JP2021084382A - Parting method and parting device - Google Patents

Abstract

To provide a parting method and a parting device capable of easily and satisfactorily parting an end material part along a scribe line formed at a substrate.SOLUTION: A parting method of parting an end material part 30 from a substrate 10 comprises: a scribe step (S11) of forming a main scribe line L formed along the shape of an end material part 30 and a sub-scribe line S1; and a parting step (S12) of parting the substrate 10 along the main scribe line L and the sub-scribe line S1. In the scribe step (S11), the sub-scribe line S1 extends in a direction crossed to the main scribe line L, and the end material part 30 is formed so as to be partitioned in a width direction. The parting step (S12) comprises a step of growing a vertical crack C1 along the sub-scribe line S1 by distorting a region comprising the sub-scribe line S1, and parting the end material part 30 by being divided into a plurality of regions partitioned by the sub-scribe line S1.SELECTED DRAWING: Figure 1

Description

The present invention relates to a dividing method and a dividing device for dividing a substrate on which a scribe line is formed.

Conventionally, division of a brittle material substrate such as a glass substrate is performed by a scribe step of forming a scribe line on the surface of the substrate and a predetermined surface along the formed scribe line on a surface opposite to the surface on which the scribe line is formed. It is performed by a break process that applies force. In the scribe process, the scribing wheel is moved along a predetermined line while being pressed against the surface of the substrate.

Patent Document 1 discloses a method of removing a scrap portion having a shape recessed from an edge edge of a substrate toward the inside of the substrate along a scribe line. The method for removing the scrap portion disclosed in Patent Document 1 includes a step of forming a scribe line along the outer edge of the scrap portion and a secondary scrib line along the scrib line so as to form a strip-shaped portion. It includes a step of forming the scribe, a step of removing the main body from the end material, and a step of moving both ends of the strip so as to be close to each other.

Japanese Unexamined Patent Publication No. 2015-174804

In the method described in Patent Document 1, both ends of the strip-shaped portion are moved so as to be close to each other to separate the strip-shaped portion from the product portion, but the scrap portion has a complicated shape such as including an acute-angled portion. In that case, it is difficult to separate the strip. Further, in this method, an auxiliary scribe line is formed in the scrap portion separately from the scribe line. Further, when the end material portion is divided, it is necessary to divide the main body portion and the strip-shaped portion, respectively, but it may be difficult to form the strip-shaped portion depending on the size of the end material portion.

In view of such a problem, an object of the present invention is to provide a dividing method and a dividing device capable of easily and satisfactorily dividing a scrap portion along a scribing line formed on a substrate.

The first aspect of the present invention relates to a dividing method for dividing a scrap portion from a substrate. In the dividing method according to this aspect, a main scribe line formed along the contour shape of the end material portion and a sub scribe line formed in the end material portion on the same surface as the main scribe line are provided. A scribe step for forming and a dividing step for dividing the substrate along the main scribe line and the sub scribe line are provided. In the scribe step, the sub scribe line is oriented in a direction intersecting the main scribe line. It extends and is formed so as to divide the end material portion in the width direction, and in the dividing step, a vertical crack is extended along the sub-scribe line by bending a region including the sub-scribe line, and the end is formed. The step of dividing the material portion into a plurality of regions divided by the sub-scribe line is included.

According to the dividing method according to this aspect, when the region including the secondary scribe line is bent in the scrap portion, the vicinity of the secondary scribe line is displaced in the thickness direction of the substrate. As a result, the vertical cracks formed in the secondary scribe line penetrate, and the penetration of the vertical crack extends along the secondary scribe line. The vertical crack extending along the secondary scribe line is connected to the main scribe line, and the vertical crack penetrates and extends along the main scribe line. As a result, the scrap portion can be easily divided for each region divided by the sub-scribe line. At this time, since the vertical cracks permeate and extend along the secondary scribe line and the main scribe line, it is possible to suppress chipping (chips) that occur in the substrate after division and fine scratches called "pry". Therefore, a high quality product can be obtained from the substrate.

In particular, in the corner portion inside the substrate of the scrap portion, when the scrap portion is separated from the substrate, the scrap portion and the product portion are liable to rub against each other and pry. However, according to the above configuration, the vertical cracks satisfactorily permeate and extend along the secondary scribe line and the main scribe line, so that when the end material portion is divided, the twisting that occurs at the corner portion of the end material portion is reduced. ..

In the dividing method according to the present aspect, in the dividing step, the surface opposite to the surface of the end material portion on which the auxiliary scribe line is formed is pressed toward the auxiliary scribe line, and the auxiliary scribe line is formed. The surface of the end material portion that has been formed can be pressed at at least two locations with the sub-scribe line in between.

According to the dividing method according to this aspect, since a force is applied to open the secondary scribe line to the outside, vertical cracks satisfactorily penetrate and extend along the secondary scribe line.

In addition, since the force is applied to the scraps in the same direction from the position where the secondary scribe line is sandwiched, when the vertical cracks that penetrate and extend along the secondary scribe line are connected to the main scribe line, the entire main scribe line is connected. Vertical cracks penetrate and extend smoothly over the circumference. As a result, the region divided by the sub-scribe line can be easily and satisfactorily separated from the scrap portion.

In the dividing method according to this aspect, the end material portion is concave from the outer peripheral edge of the substrate toward the inside of the substrate, and may be formed so as to have a contour shape including a straight portion and a curved portion.

According to the dividing method according to this aspect, since the end material portion is curved to divide the end material portion, even if the end material portion has the above-mentioned shape, the quality of the product portion is not impaired, and the end material portion is separated from the substrate. The scraps can be divided.

In this case, the dividing step may include a step of pulling the end material portion to the outside of the substrate in a state where vertical cracks are extended along the sub-scribe line.

As a result, the scrap portion can be separated without coming into contact with the product portion.

In the dividing method according to the present embodiment, the sub-scribe line may be formed so that the end portion of the sub-scribe line toward the main scribe line is separated from the main scribe line by a predetermined distance.

According to the dividing method according to this aspect, since the end of the secondary scribe line is separated from the main scribe line by a predetermined distance, vertical cracks that permeate and extend along the secondary scribe line toward the main scribe line are formed in the main scribe line. It is possible to prevent the product from entering the product section beyond the line. Therefore, it is possible to more reliably prevent the product part from being damaged when the end material part is divided, and it is possible to improve the quality of the product part.

Further, the sub-scribe line may include a first sub-scribe line formed near the center of the end material portion in the width direction.

According to the dividing method according to this aspect, when the end material portion is bent, the end material portion is bent substantially evenly around the first sub-scribe line. Therefore, a force for opening the first secondary scribe line to the outside of the substrate is applied substantially evenly. Therefore, the vertical cracks penetrate and extend more smoothly along the first secondary scribe line. On the other hand, with the above configuration, a force for deforming in the thickness direction of the substrate is applied substantially evenly over the entire circumference of the main scribe line. Therefore, when the vertical cracks that permeate and extend along the first secondary scribe line continue to the main scribe line, the vertical cracks permeate and extend evenly along the main scribe line. Therefore, the scrap portion can be more smoothly and satisfactorily divided along the first sub-scribe line and the main scribe line.

In the dividing method according to the present embodiment, the sub-scrivener line includes a second sub-scribe line and a third sub-scrivener line formed at positions sandwiching the first sub-scrivener line, and the dividing step includes the first sub-scrivener line. A vertical crack extension step of pressing the vicinity of the center of the end material portion from the surface opposite to the surface of the end material portion on which the scribe line is formed toward the first sub-scribe line, and the second sub-scribe line. And the second sub-scribe line by pressing two places of the end material portion sandwiched between the third sub-scribe line and the first sub-scribe line from the surface side on which the first sub-scribe line is formed. And a first dividing step of dividing the region sandwiched by the third subscribe line, and the like.

According to the dividing method according to this aspect, in the crack extension step, a force is applied to the end material portion to open the first secondary scribe line to the outside, so that the vertical crack permeates and extends along the first secondary scribe line. ..

Then, in the first dividing step, two places of the scraps sandwiched between the second and third sub-scribe lines and the first sub-scribe line are pressed against the second and third sub-scribe lines. Therefore, a force is applied to displace the substrate in the thickness direction. Therefore, vertical cracks permeate and extend along the second sub-scribe line and the third sub-scribe line.

As described above, since the first sub-scribe line, the second sub-scribe line, and the third sub-scribe line are in a state in which the vertical cracks are well penetrated and extended, the region concerned is centered on the first sub-scribe line. It is easily and well divided into two regions.

In the dividing method according to the present embodiment, the sub-scribe line includes a second sub-scrivener line and a third sub-scrivener line formed at positions sandwiching the first sub-scribe line, and the first sub-scribe line and the second sub-scribe line. The dividing step includes the sub-scribe line and the fourth sub-scribe line formed so as to intersect each of the third sub-scribe lines, and the dividing step is performed on the scrap portion on which the first sub-scribe line is formed. A crack extension step of pressing the intersection of the first sub-scribe line and the fourth sub-scribe line toward the first sub-scribe line from the surface opposite to the surface of the first sub-scribe line, and the first sub-scribe line and the substrate. The two regions surrounded by the outer peripheral edge, the second sub-scribe line, and the third sub-scribe line are pressed from the surface side on which the first sub-scribe line is formed to divide the region. It may include a 1-dividing step.

