TW201938302A - Abrasive wire and method and system for forming abrasive wire - Google Patents

Abrasive wire and method and system for forming abrasive wire Download PDF

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TW201938302A
TW201938302A TW107108733A TW107108733A TW201938302A TW 201938302 A TW201938302 A TW 201938302A TW 107108733 A TW107108733 A TW 107108733A TW 107108733 A TW107108733 A TW 107108733A TW 201938302 A TW201938302 A TW 201938302A
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abrasive particles
substrate
line
wire
abrasive
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TW107108733A
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TWI655044B (en
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何昭慶
郭佳儱
莊賀喬
張元震
許進成
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國立臺北科技大學
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Abstract

The present invention provides a method and system for forming an abrasive wire, in which an electrically induced magnetic field is generated on a wire material transported toward a moving direction so as to form a plurality of induced magnetic area spaced apart by a specific distance whereby each induced magnetic area attracts abrasives after passing through an abrasives supplying area, and the wire material having abrasives attracted thereon passes through a film-coating area so that a coating film is formed on the wire material to enhance attachment effect between the abrasives and wire material. According to the method and system in the present invention, the abrasives can be regularly formed or with a specific pattern on the wire material through a position arrangement of the electrically induced magnets as well as a controllable electrically induced magnetic field generated therefrom.

Description

具有研磨顆粒之割線的製造方法與系統以及使用該方法所製造的割線Manufacturing method and system of secant line with abrasive particles and secant line manufactured by using this method

本發明為一種研磨割線的技術,特別是指一種透過感應磁場控制研磨粒形成的位置與圖案的一種具有研磨顆粒之割線的製造方法與系統,以及使用該方法所製造的割線。The present invention relates to a technique for grinding secant lines, in particular to a method and system for manufacturing a secant line with abrasive particles that controls the position and pattern of abrasive particles formed through an induced magnetic field, and a secant line manufactured using the method.

利用割線(或稱線鋸)的切割方式來對半導體、水晶、各種單結晶、磁性材料、精密陶瓷、及其他硬脆材料進行切割已經在各工業上行之有年。具有研磨粒(例如鑽石)的割線,近年更是在半導體晶圓的切割產業中佔有重要的一席之地。The use of secant (or wire saw) cutting methods to cut semiconductors, crystals, various single crystals, magnetic materials, precision ceramics, and other hard and brittle materials has been in various industries for many years. Slicing lines with abrasive particles (such as diamonds) have in recent years occupied an important place in the semiconductor wafer cutting industry.

習用技術中,的割線制法有很多種方式,例如中華民國專利公告第I461249 教導一種線鋸及其製作方法。本發明之線鋸製作方法包括:提供一裸線;塗佈一中間層於該裸線上,且嵌置複數個磨料於該中間層中;以及鍍覆一金屬保護層,以覆蓋該些磨料。據此,本發明可解決習知電鍍液內磨料於電鍍沉積時的聚集問題,以提高切割品質及精度。中間層之材料係選自由黏性材料、溶劑及溶液所組群組中之其中一者或其組合。In conventional technology, there are many ways to make a secant. For example, the Republic of China Patent Publication No. I461249 teaches a wire saw and a method for manufacturing the same. The method for manufacturing a wire saw of the present invention includes: providing a bare wire; coating an intermediate layer on the bare wire, and embedding a plurality of abrasives in the intermediate layer; and plating a metal protective layer to cover the abrasives. According to this, the present invention can solve the problem of agglomeration of abrasives in the conventional plating solution during plating deposition, so as to improve the cutting quality and accuracy. The material of the intermediate layer is one or a combination selected from the group consisting of a viscous material, a solvent, and a solution.

中華民國專利公告第I510314教導一種線鋸及其製作方法包含下列步驟:一、提供一磨料組份,該磨料組份包括多個複合磨料顆粒,每一複合磨料顆粒具有一磨料主體,及一包覆結合在該磨料主體外表面的金屬披覆層,該等複合磨料顆粒的磨料主體的粒徑為10μm~200μm,包覆結合在每一複合磨料顆粒的磨料主體外表面的金屬披覆層的厚度為0.1μm~19μm,且每一複合磨料顆粒的金屬披覆層的平均重量為單一複合磨料顆粒平均重量的10%~60%;二、提供一金屬線材;三、使該磨料組份的複合磨料顆粒均勻分布於一電鍍液中配製為一上砂電鍍液,再以急速加壓噴鍍方式配合施加電流使該上砂電鍍液在該線基材表面形成一結合該等複合磨料顆粒的上砂金屬鍍層,使該等複合磨料顆粒初步固定於線材表面;及四、對已初步固定有複合磨料顆粒的線材進行一電鍍處理,以在該上砂金屬鍍層上再形成一加厚金屬鍍層而使該等複合磨料顆粒平均粒徑的1/3至2/3的部分被埋在金屬鍍層中,就能製得一高耐磨線鋸產品,其中,金屬鍍層的膜厚實質上均等,且金屬鍍層的平均膜厚為該等複合磨料顆粒平均粒徑的1/3至2/3。The Republic of China Patent Bulletin No. I510314 teaches a wire saw and its manufacturing method including the following steps: 1. Provide an abrasive component, the abrasive component includes a plurality of composite abrasive particles, each composite abrasive particle has an abrasive body, and a package A metal coating layer bonded to the outer surface of the abrasive body, the particle size of the abrasive body of the composite abrasive particles is 10 μm to 200 μm, and a metal coating layer bonded to the outer surface of the abrasive body of each composite abrasive particle; The thickness is 0.1 μm to 19 μm, and the average weight of the metal coating layer of each composite abrasive particle is 10% to 60% of the average weight of a single composite abrasive particle; 2. Provide a metal wire; 3. Make the abrasive component The composite abrasive particles are uniformly distributed in a plating solution to be prepared as a sanding plating solution, and then a rapid pressure spraying method is applied in combination with an applied current to cause the sanding plating solution to form a combination of the composite abrasive particles on the surface of the wire substrate. Sand metal plating to make the composite abrasive particles initially fixed on the surface of the wire; and 4. electroplating the wire that has been initially fixed with the composite abrasive particles to A thicker metal plating layer is formed on the sanded metal plating layer, so that a part of the average particle diameter of the composite abrasive particles of 1/3 to 2/3 is buried in the metal plating layer, and a highly wear-resistant wire saw can be obtained. In the product, the film thickness of the metal plating layer is substantially equal, and the average film thickness of the metal plating layer is 1/3 to 2/3 of the average particle diameter of the composite abrasive particles.

傳統製程利用塗布具有圖樣化絶緣膠膜來控制磨粒分佈的方法,但這對上砂效率及鍍液中磨粒鎳膜壽命的改善,並無直接的助益。而鎳膜中加入特殊的成分以提高其鍍液中使用壽命的作法,必然増加原料的成本,且 對上砂效率也同樣無助益。In the traditional process, the method of coating the patterned insulating adhesive film is used to control the wear distribution, but this does not directly improve the sanding effect and the improvement of the life of the nickel film in the plating solution. The addition of special ingredients to the nickel film to increase its service life in the plating solution will inevitably increase the cost of the original coating, and it will not help the sanding effect.

綜合上述,因此需要一種具有研磨顆粒之割線的製造方法與系統,以及使用該方法所製造的割線,來解決習用技術之不足。To sum up, there is a need for a manufacturing method and system for a secant line with abrasive particles, and a secant line manufactured using the method to solve the shortcomings of conventional technology.

本發明提供一種具有研磨顆粒之割線的製造方法與系統,以及使用該方法所製造的割線,其係可控制磨粒排列以同時解決磨粒分佈無法均 匀控制、上砂效率差、鍍液中磨粒鎳膜壽命短等諸多問題。The invention provides a manufacturing method and system for a secant line with abrasive particles, and a secant line manufactured by using the method, which can control the grinding and discharging to simultaneously solve the problem that the grinding distribution cannot be uniformly controlled, the sanding effect is poor, and the plating solution is ground There are many problems such as short life of nickel film.

本發明提供一種控制磨粒分佈的方法,藉由“脈衝式電磁鐡"瞬間産生的磁通量變化而有感應磁場,當施加外磁 場於物質時,物質的內部會被磁化,會出現很多微小的磁偶極子(磁矩),磁化強度描述物質被磁化的程度。運用脈 衝式(數微秒~)電源驅動鐵芯上的線圏,籍由瞬間産生的感應磁場(磁力線),沿著鐵芯結構的方向被引導流向 端面(具有尖鋭外徑)將磁力線聚焦於鐵芯尖端(十數微米~),可限縮琴鋼線被磁化的區域大小,達到切割線具 備有可控式鑽石磨粒排列技術,本方法亦可製作多層磨粒鍍層的3D構造的鑽石切割線,使其磨削力及使用壽命更 進一歩提高。The present invention provides a method for controlling the distribution of friction. There is an induced magnetic field caused by the instantaneous change in magnetic flux generated by a "pulse-type electromagnetic pump." Dipole (magnetic moment), magnetization intensity, describes the process by which a substance is magnetized. A pulse-type (數 microsecond ~) power source is used to drive the coils on the core, and the magnetic field is guided along the direction of the core structure by the instantaneous induced magnetic field (magnetic coils) to focus the magnetic coils on the end surface (with a sharp outer diameter). The tip of the iron core (ten micrometers ~) can limit the size of the magnetized area of the shrinking steel wire. The castration line has a controllable diamond grinding and discharging technology. This method can also produce a multilayer 3D structured diamond with a grinding coating. Cut lines to improve grinding and service life.

