JP5887895B2 - Apparatus and method for detecting flaw on surface of inspection object - Google Patents

Description

  The present invention relates to a flaw detection device and a flaw detection method for a surface of an inspection object used for detecting a flaw generated on the surface of an inspection object, such as a flaw generated on the inner surface of a groove formed on an end face of a pipe. Is.

  Conventionally, as a device for detecting scratches on the surface of an inspection object, a rotating device that intermittently rotates the inspection object at every predetermined rotation angle and an image of the surface of the inspection object at every predetermined rotation angle are taken. For each image data output from the imaging camera device and the imaging camera device, based on the given image data and the image data taken at the previous rotation angle of the given image data, the above An inspection apparatus that generates a difference image indicating an image of a difference between images in an inspection object region of the inspection object, and determines whether or not there is a scratch on the surface of the inspection object based on the difference image. Some have been proposed (see, for example, Patent Document 1).

  In addition, as another device for detecting a flaw on the surface of the inspection object, a diffused light source disposed on one opening end side of the tube material, and light on the central axis of the tube material on the other opening end side of the tube material. A camera with a movable focus zoom lens relatively arranged so that the axes intersect at a minute angle, and a first inner surface observation integrated image obtained by continuously changing the focus at the first tube position Comparative analysis is performed with the second inner surface observation integrated image obtained by continuously changing the focal point with respect to the second tube position where the tube is slightly rotated around the axis with respect to the first tube position. The thing of the structure provided with the flaw detection analysis means has been proposed (for example, refer to patent documents 2).

JP 2007-248325 A JP 2011-69616 A

  However, since the apparatus for detecting a flaw on the surface of the inspection object described in Patent Document 1 performs imaging of the surface of the inspection object with a shutter speed that does not cause blurring in the captured image by the imaging camera apparatus, When the length of the scratch on the surface of the inspection object is less than the minimum length that can be detected by the inspection apparatus, there is a problem that the inspection apparatus cannot detect the scratch on the surface of the inspection object.

  An apparatus for detecting a flaw on the surface of an inspection object described in Patent Document 2 includes a first inner surface observation integrated image obtained by photographing at a first tube material position, and the first tube material position. Since the flaw on the inspection object surface is detected by comparing with the second inner surface observation integrated image obtained by photographing at the second tube position slightly rotated around the axis from Similar to that described in Document 1, if the length of the scratch on the surface of the inspection object is less than the minimum length that can be detected by the scratch detection analysis means, the surface of the inspection object can be detected. There is a problem that you can not.

  Therefore, the present invention has occurred on the surface of the inspection object even if the damage on the surface of the inspection object is less than the minimum length that can be detected by the determination device for determining the presence or absence of the damage on the surface of the inspection object. An object of the present invention is to provide a flaw detection device and a flaw detection method on the surface of an inspection object that can easily detect flaws.

The present invention, in order to solve the above problems, in correspondence to claim 1, the image capturing apparatus for capturing an examination surface of the inspection object, on the basis of changes of the output captured image from the imaging device Symbol comprising a determining unit whether wound inspection object surface, a relative displacement device for moving at least one of the above dangerous査the photographing device in the direction along the target surface or the inspection object, a control device, the the control device, when the imaging apparatus or the inspection object is moved, a function to perform multiple exposures to the photographing apparatus, during the exposure time, the relative moving distance of the field of view of the imaging device There configured to have a give Ru function photographed image in a state in which stretched the wound until at least the minimum length of the wound continues to drive the relative displacement device by the photographing apparatus can be judged by the judging device.

Further, in response to claim 2, the control device of the above construction, the exposure is performed a plurality of times by the image capturing apparatus with respect to the field of view of a certain exposure time at the end of the imaging device, the next exposure start of the imaging device A function is provided to drive the relative displacement device until the imaging field of view overlaps more than the minimum length of scratches that can be determined by the determination device.

Further, in accordance with claim 3, the inspection object in the above configuration is a cylindrical body, and the relative displacement device is relatively positioned on the axis of the cylindrical body in the circumferential direction. In addition to the rotation drive device that rotates, the control device has a photographing field of view at the time of the last exposure in the circumferential direction of the photographing device relative to the photographing field of view at the time of the first exposure of the photographing device of the exposure performed by the photographing device a plurality of times. However , a configuration is provided in which a function for driving the rotational drive device is provided so as to overlap more than the minimum length of scratches that can be determined by the determination device.

Furthermore, in response to claim 4, in the above configuration, the measuring unit comprising a detecting device for detecting the position of the inspection target surface of the cylinder, an imaging device driving mechanism for moving the imaging device in the diameter direction of the cylindrical body The control device is configured to have a function of controlling the driving of the photographing device drive mechanism based on the detection signal of the detection device.

State also corresponds to claim 5, in which in the above structure, by contacting the conveying surface to the outer peripheral surface of the cylindrical body, it is matched with the axial position of the axis and the cylindrical body of the support shaft of the imaging device And a measurement unit drive mechanism for moving the measurement unit in the vertical direction, and the control device is provided with the height of the axis of the cylinder based on the outer diameter of the cylinder. a function of determining, the configuration in which the provided the function for driving the measurement unit drive mechanism to the shaft center of the height of the support shaft of the imaging device to the height of the obtained axis coincides.

Further, in accordance with claim 6, while the imaging apparatus for imaging the inspection target surface of the inspection object is exposed, the imaging field of view of the imaging apparatus is determined along the inspection target surface. continuing relatively moving at least the minimum length of the scratches can be determined by, and obtained Ru step the captured image in a state of stretching the wound by the imaging device, based on a change in the images picked up by the exposure of the imaging device, the presence or absence of scratches on dangerous査target surface, a structure having a step of determining by the determining device.

According to the inspection object flaw detection apparatus and flaw detection method for the surface of the present invention, the image capturing apparatus for capturing an examination surface of the inspection object, on the basis of changes of the output captured image from the imaging device dangerous comprising a determining unit whether wound査object surface, a relative displacement device for moving at least one of the above dangerous査the photographing device in the direction along the target surface or the inspection object, and a control unit, a the control device, when the imaging apparatus or the inspection object is moved, a function to perform multiple exposures to the photographing apparatus, during the exposure time, the relative moving distance of the field of view of the imaging device flaw detection of the test object surface having a function and give Ru captured image in a state in which stretched the wound by until the above minimum flaw length which can be determined by the determination unit continues to drive the relative displacement device the imaging device Equipment, and The imaging field of view of the imaging device is more than the minimum length of a scratch that can be determined by the determination device along the surface of the inspection object while the imaging device that images the inspection target surface of the inspection object is exposed. continuing relatively moving, and give Ru step the captured image in a state of stretching the wound by the imaging device, based on a change in the image captured by the exposure of the imaging device, the scratches on dangerous査object surface Since there is a method for detecting the presence or absence of the scratch by the surface of the inspection object having the step of determining by the determination device, during the exposure time of the imaging device, the imaging device has a minimum length of scratch that can be determined by the determination device. The field of view can be moved relative to the surface of the inspection object. Therefore, a photographed image in a state where a scratch generated on the surface of the inspection object is stretched beyond the minimum length of the scratch that can be determined by the determination device can be created by the imaging device. Therefore, even if the actual length of the scratch generated on the surface of the inspection object is less than the minimum length of the scratch that can be determined by the determination device, the determination device can easily detect the surface of the inspection target surface. Can do. In addition, even when the length of the scratch generated on the surface of the inspection object is equal to or greater than the minimum length of the scratch that can be determined by the determination device, the imaging field of the imaging device is moved during the exposure time of the imaging device. Since the photographed image can be created by the photographing device, it can be more easily detected as a scratch by the determination device.

