TW202036179A - Double-workpiece-table flexible winding tape exposure device and exposure method - Google Patents

Abstract

The invention provides a double-workpiece-table flexible winding tape exposure device and exposure method. When two workpiece tables are positioned in an exposure area and a measurement area respectively, measurement and exposure can be synchronously performed on the flexible winding tape; after the measurement and exposure are completed, the two workpiece tables move to switch the working areas; a control module controls a photomask adjusting module to adjust a photomask according to the alignment data and/or focal plane measurement data of the measurement module in the moving process of the workpiece tables, and controls the exposure module to perform exposure on the flexible winding tape after the flexible winding tape in the measurement area arrives at the exposure area. According to the exposure device, a double-workpiece-table parallel mode is adopted; when the flexible winding tape on the workpiece table of the measurement area is subjected to alignment and/or focal plane measurement, synchronous exposure is carried out on the flexible winding tape on the workpiece table of the exposure area, and in the process of switching the working areas, adjustment of the photomask is completed, the double-workpiece tables are used for processing the flexible winding tape at the same time, so that the time is reasonably utilized, the time consumption of the exposure process is shortened, and the productivity is improved.

Description

Double-workpiece stage flexible tape exposure device and exposure method

The present invention relates to the technical field of photolithography, in particular to a dual-workpiece stage flexible tape exposure device and an exposure method.

The thin-film circuit substrates made of flexible tapes are widely used in mobile phones, liquid crystal screens, smart cards and other fields. The process of making a thin-film circuit substrate from a tape-shaped flexible tape usually includes: the step of coating a photoresist on the tape-shaped flexible tape, the step of exposing and developing the pattern on the photomask to the photoresist, and the step of applying the photoresist to the photoresist. The pattern is transferred to the etching step on the flexible tape. The strip-shaped flexible reel is usually wound on a reel. In each step, the strip-shaped flexible reel is reeled from the reel to the corresponding work table, processed accordingly, and then wound on the reel again after the processing is completed.

At present, there is only one workpiece stage used in the exposure step. During the exposure process, the belt-shaped flexible web is first moved to the workpiece table, and then the belt-shaped flexible web is aligned and/or measured. Position and/or measured data adjust the work stage to adjust the focus of the belt-shaped flexible web to ensure that the belt-shaped flexible web is adjusted to a suitable exposure state, and then use the exposure module to Reel for exposure. It can be seen that this exposure method is to sequentially perform alignment measurement, focus adjustment and exposure on a strip-shaped flexible web. After the strip-shaped flexible web is exposed, the next strip-shaped flexible web can be measured and focused. And exposure, until the exposure of all strip-shaped flexible rolls is completed. That is, this exposure method adopts the mode of alignment measurement, focus adjustment, and exposure sequence, which takes a long time and results in low productivity, which is not conducive to mass production.

The object of the present invention is to provide a dual-workpiece-stage flexible tape-reel exposure device and an exposure method, which can reduce the process time of the exposure step and increase the productivity.

In order to solve the above-mentioned technical problems, the present invention provides a dual-workpiece-stage flexible tape web exposure device, including:

Two workpiece tables are used to carry flexible tapes;

At least one exposure module, each of the exposure modules corresponds to an exposure zone, each of the workpiece stages can be moved to the exposure zone, the exposure module includes an illumination unit, a mask stage and an objective lens unit, the The illuminating unit emits a light beam, and the light beam passes through the mask and the objective lens unit carried on the masking table, and then irradiates the flexible web carried by the workpiece table in the exposure area for exposure;

At least two measurement modules, the two measurement modules respectively correspond to two measurement areas, the two workpiece tables can respectively move to the two measurement areas, and each measurement module is used to correspond to it Performing alignment measurement and/or focal plane measurement on the flexible web carried on the workpiece table in the measurement zone;

Two transfer modules, the two transfer modules respectively correspond to the two workpiece stages, and each transfer module is used to transfer the flexible web to its corresponding workpiece stage;

The two workpiece tables can be respectively located in the exposure area and the measurement area to simultaneously perform measurement and exposure on the flexible webs in different positions; the two workpiece tables can be moved to be in the exposure area and the measurement area Switch; according to the measurement results obtained by each of the workpiece stages in the measurement area, when the workpiece stage is exposed in the exposure area, the carried flexible tape is within the focal depth range of the objective lens unit and/or can be realized Exposure alignment.

Optionally, a first alignment mark is provided on the flexible web;

Each of the measurement modules includes: a first light source, an alignment mark unit, a bearing platform for carrying the alignment mark unit, and a first image acquisition unit, and the alignment mark unit is provided with A second alignment mark corresponding to the first alignment mark;

The first light source is used to provide alignment light, which irradiates the second alignment mark and the first alignment mark in sequence and is reflected by the flexible web on the measurement area, reflecting the light Passing through the alignment mark unit to the first image acquisition unit to obtain alignment data.

Optionally, each of the measurement modules further includes: a second light source, a projection lens unit, a detection mirror unit, and a second image acquisition unit. The second light source is used to provide measurement light that passes through the The projection lens unit irradiates the surface of the flexible web on the measurement area and is reflected, and the reflected light passes through the detection lens unit and then reaches the second image acquisition unit to obtain focal plane measurement data.

Optionally, the dual-stage flexible tape-reel exposure device further includes:

The mask adjustment module is used to adjust the mask according to the measurement result of the measurement module so that the flexible web of the exposure area is within the focal depth range of the objective lens unit.

Optionally, the dual-stage flexible tape-reel exposure device further includes:

The control module is connected to the measurement module, the photomask adjustment module, and the transmission module respectively, and is used to control the photomask adjustment module to adjust the photomask according to the measurement result of the measurement module. The mask is used to make the flexible web of the exposure area within the focal depth range of the objective lens unit.

Optionally, the dual-stage flexible web exposure device further includes an angular displacement sensor for acquiring tilt data of the flexible web, and the control module is used for The measurement result of the measurement module and the tilt data control the mask adjustment module to adjust the mask so that the flexible web of the exposure area is within the focal depth range of the objective lens unit.

Optionally, the photomask adjustment module includes a first photomask adjustment unit and a second photomask adjustment unit, and the first photomask adjustment unit adjusts the photomask along the vertical direction according to the focal plane measurement data. The direction of the surface of the workpiece table is moved, and the second mask adjustment unit adjusts the mask to move in a plane parallel to the surface of the workpiece table according to the alignment data.

Optionally, the first mask adjustment unit includes: a first displacement sensor and at least one first adjustment unit, the first adjustment unit includes a first motor and a screw, and the first motor is used to drive the The screw moves in a direction perpendicular to the surface of the workpiece table, thereby driving the photomask fixed on the photomask table to move, and the first displacement sensor is used to obtain the displacement data of the photomask table.

