TW202008855A - 電漿處理裝置及電漿處理方法 - Google Patents
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Abstract
提供一種無需改變期望的製程條件而使電漿點火性提升,能夠抑制對被處理物的處理後尺寸帶來影響之電漿處理裝置及電漿處理方法。
電漿處理裝置(100),係一種具備處理室(114)、及產生微波而投射至處理室(114)內之磁控管(105)、及被配置於處理室(114)內而承載晶圓(300)之電極、及在電極產生用來將晶圓(300)靜電吸附的電位之靜電吸附電源(112)、及將製程氣體供給至處理室(114)內之製程氣體供給源(118)、及電漿點火促進裝置的電漿處理裝置,其中,前述電漿點火促進裝置,為將受到脈波調變之紫外線照射至處理室(114)內之紫外線光源(102、115)。
Description
本發明有關電漿處理裝置及電漿處理方法。
近年來,半導體元件等的製造製程中的設計規則益加嚴格化,要求在製造物確保更高的尺寸精度。例如,在低溫氣體電漿中進行之蝕刻中,為了提高蝕刻的均一性,要求降低電漿密度。為了降低電漿密度,有降低氣體壓力之手法或降低微波電力等之手法,但任一手法中皆有電漿點火變得困難之虞。
對此,專利文獻1中,揭示一種對處理室同時供給微波以及紫外線之半導體製造裝置。該半導體製造裝置中,被供給的紫外線係令電漿中的原子或分子激發,發揮提高其能量之作用,而微波的功用則是令電漿維持。是故,能夠提升電漿點火性,並且可使處理速率提升。
[先前技術文獻]
[專利文獻]
[專利文獻1] 日本特開平6-349776號公報
[發明所欲解決之問題]
然而,該習知技術中,由於將紫外線連續性地照射至晶圓,而有晶圓的溫度上昇,對加工尺寸造成影響之可能性。
本發明有鑑於上述習知技術之待解問題而研發,目的在於提供一種無需改變期望的製程條件而使電漿點火性提升,能夠抑制對被處理物的處理後尺寸帶來影響之電漿處理裝置及電漿處理方法。
[解決問題之技術手段]
為解決上述待解問題,代表性的本發明之電漿處理裝置的一者,
係具備供試料受到電漿處理之處理室、及供給用來生成電漿的高頻電力之高頻電源、及供前述試料受到載置之試料台、及照射紫外線之紫外線光源的電漿處理裝置,
藉由更具備:控制部,控制前述紫外線光源,使得於前述高頻電力被供給往前述處理室內之前,令受到脈波調變之紫外線往前述處理室內照射來達成。
此外,代表性的本發明之電漿處理裝置的一者,
係具備供試料受到電漿處理之處理室、及供給用來生成電漿的高頻電力之高頻電源、及供前述試料受到載置之試料台、及照射紫外線之紫外線光源的電漿處理裝置,
藉由更具備:控制部,控制前述高頻電源與前述紫外線光源,使得前述高頻電力被供給往前述處理室內並且令受到脈波調變之紫外線往前述處理室內照射來達成。
此外,代表性的本發明之電漿處理方法的一者,
係使用藉由高頻電力而生成的電漿,於處理室內處理試料的電漿處理方法,
藉由於前述高頻電力被供給往前述處理室內之前,令受到脈波調變之紫外線往前述處理室內照射,藉此生成電漿來達成。
[發明之效果]
按照本發明,能夠提供一種無需改變期望的製程條件而使電漿點火性提升,能夠抑制對被處理物的處理後尺寸帶來影響之電漿處理裝置及電漿處理方法。
上述以外的待解問題、構成及效果,將由以下的實施形態之說明而明瞭。
