WO2020192115A1 - Multi-station flexible tape exposure device and exposure method - Google Patents

Abstract

Provided are a multi-station flexible tape exposure device and exposure method. A workpiece table (11) has a plurality of stations provided with flexible tapes; when the flexible tapes in an exposure area (112) are exposed, alignment measurement and/or focal plane measurement is synchronously performed on the flexible tapes in a measurement area (111); while the exposed flexible tapes are transferred out from the exposure area (112), the flexible tapes having completed alignment measurement and/or focal plane measurement are transferred from the measurement area (111) to the exposure area (112); and a control unit (50) controls a photomask adjustment unit (40) such that same adjusts a photomask (M1) during a transferring process, and controls, after the next flexible tape reaches the exposure area (112), an exposure unit (3) such that same exposes the next flexible tape. By means of a multi-station parallel mode, the alignment measurement and/or focal plane measurement on the flexible tapes in the measurement area (111) and the exposure of the flexible tapes in the exposure area (112) are synchronously performed, the adjustment of the photomask (M1) is completed during a station switching process, and the flexible tapes are simultaneously treated at multiple stations, thereby reducing the time consumption of the exposure process and facilitating an improvement in productivity.

Description

Multi-station flexible tape exposure device and exposure method Technical field

The present invention relates to the technical field of photolithography, in particular to a multi-station flexible tape exposure device and an exposure method.

Background technique

The thin-film circuit substrates made of flexible tapes are widely used in mobile phones, liquid crystal screens, smart cards and other fields. The process of making a thin film circuit substrate from a tape-shaped flexible tape usually includes: the process of coating a photoresist on the tape-shaped flexible tape, the exposure and development process of transferring the pattern on the photomask to the photoresist, and the photoresist The pattern is transferred to the etching process on the flexible tape. The strip-shaped flexible reel is usually wound on a reel. In each process, the strip-shaped flexible reel is rolled out from the reel to the corresponding work table, processed accordingly, and then wound on the reel again after the processing is completed.

At present, the workpiece table used in the exposure process has only one station, and the station includes at least one exposure field. During the exposure process, the ribbon-shaped flexible web is first moved to the station of the workpiece table, and then the ribbon-shaped flexible The web performs alignment measurement and/or focal plane measurement, and then adjusts the workpiece table according to the data of the alignment measurement and/or focal plane measurement to adjust the focus of the ribbon-shaped flexible web to ensure the ribbon-shaped flexible web The belt is adjusted to a state suitable for exposure, and then an exposure unit is used to expose the belt-shaped flexible web. It can be seen that this exposure method is to perform alignment measurement, focus adjustment and exposure on a strip-shaped flexible reel in sequence. After the strip-shaped flexible reel is exposed, the next strip-shaped flexible reel can be measured and focused. Adjust and expose until the exposure of all belt-shaped flexible rolls is completed. That is, this exposure method adopts the mode of alignment measurement, focus adjustment, and exposure sequence, which takes a long time and results in low productivity, which is not conducive to mass production.

Summary of the invention

The purpose of the present invention is to provide a multi-station flexible tape-reel exposure device and an exposure method, which can reduce the process time of the exposure process and increase the productivity.

In order to solve the above technical problems, the present invention provides a multi-station flexible tape web exposure device, including:

Illumination unit for emitting light beam;

Mask table, used to carry the mask;

The objective lens unit is used to transfer the light beam passing through the mask to the flexible web for exposure;

A workpiece table having a plurality of stations for carrying the flexible tape;

A measuring unit for performing alignment measurement and/or focal plane measurement on the flexible web carried on the workpiece table;

A conveying unit for conveying the flexible web to the workpiece table;

The area under the objective lens unit is defined as an exposure area, and the area under the measurement unit is defined as a measurement area; at least two of the workstations of the workpiece table can be located in the exposure area and the measurement area separately and simultaneously , So that the different flexible webs on different stations are exposed and measured separately and simultaneously; wherein, according to the measurement results of the flexible webs obtained by the measurement unit in the measurement area, the same After the flexible web is moved to the exposure zone, it can be within the focal depth range of the objective lens unit and/or can achieve exposure alignment.

Optionally, after the flexible web located in the exposure area is exposed, the flexible web located in the measurement area can be moved to the exposure area, and before the flexible web in the exposure area is exposed, according to the The measurement result of the measurement unit makes the flexible web of the exposure area within the focal depth range of the objective lens unit and/or achieves exposure alignment.

Optionally, a first alignment mark is provided on the flexible web;

The measurement unit includes: a first light source, an alignment mark unit, a bearing platform for carrying the alignment mark unit, and a first image acquisition unit, and the alignment mark unit is provided with the first alignment mark unit. The second alignment mark corresponding to the mark;

The first light source is used to provide alignment light, which irradiates the second alignment mark and the first alignment mark in sequence and is reflected by the flexible web on the measurement area, The reflected light passes through the alignment mark unit to the first image acquisition unit to obtain alignment data.

Optionally, the measurement unit further includes: a second light source, a projection lens assembly, a detection mirror assembly, and a second image acquisition unit. The second light source is used to provide measurement light that passes through the projection mirror assembly. The surface of the flexible web on the measurement area is irradiated and reflected, and the reflected light passes through the probe mirror assembly and then reaches the second image acquisition unit to obtain focal plane measurement data.

Optionally, the multi-station flexible tape web exposure device further includes:

The mask adjustment unit is configured to adjust the mask according to the measurement result of the measurement unit so that the flexible web of the exposure area is within the focal depth range of the objective lens unit.

Optionally, the multi-station flexible tape web exposure device further includes:

The control unit is signally connected to the measurement unit, the photomask adjustment unit, and the transmission unit, and is configured to control the photomask adjustment unit to adjust the photomask according to the measurement result of the measurement unit to make the photomask The flexible roll of the exposure zone is within the focal depth range of the objective lens unit.

Optionally, the photomask adjustment unit includes a first photomask adjustment mechanism and a second photomask adjustment mechanism, and the first photomask adjustment mechanism is used to adjust the photomask along the vertical direction according to the focal plane measurement data. The direction of the surface of the workpiece table is moved, and the second mask adjustment mechanism is used for adjusting the movement of the mask in a plane parallel to the surface of the workpiece table according to the alignment data.

Optionally, the first mask adjustment mechanism includes: a first displacement sensor and at least one first adjustment assembly, the first adjustment assembly includes a first motor and a screw, and the first motor is used to drive the screw It moves in a direction perpendicular to the surface of the workpiece table, thereby driving the photomask fixed on the mask table to move, and the first displacement sensor is used to obtain displacement data of the mask table.

Optionally, the second photomask adjustment mechanism includes: a second displacement sensor and at least two second adjustment assemblies, the second adjustment assembly includes a second motor, a cam and an elastic element, and the second motor is used for The cam is driven to rotate so that the elastic element drives the mask table to move, so that the photomask fixed on the mask table moves in a plane parallel to the surface of the workpiece table.

Optionally, the conveying unit includes: an unwinding roll, a first intermediate guide roll, a second intermediate guide roll, and a rewinding roll, and the control unit is used to control the flexible web to pass from the unwinding roll to The first intermediate guide roller is guided to the work table, and after being driven on the work table, is guided to the winding roller through the second intermediate guide roller.

Optionally, the multi-station flexible tape web exposure device further includes:

The workpiece stage adjustment unit is configured to adjust the workpiece stage according to the measurement result of the measurement unit so that the flexible web of the exposure area is within the focal depth range of the objective lens unit.

Optionally, the multi-station flexible tape web exposure device further includes:

The control unit is signally connected to the measurement unit, the workpiece table adjustment unit, and the transmission unit, and the control unit is used to control the workpiece table adjustment unit to adjust the workpiece table according to the measurement result of the measurement unit The flexible web of the exposure zone is within the focal depth range of the objective lens unit.

