CN109343314A - A kind of exposure device for double-sided flexible circuit board - Google Patents
A kind of exposure device for double-sided flexible circuit board Download PDFInfo
- Publication number
- CN109343314A CN109343314A CN201811493304.0A CN201811493304A CN109343314A CN 109343314 A CN109343314 A CN 109343314A CN 201811493304 A CN201811493304 A CN 201811493304A CN 109343314 A CN109343314 A CN 109343314A
- Authority
- CN
- China
- Prior art keywords
- guide roller
- circuit board
- double
- flexible circuit
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005286 illumination Methods 0.000 claims 1
- 238000002864 sequence alignment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
- G03F7/2032—Simultaneous exposure of the front side and the backside
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The present invention provides a kind of exposure devices for double-sided flexible circuit board, its exposure efficiency that can greatly improve double-sided flexible circuit board, save the time, including being transversely arranged and several guide rollers arranged up and down, at least one described guide roller is connected with driving mechanism, the driving device is able to drive the guide roller rotation, double-sided flexible circuit board moves between the guide roller under guide roller drive, it is characterized by: alignment system is arranged in sequence in correspondence at wherein three guide rollers of sequence setting, first exposure system, second exposure system, first exposure system and the second exposure system are separately positioned on the two sides of the double-sided flexible circuit board, it is exposed for two surfaces to the double-sided flexible circuit board.
Description
Technical field
The present invention relates to a kind of exposure device, specially a kind of exposure device for double-sided flexible circuit board.
Background technique
It with the development of communication technology, is the use demand for meeting user, the function of mobile terminal is more and more diversified, gives
People's life brings great convenience.Wherein, since flexible circuit board is compared with printed circuit board, have weight lighter, soft
Softness is higher, assembles working hour section, the smaller characteristic of volume reinforces device group in a limited space to obtain lighter product
It fills, raising assembly efficiency, in mobile terminal, replaces PCB, especially double-sided flex circuit using flexible circuit board in many places
The use of plate more has wide practical use.
Exposure device is a kind of equipment that must be used in flexible circuit board production process, is substantially carried out route production, right
For double-sided flexible circuit board, need to require on two surface to carry out route production, currently on the market the direct write of mainstream
Formula exposure machine is scanned exposure in a manner of single work stage mostly, after the completion of will being first exposed the face the A exposure of workpiece, then is turned over
Version, is then exposed the face B.In single workpiece table system, the upper plate of the substrate for exposure, alignment, exposure, lower plate be according to
Secondary progress.According to current structural system, each operating process has reached the time-consuming upper limit, is difficult to shorten some operation again
The operating time of step, i.e., the write-through exposure machine of single work stage have been difficult to improve again due to the serial nature of each operating process
Production capacity, flexible circuit board are limited by its characteristic, and exposure efficiency is low.
Summary of the invention
In view of the above-mentioned problems, the present invention provides a kind of exposure device for double-sided flexible circuit board, it can be significantly
The exposure efficiency of double-sided flexible circuit board is improved, the time is saved.
Its technical solution is such that a kind of exposure device for double-sided flexible circuit board, including be transversely arranged and
Several guide rollers arranged up and down, at least one described guide roller are connected with driving mechanism, and the driving device is able to drive institute
Guide roller rotation is stated, double-sided flexible circuit board moves between the guide roller under guide roller drive, it is characterised in that:
Alignment system, the first exposure system, the second exposure system is arranged in sequence in correspondence at wherein three guide rollers of sequence setting,
First exposure system and the second exposure system are separately positioned on the two sides of the double-sided flexible circuit board, for described double
Two surfaces of face flexible circuit board are exposed.
Further, first exposure system, the second exposure system respectively include exposure cameras, the alignment system packet
Include CCD camera, alignment camera lens and lighting source.
Further, the projection of the exposure cameras is practised physiognomy as curved surface, and the projection of the alignment camera lens is practised physiognomy as curved surface, institute
Radian of the radian of curved surface respectively with the flexible circuit board on the guide roller is stated to match.
