TW202007622A - Carrying system including a detection mechanism and a tray separation mechanism - Google Patents

Carrying system including a detection mechanism and a tray separation mechanism Download PDF

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TW202007622A
TW202007622A TW108126819A TW108126819A TW202007622A TW 202007622 A TW202007622 A TW 202007622A TW 108126819 A TW108126819 A TW 108126819A TW 108126819 A TW108126819 A TW 108126819A TW 202007622 A TW202007622 A TW 202007622A
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Taiwan
Prior art keywords
tray
platform
conveyor
detection mechanism
claw member
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TW108126819A
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Chinese (zh)
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TWI732253B (en
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佐藤史朗
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日商日本電產三協股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/912Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rectilinear movements only
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/08Control devices operated by article or material being fed, conveyed or discharged
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G59/00De-stacking of articles
    • B65G59/02De-stacking from the top of the stack
    • B65G59/04De-stacking from the top of the stack by suction or magnetic devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02Articles
    • B65G2201/0235Containers
    • B65G2201/0258Trays, totes or bins
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/04Detection means
    • B65G2203/042Sensors
    • B65G2203/044Optical

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • De-Stacking Of Articles (AREA)

Abstract

The present invention provides a carrying system capable of carrying trays one by one toward a tray platform from a tray arrangement section where trays capable of accommodating display panels are stacked in a multi-layer state. The carrying system includes: a detection mechanism 28 used for detecting the upper end of a first tray 3A arranged on the uppermost layer in the tray arrangement section, and a tray separation mechanism 29 used for separating a second tray 3B, which is located in the second from the top in the tray arrangement section, from the first tray 3A. In the carrying system, each time a carrying robot carries the first tray 3A from the tray arrangement section to the tray platform, a lifting mechanism 30 raises and lowers the detection mechanism 28 which detects the upper end of the first transferred 3A tray to be carried next, and, based on the detection result of the upper end of the first tray 3A obtained by the detection mechanism 28, a claw member 60 of the tray separation mechanism 29 disposed at a specified position in the up-down direction of the tray arrangement section moves between the first tray 3A and the second tray 3B.

Description

搬送系統Handling system

本發明涉及一種搬送可收容液晶面板等顯示面板的托盤的搬送系統。The present invention relates to a transport system for transporting trays that can accommodate display panels such as liquid crystal panels.

先前,已知有一種搬送小型的液晶面板的搬送系統(例如,參照專利文獻1)。專利文獻1中記載的搬送系統包括:輸送機,搬送可收容液晶面板的托盤;托盤平臺,載置托盤;第一搬送機器人,在輸送機與托盤平臺之間搬送托盤;以及第二搬送機器人,從被載置在托盤平臺的托盤搬出液晶面板。第一搬送機器人是所謂的三軸正交機器人,包括握持托盤的托盤握持部。第二搬送機器人是所謂的並聯機器人,包括握持液晶面板的面板握持部。Previously, a transport system for transporting a small liquid crystal panel has been known (for example, refer to Patent Document 1). The transport system described in Patent Document 1 includes: a conveyor that transports a tray that can contain an LCD panel; a tray platform that mounts a tray; a first transport robot that transports a tray between the conveyor and the tray platform; and a second transport robot, The liquid crystal panel is carried out from the tray placed on the tray platform. The first transport robot is a so-called three-axis orthogonal robot, and includes a tray holding portion that holds the tray. The second transport robot is a so-called parallel robot, and includes a panel grip portion that grips the liquid crystal panel.

專利文獻1中記載的搬送系統包括供給側的輸送機與排出側的輸送機作為搬送托盤的輸送機,並且包括兩個托盤平臺。供給側的輸送機與排出側的輸送機在左右方向上鄰接配置,兩個托盤平臺在左右方向上鄰接配置。第一搬送機器人從供給側的輸送機朝托盤平臺一塊一塊地搬送托盤,並且從托盤平臺朝排出側的輸送機一塊一塊地搬送托盤。The conveyance system described in Patent Document 1 includes a conveyor on the supply side and a conveyor on the discharge side as conveyors for conveying pallets, and includes two pallet platforms. The conveyor on the supply side and the conveyor on the discharge side are arranged adjacently in the left-right direction, and the two tray platforms are arranged adjacently in the left-right direction. The first transport robot transports the trays one by one from the conveyor on the supply side toward the tray platform, and transports the trays one by one from the tray platform toward the conveyor on the discharge side.

在專利文獻1中記載的搬送系統中,輸送機朝前後方向直線式地搬送堆積成多層的托盤。另外,輸送機包含在前後方向上被分割的多個分割輸送機。構成供給側的輸送機的分割輸送機中的配置在最後側的分割輸送機包括用於探測輸送機上的托盤的層數的層數探測機構。在專利文獻1中記載的搬送系統中,第一搬送機器人根據層數探測機構的探測結果進行動作,從供給側的輸送機朝托盤平臺搬送托盤。 [現有技術文獻] [專利文獻]In the conveyance system described in Patent Document 1, the conveyor linearly conveys the stacked pallets in the front-rear direction. In addition, the conveyor includes a plurality of divided conveyors that are divided in the front-rear direction. The split conveyor arranged on the rear side among the split conveyors constituting the conveyor on the supply side includes a layer number detection mechanism for detecting the number of layers of pallets on the conveyor. In the transport system described in Patent Document 1, the first transport robot operates based on the detection result of the layer number detection mechanism, and transports the tray from the conveyor on the supply side toward the tray platform. [Prior Art Literature] [Patent Literature]

[專利文獻1]日本專利特開2018-6518號公報[Patent Document 1] Japanese Patent Laid-Open No. 2018-6518

[發明所要解決的問題][Problems to be solved by the invention]

在專利文獻1中記載的搬送系統中,當在供給側的輸送機上,在上下方向上接觸的兩塊托盤中的一塊托盤陷入另一塊托盤,且兩塊以上的托盤在重疊的狀態下被從供給側的輸送機朝托盤平臺搬送時,存在產生如下等各種問題的擔憂:第二搬送機器人無法從被載置在托盤平臺的托盤搬出液晶面板、或被收容在被載置在托盤平臺的托盤的液晶面板與第二搬送機器人的面板握持部碰撞而導致液晶面板破損。In the conveyance system described in Patent Document 1, when a conveyor on the supply side, one of the two trays contacted in the up-and-down direction sinks into the other, and two or more trays are overlapped When transporting from the conveyor on the supply side to the pallet platform, there is a concern that various problems such as the following: the second transport robot cannot carry out the liquid crystal panel from the pallet mounted on the pallet platform, or is accommodated in the pallet platform. The liquid crystal panel of the tray collides with the panel grip of the second transport robot, and the liquid crystal panel is damaged.

因此,本發明的課題在於提供一種搬送系統,其可從配置處於堆積成多層的狀態的可收容顯示面板的托盤的托盤配置部朝托盤平臺一塊一塊地搬送托盤。 [解決問題的技術手段]Therefore, an object of the present invention is to provide a transport system that can transport trays one by one toward a tray platform from a tray arrangement portion where trays that can accommodate display panels stacked in multiple layers are arranged toward a tray platform. [Technical means to solve the problem]

為了解決所述問題,本發明的搬送系統的特徵在於包括:托盤配置部,配置處於堆積成多層的狀態的可收容顯示面板的托盤;托盤平臺,載置托盤;搬送機器人,從托盤配置部朝托盤平臺一塊一塊地搬送托盤;探測機構,用於探測第一托盤的上端,第一托盤為在托盤配置部中堆積成多層的托盤中的配置在最上層的托盤;托盤分離機構,用於將第二托盤與所述第一托盤分離,第二托盤為在托盤配置部中堆積成多層的托盤中的配置在從上方起第二個的托盤;以及升降機構,用於使探測機構及托盤分離機構相對於托盤配置部相對地進行升降,托盤分離機構包含:爪構件,進入第一托盤與第二托盤之間;以及爪移動機構,使爪構件在爪構件進入第一托盤與第二托盤之間的分離位置和爪構件從第一托盤與第二托盤之間離開的退避位置之間移動,每當搬送機器人從托盤配置部朝托盤平臺搬送第一托盤時,升降機構使探測機構相對於托盤配置部相對地進行升降,探測機構探測下一個被搬送的第一托盤的上端,並且根據由探測機構所得的第一托盤的上端的探測結果,配置在相對於托盤配置部的上下方向的規定的位置的爪構件從退避位置朝分離位置移動。In order to solve the above-mentioned problems, the transport system of the present invention is characterized by including: a tray arrangement section that arranges trays that can accommodate a display panel in a state of being stacked in multiple layers; a tray platform that mounts trays; and a transport robot that faces from the tray arrangement section The pallet platform conveys the pallets one by one; the detection mechanism is used to detect the upper end of the first pallet. The first pallet is the pallet arranged at the uppermost layer among the pallets stacked in multiple layers in the pallet arrangement section; the pallet separation mechanism is used to The second tray is separated from the first tray, and the second tray is a tray disposed second from above among the trays stacked in multiple layers in the tray arrangement portion; and a lifting mechanism for separating the detection mechanism and the tray The mechanism moves up and down relative to the tray arrangement portion. The tray separation mechanism includes: a claw member that enters between the first tray and the second tray; and a claw moving mechanism that allows the claw member to enter the first tray and the second tray between the claw members Between the separation position between the two and the retracted position where the claw member is separated from the first tray and the second tray, the lift mechanism moves the detection mechanism relative to the tray each time the transport robot transports the first tray from the tray arrangement portion toward the tray platform The arranging section relatively moves up and down, and the detection mechanism detects the upper end of the first pallet to be transported next, and according to the detection result of the upper end of the first pallet obtained by the detection mechanism, the arranging section is arranged in a predetermined direction relative to the vertical direction of the pallet arrangement section The claw member at the position moves from the retracted position toward the separated position.

在本發明中,當將在托盤配置部中堆積成多層的托盤中的配置在最上層的托盤設為第一托盤,將在托盤配置部中堆積成多層的托盤中的配置在從上方起第二個的托盤設為第二托盤時,搬送系統包括用於將第一托盤與第二托盤分離的托盤分離機構。因此,在本發明中,可通過搬送機器人,從配置處於堆積成多層的狀態的托盤的托盤配置部朝托盤平臺一塊一塊地搬送托盤。In the present invention, when the tray arranged in the uppermost layer among the trays stacked in multiple layers in the tray arrangement section is set as the first tray, the tray arranged in multiple layers in the tray arrangement section is arranged first from the top When two trays are set as the second tray, the transport system includes a tray separating mechanism for separating the first tray from the second tray. Therefore, in the present invention, the transport robot can transport the trays one by one from the tray arrangement portion where the trays stacked in multiple layers are arranged toward the tray platform.

另外,本發明的搬送系統包括用於探測第一托盤的上端的探測機構、及用於使探測機構及托盤分離機構相對於托盤配置部相對地進行升降的升降機構,托盤分離機構包括進入第一托盤與第二托盤之間的爪構件、及使爪構件在分離位置與退避位置之間移動的爪移動機構。另外,在本發明中,每當搬送機器人從托盤配置部朝托盤平臺搬送第一托盤時,升降機構使探測機構相對於托盤配置部相對地進行升降,探測機構探測下一個被搬送的第一托盤的上端,並且根據由探測機構所得的第一托盤的上端的探測結果,配置在相對於托盤配置部的上下方向的規定的位置的爪構件從退避位置朝分離位置移動。In addition, the transport system of the present invention includes a detection mechanism for detecting the upper end of the first tray, and a lifting mechanism for relatively raising and lowering the detection mechanism and the tray separation mechanism relative to the tray arrangement portion. A claw member between the tray and the second tray, and a claw moving mechanism that moves the claw member between the separation position and the retracted position. In addition, in the present invention, each time the transport robot transports the first tray from the tray arrangement portion to the tray platform, the elevating mechanism relatively raises and lowers the detection mechanism relative to the tray arrangement portion, and the detection mechanism detects the next first tray to be transported At the upper end of the first tray, and according to the detection result of the upper end of the first tray obtained by the detection mechanism, the claw member disposed at a predetermined position in the vertical direction relative to the tray arrangement portion moves from the retracted position to the separated position.