Optionally, the workpiece table adjustment unit is used to adjust the workpiece table to move in a direction perpendicular to the surface of the workpiece table according to the focal plane measurement data, and the workpiece table adjustment unit is also used to adjust the position according to the alignment The data adjusts the movement of the workpiece table in a plane parallel to the surface of the workpiece table.

Optionally, the number of the measurement unit, the mask stage, the objective lens unit, and the illumination unit is two, and both sides of the workpiece stage are provided with one measurement unit and one The mask stage, one objective lens unit and one illumination unit, the two objective lens units on both sides of the workpiece stage are directly opposite to each other, and the two measuring units on both sides of the workpiece stage are directly opposite to each other.

Optionally, the number of the measuring unit, the mask stage, the objective lens unit, the illumination unit, and the mask adjustment unit are all two, and the workpiece stage is provided with one spot on each side. The measuring unit, the mask stage, the objective lens unit, the illumination unit, and the mask adjustment unit, the two objective lens units on both sides of the workpiece stage are facing each other, and The two measuring units on both sides of the workpiece table are directly opposite to each other.

Optionally, the workpiece table has a frame structure or a plate structure.

Optionally, the workpiece table is a rectangular frame and the corners of the rectangular frame are provided with pressing plates.

The present invention also provides a multi-station flexible tape exposure method. The light beams emitted by the lighting unit sequentially pass through the mask and the objective lens unit carried on the mask table, and then irradiate the flexible tape carried on the workpiece table. Exposure on flexible tape;

The multi-station flexible web exposure method includes the following steps:

Perform alignment measurement and/or focal plane measurement on the flexible tape in the measurement area below the measurement unit, obtain alignment data and/or focal surface measurement data, and synchronize the flexible tape in the exposure area below the objective lens unit Perform exposure;

After the flexible web located in the exposure area is exposed, move the flexible web located in the measurement area to the exposure area, and before the flexible web located in the exposure area is exposed, according to the The measurement result of the flexible web obtained by the measurement unit makes the flexible web of the exposure zone within the focal depth range of the objective lens unit and/or achieves exposure alignment.

Optionally, when the flexible web in the measurement area moves to the exposure area, the workpiece table is fixed and the flexible web is driven on the workpiece table.

Optionally, the workpiece table includes a first station and a second station, the first station is located in the exposure area, the second station is located in the measurement area, and the flexible web includes N There are two flexible tape subunits, N is greater than or equal to 2. The exposure process of the i-th to Nth flexible tape subunits includes:

Expose the i-th flexible tape subunit at the first station, and simultaneously perform alignment measurement and/or focal plane measurement on the i+1th flexible tape subunit at the second station, where i ≥1;

After the i-th flexible webbing subunit is exposed, it is transmitted from the first station, and at the same time, the i+1th flexible webbing subunit that has completed alignment measurement and/or focal plane measurement is removed from the second work station. The position is transferred to the first station, and the photomask is adjusted according to the measurement result of the i+1th flexible tape subunit during the transfer process so that the i+1th flexible tape subunit subsequently arrives After the first station is within the focal depth range of the objective lens unit; and after the i+1th flexible tape subunit reaches the first station, the i+1th flexible tape The unit performs exposure, and synchronously performs alignment measurement and/or focal plane measurement on the i+2th flexible tape subunit newly introduced in the first station.

Optionally, before exposing the first flexible tape subunit, the method further includes:

Fix the first flexible webbing subunit on the second station for alignment measurement and/or focal plane measurement. After the first flexible webbing subunit completes the alignment measurement and/or focal plane measurement, The first flexible webbing subunit is transferred from the second station to the first station, and the photomask is adjusted according to the measurement result of the first flexible webbing subunit during the transmission process so that all The first flexible tape winding subunit subsequently reaches the first station and is within the focal depth range of the objective lens unit;

Wherein, after the first flexible webbing subunit arrives at the first station, the first flexible webbing subunit is exposed and synchronized to the second newly introduced second station at the second station. The flexible tape subunit performs alignment measurement and/or focal plane measurement.

Optionally, when the flexible web in the measurement area moves to the exposure area, the workpiece table moves and drives the flexible web fixed on the workpiece table to move.

Optionally, the workpiece table includes M stations arranged in sequence, where M≥3, and the flexible tape set on the M stations includes K flexible tape subunits, 3≤K≤M, right The exposure process of the i-th to K-1th flexible tape subunit includes:

Expose the i-th flexible tape subunit located on the exposure area, and simultaneously perform alignment measurement and/or focal plane measurement on the i+1th flexible tape subunit located on the measurement area, where 1 ≤i≤K-1;

After the i-th flexible tape subunit completes the exposure, the workpiece table moves to transfer the i-th flexible tape subunit from the exposure area, and at the same time, it will complete the alignment measurement and/or focal plane measurement. The i+1th flexible webbing subunit is transferred from the measurement area to the exposure area. During the transmission, the photomask is adjusted according to the measurement result of the i+1th flexible webbing subunit so that the The (i+1)th flexible tape winding subunit subsequently reaches the exposure zone and is within the focal depth range of the objective lens unit; and

After the (i+1)th flexible webbing subunit reaches the exposure area, the i+1th flexible webbing subunit is exposed.

Optionally, when the workpiece table is in the initial position, the first station on the workpiece table is located in the measurement area, and the measurement process of the first flexible tape subunit includes:

Fix the first flexible webbing subunit on the first station of the measurement area to perform alignment measurement and/or focal plane measurement, and the first flexible webbing subunit completes alignment measurement and/or After the focal plane is measured, the workpiece table moves to transfer the first flexible tape subunit from the measurement area to the exposure area, and according to the measurement of the first flexible tape subunit during the transfer process As a result, the photomask is adjusted so that the first flexible tape winding subunit subsequently reaches the exposure area and is within the focal depth range of the objective lens unit;

After the first flexible webbing subunit reaches the exposure zone, the first flexible webbing subunit is exposed, and the second flexible webbing subunit on the measurement area is synchronized to perform alignment measurement and/ Or focal plane measurement;

And, the exposure process of the Kth flexible tape subunit includes:

When exposing the K-1th flexible tape subunit, synchronously perform alignment measurement and/or focal plane measurement on the Kth flexible tape subunit on the measurement area, and the Kth flexible tape subunit After the unit completes the alignment measurement and/or focal plane measurement, the workpiece table moves to transfer the Kth flexible tape subunit from the measurement area to the exposure area, and according to the first The measurement results of the K flexible tape winding subunits adjust the mask so that the Kth flexible tape winding subunit subsequently reaches the exposure area and is within the focal depth range of the objective lens unit;

After the Kth flexible ribbon winding subunit reaches the exposure area, exposing the Kth flexible ribbon winding subunit;

The workpiece table moves back to the initial position.

Optionally, a first alignment mark is provided on the flexible web; the measurement unit includes: a first light source, a bearing platform for carrying the alignment mark unit, and a first image acquisition unit, the alignment mark A second alignment mark corresponding to the first alignment mark is provided on the unit;

The process of obtaining the alignment data includes:

The first light source provides alignment light, which irradiates the second alignment mark and the first alignment mark in sequence and is reflected by the flexible web on the measurement area, and the reflected light passes through From the alignment marking unit to the first image acquisition unit to obtain alignment data;

According to the alignment data, the photomask or/and the work stage are adjusted to move in a plane parallel to the surface of the work stage to achieve exposure alignment.

Optionally, the measurement unit further includes: a second light source, a projection mirror assembly, a detection mirror assembly, and a second image acquisition unit;

The process of obtaining focal plane measurement data includes:

The second light source provides measurement light, the measurement light irradiates the surface of the flexible web on the measurement area through the projection lens assembly and is reflected, and the reflected light reaches the second image after passing through the detection mirror assembly Acquisition unit to obtain focal plane measurement data;

Adjust the reticle or/and the workpiece table to move in a direction perpendicular to the surface of the workpiece table according to the focal plane measurement data, so that the flexible web of the exposure area is in the focal depth range of the objective lens unit Inside.