Further, the guide roller includes the first guide roller of sequence setting, the second guide roller, third guide roller, institute
It states the first guide roller and the downside of the double-sided flexible circuit board is arranged in for the third guide roller and second guide roller is set
It sets in the upside of the double-sided flexible circuit board, the surface of first guide roller is equipped with the alignment system, and described second
Guide roller is arranged right below first exposure system, and the surface of the third guide roller is equipped with second exposure system
The upper of the double-sided flexible circuit board at the first guide roller described in face is arranged in system, the alignment mirror of the alignment system upside down
Surface, the exposure cameras of first exposure system are arranged the lower surface of double-sided flexible circuit board described in face upward, and described
The upper surface of double-sided flexible circuit board described in face is arranged in the exposure cameras of two exposure systems downward.
Further, the guide roller includes the first guide roller of sequence setting, the second guide roller, third guide roller, institute
It states the first guide roller and the upside of the double-sided flexible circuit board is arranged in for the third guide roller and second guide roller is set
It sets in the downside of the double-sided flexible circuit board, first guide roller is arranged right below the alignment system, and described second
The surface of guide roller is equipped with first exposure system, and the third guide roller is arranged right below second exposure system
System, the alignment mirror of the alignment system are head-up arranged under the double-sided flexible circuit board at the first guide roller described in face
Surface, the exposure cameras of first exposure system are arranged the upper surface of double-sided flexible circuit board described in face downward, and described
The lower surface of double-sided flexible circuit board described in face is arranged in the exposure cameras of two exposure systems upward.
Further, it is provided with unwinding device on front side of the guide roller, the rear side positioned at the guide roller is arranged
There is wrap-up.
It further, further include help roll, the side of the guide roller is arranged in the help roll, for described two-sided
Flexible circuit board carries out auxiliary guiding.
Exposure device for double-sided flexible circuit board of the invention cooperates unwinding device and winding by setting guide roller
Device drives double-sided flexible circuit board mobile, while contraposition is respectively set at three guide rollers arranged up and down of sequence setting
System, the first exposure system, the second exposure system, alignment system are used to find the registration holes in double-sided flexible circuit board, expose
It is first completed to align before light, and the first exposure system, the second exposure system are separately positioned on the two sides of double-sided flexible circuit board,
To realize when guide roller drives double-sided flexible circuit board movement, first passes through alignment system and complete contraposition, can then pass through
Two surfaces that first exposure system, the second exposure system synchronously complete double-sided flexible circuit board are exposed production route, show
It writes and improves the mobile exposure efficiency of double-sided flexible circuit board, saved the time.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the exposure device for double-sided flexible circuit board of specific embodiment 1；
Fig. 2 is the structural schematic diagram of the exposure device for double-sided flexible circuit board of specific embodiment 2.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description.
