JP4150963B2

JP4150963B2 - Supported layer stacking support device

Info

Publication number: JP4150963B2
Application number: JP2003031090A
Authority: JP
Inventors: 良裕保坂
Original assignee: Daifuku Co Ltd
Current assignee: Daifuku Co Ltd
Priority date: 2003-02-07
Filing date: 2003-02-07
Publication date: 2008-09-17
Anticipated expiration: 2023-02-07
Also published as: JP2004241705A

Description

【０００１】
【発明の属する技術分野】
本発明は、板状の被支持体を積層状態に支持する被支持体積層支持装置に関する。
【０００２】
【従来の技術】
かかる被支持体積層支持装置は、半導体のウェハや液晶に使用するガラス等の板状の被支持体を積層状態に支持するものである。
そして、上記のような被支持体積層支持装置の従来の構成においては、板状の被支持体の夫々を各別に載置支持する載置面を備えた支持体が設けられ、その支持体の夫々は、上面を凹入形成して底部に載置面を備える凹入部が形成されており、載置面に載置された前記被支持体はその外周縁部が凹入部の側壁に接当して被支持体の載置面に沿う方向での移動を規制し、凹入部の底部に載置面を備えることにより隣接する支持体の載置面側への移動位置を前記被支持体の厚さよりも大なる位置に規制し、隣接する支持体の被係合部と凹入部とが係合して隣接する支持体の載置面に沿う方向での相対移動を規制するように構成されていた（例えば、特許文献１参照。）。
【０００３】
【特許文献１】
特開平９−８２７８９号公報
【０００４】
【発明が解決しようとする課題】
近年の板状の被支持体は、例えば、半導体のウェハであれば径の大きさが８インチから１２インチに移行したり、液晶に使用するガラスであれば液晶画面の大画面化に伴いそれに使用するガラスも大型なものとなるなど大型化が顕著であり、その大型化した板状の被支持体を積層状態に支持する被支持体積層支持装置も当然に大型なものとなる。従って、被支持体積層支持装置の大型化によって被支持体積層支持装置自体の重量も増大してしまうものであるが、上記従来の構成であれば、被支持体の前記載置面に沿う方向での移動の規制、隣接する支持体の載置面側への移動位置を前記被支持体の厚さよりも大なる位置に規制、並びに、隣接する支持体の前記載置面に沿う方向での相対移動の規制を行うために、支持体に積層方向の凹入部が形成されており、凹入部を形成することにより支持体は積層方向に厚肉となるために重く、重い支持体を備えた被支持体積層支持装置も重量増大となるため、被支持体積層支持装置を搬送する際の負担が大きなものであった。
そして、被支持体積層支持装置自体から発生するアウトガスにより収納してある被支持体が影響を受けるおそれがあり、例えば、板状の被支持体として半導体のウェハを収納した場合では、発生したアウトガスによりウェハの素材の特性が変わってしまうおそれがあり、被支持体積層支持装置における支持体の素材として樹脂や金属等が考えられるものの、支持体の材質をアウトガスの対策として有効な金属製とした場合には、上記課題は特に顕著なものとなる。
また、上記例示したように板状の被支持体が半導体のウェハであり、前工程を行う工場と後工程を行う工場とが離れた場所、例えば、前工程の工場が国内であり後工程の工場が国外である場合のように、板状の支持体の搬送距離が長距離である場合でも、上記課題が顕著なものである。
【０００５】
本発明の目的は、支持体夫々の積層方向の厚みを薄くして被支持体積層支持装置を軽量化する点にある。
【０００６】
【課題を解決するための手段】
請求項１によれば、板状の被支持体を積層状態に支持する被支持体積層支持装置において、前記被支持体の夫々を各別に載置支持する載置面を備えた板状の支持体が設けられ、それら支持体の夫々には、前記載置面に載置された前記被支持体の外周縁部に接当して、前記被支持体の前記載置面に沿う方向での移動を規制する複数の円形状の突出部が、前記載置面から突出しかつ前記被支持体の外周縁部に対して分散配置される状態で設けられ、前記突出部の夫々には、それが設けられた支持体に隣接する支持体の載置面側への移動位置を前記被支持体の厚さよりも大なる位置に規制するように、隣接する支持体を受け止める円形状の受け部、及び、隣接する支持体の前記載置面に沿う方向での相対移動を規制するように、隣接する支持体の被係合部と係合する前記受け部より小径の円形状の係合部が設けられていることを特徴としている。
すなわち、載置面から突出しかつ前記被支持体の外周縁部に対して分散配置される状態で設けられた突出部によって、被支持体の前記載置面に沿う方向での移動を規制、隣接する支持体の載置面側への移動位置を前記被支持体の厚さよりも大なる位置に規制、並びに、隣接する支持体の前記載置面に沿う方向での相対移動の規制が行われている。
つまり、上記した規制がすべて突出部によって行われているため、支持体は被支持体を載置面上に単に載置させるだけでよく、支持体を被支持体を受け止めるだけの薄い形状にできて軽量なものとすることができ、この軽量となった支持体を複数備える被支持体積層支持装置も軽量化することができるに至った。
【０００７】
請求項２によれば、前記支持体には、その周縁部から前記載置面に載置される前記被支持体の存在箇所にまで延びる切欠きが形成されていることを特徴としている。
すなわち、被支持体を被支持体積層支持装置から他の所に移載する際、切欠きを通して被支持体の載置する側の面から作用させることができ、例えば、被支持体の載置する側の面の反対側を吸着保持して搬送するほかに、被支持体の載置する側の面を吸着保持して搬送したり、被支持体を把持して搬送したりすることもできるようになり、被支持体を被支持体積層支持装置から他の所に移載する際に移載方法の選択肢が増え、使い勝手が良い被支持体積層支持装置が得られる。
【０００８】
請求項３によれば、前記被支持体を載置した前記支持体の複数を積層させた積層支持体群を収納する収納ケースが、前記積層支持体群の収納及び取り出しのために開閉自在に構成され、且つ、閉じ状態において、前記積層支持体群を積層方向に押圧し、かつ、前記積層支持体群の積層方向と交差する方向の移動の規制するように構成されて設けられていることを特徴としている。
すなわち、積層支持体群を収納ケースに収納している状態では、積層支持体群が積層方向に押圧され、かつ、前記積層支持体群の積層方向と交差する方向の移動の規制された状態で収納されているため、積層支持体群における支持体が積層方向や積層方向と交差する方向にずれ動くことがなく、収納ケースの内壁に接当する等による被支持体の破損の可能性を抑えることができる。
【０００９】
請求項４によれば、前記収納ケースが、前記積層支持体群の積層方向に伸びて、前記積層支持体群における各支持体についての前記積層方向と交差する方向での移動を接当規制する規制体を外部から挿入自在に構成されていることを特徴としている。
すなわち、規制体を収納ケース外部から挿入することにより、積層支持体群における各支持体についての積層方向と交差する方向の移動を接当規制することができるため、規制体を収納ケース外部から挿入した状態で、収納ケースによる積層支持体群に対する積層方向と交差する方向の移動の規制を解除することにより、積層支持体群における各支持体についての積層方向と交差する方向での移動の規制を維持した状態で積層支持体群を収納ケースから取り出すことができる。従って、積層支持体群を収納ケースから取り出す際に各支持体が積層方向と交差する方向に位置ずれすることがなく、その後の支持体の移動させる作業が行いやすくなる。
【００１０】
請求項５によれば、前記突出部が前記規制体を貫通可能な筒状に形成されて、前記規制体が前記突出部を貫通するように構成されていることを特徴としている。
すなわち、規制体を収納ケース外部から挿入することにより、積層支持体群における各支持体についての前記積層方向と交差する方向の移動を突出部にて全周にわたって接当規制することができるため、各支持体についての前記積層方向と交差する方向の移動を確実に接当規制することができ、各支持体が積層方向と交差する方向に位置ずれすることをより確実になくすことができる。
【００１１】
請求項６によれば、前記被支持体を載置した前記支持体の複数を積層させた積層支持体群を載置自在な基枠に、前記積層支持体群の積層方向に伸びて、前記積層支持体群における各支持体についての前記積層方向と交差する方向での移動を接当規制する規制材が設けられ、前記積層支持体群を前記基枠との間で挟持する押圧部材が、前記規制材の先端部に取り付け自在に設けられて、前記積層支持体群が、前記基枠と前記押圧部材とにより積層状態に保持されるように構成されていることを特徴としている。
すなわち、基枠と前記押圧部材とにより積層状態に保持されている積層支持体群は、各支持体が押圧部材にて積層方向に押圧されているとともに積層方向と交差する方向での移動は規制材にて規制されているため、積層支持体群が崩れるおそれがなく、被支持体積層支持装置を容易に移載することができる。
