TW202003402A - Method for producing glass film - Google Patents

Abstract

An initial crack Sa is formed on a preset cleavage line V formed on a boundary between a width-direction center part Ga of a glass film G supported from the rear surface side thereof by a support member 2 and a width-direction center part Ga of the glass film G, and then the initial crack Sa is allowed to propagate along the preset cleavage line V by heating with a laser L and subsequent cooling with a cooling medium W to cleave the glass film G. In the cleavage, a support bar 3 that extends along the preset cleavage line V is placed at a position avoiding a position immediately below the preset cleavage line V in each of a space between the width-direction center part Ga and the support member 2 and a space between a width-direction end part Gb and the support member 2, so that a region of the glass film G which includes the preset cleavage line V can be suspended from the support member 2.

Description

Manufacturing method of glass film

The invention relates to a method for manufacturing a glass film.

The glass film is, for example, a thin plate glass having a thickness of 200 μm or less, and the manufacturing process usually includes a step of cutting the glass film into a desired size.

As one of the methods for cutting the glass film, there is laser cutting (for example, refer to Patent Document 1). In this method, first, an initial crack is formed on a line to be cut (imaginary line) at one end of the glass film, that is, one end of the line to be cut. Thereafter, the heating area heated by the laser and the cooling area cooled by the cooling medium following the heating area are sequentially scanned from one end to the other end of the line to be cut of the glass film. Thereby, the thermal stress generated by the temperature difference between the heating area and the cooling area causes the initial crack to develop along the planned cutting line, and cuts the glass film (full body cut). [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2011-144092

[Problems to be solved by the invention] However, as shown in FIG. 9, when laser cutting the glass film 100, it is difficult to become the end point of the cutting portion (cutting completed portion) 101 formed by the development of the initial crack, and the planned cutting line 102 In the vicinity of the other end 102a, a space for forming the heating area 103 and the cooling area 104 at the same time (see the area 103 and the area 104 shown by chain lines) is secured. As a result, there is a problem that, as shown in FIG. 10, near the other end 102a of the planned cutting line 102, the thermal stress required for the development of the initial crack cannot be exerted, and the cutting portion 101 reaches the planned cutting line The other end 102a of 102 stops before, and the cutting residue 105 is formed. Furthermore, when the residual cutting portion 105 is subsequently broken, the cutting portion may be bent and deviated from the planned cutting line, and sufficient dimensional accuracy cannot be obtained.

An object of the present invention is to perform laser cutting of a glass film along a line to be cut so as not to cause cutting residue. [Means to solve the problem]

The present invention created to solve the above-mentioned problems is a method of manufacturing a glass film, including a cutting step, after forming an initial crack on a planned line for cutting a glass film supported from the back side by a support member, by using a laser The heating and the cooling using the refrigerant following the heating, the initial cracks are developed along the planned cutting line, and the glass film is cut. The method of manufacturing the glass film is characterized in that: in the cutting step, the glass film is cut Between at least one region where the predetermined line is a boundary and the support member, a support rod extending along the predetermined cutting line is arranged at a position other than directly below the predetermined cutting line, thereby allowing the portion of the glass film containing the predetermined cutting line to When the support member floats, the glass film is cut. According to such a configuration, even if the thermal stress that causes the initial crack to develop in the vicinity of the other end of the planned cutting line becomes insufficient, it is possible to prevent the formation of a cutting residue.

Although the cause of this phenomenon has not been identified, it is considered as follows. That is, the portion of the glass film including the planned cutting line is in a state where it floats from the support member. Therefore, if the glass film is laser-cut along the planned cutting line, the cut portion on the planned cutting line (the part where the cutting is completed) One area and the other area that are the boundaries want to return to a more stable state (for example, a flat state) independently. The direction and/or magnitude of the force that acts when returning to a stable state is different from one area and another area bordered by the cut-off portion. As a result, it can be considered that the thermal stress caused by laser cutting is different from the uncut part (uncut part) on the planned cutting line, such as tearing force or shearing force, which assists the development of initial cracks. Force. Therefore, it is considered that even if the thermal stress for the development of the initial cracks becomes insufficient, the development of the initial cracks continues due to such an assisting force, and the occurrence of cutting residues is prevented.