According to the dividing method according to this aspect, in the crack extension step, the end material portion is bent by being pressed from below the first secondary scribe line toward the first secondary scribe line. As a result, vertical cracks extend radially starting from the intersection of the pressed first and fourth secondary scribe lines.

Then, in the first dividing step, two places of the scraps sandwiched between the second and third sub-scribe lines and the first sub-scribe line are pressed against the second and third sub-scribe lines. Therefore, a force is applied to displace the substrate in the thickness direction. Therefore, vertical cracks permeate and extend along the second and third secondary scribe lines.

As described above, since the first sub-scribe line, the second sub-scribe line, and the third sub-scribe line are in a state in which the vertical cracks are well penetrated and extended, the region concerned is centered on the first sub-scribe line. It is easily and well divided into two regions.

The region is a region located on the outer peripheral edge side of the scrap portion. Therefore, when the region is divided by performing the first division step, the product part is not affected. Further, for example, when the shape of the end material portion is such that the width widens from the outer peripheral edge of the substrate toward the inside of the substrate, if the relevant region on the outer peripheral edge side of the substrate is divided first, the region is divided. , It is possible to increase the deformation when dividing the area on the inner side of the scrap portion. Therefore, after dividing the region, the remaining region can be easily divided.

Further, such division is particularly effective when, for example, the scrap portion has a large area. By forming a plurality of sub-scribe lines in the end material portion, the end material portion can be divided into a plurality of parts and partially divided from the easily divided region.

In the dividing method according to the present embodiment, the sub-scribe line includes a second sub-scrivener line and a third sub-scrivener line formed at positions sandwiching the first sub-scribe line, and the first sub-scribe line and the second sub-scribe line. The dividing step includes the sub-scribe line and the fourth sub-scribe line formed so as to intersect each of the third sub-scribe lines, and the dividing step is performed on the scrap portion on which the first sub-scribe line is formed. A crack extension step of pressing the intersection of the first subscribing line and the fourth subscribing line toward the first subscribing line from the side opposite to the surface of the first subscribing line, and the first subscribing line outside the substrate. The peripheral edge, the second sub-scribe line, the third sub-scribe line, and the two regions surrounded by the fourth sub-scribe line are pressed from the surface side on which the first sub-scribe line is formed. It may include a first division step of dividing the region.

According to the dividing method according to this aspect, in the crack extension step, the end material portion is bent by being pressed from below the first secondary scribe line toward the first secondary scribe line. As a result, vertical cracks extend radially starting from the intersection of the pressed first and fourth secondary scribe lines.

Then, in the first dividing step, two places in the region located on the outer peripheral edge side of the end material portion surrounded by the second, third, and fourth sub-scribe lines are pressed, so that the first to fourth parts are pressed. A force is applied to the secondary scribe line to displace it in the thickness direction of the substrate. Therefore, vertical cracks permeate and extend along the second and third secondary scribe lines.

As described above, since the first sub-scribe line, the second sub-scribe line, the third sub-scribe line, and the fourth sub-scribe line are in a state in which the vertical cracks are well penetrated and extended, the region concerned is each sub-scrivener. It is easily and well divided into a plurality of regions along the line.

The region is a region located on the outer peripheral edge side of the scrap portion. Therefore, when the region is divided by performing the first division step, the product part is not affected. Further, for example, when the shape of the end material portion is such that the width widens from the outer peripheral edge of the substrate toward the inside of the substrate, if the relevant region on the outer peripheral edge side of the substrate is divided first, the region is divided. , When dividing the region on the back side of the scrap portion, the region on the back side of the scrap portion can be deformed more greatly. Therefore, after dividing the region, the remaining region can be easily divided.

Further, such division is particularly effective when, for example, the scrap portion has a large area. By forming a plurality of sub-scribe lines in the end material portion, the end material portion can be divided into a plurality of parts and partially divided from the easily divided region.

In the dividing method according to the present embodiment, the second sub-scribe line and the third sub-scribe line may be formed so as to be inclined from a state perpendicular to the main scrib line.

According to the dividing method according to this aspect, when the end material portion is pressed, the end material portion bends around the first secondary scribe line. This causes vertical cracks to penetrate and extend along the second and third subscribing lines. At this time, the case where the second secondary scribe line and the third secondary scribe line are tilted from the state perpendicular to the main scribe line is higher than the case where the second and third secondary scribe lines are perpendicular to the main scribe line. The cracks that extend along the scribe line smoothly connect to the main scribe line. Therefore, when the vertical cracks of the second and third sub scribe lines reach the main scribe line, the vertical cracks easily penetrate and extend along the main scribe line. Therefore, the scrap portion can be easily and satisfactorily divided.

In the dividing method according to the present embodiment, the second sub-scribe line and the third sub-scribe line toward the main scribe line are separated from each other by a predetermined distance from the main scribe line. A sub-scribe line and the third sub-scribe line can be formed.

According to the dividing method according to this aspect, since the ends of the second and third secondary scribe lines are separated from the main scribe line by a predetermined distance, they permeate toward the main scribe line along the secondary scribe line. It is possible to prevent the extended vertical crack from invading the product part beyond the main scribe line. Therefore, it is possible to more reliably prevent the product part from being damaged when the end material part is divided, and it is possible to improve the quality of the product part.

In the dividing method according to the present embodiment, the fourth sub-scribe line may be formed so that the end portion of the fourth sub-scribe line toward the main scribe line is separated from the main scribe line by a predetermined distance.

According to the dividing method according to this aspect, since the end of the fourth sub-scribe line is separated from the main scribe line by a predetermined distance, the vertical direction that permeates and extends along the sub-scrib line toward the main scribe line. It is possible to prevent cracks from entering the product section beyond the main scribe line. Therefore, it is possible to more reliably prevent the product part from being damaged when the end material part is divided, and it is possible to improve the quality of the product part.

In the dividing method according to this aspect, in the dividing step, after the first dividing step, the first sub-scribe line is formed in a region other than the region divided by the first dividing step in the scrap portion. It may include a second dividing step of pressing and dividing at least two points on the surface of the end material portion.

According to the division method according to this aspect, since vertical cracks permeate and extend along each scribe line in the first division step, the region can be easily divided by pressing at least two locations in the remaining region. ..

A second aspect of the present invention relates to a dividing device that divides a scrap portion from a substrate along a scribe line formed on the substrate. The dividing device according to this embodiment includes a mounting table on which the substrate is placed, a jig for bending the end material portion in the thickness direction, an elevating mechanism for raising and lowering the jig, and a front jig on the substrate. The jig has a moving mechanism for moving in the in-plane direction, and the jig has a first jig that presses one surface of the end material portion and a second jig that presses the other surface of the end material portion. The second jig is provided with a tool and is arranged outside the first jig.

Even in the dividing device according to this aspect, the same effect as that of the first aspect of the present invention can be obtained.

As described above, according to the present invention, it is possible to provide a dividing method and a dividing device capable of easily and satisfactorily dividing a scrap portion along a scribe line formed on a substrate.

The effects or significance of the present invention will be further clarified by the description of the embodiments shown below. However, the embodiments shown below are merely examples when the present invention is put into practice, and the present invention is not limited to those described in the following embodiments.

FIG. 1 is a flowchart showing a division method according to the first embodiment. FIG. 2 is a schematic view of a scribe device used in the dividing method according to the first embodiment. 3A and 3B are schematic views showing a part of a substrate and a dividing device to which the dividing method according to the first embodiment is applied, respectively. FIG. 2A is a top view of the substrate and the dividing device, and FIG. 2B is a side view of FIG. 2A. 4 (a) to 4 (c) are cross-sectional views schematically showing the process of the dividing method according to the first embodiment. 5 (a) and 5 (b) are schematic views for explaining that when the substrate is divided by the division method according to the first embodiment, vertical cracks permeate and extend along the scribe line, respectively. is there. FIG. 5A is a schematic view for explaining the extension direction of the vertical crack. FIG. 5B is a cross-sectional view schematically showing how vertical cracks permeate in the thickness direction of the substrate. FIG. 6 is a schematic view showing the contour shape of the end material portion to which the dividing method according to the second embodiment is applied. FIG. 7A is a schematic view showing the contour shape of the end material portion and the sub-scribe line formed on the end material portion in the substrate to which the division method according to the first modification is applied. FIG. 7B is a flowchart showing a division method according to the first modification. 8 (a) to 8 (d) are schematic views showing the state of the end material portion and the position where the jig abuts in the process of the dividing method according to the first modification. 9 (a) to 9 (f) are cross-sectional views schematically showing the process of the dividing method according to the first modification. 10 (a) to 10 (f) are cross-sectional views schematically showing the process of the dividing method according to the first modification. FIG. 11 is a schematic view for explaining the penetration and extension of vertical cracks in the main scribe line and the sub scribe line when the substrate is divided by the division method according to the first modification. 12 (a) to 12 (d) are schematic views showing the contour shape of the end material portion and the sub-scribe line formed on the end material portion in the substrate to which the division method according to the second modification is applied. FIG. 13 is a schematic view showing the contour shape of the end material portion and the sub-scribe line formed on the end material portion in the substrate to which the division method according to the other modification is applied.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. For convenience, the X-axis, Y-axis, and Z-axis that are orthogonal to each other are added to each figure. The Z-axis indicates upwards and downwards in the vertical direction. Hereinafter, the upper and lower sides mean the Z-axis positive side and the Z-axis negative side, respectively.