Specific embodiment 1: being shown in Fig. 1, a kind of exposure device for double-sided flexible circuit board of the invention, including transversely
Setting and several guide rollers arranged up and down are provided only with a guide roller and are connected with driving mechanism as master in the present embodiment
Action-oriented roller, driving device are able to drive guide roller rotation, other guide rollers are driven guide roller, and double-sided flexible circuit board 1 exists
Guide roller moves between guide roller under driving, and unwinding device 2 is provided on front side of guide roller, positioned at the rear side of guide roller
It is provided with wrap-up 3；
Furthermore several guide rollers also can be set as active directive wheel and setting rotates synchronously, it can be according to specific requirements
Rationally it is provided as the quantity of the guide roller of active guide roller；
Specifically in the present embodiment, guide roller includes the first guide roller 4, the second guide roller 5, the third guiding of sequence setting
The downside of double-sided flexible circuit board 1 is arranged in roller 6, the first guide roller 4 and third guide roller 6 and the second guide roller 5 is arranged double
The surface of the upside of face flexible circuit board 1, the first guide roller 4 is equipped with alignment system 7, and the second guide roller 5 is arranged right below
The surface of first exposure system 8, third guide roller 6 is equipped with the second exposure system 9, the first exposure system 8, the second exposure system
9 respectively include exposure cameras 81,91, and alignment system 7 includes CCD camera, alignment camera lens 71 and lighting source, pair of alignment system
The upper surface 11 of the double-sided flexible circuit board at the first guide roller of face, the exposure of the first exposure system is arranged in quasi- camera lens 71 downward
The lower surface 12 of face double-sided flexible circuit board 1 is arranged in camera lens 81 upward, and the exposure cameras 91 of the second exposure system is arranged downward
The upper surface 11 of face double-sided flexible circuit board, the projection of exposure cameras 81,91 are practised physiognomy as curved surface, the projection phase of alignment camera lens 71
Face is curved surface, the radian for the curved surface that the projection of exposure cameras 81,91 the is practised physiognomy radian with the flexible circuit board 1 on guide roller respectively
Match；
In addition, in the present embodiment, help roll 10 is additionally provided in the side of guide roller, for double-sided flexible circuit board
1 carries out auxiliary guiding.
Specific embodiment 2: being shown in Fig. 2, a kind of exposure device for double-sided flexible circuit board of the invention, including transversely
Setting and several guide rollers arranged up and down, in the present embodiment, there are two guide rollers to be connected with driving mechanism as master for setting
Action-oriented roller, driving device can synchronous drive two guide rollers rotation, other guide rollers are driven guide roller, double-faced flexible electricity
Road plate 1 moves between guide roller under guide roller drive, and unwinding device 2 is provided on front side of guide roller, is located at guiding
Wrap-up 3 is provided on rear side of roller；
Specifically in the present embodiment, guide roller includes the first guide roller 4, the second guide roller 5, the third guiding of sequence setting
The upside of double-sided flexible circuit board 1 is arranged in roller 6, the first guide roller 4 and third guide roller 6 and the second guide roller 5 is arranged double
The surface of the downside of face flexible circuit board 1, the first guide roller 4 is equipped with alignment system 7, and the second guide roller 5 is arranged right below
The surface of first exposure system 8, third guide roller 6 is equipped with the second exposure system 9, the first exposure system 8, the second exposure system
9 respectively include exposure cameras 81,91, and alignment system 7 includes CCD camera, alignment camera lens 71 and lighting source, pair of alignment system
The lower surface 12 of the double-sided flexible circuit board at the first guide roller of face, the exposure of the first exposure system is arranged in quasi- camera lens 71 upward
The upper surface 12 of face double-sided flexible circuit board 1 is arranged in camera lens 81 downward, and the exposure cameras 91 of the second exposure system is arranged upward
The lower surface 11 of face double-sided flexible circuit board, the projection of exposure cameras 81,91 are practised physiognomy as curved surface, the projection phase of alignment camera lens 71
Face is curved surface, the radian for the curved surface that the projection of exposure cameras 81,91 the is practised physiognomy radian with the flexible circuit board 1 on guide roller respectively
Match；
In addition, in the present embodiment, help roll 10 is additionally provided in the side of guide roller, for double-sided flexible circuit board
1 carries out auxiliary guiding.