In the above structure, an area of the glass film bordered by a predetermined cutting line may be an end of the glass film. By arranging a support rod only between the end and the support member, the glass film may be included. The portion where the predetermined line is cut is cut in a state where one side of the support rod floats from the support member. This cutting method is effective when the width of the end of the glass film (the dimension in the direction orthogonal to the line to be cut) is small.

In this way, when the support rod is arranged only on one side of the cut line, it is preferable that the end portion floats from the support member at a position other than the contact portion with the support rod. If so set, it may be considered that the auxiliary force that promotes the development of the initial cracks acts more strongly on the uncut portion on the planned cutting line.

When the support rod is arranged only on one side of the planned cutting line as described above, it is preferable that the portion of the glass film including the planned cutting line includes a first contact portion that contacts the support rod and a second contact that contacts the support member The part is to cut a predetermined line between the first contact part and the second contact part, and is located on the side of the first contact part. With this setting, it can be confirmed that laser cutting can be performed more accurately along the planned cutting line.

In the above structure, support rods may be arranged between one area of the glass film bordered by the planned cutting line and the support member, and another area of the glass film bordered by the planned cutting line and the support member, With this, the glass film is cut in a state where the portion of the glass film including the planned cutting line floats from the support member between the two support rods. This cutting method is effective when the width (the size in the direction orthogonal to the planned cutting line) of one region and the other region of the glass film bordered by the planned cutting line is large.

When the support rods are arranged on both sides of the planned cutting line in this way, an area of the glass film bordered by the planned cutting line can also be an end of the glass film, and the end is at a position other than the contact portion with the support rod The self-supporting member floats. Alternatively, the edge of the end portion may be brought into line contact with the support member, and the rest of the end portion floats from the support member at a position other than the contact portion with the support rod. If so set, it may be considered that the auxiliary force that promotes the development of the initial cracks acts more strongly on the uncut portion on the planned cutting line.

In the above structure, it is preferable that the support rods are continuously arranged over the entire length of the glass film along the direction along which the line is to be cut. That is, if the support rod is placed intermittently in the direction along the line to be cut, the glass film will rest on the support rod or the like halfway, and the glass film will bend in a undulating manner. If the glass film is bent in a undulating manner in this way, there is a possibility that the stress that prevents the initial crack from developing along the planned cutting line acts. On the other hand, if the support rod is continuously arranged over the entire length of the glass film in the direction along the planned cutting line, the full length of the glass film in the direction along the planned cutting line is supported by the support rod. Therefore, it is possible to prevent the glass film from being bent in a undulating manner. Therefore, the stress that prevents the initial crack from developing along the planned cutting line is not easy to function, and it is easy to realize accurate laser cutting along the planned cutting line.

In the above structure, it is preferable that the support rod includes a flat plate. With this setting, it is easy to stabilize the posture of the support rod with respect to the support member or the posture of the glass film with respect to the support rod.

In the above structure, it is preferable that the glass film is supported by the support member and the support rod through the heat insulation sheet from the back side. With this setting, the heat of the laser or the heat of the cooling of the refrigerant can be suppressed from being transferred to the support member and the support rod and dissipated by the heat insulating sheet. Therefore, the temperature difference between heating by laser and cooling by refrigerant can be sufficiently ensured, thermal efficiency can be improved, and accurate laser cutting of the glass film can be achieved. This cutting method is particularly effective when the glass film is thin (for example, when the thickness is 200 μm or less). In addition, the portion of the glass film that floats from the support member including the line to be cut is also supported by the heat insulating sheet, so there is also an advantage that the posture of the glass film is more stable. [Effect of invention]

According to the present invention, the glass film can be laser-cut so that no cutting residue is generated.