【００１２】
請求項７によれば、前記突出部が前記規制材を貫通可能な筒状に形成されて、前記規制材が前記突出部を貫通するように構成されていることを特徴としている。
すなわち、規制材により積層支持体群における各支持体についての積層方向と交差する方向の移動を突出部にて全周にわたって接当規制することができるため、各支持体についての前記積層方向と交差する方向の移動を確実に接当規制することができ、各支持体が積層方向と交差する方向に位置ずれすることをより確実になくすことができる。
【００１３】
請求項８によれば、前記積層状態に保持された前記積層支持体群を収納する保持ケースが、前記積層支持体群の収納及び取り出しのために開閉自在に構成され、且つ、閉じ状態において、前記積層支持体群の積層方向及びそれと交差する方向の移動の規制するように構成されて設けられていることを特徴としている。
すなわち、積層支持体群を保持ケースに収納している状態では、積層支持体群が積層方向に押圧され、かつ、前記積層支持体群の積層方向と交差する方向の移動の規制された状態で収納されているため、積層支持体群が保持ケースの内壁に接当する等により被支持体が破損してしまう可能性を抑えることができる。
【００１４】
【発明の実施の形態】
〔第１実施形態〕
以下、本発明に係る被支持体積層支持装置の第１実施形態を、板状の被支持体の一例を半導体のウェハ２とし、そのウェハ２を積層状態に支持するウェハ積層支持装置１に適用する場合について図面に基づいて説明する。
【００１５】
図１に示すように、被支持体積層支持装置としてのウェハ積層支持装置１は、被支持体としてのウェハ２の夫々を各別に載置支持する載置面６を備えた板状の支持体３と、ウェハ２を載置した支持体３の複数を積層させた積層支持体群４を収納する収納ケース５とで構成されている。
【００１６】
図２に示すように、支持体３の夫々には、前記載置面６に載置された前記ウェハ２の外周縁部２ａに接当して、前記ウェハ２の前記載置面６に沿う方向での移動を規制する複数の突出部７が、前記載置面６から突出しかつ前記ウェハ２の外周縁部２ａに対して分散配置される状態で設けられ、前記突出部７の夫々には、それが設けられた支持体３に隣接する支持体３の載置面６側への移動位置を前記ウェハ２の厚さよりも大なる位置に規制するように、隣接する支持体３を受け止める受け部７ａ、及び、隣接する支持体３の前記載置面６に沿う方向での相対移動を規制するように、隣接する支持体３の被係合部８と係合する係合部７ｂが設けられている。また、前記支持体３には、その周縁部３ａから前記載置面に載置される前記ウェハ２の存在箇所３ｂにまで延びる切欠き９が形成されている。
【００１７】
前記支持体３の夫々について詳述すると、図２、図４に示すように、支持体３は、前記載置面６を備えた薄い四角板状に形成された支持体本体１０と、この支持体本体１０とは別体に構成された突出係止部材１１と、ゴムやスポンジ等の合成樹脂により構成された緩衝部材１２とにより構成されている。前記支持体本体１０の夫々には、その４辺ある周縁部３ａの１辺から支持体３の中心部に向けて載置面６に載置されるウェハ２の存在箇所３ｂにまで延びる切欠き９が形成され、残る３辺のうちの対向する２辺の夫々に後述する規制体２１が係合する切欠き係合部１３が形成されている。また、支持体本体３には、支持体本体３における前記存在箇所３ｂ内に位置して積層方向に貫通する３つの内孔１４と、支持体本体３における前記存在箇所３ｂより周縁部３ａ側に位置して積層方向に貫通する３つの外孔１５とが形成されている。尚、支持体本体１０は、アルミニウムやステンレス等の金属、若しくは、強度及びアウトガスに対して有効な効果を有する合成樹脂にて構成されている。
【００１８】
図４に示すように、前記突出係止部材１１の夫々は、先端部１１ａと基端部１１ｂと、これら先端部１１ａや基端部１１ｂより大径のフランジ部１１ｃとで構成されており、基端部１１ｂを前記支持体本体１０の外孔１５に載置面６側から嵌合して支持体本体１０に取り付けられるように構成してある。尚、支持体本体１０に取り付けた状態において載置面６から突出している先端部１１ａとフランジ部１１ｃとが前記突出部７に相当し、フランジ部１１ｃが前記受け部７ａに相当し、先端部１１ａが前記係合部７ｂに相当する。また、支持体３における３つの突出係止部材１１のうちの１つが４辺ある周縁部３ａのうちの切欠き９及び切欠き係合部１３が形成されていない１辺寄りに設けられており、その１つの突出係止部材１１は筒状で挿通口１１ｄが形成されている。
そして、前記緩衝部材１２の夫々は、柱状の柱部１９と柱部１９の両端に備えられて柱部１９より大径で面状の面状部２０とで構成されている。
【００１９】
前記突出係止部材１１の夫々は、基端部１１ｂを前記支持体本体１０の外孔１５に載置面６側から嵌合して支持体３に取り付けられており、前記緩衝部材１２の夫々は、一方の面状部２０が載置面６上に位置し、他方の面状部２０が裏面１６上に位置するように支持体本体１０の内孔１４に嵌合して設けられている。尚、外孔１５の裏面１６側は係合部７ｂと係合する被係合部８に構成されている。
【００２０】
図２に示すように、上記のように支持体本体１０に突出係止部材１１と緩衝部材１２とを設けた状態とした支持体３は、３つの突出係止部材１１にて囲まれる載置面６にウェハ２を載置すると、ウェハ２は３つの緩衝部材１２における面状部２０上に位置するとともに、そのウェハ２の載置面６に沿う方向への移動は突出係止部材１１のフランジ部１１ｃへの接当によって規制されるように構成されている。
また、図４、図５に示すように、ウェハ２を載置した支持体３の複数を積層させて積層支持体群４とした状態では、突出係止部材１１の先端部１１ａは載置面６側に隣接する支持体３の被係合部８に係合した状態であり、支持体３同士の載置面６に沿う方向での相対移動が規制されているとともに、隣接する支持体３の載置面６と裏面１６との間には突出係止部材１１のフランジ部１１ｃが介在することによって所定の間隔が形成されており、載置しているウェハ２は隣接する支持体２の夫々に備えた緩衝部材１２に挟まれる状態で位置するように構成されている。
つまり、支持体３の複数を積層させて積層支持体群４とした状態でのウェハ２は、載置面６に沿う方向への移動が突出係止部材１１のフランジ部１１ｃにて規制されているとともに、積層方向への移動が緩衝部材１２により緩衝されながら載置面６と裏面１６とにより規制されている。
【００２１】
図１、図３、図４に示すように、積層支持体群４における最も頂部に位置する支持体３には、この支持体３の係合部７ａと係合する被係合孔２８ａを形成した係合板２８が載置されており、積層支持体群４に係合板２８を載置させた状態で前記収納ケース５に収納するように構成されている。
【００２２】
次に、前記収納ケース５について説明する。前記収納ケース５は、前記ウェハ２を載置した前記支持体３の複数を積層させた積層支持体群４を収納するものであり、前記積層支持体群４の収納及び取り出しのために開閉自在に構成され、且つ、閉じ状態において、前記積層支持体群４を積層方向に押圧し、かつ、前記積層支持体群４の積層方向と交差する方向の移動の規制するように構成されて設けられている。また、前記収納ケース５が、前記積層支持体群４の積層方向に伸びて、前記積層支持体群４における各支持体３についての前記積層方向と交差する方向での移動を接当規制する規制体２１を外部から挿入自在に構成されている。また、前記突出部７が前記規制体２１を貫通可能な筒状に形成されて、前記規制体２１が前記突出部７を貫通するように構成されている。
【００２３】
前記収納ケース５について詳述すると、図１に示すように、収納ケース５は、底板２２に側壁２３を立設して収納部２４を形成したケース体２５と、収納部２４を閉塞する蓋体２６と、収納部２４を閉塞した状態において蓋体２６をケース体２５に固定する固定機構２７とで構成されており、収納部２４を開放した開き状態と蓋体２６にて収納部２４を閉塞した閉じ状態とに開閉自在に構成されている。また、固定機構２７は、蓋体２６に備えた固定具２７ａとケース体２５に備えた被固定具２７ｂとで構成されている。
そして、ケース体２５の底板２２には、収納する積層支持体群４の最も底部に位置する支持体３の被係合部８に係合する第１係合突起２２ａが形成されており、この第１係合突起２２ａは、挿通口１１ｄを形成した突出係止部材１１を嵌合した外孔１５における被係合部８と係合する第１係合突起２２ａは形成さられておらず、残る２つの被係合部８に係合するように２つの第１係合突起２２ａが形成されている。そして、蓋体２６の内面には、収納部２４を閉塞した状態において積層支持体群４に載置した係合板２８に形成した前記被係合孔２８ａの夫々に係合する第２係合突起２６ａが形成されている。従って、収納ケース５に収納された積層支持体群５は、収納ケース５を閉じ状態とすることで、ケース体２５と蓋体２６とによって積層支持体群５の積層方向の移動が規制されているとともに、第１係合突起２２ａ及び第２係合突起２６ａにより積層支持体群５の積層方向と交差する方向の移動が規制されている。
また、ケース体２５の底板２２には、収納された積載支持体群４における前記突出係止部材１１の挿通口１１ｄと前記切欠き係合部１３との直下に位置する３箇所には、規制体２１を外部から収納部２４側に挿入自在となるように挿通孔２２bが形成されている。
