JP2019210159A - Glass film manufacturing method - Google Patents

Abstract

To laser-cut a glass film along a cutting schedule line so as not to generate an uncut part.SOLUTION: After an initial crack Sa is formed at a width direction center part Ga of a glass film G supported from a rear side by a support member 2 and on a cutting schedule line V existing at a boundary of the width direction center part Ga, the initial crack Sa is advanced along the cutting schedule line V by heating with laser L and cooling with a refrigerant W following it, so as to cut the glass film G. At the time of cutting, supporting bars 3 extending along the cutting schedule line V at a position except for a portion immediately under the cutting schedule line V are respectively arranged between the width direction center part Ga and the support member 2, and between a width direction end Gb and the support member 2, so as to make a portion of the glass film G including the cutting schedule line V floated from the support member 2.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a method for producing a glass film.

  The glass film is a thin glass having a thickness of, for example, 200 μm or less, and the production process usually includes a process of cleaving the glass film into a desired size.

  One method for cleaving a glass film is laser cleaving (see, for example, Patent Document 1). In this method, first, an initial crack is formed on the planned cutting line (virtually existing line) at one end of the glass film, that is, at one end of the planned cutting line. Thereafter, the heating area heated by the laser and the cooling area cooled by the refrigerant following the laser are sequentially scanned from one end portion to the other end portion of the planned cutting line of the glass film. Thereby, the initial crack propagates along the planned cutting line due to the thermal stress generated due to the temperature difference between the heating region and the cooling region, and the glass film is cut (full body cutting).

JP2011-144092A

  However, as shown in FIG. 9, when the glass film 100 is cleaved by laser, the other end 102a of the cleaved planned line 102 which is the end point of the cleaved portion (part where cleaving is completed) 101 formed by the development of the initial crack. In the vicinity, it is difficult to secure a space for simultaneously forming the heating region 103 and the cooling region 104 (see the regions 103 and 104 indicated by chain lines). As a result, as shown in FIG. 10, in the vicinity of the other end 102a of the planned cutting line 102, the desired thermal stress for causing the initial crack to propagate cannot be applied, and the cutting unit 101 has the other side of the planned cutting line 102. There exists a problem that it stops before reaching the end 102a and the uncut portion 105 is formed. If the uncut portion 105 is folded later in this way, the cleaved portion may bend and deviate from the planned cutting line, and sufficient dimensional accuracy may not be obtained.

  An object of the present invention is to laser-cleave a glass film along a planned cutting line so that no uncut portion is generated.

  The present invention, which was created to solve the above problems, is formed by forming an initial crack on the planned cutting line of the glass film supported from the back side by the support member, and then heating by the laser and cooling by the refrigerant following this. The method for producing a glass film comprising a cleaving step of cleaving a glass film by causing an initial crack to develop along the cleaving line, wherein in the cleaving step, at least one of the cleaving line of the glass film is defined as a boundary. Between the region and the support member, by placing a support bar that extends along the planned cutting line at a position excluding the area directly below the planned cutting line, the portion including the planned cutting line of the glass film is floated from the support member Then, the glass film is cleaved. According to such a configuration, even if the thermal stress that causes the initial crack to propagate in the vicinity of the other end of the planned cutting line becomes insufficient, it is possible to prevent a situation where the uncut portion is formed.

  Although the cause of such an event has not been elucidated, it is considered as follows. That is, since the portion including the planned cutting line of the glass film is lifted from the support member, when the glass film is laser cut along the planned cutting line, the cutting part on the planned cutting line (the part where the cutting is completed) One region and the other region that are bounded by each other attempt to return to a more stable state (for example, a state of forming a plane) independently. The direction and / or magnitude of the force acting when trying to return to such a stable state is different between one region and the other region with the cleaved portion as a boundary. As a result, in addition to the thermal stress due to laser cleaving, an auxiliary force that promotes the development of initial cracks such as tearing force and shearing force is applied to the uncleaved portion (the portion where cleaving has not been completed) on the planned cleaving line. It is thought to act. Therefore, even if the thermal stress that propagates the initial crack becomes insufficient, it is considered that the development of the initial crack is sustained by such an auxiliary force and the occurrence of the uncut portion is prevented.