<Embodiment 1>
FIG. 1 is a flowchart showing a dividing method for dividing the substrate 10.

The substrate to which the dividing method according to the present embodiment is applied has a product part which is a necessary part as a product and a scrap part which is an unnecessary part. In this dividing method, the scrap portion is separated from the substrate by using a jig.

As shown in FIG. 1, the substrate 10 is divided by a scribe step (S11) for forming a scribe line on the substrate 10 and a division step (S12) for dividing the scrap portion 30.

Hereinafter, the method of dividing the substrate shown in FIG. 1 will be described in detail.

FIG. 2 is a diagram schematically showing the configuration of the scribe device 100. The scribe device 100 includes a moving table 101 and a scribe head 120. The moving table 101 is screwed with the ball screw 102. The moving table 101 is supported by a pair of guide rails 103 so as to be movable in the Y-axis direction. The ball screw 102 is rotated by the drive of the motor, so that the moving table 101 moves in the Y-axis direction along the pair of guide rails 103.

A motor 104 is installed on the upper surface of the moving table 101. The motor 104 rotates the mounting portion 105 located at the upper portion on the XY plane and positions it at a predetermined angle. The mounting portion 105 that can be horizontally rotated by the motor 104 includes a vacuum suction means (not shown). The substrate 10 mounted on the mounting portion 105 is held on the mounting portion 105 by the vacuum suction means.

The scribe device 100 includes two cameras 106 that image an alignment mark formed on the substrate 10 above the substrate 10 mounted on the mounting portion 105. Further, a bridge 107 is erected on the columns 108a and 108b so as to straddle the moving table 101 and the mounting portion 105 above the moving table 101.

A rail 109 is attached to the bridge 107. The rail 109 and the scribe head 120 are connected via a moving portion 110, and the scribe head 120 is installed so as to move in the X-axis direction by sliding the moving portion 110 on the rail 109.

When forming a scribe line on the substrate 10 using the scribe device 100, first, the holder unit 130 to which the cutting edge 5 is attached is attached to the support portion 121 of the scribe head 120.

The scribe device 100 positions the substrate 10 by a pair of cameras 106. Then, the scribe device 100 moves the scribe head 120 to a predetermined position, applies a predetermined load to the cutting edge 5, and brings the scribe head 120 into contact with the substrate 10. After that, the scribe device 100 forms a main scribe line L (see FIG. 3A) on the substrate 10 by moving the scribe head 120 in the X-axis direction.

The scribe device 100 can rotate or move the mounting portion 105 in the Y-axis direction as needed. When the main scribe line L is formed on the substrate 10, the scribe device 100 rotates the mounting portion 105 to form the sub scribe line S1 (see FIG. 3A) on the substrate 10.

In the above, the scribe device 100 that rotates while the scribe head 120 moves in the X-axis direction and the mounting portion 105 moves in the Y-axis direction is shown. However, the scribe device 100 includes the scribe head 120 and the mounting portion 105. Anything that moves relatively is sufficient. For example, the scribe head 120 may be fixed, and the mounting portion 105 may be a scribe device 100 that moves and rotates in the X-axis and Y-axis directions. Further, in this case, the camera 106 may be fixed to the scribe head 120.

FIG. 3A is a diagram showing a substrate 10 and a dividing device 1 to which the dividing method is applied. FIG. 3A is a top view of the substrate 10 and the dividing device 1.

As shown in FIG. 3A, the substrate 10 is composed of a product part 20 and a scrap part 30. For convenience, in FIG. 3A, the product section 20 is shaded. By the dividing method shown in FIG. 1, the scrap portion 30 is removed from the substrate 10.

The end material portion 30 has a concave contour shape that is recessed from the outer peripheral edge of the substrate 10 toward the inside of the substrate 10, and includes a curved portion in a part thereof. The contour shape of the end material portion 30 shown in FIG. 3A is a trapezoidal shape including one end edge of the outer peripheral edge of the substrate 10. In FIG. 3A, the edge of the outer peripheral edge of the substrate 10 included in the contour shape of the scrap portion 30 is defined as the edge 10a.

The two corners 34 on the positive side of the Y-axis included in the contour shape of the end material 30 are curved. The angle α of the corner portion 34 in the end material portion 30 shown in FIG. 3A is about 102 °. The main scribe line L is formed along the contour shape of the scrap portion 30 by the scribe device 100 shown in FIG.

A sub-scribe line S1 is formed on the scrap portion 30. The sub scribe line S1 extends in a direction intersecting the main scribe line L, and is formed near the center of the end material portion 30 in the width direction (X-axis direction in FIG. 3A). In the present embodiment, the sub-scribe line S1 is formed on a straight line that bisects the end material portion 30 in the width direction.

At this time, the secondary scribe line S1 is formed so as not to be connected to the straight line portion L1 facing the edge 10a of the main scribe line L. That is, the sub-scribe line S1 extends from the end edge 10a toward the inside of the end material portion 30, and is formed on the end material portion 30 so as to be separated from the straight line portion L1 by a distance d.

The distance d is appropriately adjusted according to the type, thickness, size, etc. of the substrate 10. For example, when the thickness of the substrate 10 is 0.4 mm, the distance d is set to about 5 mm.

As shown in FIG. 3A, the dividing device 1 includes a mounting table 2, a moving mechanism 3, and a jig 40. The mounting table 2 mounts the substrate 10. The moving mechanism 3 raises and lowers the jig 40 with respect to the substrate 10 and moves the jig 40 at least in the Y-axis direction. An elevating mechanism for raising and lowering the jig 40 with respect to the substrate 10 and a moving mechanism for moving the jig 40 in the X-axis and Y-axis directions with respect to the substrate may be separately provided. The jig 40 bends the end material portion 30 in the thickness direction to separate it from the end material portion 30. However, the moving mechanism 3 is not shown in FIG. 3 (a), but is shown in FIG. 3 (b).

In FIG. 3A, the white circles and black circles shown in the end material portion 30 schematically indicate the positions where the jig 40 (see FIG. 3B) abuts. Positions 31 and 32 indicated by black circles and positions 33 indicated by white circles are close to the edge 10a and are aligned along the edge 10a. The position 33 is the lower surface 11 of the substrate 10 and is located directly below the sub-scribe line S1. The jig 40 comes into contact with the position 31 on the lower surface 11 of the substrate 10. The jig 40 comes into contact with the positions 31 and 32 on the upper surface 12 of the substrate 10.

FIG. 3B is a side view of the configuration of FIG. 3A as viewed from the negative side of the X-axis. However, the moving mechanism 3 is shown by a broken line.

As shown in FIG. 3B, when the end material portion 30 is divided from the substrate 10, the substrate 10 is formed so that the edge region of the substrate 10 including the end material portion 30 protrudes from the mounting table 2 of the dividing device 1. It is mounted on the mounting table 2. When the substrate 10 is placed on the mounting table 2, the moving mechanism 3 raises and lowers the jig 40, so that the jig 40 comes into contact with the end material portion 30.

The jig 40 is composed of a first jig 41 and a second jig 42, and the moving mechanism 3 raises and lowers each of the first jig 41 and the second jig 42. The moving mechanism 3 is composed of a known elevating means, for example, an air cylinder. In this case, by appropriately applying pressure to the air cylinder, each of the first jig 41 and the second jig 42 can be moved up and down toward the end material portion 30.

Further, as shown in FIG. 3B, in order to prevent the substrate 10 from moving on the mounting table 2 and excessive deformation of the product unit 20 during the division of the substrate 10, the substrate 10 The upper surface 12 is pressed by the pressing member 4. The pressing member 4 is, for example, a member that is arranged near the end portion of the mounting table 2 and is provided so as to come into contact with a surface that is at least close to the end material portion 30 of the substrate 10. Alternatively, the mounting table 2 may be provided with, for example, a pressure adjusting unit for applying pressure to the substrate 10. In this case, since the substrate 10 can be attracted to the mounting table 2 by appropriately applying pressure to the pressure adjusting unit, the pressing member 4 can be omitted.

The substrate 10 may be, for example, a glass substrate, a ceramic substrate such as a low-temperature fired ceramic or a high-temperature fired ceramic, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, a quartz substrate, or the like. Further, the substrate 10 may have a thin film or a semiconductor material that does not correspond to a brittle material adhered to or contained on the surface or the inside. In the present embodiment, the dividing method is applied to the glass substrate.

The substrate 10 may be a bonded substrate in which two substrates are bonded together. Examples of such a substrate 10 include a substrate on which a color filter (CF) is formed and a thin film transistor (TFT) is formed on the other substrate.

As described above, the jig 40 is composed of the first jig 41 and the second jig 42. As shown in FIG. 3B, the first jig 41 and the second jig 42 are arranged so as to face each other with the substrate 10 interposed therebetween. Hereinafter, in the present specification, the first jig will be referred to as an "upper jig" and the second jig will be referred to as a "lower jig".

The upper jig 41 and the lower jig 42 may be integrally configured or may be separate bodies. The upper jig 41 is provided with protrusions 41a and 41b that come into contact with the positions 31 and 32. In FIG. 3B, only the protrusion 41a is shown. The lower jig 42 is provided with a protrusion 42a that comes into contact with the position 33. The protrusions 41a and 41b and the protrusions 42a are arranged at predetermined intervals on the XY plane.

