TW202036925A - 積層體之製造方法及染料敏化太陽電池之製造方法 - Google Patents
積層體之製造方法及染料敏化太陽電池之製造方法 Download PDFInfo
- Publication number
- TW202036925A TW202036925A TW108145358A TW108145358A TW202036925A TW 202036925 A TW202036925 A TW 202036925A TW 108145358 A TW108145358 A TW 108145358A TW 108145358 A TW108145358 A TW 108145358A TW 202036925 A TW202036925 A TW 202036925A
- Authority
- TW
- Taiwan
- Prior art keywords
- manufacturing
- type semiconductor
- electrode layer
- laminate
- semiconductor layer
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 32
- 239000004065 semiconductor Substances 0.000 claims abstract description 46
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims abstract description 21
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims abstract description 17
- 239000010936 titanium Substances 0.000 claims abstract description 16
- 239000007788 liquid Substances 0.000 claims description 18
- 230000010287 polarization Effects 0.000 claims description 9
- RXCBCUJUGULOGC-UHFFFAOYSA-H dipotassium;tetrafluorotitanium;difluoride Chemical compound [F-].[F-].[F-].[F-].[F-].[F-].[K+].[K+].[Ti+4] RXCBCUJUGULOGC-UHFFFAOYSA-H 0.000 claims description 5
- 239000011734 sodium Substances 0.000 claims description 5
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 4
- NMGYKLMMQCTUGI-UHFFFAOYSA-J diazanium;titanium(4+);hexafluoride Chemical compound [NH4+].[NH4+].[F-].[F-].[F-].[F-].[F-].[F-].[Ti+4] NMGYKLMMQCTUGI-UHFFFAOYSA-J 0.000 claims description 4
- YOYLLRBMGQRFTN-SMCOLXIQSA-N norbuprenorphine Chemical group C([C@@H](NCC1)[C@]23CC[C@]4([C@H](C3)C(C)(O)C(C)(C)C)OC)C3=CC=C(O)C5=C3[C@@]21[C@H]4O5 YOYLLRBMGQRFTN-SMCOLXIQSA-N 0.000 claims description 4
- 229910052708 sodium Inorganic materials 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 4
- AIFLGMNWQFPTAJ-UHFFFAOYSA-J 2-hydroxypropanoate;titanium(4+) Chemical compound [Ti+4].CC(O)C([O-])=O.CC(O)C([O-])=O.CC(O)C([O-])=O.CC(O)C([O-])=O AIFLGMNWQFPTAJ-UHFFFAOYSA-J 0.000 claims description 3
- MRSOZKFBMQILFT-UHFFFAOYSA-L diazanium;oxalate;titanium(2+) Chemical compound [NH4+].[NH4+].[Ti+2].[O-]C(=O)C([O-])=O.[O-]C(=O)C([O-])=O MRSOZKFBMQILFT-UHFFFAOYSA-L 0.000 claims description 3
- DCKVFVYPWDKYDN-UHFFFAOYSA-L oxygen(2-);titanium(4+);sulfate Chemical compound [O-2].[Ti+4].[O-]S([O-])(=O)=O DCKVFVYPWDKYDN-UHFFFAOYSA-L 0.000 claims description 2
- 229910000348 titanium sulfate Inorganic materials 0.000 claims description 2
- MVOKPRCGJFSRSJ-UHFFFAOYSA-N O.O.[Ti].[K] Chemical compound O.O.[Ti].[K] MVOKPRCGJFSRSJ-UHFFFAOYSA-N 0.000 claims 1