It is a schematic side view which shows one Embodiment of the flaw detection apparatus of the test target object surface of this invention. It is an AA direction arrow line view of FIG. The state of conveyance and a clamp of the cylindrical body as a test object is shown, (a) is a BB direction arrow line view of FIG. 1, (b) is a CC direction arrow line view of FIG. FIG. 2 is an enlarged view of the measurement unit shown in FIG. 1, wherein (a) is a schematic side view, and (b) is a schematic front view of (a). It is a block diagram which shows the control structure of the control apparatus with which the flaw detection apparatus of the test target object surface of FIG. 1 was equipped. 1 shows a procedure for inspecting an end surface of a cylindrical body as an inspection object by the flaw detection device on the inspection object surface of FIG. 1, and (a) abuts a downstream end surface of the cylindrical body against a stopper. (B) is a schematic side view showing a state in which the cylindrical body is fixed by a clamp device, and (c) is a state in which the axis of the cylindrical body and the rotation shaft of the photographing apparatus are aligned. It is a schematic side view which shows. FIG. 6C shows a procedure for inspecting the end of the outer peripheral surface of the cylindrical body from the state shown in FIG. 6C. FIG. The schematic side view which shows a state, (b) is a schematic side view which shows the state which moved the imaging device to the imaging position of a cylindrical body axial center, (c) is the model which shows the state which is image | photographing by normal imaging | photography control. FIG. 4D is a schematic diagram illustrating a state in which the photographing apparatus is moved by feed control, and FIG. 4E is a schematic diagram illustrating a state in which photographing is performed by terminal photographing control. FIG. 6C shows a procedure for inspecting the end portion of the inner peripheral surface of the cylindrical body from the state shown in FIG. 6C. FIG. 6A shows the procedure for moving the imaging device to a position where the imaging of the peripheral surface of the cylindrical body can be performed in a desired field of view. (B) is a schematic side view showing a state in which the photographing apparatus is moved to the photographing position in the cylindrical axis direction, and (c) is a state in which photographing is performed by normal photographing control. FIG. 4D is a schematic diagram illustrating a state in which the photographing apparatus is moved by feed control, and FIG. 5E is a schematic diagram illustrating a state in which photographing is performed by terminal photographing control. The other form of implementation of the flaw detection apparatus of the test subject surface of this invention is shown, (a) is a schematic side view, (b) is a DD direction arrow line view of (a). It is a block diagram which shows the control structure of the control apparatus with which the flaw detection apparatus of the test target object surface of FIG. 9 was equipped. FIG. 9 shows a procedure for inspecting the upper end of the outer peripheral surface of the cylindrical body by the flaw detection device on the surface of the inspection object in FIG. 9, and FIG. The side view, (b) is a schematic side view showing a state in which the photographing apparatus is moved to a position where the upper end of the cylindrical body outer surface can be photographed in a desired field of view, and (c) is a photographing of the photographing apparatus in the axial direction of the cylindrical body. FIG. 6 is a schematic side view showing a state in which shooting is performed by start-end shooting control from a state moved to a position, and (d) a schematic side view showing a state in which the shooting apparatus is moved by feed control. 11 shows the continuation of the inspection procedure of FIG. 11, (a) is a schematic side view showing a state in which photographing is performed by normal photographing control, and (b) is a schematic side view showing a state in which photographing is performed by terminal photographing control. FIG.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.

  FIGS. 1 to 8 (a), (b), (c), (d), and (e) show an embodiment of a flaw detection device and a flaw detection method for an inspection object surface according to the present invention. The cylinder 1 (tube material) of the cylinder 1 is conveyed in the axial direction of the cylinder 1 and a clamp that fixes one end surface of the cylinder 1 conveyed by the conveyor 8 after being stopped by a stopper 29. An imaging device 2 for imaging the surface to be inspected of the cylindrical body 1 so as to face one end surface of the cylindrical body 1 fixed by the clamping device 9, and the cylindrical body 1. A detection device 5 for detecting the position of the inner peripheral surface, a photographing device drive mechanism 3 for moving the detection device 5 and the photographing device 2 in the diameter direction of the cylindrical body 1, and the photographing device drive mechanism 3; A relative displacement device for rotating the photographing device 2 in the circumferential direction on the axis of the cylindrical body 1 And a rotational drive device 4, and a measurement unit 6 that moves in the axial direction of the cylindrical body 1 and moves in the vertical direction (diameter direction of the cylindrical body 1). A measurement unit drive mechanism 7 is provided. Furthermore, a determination device 10 having a function of determining the presence or absence of scratches on the surface to be inspected of the cylindrical body 1 based on a change in brightness (brightness value) of a captured image output from the imaging device 2, and a control device 11 The controller 11 determines the relative movement (displacement) distance of the photographing field of view 2a of the photographing device 2 relative to the cylindrical body 1 while the photographing device 2 is performing exposure. A normal imaging control unit 26 that performs normal imaging control of continuing to drive the rotation driving device 4 until the minimum length of scratches that can be determined, and a field of view of the imaging device 2 at the end of the exposure time (at the end of imaging) The upstream end (starting end) in the relative movement direction with respect to the cylindrical body 1 of the imaging field of view 2a at the start of the next exposure of the imaging apparatus 2 with respect to the downstream end (terminal) in the relative movement direction with respect to the cylindrical body 2a. By the judgment device 10 A feed control unit 27 that performs feed control of driving the rotary drive device 4 until the minimum flaw length that can be determined overlaps, and the cylindrical body 1 in the field of view 2a at the time of the first exposure (during shooting) of the image taking device 2 The minimum flaw that can be determined by the determination device 10 is the downstream end in the relative movement direction relative to the cylindrical body 1 of the imaging field 2a at the time of the last exposure (during imaging) of the imaging apparatus 2 with respect to the upstream end in the relative movement direction with respect to A terminal photographing control unit 28 that performs terminal photographing control to continue to drive the rotation driving device 4 during the exposure time of the photographing device 2 until it overlaps more than the length is provided. In addition, the image processing apparatus 12 has a function of processing the captured image captured by the control apparatus 11 through the normal imaging control and the terminal imaging control and sending the processed image to the determination apparatus 10.

  The minimum scratch length that can be determined by the determination device 10 is, for example, the field of view (mm) of the photographing device 2 × the minimum detected pixel size (pixels) on the CCD of the photographing device 2 ÷ the CCD size of the photographing device 2 ( The value obtained in (pixel).

  More specifically, the imaging device 2 of the measurement unit 6 is, for example, a CCD camera, and the optical axis of the imaging device 2 is the central axis of the cylindrical body 1 as an inspection object arranged with the axis direction horizontal. As shown in FIGS. 1 and 4A, the transfer table 13 is inclined with respect to the inspection target surface (inner peripheral surface in the figure) of the cylindrical body 1 so as to intersect with the required angle. It is designed to be fixed on the surface (side surface facing the cylindrical body 1).

  The photographing device drive mechanism 3 moves the photographing device 2 in the diameter direction of the cylindrical body 1 via the transport table 13, and on the back surface of the transport table 13, as shown in FIG. A plurality of (four in the figure) linear guides 14 provided in the width direction of the transfer table 13 and the linear guides 14 are supported to move the transfer table 13 in the diameter direction of the cylindrical body 1. Thus, the linear guide rail 16 provided in parallel with the surface of the rotary table 15 is provided. Further, a table driving device (not shown) such as a linear motor is provided on the back surface of the transfer table 13.

  Thus, the imaging device drive mechanism 3 is configured to include the transport table 13, the linear guide 14, the linear guide rail 16, and the table drive device, so that the imaging device 2 is the cylindrical body. 1 can be moved in the diameter direction.

  On the surface of the transfer table 13, in addition to the photographing apparatus 2, as shown in FIGS. 1, 4 (a) and 4 (b), the position of the inner peripheral surface of the cylindrical body 1 is detected. A detection device 5 such as a sensor is provided. The irradiation light emitted from the photoelectric sensor 5 is emitted in the axial direction of the cylindrical body 1, and the irradiation light from the photoelectric sensor 5 is blocked by the inner edge of the end surface of the cylindrical body 2. The driving of the photographing device drive mechanism 3 by the photographing device drive mechanism control unit 11d of the control device 11 to be described later is stopped. If the position of the inner surface of the cylindrical body 1 can be detected, another sensor such as a contact-type displacement sensor may be used as the detection device 5.

  Further, a rotating shaft (support shaft) 4 a of a rotation driving device 4 such as a servo motor that rotates the photographing device 2 via the rotating table 15 is fixed to the back surface of the rotating table 15. As a result, the photographing apparatus 2 can be rotated on the axis of the cylindrical body 1 integrally with the photographing apparatus drive mechanism 3 with the axis of the rotation shaft 4a of the rotation driving apparatus 4 as the rotation center. It is. Although not shown in the figure, a linear scale as a position detector is provided on the surface of the rotary table 15 in parallel with the linear guide rail 16, and is conveyed along the linear guide rail 16. The position of the table 13 and the position of the photoelectric sensor 5 can be detected as absolute positions based on any position in the direction along the linear guide rail 16. Thereby, the vertical distance from the axial center position of the rotating shaft 4a that rotates the photographing apparatus 2 to the photoelectric sensor 5 on the conveyance table 13, and the irradiation light of the photoelectric sensor 5 after the movement of the conveyance table 13 are cylindrical. The radius of the inner diameter of the cylindrical body 1 can be measured on the basis of the moving distance until the conveying table 13 stops after being blocked by the inner edge of the end face. Further, the rotational drive device 4 is supported by the support structure 17.