  In said structure, one area | region which makes the dividing line of a glass film a boundary is an edge part of a glass film, By arrange | positioning a support bar only between this edge part and a supporting member, You may make it cleave a glass film in the state which floated from the support member in the one side of a support bar the part containing the planned cutting line. Such a cleaving method is effective when the width of the end portion of the glass film (dimension in the direction orthogonal to the planned cleaving line) is small.

  Thus, when arrange | positioning a support bar only to the one side of the planned cutting line, it is preferable that the edge part has floated from the support member in the position except a contact part with a support bar. In this way, it is considered that the auxiliary force that promotes the development of the initial crack acts more strongly on the uncut portion on the planned cutting line.

  When the support bar is arranged only on one side of the planned cutting line as described above, the portion including the planned cutting line of the glass film includes a first contact part that contacts the support bar, and a second contact part that contacts the support member, It is preferable that the cleaving line is located on the first contact portion side between the first contact portion and the second contact portion. In this way, it has been confirmed that laser cleaving can be carried out more accurately along the planned cutting line.

  In said structure, it supports to each between one area | region and the support member which border on the cutting line of a glass film, and between the other area | region and board | substrate which has a cutting line of a glass film as a boundary. By arranging the bar, the glass film may be cleaved in a state where the portion including the planned breaking line of the glass film is floated from the support member between the two support bars. Such a cleaving method is effective when the widths of one region and the other region (dimensions in the direction perpendicular to the cleaving line) are large, with the cleaving line of the glass film as a boundary.

  Thus, when arrange | positioning a support bar on both sides of the planned cutting line, one area | region which makes a boundary the cutting planned line of a glass film is an edge part of a glass film, and an edge part contacts a support bar. You may float from a support member in the position except. Alternatively, the edge of the end portion may be in line contact with the support member, and the remaining portion of the end portion may float at the position excluding the contact portion with the support bar. In this way, it is considered that the auxiliary force that promotes the development of the initial crack acts more strongly on the uncut portion on the planned cutting line.

  Said structure WHEREIN: It is preferable that the support bar is continuously arrange | positioned over the full length of the glass film in the direction along a cutting plan line. That is, if the support bar is intermittently arranged in the direction along the planned cutting line, the glass film will run on the support bar in the middle, and the glass film will be bent like a wave. When the glass film is curved like a wave like this, there is a possibility that a stress that inhibits the initial crack from progressing along the planned breaking line may act. On the other hand, when the support bar is continuously arranged over the entire length of the glass film in the direction along the planned cutting line, the entire length of the glass film in the direction along the planned cutting line is supported by the support bar. Therefore, it is possible to prevent a situation in which the glass film is bent like a wave. Therefore, stress that inhibits the initial crack from propagating along the planned cutting line is unlikely to act, and it is easy to realize accurate laser cutting along the planned cutting line.

  Said structure WHEREIN: It is preferable that a support bar consists of a flat plate. If it does in this way, it will become easy to stabilize the attitude | position of the support bar with respect to a support member, and the attitude | position of the glass film with respect to a support bar.

  Said structure WHEREIN: It is preferable that the glass film is supported by the support member and the support bar via the heat insulation sheet from the back surface side. If it does in this way, it can suppress that the calorie | heat amount by the heating of a laser, or the calorie | heat amount by cooling of a refrigerant | coolant is conducted to a support member and a support bar, and escapes. Therefore, a sufficient temperature difference between the heating by the laser and the cooling by the refrigerant can be secured, and the accurate laser cleaving of the glass film can be realized while improving the thermal efficiency. Such a cleaving method is particularly effective when the glass film is thin (for example, when the thickness is 200 μm or less). In addition, since the portion including the planned cutting line of the glass film floating from the support member is also supported by the heat insulating sheet, there is an advantage that the posture of the glass film becomes more stable.