The shapes and sizes of the protrusions 41a and 41b of the upper jig 41 and the protrusions 42a of the lower jig 42 are such that the end material portion 30 is curved according to the thickness, shape, and size of the end material portion 30 to form the substrate 10. It is appropriately adjusted so that the scrap portion 30 can be divided from the slab. Further, the positions where the protrusions 41a and 41b of the upper jig 41 and the protrusions 42a of the lower jig 42 of the end material portion 30 come into contact with each other are also vertical depending on the thickness, shape, and size of the end material portion 30. An appropriate position is selected so that the cracks can be extended and the scrap portion 30 can be separated from the substrate 10.

When the substrate 10 is divided by the dividing method shown in FIG. 1, the moving mechanism 3 moves the upper jig 41 and the lower jig 42 in the directions of the arrows in FIG. 3 (b) to sandwich the end material portion 30. Then, the moving mechanism 3 further moves the upper jig 41 and the lower jig 42, and the upper jig 41 and the lower jig 42 apply a pressing force to the end material portion 30, so that the main scribe line L That is, the scrap portion 30 is separated from the substrate 10 along the contour shape of the scrap portion 30.

Next, among the steps of the dividing method shown in FIG. 1, the dividing step (S12) will be described in detail with reference to FIGS. 4 (a) to 4 (c).

4 (a) to 4 (c) are diagrams schematically showing the process of the method of dividing the substrate 10. 4 (a) to 4 (c) show the moving mechanism 3, the substrate 10, and the curing in a plane parallel to the XZ plane at positions 31 to 33 in the Y-axis direction of the end material portion 30 shown in FIG. 3 (a). FIG. 5 is a cross-sectional view when the cross section of the tool 40 when cut is viewed from the negative side of the Y-axis. For convenience, in FIGS. 4A to 4C, only the substrate 10 is shaded to indicate the cross section. Further, in FIGS. 4A and 4B, the vertical cracks C and C1 are virtually illustrated for convenience of explanation. Further, in FIGS. 4A to 4C, the mounting table 2 and the pressing member 4 are not shown.

FIG. 4A shows a state before the scrap portion 30 is divided. The substrate 10 is mounted on the mounting table 2 so that the region including the scrap portion 30 of the substrate 10 protrudes from the mounting table 2. The upper surface 12 of the substrate 10 is pressed by the pressing member 4. The upper jig 41 is arranged directly above the positions 31 and 32 in FIG. 3A. The lower jig 42 is arranged directly below the position 33 in FIG. 3A. That is, the lower jig 42 is arranged directly below the sub-scribe line S1.

The distance between the protrusions 41a and 41b of the upper jig 41 is appropriately adjusted according to the type, thickness, size, and the like of the substrate 10.

Further, as described above, the substrate 10 is a glass substrate, and the main scribe line L shown in FIG. 3A is formed on the upper surface 12 of the substrate 10. A vertical crack C is formed along the main scribe line L. FIG. 4A is a schematic view of the substrate 10 of FIG. 3A when viewed from the negative side of the Y-axis.

As shown in FIG. 4B, the moving mechanism 3 moves the upper jig 41 downward to press the end material portion 30 from above, and the moving mechanism 3 moves the lower jig 42 upward. Press the scrap portion 30 from below. That is, the end material portion 30 is bent by three-point bending. As a result, the vertical crack C1 formed along the secondary scribe line S1 and the vertical crack C formed along the main scribe line L permeate and extend in the thickness direction of the substrate 10. In this state, the jig 40 is moved to the opening side to separate the scrap portion 30 from the base material. The penetration and extension of the vertical cracks C and C1 will be described later with reference to FIGS. 5A and 5B.

When the vertical cracks C and C1 permeate and extend in the main scribe line L and the sub scribe line S1, respectively, the scrap portion 30 is separated from the substrate 10 as shown in FIG. 4 (c). At this time, the scrap portion 30 separated from the substrate 10 is divided into two regions with the sub-scribe line S1 (vertical crack C1) as a boundary.

Next, the extension of the vertical cracks C and C1 by the dividing step (S12) described with reference to FIGS. 4 (a) to 4 (c) will be described with reference to FIGS. 5 (a) and 5 (b).

FIG. 5A is a schematic view for explaining that when the substrate 10 is divided, the vertical cracks C and C1 permeate and extend along the main scribe line L and the sub scribe line S1, respectively. ..

As shown in FIG. 4B, when the upper jig 41 and the lower jig 42 press the end material portion 30, the lower jig 42 presses the position 33. The position 33 is located directly below the sub-scribe line S1 as described above. As a result, the end material portion 30 is easily bent around the sub-scribe line S1 and is deformed in the thickness direction of the substrate 10.

At this time, as shown in FIG. 5A, the vertical crack C1 formed in the sub-scribing line S1 penetrates in the thickness direction of the substrate 10 starting from the position 33, and penetrates along the sub-scribing line S1 in the main scribing. Extend in direction E1 toward line L.

When the vertical crack C1 extending in the direction E1 along the secondary scribe line S1 reaches the position G1 of the straight portion L1 of the main scribe line L, it is connected to the vertical crack C of the main scribe line L and is formed from the position G1 to the straight portion L1. The vertical crack C that has been formed permeates and extends in directions E2 and E3.

Although the secondary scribe line S1 and the straight portion L1 are separated by a distance d, the vertical crack C1 extends to the straight portion L1 along the extension line of the secondary scribe line S1.

On the other hand, when the end material portion 30 is deformed due to bending, the vertical crack C permeates in the main scribe line L in the thickness direction of the substrate 10 from the end portions LA and LB where the vertical crack C is most likely to permeate due to an external force. Then, in the inward directions F1 and F2 from the ends LA and LB of the main scribe line L, the vertical crack C sequentially permeates and extends along the main scribe line L.

When the vertical crack C extends in the directions F1 and F2 on the main scribing line L, the direction is near the intermediate position of the main scribing line L, that is, near the position G1 which is the intersection of the extension line of the sub scribing line S1 and the straight line portion L1. The vertical crack C extending in F1 and F2 is connected to the extension of the vertical crack C1 extending from the directions E2 and E3. In this way, the vertical crack C penetrates in the entire range of the main scribe line L. By moving the jig 40 toward the open end side in this state, the end material portion 30 is removed from the substrate 10.

FIG. 5B is a cross-sectional view schematically showing how the vertical cracks C and C1 permeate in the thickness direction of the substrate 10. FIG. 5B shows a cross section when the substrate 10 and the jig 40 are cut in a plane parallel to the XZ plane at the position 33 in the Y-axis direction of FIG. 5A when viewed from the negative side of the Y-axis. It is a cross-sectional view of. For convenience, in FIG. 5B, only the substrate 10 is shaded to indicate the cross section.

As shown in the upper part of FIG. 5B, the vertical cracks C and C1 are in the thickness direction of the substrate 10 before the end material portion 30 is pressed by the upper jig 41 and the lower jig 42 to bend the end material portion 30. It has penetrated to the same depth.

As shown in the lower part of FIG. 5B, the sub-scribe line S1 is pressed by the lower jig 42, and the positions 31 and 32 are pressed by the upper jig 41, so that the end material portion 30 is bent, and thus the scrap portion 30 is bent. The vertical crack C1 penetrates in the thickness direction of the substrate.

On the other hand, with respect to the vertical crack C formed along the main scribe line L, the vertical crack C permeates in the thickness direction of the substrate 10 due to the bending of the end material portion 30. Here, the main scribe line L is not pressed by the jig 40 (upper jig 41), but the end material portion 30 bends and the center thereof is displaced upward, so that the peripheral edge of the end material portion 30 is reached. Inward displacement occurs in the scraps. In FIG. 5B, the displacement of the substrate is indicated by an arrow. As a result, the vertical crack C penetrates in the thickness direction of the substrate 10.

As shown in FIGS. 5A and 5B, when the vertical cracks C1 and C permeate along the secondary scribe line S1 and the main scribe line L and extend, the scrap portion 30 is centered on the secondary scribe line S1. It is divided into two regions in the width direction (X-axis direction).

In the present embodiment, both ends of the end material portion 30 in the X-axis direction are displaced downward and inward by pressing the end material portion 30 by the upper jig 41. Therefore, as shown in FIG. 5A, vertical cracks C1 and C2 are in the same state along the main scribe line L in the inward directions F1 and F2 from the ends LA and LB of the main scribe line L. I will extend it with. As a result, the vertical cracks C1 and C2 can be smoothly extended over the entire circumference of the main scribe line L, and the scrap portion 30 can be smoothly divided.

<Effect of Embodiment 1>
As shown in FIGS. 1 and 3 (a) to 5 (b), the sub-scribe line S1 extends in a direction intersecting the main scribe line L, and the end material portion 30 is divided into two regions in the width direction. As described above, it is formed on the end material portion 30. When the end material portion 30 is bent, first, the vertical crack C1 permeates along the secondary scribe line S1 in the thickness direction of the substrate 10 and extends along the secondary scribe line S1. This extension proceeds to the main scribe line L, and the vertical crack C permeates along the main scribe line L in the thickness direction of the substrate 10 and extends along the main scribe line L.

As a result, the scrap portion 30 is divided into two regions centered on the secondary scribe line S1, separated from the substrate 10, and the vertical crack C permeates and extends over the entire circumference of the main scribe line L. Therefore, it is possible to suppress chipping and twisting that occur on the end face of the product portion 20 after the division. Therefore, the scrap portion 30 can be easily and satisfactorily separated from the substrate 10.

