TW202040092A - Testing device, testing method, and manufacturing method for film - Google Patents

Abstract

A testing device according to one embodiment comprises: a testing optical system having an illumination unit and an imaging unit that acquires a test image for defect determination; and a moving mechanism that moves a film. The testing optical system is fixed in place independent of the moving mechanism. The moving mechanism has a mechanism for moving a film in a first direction differing from a reference direction of the film, in relation to the testing optical system. An imaging region A of the imaging unit extends in a second direction differing from the first direction. The reference direction, the first direction, and the second direction are perpendicular to the thickness direction of the film. A first angle [Theta]1 between the reference direction and the first direction is from 15 DEG to 165 DEG. A second angle [Theta]2 between the first direction and the second direction is from 15 DEG to 165 DEG. The reference direction and the second direction are not perpendicular to each other.

Description

Inspection device, inspection method, and film manufacturing method

The invention relates to an inspection device, an inspection method and a film manufacturing method.

In optical films such as polarizing films and retardation films, films used in separators of batteries, and the like, after the films are formed, the film is inspected for defects. As a conventional technique of film defect inspection, there is a technique of Patent Document 1. In the technique of Patent Document 1, the inspection of the film is performed while the long film is transported in the longitudinal direction. Specifically, the film is illuminated by an illuminating element extending in the width direction (direction perpendicular to the longitudinal direction) of the film conveyed in the longitudinal direction, and the film is captured by multiple cameras arranged in the width direction. To check the film for defects. [Prior Art Literature] [Patent Literature]

Patent Document 1: Japanese Patent Laid-Open No. 2016-70856

[The problem to be solved by the invention] The polarizing film is formed by conveying a long film made of a material of the polarizing film in the longitudinal direction by a conveying roller, and performing a stretching process for extending the film in the longitudinal direction. For example, there is a case where foreign matter adheres to the roller surface of the transport roller for transporting a long-sized film, and the film is damaged by the foreign matter. If the stretched treatment is performed on the damaged film, streak-shaped defects that extend in the longitudinal direction of the film are generated in the film. However, in the technique of Patent Document 1 in which the film is conveyed in the longitudinal direction and an area illuminated linearly in the width direction is photographed on the same side to inspect the defects of the film, it is impossible to detect the extension in the longitudinal direction as described above. Defects.

Here, taking the polarizing film as an example, the defects extending in the longitudinal direction are described, but the defects extending in the reference direction set in the film cause the same problem. That is, as in the technique of Patent Document 1, while the film is moved in the reference direction (corresponding to the longitudinal direction of Patent Document 1), the film is linearly illuminated in a direction orthogonal to the reference direction. In the case of imaging the linear illumination area as the imaging area to perform defect inspection, it is difficult to detect defects extending in the reference direction.

Therefore, an object of the present invention is to provide an inspection method and an inspection device that can detect defects extending in one direction in a film, and a film manufacturing method including the inspection method. [Means to solve the problem]

An inspection device (hereinafter, referred to as "first inspection device") of one aspect of the present invention includes an inspection optical system having an illuminating unit that illuminates a film, and receiving from the film illuminated by the illuminating unit The photographing part of the light to obtain the inspection image used to determine the defect; and the moving mechanism to move the film. The inspection optical system is fixedly configured independently of the moving mechanism. The moving mechanism has a mechanism for moving the film in a first direction different from the reference direction of the film with respect to the inspection optical system. The imaging area of the inspection optical system extends in a second direction different from the first direction. The reference direction, the first direction, and the second direction are orthogonal to the thickness direction of the film. The first angle between the reference direction and the first direction is 15° or more and 165° or less. The second angle between the first direction and the second direction is 15° or more and 165° or less. The reference direction is not orthogonal to the second direction.

In the first inspection device, while the film is moved relative to the inspection optical system in a first direction different from the reference direction, an inspection image is acquired. The second direction, which is the extension direction of the imaging area of the inspection optical system, is different from the first direction and is not orthogonal to the reference direction. Therefore, defects that extend in the reference direction can be detected. In the first inspection device, the inspection optical system does not move, on the other hand, the film moves, so there is no positional deviation between the lighting unit and the imaging unit in the arrangement relationship between the two. Therefore, it is easy to reliably detect the defect.

In an embodiment of the first inspection device, the inspection optical system may also be a scattering optical system. In the case where the inspection optical system is a scattering optical system, the positional accuracy of the illumination unit and the imaging unit is likely to affect the detection sensitivity. When the inspection optical system is fixed and the film is moved, as described above, the positional deviation between the lighting unit and the imaging unit does not occur. Therefore, it is easy to reliably detect the defect.

In an embodiment of the first inspection device, the moving mechanism may further have a mechanism for moving the film in a third direction relative to the inspection optical system, and the third direction is the same as the first The directions are different and orthogonal to the thickness direction. The third angle between the first direction and the third direction may also be 15° or more and 165° or less. In this case, the inspection range in which the film is moved in the first direction for inspection can be changed.

Another inspection device (hereinafter, referred to as "second inspection device") according to an aspect of the present invention includes an inspection optical system having an illuminating unit that illuminates the film, and a light receiving device that is illuminated by the illuminating unit. The light of the film is used to obtain an imaging unit for determining an inspection image for defects; and a moving mechanism to move at least one of the film and the inspection optical system. The moving mechanism has a mechanism for moving one of the film and the inspection optical system relative to the other in a first direction different from the reference direction of the film. The imaging area of the inspection optical system extends in a second direction different from the first direction. The reference direction, the first direction, and the second direction are orthogonal to the thickness direction of the film. The first angle between the reference direction and the first direction is 15° or more, less than 90° or more than 90° and 165° or less. The second angle between the first direction and the second direction is 15° or more and 165° or less. The reference direction is not orthogonal to the second direction.

In the second inspection device, while moving one of the film and the inspection optical system relative to the other in a first direction different from the reference direction of the film, an inspection image is acquired . The second direction, which is the extension direction of the imaging area of the inspection optical system, is different from the first direction and is not orthogonal to the reference direction. Therefore, defects that extend in the reference direction can be detected.

In an embodiment of the second inspection device, the moving mechanism may further have a mechanism for moving one of the film and the inspection optical system in a third direction relative to the other, the The third direction is different from the first direction and is orthogonal to the thickness direction. The third angle between the first direction and the third direction may also be 15° or more and 165° or less. In this case, it is possible to change the inspection range in which one of the film and the inspection optical system is moved in the first direction relative to the other to perform inspection.

One embodiment of each of the first inspection device and the second inspection device may have a transport mechanism that transports the film in the reference direction. The moving mechanism may also move the conveying mechanism, thereby moving the film.