- ZDYUUBIMAGBMPY-UHFFFAOYSA-N oxalic acid;hydrate Chemical compound O.OC(=O)C(O)=O ZDYUUBIMAGBMPY-UHFFFAOYSA-N 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 21
- 239000011521 glass Substances 0.000 description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- 238000005406 washing Methods 0.000 description 8
- 239000000049 pigment Substances 0.000 description 7
- 238000001035 drying Methods 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- TWRXJAOTZQYOKJ-UHFFFAOYSA-L Magnesium chloride Chemical compound [Mg+2].[Cl-].[Cl-] TWRXJAOTZQYOKJ-UHFFFAOYSA-L 0.000 description 2
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- ZCCIPPOKBCJFDN-UHFFFAOYSA-N calcium nitrate Chemical compound [Ca+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ZCCIPPOKBCJFDN-UHFFFAOYSA-N 0.000 description 2
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- GNRMKQMKBAJVLN-UHFFFAOYSA-J dipotassium;oxalate;oxygen(2-);titanium(4+);dihydrate Chemical compound O.O.[O-2].[K+].[K+].[Ti+4].[O-]C(=O)C([O-])=O.[O-]C(=O)C([O-])=O GNRMKQMKBAJVLN-UHFFFAOYSA-J 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 238000005342 ion exchange Methods 0.000 description 2
- YIXJRHPUWRPCBB-UHFFFAOYSA-N magnesium nitrate Chemical compound [Mg+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O YIXJRHPUWRPCBB-UHFFFAOYSA-N 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 2
- OTYBMLCTZGSZBG-UHFFFAOYSA-L potassium sulfate Chemical compound [K+].[K+].[O-]S([O-])(=O)=O OTYBMLCTZGSZBG-UHFFFAOYSA-L 0.000 description 2
- 229910052939 potassium sulfate Inorganic materials 0.000 description 2
- 235000011151 potassium sulphates Nutrition 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- VWDWKYIASSYTQR-UHFFFAOYSA-N sodium nitrate Chemical compound [Na+].[O-][N+]([O-])=O VWDWKYIASSYTQR-UHFFFAOYSA-N 0.000 description 2
- LLZRNZOLAXHGLL-UHFFFAOYSA-J titanic acid Chemical compound O[Ti](O)(O)O LLZRNZOLAXHGLL-UHFFFAOYSA-J 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 206010070834 Sensitisation Diseases 0.000 description 1
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical compound [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- -1 acetylene glycol Chemical compound 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 235000011132 calcium sulphate Nutrition 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000003841 chloride salts Chemical class 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 125000000332 coumarinyl group Chemical class O1C(=O)C(=CC2=CC=CC=C12)* 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- XPPKVPWEQAFLFU-UHFFFAOYSA-J diphosphate(4-) Chemical compound [O-]P([O-])(=O)OP([O-])([O-])=O XPPKVPWEQAFLFU-UHFFFAOYSA-J 0.000 description 1