  In this way, the measurement unit 6 including the imaging device 2, the imaging device drive mechanism 3, the rotation drive device 4, the detection device 5, and the support structure 17 is configured.

  On the other hand, as shown in FIGS. 1 and 2, the measurement unit drive mechanism 7 includes a horizontal direction drive mechanism 18 that moves the measurement unit 6 in the axial direction of the cylindrical body 1, and the measurement unit 6 in the vertical direction. The vertical drive mechanism 19 to be moved is provided.

  The horizontal drive mechanism 18 includes a linear guide 20 installed in parallel to the front-rear direction parallel to the axial direction of the cylindrical body 1 at the lower end of the support structure 17, and the linear guide 20 connected to the cylindrical body 1. A linear guide rail 21 that can move in the axial direction and a drive device (not shown) such as a linear motor attached to the lower end of the support structure 17 are provided. Thereby, the measurement unit 6 can be moved in the axial direction of the cylindrical body 1.

  The vertical drive mechanism 19 includes a support bracket 22 in which the linear guide rail 21 of the horizontal drive mechanism 18 is installed on the upper surface, and a base end side of the support bracket 22 (a side facing the cylindrical body 1). A linear guide 23 fixed so as to extend in parallel with the direction, a linear guide rail 24 that enables the support bracket 22 to move in the vertical direction via the linear guide 23, and a linear attached to the support bracket 22. A driving device (not shown) such as a motor and a support base 25 on which the linear guide rail 24 is fixed and upright are provided. Thereby, the measurement unit 6 can be moved in the vertical direction.

  Further, a linear scale as a position detector (not shown) is provided on the support bracket 22 and the support base 25 in parallel with the guide rail 21 in the horizontal driving mechanism 18 and the guide rail 24 in the vertical driving mechanism 19. Are provided. Thereby, the height position of the shaft center of the rotating shaft 4a for rotating the photographing device 2 and the position of the photographing device 2 in the axial direction of the cylindrical body 1 are arbitrarily set in the direction along the guide rails 21 and 24. It can be detected as an absolute position on the basis of the position, and the height of the axial center of the cylindrical body 1 can be made to coincide with the height of the rotational axis 4a for rotating the photographing device 2. In addition, the position of the photographing device 2 in the axial direction of the cylindrical body 1 can be easily adjusted to the photographing position of the cylindrical body 1.

  The imaging device 2 of the measurement unit 6 is provided with a transport device 8 for transporting the cylindrical body 1 so as to face one end surface of the cylindrical body 1. As shown in FIG. 3A, the transport device 8 has a transport surface 8a in a trough shape, and the transport surface 8a is placed in a state where the outer peripheral surface of the cylindrical body 1 is in contact with both side surfaces of the transport surface 8a. By driving in the axial direction of the cylindrical body 1, the cylindrical body 1 can be transported along the axial direction of the cylindrical body where the transport surface 8a moves. Further, the transport surface 8a of the transport device 8 is arranged in the same straight line as the shaft center line of the rotating shaft 4a for rotating the photographing device 2 in a plan view. It is provided as follows. Thereby, the cylindrical body 1 is transported between a horizontal position orthogonal to the axial center line of the cylindrical body 1 being transported and a horizontal position orthogonal to the axial center line of the rotating shaft 4a of the photographing apparatus 2. It is made to automatically match during this time.

  Further, on the support base 25, as shown in FIG. 3 (b), a roller 25a for sending the cylindrical body 1 sent out from the conveying device 8 to a photographing position by the photographing device 2 is provided on the outer periphery of the cylindrical body 1. The surface is provided so as to abut on both sides. Further, on the support base 25, as shown in FIGS. 1 and 3B, the clamp device 9 for fixing the cylindrical body 1 conveyed by the conveying device 8 at the photographing position by the photographing device 2 can be moved up and down. It is intended to be provided. Accordingly, the cylindrical body 1 is prevented from moving from the support base 25 during imaging of the surface of the cylindrical body 1 to be inspected by the imaging apparatus 2.

  Next, the configuration of the control device 11 will be described. As shown in FIG. 5, the control device 11 includes a photographing calculation unit 11 a that calculates the rotational speeds ω and ω ′ of the rotational driving device 4 based on input information, and performs exposure on the photographing device 2. In addition, during the exposure time t, the photographing operation unit 11a obtains the relative movement distance of the photographing field 2a of the photographing device 2 with respect to the cylindrical body 1 to be not less than the minimum length L of the scratch that can be judged by the judging device 10. A normal photographing control unit 26 that performs normal photographing control of continuing to drive the rotation driving device 4 at the rotational speeds ω and ω ′, and a photographing field of the photographing device 2 when exposure (photographing) by the normal photographing control is completed. The upstream end (in the relative movement direction with respect to the cylindrical body 1 of the imaging field 2a at the start of exposure by the next normal imaging control or the final imaging control with respect to the downstream end (terminal) in the relative movement direction with respect to the cylindrical body 1 of 2a. A feed control unit that performs feed control for driving the rotational drive device 4 at the rotational speeds ω and ω ′ obtained by the imaging calculation unit 11a until the end portion overlaps the minimum length L of the scratch that can be determined by the determination device 10 27, at the upstream end of the imaging field of view 2a relative to the cylindrical body 1 during the first exposure (during imaging) of the imaging apparatus 2 during the exposure time t. On the other hand, the photographing calculation unit 11a obtains until the downstream end of the photographing field of view 2a in the relative movement direction of the photographing field 2a relative to the cylindrical body 1 at the last exposure overlaps the minimum length L of the scratch that can be judged by the judging device 10. A photographing control unit 11b having a terminal photographing control unit 28 for performing the terminal photographing control for continuing to drive the rotational driving device 4 at the rotational speeds ω and ω ′, and the axial center of the cylindrical body 1 is high. The above picture Control for driving the vertical direction drive mechanism 19 in the measurement unit drive mechanism 7 until the height of the axis of the rotating shaft 4a for rotating the apparatus 2 coincides, and the cylindrical body in the axial direction of the cylindrical body 1 And a measurement unit drive mechanism controller 11c that controls the horizontal direction drive mechanism 18 in the measurement unit drive mechanism 7 until it moves to the photographing position for photographing 1. Further, the detection signal of the detection device 5 The imaging device drive mechanism control unit 11d that controls the drive of the imaging device drive mechanism 3 is provided.

  In the case where the surface to be inspected of the cylindrical body 1 is the inner peripheral surface, the imaging calculation unit 11a, for example, has a radius r of the inner diameter of the cylindrical body 1 obtained from a linear scale (not shown) attached to the rotary table 15. The exposure time t of the photographing device 2, the length X of the photographing field 2a of the photographing device 2, the distance Z by which the photographing device 2 is moved by the feed control, and the entire inner peripheral surface of the cylindrical body 1 In the inspection, the number n of times that the photographing apparatus 2 performs exposure (photographing) and the last end relative to the upstream end in the relative movement direction of the photographing field of view 2a with respect to the cylindrical body 1 during the first exposure by the terminal photographing control. The rotational speed ω (= (2πr + A−X− (n−1) Z) / of the rotation drive device 4 is calculated from the length A in which the downstream end of the photographing field of view 2a in the relative movement direction with respect to the cylindrical body 1 is overlapped. ntr, where rωt ≧ determining device Determination can be minimum length of the scratches L, A ≧ L, are the X-Z ≧ L) as obtained. When the inspection target surface of the cylindrical body 1 is the outer peripheral surface, for example, the radius R of the outer diameter of the cylindrical body 1 measured by an outer diameter measuring instrument such as a laser displacement sensor (not shown), The exposure time t of the photographing device 2, the length X of the photographing field 2a of the photographing device 2, the distance Z by which the photographing device 2 is moved by the feed control, and the entire outer peripheral surface of the cylindrical body 1 are inspected. In this case, the number n of times that the photographing apparatus 2 performs exposure (photographing) and the time of the last exposure with respect to the upstream end in the relative movement direction with respect to the cylindrical body 1 of the photographing field 2a at the time of the first exposure by the terminal photographing control. The rotation speed ω ′ (= (2πR + A−X− (n−1) Z) / ntR) of the rotation driving device 4 from the length A of the downstream end of the photographing field of view 2a relative to the cylindrical body 1 in the relative movement direction. However, Rωt ≧ L, A ≧ L, X−Z ≧ L) And Aru. Note that rωt ≧ L, Rωt ≧ L, A ≧ L, and XZ ≧ L indicate that any of rωt, Rωt, A, and XZ can be determined by the determination device 10 as the minimum length L of the wound. If it is less than that, there will be a portion in the photographed image of the photographing apparatus 2 where the effect of stretching the wound cannot be obtained.

