming the first sub-line to divide.

According to the division method of this form, since the vertical crack penetrates and spreads along each scribe line in the first division step, it is easy to divide the area by pushing at least two places of the remaining area.

The second aspect of the present invention relates to a dividing device that divides a waste material portion from a substrate along a scribe line formed on the substrate. The dividing device of this form is characterized in that it has: a placing table for placing the substrate; a jig for bending the waste material part in the thickness direction; an elevating mechanism for raising and lowering the jig; and a moving mechanism for making The jig moves in the direction of the surface of the substrate; the jig includes: a first jig that pushes the surface on one side of the waste material part; and a second jig that pushes the surface of the waste material part The other side surface; the second jig system is arranged on the outside of the first jig.

The dividing device of this aspect can also have the same effect as the first aspect of the present invention. [Effects of Invention]

As described above, according to the present invention, it is possible to provide a dividing method and a dividing device that can easily and well divide the waste material portion along the scribe line formed on the substrate.

The effects and significance of the present invention will be more apparent from the description of the embodiments shown below. However, the embodiment shown below is completely an example when implementing the present invention, and the present invention is not limited to what is described in the following embodiment at all.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, in each drawing, the X-axis, Y-axis, and Z-axis that are orthogonal to each other are added as expedients. The Z-axis system indicates above and below the vertical direction. Hereinafter, upper and lower refer to the positive side of the Z axis and the negative side of the Z axis, respectively. <Embodiment 1>

FIG. 1 is a flowchart showing a dividing method of dividing the substrate 10.

The substrate to which the dividing method of this embodiment is applied has a product part which is a part required for the product and a waste material part which is an unnecessary part. In this dividing method, a jig is used to separate the waste material part from the substrate.

As shown in FIG. 1, the division of the substrate 10 is composed of a scribing step (S11) and a dividing step (S12 ). The scribing step forms a scribing line on the substrate 10, and the dividing step divides the waste material portion 30.

Hereinafter, the method of dividing the substrate shown in FIG. 1 will be described in detail.

FIG. 2 is a diagram schematically showing the structure of the scribing device 100. As shown in FIG. The scribing device 100 includes a mobile station 101 and a scribing head 120. The moving table 101 is screwed with the ball screw 102. The moving table 101 is supported by a pair of guide rails 103 so as to be movable in the Y-axis direction. Driven by the motor, the ball screw 102 rotates, whereby the moving table 101 moves along the pair of guide rails 103 in the Y-axis direction.

On the upper surface of the mobile station 101, a motor 104 is provided. The motor 104 rotates the placement part 105 located on the upper part in the XY plane and positions it at a predetermined angle. The placing portion 105 that can be rotated horizontally by the motor 104 has a vacuum suction means (not shown). The substrate 10 placed on the placing portion 105 is held on the placing portion 105 by the vacuum suction means.

The scribing device 100 is located above the substrate 10 placed on the placing portion 105 and has two cameras 106 that photograph the alignment marks formed on the substrate 10. In addition, the bridge 107 is erected on the pillars 108a and 108b so as to straddle the moving table 101 and the placing portion 105 above it.

At the bridge 107, a rail 109 is installed. The rail 109 and the scribing head 120 are connected via the moving part 110, and the moving part 110 slides on the rail 109, and the scribing head 120 is set to move in the X-axis direction.

In the case of using the scribing device 100 to form a scribing line on the substrate 10, first, the tool holder unit 130 to which the blade tip 5 has been mounted is mounted on the support portion 121 of the scribing head 120.

The scribing device 100 uses a pair of cameras 106 to position the substrate 10. In addition, after the scribing device 100 moves the scribing head 120 to a predetermined position, a predetermined load is applied to the blade tip 5 to make it contact the substrate 10. Then, the scribing device 100 moves the scribing head 120 in the X-axis direction to form the main scribing line L on the substrate 10 (see FIG. 3(a)).

The scribing device 100 can rotate or move the placing part 105 in the Y-axis direction according to needs. When the main scribing line L is formed on the substrate 10, the scribing device 100 rotates the mounting portion 105 to form the sub-scribing line S1 on the substrate 10 (see FIG. 3(a)).

In the above, it means that the scribing head 120 moves in the X-axis direction, and the placement portion 105 moves in the Y-axis direction and rotates the scribing device 100. However, the scribing device 100 only needs to be the scribing head 120 and the placement portion 105. Just move the person relatively. For example, it may be the scribing device 100 in which the scribing head 120 is fixed, the mounting portion 105 is moved in the X-axis and Y-axis directions, and is rotated. Moreover, in this case, the camera 106 may be fixed to the scribing head 120.

FIG. 3(a) is a diagram showing the substrate 10 and the dividing device 1 to which the dividing method is applied. FIG. 3(a) is a top view of the substrate 10 and the dividing device 1.

As shown in FIG. 3( a ), the substrate 10 is composed of a product part 20 and a waste material part 30. Expediently, in FIG. 3(a), diagonal lines are added to the product part 20. According to the dividing method shown in FIG. 1, the waste material portion 30 is removed from the substrate 10.

The waste material portion 30 has a concave contour shape that is recessed from the outer periphery of the substrate 10 toward the inner side of the substrate 10, and includes a curved portion in a part. The outline shape of the waste material part 30 shown in FIG. In FIG. 3(a), in the outer periphery of the substrate 10, the end edge of the part included in the contour shape of the waste material portion 30 is regarded as the end edge 10a.

The two corners 34 on the positive side of the Y axis included in the contour shape of the waste material portion 30 are curved. The angle α of the corner portion 34 of the waste material portion 30 shown in FIG. 3(a) is about 102°. With the scribing device 100 shown in FIG. 2, a main scribing line L is formed along the outline shape of the waste material portion 30.

A sub-scribing line S1 is formed in the waste material part 30. The auxiliary scribing line S1 extends in a direction intersecting the main scribing line L, and is formed near the center of the waste material portion 30 in the width direction (the X-axis direction in FIG. 3(a)). In the present embodiment, the auxiliary scribing line S1 is formed on a straight line that bisects the waste material portion 30 in the width direction.

At this time, the auxiliary scribing line S1 is formed so as not to be connected to the linear portion L1 of the main scribing line L facing the end edge 10a. That is, the secondary scribing line S1 is formed in the waste material part 30 so that it may extend toward the inside of the waste material part 30 from the edge 10a, and is only a distance d from the linear part L1.

The distance d is appropriately adjusted according to the type, thickness, size, etc. of the substrate 10. For example, when the thickness of the substrate 10 is 0.4 mm, the distance d is set to about 5 mm.

As shown in FIG. 3(a), the dividing device 1 includes a mounting table 2, a moving mechanism 3, and a jig 40. The mounting table 2 mounts the substrate 10. The moving mechanism 3 raises and lowers the jig 40 with respect to the substrate 10 and moves it at least in the Y-axis direction. It is also possible to separately provide an elevating mechanism for raising and lowering the jig 40 to the substrate 10 and a moving mechanism for moving the substrate in the X-axis and Y-axis directions. The jig 40 is divided from the waste material part 30 by bending the waste material part 30 in the thickness direction. However, the moving mechanism 3 is not shown in FIG. 3(a), but is shown in FIG. 3(b).

In FIG. 3(a), the white circles and black circles shown in the waste material portion 30 schematically indicate the positions where the jig 40 (see FIG. 3(b)) abuts. The positions 31 and 32 shown by the black circles and the position 33 shown by the white circles are close to the end edge 10a, and are arranged along the end edge 10a. The position 33 is the lower surface 11 of the substrate 10 and is located directly below the sub-scribing line S1. On the base plate 10, the jig 40 abuts against the position 31 of the lower surface 11. On the substrate 10, the jig 40 abuts on the positions 31 and 32 of the upper surface 12.