在一實施例中,本發明提供一種具有研磨顆粒之割線的製造方法,其係包括有下列步驟:首先,提供一線基材,並使該線基材沿一方向輸送。接著,使該線基材通過一感磁區,該感磁區具有至少一對電磁鐵,分別對應設置於該線基材的兩側,當該線基材通過該感磁區時,該對電磁鐵對該線基材施加一脈衝式感應磁場,使該線基材上具有複數個相距特定距離的感應磁區。然後再使具有該複數個感應磁區的線基材通過一研磨粒區,進而使每一個感應磁區上吸附至少一研磨粒。最後,使具有該研磨粒之線基材通過一鍍膜區,以在該線基材上形成一層鍍膜層。In one embodiment, the present invention provides a method for manufacturing a secant line with abrasive particles, which includes the following steps: First, a line substrate is provided and the line substrate is conveyed in a direction. Next, the wire substrate is passed through a magnetically sensitive area, and the magnetically sensitive area has at least a pair of electromagnets respectively disposed on both sides of the wire substrate. When the wire substrate passes the magnetically sensitive area, the pair The electromagnet applies a pulse-type induction magnetic field to the wire substrate, so that the wire substrate has a plurality of induction magnetic regions at a specific distance from each other. Then, the wire substrate having the plurality of inductive magnetic regions is passed through an abrasive particle region, so that at least one abrasive particle is adsorbed on each of the inductive magnetic regions. Finally, the wire substrate having the abrasive particles is passed through a coating area to form a coating layer on the wire substrate.

在一實施例中,本發明提供一種具有研磨顆粒之割線的製造系統,其係包括有一輸送裝置、至少一對電磁鐵、一上砂模組以及一鍍膜裝置。該輸送裝置,用以將一線基材沿一方向輸送。該至少一對電磁鐵,設置於該輸送裝置之一側,該對電磁鐵分別對應設置於該線基材的兩側,當該線基材通過該至少一對電磁鐵時,該至少一對電磁鐵該線基材施加一脈衝式感應磁場,使該線基材上具有複數個相距特定距離的感應磁區。該上砂模組,設置於該至少一對電磁鐵之一側,該上砂模組於該線基材通過時,使每一個感應磁區上吸附至少一研磨粒。該鍍膜裝置,設置於該上砂模組之一側,該鍍膜裝置用以於該線基材上形成一層鍍膜層。In one embodiment, the present invention provides a secant manufacturing system with abrasive particles, which includes a conveying device, at least a pair of electromagnets, a sanding module, and a coating device. The conveying device is used for conveying a line of substrates in one direction. The at least one pair of electromagnets are disposed on one side of the conveying device, and the pair of electromagnets are respectively disposed on two sides of the wire substrate. When the wire substrate passes the at least one pair of electromagnets, the at least one pair The electromagnet applies a pulse-type induction magnetic field to the wire substrate, so that the wire substrate has a plurality of induction magnetic regions at a specific distance from each other. The sand-up module is disposed on one side of the at least one pair of electromagnets, and the sand-up module makes at least one abrasive particle be adsorbed on each induction magnetic zone when the wire substrate passes through. The coating device is disposed on one side of the sand-up module, and the coating device is used to form a coating layer on the wire substrate.

在一實施例中,本發明提供一種具有研磨顆粒之割線,其係包括有一線基材、一研磨粒層以及一鍍膜層。該線基材,其係沿其軸向上,以一第一間距有秩序地具有複數個第一充磁區以及分別與該複數個第一充磁區相對應且相距一第一徑度之複數個第二充磁區,該第一充磁區與該第二充磁區磁極性相反。該研磨粒層,其係形成於該複數個第一與第二充磁區上。該鍍膜層,其係形成於該線基材之表面上,用以増加磨粒與該線基材的附著力。In one embodiment, the present invention provides a secant line with abrasive particles, which includes a line substrate, an abrasive particle layer, and a coating layer. The wire substrate has a plurality of first magnetizing regions in an orderly manner at a first interval along the axial direction, and a plurality of first magnetizing regions corresponding to the plurality of first magnetizing regions and spaced apart from each other by a first radius. A second magnetizing region, the first magnetizing region is opposite in magnetic polarity to the second magnetizing region. The abrasive particle layer is formed on the plurality of first and second magnetizing regions. The coating layer is formed on the surface of the wire substrate, and is used to grind the adhesion with the wire substrate.

在下文將參考隨附圖式,可更充分地描述各種例示性實施例,在隨附圖式中展示一些例示性實施例。然而,本發明概念可能以許多不同形式來體現,且不應解釋為限於本文中所闡述之例示性實施例。確切而言,提供此等例示性實施例使得本發明將為詳盡且完整,且將向熟習此項技術者充分傳達本發明概念的範疇。類似數字始終指示類似元件。以下將以多種實施例配合圖式來說明所述具有研磨顆粒之割線的製造方法與系統,以及使用該方法所製造的割線,然而,下述實施例並非用以限制本發明。Various exemplary embodiments may be described more fully hereinafter with reference to the accompanying drawings, in which some exemplary embodiments are shown. However, the inventive concept may be embodied in many different forms and should not be construed as limited to the exemplary embodiments set forth herein. Rather, these exemplary embodiments are provided so that this invention will be thorough and complete, and will fully convey the scope of the inventive concept to those skilled in the art. Similar numbers always indicate similar components. The method and system for manufacturing the secant line with abrasive particles and the secant line manufactured using the method will be described with various embodiments and drawings in the following. However, the following embodiments are not intended to limit the present invention.

請參閱圖1所示,其為本發明之具有研磨顆粒之割線的製造方法流程之一實施例示意圖。該方法係包括有下列步驟:首先進行步驟20,提供一線基材,並使該線基材沿一方向輸送。該線基材可以為琴鋼線、絞合線或不銹鋼線,或者是有鍍膜之線材,例如:鍍黃銅不銹鋼線、鍍黃銅琴鋼線、鍍鎳不銹鋼線,及鍍鎳琴鋼線等,其係可以根據需求而選擇適當線種作為步驟20所使用的線基材。在一實施例中,該線基材的線徑約在150μm~250μm之間,但並不以此範圍為限制,使用者可以根據本發明之精神選擇需要的線徑。Please refer to FIG. 1, which is a schematic diagram of an embodiment of a manufacturing method flow of a secant line with abrasive particles according to the present invention. The method includes the following steps: First, step 20 is performed to provide a line substrate and convey the line substrate in a direction. The wire substrate can be piano steel wire, stranded wire or stainless steel wire, or coated wire, such as: brass-plated stainless steel wire, brass-plated piano steel wire, nickel-plated stainless steel wire, and nickel-plated piano steel wire For example, it is possible to select an appropriate thread type as the thread base material used in step 20 according to requirements. In an embodiment, the wire diameter of the wire substrate is between 150 μm and 250 μm, but the range is not limited. The user can select the required wire diameter according to the spirit of the present invention.

接著進行步驟21,使該線基材通過一感磁區,該感磁區具有至少一電磁鐵,分別對應設置於該線基材的兩側,當該線基材通過該感磁區時,該至少一電磁鐵對該線基材施加一脈衝式感應磁場,使該線基材上具有複數個相距特定距離的感應磁區。在一實施例中,可以透過電磁鐵靠近線基材的端部結構設計來控制線基材上相對應的感磁區的大小。如圖2A所示,該圖為電磁鐵與線基材感應截面示意圖。在本實施例中,以一對電磁鐵31來作說明,每一電磁鐵311與312之端部結構310可以具有尖端部結構,因此當電源驅動電磁鐵311與312産生感應磁場時,磁力線被引導流向尖端的端部結構310,使得電磁鐵311與312可以將磁力線聚焦於端部結構310,進而形成如圖2B所示之具NS極性的小感應磁區MA。Next, step 21 is performed to pass the wire substrate through a magnetic sensing region, the magnetic sensing region having at least one electromagnet, which is respectively disposed on both sides of the wire substrate, and when the wire substrate passes through the magnetic sensing region, The at least one electromagnet applies a pulse-type induction magnetic field to the wire substrate, so that the wire substrate has a plurality of inductive magnetic regions spaced apart from a specific distance. In one embodiment, the size of the corresponding magnetically sensitive region on the wire substrate can be controlled through the end structure design of the electromagnet close to the wire substrate. As shown in FIG. 2A, this figure is a schematic diagram of an induction cross section of an electromagnet and a wire substrate. In this embodiment, a pair of electromagnets 31 are used for description. The end structure 310 of each electromagnet 311 and 312 may have a tip structure. Therefore, when a power source drives the electromagnets 311 and 312 to generate an induced magnetic field, the magnetic field lines are Guide the end structure 310 toward the tip, so that the electromagnets 311 and 312 can focus the magnetic field line on the end structure 310, thereby forming a small induction magnetic area MA with NS polarity as shown in FIG. 2B.