  In addition, the photographing calculation unit 11a performs feed control based on the radius r of the inner diameter of the cylindrical body 1, the rotational speed ω of the rotation driving device 4, and the distance Z by which the photographing device 2 is moved by the feed control. The feed time t ′ for driving the rotation drive device 4 is obtained.

  The imaging control unit 11b reads the rotational speeds ω, ω ′, the number of exposures n, the exposure time t, and the feeding time t ′ from the imaging calculation unit 11a, and receives an inspection start signal for the inspection object. A normal shooting control start signal is sent to the normal shooting control unit 26 to cause the normal shooting control unit 26 to start normal shooting control. The normal photographing control includes control for causing the photographing device 2 to perform exposure and control for continuously driving the rotational driving device 4 at the rotational speeds ω and ω ′ obtained by the photographing arithmetic unit 11a during the exposure time t. And so on. As a result, the photographing field 2a of the photographing device 2 is moved over the minimum length L of the scratch that can be judged by the judging device 10 as shown in FIGS. 7C and 8C during the exposure time t. By doing so, it is possible to obtain a photographic image with the wound stretched by the photographic device 2. Further, the normal photographing control unit 26 sends an exposure time end signal to the sending control unit 27 when the exposure time t has passed and the photographing is finished.

  When the feed control unit 27 receives the exposure time end signal from the normal photographing control unit 26, the feed control unit 27 drives the rotation driving device 4 at the rotational speeds ω and ω ′ obtained by the photographing calculation unit 11a during the feed time t ′. The feed control is performed. As a result, as shown in FIGS. 7D and 8D, the photographing field 2a of the photographing device 2 is set to the cylindrical body 1 of the photographing field 2a of the photographing device 2 when the exposure by the normal photographing control is completed. The minimum length of a flaw that can be determined by the determination device 10 at the upstream end in the relative movement direction relative to the cylindrical body 1 of the imaging field 2a at the start of exposure by the next normal imaging control or terminal imaging control with respect to the downstream end in the relative movement direction. It is made to move until it overlaps L or more. Further, when the feed control is completed after the feed time t ′ has elapsed, the feed control unit 27 performs normal shooting on the normal shooting control unit 26 when the total number of shootings by the normal shooting control unit 26 is less than n−1. A control start signal is sent to cause the normal photographing control unit 26 to perform normal photographing control again. On the other hand, when the total number of times of photographing by the normal photographing control unit 26 is n−1, a terminal photographing control start signal is sent to the terminal photographing control unit 28.

  When the terminal photographing control unit 28 receives the terminal photographing control start signal from the feed control unit 27, the terminal photographing control unit 28 controls the photographing apparatus 2 to perform exposure as the terminal photographing control and the photographing calculation during the exposure time t. The rotation drive device 4 is controlled to continue to be driven at the rotational speeds ω and ω ′ obtained by the unit 11a. As a result, the photographing field 2a of the photographing device 2 is placed at the downstream end of the photographing field 2a of the photographing device 2 relative to the cylindrical body 1 when the exposure by the normal photographing control is completed during the exposure time t. On the other hand, from the state where the upstream end portion in the relative movement direction with respect to the cylindrical body 1 of the photographing field 2a at the start of exposure by the terminal photographing control is over the minimum length L of the scratch that can be determined by the determination device 10, FIG. As shown in FIG. 8E, the downstream end of the photographing field of view 2a relative to the cylindrical body 1 at the end of exposure by the terminal photographing control is the cylindrical body 1 of the photographing field of view 2a at the time of the first exposure of the photographing apparatus 2. It moves so that it may overlap with more than the minimum length L of the damage | wound which can be determined with the determination apparatus 10 to the upstream edge part with respect to the relative moving direction.

  On the other hand, the measurement unit drive mechanism control unit 11c is configured so that, for example, the outer diameter of the cylindrical body 1 measured by an outer diameter measuring instrument such as a laser displacement sensor (not shown) and the trough-shaped transport surface of the transport device 8 are used. It has a function of obtaining the height of the axial center of the cylindrical body 1 from the angle formed by the height of 8a and the conveying surface 8a, and the above-mentioned photographing obtained from a linear scale (not shown) attached to the support base 25 Based on the height of the axis of the rotating shaft 4a for rotating the device 2 and the height of the axis of the cylindrical body 1 obtained as described above, control for driving the vertical driving mechanism 19 is performed. Thereby, the height of the axis of the rotating shaft 4a for rotating the photographing apparatus 2 can be matched with the height of the axis of the cylindrical body 1. Further, the position of the photographing apparatus 2 in the axial direction of the cylindrical body 1 obtained from a linear scale (not shown) attached to the support bracket 22 and the position where the cylindrical body 1 is stopped by a stopper 29 described later, that is, the photographing apparatus. Control for driving the horizontal driving mechanism 18 is performed on the basis of the photographing position 2. As a result, the photographing apparatus 2 can be moved between a retreat position that is separated from the cylindrical body 1 and a photographing position where the cylindrical body 1 is photographed (a position where the cylindrical body 1 is stopped by the stopper 29). I can do it.

  In the case where the inspection target surface of the cylindrical body 1 is an outer peripheral surface, the imaging device drive mechanism control unit 11d is configured to measure the cylindrical body 1 measured by an outer diameter measuring instrument such as a laser displacement sensor (not shown). The current position of the photographing apparatus 2 obtained from an outer diameter, a linear scale (not shown) attached to the rotary table 15, and the photographing apparatus 2 and the cylindrical body 1 that obtain a desired photographing visual field 2 a stored in advance. Based on the vertical distance from the surface to be inspected, it has a function of obtaining a distance for moving the transfer table 13 in the diameter direction of the cylindrical body 1, and based on the obtained distance, the photographing apparatus drive mechanism 3 is driven. As a result, the photographing device 2 can photograph the outer peripheral surface of the cylindrical body 1 with a desired photographing visual field 2a. On the other hand, when the inspection target surface of the cylindrical body 1 is an inner peripheral surface, a detection signal from the detection device 5, for example, a detection signal sent when the irradiation light of the photoelectric sensor 5 is blocked by the inner edge of the end surface of the cylindrical body 1. Based on the above, the driving of the photographing apparatus driving mechanism 3 is stopped. Thus, the photographing device 2 can photograph the inner peripheral surface of the cylindrical body 1 with a desired photographing visual field 2a, and the radius of the inner diameter of the cylindrical body 1 is obtained based on the detection signal of the sensing device 5. The radius r of the inner diameter of the cylindrical body 1 is sent to the photographing calculation unit 11a.

  Further, the image processing device 12 outputs from the photographing device 2 when the number of exposures n is 2 or more, the distance Z by which the photographing device 2 is moved by feed control is zero, and X ≧ Rωt ≧ L. Each of the captured images is sequentially connected, and the connected captured images are sent to the determination device 10. Thus, the determination device 10 can estimate the positions of all the scratches generated on the surface of the cylindrical body 1 to be inspected. On the other hand, when the distance Z by which the photographing device 2 is moved by the feed control is set, each photographed image is sent to the determination device 10 without performing processing for connecting the photographed images output from the photographing device 2. I am trying to send it. Thereby, the presence or absence of a flaw can be determined by the determination device 10 with a small number of exposures n. In the image processing apparatus 12, brightness correction or the like is appropriately performed on the captured image.

  Further, the determination device 10 determines a presence / absence of a flaw on the inspection target surface of the cylindrical body 1 based on a change in brightness of the captured image and an appearance pattern of the change in brightness, and the determination The configuration includes a position estimation function that estimates the downstream end of the light-dark change portion determined to be a scratch by the function as the position of the scratch generated on the inspection target surface of the cylindrical body 1. In the above determination function, when the number of exposures n is 2 or more, a portion where a change in brightness appears at the same position in each captured image, or a portion where a change in brightness appears at equal intervals in the connected captured image appears. When this is done, the portion is recognized as dirt adhering to the lens of the photographic image device 2, and the portion is not determined to be a scratch.