  According to the present invention, the glass film can be cleaved with a laser so that an uncut portion is not generated.

It is a top view which shows the cleaving process contained in the manufacturing method of the glass film which concerns on 1st embodiment, and the cleaving apparatus for implementing it. It is AA sectional drawing of FIG. 1, Comprising: It is a figure which shows the condition which forms an initial stage crack in the one end of the cutting planned line. It is BB sectional drawing of FIG. 1, Comprising: It is a figure which shows an example of the condition (1st state) immediately after a cleaving part was formed. It is BB sectional drawing of FIG. 1, Comprising: It is a figure which shows an example of the condition (2nd state after a 1st state) immediately after a cleaving part was formed. It is sectional drawing which shows the modification of the cleaving process contained in the manufacturing method of the glass film which concerns on 1st embodiment, and the cleaving apparatus for implementing it. It is sectional drawing which shows the modification of the cleaving process contained in the manufacturing method of the glass film which concerns on 1st embodiment, and the cleaving apparatus for implementing it. It is sectional drawing which shows the cleaving process contained in the manufacturing method of the glass film which concerns on 2nd embodiment, and the cleaving apparatus for implementing it, Comprising: An example of the situation (1st state) immediately after a cleaving part was formed FIG. It is sectional drawing which shows the cleaving process included in the manufacturing method of the glass film which concerns on 2nd embodiment, and the cleaving apparatus for implementing it, Comprising: The situation immediately after a cleaving part was formed (the 1st state after a 1st state) It is a figure which shows an example of (two states). It is a top view which shows the cleaving method of the glass film in the past. It is a top view which shows the cleaving method of the glass film in the past.

  Hereinafter, the manufacturing method of the glass film which concerns on embodiment of this invention is demonstrated with reference to an accompanying drawing. In the figure, XYZ is an orthogonal coordinate system. The X direction and the Y direction are horizontal directions, and the X direction is a width direction. The Z direction is the vertical direction.

<First embodiment>
As shown in FIG.1 and FIG.2, the cleaving apparatus 1 used for the manufacturing method of the glass film which concerns on 1st embodiment is a laser cleaving along the planned cutting line V of the glass film G, Comprising: Support member 2, a support bar 3, a laser oscillator 4, a refrigerant injection nozzle 5, and a support base 6.

  The glass film G has a rectangular sheet shape. The size of one side of the glass film G is preferably 300 mm to 3000 mm, the thickness is preferably 5 μm to 300 μm, and more preferably 30 μm to 200 μm.

  The planned cutting line V is a straight virtual line straddling between two sides facing each other in a direction orthogonal to the width direction of the glass film G. In this embodiment, a total of two planned cutting lines V exist at the boundary between the width direction central portion Ga and the respective width direction end portions Gb of the glass film G. Therefore, when laser cutting is performed along the two planned cutting lines V, the width direction ends Gb on both sides are separated from the width direction central portion Ga. Here, the width direction end portion Gb includes, for example, a portion (also referred to as an ear portion) that is thicker than the width direction central portion Ga due to the influence of shrinkage or the like in the molding process. Of course, the width direction end portion Gb is not limited to the case having the ear portion, and may have substantially the same thickness as the width direction central portion Ga.

  The glass film G is disposed on the support member 2 and the support bar 3 via the heat insulating sheet T. The heat insulating sheet T suppresses the heat quantity of the heating area H formed by the irradiation of the laser L and the heat quantity of the cooling area C formed by the injection of the refrigerant W from being transferred to the support member 2 and the support bar 3 and escaping. The heat insulating sheet T preferably has a lower thermal conductivity than the support member 2 and the support bar 3. As the heat insulating sheet T, for example, a resin sheet such as a foamed resin or a nonwoven fabric can be used. The heat insulating sheet T is preferably an elastic sheet. The heat insulating sheet T may not be arranged.