As shown in FIGS. 1 and 3 (a) to 5 (b), the lower scribe line S1 is pressed against the scrap portion 30 by the lower jig 42. As a result, the vertical crack C1 satisfactorily penetrates and extends along the secondary scribe line S1.

Further, since the positions 31 and 32 sandwiching the secondary scribe line S1 are pressed by the upper jig 41, a force is applied to the end material portion 30 in the same direction, so that the entire circumference of the main scribe line L is covered. The vertical crack C penetrates and spreads smoothly and uniformly. As a result, the region of the scrap portion 30 separated by the sub-scribe line S1 is easily and satisfactorily separated from the scrap portion 30.

As shown in FIGS. 3A and 5A, the contour shape of the end material portion 30 is a concave shape from the edge 10a of the substrate 10 toward the inside of the substrate 10, and is a straight portion and a curved corner portion. Including 34 and.

Since the shape is as described above, when the end material portion 30 is bent without the auxiliary scribe line S1 being provided on the end material portion 30, the corner portion 34 is displaced to the inside of the end material portion 30 due to the bending. Since the amount is smaller than that, chipping and twisting are likely to occur near the corner portion 34. In this respect, in the present embodiment, the sub-scribe line S1 is formed so as to divide the end material portion 30 in the width direction. Therefore, when the positions 31 to 33 of the scrap portion 30 are pressed by the jig 40, the vertical crack C1 permeates and extends along the sub-scribe line S1. The extension of the vertical crack C1 is connected to the main scribe line L, and the vertical crack C permeates and extends over the entire circumference of the main scribe line L.

Therefore, even in the corner portion 34, the vertical crack C sufficiently permeates and extends in the thickness direction of the substrate 10. Therefore, the scrap portion 30 can be easily and satisfactorily divided along the main scribe line L including the corner portion 34.

As shown in FIGS. 3 (a) and 5 (a), the sub scribe line S1 is directed toward the main scribe line L so that the end of the sub scribe line S1 is separated from the main scribe line L by a distance d. It is formed. As a result, there is no possibility that the vertical crack C1 extending from the sub-scribe line S1 crosses the straight line portion L1 and enters the product section 20. Therefore, it is possible to more reliably prevent the product portion 20 from being damaged when the scrap portion 30 is divided.

As shown in FIGS. 3 (a) and 5 (a), the sub-scribe line S1 is formed with the end material portion 30 near the center in the width direction.

According to the above configuration, when the end material portions 30 are bent by pressing the positions 31 to 33 with the jig 40 (see FIGS. 4A to 4C), both sides of the secondary scribing line S1 are centered. The area of is flexed almost evenly. Therefore, a force for deforming the substrate 10 in the thickness direction is applied substantially evenly over the entire circumference of the main scribe line L. Therefore, the scrap portion 30 can be more smoothly and satisfactorily divided along the sub scribe line S1 and the main scribe line L.

<Embodiment 2>
In the first embodiment, the contour shape of the end material portion 30 includes the edge 10a of the substrate 10 and is a trapezoidal shape of the substrate 10. In the second embodiment, the contour shape of the end material portion 30 is rectangular.

FIG. 6 is a schematic view showing the contour shape of the end material portion 30 according to the second embodiment.

As shown in FIG. 6, the shape of the end material portion 30 according to the second embodiment is a rectangular shape in which the angle α of the corner portion 34 is about 90 °. The secondary scribe line S1 is formed so that the end portion of the secondary scribe line S1 toward the main scribe line L is separated from the main scribe line L by a distance d, as in the first embodiment. Further, the sub-scribe line S1 is formed near the center of the end material portion 30 in the width direction, specifically, on a straight line that bisects the end material portion 30 in the width direction.

In the case of the scrap portion 30 as shown in FIG. 6, the scrap portion 30 can be divided by the same procedure as in the first embodiment (S11, S12 in FIG. 1).

<Modification example 1>
In the first and second embodiments, the width of the edge 10a of the substrate 10 in the scrap portion 30 is formed to be about the same as or larger than the width of the straight portion L1 of the main scribe line L, and the angle of the corner portion 34. α was 90 ° or more. In the first modification, the end material portion 30 in which the width of the edge 10a is formed to be narrower than the width of the straight portion L1 and the angle α of the corner portion 34 is an acute angle will be described.

FIG. 7A is a schematic view showing the contour shape of the end material portion 30 and the sub-scribe lines S1 to S4 formed on the end material portion 30 in the substrate 10 to which the division method according to the first modification is applied.

As shown in FIG. 7A, the corner portion 34 of the end material portion 30 has an acute angle α. Further, the width of the straight line portion L1 of the main scribe line L which is arranged to face the edge 10a is larger than the width of the edge 10a of the substrate 10. Four sub-scribe lines S1 to S4 are formed on the end material portion 30 having such a shape.

The sub-scribing line S1 is formed so that the end portion of the sub-scribing line S1 toward the main scribing line L is separated from the main scribing line L by a distance d1 as in the first and second embodiments. Further, the sub-scribe line S1 is formed near the center of the end material portion 30 in the width direction, specifically, on a straight line that bisects the end material portion 30 in the width direction.

The sub-scribing lines S2 and S3 are arranged at symmetrical positions with respect to the sub-scribing line S1 and are formed so as to be inclined from a state perpendicular to the main scribing line L. Further, in the sub-scribing lines S2 and S3, similarly to the sub-scribing line S1, the ends of the sub-scribing line S2 and the sub-scribing line S3 toward the main scribing line L are separated from the main scribing line L by a distance d1. Is formed to do.

The sub-scribe line S4 passes near the center of the sub-scribe line S1 and is formed in parallel along the edge 10a. The sub-scribe line S4 is formed so that both ends of the sub-scribe line S4 toward the main scribe line L are separated from the main scribe line L by a distance d2.

The distances d1 and d2 are appropriately adjusted according to the type, thickness, size, shape of the end material portion 30, and the like of the substrate 10.

When the four sub-scribe lines S1 to S4 are formed in the end material portion 30 in this way, the end material portion 30 is divided into a plurality of regions. In the first modification, the scrap portion 30 divided into a plurality of regions is divided into two stages.

As the first stage of division, as shown in FIG. 7A, a region R1 including two regions surrounded by the sub-scribe line S1, the edge 10a, and the sub-scribe lines S2, S3, and S4 is divided. In the second stage of division, the remaining region R2 other than the region R1 is divided.

FIG. 7B is a flowchart showing a method of dividing the scrap portion 30 on which the four subscribe lines S1 to S4 formed as shown in FIG. 7A are formed from the substrate 10.

As shown in FIG. 7B, the substrate 10 is divided by pressing the scribe step (S21) for forming the main scribe line L and the sub scribe lines S1 to S4 on the substrate 10 and pressing the sub scribe line S1 from directly below. , A crack extending step (S22) for infiltrating and extending vertical cracks C1 to C4 along the sub-scribe lines S1 to S4, a first dividing step (S23) for dividing the region R1, and a second for dividing the region R2. It is performed by the dividing step (S24).

Hereinafter, among the methods for dividing the substrate 10 shown in FIG. 7B, the crack extension step (S22), the first division step (S23), and the second division step (S24) will be described in detail. In the following description, the penetration and extension of the vertical cracks C and C1 to C4 will be referred to, but the detailed description of the vertical cracks C and C1 to C4 will be described later with reference to FIG.

8 (a) to 8 (d) are plan views schematically showing the state of the scrap portion 30 and the position where the jig 40 abuts in the process of dividing the substrate 10. The end material portions 30 shown in FIGS. 8 (a) to 8 (d) are the same as the end material portions 30 of the substrate 10 shown in FIG. 7 (a), and the main scribe line L and the sub scribe lines S1 to S4 are It is formed.

9 (a) to 9 (f) and FIGS. 10 (a) to 10 (f) show a crack stretching step (S22), a first cutting step (S23), and a second cutting step (S24) among the methods for dividing the substrate 10. It is a figure which shows typically the state of the substrate 10 and the operation of a jig 40 in the above.

9 (a) to 9 (f) show the substrate 10, the mounting table 2, the moving mechanism 3, the holding member 4, and the jig 40 in a plane parallel to the YY plane at the position 35a of the end material portion 30 in the X-axis direction. It is a cross-sectional view when the X-axis negative side is seen from the cross section when 10 (a) to 10 (f) show a cross section when the moving mechanism 3, the substrate 10, and the jig 40 are cut in a plane parallel to the XZ plane at the position 35a of the end material portion 30 in the Y-axis direction. It is sectional drawing when viewed from the negative side of the Y axis. For convenience, in FIGS. 9 (a) to 9 (f) and FIGS. 10 (a) to 10 (f), only the substrate 10 is shaded to indicate the cross section. Further, in FIGS. 9 (a) to 9 (f) and FIGS. 10 (a) to 10 (f), vertical cracks C and C1 to C3 are virtually illustrated for convenience of explanation. Further, in FIGS. 10A to 10F, the mounting table 2 and the pressing member 4 are not shown.

In FIG. 8A, the white circles shown in the end material portion 30 schematically indicate the positions where the lower jig 42 abuts. The position 35a indicated by a white circle is near the center of the end material portion 30, is the lower surface 11 of the substrate 10, and is located directly below the sub-scribe line S1. Further, the sub-scribe line S4 is formed so as to pass through the position 35a and be parallel to the edge 10a.