  When inspecting the outer peripheral surface end or the inner peripheral surface end of the cylindrical body 1 using the scratch detection device on the surface of the inspection object having such a configuration, first, the stopper 29 is lowered by an elevating mechanism (not shown). As shown in FIG. 6A, the cylindrical body 1 is transported by the transport device 8 until the downstream end surface of the cylindrical body 1 contacts the stopper 29. Next, when the downstream end surface of the cylindrical body 1 comes into contact with the stopper 29, the conveying device 8 is stopped, and the clamping device 9 is lowered as shown in FIG. The stopper 29 is raised by a lifting mechanism (not shown). Next, based on the outer diameter of the cylindrical body 1 measured using an outer diameter measuring instrument such as a laser displacement sensor (not shown), the measuring unit drive mechanism control unit 11c of the control device 11 has the axis of the cylindrical body 1 as the axis. And the measurement unit drive mechanism control unit 11c controls the measurement based on the obtained height of the axis of the cylindrical body 1 and the height of the axis of the rotating shaft 4a for rotating the photographing apparatus 2. The vertical driving mechanism 19 in the unit driving mechanism 7 is driven to align the center of the cylindrical body 1 with the rotating shaft 4a for rotating the photographing apparatus 2 as shown in FIG. 6C.

  In this state, when the outer peripheral surface end of the cylindrical body 1 is inspected, first, the imaging device driving mechanism 3 shown in FIG. 7A is driven by the control of the imaging device driving mechanism control unit 11d in the control device 11. Then, the photographing apparatus 2 is moved along the linear guide rail 16 to a position where the outer peripheral surface of the cylindrical body 1 can be photographed in the desired photographing visual field 2a. Next, under the control of the measurement unit drive mechanism control unit 11c of the control device 11, as shown in FIG. 7B, the position where the downstream end surface of the cylindrical body 1 is in contact with the stopper 29, and the photographing device 2 The horizontal driving mechanism 18 of the measurement unit driving mechanism 7 is driven based on the position of the cylindrical body 1 in the axial direction, and the imaging device 2 is moved to the imaging position in the axial direction of the cylindrical body 1. Next, as shown in FIG. 7C, the normal photographing control of the normal photographing control unit 26 causes the photographing apparatus 2 to start exposure, and the rotation speed obtained by the photographing calculation unit 11a during the exposure time t. The imaging device 2 is rotationally displaced by continuing to drive the rotation driving device 4 with ω ′. Thereafter, by the feed control of the feed control unit 27, the rotation driving device 4 is driven at the rotation speed ω ′ obtained by the photographing calculation unit 11a as shown in FIG. 7D during the feed time t ′. After performing the normal photographing control and the feed control n-1 times, the terminal photographing control of the terminal photographing control unit 28 causes the photographing apparatus 2 to start exposure and the exposure time as shown in FIG. During the period t, the rotation driving device 4 is continuously driven at the rotational speed ω ′ obtained by the imaging calculation unit 11a, and the imaging of the outer peripheral surface end of the cylindrical body 1 is completed. The captured images are sequentially sent from the imaging device 2 to the image processing device 12.

  On the other hand, when the end of the inner peripheral surface of the cylindrical body 1 is inspected, first, as shown in FIG. 8A, the photographing device driving mechanism 3 is controlled by the photographing device driving mechanism control unit 11d in the control device 11. The detection device 5 is driven until it detects the inner edge of the end surface of the cylindrical body 1, and the imaging device 2 is positioned along the linear guide rail 16 so that the inner peripheral surface of the cylindrical body 1 can be imaged in the desired imaging field 2a. Move to. Next, under the control of the measurement unit drive mechanism controller 11c of the control device 11, as shown in FIG. 8B, the position where the downstream end face of the cylindrical body 1 is brought into contact with the stopper 29, and the photographing device 2 Based on the position in the axial direction of the cylindrical body 1, the horizontal driving mechanism 18 is driven to move the imaging device 2 to the imaging position in the axial direction of the cylindrical body 1. Next, as shown in FIG. 8C, the normal photographing control of the normal photographing control unit 26 causes the photographing apparatus 2 to start exposure, and the rotation speed obtained by the photographing calculation unit 11a during the exposure time t. The rotation drive device 4 is continuously driven by ω. Thereafter, by the feed control of the feed control unit 27, the rotation drive device 4 is driven at the rotation speed ω ′ obtained by the photographing calculation unit 11a as shown in FIG. 8D during the feed time t ′. After the normal photographing control and the feed control are performed n-1 times, the terminal photographing control of the terminal photographing control unit 28 causes the photographing apparatus 2 to start exposure as shown in FIG. During the exposure time t, the rotation driving device 4 is continuously driven at the rotation speed ω obtained by the imaging calculation unit 11a, and the imaging of the inner peripheral end of the cylindrical body 1 is completed. The captured images are sequentially sent from the imaging device 2 to the image processing device 12.

  When a photographed image is sent to the image processing device 12, when the distance Z to which the photographing device 2 is moved by the feed control is set, the processing for connecting the photographed images output from the photographing device 2 is not performed. Each captured image is sent to the determination device 10. On the other hand, when the number of exposures n is 2 or more, the distance Z by which the photographing apparatus 2 is moved by feed control is zero, and X ≧ Rωt ≧ L, the photographed images output from the photographing apparatus 2 are sequentially displayed. The connecting process is performed, and the connected captured image is sent to the determination device 10.

  When the determination device 10 receives a captured image, the determination device 10 determines that a portion where a change in brightness of each captured image occurs is a scratch. At this time, when a portion where a change in brightness appears in the same position of each captured image, or when a portion where a change in brightness appears at equal intervals in a connected captured image, this portion is detected by the imaging device 2. This part is recognized as dirt adhering to the lens, and the part is not determined as a scratch. Further, the downstream end of the light / dark change portion determined to be a scratch is estimated as the position of the scratch generated in the cylindrical body 1.

  As described above, according to the scratch detection device on the surface of the inspection object having the above-described configuration, the imaging field of view 2a of the imaging device 2 is set to be longer than the minimum length of the scratch that can be determined by the determination device 10 during the exposure time of the imaging device 2. The cylindrical body 1 can be moved relative to the scratches on the outer peripheral surface end and the inner peripheral surface end. Therefore, the photographing device 2 can create a photographed image in a state where the scratches generated at the outer peripheral surface end and the inner peripheral surface end of the cylindrical body 1 are extended beyond the minimum length of the scratch that can be determined by the determination device 10. . Therefore, even if the actual scratch length generated at the outer peripheral surface end and the inner peripheral surface end of the cylindrical body 1 is less than the minimum scratch length that can be determined by the determination device 10, the determination device 10 The presence or absence of scratches on the outer peripheral surface end and the inner peripheral surface end of the cylindrical body 1 can be easily determined.

  Even when the length of the scratches generated at the outer peripheral surface end and the inner peripheral surface end of the cylindrical body 1 is equal to or longer than the minimum length of the scratch that can be determined by the determination device 10, the exposure time of the imaging device 2 is detected. Since the photographed image 2 can be created by the photographing device 2 in a state where the photographing visual field 2a of the photographing device 2 is moved, the determination device 10 can more easily determine a scratch.

  Next, FIGS. 9A and 9B and FIGS. 12A and 12B show a cylinder as an inspection object as another embodiment of the flaw detection apparatus and the flaw detection method of the inspection object surface of the present invention. 1 shows an example of a case where the outer peripheral surface of the body 1 is photographed in the axial direction to detect a flaw, and includes a measurement unit 30, a measurement unit drive mechanism 32, and a control device 33. It is as. The measurement unit 30 includes an imaging device 2 for imaging the inspection target surface of the cylindrical body 1 (tube material) as an inspection target, and the imaging device with respect to the cylindrical body 1 on the axial center of the cylindrical body 1. And a moving device 31 as a relative displacement device that relatively moves 2 in the axial direction of the cylindrical body. Further, the measurement unit drive mechanism 32 is configured to move the measurement unit 30 in the vertical direction. Further, the control device 33 has a cylindrical upstream end in the relative movement direction of the imaging field of view 2a with respect to the cylindrical body 1. Minimum wound length that can be determined by the determination device 10 relative to the cylindrical body 1 of the field of view 2a of the imaging device 2 projected from the downstream end of the body 1 more than the minimum wound length that can be determined by the determination device 10. The start-end shooting control unit 41 that performs the start-end shooting control for continuously driving the moving device 31 during the exposure time of the shooting apparatus 2 until the above-described operation is performed, and the shooting apparatus 2 is exposed after the start-end shooting control. The moving device 2 is moved until the relative moving distance of the photographing field 2a of the photographing device 2 with respect to the cylindrical body 1 is equal to or longer than the minimum length of the scratch that can be judged by the judging device 10. A normal photographing control unit 42 that performs normal photographing control to continue driving 31 and a downstream end portion (end point) relative to the cylindrical body 1 of the photographing field 2a of the photographing device 2 at the end of the exposure time (at the end of photographing). Part)) until the upstream end (starting end) in the relative movement direction of the imaging field of view 2a at the start of the next exposure of the imaging apparatus 2 with respect to the cylindrical body 1 overlaps the minimum length of the scratch that can be determined by the determination apparatus 10. A feed control unit 43 that performs feed control to drive the rotation drive device 4 and a downstream end in the relative movement direction of the imaging field of view 2a of the imaging device 2 with respect to the cylindrical body 1 after the normal imaging control is an upstream end of the cylindrical body 1 A terminal photographing control unit 44 that performs terminal photographing control to continue to drive the moving device 31 during the exposure time of the photographing apparatus 2 until it protrudes beyond the minimum length of a scratch that can be judged by the judging device 10 And the construction shall have.