  The support member 2 supports the glass film G from the back surface side, and is constituted by a surface plate in this embodiment. The upper surface of the support member 2 is preferably a horizontal single plane.

  The support bar 3 supports each cutting planned line V vicinity of the glass film G from the back surface side, and is comprised with the flat plate long in the direction parallel to the cutting planned line V in this embodiment. The upper surface of the support bar 3 is preferably a horizontal plane.

  In this embodiment, the support bar 3 is located at a position excluding the portion immediately below each planned cutting line V in the vicinity of each planned cutting line V, between the width direction end portion Gb and the support member 2, and in the center in the width direction. Between the part Ga and the support member 2, two are arranged in parallel in parallel with the planned cutting line V. Since there are a total of two scheduled cutting lines V, a total of four support bars 3 are arranged on the support member 2. Thereby, the part containing each cutting planned line V of the glass film G is lifted by the two support bars 3 arrange | positioned in parallel, and the state which floated from the support member 2 between the two support bars 3 Held in. In addition, the part including the cutting line V of the glass film G may be a horizontal planar shape between the two support bars 3, or may be a convex curved surface that is convex upward. It may be a concave curved surface that protrudes downward.

  Thus, when arrange | positioning the two support bars 3 in parallel on both sides of the cutting planned line V, it is preferable that the width | variety of the width direction edge part Gb is relatively large. However, the width of the central portion Ga in the width direction is greater than the width of the end portion Gb in the width direction. Here, as the case where the width of the width direction end portion Gb is relatively large, the following values can be exemplified. That is, when the thickness of the glass film G is 200 μm, the width of the width direction end Gb is 46 mm or more, and when the thickness of the glass film G is 100 μm, the width of the width direction end Gb is 70 mm or more. In addition, let the width | variety of said width direction edge part Gb be the value measured by mounting the glass film G on a horizontal plane. Moreover, since the suitable range of the width | variety edge part Gb changes with conditions, such as the thickness of the glass film G, the thickness of the support bar 3, and a width | variety, it is not limited to what was illustrated.

  The distance D1 between the two support bars 3 is preferably, for example, 5 to 50 mm (15 mm in this embodiment).

  The thickness of the support bar 3 is preferably, for example, 0.5 to 5 mm (2 mm in this embodiment). It is preferable that the thickness of each support bar 3 is the same.

  The width of the support bar 3 is preferably 5 to 30 mm (10 mm in this embodiment), for example. The width of each support bar 3 is preferably the same.

  The support bar 3 is fixed to the support member 2. Examples of the fixing method of the support bar 3 include fastening and fixing with screws and the like, and adhesion and fixing with an adhesive tape and the like. The support bar 3 may be detachable from the support member 2 or may be integrated with the support member 2.

  Examples of the material of the support bar 3 include metals and resins. When the support bar 3 is made of metal, the entire back surface of the support bar 3 is preferably bonded and fixed to the support member 2. When the support bar 3 is made of resin, only both ends in the longitudinal direction of the support bar 3 are bonded to the support member 2. It is preferable to fix. Of course, the fixing method and fixing position of the support bar 3 are not particularly limited.

  The support bar 3 is continuously arranged over the entire length of the glass film G in a direction parallel to the planned cutting line V. In addition, the support bar 3 may be intermittently arrange | positioned in the full length of the glass film G in the direction parallel to the cutting planned line V, or may be arrange | positioned only in part. In this case, the support bar 3 is preferably disposed at least in the vicinity of the other end of the planned cutting line V (the end opposite to the one end Va of the planned cutting line V where the initial crack Sa is formed) Vb.

  The support area of the support member 2 (contact area between the support member 2 and the glass film G) is larger than the support area of the support bar 3 (contact area between the support bar 3 and the glass film G). Specifically, the support area of the support member 2 is preferably 5 times or more the support area of the support bar 3. Thereby, since most of the glass film G is supported by the support member 2, the attitude | position of the glass film G is stabilized also at the time of laser cutting.