因此,在本發明中,即便堆積成多層的托盤的上下方向的間距因堆積成多層的各個托盤的歪斜等的影響而變得不固定,也能夠以更高的概率使爪構件進入第一托盤與第二托盤之間。因此,在本發明中,可使用托盤分離機構以更高的概率將第一托盤與第二托盤分離。其結果,在本發明中,可通過搬送機器人從托盤配置部朝托盤平臺確實地一塊一塊地搬送托盤。Therefore, in the present invention, even if the pitch in the vertical direction of trays stacked in multiple layers becomes unstable due to the influence of the skew of each tray stacked in multiple layers, the claw member can enter the first tray with a higher probability Between the second tray. Therefore, in the present invention, the tray separation mechanism can be used to separate the first tray from the second tray with a higher probability. As a result, in the present invention, the pallet can be surely conveyed one by one by the conveying robot from the pallet arrangement portion toward the pallet platform.

在本發明中,優選當搬送機器人從托盤配置部朝托盤平臺搬送第一托盤時,在探測機構探測下一個第一托盤的上端之前,升降機構使探測機構相對於托盤配置部相對地升降至配置有下一個應被搬送的第一托盤的位置,探測機構探測下一個應被搬送的第一托盤的有無。當如此構成時,即便萬一由搬送機器人從托盤配置部朝托盤平臺搬送了重疊的狀態的兩塊以上的托盤,也可以探測到從托盤配置部朝托盤平臺搬送了兩塊以上的托盤。因此,當從托盤配置部朝托盤平臺搬送了重疊的狀態的兩塊以上的托盤時,可執行規定的錯誤處理。In the present invention, preferably, when the transport robot transports the first tray from the tray arrangement portion to the tray platform, before the detection mechanism detects the upper end of the next first tray, the elevating mechanism relatively raises and lowers the detection mechanism relative to the tray arrangement portion to the arrangement There is the position of the first pallet to be transported next, and the detection mechanism detects the presence or absence of the first pallet to be transported next. With such a configuration, even if two or more trays in a state of being overlapped are transferred from the tray arrangement portion to the tray platform by the transfer robot, it can be detected that two or more trays are transferred from the tray arrangement portion to the tray platform. Therefore, when two or more trays in an overlapping state are transferred from the tray arrangement portion to the tray platform, a predetermined error process can be performed.

在本發明中,優選搬送系統包括從被載置在托盤平臺的托盤搬出顯示面板的第二搬送機器人,且當探測機構探測到不存在下一個應被搬送的第一托盤時,第二搬送機器人停止。當如此構成時,即便萬一由搬送機器人從托盤配置部朝托盤平臺搬送了重疊的狀態的兩塊以上的托盤,也可以防止由被收容在被載置在托盤平臺的托盤的顯示面板與第二搬送機器人的碰撞所引起的顯示面板的破損。In the present invention, it is preferable that the transport system includes a second transport robot that transports the display panel from the tray mounted on the tray platform, and when the detection mechanism detects that there is no next first tray to be transported, the second transport robot stop. With this configuration, even if two or more trays in an overlapping state are transported by the transport robot from the tray arrangement portion to the tray platform, it is possible to prevent the display panel and the first tray accommodated in the tray placed on the tray platform 2. Damage to the display panel caused by the collision of the transport robot.

在本發明中,優選在爪構件的前端部的上表面,形成有隨著朝向爪構件的前端而朝下側傾斜的上側傾斜面,且在爪構件的前端部的下表面,形成有隨著朝向爪構件的前端而朝上側傾斜的下側傾斜面。當如此構成時,能夠以更高的概率使爪構件進入第一托盤與第二托盤之間,可使用托盤分離機構以更高的概率將第一托盤與第二托盤分離。因此,可通過搬送機器人從托盤配置部朝托盤平臺更確實地一塊一塊地搬送托盤。 [發明的效果]In the present invention, it is preferable that an upper inclined surface inclined downward toward the front end of the claw member is formed on the upper surface of the front end portion of the claw member, and that the following surface is formed on the lower surface of the front end portion of the claw member. A lower inclined surface inclined upward toward the front end of the claw member. When configured in this manner, the claw member can enter the first tray and the second tray with a higher probability, and the tray separating mechanism can be used to separate the first tray from the second tray with a higher probability. Therefore, the transport robot can transport the trays one by one from the tray arrangement portion toward the tray platform more reliably. [Effect of invention]

如上所述,在本發明的搬送系統中,可從配置處於堆積成多層的狀態的可收容顯示面板的托盤的托盤配置部朝托盤平臺一塊一塊地搬送托盤。As described above, in the transport system of the present invention, the trays can be transported one by one toward the tray platform from the tray arrangement portion where trays capable of accommodating display panels stacked in multiple layers are arranged toward the tray platform.

以下,一邊參照圖式一邊對本發明的實施方式進行說明。Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(搬送系統的整體結構) 圖1是本發明的實施方式的搬送系統1的側面圖。圖2是從圖1的E-E方向表示搬送系統1的平面圖。(Overall structure of conveying system) FIG. 1 is a side view of a transport system 1 according to an embodiment of the present invention. FIG. 2 is a plan view showing the transport system 1 from the E-E direction in FIG. 1.

本形態的搬送系統1被組裝入便攜式機器等中所使用的小型的液晶顯示器的生產線來使用。搬送系統1搬送作為顯示面板的液晶面板2,將液晶面板2供給至對液晶面板2進行規定的處理的處理裝置15(參照圖2)。液晶面板2形成為長方形的平板狀。The transport system 1 of this embodiment is used in a production line of small liquid crystal displays used in portable devices and the like. The transport system 1 transports the liquid crystal panel 2 as a display panel, and supplies the liquid crystal panel 2 to the processing device 15 (see FIG. 2) that performs predetermined processing on the liquid crystal panel 2. The liquid crystal panel 2 is formed in a rectangular flat plate shape.

搬送系統1包括兩個輸送機,即搬送可收容液晶面板2的托盤3的輸送機4、輸送機5。即,搬送系統1搬送托盤3。托盤3形成為大致長方形的平板狀。在托盤3的上表面,形成有收容液晶面板2的凹部。另外,托盤3包括樹脂,比較容易變形。輸送機4、輸送機5朝水平方向直線式地搬送堆積成多層的托盤3(經堆疊的托盤3)。The transport system 1 includes two conveyors, that is, a conveyor 4 and a conveyor 5 that transport a tray 3 that can accommodate the liquid crystal panel 2. That is, the transport system 1 transports the tray 3. The tray 3 is formed in a substantially rectangular flat plate shape. On the upper surface of the tray 3, a recessed portion for accommodating the liquid crystal panel 2 is formed. In addition, the tray 3 includes resin and is relatively easy to deform. The conveyor 4 and the conveyor 5 linearly transport the stacked trays 3 (stacked trays 3) in a horizontal direction.

在以下的說明中,將輸送機4、輸送機5搬送托盤3的方向(圖1等的X方向)設為“前後方向”,將與上下方向(垂直方向)及前後方向正交的方向(圖1等的Y方向)設為“左右方向”。另外,將作為前後方向的一側的圖1等的X1方向側設為“前”側,將作為其相反側的圖1等的X2方向側設為“後方(後)側”,將作為左右方向的一側的圖2等的Y1方向側設為“右”側,將作為其相反側的圖2等的Y2方向側設為“左”側。在本形態中,在搬送系統1的後側配置有處理裝置15。In the following description, the direction in which the conveyor 4 and the conveyor 5 transport the pallet 3 (X direction in FIG. 1 etc.) is referred to as the “front-rear direction”, and the direction orthogonal to the vertical direction (vertical direction) and the front-rear direction ( (Y direction in FIG. 1 etc.) is set to "left-right direction". In addition, let the X1 direction side of FIG. 1 etc. which is the front-back direction be the "front" side, and let the X2 direction side of FIG. 1 etc. which are the opposite side be the "rear (rear) side" and let it be left and right The Y1 direction side of FIG. 2 etc. on one side of the direction is referred to as the “right” side, and the Y2 direction side of FIG. 2 etc., which is the opposite side, is referred to as the “left” side. In this embodiment, the processing device 15 is arranged on the rear side of the transport system 1.

另外,搬送系統1包括:兩個托盤平臺,即載置托盤3的托盤平臺6、托盤平臺7;作為搬送機器人的機器人8,在輸送機4、輸送機5與托盤平臺6、托盤平臺7之間搬送托盤3;作為第二搬送機器人的機器人9,從被載置在托盤平臺6、托盤平臺7的托盤3搬出液晶面板2;以及供給單元10,從機器人9接收液晶面板2並供給至處理裝置15。相比於輸送機4、輸送機5,托盤平臺6、托盤平臺7配置在更後側。相比於托盤平臺6、托盤平臺7,供給單元10配置在更後側。In addition, the transport system 1 includes: two pallet platforms, that is, a pallet platform 6 and a pallet platform 7 on which the pallet 3 is placed; a robot 8 as a transport robot, among the conveyor 4, the conveyor 5 and the pallet platform 6, the pallet platform 7 Transfer tray 3; the robot 9 as the second transfer robot transports the liquid crystal panel 2 from the tray 3 placed on the tray platform 6 and the tray platform 7; and the supply unit 10 receives the liquid crystal panel 2 from the robot 9 and supplies it to the process装置15。 Device 15. Compared with the conveyor 4 and the conveyor 5, the pallet platform 6 and the pallet platform 7 are arranged on the rear side. Compared to the pallet platform 6 and the pallet platform 7, the supply unit 10 is arranged on the rear side.

另外,搬送系統1包括:本體框架11,設置輸送機4、輸送機5,托盤平臺6、托盤平臺7,機器人8,及供給單元10;以及本體框架12,設置機器人9。本體框架11形成為在前後方向上細長、且高度低的扁平的長方體狀。在本體框架11的上表面,設置有輸送機4、輸送機5,托盤平臺6、托盤平臺7,機器人8,及供給單元10。本體框架12是形成為大致門型的門型框架,當從前後方向觀察時,以橫跨本體框架11的後端側部分的方式設置。In addition, the conveyance system 1 includes a main body frame 11 provided with a conveyor 4, a conveyor 5, a pallet platform 6, a pallet platform 7, a robot 8, and a supply unit 10; and a main body frame 12 provided with a robot 9. The body frame 11 is formed in a flat rectangular parallelepiped shape that is elongated in the front-rear direction and has a low height. On the upper surface of the body frame 11, a conveyor 4, a conveyor 5, a pallet platform 6, a pallet platform 7, a robot 8, and a supply unit 10 are provided. The body frame 12 is a door-shaped frame formed in a substantially door shape, and is provided so as to straddle the rear end side portion of the body frame 11 when viewed from the front-rear direction.

輸送機4、輸送機5是包括多個輥的輥式輸送機。輸送機4與輸送機5在左右方向上鄰接配置。輸送機4朝後側搬送經堆疊的托盤3,輸送機5朝前側搬送經堆疊的托盤3。在由輸送機4搬送的托盤3收容有多塊液晶面板2。另一方面,在由輸送機5搬送的托盤3未收容液晶面板2,由輸送機5搬送的托盤3變成空托盤。另外,輸送機4、輸送機5也可以是帶式輸送機等。The conveyor 4 and the conveyor 5 are roller conveyors including a plurality of rollers. The conveyor 4 and the conveyor 5 are arranged adjacent to each other in the left-right direction. The conveyor 4 conveys the stacked tray 3 toward the rear side, and the conveyor 5 conveys the stacked tray 3 toward the front side. A plurality of liquid crystal panels 2 are housed in the tray 3 conveyed by the conveyor 4. On the other hand, the liquid crystal panel 2 is not accommodated in the tray 3 conveyed by the conveyor 5, and the tray 3 conveyed by the conveyor 5 becomes an empty tray. In addition, the conveyor 4 and the conveyor 5 may be a belt conveyor or the like.