  More specifically, as shown in FIG. 9A, the imaging device 2 of the measurement unit 30 has the conveyance table tilted so that the optical axis intersects the central axis of the cylindrical body 1 at a required angle. 34 is fixedly provided on the lower surface. As shown in FIG. 9B, a plurality (four in the figure) of linear guides 35 are provided on the upper surface of the transfer table 34. Each linear guide 35 is shown in FIG. As shown in FIG. 2, the cylindrical body 1 is movably attached to a linear guide rail 37 fixed in parallel to the lower surface of the lifting table 36 so as to extend in the axial direction of the cylindrical body 1. Further, the transport table 34 is provided with a table driving device (not shown) such as a linear motor. As described above, the moving device 31 is configured to include the transport table 34, the linear guide 35, the linear guide rail 37, and the table driving device, so that the photographing device 2 is connected to the shaft of the cylindrical body 1. It can be moved in the direction of the heart.

  The lifting table 36 is provided with a linear scale (not shown) as a position detector in parallel with the linear guide rail 37 so that the position of the conveying table 34 in the direction along the linear guide rail 37 is It can be detected as an absolute position based on an arbitrary position in the direction along the linear guide rail 37. Thereby, the minimum of the damage | wound which can determine with the determination apparatus 10 from the upstream end of the cylindrical body 1 the upstream end of the imaging | photography field of view 2a relative to the cylindrical body 1 at the time of the first exposure (at the time of imaging). It can be positioned at a position protruding more than the length. Further, the downstream end of the photographing field of view 2a relative to the cylindrical body 1 at the time of the last exposure (during photographing) of the photographing apparatus 2 was measured by a length measuring instrument such as a laser displacement sensor (not shown). Based on the length of the cylindrical body 1, it can be moved from the downstream end of the cylindrical body 1 to a position protruding beyond the minimum length of the scratch that can be determined by the determination device 10. In this way, the measuring unit 30 including the photographing device 2 and the moving device 31 is configured.

  On the other hand, as shown in FIGS. 9 (a) and 9 (b), the measurement unit drive mechanism 32 includes linear guides 38 that are fixed in the vertical direction at each corner portion (four locations in the figure) of the lift table 36; A linear guide rail 39 to which the linear guides 38 are attached so as to be movable in the vertical direction, a driving device (not shown) such as a linear motor attached to the lifting table 36, and the linear guide rails 36 are fixed. The support device 40 is provided on both sides of the transport device 8. Thereby, the measurement unit 30 can be moved in the vertical direction.

  The support base 40 is provided with a linear scale as a position detector (not shown) parallel to the linear guide rail 39 in the measurement unit drive mechanism 32. Thereby, the height position of the imaging device 2 can be detected as an absolute position with reference to an arbitrary position in the direction along the linear guide rail 39, and the upper end of the outer peripheral surface of the cylindrical body 1 The distance to the photographing apparatus 2 can be easily set to a distance at which a desired photographing visual field 2a can be obtained.

  Further, the transport device 8 is installed such that the axial center line of the cylindrical body 1 transported by the transport device 8 is arranged on the same straight line as the optical axis of the photographing device 2 in plan view. It is. Thereby, the horizontal position orthogonal to the axis of the cylindrical body 1 being conveyed and the horizontal position orthogonal to the optical axis of the photographing apparatus 2 are automatically detected while the cylindrical body 1 is being conveyed. To be matched.

  Next, the configuration of the control device 33 will be described. As shown in FIG. 10, the control device 33 includes a photographing calculation unit 33 a that calculates the moving speed v of the moving device 31 based on the input information. Photographing by the photographing apparatus 2 in which exposure is performed and the upstream end in the relative movement direction of the photographing field of view 2a with respect to the cylindrical body 1 protrudes from the downstream end of the cylindrical body 1 by at least the minimum scratch length L that can be determined by the determination apparatus 10 The starting point of continuing to drive the moving device 31 during the initial exposure time t of the photographing device 2 until the relative moving distance of the field of view 2a with respect to the cylindrical body 1 is equal to or greater than the minimum length L of the scratch that can be determined by the determining device 10. A start-end shooting control unit 41 that performs shooting control, and causes the shooting apparatus 2 to perform exposure after the start-end shooting control, and a cylinder of the shooting field of view 2a of the shooting apparatus 2 during the exposure time t. The normal photographing control is performed in which the moving device 31 is continuously driven at the moving speed v obtained by the photographing calculation unit 33a until the relative moving distance with respect to 1 becomes equal to or larger than the minimum scratch length L that can be determined by the determining device 10. When the exposure by the imaging control unit 42 and the normal imaging control and the start-end imaging control is completed, the next normal to the downstream side end portion (terminal portion) relative to the cylindrical body 1 of the imaging field 2a of the imaging device 2 The photographing operation unit until the upstream end (starting end) in the relative movement direction of the photographing field of view 2a with respect to the cylindrical body 1 at the start of exposure by photographing control or terminal photographing control overlaps the minimum length L of the scratch that can be determined by the determination device 10 A feed control unit 43 that performs feed control to drive the moving device 31 at the moving speed v obtained in 33a, and performs the final exposure on the photographing device 2 after the normal photographing control. And the downstream end in the relative movement direction of the imaging field 2a of the imaging device 2 with respect to the cylindrical body 1 during the exposure time t is not less than the minimum length L of the scratch that can be determined by the determination device 10 from the upstream end of the cylindrical body 1. An imaging control unit 33b having an end imaging control unit 44 for performing an end imaging control of continuing to drive the moving device 31 during the exposure time t of the imaging device 2 until it protrudes, and the cylindrical body 1 Measurement unit drive mechanism control for controlling the drive of the measurement unit drive mechanism 32 until the distance between the height of the upper end of the outer peripheral surface of the image pickup device 2 and the height of the image pickup device 2 is such that the desired shooting field 2a of the image pickup device 2 is obtained. A moving unit control unit 33d for controlling the driving of the moving device 31 until the moving unit 31 is moved to a shooting position for shooting the cylindrical body 1 in the axial direction of the cylindrical body 1; It is set as the structure provided with.

  The photographing calculation unit 33a includes, for example, a cylindrical body length Y measured by a length measuring instrument such as a laser displacement sensor (not shown), an exposure time t of the photographing apparatus 2, and the photographing apparatus 2. The length X of the photographic field of view 2a, the distance Z by which the photographic device 2 is moved by the feed control, the number n of times that the photographic device 2 performs exposure (photographing), and the first exposure time of the photographic device 2 The horizontal distance B in which the upstream end in the relative movement direction of the imaging field 2a with respect to the cylindrical body 1 is projected from the downstream end of the cylindrical body 1 and the relative position of the imaging field 2a with respect to the cylindrical body 1 at the time of the final exposure of the imaging device 2. From the horizontal distance C in which the downstream end in the moving direction protrudes from the upstream end of the cylindrical body 1, the moving speed v of the moving device 31 (= (Y + B + C−X + Z−nZ) / nt, where vt ≧ L, B ≧ L, C ≧ L, XZ ≧ L) Are to. It should be noted that vt ≧ L, B ≧ L, C ≧ L, and XZ ≧ L are the minimum scratch length L that can be determined by the determination device 10 according to any of vt, B, C, and XZ. If it is less than that, there will be a portion in the photographed image of the photographing apparatus 2 where the effect of stretching the wound cannot be obtained.