Another inspection method of the present invention (hereinafter referred to as the "first inspection method") is an inspection method in which an inspection image of a film is acquired in order to determine a defect, thereby inspecting the film, which includes an inspection image In the obtaining step, the inspection image obtaining step illuminates the film with the illumination unit of the inspection optical system, and uses the imaging unit of the inspection optical system to photograph the film, thereby obtaining Defect inspection image. In the inspection image acquisition step, the inspection image is acquired while moving the film relative to the inspection optical system in a first direction different from the reference direction of the film. The imaging area of the inspection optical system extends in a second direction different from the first direction. The reference direction, the first direction, and the second direction are orthogonal to the thickness direction of the film. The first angle between the reference direction and the first direction is 15° or more and 165° or less. The second angle between the first direction and the second direction is 15° or more and 165° or less. The reference direction is not orthogonal to the second direction.

In the first inspection method, while moving the film relative to the inspection optical system in a first direction different from the reference direction, an inspection image is acquired. The second direction, which is the extension direction of the imaging area of the inspection optical system, is different from the first direction and is not orthogonal to the reference direction. Therefore, defects that extend in the reference direction can be detected. In the first inspection method, the inspection optical system is not moved, and the film is moved on the other hand, so there is no positional deviation between the lighting unit and the imaging unit in the arrangement relationship between the two. Therefore, it is easy to reliably detect the defect.

In an embodiment of the first inspection method, the inspection optical system may also be a scattering optical system. In the case where the inspection optical system is a scattering optical system, the positional accuracy of the illumination unit and the imaging unit is likely to affect the detection sensitivity. Since the inspection optical system is fixed, when the film is moved, as described above, there is no positional deviation between the lighting unit and the imaging unit in the arrangement relationship between the two. Therefore, it is easy to reliably detect the defect.

Another inspection method of another aspect of the present invention (hereinafter referred to as the "second inspection method") is to obtain an inspection image of a film in order to determine defects, thereby inspecting the film, which includes inspection In the image acquisition step, the inspection image acquisition step illuminates the film with an illuminating part of the inspection optical system and photographs the film with an imaging part of the inspection optical system, thereby acquiring The inspection image used to determine defects. In the inspection image acquisition step, while moving one of the film and the inspection optical system relative to the other in a first direction different from the reference direction of the film, an inspection image is acquired . The imaging area of the inspection optical system extends in a second direction different from the first direction. The reference direction, the first direction, and the second direction are orthogonal to the thickness direction of the film. The first angle between the reference direction and the first direction is 15° or more, less than 90° or more than 90° and 165° or less. The second angle between the first direction and the second direction is 15° or more and 165° or less. The reference direction is not orthogonal to the second direction.

In the second inspection method, while moving one of the film and the inspection optical system relative to the other in a first direction different from the reference direction of the film, an inspection image is acquired. The relationship between the first angle and the second angle satisfies the relationship, and the reference direction and the second direction are not orthogonal. Therefore, defects that extend in the reference direction can be detected.

In one embodiment of each of the first inspection method and the second inspection method, there may be a range change step of changing the inspection range of the film inspected in the inspection image acquisition step. It is also possible to alternately implement the inspection image acquisition step and the range change step until the inspection image of all inspection ranges set in the film in advance is acquired. Thereby, the entire inspection range can be inspected.

In the step of changing the range of one embodiment of each of the first inspection method and the second inspection method, the film may be moved in a third direction different from the first direction and orthogonal to the thickness direction To change the inspection range. Alternatively, in the range change step of one embodiment of each of the first inspection method and the second inspection method, the film may be conveyed in the reference direction, thereby changing the inspection range.

In one embodiment of each of the first inspection device, the second inspection device, the first inspection method, and the second inspection method, the film may be a long-size film. The reference direction may also be the longitudinal direction of the film.

In each embodiment of the first inspection device, the second inspection device, the first inspection method, and the second inspection method, the film may also include a stretched film extending in one direction. The reference direction may also be the extension direction of the stretched film.

The present invention also relates to a method for manufacturing a film, which includes the step of inspecting the film by the inspection method. [Effects of the invention]

According to the present invention, it is possible to provide an inspection apparatus and an inspection method capable of detecting defects extending in one direction in a film, and a film manufacturing method including the inspection method.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, the same or equivalent parts are assigned the same symbols, and repeated descriptions are omitted. The size ratio of the drawing may not be consistent with the description.

Fig. 1 is a diagram showing a flowchart of a film manufacturing method including an inspection method according to an embodiment. The film manufacturing method has a film formation step S10 and a film inspection step S20. In this embodiment, the film manufactured by the film manufacturing method is a polarizing film. An example of the material of the polarizing film is polyvinyl alcohol-based resin. An example of the polyvinyl alcohol-based resin is polyvinyl alcohol (PVA) resin. Hereinafter, a case where a long-sized polyvinyl alcohol-based resin film is used to manufacture a polarizing film will be described.

In the film forming step S10, as shown in FIG. 2, while the long-sized polyvinyl alcohol-based resin film 2 is conveyed in the longitudinal direction by a roll-to-roll method, the polarizing film 3 is formed on one side. Specifically, the long-sized polyvinyl alcohol-based resin film 2 provided on the unwinding roll R1 is unrolled. The polyvinyl alcohol-based resin film 2 that has been wound up is transported by a plurality of transport rollers R2, and after various processes are performed to form the polarizing film 3, it is wound up by a take-up roller R3. In FIG. 2, among various treatments, a case where the stretching treatment device 4 arranged on the conveying path of the polyvinyl alcohol-based resin film 2 is used for stretching treatment is illustrated. In the stretching processing apparatus 4, the polyvinyl alcohol-based resin film 2 conveyed in the longitudinal direction is extended in the longitudinal direction. The stretching method in the stretching processing device 4 may be any of dry and wet stretching methods. By this, linear polarization characteristics are imparted to the polyvinyl alcohol-based resin film 2 to form the polarizing film 3. Therefore, the polarizing film 3 is a stretched film. The extending direction of the polarizing film 3 is the long side direction of the long polarizing film 3.

The film formation step S10 may include other processing for forming the polarizing film 3 (for example, dyeing processing, washing processing, drying processing, etc., for adsorbing a dichroic dye to the polyvinyl alcohol-based resin film 2).

In the film inspection step S20, the polarizing film 3 formed in the film formation step S10 is inspected for defects. The inspection object in the film inspection step S20 is, for example, a long-size film formed by connecting parts cut out from the polarizing film 3 for inspection. For example, the film to be inspected may be a long-size film cut out from one of both ends in the longitudinal direction of the polarizing film 3. The film to be inspected may be, for example, a film in which each of the plurality of polarizing films 3 formed in the film forming step S10 includes one end (one end in the longitudinal direction) and the other end ( The fixed part of the other end in the longitudinal direction is cut out, and the cut part is connected to the obtained film. In this case, the defects of a plurality of polarizing films 3 can be inspected. Examples of the length in the longitudinal direction of the film to be inspected are 70 mm to 7000 mm, and examples of the length in the width direction orthogonal to the longitudinal direction are 50 mm to 1500 mm.