【００２４】
次に、積層支持体群４からのウェハ２の取り出しについて説明する。図５に示すように、収納ケース５に収納されている積層支持体群４からウェハ２の取り出す際に収納ケース５を載置する作業台２９には、積層支持体群４における支持体３についての積層方向と交差する方向での移動を接当規制しながら積層支持体群４を持ち上げる規制体２１が３本設けられ、作業台２９の横側には、規制体２１により持ち上げられた積層支持体群４における隣接する支持体３同士の間隔を広げる間隔調節装置３１（図４参照）と、間隔調節装置３１により支持体３同士の間隔が広げられた積層支持体群４からウェハ２を取り出す取出装置３２（図６参照）とが備えられている。
【００２５】
前記規制体２１の夫々には、先端側の小径部２１ａと基端側の大径部２１ｂとが備えられており、規制体２１の夫々は作業台２９の上面から引退した状態と作業台２９の上面から突出する状態とに切り替えられるように構成されている。
間隔調節装置３１は、積層支持体群４における支持体３と同数のフォーク３１ａを上下方向に並べて備えてあり、フォーク３１ａ同士の間隔が狭い幅狭状態とフォーク３１ａを夫々上昇させてフォーク３１ａ同士の感覚が広い幅広状態とに切り換えられるように構成されている。
取出装置３２は、アーム３２ａの先端上部に吸着部３２ｂを備えてあり、支持体３に支持されているウェハ２を切欠き９を通して載置面６側から吸着保持して取り出し可能に構成されている。
【００２６】
つまり、収納ケース５に収納されている積層支持体群４からウェハ２を取り出すには、まず、収納ケース５を作業台２９上に移載し、その移載させた収納ケース５のケース体２５をフック３０により載置台２９に固定し、前記固定具２７による固定を解除するとともに、蓋体２６を取り外して開き状態とする。
【００２７】
この状態から、図５（イ）に示すように、前記規制体２１の夫々を作業台２９の上面から引退した状態から、作業台２９の上面から突出する状態に切り替えると、規制体２１の夫々は挿入孔２２bを通って収納部２４側に侵入するとともに、１本の規制体２１の小径部２１ａが各支持体３における挿通口１１ｄに相通した状態で、かつ、残る２本の規制体２１の小径部２１ａが切欠き係合部１３に係合しするとともに各規制体２１の大径部２１ｂが収納されている積層支持体群４の最も底部に位置する支持体３の裏面に接当した状態となる。そして、図５（ロ）に示すように、規制体２１の夫々を作業台２９の上面からさらに突出させることにより、各規制体２１の大径部２１ｂにより積層支持体群４が押し上げられて、積層支持体群４を底板２２の側壁２３上端よりも上方に持ち上げられる。
【００２８】
底板２２の側壁２３上端よりも上方に持ち上げられた積層支持体群４に対して、図４（イ）に示すように、幅狭状態の間隔調節装置３１のフォーク３１ａの夫々が、前記フランジ部１１ｃが介在することにより形成される支持体３同士の間、或いは、最も頂部に位置する支持体３と係合板２８との間に介挿させ、図４（ロ）に示すように、フォーク介挿させた状態の間隔調節装置３１を幅広状態とすることにより、最も低部に位置する支持体３を除くその他の支持体３並びに係合板２８の夫々が所定量持ち上げられ、支持体３の載置面６上にウェハ２を取出し可能なスペースが形成される。ウェハ２を取出し可能なスペースが形成されている状態において、取出装置３２の吸着部３２ｂにてウェハ２を切欠き９を通して載置面６側から吸着保持し、アーム３２ａを上昇させるとともに引き抜くことによってウェハ２は積層支持体群４から取り出される。
【００２９】
〔第２実施形態〕
以下、本発明に係る被支持体積層支持装置の第２実施形態を、板状の被支持体の一例を半導体のウェハ２とし、そのウェハ２を積層状態に支持するウェハ積層支持装置１に適用する場合について図面に基づいて説明する。尚、この第２実施形態において、第１実施形態と同様の構成のものは第２実施形態においても符号を同一とし説明は省略する。
【００３０】
図８、図９に示すように、被支持体積層支持装置としてのウェハ積層支持装置１には、ウェハ２を載置した支持体３の複数を積層させた積層支持体群４を後述するように積層状態に保持された状態で収納する保持ケース３７が備えられている。
【００３１】
前記ウェハ２を載置した前記支持体３の複数を積層させた積層支持体群４を載置自在な板状の基枠４１に、前記積層支持体群４の積層方向に伸びて、前記積層支持体群４における各支持体３についての前記積層方向と交差する方向での移動を接当規制する規制材３８が設けられ、前記積層支持体群４を前記基枠４１との間で挟持する板状の押圧部材４０が、前記規制材３８の先端側に取り付け自在に設けられており、前記積層支持体群４の積層状態は、前記基枠４１と前記押圧部材４０とにより保持されるように構成されている。前記規制材３８は棒状に形成されており、規制材３８の先端側には締め付け部材３９の雌ねじ部と螺合する雄ねじ部３８ａが備えられているとともに、基端側には抜け止め用の大径部３８ｂが備えられている。
【００３２】
また、基枠４１における積層支持体群４を載置する側の面には、積層支持体群４の最も底部に位置する支持体３の被係合部８の夫々と係合する凸部４１ｂが計３箇所に形成されており、凸部４１ｂの夫々には規制材３８が貫通可能なように底板貫通孔４１ａが形成されており、基枠４１における積層支持体群４を載置させる側の面とは反対側の面には、前記規制材３８における大径部３８ｂが入り込む凹入部が形成されている。また、押圧部材４０における積層支持体群４に載置させる側の面には、積層支持体群４の最も頂部に位置する支持体３の突出係止部材１１の先端部１１ａの夫々と係合する凹部４０ｂが計３箇所に形成されており、凹部４０ｂの夫々には規制材３８が貫通可能なように頂板貫通孔４０ａが形成されている。
【００３３】
そして、前記支持体３に設けられる前記突出部７が前記規制材３８を貫通可能な筒状に形成されて、前記規制材３８が前記突出部７を貫通するように構成されている。尚、第１実施形態では、支持体３における３つの突出係止部材１１のうちの１つが筒状でその１つの突出係止部材１１に挿通口１１ｄが形成されていたが、第２実施形態では、支持体３における３つの突出係止部材１１の夫々が筒状で突出係止部材１１の夫々に挿通口１１ｄが形成されている。
【００３４】
つまり、積層支持体群４を積層状態に保持する際は、基枠４１の凸部４１ｂの夫々と積層支持体群４における支持体３の被係合部８の夫々とが係合するように基枠４１に積層支持体群４を載置し、積層支持体群４における支持体３の突出係止部材１１の先端部１１ａの夫々と押圧部材４０の凹部４０ｂ夫々とが係合するように積層支持体群４に押圧部材４０を載置して、基枠４１と押圧部材４０との間に積層支持体群４を挟んだ状態とし、規制材３８の夫々を先端側から、基枠４１の底板貫通孔４１ａ、積層支持体群４の挿通口１１ｄ、押圧部材４０の頂板貫通孔４０ａの順に貫通させ、押圧部材４０から突出した規制材３８の先端部に締め付け部材３９を螺合させて取り付ける。
そうすることにより、積層支持体群４における各支持体３は、規制材３８により積層方向と交差する方向での移動を接当規制するとともに、規制材３８の雄ねじ部３８ａと締め付け部材３９の雌ねじ部３９ａとの螺合による締め付けにより、押圧部材４０並びに基枠４１が積層支持体群４側に押し付けられて積層方向に沿う方向の移動が規制されて積層支持体群４を積層状態に保持することができる。
【００３５】
次に、前記保持ケース３７について説明する。図９、図１０に示すように、前記保持ケース３７は、前記積層状態に保持された前記積層支持体群４を収納するように構成されており、前記積層支持体群４の収納及び取り出しのために開閉自在に構成され、且つ、閉じ状態において、前記積層支持体群４の積層方向及びそれと交差する方向の移動の規制するように構成されて設けられている
【００３６】
前記保持ケース３７について詳述すると、保持ケース３７は、保持空間４２を形成したケース部分４３と、保持空間４２を閉塞する蓋部分４４と、保持空間４２を閉塞した状態において蓋部分４４をケース部分４３に固定するロック機構４５とで構成されており、保持空間４２を開放した開き状態と蓋部分４４にて保持空間４２を閉塞した閉じ状態とに開閉自在に構成されている。また、ロック機構４５は、蓋部分４４に備えたロック具４５ａとケース部分４３に備えた被ロック具４５ｂとで構成されている。
そして、ケース部分４３の内面には、上記したように積層支持体群４を保持した状態における基枠４１に積層方向と交差する方向に接当する第１突部４３ａが形成されており、蓋部分４４の内面には、保持空間４２を閉塞した状態において上記したように積層支持体群４を保持した状態における締め付け部材３９に積層方向と交差する方向に接当する第２突部４４ａが形成されている。従って、閉じ状態の保持ケース３７内に位置する積層支持体群４は、ケース部分４３と蓋部分４４とによって積層支持体群５の積層方向の移動が規制されているとともに、第１突部４３ａ及び第２突部４４ａにより積層支持体群５の積層方向と交差する方向の移動が規制されている。
【００３７】