在圖2B中,成對的端部結構310設置在線基材截面方向中心的兩側,使得端部結構所產生的感應磁場穿過線基材90截面方向的中心,進而產生感應磁區MA,其大小及強度將會受到電磁鐵上之螺線圏電流I、螺線圏匝數N、端部結構310的尖端部直徑及錐度θ的影響。在一實施例中,端部結構310的直徑約在十數微米,因此可限縮線基材90被磁化的區域大小。如圖2C所示,成對的電磁鐵在線基材90中心軸的相對應兩側可以設置多對電磁鐵,圖中為三對電磁鐵31, 31a與31b,使得該三對電磁鐵31, 31a與31b可以沿該線基材90中心呈現徑向排列。要說明的是,前述之實施例,雖然以成對的電磁鐵來實施,但並不以成對配置為限制,單一電磁鐵或者是多個單一電磁鐵不成對的配置,或部份成對配置、部分不成對配置的組合也可以實施。In FIG. 2B, the paired end structures 310 are disposed on both sides of the center of the cross-section direction of the line substrate so that the induced magnetic field generated by the end structure passes through the center of the cross-section direction of the line substrate 90, thereby generating the induction magnetic area MA, Its size and strength will be affected by the 螺 line 圏 electric line I, the 螺 line 圏 turn 數 N, the tip diameter of the end structure 310, and the cone 及 θ on the electromagnet. In one embodiment, the diameter of the end structure 310 is about ten micrometers, so the size of the magnetized area of the shrinkage substrate 90 can be limited. As shown in FIG. 2C, a pair of electromagnets may be provided with two pairs of electromagnets on two sides corresponding to the central axis of the line substrate 90. The figure shows three pairs of electromagnets 31, 31a, and 31b, so that the three pairs of electromagnets 31, 31a and 31b may be arranged radially along the center of the line substrate 90. It should be noted that although the foregoing embodiments are implemented with paired electromagnets, they are not limited to a paired configuration. A single electromagnet or a plurality of single electromagnets are not paired or partially paired. Combinations of configurations and partially unpaired configurations can also be implemented.

此外,如圖2D所示,本實施例中,基本上與圖2B類似,差異的是,電磁鐵311與312的端部結構310與310’獨立的所產生各自的感應磁場,端部結構310與310’產生的感應磁場,並未穿過線基材90的中心,而形成感應磁區MA與MA’。要說明的是,雖然在本實施例中,感應磁區MA與MA’相互對應,但在另一實施例中,感應磁區MA與MA’亦可以不相互對應,其係根據使用者之需求而定。In addition, as shown in FIG. 2D, in this embodiment, it is basically similar to FIG. 2B, except that the end structures 310 and 310 ′ of the electromagnets 311 and 312 independently generate respective induced magnetic fields, and the end structure 310 The induced magnetic field generated with 310 ′ does not pass through the center of the wire substrate 90, and forms the induced magnetic regions MA and MA ′. It should be noted that although in this embodiment, the induction magnetic areas MA and MA 'correspond to each other, in another embodiment, the induction magnetic areas MA and MA' may not correspond to each other, which is based on the needs of users It depends.

如圖3A與圖3B所示,該圖分別為本發明之線基材上所形成的感應磁區不同實施例示意圖。在圖3A中,圖3A(a)表示磁感應之後的線基材的側視示意圖,而圖3A (b)則表示線基材之徑向剖面示意圖。從圖3A所示的實施例可以看出線基材90上的同一截面上具有複數個成對(NS)的感應磁區MA~MA3,其係在徑向上具有一定的角度間隔,本實施例中,每一截面位置上的感應磁區MA~MA3數量相同。此外,每一感應磁區MA~MA3與相鄰的感應磁區MA~MA3之間具有第一距離d0與第二距離d1,其中第一距離d0可以透過電磁鐵的數量與排列位置來控制,電磁鐵的數量越多,距離d0會越小,而第二距離d1則可以透過線基材90的移動速度或者是控制電磁鐵作動的脈衝式電流的on-off時間,以及工作週期(duty-cycle)而定。As shown in FIG. 3A and FIG. 3B, the figures are schematic diagrams of different embodiments of the induction magnetic regions formed on the wire substrate of the present invention, respectively. In FIG. 3A, FIG. 3A (a) shows a schematic side view of a wire substrate after magnetic induction, and FIG. 3A (b) shows a schematic radial sectional view of the wire substrate. It can be seen from the embodiment shown in FIG. 3A that there are a plurality of pairs (NS) of induction magnetic regions MA ~ MA3 on the same cross section on the wire substrate 90, which have a certain angular interval in the radial direction. In each section, the number of the induction magnetic regions MA ~ MA3 is the same. In addition, there is a first distance d0 and a second distance d1 between each inductive magnetic area MA ~ MA3 and an adjacent inductive magnetic area MA ~ MA3. The first distance d0 can be controlled by the number and arrangement of the electromagnets. The greater the number of electromagnets, the smaller the distance d0, and the second distance d1 can pass through the moving speed of the wire substrate 90 or the on-off time of the pulsed current that controls the electromagnet operation, and the duty cycle (duty- cycle).

在圖3B(a)與圖3B(b)則為在線基材90在每一截面位置上具有單一感應磁區MA與MA2且相鄰截面之感應磁場方向不同的示意圖。圖3B(a)為經過感磁之後的線基材局部側視示意圖。例如在位置P0的區域感應磁區數量為一個,在位置P1上的感應磁區數量為1個,但其感應磁場方向不同。同樣地,每一感應磁區MA與相鄰的感應磁區MA2之間具有第一距離d0與第二距離d1,其中第一距離d0可以透過成對電磁鐵的數量與排列的位置來控制,而第二距離d1則可以透過線基材的移動速度或者是控制電磁鐵作動的脈衝式電流的on-off時間,以及工作週期(duty-cycle)而定。要說明的是,根據圖3A與圖3B之精神,使用者也可以透過電磁鐵不同位置的配置,再線基材上不同位置的徑向截面上,形成不同數量的感應磁區。3B (a) and 3B (b) are schematic diagrams of the line substrate 90 having a single induction magnetic region MA and MA2 at each cross-section position and different directions of the induction magnetic fields of adjacent cross-sections. FIG. 3B (a) is a schematic partial side view of the wire substrate after undergoing magnetic induction. For example, the number of inductive magnetic regions is one at the position P0 and the number of inductive magnetic regions at position P1 is one, but the directions of the induced magnetic fields are different. Similarly, there is a first distance d0 and a second distance d1 between each inductive magnetic area MA and an adjacent inductive magnetic area MA2. The first distance d0 can be controlled by the number and arrangement of the pair of electromagnets. The second distance d1 can be determined by the moving speed of the wire substrate or the on-off time of the pulsed current that controls the electromagnet operation, and the duty-cycle. It should be noted that according to the spirit of FIG. 3A and FIG. 3B, the user can also form different numbers of induction magnetic regions on the radial section of the wire base at different positions through the configuration of the electromagnet at different positions.

此外,如圖3C與3D所示,該圖為本發明之感應磁區排列之其中一實施例示意圖。在本實施例中,基本上係為圖2D所示之實施例的延伸,也就是在線基材90的徑向截面上形成複數個具有成對磁場極性(N與S),且其磁場極性沿著線基材90徑向配置的感應磁區。在圖3C的實施例中,可以看出線基材90的一截面上具有感應磁區(MA, MA’) ,而感應磁區(MA1, MA1’),則和感應磁區(MA, MA’)不在同一徑向截面上。本實施例中,感應磁區(MA, MA’)和感應磁區(MA1, MA1’)在線基材90的軸向上相距第二距離d1。要說明的是,雖然本實施例中,感應磁區(MA, MA’)和感應磁區(MA1, MA1’)為成對配置,在另一實施例中,也可以不以成對方式排列,亦即感應磁區MA 和MA’在軸向上具有一定之距離。又如圖3D所示,在本實施例中,線基材90的同一截面上具有複數對的感應磁區(MA, MA’)、(MA1, MA1’)、(MA2, MA2’)以及(MA3, MA3’)。In addition, as shown in FIGS. 3C and 3D, the figure is a schematic diagram of an embodiment of the arrangement of the induction magnetic regions of the present invention. In this embodiment, it is basically an extension of the embodiment shown in FIG. 2D, that is, a plurality of paired magnetic field polarities (N and S) are formed on a radial cross section of the wire substrate 90, and the magnetic field polarities are along the The induction magnetic region of the threaded substrate 90 is arranged radially. In the embodiment of FIG. 3C, it can be seen that a cross section of the wire substrate 90 has an induction magnetic region (MA, MA '), and the induction magnetic region (MA1, MA1') is in combination with the induction magnetic region (MA, MA). ') Not on the same radial section. In this embodiment, the inductive magnetic region (MA, MA ') and the inductive magnetic region (MA1, MA1') are separated from the second direction by a second distance d1 in the axial direction of the line substrate 90. It should be noted that although in this embodiment, the inductive magnetic area (MA, MA ') and the inductive magnetic area (MA1, MA1') are arranged in pairs, in another embodiment, they may not be arranged in pairs. , That is, the induction magnetic regions MA and MA 'have a certain distance in the axial direction. As shown in FIG. 3D, in the present embodiment, the wire substrate 90 has a plurality of pairs of induction magnetic regions (MA, MA '), (MA1, MA1'), (MA2, MA2 '), and ( MA3, MA3 ').