As shown in FIG. 3, the defect detected in the film inspection step S20 is a stripe-shaped defect 5 that extends in one direction in the film 1 that is the inspection target. Defect 5, for example, can be considered to be a defect caused by foreign matter adhering to the surface of the transport roller R2 used in the film formation step S10 that stretches in the longitudinal direction due to tension or the like, and the tension is caused by the extension. The tension applied to the polyvinyl alcohol-based resin film 2 is processed or conveyed by the conveying roller R2. Therefore, the extending direction of the defect 5 coincides with the longitudinal direction of the polarizing film 3 formed in the film forming step S10 and also coincides with the longitudinal direction of the film 1 that is the inspection target. The longitudinal direction of the polarizing film 3 is the conveying direction of the polarizing film 3 (or the polyvinyl alcohol-based resin film 2) in the film formation step S10 and is also the extending direction of the polarizing film 3. Hereinafter, the longitudinal direction of the film 1 is referred to as the reference direction D1 set in the film 1. An example of the length of the defect 5 in the reference direction D1 is 0.2 mm to 1 mm, and an example of the length of the width direction orthogonal to the reference direction D1 is 0.05 mm to 0.2 mm.

The inspection device 10 used in the film inspection step S20 will be described with reference to FIGS. 4 and 5. The inspection device 10 has a conveying mechanism 11 that conveys the film 1 in the longitudinal direction, an inspection optical system 12 that photographs the film 1, and a moving mechanism 13 that moves the conveying mechanism 11.

The conveying mechanism 11 has an unwinding roller 111, a conveying roller 112, a conveying roller 113, and a winding roller 114. The rotating shaft 111a, rotating shaft 112a, rotating shaft 113a, and rotating shaft 114a (refer to FIG. 5) of the unwinding roller 111, the conveying roller 112, the conveying roller 113, and the winding roller 114 are fixed to a pair of bases 115 of the moving mechanism 13 Rotatable support. In FIG. 4, in order to show the conveyance form of the film 1 conveyed by the conveyance mechanism 11, and the inspection optical system 12, the base 115 is shown typically by the dotted line. The roll-shaped film 1 provided on the unwinding roller 111 is transported to the take-up roller 114 by the transport roller 112 and the transport roller 113, and is wound into a roll by the take-up roller 114. In the embodiment shown in FIG. 4, the film 1 is transported horizontally between the transport roller 112 and the transport roller 113.

The inspection optical system 12 is fixedly arranged between the transport roller 112 and the transport roller 113 independently of the moving mechanism 13. The inspection optical system 12 has an illuminating unit 121 and an imaging unit 122 in order to image the imaging area A extending in one direction as shown in FIG. 5. Hereinafter, the extension direction (second direction) of the imaging area A is referred to as the extension direction D2. In FIG. 5, illustration of the imaging unit 122 is omitted. An example of the lighting unit 121 and the imaging unit 122 will be described.

As shown in FIG. 4, the illuminating part 121 is arrange|positioned on one surface (in FIG. 4, the lower surface of the film 1) side of the film 1, and illuminates the film 1. Specifically, the illuminating unit 121 illuminates the imaging area (field of view) A. Therefore, the illuminating unit 121 extends along the extension direction D2 of the imaging area A.

The illuminating unit 121 has a light source 121a and a light shield 121b. The light source 121a extends along the extension direction of the illumination unit 121 (the extension direction D2 of the imaging area A). In order to illuminate the film 1, the light source 121a outputs light that does not affect the composition and properties of the film 1. Examples of the light source 121a are metal halide lamps, halogen transmission lamps, fluorescent lamps, and the like. The light shielding body 121b is disposed between the light source 121a and the film 1. The light shielding body 121b functions as a knife edge that shields a part of the light output from the light source 121a to the film 1. When viewed from the imaging unit 122, the light shielding body 121b is arranged in a direction orthogonal to the extending direction of the light source 121a so as to cover a part (for example, half) of the illumination area of the film 1 when the light shielding body 121b is not arranged.

In the configuration of the illumination unit 121, the scattered light output from the light source 121a and scattered by the edge portion of the light shield 121b illuminates the film 1. In this way, since the film 1 is illuminated with scattered light, the inspection optical system 12 is a scattering optical system. The light source 121a and the light shielding body 121b extend along the extension direction D2 of the imaging area A, so the illumination area of the film 1 illuminated by the illuminating unit 121 also extends along the extension direction D2.

The imaging unit 122 images the film 1 in order to obtain an inspection image for determining defects by receiving light from the film 1 illuminated by the illumination unit 121. The imaging unit 122 has a plurality of pixels arranged along the extension direction D2 of the imaging area A. Examples of the imaging unit 122 include a Charge Coupled Device (CCD) camera, a Complementary Metal Oxide Semiconductor (CMOS) camera, a line sensor, and an area sensor. The imaging unit 122 is arranged so that the imaging area A can image the illumination area of the illumination unit 121.

The imaging unit 122 is electrically connected to the analysis device 14. The imaging unit 122 inputs imaging data into the analysis device 14. The analysis device 14 sets and controls the operating conditions in the imaging unit 122. The analysis device 14 creates an inspection image for determining whether there is a defect 5 based on the imaging data from the imaging unit 122 and displays it on the display device 15. Thereby, when the defect 5 is included in the film 1, the defect 5 is displayed in the inspection image. As a result, it can be determined whether the film 1 has a defect 5 or not. When the analysis device 14 produces the inspection image, in order to clearly indicate the defect 5, for example, the position of the defect 5 can be determined according to the intensity of the light entering the imaging unit 122, and the defect 5 can be displayed in different colors. Part, or in the case of making a black-and-white image, the defect 5 can also be distinguished from other parts by shading. The analysis device 14 is a computer device having a central processing unit (CPU), a read only memory (Read Only Memory, ROM), a random access memory (Random Access Memory, RAM), a hard disk, and the like. For example, the imaging unit 122 may also have the function of forming the inspection image in the analysis device 14.

The analysis device 14 also functions as a control device that controls the inspection device 10. For example, the analysis device 14 sets and controls the conveying speed of the conveying mechanism 11. The analysis device 14 may also be a part of the inspection device 10.

The moving mechanism 13 is a mechanism that moves the film 1 in a first moving direction (first direction) D3 different from the reference direction (conveying direction) D1 of the film 1. The moving mechanism 13 is a single-axis platform having a bottom plate 131 and a moving platform 132, and the moving platform 132 is electrically moved relative to the bottom plate 131 in the first moving direction D3. The transport mechanism 11 (specifically, the base 115) is fixed to the mobile platform 132. Therefore, with the movement of the moving platform 132, the transport mechanism 11 moves in the first movement direction D3, and therefore the film 1 moves in the first movement direction D3.

The moving mechanism 13 has, for example, a guide part 133 extending along the first moving direction D3 between the bottom plate 131 and the moving platform 132. In this case, for example, what is necessary is just to mount the mobile platform 132 to the guide part 133 so that it can move along the guide part 133. In order to move the moving platform 132 relative to the bottom plate 131, the moving mechanism 13 may have an actuator mechanism, a rack and pinion mechanism, etc., for example.

The moving timing, moving speed, moving amount, and the like of the moving platform 132 included in the moving mechanism 13 may be controlled by the analysis device 14.

The movement mechanism 13 to move the film 1 in the first movement direction D3 means to move the film 1 in the first positive direction along the first movement direction D3 and to move the film 1 in the first movement direction D3. And the meaning of the first reverse movement opposite to the first forward direction.