  The laser oscillator 4 is arranged above the glass film G so as to be movable along the planned cutting line V. The laser oscillator 4 irradiates the planned cutting line V with a laser L to form a heating region H, and scans the heating region H on the planned cutting line V as the movement occurs.

  Similarly to the laser oscillator 4, the refrigerant injection nozzle 5 is disposed above the glass film G so as to be movable along the planned cutting line V. The refrigerant injection nozzle 5 forms a cooling region C by injecting a refrigerant (for example, mist-like water) W to a portion that has been irradiated with the laser L in the cutting line V, and the cooling region C is moved along with the movement. Is scanned on the planned cutting line V. Thereby, as shown in FIG. 1, the heating area H and the cooling area C following the heating area H are sequentially scanned from the one end Va side to the other end Vb side.

  The speed at which the laser oscillator 4 and the refrigerant injection nozzle 5 move in a direction parallel to the planned cutting line V is preferably in the range of 20 to 200 mm / s.

  The support base 6 supports the vicinity of one end Va of the planned cutting line V of the glass film G from the back side, and is used when forming the initial crack Sa at the one end Va of the planned cutting line V. The support base 6 is composed of a flat plate made of a predetermined material such as metal or resin. The upper surface of the support base 6 is preferably a horizontal plane. The support base 6 is fixed to the support member 2 by an arbitrary fixing method similarly to the support bar 3. The support base 6 may not be arranged.

  Next, the manufacturing method of the glass film which concerns on 1st embodiment is demonstrated. This manufacturing method includes a cleaving process using the cleaving apparatus 1 configured as described above. In the following, in the cleaving step, a case where laser cleaving is performed along a pair of sides facing the width direction of the glass film G will be described, but laser cleaving is performed in the same manner along the remaining pair of sides. The

  In the cleaving step, first, as shown in FIG. 2, the wheel cutter 7 is held on the surface side of the glass film G while supporting the vicinity of one end Va of the planned cutting line V of the glass film G by the support base 6. The initial crack Sa is formed at one end Va of the planned cutting line V. Here, it is preferable that the direction in which the wheel cutter 7 is rolled is a direction from the inner side of the glass film G toward the end side along the planned cutting line V. Moreover, it is preferable to make the distance which rolls the wheel cutter 7 into the range of 5-10 mm. The means for forming the initial crack Sa is not limited to the wheel cutter 7, and may be, for example, a diamond scribe tool or a laser. In addition, an initial crack Sa may be formed in advance at one end Va of the planned cutting line V of the glass film G in a pre-process of the cutting process.

  After the initial crack Sa is formed in this way, as shown in FIGS. 3 and 4, with the initial crack Sa as a starting point, the irradiation of the laser L along the planned cutting line V, and the injection of the coolant W that follows this I do. Thereby, the initial crack Sa is propagated along the planned cutting line V toward the other end Vb by the thermal stress generated due to the temperature difference between the heating region H and the cooling region C (see FIG. 1).

  At this time, the portion including the planned cutting line V of the glass film G is lifted by the two support bars 3 arranged in parallel over the entire length of the planned cutting line V, and between the two support bars 3. It floats from the support member 2. When the glass film G is laser-cleaved in such a support mode, a situation where a remaining portion is not formed even if the thermal stress that causes the initial crack Sa to propagate in the vicinity of the other end Vb of the cleaving line V is insufficient is prevented. can do.

  Although the cause of such an event has not been elucidated, it is considered as follows. That is, since the part including the planned cutting line V of the glass film G is floating from the support member 2 between the two support bars 3, the cutting part on the planned cutting line V (the cutting is completed). (Part) The width direction end part Gb and the width direction center part Ga having S as a boundary are each independently going to return to a more stable state (for example, a state of forming a plane). The direction and / or magnitude of the force acting when trying to return to such a stable state differs between the width direction end Gb and the width direction central portion Ga having the cleaved portion S as a boundary. As a result, in addition to the thermal stress due to the laser cleaving, an auxiliary for promoting the progress of the initial crack Sa, such as a tearing force or a shearing force, in the uncleaved portion (the portion where the cleaving has not been completed) on the planned cutting line V. It is considered that an effective force (for example, a force indicated by an arrow F1 in FIG. 4) acts. Therefore, even if the thermal stress that causes the initial crack Sa to propagate in the vicinity of the other end Vb of the planned cutting line V becomes insufficient, the development of the initial crack Sa is sustained by such an auxiliary force, and the occurrence of the uncut portion is generated. Is thought to be prevented.