Optionally, the number of the measurement unit, the mask stage, the objective lens unit, and the illumination unit is two, and both sides of the workpiece stage are provided with one measurement unit and one A mask stage, one objective lens unit and one illumination unit, the two objective lens units on both sides of the workpiece stage are directly opposite to each other, and the two measuring units on both sides of the workpiece stage are directly opposite to each other; The multi-station flexible web exposure method is used for double-sided exposure of the flexible web.

In the multi-station flexible tape exposure device and exposure method provided by the present invention, the workpiece table has a plurality of stations for setting the flexible tape, and the flexible tape on the exposure area is exposed while the flexible tape on the measurement area is exposed. Position measurement and/or focal plane measurement, the flexible web that has completed the exposure is transmitted from the exposure area, and the flexible web that has completed the alignment measurement and/or focal plane measurement is transferred from the measurement area to the exposure area to switch stations During the transmission process, the control unit controls the mask adjustment unit to adjust the mask according to the alignment data and/or focal plane measurement data of the latter flexible web, and the latter flexible web reaches the exposure area The post-control exposure unit exposes the latter flexible tape. The present invention adopts a multi-station parallel mode. When the flexible web on the measurement area performs alignment measurement and/or focal plane measurement, the flexible web on the exposure area is exposed simultaneously, and the flexible web is in the process of switching stations. In the process, the adjustment of the mask is completed, and the flexible tape is processed at the same time in multiple stations, so that the time is rationally used, the time-consuming of the exposure process is reduced, and the production capacity is improved.

Description of the drawings

FIG. 1 is a schematic structural diagram of a multi-station flexible tape web exposure device capable of double-sided exposure according to Embodiment 1 of the present invention;

2 is a schematic structural diagram of a measuring unit in a multi-station flexible tape web exposure device provided by Embodiment 1 of the present invention;

3 is a schematic diagram of the alignment measurement process of the measurement unit in the multi-station flexible tape web exposure device provided in the first embodiment of the present invention;

4 is a schematic diagram of the focal plane measurement process of the measurement unit of the multi-station flexible tape web exposure device provided by the first embodiment of the present invention;

5 is a schematic structural diagram of a first mask adjusting mechanism of a multi-station flexible tape web exposure device according to Embodiment 1 of the present invention;

6 is a schematic structural diagram of a second mask adjusting mechanism of a multi-station flexible tape web exposure device according to Embodiment 1 of the present invention;

FIG. 7 is a schematic structural diagram of a multi-station flexible tape web exposure device capable of single-sided exposure according to the first embodiment of the present invention;

FIG. 8 is a schematic flowchart of a multi-station flexible web exposure method provided by Embodiment 1 of the present invention;

9 is a schematic diagram of the structure when the workpiece stage of the multi-station flexible tape web exposure device capable of single-sided exposure provided by the second embodiment of the present invention is in an initial position;

10 is a schematic diagram of the structure of the work stage of the multi-station flexible tape web exposure device capable of single-sided exposure provided by the second embodiment of the present invention after moving to the right once;

11 is a schematic diagram of the structure of the multi-station flexible tape web exposure device capable of single-sided exposure provided by the second embodiment of the present invention after the workpiece stage is moved to the right twice;

12 is a schematic diagram of the structure of the multi-station flexible tape web exposure device capable of single-sided exposure provided by the second embodiment of the present invention after the workpiece stage has moved three times to the right;

13 is a schematic flowchart of a multi-station flexible web exposure method provided by the second embodiment of the present invention;

Among them, the reference signs are as follows:

11-workpiece table; 12-workpiece table; 111-measurement area; 112-exposure area; 121-first station; 122-second station; 123-third station;

M1-Photomask; M2-Alignment mark unit; M21-Second alignment mark;

20-measurement unit; 201-first light source; 202-first image acquisition unit;

203-second light source; 204-projection mirror assembly; 205-detection mirror assembly; 206-second image acquisition unit;

30-exposure unit; 301-third light source; 302-projection lens;

40-mask adjustment unit; 41-first mask adjustment mechanism; 411-first motor; 412-screw; 413-first displacement sensor; 42-second mask adjustment mechanism; 421-second motor; 422- Cam; 423-elastic element; 424-second displacement sensor;

50-control unit;

61-transport unit; 611-unwinding roll; 612-first intermediate guide roll; 613-second intermediate guide roll; 614-rewind roll;

701-mask table; 702-carrying table;

80-flexible tape;

90-press plate;

A-A direction.

detailed description

As mentioned in the background art, the traditional exposure method is to perform alignment measurement, focus adjustment, and exposure on a strip-shaped flexible web in sequence. After all the above steps are completed for a strip-shaped flexible web, the next strip-shaped flexible web Performing alignment measurement, focus adjustment, and exposure. This mode of alignment measurement, focus adjustment, and exposure sequence takes a long time and results in low productivity.

The present invention adopts a multi-station parallel mode, a workpiece table includes a plurality of stations, the station includes at least one exposure field, used to fix the tape workpiece, and the flexible tape on the measurement area performs alignment measurement and/or focus At the same time of surface measurement, the flexible tape on the exposure area is exposed. When the flexible tape is transferred from the measurement area to the exposure area, the adjustment of the mask is completed, and the flexible tape is processed at the same time in multiple stations, so as to make rational use. Time, reduce the time-consuming of the exposure process, and help increase productivity.

The multi-station flexible web exposure device and exposure method proposed by the present invention will be described in further detail below in conjunction with FIGS. 1 to 13. According to the following description, the advantages and features of the present invention will be clearer. It should be noted that the drawings all adopt a very simplified form and all use imprecise proportions, which are only used for the purpose of conveniently and clearly assisting in describing the embodiments of the present invention.

Example one

The multi-station flexible web exposure device can perform double-sided exposure to improve exposure efficiency. Figure 1 is a schematic diagram of the structure of a multi-station flexible web exposure device capable of double-sided exposure. As shown in Figure 1, this multi-station flexible web exposure device capable of double-sided exposure (also called It is a double-sided multi-station flexible tape exposure device), including: a workpiece table 11, a transfer unit 61, two measurement units 20, two mask tables 701, two exposure units 30, two mask adjustment units 40, and Control unit 50. The control unit 50 is in signal connection with the measurement unit 20, the exposure unit 30, the mask adjustment unit 40, and the transmission unit 61; the workpiece table 11 includes a measurement area 111 and an exposure area 112; the measurement The area 111 is located at a position corresponding to the measurement unit 20; the exposure area 112 is located at a position corresponding to the exposure unit 30.

The measuring unit 20, the mask table 701, the exposure unit 30 and the mask adjustment unit 40 are respectively provided on the upper and lower sides of the workpiece table 11. The exposure units 30 on both sides of the workpiece table 11 can be aligned with each other, and calibration can be achieved during regular maintenance, so that the exposure units 30 on the upper and lower sides can be aligned with the front and back sides of the flexible web 80 at the same position during the production process. consistency. In this embodiment, the multi-station flexible web exposure device performs double-sided exposure of the flexible web 80, and the measuring unit 20 and the exposure unit 30 located above the workpiece table 11 realize the alignment and/or exposure of the front side of the flexible web 80; The measuring unit 20 and the exposure unit 30 located under the workpiece table 11 realize the alignment and/or exposure of the back of the flexible web 80.

As an example, the flexible web is a strip-shaped flexible web, and all the strip-shaped flexible webs to be exposed can be connected together in sequence to form a continuous elongated structure. The flexible web is, for example, a belt-shaped flexible web used to form a thin-film circuit board.