Optionally, the second mask adjustment unit includes: a second displacement sensor and at least two second adjustment units, the second adjustment unit includes a second motor, a cam, and an elastic element, the second motor It is used to drive the cam to rotate so that the elastic element drives the photomask table to move, so that the photomask fixed on the photomask table moves in a plane parallel to the surface of the workpiece table.

Optionally, the transfer module includes: an unwinding roll, a first intermediate guide roll, a second intermediate guide roll, and a rewinding roll. The control module is also used to control the flexible web from the unwinding roll. The roll is transferred out, introduced into the work piece table via the first intermediate guide roll, and is introduced to the rewinding roll via the second intermediate guide roll after being driven on the work table.

Optionally, the dual-stage flexible tape-reel exposure device further includes:

The workpiece table driving module includes a guide rail, a third motor and a guide rod. The two workpiece tables are both arranged on the guide rail, and the two transmission modules corresponding to each of the workpiece tables are connected by the guide rod, The third motor is used to drive each of the workpiece stages to move on the guide rail, and to make the transfer module corresponding to each of the workpiece stages move synchronously along the guide rod.

Optionally, a buckle is provided on the guide rod, and the position of the buckle corresponds to the position of the exposure zone. When the workpiece stage moves to the exposure zone, the workpiece stage corresponds to the The transmission module is fixed on the guide rod at a position corresponding to the exposure area by the buckle.

Optionally, the dual-stage flexible tape-reel exposure device further includes:

The workpiece stage adjustment module is used for adjusting the workpiece stage according to the measurement result of the measurement module so that the flexible web of the exposure area is within the focal depth range of the objective lens unit.

Optionally, the dual-stage flexible tape-reel exposure device further includes:

The control module is signally connected to the measurement module, the workpiece stage adjustment module, and the transmission module, and the control module is used to control the workpiece stage adjustment mold according to the measurement result of the measurement module The group adjusts the work stage so that the flexible web of the exposure area is within the focal depth range of the objective lens unit.

Optionally, the workpiece table adjustment module is used to adjust the workpiece table to move in a direction perpendicular to the surface of the workpiece table according to the focal plane measurement data, and the workpiece table adjustment module is also used to adjust the workpiece table according to the The alignment data adjusts the movement of the workpiece table in a plane parallel to the surface of the workpiece table.

Optionally, two measurement modules and one exposure module are provided on the same side of the workpiece table.

Optionally, the dual-workpiece-stage flexible tape-reel exposure device includes two exposure devices and four measurement modules, and the four measurement modules face each other up and down to form two sets of measurement modules. The two sets of measurement modules correspond to the two measurement areas respectively, and the two exposure modules form a set of exposure modules facing up and down and correspond to one of the exposure areas.

Optionally, the two exposure modules are located on the upper and lower sides of the exposure area and are aligned with each other, and the two exposure modules on the upper and lower sides can achieve consistent exposure of the front and back sides of the flexible web at the same position Sex.

Optionally, the workpiece table has a frame structure or a plate structure.

Optionally, the workpiece table is a rectangular frame, and a pressure plate is provided at the corner of the rectangular frame, and the pressure plate is used to fix the flexible tape.

The present invention also provides a dual-workpiece stage flexible tape exposure method, which includes the following steps:

The two workpiece stages are respectively located in the exposure area and the measurement area, and the measurement module performs alignment measurement and/or focal plane measurement on the flexible tape in the measurement area to obtain alignment data and/or For focal plane measurement data, the illumination unit emits a light beam, and the light beam passes through the mask and the objective lens unit and is irradiated on the flexible web of the exposure area for exposure, so that the flexible web located in the exposure area The belt performs exposure, while the flexible web located in the measurement area performs measurement;

When the measurement and exposure are completed, the two workpiece stages move to switch between the measurement zone and the exposure zone and replace the exposed flexible tape, and the flexible roll carried by the workpiece stage in the exposure zone Before belt exposure, according to the measurement results obtained by the workpiece stage in the measurement area, when the workpiece stage is exposed in the exposure area, the carried flexible tape is within the focal depth range of the objective lens unit and/or can be achieved Exposure alignment.

Optionally, when the exposure, alignment measurement and/or focal plane measurement are completed, the flexible web is fixed by vacuum adsorption, and a pressure plate is provided on the surface of the flexible web to prevent the flexible web from moving; when the flexible web is transferred, the The flexible tape loosens.

Optionally, after the flexible web located in the measurement area completes the measurement and the flexible web located in the exposure area completes the exposure, the workpiece stage located in the exposure area moves to the idle measurement area, located in the The workpiece stage in the measurement area is moved to the exposure area to switch the working areas, and after switching the working areas, the exposed flexible tape on the workpiece stage in the measurement area is replaced and replaced with a new flexible tape.

Optionally, before exposing the first flexible tape subunit, it further includes:

Fix the first flexible web on a workpiece table located in the measurement area to perform alignment measurement and/or focal plane measurement. After the first flexible web completes the alignment measurement and/or focal plane measurement, The workpiece stage is moved from the measurement area to the exposure area, and during the movement of the workpiece stage, the photomask is adjusted according to the measurement result of the first flexible web to make the first flexible web After the belt subsequently reaches the exposure zone, it is within the focal depth range of the objective lens unit;

Wherein, after the first flexible web reaches the exposure area, the first flexible web is exposed, and at the same time, the flexible web on another workpiece table in the measurement area is aligned Measurement and/or focal plane measurement.

Optionally, a first alignment mark is provided on the flexible web; the measurement module includes: a first light source, an alignment mark unit, a bearing platform for carrying the alignment mark unit, and a first image An image acquisition unit, the alignment mark unit is provided with a second alignment mark corresponding to the first alignment mark;

The process of obtaining the alignment data includes:

The first light source provides alignment light, which irradiates the second alignment mark and the first alignment mark in sequence and is reflected by the flexible web on the measurement area, and the reflected light passes through From the alignment marking unit to the first image acquisition unit to obtain alignment data;

According to the alignment data, the photomask and/or the workpiece table are adjusted to move in a plane parallel to the surface of the workpiece table to achieve exposure alignment.

Optionally, the measurement module further includes: a second light source, a projection mirror unit, a detection mirror unit, and a second image acquisition unit;

The process of obtaining focal plane measurement data includes:

The second light source provides measurement light, which is irradiated by the projection lens unit to the surface of the flexible web on the measurement area and reflected, and the reflected light reaches the second image after passing through the detection mirror unit Image acquisition unit to obtain focal plane measurement data;

Adjust the reticle or/and the workpiece table to move in a direction perpendicular to the surface of the workpiece table according to the focal plane measurement data, so that the flexible web of the exposure area is in the focal depth range of the objective lens unit Inside.