一面參照圖面一面說明本發明之實施形態的電漿處理裝置。圖1為在電漿生成手段利用了微波與磁場之微波ECR(Electron Cyclotron Resonance;電子迴旋共振)電漿處理裝置的概略截面圖。特別是,電漿處理裝置中,當使用低氣體壓力、低微波功率、低工作比等的製程條件之情形下,於製程開始時不能適當地進行電漿點火是一個重要的技術問題。按照本實施形態,即使該製程條件下仍能提升電漿點火性。
微波ECR電漿處理裝置100,具備能夠將內部真空排氣之處理室114、及配置被處理物(亦稱為試料)亦即晶圓300之試料台113、及設於試料台113上方之石英等的微波及紫外線供給口117、及設於其上之導波管104、及藉由內建的第1高頻電源而被供給高頻電力而產生微波之磁控管105、及設於導波管窺視窗的上方之脈波紫外線光源102、及設於處理室114的周圍之螺線管線圈108、及連接至試料台之靜電吸附電源112、及高頻電源(第2高頻電源)101、及製程氣體供給源118、及控制部(處理器)111。
作為脈波紫外線光源,例如能夠使用能射出輸出5W、波長185nm~2000nm的光之燈。可使用射出光當中紫外頻帶(185nm~450nm)的光,進行後述處理。
以下,說明使用了微波ECR電漿處理裝置100之電漿處理的製程。首先,晶圓300,被搬入至處理室114內後,藉由靜電吸附電源112被靜電吸附於試料台113。接下來將製程氣體藉由製程氣體供給源118透過氣體導入口(圖略)從噴淋板119供給至處理室114內,藉由真空泵浦(圖略)調整至規定的壓力。
接下來,從磁控管105振盪頻率2.45GHz的微波,通過導波管104令其傳播至處理室114內。藉由微波與因螺線管線圈108而產生的磁場之作用,處理氣體被激發,藉此在晶圓300上部的空間會生成電漿109。使用此電漿109,進行被裝載於試料台113的晶圓300之蝕刻製程。
上述的微波ECR電漿處理裝置中,備有控制各元件的起動時間點之系統。具體而言,高頻電源101、脈波紫外線光源102、磁控管105、螺線管線圈108、靜電吸附電源112、光檢測器110等元件,是透過LAN(Local Area Network;區域網路)纜線116而連接至控制部111,在控制部111編寫循序,藉此便能分別控制該些元件。特別是,控制部111,可將脈波紫外線光源102做脈波調變,此處係可調整脈波間隔。
若令繞藉由螺線管線圈108而產生之磁場做圓運動之頻率、和從外部投入的電磁波的頻率一致,則藉由共振(ECR),位於氣體分子的外側之電子會開始高速地旋轉運動。此電子的運動能量為電離能量以上時,位於原子或分子的最外殻之電子會飛出,和鄰接的原子或分子衝撞。電子的數量會從衝撞的電子加上從分子或原子飛出的電子,成為2倍。其結果,電子的數量會如雪崩現象般增加,超出某一閾值便形成電漿。但,當製程條件為低氣體壓力、低微波功率的情形下,當原子或分子之間距離遠的情形下、或被電離的電子不具有足以朝向旁邊的原子或分子飛出之充分的能量的情形下,電漿點火會變得困難。
本實施形態中,在微波ECR電漿處理裝置100,設有脈波紫外線光源102。如圖2所示,從脈波紫外線光源102以2/100秒間隔產生脈波紫外線(照射脈波狀的紫外線)。紫外線的一脈波(稱為閃發(flash)),一例而言係持續1.5μs,此時放出100mJ的能量。另,脈波紫外線的波形中的紫外線的脈波周期和紫外線的照射時間之縮尺係相異,紫外線的照射時間,是揭示相對於紫外線的脈波周期而言設為約6667倍者。本規範中,只要將脈波紫外線的間隔設為至少1/155秒以上,便不會使晶圓溫度實質地上昇。因此,只要將脈波紫外線的間隔設為至少1/150秒以上即可。