輸送機4包含在前後方向上被分割的多個分割輸送機,即分割輸送機16~分割輸送機20。例如,輸送機4包含五個分割輸送機,即分割輸送機16~分割輸送機20。分割輸送機16~分割輸送機20以此順序從前側朝後側配置。同樣地,輸送機5包含在前後方向上被分割的五個分割輸送機,即分割輸送機21~分割輸送機25。分割輸送機21~分割輸送機25以此順序從前側朝後側配置。分割輸送機16~分割輸送機25可個別地進行驅動。The conveyor 4 includes a plurality of division conveyors divided in the front-rear direction, that is, the division conveyor 16 to the division conveyor 20. For example, the conveyor 4 includes five division conveyors, that is, division conveyor 16 to division conveyor 20. The dividing conveyor 16 to the dividing conveyor 20 are arranged in this order from the front side to the rear side. Similarly, the conveyor 5 includes five divided conveyors divided in the front-rear direction, that is, the divided conveyor 21 to the divided conveyor 25. The dividing conveyor 21 to the dividing conveyor 25 are arranged in this order from the front side to the rear side. The split conveyor 16 to the split conveyor 25 can be individually driven.

在分割輸送機16,載置由作業者從臨時放置用的架子(省略圖示)搬運而來的堆疊狀態的托盤3。被載置在分割輸送機16的堆疊狀態的托盤3由輸送機4朝後側搬送。被搬送至分割輸送機20的堆疊狀態的托盤3如後述那樣由機器人8進行拆疊。另外,如後述那樣通過機器人8來將空的托盤3堆疊在分割輸送機25。當將托盤3堆疊至規定的層數時,堆疊狀態的托盤3由輸送機5朝前側搬送。被搬送至分割輸送機21的堆疊狀態的托盤3由作業者搬運至空托盤用的架子。On the split conveyor 16, the stacked trays 3 that are transported by the worker from a temporary placement shelf (not shown) are placed. The tray 3 placed in the stacked state of the split conveyor 16 is conveyed toward the rear side by the conveyor 4. The stacked trays 3 conveyed to the split conveyor 20 are unstacked by the robot 8 as described later. In addition, as described later, the robot 8 stacks the empty trays 3 on the dividing conveyor 25. When the trays 3 are stacked to a predetermined number of layers, the stacked trays 3 are transported by the conveyor 5 toward the front side. The stacked trays 3 conveyed to the split conveyor 21 are transported by the operator to a rack for empty trays.

在分割輸送機20,設置有探測機構28、托盤分離機構29以及升降機構30,探測機構28用於探測在分割輸送機20中堆積成多層的托盤3中的配置在最上層的托盤3的上端,托盤分離機構29用於將在分割輸送機20中堆積成多層的托盤3中的配置在從上方起第二個的托盤3與配置在最上層的托盤3分離,升降機構30用於使探測機構28及托盤分離機構29相對於分割輸送機20進行升降(參照圖3、圖4)。探測機構28、托盤分離機構29及升降機構30的具體的結構將後述。另外,本形態的分割輸送機20是配置處於堆積成多層的狀態的可收容液晶面板2的托盤3的托盤配置部。The dividing conveyor 20 is provided with a detection mechanism 28, a tray separating mechanism 29, and a lifting mechanism 30. The detecting mechanism 28 is used to detect the upper end of the tray 3 arranged in the uppermost layer among the trays 3 stacked in multiple layers on the dividing conveyor 20 , The tray separating mechanism 29 is used to separate the tray 3 arranged second from the top among the trays 3 stacked in multiple layers on the split conveyor 20 and the tray 3 arranged on the uppermost layer, and the lifting mechanism 30 is used to detect The mechanism 28 and the tray separation mechanism 29 move up and down relative to the split conveyor 20 (refer to FIGS. 3 and 4 ). The specific structures of the detection mechanism 28, the tray separation mechanism 29, and the elevating mechanism 30 will be described later. In addition, the split conveyor 20 of the present embodiment is a tray arrangement portion that arranges trays 3 that can accommodate the liquid crystal panel 2 in a stacked state.

在托盤平臺6、托盤平臺7載置一塊托盤3。托盤平臺6與托盤平臺7以在左右方向上空開規定的間隔的狀態來配置。托盤平臺6在左右方向上配置在與輸送機4大致相同的位置,托盤平臺7在左右方向上配置在與輸送機5大致相同的位置。另外,托盤平臺6緊跟在分割輸送機20之後來配置,托盤平臺7緊跟在分割輸送機25之後來配置。托盤平臺6、托盤平臺7的上表面成為與上下方向正交的平面。A tray 3 is placed on the tray platform 6 and the tray platform 7. The pallet platform 6 and the pallet platform 7 are arranged with a predetermined gap in the left-right direction. The pallet platform 6 is arranged at substantially the same position as the conveyor 4 in the left-right direction, and the pallet platform 7 is arranged at substantially the same position as the conveyor 5 in the left-right direction. In addition, the pallet platform 6 is arranged immediately after the dividing conveyor 20, and the pallet platform 7 is arranged immediately after the dividing conveyor 25. The upper surface of the tray platform 6 and the tray platform 7 becomes a plane orthogonal to the up-down direction.

機器人8是所謂的三軸正交機器人。機器人8包括:本體框架35,形成為門型;可動框架36,以相對於本體框架35可朝左右方向滑動的方式保持在本體框架35;可動框架37,以相對於可動框架36可朝前後方向滑動的方式保持在可動框架36;可動框架38,以相對於可動框架37可朝上下方向滑動的方式保持在可動框架37;以及托盤握持部39,安裝在可動框架38。另外,機器人8包括:使可動框架36朝左右方向滑動的驅動機構、使可動框架37朝前後方向滑動的驅動機構、以及使可動框架38朝上下方向滑動的驅動機構。The robot 8 is a so-called three-axis orthogonal robot. The robot 8 includes: a body frame 35 formed in a door shape; a movable frame 36 held in the body frame 35 so as to be slidable in the left-right direction relative to the body frame 35; and a movable frame 37 held in the front-rear direction relative to the movable frame 36 The movable frame 36 is slidably held; the movable frame 38 is held in the movable frame 37 so as to be slidable up and down relative to the movable frame 37; and the tray holding portion 39 is attached to the movable frame 38. The robot 8 includes a drive mechanism that slides the movable frame 36 in the left-right direction, a drive mechanism that slides the movable frame 37 in the front-rear direction, and a drive mechanism that slides the movable frame 38 in the vertical direction.

本體框架35在左右方向上,以橫跨分割輸送機19、分割輸送機24的後端側部分及分割輸送機20、分割輸送機25的前端側部分的方式設置。本體框架35以從本體框架11的上表面立起的方式固定在本體框架11的上表面。可動框架36安裝在本體框架35的上表面側,可動框架37安裝在可動框架36的右側,可動框架38安裝在可動框架37的後端側。托盤握持部39安裝在可動框架38的下端。托盤握持部39包括吸附托盤3的多個吸附部。當機器人8搬送托盤3時,吸附部接觸托盤3的上表面來真空吸附托盤3。The main body frame 35 is provided in the left-right direction so as to straddle the rear end portions of the split conveyor 19 and the split conveyor 24 and the front end portions of the split conveyor 20 and the split conveyor 25. The body frame 35 is fixed to the upper surface of the body frame 11 so as to stand up from the upper surface of the body frame 11. The movable frame 36 is mounted on the upper surface side of the body frame 35, the movable frame 37 is mounted on the right side of the movable frame 36, and the movable frame 38 is mounted on the rear end side of the movable frame 37. The tray grip 39 is attached to the lower end of the movable frame 38. The tray grip 39 includes a plurality of suction parts that suction the tray 3. When the robot 8 transports the tray 3, the suction portion contacts the upper surface of the tray 3 to vacuum-suck the tray 3.

機器人8從輸送機4朝托盤平臺6、托盤平臺7一塊一塊地搬送托盤3,並且從托盤平臺6、托盤平臺7朝輸送機5一塊一塊地搬送托盤3。具體而言,機器人8將被搬送至分割輸送機20的堆疊狀態的托盤3一塊一塊地搬送至托盤平臺6或托盤平臺7,並將分割輸送機20上的堆疊狀態的托盤3拆疊。另外,機器人8將變成空托盤的一塊托盤3從托盤平臺6或托盤平臺7搬送至分割輸送機25,並在分割輸送機25堆疊托盤3直至在分割輸送機25上堆積的托盤3的層數變成規定的層數。The robot 8 conveys the pallet 3 one by one from the conveyor 4 toward the pallet platform 6 and the pallet platform 7, and conveys the pallet 3 one by one from the pallet platform 6 and the pallet platform 7 toward the conveyor 5. Specifically, the robot 8 transports the stacked pallets 3 transferred to the split conveyor 20 to the pallet platform 6 or the pallet platform 7 one by one, and unstacks the stacked pallets 3 on the split conveyor 20. In addition, the robot 8 transfers a pallet 3 that has become an empty pallet from the pallet platform 6 or the pallet platform 7 to the split conveyor 25, and stacks the pallets 3 on the split conveyor 25 up to the number of layers of the pallet 3 stacked on the split conveyor 25 It becomes the prescribed number of floors.

機器人9是所謂的並聯機器人。機器人9包括:本體部45、與本體部45連結的三根操縱杆46、與三根操縱杆46分別連結的三個臂部47、與三個臂部47連結的頭部單元48、以及安裝在頭部單元48的面板握持部49。本體部45固定在本體框架12的上表面部12a,機器人9配置在上表面部12a的下側。即,機器人9以懸挂在上表面部12a的方式設置在上表面部12a。另外,本體部45配置在托盤平臺6、托盤平臺7的上方,並且相比於機器人8的本體框架35,配置在更後側。The robot 9 is a so-called parallel robot. The robot 9 includes a body portion 45, three joysticks 46 connected to the body portion 45, three arm portions 47 connected to the three joysticks 46, a head unit 48 connected to the three arm portions 47, and a head mounted on the head The panel grip 49 of the unit 48. The body portion 45 is fixed to the upper surface portion 12a of the body frame 12, and the robot 9 is disposed below the upper surface portion 12a. That is, the robot 9 is provided on the upper surface portion 12a so as to be suspended from the upper surface portion 12a. In addition, the body portion 45 is arranged above the pallet platform 6 and the pallet platform 7, and is arranged on the rear side of the body frame 35 of the robot 8.

三根操縱杆46以大致等角度間距呈大致放射狀地朝本體部45的外周側伸長的方式與本體部45連結。即,三根操縱杆46以大致120°間距呈大致放射狀地朝本體部45的外周側伸長的方式與本體部45連結。另外,三根操縱杆46的基端側可轉動地與本體部45連結。在本體部45與操縱杆46的連結部,配置有使操縱杆46轉動的馬達50。本形態的機器人9包括使三根操縱杆46分別轉動的三個馬達50。The three joysticks 46 are connected to the body portion 45 so as to extend substantially radially toward the outer peripheral side of the body portion 45 at substantially equal angular intervals. That is, the three joysticks 46 are connected to the body portion 45 so as to extend radially toward the outer peripheral side of the body portion 45 at a substantially 120° pitch. In addition, the base ends of the three joysticks 46 are rotatably connected to the main body 45. A motor 50 that rotates the joystick 46 is arranged at the connecting portion between the main body 45 and the joystick 46. The robot 9 of this form includes three motors 50 that respectively rotate the three joysticks 46.