The relationship between the reference direction D1 of the film 1, the extension direction D2 of the imaging area A, and the first movement direction D3 will be described using FIG. 6. The reference direction D1, the extension direction D2 of the imaging area A, and the first movement direction D3 are directions orthogonal to the thickness direction of the film 1 and have the relationship shown in FIG. 6.

As shown in FIG. 6, the first movement direction D3 is inclined with respect to the reference direction D1 of the film 1. The first angle θ1 between the reference direction D1 and the first movement direction D3 is 15° or more and 165° or less. The first angle θ1 is, for example, 45° or more and 135° or less. The first angle θ1 is a case where the first movement direction D3 is rotated in a predetermined rotation direction (right-handed in FIG. 6) relative to the reference direction D1 from the assumption that the reference direction D1 coincides with the first movement direction D3 Below, it corresponds to the angle between the increased reference direction D1 and the first moving direction D3.

The extension direction D2 of the imaging area A is inclined with respect to the first movement direction D3 and is not orthogonal to the reference direction D1. The second angle θ2 formed by the extension direction D2 and the first movement direction D3 is 15° or more and 165° or less. The second angle θ2 is, for example, 45° or more and 135° or less. However, the second angle θ2 is an angle at which the extension direction D2 and the reference direction D1 are not orthogonal to the above-mentioned angle range. The second angle θ2 is based on the assumption that the first movement direction D3 coincides with the expansion direction D2 of the imaging area A, so that the expansion direction D2 is along the predetermined rotation direction relative to the first movement direction D3 (in FIG. 6, (Right-handed) In the case of rotating, it corresponds to the angle between the first moving direction D3 and the extending direction D2 increased. In this specification, the so-called extension direction D2 and the reference direction D1 are not orthogonal, and it is not limited to the case where the angle between the extension direction D2 and the reference direction D1 is different from 90°. For example, it also includes those from 0° to 180°. When the range of 85°-95° or the range of 75°-105° is different. Therefore, the angle formed by the extension direction D2 and the reference direction D1 may be, for example, an angle different from the range of 85° to 95° or the range of 75° to 105° among 0° to 180°. The angle formed by the extension direction D2 and the reference direction D1 is also based on the assumption that the reference direction D1 coincides with the extension direction D2, so that the extension direction D2 is along the predetermined rotation direction relative to the reference direction D1 (for example, in FIG. 6, When the rotation is performed, it corresponds to the angle between the increased reference direction D1 and the extension direction D2.

Next, the film inspection step S20 by the inspection device 10 will be described. Fig. 7 is a flowchart of an example of an inspection procedure. In the film inspection step S20, the film 1 to be inspected is set on the unwinding roller 111, and the film 1 is unrolled. The film 1 that has been wound up is stretched to the winding roller 114 via the conveying roller 112 and the conveying roller 113. The case where the film inspection is performed after the film 1 is installed in this way is described. The film inspection step S20 has an inspection image acquisition step S21, a determination step S22, and a range change step S23.

First, in a state where the transport of the film 1 by the transport mechanism 11 is stopped, the moving mechanism 13 is used to move the moving platform 132, thereby as shown by the solid line and the double-dot chain line in FIG. While moving in a moving direction D3 (for example, the first forward direction), the film 1 is photographed by the inspection optical system 12 fixedly arranged (that is, not moving). Specifically, the film 1 is irradiated with light from the illumination unit 121, and the film 1 is imaged by the imaging unit 122. The imaging data obtained by the imaging unit 122 is input to the analysis device 14, and the analysis device 14 creates an inspection image (inspection image acquisition step S21 in FIG. 7). The inspection image produced by the analysis device 14 is displayed on the display device 15.

In the inspection image acquisition step S21, for example, the moving mechanism 13 is used to move the film 1 in the first moving direction D3 until the entire width direction of the film 1 is photographed. Thereby, as shown by hatching in FIG. 9, image data of the inspection range B in the film 1 can be obtained. The length of the inspection range B in the transport direction is substantially equivalent to the length of the imaging area A in the transport direction (the distance along the transport direction between the upstream end and the downstream end of the imaging area A).

According to the size of the film 1, the range that can be inspected in the inspection image acquisition step S21 is a part of the film 1. That is, in the inspection image acquisition step S21, inspection of a part of the film 1 is performed. Therefore, at the stage when the movement of the film 1 by the moving mechanism 13 has ended (that is, the inspection image acquisition step S21 has ended), the inspection of all the expected inspection ranges (all the inspection ranges set in advance) in the film 1 is determined Whether it has ended (determination step S22 in FIG. 7). The determination can be made, for example, by using the analysis device 14 to compare the inspection end range calculated from the number of times the inspection image acquisition step S21 is performed and the size of the inspection range B with the size of the entire expected inspection range in the film 1. Implement. Alternatively, it may be confirmed visually by the operator.

In the case where the inspection of all expected inspection ranges has not been completed (in the case of NO in determination step S22), the inspection range to be inspected in the inspection image acquisition step S21 is changed (range change step S23 in FIG. 7) ). In the range change step S23, the film 1 is conveyed along the reference direction D1 (conveyance direction). The transport amount is substantially equal to the length of the inspection range B in the transport direction. When the inspection of all the expected inspection ranges has ended (in the case of YES in the determination step S22), the inspection is ended.

In the film inspection step S20, the inspection image acquisition step S21 and the range change step S23 are implemented until all the desired inspection ranges in the film 1 are inspected. When the multiple inspection image acquisition step S21 is implemented by repeating the inspection image acquisition step S21 and the inspection range change step S22, the multiple inspection image acquisition step S21 may be alternately implemented using the moving mechanism 13 When the mobile platform 132 moves in the first forward direction in the first moving direction D3, and when it moves in the first reverse direction.

When a defect 5 is displayed in the inspection image of the film 1 obtained in the film inspection step S20, there is a possibility that foreign matter adheres to any of the transport rollers R2 (especially the roller before the stretching process) used in the film formation step S10 Sex. Therefore, what is necessary is just to wash the roller surface of the conveyance roller R2 used in the film formation step S10, or replace the conveyance roller R2. Thereby, the polarizing film 3 that does not include the defect 5 can be manufactured.

When inspecting the film, it is conceivable that the imaging section 122 and the illuminating section 121 are arranged such that the extension direction D2 of the imaging area A is orthogonal to the reference direction D1, and the film is photographed while being transported in the transport direction (hereinafter referred to as "First Reference Inspection Method"). However, in the first reference inspection method, even if the film with the defect 5 is inspected, as shown in FIG. 10, the defect 5 is not displayed in the inspection image obtained by photographing the film. That is, defect 5 cannot be detected. On the other hand, if the extension direction D2 of the imaging area A is oriented in a direction different from the reference direction D1 at 90° (the extension direction D2 is not orthogonal to the reference direction D1), one side is transported in the transport direction D1 When the film is photographed on one side of the film (hereinafter referred to as the "second reference inspection method"), the defect 5 is detected as if it appeared in the area indicated by the broken line in FIG. 11. It is considered that this is because in the second reference inspection method, more light is used to illuminate the defect 5 than in the case of the first reference inspection method, and as a result, the amount of light incident on the imaging unit increases.

