TW201939074A - 光波分離結構與形成光波分離結構的方法 - Google Patents

光波分離結構與形成光波分離結構的方法 Download PDF

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Publication number
TW201939074A
TW201939074A TW108115185A TW108115185A TW201939074A TW 201939074 A TW201939074 A TW 201939074A TW 108115185 A TW108115185 A TW 108115185A TW 108115185 A TW108115185 A TW 108115185A TW 201939074 A TW201939074 A TW 201939074A
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TW
Taiwan
Prior art keywords
layer
substrate
refractive index
vapor deposition
physical vapor
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TW108115185A
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English (en)
Chinese (zh)
Inventor
迪爾丹尼爾李
曹勇
朱明偉
陳泰舟
Original Assignee
美商應用材料股份有限公司
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Application filed by 美商應用材料股份有限公司 filed Critical 美商應用材料股份有限公司
Publication of TW201939074A publication Critical patent/TW201939074A/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
    • G02B27/1013—Beam splitting or combining systems for splitting or combining different wavelengths for colour or multispectral image sensors, e.g. splitting an image into monochromatic image components on respective sensors
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676—Oxynitrides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Chemical Vapour Deposition (AREA)
  • Optical Filters (AREA)
  • Solid State Image Pick-Up Elements (AREA)
TW108115185A 2014-04-11 2015-03-25 光波分離結構與形成光波分離結構的方法 TW201939074A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201461978803P 2014-04-11 2014-04-11
US61/978,803 2014-04-11
US14/291,712 2014-05-30
US14/291,712 US9746678B2 (en) 2014-04-11 2014-05-30 Light wave separation lattices and methods of forming light wave separation lattices

Publications (1)

Publication Number Publication Date
TW201939074A true TW201939074A (zh) 2019-10-01

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
TW108115185A TW201939074A (zh) 2014-04-11 2015-03-25 光波分離結構與形成光波分離結構的方法
TW104109544A TWI667501B (zh) 2014-04-11 2015-03-25 光波分離結構與形成光波分離結構的方法

Family Applications After (1)

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TW104109544A TWI667501B (zh) 2014-04-11 2015-03-25 光波分離結構與形成光波分離結構的方法

Country Status (7)

Country Link
US (2) US9746678B2 (enExample)
EP (1) EP3129823A4 (enExample)
JP (1) JP2017516914A (enExample)
CN (1) CN106170730A (enExample)
SG (2) SG11201607119UA (enExample)
TW (2) TW201939074A (enExample)
WO (1) WO2015156991A1 (enExample)

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Also Published As

Publication number Publication date
US20180011331A1 (en) 2018-01-11
SG10201809273VA (en) 2018-11-29
US9746678B2 (en) 2017-08-29
CN106170730A (zh) 2016-11-30
SG11201607119UA (en) 2016-10-28
US20150293363A1 (en) 2015-10-15
EP3129823A1 (en) 2017-02-15
WO2015156991A1 (en) 2015-10-15
EP3129823A4 (en) 2017-11-22
TW201602650A (zh) 2016-01-16
TWI667501B (zh) 2019-08-01
JP2017516914A (ja) 2017-06-22

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