Optionally, the dual-stage flexible web exposure method is used for single-sided exposure of the flexible web.

Optionally, the dual-stage flexible web exposure method is used for double-sided exposure of the flexible web.

In the dual-workpiece stage flexible tape exposure device and exposure method provided by the present invention, when the two work piece stages are respectively located in the exposure area and the measurement area, measurement and exposure can be performed on the flexible tape simultaneously to complete the measurement and exposure After that, the two workpiece stages move to switch the working area. During the movement of the workpiece stage, the control module controls the alignment data of the reticle adjustment module according to the alignment data and/or focal plane measurement data measured by the measurement module. The cover is adjusted, and after the flexible web in the measurement area reaches the exposure area, the exposure module is controlled to expose the flexible web in the exposure area. The present invention adopts the parallel mode of two workpiece stages. When the flexible tape on the workpiece stage in the measurement zone is used for alignment measurement and/or focal plane measurement, the flexible tape on the workpiece stage in the exposure zone is subjected to synchronous exposure. The adjustment of the mask is completed during the movement of the workpiece stage to switch the working area, and the double-workpiece stage processes the flexible tape at the same time, so that the time is reasonably used, the time-consuming of the exposure step is reduced, and the productivity is improved.

As mentioned in the background art, the traditional exposure method is to perform alignment measurement, focus adjustment, and exposure on a strip-shaped flexible web in sequence. After all the above steps are completed for a strip-shaped flexible web, the next strip-shaped flexible web Performing alignment measurement, focus adjustment, and exposure. This mode of alignment measurement, focus adjustment, and exposure sequence takes a long time and results in low productivity.

The present invention adopts the parallel mode of two workpiece stages. When the flexible tape on the workpiece stage in the measurement zone is used for alignment measurement and/or focal plane measurement, the flexible tape on the workpiece stage in the exposure zone is subjected to synchronous exposure. The adjustment of the mask is completed during the movement of the workpiece stage to switch the working area, and the double-workpiece stage processes the flexible tape at the same time, so that the time is reasonably used, the time-consuming of the exposure step is reduced, and the productivity is improved.

The double-work stage flexible tape exposure device and the exposure method proposed in this embodiment will be described in further detail below with reference to the accompanying drawings 1a to 8. According to the following description, the advantages and features of the present invention will be clearer. It should be noted that the drawings all adopt a very simplified form and all use imprecise proportions, which are only used for the purpose of conveniently and clearly assisting in describing the embodiments of the present invention.

The dual-stage flexible tape-reel exposure device can perform double-sided exposure to improve exposure efficiency. Figure 1a and Figure 1b are schematic diagrams of a dual-stage flexible tape exposure device that can perform double-sided exposure. As shown in Figure 1a and Figure 1b, this dual-stage flexible tape can perform double-sided exposure. The exposure device (also called a double-sided dual-workpiece stage flexible tape exposure device) includes: two workpiece stages 11, two transfer modules 61, four measurement modules 20, two exposure modules 30, Two mask adjustment modules 40, a work table driving module 01 and a control module 50. The control module 50 is respectively connected to the measurement module 20, the exposure module 30, the mask adjustment module 40, the workpiece table driving module 01, and the transmission module 61 in signal connection. Wherein, the four measurement modules 20 are opposed to each other up and down to form two sets of measurement modules 20, and the two exposure modules 30 form a set of exposure modules 30 that face up and down. The dual-stage flexible tape-reel exposure device includes two measurement areas 111 and one exposure area 112. Each measurement area 111 is located at a position corresponding to a group of the measurement modules 20; the exposure area 112 is located at a position corresponding to a group of the exposure modules 30. In a natural state, the two workpiece tables 11 are both located in the measurement area 111, both sides of each workpiece table 11 are aligned with one of the measurement modules 20, and the exposure area 112 is located in the two measurement areas. The distances between the measurement areas 111 and the distances between the two measurement areas 111 and the exposure area 112 are equal.

Each of the upper and lower sides of the measurement area 111 is provided with one of the measurement modules 20, and the upper and lower sides of the exposure area 112 are provided with one of the exposure modules 30 respectively. The exposure modules 30 on both sides of the exposure area 112 can be aligned with each other, and calibration can be achieved during regular maintenance, so that the exposure modules 30 on the upper and lower sides can expose the front and back sides of the flexible tape 80 at the same position during the production process. Consistency. In this embodiment, the dual-workpiece-stage flexible tape exposure device performs double-sided exposure of the flexible tape 80, and the measurement module 20 and the exposure module 30 located above the workpiece stage 11 realize the alignment and exposure of the front of the flexible tape 80 ; The measurement module 20 and the exposure module 30 located under the workpiece table 11 realize the alignment and exposure of the back of the flexible web 80.

As an example, the flexible web is a strip-shaped flexible web, and all the strip-shaped flexible webs to be exposed can be connected together in sequence to form a continuous elongated structure. The flexible web is, for example, a belt-shaped flexible web used to form a thin-film circuit board.

The workpiece table 11 adopts, for example, a frame structure, the belt-shaped flexible web is laid on the workpiece table 11, and the upper and lower surfaces of the belt-shaped flexible web are exposed. Specifically, the workpiece table 11 may be a rectangular frame. A cross beam can be set in the center of the rectangular frame to better support the flexible roll. A pressing plate 90 can also be provided at the corners of the rectangular frame, and the flexible web can be further fixed by the pressing plate 90 to prevent the flexible web from moving. The number of the pressing plates 90 is, for example, six, which are distributed at the four corners of the rectangular frame and the junction between the beam and the rectangular frame.

As an example, each of the workpiece tables 11 corresponds to a transfer module 61, and the transfer module 61 includes an unwinding roller 611, a first intermediate guide roller 612, a second intermediate guide roller 613, and a rewinding roller 611 arranged in parallel. Roller 614, the control module 50 controls the strip-shaped flexible web to be transmitted from the unwinding roller 611, introduced into the workpiece table via the intermediate guide roller 612, and then fixed 11, completing the steps of the corresponding station After being loosened, the belt-shaped flexible web is guided to the winding roller 614 through the second intermediate guide roller 613. Specifically, the edge of the belt-shaped flexible web can be provided with a hole count to control the conveying length of the flexible web. In other embodiments, a displacement sensor can also be provided to monitor the conveying length of the belt-shaped flexible web.