Fig. 3(b) is a side view of the structure of Fig. 3(a) viewed from the negative side of the X-axis. However, the moving mechanism 3 is shown by a broken line.

As shown in FIG. 3(b), when the waste material portion 30 is divided from the substrate 10, the substrate 10 is placed on the mount so that the area at the end of the substrate 10 including the waste material portion 30 protrudes from the mounting table 2 of the dividing device 1置台2. When the substrate 10 is placed on the mounting table 2, the jig 40 is raised and lowered by the moving mechanism 3, and the jig 40 abuts against the waste material portion 30.

The jig 40 is composed of a first jig 41 and a second jig 42, and is raised and lowered by the moving mechanism 3, the first jig 41 and the second jig 42. The moving mechanism 3 is constituted by a well-known lifting means such as a pneumatic cylinder. In this case, by appropriately applying pressure to the pneumatic cylinder, each of the first jig 41 and the second jig 42 can be raised and lowered toward the waste material portion 30.

In order to prevent the substrate 10 from moving on the mounting table 2 or excessive deformation of the product part 20 during the division of the substrate 10, as shown in FIG. 3(b), the upper surface 12 of the substrate 10 is pressed by the pressing member 4. The pressing member 4 is, for example, a member that is arranged near the end of the mounting table 2 and is provided so as to abut at least the surface of the substrate 10 close to the waste material portion 30. Alternatively, the mounting table 2 may be provided with a pressure adjusting part for applying pressure to the substrate 10, for example. In this case, by appropriately applying pressure to the pressure adjusting portion, since the substrate 10 can be adsorbed to the mounting table 2, the pressing member 4 can be omitted.

The substrate 10 may be, for example, a ceramic substrate such as a glass substrate, a low-temperature fired ceramic or a high-temperature fired ceramic, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, a quartz substrate, and the like. In addition, the substrate 10 may have a thin film or semiconductor material that is not a brittle material attached to or contained on the surface or inside. In this embodiment, the dividing method is applied to the glass substrate.

In addition, the substrate 10 may be an adhesive substrate formed by pasting two substrates. As such a substrate 10, for example, a color filter (CF) is formed on one substrate, and a thin film transistor (TFT) is formed on the other substrate.

As described above, the jig 40 is composed of the first jig 41 and the second jig 42. As shown in FIG. 3(b), the first jig 41 and the second jig 42 are respectively arranged so as to face each other with the substrate 10 interposed therebetween. Hereafter, in this patent specification, the first jig will be referred to as the "upper jig", and the second jig will be referred to as the "lower jig 42".

The upper jig 41 and the lower jig 42 can also be integrated or separated. The upper jig 41 is provided with protrusions 41a and 41b that abut the positions 31 and 32. In addition, in FIG. 3(b), only the protrusion 41a is shown. The lower jig 42 is provided with a protrusion 42a that abuts on the position 33. The protrusions 41a, 41b and the protrusion 42a are arranged on the X-Y plane with a predetermined interval therebetween.

The shape and size of the protrusions 41a, 41b of the upper jig 41 and the protrusion 42a of the lower jig 42 are adapted to the thickness, shape, and size of the waste material portion 30, and are appropriately adjusted so that the waste material portion 30 is bent and removed from The substrate 10 can be divided into the waste material part 30. In addition, the position where each of the protrusions 41a, 41b of the upper jig 41 and the protrusion 42a of the lower jig 42 abut on the waste material part 30 also depends on the thickness, shape, and size of the waste material part 30, so that The vertical cracks extend and an appropriate position is selected from the manner in which the substrate 10 can divide the waste material portion 30.

In the case of dividing the substrate 10 according to the dividing method shown in FIG. 1, the moving mechanism 3 moves the upper jig 41 and the lower jig 42 in the direction of the arrow in FIG. 3( b) and clamps the waste material portion 30. Then, the moving mechanism 3 moves the upper jig 41 and the lower jig 42 further, and by making the upper jig 41 and the lower jig 42 apply a pressing force to the waste material portion 30, it follows the main scribe line L, that is, waste The contour shape of the material portion 30 divides the waste material portion 30 from the substrate 10.

Next, referring to FIGS. 4(a) to (c), the dividing step (S12) among the steps of the dividing method shown in FIG. 1 will be described in detail.

4(a) to (c) are diagrams schematically showing the process of the method of dividing the substrate 10. Figures 4 (a) ~ (c) are viewed from the negative side of the Y axis at positions 31 to 33 in the Y axis direction of the waste material portion 30 shown in Figure 3 (a), which are sectioned on a plane parallel to the X-Z plane A cross-sectional view of the case of the moving mechanism 3, the substrate 10, and the jig 40. Expediently, in Fig. 4(a)~(c), only the substrate 10 is attached with oblique lines indicating the cross section. In addition, in FIGS. 4(a) and (b), for convenience of explanation, the vertical cracks C and C1 are virtually illustrated. In addition, in FIGS. 4(a) to (c), illustration of the mounting table 2 and the pressing member 4 is omitted.

FIG. 4(a) shows a state before the waste material part 30 is divided. The substrate 10 is placed on the mounting table 2 so as to protrude from the mounting table 2 in an area of the substrate 10 including the waste material portion 30. The upper surface 12 of the substrate 10 is pressed by the pressing member 4. The upper jig 41 is arranged directly above the positions 31 and 32 in Fig. 3(a). The lower jig 42 is arranged directly below the position 33 in Fig. 3(a). That is, the lower jig 42 is arranged directly under the sub-scribing line S1.

In addition, the interval between the protrusions 41a and 41b of the upper jig 41 is appropriately adjusted according to the type, thickness, size, and the like of the substrate 10.

In addition, as described above, the substrate 10 is a glass substrate, and the main scribe line L shown in FIG. 3(a) is formed on the upper surface 12 of the substrate 10. A vertical crack C is formed along the main scribe line L. A schematic diagram of the case where the substrate 10 of FIG. 3(a) is viewed from the negative side of the Y axis is FIG. 4(a).

As shown in FIG. 4(b), the moving mechanism 3 moves the upper jig 41 downward and pushes the waste material portion 30 from above, and the moving mechanism 3 moves the lower jig 42 upward and pushes it from below Waste material department 30. That is, the waste material part 30 is bent by three-point bending. Thereby, the vertical crack C1 formed along the auxiliary scribing line S1 and the vertical crack C formed along the main scribing line L penetrate and extend in the thickness direction of the substrate 10. In this state, the jig 40 is moved to the opening side, and the waste material portion 30 is separated from the base material. In addition, the penetration and extension of the vertical cracks C and C1 will be described later with reference to Figs. 5(a) and (b).

In this way, when the vertical cracks C and C1 penetrate and expand on the main scribing line L and the auxiliary scribing line S1, respectively, as shown in FIG. 4(c), the waste material portion 30 is divided from the substrate 10. At this time, the waste material portion 30 divided from the substrate 10 is divided into two regions with the sub-scribing line S1 (vertical crack C1) as the boundary.

Next, referring to Figs. 5(a) and (b), the extension of the vertical cracks C and C1 in the dividing step (S12) shown and described in Figs. 4(a) to (c) will be described.

FIG. 5(a) is a schematic diagram for explaining that when the substrate 10 is divided, the vertical cracks C and C1 penetrate and extend along each of the main scribing line L and the sub-scribing line S1.