The workpiece table 11 adopts, for example, a frame structure, the belt-shaped flexible web is laid on the workpiece table 11, and the upper and lower surfaces of the belt-shaped flexible web are exposed. Specifically, the workpiece table 11 may be a rectangular frame. A cross beam can be set in the center of the rectangular frame to better support the flexible roll. A pressing plate 90 can also be provided at the corners of the rectangular frame, and the flexible web can be further fixed by the pressing plate 90 to prevent the flexible web from moving. The number of the pressing plates 90 is, for example, six, which are distributed at the four corners of the rectangular frame and the junction between the beam and the rectangular frame.

As an example, the conveying unit 61 includes an unwinding roller 611, a first intermediate guide roller 612, a second intermediate guide roller 613, and a rewinding roller 614 that are arranged in parallel, and the control unit 50 controls the belt-shaped flexible roll The unwinding roller 611 is passed out, introduced into the workpiece table by the first intermediate guide roller 612, and then fixed by 11, and is released after completing the process of the corresponding station, and the ribbon-shaped flexible web is introduced to the workpiece through the second intermediate guide roller 613述Rewinding roll 614. Specifically, the edge of the belt-shaped flexible web can be provided with a hole count to control the conveying length of the flexible web. In other embodiments, a displacement sensor can also be provided to monitor the conveying length of the belt-shaped flexible web.

It should be understood that this type of double-sided multi-station flexible tape web exposure device can actually perform single-sided exposure. Only the measuring unit 20, the mask stage 701, the exposure unit 30, and the mask adjustment unit 40 on the same side above or below the workpiece stage 11 may be used.

As shown in Figures 2 to 4, the multi-station flexible web exposure device further includes a bearing platform 702 for supporting the alignment mark unit M2, and the alignment mark unit M2 is provided with The second alignment mark M21 corresponding to the first alignment mark. The measurement unit 20 includes a first light source 201 and a first image acquisition unit 202, and both the first light source 201 and the first image acquisition unit 202 are located on a side of the alignment marking unit M2 away from the workpiece table 11. side. The first light source 201 is used to provide alignment light, which sequentially irradiates the second alignment mark M21 and the first alignment mark on the flexible web on the measurement area 111 and Reflected by the flexible web on the measurement area 111, the reflected light passes through the alignment mark unit M2 to the first image acquisition unit 202 to obtain alignment data.

The measurement unit 20 also includes a second light source 203, a projection lens assembly 204, a probe lens assembly 205, and a second image acquisition unit 206. The second light source 203 provides measurement light for focal plane measurement, and the measurement light passes through The projection mirror assembly 204 irradiates the surface of the flexible web on the measurement area 111 to reflect, and the reflected light passes through the detection mirror assembly 205 to the second image acquisition unit 206 to obtain focal plane measurement data. The surface measurement data is, for example, focal surface test data.

As shown in FIGS. 5 and 6, the mask adjustment unit 40 includes a first mask adjustment mechanism 41 and a second mask adjustment mechanism 42.

As shown in FIG. 5, the first mask adjusting mechanism 41 adjusts the mask M1 on the mask stage 701 to move in a direction perpendicular to the surface of the workpiece stage 11. The first mask adjustment mechanism 41 includes a first displacement sensor 413 and at least one first adjustment assembly. The first adjustment assembly includes a first motor 411 and a screw 412. The first motor 411 drives the screw 412 perpendicular to The workpiece table 11 moves up and down in the direction of the surface, thereby driving the mask M1 fixed on the mask table 701 to move up and down in a direction perpendicular to the surface of the workpiece table 11. The first displacement sensor 413 For testing the movement of the mask stage 701 in a direction perpendicular to the surface of the workpiece stage 11, the first displacement sensor 413 is, for example, a grating ruler. Preferably, the first mask adjustment mechanism 41 includes two first adjustment components, which are respectively installed on both sides of the mask table 701 facing/back to the surface of the workpiece table 11, that is, the upper and lower sides in the position shown in the figure. On both sides.

As shown in FIG. 6, the second mask adjustment mechanism 42 is used to adjust the movement of the mask stage 701 in a plane parallel to the surface of the workpiece stage 11. The second mask adjustment mechanism 42 includes a second displacement sensor 424 and at least two second adjustment components. The mask stage 701 is, for example, rectangular, and each of the second adjustment components is mounted on one of the mask stages 701. On the corners, when there are two second adjustment components, they are installed on the opposite corners of the mask stage 701. When there are three second adjustment components, they are installed on any three corners of the mask stage 701. Each of the second adjustment components includes a second motor 421, a cam 422, and an elastic element 423. The second motor 421 drives the cam 422 to rotate so that the elastic element 423 drives the mask stage 701 to move, so that The mask M1 fixed on the mask table 701 moves in a plane parallel to the surface of the workpiece table 11, for example, rotates. The elastic element 423 is, for example, a spring, which acts as an elastic support. Specifically, each cam 422 is connected to the mask stage 701 through two elastic elements 423 distributed on both sides of the corner of the mask stage 701. When the cam 422 rotates, one of the elastic elements 423 is compressed, and the other The elastic element 423 stretches to drive the mask stage 701 to rotate. The second displacement sensor 424 measures the displacements in two mutually perpendicular directions (X direction and Y direction) in a plane parallel to the surface of the workpiece table 11, so as to obtain rotation accuracy. The mask stage 701 is, for example, rectangular, and adjacent rectangular sides are respectively arranged along the X direction and the Y direction. The displacement sensor 424 is, for example, a grating ruler.

1, the exposure unit 30 includes: a third light source 301 and a projection lens 302, the mask stage 701 is located between the third light source 301 and the projection lens 302, the mask M1 Fixed on the mask stage 701. The optical axis direction of the third light source 301 is perpendicular to the surface of the workpiece table 11, and the workpiece table 11 is usually arranged horizontally. The third light source 301 is used to provide exposure light, which irradiates the mask M1 on the mask stage 701, and focuses the light on the flexible roll of the exposure area 112 through the projection lens 302 Exposure is performed on the tape, more specifically, focusing on the photoresist on the surface of the flexible web to be exposed. The light gathering point is the focal point, the focal point is the point where the best image appears after being focused by the projection lens 302, the horizontal plane where the focal point is located is the focal plane, and the depth of focus (DOF) is the upper limit plane on both sides of the focal plane that can keep the focused image clear The distance of the lower limit plane. In the photolithography process, the focus may not be exactly in the middle of the upper and lower surfaces of the photoresist, but the upper and lower surfaces of the photoresist are located within the depth of focus (DOF), so as to ensure that the entire thickness of the photoresist within the exposure range is clearly imaged .

In this embodiment, by adjusting the mask M1 to move in a direction perpendicular to the surface of the workpiece table 11, the upper and lower surfaces of the photoresist on the surface of the flexible web on the exposure area 112 are all exposed to light passing through the mask table. The mask M1 on 701 reaches the depth of focus (DOF) range where the projection lens 302 focuses light, so that the photoresist on the surface of the flexible web on the exposure area 112 is continuously and clearly exposed.

In this embodiment, the workpiece table 11 is fixed during the entire working process. The control unit 50 is used to control the exposure unit 30 to expose the flexible web on the exposure area 112, and at the same time control the measurement unit 20 to measure Perform alignment measurement and/or focal plane measurement on the flexible web on the area 111, wherein the flexible web on the exposure area 112 and the flexible web on the measurement area 111 may be different from the same flexible web. Part, can also be different rolls of flexible tape; and control the conveying unit 61 to transfer the exposed flexible tape on the exposure area 112 from the exposure area 112, and at the same time transfer the flexible tape on the measurement area 111 The flexible web, which has completed alignment measurement and/or focal plane measurement, is transferred from the measurement area 111 to the exposure area 112. During the transfer process, the control unit 50 adjusts the alignment data and focus of the flexible web. The area measurement data controls the mask adjustment unit 40 to adjust the mask M1; and controls the exposure unit 30 to perform exposure after the flexible web on the measurement area 111 reaches the exposure area 112, and at the same time controls The measurement unit 20 performs alignment measurement and/or focal plane measurement on the flexible web passing in the measurement area 111.