- 235000011180 diphosphates Nutrition 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910001629 magnesium chloride Inorganic materials 0.000 description 1
- 229910052943 magnesium sulfate Inorganic materials 0.000 description 1
- 235000019341 magnesium sulphate Nutrition 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 125000000896 monocarboxylic acid group Chemical group 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 238000010979 pH adjustment Methods 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- 235000010333 potassium nitrate Nutrition 0.000 description 1
- 239000004323 potassium nitrate Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008313 sensitization Effects 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 235000019333 sodium laurylsulphate Nutrition 0.000 description 1
- 235000010344 sodium nitrate Nutrition 0.000 description 1
- 239000004317 sodium nitrate Substances 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- HDUMBHAAKGUHAR-UHFFFAOYSA-J titanium(4+);disulfate Chemical compound [Ti+4].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O HDUMBHAAKGUHAR-UHFFFAOYSA-J 0.000 description 1
- 238000004832 voltammetry Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/20—Light-sensitive devices
- H01G9/2004—Light-sensitive devices characterised by the electrolyte, e.g. comprising an organic electrolyte
- H01G9/2018—Light-sensitive devices characterised by the electrolyte, e.g. comprising an organic electrolyte characterised by the ionic charge transport species, e.g. redox shuttles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/20—Light-sensitive devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/20—Light-sensitive devices
- H01G9/2027—Light-sensitive devices comprising an oxide semiconductor electrode
- H01G9/2031—Light-sensitive devices comprising an oxide semiconductor electrode comprising titanium oxide, e.g. TiO2
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D9/00—Electrolytic coating other than with metals
- C25D9/04—Electrolytic coating other than with metals with inorganic materials
- C25D9/08—Electrolytic coating other than with metals with inorganic materials by cathodic processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/0029—Processes of manufacture