As shown in FIG. 4( b ), when the upper jig 41 and the lower jig 42 push the waste material portion 30, the lower jig 42 pushes the position 33. The position 33 is as shown above, and is located directly below the underline S1. Therefore, the waste material portion 30 is easily bent with the sub-scribing line S1 as the center, and deforms in the thickness direction of the substrate 10.

At this time, as shown in FIG. 5(a), the vertical crack C1 formed on the secondary scribing line S1 penetrates in the thickness direction of the substrate 10 starting from the position 33, and moves toward the main scribing along the secondary scribing line S1. The direction E1 of the line L stretches.

When the vertical crack C1 extending along the sub-scribing line S1 in the direction E1 reaches the position G1 of the straight line portion L1 of the main scribing line L, it is connected to the vertical crack C of the main scribing line L, and from the position G1 at the straight line portion L1 The formed vertical crack C penetrates and spreads in the directions E2 and E3.

In addition, the secondary scribing line S1 is separated from the linear portion L1 by a distance d, but the vertical crack C1 extends along the extension line of the secondary scribing line S1 to the linear portion L1.

On the other hand, when the waste material portion 30 is deformed due to bending, at the main scribing line L, the vertical crack C due to external force penetrates in the thickness direction of the substrate 10 from the end portions LA and LB where the vertical crack C is most permeable. In addition, in directions F1 and F2 from the ends LA and LB of the main scribing line L to the inside, the vertical crack C penetrates and spreads along the main scribing line L in order.

On the main scribing line L, when the vertical crack C extends in the directions F1 and F2, it is near the middle position of the main scribing line L, that is, near the position G1 that is the intersection of the extension line of the sub-scribing line S1 and the straight portion L1, The vertical crack C extending in the directions F1 and F2 is connected with the vertical crack C1 extending in the directions E2 and E3. In this way, the vertical crack C penetrates the entire range of the main scribe line L. In this state, by moving the jig 40 to the opening end side, the waste material portion 30 is removed from the substrate 10.

FIG. 5(b) is a cross-sectional view schematically showing the penetration of vertical cracks C and C1 in the thickness direction of the substrate 10. Fig. 5(b) is viewed from the negative side of the Y-axis at the position 33 in the Y-axis direction of Fig. 5(a) when the substrate 10 and the jig 40 are cut in a plane parallel to the X-Z plane. Sectional view. Expediently, in FIG. 5(b), only the substrate 10 is attached with oblique lines showing the cross section.

As shown in the upper part of Figure 5(b), before the upper jig 41 and the lower jig 42 push the waste material portion 30 to bend the waste material portion 30, vertical cracks C and C1 penetrate in the thickness direction of the substrate 10 To the same depth.

As shown in the lower part of Figure 5(b), the sub-line S1 is pushed by the lower jig 42, and the positions 31 and 32 are pushed by the upper jig 41. As a result, the waste material portion 30 is bent, so that the vertical tortoise The crack C1 penetrates in the thickness direction of the substrate.

On the other hand, regarding the vertical crack C formed along the main scribing line L, the vertical crack C penetrates in the thickness direction of the substrate 10 because the waste material portion 30 is bent. Here, the main scribing line L is not pressed by the jig 40 (upper jig 41), but the center of the waste material portion 30 is bent upward, thereby causing waste to be generated on the periphery of the waste material portion 30 Displacement in the inner direction of the material part. In Figure 5(b), the displacement of the substrate is indicated by arrows. Therefore, the vertical crack C penetrates in the thickness direction of the substrate 10.

As shown in Figures 5(a) and 5(b), when the vertical cracks C and C1 penetrate and extend along the auxiliary scribing line S1 and the main scribing line L, with the auxiliary scribing line S1 as the center, the waste material portion 30 is in the width The direction (X-axis direction) is divided into two areas.

In addition, in this embodiment, by pressing the waste material portion 30 by the upper jig 41, both ends of the waste material portion 30 in the X-axis direction are displaced downward and inward. Therefore, as shown in Figure 5(a), in the directions F1 and F2 from the ends LA and LB of the main scribe line L to the inside, the vertical cracks C1 and C2 gradually extend in the same state along the main scribe line L . Therefore, the vertical cracks C1 and C2 can be smoothly extended over the entire circumference of the main scribe line L, and the waste material portion 30 can be smoothly divided. <Effects of Embodiment 1>

As shown in Figure 1, Figure 3 (a) ~ Figure 5 (b), the sub-scribing line S1 extends in the direction intersecting the main scribing line L, and divides the waste material portion 30 into two areas in the width direction The pattern is formed in the waste material part 30. When the waste material portion 30 is bent, first, along the secondary scribing line S1, the vertical crack C1 penetrates in the thickness direction of the substrate 10 and extends along the secondary scribing line S1. When this stretching progresses to the main scribing line L, along the main scribing line L, the vertical crack C penetrates in the thickness direction of the substrate 10 and extends along the main scribing line L.

Therefore, because the waste material portion 30 is divided into two regions centered on the sub-scribing line S1 and divided from the substrate 10, and the vertical crack C penetrates and spreads over the entire circumference of the main scribing line L, so that it can be suppressed Fragments or distortions generated on the end surface of the divided product portion 20. Therefore, the waste material portion 30 can be easily and well divided from the substrate 10.

As shown in Figs. 1 and 3(a) to 5(b), the waste material part 30 is pressed by the lower jig 42 against the sub-scribing line S1. Therefore, the vertical crack C1 penetrates and spreads well along the sub-scribing line S1.

In addition, by using the upper jig 41 to push the positions 31 and 32 across the sub-scribing line S1, the waste material portion 30 is given force in the same direction, so vertical cracks C are formed on the entire circumference of the main scribing line L Smoothly and evenly penetrates and stretches. Therefore, the waste material part 30 can be easily and well divided into the area demarcated by the subscribed line S1 of the waste material part 30.

As shown in Figures 3(a) and 5(a), the contour shape of the waste material portion 30 is a concave shape from the edge 10a of the substrate 10 to the inside of the substrate 10, and includes straight portions and curved corner portions 34 .

Because of the shape shown above, when the waste material part 30 is not provided with the auxiliary scribing line S1 and the waste material part 30 is bent, the displacement caused by the bending of the corner part 34 is less than the inner side of the waste material part 30 , So chipping or distortion is likely to occur near the corner 34. In this regard, in the present embodiment, the sub-scribing line S1 is formed so as to divide the waste material portion 30 in the width direction. Therefore, when the positions 31 to 33 of the waste material portion 30 are pressed by the jig 40, the vertical crack C1 penetrates and extends along the secondary scribe line S1. The extension of this vertical crack C1 is connected to the main scribe line L, and the vertical crack C penetrates and extends throughout the main scribe line L.

Therefore, at the corner portion 34, the vertical crack C sufficiently penetrates and spreads in the thickness direction of the substrate 10. Therefore, including the corner portion 34, the waste material portion 30 can be easily and well divided along the main scribe line L.

As shown in FIGS. 3(a) and 5(a), toward the main scribing line L, the auxiliary scribing line S1 is formed such that the end of the auxiliary scribing line S1 is separated from the main scribing line L by only a distance d. Therefore, the vertical crack C1 extending from the sub-scribing line S1 does not go beyond the linear portion L1 and enter the product portion 20. Therefore, when the waste material part 30 is divided, the damage of the product part 20 is suppressed more reliably.