前記収納ケース５に収納されている積層支持体群４からウェハ２を取り出すには、保持ケース３７から積層状態に保持された積層支持体群４を取り出すとともに、この積層状態に保持された積層支持体群４を作業台２９上の所定の箇所に移載する。この移載した状態（図１１参照）から締め付け部材３９の夫々を取り外すとともに規制材３８の夫々を積層支持体群４から引き抜き、その後、前記規制体２１のうちの前記切欠き係合部１３に係合する２本の規制体２１の夫々を作業台２９の上面から引退した状態から、作業台２９の上面から突出する状態に切り替えると、突出する状態に切り替えた２本の規制体２１の小径部２１ａが切欠き係合部１３に係合するとともに各規制体２１の大径部２１ｂが基枠４１の裏面に接当し、さらに突出させることにより積層支持体群４が各規制体２１の大径部２１ｂにより持ち上げられる。
この後の、間隔調節装置３１並びに取出装置３２によるウェハの取り出しは第１実施形態と同様であるため説明は省略する。
【００３８】
〔別実施形態〕
上記した第１実施形態及び第２実施形態では、第１実施形態における係合板や第２実施形態の基枠及び押圧部材をそれぞれ専用の板状の部材を用いたが、ウェハを載置支持していない支持体を、第１実施形態では係合板としたり第２実施形態では基枠や押圧部材としたりしても良い。
すなわち、例えば第１実施形態おいては、図１２に示すように、積層支持体群４に係合板２８としての支持体３を載置させた状態で収納ケース５に収納するように構成する。つまり、蓋体２６の内面に、第２係合突起に代えて凹形状の係合凹部２６ｂを形成し、積層支持体群４を収納ケース５に収納した状態では、係合板２８としての支持体３における被係合部８の夫々と積層支持体群４における最も頂部に位置する支持体３の係合部７ｂの夫々とが係合し、係合板２８としての支持体３における先端部１１ａの夫々と蓋体２６の係合凹部２６ｂの夫々とが係合する。よって、積層支持体群４における最も頂部に位置する支持体３に載置支持されたウェハ２は、その最も頂部に位置する支持体３の緩衝部材１２と係合板２８としての支持体３の緩衝部材１２とによって挟まれる状態で位置するように構成されている。
また、第２実施形態においては、基枠としての支持体に積層支持体群を載置し、この積層支持体群に押圧部材としての支持体を載置させる。つまり、積層支持体群を積層状態に保持した状態では、機枠としての支持体における先端部の夫々と積層支持体群における最も底部に位置する支持体の被係合部とが係合し、積層支持体群における最も頂部に位置する支持体の先端部と押圧部材としての支持体の被係合部とが係合する。よって、積層支持体群における最も頂部に位置する支持体に載置支持されたウェハは、その最も頂部に位置する支持体の緩衝部材と押圧部材としての支持体の緩衝部材とによって挟まれる状態で位置するように構成されている。
尚、係合板としての支持体や押圧部材としての支持体は突出係止部材を備えなくてもよく、例えば第１実施形態であれば、係合板としての支持体の外孔と蓋体の第２係合突起が係合するように構成してもよい。
【００３９】
上記した第１実施形態では、収納ケースに収納されている積層支持体群からウェハを取り出す際に、固定具による固定を解除するとともに蓋体を取り外して開き状態とした収納ケースに対して、規制体の夫々を挿通させたが、固定具による固定を解除しただけの閉じ状態の収納ケースに対して、規制体の夫々を挿通させてもよい。
つまり、収納ケースを作業台上の所定の箇所に移載し、その移載させた収納ケースのケース体をフックにより作業台に固定し、前記固定具による固定を解除する。この状態から、前記規制体の夫々を作業台の上面から引退した状態から、作業台の上面から突出する状態に切り替えることにより、規制体の夫々は挿入孔を通って収納部側に侵入し、その侵入した規制体の先端部によって蓋体が押し上げられて収納ケースを開き状態とすることができる。
【００４０】
上記した第１実施形態及び第２実施形態では、支持体本体に突出部を備えた突出係止部材を設けて、支持体本体と突出部とを別体に構成したが、支持体本体の載置面側に突出部を一体形成してもよい。尚、この実施形態では、裏面側に被係合部を凹入形成して、この凹入形成した被係合部と突出部の係合部と係合するように構成する。
また、係合部を凸形状とし被係合部を凹形状としたが、係合部を凹形状とし被係合部を凸形状としてもよく、受け部をフランジ部としてフランジ状に形成したが、突出部から載置面に沿う方向に部分的に突出させて受け部を形成してもよい。
【００４１】
上記した第１実施形態及び第２実施形態では、支持体本体における前記存在箇所内に位置して積層方向に貫通する内孔を３つ形成したが、内孔の数は３つに限られるものではなく、内孔を１つや２つ或いは４以上形成してもよく、また、内孔を形成しなくてもよい。内孔を形成しない場合は載置面や裏面に緩衝部材を付着させる。
【００４２】
上記した第１実施形態及び第２実施形態では、支持体の切欠き係合部に２本の規制体の小径部が係合させて、積層支持体群における支持体についての積層方向と交差する方向での移動を接当規制したが、支持体に切欠き係合部を形成せずに、前記２本の規制体の小径部を支持体の周縁部に接当させることで、積層支持体群における支持体の積層方向と交差する方向での移動を接当規制してもよい。
【００４３】
上記した第１実施形態及び第２実施形態では、被支持体として、半導体のウェハとしたが、液晶用のガラスでもよく、被支持体の形状や大きさは実施形態に限定されるものではない。
【図面の簡単な説明】
【図１】第１実施形態における収納状態を示すウェハ積層支持装置の斜視図
【図２】第１実施形態における支持体の平面図
【図３】第１実施形態における収納状態を示す断面正面図
【図４】（イ）第１実施形態における積層支持体群を示す一部拡大側面図
（ロ）第１実施形態における支持体を持ち上げた状態を示す一部拡大側面図
【図５】（イ）第１実施形態における規制体を示す側面図
（ロ）第１実施形態における積層支持体群を持ち上げた状態を示す側面図
【図６】第１実施形態におけるウェハを取り出した状態を示す斜視図
【図７】第１実施形態におけるウェハを取り出した状態を示す側面図
【図８】第２実施形態における積層支持大群の斜視図
【図９】第２実施形態における収納状態を示すウェハ積層支持装置の斜視図
【図１０】第２実施形態における収納状態を示す断面正面図
【図１１】第２実施形態における積層支持大群を作業台に載置した状態を示す側面図
【図１２】別実施形態における収納状態を示す断面正面図
【符号の説明】
１被支持体積層支持装置
２被支持体
２ａ外周縁部
３支持体
３ａ周縁部
３ｂ存在箇所
４積層支持体群
５収納ケース
６載置面
７突出部
７ａ受け部
７ｂ係合部
９切欠き
２１規制体
３７保持ケース
３８規制材
４０押圧部材
４１基枠[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a supported laminated support apparatus for supporting a plate-like supported body in a laminated state.
[0002]
[Prior art]
Such a support laminated support apparatus supports a plate-like support such as glass used for a semiconductor wafer or liquid crystal in a laminated state.
And in the conventional structure of the above-mentioned support body laminated support apparatus, a support body provided with a mounting surface for mounting and supporting each of the plate-like support bodies is provided. Each of the supported bodies mounted on the mounting surface is in contact with the side wall of the recessed portion. Then, the movement of the supported body in the direction along the placement surface is restricted, and the placement position of the adjacent support body to the placement surface side is provided by providing the placement surface at the bottom of the recessed portion. It is configured to regulate to a position larger than the thickness, and to engage the engaged portion and the recessed portion of the adjacent support so as to restrict relative movement in the direction along the mounting surface of the adjacent support. (For example, refer to Patent Document 1).