In above-mentioned specific embodiment 1 and specific embodiment 2, unwinding device and winding are all cooperated by setting guide roller
Device drives double-sided flexible circuit board mobile, at the same sequence setting and in being respectively set at three guide rollers arranged up and down
Alignment system, the first exposure system, the second exposure system, alignment system are used to find the registration holes in double-sided flexible circuit board,
It is first completed to align before exposure, and the first exposure system, the second exposure system are separately positioned on double-sided flexible circuit board
Two sides first pass through alignment system and complete contraposition to realize when guide roller drives double-sided flexible circuit board movement, then can be with
Production line is exposed by two surfaces that the first exposure system, the second exposure system synchronously complete double-sided flexible circuit board
Road has been obviously improved the mobile exposure efficiency of double-sided flexible circuit board, has saved the time, while also improving the degree of automation, this
The production method of the high the degree of automation of sample reduces manual operation intervention significantly, and uncontrollable factor is reduced, thus is had more
Even consistent and stable dimensional discrepancy, the double-sided flexible circuit board produced have higher product qualification rate, quality and can
By property.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims
Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (7)
1. a kind of exposure device for double-sided flexible circuit board, including transversely it is arranged and several guide rollers arranged up and down,
At least one described guide roller is connected with driving mechanism, and the driving device is able to drive the guide roller rotation, double-faced flexible
Circuit board moves between the guide roller under guide roller drive, it is characterised in that: wherein three institutes of sequence setting
State at guide roller it is corresponding be arranged in sequence alignment system, the first exposure system, the second exposure system, first exposure system and the
Two exposure systems are separately positioned on the two sides of the double-sided flexible circuit board, for two tables to the double-sided flexible circuit board
Face is exposed.
2. a kind of exposure device for double-sided flexible circuit board according to claim 1, it is characterised in that: described first
Exposure system, the second exposure system respectively include exposure cameras, and the alignment system includes CCD camera, alignment camera lens and illumination
Light source.
3. a kind of exposure device for double-sided flexible circuit board according to claim 2, it is characterised in that: the exposure
The projection of camera lens is practised physiognomy as curved surface, and the projection of the alignment camera lens is practised physiognomy as curved surface, and the radian of the curved surface is led with described respectively
The radian of double-sided flexible circuit board on roller matches.
4. a kind of exposure device for double-sided flexible circuit board according to claim 3, it is characterised in that: the guiding
Roller includes the first guide roller of sequence setting, the second guide roller, third guide roller, and first guide roller and the third are oriented to
The downside of the double-sided flexible circuit board is arranged in roller and the upper of the double-sided flexible circuit board is arranged in second guide roller
The surface of side, first guide roller is equipped with the alignment system, and second guide roller is arranged right below described first
The surface of exposure system, the third guide roller is equipped with second exposure system, the alignment camera lens court of the alignment system
The upper surface of the double-sided flexible circuit board at first guide roller described in lower setting face, the exposure of first exposure system
The lower surface of double-sided flexible circuit board described in face is arranged in camera lens upward, and the exposure cameras of second exposure system is arranged downward
The upper surface of double-sided flexible circuit board described in face.
5. a kind of exposure device for double-sided flexible circuit board according to claim 3, it is characterised in that: the guiding
Roller includes the first guide roller of sequence setting, the second guide roller, third guide roller, and first guide roller and the third are oriented to
The upside of the double-sided flexible circuit board is arranged in roller and second guide roller is arranged under the double-sided flexible circuit board
Side, first guide roller are arranged right below the alignment system, and the surface of second guide roller is equipped with described first
Exposure system, the third guide roller are arranged right below second exposure system, the alignment camera lens court of the alignment system
The lower surface of the double-sided flexible circuit board at first guide roller described in upper setting face, the exposure of first exposure system
The upper surface of double-sided flexible circuit board described in face is arranged in camera lens downward, and the exposure cameras of second exposure system is arranged upward
The lower surface of double-sided flexible circuit board described in face.
6. a kind of exposure device for double-sided flexible circuit board according to claim 1, it is characterised in that: be located at described
It is provided with unwinding device on front side of guide roller, is provided with wrap-up on rear side of the guide roller.