Hereinafter, a method of manufacturing a glass film according to an embodiment of the present invention will be described with reference to the accompanying drawings. In addition, XYZ in the figure is an orthogonal coordinate system. The X direction and the Y direction are horizontal directions, and the X direction is the width direction. The Z direction is the vertical direction.

<First embodiment> As shown in FIGS. 1 and 2, a cutting device 1 used in the method for manufacturing a glass film of the first embodiment performs laser cutting of a glass film G along a planned cutting line V, and includes a support member 2, a support rod 3, and a laser Injection oscillator 4, refrigerant injection nozzle 5 and support table 6.

The glass film G has a single rectangular shape. The size of one side of the glass film G is preferably 300 mm to 3000 mm, and the thickness is preferably 5 μm to 300 μm, more preferably 30 μm to 200 μm.

The planned cutting line V is a straight imaginary line, and spans between the two sides facing the direction orthogonal to the width direction of the glass film G. In the present embodiment, the planned cutting line V is in the glass film G, and there are a total of two boundaries between the widthwise central portion Ga and the widthwise end portions Gb. Therefore, when laser cutting is performed along the two planned cutting lines V, the widthwise end portions Gb on both sides are separated from the widthwise central portion Ga. Here, the end portion Gb in the width direction includes a portion (also referred to as an edge portion) that is thicker than the center portion Ga in the width direction due to, for example, shrinkage during the forming process. Of course, the width-direction end Gb is not limited to the case of having an edge, and may have substantially the same thickness as the width-direction central portion Ga.

The glass film G is arranged on the support member 2 and the support rod 3 via the heat insulation sheet T. The heat insulating sheet T suppresses the heat of the heating area H formed by the irradiation of the laser L or the heat of the cooling area C formed by the injection of the refrigerant W from transferring heat to the support member 2 or the support rod 3 and dissipating. The thermal insulation sheet T preferably has a thermal conductivity lower than that of the support member 2 and the support rod 3. For the heat insulating sheet T, for example, a resin sheet such as foamed resin or non-woven fabric can be used. The heat insulating sheet T is preferably an elastic sheet. Furthermore, the heat insulating sheet T may not be arranged.

The supporting member 2 supports the glass film G from the back side, and in the present embodiment, it is composed of a fixed plate. The upper surface of the support member 2 is preferably a horizontal single plane.

The support rod 3 supports the vicinity of each planned cutting line V of the glass film G from the back side. In this embodiment, it is composed of a flat plate that is elongated in a direction parallel to the planned cutting line V. The upper surface of the support rod 3 is preferably a horizontal plane.

In the present embodiment, the support rod 3 is located between the end portion Gb in the width direction and the support member 2 and the central portion Ga in the width direction at positions other than immediately below each line to be cut V in the vicinity of each line to be cut V Two support members 2 are arranged in parallel in parallel with the planned cutting line V. A total of two scheduled cutting lines V exist, so a total of four support rods 3 are arranged on the support member 2. As a result, the portion of the glass film G including each planned cutting line V is lifted by the two support rods 3 arranged in parallel, and is held in a state where it floats from the support member 2 between the two support rods 3. Furthermore, the portion of the glass film G including the planned cutting line V may be horizontally flat between the two support rods 3, or may be a convex curved surface projecting upward, or may be projecting downward. Concave surface.

When the two support bars 3 are arranged in parallel on both sides of the cut line V in this way, the width of the width end Gb is preferably relatively large. However, the width of the central portion Ga in the width direction is set larger than the width of the end portion Gb in the width direction. Here, as a case where the width of the end portion Gb in the width direction is relatively large, the following values can be exemplified. That is, when the thickness of the glass film G is 200 μm, the width of the width direction end Gb is 46 mm or more, and when the thickness of the glass film G is 100 μm, the width of the width direction end Gb is 70 mm or more. In addition, the width of the said width direction edge part Gb is the value measured as the glass film G was mounted on the horizontal plane. In addition, the preferable range of the width of the end portion Gb in the width direction varies depending on various conditions such as the thickness of the glass film G, or the thickness or width of the support rod 3, so it is not limited to the examples.