  The manufacturing method of the glass film which concerns on 1st embodiment is provided with the shaping | molding process, the slow cooling process, and the plate-drawing process before the cleaving process, for example. Moreover, the manufacturing method of the glass film which concerns on 1st embodiment is equipped with the washing | cleaning process (a drying process is included), an inspection process, and a packing process after a cleaving process, for example. In addition, you may implement a heat treatment process after the plate-drawing process. Moreover, you may implement an end surface processing process after the cleaving process. Of course, only the cleaving process may be performed alone.

  In the forming step, a glass ribbon is formed from the molten glass by a known method such as an overflow downdraw method or a float method.

  In the slow cooling step, the molded glass ribbon is gradually cooled in order to reduce warpage and internal strain of the molded glass ribbon.

  In the plate-drawing step, the slowly cooled glass ribbon is cut into predetermined lengths to obtain a plurality of glass films. Alternatively, after slowly cooling the glass ribbon into a roll shape, the glass ribbon is cut for each predetermined length to obtain a plurality of glass films.

  In the heat treatment step, for example, heat treatment is performed on the glass film in a heat treatment furnace.

  In the end face processing step, end face processing including end face grinding, polishing, and corner cutting is performed on the glass film cut into a predetermined size in the cleaving step.

  In the washing step, the glass film is dried while being transported in an inclined posture and then dried. Of course, you may implement a washing | cleaning process with respect to the glass film of a horizontal attitude | position.

  In the inspection step, the surface of the cleaned glass film is inspected for scratches, dust, dirt, and / or internal defects such as bubbles and foreign matter. The inspection is performed using an optical inspection device such as a camera.

  In the packing process, the glass film that satisfies the desired quality is packed as a result of the inspection. Packing is performed by laminating a plurality of glass films on a predetermined pallet in a flat position or in a vertical position. In this case, it is preferable to interpose a protective sheet made of interleaving paper or foamed resin between the glass film lamination directions.

  In this embodiment, in the cleaving step, the laser cleaving is performed in a state where the width direction end Gb of the glass film G is lifted from the support member 2 at a position excluding the support bar 3, but is not limited thereto. For example, as shown in FIG. 5, the end edge Gc of the width direction end portion Gb is in line contact with the support member 2 via the heat insulating sheet T, and the remaining portion of the width direction end portion Gb is the heat insulating sheet T. You may float from the support member 2 in the position except a contact part with the support bar 3 via. Alternatively, as shown in FIG. 6, the portion including the edge Gc of the width direction end Gb is in surface contact with the support member 2 via the heat insulating sheet T, and the remaining portion of the width direction end Gb is You may float from the supporting member 2 in the position except a contact part with the support bar 3 via the heat insulation sheet T. FIG.

  Moreover, in this embodiment, although the case where laser cutting was performed along the cutting planned line V provided in the boundary of the width direction edge part Gb of the glass film G and the width direction center part Ga was demonstrated, said two support The support mode of the glass film G by the bar 3 can also be used when laser cutting is performed along a planned cutting line provided at a predetermined position of the central portion Ga in the width direction. That is, such a support mode is not limited to the case where the width direction end portion Gb is separated from the width direction central portion Ga by laser cleaving.

<Second embodiment>
The point in which the manufacturing method of the glass film which concerns on 2nd embodiment differs from the manufacturing method of the glass film which concerns on 1st embodiment is the support aspect of the glass film G in a cleaving process. Hereinafter, this difference will be described. In addition, about the common structure, the same code | symbol is attached | subjected and detailed description is abbreviate | omitted.