7. a kind of exposure device for double-sided flexible circuit board according to claim 1, it is characterised in that: further include auxiliary
Roller is helped, the side of the guide roller is arranged in the help roll, for carrying out auxiliary guiding to the double-sided flexible circuit board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811493304.0A CN109343314B (en) | 2018-12-07 | 2018-12-07 | Exposure device for double-sided flexible circuit board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811493304.0A CN109343314B (en) | 2018-12-07 | 2018-12-07 | Exposure device for double-sided flexible circuit board |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109343314A true CN109343314A (en) | 2019-02-15 |
| CN109343314B CN109343314B (en) | 2024-06-25 |
Family
ID=65302865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811493304.0A Active CN109343314B (en) | 2018-12-07 | 2018-12-07 | Exposure device for double-sided flexible circuit board |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109343314B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109856925A (en) * | 2019-03-22 | 2019-06-07 | 上海微电子装备（集团）股份有限公司 | Double-workpiece-table flexibility winding exposure device and exposure method |
| CN109884861A (en) * | 2019-03-26 | 2019-06-14 | 中山新诺科技股份有限公司 | A kind of flexible board double-sided laser direct write digitized exposure machine |
| WO2020192115A1 (en) * | 2019-03-22 | 2020-10-01 | 上海微电子装备（集团）股份有限公司 | Multi-station flexible tape exposure device and exposure method |
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| US20090279057A1 (en) * | 2008-05-07 | 2009-11-12 | Protec Co., Ltd. | Independent upper side and lower side drive type double-sided simultaneous exposure system |
| CN202904224U (en) * | 2012-11-09 | 2013-04-24 | 川宝科技股份有限公司 | Double-sided light-sensitive circuit board alignment device for exposure machine |
| CN103383532A (en) * | 2013-07-05 | 2013-11-06 | 福州瑞华印制线路板有限公司 | Circuit alignment method of semi-automatic exposure machine |
| CN204031606U (en) * | 2014-06-24 | 2014-12-17 | 上海英内电子标签有限公司 | A kind of aluminium etching flexible circuit board continuous production device |
| CN105607430A (en) * | 2015-12-30 | 2016-05-25 | 深圳市鑫富宝科技有限公司 | Automatic exposure machine for flexible printed circuit board |
| CN209297101U (en) * | 2018-12-07 | 2019-08-23 | 苏州源卓光电科技有限公司 | A kind of exposure device for double-sided flexible circuit board |
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2018
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| US20090279057A1 (en) * | 2008-05-07 | 2009-11-12 | Protec Co., Ltd. | Independent upper side and lower side drive type double-sided simultaneous exposure system |
| CN202904224U (en) * | 2012-11-09 | 2013-04-24 | 川宝科技股份有限公司 | Double-sided light-sensitive circuit board alignment device for exposure machine |
| CN103383532A (en) * | 2013-07-05 | 2013-11-06 | 福州瑞华印制线路板有限公司 | Circuit alignment method of semi-automatic exposure machine |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109856925A (en) * | 2019-03-22 | 2019-06-07 | 上海微电子装备（集团）股份有限公司 | Double-workpiece-table flexibility winding exposure device and exposure method |
| CN109856925B (en) * | 2019-03-22 | 2020-01-24 | 上海微电子装备（集团）股份有限公司 | Double-workpiece-table flexible tape exposure device and exposure method |
| WO2020192115A1 (en) * | 2019-03-22 | 2020-10-01 | 上海微电子装备（集团）股份有限公司 | Multi-station flexible tape exposure device and exposure method |
| TWI728534B (en) * | 2019-03-22 | 2021-05-21 | 大陸商上海微電子裝備（集團）股份有限公司 | Multi-station flexible tape exposure device and exposure method |
| CN109884861A (en) * | 2019-03-26 | 2019-06-14 | 中山新诺科技股份有限公司 | A kind of flexible board double-sided laser direct write digitized exposure machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109343314B (en) | 2024-06-25 |
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Country or region after: China Address after: 215000 Room 102, building C5, Ting LAN lane, Suzhou Industrial Park, Jiangsu, China, 192 Applicant after: Yuanzhuo Micro Nano Technology (Suzhou) Co.,Ltd. Address before: 215000 Room 102, building C5, Ting LAN lane, Suzhou Industrial Park, Jiangsu, China, 192 Applicant before: ADVANCED MICRO OPTICS.INC Country or region before: China |
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| GR01 | Patent grant |