另外,如圖3E與3F所示,該圖分別為本發明之感應磁區排列之其中一實施例示意圖。在本實施例中,基本上係為圖2D的延伸,但差異在於圖3E和圖3F的磁場極性方向的不同。在圖3E的實施例中,每一個感應磁區(MAa, MAa’)、(MA1a, MA1a)、(MA2a MA2a’)以及(MA3a, MA3a’)的磁場方向為沿著線基材90的圓周方向排列。而 在圖3F中,每一個感應磁區(MAb, MAb’)、(MA1b, MA1b)、(MA2b MA2b’)以及(MA3b, MA3b’)的磁場方向為沿著線基材90的軸向方向排列。In addition, as shown in FIGS. 3E and 3F, the figures are schematic diagrams of one embodiment of the arrangement of the induction magnetic regions of the present invention, respectively. In this embodiment, it is basically an extension of FIG. 2D, but the difference lies in the different directions of the magnetic field polarities in FIGS. 3E and 3F. In the embodiment of FIG. 3E, the magnetic field directions of each of the induction magnetic regions (MAa, MAa '), (MA1a, MA1a), (MA2a MA2a'), and (MA3a, MA3a ') are along the circumference of the line substrate 90. Orientation. In FIG. 3F, the magnetic field directions of each of the induction magnetic regions (MAb, MAb '), (MA1b, MA1b), (MA2b MA2b'), and (MA3b, MA3b ') are along the axial direction of the line substrate 90. arrangement.

再回到圖1所示,接下來進行步驟22使具有該複數個感應磁區的線基材通過一研磨粒區,進而使每一個感應磁區上吸附至少一研磨粒。由於線基材上具有複數個感應磁區,因此在上研磨粒時,因為研磨粒內還有導磁的材質,因此在線基材通過研磨粒區時,研磨粒會被吸附在線基材的感應磁區上。在本步驟中,研磨粒可以用噴灑或自由落下的方式,附著在線基材上。研磨粒,在一實施例中,其係具有20~40μm的粒徑,本實施例的粒徑約在30μm左右。研磨粒的粒徑並不以前述的實施例為限制,使用者可以根據需求選擇適當的研磨粒徑。該研磨粒的材料可以為含有鑽石、立方氮化硼、碳化矽或碳化鎢成分的材料。Returning to FIG. 1 again, step 22 is followed by passing the wire substrate having the plurality of inductive magnetic regions through an abrasive particle region, so that at least one abrasive particle is adsorbed on each of the inductive magnetic regions. Because the wire substrate has a plurality of induction magnetic regions, when the abrasive particles are loaded, because the abrasive particles still have a magnetically permeable material, the abrasive particles will be absorbed by the induction of the wire substrate when the wire substrate passes through the abrasive particle area. Magnetic domain. In this step, the abrasive particles can be attached to the wire substrate by spraying or freely falling. In one embodiment, the abrasive particles have a particle diameter of 20 to 40 μm, and the particle diameter of this embodiment is about 30 μm. The particle size of the abrasive particles is not limited by the foregoing embodiment, and a user may select an appropriate abrasive particle size according to requirements. The material of the abrasive particles may be a material containing diamond, cubic boron nitride, silicon carbide, or tungsten carbide.

由於本發明的電磁鐵是利用脈衝式的產生電流使得電磁鐵產生週期性有感應磁場以及無感應磁場交替的狀態,因此隨著線基材以特定速度移動的條件下,可以規律的在線基材上面形成排列整齊的感應磁區。在一實施例中,如圖4A至圖4B所示,其中圖4A為習用之研磨粒排列示意圖,圖4B為本發明之有規則以吸附複數個研磨粒示意圖。習用技術中,如圖4A所示,其所使用的隨機附著研磨粒320a的無序排列方式,研磨粒320a不僅分佈不均一,同一個位置的研磨粒320a數量也不同。由於研削切割時,研磨粒的脱落是影響切割線壽命的原因之一,藉由本發明的方式,可以透過控制感應磁區的大小,如在圖4B中,因為感應磁區大,因此可以吸附多個研磨粒320b的感應磁區,本實施例為2X2的區域大小,可以吸附4顆研磨粒320b。要說明的是,由於研磨粒320b的尺寸為已知,本實施例約為粒徑30μm的研磨粒320b,又感應磁區的尺寸大小和電磁鐵上之螺線圏電流I、螺線圏匝數N、尖端部結構的直徑及尖端部結構的錐度θ有關,因此可以透過控制磁感應區的大小,來吸附特定數量的研磨粒。比較圖4A與圖4B,由於圖4A中研磨粒320a隨機分佈,因此多處區域都是單顆研磨粒320a的狀態,與雙顆研磨粒320b研削受力的構造,相較於前者支撐力薄弱,後者可以提供多顆研磨粒320b併聯排列,因此支撐力強固不容易脱落,預 期可大幅提高使用壽命。Since the electromagnet of the present invention uses pulsed current generation to cause the electromagnet to generate periodic states of induction magnetic field and non-induced magnetic field alternately, as the wire substrate moves at a specific speed, the wire substrate can be regularly on-line. A neatly arranged induction magnetic area is formed on the top. In an embodiment, as shown in FIG. 4A to FIG. 4B, FIG. 4A is a schematic diagram of a conventional abrasive particle arrangement, and FIG. 4B is a schematic diagram of a regular method for adsorbing a plurality of abrasive particles in the present invention. In conventional technology, as shown in FIG. 4A, the random arrangement method of randomly attached abrasive particles 320a is used. The abrasive particles 320a are only distributed uniformly, and the abrasive particles 320a at the same location are also different. Since the abrasive particles fall off during grinding and castration, it is one of the factors that affect the life of the castration line. With the method of the present invention, the size of the induction magnetic field can be controlled by, for example, as shown in FIG. The induction magnetic area of each abrasive particle 320b is 2 × 2 in size in this embodiment, and can absorb four abrasive particles 320b. It should be noted that since the size of the abrasive particles 320b is known, this embodiment has an abrasive particle 320b with a particle size of about 30 μm, and the size of the induction magnetic region and the 螺 line 螺 electricity 圏, 螺 line 圏 turn on the electromagnet數 N, the diameter of the tip structure and the cone 度 θ of the tip structure, so it is possible to adsorb a specific number of abrasive particles by controlling the size of the magnetic induction zone. Comparing FIG. 4A and FIG. 4B, since the abrasive particles 320a in FIG. 4A are randomly distributed, multiple regions are in the state of a single abrasive particle 320a, and the structure of the grinding force with the two abrasive particles 320b is weaker than the former. The latter can provide multiple abrasive particles 320b arranged in parallel, so the support force is strong and the capacity is allowed to fall off, which is expected to greatly increase the service life.

再回到圖1所示,步驟22之後,再以步驟23對具有研磨粒的線基材進行鍍膜處理,以強化研磨粒附著於線基材上的固著效果。在一實施例中,可以直接鍍上一層所需厚度的鍍膜層,或者是如圖5A所示,先預在線基材90上鍍膜一初始鍍膜層340之後,再繼續鍍上所需要的鍍層厚度,以形成如圖5B所示的鍍膜層341。在一實施例中,該鍍膜層的材質為鎳,但不以此為限制。步驟23之後,即完成具有研磨粒320的割線4,其係可以用來切割矽晶體,例如:晶圓、石英晶體、各種石材、寶石、玻璃、陶瓷、稀土磁性材料與硬質合金等。雖然圖5A與5B係利用如圖2B的磁力線貫穿線基材90中心所形成的感應磁區來說明鍍膜處理的程序,在另一實施例中,如圖5C與圖5D所示,也可以用如圖3D未穿過線基材90中心的感應磁場,所形成感應磁區分佈狀態來進行步驟23鍍膜處理的程序。此外,如圖3E與3F所示的感應磁區分佈態樣的線基材也可以根據步驟23來進行鍍膜處理的程序。As shown in FIG. 1 again, after step 22, the wire substrate with abrasive particles is coated in step 23 to enhance the fixing effect of the abrasive particles on the wire substrate. In an embodiment, a coating layer of a desired thickness may be directly plated, or as shown in FIG. 5A, an initial coating layer 340 is first pre-coated on the substrate 90, and then the required coating thickness is further plated. To form a coating layer 341 as shown in FIG. 5B. In one embodiment, the material of the coating layer is nickel, but not limited thereto. After step 23, the secant line 4 with the abrasive particles 320 is completed, which can be used to cut silicon crystals, such as wafers, quartz crystals, various stone materials, gems, glass, ceramics, rare earth magnetic materials, and hard alloys. Although FIGS. 5A and 5B use the induction magnetic region formed by the center of the magnetic line of force through the substrate 90 as shown in FIG. 2B to describe the coating process, in another embodiment, as shown in FIGS. 5C and 5D, it can also be used. As shown in FIG. 3D, the induction magnetic field that does not pass through the center of the wire substrate 90, and the induced magnetic field distribution state is formed to perform the coating process of step 23. In addition, the wire substrate of the induction magnetic zone distribution state shown in FIGS. 3E and 3F may also be subjected to a coating process according to step 23.