As shown in FIG. 3(a) and FIG. 5(a), the auxiliary scribing line S1 forms the waste material portion 30 near the center in the width direction.

According to the above-mentioned structure, when the waste material portion 30 is bent by pressing the positions 31 to 33 by the jig 40 (refer to Figure 4 (a) to (c)), the area on both sides of the center with the subscribed line S1 is roughly Bend equally. Therefore, the force generating deformation in the thickness direction of the substrate 10 acts substantially uniformly over the entire circumference of the main scribe line L. Therefore, the waste material portion 30 can be divided more smoothly and well along the sub-scribing line S1 and the main scribing line L. <Embodiment 2>

In the first embodiment, the contour shape of the waste material portion 30 includes the edge 10 a of the substrate 10 and is a trapezoid of the substrate 10. In Embodiment 2, the outline shape of the waste material part 30 is rectangular.

FIG. 6 is a schematic diagram showing the outline shape of the waste material portion 30 in the second embodiment.

As shown in FIG. 6, the shape of the waste material portion 30 of the second embodiment is a rectangle with the angle α of the corner portion 34 being approximately 90°. The auxiliary scribing line S1 is formed in such a manner that the end of the auxiliary scribing line S1 facing the main scribing line L is separated from the main scribing line L by a distance d, as in the first embodiment. In addition, the sub-scribing line S1 is formed near the center of the waste material portion 30, specifically, on a straight line that bisects the waste material portion 30 in the width direction.

In the case of the waste material part 30 shown in FIG. 6, the waste material part 30 can be divided according to the same procedure as in the first embodiment (S11 and S12 in FIG. 1). <Modification 1>

In the first and second embodiments described above, in the waste material portion 30, the width of the end edge 10a of the substrate 10 is formed to be the same as or larger than the width of the linear portion L1 of the main scribe line L, and the angle α of the corner portion 34 It is above 90°. In Modification 1, the waste material portion 30 is described. The width of the end edge 10a of the waste material portion 30 is formed to be narrower than the width of the linear portion L1, and the angle α of the corner portion 34 is an acute angle.

FIG. 7(a) is a schematic diagram showing the outline shape of the waste material portion 30 on the substrate 10 and the sub-scribing lines S1 to S4 formed on the waste material portion 30 to which the dividing method of Modification 1 is applied.

As shown in FIG. 7(a), the angle α of the corner portion 34 of the waste material portion 30 is an acute angle. In addition, the width of the straight portion L1 arranged opposite to the end edge 10a in the main scribing line L is wider than the width of the end edge 10a of the substrate 10. In the waste material portion 30 of this shape, four sub-scribing lines S1 to S4 are formed.

The sub-scribing line S1 is formed in such a manner that the end of the sub-scribing line S1 facing the main scribing line L is separated from the main scribing line L by a distance d1, as in the above-mentioned first and second embodiments. In addition, the sub-scribing line S1 is formed near the center of the waste material portion 30, specifically, on a straight line that bisects the waste material portion 30 in the width direction.

The sub-scribing lines S2 and S3 are arranged at symmetrical positions across the sub-scribing line S1, and are formed so as to be inclined from a state perpendicular to the main scribing line L. In addition, the sub-scribing lines S2 and S3 are the same as the sub-scribing line S1, and are formed such that the respective ends of the sub-scribing line S2 and the sub-scribing line S3 facing the main scribing line L are separated from the main scribing line L by a distance d1. .

The auxiliary scribing line S4 passes through the vicinity of the center of the auxiliary scribing line S1 and is formed in parallel along the edge 10a. The auxiliary scribing line S4 is formed in such a manner that the two ends of the auxiliary scribing line S4 facing the main scribing line L are separated from the main scribing line L by a distance d2.

The distances d1 and d2 are appropriately adjusted according to the type, thickness, and size of the substrate 10, the shape of the waste material portion 30, and the like.

In this manner, when the four sub-scribing lines S1 to S4 are formed in the waste material part 30, the waste material part 30 is divided into a plurality of regions. In Modification 1, it is divided into two stages, and the waste material part 30 divided into a plurality of regions is divided.

As the first stage of the division, as shown in FIG. 7(a), the region R1 including two regions surrounded by the sub-scribing line S1, the edge 10a, and the sub-scribing lines S2, S3, and S4 is divided. In the second stage of the division, it is the region R2 remaining outside the divided region R1.

FIG. 7(b) is a flowchart showing a method of dividing the waste material portion 30 formed with four sub-scribing lines S1 to S4 from the substrate 10 as shown in FIG. 7(a).

As shown in Figure 7(b), the division of the substrate 10 is composed of the following steps. The scribing step (S21) is to form the main scribing line L and the sub-scribing lines S1 to S4 on the substrate 10; the crack extension step ( S22), pressing the sub-scribing line S1 from directly below, so that the vertical cracks C1~C4 penetrate and extend along the sub-scribing lines S1~S4; the first division step (S23), the division area R1; and the second division Step (S24) is to divide the region R2.

Hereinafter, the crack extension step (S22), the first dividing step (S23), and the second dividing step (S24) in the method of dividing the substrate 10 shown in FIG. 7(b) will be described in detail. In addition, in the following description, the penetration and extension of the vertical cracks C and C1 to C4 are mentioned, but the detailed description of the vertical cracks C and C1 to C4 will be described later in FIG. 11.

8(a) to (d) are plan views schematically showing the state of the waste material portion 30 in the process of dividing the substrate 10 and the position where the jig 40 abuts. The waste material part 30 shown in FIGS. 8(a) to (d) is the same as the waste material part 30 of the substrate 10 shown in FIG.

Figures 9(a)~(f) and Figures 10(a)~(f) schematically show the crack extension step (S22), the first dividing step (S23), and the second in the method of dividing the substrate 10 A diagram of the state of the substrate 10 and the operation of the jig 40 in the dividing step (S24).

Figure 9 (a) ~ (f) are viewed from the negative side of the X-axis at a position 35a in the X-axis direction of the waste material portion 30, which cuts the substrate 10, the mounting table 2, and the moving mechanism 3 in a plane parallel to the Y-Z plane , A cross-sectional view of the cross-section of the case where the member 4 and the jig 40 are pressed. Figure 10 (a) ~ (f) are viewed from the negative side of the Y axis at the position 35a of the waste material portion 30 in the Y axis direction, cutting the moving mechanism 3, the substrate 10 and the jig 40 in a plane parallel to the X-Z plane The cross-section of the situation. The cross-section of the situation. Expediently, in Figs. 9(a) to (f) and Figs. 10(a) to (f), only the substrate 10 is attached with oblique lines indicating the cross section. In addition, in FIGS. 9(a) to (f) and FIGS. 10(a) to (f), for convenience of explanation, the vertical cracks C and C1 to C3 are virtually illustrated. In addition, in FIGS. 10(a) to (f), illustration of the mounting table 2 and the pressing member 4 is omitted.

In FIG. 8(a), the white circle shown in the waste material portion 30 schematically shows the position where the lower jig 42 abuts. The position 35a shown by the white circle is near the center of the waste material portion 30, is the lower surface 11 of the substrate 10, and is located directly under the sub-scribing line S1. In addition, the auxiliary scribing line S4 is formed so as to pass through the position 35a and become parallel along the edge 10a.

As shown in FIG. 9(a) and FIG. 10(a), the lower jig 42 is in contact with the position 35a of the lower surface 11 of the substrate 10. In addition, in FIG. 10(a), the position of the lower jig 42 in the Z-axis direction when the lower jig 42 is in contact with the position 35a of the lower surface 11 is indicated by the position M0.