  As shown in FIG.7 and FIG.8, in the cleaving process included in the manufacturing method of the glass film which concerns on 2nd embodiment, the support bar 3 is directly under each cleaved planned line V among each cleaved planned line V vicinity. At the excluded position, one is arranged in parallel with the planned cutting line V only between the width direction end Gb and the support member 2. In other words, the support bar 3 is not disposed between the width direction central portion Ga and the support member 2. Since there are a total of two planned cutting lines V, two support bars 3 are arranged on the support member 2 in total. Thereby, while the part containing each cutting planned line V of the glass film G is lifted by the one support bar 3, it is in one side of the one support bar 3, ie, the width direction center part Ga side. It is held in a state of floating from the support member 2. The portion including the planned cutting line V of the glass film G may be an inclined flat surface on one side of the support bar 3 or may be a convex curved surface that is convex upward. It may be a concave curved surface that protrudes downward. Further, in this embodiment, the entire width direction end portion Gb is held in a state of floating from the support member 2 at a position excluding the contact portion with the support bar 3 via the heat insulating sheet T. The part including the edge of the part Gb may be in contact with the support member 2 via the heat insulating sheet T (line contact or surface contact).

  Thus, when arrange | positioning the one support bar 3 only to the one side of the cutting planned line V, it is preferable that the width | variety of the width direction edge part Gb is relatively small. Here, as the case where the width of the width direction end portion Gb is relatively small, the following values can be exemplified. That is, when the thickness of the glass film G is 200 μm, the width of the width direction end Gb is less than 46 mm (preferably 45 mm or less), and when the thickness of the glass film G is 100 μm, the width of the width direction end Gb is less than 70 mm ( Preferably, it is 50 mm or less. In addition, let the width | variety of said width direction edge part Gb be the value measured by mounting the glass film G on a horizontal plane. Moreover, since the suitable range of the width | variety edge part Gb changes with conditions, such as the thickness of the glass film G, the thickness of the support bar 3, and a width | variety, it is not limited to what was illustrated.

  The thickness of the support bar 3 is preferably, for example, 0.5 to 5 mm (2 mm in this embodiment).

  The width of the support bar 3 is preferably 5 to 30 mm (10 mm in this embodiment), for example.

  The portion including the planned cutting line V of the glass film G includes a first contact portion P1 that contacts the support bar 3 via the heat insulating sheet T, and a second contact portion P2 that contacts the support member 2 via the heat insulating sheet T. Have The distance D2 between the first contact portion P1 and the second contact portion P2 is preferably, for example, 30 to 200 mm (140 mm in this embodiment).

  It is preferable that the cleaving planned line V is located between the first contact portion P1 and the second contact portion P2 so as to be biased toward the first contact portion P1. In other words, the distance D3 between the second contact part P2 and the planned cutting line V is preferably larger than the distance D4 between the first contact part P1 and the planned cutting line V. The interval D3 is preferably at least twice the interval D4.

  Even in the support mode in which the single support bar 3 is arranged only on one side of the planned cutting line V as described above, as in the cutting process of the first embodiment, the uncut part (cleaved) on the planned cutting line V In addition to the thermal stress due to laser cleaving, for example, an auxiliary force (for example, a force indicated by an arrow F2 in FIG. 8) that promotes the development of the initial crack Sa, such as a tearing force or a shearing force. ) Is considered to act. Therefore, even when the thermal stress that causes the initial crack Sa to propagate in the vicinity of the other end Vb of the planned cutting line V becomes insufficient, it is possible to prevent a situation in which an uncut portion is formed. In particular, it is easy to enjoy such an effect when the planned cutting line V is biased to the first contact portion P1 side.

  The present invention is not limited to the above embodiment, and can be implemented in various forms without departing from the gist of the present invention.