一旦脈波紫外線光源102產生脈波紫外線,則產生的脈波紫外線,會透過石英光纖(例如直徑:0.8mm)103、及準直透鏡(例如直徑:3m、擴散性tan(a):0.08,惟a=光纖徑/焦點)106,對於微波入射方向平行地,且朝向被處理前的晶圓表面入射至處理室114。如此一來位於製程氣體分子或原子的外殻之電子,便藉由從脈波紫外線吸收光子而被激發。
又,若通過了製程氣體之脈波紫外線入射至晶圓表面,則在晶圓表面會發生光電效應,藉此會產生自由電子。故,注入微波,於點火前使用在處理室114被激發的電子、或自由電子,藉此便能改善電漿的點火性。
如上述般於導入微波與磁場之前對製程氣體照射紫外線,是為了提升位於製程氣體分子或原子的外側之電子的能階(激發用)。一般而言電子的激發狀態不穩定,只能停留在激發狀態10-8
s。且,電漿若有點火的火種,則會藉由雪崩現象而一瞬間生成。故,比起連續紫外線照射,瞬間性的光輸出高的脈波紫外線照射,更能一瞬間使大量的氣體激發,對於謀求電漿點火改善係合適。
又,能夠使用在電容器蓄積電荷而發光之類型的脈波紫外線光源,如此一來便無需為了令脈波紫外線產生而做光源的暖機,容易配合處理的動作時間點,對應用而言係合適。另,當以相同100mJ的功率連續性地將紫外線發光的情形下,需要約70KW的大型電源,電漿裝置的設備成本變高,亦無法節能。由該觀點看來,使用脈波紫外線來得理想。
圖3揭示在試料台上設置之電極的擴大圖。此電極,具有圓盤狀的內側電極基材301、及圍繞其之環狀的外側電極基材302、及熱噴塗膜303。靜電吸附電源112(圖1),若對電性分離的二個電極基材301、302分別施加極性相異之電壓(例如+1500V與-1500V),則由於介電,在熱噴塗膜303的表面和晶圓300的背面,於和電極基材301、302相對應之區域會分別產生正負的電位。晶圓300,藉由因此電位而產生的庫侖引力304而被吸附於電極表面。另,針對設置於試料台上的電極,亦可僅設置具有負的電位之一極的電極構件。
晶圓300被載置於試料台113(圖1)之上後,藉由靜電吸附電源112被靜電吸附於試料台113。更具體而言,如圖3所示,當負電壓被施加於熱噴塗膜303的情形下,由於介電,晶圓300的中央表面具有負的電位。亦即在晶圓300的中央表面會成為電子豐富地存在之狀態。此處,若對豐富地具有電子之晶圓300的中央表面照射脈波紫外線306,則由於光電效應,電子會從晶圓300的中央表面飛出,飛出的電子藉由晶圓300的表面上的負電位而朝向製程氣體加速。再來電子於ECR面附近,會藉由微波與磁場而加速,成為電漿點火的火種。
此外,若對內側電極基材301施加負的電壓,則和內側電極基材301相對應之受到靜電吸附的晶圓300的表面的中心區域404(圖4)會具有負電荷,並且和外側電極基材302相對應之晶圓300的表面的外側區域403(圖4)會具有正的電荷。故,較佳是將脈波紫外線的照射位置401設置於受到靜電吸附的晶圓300的具有負電荷之中心區域404的上方,而將脈波紫外線照射至上述具有負電荷之區域(負的帶電區域)。此外,較佳是令脈波紫外線電源於應處理之晶圓300受到靜電吸附前動作。
此處,微波ECR電漿處理裝置中,當將從準直透鏡至晶圓之距離設為約785mm時,若如上述般透過光纖103與準直透鏡106將脈波紫外線照射至晶圓表面,則晶圓表面的被照射範圍會成為直徑6cm的圓形區域。忽略傳播的光損失,於照射時間1.5μs間在晶圓表面接受的光的強度成為161mJ/s/cm2