In this embodiment, the workpiece table driving module 01 includes a guide rail 011, a third motor 012, and a guide rod 013. The guide rail 011 is laid on the moving paths of the two workpiece tables 11, and the two workpiece tables 11 are all arranged on the guide rail 011, and the third motor 012 can drive the workpiece table 11 to move on the guide rail 011. Further, the unwinding roll 611 of the transfer module 61 corresponding to each workpiece table 11 is connected by the guide rod 013, and the winding roll 614 of the transfer module 61 corresponding to each workpiece table 11 also passes through the The guide rod 013 is connected so that when the third motor 012 drives the workpiece table 11 to move, the corresponding conveying module 61 can move stably together. Optionally, each guide rod 013 is provided with a buckle 014, and the position of the buckle 014 corresponds to the position of the exposure module 30. When the workpiece table 11 moves from the measurement area 111 After reaching the exposure area, the buckle 014 can secure the unwinding roller 611 and the rewinding roller 614 to prevent the workpiece table 11 from shifting during the exposure process.

As shown in Figures 2 to 4, the dual-workpiece-stage flexible web exposure device further includes a bearing platform 702 for bearing the alignment mark unit M2, and the alignment mark unit M2 is provided with the flexible web. The first alignment mark corresponds to the second alignment mark M21. The measurement module 20 includes a first light source 201 and a first image acquisition unit 202. Both the first light source 201 and the first image acquisition unit 202 are located at the alignment mark unit M2 away from the workpiece table. 11 side. The first light source 201 is used to provide alignment light, which sequentially irradiates the second alignment mark M21 and the first alignment mark on the flexible web on the measurement area 111 and Reflected by the flexible web on the measurement area 111, the reflected light passes through the alignment mark unit M2 to the first image acquisition unit 202 to obtain alignment data.

The measurement module 20 also includes a second light source 203, a projection lens unit 204, a detection mirror unit 205, and a second image acquisition unit 206. The second light source 203 provides measurement light for focal plane measurement. The light is reflected by the projection mirror unit 204 to the surface of the flexible web on the measurement area 111, and the reflected light passes through the detection mirror unit 205 and then reaches the second image acquisition unit 206 to obtain focal plane measurement data. The focal plane measurement data is, for example, focal plane test data.

As shown in FIGS. 5 and 6, the mask adjustment module 40 includes a first mask adjustment unit 41 and a second mask adjustment unit 42.

As shown in FIG. 5, the first mask adjusting unit 41 adjusts the mask M1 on the mask stage 701 to move in a direction perpendicular to the surface of the workpiece stage 11. The first mask adjustment unit 41 includes a first displacement sensor 413 and at least one first adjustment unit. The first adjustment unit includes a first motor 411 and a screw 412. The first motor 411 drives the screw 412 to Move up and down in a direction perpendicular to the surface of the workpiece table 11, thereby driving the mask M1 fixed on the mask table 701 to move up and down in a direction perpendicular to the surface of the workpiece table 11. The first displacement The sensor 413 is used to detect the movement of the mask stage 701 in a direction perpendicular to the surface of the workpiece stage 11, and the first displacement sensor 413 is, for example, a grating ruler. Preferably, the first mask adjustment unit 41 includes two first adjustment units, which are installed on both sides of the mask stage 701 respectively.

As shown in FIG. 6, the second mask adjustment unit 42 is used to adjust the movement of the mask stage 701 in a plane parallel to the surface of the workpiece stage 11. The second mask adjustment unit 42 includes a second displacement sensor 424 and at least two second adjustment units. The mask stage 701 is, for example, rectangular, and each of the second adjustment units is installed on the mask stage 701. When there are two second adjustment units, they are installed on the opposite corner of the mask stage 701. When there are three second adjustment units, they are installed on any three corners of the mask stage 701. Each of the second adjustment units includes a second motor 421, a cam 422 and an elastic element 423. The second motor 421 drives the cam 422 to rotate so that the elastic element 423 drives the mask stage 701 to move, so that The mask M1 fixed on the mask table 701 moves in a plane parallel to the surface of the workpiece table 11, for example, rotates. The elastic element 423 is, for example, a spring, which acts as an elastic support. Specifically, each cam 422 is connected to the mask stage 701 through two elastic elements 423 distributed on both sides of the corner of the mask stage 701. When the cam 422 rotates, one of the elastic elements 423 is compressed, and the other The elastic element 423 stretches to drive the mask stage 701 to rotate. The second displacement sensor 424 detects displacements in two mutually perpendicular directions (X direction and Y direction) in a plane parallel to the surface of the workpiece table 11, so as to obtain rotation accuracy. The mask stage 701 is, for example, a rectangle, and adjacent rectangular sides are respectively arranged along the X direction and the Y direction. The displacement sensor 424 is, for example, a grating ruler.

1a, the exposure module 30 includes: a third light source 301, a mask stage 701, and a projection lens 302, the mask stage 701 is located between the third light source 301 and the projection lens 302 , The photomask M1 is fixed on the photomask stage 701. The direction of the optical axis of the third light source 301 is perpendicular to the surface of the moving workpiece table 11, and the workpiece table 11 is usually arranged horizontally. Therefore, the optical axis direction of the third light source 301 is usually a vertical direction. The third light source 301 is used to provide exposure light, which irradiates the mask M1 on the mask stage 701, and focuses the light on the flexible roll of the exposure zone 112 through the projection lens 302 Exposure is performed on the tape, more specifically, focusing on the photoresist on the surface of the flexible web to be exposed. The light gathering point is the focal point, the focal point is the point where the best image appears after being focused by the projection lens 302, the horizontal plane where the focal point is located is the focal plane, and the depth of focus (DOF) is the upper limit on both sides of the focal plane that can keep the focused image clear The distance from the plane to the lower limit plane. In the photolithography process, the focus may not be exactly in the middle of the upper and lower surfaces of the photoresist, but the upper and lower surfaces of the photoresist are within the depth of focus (DOF), so that the entire thickness of the photoresist within the exposure range can be imaged clearly.

In this embodiment, by adjusting the mask M1 to move in a direction perpendicular to the surface of the workpiece table 11, the upper and lower surfaces of the photoresist on the surface of the flexible web on the exposure area 112 are all exposed to light passing through the mask table. The photomask M1 on the 701 reaches the depth of focus (DOF) range where the projection lens 302 focuses light, so that the photoresist on the surface of the flexible web on the exposure area 112 is continuously and clearly exposed.