[0003]
[Patent Document 1]
Japanese Patent Laid-Open No. 9-82789
[0004]
[Problems to be solved by the invention]
In recent years, for example, in the case of a semiconductor wafer, the diameter of the plate-shaped supported body has shifted from 8 inches to 12 inches. The increase in the size of the glass to be used is remarkable, such as a large glass, and the supported laminated support apparatus for supporting the enlarged plate-like supported body in a laminated state is naturally large. Therefore, although the weight of the supported laminated support device itself increases due to the increase in the size of the supported laminated support device, in the conventional configuration, the direction along the mounting surface of the supported substrate is described above. In the direction along the placement surface of the adjacent support body, and the movement position of the adjacent support body to the placement surface side is restricted to a position larger than the thickness of the supported body. In order to regulate the relative movement, the support is provided with a recessed portion in the stacking direction. By forming the recessed portion, the support becomes thick in the stacking direction, and thus a heavy and heavy support is provided. Since the supported laminated support device also increases in weight, the burden on transporting the supported stacked support device is large.
Then, there is a possibility that the supported body stored by the outgas generated from the supported stacked support apparatus itself may be affected. For example, when a semiconductor wafer is stored as a plate-shaped supported body, the generated outgas is generated. May cause the characteristics of the wafer material to change, and although resin and metal are considered as the material of the support in the supported laminated support device, the material of the support is made of metal that is effective as a countermeasure against outgassing. In some cases, the above problem becomes particularly prominent.
In addition, as exemplified above, the plate-shaped support is a semiconductor wafer, and the place where the factory that performs the pre-process and the factory that performs the post-process are separated, for example, the factory of the pre-process is domestic and the post-process Even when the transport distance of the plate-like support is long, as in the case where the factory is outside the country, the above problem is remarkable.
[0005]
An object of the present invention is to reduce the thickness of each support in the stacking direction to reduce the weight of the supported stack support apparatus.
[0006]
[Means for Solving the Problems]
According to claim 1, in a supported body laminated support device for supporting a plate-like supported body in a laminated state, the plate-like support provided with a mounting surface for mounting and supporting each of the supported bodies separately. A body is provided, and each of the supports is in contact with an outer peripheral edge of the supported body placed on the mounting surface, and in a direction along the mounting surface of the supported body. Multiple to regulate movement Circular Protrusions are provided in a state of projecting from the mounting surface and being dispersedly arranged with respect to the outer peripheral edge of the supported body, and each of the projecting parts is provided with a support adjacent to the support body provided with the projecting parts. Receiving an adjacent support so as to restrict the position of the body to the mounting surface side to a position larger than the thickness of the supported body Circular Engage with the engaged portion of the adjacent support so as to restrict the relative movement in the direction along the mounting surface of the receiving portion and the adjacent support. Circular shape with a smaller diameter than the receiving part An engaging portion is provided.
That is, the protruding portion provided in a state of protruding from the mounting surface and distributed with respect to the outer peripheral edge portion of the supported body regulates and adjoins the movement of the supported body in the direction along the mounting surface. The movement position of the supporting body to the placement surface side is restricted to a position larger than the thickness of the supported body, and the relative movement in the direction along the placement surface of the adjacent support body is restricted. ing.
In other words, since the above-described restrictions are all performed by the protrusions, the support body can be simply placed on the placement surface, and the support body can be thin enough to receive the support body. It is possible to reduce the weight of the supported laminated support device including a plurality of lightweight support bodies.
[0007]
According to a second aspect of the present invention, the support is formed with a notch extending from the peripheral edge to the location where the supported body is placed on the mounting surface.
That is, when the supported body is transferred from the supported body laminated support apparatus to another place, it can be applied from the surface on the side of the supported body through the notch. For example, the placement of the supported body In addition to sucking and holding the opposite side of the surface to be carried, it is also possible to suck and hold and carry the surface on the side where the supported body is placed, or to hold and carry the supported body Thus, when the support is transferred from the support stack supporting device to another place, the number of options for the transfer method increases, and a support stack supporting device with good usability is obtained.
[0008]
According to claim 3, a storage case for storing a stacked support group in which a plurality of the supports on which the supported body is placed is stacked can be opened and closed for storing and taking out the stacked support group. In the closed state, the laminated support group is pressed in the laminating direction and configured to be restricted from moving in a direction crossing the laminating direction of the laminated support group. It is characterized by.
That is, in a state where the stacked support group is stored in the storage case, the stacked support group is pressed in the stacking direction, and movement in a direction intersecting the stacking direction of the stacked support group is restricted. Since it is stored, the support in the stacked support group does not move in the stacking direction or the direction crossing the stacking direction, and the possibility of damage to the supported body due to contact with the inner wall of the storage case is suppressed. be able to.
[0009]
According to claim 4, the storage case extends in the stacking direction of the stacked support group, and restricts movement of each support in the stacked support group in a direction intersecting the stacking direction. The restriction body is configured to be freely inserted from the outside.
In other words, by inserting the restricting body from the outside of the storage case, it is possible to restrict the movement in the direction intersecting the stacking direction of each support in the stacked support group, so the restricting body is inserted from the outside of the storing case. In such a state, by restricting the movement of the storage case in the direction intersecting the stacking direction relative to the stacking support group by the storage case, the movement of each support in the stacking support group in the direction crossing the stacking direction is controlled. The laminated support group can be taken out from the storage case in the maintained state. Therefore, when the laminated support group is taken out from the storage case, the respective supports are not displaced in the direction intersecting the laminating direction, and the subsequent work of moving the support becomes easy.
[0010]
According to a fifth aspect of the present invention, the projecting portion is formed in a cylindrical shape that can penetrate the restricting body, and the restricting body is configured to penetrate the projecting portion.
That is, by inserting the regulating body from the outside of the storage case, it is possible to restrict the movement in the direction intersecting the laminating direction for each support in the laminated support group over the entire circumference with the protruding portion. The movement of each support in the direction intersecting with the stacking direction can be reliably restricted, and the displacement of each support in the direction intersecting with the stacking direction can be more reliably eliminated.
[0011]
According to claim 6, a stacking support group in which a plurality of the supports on which the supported body is mounted is stacked, is mounted on a freely mountable base frame, and extends in the stacking direction of the stacking support group. A regulating member for restricting the movement in the direction intersecting the laminating direction for each support in the laminated support group is provided, and a pressing member for sandwiching the laminated support group with the base frame, It is provided such that it can be attached to the front end of the regulating member, and the laminated support group is configured to be held in a laminated state by the base frame and the pressing member.
That is, in the laminated support group that is held in a laminated state by the base frame and the pressing member, each support is pressed in the laminating direction by the pressing member, and movement in a direction crossing the laminating direction is restricted. Since it is regulated by the material, there is no possibility that the laminated support group collapses, and the supported laminated support device can be easily transferred.
[0012]
According to a seventh aspect of the present invention, the projecting portion is formed in a cylindrical shape capable of penetrating the restricting material, and the restricting material is configured to penetrate the projecting portion.
That is, the movement in the direction intersecting the stacking direction for each support in the stacked support group can be restricted by the projecting portion over the entire circumference by the restricting material, and thus intersects the stacking direction for each support. Therefore, it is possible to reliably prevent the displacement of the respective support bodies in the direction intersecting the stacking direction.
[0013]
According to claim 8, the holding case for storing the stacked support group held in the stacked state is configured to be openable and closable for storing and taking out the stacked support group, and in the closed state, The laminated support group is configured and provided so as to restrict movement in the laminating direction and in the direction intersecting with the laminating direction.
That is, in a state where the laminated support group is housed in the holding case, the laminated support group is pressed in the laminating direction, and movement in a direction crossing the laminating direction of the laminated support group is restricted. Since it is housed, it is possible to suppress the possibility that the supported body is damaged due to the laminated support group coming into contact with the inner wall of the holding case.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
[First Embodiment]
Hereinafter, the first embodiment of the supported laminated support apparatus according to the present invention is applied to a wafer laminated support apparatus 1 that supports an example of a plate-like supported body as a semiconductor wafer 2 and supports the wafer 2 in a laminated state. The case where it does is demonstrated based on drawing.
[0015]
As shown in FIG. 1, a wafer stacking support apparatus 1 as a supported body stacking support apparatus includes a plate-like support body having mounting surfaces 6 for mounting and supporting each of wafers 2 as supported bodies. 3 and a storage case 5 for storing a stacked support group 4 in which a plurality of supports 3 on which the wafer 2 is placed are stacked.
[0016]
As shown in FIG. 2, each of the supports 3 is in contact with the outer peripheral edge 2 a of the wafer 2 placed on the placement surface 6 and is along the placement surface 6 of the wafer 2. A plurality of protrusions 7 for restricting movement in the direction are provided in a state of protruding from the mounting surface 6 and distributed with respect to the outer peripheral edge 2a of the wafer 2, and each of the protrusions 7 has The receiver 3 receives the adjacent support 3 so that the position of the support 3 adjacent to the support 3 provided with the support 3 is moved to the position of the mounting surface 6 to be larger than the thickness of the wafer 2. An engaging portion 7b that engages with the engaged portion 8 of the adjacent support 3 is provided so as to restrict the relative movement of the portion 7a and the adjacent support 3 in the direction along the mounting surface 6 described above. It has been. Further, the support 3 is formed with a notch 9 extending from the peripheral edge portion 3a to the location 3b of the wafer 2 placed on the placement surface.