臂部47的基端側可轉動地與操縱杆46的前端側連結。具體而言,臂部47包括相互平行的直線狀的兩根臂52,兩根臂52各自的基端側可轉動地與操縱杆46的前端側連結。頭部單元48可轉動地與三個臂部47的前端側連結。面板握持部49安裝在頭部單元48的下端。面板握持部49包括真空吸附液晶面板2的多個吸附部,通過所述吸附部來吸附液晶面板2的上表面,由此握持液晶面板2。另外,在頭部單元48的上端,安裝有將上下方向作為旋轉的軸方向來使面板握持部49旋轉的馬達。The base end side of the arm portion 47 is rotatably connected to the front end side of the joystick 46. Specifically, the arm portion 47 includes two linear arms 52 parallel to each other, and the base end sides of the two arms 52 are rotatably connected to the front end side of the joystick 46. The head unit 48 is rotatably connected to the front end sides of the three arm portions 47. The panel grip 49 is attached to the lower end of the head unit 48. The panel holding portion 49 includes a plurality of suction portions that vacuum suction the liquid crystal panel 2, and the upper surface of the liquid crystal panel 2 is suctioned by the suction portions, thereby holding the liquid crystal panel 2. In addition, at the upper end of the head unit 48, a motor that rotates the panel grip 49 using the up-down direction as the axis of rotation is attached.

在機器人9中,個別地驅動三個馬達50,由此可在規定的區域內,使頭部單元48在頭部單元48一直保持固定的姿勢的狀態下(具體而言,在面板握持部49一直朝向下側的狀態下),朝上下方向、左右方向及前後方向的任意的位置移動。機器人9從被載置在托盤平臺6的托盤3或被載置在托盤平臺7的托盤3一塊一塊地搬出液晶面板2。具體而言,機器人9從托盤3一塊一塊地搬出液晶面板2,直至被載置在托盤平臺6、托盤平臺7的托盤3變成空托盤,並搬入至供給單元10。In the robot 9, the three motors 50 are individually driven, so that the head unit 48 can be kept in a fixed posture in a predetermined area (specifically, in the panel holding portion) 49 is always facing the lower side), moving to any position in the up-down direction, left-right direction, and front-rear direction. The robot 9 carries out the liquid crystal panel 2 one by one from the tray 3 placed on the tray platform 6 or the tray 3 placed on the tray platform 7. Specifically, the robot 9 carries out the liquid crystal panel 2 one by one from the tray 3 until the tray 3 placed on the tray platform 6 and the tray platform 7 becomes an empty tray, and is carried into the supply unit 10.

供給單元10包括:數據讀取裝置,讀取液晶面板2的被記錄在脫離顯示區域的部位的檢查數據等數據;對準裝置,在由數據讀取裝置讀取液晶面板2的數據之前進行液晶面板2的對位;以及機器人,朝處理裝置15搬送由數據讀取裝置讀取數據後的液晶面板2。供給單元10從機器人9接收液晶面板2並供給至處理裝置15。The supply unit 10 includes: a data reading device that reads data such as inspection data recorded on a portion of the liquid crystal panel 2 that is away from the display area; an alignment device that performs liquid crystal reading before the data reading device reads the data of the liquid crystal panel 2 The alignment of the panel 2; and the robot, the liquid crystal panel 2 after the data reading device reads the data is transferred to the processing device 15. The supply unit 10 receives the liquid crystal panel 2 from the robot 9 and supplies it to the processing device 15.

(探測機構、托盤分離機構及升降機構的結構) 圖3是圖1中所示的分割輸送機20的立體圖。圖4是用於說明圖3的F部的結構的平面圖。圖5是用於說明圖4中所示的探測機構28及托盤分離機構29等的結構的概略圖。(Structure of detection mechanism, tray separation mechanism and lifting mechanism) FIG. 3 is a perspective view of the split conveyor 20 shown in FIG. 1. 4 is a plan view for explaining the structure of the F part of FIG. 3. FIG. 5 is a schematic diagram for explaining the structure of the detection mechanism 28, the tray separation mechanism 29, and the like shown in FIG.

升降機構30是電動缸30。因此,在以下的說明中,將升降機構30表述成“電動缸30”。電動缸30設置在左右方向上的分割輸送機20的兩端側。設置在分割輸送機20的左右方向的兩端側的兩個電動缸30在前後方向上配置在相同的位置。另外,電動缸30在前後方向上,配置在分割輸送機20的大致中心位置。電動缸30以電動缸30的杆朝上側突出的方式配置。The lifting mechanism 30 is an electric cylinder 30. Therefore, in the following description, the lifting mechanism 30 is expressed as "electric cylinder 30". The electric cylinder 30 is provided on both end sides of the split conveyor 20 in the left-right direction. The two electric cylinders 30 provided on both end sides of the split conveyor 20 in the left-right direction are arranged at the same position in the front-rear direction. In addition, the electric cylinder 30 is arranged at a substantially central position of the split conveyor 20 in the front-rear direction. The electric cylinder 30 is arranged so that the rod of the electric cylinder 30 protrudes upward.

在電動缸30的杆的上端部固定有固定板55。在固定板55固定有用於朝上下方向引導固定板55的引導軸56。引導軸56從固定板55朝下側伸長。引導軸56插通於固定在分割輸送機20的導套57。另外,升降機構30也可以包含滾珠螺杆、及使滾珠螺杆的螺杆軸旋轉的馬達等,所述滾珠螺杆具有可旋轉地支撐在分割輸送機20的螺杆軸與固定在固定板55的螺母。A fixing plate 55 is fixed to the upper end of the rod of the electric cylinder 30. A guide shaft 56 for guiding the fixed plate 55 in the vertical direction is fixed to the fixed plate 55. The guide shaft 56 extends downward from the fixed plate 55. The guide shaft 56 is inserted through the guide sleeve 57 fixed to the split conveyor 20. In addition, the lifting mechanism 30 may include a ball screw and a motor that rotates the screw shaft of the ball screw. The ball screw has a screw shaft rotatably supported by the split conveyor 20 and a nut fixed to a fixed plate 55.

探測機構28是包括發光部58與接收從發光部58中射出的光的光接收部59的透過型的光學式傳感器。發光部58與光接收部59以在左右方向上夾持被載置在分割輸送機20的托盤3的方式設置。另外,發光部58及光接收部59固定在固定板55的上表面側,發光部58與光接收部59在前後方向上配置在相同的位置。另外,探測機構28也可以是反射型的光學式傳感器。The detection mechanism 28 is a transmissive optical sensor that includes a light emitting unit 58 and a light receiving unit 59 that receives light emitted from the light emitting unit 58. The light-emitting portion 58 and the light-receiving portion 59 are provided so as to sandwich the tray 3 placed on the split conveyor 20 in the left-right direction. In addition, the light-emitting portion 58 and the light-receiving portion 59 are fixed to the upper surface side of the fixing plate 55, and the light-emitting portion 58 and the light-receiving portion 59 are arranged at the same position in the front-rear direction. In addition, the detection mechanism 28 may be a reflective optical sensor.

當將在分割輸送機20中堆積成多層的托盤3中的配置在最上層的托盤3設為“第一托盤3A”,將在分割輸送機20中堆積成多層的托盤3中的配置在從上方起第二個的托盤3設為“第二托盤3B”時,托盤分離機構29包括進入第一托盤3A與第二托盤3B之間的爪構件60、及使爪構件60移動的爪移動機構61。爪移動機構61是氣缸。因此,在以下的說明中,將爪移動機構61表述為“氣缸61”。When the tray 3 arranged in the uppermost layer among the trays 3 stacked in multiple layers on the dividing conveyor 20 is set to "first tray 3A", the tray 3 arranged in multiple layers on the dividing conveyor 20 is arranged in the When the second tray 3 from the top is set to "second tray 3B", the tray separating mechanism 29 includes a claw member 60 that enters between the first tray 3A and the second tray 3B, and a claw moving mechanism that moves the claw member 60 61. The claw moving mechanism 61 is an air cylinder. Therefore, in the following description, the claw moving mechanism 61 is expressed as "air cylinder 61".

氣缸61固定在固定板55的上表面,兩個氣缸61以在左右方向上夾持被載置在分割輸送機20的托盤3的方式設置。另外,兩個氣缸61以氣缸61的杆朝左右方向的內側突出的方式配置。爪構件60與固定在氣缸61的杆的前端部的固定構件62一體地形成,兩個爪構件60以在左右方向上夾持被載置在分割輸送機20的托盤3的方式設置。固定構件62形成為與左右方向正交的平板狀。爪構件60與固定構件62的下表面連接。另外,爪構件60從固定構件62朝左右方向的內側突出。The air cylinder 61 is fixed to the upper surface of the fixed plate 55, and the two air cylinders 61 are provided so as to sandwich the tray 3 placed on the split conveyor 20 in the left-right direction. In addition, the two cylinders 61 are arranged so that the rod of the cylinder 61 protrudes inward in the left-right direction. The claw member 60 is formed integrally with the fixing member 62 fixed to the front end portion of the rod of the air cylinder 61, and the two claw members 60 are provided so as to sandwich the tray 3 placed on the dividing conveyor 20 in the left-right direction. The fixing member 62 is formed in a flat plate shape orthogonal to the left-right direction. The claw member 60 is connected to the lower surface of the fixing member 62. In addition, the claw member 60 protrudes inward in the left-right direction from the fixing member 62.

在爪構件60的前端部的上表面,形成有隨著朝向爪構件60的前端而朝下側傾斜的上側傾斜面60a,在爪構件60的前端部的下表面,形成有隨著朝向爪構件60的前端而朝上側傾斜的下側傾斜面60b。即,在配置在被載置在分割輸送機20的托盤3的右側的爪構件60的左端部的上表面、及配置在被載置在分割輸送機20的托盤3的左側的爪構件60的右端部的上表面形成有上側傾斜面60a,在配置在被載置在分割輸送機20的托盤3的右側的爪構件60的左端部的下表面、及配置在被載置在分割輸送機20的托盤3的左側的爪構件60的右端部的下表面形成有下側傾斜面60b。On the upper surface of the front end portion of the claw member 60, an upper inclined surface 60a inclined downward toward the front end of the claw member 60 is formed, and on the lower surface of the front end portion of the claw member 60, the following claw member is formed. The front end of 60 is a lower inclined surface 60b inclined upward. That is, on the upper surface of the left end portion of the claw member 60 placed on the right side of the tray 3 of the split conveyor 20 and the claw member 60 placed on the left side of the tray 3 of the split conveyor 20 An upper inclined surface 60 a is formed on the upper surface of the right end portion, and is arranged on the lower surface of the left end portion of the claw member 60 disposed on the right side of the tray 3 placed on the split conveyor 20 and on the split conveyor 20. The lower surface of the right end of the claw member 60 on the left side of the tray 3 is formed with a lower inclined surface 60b.

在托盤3形成有朝托盤3的外周側擴展的環狀(框狀)的凸緣部3a,爪構件60進入第一托盤3A的凸緣部3a與第二托盤3B的凸緣部3a之間。氣缸61使爪構件60在分離位置60A(圖5的由雙點劃線所示的位置)與退避位置60B(圖5的由實線所示的位置)之間移動,所述分離位置60A是爪構件60進入第一托盤3A與第二托盤3B之間(具體而言,第一托盤3A的凸緣部3a與第二托盤3B的凸緣部3a之間)的位置,所述退避位置60B是爪構件60從第一托盤3A與第二托盤3B之間離開的位置。The tray 3 is formed with an annular (frame-like) flange portion 3a that expands toward the outer peripheral side of the tray 3, and the claw member 60 enters between the flange portion 3a of the first tray 3A and the flange portion 3a of the second tray 3B . The air cylinder 61 moves the claw member 60 between the separation position 60A (the position indicated by the two-dot chain line in FIG. 5) and the retreat position 60B (the position indicated by the solid line in FIG. 5 ). The separation position 60A is The claw member 60 enters the position between the first tray 3A and the second tray 3B (specifically, between the flange portion 3a of the first tray 3A and the flange portion 3a of the second tray 3B), and the retracted position 60B It is a position where the claw member 60 is separated from between the first tray 3A and the second tray 3B.