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/542—Dye sensitized solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Electrochemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Photovoltaic Devices (AREA)
- Hybrid Cells (AREA)
Abstract
本發明係提供:依序具有透光性電極層、N型半導體層、P型半導體層及反電極層的濕式或固態式染料敏化太陽電池之成為透光性電極層與N型半導體層的積層體的新穎製造方法。上述方法係在含有Ti成分的處理液中,藉由將成為上述透光性電極層的構件施行陰極極化,在上述構件上形成成為上述N型半導體層的氧化鈦層。
Description
本發明係關於積層體之製造方法及染料敏化太陽電池之製造方法。
習知已知有染料敏化太陽電池(參照專利文獻1)。
染料敏化太陽電池係有濕式或固態式的染料敏化太陽電池,例如依序具有透光性電極層、N型半導體層、P型半導體層及反電極層。
[先前技術文獻]
[專利文獻]
[專利文獻1]日本專利特開2005-108807號公報
如上述,染料敏化太陽電池係有濕式或固態式的染料敏化太陽
電池,例如依序具有透光性電極層、N型半導體層、P型半導體層及反電極層。
本發明目的在於提供:製造此種染料敏化太陽電池之成為透光性電極層與N型半導體層的積層體的新穎方法。
本案發明人等經深入鑽研,結果發現藉由採用下述構成,可達成上述目的,遂完成本發明。
即,本發明係提供以下的[1]~[5]。
[1]一種積層體之製造方法,係依序具有透光性電極層、N型半導體層、P型半導體層及反電極層的濕式或固態式染料敏化太陽電池之成為上述透光性電極層及上述N型半導體層的積層體的製造方法;係在含有Ti成分的處理液中,藉由將成為上述透光性電極層的構件施行陰極極化,而在上述構件上形成成為上述N型半導體層的氧化鈦層。
[2]如上述[1]所記載的積層體之製造方法,其中,上述處理液中的Ti含有量係0.004mol/L以上且1.300mol/L以下。
[3]如上述[1]或[2]所記載的積層體之製造方法,其中,上述Ti成分係從六氟鈦酸、六氟鈦酸鉀、六氟鈦酸鈉、六氟鈦酸銨、草酸氧鈦銨、草酸氧鈦鉀二水合物、硫酸鈦及乳酸鈦所構成群組中選擇之至少1種。
[4]如上述[1]~[3]中任一項所記載的積層體之製造方法,其中,將成為上述透光性電極層的構件設為陰極,依0.01A/dm2以上且未
滿1.00A/dm2的電流密度通電。
[5]一種染料敏化太陽電池之製造方法,係使用依上述[1]~[4]中任一項所記載的積層體之製造方法所獲得之積層體,製造依序具有透光性電極層、N型半導體層、P型半導體層及反電極層的濕式或固態式染料敏化太陽電池。
根據本發明可提供:製造染料敏化太陽電池之成為透光性電極層與N型半導體層的積層體的新穎方法。
[染料敏化太陽電池]
首先,針對染料敏化太陽電池進行說明。
染料敏化太陽電池係濕式或固態式的染料敏化太陽電池,例如依序具有透光性電極層、N型半導體層、P型半導體層及反電極層。
各層的厚度等係可適當設定。
透光性電極層係可舉例如:ITO(Indium Tin Oxide)膜、FTO(Fluorine-doped Tin Oxide)膜等導電性金屬氧化物的膜。透光性電極層亦可配置於例如:玻璃基板、樹脂薄膜等透明性基板上。
N型半導體層係可舉例如:含有已吸附色素之氧化鈦(TiO2)的氧化鈦層。色素係可舉例如:Ru系色素、香豆素系色素等。
P型半導體層的材料係可舉例如:CuI。
反電極層係可舉例如:ITO電極層、FTO電極層等。
[積層體之製造方法]
本發明的積層體之製造方法,概略而言係製造上述染料敏化太陽電池中成為透光性電極層與N型半導體層的積層體的方法。
更詳言之,在含有Ti成分的處理液中,將成為透光性電極層的構件施行陰極極化。即,將成為透光性電極層的構件設為陰極並通電。藉此,在成為透光性電極層的構件上形成成為N型半導體層的氧化鈦層。另外,反電極係適用白金電極等不溶性電極。
推測氧化鈦層係依如下形成。首先,於成為透光性電極層的構件的表面,隨氫生成而pH上升。結果,例如在處理液中的Ti成分係六氟鈦酸及/或其鹽的情況,處理液中的六氟鈦酸離子將一邊脫F、一邊生成氫氧化鈦。該氫氧化鈦附著於成為透光性電極層的構件的表面,經由後續的藉由洗淨、乾燥等進行脫水縮合,而形成氧化鈦層。但,此以外的機制亦隸屬本發明範圍內。
成為透光性電極層的構件較佳係具有導電性的構件,例如:ITO膜、FTO膜等導電性金屬氧化物之膜。
成為透光性電極層的構件亦可配置於玻璃基板、樹脂薄膜等透明性基板上。在此情況下,則將具有成為透光性電極層的構件的透明性基板(例如具有ITO膜之玻璃基板)施行陰極極化。在此情況,所獲得積層體亦更進一步具有此透明性基板。
處理液係含有用於對所形成之氧化鈦層供應Ti(鈦元素)的Ti成分(Ti化合物)。
Ti成分較佳係從六氟鈦酸(H2TiF6)、六氟鈦酸鉀(K2TiF6)、六氟鈦酸鈉(Na2TiF6)、六氟鈦酸銨((NH4)2TiF6)、草酸氧鈦銨((NH4)2[TiO(C2O4)2])、草酸氧鈦鉀二水合物(K2[TiO(C2O4)2]‧2H2O)、硫酸鈦(Ti(SO4)2)、及乳酸鈦(Ti(OH)2[OCH(CH3)COOH]2)所構成群組中選擇之至少1種。
該等之中,從處理液安定性、取得容易性等觀點而言,較佳係六氟鈦酸及/或其鹽(六氟鈦酸鉀、六氟鈦酸鈉、六氟鈦酸銨)。
處理液中的Ti含有量較佳係0.004mol/L以上、更佳係0.010mol/L以上、特佳係0.020mol/L以上。