The ring-shaped mark shown in FIG. 10 and FIG. 11 is a mark which shows the area|region where the defect 5 is formed in a film. FIGS. 10 and 11 show images of the same film with the defect 5 formed at the position of the ring-shaped mark under the same conditions, except for the point that the direction of the imaging area A with respect to the reference direction D1 is inclined as described above. Schema of the result.

In the inspection method of the film using the inspection apparatus 10, in the inspection image acquisition step S21, the film 1 is photographed by the inspection optical system 12 while moving the film 1 in the first moving direction D3. In this embodiment, the extension direction D2, the reference direction D1, and the first movement direction D3 of the imaging area A have the relationship shown in FIG. 6, and as described above, the reference direction D1 and the extension direction D2 are not orthogonal. As a result, in the inspection method of the film using the inspection device 10, the defect 5 can be detected in the same manner as the second reference inspection method.

Since the film 1 is moved in the first movement direction D3, for example, even if there is one inspection optical system 12, an inspection image of the film 1 can be obtained. Furthermore, since the inspection optical system 12 is fixedly arranged and the film 1 is moved independently of the inspection optical system 12, there is no deviation in the positional relationship between the imaging unit 122 and the illumination unit 121. As a result, the defect 5 can be reliably detected. As shown in FIG. 4, when light is scattered by the light shielding body 121b and the film 1 is illuminated by the scattered light, the positional accuracy of the imaging unit 122 and the illumination unit 121 is very important. Therefore, the inspection device 10 and the inspection method using the same are very effective in the case where scattered light is output from the illuminating unit 121 to illuminate the film 1.

Next, various modifications to the above-mentioned embodiment will be described with a focus on differences from the above-mentioned embodiment.

(First modification) The film inspection step S20 is performed on the film 1. The film 1 is obtained by winding the polarizing film 3 in a roll shape once in the film forming step S10, and then cutting out a fixed area from the formed polarizing film 3 membrane. However, as shown in FIG. 12, the polarizing film 3 formed in the film forming step S10 may be further conveyed by the conveying roller R2, and the film inspection step S20 may be performed on the polarizing film 3 at the same time. In other words, the film inspection step S20 may be performed before the polarizing film 3 formed in the film formation step S10 is wound into a roll shape.

12 and 13 are schematic diagrams of the inspection apparatus 20 for implementing the film inspection step S20 of Modification 1. The inspection device 20 has an inspection optical system 12, a moving mechanism 13, and a conveying mechanism 21. The configurations of the inspection optical system 12 and the moving mechanism 13 are the same as in the case of the inspection apparatus 10, and therefore the description is omitted.

The conveying mechanism 21 has a winding roller 211, a conveying roller 212, and a pair of bases 213. The winding roller 211 is a roller for winding the polarizing film 3 into a roll shape. The conveying roller 212 is a roller for guiding and supporting the polarizing film 3 to convey the polarizing film 3 to the winding roller 211. The pair of bases 213 rotatably supports the respective rotating shafts 211a and 212a of the winding roller 211 and the conveying roller 212. A pair of bases 213 are fixed on the moving mechanism 13 (specifically, on the moving platform 132). In the embodiment shown in FIG. 12, the winding roller 211 and the conveying roller 212 are arrange|positioned so that the polarizing film 3 may be conveyed substantially horizontally between them.

The film inspection step S20 of the first modification example has the inspection image acquisition step S21, the determination step S22, and the range change step S23 shown in FIG. 7 as in the case of the inspection apparatus 10. In the inspection image acquisition step S21, the determination step S22, and the range change step S23, the inspection object is the polarizing film 3 itself, and the inspection image acquisition step included in the film inspection step S20 using the inspection device 10 S21, the determination step S22 and the range change step S23 are the same.

In Modification 1, the entire polarizing film 3 may be substantially the inspection range. However, for example, a plurality of regions discretely set in the transport direction of the polarizing film 3 may be the inspection ranges.

In Modification 1, in the inspection image acquisition step S21, the polarizing film 3 is also moved by the moving mechanism 13, and on the other hand, the conveying of the polarizing film 3 is stopped. Therefore, as shown in FIG. 12, an accumulator 22 is arranged in the front stage of the inspection device 20. The accumulator 22 is a mechanism for separating and controlling the transport speed of the polarizing film 3 before the accumulator 22 and the transport speed after the accumulator 22 (including the case where the transport speed is 0).

As shown in FIG. 12, the accumulator 22 has a fixed roller 221 and a movable roller 222 whose distance from the fixed roller 221 can be adjusted. In the accumulator 22, the transport distance of the polarizing film 3 is changed by moving the position of the movable roller 222. Thereby, the conveying speed of the accumulator 22 afterwards can be adjusted. For example, by moving the movable roller 222 to increase the transport distance of the polarizing film 3 between the fixed roller 221 and the movable roller 222, the polarizing film 3 stays in the accumulator 22, so that the accumulator The conveying speed of the polarizing film 3 after 22 becomes smaller (the speed can be reduced to 0 according to the residence time). The position control of the movable roller 222 may be performed by, for example, the analysis device 14. The accumulator 22 may also be a part of the inspection device 20.

In the inspection image acquisition step S21, the moving mechanism 13 is used to move the transport mechanism 21 relative to the inspection optical system 12 in the first moving direction D3, thereby moving the polarizing film 3 relative to the inspection optical system 12 in the first moving direction D3 . Therefore, a turn bar (conveying direction switching unit) 23 may be arranged between the accumulator 22 and the conveying roller 212 of the inspection device 20. The steering rod 23 functions as a conveying direction switching unit that changes the conveying direction of the polarizing film 3. The steering rod 23 compares the movement of the transport mechanism 21 by the moving mechanism 13 to maintain the transport direction of the polarizing film 3 conveyed by the transport mechanism 21 (that is, the transport direction of the polarizing film 3 from the transport roller 212 to the take-up roller 211 ) And change the conveying direction of the polarizing film 3 so as not to generate unnecessary tension on the polarizing film 3.

The steering rod 23 may be installed in such a way that the direction of extension of the steering rod 23 can be adjusted relative to the transport direction of the polarizing film 3 transported from the accumulator 22 to the steering rod 23 according to the movement of the transport mechanism 21 by the moving mechanism 13 . The adjustment of the direction of the extension direction of the steering rod 23 may be performed by, for example, the analysis device 14. The steering rod 23 may also be a part of the inspection device 10.

The number of steering rods 23 is not limited to one. The number and arrangement of the steering rods 23 can be set in a manner that maintains the conveying direction of the polarizing film 3 conveyed by the conveying mechanism 21 in the inspection image acquisition step S21 and does not generate unnecessary tension on the polarizing film 3.