。燈加熱所造成之賦予熱量,為光強度的1/10程度(16.1mJ/s/cm2
),比起處理中來自電漿的熱量(500mJ/s/cm2
)來得小,因此晶圓表面的溫度幾乎不會變。相對於此,若以100mJ的功率連續照射1sec,則到達晶圓表面之光的強度成為41551mJ/s/cm2
,晶圓表面溫度有上昇之虞。故,為了不使晶圓表面溫度上昇,而賦予點火充分的能量,使用脈波紫外線為理想。
為避免脈波紫外線與微波在傳播途中損失增大,紫外線傳播使用光纖103為理想,進一步在位於處理室上之天板107與噴淋板119使用石英製品較佳。
當使用受到脈波調變的紫外線,照射製程氣體及晶圓表面的負帶電區域時,為了驗證電漿的點火改善效果,係使用上述的微波ECR電漿處理裝置100,以複數個配方實施了點火改善確認實驗。為了做驗證電漿點火改善效果之實驗,處理模式準備了三種類(參照圖5)、處理條件準備了二種類(參照表1、2)。
說明使用了上述的微波ECR電漿處理裝置100之確認實驗中所使用的三個處理模式(亦簡稱模式)。圖5中,ESC意指靜電吸附電源的驅動電壓。圖5(a)所示之處理模式1中,在將被處理前的晶圓搬送至處理室114而載置於試料台113的電極的上方之狀態下,首先施加ESC電壓令晶圓吸附後,導入製程氣體,藉由真空泵浦(圖略)調整至規定的壓力,藉由磁控管驅動導入規定微波與磁場而使電漿點火。處理模式1中,不進行脈波紫外線的照射。
另一方面,圖5(b)所示之處理模式2中,在將被處理前的晶圓搬送至處理室114而載置於試料台113的電極的上方之狀態下,首先施加ESC電壓令晶圓吸附後,導入製程氣體,藉由真空泵浦(圖略)調整至規定的壓力,再令脈波紫外線光源(102或115)動作,接下來藉由磁控管驅動導入規定的微波與磁場而使電漿點火。
又,圖5(c)所示之處理模式3中,在將被處理前的晶圓搬送至處理室114而載置於試料台113的電極的上方之狀態下,首先令脈波紫外線光源(102或115)動作,接下來施加ESC電壓令晶圓吸附,控制部111於其後導入製程氣體,藉由真空泵浦(圖略)調整至規定的壓力,藉由磁控管驅動導入規定微波與磁場而使電漿點火。
說明使用了上述的微波ECR電漿處理裝置100之確認實驗中的二個處理條件。
表1與表2揭示二種類的處理條件。處理條件的參數被稱為配方,進行基於表1、2所示配方之動作。配方1中,使用Cl2
作為製程氣體,流量設為150ml/min,氣體壓力與微波電力分別設定為0.5Pa與1000W。
配方2中,使用Cl2
與CH3
F作為製程氣體,流量分別設為Cl2
為40ml/min、CH3
F為150ml/min,氣體壓力與微波電力分別設定為0.2Pa與600W。配方2比起配方1其氣體壓力與微波電力低,相對較難點火。
圖6以流程圖揭示藉由控制部111進行之點火時間的判定與記錄的處理流程。以圖1的光檢測器110來監視處理室內的發光狀況(發光水準),將該資料送至控制部111。步驟S01中開始脈波紫外線及規定微波與磁場之導入,並且控制部111令計數器(未圖示)啟動,首先在步驟S02中判斷若為經過10s的計數時間以前(步驟S02中Yes),則步驟S03中以控制部111分析發光資料。若發光水準超出閾值(步驟S03中Yes),控制部111判定為電漿點火,於步驟S04中開始處理製程,並且停止計數器,將該計數時間記憶作為電漿點火時間。
另一方面,若發光水準未超出閾值(步驟S03中No),將流程返回步驟S02,一面持續導入脈波紫外線及規定微波與磁場,一面繼續計數,而在步驟S03中控制部111持續監視發光水準。