[0017]
Each of the support bodies 3 will be described in detail. As shown in FIGS. 2 and 4, the support body 3 includes a support body body 10 formed in a thin square plate shape having the mounting surface 6 and the support body 10. It is comprised by the protrusion latching member 11 comprised separately from the body main body 10, and the buffer member 12 comprised by synthetic resins, such as rubber | gum and sponge. Each of the support body 10 has a notch extending from one side of the four peripheral edges 3a toward the center 3 of the support 3 to the location 3b of the wafer 2 mounted on the mounting surface 6. 9 is formed, and a notch engaging portion 13 is formed on each of the two opposite sides of the remaining three sides to engage a regulating body 21 described later. Further, the support body 3 has three inner holes 14 that are located in the existing portion 3b in the support body 3 and penetrate in the stacking direction, and the peripheral portion 3a side from the existing portion 3b in the support body 3. Three outer holes 15 that are positioned and penetrate in the stacking direction are formed. The support body 10 is made of a metal such as aluminum or stainless steel, or a synthetic resin having an effect effective for strength and outgas.
[0018]
As shown in FIG. 4, each of the protruding locking members 11 includes a distal end portion 11a, a proximal end portion 11b, and a flange portion 11c having a diameter larger than those of the distal end portion 11a and the proximal end portion 11b. The base end portion 11 b is fitted to the outer hole 15 of the support body 10 from the placement surface 6 side and attached to the support body 10. Note that the front end portion 11a and the flange portion 11c that protrude from the mounting surface 6 in a state of being attached to the support body 10 correspond to the protruding portion 7, the flange portion 11c corresponds to the receiving portion 7a, and the front end portion. 11a corresponds to the engaging portion 7b. Further, one of the three protruding locking members 11 in the support 3 is provided near one side where the notch 9 and the notch engaging portion 13 are not formed in the peripheral edge portion 3a having four sides. The one protruding locking member 11 is cylindrical and has an insertion port 11d.
Each of the buffer members 12 includes a columnar column portion 19 and a planar portion 20 that is provided at both ends of the column portion 19 and has a larger diameter than the column portion 19 and has a planar shape.
[0019]
Each of the protruding locking members 11 is attached to the support body 3 by fitting the base end portion 11b into the outer hole 15 of the support body 10 from the mounting surface 6 side. Is provided by being fitted into the inner hole 14 of the support body 10 so that one planar portion 20 is located on the placement surface 6 and the other planar portion 20 is located on the back surface 16. . In addition, the back surface 16 side of the outer hole 15 is comprised by the to-be-engaged part 8 engaged with the engaging part 7b.
[0020]
As shown in FIG. 2, the support body 3 in the state in which the protrusion body locking member 11 and the buffer member 12 are provided on the support body body 10 as described above is mounted by being surrounded by the three protrusion locking members 11. When the wafer 2 is placed on the surface 6, the wafer 2 is positioned on the planar portion 20 of the three buffer members 12, and the movement of the wafer 2 in the direction along the placement surface 6 is caused by the protrusion locking member 11. It is configured to be regulated by contact with the flange portion 11c.
As shown in FIGS. 4 and 5, in a state where a plurality of support bodies 3 on which the wafer 2 is placed are stacked to form a laminated support body group 4, the tip end portion 11 a of the protruding locking member 11 is placed on the placement surface. 6 is engaged with the engaged portion 8 of the support 3 adjacent to the side 6, the relative movement of the supports 3 in the direction along the mounting surface 6 is restricted, and the adjacent support 3 A predetermined interval is formed between the mounting surface 6 and the back surface 16 by interposing the flange portion 11c of the protruding locking member 11, and the mounted wafer 2 is adjacent to the support 2 adjacent thereto. It is comprised so that it may be located in the state pinched | interposed into the buffer member 12 with which each was equipped.
That is, in the wafer 2 in a state where a plurality of the support bodies 3 are stacked to form the stacked support body group 4, movement in the direction along the mounting surface 6 is restricted by the flange portion 11 c of the protruding locking member 11. In addition, the movement in the stacking direction is regulated by the placement surface 6 and the back surface 16 while being buffered by the buffer member 12.
[0021]
As shown in FIGS. 1, 3, and 4, an engagement hole 28 a that engages with the engagement portion 7 a of the support 3 is formed in the support 3 that is located at the top of the stacked support group 4. The engagement plate 28 is placed, and is configured to be stored in the storage case 5 in a state where the engagement plate 28 is placed on the laminated support group 4.
[0022]
Next, the storage case 5 will be described. The storage case 5 stores a stacked support group 4 in which a plurality of the supports 3 on which the wafer 2 is placed is stacked, and can be opened and closed for storing and taking out the stacked support group 4. In the closed state, the stacked support group 4 is pressed in the stacking direction, and the movement of the stacked support group 4 in the direction intersecting the stacking direction is regulated. ing. In addition, the storage case 5 extends in the stacking direction of the stacked support group 4 and regulates the movement of each support 3 in the stacked support group 4 in a direction intersecting the stacking direction. The body 21 is configured to be freely inserted from the outside. Further, the protruding portion 7 is formed in a cylindrical shape that can penetrate the restricting body 21, and the restricting body 21 is configured to penetrate the protruding portion 7.
[0023]
The storage case 5 will be described in detail. As shown in FIG. 1, the storage case 5 includes a case body 25 in which a side wall 23 is erected on a bottom plate 22 to form a storage portion 24, and a lid body that closes the storage portion 24. 26 and a fixing mechanism 27 that fixes the lid body 26 to the case body 25 in a state in which the storage portion 24 is closed. The storage portion 24 is closed by the open state in which the storage portion 24 is opened and the lid body 26. It can be opened and closed freely in the closed state. The fixing mechanism 27 includes a fixing tool 27 a provided on the lid body 26 and a fixed tool 27 b provided on the case body 25.
The bottom plate 22 of the case body 25 is formed with a first engagement protrusion 22a that engages with the engaged portion 8 of the support 3 positioned at the bottom of the stacked support group 4 to be stored. The first engagement protrusion 22a is not formed with the first engagement protrusion 22a that engages with the engaged portion 8 in the outer hole 15 into which the protrusion locking member 11 having the insertion port 11d is fitted. Two first engagement protrusions 22a are formed so as to engage with the remaining two engaged portions 8. Then, on the inner surface of the lid body 26, second engagement protrusions that engage with the respective engaged holes 28 a formed in the engagement plate 28 placed on the laminated support group 4 in a state where the storage portion 24 is closed. 26a is formed. Therefore, the stacking support group 5 stored in the storage case 5 is controlled to move in the stacking direction of the stacking support group 5 by the case body 25 and the lid body 26 by closing the storage case 5. In addition, the movement in the direction intersecting the stacking direction of the stacked support group 5 is regulated by the first engaging protrusion 22a and the second engaging protrusion 26a.
In addition, the bottom plate 22 of the case body 25 has a restriction in three places located immediately below the insertion opening 11d of the protruding locking member 11 and the notch engaging portion 13 in the stored stacking support group 4. An insertion hole 22b is formed so that the body 21 can be inserted into the storage unit 24 from the outside.
[0024]
Next, taking out of the wafer 2 from the laminated support group 4 will be described. As shown in FIG. 5, a work table 29 on which the storage case 5 is placed when the wafer 2 is taken out from the stacked support group 4 stored in the storage case 5 is provided on the support 3 in the stacked support group 4. Three regulating bodies 21 for lifting the laminated support group 4 while restricting the movement in the direction crossing the laminating direction are provided, and on the side of the work table 29, the laminated support lifted by the regulating body 21 is provided. The wafer 2 is taken out from the interval adjusting device 31 (see FIG. 4) for increasing the interval between the adjacent supports 3 in the body group 4 and the stacked support group 4 in which the interval between the supports 3 is increased by the interval adjusting device 31. A take-out device 32 (see FIG. 6) is provided.
[0025]
Each of the regulating bodies 21 is provided with a small-diameter portion 21a on the distal end side and a large-diameter portion 21b on the proximal end side, and each regulating body 21 is retracted from the upper surface of the work table 29 and the work table 29. It is comprised so that it can switch to the state which protrudes from the upper surface.
The interval adjusting device 31 includes the same number of forks 31a as the supports 3 in the stacked support group 4 arranged in the vertical direction, and the forks 31a are lifted by raising the forks 31a with a narrow space between the forks 31a. Is configured to be switched to a wide and wide state.
The take-out device 32 includes a suction portion 32b at the upper end of the arm 32a, and is configured to be able to suck and hold the wafer 2 supported by the support 3 through the notch 9 from the placement surface 6 side. Yes.