請參閱圖6A所示,該圖為本發明之具有研磨顆粒之割線的製造方法流程之另一實施例示意圖。在本實施例中,基本上與圖1的流程相似,差異的是在步驟22與步驟23之間,更包括有以步驟22a控制該線基材表面之研磨粒的厚度的步驟。當在步驟21中線基材被磁化後,將研磨粒撒在線上面,此時磨粒將被吸附在磁化區的 NS 兩端,完成上砂,亦即撒研磨粒的步驟。如果磁化控制得宜,撒上研磨粒後應該只有一層研磨粒被吸附,但是如果上砂後有多層研磨粒被吸附,如圖7A所示,則需要進行整平,將多層研磨粒籍整平為一層磨粒。在步驟22a的一實施例中,可以讓在研磨粒區與該鍍膜區之間設置使具有該研磨粒之線基材通過的模具,模具具有膜孔,可以使具有研磨粒的線基材通過模具之後,形成具有均勻厚度的研磨粒層在線基材的表面上。如圖7A~7C所示,在圖7A中,為步驟22後形成具有多層研磨粒320的線基材90。而圖7B則為讓線基材90通過模具33,通過模具33的線基材90表面上只剩下一層研磨粒層320。最後,如圖6A與圖7C所示,再以步驟23對具有研磨粒的線基材90進行鍍膜處理,鍍上一層鍍膜層341,以強化研磨粒320附著於線基材90上的固著效果。在另一實施例中,線基材90內的感應磁區分佈並不以圖7A到圖7C所示的實施例為限制。在另一實施例中,如圖7D至7F,其係以具有如圖3D感應磁區分佈的線基材來進行步驟22a控制該線基材表面之研磨粒的厚度的步驟。要說明的是,除了前述以圖3D的感應磁區分佈的線基材來進行步驟22a之外,其他種感應磁區分佈的線基材,例如圖3E與3F所示,也可以步驟22a來控制該線基材表面之研磨粒的厚度。Please refer to FIG. 6A, which is a schematic diagram of another embodiment of a manufacturing method flow of a secant line with abrasive particles according to the present invention. In this embodiment, it is basically similar to the process of FIG. 1, except that the difference between step 22 and step 23 further includes the step of controlling the thickness of the abrasive particles on the surface of the wire substrate in step 22 a. After the wire substrate is magnetized in step 21, the grinding pad is scattered on the wire. At this time, the grinding pad will be adsorbed on the NS end of the magnetized area to complete the step of sanding, that is, the grinding particles. If the magnetization is properly controlled, there should be only one layer of grindstone absorbed after dusting, but if there are multiple layers of grindstone absorbed after sanding, as shown in Figure 7A, it is necessary to level and level the multi-layered grindstone. A layer of grinding. In an embodiment of step 22a, a mold for passing the wire substrate with the abrasive particles may be provided between the abrasive particle region and the coating region. The mold has a film hole to allow the wire substrate with the abrasive particles to pass through. After the mold, a layer of abrasive particles having a uniform thickness is formed on the surface of the substrate. As shown in FIGS. 7A to 7C, in FIG. 7A, a wire substrate 90 having a multilayer polishing pad 320 is formed after step 22. 7B shows that the wire substrate 90 passes through the mold 33, and only one layer of abrasive particles 320 remains on the surface of the wire substrate 90 passing through the mold 33. Finally, as shown in FIG. 6A and FIG. 7C, the wire base material 90 with abrasive particles is coated in step 23, and a coating layer 341 is plated to strengthen the attachment of the abrasive particles 320 to the wire base material 90. effect. In another embodiment, the distribution of the induction magnetic region in the wire substrate 90 is not limited by the embodiment shown in FIGS. 7A to 7C. In another embodiment, as shown in FIGS. 7D to 7F, it is a step of controlling the thickness of the abrasive particles on the surface of the wire substrate by performing step 22a with a wire substrate having a magnetic field distribution as shown in FIG. 3D. It should be noted that, in addition to performing the step 22a with the line substrate with the induction magnetic field distribution shown in FIG. 3D, other types of line substrate with the induction magnetic field distribution, for example, as shown in FIGS. Control the thickness of the abrasive particles on the surface of the wire substrate.

如圖6B所示,該圖為本發明之具有研磨顆粒之割線的製造方法流程之又一實施例示意圖。本實施例基本上與圖6A相似,差異的是在步驟23之後,更包括有一消磁步驟24。由於具有感應磁區的研磨粒割線,在研削切割時有可能會吸附切屑,例如:矽(Silicon), 藍寶石(Sapphire), 碳化矽(Silicon Carbide)等,這些切屑會造成切割阻礙或對被切割材料,例如:晶圓,的物理性質產生影響,因此透過步驟24消磁,使得割線4在加工切割時,不會吸附切屑。要說明的是,由於步驟21中磁化所需強度,只需要吸附直徑30μm研磨粒在直徑150~250μm線基材上,而步驟22的上砂製程中,也不會有其他的外力使這些研磨粒脱落, 因此完成的研磨粒割線上所具有的磁力極弱,要吸附切屑應該不易發生。但是如果要避免吸附切屑的疑慮,可以利用本實施例,來對步驟23所形成的研磨粒割線進行消磁。在一實施例中,消磁的方式可以在步驟23所形成的研磨粒割線外加一個電磁線圏施與交流訊號使其瞬間消磁。要說明的是,雖然步驟24係以圖6A所示的流程來作進一步實施例的說明,但在另一實施例中,步驟24的流程也可以應用在圖1所示的流程中。As shown in FIG. 6B, this figure is a schematic diagram of another embodiment of a manufacturing method flow of a secant line with abrasive particles according to the present invention. This embodiment is basically similar to FIG. 6A. The difference is that after step 23, a degaussing step 24 is further included. Due to the cutting line of the abrasive grain with induction magnetic zone, it is possible to adsorb cuttings during grinding and cutting, such as: Silicon, Sapphire, Silicon Carbide, etc. These cuttings may cause cutting resistance or prevent cutting. The physical properties of materials, such as wafers, have an effect, so demagnetization is performed through step 24, so that the cutting line 4 does not attract chips during processing and cutting. It should be noted that, due to the strong magnetization required for magnetization in step 21, it is only necessary to adsorb abrasive particles with a diameter of 30 μm on a wire substrate with a diameter of 150 to 250 μm, and in the process of sanding in step 22, there will be no other external force to make these abrasives. The particles fall off, so the magnetic force on the finished abrasive grain secant line is extremely weak, and it should not be easy to attract dust. However, if you want to avoid the suspicion of attracting dust, you can use this embodiment to degauss the abrasive grain secant formed in step 23. In one embodiment, the method of demagnetizing can add an electromagnetic line to the abrasive grain secant formed in step 23 to apply a cross signal to demagnetize it instantly. It should be noted that although step 24 is described by using the flow shown in FIG. 6A for further embodiments, in another embodiment, the flow of step 24 may also be applied to the flow shown in FIG. 1.

請參閱圖6C所示,該圖為本發明之具有研磨顆粒之割線的製造方法流程之再一實施例示意圖。在本實施例中,基本上與圖6B所示的流程相似,差異的是,本實施例中,在步驟21之前更包括有一步驟20a使該線基材通過一初始感磁區,以進行一磁化動作。該初始感磁區對該線基材進行一初始磁化的程序。要說明的是,雖然步驟20a係以圖6B所示的流程來作進一步實施例的說明,但在另一實施例中,步驟24的流程也可以應用在圖1或圖6A所示的流程中。Please refer to FIG. 6C, which is a schematic diagram of another embodiment of a manufacturing method flow of a secant line with abrasive particles according to the present invention. In this embodiment, it is basically similar to the process shown in FIG. 6B. The difference is that, in this embodiment, before step 21, a step 20a is further included to pass the wire substrate through an initial magnetic sensing area to perform a Magnetizing action. The initial magnetically sensitive region performs an initial magnetization process on the wire substrate. It should be noted that although step 20a is described by using the flow shown in FIG. 6B for further embodiments, in another embodiment, the flow of step 24 may also be applied to the flow shown in FIG. 1 or 6A. .

請參閱圖8所示,該圖為本發明之具有研磨顆粒之割線的製造系統之一實施例示意圖。在本實施例中,該系統3包括有一輸送裝置30、一對電磁鐵31、一上砂模組32以及一鍍膜裝置34。該輸送裝置30,用以將一線基材90沿一方向輸送。在一實施例中,線基材90係來自於一捆金屬線材9,金屬線材9的材料可以為,例如:琴鋼線、絞合線或不銹鋼線,或者是有鍍膜之線材,例如:鍍黃銅不銹鋼線、鍍黃銅琴鋼線、鍍鎳不銹鋼線,及鍍鎳琴鋼線等。本實施例則為琴鋼線。該捆金屬線材9設置在輸入裝置30上。輸送裝置30可以為旋轉盤、滾輪的組合,輸送線材的技術為本領域技術之人所熟知,在此不作贅述。Please refer to FIG. 8, which is a schematic diagram of an embodiment of a manufacturing system with a cutting line with abrasive particles according to the present invention. In this embodiment, the system 3 includes a conveying device 30, a pair of electromagnets 31, a sand loading module 32, and a coating device 34. The conveying device 30 is used for conveying a line of substrate 90 in a direction. In one embodiment, the wire base material 90 is from a bundle of metal wires 9, and the material of the metal wires 9 can be, for example, piano steel wires, stranded wires, or stainless steel wires, or coated wires, such as: Brass stainless steel wire, brass-plated piano wire, nickel-plated stainless steel wire, and nickel-plated piano steel wire. This embodiment is a piano steel wire. The bundle of metal wires 9 is provided on the input device 30. The conveying device 30 may be a combination of a rotating disk and a roller. The technology of conveying wires is well known to those skilled in the art, and details are not described herein.