It should be understood that for the first flexible web, fix the first flexible web in the measurement area 111 for alignment measurement and/or focal plane measurement, and after completing the alignment measurement and/or focal plane measurement, The first flexible web is transferred from the measurement area 111 to the exposure area 112. During the transfer, the control unit 50 controls the light according to the alignment data and focal plane measurement data of the first flexible web. The mask adjustment unit 40 adjusts the mask M1; after the first flexible web reaches the exposure zone 112, the control unit 50 controls the exposure unit 30 to expose the first flexible web, At the same time, the measurement unit 20 is controlled to perform alignment measurement and/or focal plane measurement on the second flexible web on the measurement area 111.

When the exposure, alignment measurement, and/or focal plane measurement are completed, the flexible web 80 is fixed by vacuum suction, and the surface of the flexible web 80 is provided with a pressure plate 90 to prevent the flexible web from moving; when the flexible web 80 is transferred, the The flexible web 80 is loosened.

The test data and the alignment data obtained by the measurement unit 20 are coordinated by the control unit 50, so that the second alignment mark M21 on the alignment mark unit M2 is on the mask M1 The marks correspond and match exactly. According to the test data and the alignment data, the control unit 50 matches the corresponding focal plane compensation data and alignment deviation compensation data, and controls the mask adjustment unit 40 to adjust the mask stage 701. M1 is fixed on the mask stage 701, so the mask M1 is finally adjusted by the mask adjustment unit 40. The mask M1 on the mask stage 701 is adjusted by the first mask adjustment mechanism 41 to move in a direction perpendicular to the surface of the workpiece stage 11, so that the flexible web on the exposure zone 112 is at the focal depth ( DOF) can be clearly exposed. The second mask adjustment mechanism 42 adjusts the mask stage 701 to rotate in a plane parallel to the surface of the workpiece stage 11, so that the exposure process is accurately aligned.

Further, the flexible web 80 may be inclined during the conveying process (for example, the edges on both sides of the flexible web in the conveying direction are not perpendicular to the axis of the first intermediate guide roller 612, and there is an offset) which can be measured by an angular displacement sensor. Tilt data of flexible tape. At this time, it is necessary to convert the tilt data through the control unit 50 for coordinate conversion. The control unit 50 integrates the focal plane measurement data (for example, focal plane test data), alignment data, and tilt data to match the corresponding compensation data to control the mask The adjustment unit 40 adjusts the mask M1. The adjustment error of the mask M1 in a plane parallel to the surface of the workpiece table 11 includes the deviation caused by the misalignment during the alignment and the tilt deviation of the flexible web during the conveying process. The control unit 50 adjusts the mask stage 701 to rotate in a plane parallel to the surface of the workpiece stage 11 through the second mask adjustment mechanism 42 to accurately align the exposure process. The control unit 50 adjusts the mask M1 on the mask stage 701 through the first mask adjustment mechanism 41 to move in a direction perpendicular to the surface of the workpiece stage 11, so that the flexible tape on the exposure area 112 is Clear exposure within the depth of focus (DOF) range.

The multi-station flexible tape-reel exposure device can also be a device that can only perform single-sided exposure, so as to simplify the machine structure and reduce equipment manufacturing costs. Figure 7 is a schematic diagram of the structure of a multi-station flexible web exposure device capable of single-sided exposure. As shown in Figure 7, this multi-station flexible web exposure device capable of single-sided exposure (also called It is a single-sided multi-station flexible tape exposure device), including: the number of the measuring unit 20, the mask table 701, the exposure unit 30, and the mask adjustment unit 40 is one, and they are all located on the workpiece table 11 On the same side. In this embodiment, the multi-station flexible web exposure device performs single-sided exposure of the flexible web 80. The work table 11 of the single-sided multi-station flexible tape-reel exposure device can adopt a flat structure or a frame structure.

Based on this, this embodiment also provides a multi-station flexible reel exposure method, as shown in Figures 1 and 8, the method is based on a dual-station multi-station flexible reel exposure device, the dual-station The workpiece table of the multi-station flexible tape exposure device includes a first station and a second station. The first station is located in the exposure area, the second station is located in the measurement area, and the flexible roll The tape includes N (N≥2) flexible tape subunits, and the exposure process for the i-th to N-th flexible tapes includes:

The control unit 50 controls the exposure unit 30 to expose the i-th (i≥1) flexible tape subunit at the first station, and the control unit 50 synchronously controls the measuring unit 20 to expose the i-th flexible tape subunit at the second station. i+1 flexible tape subunits for alignment measurement and/or focal plane measurement;

After the i-th flexible tape subunit on the first station is exposed, the control unit 50 controls the conveying unit 61 to transfer the i-th flexible tape subunit after the exposure from the first station At the same time, the i+1th flexible tape subunit that has completed alignment measurement and/or focal plane measurement is transferred from the second station to the first station, and the control unit is in the process of transferring 50 controlling the mask adjustment unit 40 to adjust the mask M1 according to the alignment data and focal plane measurement data of the i+1th flexible tape subunit; and

After the i+1th flexible tape subunit reaches the first station, the control unit 50 controls the exposure unit 30 to expose the i+1th flexible tape subunit, and synchronously controls all The measurement unit 20 performs alignment measurement and/or focal plane measurement on the i+2th flexible tape subunit newly introduced in the second station.

Further, before exposing the first flexible tape, it also includes:

Fix the first flexible web on the second station for alignment measurement and/or focal plane measurement. After the first flexible web has completed alignment measurement and/or focal plane measurement, the The first flexible web is transferred from the second station to the first station. During the transfer, the control unit 50 is based on the alignment data and focal plane measurement data of the first flexible web Controlling the mask adjustment unit 40 to adjust the mask M1;

After the first flexible web reaches the first station, the control unit 50 controls the exposure unit 30 to expose the first flexible web, and at the same time controls the measuring unit 20 to expose the The second flexible web on the second station performs alignment measurement and/or focal plane measurement.

As shown in Figures 1 and 2, the measurement unit 20 includes a first light source 201 and a first image acquisition unit 202; the process of obtaining the alignment data includes: the first light source 201 provides alignment light, the The alignment light is sequentially irradiated to the second alignment mark M21 and the first alignment mark and is reflected by the flexible web on the measurement area. The reflected light passes through the alignment mark unit M2 to the first alignment mark. An image acquisition unit 202 obtains alignment data; the control unit 50 controls the mask adjustment unit 40 to adjust the mask M1 on the mask stage 701 according to the alignment data of the latter flexible tape It moves in a plane parallel to the surface of the workpiece table 11.

The measurement unit 20 further includes: a second light source 203, a projection lens assembly 204, a detection mirror assembly 205, and a second image acquisition unit 206; the process of obtaining focal plane measurement data includes: the second light source 203 is used to provide measurement light , The measurement light is irradiated to the surface of the flexible web on the measurement area 111 through the projection lens assembly 204 and is reflected, and the reflected light passes through the detection mirror assembly 205 to the second image acquisition unit 206 to obtain Focal surface measurement data; the control unit 50 controls the mask adjustment unit 40 to adjust the mask M1 on the mask stage 701 to be perpendicular to the The direction of the surface of the work table 11 moves.