[0026]
That is, in order to take out the wafer 2 from the laminated support group 4 stored in the storage case 5, first, the storage case 5 is transferred onto the work table 29, and the case body 25 of the transferred storage case 5 is transferred. Is fixed to the mounting table 29 by the hook 30, the fixing by the fixing tool 27 is released, and the lid body 26 is removed to make it open.
[0027]
As shown in FIG. 5 (a), when each of the regulating bodies 21 is switched from a state in which the regulating bodies 21 are retreated from the upper surface of the work table 29 to a state in which the working bodies 29 protrude from the upper surface, as shown in FIG. Enters the storage portion 24 side through the insertion hole 22b, and the small diameter portion 21a of one restricting body 21 communicates with the insertion opening 11d in each support body 3 and the remaining two restricting bodies 21. The small-diameter portion 21a engages with the notch engaging portion 13 and contacts the back surface of the support body 3 positioned at the bottom of the laminated support group 4 in which the large-diameter portions 21b of the regulating bodies 21 are housed. It will be in the state. Then, as shown in FIG. 5 (b), by further protruding each of the regulating bodies 21 from the upper surface of the work table 29, the laminated support group 4 is pushed up by the large diameter portion 21b of each regulating body 21, The laminated support group 4 is lifted above the upper end of the side wall 23 of the bottom plate 22.
[0028]
As shown in FIG. 4 (a), each of the forks 31a of the gap adjusting device 31 in the narrow state is connected to the flange portion with respect to the laminated support group 4 lifted above the upper end of the side wall 23 of the bottom plate 22. 11c is interposed between the supports 3 formed between each other or between the support 3 located at the top and the engagement plate 28, and as shown in FIG. By setting the interval adjusting device 31 in the inserted state to the wide state, the other support members 3 except the support member 3 positioned at the lowest part and the engagement plate 28 are lifted by a predetermined amount, and the support member 3 is mounted. A space where the wafer 2 can be taken out is formed on the mounting surface 6. In a state where a space where the wafer 2 can be taken out is formed, the suction portion 32b of the take-out device 32 sucks and holds the wafer 2 from the placement surface 6 side through the notch 9, and raises and pulls out the arm 32a. The wafer 2 is taken out from the laminated support group 4.
[0029]
[Second Embodiment]
Hereinafter, the second embodiment of the support laminated support apparatus according to the present invention is applied to a wafer laminated support apparatus 1 that supports an example of a plate-like supported body as a semiconductor wafer 2 and supports the wafer 2 in a laminated state. The case where it does is demonstrated based on drawing. In the second embodiment, the same components as those in the first embodiment have the same reference numerals in the second embodiment, and the description thereof is omitted.
[0030]
As shown in FIG. 8 and FIG. 9, a laminated support group 4 in which a plurality of supports 3 on which a wafer 2 is placed is laminated in a wafer laminated support device 1 as a supported laminated support device will be described later. Is provided with a holding case 37 that is stored in a stacked state.
[0031]
A laminated support group 4 in which a plurality of the support bodies 3 on which the wafer 2 is placed is laminated is extended in a laminating direction of the laminated support group 4 on a plate-like base frame 41 on which the wafer 2 can be placed. A regulating member 38 for restricting the movement of each support 3 in the support group 4 in the direction crossing the stacking direction is provided, and the stacking support group 4 is sandwiched between the base frame 41. A plate-like pressing member 40 is provided on the front end side of the regulating member 38 so as to be freely attached, and the laminated state of the laminated support group 4 is held by the base frame 41 and the pressing member 40. It is configured. The regulating member 38 is formed in a rod shape, and a male screw portion 38a that engages with the female screw portion of the fastening member 39 is provided on the distal end side of the regulating member 38, and a large retaining portion is provided on the proximal end side. A diameter portion 38b is provided.
[0032]
Further, on the surface of the base frame 41 on the side on which the stacked support group 4 is placed, a convex portion 41 b that engages with each of the engaged portions 8 of the support 3 positioned at the bottom of the stacked support group 4. Are formed in a total of three locations, and a bottom plate through hole 41a is formed in each of the convex portions 41b so that the regulating member 38 can pass therethrough, and a side on which the laminated support group 4 is placed in the base frame 41 A concave portion into which the large-diameter portion 38b of the regulating member 38 enters is formed on the surface opposite to the surface. Further, the surface of the pressing member 40 on the side to be placed on the laminated support group 4 is engaged with each of the distal end portions 11 a of the protruding locking members 11 of the support body 3 positioned at the top of the laminated support group 4. A total of three concave portions 40b are formed, and a top plate through hole 40a is formed in each of the concave portions 40b so that the regulating member 38 can pass therethrough.
[0033]
And the said protrusion part 7 provided in the said support body 3 is formed in the cylinder shape which can penetrate the said control material 38, and the said control material 38 is comprised so that the said protrusion part 7 may be penetrated. In the first embodiment, one of the three protruding locking members 11 in the support 3 is cylindrical and the one protruding locking member 11 has an insertion port 11d. Then, each of the three protrusion locking members 11 in the support 3 is cylindrical, and an insertion port 11 d is formed in each of the protrusion locking members 11.
[0034]
That is, when the laminated support group 4 is held in a laminated state, the convex portions 41b of the base frame 41 and the engaged portions 8 of the support 3 in the laminated support group 4 are engaged with each other. The laminated support group 4 is placed on the base frame 41 so that each of the distal end portions 11a of the protruding locking members 11 of the support 3 and the recessed portions 40b of the pressing member 40 in the laminated support group 4 are engaged. The pressing member 40 is placed on the laminated support group 4 so that the laminated support group 4 is sandwiched between the base frame 41 and the pressing member 40, and each of the regulating members 38 is moved from the distal end side to the base frame 41. The bottom plate through hole 41a, the insertion hole 11d of the laminated support group 4 and the top plate through hole 40a of the pressing member 40 are passed through in this order, and the fastening member 39 is screwed to the tip of the regulating member 38 protruding from the pressing member 40. Install.
By doing so, each support body 3 in the stacked support body group 4 controls the movement in the direction intersecting the stacking direction by the restricting material 38 and controls the male screw portion 38a of the restricting material 38 and the female screw of the fastening member 39. By tightening by screwing with the portion 39a, the pressing member 40 and the base frame 41 are pressed against the laminated support group 4 side, and movement in the direction along the laminating direction is restricted to hold the laminated support group 4 in the laminated state. be able to.
[0035]
Next, the holding case 37 will be described. As shown in FIGS. 9 and 10, the holding case 37 is configured to store the stacked support group 4 held in the stacked state, and the stacked support group 4 can be stored and taken out. Therefore, it is configured to be openable and closable, and in a closed state, is configured to restrict movement of the stacked support group 4 in the stacking direction and the direction intersecting with the stacking support group 4.
[0036]
The holding case 37 will be described in detail. The holding case 37 includes a case portion 43 in which a holding space 42 is formed, a lid portion 44 that closes the holding space 42, and the lid portion 44 in the state in which the holding space 42 is closed. The locking mechanism 45 is fixed to the opening 43 and is configured to be openable and closable between an open state in which the holding space 42 is opened and a closed state in which the holding space 42 is closed by the lid portion 44. The lock mechanism 45 includes a locking tool 45 a provided in the lid portion 44 and a locked tool 45 b provided in the case portion 43.
A first protrusion 43a is formed on the inner surface of the case portion 43 so as to contact the base frame 41 in a state in which the stacked support group 4 is held as described above in a direction intersecting the stacking direction. A second protrusion 44a is formed on the inner surface of the portion 44 so as to contact the fastening member 39 in a state of holding the laminated support group 4 in a state in which the holding space 42 is closed, in a direction crossing the lamination direction. Has been. Accordingly, in the stacked support group 4 located in the holding case 37 in the closed state, the movement of the stacked support group 5 in the stacking direction is restricted by the case portion 43 and the lid portion 44, and the first protrusion 43a. And the movement of the direction which cross | intersects the lamination direction of the lamination | stacking support body group 5 is controlled by the 2nd protrusion 44a.
[0037]
In order to take out the wafer 2 from the laminated support group 4 stored in the storage case 5, the laminated support group 4 held in the laminated state is taken out from the holding case 37 and the laminated support held in this laminated state is taken out. The body group 4 is transferred to a predetermined location on the work table 29. Each of the fastening members 39 is removed from the transferred state (see FIG. 11), and each of the regulating members 38 is pulled out from the laminated support body group 4, and then the notched engaging portion 13 in the regulating body 21. When each of the two restricting bodies 21 to be engaged is switched from a state where the two restricting bodies 21 are retracted from the upper surface of the work table 29 to a state where the two restricting bodies 21 protrude from the upper surface of the work table 29, the small diameters of the two restricting bodies 21 switched to the protruding state The portion 21 a engages with the notch engaging portion 13, and the large diameter portion 21 b of each regulating body 21 comes into contact with the back surface of the base frame 41, and further protrudes, whereby the laminated support group 4 of each regulating body 21 It is lifted by the large diameter portion 21b.