As shown in FIG. 10(b), by the moving mechanism 3, the lower jig 42 is moved from the position M0 to the position M1 in the upward direction, and as shown in FIG. 9(b), the waste material portion 30 is pushed in the upward direction. At this time, on the sub-scribing lines S1 and S4, the vertical cracks C1 and C4 penetrate from the vicinity of the position 35a and extend outward. Fig. 8(a), Fig. 9(a), (b), Fig. 10(a), (b) correspond to the crack extension step (S22) of Fig. 7(b).

In FIG. 8(b), the white circle and the black circle shown in the waste material portion 30 schematically indicate the position where the jig 40 abuts. The position 35b shown in the white circle diagram and the positions 36a and 36b shown in the black circle are positions close to the edge 10a of the substrate 10 and are arranged in the region R1. The position 35b is the lower surface 11 of the substrate 10, and is located directly under the sub-scribing line S1. On the substrate 10, the lower jig 42 is in contact with the position 35b where the lower surface 11 is made. On the substrate 10, the upper jig 41 is in contact with the positions 36a and 36b of the upper surface 12. In addition, the positions 36a and 36b are symmetrical positions via the sub-scribing line S1.

In order to make the lower jig 42 and the upper jig 41 abut each of the positions 35b, 36a, and 36b shown in Fig. 8(b), first, as shown in Figs. 9(c) and 10(c), the moving mechanism In the 3 system, the lower jig 42 is lowered from the position M1 to the position M2. In addition, the moving mechanism 3 moves the lower jig 42 to the edge 10a side of the substrate 10 and is positioned directly under the position 35b. In Fig. 9(c), the broken arrow indicates that the lower jig 42 moves to the edge 10a side, and also moves downward. In addition, FIG. 9(c) and FIG. 10(c) are not shown, and the moving mechanism 3 positions the upper jig 41 directly above the positions 36a and 36b.

In this way, when the lower jig 42 and the upper jig 41 are positioned in a manner corresponding to each of the positions 35b, 36a, and 36b, as shown in Fig. 9(d) and Fig. 10(d), the moving mechanism 3 is The lower jig 42 is moved upward and the upper jig 41 is moved downward. Therefore, the upper jig 41 and the lower jig 42 push the area R1 of the waste material part 30.

At this time, on the sub-scribing lines S2 and S3, the vertical cracks C2 and C3 penetrate and extend from the part of the predetermined area R1, and the area R1 is divided into two areas with the sub-scribing line S1 of the area R1 as the center. Fig. 8(b), Fig. 9(c), (d), Fig. 10(c), (d) correspond to the first division step (S23) of Fig. 7(b).

In FIG. 8( c ), the positions 37 a and 37 b shown by the black circles shown in the waste material part 30 are arranged in the region R2 and are close to the corners 34 of the waste material part 30. In addition, the positions 37a and 37b are symmetrical positions via the subscribing line S1. On the substrate 10, the upper jig 41 is in contact with the positions 37a and 37b of the upper surface 12.

In order to make the upper jig 41 abut the positions 37a and 37b shown in Fig. 8(c), as shown in Figs. 9(e) and 10(e), the moving mechanism 3 positions the upper jig 41 at the position 37a , 37b is directly above, and moves the upper jig 41 downward. Therefore, the area R2 of the waste material portion 30 is pushed by the upper jig 41. At this time, in the sub-line S1~S4, the vertical cracks C1~C4 in the part contained in the region R2 penetrate and spread. Furthermore, at the main scribe line L, the vertical crack C penetrates and spreads.

In this way, because the vertical cracks C and C1 to C4 extend, the region R2 is divided from the substrate 10. The divided substrate 10 is shown in Fig. 8(d), Fig. 9(f), and Fig. 10(f). Fig. 8(c), (d), Fig. 9(e), (f), Fig. 10(e), (f) correspond to the second division step (S24) of Fig. 7(b).

Next, referring to FIG. 11, the vertical cracks C and the extension of C1 to C4 in Modification 2 will be described.

11 is a schematic diagram for explaining the penetration and extension of vertical cracks C, C1 to C4 of the main scribing line L and the auxiliary scribing lines S1 to S4 when the substrate 10 is divided according to the dividing method of the modification 1.

In the crack extension step of step S22 (FIG. 9(a), (b), FIG. 10(a), (b)), the lower jig 42 pushes the position 35a of the waste material portion 30. Therefore, first, starting from the position 35a, the vertical cracks C1 and C4 penetrate along the sub-scribing lines S1 and S4 and extend in the directions E5, E6, E7, and E10.

Next, in the first division step of step S23 (Figure 9(c), (d), Figure 10(c), (d)), the lower jig 42 pushes the position 35b of the waste material portion 30, and the upper jig 41 The positions 36a and 36b of the waste material part 30 are pressed (refer to FIG. 8(b)). Therefore, the region R1 is displaced in the thickness direction of the substrate 10. Therefore, in the subscribed lines S2 and S3, the portion of the predetermined region R1 is displaced in the inner direction of the region R1. Therefore, the vertical cracks C2 and C3 in the part contained in the region R1 penetrate in the sub-scribing lines S2 and S3 and extend in the directions E8 and E9.

As described above, in the crack extension step (S22), the vertical crack C4 in the portion of the predetermined area R1 in the subscribed line S4 penetrates and extends. Therefore, at the intersection point G2 of the auxiliary scribing line S4 and the auxiliary scribing line S2 and the intersection point G3 of the auxiliary scribing line S4 and the auxiliary scribing line S3, the vertical crack C4 and the vertical crack C2, and the vertical crack C4 and the vertical crack C3 Connect and extend smoothly in directions E8 and E9.

Here, at the auxiliary dash line S2, the vertical crack C2 penetrates and extends from the intersection G2 in the direction E11. Similarly, at the secondary dash line S3, the vertical crack C3 penetrates and extends from the intersection G3 in the direction E12.

Therefore, the vertical cracks C1 to C4 in the part contained in the area R1 in the subline S1 to S4 penetrate and extend. Therefore, the region R1 is divided into two equal parts with the subline S1 as the center (refer to FIG. 10(d)).

Next, in the second division step of step S24 (FIG. 9(e), (f), FIG. 10(e), (f)), the upper jig 41 pushes the positions 37a, 37b of the waste material portion 30 (see FIG. 8(c)). Therefore, the region R2 is displaced in the thickness direction of the substrate 10, and the peripheral edge of the region R2 is displaced in the inner direction. Therefore, in the sub-line S1~S4, the vertical cracks C1~C4 contained in the region R2 penetrate and extend in the directions E10~E14.

As described above, in the crack extension step (S22), the vertical crack C1 has penetrated in the area R2 of the sub-scribing line S1. Moreover, in the first dividing step (S23), the vertical cracks C2 and C3 penetrate into the sub-scribing lines S2 and S3 in the part included in the region R2 and extend in the directions E11 and E12. Then, when the above jig 41 pushes the region R2, the vertical cracks C1~C4 in the sub-scribed line S1~S4 and the part of the region R2 penetrate smoothly and extend in the directions E10~E14.

In addition, the vertical crack C4 of the auxiliary scribing line S4 extends from the intersection G2 in the direction E13. Similarly, the vertical crack C4 extends from the intersection G3 to the direction E14.