1 and 5, the mask adjustment unit 40 includes a first mask adjustment mechanism 41, and the first mask adjustment mechanism 41 includes: a first displacement sensor 413 and at least one first adjustment assembly, so The first adjustment assembly includes a first motor 411 and a screw 412. The first motor 411 is used to drive the screw 412 to move in a direction perpendicular to the surface of the workpiece table 11, thereby driving and fixing to the mask table. The mask M1 on the 701 moves, and the first displacement sensor 413 is used to obtain displacement data of the mask stage 701.

As shown in FIGS. 1 and 6, the mask adjustment unit 40 further includes a second mask adjustment mechanism 42, which includes: a second displacement sensor 424 and at least two second adjustment components The second adjustment assembly includes a second motor 421, a cam 422, and an elastic element 423. The second motor 421 is used to drive the cam 422 to rotate so that the elastic element 423 drives the mask stage 701 to move, Thus, the mask M1 fixed on the mask stage 701 moves in a plane parallel to the surface of the workpiece stage 11.

As shown in FIG. 1, the flexible web 80 is a belt-shaped flexible web, and the conveying unit 61 includes an unwinding roller 611, a first intermediate guiding roller 612, a second intermediate guiding roller 613, and a winding roller 614 arranged in parallel. The control unit 50 controls the flexible web 80 to be transmitted from the unwinding roller 611, and is guided into the workpiece table 11 via the first intermediate guide roller 612 and fixed; the flexible web 80 is from the When the exposure area 112 passes out, it enters the winding roller 614 through the second middle guide roller guide 613.

As shown in FIG. 1, the exposure unit 30 includes a third light source 301 and a projection lens 302, the mask stage 701 is located between the third light source 301 and the projection lens 302, and the exposure process includes: The third light source 301 provides exposure light, which irradiates the mask M1 on the mask stage 701, and is focused on the flexible web located in the exposure area 112 by the projection lens 302. Make an exposure.

As shown in FIG. 1, the number of the measuring unit 20, the mask stage 701, the exposure unit 30, and the photomask adjustment unit 40 are all two, and one measuring unit is provided on both sides of the workpiece stage 11 20. The mask stage 701, the exposure unit 30 and the mask adjustment unit 40, the exposure units 30 on both sides of the workpiece stage 11 are directly opposite to each other; the exposure method is used to double the flexible tape Face exposure.

As shown in FIG. 7, the number of the measuring unit 20, the mask stage 701, the exposure unit 30, and the mask adjustment unit 40 is one, and they are located on the same side of the workpiece stage 11; the exposure method is used for The flexible web is exposed to one side.

Example two

As shown in Figures 9-12, in this embodiment, the multi-station flexible web exposure device includes a workpiece table 12, a transfer unit 61, two measuring units 20, two mask tables 701, and two exposure units. 30. Two mask adjustment units 40 and a control unit 50. The control unit 50 is signally connected to the measurement unit 20, the exposure unit 30, the mask adjustment unit 40, and the transmission unit 61, respectively. The difference from the first embodiment is that in this embodiment, the workpiece table 12 can be moved. When the flexible web of the measuring area moves to the exposure area, the workpiece table 12 moves and drives a fixed The flexible web on the workpiece table 12 moves. Specifically, in this embodiment, a single-side exposure multi-station flexible web exposure device is used as an example, but it should be understood that the multi-station flexible web exposure device in this embodiment can actually perform double-side exposure.

The workpiece table 12 has M (M≥3) stations arranged in sequence, and the flexible tape set on the workpiece table includes K (3≤K≤M) flexible tape subunits, each of which is Each position can be provided with one of the flexible tape subunits. As shown in FIG. 9, the workpiece table 12 in this embodiment has 3 stations. For ease of description, let the directions (from right to left) of the 3 stations from the exposure area to the measurement area be The first station 121, the second station 122 and the third station 123, when the workpiece table 12 moves, the positions of the first station 121, the second station 122 and the third station 123 can be switched, In this way, the flexible tape subunits on the first station 121, the second station 122 and the third station 123 can all pass through the measurement area and the exposure area. Specifically, the control unit 50 is used to control the exposure unit 30 to expose the flexible web on the exposure area, and control the measurement unit 20 to perform alignment measurement and/or focus on the flexible web on the measurement area. Surface measurement; and control the workpiece table 12 to move to the right to transfer the exposed flexible web from the exposed area.

Based on this, this embodiment also provides a multi-station flexible reel exposure method, as shown in Figures 9-13, which is based on a multi-station (greater than or equal to 3) multi-station flexible reel exposure device. In this embodiment, the workpiece table of the multi-station flexible tape web exposure device includes the first station 121, the second station 122, and the third station 123. When the workpiece table 12 moves to the initial position, The first station 121 is located in the measurement area, the second station 122 and the third station 123 are both outside the measurement and exposure range, and the flexible web includes N (N≥2) flexible Reeling subunits (represented as N1, N2, Ni...NN), the flexible reeling set on the workpiece table includes K (3≤K≤M) flexible reeling subunits (here K=3), the exposure process include:

The three flexible winding subunits (N1, N2, N3) are sequentially fixed on the first station 121, the second station 122 and the third station 123 of the workpiece table 12. At this time, as shown in FIG. 9 , The workpiece table 12 is in the initial position, the first station 121 is located below the measurement area, and then the alignment measurement and/or focal plane measurement are performed on the first flexible tape subunit (N1). After the alignment measurement and/or focal plane measurement are completed, the workpiece table 12 moves to the right, as shown in FIG. 10, so that the first station 121 is located below the exposure area, and the second station 122 is located at the measurement Area below, so that the first flexible tape subunit (N1) is transferred from the measurement area to the exposure area, and the second flexible tape subunit (N2) is transferred to the measurement area, on the workpiece table 12 During the movement, the control unit 50 controls the mask adjustment unit 40 to adjust the mask M1 according to the alignment data and focal plane measurement data of the first flexible tape winding subunit (N1). Here, The multi-station flexible reel exposure device may also include a work stage adjustment unit that adjusts the work stage according to the measurement result of the measurement unit so that the flexible reel in the exposure area is at Within the focal depth range of the objective lens unit, only one of the workpiece stage adjustment unit and the first mask adjustment mechanism 41 in the mask adjustment unit 40 may be used; the first flexible tape winding subunit (N1) reaches the exposure After the zone, the control unit 50 controls the exposure unit 30 to expose the first flexible tape subunit (N1), and synchronously controls the measurement unit 20 to control the second station 122 on the second A flexible tape subunit (N2) for alignment measurement and/or focal plane measurement. After the exposure of the first flexible winding subunit (N1) is completed and the measurement of the second flexible winding subunit (N2) is completed, as shown in FIG. 11, the workpiece table 12 moves to the right again to make the first station 121 is transmitted from the exposure area, the second station 122 is located in the exposure area, the third station 123 is located in the measurement area, and the control unit 50 controls the exposure unit 30 to Two flexible webbing subunits (N2) perform exposure, and synchronously control the measuring unit 20 to perform alignment measurement and/or focal plane measurement on the third flexible webbing subunit (N3) on the third station 123 . After the exposure of the second flexible tape subunit (N2) is completed and the measurement of the third flexible tape subunit (N3) is completed, as shown in FIG. 12, the workpiece table 12 moves to the right again to make the second station 122 is transmitted from the exposure area, and the third station 123 is located in the exposure area, and then the exposure unit 30 exposes the third flexible tape subunit (N3). After the exposure is completed, the workpiece table 12 moves to the initial position. While moving, the transfer unit 61 is released, and the three flexible tape subunits (N1, N2, N3) on the workpiece table 12 are released. After passing out, the last three flexible tape sub-units (N4, N5, N6) are transferred and fixed to the workpiece table 12 until the N flexible tape sub-units are all exposed.

It is understandable that since the workpiece table 12 in this embodiment can be moved, the film can be reloaded after all the flexible tape subunits on the workpiece table are exposed, which avoids the need to reload each flexible tape subunit after exposure. The problem of the film further improves efficiency.