In the film inspection step S20 of Modification 1, as described above, while the inspection optical system 12 is fixed, the transport mechanism 11 is moved in the first moving direction D3 by the moving mechanism 13 (more specifically, the polarized light The film 3 moves), and the polarizing film 3 is inspected. Therefore, also in Modification 1, there are the same effects as in the case of the inspection device 10 and the inspection method of the film using the same. In Modification 1, almost all of the longitudinal direction of the polarizing film 3 can be inspected easily.

(Second modification) When the first angle θ1 is 15° or more, less than 90° or more than 90° and 165° or less, or the first angle θ1 is 45° or more, less than 90° or more than 90° and 135° or less , Can also move the inspection optical system. The case of moving the inspection optical system will be described as a second modification. In the second modification, the extension direction D2 is also not orthogonal to the reference direction D1. The meaning of not orthogonal is as described above.

The inspection apparatus 30 that implements the film inspection step S20 of the second modification includes a transport mechanism 11, an inspection optical system 31, and a moving mechanism 32. The conveying mechanism 11 is the same as the case of the inspection device 10, and therefore the description of the conveying mechanism 11 is omitted. The schematic configuration of the inspection optical system 31 and the moving mechanism 32 included in the inspection apparatus 30 will be described with reference to FIG. 14. In FIG. 14, it is schematically shown that the inspection optical system 31 and the moving mechanism 32 are viewed from a direction orthogonal to the extending direction of the illuminating unit 121. In FIG. 14, the illustration of the conveying mechanism 11 is omitted.

As shown in FIG. 14, the inspection optical system 31 has an illumination part 121, an imaging part 122, and the connection part 311 which connects the two integrally. The configuration of the illuminating unit 121 and the imaging unit 122 and the arrangement relationship between them are the same as in the case of the inspection device 10. In FIG. 14, the lighting unit 121 is schematically shown. The connecting portion 311 only needs to have a configuration that does not interfere with the film 1 when the inspection optical system 31 is moved in the first movement direction D3. For example, when the connection part 311 is U-shaped as shown in FIG. 14, the length of the 1st movement direction D3 of the connection part 311 should just be more than the length of the film 1 in the 1st movement direction D3.

The moving mechanism 32 has: a guide portion 321 that extends in the first movement direction D3 of the inspection optical system 31; and a support portion 322 that is mounted on the guide portion 321 so as to be movable along the extending direction of the guide portion 321 and supports the connecting portion 311 . The support portion 322 is mounted on the guide portion 321 in a manner capable of being moved in the first movement direction D3 by electric power.

When the width of the film 1 is long (in other words, when the moving distance of the inspection optical system 31 in the first movement direction D3 is long), for example, the moving mechanism 32 may move the plurality of inspection optical systems 31. For example, in the case of using two inspection optical systems 31, as long as in the width direction of the film 1, one inspection optical system 31 is arranged on one edge portion side of the film 1, and another inspection optical system is arranged on the other edge portion side. 31 is fine. As a result, compared with the case where one inspection optical system 31 is used to capture all areas in the first movement direction D3, the movement distance of each inspection optical system 31 becomes shorter, so that the distance in the first movement direction D3 of the connecting portion 311 can be shortened. length.

In the second modified example, it is only necessary to move the connecting portion 311 along the guide portion 321 in the first moving direction D3 while photographing the film 1 to perform the inspection of the film 1. The movement state of the connecting portion 311 may be controlled by the analysis device 14, for example.

The film inspection step S20 of the second modification example has the inspection image acquisition step S21, the determination step S22, and the range change step S23 shown in FIG. 7 as in the case of the film inspection step S20 using the inspection device 10. The film inspection step S20 in the second modification is different from the inspection image acquisition step S21 in which the transport mechanism 11 is not moved, and the inspection optical system 31 is moved relative to the film 1 by the moving mechanism 32. Check that step S20 is the same. Therefore, the defect 5 shown in FIG. 3 can be detected. When moving the inspection optical system 31, for example, the inspection optical system 31 is moved so that the deviation of the positional relationship between the imaging unit 122 and the illumination unit 121 is equal to or less than the resolution of the imaging unit 122. As shown in FIG. 14, when the illuminating unit 121 and the imaging unit 122 included in the inspection optical system 31 are connected by the connecting portion 311, it is difficult to cause a deviation in the positional relationship between the imaging unit 122 and the illuminating unit 121. The deviation of the positional relationship is such that the resolution of the imaging unit 122 is equal to or lower, and the inspection optical system 31 is moved.

In the second modification example, the case where the transport mechanism 11 is not moved and the inspection optical system 31 is moved relative to the film 1 has been mainly described. However, the inspection apparatus 30 may further include the moving mechanism 13 shown in FIG. 4, and the transport mechanism 11 (specifically, the film 1) may also be moved together with the inspection optical system 31 by the moving mechanism 13. That is, when the first angle θ1 is 15° or more, less than 90° or more than 90° and less than 165°, or the first angle θ1 is 45° or more, less than 90° or more than 90° and less than 135° In this case, it is only necessary to move one of the inspection optical system 31 and the film 1 (or the conveying mechanism 11) relative to the other in the first movement direction D3.

(Third modification) In FIG. 4, when the area of the film 1 between the transport roller 112 and the transport roller 113 is set as the entire inspection range of the film, for example, in the inspection range change step S22, the transport mechanism 11 itself (ie , The film 1) further moves toward a second movement direction (third direction) D4 that is different from the first movement direction D3.

15 is a diagram for explaining the relationship between the reference direction D1, the extension direction D2 of the imaging area A, the first movement direction D3, and the second movement direction D4. The relationship between the first angle θ1 between the reference direction D1 and the first movement direction D3 and the second angle θ2 between the first movement direction D3 and the extension direction D2 is the same as in the case of FIG. 6. Furthermore, in the third modification, the extension direction D2 and the reference direction D1 are also not orthogonal. In the third modification, the angle formed by the extension direction D2 and the reference direction D1 may be different from, for example, 75° to 105°. The second movement direction D4 is different from the first movement direction D3, and the third angle θ3 between the first movement direction D3 and the second movement direction D4 is 15°-165° or 45°-135°. The second movement direction D4 may also be the same as the extension direction D2 of the shooting area A.

In order to move the film 1 in the first moving direction D3 and the second moving direction D4, the inspection device 40 for implementing the film inspection step S20 of the third modification is shown in FIG. 16, and includes a conveying mechanism 11, an inspection optical system 12, And moving mechanism 41. The transport mechanism 11 and the inspection optical system 12 are the same as in the case of the inspection device 10, so the description is omitted.

The moving mechanism 41 is a biaxial platform that can move the film 1 in the first moving direction D3 and move the film 1 in the second moving direction D4. For example, the moving mechanism 41 includes a first moving mechanism 411 that moves the film 1 in the first moving direction D3, and a second moving mechanism 412 that moves the film 1 in the second moving direction D4. The structure of the first moving mechanism 411 may be the same as that of the moving mechanism 13 in FIG. 4. The second moving mechanism 412 is disposed on the first moving mechanism 411, and the conveying mechanism 11 is fixed on the second moving mechanism 412. The configuration of the second moving mechanism 412 can be the same as the configuration of the first moving mechanism 411, that is, the moving mechanism 13 of FIG. 4, except that the extending direction of the guide portion is the second moving direction D4. For example, the second moving mechanism 412 has a bottom plate, a moving platform, and a guide part extending along the second moving direction D4 provided between the two. The moving platform only needs to be able to move in the second moving direction D4 along the guide part relative to the bottom plate. It can be constructed by moving. In the case that the second moving mechanism 412 has a bottom plate and a moving platform as described above, the bottom plate on the side of the second moving mechanism 412 can also be shared with the moving platform of the first moving mechanism 411.