The vertical crack C1 of the secondary scribing line S1 extends in the direction E10, and when it reaches the position G1 of the main scribing line L, the vertical crack C of the main scribing line L penetrates and extends in the directions E15 and E16. Similarly, the vertical crack C2 extends in the direction E11 and is connected to the vertical crack C of the main scribe line L. The vertical crack C3 extends in the direction E12 and is connected to the vertical crack C of the main scribe line L. The vertical crack C4 extends in the directions E13 and E14, and is connected to the vertical crack C of the main scribe line L.

On the other hand, in the main scribing line L, as shown in the description with reference to FIG. 5(a), when the region R2 is pushed by the upper jig 41, the waste material portion 30 is deformed due to bending. Therefore, on the main scribe line L, the vertical crack C penetrates in the thickness direction of the substrate 10 from the end portions LC and LD where the vertical crack C is most easily penetrated by the external force. In addition, in the directions F3 and F4 from the ends LC and LD to the inside, the vertical crack C penetrates and spreads along the main scribe line L in order.

On the main scribe line L, when the vertical crack C extends in the directions F3 and F4, the vertical crack C is connected in sequence with the vertical cracks C1~C4 that reach the main scribe line L. In this way, the vertical crack C penetrates the entire range of the main scribe line L.

In this way, the vertical crack penetrates and spreads to all the scribe lines contained in the region R2. Thereby, the region R2 is divided into a plurality of sections along the sub-scribing line S1 to S4, and the waste material portion 30 is divided along the main scribing line L. As shown in FIG. <Verification>

The inventors of the present invention performed the following verification in order to verify the effect of the case of using the division method of this modification 1. In addition, in this verification, the upper jig and the lower jig are moved in the up and down direction using the established moving mechanism. In addition, in this verification, appropriately refer to FIGS. 7(a) to 10(f) referred to in this modification 1.

The shape of the waste material part used in this verification is the same shape as the waste material part 30 of the substrate 10 shown in FIG. 7(a). The angle α of the corner 34 is 60°.

In addition, as the substrate 10, a glass substrate having a thickness of 0.4 mm was used. As shown in FIG. 7( a ), the sub-scribing lines S1 to S4 are formed in the waste material portion 30 in the same manner as in Modification Example 1. As shown in FIG. This corresponds to the scribing step (S21) in Figure 7(b).

By the above-mentioned scribing step, as shown in FIG. 7(a), the waste material portion 30 is divided into regions R1 and R2. [Verification Procedure]

First, as shown in Figure 8 (a), Figure 9 (a), (b), Figure 10 (a), (b), by means of a moving mechanism, the lower jig is used to push the area near the center of the waste material portion 30 Position 35a, and the waste material portion 30 is raised by 0.7 mm. This position 35a is the lower surface 11 of the substrate 10, and is located directly below the intersection of the auxiliary scribing line S1 and the auxiliary scribing line S4. This corresponds to the crack extension step (S22) in Figure 7(b).

Next, as shown in Figure 8 (b), Figure 9 (c), (d), Figure 10 (c), (d), the moving mechanism is to move the lower jig from the waste material portion 30 downward by 2mm, so that the lower The jig moves from the position 35a to the edge 10a side of the substrate 10, and is positioned directly under the position 35b. Then, the moving mechanism positions the upper jig at positions 36a and 36b. The positions 36a and 36b are on the upper surface 12 of the substrate 10, and are arranged at symmetrical positions via the position 35b.

When the moving mechanism positions the upper jig and the lower jig at the above-mentioned positions, the upper jig is lowered and the lower jig is raised, and the area R1 of the waste material portion 30 is pushed. In this way, the region R1 is divided. This corresponds to the first division step (S23) in Fig. 7(b).

Then, as shown in Figure 8(c), (d), Figure 9(e), (f), Figure 10(e), (f), the moving mechanism moves the upper jig to the position 37a, 37b. Go up and meet. The positions 37a and 37b are on the upper surface 12 of the substrate 10, and are symmetrical positions via the sub-scribing line S1.

When the moving mechanism positions the upper jig at the above-mentioned position, the upper jig is lowered, and the area R2 of the waste material portion 30 is pressed. In this way, the region R2 is divided. This corresponds to the second division step (S24) in Fig. 7(b).

After the waste material portion 30 of the substrate 10 is divided, the end portion of the product portion 20 is confirmed. At the end of the product part 20, although small fragments and distortions occur, they do not affect the quality of the product.

From this verification, it was confirmed that in the dividing method of Modification 1, the waste material portion 30 from the substrate 10 can also be easily and well divided. <Effects of Modification 1>

As shown in FIG. 7(a) to FIG. 11, in the waste material part 30, four sub-scribing lines S1 to S4 are formed, and it is divided into a plurality of areas. In the crack extension step (S22), when the intersection of the auxiliary scribing line S1 and the auxiliary scribing line S4 is pressed on the lower surface 11 of the substrate 10, that is, the position 35a, the vertical cracks C1 and C4 penetrate and extend with the position 35a as the starting point.

However, in the first dividing step (S23), the area R1 is displaced in the thickness direction of the substrate 10 by pressing at two places of the area R1 of the waste material portion 30. Therefore, in the part of the predetermined region R1 by the subscribed lines S2 and S3, a displacement in the inner direction of the region R1 occurs. Therefore, the force of displacement in the thickness direction of the substrate 10 acts on the sub-scribing lines S2 and S3. Therefore, the vertical cracks C1 and C2 penetrate and extend along the sub-scribing lines S2 and S3.

In this way, the sub-scribing lines S1 to S4 are in a state where the vertical cracks C1 to C4 are well penetrated and extended, so the area R1 is easily and well divided into two areas with the sub-scribing line S1 as the center.

In addition, the region R1 is a region located on the edge 10a side of the substrate 10. Therefore, the first division step (S23) is performed, and the division area R1 also has no influence on the product part 20.

In particular, as shown in FIG. 7(a), when the shape of the waste material portion 30 is a shape whose width widens from the end edge 10a toward the inner side of the substrate 10, if the area R1 on the end edge 10a side is divided first, the After R1, the region R2 on the deep side of the waste material portion 30 can be more deformed. Therefore, after the region R1 is divided, the remaining region R2 can be easily divided.

As shown in FIG. 7(a), the sub-scribing lines S2 and S3 are formed so as to be inclined from a state perpendicular to the main scribing line L. As shown in FIG.

According to this configuration, the vertical cracks C2 and C3 extending along the sub-scribing lines S2 and S3 are more smooth to the main scribing line L compared to the state where the sub-scribing lines S2 and S3 are perpendicular to the main scribing line L connect. Therefore, the vertical crack C easily penetrates and spreads along the main scribe line L. Therefore, the waste material part 30 can be divided easily and well.

7(a), in the waste material portion 30, the sub-scribing lines S2 and S3 are separated from the main scribing line L by the respective ends of the sub-scribing lines S2 and S3 facing the main scribing line L. d1 way.

According to this configuration, it is possible to prevent the vertical cracks C2, C3 that penetrate and extend toward the side of the main scribing line L and extending along the sub-scribing lines S2, S3 from exceeding the main scribing line L and entering the product portion 20. Therefore, when the waste material part 30 is divided, the damage of the product part 20 can be suppressed more reliably, and the quality of the product part 20 can be improved.

Similarly, both ends of the auxiliary scribing line S4 are formed so as to be separated from the main scribing line L by a distance d2. Therefore, as described above, vertical cracks penetrate into the product portion 20, and damage to the product portion 20 can be reliably suppressed, and the quality of the product portion 20 can be improved.

7(a) to 11, the dividing method includes a second dividing step (S24). The second dividing step (S24) is after the first dividing step (S23). The area R2 of 30 is divided by pressing at least two of the surface of the waste material portion 30 forming the secondary scribe line S1.