As shown in FIGS. 9A and 10A, the lower jig 42 abuts on the position 35a of the lower surface 11 on the substrate 10. In FIG. 10A, the position in the Z-axis direction when the lower jig 42 abuts on the position 35a on the lower surface 11 is shown as the position M0.

As shown in FIG. 10B, the lower jig 42 is moved upward from the position M0 to the position M1 by the moving mechanism 3, and the end material portion 30 is pressed upward as shown in FIG. 9B. Will be done. At this time, the vertical cracks C1 and C4 permeate from the vicinity of the position 35a on the sub-scribe lines S1 and S4 and extend outward. 8 (a), 9 (a), (b), 10 (a), and (b) correspond to the crack stretching step (S22) of FIG. 7 (b).

In FIG. 8B, the white circles and black circles shown in the end material portion 30 schematically indicate the positions where the jig 40 abuts. The positions 35b indicated by white circles and the positions 36a and 36b indicated by black circles are positions near the edge 10a of the substrate 10 and are arranged in the region R1. The position 35b is the lower surface 11 of the substrate 10 and is located directly below the sub-scribe line S1. The lower jig 42 at the position 35b of the lower surface 11 of the substrate 10 comes into contact with the substrate 10. The upper jig 41 comes into contact with the positions 36a and 36b of the upper surface 12 of the substrate 10. Further, the positions 36a and 36b are symmetrical positions via the sub-scribe line S1.

In order to bring the lower jig 42 and the upper jig 41 into contact with the positions 35b, 36a, and 36b shown in FIG. 8 (b), first, as shown in FIGS. 9 (c) and 10 (c). , The moving mechanism 3 lowers the lower jig 42 from the position M1 to the position M2. Further, the moving mechanism 3 moves the lower jig 42 toward the edge 10a of the substrate 10 and positions it directly below the position 35b. In FIG. 9C, the broken line arrow indicates that the lower jig 42 moves toward the edge 10a and also moves downward. Although not shown in FIGS. 9 (c) and 10 (c), the moving mechanism 3 positions the upper jig 41 directly above the positions 36a and 36b.

In this way, when the lower jig 42 and the upper jig 41 are positioned so as to correspond to the positions 35b, 36a, and 36b, the moving mechanism 3 moves as shown in FIGS. 9 (d) and 10 (d). The lower jig 42 is moved upward and the upper jig 41 is moved downward. As a result, the region R1 of the end material portion 30 is pressed by the upper jig 41 and the lower jig 42.

At this time, the vertical cracks C2 and C3 permeate and extend from the portions defining the regions R1 in the sub-scribe lines S2 and S3, and the region R1 is divided into two regions around the sub-scribe line S1 of the region R1. To. 8 (b), 9 (c), (d), 10 (c), and (d) correspond to the first dividing step (S23) of FIG. 7 (b).

In FIG. 8C, the positions 37a and 37b indicated by the black circles in the end material portion 30 are arranged in the region R2 and are close to the corner portion 34 of the end material portion 30. Further, the positions 37a and 37b are symmetrical positions via the sub-scribe line S1. The upper jig 41 comes into contact with the positions 37a and 37b of the upper surface 12 of the substrate 10.

In order to bring the upper jig 41 into contact with the positions 37a and 37b shown in FIG. 8 (c), as shown in FIGS. 9 (e) and 10 (e), the moving mechanism 3 moves the upper jig 41. The upper jig 41 is moved downward by positioning it directly above the positions 37a and 37b. As a result, the region R2 of the end material portion 30 is pressed against the upper jig 41. At this time, the vertical cracks C1 to C4 of the portion included in the region R2 in the sub-scribe lines S1 to S4 permeate and extend. Further, the vertical crack C penetrates and extends in the main scribe line L.

Since the vertical cracks C and C1 to C4 extend in this way, the region R2 is separated from the substrate 10. The divided substrate 10 is shown as shown in FIGS. 8 (d), 9 (f), and 10 (f). 8 (c), (d), 9 (e), (f), 10 (e), and (f) correspond to the second dividing step (S24) of FIG. 7 (b).

Next, the extension of the vertical cracks C and C1 to C4 in the second modification will be described with reference to FIG.

FIG. 11 is a schematic view for explaining the penetration and extension of the vertical cracks C and C1 to C4 of the main scribe lines L and the sub scribe lines S1 to S4 when the substrate 10 is divided by the division method according to the first modification. Is.

In the crack extending step (FIGS. 9 (a), 9 (b), 10 (a), (b)) of step S22, the lower jig 42 presses the position 35a of the end material portion 30. As a result, first, the vertical cracks C1 and C4 permeate along the sub-scribe lines S1 and S4 starting from the position 35a and extend in the directions E5, E6, E7 and E10.

Next, in the first dividing step (FIGS. 9 (c), (d), 10 (c), (d)) of step S23, the lower jig 42 presses the position 35b of the end material portion 30 and moves up. The jig 41 presses the positions 36a and 36b of the end material portion 30 (see FIG. 8B). As a result, the region R1 is displaced in the thickness direction of the substrate 10. Therefore, inward displacement of the region R1 occurs with respect to the portion of the sub-scribe lines S2 and S3 that defines the region R1. Therefore, the vertical cracks C2 and C3 of the portion included in the region R1 in the sub-scribe lines S2 and S3 permeate and extend in the directions E8 and E9.

As described above, in the crack extension step (S22), the vertical crack C4 of the portion of the sub-scribe line S4 that defines the region R1 has penetrated and is extended. Therefore, at the intersection G2 between the secondary scribe line S4 and the secondary scribe line S2 and the intersection G3 between the secondary scribe line S4 and the secondary scribe line S3, the vertical crack C4 and the vertical crack C2, and the vertical crack C4 and the vertical crack C3 Are connected and smoothly extend in directions E8 and E9.

Here, at the secondary scribe line S2, the vertical crack C2 penetrates from the intersection G2 to the direction E11 and extends. Similarly, at the secondary scribe line S3, the vertical crack C3 penetrates and extends from the intersection G3 to the direction E12.

As a result, the vertical cracks C1 to C4 of the portion of the sub-scribe lines S1 to S4 included in the region R1 permeate and extend. Therefore, the region R1 is bisected around the sub-scribe line S1 (see FIG. 10D).

Subsequently, in the second dividing step (FIGS. 9 (e), (f), 10 (e), (f)) of step S24, the upper jig 41 presses the positions 37a and 37b of the scrap portion 30. (See FIG. 8 (c)). As a result, the region R2 is displaced in the thickness direction of the substrate 10, and the peripheral edge of the region R2 is displaced inward. Therefore, the vertical cracks C1 to C4 of the portion included in the region R2 in the sub-scribe lines S1 to S4 permeate and extend in the directions E10 to E14.

As described above, in the crack extension step (S22), the vertical crack C1 has already penetrated in the region R2 of the sub-scribe line S1. Further, also in the first dividing step (S23), the vertical cracks C2 and C3 permeate the portions included in the region R2 in the sub-scribe lines S2 and S3 and extend in the directions E11 and E12. From these, when the region R2 is pressed by the upper jig 41, the vertical cracks C1 to C4 of the portion included in the region R2 in the sub-scribe lines S1 to S4 smoothly permeate and extend in the directions E10 to E14.

Further, the vertical crack C4 of the secondary scribe line S4 extends from the intersection G2 in the direction E13. Similarly, the vertical crack C4 extends from the intersection G3 in the direction E14.

When the vertical crack C1 of the secondary scribe line S1 extends in the direction E10 and reaches the position G1 of the main scribe line L, the vertical crack C of the main scribe line L penetrates and extends in the directions E15 and E16. Similarly, the vertical crack C2 extends in the direction E11 and connects to the vertical crack C of the main scribe line L. The vertical crack C3 extends in the direction E12 and connects to the vertical crack C of the main scribe line L. The vertical crack C4 extends in the directions E13 and E14 and connects to the vertical crack C of the main scribe line L.

On the other hand, in the main scribe line L, as described with reference to FIG. 5A, when the region R2 is pressed by the upper jig 41, the end material portion 30 is deformed due to bending. Therefore, in the main scribe line L, the vertical crack C permeates from the end LCs and LDs at which the vertical crack C is most likely to permeate due to the external force in the thickness direction of the substrate 10. Then, in the inward directions F3 and F4 from the end LCs and LDs, the vertical cracks C sequentially permeate and extend along the main scribe line L.

When the vertical cracks C extend in the directions F3 and F4 on the main scribe line L, the vertical cracks C are sequentially connected to the vertical cracks C1 to C4 that have reached the main scribe line L. In this way, the vertical crack C penetrates in the entire range of the main scribe line L.

In this way, vertical cracks permeate and extend in all scribe lines contained in region R2. As a result, the region R2 is divided into a plurality of areas along the sub-scribe lines S1 to S4, and the end material portion 30 is divided along the main scribe line L.

<Verification>
The inventors of the present application have carried out the following verification in order to verify the effect when the division method according to the above-mentioned modification 1 is used. In this verification, the upper jig and the lower jig were moved in the vertical direction using a predetermined moving mechanism. Further, in this verification, FIGS. 7 (a) to 10 (f) referred to in the above modification 1 are appropriately referred to.

The shape of the end material portion used in this verification was the same as that of the end material portion 30 of the substrate 10 shown in FIG. 7A, and the corner portion 34 had an angle α of 60 °.