在該系統3中的第一段製造程序為感應充磁區,其係由該對電磁鐵31所構成的充磁區。本實施例中,在該對電磁鐵31之前段更具有一初始充磁單元35,先對線基材90進行預先充磁的程序。初始充磁單元35可以使用電磁鐵或永久磁鐵,來對線基材90進行充磁。要說明的是,初始充磁單元35並非實現本發明之必要元件,可以根據需求設置。該對電磁鐵31,設置於該輸送裝置30之一側,其係包括電磁鐵311與312,分別對應設置於該線基材90的兩側。要說明的是,電磁鐵不以一對為實施之限制,例如:複數對,如圖2C所示或者是奇數個皆可以在本發明之精神上予以實施。電磁鐵311具有螺線圏311a以及一鐵芯311b,同樣地,電磁鐵312具有螺線圏312a以及一鐵芯312b。鐵芯311a與312a的端部具有端部結構310,其係為尖端的結構。當該線基材90通過該對電磁鐵31時,該對電磁鐵31對該線基材90施加一脈衝式感應磁場,使該線基材90上具有複數個相距特定距離的感應磁區MA。形成感應磁區MA的方式係如前所述,在此不作贅述。The first stage of the manufacturing process in the system 3 is an inductive magnetizing zone, which is a magnetizing zone formed by the pair of electromagnets 31. In this embodiment, an initial magnetizing unit 35 is further provided in front of the pair of electromagnets 31, and a procedure for pre-magnetizing the wire substrate 90 is performed first. The initial magnetization unit 35 may use an electromagnet or a permanent magnet to magnetize the wire substrate 90. It should be noted that the initial magnetizing unit 35 is not an essential element for implementing the present invention, and can be set according to requirements. The pair of electromagnets 31 is disposed on one side of the conveying device 30, and includes electromagnets 311 and 312, which are respectively disposed on two sides of the wire substrate 90. It should be noted that the electromagnet is not limited to a pair of implementations. For example, a plurality of pairs, as shown in FIG. 2C or an odd number, can be implemented in the spirit of the present invention. The electromagnet 311 includes a cymbal coil 311a and an iron core 311b. Similarly, the electromagnet 312 includes a cymbal coil 312a and an iron core 312b. The ends of the iron cores 311a and 312a have an end structure 310, which is a pointed structure. When the wire substrate 90 passes through the pair of electromagnets 31, the pair of electromagnets 31 applies a pulsed induction magnetic field to the wire substrate 90, so that the wire substrate 90 has a plurality of induction magnetic regions MA at a certain distance from each other. . The manner of forming the induction magnetic area MA is as described above, and will not be repeated here.

如圖9A至9E為本發明之具有研磨顆粒之割線的製造系統之電磁鐵產生磁力線之不同實施例示意圖。在圖9A中,本實施的電磁鐵311與312的鐵芯311b與312b結構為C字型或ㄇ字型的結構,由於電磁鐵311與312具有尖端的端部結構310,因此成對的電磁鐵311與312配置可於線基材90徑向產生磁場B1,因此可以在同一截面的徑向產生相反極性的感應磁區MA4與MA5。要說明的是,ㄇ字型的電磁鐵結構,其數量並不以成對配置為限制,在另一實施例中,可以為單一個電磁鐵,或者是多個電磁鐵但是不成對配置在線基材的各側。9A to 9E are schematic diagrams of different embodiments of magnetic lines generated by an electromagnet in a manufacturing system with a secant line of abrasive particles according to the present invention. In FIG. 9A, the iron cores 311b and 312b of the electromagnets 311 and 312 of this embodiment have a C-shaped or sigmoid-shaped structure. Since the electromagnets 311 and 312 have a tip end structure 310, the paired electromagnetic The arrangement of the irons 311 and 312 can generate a magnetic field B1 in the radial direction of the wire base material 90, and therefore, it is possible to generate induction magnetic regions MA4 and MA5 of opposite polarities in the radial direction of the same cross section. It should be noted that the number of the ㄇ -shaped electromagnet structure is not limited to the configuration in pairs. In another embodiment, it can be a single electromagnet, or multiple electromagnets, but not paired. Sides of the wood.

在另一實施例中,如圖9B所示,其係為另一種電磁鐵感應線基材產生感應磁區的實施例示意圖。本實施例中,該電磁鐵313是一種C型或ㄇ字型鐵芯313b的電磁鐵,開口向下,因此當電磁鐵313上的線圈313a通電而產生磁場時,其係會於線基材90的軸向上產生極性相反感應磁區MA6與MA7。要說明的是,本實施例的電磁鐵313雖以一個說明,但是其數量並不以一個為限制,可以根據需求選擇配置的位置或成對配置。此外,在另一實施例中,可以透過改變電流的方向,改變感應磁區MA6與MA7的磁極性。再者,可以透過C型電磁鐵313的數量、配置的位置,以及C形電磁鐵313開口間距以及線基材移動速度來決定感應磁區間的距離與形成的位置。例如,圖9C所示,其係為線基材之一位置上的剖面是意圖,在本實施例中,基本上與圖9B相近,差異的是為電磁鐵313開口的磁場方向和線基材90的軸向垂直。In another embodiment, as shown in FIG. 9B, it is a schematic diagram of an embodiment that generates an induction magnetic region for another electromagnet induction wire substrate. In this embodiment, the electromagnet 313 is an electromagnet with a C-shaped or cymbal-shaped iron core 313b, and the opening is downward. Therefore, when the coil 313a on the electromagnet 313 is energized to generate a magnetic field, it will be on the wire substrate. Inductive regions MA6 and MA7 of opposite polarities are generated in the axial direction of 90. It should be noted that although one description of the electromagnets 313 in this embodiment is provided, the number of the electromagnets 313 is not limited to one, and a configuration position or a pair configuration may be selected according to requirements. In addition, in another embodiment, the magnetic polarity of the induction magnetic regions MA6 and MA7 can be changed by changing the direction of the current. Furthermore, the distance and position of the induction magnetic section can be determined by the number and position of the C-type electromagnets 313, the opening distance of the C-type electromagnets 313, and the moving speed of the wire substrate. For example, as shown in FIG. 9C, the cross section at one position of the wire substrate is intended. In this embodiment, it is basically similar to FIG. 9B, except that the direction of the magnetic field and the wire substrate of the opening of the electromagnet 313 are different. The axial direction of 90 is vertical.

另一實施例,如圖9D所示,本實施中,電磁鐵314為具有C字型或ㄇ字型鐵芯314b的結構,其上具有線圈314a。鐵芯314b具有兩尖端的端部結構314c,分別設置在線基材90相對於其截面中心的兩端,兩端部結構314c產生的感應磁場B穿過線基材90徑向截面的中心,而形成如圖2B的感應磁區。圖9E所示的電磁鐵315為具有C字型或ㄇ字型鐵芯315b的結構,其上具有線圈315a。鐵芯315b具有兩尖端的端部結構315c,設置在線基材90的同一側,兩端部結構315c產生的感應磁場B並未穿過線基材90徑向截面的中心,而形成如圖3C至3F的感應磁區,本實施例以感應磁區MA8與MA9示意。要說明的是,圖9B至圖9E的電磁鐵僅以一個作為示意,實際上電磁鐵設置的數量,可以根據形成改應磁區的數目、間隔距離與位置而定。In another embodiment, as shown in FIG. 9D, in this implementation, the electromagnet 314 has a structure of a C-shaped or a sigma-shaped iron core 314b, and has a coil 314a thereon. The iron core 314b has two pointed end structures 314c, which are respectively provided at the two ends of the wire substrate 90 with respect to the center of its section. The induced magnetic field B generated by the two end structures 314c passes through the center of the radial section of the wire substrate 90, and A magnetic induction region is formed as shown in FIG. 2B. The electromagnet 315 shown in FIG. 9E has a structure having a C-shaped or a U-shaped iron core 315b, and has a coil 315a thereon. The iron core 315b has two tip end structures 315c, which are disposed on the same side of the wire substrate 90. The induced magnetic field B generated by the two end structures 315c does not pass through the center of the radial section of the wire substrate 90, and is formed as shown in FIG. 3C. To the 3F induction magnetic regions, this embodiment is illustrated by the induction magnetic regions MA8 and MA9. It should be noted that only one of the electromagnets shown in FIGS. 9B to 9E is used as an example. Actually, the number of the electromagnets can be determined according to the number, interval and position of the modified magnetic fields.

再回到圖8所示,為了可以控制該電磁鐵31相對於線基材90的位置或方位角度,在本實施例中,每個電磁鐵31設置於精密移動平台37上,每個電磁鐵31可以透過精密移動平台37進行三軸的位移運動和轉動運動,最小解析度可以達1μm來調整電磁鐵的位置或方位。該上砂模組32,設置於該對電磁鐵31之一側,該上砂模組32於該線基材90通過時,使每一個感應磁區MA上吸附至少一研磨粒320。本實施例中,上砂模組具有一供砂部321以及一接砂部322。供砂部321用以對通過的線基材90撒出研磨粒320,讓研磨粒320可以附著在感應磁區MA上,多餘的研磨粒再被接砂部322所接收。研磨粒的特徵係如前所述,在此不作贅述。Returning to FIG. 8 again, in order to control the position or azimuth of the electromagnet 31 relative to the wire substrate 90, in this embodiment, each electromagnet 31 is disposed on a precision moving platform 37, and each electromagnet 31 The three-axis displacement movement and rotation movement can be performed through the precision moving platform 37. The minimum resolution can reach 1 μm to adjust the position or orientation of the electromagnet. The sand-up module 32 is disposed on one side of the pair of electromagnets 31. When the wire-up module 32 passes through the wire substrate 90, the sand-up module 32 adsorbs at least one abrasive particle 320 on each of the induction magnetic regions MA. In this embodiment, the sand loading module has a sand supply unit 321 and a sand receiving unit 322. The sand supplying portion 321 is used to spray the abrasive particles 320 on the passing wire substrate 90 so that the abrasive particles 320 can be attached to the induction magnetic area MA, and the excess abrasive particles are received by the sand receiving portion 322. The characteristics of the abrasive particles are as described above, and will not be repeated here.