By the first dividing step (S23), the vertical cracks C, C1~C4 penetrate and extend along the main scribe line L and the sub-scribe line S1~S4. Therefore, in the second division step (S24), if at least two of the regions R2 are pushed, the region R2 can be easily divided. In this way, it is divided into two stages, and the waste material portion 30 can be divided from the substrate 10. <Modification 2>

In this modification 1, the waste material portion 30 is divided into regions R1 and R2 by four sub-scribing lines S1 to S4, and the shape of the region R1 is a trapezoid. In Modification 2, four sub-scribing lines S1 to S4 are formed in the waste material portion 30 so that the shapes of the regions R1 and R2 are different from those of Modification 1.

12(a) to (d) are schematic diagrams showing the shape of the waste material portion 30 and the formation patterns of the sub-scribing lines S1 to S4 in the dividing method of the modification 2.

As shown in FIGS. 12(a) to (d), in Modification 2, the sub-scribing lines S1 and S4 are formed in the same manner as in Modification 1.

The sub-scribing lines S2 and S3 are arranged at symmetrical positions across the sub-scribing line S1 as in Modification 1, and are formed so as to be inclined from a state perpendicular to the main scribing line L. In addition, the auxiliary scribing lines S2 and S3 are the same as the auxiliary scribing line S1, and are formed such that the respective ends of the auxiliary scribing lines S2 and S3 facing the main scribing line L are separated from the main scribing line L by a distance d1.

In Modification 2, further, the sub-scribing lines S2 and S3 are formed so as to pass through the position 35a which is the intersection of the sub-scribing lines S1 and S4.

In this manner, when the four sub-scribing lines S1 to S4 are formed in the waste material part 30, the waste material part 30 is divided into a plurality of regions. In Modification 2, the system is divided into two stages, the area R3 including the two areas surrounded by the sub-scribing line S1, the end edge 10a, and the sub-scribing lines S2, S3, and the area other than the area R3 of the waste material portion 30 are divided Area R4.

In the case of dividing the waste material portion 30 of the modification 2, the division is performed according to the same procedure as the modification 1. As shown in Fig. 12(a), the moving mechanism 3 makes the lower jig 42 abut the position 35a and raises it only a predetermined distance, and pushes the waste material part 30 (refer to Figs. 9(a), (b) , Figure 10 (a), (b)). This corresponds to the crack extension step (S22) in Figure 7(b).

Then, as shown in FIG. 12(b), the moving mechanism 3 positions the lower jig 42 and the upper jig 41 at each of the positions 35a, 36a, and 36b. The positions 35a, 36a, and 36b are the same positions as the first modification. The moving mechanism 3 is a state in which the upper jig 41 and the lower jig 42 are in contact with this position, and the upper jig 41 is moved downward and the lower jig 42 is moved upward. Therefore, the waste material part 30 is pressed by the jig 40, and the area|region R3 is divided (refer FIG. 9(c), (d), FIG. 10(c), (d)). This corresponds to the first division step (S23) in Fig. 7(b).

Next, as shown in FIG. 12(b), the moving mechanism 3 positions the upper jig 41 at positions 37a and 37b. The positions 37a and 37b are the same positions as in the first modification. The moving mechanism 3 moves the upper jig 41 downward in a state where the upper jig 41 is in contact with this position. Therefore, as shown in FIG. 12(d), the waste material portion 30 is pressed by the upper jig 41, and the region R4 is divided (see FIGS. 9(e), (f), 10(e), and (f)). This corresponds to the second division step (S24) in Fig. 7(b).

In this way, when the sub-scribing lines S1 to S4 are formed as shown in Modification Example 2, the waste material portion 30 is divided into two regions R3 and R4 and can be divided from the substrate 10 as in Modification Example 1.

In addition, in the above-mentioned Modifications 1 and 2, after the crack extension step (S22), in the first dividing step (S23), the lower jig 42 pushes the regions R1, R3 of the waste material portion 30 from below. Therefore, the vertical cracks C2 and C3 penetrate and extend along the sub-scribing lines S2 and S3 contained in the regions R1 and R3.

However, for example, when the substrate 10 is thin, in the crack extension step (S22), the vertical cracks C1 to C4 may fully penetrate and extend along the sub-scribing lines S1 to S4. Therefore, at the main scribe line L, the vertical crack C penetrates and spreads.

In this case, in the first dividing step (S23), it is not necessary to use the lower jig 42 to push the regions R1 and R3 to penetrate and extend the vertical cracks C1 to C4. Therefore, in the first division step (S23), only the upper jig 41 is used to push the regions R1 and R3, the regions R1 and R3 are divided from the waste material portion 30, and the remaining region R2 is divided in the second division step (S24) , R4 is fine. ＜Other modifications＞

In Modifications 1 and 2 described above, four sub-scribing lines are formed in the waste material portion 30, but three sub-scribing lines may be used.

FIG. 13 is a schematic diagram showing the shape of the waste material portion 30 and the formation pattern of the sub-scribing lines S1 to S3 in the dividing method of another modification.

As shown in FIG. 13, in the second modification example, the auxiliary scribing line S1 is formed in the same manner as in the first modification example.

The sub-scribing lines S2 and S3 are arranged at symmetrical positions across the sub-scribing line S1 as in Modification 1, and are formed so as to be inclined from a state perpendicular to the main scribing line L. In addition, the sub-scribing lines S2 and S3 are the same as the sub-scribing line S1, and are formed such that the respective ends of the sub-scribing line S2 and the sub-scribing line S3 facing the main scribing line L are separated from the main scribing line L by a distance d1. , And formed in a way to intersect the end of the sub-line S1.

In this way, the waste material portion 30 forming the sub-scribing lines S1 to S3 is divided into a region R5 and a region R6 other than the region R5. The region R5 includes the sub-scribing line S1, the edge 10a, and the sub-scribing line S2. 2 areas surrounded by S3.

In the case of forming the auxiliary scribing lines S1~S3 as shown in FIG. 13, for example, the lower jig 42 is moved by the moving mechanism 3. Scribe S1 penetrates and stretches. This corresponds to the crack extension step (S22) in Figure 7(b).

Then, the moving mechanism 3 positions the upper jig 41 and the lower jig 42 at an appropriate position in the area R5 of the waste material portion 30, and presses the area R5 with the upper jig 41 and the lower jig 42. Therefore, because the vertical cracks C2 and C3 penetrate and extend along the sub-scribing lines S2 and S3, the region R5 is divided. This corresponds to the first division step (S23) in Fig. 7(b).

Next, the moving mechanism 3 positions the upper jig 41 at an appropriate position in the area R6 of the waste material portion 30, and presses the area R6 by the above jig 41, because the vertical cracks C, C2, and C3 are along the main scribe line L, the auxiliary line S2 and S3 penetrate and stretch, so the region R6 is divided. This corresponds to the second division step (S24) in Fig. 7(b).

In this way, even when the number of sub-dashed lines is three, by dividing the waste material portion 30 into regions R5 and R6, the waste material portion 30 can be divided easily and well.

In addition, in the above-mentioned Embodiments 1, 2, Modifications 1, and 2, the main scribing line L and the sub-scribing line S1 to S4 apply the same load to the substrate 10 to form the vertical cracks C, C1 to C4, but in In another modification, the scribing line is formed so that the load is different between the main scribing line L and the auxiliary scribing line S1 to S4.