The movement mechanism 41 to move the film 1 in the second movement direction D4 means to move the film 1 in the second positive direction along the second movement direction D4 and to move the film 1 in the second movement direction D4. And the meaning of the second reverse movement opposite to the second forward direction.

In the third modification, by repeating the inspection image acquisition step S21 and the range changing step S23, the area of the film 1 located between the conveying roller 112 and the conveying roller 113 in the film 1 can be inspected as the entire inspection range. . After the inspection of the inspection range is completed, for example, the film 1 may be conveyed in the conveying direction by the conveying mechanism 11, and the range of the film 1 may be further inspected.

(Fourth modification) The inspection optical system 12 is not limited to a transmissive optical system, and may be a reflective optical system. That is, the illuminating unit 121 and the imaging unit 122 may be arranged on the same side with respect to the film 1. Furthermore, the inspection optical system 12 may be a combination of a transmissive optical system and a reflective optical system. In this case, the inspection optical system 12 may also have: an imaging part 122; a first illuminating part arranged on the opposite side of the imaging part 122 with respect to the film 1 to form a transmissive optical system; and a second illuminating part facing the film 1 It is arranged on the same side as the imaging unit 122 to form a reflective optical system. The structure of the first illuminating part and the second illuminating part may also be as illustrated in FIG. 4, for example, including a light source 121a and a light shield 121b.

The embodiments and various modifications have been described above. However, the present invention is not limited to the above-described embodiments and various modifications, and is intended to include the scope shown by the scope of patent application, and include all changes within the meaning and scope equivalent to the scope of patent application.

Therefore, for example, the above-mentioned embodiment and various modifications may be appropriately combined within a range that does not deviate from the gist of the present invention. For example, the first modification may be applied to the second modification to the fourth modification, and the polarizing film 3 may be inspected before the polarizing film 3 formed in the film forming step S10 of FIG. 1 is wound by a winding roller. The third modification can also be applied to the first modification and the fourth modification. In the range modification step S23 of FIG. 7, the inspection object (film 1 or polarizing film 3) is moved in the second movement direction D4, thereby Change the scope of inspection. The third modification can also be applied to the second modification. In this case, in the range change step S23 of FIG. 7, it is only necessary to move one of the film 1 or the inspection optical system 31 relative to the other in the second movement direction D4, thereby changing the inspection range. The fourth modification may be applied to the first modification to the third modification, and a reflective optical system may be used in the inspection optical system, or an optical system combining a transmissive optical system and a reflective optical system may also be used.

When the inspection image acquisition step S21 of FIG. 7 is implemented once and the inspection can be performed on all the desired inspection ranges of the inspection object, there is no need to implement the other steps of FIG. 7 (determination step S22 and range change step S23).

In the embodiment where the inspection optical system is a scattering optical system, the illuminating part may not have a light shielding body. For example, it is also possible to arrange the illuminating unit and the imaging unit in such a manner that the imaging unit photographs an area illuminated by light scattered by the end of the illuminating unit, thereby realizing a scattering optical system. The inspection optical system is not limited to the scattering optical system.

As described above, the damage generated before the stretching process is often extended due to the stretching process to form the defect 5. Therefore, the inspection method and inspection apparatus described in the above-mentioned embodiment and various modifications are useful for inspecting the defect 5 of the stretched film. effective. However, for example, when a film is conveyed by a conveying roller, tension is applied to the conveying direction of the film, and therefore there is a possibility that the defect 5 may occur similarly to the case of the stretching process. Therefore, the present invention is also effective for defect inspection of a long film when a film is formed by a roll-to-roll method, for example.

In the inspection apparatus and inspection methods described in the above-mentioned embodiments and various modifications, the reference direction, the movement direction of at least one of the film and the optical system (first direction), and the extension direction of the imaging area (second Direction) satisfying the relationship, it is possible to detect defects that extend substantially along the reference direction (that is, defects that extend along a direction that satisfies a fixed relationship with respect to the first direction and the second direction). Therefore, the reference direction of the film is not limited to the longitudinal direction of the film or the transport direction when the film is transported by the transport roller. When the extension direction of the defect that should be detected in the film is assumed in advance, the extension direction of the assumed defect may be the reference direction of the film. Arbitrary directions may be used as reference directions in the film. In this case, when a defect extending in the reference direction occurs, the defect can be detected.

In the above description, the case where there is only one inspection optical system has been mainly described. However, two or more inspection optical systems as a combination of the illuminating unit and the imaging unit may be provided with respect to the film. In this case, considering the inspection range of multiple inspection optical systems, in the inspection image acquisition step, when the first angle θ1 includes 90°, it is sufficient to move the film relative to the inspection optical system. When the first angle When θ1 does not include 90°, it is sufficient to move one of the film and the inspection optical system relative to the other.

In the above description, the film formed in the film forming step is regarded as a part of the polarizing film, and the polarizing film (or the film cut out from the polarizing film) is regarded as the inspection target. However, the film to be inspected is not limited to a polarizing film. For example, it may be a laminated film obtained by further bonding other films (for example, a protective film, a retardation film) to a polarizing film, or a separator film of a battery. The film to be inspected is not limited to a long film, and may be a piece-by-piece film.

1: membrane 2: Polyvinyl alcohol resin film 3: Polarizing film 4: Extended processing device 5: defects 10, 20, 30, 40: inspection device 11, 21: Transport mechanism 12, 31: Check the optical system 13, 32, 41: mobile mechanism 14: Analysis device 15: display device 22: Accumulator 23: Steering lever (conveying direction switching part) 111, R1: roll out 111a, 112a, 113a, 114a, 211a, 212a: rotation axis 112, 113, 212, R2: transfer roller 114, 211, R3: take-up roller 115, 213: base 121: Lighting Department 121a: light source 121b: Shading body 122: Photography Department 131: bottom plate 132: mobile platform 133: Guidance 221: fixed roller 222: movable roller 311: Connection 321: Guidance 322: Support Department 411: First Mobile Organization 412: The second moving mechanism A: Shooting area B: Inspection scope D1: Reference direction (transport direction) D2: Extension direction (second direction) D3: The first moving direction (first direction) D4: Second direction of movement (third direction) S10, S20, S21～S23: steps θ1: the first angle θ2: second angle θ3: third angle