在本實施例中,為了控制附著在線基材的感應磁區上的研磨粒的高度,在一實施例中,在該上砂模組32與該鍍膜裝置34之間更具有一模具33,用以控制研磨粒320附著在線基材90的高度。在一實施例中,該模具33有一模孔330,提供該線基材90通過,模孔330的尺寸係根據研磨粒320的高度或層數而定,只要讓模孔330中心和線基材90的中心軸對應,就可以精確控制研磨粒的層數。在一實施例中,可以使用雷射指示器及光學影像來校正模孔330與線基材90的中心位置對準。要說明的是,本實施例中模具33,並非必要之元件,其係可以根據需求選擇是否要設置。經過了模具33的調整研磨粒的厚度之後,在該模具33一側具有該鍍膜裝置34,該鍍膜裝置34用以於該線基材上形成一層鍍膜層341,用以強化研磨粒320附著於線基材90的效果。該鍍膜層341的材質係如前所述,在此不作贅述。In this embodiment, in order to control the height of the abrasive particles attached to the induction magnetic region of the wire substrate, in one embodiment, a mold 33 is further provided between the sanding module 32 and the coating device 34. In order to control the height of the abrasive particles 320 attached to the wire substrate 90. In one embodiment, the mold 33 has a mold hole 330 for passing the line substrate 90. The size of the mold hole 330 is determined by the height or number of layers of the abrasive particles 320, as long as the center of the mold hole 330 and the line substrate are provided. Corresponding to the central axis of 90, the number of layers of abrasive particles can be precisely controlled. In one embodiment, a laser pointer and an optical image can be used to correct the alignment of the die hole 330 with the center position of the wire substrate 90. It should be noted that, the mold 33 in this embodiment is not an essential component, and it can be selected whether to be set according to requirements. After the thickness of the abrasive particles is adjusted by the mold 33, the coating device 34 is provided on one side of the mold 33. The coating device 34 is used to form a coating layer 341 on the wire substrate to strengthen the attachment of the abrasive particles 320 to Effect of the wire substrate 90. The material of the coating layer 341 is as described above, and is not repeated here.

要說明的是,在鍍膜裝置34鍍膜過程中,電鍍液343中完全没有放入浮游的鑽石研磨粒的必要,因此本發明可以解決習用技術電鍍液浸蝕研磨粒造成研磨粒老化的問題。此外,由於不需要在電鍍液中放置研磨粒,降低研磨粒所需的成本。此外由於本發明利用感應磁區和上砂模組32使線基材90吸附研磨粒320,因此不需要習用利用電鍍液的技術中,透過依頼微弱的電泳作用,形成研磨粒隨機附著的割線,以致可大幅降 低現階段製程的主要缺點。又因為在上砂過程中不需要増加電流密度來提高磨粒的附著率,因此與線基材90接合的鎳鍍層比較低的殘留張應力,甚致可達到殘留壓應力,所以預期可増加磨粒與線基材的附著力(Adhesion),進而可以在研削切割時研磨粒不容易脱落,以增加割線使用壽命。It should be noted that during the coating process of the coating device 34, there is no need to put floating diamond abrasive particles in the plating solution 343, so the present invention can solve the problem of abrasive particles aging caused by erosion of the abrasive particles by the plating solution of the conventional technology. In addition, since there is no need to place abrasive particles in the plating solution, the cost required for the abrasive particles is reduced. In addition, since the present invention uses the induction magnetic area and the sanding module 32 to make the wire substrate 90 adsorb the abrasive particles 320, it is necessary to use the technique of using a plating solution to form a secant line where the abrasive particles randomly adhere through the weak electrophoresis. This can significantly reduce the main disadvantages of the current process. In addition, during the sand loading process, it is necessary to add electrical density to improve the adhesion of abrasive particles. Therefore, the nickel plating layer bonded to the wire substrate 90 has a relatively low residual tensile stress, which can even reach a residual compressive stress. Adhesion between the pellets and the wire substrate, so that the abrasive grains can fall off during grinding and cutting to increase the service life of the cut.

請參閱圖10所示,該圖為本發明之具有研磨顆粒之割線的製造系統另一實施例示意圖。在本實施例中,基本上與圖8相似,差異的是,本實施例在通過鍍膜裝置34之後的一側設置有一消磁單元36,用以對鍍膜裝置34所輸出的割線4進行消磁。在一實施例中,該消磁單元36為施與交流訊號的一電磁線圈,使得通過鍍膜裝置34所形成的割線4可以通過該消磁單元36,而使割線4瞬間消磁。避免割線在切割工件的過程中,有可能會吸附切屑的問題。Please refer to FIG. 10, which is a schematic diagram of another embodiment of a manufacturing system having a cutting line with abrasive particles according to the present invention. In this embodiment, it is basically similar to FIG. 8. The difference is that in this embodiment, a degaussing unit 36 is provided on the side after passing through the coating device 34 to degauss the secant line 4 output by the coating device 34. In one embodiment, the degaussing unit 36 is an electromagnetic coil to which a cross signal is applied, so that the scoring line 4 formed by the coating device 34 can pass through the degaussing unit 36 to demagnetize the scoring line 4 instantly. Avoid the problem that the cutting line may attract dust when cutting the workpiece.

以上所述,乃僅記載本發明為呈現解決問題所採用的技術手段之較佳實施方式或實施例而已,並非用來限定本發明專利實施之範圍。即凡與本發明專利申請範圍文義相符,或依本發明專利範圍所做的均等變化與修飾,皆為本發明專利範圍所涵蓋。The above description only describes the preferred implementations or embodiments of the technical means adopted by the present invention to solve the problem, and is not intended to limit the scope of patent implementation of the present invention. That is, all changes and modifications that are consistent with the meaning of the scope of patent application of the present invention, or made according to the scope of patent of the present invention, are covered by the scope of patent of the present invention.

2‧‧‧具有研磨顆粒之割線的製造方法2‧‧‧ Manufacturing method of secant line with abrasive particles

20~24‧‧‧步驟20 ~ 24‧‧‧step

20a‧‧‧步驟20a‧‧‧step

22a‧‧‧步驟22a‧‧‧step

3‧‧‧製造系統3‧‧‧Manufacturing System

30‧‧‧輸送裝置30‧‧‧ Conveying device

31、31a、31b‧‧‧電磁鐵對31, 31a, 31b‧‧‧ electromagnet pair

310、310’‧‧‧端部結構310, 310’‧‧‧ end structure

311、312、313、314、315‧‧‧電磁鐵311, 312, 313, 314, 315‧‧‧ electromagnets

32‧‧‧上砂模組32‧‧‧Sand loading module

311a、312a、313a、314a、315a‧‧‧螺線圏311a, 312a, 313a, 314a, 315a

311b、312b、313b、314b、315b‧‧‧鐵芯311b, 312b, 313b, 314b, 315b‧‧‧ iron core

320、320a、320b‧‧‧研磨粒320, 320a, 320b ‧‧‧ Abrasive particles

321‧‧‧供砂部321‧‧‧Sand Supply Department

322‧‧‧接砂部322‧‧‧ Sand Receiving Department

33‧‧‧模具33‧‧‧Mould

330‧‧‧模孔330‧‧‧die hole

34‧‧‧鍍膜裝置34‧‧‧Coating device

340‧‧‧初始鍍膜層340‧‧‧Initial coating

341‧‧‧鍍膜層341‧‧‧ Coating

35‧‧‧初始充磁單元35‧‧‧ initial magnetization unit

36‧‧‧消磁單元36‧‧‧Degaussing unit

37‧‧‧移動平台37‧‧‧mobile platform

4‧‧‧割線4‧‧‧ secant

9‧‧‧金屬線材9‧‧‧ metal wire

90‧‧‧線基材90‧‧‧line substrate

B‧‧‧磁場B‧‧‧ Magnetic Field

N、S‧‧‧磁極N, S‧‧‧ magnetic pole

MA~MA9、MA’、MA1’~MA3’、MA1a~MA3a、MA1a’~MA3a’‧‧‧感應磁區MA ~ MA9, MA ’, MA1’ ~ MA3 ’, MA1a ~ MA3a, MA1a’ ~ MA3a’‧‧‧Induction magnetic zone