The distance D1 between the two support rods 3 is preferably, for example, 5 mm to 50 mm (15 mm in this embodiment).

The thickness of the support rod 3 is preferably, for example, 0.5 mm to 5 mm (2 mm in this embodiment). The thickness of each support rod 3 is preferably the same.

The width of the support rod 3 is preferably, for example, 5 mm to 30 mm (in this embodiment, 10 mm). The width of each support rod 3 is preferably the same.

The support rod 3 is fixed to the support member 2. The fixing method of the support rod 3 may include tightening and fixing using a screw or the like, or adhesive fixing using an adhesive tape or the like. The support rod 3 may be detachable with respect to the support member 2 or may be integrated with the support member 2.

Examples of the material of the support rod 3 include metal and resin. When the support rod 3 is a metal, it is preferable to adhere and fix the entire back surface of the support rod 3 to the support member 2, and when the support rod 3 is a resin, it is preferable to adhere only the both ends of the support rod 3 in the longitudinal direction接固定于支持件2。 Then fixed to the support member 2. Of course, the fixing method or fixing position of the support rod 3 is not particularly limited.

The support rods 3 are continuously arranged over the entire length of the glass film G in a direction parallel to the planned cutting line V. In addition, the support rod 3 may be arranged intermittently or only partially in the entire length of the glass film G in a direction parallel to the planned cutting line V. At this time, the support rod 3 is preferably arranged at least in the vicinity of the other end of the planned cutting line V (the end opposite to one end Va of the planned cutting line V where the initial crack Sa is formed) Vb.

The support area of the support member 2 (the contact area of the support member 2 and the glass film G) is larger than the support area of the support rod 3 (the contact area of the support rod 3 and the glass film G). In detail, the support area of the support member 2 is preferably 5 times or more the support area of the support rod 3. As a result, most of the glass film G is supported by the support member 2, so the posture of the glass film G is also stable when the laser is cut.

The laser oscillator 4 is disposed above the glass film G so as to be movable along a line to cut V to be cut. The laser oscillator 4 irradiates the laser beam L on the planned cutting line V to form a heating area H, and scans the heating area H on the planned cutting line V as the movement moves.

Like the laser oscillator 4, the refrigerant injection nozzle 5 is arranged above the glass film G so as to be movable along the planned cutting line V. The refrigerant injection nozzle 5 sprays a refrigerant (for example, mist-like water) W on the portion irradiated with the laser light L of the planned cutting line V to form the cooling area C, and scans the cooling area C on the planned cutting line V as the movement moves. Thereby, as shown in FIG. 1, the heating area H and the cooling area C following the heating area H are sequentially scanned from one end Va side to the other end Vb side of the planned cutting line V.

The speed at which the laser oscillator 4 and the refrigerant injection nozzle 5 move in a direction parallel to the planned cutting line V is preferably in the range of 20 mm/s to 200 mm/s.

The support table 6 supports the vicinity of one end Va of the planned cutting line V of the glass film G from the back side, and is used when an initial crack Sa is formed at one end Va of the planned cutting line V. The support table 6 is composed of a flat plate formed of a predetermined material such as metal or resin. The upper surface of the support table 6 is preferably a horizontal plane. The support table 6 is fixed to the support member 2 by any fixing method in the same manner as the support rod 3. Furthermore, the support station 6 may not be configured.

Next, the method of manufacturing the glass film of the first embodiment will be described. This manufacturing method includes a cutting step using the cutting device 1 configured as described above. In the following, the case where laser cutting is performed along a pair of sides facing the width direction of the glass film G in the cutting step will be described, but laser cutting is also performed along the remaining pair of sides by the same method.