  Further, the photographing calculation unit 33a obtains a feed time t ′ for driving the moving device 31 by feed control from the moving speed v of the moving device 31 and the distance Z by which the photographing device 2 is moved by the feed control. It is like that.

  The imaging control unit 33b reads the moving speed v, the number of exposures n, the exposure time t, and the feed time t ′ from the imaging calculation unit 33a. A start-end shooting control start signal is sent to the shooting control unit 41 so that the start-end shooting control unit 41 starts the start-end shooting control. The start-end photographing control includes control for causing the photographing apparatus 2 to perform exposure and control for continuously driving the moving apparatus 31 at the moving speed v obtained by the photographing calculation unit 33a during the exposure time t. It is. As a result, the exposure field 2a of the imaging apparatus 2 in which the upstream end in the relative movement direction with respect to the cylindrical body 1 protrudes from the downstream end of the cylindrical body 1 beyond the minimum length L of the scratch that can be determined by the determination apparatus 10 is exposed. During the period t, as shown in FIG. 11C, by moving the wound length L or more that can be determined by the determination device 10, it is possible to obtain a photographed image in which the wound is stretched by the photographing device 2. It is like that. The start-end shooting control unit 41 sends an exposure time end signal to the sending control unit 43 when the exposure time t elapses and shooting ends.

  When the feed control unit 43 receives the exposure time end signal from the start-end shooting control unit 41 and the normal shooting control unit 42, the moving device 43 moves at the moving speed v obtained by the shooting calculation unit 33a during the feed time t ′. Feed control for driving 31 is performed. As a result, the photographing field 2a of the photographing device 2 is moved relative to the cylindrical body 1 of the photographing field 2a of the photographing device 2 when the exposure by the start-end photographing control and the normal photographing control is completed as shown in FIG. 11 (d). The minimum length L of the scratch that can be determined by the determination device 10 at the upstream end in the relative movement direction relative to the cylindrical body 1 of the imaging field 2a at the start of exposure by the next normal imaging control or terminal imaging control with respect to the downstream end in the direction. It is made to move until it overlaps. When the feed control is finished after the feed time t ′ has elapsed, the feed control unit 43 causes the normal shooting control unit 42 to perform normal shooting when the total shooting count by the normal shooting control unit 42 is less than n−2. A control start signal is sent to cause the normal shooting control unit 42 to perform normal shooting control. On the other hand, when the total number of times of photographing by the normal photographing control unit 42 is n−2, the terminal photographing control start signal is sent to the terminal photographing control unit 44.

  When the normal photographing control unit 42 receives the normal photographing control start signal, the normal photographing control unit 42 controls the photographing apparatus 2 to perform exposure, and the movement at the moving speed v obtained by the photographing calculating unit 33a during the exposure time t. The normal photographing control is performed in which the device 31 is continuously driven. As a result, the imaging field of view 2a of the imaging device 2 is moved over the minimum length L of the scratch that can be determined by the determination device 10 as shown in FIG. The photographed image in which the scratches are stretched by 2 can be obtained. Further, the normal photographing control unit 42 sends an exposure time end signal to the feed control unit 43 when the exposure time t elapses and the photographing is finished.

When the terminal photographing control unit 44 receives the terminal photographing control start signal from the feed control unit 43, the photographing operation unit 33a obtains the control during which the photographing apparatus 2 performs exposure and the exposure time t. Terminal photographing control is performed in which the moving device 31 is continuously driven at the moving speed v. As a result, the field of view 2a of the photographing apparatus 2 is changed during the exposure time t.
Relative movement of the imaging field of view 2a relative to the cylindrical body 1 at the start of exposure by terminal imaging control with respect to the downstream end of the relative direction of movement of the imaging field 2a of the imaging device 2 relative to the cylindrical body 1 when exposure by the normal imaging control is completed As shown in FIG. 12B, relative to the cylindrical body 1 of the field of view 2a at the end of the exposure by the terminal photographing control from the state where the upstream end in the direction is overlapped more than the minimum length L of the scratch that can be judged by the judging device 10. The downstream end of the moving direction is moved beyond the minimum scratch length L that can be determined by the determination device 10 until it protrudes from the upstream end of the cylindrical body 1.

  On the other hand, the measurement unit drive mechanism control unit 33c is configured such that, for example, the outer diameter of the cylindrical body 1 measured by an outer diameter measuring instrument such as a laser displacement sensor (not shown) and the trough-shaped transport surface of the transport device 8 are used. It has a function of obtaining the height of the upper end of the outer peripheral surface of the cylindrical body 1 from the angle formed by the height of 8a and the conveying surface 8a, and is obtained from a linear scale (not shown) attached to the support base 40. Based on the height of the imaging device 2 and the obtained height of the upper end of the outer peripheral surface of the cylindrical body 1, control for driving the measurement unit drive mechanism 32 is performed. Thereby, the distance between the height of the photographing apparatus 2 and the height of the upper end of the outer peripheral surface of the cylindrical body 1 can be set to a distance at which a desired photographing visual field 2a of the photographing apparatus 2 can be obtained.

  For example, the moving device control unit 33d is configured such that the position of the imaging device 2 in the axial direction of the cylindrical body 1 obtained from a linear scale (not shown) attached to the lifting table 36 and the cylindrical body 1 is cylindrical on the transport device 8. The position stopped by the stopper 29 moving in the diameter direction of the body 1 and the upstream end in the relative movement direction of the imaging field of view 2a with respect to the cylindrical body 1 at the time of the first exposure of the imaging apparatus 2 protrude from the downstream end of the cylindrical body 1. Based on the horizontal distance B, control for driving the moving device 31 is performed. As a result, the photographing apparatus 2 is moved away from the cylindrical body 1 in the axial direction of the cylindrical body 1 and the photographing position where the cylindrical body 1 is photographed, that is, the photographing field at the time of the first exposure of the photographing apparatus 2. 2a so that the upstream end in the relative movement direction with respect to the cylindrical body 1 can be moved from the downstream end of the cylindrical body 1 to a position protruding beyond the minimum length L of the scratch that can be determined by the determination device 10. is there.

  Further, the image processing device 12 outputs from the photographing device 2 when the number of exposures n is 2 or more, the distance Z to which the photographing device 2 is moved by feed control is zero, and X ≧ vt ≧ L. Each of the captured images is sequentially connected, and the connected captured images are sent to the determination device 10.

  Further, on the downstream side of the conveying device 8, a cylindrical body rotation driving device (not shown) for rotating the cylindrical body 1 in the circumferential direction is provided.

  Other configurations are the same as those shown in FIGS. 1 to 8 (a), (b), (c), (d), and (e), and the same components are denoted by the same reference numerals.

  When the outer peripheral surface of the cylindrical body 1 is inspected using the flaw detection device for the inspection object surface according to the embodiment shown in FIGS. 9A, 9B and 12A, 12B, first, FIG. 11 (a), until the downstream end surface of the cylindrical body 1 comes into contact with the stopper 29 which has been moved to a position away from the downstream end portion of the transport device 8 by a lifting mechanism (not shown). The cylindrical body 1 is transported by the transport device 8. Next, when the downstream end surface of the cylindrical body 1 comes into contact with the stopper 29, the transport device 8 is stopped, and the stopper 29 is lowered and retracted by a lifting mechanism (not shown). Next, the measurement unit drive mechanism 32 is driven under the control of the measurement unit drive mechanism control unit 33c in the control device 33, and as shown in FIG. Move to a height position Thereafter, the moving device 31 is driven under the control of the moving device control unit 33d in the control device 33, so that the photographing device 2 moves relative to the cylindrical body 1 of the photographing field 2a at the time of the first exposure of the photographing device 2. After the upstream end is moved from the downstream end of the cylindrical body 1 to a position protruding beyond the minimum length L of the scratch that can be determined by the determination device 10, as shown in FIG. Under the start-up photographing control, the photographing device 2 starts exposure, and the driving device 31 is continuously driven at the moving speed v determined by the photographing calculation unit 33a during the exposure time t. Next, as shown in FIG. 11 (d), by the feed control of the feed control unit 43, the moving device 31 is driven at the moving speed v obtained by the photographing calculation unit 33a during the feed time t '. After performing this feed control, as shown in FIG. 12A, the normal photographing control of the normal photographing control unit 42 causes the photographing apparatus 2 to start exposure, and the photographing calculation unit during the exposure time t. The moving device 31 is continuously driven at the moving speed v obtained in 33a. Next, the feed control by the feed control unit 43 is performed in the same manner as shown in FIG. After performing the normal photographing control and the feed control n-2 times, as shown in FIG. 12B, the photographing apparatus 2 starts exposure and the exposure time is controlled by the terminal photographing control of the terminal photographing control unit 44. During the period t, the moving device 31 is continuously driven at the moving speed v determined by the photographing calculation unit 33a, and the photographing of the upper end of the outer peripheral surface of the cylindrical body 1 is finished. The captured images are sequentially sent from the imaging device to the image processing device 12.