(托盤搬送時的托盤分離機構及升降機構的動作) 圖6、圖7是用於說明從圖1中所示的分割輸送機20朝托盤平臺6、托盤平臺7搬送托盤3時的托盤分離機構29及升降機構30等的動作的圖。(Operation of tray separating mechanism and lifting mechanism during tray transportation) FIGS. 6 and 7 are diagrams for explaining operations of the tray separating mechanism 29, the lifting mechanism 30, and the like when the tray 3 is transferred from the split conveyor 20 shown in FIG. 1 to the tray platform 6 and the tray platform 7.

當堆疊狀態的托盤3被搬送至分割輸送機20時,電動缸30的杆朝上側突出,固定板55移動至規定的上限位置(參照圖6的(A))。當將托盤3的厚度(經堆疊的托盤3的上下方向的厚度)設為t(參照圖5)時,固定板55移動至上限位置後,每次下降與厚度t相同的距離直至探測機構28探測第一托盤3A而停止(參照圖6的(B))。另外,通過探測機構28探測第一托盤3A,而探測被載置在分割輸送機20的托盤3的層數。另外,此時,發光部58及光接收部59的光軸(即,探測機構28的光軸)L在上下方向上,相比於第一托盤3A的上端,配置在更下側。另外,當固定板55進行升降時,爪構件60配置在退避位置60B。When the tray 3 in the stacked state is transported to the split conveyor 20, the rod of the electric cylinder 30 protrudes upward, and the fixed plate 55 moves to a predetermined upper limit position (see (A) of FIG. 6 ). When the thickness of the tray 3 (thickness of the stacked trays 3 in the vertical direction) is set to t (see FIG. 5 ), after the fixed plate 55 moves to the upper limit position, it is lowered by the same distance as the thickness t each time until the detection mechanism 28 The first tray 3A is detected and stopped (see (B) of FIG. 6 ). In addition, the first tray 3A is detected by the detection mechanism 28 to detect the number of layers of the tray 3 placed on the dividing conveyor 20. In addition, at this time, the optical axes of the light-emitting section 58 and the light-receiving section 59 (that is, the optical axis of the detection mechanism 28) are arranged on the lower side in the vertical direction than the upper end of the first tray 3A. In addition, when the fixed plate 55 moves up and down, the claw member 60 is arranged at the retracted position 60B.

其後,固定板55上升直至探測機構28探測第一托盤3A的上端而停止(參照圖6的(C))。即,電動缸30使探測機構28相對於分割輸送機20進行升降,探測機構28探測第一托盤3A的上端。其後,以探測機構28探測到的第一托盤3A的上端為基準,固定板55升降至爪構件60進入第一托盤3A的凸緣部3a與第二托盤3B的凸緣部3a之間的位置後,位於退避位置60B的爪構件60朝分離位置60A移動(參照圖7的(A))。即,電動缸30根據由探測機構28所得的第一托盤3A的上端的探測結果,使托盤分離機構29相對於分割輸送機20進行升降後,氣缸61使爪構件60從退避位置60B朝分離位置60A移動。After that, the fixed plate 55 rises until the detection mechanism 28 detects the upper end of the first tray 3A and stops (refer to (C) of FIG. 6 ). That is, the electric cylinder 30 raises and lowers the detection mechanism 28 relative to the dividing conveyor 20, and the detection mechanism 28 detects the upper end of the first tray 3A. Thereafter, based on the upper end of the first tray 3A detected by the detection mechanism 28, the fixed plate 55 is raised and lowered until the claw member 60 enters between the flange portion 3a of the first tray 3A and the flange portion 3a of the second tray 3B After the position, the claw member 60 located at the retracted position 60B moves toward the separated position 60A (see (A) of FIG. 7 ). That is, after the electric cylinder 30 raises and lowers the tray separating mechanism 29 relative to the dividing conveyor 20 based on the detection result of the upper end of the first tray 3A obtained by the detecting mechanism 28, the air cylinder 61 moves the claw member 60 from the retracted position 60B toward the separated position 60A mobile.

另外,在上下方向上,探測機構28探測第一托盤3A的上端的位置和爪構件60進入第一托盤3A的凸緣部3a與第二托盤3B的凸緣部3a之間的位置也可以一致。在此情況下,當固定板55上升直至探測機構28探測第一托盤3A的上端而停止時,位於退避位置60B的爪構件60直接朝分離位置60A移動。In addition, in the vertical direction, the detection mechanism 28 detects the position of the upper end of the first tray 3A and the position where the claw member 60 enters between the flange portion 3a of the first tray 3A and the flange portion 3a of the second tray 3B . In this case, when the fixed plate 55 rises until the detection mechanism 28 detects the upper end of the first tray 3A and stops, the claw member 60 located at the retreat position 60B moves directly to the separation position 60A.

當爪構件60移動至分離位置60A時,機器人8的托盤握持部39真空吸附第一托盤3A的上表面,從分割輸送機20朝托盤平臺6、托盤平臺7搬送第一托盤3A(參照圖7的(A))。當由機器人8從分割輸送機20朝托盤平臺6、托盤平臺7搬送第一托盤3A時,位於分離位置60A的爪構件60朝退避位置60B移動。另外,為了防止托盤握持部39與第一托盤3A的碰撞,機器人8根據被載置在分割輸送機20的托盤3的層數的探測結果進行動作。When the claw member 60 moves to the separation position 60A, the tray holding portion 39 of the robot 8 vacuum-absorbs the upper surface of the first tray 3A, and transfers the first tray 3A from the split conveyor 20 toward the tray platform 6 and the tray platform 7 (refer to FIG. 7(A)). When the first tray 3A is transported by the robot 8 from the dividing conveyor 20 toward the tray platform 6 and the tray platform 7, the claw member 60 located at the separation position 60A moves toward the retreat position 60B. In addition, in order to prevent the collision between the tray holding portion 39 and the first tray 3A, the robot 8 operates based on the detection result of the number of layers of the tray 3 placed on the dividing conveyor 20.

另外,當由機器人8從分割輸送機20朝托盤平臺6、托盤平臺7搬送第一托盤3A時,在上下方向上,固定板55下降直至探測機構28的光軸L被配置在配置下一個應被搬送的第一托盤3A(即,第一托盤3A被搬送之前的第二托盤3B)的位置而停止(參照圖7的(B))。即,當由機器人8從分割輸送機20朝托盤平臺6、托盤平臺7搬送第一托盤3A時,電動缸30使探測機構28相對於分割輸送機20下降至配置有下一個應被搬送的第一托盤3A的位置,探測機構28探測下一個應被搬送的第一托盤3A的有無。In addition, when the first tray 3A is transported by the robot 8 from the dividing conveyor 20 toward the tray platform 6 and the tray platform 7, the fixed plate 55 is lowered in the vertical direction until the optical axis L of the detection mechanism 28 is arranged at the next position. The position of the first tray 3A being transported (that is, the second tray 3B before the first tray 3A is being transported) is stopped (see (B) of FIG. 7 ). That is, when the first tray 3A is transported by the robot 8 from the split conveyor 20 toward the tray platform 6 and the tray platform 7, the electric cylinder 30 lowers the detection mechanism 28 relative to the split conveyor 20 to the position where the next to be transported is arranged. For the position of one tray 3A, the detection mechanism 28 detects the presence or absence of the first tray 3A to be transferred next.

在由機器人8從分割輸送機20朝托盤平臺6、托盤平臺7僅搬送一塊托盤3的情況(即,僅搬送第一托盤3A的情況)下,當在上下方向上,固定板55下降直至探測機構28的光軸L被配置在配置下一個應被搬送的第一托盤3A的位置而停止時,如圖7的(B)所示,探測機構28探測下一個第一托盤3A。另一方面,在由機器人8從分割輸送機20朝托盤平臺6、托盤平臺7搬送了重疊的狀態的兩塊以上的托盤3的情況下,當在上下方向上,固定板55下降直至探測機構28的光軸L被配置在配置下一個應被搬送的第一托盤3A的位置而停止時,探測機構28探測不到下一個第一托盤3A。When the robot 8 transports only one tray 3 from the split conveyor 20 toward the tray platform 6 and the tray platform 7 (that is, the case where only the first tray 3A is transported), when the vertical direction, the fixed plate 55 is lowered until detection When the optical axis L of the mechanism 28 is arranged at the position where the first tray 3A to be transferred next is placed and stopped, as shown in FIG. 7(B), the detection mechanism 28 detects the next first tray 3A. On the other hand, when two or more pallets 3 in a state of being overlapped are transferred from the dividing conveyor 20 to the pallet platform 6 and the pallet platform 7 by the robot 8, when the pallet 3 is stacked in the vertical direction, the fixed plate 55 is lowered to the detection mechanism When the optical axis L of 28 is arranged at the position where the first tray 3A to be transferred next is placed and stopped, the detection mechanism 28 cannot detect the next first tray 3A.

即,在由機器人8從分割輸送機20朝托盤平臺6、托盤平臺7搬送第一托盤3A後,電動缸30使探測機構28相對於分割輸送機20下降至配置有下一個應被搬送的第一托盤3A的位置,探測機構28探測下一個應被搬送的第一托盤3A的有無,由此能夠對由機器人8從分割輸送機20朝托盤平臺6、托盤平臺7搬送了重疊的狀態的兩塊以上的托盤3這件事進行探測。That is, after the robot 8 transports the first tray 3A from the split conveyor 20 toward the tray platform 6 and the tray platform 7, the electric cylinder 30 lowers the detection mechanism 28 relative to the split conveyor 20 to the position where the next to be transported is arranged. For the position of one pallet 3A, the detection mechanism 28 detects the presence or absence of the first pallet 3A to be transported. This allows the robot 8 to transport two overlapping states from the dividing conveyor 20 toward the tray platform 6 and the tray platform 7 Carry out the detection of the pallet 3 above the block.

當在上下方向上,固定板55下降直至探測機構28的光軸L被配置在配置下一個應被搬送的第一托盤3A的位置而停止時,當探測機構28探測到不存在下一個應被搬送的第一托盤3A(即,當探測機構28探測不到下一個第一托盤3A)時,認定由機器人8從分割輸送機20朝托盤平臺6、托盤平臺7搬送了重疊的狀態的兩塊以上的托盤3,因此機器人9停止,液晶面板2從托盤平臺6、托盤平臺7上的托盤3的搬出停止。另外,機器人8也停止。When the fixing plate 55 is lowered in the up-down direction until the optical axis L of the detection mechanism 28 is arranged at the position where the first tray 3A to be transported is arranged and stopped, when the detection mechanism 28 detects that there is no next When the first pallet 3A that has been transported (that is, when the detection mechanism 28 cannot detect the next first pallet 3A), it is determined that the robot 8 has transferred two pieces in a state of being overlapped from the dividing conveyor 20 toward the tray platform 6 and the tray platform 7 With the above tray 3, the robot 9 stops, and the liquid crystal panel 2 is unloaded from the tray platform 6 and the tray platform 7 on the tray platform 7. In addition, the robot 8 also stops.