另一方面,處理液中的Ti含有量較佳係1.300mol/L以下、更佳係1.000mol/L以下、又更佳係0.700mol/L以下、特佳係0.300mol/L以下、最佳係0.150mol/L以下。
處理液的溶劑係使用水。
處理液的pH並無特別的限定,例如pH2.0~5.0。pH調整時可使用公知的酸成分(例如:磷酸、硫酸等)、或鹼成分(例如:氫氧化鈉、氨水等)。
處理液中,視需要亦可含有:月桂基硫酸鈉、乙炔二醇等界面活性劑。從附著行為的經時安定性的觀點而言,在處理液中亦可含有焦磷酸鹽等縮合磷酸鹽。
處理液的液溫較佳係20~80℃、更佳係40~60℃。
處理液亦可更進一步含有傳導助劑。
傳導助劑係可舉例如:硫酸鉀、硫酸鈉、硫酸鎂、硫酸鈣等硫酸鹽;硝酸鉀、硝酸鈉、硝酸鎂、硝酸鈣等硝酸鹽;氯化鉀、氯化鈉、氯化鎂、氯化鈣等氯化物鹽等。
處理液中的傳導助劑含有量,較佳係0.010~1.000mol/L、更佳係0.020~0.500mol/L。
施行陰極極化時的電流密度較佳係0.01A/dm2以上、更佳係0.10A/dm2以上、特佳係0.20A/dm2以上。
另一方面,施行陰極極化時的電流密度較佳係未滿1.00A/dm2、更佳係0.80A/dm2以下、特佳係0.60A/dm2以下。
通電時間係可適當設定,例如5~60秒、較佳係10~40秒。
經陰極極化後,亦可施行水洗。
水洗的方法並無特別的限定,可舉例如:在陰極極化後浸漬於水中的方法等。水洗時所使用水的溫度(水溫)較佳係40~90℃。
水洗時間較佳係超過0.5秒、更佳係1.0~5.0秒。
再者,亦可取代水洗、或經水洗後,施行乾燥。乾燥時的溫度與方式並無特別的限定,可應用例如使用普通乾燥機或電爐的乾燥方式。乾燥溫度較佳係100℃以下。
[染料敏化太陽電池之製造方法]
本發明的染料敏化太陽電池之製造方法,係使用依上述本發明
積層體之製造方法所獲得的積層體,製造依序具有透光性電極層、N型半導體層、P型半導體層及反電極層的濕式或固態式染料敏化太陽電池之方法。
例如,首先將依照本發明積層體之製造方法所獲得的積層體,浸漬於含有Ru系等色素的溶液中,使色素吸附於構成積層體之氧化鈦層的氧化鈦,以氧化鈦層作為N型半導體層。
其次,在N型半導體層上,依序形成P型半導體層與反電極層。例如:在N型半導體層上滴下CuI溶液,而形成P型半導體層,再於所形成的P型半導體層上,配置ITO電極層等,作成反電極層。
形成各層的方法並不侷限於此等方法,亦可適當使用習知公知方法。
[實施例]
以下,列舉實施例針對本發明進行具體說明。惟,本發明並不侷限於以下實施例。
<成為透光性電極層的構件之準備>
準備在玻璃基板(30mm×35mm、厚度0.7mm)之一面上,利用濺鍍積層了ITO(Indium Tin Oxide)膜的具有ITO膜之玻璃基板(Ideal Star公司製)。將該具有ITO膜之玻璃基板使用為具有成為透光性電極層之構件的透明性基板。
<成為透光性電極層與N型半導體層的積層體之製作>
使用所準備的具有ITO膜之玻璃基板(具有成為透光性電極層
之構件的透明性基板),如下述製作成為透光性電極層與N型半導體層的積層體。
首先,調製含有0.040mol/L六氟鈦酸鉀(K2TiF6)與0.10mol/L硫酸鉀(K2SO4),且經利用氫氧化鉀調整pH4.0的處理液(以下簡稱「處理液」)。
其次,將所準備的具有ITO膜之玻璃基板,浸漬於將Semi Clean M4(橫濱油脂工業公司製)藉離子交換水稀釋20倍的洗淨液中,施行10分鐘超音波洗淨。然後,從洗淨液中取出具有ITO膜之玻璃基板,浸漬於離子交換水中,施行10分鐘超音波洗淨。
將經洗淨的具有ITO膜之玻璃基板浸漬於所調製的處理液(液溫:50℃)中。在處理液中,將具有ITO膜之玻璃基板,依電流密度0.40A/dm2、通電時間20秒的條件施行陰極極化。然後,在25℃水槽中浸漬2.0秒鐘而施行水洗後,使用鼓風機於室溫中施行乾燥。藉此,在具有ITO膜之玻璃基板之ITO膜上,依厚度約50nm形成成為N型半導體層的氧化鈦層。依此,製得已形成氧化鈦層的具有ITO膜之玻璃基板(成為透光性電極層與N型半導體層的積層體)。
<染料敏化太陽電池之製作>
使用所製作的積層體,依如下述製作染料敏化太陽電池。
首先,使Ru錯合物(Aldrich公司製)依2.8×10-4mol/L濃度溶解於氯仿中,而準備Ru錯合物溶液。在所準備的Ru錯合物溶液中,將已形成氧化鈦層的具有ITO膜之玻璃基板浸漬30小時,然後施行乾燥。依此,於氧化鈦層所含有的氧化鈦,使由Ru錯合物所構
成的色素(Ru系色素)吸附。依此,以氧化鈦層作為N型半導體層。
接著,在已吸附Ru系色素的氧化鈦層(N型半導體層)上,滴下CuI溶液,而形成P型半導體層。
進而在P型半導體層上,配置成為反電極層的ITO電極層(30mm×35mm)。
依此,製作在玻璃基板之一面上,依序積層著:ITO膜(透光性電極層)、已吸附色素的氧化鈦層(N型半導體層)、P型半導體層及ITO電極層(反電極層)的固態式染料敏化太陽電池。
<染料敏化太陽電池之評價>
針對所製作的染料敏化太陽電池,依大氣中密封狀態施行下述評價。
使用模擬太陽光光源裝置(SAN-EI Electric公司製、XES-502S),將具有AM1.5G光譜分佈、且具有100mW/cm2光強度的模擬太陽光,,從ITO膜側照射至染料敏化太陽電池。在此狀態下,使用線性掃描伏安(LSV)測定裝置(Hokuto Denko公司製、HZ-5000),測定染料敏化太陽電池的光電流-電壓分佈。
由該分佈計算出短路電流(絕對值、Jsc):8.27mA/cm2、開路電壓(Voc):0.545V、曲線因子(FF):0.57、及能量轉換效率(PCE):2.56%。
Claims (5)
- 一種積層體之製造方法,係依序具有透光性電極層、N型半導體層、P型半導體層及反電極層的濕式或固態式染料敏化太陽電池之成為上述透光性電極層及上述N型半導體層的積層體的製造方法;係在含有Ti成分的處理液中,藉由將成為上述透光性電極層的構件施行陰極極化,而在上述構件上形成成為上述N型半導體層的氧化鈦層。