  When a photographed image is sent to the image processing device 12, when the distance Z to which the photographing device 2 is moved by the feed control is set, the processing for connecting the photographed images output from the photographing device 2 is not performed. Each captured image is sent to the determination device 10. On the other hand, when the number of exposures n is 2 or more, the distance Z by which the photographing apparatus 2 is moved by feed control is zero, and X ≧ Rωt ≧ L, the photographed images output from the photographing apparatus 2 are sequentially displayed. The connecting process is performed, and the connected captured image is sent to the determination device 10.

  When the determination device 10 receives a captured image, the determination device 10 determines that a portion where a change in brightness of each captured image occurs is a scratch. At this time, when a portion where a change in brightness appears in the same position of each captured image, or when a portion where a change in brightness appears at equal intervals in a connected captured image, the portion is displayed as a captured image device. The part is recognized as dirt adhering to the lens 2 and is not determined to be a scratch. Further, the downstream end of the light / dark change portion determined to be a scratch is estimated as the position of the scratch generated in the cylindrical body 1.

  Thereafter, a cylindrical body rotation driving device (not shown) is attached to the cylindrical body 1, and the cylindrical body rotation drive device rotates the cylindrical body 1 in the circumferential direction below the width of the imaging field 2a of the imaging device 2. The upper end of the outer peripheral surface of the cylindrical body 1 is inspected again in the same order as described above.

  As described above, according to the flaw detection apparatus on the surface of the inspection object of the embodiment shown in FIGS. 9A, 9B and 12A, 12B, FIGS. ) (C) (d) (e) The same effects as those of the embodiment shown in FIG.

  In the embodiment shown in FIGS. 1 to 8 (a), (b), (c), (d), and (e), the rotation driving device 4 is used for rotationally displacing the photographing device 2 with respect to the cylindrical body 1. However, the present invention is not limited to this, and the cylindrical body 1 is rotated relative to the imaging apparatus 2 or both the imaging apparatus 2 and the cylindrical body 1 are mutually connected. It may be rotated so as to be relatively displaced in opposite directions on the axis of the cylindrical body 1.

  In the embodiment shown in FIGS. 9 to 12 (a) and 12 (b), in order to displace the photographing device 2 relative to the cylindrical body 1, the photographing device 2 is used as a relative displacement device by the moving device 31. However, the present invention is not limited to this, and the cylindrical body 1 is moved relative to the imaging device 2 or both the imaging device 2 and the cylindrical body 1 are moved relative to each other. Also good.

  Further, in each of the above-described embodiments, the case where the rotation speeds ω and ω ′ of the rotation driving device 4 and the movement speed v of the moving device 31 are controlled by the control devices 11 and 33 has been described, but the present invention is not limited to this. Further, the exposure time t of the photographing apparatus 2 may be controlled by the control devices 11 and 33.

  In the embodiment shown in FIGS. 1 to 8 (a), (b), (c), (d), and (e), a cylinder is provided between the photographing apparatus 2 and the transport table 13, and the cylinder is expanded and contracted. Thereby, you may enable it to image | photograph the inner surface of the cylindrical body 1 with the imaging device 2 over the full length.

  Also, in the embodiment shown in FIGS. 1 to 8A, 8B, 8C, 8D, and 8E, the horizontal direction in the measurement unit drive mechanism 7 during the exposure time t of the photographing apparatus 2 is shown. The drive mechanism 18 is moved more than the minimum length L of the scratch that can be determined by the determination device 10 so that the scratch of the cylindrical body 1 photographed by the photographing device 2 is also extended in the axial direction of the cylindrical body 1. Good.

  Furthermore, in the embodiment shown in FIGS. 9 to 12 (a) and 12 (b), the case where the inspection object is the cylindrical body 1 has been described. However, the present invention is not limited to this, and other than a cylinder such as a flat plate. The shape may be the inspection object.

  In each of the above-described embodiments, the case where the rotation speeds ω and ω ′ of the rotation driving device 4 and the movement speed v of the moving device 31 are controlled to the same speed by the normal photographing control and the feed control by the control devices 11 and 33 will be described. However, it may be controlled to separate rotational speeds ω, ω ′ and moving speed v.

  1 to 8 (a), (b), (c), (d), and (e), the detection device 5 can detect any position as long as it can detect the position of the inspection target surface of the inspection target. May be provided.

  Of course, various changes can be made without departing from the scope of the present invention.

1 Cylindrical body (inspection object)
2 photographing device 2a photographing field of view 3 photographing device driving mechanism 4 rotation driving device (relative displacement device)
4a Rotating shaft (support shaft)
DESCRIPTION OF SYMBOLS 5 Detection apparatus 6 Measurement unit 7 Measurement unit drive mechanism 8 Conveyance apparatus 8a Conveyance surface 10 Judgment apparatus 11 Control apparatus 31 Movement apparatus (relative displacement apparatus)
33 Controller

Claims (6)

An imaging device for imaging the inspection object surface of the inspection object;
A determination device whether the scratches on dangerous査object surface based on a change of the output captured image from the imaging device,
A relative displacement device for moving at least one of the photographing device or the test object in a direction along a top danger査object surface,
A control device,
The control device, when the imaging apparatus or the inspection object is moved, a function to perform multiple exposures to the photographing apparatus, during the exposure time, the relative moving distance of the field of view of the imaging device and characterized in that a structure having the function and give Ru captured image in a state in which stretched the wound by until the above minimum flaw length which can be determined by the determination unit continues to drive the relative displacement device the imaging device A device for detecting scratches on the surface of an inspection object. The control device of the exposure to be performed a plurality of times by the image capturing apparatus with respect to the field of view of a certain exposure time at the end of the imaging device, the field of view of the next exposure start of the imaging device, the smallest flaw that can be determined by the determination unit The flaw detection device for a surface of an inspection object according to claim 1, wherein a function for driving the relative displacement device is provided until it overlaps the length or more. The inspection object is a cylindrical body, and the relative displacement device is a rotational drive device that relatively rotates the cylindrical body and the imaging device in the circumferential direction on the axial center of the cylindrical body,
Furthermore, the control device of the exposure to be performed a plurality of times by the photographing device, for the first of the field of view at the time of exposure of the imaging device, the circumferential end of the field of view at the time of exposure of the imaging device, can be determined by the determination unit The flaw detection device for a surface of an inspection object according to claim 1 or 2, wherein a function of driving the rotary drive device is provided so as to overlap with a minimum length of flaws. A detection device for detecting the position of the inspection target surface of the cylinder, a measuring unit and a photographic device driving mechanism for moving the imaging device in the diameter direction of the cylindrical body is provided,
The flaw detection device on the surface of the inspection object according to claim 3, wherein the control device is provided with a function of controlling driving of the photographing device drive mechanism based on a detection signal of the detection device. By contacting the conveying surface to the outer peripheral surface of the cylindrical body, and a conveying device for conveying a cylindrical body in the state that is matched with the axial position of the axis and the cylindrical body of the support shaft of the imaging device, a measurement unit A measurement unit drive mechanism that moves in the vertical direction is provided,
The control device, and a function of obtaining the axial height of the cylindrical body, the axis of height of the support shaft of the imaging device to the height of the obtained axis coincides based on the outer diameter of the cylindrical body The flaw detection apparatus for a surface of an inspection object according to claim 4, wherein a function for driving the measurement unit drive mechanism is provided. While the imaging device for imaging the inspection target surface of the inspection target is exposed, the imaging field of view of the imaging device is relative to the minimum length of the scratch that can be determined by the determination device along the inspection target surface. continuing the moved, the resulting Ru step the captured image in a state of stretching the wound by the imaging device,
Based on the change in the image captured by the exposure of the imaging device, the presence or absence of scratches on dangerous査object surface, and determining by the determination device,
A method for detecting flaws on the surface of an inspection object, characterized by comprising:

Images