In the cutting step, first, as shown in FIG. 2, on the one hand, the support table 6 supports the glass film G in a flat state near one end Va of the planned cutting line V, and on the other hand, the wheel cutter 7 is placed on the glass. The surface side of the film G rotates, and an initial crack Sa is formed at one end Va of the cut line V. Here, the direction in which the wheel cutter 7 is rotated is preferably a direction along the planned cutting line V from the inside of the glass film G toward the end side. In addition, the distance of the rotary wheel cutter 7 is preferably set within a range of 5 mm to 10 mm. In addition, the mechanism for forming the initial crack Sa is not limited to the wheel cutter 7, for example, it may be a diamond scribe tool or a laser. In addition, in the step before the cutting step, an initial crack Sa may be formed in advance at one end Va of the planned cutting line V of the glass film G.

After the initial crack Sa is formed in this way, as shown in FIGS. 3 and 4, the laser beam L along the planned cutting line V is irradiated from the initial crack Sa, and the refrigerant W following the irradiation is sprayed. By this, the initial stress Sa is developed to the other end Vb along the planned cutting line V by the thermal stress generated by the temperature difference between the heating area H and the cooling area C (see FIG. 1 ).

At this time, the portion of the glass film G including the planned cutting line V is lifted by the two supporting rods 3 arranged side by side over the entire length of the planned cutting line V, and floats from the supporting member 2 between the two supporting rods 3 Up. If the glass film G is laser cut in such a supporting state, even if the thermal stress that develops the initial crack Sa near the other end Vb of the planned cutting line V becomes insufficient, it is possible to prevent the formation of cutting residues .

Although the cause of this phenomenon has not been identified, it is considered as follows. That is, the portion of the glass film G including the planned cutting line V floats from the support member 2 between the two support rods 3, so the width of the boundary is the cutting portion (cutting completed portion) S on the planned cutting line V The direction end portion Gb and the width direction center portion Ga are each to return to a more stable state (for example, a flat state). The direction and/or magnitude of such a force to be exerted when returning to a stable state are different from the width-direction end Gb and the width-direction central portion Ga with the cutting portion S as a boundary. As a result, it can be considered that the thermal stress caused by the laser cutting is different from the uncut portion (uncut portion) on the planned cutting line V, such as tearing force or shearing force, which promotes the development of the initial crack Sa The auxiliary force (for example, the force indicated by arrow F1 in FIG. 4) functions. Therefore, even if the thermal stress that develops the initial crack Sa in the vicinity of the other end Vb of the planned cutting line V becomes insufficient, the development of the initial crack Sa continues due to such an assisting force, preventing the occurrence of residual cutting portions.

The manufacturing method of the glass film of the first embodiment includes, before the cutting step, a forming step, a slow cooling step, and a plate picking step, for example. In addition, the manufacturing method of the glass film of the first embodiment includes, after the cutting step, for example, a washing step (including a drying step), an inspection step, and a packing step. Furthermore, a heat treatment step can also be implemented after the board picking step. In addition, the end face processing step may be performed after the cutting step. Of course, it is also possible to perform the cutting step alone.

In the forming step, the glass ribbon is formed from molten glass by a well-known method such as an over-flow down draw method or a float method.

In the slow cooling step, in order to reduce the warpage and internal strain of the formed glass ribbon, the formed glass ribbon is slowly cooled.

In the board collecting step, the slowly cooled glass ribbon is cut every predetermined length to obtain a plurality of glass films. Alternatively, after slowly cooling the glass ribbon in a roll shape, it may be cut at predetermined lengths to obtain a plurality of glass films.

In the heat treatment step, for example, the glass film is heat-treated in a heat treatment furnace.

In the end face processing step, the glass film cut to a predetermined size in the cutting step is subjected to end face processing including end face grinding, grinding, and corner cut.

In the cleaning step, the glass film is transported in an inclined posture while being cleaned and dried. Of course, it is also possible to perform a washing step on the glass film in a horizontal posture.

In the inspection step, the cleaned glass film is inspected for damage, dust, dirt, etc. on the surface, and/or whether there are no internal defects such as bubbles or foreign objects. The inspection is performed using an optical inspection device such as a camera.

In the packing step, the glass film satisfying the desired quality as a result of the inspection is packed. The bundling is carried out by laying a plurality of glass films horizontally or vertically on a predetermined pallet. In this case, a protective sheet containing liner paper, foamed resin, or the like may be interposed between the layers in the layering direction of the glass film.