於發光水準之監視中,控制部111從脈波紫外線及規定微波與磁場之導入開始起算,判斷若經過了10s的計數時間(步驟S02中No),則判斷電漿點火失敗,在步驟S05中視為錯誤。在該情形下,控制部111將電漿點火時間記憶作為10.1秒。
[針對點火改善性及照射方向相依性之檢討]
・圖5(a)的處理模式1(無紫外線)、
・圖5(b)的處理模式2(惟使用位於裝置側邊之脈波紫外線光源115,從側方令脈波紫外線入射至處理室114)、
・圖5(b)的處理模式2(惟使用位於裝置上方之脈波紫外線光源102,從上方令脈波紫外線入射至處理室114)
進行了這樣的比較試驗,確認了點火改善效果。
如表1所示,以處理模式1,對Si(矽)晶圓施加了10次配方1之處理,得到10次份的點火時間的平均值為1.13s。接下來、以處理模式2,對Si晶圓施加了10次配方1之處理,得到10次份的點火時間的平均值為1.00s。最後以處理模式2,對Si晶圓施加了10次配方1之處理,得到10次份的點火時間的平均值為0.64s。
由以上結果,可知比起不照射脈波紫外線之情形,照射會讓電漿點火性提升。此外,可知將脈波紫外線從上方(朝向Si晶圓與製程氣體)照射,比起從側方照射,能夠更加改善點火性。
[針對點火改善性之檢討]
・圖5(a)的處理模式1(無紫外線)、
・圖5(c)的處理模式3(惟使用位於裝置上方之脈波紫外線光源102,從上方令脈波紫外線入射至處理室114)
進行了這樣的比較試驗,確認了點火改善效果。
如表2所示,以處理模式1,對Si晶圓施加了10次配方2之處理,得到10次份的點火時間的平均值為4.67s。另一方面,以處理模式3,對Si晶圓施加了10次配方2之處理,得到10次份的點火時間的平均值為0.87s。
由以上結果,可知即使改變配方,比起不照射脈波紫外線之情形,照射會讓電漿點火性提升。
由以上的確認實驗,可知使用脈波紫外線,對製程氣體與晶圓表面的任一者照射皆可看出點火改善效果。此外,為了累加二種效果來創出最好的點火效果,較佳是令脈波紫外線光源於晶圓的靜電吸附前動作。這是因為於晶圓的靜電吸附前照射紫外線,藉此飛出至晶圓上的電子會增加的緣故。
具體而言,以下的工程為理想。依本實施形態之微波ECR電漿處理裝置100中,首先令脈波紫外線光源102動作,開始照射脈波紫外線。接下來,自靜電吸附電源112對試料台113施加直流電壓,藉此使被處理前的晶圓300靜電吸附。其後供給製程氣體,藉由真空泵浦調整至規定的壓力。然後,將從磁控管105產生的微波與從螺線管線圈108產生的磁場導入至處理室內,進行電漿點火。一旦電漿點火發生,其後電漿便會連續生成。藉由前述的電漿,對半導體晶圓實施規定的製程。
此外,上述的實施形態中,說明了電子迴旋共振(ECR)作為電漿生成手段,但並不限定於此,亦能運用激發製程氣體之其他的電漿放電手法。例如電容耦合電漿(CCP)、感應耦合電漿(ICP)、電磁感應耦合電漿(EMCP)等的電漿生成方式,本發明亦能運用。
另,本發明並非限定於上述實施形態,還包含各種變形例。舉例來說,上述實施形態是為了簡單明瞭地敍述本發明而詳細說明,未必限定於具備上開說明之所有構成者。此外,可將某一實施形態中的構成的一部分置換成其他實施形態之構成,又,亦可於某一實施形態之構成追加其他實施形態之構成。此外,針對各實施形態中的構成的一部分,亦可追加、刪除或置換其他構成。
101‧‧‧高頻電源
102‧‧‧脈波紫外線光源