- 如請求項1之積層體之製造方法,其中,上述處理液中的Ti含有量係0.004mol/L以上且1.300mol/L以下。
- 如請求項1或2之積層體之製造方法,其中,上述Ti成分係從六氟鈦酸、六氟鈦酸鉀、六氟鈦酸鈉、六氟鈦酸銨、草酸氧鈦銨、草酸氧鈦鉀二水合物、硫酸鈦及乳酸鈦所構成群組中選擇之至少1種。
- 如請求項1至3中任一項之積層體之製造方法,其中,將上述成為透光性電極層的構件作為陰極,依0.01A/dm2以上且未滿1.00A/dm2的電流密度通電。
- 一種染料敏化太陽電池之製造方法,係使用依請求項1至4中任一項之積層體之製造方法所獲得的積層體,製造依序具有透光性電極層、N型半導體層、P型半導體層及反電極層的濕式或固態式染料敏化太陽電池。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018-232755 | 2018-12-12 | ||
JP2018232755 | 2018-12-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202036925A true TW202036925A (zh) | 2020-10-01 |
TWI776106B TWI776106B (zh) | 2022-09-01 |
Family
ID=71076359
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW108145358A TWI776106B (zh) | 2018-12-12 | 2019-12-11 | 積層體之製造方法及染料敏化太陽電池之製造方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US11594381B2 (zh) |
EP (1) | EP3896752A4 (zh) |
JP (1) | JP6897871B2 (zh) |
KR (1) | KR102574035B1 (zh) |
CN (1) | CN113243053A (zh) |
TW (1) | TWI776106B (zh) |
WO (1) | WO2020122019A1 (zh) |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004253331A (ja) * | 2003-02-21 | 2004-09-09 | Central Glass Co Ltd | 半導体電極膜の改質方法 |
JP4875837B2 (ja) | 2003-06-30 | 2012-02-15 | 株式会社イデアルスター | 固体型色素増感素子、及びその製造方法 |
JP4583025B2 (ja) | 2003-12-18 | 2010-11-17 | Jx日鉱日石エネルギー株式会社 | ナノアレイ電極の製造方法およびそれを用いた光電変換素子 |
JP2005243498A (ja) * | 2004-02-27 | 2005-09-08 | Hitachi Metals Ltd | 酸化物半導体電極の製造方法および色素増感型太陽電池の製造方法 |
US7871502B2 (en) * | 2004-05-11 | 2011-01-18 | Honda Motor Co., Ltd. | Method for manufacturing chalcopyrite thin-film solar cell |
JP2006073488A (ja) * | 2004-09-06 | 2006-03-16 | Erekuseru Kk | 色素増感太陽電池及びその製造方法 |
WO2010050575A1 (ja) * | 2008-10-29 | 2010-05-06 | 富士フイルム株式会社 | 色素、これを用いた光電変換素子、光電気化学電池、および色素の製造方法 |
US20100269894A1 (en) | 2009-04-28 | 2010-10-28 | Board Of Regents Of The Nevada System Of Higher Education, On Behalf Of The University Of Nevada | Titanium dioxide nanotubes and their use in photovoltaic devices |
DE102009035238A1 (de) * | 2009-07-29 | 2011-02-10 | Behr Gmbh & Co. Kg | Solarkollektor und Verfahren zur Herstellung einer lichtabsorbierenden Oberfläche |
GB201020209D0 (en) | 2010-11-29 | 2011-01-12 | Isis Innovation | Device |
US20130327386A1 (en) * | 2012-06-11 | 2013-12-12 | Tao Xu | Three-dimensional photovoltaic device |
JP6361629B2 (ja) | 2015-10-29 | 2018-07-25 | Jfeスチール株式会社 | 容器用鋼板の製造方法および容器用鋼板の製造装置 |
WO2018225861A1 (ja) | 2017-06-09 | 2018-12-13 | Jfeスチール株式会社 | 多層構造体および多層構造体の製造方法 |
-
2019