另一方面,當在上下方向上,固定板55下降直至探測機構28的光軸L被配置在配置下一個應被搬送的第一托盤3A的位置而停止時,當探測機構28探測到存在下一個應被搬送的第一托盤3A(即,當探測機構28探測到下一個第一托盤3A)時,機器人9繼續動作,並且固定板55上升直至探測機構28探測第一托盤3A的上端而停止(參照圖7的(C))。On the other hand, when the fixing plate 55 is lowered in the up-down direction until the optical axis L of the detection mechanism 28 is arranged at the position where the first tray 3A to be transported is arranged and stopped, when the detection mechanism 28 detects the presence A first tray 3A that should be transported (ie, when the detection mechanism 28 detects the next first tray 3A), the robot 9 continues to move, and the fixed plate 55 rises until the detection mechanism 28 detects the upper end of the first tray 3A and stops (Refer to (C) of FIG. 7).

其後,以探測機構28探測到的第一托盤3A的上端為基準,固定板55升降至爪構件60進入第一托盤3A的凸緣部3a與第二托盤3B的凸緣部3a之間的位置後,位於退避位置60B的爪構件60朝分離位置60A移動(參照圖7的(A))。另外,如上所述,當在上下方向上,探測機構28探測第一托盤3A的上端的位置和爪構件60進入第一托盤3A的凸緣部3a與第二托盤3B的凸緣部3a之間的位置一致時,當固定板55上升直至探測機構28探測第一托盤3A的上端而停止時,位於退避位置60B的爪構件60直接朝分離位置60A移動。Thereafter, based on the upper end of the first tray 3A detected by the detection mechanism 28, the fixed plate 55 is raised and lowered until the claw member 60 enters between the flange portion 3a of the first tray 3A and the flange portion 3a of the second tray 3B After the position, the claw member 60 located at the retracted position 60B moves toward the separated position 60A (see (A) of FIG. 7 ). In addition, as described above, when in the up-down direction, the detection mechanism 28 detects the position of the upper end of the first tray 3A and the claw member 60 enters between the flange portion 3a of the first tray 3A and the flange portion 3a of the second tray 3B When the positions of the two are the same, when the fixing plate 55 rises until the detection mechanism 28 detects the upper end of the first tray 3A and stops, the claw member 60 located at the retreat position 60B moves directly to the separation position 60A.

當爪構件60移動至分離位置60A時,機器人8的托盤握持部39真空吸附第一托盤3A的上表面,從分割輸送機20朝托盤平臺6、托盤平臺7搬送第一托盤3A(參照圖7的(A))。當由機器人8從分割輸送機20朝托盤平臺6、托盤平臺7搬送第一托盤3A時,位於分離位置60A的爪構件60朝退避位置60B移動。When the claw member 60 moves to the separation position 60A, the tray holding portion 39 of the robot 8 vacuum-absorbs the upper surface of the first tray 3A, and transfers the first tray 3A from the split conveyor 20 toward the tray platform 6 and the tray platform 7 (refer to FIG. 7(A)). When the first tray 3A is transported by the robot 8 from the dividing conveyor 20 toward the tray platform 6 and the tray platform 7, the claw member 60 located at the separation position 60A moves toward the retreat position 60B.

另外,當由機器人8從分割輸送機20朝托盤平臺6、托盤平臺7搬送第一托盤3A時,在上下方向上,固定板55下降直至探測機構28的光軸L被配置在配置下一個應被搬送的第一托盤3A的位置而停止(參照圖7的(B)),並且當探測機構28探測到存在下一個應被搬送的第一托盤3A時,固定板55上升直至探測機構28探測第一托盤3A的上端而停止(參照圖7的(C))。以後,重複圖7的(A)~圖7的(C)中所示的動作,直至被載置在分割輸送機20的所有托盤3被搬出至托盤平臺6、托盤平臺7。In addition, when the first tray 3A is transported by the robot 8 from the dividing conveyor 20 toward the tray platform 6 and the tray platform 7, the fixed plate 55 is lowered in the vertical direction until the optical axis L of the detection mechanism 28 is arranged at the next position. The position of the first tray 3A being transported is stopped (see (B) of FIG. 7 ), and when the detection mechanism 28 detects the presence of the first first tray 3A to be transported, the fixed plate 55 is raised until the detection mechanism 28 detects The upper end of the first tray 3A stops (see (C) of FIG. 7 ). Thereafter, the operations shown in FIGS. 7(A) to 7(C) are repeated until all the trays 3 placed on the split conveyor 20 are carried out to the tray platform 6 and the tray platform 7.

如此,在本形態中,每當機器人8從分割輸送機20朝托盤平臺6、托盤平臺7搬送第一托盤3A時,電動缸30使探測機構28相對於分割輸送機20相對地進行升降,探測機構28探測下一個被搬送的第一托盤3A的上端,並且根據由探測機構28所得的第一托盤3A的上端的探測結果,配置在相對於分割輸送機20的上下方向的規定的位置的爪構件60從退避位置60B朝分離位置60A移動。In this manner, in this embodiment, each time the robot 8 transports the first tray 3A from the dividing conveyor 20 toward the tray platform 6 and the tray platform 7, the electric cylinder 30 moves the detection mechanism 28 relative to the dividing conveyor 20 relatively to detect The mechanism 28 detects the upper end of the first pallet 3A to be transported next, and according to the detection result of the upper end of the first pallet 3A obtained by the detection mechanism 28, is disposed at a predetermined position with respect to the vertical direction of the dividing conveyor 20 The member 60 moves from the retracted position 60B to the separated position 60A.

另外,在本形態中,當機器人8從分割輸送機20朝托盤平臺6、托盤平臺7搬送第一托盤3A時,在探測機構28探測下一個第一托盤3A的上端之前,電動缸30使探測機構28相對於分割輸送機20相對地升降至配置有下一個應被搬送的第一托盤3A的位置,探測機構28探測下一個應被搬送的第一托盤3A的有無。In addition, in this embodiment, when the robot 8 transports the first tray 3A from the split conveyor 20 toward the tray platform 6 and the tray platform 7, the electric cylinder 30 causes the detection by the detection mechanism 28 before detecting the upper end of the next first tray 3A The mechanism 28 moves up and down relative to the split conveyor 20 to the position where the first tray 3A to be transported next is arranged, and the detection mechanism 28 detects the presence or absence of the first tray 3A to be transported next.

另外,也可以從圖6的(B)、圖7的(B)中所示的狀態起,固定板55暫時上升至探測機構28的光軸L被配置在比第一托盤3A的上端更上側的規定的位置後,固定板55下降直至探測機構28探測第一托盤3A的上端而停止。In addition, from the state shown in FIGS. 6(B) and 7(B), the fixing plate 55 may be temporarily raised to the optical axis L of the detection mechanism 28 and arranged above the upper end of the first tray 3A. After the predetermined position, the fixing plate 55 descends until the detection mechanism 28 detects the upper end of the first tray 3A and stops.

(本形態的主要效果) 如以上所說明的那樣,在本形態中,在分割輸送機20設置有用於將第一托盤3A與第二托盤3B分離的托盤分離機構29。因此,在本形態中,可通過機器人8,從配置堆積成多層的狀態的托盤3的分割輸送機20朝托盤平臺6、托盤平臺7一塊一塊地搬送托盤。(The main effect of this form) As described above, in this embodiment, the split conveyor 20 is provided with the tray separation mechanism 29 for separating the first tray 3A and the second tray 3B. Therefore, in the present embodiment, the robot 8 can transport the pallets one by one from the split conveyor 20 where the pallets 3 stacked in multiple layers are arranged toward the pallet platform 6 and the pallet platform 7.

另外,在本形態中,每當機器人8從分割輸送機20朝托盤平臺6、托盤平臺7搬送第一托盤3A時,電動缸30使探測機構28相對於分割輸送機20進行升降,探測機構28探測下一個被搬送的第一托盤3A的上端,並且根據由探測機構28所得的第一托盤3A的上端的探測結果,配置在相對於分割輸送機20的上下方向的規定的位置的爪構件60從退避位置60B朝分離位置60A移動。In addition, in this embodiment, each time the robot 8 transports the first tray 3A from the split conveyor 20 toward the tray platform 6 and the tray platform 7, the electric cylinder 30 moves the detection mechanism 28 up and down relative to the split conveyor 20, and the detection mechanism 28 The upper end of the first tray 3A to be transported next is detected, and based on the detection result of the upper end of the first tray 3A obtained by the detection mechanism 28, the claw member 60 disposed at a predetermined position with respect to the vertical direction of the dividing conveyor 20 It moves from the retracted position 60B to the separated position 60A.

因此,在本形態中,即便堆積成多層的托盤3的上下方向的間距因堆積成多層的各個托盤3的歪斜等的影響而變得不固定,也能夠以更高的概率使爪構件60進入第一托盤3A的凸緣部3a與第二托盤3B的凸緣部3a之間。因此,在本形態中,可使用托盤分離機構29以更高的概率將第一托盤3A與第二托盤3B分離。其結果,在本形態中,可通過機器人8從分割輸送機20朝托盤平臺6、托盤平臺7確實地一塊一塊地搬送托盤3。Therefore, in this embodiment, even if the pitch of the trays 3 stacked in the vertical direction becomes unstable due to the influence of the skew of the trays 3 stacked in multiple layers, the claw member 60 can be entered with a higher probability Between the flange portion 3a of the first tray 3A and the flange portion 3a of the second tray 3B. Therefore, in this embodiment, the tray separation mechanism 29 can be used to separate the first tray 3A from the second tray 3B with a higher probability. As a result, in this embodiment, the pallet 3 can be reliably conveyed one by one by the robot 8 from the dividing conveyor 20 toward the pallet platform 6 and the pallet platform 7.

另外,在本形態中,在爪構件60的前端部的上表面形成有上側傾斜面60a,在爪構件的前端部的下表面形成有下側傾斜面60b,因此能夠以更高的概率使爪構件60進入第一托盤3A的凸緣部3a與第二托盤3B的凸緣部3a之間,可使用托盤分離機構29以更高的概率將第一托盤3A與第二托盤3B分離。因此,在本形態中,可通過機器人8從分割輸送機20朝托盤平臺6、托盤平臺7更確實地一塊一塊地搬送托盤3。In addition, in this embodiment, the upper inclined surface 60a is formed on the upper surface of the front end portion of the claw member 60, and the lower inclined surface 60b is formed on the lower surface of the front end portion of the claw member. Therefore, the claw can be made with a higher probability The member 60 enters between the flange portion 3a of the first tray 3A and the flange portion 3a of the second tray 3B, and the tray separation mechanism 29 can be used to separate the first tray 3A and the second tray 3B with a higher probability. Therefore, in this embodiment, the pallet 3 can be conveyed one by one by the robot 8 from the split conveyor 20 toward the pallet platform 6 and the pallet platform 7 more reliably.

在本形態中,當機器人8從分割輸送機20朝托盤平臺6、托盤平臺7搬送第一托盤3A時,在探測機構28探測下一個第一托盤3A的上端之前,電動缸30使探測機構28升降至配置有下一個應被搬送的第一托盤3A的位置,探測機構28探測下一個應被搬送的第一托盤3A的有無。因此,在本形態中,即便萬一由機器人8從分割輸送機20朝托盤平臺6、托盤平臺7搬送了兩塊以上的托盤3,如上所述,也可以探測到從分割輸送機20朝托盤平臺6、托盤平臺7搬送了兩塊以上的托盤3。In this form, when the robot 8 transports the first tray 3A from the split conveyor 20 toward the tray platform 6 and the tray platform 7, the electric cylinder 30 causes the detection mechanism 28 before the detection mechanism 28 detects the upper end of the next first tray 3A Raising and lowering to the position where the first tray 3A to be transported next is arranged, the detection mechanism 28 detects the presence or absence of the first tray 3A to be transported next. Therefore, in this embodiment, even if two or more pallets 3 are transported by the robot 8 from the dividing conveyor 20 toward the tray platform 6 and the tray platform 7, as described above, it is possible to detect the direction from the dividing conveyor 20 toward the tray The platform 6 and the pallet platform 7 transported two or more pallets 3.