103‧‧‧石英光纖
104‧‧‧導波管
105‧‧‧磁控管
106‧‧‧準直透鏡
107‧‧‧天板
108‧‧‧螺線管線圈
109‧‧‧電漿
111‧‧‧控制部
112‧‧‧靜電吸附電源
113‧‧‧試料台
114‧‧‧處理室
115‧‧‧脈波紫外線光源
116‧‧‧LAN纜線
117‧‧‧微波及紫外線供給口
118‧‧‧製程氣體供給源
300‧‧‧晶圓
301‧‧‧內側電極基材
302‧‧‧外側電極基材
303‧‧‧熱噴塗膜
304‧‧‧庫侖引力
306‧‧‧脈波紫外線
401‧‧‧脈波紫外線的照射位置
403‧‧‧晶圓表面上的外側區域
404‧‧‧晶圓表面上的中心區域
[圖1] 微波ECR電漿處理裝置的概略構成圖。
[圖2] 脈波紫外線和連續紫外線的持續時間比較示意圖,橫軸取時間來表示。
[圖3] 在試料台載置晶圓,施加了靜電吸附電壓時之介電分離狀況示意概略圖。
[圖4] 晶圓的俯視圖,揭示來自脈波紫外線光源之紫外線照射位置、及晶圓上帶電分布狀況。
[圖5] 電漿處理裝置的起動時間點的循序示意圖,縱軸表示各部的ON/OFF、橫軸取時間來表示。
[圖6] 點火判定及點火時間記錄的流程示意流程圖。
100‧‧‧電漿處理裝置
101‧‧‧高頻電源
102‧‧‧脈波紫外線光源
103‧‧‧石英光纖
104‧‧‧導波管
105‧‧‧磁控管
106‧‧‧準直透鏡
107‧‧‧天板
108‧‧‧螺線管線圈
109‧‧‧電漿
110‧‧‧光檢測器
111‧‧‧控制部
112‧‧‧靜電吸附電源
113‧‧‧試料台
114‧‧‧處理室
115‧‧‧脈波紫外線光源
116‧‧‧LAN纜線
117‧‧‧微波及紫外線供給口
118‧‧‧製程氣體供給源
119‧‧‧噴淋板
300‧‧‧晶圓
Claims (6)
- 一種電漿處理裝置,係具備供試料受到電漿處理之處理室、及供給用來生成電漿的高頻電力之高頻電源、及供前述試料受到載置之試料台、及照射紫外線之紫外線光源的電漿處理裝置,其特徵為, 更具備:控制部,控制前述紫外線光源,使得於前述高頻電力被供給往前述處理室內之前,令受到脈波調變之紫外線往前述處理室內照射。
- 一種電漿處理裝置,係具備供試料受到電漿處理之處理室、及供給用來生成電漿的高頻電力之高頻電源、及供前述試料受到載置之試料台、及照射紫外線之紫外線光源的電漿處理裝置,其特徵為, 更具備:控制部,控制前述高頻電源與前述紫外線光源,使得前述高頻電力被供給往前述處理室內並且令受到脈波調變之紫外線往前述處理室內照射。
- 如申請專利範圍第1項所述之電漿處理裝置,其中, 前述試料台,具備被施加用來使前述試料靜電吸附的直流電壓之電極, 前述控制部,控制前述紫外線光源,使得於前述直流電壓被施加於前述電極之前,令前述受到脈波調變之紫外線往前述處理室內照射。
- 如申請專利範圍第1項至第3項中任一項所述之電漿處理裝置,其中, 前述紫外線光源被配置成使得前述受到脈波調變之紫外線會照射至前述試料。
- 如申請專利範圍第4項所述之電漿處理裝置,其中, 前述紫外線光源被配置成使得前述受到脈波調變之紫外線會照射至被靜電吸附於前述試料台之試料的負的帶電區域。
- 一種電漿處理方法,係使用藉由高頻電力而生成的電漿,於處理室內處理試料的電漿處理方法,其特徵為, 於前述高頻電力被供給往前述處理室內之前,令受到脈波調變之紫外線往前述處理室內照射,藉此生成電漿。
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