- 2019-12-09 US US17/294,823 patent/US11594381B2/en active Active
- 2019-12-09 JP JP2020516933A patent/JP6897871B2/ja active Active
- 2019-12-09 CN CN201980081300.8A patent/CN113243053A/zh active Pending
- 2019-12-09 KR KR1020217017043A patent/KR102574035B1/ko active IP Right Grant
- 2019-12-09 EP EP19896508.9A patent/EP3896752A4/en active Pending
- 2019-12-09 WO PCT/JP2019/048096 patent/WO2020122019A1/ja unknown
- 2019-12-11 TW TW108145358A patent/TWI776106B/zh active
Also Published As
Publication number | Publication date |
---|---|
JP6897871B2 (ja) | 2021-07-07 |
EP3896752A4 (en) | 2022-03-09 |
KR102574035B1 (ko) | 2023-09-01 |
US20210407738A1 (en) | 2021-12-30 |
JPWO2020122019A1 (ja) | 2021-02-15 |
EP3896752A1 (en) | 2021-10-20 |
KR20210089708A (ko) | 2021-07-16 |
WO2020122019A1 (ja) | 2020-06-18 |
US11594381B2 (en) | 2023-02-28 |
CN113243053A (zh) | 2021-08-10 |
TWI776106B (zh) | 2022-09-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Liang et al. | Photocathode-assisted redox flow desalination | |
El Tayyan | Dye sensitized solar cell: parameters calculation and model integration | |
CN105386061A (zh) | Bi2S3/TiO2纳米棒复合膜光阳极的制备方法 | |
Shin et al. | Strategic approach for frustrating charge recombination of perovskite solar cells in low-intensity indoor light: insertion of polar small molecules at the interface of the electron transport layer | |
TWI776106B (zh) | 積層體之製造方法及染料敏化太陽電池之製造方法 | |
Xi-Zhe et al. | Recombination reduction in dye-sensitized solar cells by screen-printed TiO2 underlayers | |
JP2008243754A (ja) | 光電変換電極及びその製造方法、並びに色素増感型太陽電池 | |
CN103219565B (zh) | 逆光电化学电池 | |
KR20180121480A (ko) | 광전기분해 디바이스를 위한 광전캐소드, 이러한 광전캐소드를 생산하는 방법, 및 광전기분해 디바이스 | |
TWI717144B (zh) | 積層體、有機薄膜太陽電池、積層體之製造方法及有機薄膜太陽電池之製造方法 | |
TWI719752B (zh) | 積層體之製造方法及鈣鈦礦型太陽電池之製造方法 | |
CN111326603A (zh) | 一种以氧化锌做电子传输层的无机钙钛矿电池制备方法 | |
TWI383511B (zh) | 可撓式染料敏化太陽能電池之電化學製造方法 | |
JP5051511B2 (ja) | 色素増感型太陽電池用電極 | |
KR20220052100A (ko) | 태양광 물분해 장치 | |
TWI383529B (zh) | And a method for producing an electrode having a platinum film | |
CN110400910A (zh) | 一种杂多配合物/钌配合物电聚合薄膜的制备及其光电性能 | |
TW202119667A (zh) | 積層體、有機薄膜太陽電池、積層體之製造方法及有機薄膜太陽電池之製造方法 | |
Sato et al. | Chemical bias coupled photoelectrochemical zero bias hydrogen generation utilizing self-assembled TiO2 nanoarchitecture electrode | |
JP2021064739A (ja) | 光活性層及びその製造方法 | |
CN114085043A (zh) | 用于光电阴极保护的复合膜及其制备方法和应用 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4A | Issue of patent certificate for granted invention patent |