In this case, the auxiliary scribing lines S1 to S4 are formed so that the scribing load on the substrate 10 is set to be larger than the main scribing line L.

Therefore, the vertical cracks C1~C4 along the sub-scribing line S1~S4 are more smooth and penetrate and extend well. Moreover, the vertical crack C penetrates and spreads along the main scribe line L. Therefore, the waste material part 30 is divided into a plurality of regions, and can be divided smoothly and well.

In addition, the embodiments of the present invention can be appropriately modified in various ways within the scope of the technical concept shown in the scope of the patent claims.

1: Split device 3: Moving mechanism (lifting mechanism) 10: substrate 20: Product Department 30: Waste Materials Department 31, 32, 33: location 35a, 35b: location 36a, 36b: location 37a, 37b: location C: Vertical cracking C1, C2, C3, C4: vertical cracking L: main line L1: Straight line R1~R6: area S1~S4: Underline

[Fig. 1] It is a flowchart showing the division method of the first embodiment. [Figure 2] is a schematic diagram of the scribing device used in the dividing method of the first embodiment. [Fig. 3] Figs. 3(a) and (b) are schematic diagrams respectively showing a part of a substrate and a dividing device to which the dividing method of Embodiment 1 is applied. Fig. 2(a) is a top view of a substrate and a dividing device, and Fig. 2(b) is a side view of Fig. 2(a). [Fig. 4] Fig. 4(a)~(c) are cross-sectional views schematically showing the process of the division method of the first embodiment. [Fig. 5] Figs. 5(a) and (b) are schematic diagrams respectively for explaining that when the substrate is divided according to the dividing method of the first embodiment, vertical cracks penetrate and extend along the scribe line. Fig. 5(a) is a schematic diagram for explaining the extension direction of the vertical crack. Fig. 5(b) is a cross-sectional view schematically showing the penetration of vertical cracks in the thickness direction of the substrate. [Fig. 6] is a schematic diagram showing the contour shape of the waste material part to which the dividing method of the second embodiment is applied. [FIG. 7] FIG. 7(a) is a schematic diagram showing the outline shape of the waste material portion of the substrate and the sub-scribing lines formed in the waste material portion by applying the dividing method of Modification Example 1. FIG. 7(b) is a flowchart showing the division method of Modification Example 1. FIG. [Fig. 8] Fig. 8(a) to (d) are schematic diagrams showing the state of the waste material portion and the position where the jig abuts in the process of the dividing method of Modification 1. [Figure 9] Figures 9(a) to (f) are cross-sectional views schematically showing the process of the division method of Modification 1. [Fig. 10] Figs. 10(a) to (f) are cross-sectional views schematically showing the process of the division method of Modification 1. [Fig. 11] It is a schematic diagram for explaining the penetration and extension of vertical cracks of the main scribing line and the sub-scribing line when the substrate is divided according to the dividing method of Modification 1. [Fig. 12] Fig. 12(a)~(d) are schematic diagrams showing the outline shape of the waste material portion of the substrate and the subscribed lines formed in the waste material portion using the dividing method of Modification 2. [Fig. 13] is a schematic diagram showing the outline shape of the waste material portion of the substrate and the sub-scribing line formed in the waste material portion by applying the division method of another modified example.

S11: marking step

S12: Segmentation step

Claims (13)

A dividing method is a method of dividing the waste material part from the substrate, which is characterized by: include: The scribing step is to form: the main scribing line is formed along the contour shape of the waste material part; and the auxiliary scribing line is formed in the waste material part and is formed on the same surface as the main scribing line; The dividing step is to divide the substrate along the main scribing line and the sub-scribing line; In the scribing step, the auxiliary scribing line is formed in a way that extends in a direction intersecting the main scribing line and divides the waste material part in the width direction; The dividing step includes the step of dividing, and the step of dividing is to bend the area containing the sub-line to extend the vertical crack along the sub-line, and to divide into the plural number divided by the sub-line Divide the waste material section in a manner of three regions. Such as the dividing method of claim 1, wherein the dividing step is to push the side opposite to the side of the waste material portion forming the auxiliary scribing line toward the auxiliary scribing line, and pushing at least two places across the auxiliary scribing line Press to form the side of the waste material portion of the secondary scribe line. According to the dividing method of claim 1, wherein the waste material portion is a concave shape from the outer periphery of the substrate to the inner side of the substrate, and has an outline shape including a straight portion and a curved portion. Such as the dividing method of claim 3, wherein the dividing step includes a separating step, and the separating step separates the waste material portion to the outside of the substrate in a state where the vertical crack is extended along the sub-scribing line. Such as the dividing method of claim 1, wherein the sub-scribing line is formed in such a manner that the end of the sub-scribing line facing the main scribing line is separated from the main scribing line by only a predetermined distance. Such as the dividing method of claim 5, wherein the underline includes a first underline, and the first underline is formed near the center of the waste material portion in the width direction. Such as the division method of claim 6, where The sub-line includes: the second sub-line and the third sub-line, which are formed at the position separating the first sub-line; and the fourth sub-line, which is the same as the first sub-line. It is formed by the way in which each of the line, the second sub-line and the third sub-line intersect; The segmentation step includes: The crack extension step is to push the intersection of the first sub-scribing line and the fourth sub-scribing line from the side opposite to the surface of the waste material portion where the first sub-scribing line is formed toward the first sub-scribing line ;and The first dividing step is to press two areas from the side on which the first sub-scribing line is formed, and to divide the area. The two areas are divided by the first sub-scribing line, the outer periphery of the substrate, and the second sub-scribing line. Surrounded by the sub-line and the third sub-line. Such as the division method of claim 6, where The sub-line includes: the second sub-line and the third sub-line, which are formed at the position separating the first sub-line; and the fourth sub-line, which is the same as the first sub-line. It is formed by the way in which each of the line, the second sub-line and the third sub-line intersect; The segmentation step includes: The crack extension step is to push the intersection of the first sub-scribing line and the fourth sub-scribing line from the side opposite to the surface of the waste material portion where the first sub-scribing line is formed toward the first sub-scribing line; and The first dividing step is to press two areas from the side on which the first sub-scribing line is formed, and to divide the area. The two areas are divided by the first sub-scribing line, the outer periphery of the substrate, and the second sub-scribing line. Surrounded by the subline, the third subline, and the fourth subline. Such as the dividing method of claim 7 or 8, wherein the second sub-line and the third sub-line are formed in a manner inclined from a state perpendicular to the main line. Such as the dividing method of claim 7 or 8, wherein the second sub-line and the third sub-line facing the main line are separated from the main line by a predetermined distance from each end of the second sub-line. 2 underline and the third underline. Such as the dividing method of claim 7 or 8, wherein the fourth sub-scribing line is formed in such a way that the end of the fourth sub-scribing line facing the main scribing line is separated from the main scribing line by only a predetermined distance. For example, the dividing method of claim 7 or 8, wherein the dividing step includes a second dividing step, and the second dividing step is after the first dividing step, for the area divided by the first dividing step in the waste material part The other area is divided by pressing at least two of the surface of the waste material portion forming the first sub-line. A dividing device is a dividing device that divides a waste material portion from the substrate along a scribe line formed on the substrate, and is characterized by: have: The mounting table is for mounting the substrate; The jig is to bend the waste material in the thickness direction; The lifting mechanism is used to lift the fixture; and The moving mechanism is to move the jig in the in-plane direction of the substrate; The fixture system includes: The first jig is to push the surface on one side of the waste material part; and The second jig is to push the other side of the waste material part; The first jig is arranged outside the second jig.

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