In this embodiment, the two workpiece tables 11 move back and forth between the measurement area 111 and the exposure area 112 during the entire exposure process. For example, in FIG. 1b, the workpiece table 11 on the left is at the measurement area 111 on the left. Move to the right to reach the exposure area 112 in the middle, and after the exposure is completed, move to the left to return to the measurement area 111 on the left. The control module 50 is used to control the exposure module 30 to expose the flexible web on the exposure area 112, and at the same time control the measurement module 20 to align the flexible web on the measurement area 111 and/or Measurement (only when the workpiece stage 11 exists in the measurement area 111, the corresponding measurement module 20 will perform measurement. Similarly, only when the workpiece stage 11 exists in the exposure area 112, the exposure module 30 will perform exposure); and Control the switching of the working areas of the two workpiece stages 11 (that is, control each workpiece stage 11 to switch between the measurement area 111 and the exposure area 112). After each measurement and exposure, the transfer module 61 is controlled to The exposed flexible web on the exposure area 112 is replaced and replaced with a new flexible web. During the transmission process, the control module 50 according to the alignment data and/or focal plane of the flexible web The measurement data controls the photomask adjustment module 40 to adjust the photomask M1; and controls the exposure module 30 to perform exposure after the flexible web on the measurement area 111 reaches the exposure area 112, and at the same time The measurement module 20 is controlled to perform alignment measurement and/or focal plane measurement on the flexible web on the measurement area 111.

It should be understood that for the first flexible web, fix the first flexible web on any of the workpiece tables 11 for alignment measurement and/or focal plane measurement. After the alignment measurement and/or focal plane measurement is completed, the The first flexible web is moved from the measurement area 111 to the exposure area 112. During the movement of the workpiece table 11, the control module 50 is based on the alignment data and/or of the first flexible web. The focal plane measurement data controls the mask adjustment module 40 to adjust the mask M1; after the first flexible web reaches the exposure zone 112, the control module 50 controls the exposure module 30 to The first flexible web is exposed, and at the same time, the measurement module 20 is controlled to perform alignment measurement and/or measurement on the flexible web on the other measurement area 111.

When the exposure, alignment measurement, and/or focal plane measurement are completed, the flexible web 80 is fixed by vacuum suction, and the surface of the flexible web 80 is provided with a pressure plate 90 to prevent the flexible web from moving; when the flexible web 80 is transferred, the The flexible web 80 is loosened.

The focal plane test data and the alignment data obtained by the measurement module 20 undergo coordinate conversion by the control module 50, so that the second alignment mark M21 on the alignment mark unit M2 is The marks on the mask M1 correspond and match precisely, and the control module 50 matches the corresponding focal plane compensation data and alignment deviation compensation data according to the focal plane test data and the alignment data to control the mask adjustment module The group 40 adjusts the mask stage 701. Since the mask M1 is fixed on the mask stage 701, the mask M1 is finally adjusted by the mask adjustment module 40. The mask M1 on the mask stage 701 is adjusted by the first mask adjustment unit 41 to move in a direction perpendicular to the surface of the workpiece stage 11, so that the flexible web on the exposure zone 112 is at the focal depth ( DOF) can be clearly exposed within the range. The second mask adjustment unit 42 adjusts the mask stage 701 to rotate in a plane parallel to the surface of the workpiece stage 11, so that the exposure process is accurately aligned. In other embodiments of the present application, the dual-workpiece stage flexible reel exposure device may also include: a work piece stage adjustment module for adjusting the work piece stage 11 according to the measurement result of the measurement module 20 so that The flexible web of the exposure zone 112 is within the focal depth range of the objective lens unit. Wherein, the workpiece stage adjustment module and the first mask adjustment unit 41 can be used alternatively.

Further, the flexible web 80 may be inclined during the conveying process (for example, the edges on both sides of the flexible web in the conveying direction are not perpendicular to the axis of the first middle guide roller 612, and are offset). The angular displacement sensor may be used. Measure and obtain tilt data of flexible tape. At this time, it is necessary to convert the tilt data through the control module 50 for coordinate conversion. The control module 50 integrates the focal plane measurement data (for example, focal plane test data), alignment data, and tilt data to match the corresponding compensation data control The mask adjustment module 40 adjusts the mask M1. The error of the adjustment of the mask M1 in a plane parallel to the surface of the workpiece table 11 includes the deviation caused by the misalignment during the alignment and the tilt deviation of the flexible web during the conveying process. The control module 50 adjusts the mask stage 701 to rotate in a plane parallel to the surface of the workpiece stage 11 through the second mask adjustment unit 42 so that the exposure process is accurately aligned. The control module 50 adjusts the mask M1 on the mask stage 701 through the first mask adjustment unit 41 to move in the direction perpendicular to the surface of the workpiece stage 11, so that the flexible tape on the exposure area 112 Clear exposure in the depth of focus (DOF) range.

It should be understood that this type of double-sided dual-stage flexible tape-reel exposure device can actually perform single-sided exposure. Only the measurement module 20, the exposure module 30, and the mask adjustment module 40 on the same side above or below the workpiece stage 11 may be used. That is to say, the dual-stage flexible tape-reel exposure device can also be a device that can only perform single-sided exposure, so as to simplify the machine structure and reduce equipment manufacturing costs. Figure 7 is a schematic structural diagram of a dual-stage flexible tape exposure device that can perform single-sided exposure. As shown in Figure 7, this dual-stage flexible tape exposure device that can only perform single-sided exposure (also It is called a single-sided dual-workpiece stage flexible tape exposure device), which includes two measurement modules 20, one exposure module 30, and one mask adjustment module 40, all of which are located on the workpiece The same side of station 11. In this embodiment, the double-workpiece flexible tape web exposure device exposes the flexible tape 80 on one side. The work table 11 of the single-sided double work table flexible tape web exposure device can adopt a flat structure or a frame structure.

Based on this, this embodiment also provides a dual-stage flexible reel exposure method, as shown in Figures 1a and 8, the method is based on a dual-stage flexible reel exposure device, and the exposure process includes:

The control module 50 controls one of the workpiece stages 11 to move to the exposure zone 112, and the other of the workpiece stages 11 to move to the measurement zone 111, and the two workpiece stages are respectively located in the exposure zone 112 and the After the measurement area 111, the exposure module 30 is controlled to expose the flexible web on the exposure area 112, and the control module 50 synchronously controls the measurement module 20 corresponding to another workpiece table 11 to Perform alignment measurement and/or measurement on the flexible tape in the measurement area 111;

After the flexible web on the workpiece table 11 in the exposure zone 112 is exposed and the flexible web on the workpiece table 11 in the measurement zone 111 is measured, the control module 50 controls the workpiece table to drive The unit 01 drives the two workpiece tables 11 to move synchronously, moves the workpiece table 11 in the exposure area 112 to the (idle) measurement area 111, and moves the workpiece table 11 in the measurement area 111 to the In the exposure zone 112, at this time, the transfer module 61 replaces the exposed flexible web and replaces it with a new flexible web. The two workpiece tables 11 move synchronously, and the control module 50 moves according to The alignment data and/or focal plane measurement data of the flexible tape control the mask adjustment module 40 to adjust the mask M1. After the two workpiece stages 11 have switched the working areas, the control module 50 again controls the measurement module 20 and the exposure module 30 to perform measurement and exposure simultaneously.