圖1為本發明之具有研磨顆粒之割線的製造方法流程之一實施例示意圖。 圖2A~2D為電磁鐵於線基材上形成感應磁區之各種態樣截面示意圖。 圖3A至圖3F分別為本發明之線基材上所形成的感應磁區不同實施例示意圖。 圖4A為習用之研磨粒排列示意圖。 圖4B為本發明之一有規則以吸附複數個研磨粒之實施例示意圖。 圖5A與圖5B為本發明之鍍膜步驟之一實施例示意圖。 圖5C與圖5D為本發明之鍍膜步驟之另一實施例示意圖。 圖6A為本發明之具有研磨顆粒之割線的製造方法流程之另一實施例示意圖。 圖6B為本發明之具有研磨顆粒之割線的製造方法流程之又一實施例示意圖。 圖6C為本發明之具有研磨顆粒之割線的製造方法流程之再一實施例示意圖。 圖7A為本發明之步驟22後形成具有多層研磨粒的線基材之一實施例示意圖。 圖7B則為本發明讓線基材通過模具後表面上只剩下一層研磨粒層之一實施例示意圖。 圖7C為具有研磨粒與鍍膜層的割線之一實施例剖面示意圖。 圖7D至7F為形成有研磨粒與鍍膜層的割線之另一實施例剖面示意圖。 圖8為本發明之具有研磨顆粒之割線的製造系統之一實施例示意圖。 圖9A至9E為本發明之具有研磨顆粒之割線的製造系統之電磁鐵產生磁力線之不同實施例示意圖。 圖10為本發明之具有研磨顆粒之割線的製造系統之另一實施例示意圖。FIG. 1 is a schematic diagram of an embodiment of a manufacturing method flow of a secant line with abrasive particles according to the present invention. 2A to 2D are schematic cross-sectional views of various aspects of an electromagnet forming an induction magnetic region on a wire substrate. 3A to 3F are schematic diagrams of different embodiments of an induction magnetic region formed on a wire substrate of the present invention. FIG. 4A is a schematic diagram of a conventional abrasive particle arrangement. FIG. 4B is a schematic diagram of an embodiment of the present invention to regularly adsorb a plurality of abrasive particles. 5A and 5B are schematic diagrams of an embodiment of a coating step according to the present invention. 5C and 5D are schematic diagrams of another embodiment of the coating step of the present invention. FIG. 6A is a schematic diagram of another embodiment of a manufacturing method flow of a secant line with abrasive particles according to the present invention. FIG. 6B is a schematic view of another embodiment of a manufacturing method flow of a secant line with abrasive particles according to the present invention. FIG. 6C is a schematic diagram of another embodiment of a manufacturing method flow of a secant line with abrasive particles according to the present invention. FIG. 7A is a schematic diagram of an embodiment of forming a wire substrate having a multi-layer abrasive torch after step 22 of the present invention. FIG. 7B is a schematic diagram of an embodiment in which only one layer of abrasive particles is left on the rear surface of the wire substrate through the mold according to the present invention. 7C is a schematic cross-sectional view of an embodiment of a secant line having abrasive particles and a coating layer. 7D to 7F are schematic cross-sectional views of another embodiment of a secant line formed with abrasive particles and a coating layer. FIG. 8 is a schematic diagram of an embodiment of a manufacturing system of a secant line with abrasive particles according to the present invention. 9A to 9E are schematic diagrams of different embodiments of magnetic field lines generated by an electromagnet of a manufacturing system with a secant line of abrasive particles according to the present invention. FIG. 10 is a schematic diagram of another embodiment of a manufacturing system with a secant line of abrasive particles according to the present invention.

Claims (10)

一種具有研磨顆粒之割線的製造方法,其係包括有下列步驟: 提供一線基材,並使該線基材沿一方向輸送; 使該線基材通過一感磁區,該感磁區具有至少一電磁鐵,分別設置於該線基材的一側,當該線基材通過該感磁區時,該至少一電磁鐵對該線基材施加一脈衝式感應磁場,使該線基材上形成有複數個相距特定距離的感應磁區; 使具有該複數個感應磁區的線基材通過一研磨粒區,進而使每一個感應磁區上吸附至少一研磨粒;以及 使具有該研磨粒之線基材通過一鍍膜區,以在該線基材上形成一層鍍膜層。A method for manufacturing a secant line with abrasive particles includes the following steps: providing a line substrate and conveying the line substrate in a direction; passing the line substrate through a magnetically sensitive region, the magnetically sensitive region having at least An electromagnet is respectively disposed on one side of the wire base material. When the wire base material passes through the magnetic sensing area, the at least one electromagnet applies a pulse induction magnetic field to the wire base material, so that the wire base material is Forming a plurality of inductive magnetic regions at a specific distance; passing a wire substrate having the plurality of inductive magnetic regions through an abrasive particle region, thereby causing at least one abrasive particle to be adsorbed on each inductive magnetic region; and having the abrasive particles The wire substrate passes through a coating area to form a coating layer on the wire substrate. 如申請專利範圍第1項所述之具有研磨顆粒之割線的製造方法,其中,在研磨粒區與該鍍膜區之間更具有使具有該研磨粒之線基材通過一模具,控制該線基材表面之研磨粒的厚度。The method for manufacturing a secant line with abrasive particles according to item 1 of the scope of the patent application, wherein between the abrasive particle area and the coating area, a wire substrate having the abrasive particles is passed through a mold to control the line base. The thickness of the abrasive particles on the surface of the wood. 如申請專利範圍第1項所述之具有研磨顆粒之割線的製造方法,其中每一電磁鐵具有一對尖端,用以匯聚磁力線,以磁化該線基材,該尖端之外徑大小可以用以控制磁化區域的大小。According to the method for manufacturing a secant line with abrasive particles according to item 1 of the scope of the patent application, wherein each electromagnet has a pair of tips for gathering magnetic lines of force to magnetize the line substrate, the outer diameter of the tip can be used for Controls the size of the magnetized area. 如申請專利範圍第1項所述之具有研磨顆粒之割線的製造方法,其係更包括有一消磁步驟,對該線基材進行消磁。The method for manufacturing a secant line with abrasive particles according to item 1 of the patent application scope further includes a degaussing step to demagnetize the line substrate. 一種具有研磨顆粒之割線的製造系統,其係包括有: 一輸送裝置,用以將一線基材沿一方向輸送; 至少一電磁鐵,設置於該輸送裝置之一側,該至少一電磁鐵分別設置於該線基材的一側,當該線基材通過該至少一電磁鐵時,該至少一電磁鐵對該線基材施加一脈衝式感應磁場,使該線基材上形成有複數個相距特定距離的感應磁區; 一上砂模組,設置於該至少一電磁鐵之一側,該上砂模組於該線基材通過時,使每一個感應磁區上吸附至少一研磨粒;以及 一鍍膜裝置,設置於該上砂模組之一側,該鍍膜裝置用以於該線基材上形成一層鍍膜層。A manufacturing system for cutting lines with abrasive particles includes: a conveying device for conveying a line of substrates in one direction; at least one electromagnet disposed on one side of the conveying device, the at least one electromagnet respectively It is arranged on one side of the wire base material. When the wire base material passes the at least one electromagnet, the at least one electromagnet applies a pulse induction magnetic field to the wire base material, so that a plurality of wire base materials are formed on the wire base material. Inductive magnetic areas at a specific distance; a sand-up module is disposed on one side of the at least one electromagnet, and the sand-up module makes at least one abrasive particle adsorbed on each of the induction magnetic areas when the line substrate passes through And a coating device is disposed on one side of the sand-up module, the coating device is used to form a coating layer on the wire substrate. 如申請專利範圍第5項所述之具有研磨顆粒之割線的製造系統,其中每一電磁鐵具有一對尖端,用以匯聚磁力線,以磁化該線基材,該尖端之外徑大小可以用以控制磁化區域的大小。According to the manufacturing system of the secant line with abrasive particles according to item 5 of the scope of the patent application, each electromagnet has a pair of tips for gathering magnetic lines of force to magnetize the line substrate, and the outer diameter of the tip can be used for Controls the size of the magnetized area. 如申請專利範圍第5項所述之具有研磨顆粒之割線的製造系統,其中該上砂模組與該鍍膜裝置之間更具有一模具,以提供該線基材通過,該模具用以控制該線基材表面之研磨粒的厚度。According to the manufacturing system of the secant line with abrasive particles according to item 5 of the scope of the patent application, a mold is further provided between the sanding module and the coating device to allow the line substrate to pass through, and the mold is used to control the The thickness of the abrasive particles on the surface of the wire substrate. 如申請專利範圍第5項所述之具有研磨顆粒之割線的製造系統,消磁單元對該線基材進行消磁。According to the manufacturing system of a secant line with abrasive particles as described in item 5 of the patent application scope, the degaussing unit demagnetizes the line substrate. 一種具有研磨顆粒之割線,其係包括有: 一線基材,其係於其軸向上具有周期性排列複數個研磨區; 一研磨粒層,其係形成於該複數個研磨區上,每一研磨區上的研磨粒層具有至少一研磨粒;以及 一鍍膜層,其係形成於該線基材之表面上,用以増加磨粒與該線基材的附著力。A secant line with abrasive particles includes: a linear substrate having a plurality of abrasive regions periodically arranged in an axial direction thereof; an abrasive particle layer formed on the plurality of abrasive regions, and each abrasive The abrasive particle layer on the area has at least one abrasive particle; and a coating layer, which is formed on the surface of the wire base material for adding friction to the wire base material. 如申請專利範圍第9項所述之具有研磨顆粒之割線,其中,每一個研磨區具有一磁極性,以吸附該研磨區上的至少一研磨粒。The secant line with abrasive particles according to item 9 of the scope of the patent application, wherein each grinding zone has a magnetic polarity to adsorb at least one abrasive particle on the grinding zone.
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