Further, as the substrate 10, a glass substrate having a thickness of 0.4 mm was used. As shown in FIG. 7A, the sub-scribe lines S1 to S4 were formed on the end material portion 30 in the same manner as in the first modification. This corresponds to the scribe step (S21) of FIG. 7 (b).

By the above scribe step, as shown in FIG. 7A, the scrap portion 30 is divided into regions R1 and R2.

[Verification procedure]
First, as shown in FIGS. 8 (a), 9 (a), (b), 10 (a), and (b), the position 35a near the center of the scrap portion 30 is cured by the moving mechanism. The scrap portion 30 was raised by 0.7 mm by pressing with a tool. This position 35a is the lower surface 11 of the substrate 10 and is located directly below the intersection of the sub-scribe line S1 and the sub-scribe line S4. This corresponds to the crack stretching step (S22) of FIG. 7 (b).

Next, as shown in FIGS. 8 (b), 9 (c), (d), 10 (c), and (d), the moving mechanism moves the lower jig downward by 2 mm from the end material portion 30. , The lower jig was moved from the position 35a to the edge 10a side of the substrate 10 and positioned directly below the position 35b. Then, the moving mechanism positioned the upper jig at positions 36a and 36b. The positions 36a and 36b are the upper surface 12 of the substrate 10 and are arranged symmetrically with respect to the position 35b.

When the upper jig and the lower jig are positioned at the above positions, the moving mechanism lowers the upper jig, raises the lower jig, and presses the region R1 of the end material portion 30. As a result, the region R1 was divided. This corresponds to the first dividing step (S23) of FIG. 7 (b).

Next, as shown in FIGS. 8 (c), 8 (d), 9 (e), (f), 10 (e), and (f), the moving mechanism positions the upper jig at positions 37a and 37b. Move it up and bring it into contact. The positions 37a and 37b are the upper surface 12 of the substrate 10 and are symmetrical positions via the sub-scribe line S1.

When the moving mechanism positions the upper jig at the above position, the moving mechanism lowers the upper jig and presses the region R2 of the end material portion 30. As a result, the region R2 was divided. This corresponds to the second dividing step (S24) of FIG. 7 (b).

After dividing the end material portion 30 of the substrate 10, the end portion of the product portion 20 was confirmed. Although minute chipping and twisting occurred at the end of the product part 20, it did not affect the product quality.

From the above verification, it was confirmed that the scrap portion 30 can be easily and satisfactorily divided from the substrate 10 even by the dividing method of the modified example 1.

<Effect of variant 1>
As shown in FIGS. 7A to 11A, four sub-scribe lines S1 to S4 are formed in the scrap portion 30, and are divided into a plurality of regions. In the crack extension step (S22), when the intersection of the sub-scribe line S1 and the sub-scribe line S4, that is, the position 35a is pressed on the lower surface 11 of the substrate 10, the vertical cracks C1 and C4 permeate and penetrate from this position 35a. Extend.

Then, in the first dividing step (S23), the region R1 is displaced in the thickness direction of the substrate 10 by pressing the two regions R1 in the scrap portion 30. Therefore, inward displacement of the region R1 occurs with respect to the portion of the sub-scribe lines S2 and S3 that defines the region R1. Therefore, a force is applied to the sub-scribe lines S2 and S3 to displace the substrate 10 in the thickness direction. Therefore, the vertical cracks C1 and C2 permeate and extend along the sub-scribe lines S2 and S3.

As described above, since the vertical cracks C1 to C4 are in a state of being well penetrated and extended in the sub-scribing lines S1 to S4, the region R1 is easily and well divided into two regions centering on the sub-scribing line S1. To.

Further, the region R1 is a region located on the edge 10a side of the substrate 10. Therefore, even if the region R1 is divided by performing the first division step (S23), the product unit 20 is not affected.

In particular, as shown in FIG. 7A, when the shape of the end material portion 30 is such that the width widens from the end edge 10a toward the inside of the substrate 10, the region R1 on the end edge 10a side is first. If the region R1 is divided, the region R2 on the inner side of the scrap portion 30 can be deformed more greatly after the region R1 is divided. Therefore, after dividing the region R1, the remaining region R2 can be easily divided.

As shown in FIG. 7A, the sub-scribe lines S2 and S3 are formed so as to be inclined from a state perpendicular to the main scribe line L.

According to such a configuration, the vertical cracks C2 and C3 extending along the sub-scribing lines S2 and S3 are the main scribing lines as compared with the case where the sub-scribing lines S2 and S3 are perpendicular to the main scribing line L. It connects smoothly to L. As a result, the vertical crack C easily penetrates and extends along the main scribe line L. Therefore, the end material portion 30 can be easily and satisfactorily divided.

Further, as shown in FIG. 7A, in the scrap portion 30, the sub scribe lines S2 and S3 have their respective ends of the sub scribe lines S2 and S3 heading toward the main scribe line L from the main scribe line L. It is formed so as to be separated by a distance d1.

With such a configuration, the vertical cracks C2 and C3 that permeate and extend along the sub-scribe lines S2 and S3 toward the main scribe line L can enter the product unit 20 beyond the main scribe line L. Can be prevented. Therefore, it is possible to more reliably prevent the product section 20 from being damaged when the scrap portion 30 is divided, and it is possible to improve the quality of the product section 20.

Similarly, both ends of the secondary scribe line S4 are formed so as to be separated from the main scribe line L by a distance d2. As a result, similarly to the above, it is possible to reliably prevent the vertical cracks from penetrating the product section 20 and damaging the product section 20, and it is possible to improve the quality of the product section 20.

Further, as shown in FIGS. 7A to 11, in the dividing method, after the first dividing step (S23), the scrap portion in which the sub-scribe line S1 is formed in the region R2 in the scrap portion 30. The second dividing step (S24) of pressing and dividing at least two points on the surface of 30 is included.

By the first cutting step (S23), vertical cracks C and C1 to C4 permeate and extend along the main scribe lines L and the sub scribe lines S1 to S4. Therefore, in the second dividing step (S24), the region R2 can be easily divided by pressing at least two locations in the region R2. In this way, the scrap portion 30 can be separated from the substrate 10 in two stages.

<Modification 2>
In the above modification 1, the end material portion 30 is divided into regions R1 and R2 by the four sub-scribe lines S1 to S4, and the shape of the region R1 is trapezoidal. In the modified example 2, four sub-scribe lines S1 to S4 are formed in the end material portion 30 so that the shapes of the regions R1 and R2 are different from those of the modified example 1.

12 (a) to 12 (d) are schematic views showing the shape of the end material portion 30 and the formation pattern of the sub-scribe lines S1 to S4 in the dividing method according to the second modification.

As shown in FIGS. 12 (a) to 12 (d), in the second modification, the sub-scribe lines S1 and S4 are formed in the same manner as in the first modification.

The sub-scribing lines S2 and S3 are arranged at symmetrical positions with the sub-scribing line S1 in between, and are formed so as to be inclined from a state perpendicular to the main scribing line L, as in the first modification. Further, in the secondary scribe lines S2 and S3, similarly to the secondary scribe line S1, the ends of the secondary scribe lines S2 and S3 toward the main scribe line L are separated from the main scribe line L by a distance d1. It is formed.

In the second modification, the sub-scribe lines S2 and S3 are further formed so as to pass through the position 35a which is the intersection of the sub-scribe lines S1 and S4.

When the four sub-scribe lines S1 to S4 are formed in the end material portion 30 in this way, the end material portion 30 is divided into a plurality of regions. In the second modification, the region R3 including the two regions surrounded by the sub-scribe line S1, the edge 10a, the sub-scribe lines S2, and S3, and the region R4 other than the region R3 of the scrap portion 30 are divided into two stages. Divide and divide.

When the end material portion 30 of the modified example 2 is divided, it is divided by the same procedure as that of the modified example 1. As shown in FIG. 12A, first, the moving mechanism 3 brings the lower jig 42 into contact with the position 35a, then raises the lower jig 42 by a predetermined distance to press the end material portion 30 (FIG. 9A). ), (B), FIGS. 10 (a), (b)). This corresponds to the crack stretching step (S22) of FIG. 7 (b).

Next, as shown in FIG. 12B, the moving mechanism 3 positions the lower jig 42 and the upper jig 41 at the positions 35b, 36a, and 36b, respectively. The positions 35b, 36a, and 36b are the same positions as those in the first modification. The moving mechanism 3 moves the upper jig 41 downward and the lower jig 42 upward in a state where the upper jig 41 and the lower jig 42 are in contact with each other at such a position. As a result, the end material portion 30 is pressed by the jig 40, and the region R3 is divided (see FIGS. 9 (c), 9 (d), 10 (c), and (d)). This corresponds to the first dividing step (S23) of FIG. 7 (b).

Subsequently, as shown in FIG. 12 (c), the moving mechanism 3 positions the upper jig 41 at the positions 37a and 37b. The positions 37a and 37b are the same positions as in the first modification. The moving mechanism 3 moves the upper jig 41 downward with the upper jig 41 in contact with such a position. As a result, as shown in FIG. 12 (d), the end material portion 30 is pressed by the upper jig 41 to divide the region R4 (FIGS. 9 (e), (f), 10 (e), (F)). This corresponds to the second dividing step (S24) of FIG. 7 (b).

In this way, even when the sub-scribe lines S1 to S4 are formed as in the modified example 2, the scrap portion 30 can be divided into two regions R3 and R4 and separated from the substrate 10 as in the modified example 1. ..