Fig. 1 is a flowchart of an example of a method of manufacturing a film including an inspection method of an embodiment. FIG. 2 is a diagram for explaining a film formation step included in the method of manufacturing the film shown in FIG. 1. Fig. 3 is a diagram for explaining defects detected in the film inspection step included in the film manufacturing method shown in Fig. 1. Fig. 4 is a schematic diagram of an example of an inspection apparatus for performing a film inspection step included in the film manufacturing method shown in Fig. 1. Fig. 5 is a schematic view when the inspection device shown in Fig. 4 is viewed from the side of the imaging section. FIG. 6 is a diagram for explaining the relationship among the reference direction, the first movement direction (first direction), and the extension direction (second direction) of the imaging area. Fig. 7 is a flowchart of an example of the film inspection procedure shown in Fig. 1. FIG. 8 is a diagram for explaining the inspection image acquisition step shown in FIG. 7. FIG. 9 is a diagram showing the range to be inspected in the inspection image acquisition step shown in FIG. 7. Fig. 10 is a diagram showing an example of an inspection image obtained by inspecting a film having a defect by the first reference inspection method. FIG. 11 is a diagram showing an example of an inspection image obtained by inspecting the film photographed in FIG. 10 using a second reference inspection method. FIG. 12 is a diagram for explaining an example of an inspection apparatus for implementing the film inspection step of Modification Example 1. FIG. Fig. 13 is a schematic view of the inspection device shown in Fig. 12 viewed from the side of the imaging section. FIG. 14 is a diagram for explaining an example of an inspection apparatus for implementing the film inspection step of Modification Example 2. FIG. 15 is a diagram for explaining the relationship among the reference direction, the first movement direction (first direction), the extension direction of the imaging area (second direction), and the second movement direction (third direction) in Modification 3. FIG. 16 is a diagram for explaining an example of an inspection apparatus for implementing the film inspection step of Modification Example 3. FIG.

1: membrane

10: Check the device

11: Transport mechanism

12: Check the optical system

13: mobile agency

14: Analysis device

15: display device

111: Roll out roller

111a, 112a, 113a, 114a: rotation axis

112, 113: Conveying roller

114: take-up roller

115: base

121: Lighting Department

121a: light source

121b: Shading body

122: Photography Department

131: bottom plate

132: mobile platform

133: Guidance

Claims (17)

An inspection device, including: The inspection optical system includes an illuminating unit that illuminates the film, and an imaging unit that receives light from the film illuminated by the illuminating unit to obtain an inspection image for determining defects; and A moving mechanism to move the film; The inspection optical system is fixedly configured independently of the moving mechanism, The moving mechanism has a mechanism for moving the film in a first direction different from the reference direction of the film with respect to the inspection optical system, The shooting area of the inspection optical system extends in a second direction different from the first direction, The reference direction, the first direction and the second direction are orthogonal to the thickness direction of the film, The first angle between the reference direction and the first direction is 15° or more and 165° or less, The second angle between the first direction and the second direction is 15° or more and 165° or less, The reference direction is not orthogonal to the second direction. The inspection device according to claim 1, wherein the inspection optical system is a scattering optical system. The inspection device according to claim 1 or claim 2, wherein the moving mechanism further has a mechanism for moving the film in a third direction relative to the inspection optical system, and the third direction is the same as the first Different in direction and orthogonal to the thickness direction, The third angle between the first direction and the third direction is 15° or more and 165° or less. An inspection device, including: The inspection optical system includes an illuminating unit that illuminates the film, and an imaging unit that receives light from the film illuminated by the illuminating unit to acquire an inspection image for determining defects; and A moving mechanism to move the film or the inspection optical system; The moving mechanism has a mechanism for moving one of the film and the inspection optical system relative to the other in a first direction different from the reference direction of the film, The imaging area of the inspection optical system extends in a second direction different from the first direction, The reference direction, the first direction and the second direction are orthogonal to the thickness direction of the film, The first angle between the reference direction and the first direction is 15° or more, less than 90° or more than 90° and 165° or less, The second angle between the first direction and the second direction is 15° or more and 165° or less, The reference direction is not orthogonal to the second direction. The inspection device according to claim 4, wherein the moving mechanism further has a mechanism for moving one of the film and the inspection optical system in a third direction relative to the other, and the third direction and The first direction is different and orthogonal to the thickness direction, The third angle between the first direction and the third direction is 15° or more and 165° or less. The inspection device according to any one of claim 1 to claim 5, including a conveying mechanism that conveys the film in the reference direction, The moving mechanism moves the conveying mechanism, thereby moving the film. The inspection device according to any one of claims 1 to 6, wherein the film is a long-sized film, The reference direction is the longitudinal direction of the film. The inspection device according to any one of claims 1 to 7, wherein the film includes a stretched film extending in one direction, The reference direction is the extension direction of the stretched film. An inspection method is to obtain an inspection image of a film in order to determine defects, thereby inspecting the film, and includes: The inspection image acquisition step includes illuminating the film with the illumination unit of the inspection optical system, and photographing the film with the imaging unit of the inspection optical system, thereby acquiring an inspection image for determining defects Like, In the inspection image acquisition step, while moving the film relative to the inspection optical system in a first direction different from the reference direction of the film, acquiring the inspection image, The imaging area of the inspection optical system extends in a second direction different from the first direction, The reference direction, the first direction and the second direction are orthogonal to the thickness direction of the film, The first angle between the reference direction and the first direction is 15° or more and 165° or less, The second angle between the first direction and the second direction is 15° or more and 165° or less, The reference direction is not orthogonal to the second direction. The inspection method according to claim 9, wherein the inspection optical system is a scattering optical system. An inspection method is to obtain an inspection image of a film in order to determine defects, thereby inspecting the film, and includes: The inspection image acquisition step includes illuminating the film with the illumination unit of the inspection optical system, and photographing the film with the imaging unit of the inspection optical system, thereby acquiring an inspection image for determining defects Like, In the inspection image acquisition step, while moving one of the film and the inspection optical system relative to the other in a first direction different from the reference direction of the film, an inspection image is acquired , The imaging area of the inspection optical system extends in a second direction different from the first direction, The reference direction, the first direction and the second direction are orthogonal to the thickness direction of the film, The first angle between the reference direction and the first direction is 15° or more, less than 90° or more than 90° and 165° or less, The second angle between the first direction and the second direction is 15° or more and 165° or less, The reference direction is not orthogonal to the second direction. The inspection method according to any one of claim 9 to claim 11, including a range change step of changing the inspection range of the film inspected by the inspection image acquisition step, The inspection image acquisition step and the range changing step are alternately implemented until the inspection image of all inspection ranges set in the film in advance is acquired. The inspection method according to claim 12, wherein in the range changing step, the film is moved in a third direction that is different from the first direction and orthogonal to the thickness direction, thereby changing the Check the scope. The inspection method according to claim 12, wherein in the range changing step, the film is conveyed in the reference direction to thereby change the inspection range. The inspection method according to any one of claims 9 to 14, wherein the film is a long-sized film, The reference direction is the longitudinal direction of the film. The inspection method according to any one of claim 9 to claim 15, wherein the film includes a stretched film extending in one direction, The reference direction is the extension direction of the stretched film. A method for manufacturing a film includes the step of inspecting the film by the inspection method according to any one of claims 9 to 16.

Images