Finally, while exposing the exposure area, the present invention performs alignment measurement and/or focal plane measurement on the measurement area, and multiple stations are performed in parallel; during the process of flexible tape transport, the adjustment of the photomask is completed, Simultaneous processing of flexible tapes in multiple stations makes reasonable use of time, reduces exposure process time and increases productivity.

The various embodiments in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments, and the same or similar parts between the various embodiments can be referred to each other. For the method disclosed in the embodiment, since it corresponds to the device disclosed in the embodiment, the description is relatively simple, and the relevant part can be referred to the description of the device.

The foregoing description is only a description of the preferred embodiments of the present invention and does not limit the scope of the present invention in any way. Any changes or modifications made by persons of ordinary skill in the field of the present invention based on the foregoing disclosure shall fall within the protection scope of the claims.

Claims (27)

1. A multi-station flexible tape web exposure device is characterized in that it comprises:

   Illumination unit for emitting light beam;

   Mask table, used to carry the mask;

   The objective lens unit is used to transfer the light beam passing through the mask to the flexible web for exposure;

   A workpiece table having a plurality of stations for carrying the flexible tape;

   A measuring unit for performing alignment measurement and/or focal plane measurement on the flexible web carried on the workpiece table;

   A conveying unit for conveying the flexible web to the workpiece table;

   The area under the objective lens unit is defined as an exposure area, and the area under the measurement unit is defined as a measurement area; at least two of the workstations of the workpiece table can be located in the exposure area and the measurement area separately and simultaneously , So that the different flexible webs on different stations are exposed and measured separately and simultaneously; wherein, according to the measurement results of the flexible webs obtained by the measurement unit in the measurement area, the same After the flexible web is moved to the exposure zone, it can be within the focal depth range of the objective lens unit and/or can achieve exposure alignment.
2. The multi-station flexible web exposure device of claim 1, wherein after the flexible web located in the exposure area is exposed, the flexible web located in the measurement area can move to the exposure area And before the flexible web of the exposure area is exposed, according to the measurement result of the measuring unit, the flexible web of the exposure area is within the focal depth range of the objective lens unit and/or the exposure alignment is achieved.
3. The multi-station flexible web exposure device according to claim 1 or 2, wherein the flexible web is provided with a first alignment mark;

   The measurement unit includes: a first light source, an alignment mark unit, a bearing platform for carrying the alignment mark unit, and a first image acquisition unit, and the alignment mark unit is provided with the first alignment mark unit. The second alignment mark corresponding to the mark;

   The first light source is used to provide alignment light, which irradiates the second alignment mark and the first alignment mark in sequence and is reflected by the flexible web on the measurement area, The reflected light passes through the alignment mark unit to the first image acquisition unit to obtain alignment data.
4. The multi-station flexible web exposure device according to claim 3, wherein the measurement unit further comprises: a second light source, a projection lens assembly, a detection lens assembly, and a second image acquisition unit, the second light source It is used to provide measurement light, which is irradiated to the surface of the flexible web on the measurement area through the projection lens assembly and is reflected, and the reflected light reaches the second after passing through the detection mirror assembly Two image acquisition units to obtain focal plane measurement data.
5. 5. The multi-station flexible web exposure device of claim 4, wherein the multi-station flexible web exposure device further comprises:

   The mask adjustment unit is configured to adjust the mask according to the measurement result of the measurement unit so that the flexible web of the exposure area is within the focal depth range of the objective lens unit.
6. 5. The multi-station flexible web exposure device of claim 5, wherein the multi-station flexible web exposure device further comprises:

   The control unit is signally connected to the measurement unit, the photomask adjustment unit, and the transmission unit, and is configured to control the photomask adjustment unit to adjust the photomask according to the measurement result of the measurement unit to make the photomask The flexible roll of the exposure zone is within the focal depth range of the objective lens unit.
7. The multi-station flexible tape web exposure device according to claim 5, wherein the mask adjustment unit includes a first mask adjustment mechanism and a second mask adjustment mechanism, and the first mask adjustment mechanism is used for To adjust the mask to move in a direction perpendicular to the surface of the workpiece table according to the focal plane measurement data, the second mask adjustment mechanism is used to adjust the mask to be parallel to the alignment data according to the alignment data. Move in the plane of the surface of the workpiece table.
8. 7. The multi-station flexible tape web exposure device according to claim 7, wherein the first mask adjustment mechanism comprises: a first displacement sensor and at least one first adjustment assembly, and the first adjustment assembly includes a first A motor and a screw, the first motor is used to drive the screw to move in a direction perpendicular to the surface of the workpiece table, thereby driving the photomask fixed on the mask table to move, the first displacement sensor Used to obtain displacement data of the mask stage.
9. 8. The multi-station flexible web exposure device according to claim 7, wherein the second mask adjustment mechanism comprises: a second displacement sensor and at least two second adjustment components, the second adjustment components comprising A second motor, a cam, and an elastic element. The second motor is used to drive the cam to rotate so that the elastic element drives the mask stage to move, so that the mask fixed on the mask stage Move in a plane parallel to the surface of the workpiece table.
10. The multi-station flexible tape web exposure device according to claim 6, wherein the transfer unit includes: an unwinding roller, a first intermediate guide roller, a second intermediate guide roller, and a rewinding roller, and the control unit uses The flexible web is controlled to be transmitted from the unwinding roll, introduced into the workpiece table via the first intermediate guide roller, and then transmitted on the workpiece table and guided to the rewinding table via the second intermediate guide roller Roll rolling.
11. 5. The multi-station flexible web exposure device of claim 4, wherein the multi-station flexible web exposure device further comprises:

    The workpiece stage adjustment unit is configured to adjust the workpiece stage according to the measurement result of the measurement unit so that the flexible web of the exposure area is within the focal depth range of the objective lens unit.
12. 8. The multi-station flexible web exposure device of claim 11, wherein the multi-station flexible web exposure device further comprises:

    The control unit is signally connected to the measurement unit, the workpiece table adjustment unit, and the transmission unit, and the control unit is used to control the workpiece table adjustment unit to adjust the workpiece table according to the measurement result of the measurement unit The flexible web of the exposure zone is within the focal depth range of the objective lens unit.
13. The multi-station flexible tape exposure device according to claim 11, wherein the workpiece stage adjustment unit is used to adjust the workpiece stage in a direction perpendicular to the surface of the workpiece stage according to the focal plane measurement data Moving, the workpiece table adjusting unit is further configured to adjust the workpiece table to move in a plane parallel to the surface of the workpiece table according to the alignment data.
14. The multi-station flexible tape exposure device according to claim 11, wherein the number of the measuring unit, the mask stage, the objective lens unit and the illumination unit are all two, and the workpiece The measuring unit, the mask stage, the objective lens unit and the illumination unit are respectively provided on both sides of the stage, and the two objective lens units on both sides of the workpiece stage are facing each other, so The two measuring units on both sides of the workpiece table are directly opposite to each other.
15. The multi-station flexible web exposure device according to claim 5, wherein the number of the measuring unit, the mask table, the objective lens unit, the illumination unit and the mask adjustment unit are all There are two, one of the measuring unit, one of the mask stage, one of the objective lens unit, one of the illumination unit, and one of the mask adjustment unit are provided on both sides of the workpiece table. The two objective lens units on both sides of the stage are directly opposite to each other, and the two measuring units on both sides of the work stage are directly opposite to each other.
16. The multi-station flexible tape web exposure device according to claim 1 or 2, wherein the work stage has a frame structure or a plate structure.
17. 16. The multi-station flexible tape web exposure device according to claim 16, wherein the work stage is a rectangular frame and a press plate is provided at the corners of the rectangular frame.
18. A multi-station flexible web exposure method is characterized in that the light beam emitted by the lighting unit passes through the mask and the objective lens unit carried on the mask table in sequence, and then irradiates the flexible web carried on the workpiece table to the flexible web. Reel for exposure;