Furthermore, in the present embodiment, in the cutting step, the laser cutting is performed in a state where the end Gb in the width direction of the glass film G floats from the supporting member 2 at a position other than the supporting rod 3, but it is not limited to this . For example, as shown in FIG. 5, the edge Gc of the end Gb in the width direction may be in line contact with the support member 2 via the heat insulating sheet T, and the remaining portion of the end Gb in the width direction except the heat insulating sheet T The position other than the contact portion with the support rod 3 floats from the support member 2. Alternatively, as shown in FIG. 6, the portion including the edge Gc in the widthwise end Gb may be in surface contact with the support member 2 via the heat insulating sheet T, and the remaining portion in the widthwise end Gb may be The position of the sheet T other than the contact portion with the support rod 3 floats from the support member 2.

In addition, in the present embodiment, the case where laser cutting is performed along the planned cutting line V provided at the boundary between the width end portion Gb of the glass film G and the width direction center portion Ga is described. The supporting form of the glass film G of the root support rod 3 can also be used for laser cutting along a line to be cut provided at a predetermined position of the central portion Ga in the width direction. That is, this supporting aspect is not limited to the case where the width-direction end portion Gb is separated from the width-direction central portion Ga by laser cutting.

<Second embodiment> The manufacturing method of the glass film of the second embodiment is different from the manufacturing method of the glass film of the first embodiment in the support state of the glass film G in the cutting step. The difference will be described below. In addition, the common structure is denoted by the same symbol, and detailed description is omitted.

As shown in FIGS. 7 and 8, in the cutting step included in the method for manufacturing a glass film of the second embodiment, the support bar 3 is in the vicinity of each planned cutting line V except for directly below each planned cutting line V There is only one position between the end Gb in the width direction and the support member 2 parallel to the planned cutting line V. In other words, the support rod 3 is not disposed between the central portion Ga in the width direction and the support member 2. A total of two scheduled cutting lines V exist, so a total of two support bars 3 are arranged on the support member 2. With this, the portion of the glass film G including each planned cutting line V is lifted by one support rod 3, and one side of the one support rod 3, that is, the widthwise central portion Ga side floats from the support member 2 Keep the state. In addition, the portion of the glass film G including the planned cutting line V may be inclined flat at the side of the support rod 3, or may be convexly curved convex upward, or convex downward. Concave curved. In addition, in the present embodiment, the widthwise end Gb is held in a state where it floats from the support member 2 except for the position of contact with the support rod 3 via the heat insulating sheet T, but the widthwise end The portion of the Gb including the end edge may be in contact with the support member 2 (linear contact or surface contact) via the heat insulating sheet T.

In this way, when only one support bar 3 is arranged on one side of the planned cutting line V, the width of the end portion Gb in the width direction is preferably relatively small. Here, as a case where the width of the end portion Gb in the width direction is relatively small, the following values can be exemplified. That is, the width of the end portion Gb in the width direction is less than 46 mm (preferably 45 mm or less) when the thickness of the glass film G is 200 μm, and the width of the end portion Gb in the width direction is less than 70 when the thickness of the glass film G is 100 μm mm (preferably 50 mm or less). In addition, the width of the said width direction edge part Gb is the value measured as the glass film G was mounted on the horizontal plane. In addition, the preferable range of the width of the end portion Gb in the width direction varies depending on various conditions such as the thickness of the glass film G, or the thickness or width of the support rod 3, so it is not limited to the examples.

The thickness of the support rod 3 is preferably, for example, 0.5 mm to 5 mm (2 mm in this embodiment).

The width of the support rod 3 is preferably, for example, 5 mm to 30 mm (in this embodiment, 10 mm).

The portion of the glass film G including the planned cutting line V has a first contact portion P1 that contacts the support rod 3 via the heat insulation sheet T, and a second contact portion P2 that contacts the support member 2 via the heat insulation sheet T . The interval D2 between the first contact portion P1 and the second contact portion P2 is preferably, for example, 30 mm to 200 mm (in this embodiment, 140 mm).