Further, before exposing the first flexible tape, it also includes:

Fix the first flexible web on one of the workpiece tables 11. After the first flexible web is aligned and/or measured, place the workpiece table 11 corresponding to the first flexible web on the workpiece table 11 The measurement area 111 moves to the exposure area 112, and the control module 50 controls the mask adjustment module according to the alignment data and/or focal plane measurement data of the first flexible web during the transmission process. Group 40 adjusts the mask M1;

Wherein, after the first flexible web reaches the exposure zone 112, the control module 50 controls the exposure module 30 to expose the first flexible web and at the same time controls the measurement module 20 Align and/or measure the flexible tape on the other workpiece table.

As shown in Figures 1a and 2, the measurement module 20 includes a first light source 201 and a first image acquisition unit 202; the process of obtaining the alignment data includes: the first light source 201 provides alignment light, The alignment light is sequentially irradiated to the second alignment mark M21 and the first alignment mark and is reflected by the flexible web on the measurement area. The reflected light passes through the alignment mark unit M2 to the The first image acquisition unit 202 obtains alignment data; the control module 50 controls the mask adjustment module 40 to adjust the mask stage 701 according to the alignment data of the latter flexible tape The upper mask M1 moves in a plane parallel to the surface of the workpiece table 11.

The measurement module 20 further includes: a second light source 203, a projection lens unit 204, a detection mirror unit 205, and a second image acquisition unit 206; the process of obtaining focal plane measurement data includes: the second light source 203 is used to provide Measuring light, the measuring light is irradiated by the projection lens unit 204 to the surface of the flexible web on the measurement area 111 and is reflected, and the reflected light passes through the detection mirror unit 205 to the second image acquisition unit 206 to obtain focal plane measurement data; the control module 50 controls the mask adjustment module 40 to adjust the mask M1 on the mask stage 701 according to the focal plane measurement data of the latter flexible web Move in a direction perpendicular to the surface of the workpiece table 11.

As shown in FIGS. 1a and 5, the photomask adjustment module 40 includes a first photomask adjustment unit 41, and the first photomask adjustment unit 41 includes: a first displacement sensor 413 and at least one first adjustment unit. Unit, the first adjustment unit includes a first motor 411 and a screw 412. The first motor 411 is used to drive the screw 412 to move in a direction perpendicular to the surface of the workpiece table 11, thereby driving the The mask M1 on the mask stage 701 moves, and the first displacement sensor 413 is used to obtain the displacement data of the mask stage 701.

As shown in FIGS. 1a and 6, the photomask adjustment module 40 further includes a second photomask adjustment unit 42, and the second photomask adjustment unit 42 includes a second displacement sensor 424 and at least two second displacement sensors. Two adjustment units. The second adjustment unit includes a second motor 421, a cam 422, and an elastic element 423. The second motor 421 is used to drive the cam 422 to rotate so that the elastic element 423 drives the mask stage 701 moves, so that the mask M1 fixed on the mask stage 701 moves in a plane parallel to the surface of the workpiece stage 11.

As shown in Figure 1a, the flexible web 80 is a belt-shaped flexible web, and the transfer module 61 includes a parallel unwinding roller 611, a first intermediate guide roller 612, a second intermediate guide roller 613 and a rewinding roller. Roll 614; the control module 50 controls the flexible web 80 to be transmitted from the unwinding roll 611, and is guided into the workpiece table 11 via the first intermediate guide roller 612 and fixed; the flexible web When 80 passes out of the exposure area 112, it enters the winding roller 614 through the second middle guide roller guide 613.

As shown in FIG. 1a, the exposure module 30 includes a third light source 301, a mask stage 701, and a projection lens 302, the mask stage 701 is located between the third light source 301 and the projection lens 302, The exposure process includes: the third light source 301 provides exposure light, the exposure light irradiates the mask M1 on the mask stage 701, and is focused on the exposure area 112 by the projection lens 302 On the flexible tape for exposure.

Continuing as shown in FIG. 1a, each of the measurement areas 111 is provided with a measurement module 20 on both sides (upper and lower), and the exposure area 112 is provided with an exposure module on both sides (up and down). Group 30 and one mask adjustment module 40, the two measurement modules 20 on both sides of the measurement area 111 and the two exposure modules 30 on both sides of the exposure area 112 are directly opposite to each other; The exposure method is used for double-sided exposure of the flexible web.

As shown in FIG. 7, two measurement modules 20 are provided on the same side (of the workpiece table 11) (that is, one measurement module 20 is provided on the same side of the two measurement areas 111), one The exposure module 30 and one mask adjustment module 40 are used for single-sided exposure of the flexible web.

Finally, the present invention switches the work area through the dual-workpiece stage, and while exposing the exposure area, the measurement area is measured for alignment and/or focal plane measurement. The two-workpiece stage is performed in parallel; the dual-workpiece stage moves to In the process of switching the work area, the adjustment of the photomask is completed, and the dual work stage processes the flexible tape at the same time, so that the time is rationally used, the process time of the exposure step is reduced, and the productivity is increased.

The various embodiments in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments, and the same or similar parts between the various embodiments can be referred to each other. For the method disclosed in the embodiment, since it corresponds to the device disclosed in the embodiment, the description is relatively simple, and the relevant part can be referred to the description of the device.

The above description is only a description of the preferred embodiments of the present invention, and does not limit the scope of the present invention. Any changes or modifications made by a person of ordinary skill in the field of the present invention based on the above disclosure shall fall within the protection scope of the patent application.

11: Workpiece table 111: measurement area 112: Exposure area M1: Mask M2: registration mark unit M21: The second alignment mark 20: Measurement module 201: The first light source 202: The first image acquisition unit 203: second light source 204: Projection mirror unit 205: Detecting mirror unit 206: The second image acquisition unit 30: Exposure module 301: third light source 302: Projection lens 40: Mask adjustment module 41: The first mask adjustment unit 411: First Motor 412: Screw 413: first displacement sensor sensor 42: The second mask adjustment unit 421: Second Motor 422: Cam 423: elastic element 424: second displacement sensor 50: control module 61: Transmission module 611: Unwind Roll 612: first intermediate guide roll 613: second intermediate guide roll 614: Rewind 701: Mask Stage 702: Carrier 80: Flexible tape and reel 90: pressure plate 01: Workpiece table drive module 011: Rail 012: Third Motor 013: guide rod 014: buckle