  In the above embodiment, the case where the support bar is a flat plate that is long in a direction parallel to the planned cutting line has been described, but the shape of the support bar is not limited thereto. If the support bar is long in the direction parallel to the planned cutting line, for example, a cylinder (including an elliptical column), a polygonal column (including a triangular or pentagonal polygonal column), a semi-cylinder (including a semi-elliptical column) Or the like. The same applies to the shape of the support base.

  In said embodiment, a laser oscillator and a refrigerant | coolant injection nozzle may be hold | maintained at a fixed position, and the glass film side may be moved with a supporting member. In this case, a moving table or a belt conveyor can be used as the support member.

  In the above embodiment, the case where the glass film is cleaved along two planned cutting lines on the support member has been described, but even if the glass film is cleaved along three or more planned cutting lines Alternatively, the glass film may be cleaved along a single cut line.

  In the above embodiment, the case where only the glass film stacked on the heat insulating sheet is cleaved by laser is described. However, the heat insulating sheet may also be cut (melted) along the planned cutting line by heating of the laser.

DESCRIPTION OF SYMBOLS 1 Cleaving device 2 Support member 3 Support bar 4 Laser oscillator 5 Refrigerant injection nozzle 6 Support stand 7 Wheel cutter G Glass film Ga Width direction center part Gb Width direction edge T Thermal insulation sheet L Laser W Refrigerant C Cooling area H Heating area V Cleaving Planned line S Split part Sa Initial crack

Claims (10)

After forming an initial crack on the planned cutting line of the glass film supported from the back side by the support member, the initial crack is allowed to propagate along the planned cutting line by heating with a laser and cooling with a coolant that follows this. A method for producing a glass film comprising a cleaving step for cleaving the glass film,
In the cleaving step, a support extending along the cleaving line at a position excluding the area immediately below the cleaving line between at least one region having the cleaving line as a boundary of the glass film and the support member. A method for producing a glass film, comprising: arranging a bar to cleave the glass film in a state where a portion including the planned cutting line of the glass film is floated from the support member. One of the regions having the boundary of the planned cutting line of the glass film is an end of the glass film,
By disposing the support bar only between the end portion and the support member, the portion including the planned cutting line of the glass film is floated from the support member on one side of the support bar. The method for producing a glass film according to claim 1, wherein the glass film is cleaved.   The method for producing a glass film according to claim 2, wherein the end portion floats from the support member at a position excluding a contact portion with the support bar. The portion of the glass film including the planned cutting line includes a first contact portion that contacts the support bar, and a second contact portion that contacts the support member,
4. The glass film according to claim 2, wherein the cleaving line is positioned to be biased toward the first contact portion between the first contact portion and the second contact portion. Manufacturing method.   Between the one side of the glass film with the planned cutting line and the support member, and between the other side of the glass film with the planned cutting line and the support member, respectively. By disposing the support bar, the glass film is cleaved in a state where the portion including the planned cutting line of the glass film is floated from the support member between the two support bars. The manufacturing method of the glass film of Claim 1. One of the regions having the boundary of the planned cutting line of the glass film is an end of the glass film,
The method for producing a glass film according to claim 5, wherein the end portion floats from the support member at a position excluding a contact portion with the support bar. One of the regions having the boundary of the planned cutting line of the glass film is an end of the glass film,
An end edge of the end portion is in line contact with the support member, and a remaining portion of the end portion floats from the support member at a position excluding the contact portion with the support bar. The manufacturing method of the glass film of Claim 5.   The said support bar is continuously arrange | positioned over the full length of the said glass film in the direction along the said cutting planned line, The manufacturing of the glass film of any one of Claims 1-7 characterized by the above-mentioned. Method.   The said support bar consists of flat plates, The manufacturing method of the glass film of any one of Claims 1-8 characterized by the above-mentioned. The said glass film is supported by the said supporting member and the said support bar via the heat insulation sheet from the back surface side, The manufacturing method of the glass film of any one of Claims 1-9 characterized by the above-mentioned.

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