Subsequent wafer removal by the interval adjusting device 31 and the take-out device 32 is the same as that in the first embodiment, and a description thereof will be omitted.
[0038]
[Another embodiment]
In the first embodiment and the second embodiment described above, the engaging plate in the first embodiment and the base frame and the pressing member in the second embodiment are respectively used as plate-shaped members, but the wafer is placed and supported. An unsupported support may be an engagement plate in the first embodiment, or a base frame or a pressing member in the second embodiment.
That is, for example, in the first embodiment, as shown in FIG. 12, the laminated support group 4 is configured to be stored in the storage case 5 in a state where the support body 3 as the engagement plate 28 is placed. That is, in the state in which the concave engagement recess 26b is formed on the inner surface of the lid body 26 instead of the second engagement projection and the laminated support group 4 is stored in the storage case 5, the support body as the engagement plate 28 3 is engaged with each of the engaging portions 7b of the support body 3 positioned at the top of the laminated support group 4, and the front end portion 11a of the support body 3 as the engaging plate 28 is engaged. Each engages with each of the engaging recesses 26b of the lid body 26. Therefore, the wafer 2 placed and supported on the support 3 positioned at the top of the laminated support group 4 is buffered by the buffer member 12 of the support 3 positioned at the top and the support 3 as the engagement plate 28. It is comprised so that it may be located in the state pinched | interposed with the member 12. FIG.
Moreover, in 2nd Embodiment, a laminated support body group is mounted in the support body as a base frame, and the support body as a press member is mounted in this laminated support body group. That is, in a state where the laminated support group is held in a laminated state, each of the front end portions of the support body as a machine frame engages with the engaged portion of the support body located at the bottom of the laminated support group, The tip of the support located at the top of the laminated support group is engaged with the engaged portion of the support as a pressing member. Therefore, the wafer placed and supported on the support located at the top of the stacked support group is sandwiched between the buffer member of the support located at the top and the buffer member of the support as the pressing member. Configured to be located.
In addition, the support body as the engagement plate and the support body as the pressing member do not need to include the protruding locking member. For example, in the first embodiment, the outer hole of the support body as the engagement plate and the first of the lid body are provided. You may comprise so that 2 engaging protrusions may engage.
[0039]
In the first embodiment described above, when the wafer is taken out from the laminated support group stored in the storage case, the fixing by the fixing tool is released and the lid is removed to open the storage case. Each of the bodies is inserted, but each of the regulating bodies may be inserted into a closed storage case that is only fixed by the fixing tool.
That is, the storage case is transferred to a predetermined location on the work table, the case body of the transferred storage case is fixed to the work table by the hook, and the fixing by the fixing tool is released. From this state, by switching each of the restriction bodies from the state of retreating from the upper surface of the work table to a state of protruding from the upper surface of the work table, each of the restriction bodies enters the storage portion side through the insertion hole, The lid can be pushed up by the leading end of the restricting body that has entered, and the storage case can be opened.
[0040]
In the first and second embodiments described above, the support body is provided with a protrusion locking member having a protrusion, and the support body and the protrusion are configured separately. The protruding portion may be integrally formed on the placement surface side. In this embodiment, the engaged portion is recessedly formed on the back surface side, and is configured to engage the engaged portion of the recessed portion and the engaging portion of the protruding portion.
In addition, although the engaging part is convex and the engaged part is concave, the engaging part may be concave and the engaged part may be convex, and the receiving part is formed in a flange shape with the flange part. The receiving portion may be formed by partially protruding from the protruding portion in the direction along the mounting surface.
[0041]
In the first embodiment and the second embodiment described above, three inner holes that are located in the existing portion of the support body and penetrate in the stacking direction are formed, but the number of inner holes is limited to three. Instead, one, two, four or more inner holes may be formed, and the inner holes may not be formed. When the inner hole is not formed, a buffer member is attached to the placement surface and the back surface.
[0042]
In the first embodiment and the second embodiment described above, the small diameter portions of the two restricting bodies are engaged with the notch engaging portions of the support so as to intersect the stacking direction of the supports in the stacked support group. Although the contact in the direction is restricted, the laminated support is formed by contacting the small diameter portion of the two restrictors with the peripheral edge of the support without forming a notch engaging portion in the support. The movement in the direction intersecting the stacking direction of the supports in the group may be restricted.
[0043]
In the first and second embodiments described above, a semiconductor wafer is used as the support, but glass for liquid crystal may be used, and the shape and size of the support are not limited to those in the embodiment. .
[Brief description of the drawings]
FIG. 1 is a perspective view of a wafer stacking support apparatus showing a storage state in a first embodiment.
FIG. 2 is a plan view of a support in the first embodiment.
FIG. 3 is a cross-sectional front view showing a storage state in the first embodiment.
4A is a partially enlarged side view showing the laminated support group in the first embodiment. FIG.
(B) Partially enlarged side view showing a state in which the support in the first embodiment is lifted
FIG. 5A is a side view showing a regulating body in the first embodiment.
(B) Side view showing a state in which the laminated support group in the first embodiment is lifted
FIG. 6 is a perspective view showing a state where a wafer is taken out in the first embodiment.
FIG. 7 is a side view showing a state in which the wafer is taken out in the first embodiment.
FIG. 8 is a perspective view of a stacked support large group in the second embodiment.
FIG. 9 is a perspective view of a wafer stacking support apparatus showing a storage state in the second embodiment.
FIG. 10 is a sectional front view showing a storage state in the second embodiment.
FIG. 11 is a side view showing a state in which the stacked support horde according to the second embodiment is placed on a work table.
FIG. 12 is a sectional front view showing a storage state in another embodiment;
[Explanation of symbols]
1 Laminated support equipment
2 Supported body
2a Outer peripheral edge
3 Support
3a peripheral edge
3b Location
4 Laminated support group
5 Storage case
6 Placement surface
7 Protrusion
7a receiving part
7b Engagement part
9 Notch
21 Regulatory body
37 Holding case
38 Regulatory materials
40 Pressing member
41 Base frame

Claims

A supported body laminated support device for supporting a plate-like supported body in a laminated state,
A plate-like support body having a mounting surface for mounting and supporting each of the supported bodies separately is provided,
Each of the supports is in contact with the outer peripheral edge of the supported body placed on the placement surface, and a plurality of the movements of the supported body in a direction along the placement surface are regulated. circular protrusion is protruded from the mounting surface and the provided in the state of being distributed with respect to the outer peripheral edge portion of the support,
Each of the projecting portions has an adjacent support so as to restrict the position of movement of the support adjacent to the support on which the protrusion is provided to a position larger than the thickness of the supported body. circular receiving portion for receiving the body, and, so as to restrict the relative movement in the direction along the placement surface of the adjacent support, from the receiving portion engages with the engaged portion of the adjacent support member A supported laminated support apparatus in which a small-diameter circular engagement portion is provided.

The supported body laminated support apparatus according to claim 1, wherein the support body is formed with a notch extending from a peripheral edge portion thereof to a location where the supported body is placed on the placement surface.

A storage case for storing a stacked support group in which a plurality of the supports on which the supported body is mounted is configured to be openable and closable for storing and taking out the stacked support group, and in a closed state 3, wherein the laminated support group is pressed in the laminating direction and the movement in a direction intersecting the laminating direction of the laminated support group is regulated. Supported body laminated support device.

The storage case extends in the stacking direction of the stacked support group, and a regulating body that restricts movement of each support in the stacked support group in a direction intersecting the stacking direction can be inserted from the outside. The to-be-supported laminated support apparatus of Claim 3 comprised by these.

5. The supported stacked support apparatus according to claim 4, wherein the protruding portion is formed in a cylindrical shape that can penetrate the restricting body, and the restricting body penetrates the protruding portion. 6.

Each support in the layered support group is extended in a stacking direction of the layered support group on a base frame on which a plurality of the layered support bodies on which the supported body is mounted is stacked. A restricting material that restricts the movement of the body in a direction intersecting the stacking direction is provided, and a pressing member that sandwiches the stacked support group with the base frame is provided at a distal end portion of the restricting material. The supported stacked support apparatus according to claim 1, wherein the stacked support group is provided so as to be attachable and is configured to be held in a stacked state by the base frame and the pressing member.

The supported body laminated support device according to claim 6, wherein the protrusion is formed in a cylindrical shape that can penetrate the restriction member, and the restriction member penetrates the protrusion.

A holding case for storing the laminated support group held in the laminated state is configured to be openable and closable for storing and taking out the laminated support group, and in the closed state, the laminated support group is stacked. The supported laminated support apparatus according to claim 6 or 7, wherein the support laminated support apparatus is configured to regulate movement in a direction and a direction intersecting with the direction.