The scheduled cutting line V is preferably between the first contact portion P1 and the second contact portion P2, and is biased toward the first contact portion P1 side. In other words, it is preferable that the interval D3 between the second contact portion P2 and the planned cutting line V is greater than the interval D4 between the first contact portion P1 and the planned cutting line V. The interval D3 is preferably at least twice the interval D4.

It can be considered that even if a support rod 3 is arranged on only one side of the planned cutting line V as above, the uncut section on the planned cutting line V is the same as the cutting step of the first embodiment. (The unfinished part of the cutting) is different from the thermal stress caused by laser cutting, such as a tearing force or a shearing force, and an auxiliary force that promotes the development of the initial crack Sa (for example, as shown by arrow F2 in FIG. 8 Force). Therefore, even if the thermal stress that develops the initial crack Sa in the vicinity of the other end Vb of the planned cutting line V becomes insufficient, it is possible to prevent the formation of a cutting residual portion. Especially when the scheduled cutting line V is biased toward the first contact portion P1 side, such an effect is easily enjoyed.

The present invention is not limited to the above-mentioned embodiment at all, and can be implemented in various forms without departing from the gist of the present invention.

In the above embodiment, the case where the support rod is a flat plate that is elongated in a direction parallel to the line to cut is described, but the shape of the support rod is not limited to this. As long as the support rod is elongated in a direction parallel to the planned cutting line, it can be, for example, a cylinder (including elliptical cylinders), polygonal columns (including triangular or pentagonal polygonal columns), and semi-cylinders (including semi-elliptical cylinders) Wait. Furthermore, the shape of the support table is the same.

In the above embodiment, the laser oscillator and the refrigerant injection nozzle may be held at a constant position, and the glass film side may be moved together with the support member. At this time, the supporting member may use a mobile table, a belt conveyor, or the like.

In the above embodiment, the case where the glass film is laser cut along the two planned cutting lines on the support member has been described, but the glass film may also be laser cut along the three or more planned cutting lines. Alternatively, the glass film can be laser cut along a predetermined cutting line.

In the above-mentioned embodiment, the case where only the glass film superposed on the heat insulating sheet is laser cut is described, but the heat insulating sheet may also be cut along the line to be cut by heating of the laser ( Fuse).

1‧‧‧Cutting device 2‧‧‧Support component 3‧‧‧Support stick 4‧‧‧Laser oscillator 5‧‧‧Refrigerant spray nozzle 6‧‧‧Support Desk 7‧‧‧Wheel cutting machine 100、G‧‧‧glass film 101‧‧‧Cutting Department 102、V‧‧‧cutting the scheduled line 102a, Vb‧‧‧ the other end 103、H‧‧‧Heating area 104、C‧‧‧cooling area 105‧‧‧cutting residue D1, D2, D3, D4 ‧‧‧ interval F1, F2‧‧‧arrow Ga‧‧‧ widthwise central part Gb‧‧‧Width end Gc‧‧‧End L‧‧‧Laser P1‧‧‧First Contact Department P2‧‧‧The second contact S‧‧‧Cutting Department Sa‧‧‧The initial crack T‧‧‧Insulation sheet Va‧‧‧ one end W‧‧‧Refrigerant X, Y, Z‧‧‧ direction