    The multi-station flexible web exposure method includes the following steps:

    Perform alignment measurement and/or focal plane measurement on the flexible tape in the measurement area below the measurement unit, obtain alignment data and/or focal surface measurement data, and synchronize the flexible tape in the exposure area below the objective lens unit Perform exposure;

    After the flexible web located in the exposure area is exposed, move the flexible web located in the measurement area to the exposure area, and before the flexible web located in the exposure area is exposed, according to the The measurement result of the flexible web obtained by the measurement unit makes the flexible web of the exposure zone within the focal depth range of the objective lens unit and/or achieves exposure alignment.
19. The multi-station flexible web exposure method according to claim 18, wherein when the flexible web in the measurement area moves to the exposure area, the workpiece table is fixed and the The flexible belt is driven on the workpiece table.
20. The multi-station flexible web exposure method according to claim 19, wherein the workpiece table includes a first station and a second station, the first station is located in the exposure area, and the second Two stations are located in the measurement area, the flexible web includes N flexible web sub-units, where N is greater than or equal to 2, and the exposure process for the i-th to N-th flexible web sub-units includes:

    Expose the i-th flexible tape subunit at the first station, and simultaneously perform alignment measurement and/or focal plane measurement on the i+1th flexible tape subunit at the second station, where i ≥1;

    After the i-th flexible webbing subunit is exposed, it is transmitted from the first station, and at the same time, the i+1th flexible webbing subunit that has completed alignment measurement and/or focal plane measurement is removed from the second work station. The position is transferred to the first station, and the photomask is adjusted according to the measurement result of the i+1th flexible tape subunit during the transfer process so that the i+1th flexible tape subunit subsequently arrives After the first station is within the focal depth range of the objective lens unit; and after the i+1th flexible tape subunit reaches the first station, the i+1th flexible tape The unit performs exposure, and synchronously performs alignment measurement and/or focal plane measurement on the i+2th flexible tape subunit newly introduced in the first station.
21. 22. The multi-station flexible tape exposure method according to claim 20, wherein before exposing the first flexible tape subunit, the method further comprises:

    Fix the first flexible webbing subunit on the second station for alignment measurement and/or focal plane measurement. After the first flexible webbing subunit completes the alignment measurement and/or focal plane measurement, The first flexible webbing subunit is transferred from the second station to the first station, and the photomask is adjusted according to the measurement result of the first flexible webbing subunit during the transmission process so that all The first flexible tape winding subunit subsequently reaches the first station and is within the focal depth range of the objective lens unit;

    Wherein, after the first flexible webbing subunit arrives at the first station, the first flexible webbing subunit is exposed and synchronized to the second newly introduced second station at the second station. The flexible tape subunit performs alignment measurement and/or focal plane measurement.
22. The multi-station flexible web exposure method according to claim 18, characterized in that, when the flexible web in the measurement area moves to the exposure area, the workpiece table moves and drives and is fixed at The flexible web on the workpiece table moves.
23. The multi-station flexible tape exposure method according to claim 22, wherein the workpiece table includes M stations arranged in sequence, wherein M≥3, and the M flexible coils arranged on the stations The tape includes K flexible tape subunits, 3≤K≤M, and the exposure process for the i-th to K-1th flexible tape subunits includes:

    Expose the i-th flexible tape subunit located on the exposure area, and simultaneously perform alignment measurement and/or focal plane measurement on the i+1th flexible tape subunit located on the measurement area, where 1 ≤i≤K-1;

    After the i-th flexible tape subunit completes the exposure, the workpiece table moves to transfer the i-th flexible tape subunit from the exposure area, and at the same time, it will complete the alignment measurement and/or focal plane measurement. The i+1th flexible webbing subunit is transferred from the measurement area to the exposure area. During the transmission, the photomask is adjusted according to the measurement result of the i+1th flexible webbing subunit so that the The (i+1)th flexible tape winding subunit subsequently reaches the exposure zone and is within the focal depth range of the objective lens unit; and

    After the (i+1)th flexible webbing subunit reaches the exposure area, the i+1th flexible webbing subunit is exposed.
24. The multi-station flexible tape exposure method according to claim 23, wherein when the workpiece table is in the initial position, the first station on the workpiece table is located in the measurement area, and the The measurement process of the flexible tape subunit includes:

    Fix the first flexible webbing subunit on the first station of the measurement area to perform alignment measurement and/or focal plane measurement, and the first flexible webbing subunit completes alignment measurement and/or After the focal plane is measured, the workpiece table moves to transfer the first flexible tape subunit from the measurement area to the exposure area, and according to the measurement of the first flexible tape subunit during the transfer process As a result, the photomask is adjusted so that the first flexible tape winding subunit subsequently reaches the exposure area and is within the focal depth range of the objective lens unit;

    After the first flexible webbing subunit reaches the exposure zone, the first flexible webbing subunit is exposed, and the second flexible webbing subunit on the measurement area is synchronized to perform alignment measurement and/ Or focal plane measurement;

    And, the exposure process of the Kth flexible tape subunit includes:

    When exposing the K-1th flexible tape subunit, synchronously perform alignment measurement and/or focal plane measurement on the Kth flexible tape subunit on the measurement area, and the Kth flexible tape subunit After the unit completes the alignment measurement and/or focal plane measurement, the workpiece table moves to transfer the Kth flexible tape subunit from the measurement area to the exposure area, and according to the first The measurement results of the K flexible tape winding subunits adjust the mask so that the Kth flexible tape winding subunit subsequently reaches the exposure area and is within the focal depth range of the objective lens unit;

    After the Kth flexible ribbon winding subunit reaches the exposure area, exposing the Kth flexible ribbon winding subunit;

    The workpiece table moves back to the initial position.
25. The multi-station flexible web exposure method according to claim 18, wherein a first alignment mark is provided on the flexible web; and the measuring unit includes: a first light source for carrying the alignment mark The bearing platform of the unit and the first image acquisition unit, the alignment mark unit is provided with a second alignment mark corresponding to the first alignment mark;

    The process of obtaining the alignment data includes:

    The first light source provides alignment light, which irradiates the second alignment mark and the first alignment mark in sequence and is reflected by the flexible web on the measurement area, and the reflected light passes through From the alignment marking unit to the first image acquisition unit to obtain alignment data;

    According to the alignment data, the photomask or/and the work stage are adjusted to move in a plane parallel to the surface of the work stage to achieve exposure alignment.
26. The multi-station flexible web exposure method according to claim 25, wherein the measurement unit further comprises: a second light source, a projection lens assembly, a detection lens assembly, and a second image acquisition unit;

    The process of obtaining focal plane measurement data includes:

    The second light source provides measurement light, the measurement light irradiates the surface of the flexible web on the measurement area through the projection lens assembly and is reflected, and the reflected light reaches the second image after passing through the detection mirror assembly Acquisition unit to obtain focal plane measurement data;

    Adjust the reticle or/and the workpiece table to move in a direction perpendicular to the surface of the workpiece table according to the focal plane measurement data, so that the flexible web of the exposure area is in the focal depth range of the objective lens unit Inside.
27. The multi-station flexible tape exposure method according to any one of claims 18 to 26, wherein the number of the measuring unit, the mask stage, the objective lens unit and the illumination unit are all Two, one of the measuring unit, one of the mask stage, one of the objective lens unit, and one of the illumination unit are provided on both sides of the workpiece stage, and the two objective lenses on both sides of the workpiece stage The units are facing each other, and the two measuring units on both sides of the workpiece table are facing each other; the multi-station flexible web exposure method is used for double-sided exposure of the flexible web.

Images