在本形態中,當固定板55下降至探測機構28的光軸L被配置在配置下一個應被搬送的第一托盤3A的位置時,當探測機構28探測到不存在下一個應被搬送的第一托盤3A時,機器人9停止。因此,在本形態中,即便萬一由機器人8從分割輸送機20朝托盤平臺6、托盤平臺7搬送了兩塊以上的托盤3,也可以防止由被收容在被載置在托盤平臺6、托盤平臺7的托盤3的液晶面板2與機器人9的碰撞所引起的液晶面板2的破損。In this form, when the fixing plate 55 is lowered to the position where the optical axis L of the detection mechanism 28 is arranged at the position where the first tray 3A to be transported next is arranged, when the detection mechanism 28 detects that there is no next one to be transported In the first tray 3A, the robot 9 stops. Therefore, in this embodiment, even if two or more trays 3 are transported by the robot 8 from the dividing conveyor 20 toward the tray platform 6 and the tray platform 7, it can be prevented from being stored on the tray platform 6, The liquid crystal panel 2 of the tray 3 of the tray platform 7 collides with the robot 9 and is damaged due to the collision.

(其他實施方式) 上述形態是本發明的適宜的形態的一例,但並不限定於此,可在不變更本發明的主旨的範圍內實施各種變形。(Other embodiments) The above-mentioned form is an example of a suitable form of the present invention, but it is not limited to this, and various modifications can be made without changing the gist of the present invention.

在上述形態中,搬送系統1也可以包括用於使被載置在分割輸送機20的托盤3升降的升降機構。在此情況下,在上下方向上將探測機構28及托盤分離機構29固定,不需要電動缸30。另外,在此情況下,每當機器人8從分割輸送機20朝托盤平臺6、托盤平臺7搬送第一托盤3A時,升降機構使分割輸送機20升降,探測機構28探測下一個被搬送的第一托盤3A的上端,並且升降機構根據由探測機構28所得的第一托盤3A的上端的探測結果,使分割輸送機20升降後,配置在相對於分割輸送機20的上下方向的規定的位置的爪構件60從退避位置60B朝分離位置60A移動。In the above-mentioned form, the conveyance system 1 may include the raising-lowering mechanism for raising and lowering the tray 3 mounted on the dividing conveyor 20. In this case, the detection mechanism 28 and the tray separation mechanism 29 are fixed in the vertical direction, and the electric cylinder 30 is not required. In addition, in this case, each time the robot 8 transports the first tray 3A from the split conveyor 20 toward the tray platform 6 and the tray platform 7, the lifting mechanism raises and lowers the split conveyor 20, and the detection mechanism 28 detects the next transported first The upper end of a pallet 3A, and the lifting mechanism raises and lowers the dividing conveyor 20 according to the detection result of the upper end of the first tray 3A obtained by the detecting mechanism 28, and is arranged at a predetermined position with respect to the vertical direction of the dividing conveyor 20 The claw member 60 moves from the retracted position 60B to the separated position 60A.

另外,在此情況下,當機器人8從分割輸送機20朝托盤平臺6、托盤平臺7搬送第一托盤3A時,在探測機構28探測下一個第一托盤3A的上端之前,升降機構使下一個應被搬送的第一托盤3A升降至配置有探測機構28的位置,探測機構28探測下一個應被搬送的第一托盤3A的有無。In addition, in this case, when the robot 8 transports the first tray 3A from the dividing conveyor 20 toward the tray platform 6 and the tray platform 7, before the detection mechanism 28 detects the upper end of the next first tray 3A, the lifting mechanism causes the next The first tray 3A to be transported is raised and lowered to the position where the detection mechanism 28 is arranged, and the detection mechanism 28 detects the presence or absence of the first tray 3A to be transported next.

在上述形態中,也可以在托盤平臺6、托盤平臺7設置用於探測重疊的狀態的兩塊以上的托盤3被搬入托盤平臺6、托盤平臺7的探測機構。在此情況下,探測機構28也可以不探測下一個應被搬送的第一托盤3A的有無。另外,在上述形態中,也可以在分割輸送機20個別地設置使探測機構28升降的升降機構與使托盤分離機構29升降的升降機構。In the above-described form, a detection mechanism for detecting that two or more pallets 3 are carried into the pallet platform 6 and the pallet platform 7 may be provided on the pallet platform 6 and the pallet platform 7. In this case, the detection mechanism 28 may not detect the presence or absence of the first tray 3A to be transferred next. In addition, in the above-described aspect, the dividing conveyor 20 may be provided with an elevating mechanism that elevates the detection mechanism 28 and an elevating mechanism that elevates the tray separation mechanism 29.

在上述形態中,具有托盤3的搬送功能的分割輸送機20成為配置堆積成多層的托盤3的托盤配置部,但不具備托盤3的搬送功能的載置台也可以成為配置堆積成多層的狀態的托盤3的托盤配置部。另外,在上述形態中,輸送機4、輸送機5包含多個分割輸送機,但輸送機4、輸送機5也可以是一體型的輸送機。此情況下的輸送機4成為配置處於堆積成多層的狀態的可收容液晶面板2的托盤3的托盤配置部。In the above-mentioned form, the split conveyor 20 having the transport function of the tray 3 becomes the tray arrangement portion where the trays 3 stacked in multiple layers are arranged, but the stage not equipped with the transport function of the tray 3 may also be arranged in a state stacked in multiple layers The tray arrangement portion of the tray 3. In addition, in the above-mentioned form, the conveyor 4 and the conveyor 5 include a plurality of divided conveyors, but the conveyor 4 and the conveyor 5 may be an integrated conveyor. The conveyor 4 in this case is a tray arrangement portion where trays 3 capable of accommodating the liquid crystal panel 2 in a stacked state are arranged.

在上述形態中,搬送系統1也可以搬送從處理裝置15中排出的液晶面板2。在此情況下,由輸送機4搬送的托盤3變成空托盤,在由輸送機5搬送的托盤3收容有多塊液晶面板2。另外,在上述形態中,搬送系統1也可以搬送液晶面板2來將液晶面板2供給至處理裝置15,並且搬送從處理裝置15中排出的液晶面板2。In the above-described aspect, the transport system 1 may transport the liquid crystal panel 2 discharged from the processing device 15. In this case, the tray 3 conveyed by the conveyor 4 becomes an empty tray, and a plurality of liquid crystal panels 2 are accommodated in the tray 3 conveyed by the conveyor 5. In the above-described aspect, the transport system 1 may transport the liquid crystal panel 2 to supply the liquid crystal panel 2 to the processing device 15 and transport the liquid crystal panel 2 discharged from the processing device 15.

在上述形態中,多個托盤3也能夠以相互不重疊的方式載置在托盤平臺6、托盤平臺7。另外,在上述形態中,搬送系統1所包括的托盤平臺的數量也可以是一個,也可以是三個以上。進而,在上述形態中,搬送系統1所包括的輸送機的數量也可以是一個,也可以是三個以上。另外,在上述形態中,也可以不在爪構件60的前端部的上表面形成上側傾斜面60a,也可以不在爪構件60的前端部的下表面形成下側傾斜面60b。In the above-described form, the plurality of trays 3 can also be placed on the tray platform 6 and the tray platform 7 without overlapping each other. In addition, in the above-mentioned form, the number of pallet platforms included in the transport system 1 may be one, or may be three or more. Furthermore, in the above-mentioned form, the number of conveyors included in the transport system 1 may be one, or may be three or more. In the above-described aspect, the upper inclined surface 60 a may not be formed on the upper surface of the front end portion of the claw member 60, or the lower inclined surface 60 b may not be formed on the lower surface of the front end portion of the claw member 60.

在上述形態中,機器人8及機器人9的至少任一者也可以是垂直多關節機器人,也可以是水平多關節機器人。另外,在上述形態中,由搬送系統1搬送的顯示面板是液晶面板2,但由搬送系統1搬送的顯示面板也可以是液晶面板2以外的顯示面板。例如,由搬送系統1搬送的顯示面板也可以是有機電致發光(Electroluminescence,EL)面板。In the above aspect, at least one of the robot 8 and the robot 9 may be a vertical articulated robot or a horizontal articulated robot. In the above-mentioned aspect, the display panel transported by the transport system 1 is the liquid crystal panel 2, but the display panel transported by the transport system 1 may be a display panel other than the liquid crystal panel 2. For example, the display panel transported by the transport system 1 may be an organic electroluminescence (EL) panel.

1‧‧‧搬送系統 2‧‧‧液晶面板(顯示面板) 3‧‧‧托盤 3a‧‧‧凸緣部 3A‧‧‧第一托盤 3B‧‧‧第二托盤 4、5‧‧‧輸送機 6、7‧‧‧托盤平臺 8‧‧‧機器人(搬送機器人) 9‧‧‧機器人(第二搬送機器人) 10‧‧‧供給單元 11、12、35‧‧‧本體框架 12a‧‧‧上表面部 15‧‧‧處理裝置 16~19、20、21~25‧‧‧分割輸送機 20‧‧‧分割輸送機(托盤配置部) 28‧‧‧探測機構 29‧‧‧托盤分離機構 30‧‧‧電動缸(升降機構) 36、37、38‧‧‧可動框架 39‧‧‧托盤握持部 45‧‧‧本體部 46‧‧‧操縱杆 47‧‧‧臂部 48‧‧‧頭部單元 49‧‧‧面板握持部 50‧‧‧馬達 52‧‧‧臂 55‧‧‧固定板 56‧‧‧引導軸 57‧‧‧導套 58‧‧‧發光部 59‧‧‧光接收部 60‧‧‧爪構件 60A‧‧‧分離位置 60B‧‧‧退避位置 60a‧‧‧上側傾斜面 60b‧‧‧下側傾斜面 61‧‧‧氣缸(爪移動機構) 62‧‧‧固定構件 L‧‧‧光軸 t‧‧‧厚度 X、X1、X2、Y、Y1、Y2‧‧‧方向1‧‧‧Transport system 2‧‧‧LCD panel (display panel) 3‧‧‧Tray 3a‧‧‧Flange 3A‧‧‧The first tray 3B‧‧‧Second tray 4, 5‧‧‧ conveyor 6, 7‧‧‧ Pallet platform 8‧‧‧Robot (transfer robot) 9‧‧‧Robot (second transfer robot) 10‧‧‧Supply unit 11, 12, 35‧‧‧ Body frame 12a‧‧‧Upper surface 15‧‧‧Processing device 16~19、20、21~25‧‧‧‧Conveyor 20‧‧‧Split conveyor (pallet configuration section) 28‧‧‧ detection mechanism 29‧‧‧Tray separation mechanism 30‧‧‧Electric cylinder (lifting mechanism) 36, 37, 38 ‧‧‧ movable frame 39‧‧‧pallet grip 45‧‧‧Body 46‧‧‧ Joystick 47‧‧‧arm 48‧‧‧Head unit 49‧‧‧Panel grip 50‧‧‧Motor 52‧‧‧arm 55‧‧‧Fixed board 56‧‧‧Guide shaft 57‧‧‧Guide bush 58‧‧‧Lighting Department 59‧‧‧Receiving Department 60‧‧‧Claw member 60A‧‧‧Disconnect position 60B‧‧‧Retreat position 60a‧‧‧Upper inclined surface 60b‧‧‧Lower slope 61‧‧‧Cylinder (claw moving mechanism) 62‧‧‧Fixed member L‧‧‧optic axis t‧‧‧thickness X, X1, X2, Y, Y1, Y2

圖1是本發明的實施方式的搬送系統的側面圖。 圖2是從圖1的E-E方向表示搬送系統的平面圖。 圖3是圖1中所示的分割輸送機的立體圖。 圖4是用於說明圖3的F部的結構的平面圖。 圖5是用於說明圖4中所示的探測機構及托盤分離機構等的結構的概略圖。 圖6是用於說明從圖1中所示的分割輸送機朝托盤平臺搬送托盤時的托盤分離機構及升降機構等的動作的圖。 圖7是用於說明從圖1中所示的分割輸送機朝托盤平臺搬送托盤時的托盤分離機構及升降機構等的動作的圖。FIG. 1 is a side view of a transport system according to an embodiment of the present invention. FIG. 2 is a plan view showing the transport system from the E-E direction of FIG. 1. Fig. 3 is a perspective view of the split conveyor shown in Fig. 1. 4 is a plan view for explaining the structure of the F part of FIG. 3. FIG. 5 is a schematic diagram for explaining the structure of the detection mechanism, the tray separation mechanism, and the like shown in FIG. 4. 6 is a diagram for explaining operations of a tray separating mechanism, a lifting mechanism, and the like when the tray is transported from the split conveyor shown in FIG. 1 to the tray platform. 7 is a diagram for explaining operations of the tray separating mechanism, the lifting mechanism, and the like when the tray is transported from the split conveyor shown in FIG. 1 to the tray platform.