In the above-mentioned modifications 1 and 2, after the crack extension step (S22), in the first cutting step (S23), the regions R1 and R3 of the end material portion 30 were pressed from below by the lower jig 42. As a result, the vertical cracks C2 and C3 permeated and extended along the subscribe lines S2 and S3 included in the regions R1 and R3.

However, for example, if the substrate 10 is thin, the vertical cracks C1 to C4 may sufficiently penetrate and extend along the sub-scribe lines S1 to S4 in the crack extension step (S22). As a result, the vertical crack C penetrates and extends even in the main scribe line L.

In such a case, in the first cutting step (S23), it is not necessary to press the regions R1 and R3 with the lower jig 42 to penetrate and extend the vertical cracks C1 to C4. Therefore, in the first dividing step (S23), the regions R1 and R3 are pressed only by the upper jig 41 to divide the regions R1 and R3 from the scrap portion 30, and the remaining regions R1 and R3 are divided in the second dividing step (S24). The regions R2 and R4 may be divided.

<Other variants>
In the above-mentioned modifications 1 and 2, four sub-scribe lines are formed on the end material portion 30, but three may be formed.

FIG. 13 is a schematic view showing the shape of the end material portion 30 and the formation pattern of the sub-scribe lines S1 to S3 in the dividing method according to another modified example.

As shown in FIG. 13, in the second modification, the sub-scribe line S1 is formed in the same manner as in the first modification.

The sub-scribing lines S2 and S3 are arranged at symmetrical positions with the sub-scribing line S1 in between, and are formed so as to be inclined from a state perpendicular to the main scribing line L, as in the first modification. Further, in the sub-scribing lines S2 and S3, similarly to the sub-scribing line S1, the ends of the sub-scribing line S2 and the sub-scribing line S3 toward the main scribing line L are separated from the main scribing line L by a distance d1. And so as to intersect the end of the secondary scribe line S1.

The end material portion 30 in which the sub-scribe lines S1 to S3 are formed in this way includes a region R5 including two regions surrounded by the sub-scribe lines S1, the edge 10a, the sub-scribe lines S2, and S3, and the other regions. It is divided into region R6.

Even when the secondary scribe lines S1 to S3 as shown in FIG. 13 are formed, for example, the lower jig 42 is moved by the moving mechanism 3 to press the vicinity of the center of the secondary scribe line S1 to press the secondary scribe line S1. The vertical crack C1 penetrates and extends along S1. This corresponds to the crack stretching step (S22) of FIG. 7 (b).

Next, the moving mechanism 3 positions the upper jig 41 and the lower jig 42 at appropriate positions in the region R5 of the scrap portion 30, and presses the region R5 with the upper jig 41 and the lower jig 42. As a result, the vertical cracks C2 and C3 permeate and extend along the sub-scribe lines S2 and S3, so that the region R5 is divided. This corresponds to the first dividing step (S23) of FIG. 7 (b).

Subsequently, the moving mechanism 3 positions the upper jig 41 at an appropriate position in the region R6 of the scrap portion 30, and presses the region R6 with the upper jig 41 to cause the main scribe line L, the sub scribe lines S2, and S3. Since the vertical cracks C, C2, and C3 permeate and extend along the above, the region R6 is divided. This corresponds to the second dividing step (S24) of FIG. 7 (b).

As described above, even when there are three sub-scribe lines, the scrap portion 30 can be easily and satisfactorily divided by dividing the scrap portion 30 into the regions R5 and R6.

Further, in the first and second embodiments and the first and second modifications, the main scribe lines L and the sub scribe lines S1 to S4 are subjected to the same load on the substrate 10 to form vertical cracks C and C1 to C4. However, in another modification, the main scribe line L and the sub scribe lines S1 to S4 have different loads to form the scribe line.

In this case, the scribing load on the substrate 10 is set so that the sub-scribing lines S1 to S4 are larger than the main scribing line L to form the sub-scribing lines S1 to S4.

As a result, the vertical cracks C1 to C4 permeate and extend more smoothly and satisfactorily along the sub-scribe lines S1 to S4. Then, the vertical crack C penetrates and extends along the main scribe line L. Therefore, the scrap portion 30 can be divided into a plurality of regions and can be divided more smoothly and satisfactorily.

In addition, various modifications of the embodiment of the present invention can be made as appropriate within the scope of the technical idea shown in the claims.

1 Dividing device 3 Moving mechanism (elevating mechanism)
10 Substrate 20 Product part 30 Scrap part 31, 32, 33 Position 35a, 35b Position 36a, 36b Position 37a, 37b Position C Vertical crack C1, C2, C3, C4 Vertical crack L Main scribe line L1 Straight part R1 to R6 area S1-S4 Deputy scribe line

Claims (13)

It is a division method that divides the scraps from the substrate.
A scribe step of forming a main scribe line formed along the contour shape of the end material portion and a sub scribe line formed in the end material portion on the same surface as the main scribe line.
A dividing step for dividing the substrate along the main scribe line and the sub scribe line is provided.
In the scribe step, the secondary scribe line is formed so as to extend in a direction intersecting the main scribe line and divide the scrap portion in the width direction.
In the dividing step, a vertical crack is extended along the sub-scribing line by bending the region including the sub-scribing line, and the end material portion is divided into a plurality of regions divided by the sub-scribing line. Including the process of dividing,
A method of division characterized by that. In the division method according to claim 1,
In the dividing step, the surface opposite to the surface of the end material portion on which the sub-scribe line is formed is pressed toward the sub-scribe line, and the end material portion on which the sub-scribe line is formed is pressed. Press the surface at at least two locations with the secondary scribe line in between.
A method of division characterized by that. In the division method according to claim 1 or 2,
The end material portion has a concave shape from the outer peripheral edge of the substrate toward the inside of the substrate, and has a contour shape including a straight portion and a curved portion.
A method of division characterized by that. In the division method according to claim 3,
The dividing step includes a step of pulling the end material portion to the outside of the substrate in a state where vertical cracks are extended along the sub-scribe line.
A method of division characterized by that. In the dividing method according to any one of claims 1 to 4,
The sub-scribe line is formed so that the end of the sub-scribe line toward the main scribe line is separated from the main scribe line by a predetermined distance.
A method of division characterized by that. In the division method according to claim 5,
The sub-scribe line includes a first sub-scribe line formed near the center of the end material portion in the width direction.
A method of division characterized by that. In the division method according to claim 6,
The sub-scribe line includes a second sub-scribe line and a third sub-scrivener line formed at positions sandwiching the first sub-scribe line, the first sub-scribe line, the second sub-scribe line, and the third sub-scribe line. Includes a fourth sub-scribe line, which is formed to intersect each of the sub-scribe lines,
The dividing step is
The intersection of the first secondary scribe line and the fourth secondary scribe line is pressed toward the first secondary scribe line from the surface opposite to the surface of the end material portion on which the first secondary scribe line is formed. Crack extension process and
The two regions surrounded by the first secondary scribe line, the outer peripheral edge of the substrate, the second secondary scribe line, and the third secondary scribe line are formed from the surface side on which the first secondary scribe line is formed. Including a first dividing step of pressing to divide the area,
A method of division characterized by that. In the division method according to claim 6,
The sub-scribe line includes a second sub-scribe line and a third sub-scrivener line formed at positions sandwiching the first sub-scribe line, the first sub-scribe line, the second sub-scribe line, and the third sub-scribe line. Includes a fourth sub-scribe line, which is formed to intersect each of the sub-scribe lines,
The dividing step is
A crack that presses the intersection of the first sub-scribing line and the fourth sub-scribing line toward the first sub-scribing line from the side opposite to the surface of the end material portion on which the first sub-scribing line is formed. Extension process and
The first sub-scribe line covers two regions surrounded by the first sub-scribe line, the outer peripheral edge of the substrate, the second sub-scribe line, the third sub-scribe line, and the fourth sub-scribe line. Including a first dividing step of pressing from the formed surface side to divide the region.
A method of division characterized by that. In the division method according to claim 7 or 8.
The second sub-scribe line and the third sub-scribe line are formed so as to be inclined from a state perpendicular to the main scrib line.
A method of division characterized by that. In the division method according to claim 7 or 8.
The second secondary scribe line and the third secondary so that the ends of the second secondary scribe line and the third secondary scribe line toward the main scribe line are separated from the main scribe line by a predetermined distance. Scrivener is formed,
A method of division characterized by that. In the division method according to claim 7 or 8.
The fourth sub-scribe line is formed so that the end of the fourth sub-scribe line toward the main scribe line is separated from the main scribe line by a predetermined distance.
A method of division characterized by that. In the dividing method according to any one of claims 7 to 11,
The dividing step is
After the first cutting step, at least two points on the surface of the scrap portion on which the first sub-scribe line is formed are pressed with respect to a region other than the region divided by the first cutting step in the scrap portion. Including the second division step of dividing
A method of division characterized by that. It is a dividing device that divides a scrap portion from the substrate along a scribe line formed on the substrate.
A pedestal on which the board is placed and
A jig that bends the end material in the thickness direction,
An elevating mechanism that elevates the jig and
A moving mechanism for moving the jig in the in-plane direction of the substrate,
The jig has
A first jig that presses one surface of the scrap portion and
A second jig for pressing the other surface of the scrap portion is provided.
The first jig is arranged outside the second jig.
A dividing device characterized by that.

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