Figure 1a is a schematic structural diagram of a dual-stage flexible tape web exposure device capable of double-sided exposure according to an embodiment of the present invention; FIG. 1b is another structural schematic diagram of a dual-stage flexible tape web exposure device capable of double-sided exposure according to an embodiment of the present invention; 2 is a schematic structural view of a measurement module in a dual-workpiece-stage flexible tape web exposure device provided by an embodiment of the present invention; 3 is a schematic diagram of the alignment measurement process of the measurement module in the dual-workpiece-stage flexible tape web exposure device provided by the embodiment of the present invention; 4 is a schematic diagram of the focal plane measurement process of the measurement module of the dual-workpiece stage flexible web exposure device provided by an embodiment of the present invention; FIG. 5 is a schematic structural diagram of a first mask adjustment unit of a dual-stage flexible tape web exposure device according to an embodiment of the present invention; 6 is a schematic structural view of a second mask adjustment unit of a dual-workpiece stage flexible tape web exposure device provided by an embodiment of the present invention; FIG. 7 is a schematic structural view of a dual-work stage flexible tape-reel exposure device capable of single-sided exposure provided by an embodiment of the present invention; Fig. 8 is a schematic flow chart of a double-workpiece stage flexible tape exposure method provided by an embodiment of the present invention

11: Workpiece table

111: measurement area

112: Exposure area

M1: Mask

20: Measurement module

30: Exposure module

301: third light source

302: Projection lens

40: Mask adjustment module

61: Transmission module

611: Unwind Roll

612: first intermediate guide roll

613: second intermediate guide roll

614: Rewind

701: Mask Stage

80: Flexible tape

90: pressure plate

01: Workpiece table drive module

011: Rail

012: Third Motor

013: guide rod

014: buckle

Claims (28)