3‧‧‧托盤 3‧‧‧Tray

3a‧‧‧凸緣部 3a‧‧‧Flange

3A‧‧‧第一托盤 3A‧‧‧The first tray

3B‧‧‧第二托盤 3B‧‧‧Second tray

28‧‧‧探測機構 28‧‧‧ detection mechanism

29‧‧‧托盤分離機構 29‧‧‧Tray separation mechanism

30‧‧‧電動缸(升降機構) 30‧‧‧Electric cylinder (lifting mechanism)

39‧‧‧托盤握持部 39‧‧‧pallet grip

55‧‧‧固定板 55‧‧‧Fixed board

58‧‧‧發光部 58‧‧‧Lighting Department

59‧‧‧光接收部 59‧‧‧Receiving Department

60‧‧‧爪構件 60‧‧‧Claw member

60A‧‧‧分離位置 60A‧‧‧Disconnect position

60B‧‧‧退避位置 60B‧‧‧Retreat position

61‧‧‧氣缸(爪移動機構) 61‧‧‧Cylinder (claw moving mechanism)

62‧‧‧固定構件 62‧‧‧Fixed member

L‧‧‧光軸 L‧‧‧optic axis

X、Y‧‧‧方向 X, Y‧‧‧ direction

Claims (4)

一種搬送系統,其特徵在於,包括: 托盤配置部,配置處於堆積成多層的狀態的能夠收容顯示面板的托盤;托盤平臺,載置所述托盤;搬送機器人,從所述托盤配置部朝所述托盤平臺一塊一塊地搬送所述托盤;探測機構,用於探測第一托盤的上端,所述第一托盤為在所述托盤配置部中堆積成多層的所述托盤中的配置在最上層的所述托盤;托盤分離機構,用於將第二托盤與所述第一托盤分離,所述第二托盤為在所述托盤配置部中堆積成多層的所述托盤中的配置在從上方起第二個的所述托盤;以及升降機構,用於使所述探測機構及所述托盤分離機構相對於所述托盤配置部相對地進行升降, 所述托盤分離機構包括:爪構件,進入所述第一托盤與所述第二托盤之間;以及爪移動機構,使所述爪構件在所述爪構件進入所述第一托盤與所述第二托盤之間的分離位置和所述爪構件從所述第一托盤與所述第二托盤之間離開的退避位置之間移動, 每當所述搬送機器人從所述托盤配置部朝所述托盤平臺搬送所述第一托盤時,所述升降機構使所述探測機構相對於所述托盤配置部相對地進行升降,所述探測機構探測下一個被搬送的所述第一托盤的上端,並且根據由所述探測機構所得的所述第一托盤的上端的探測結果,配置在相對於所述托盤配置部的上下方向的規定的位置的所述爪構件從所述退避位置朝所述分離位置移動。A conveying system, characterized in that it includes: A tray arrangement portion, which arranges trays capable of accommodating display panels in a state of being stacked in multiple layers; a tray platform, on which the tray is placed; a transport robot, which transports the trays one by one from the tray arrangement portion toward the tray platform; A detection mechanism for detecting the upper end of the first tray, the first tray being the tray arranged in the uppermost layer among the trays stacked in multiple layers in the tray arrangement portion; a tray separation mechanism for The second tray is separated from the first tray, and the second tray is the tray arranged second from the top among the trays stacked in multiple layers in the tray arrangement portion; and an elevating mechanism, For raising and lowering the detection mechanism and the tray separating mechanism relative to the tray arrangement portion, The tray separating mechanism includes: a claw member that enters between the first tray and the second tray; and a claw moving mechanism that allows the claw member to enter the first tray and the first A separation position between the two trays and a retreat position where the claw member leaves from between the first tray and the second tray, Whenever the transport robot transports the first tray from the tray arrangement portion to the tray platform, the elevating mechanism moves the detection mechanism relatively up and down relative to the tray arrangement portion, the detection mechanism Detecting the upper end of the first tray to be transported next, and according to the detection result of the upper end of the first tray obtained by the detecting mechanism, arranged at a predetermined position with respect to the vertical direction of the tray arrangement portion Of the claw member moves from the retracted position toward the separated position. 如申請專利範圍第1項所述的搬送系統,其中, 當所述搬送機器人從所述托盤配置部朝所述托盤平臺搬送所述第一托盤時,在所述探測機構探測下一個所述第一托盤的上端之前,所述升降機構使所述探測機構相對於所述托盤配置部相對地升降至配置有下一個應被搬送的所述第一托盤的位置,所述探測機構探測下一個應被搬送的所述第一托盤的有無。The conveying system as described in item 1 of the patent application scope, in which When the transport robot transports the first tray from the tray arrangement portion to the tray platform, the lifting mechanism causes the detection mechanism before the detection mechanism detects the upper end of the next first tray The detection mechanism detects the presence or absence of the first tray to be transported next to the position where the first tray to be transported is arranged relative to the tray arrangement portion. 如申請專利範圍第2項所述的搬送系統,還包括第二搬送機器人,從被載置在所述托盤平臺的所述托盤搬出所述顯示面板,且 當所述探測機構探測到不存在下一個應被搬送的所述第一托盤時,所述第二搬送機器人停止。The transfer system as described in item 2 of the patent application scope further includes a second transfer robot that transfers the display panel from the tray mounted on the tray platform, and When the detection mechanism detects that there is no first tray to be transported next, the second transport robot stops. 如申請專利範圍第1項至第3項中任一項所述的搬送系統,其中, 在所述爪構件的前端部的上表面,形成有隨著朝向所述爪構件的前端而朝下側傾斜的上側傾斜面,且 在所述爪構件的前端部的下表面,形成有隨著朝向所述爪構件的前端而朝上側傾斜的下側傾斜面。The conveying system as described in any one of items 1 to 3 of the patent application scope, wherein, On the upper surface of the front end portion of the claw member, an upper inclined surface inclined downward toward the front end of the claw member is formed, and On the lower surface of the front end portion of the claw member, a lower inclined surface inclined upward toward the front end of the claw member is formed.
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Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230075187A1 (en) * 2020-04-26 2023-03-09 Abb Schweiz Ag Apparatus and method for separating objects
CN111874628B (en) * 2020-07-23 2022-06-14 湖南红太阳光电科技有限公司 High-speed continuous feeding system for sheet materials
JP2022059213A (en) * 2020-10-01 2022-04-13 日本電産サンキョー株式会社 Conveyance system
CN112777199B (en) * 2020-12-28 2023-02-10 苏州阿米特金属制品有限公司 Hoisting, stacking and arranging system for finished metal part machining products
CN112938493B (en) * 2021-01-28 2023-12-15 南通市乐能电力有限公司 Automatic glass suction and slicing device
CN113734815A (en) * 2021-08-14 2021-12-03 江苏品品鲜生物科技有限公司 Automatic integrative pile up neatly device in advance of uninstaller empty tray
CN113443448B (en) * 2021-08-31 2021-11-05 闼闼盈佳(江苏)工贸有限公司 Plank processing feeding system
CN113697513B (en) * 2021-10-28 2022-04-26 苏州精濑光电有限公司 Layered tray layered feeding device
CN114476645B (en) * 2021-12-30 2024-04-09 厦门精合电气自动化有限公司 Tower spring autosegregation loading attachment
CN115069577A (en) * 2022-06-17 2022-09-20 江苏富联通讯技术有限公司 Double-track type MAC automatic reading detection distribution equipment and use method thereof
CN115432449A (en) * 2022-08-11 2022-12-06 厦门普诚科技有限公司 A dish device of dividing for folding dish
CN117169252B (en) * 2023-10-10 2024-05-14 重庆日联科技有限公司 Double-rail automatic X-ray detection system

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63235219A (en) * 1987-03-23 1988-09-30 Rhythm Watch Co Ltd Separating and superposing device for piled pallet
JPH0721611U (en) * 1993-09-27 1995-04-21 安藤電気株式会社 Auto handler for storing IC storage tray in rack
JPH09110170A (en) * 1995-10-18 1997-04-28 Rohm Co Ltd Separation device of tray for electronic part
EP0906235B1 (en) * 1996-05-03 2004-01-14 Busse Bros., Inc. Container sweep for a palletizer
JP3298463B2 (en) * 1997-07-08 2002-07-02 松下電器産業株式会社 Substrate transfer device and transfer method
AU2075699A (en) * 1998-01-27 1999-08-09 Nikon Corporation Method and apparatus for detecting wafer
JP4150963B2 (en) 2003-02-07 2008-09-17 株式会社ダイフク Supported layer stacking support device
JP3941738B2 (en) * 2003-05-26 2007-07-04 松下電器産業株式会社 Work supply device
JP2007115600A (en) * 2005-10-21 2007-05-10 Toyota Motor Corp Separator for fuel cell, its conveying method, and conveying device
JP4569478B2 (en) * 2006-01-17 2010-10-27 村田機械株式会社 Tray transport system
FR2902235B1 (en) 2006-06-09 2008-10-31 Alcatel Sa DEVICE FOR TRANSPORTING, STORING AND TRANSFERRING SUBSTRATES
JP5253771B2 (en) * 2007-07-25 2013-07-31 株式会社東芝 Tray holding device
JP5657019B2 (en) * 2010-10-28 2015-01-21 パナソニックIpマネジメント株式会社 Optical disk ejecting apparatus and method
CN104340688B (en) * 2014-10-30 2016-07-06 湖南农业大学 A kind of seeding and growing seedling streamline seedlings nursing plate divides dish and disc stack device automatically
CN204400195U (en) * 2014-12-10 2015-06-17 天津市仟佰億家具有限公司 For the feeding and conveying device of plank processing
JP6663708B2 (en) * 2015-12-24 2020-03-13 平田機工株式会社 Transfer device and transfer method
CN205820378U (en) * 2016-06-22 2016-12-21 苏州金鸿顺汽车部件股份有限公司 Aluminium system material buttress device of breaking a jam
CN107539779A (en) * 2016-06-27 2018-01-05 天津中晟达科技有限公司 A kind of pallet sorter structure
JP6791665B2 (en) * 2016-06-30 2020-11-25 日本電産サンキョー株式会社 Transport system
CN106424421B (en) * 2016-12-05 2019-01-15 苏州宣佑科技有限公司 A kind of panel beating manipulator automatically adjusting workpiece height
CN107055109B (en) * 2017-03-22 2019-03-05 杭州长川科技股份有限公司 Charging tray automatic separating apparatus and separation method
CN207658721U (en) * 2017-12-22 2018-07-27 楚天科技股份有限公司 Tear disk device open

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