FIG. 1 is a plan view showing a cutting step included in the method for manufacturing a glass film of the first embodiment and a cutting device for performing the cutting step. FIG. 2 is a cross-sectional view taken along line A-A of FIG. 1 and is a diagram showing a state where an initial crack is formed at one end of a line to be cut. FIG. 3 is a cross-sectional view taken along line B-B in FIG. 1, and is a diagram showing an example of the state (first state) immediately after the cut portion is formed. 4 is a cross-sectional view taken along the line B-B in FIG. 1, and is a diagram showing an example of the state immediately after the cutting portion is formed (the second state after the first state). 5 is a cross-sectional view showing a modified example of a cutting step included in the method for manufacturing a glass film of the first embodiment and a cutting device for performing the cutting step. 6 is a cross-sectional view showing a modified example of a cutting step included in the method for manufacturing a glass film of the first embodiment and a cutting device for performing the cutting step. 7 is a cross-sectional view showing a cutting step included in the method for manufacturing a glass film according to the second embodiment and a cutting device for performing the cutting step, and is an example showing a state (first state) immediately after the cutting part is formed. Figure. 8 is a cross-sectional view showing a cutting step included in the method for manufacturing a glass film according to the second embodiment and a cutting device for performing the cutting step, and is a diagram showing a state immediately after the cutting part is formed (the first state after the first state). Figure of an example of two states). 9 is a plan view showing a conventional method of cutting a glass film. FIG. 10 is a plan view showing a conventional method of cutting a glass film.

1‧‧‧Cutting device

2‧‧‧Support component

3‧‧‧Support stick

4‧‧‧Laser oscillator

5‧‧‧Refrigerant spray nozzle

D1‧‧‧Interval

G‧‧‧glass film

Ga‧‧‧ widthwise central part

Gb‧‧‧Width end

L‧‧‧Laser

S‧‧‧Cutting Department

T‧‧‧Insulation sheet

V‧‧‧cutting the scheduled line

W‧‧‧Refrigerant

X, Z‧‧‧ direction

Claims (10)

A method for manufacturing a glass film, comprising: a cutting step, after an initial crack is formed on a predetermined line for cutting a glass film supported from the back side by a supporting member, by heating by a laser and using a refrigerant following the heating Cooling, the initial crack develops along the planned cutting line, and the glass film is cut. The method of manufacturing the glass film is characterized by: In the cutting step, between at least one region of the glass film bordered by the planned cutting line and the support member, the position is arranged along the position other than directly below the planned cutting line The support rod extending along the planned cutting line cuts the glass film in a state where a portion of the glass film including the planned cutting line floats from the support member. The method for manufacturing a glass film as described in item 1 of the patent application range, wherein an area of the glass film bordered by the predetermined cutting line is an end of the glass film, By arranging the support rod only between the end and the support member, the portion of the glass film including the planned cutting line is removed from the support member on the side of the support rod In a floating state, the glass film is cut. The method for manufacturing a glass film according to claim 2 of the patent application, wherein the end portion floats from the support member at a position other than the contact portion with the support rod. The method for manufacturing a glass film according to item 2 or item 3 of the patent application scope, wherein the portion of the glass film including the predetermined cutting line includes a first contact portion that contacts the support rod and The second contact portion contacted by the support member, The predetermined cutting line is between the first contact portion and the second contact portion, and is located on the side of the first contact portion. The method for manufacturing a glass film according to item 1 of the scope of the patent application, wherein between a region of the glass film bordered by the predetermined cutting line and the support member, and the glass film The support rods are arranged between the other area where the planned cut line is a boundary and the support member, whereby the portion of the glass film including the planned cut line is between the two support rods In a state where the support member floats, the glass film is cut. The method for manufacturing a glass film as described in item 5 of the patent application range, wherein an area of the glass film bordered by the predetermined cutting line is an end of the glass film, The end portion floats from the support member at a position other than the contact portion with the support bar. The method for manufacturing a glass film as described in item 5 of the patent application range, wherein an area of the glass film bordered by the predetermined cutting line is an end of the glass film, The end edge of the end portion makes line contact with the support member, and the rest of the end portion floats from the support member at a position other than the contact portion with the support bar. The method for manufacturing a glass film according to any one of claims 1 to 7, wherein the support rod is continuous over the entire length of the glass film in the direction along the predetermined cutting line Configuration. The method for manufacturing a glass film according to any one of claims 1 to 8, wherein the support rod includes a flat plate. The method for manufacturing a glass film according to any one of claims 1 to 9, wherein the glass film is supported by the support member and the support rod via a heat insulation sheet from the back side .

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