A dual-stage flexible tape-reel exposure device is characterized in that it comprises: Two workpiece tables are used to carry flexible tapes; At least one exposure module, each of the exposure modules corresponds to an exposure zone, each of the workpiece stages can be moved to the exposure zone, the exposure module includes an illumination unit, a mask stage and an objective lens unit, the The illuminating unit emits a light beam, and the light beam passes through the mask and the objective lens unit carried on the masking table, and then irradiates the flexible web carried by the workpiece table in the exposure area for exposure; At least two measurement modules, the two measurement modules respectively correspond to two measurement areas, the two workpiece tables can respectively move to the two measurement areas, and each measurement module is used to correspond to it Performing alignment measurement and/or focal plane measurement on the flexible web carried on the workpiece table in the measurement zone; Two transfer modules, the two transfer modules respectively correspond to the two workpiece stages, and each transfer module is used to transfer the flexible web to its corresponding workpiece stage; The two workpiece tables can be respectively located in the exposure area and the measurement area to simultaneously perform measurement and exposure on the flexible webs in different positions; the two workpiece tables can be moved to be in the exposure area and the measurement area Switch; according to the measurement results obtained by each of the workpiece stages in the measurement area, when the workpiece stage is exposed in the exposure area, the carried flexible tape is within the focal depth range of the objective lens unit and/or can be realized Exposure alignment. The dual-workpiece-stage flexible tape exposure device according to claim 1, wherein a first alignment mark is provided on the flexible tape; Each of the measurement modules includes: a first light source, an alignment mark unit, a bearing platform for carrying the alignment mark unit, and a first image acquisition unit, and the alignment mark unit is provided with A second alignment mark corresponding to the first alignment mark; The first light source is used to provide alignment light, which irradiates the second alignment mark and the first alignment mark in sequence and is reflected by the flexible web on the measurement area, reflecting the light Passing through the alignment mark unit to the first image acquisition unit to obtain alignment data. The dual-workpiece stage flexible tape exposure device according to claim 2, wherein each of the measurement modules further includes: a second light source, a projection lens unit, a detection mirror unit, and a second image acquisition unit. The two light sources are used to provide measurement light, which is irradiated by the projection lens unit to the surface of the flexible web on the measurement area and reflected, and the reflected light reaches the second image after passing through the detection mirror unit Acquire unit to obtain focal plane measurement data. The dual-stage flexible tape-reel exposure device according to claim 3, wherein the dual-stage flexible tape-reel exposure device further includes: The mask adjustment module is used to adjust the mask according to the measurement result of the measurement module so that the flexible web of the exposure area is within the focal depth range of the objective lens unit. The dual-stage flexible tape-reel exposure device according to claim 4, wherein the dual-stage flexible tape-reel exposure device further includes: The control module is connected to the measurement module, the photomask adjustment module, and the transmission module respectively, and is used to control the photomask adjustment module to adjust the photomask according to the measurement result of the measurement module. The mask is used to make the flexible web of the exposure area within the focal depth range of the objective lens unit. The dual-stage flexible web exposure device according to claim 5, wherein the dual-stage flexible web exposure device further includes an angular displacement sensor, and the angular displacement sensor is used to obtain the flexible web The tilt data of the belt, the control module is used to control the photomask adjustment module to adjust the photomask according to the measurement result of the measurement module and the tilt data so that the flexible tape in the exposure area is in Within the focal depth range of the objective lens unit. According to claim 4, the dual-stage flexible tape web exposure device, wherein the mask adjustment module includes a first mask adjustment unit and a second mask adjustment unit, and the first mask adjustment unit is based on The focal plane measurement data adjusts the photomask to move in a direction perpendicular to the surface of the workpiece table, and the second photomask adjustment unit adjusts the photomask to be parallel to the surface of the workpiece table according to the alignment data. Move in the plane. The dual-workpiece stage flexible tape exposure device according to claim 7, wherein the first mask adjustment unit includes: a first displacement sensor and at least one first adjustment unit, and the first adjustment unit includes a first A motor and a screw, the first motor is used to drive the screw to move in a direction perpendicular to the surface of the workpiece table, thereby driving the photomask fixed on the photomask table to move, the first displacement sense The detector is used to obtain the displacement data of the mask stage. The dual-workpiece stage flexible web exposure device according to claim 7, wherein the second mask adjustment unit includes: a second displacement sensor and at least two second adjustment units, the second adjustment unit including A second motor, a cam, and an elastic element. The second motor is used to drive the cam to rotate so that the elastic element drives the photomask stage to move, so that the photomask fixed on the photomask stage is parallel Move in the plane of the surface of the workpiece table. The dual-workpiece stage flexible tape exposure device according to claim 5, wherein the conveying module includes: an unwinding roller, a first intermediate guide roller, a second intermediate guide roller, and a winding roller, and the control module It is also used to control the flexible web to be transmitted from the unwinding roll, introduced into the workpiece table via the first intermediate guide roller, and then guided to the workpiece table via the second intermediate guide roller after being driven on the workpiece table The rewinding rolls. The dual-stage flexible tape-reel exposure device according to claim 1, wherein the dual-stage flexible tape-reel exposure device further includes: The workpiece table driving module includes a guide rail, a third motor and a guide rod. The two workpiece tables are both arranged on the guide rail, and the two transmission modules corresponding to each of the workpiece tables are connected by the guide rod, The third motor is used to drive each of the workpiece stages to move on the guide rail, and to make the transfer module corresponding to each of the workpiece stages move synchronously along the guide rod. The dual-workpiece stage flexible tape-reel exposure device according to claim 11, wherein a buckle is provided on the guide rod, and the position of the buckle corresponds to the position of the exposure area, and when the workpiece stage moves to In the exposure area, the transfer module corresponding to the workpiece stage is fixed on the guide rod at a position corresponding to the exposure area by the buckle. The dual-stage flexible tape-reel exposure device according to claim 3, wherein the dual-stage flexible tape-reel exposure device further includes: The workpiece stage adjustment module is used for adjusting the workpiece stage according to the measurement result of the measurement module so that the flexible web of the exposure area is within the focal depth range of the objective lens unit. The dual-stage flexible tape-reel exposure device according to claim 13, wherein the dual-stage flexible tape-reel exposure device further includes: The control module is signally connected to the measurement module, the workpiece stage adjustment module, and the transmission module, and the control module is used to control the workpiece stage adjustment mold according to the measurement result of the measurement module The group adjusts the work stage so that the flexible web of the exposure area is within the focal depth range of the objective lens unit. The dual-workpiece stage flexible web exposure device according to claim 13, wherein the work piece stage adjustment module is used to adjust the work piece stage to move in a direction perpendicular to the surface of the work piece stage according to the focal plane measurement data The workpiece table adjustment module is also used to adjust the workpiece table to move in a plane parallel to the surface of the workpiece table according to the alignment data. The dual-workpiece stage flexible tape-reel exposure device according to claim 4 or 13, wherein two measurement modules and one exposure module are provided on the same side of the workpiece stage. The dual-stage flexible tape exposure device according to claim 4 or 13, wherein the dual-stage flexible tape exposure device includes two of the exposure devices and four of the measurement modules, and four The measurement modules face each other up and down to form two sets of measurement modules, the two sets of measurement modules respectively correspond to the two measurement areas, and the two exposure modules form a set of up and down exposure modules corresponding to one述Exposure area. The dual-stage flexible tape-reel exposure device according to claim 17, wherein two of the exposure modules are located on the upper and lower sides of the exposure area and aligned with each other, and the two exposure modules on the upper and lower sides It can achieve the consistency of the front and back exposure of the flexible web at the same position. The dual-workpiece stage flexible tape-reel exposure device according to claim 1, wherein the work piece stage has a frame structure or a plate structure. The dual-workpiece stage flexible tape exposure device according to claim 19, wherein the work piece stage is a rectangular frame, and a pressure plate is provided at the corner of the rectangular frame, and the pressure plate is used to fix the flexible tape. A dual-stage flexible reel exposure method using the dual-stage flexible reel exposure device according to any one of claims 1 to 20, characterized in that it comprises the following steps: The two workpiece stages are respectively located in the exposure area and the measurement area, and the measurement module performs alignment measurement and/or focal plane measurement on the flexible tape in the measurement area to obtain alignment data and/or For focal plane measurement data, the illumination unit emits a light beam, and the light beam passes through the mask and the objective lens unit and is irradiated on the flexible web of the exposure area for exposure, so that the flexible web located in the exposure area The belt performs exposure, while the flexible web located in the measurement area performs measurement; When the measurement and exposure are completed, the two workpiece stages move to switch between the measurement zone and the exposure zone and replace the exposed flexible tape, and the flexible roll carried by the workpiece stage in the exposure zone Before belt exposure, according to the measurement results obtained by the workpiece stage in the measurement area, when the workpiece stage is exposed in the exposure area, the carried flexible tape is within the focal depth range of the objective lens unit and/or can be achieved Exposure alignment. According to claim 21, the double-workpiece flexible tape exposure method, wherein the flexible tape is fixed by vacuum suction when the exposure, alignment measurement and/or focal plane measurement is completed, and a pressure plate is provided on the surface of the flexible tape to prevent flexibility The reel is moved; when the flexible reel is transferred, the flexible reel is released. The dual-stage flexible web exposure method according to claim 21, wherein after the flexible web located in the measurement area is measured and the flexible web located in the exposure area is exposed, the flexible web located in the exposure area The workpiece stage is moved to the idle measurement area, the workpiece stage located in the measurement area is moved to the exposure area to switch the work area, and after the work area is switched, the work stage located in the measurement area is exposed to the flexible The tape is replaced and replaced with a new flexible tape. The method for exposing a flexible tape with dual work stage as described in claim 23, wherein before exposing the first flexible tape subunit, the method further includes: Fix the first flexible web on a workpiece table located in the measurement area to perform alignment measurement and/or focal plane measurement. After the first flexible web completes the alignment measurement and/or focal plane measurement, The workpiece stage is moved from the measurement area to the exposure area, and during the movement of the workpiece stage, the photomask is adjusted according to the measurement result of the first flexible web to make the first flexible web After the belt subsequently reaches the exposure zone, it is within the focal depth range of the objective lens unit; Wherein, after the first flexible web reaches the exposure area, the first flexible web is exposed, and at the same time, the flexible web on another workpiece table in the measurement area is aligned Measurement and/or focal plane measurement. The dual-workpiece stage flexible web exposure method according to claim 21, wherein the flexible web is provided with a first alignment mark; the measurement module includes: a first light source, an alignment mark unit, and A bearing platform and a first image acquisition unit carrying the alignment mark unit, and a second alignment mark corresponding to the first alignment mark is provided on the alignment mark unit; The process of obtaining the alignment data includes: The first light source provides alignment light, which irradiates the second alignment mark and the first alignment mark in sequence and is reflected by the flexible web on the measurement area, and the reflected light passes through From the alignment marking unit to the first image acquisition unit to obtain alignment data; According to the alignment data, the photomask and/or the workpiece table are adjusted to move in a plane parallel to the surface of the workpiece table to achieve exposure alignment. The method for exposing a flexible tape with a dual work stage according to claim 25, wherein the measurement module further includes: a second light source, a projection lens unit, a detection mirror unit, and a second image acquisition unit; The process of obtaining focal plane measurement data includes: The second light source provides measurement light, which is irradiated by the projection lens unit to the surface of the flexible web on the measurement area and reflected, and the reflected light reaches the second image after passing through the detection mirror unit Image acquisition unit to obtain focal plane measurement data; Adjust the reticle or/and the workpiece table to move in a direction perpendicular to the surface of the workpiece table according to the focal plane measurement data, so that the flexible web of the exposure area is in the focal depth range of the objective lens unit Inside. The dual-stage flexible tape exposure method according to any one of claims 21 to 26, wherein the dual-stage flexible tape exposure method is used for single-sided exposure of the flexible tape. The dual-stage flexible tape exposure method according to any one of claims 21 to 26, wherein the dual-stage flexible tape exposure method is used for double-sided exposure of the flexible tape.

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