JP2015009325A - Fixed abrasive grain wire and wire processing method - Google Patents

Fixed abrasive grain wire and wire processing method Download PDF

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JP2015009325A
JP2015009325A JP2013136783A JP2013136783A JP2015009325A JP 2015009325 A JP2015009325 A JP 2015009325A JP 2013136783 A JP2013136783 A JP 2013136783A JP 2013136783 A JP2013136783 A JP 2013136783A JP 2015009325 A JP2015009325 A JP 2015009325A
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wire
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abrasive grains
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信二 俵
Shinji Tawara
信二 俵
峠 直樹
Naoki Toge
直樹 峠
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Noritake Co Ltd
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Noritake Co Ltd
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PROBLEM TO BE SOLVED: To provide an abrasive grain wire capable of improving sharpness and reducing a processing cost when an alloy containing iron of 45% or more such as an alnico alloy, a ferritic alloy, a samarium-cobalt alloy, a neodymium alloy and the like is cut and to provide a wire processing method using the same.SOLUTION: In an abrasive grain wire 2 using for cutting an alloy containing iron of 45% or more,: abrasive grains fixed on a wire 6 include both of diamond abrasive grains 7 and CBN abrasive grains 8; and an including ratio of the diamond abrasive grains 7 to the CBN abrasive grains 8 is 20:80-70:30.

Description

本発明は、アルニコ合金、フェライト合金、サマリウムコバルト(サマコバ)合金やネオジム合金等の鉄を45%以上含有する合金の切断に用いられる固定砥粒ワイヤーおよびこれを用いたワイヤー加工方法に関する。   The present invention relates to a fixed abrasive wire used for cutting an alloy containing 45% or more of iron such as an alnico alloy, a ferrite alloy, a samarium cobalt (Samacoba) alloy, or a neodymium alloy, and a wire processing method using the same.

太陽電池、半導体シリコン、磁性体、サファイヤやSiCなどの結晶系材料のスライス加工に用いられる固定砥粒ワイヤーが知られている。固定砥粒ワイヤーは、ワイヤー芯線上にバインダーを介してダイヤモンドや立方晶窒化ホウ素(CBN)等の砥粒が固定されたものである(例えば、特許文献1参照。)。   A fixed abrasive wire used for slicing a crystalline material such as a solar cell, semiconductor silicon, a magnetic material, sapphire, or SiC is known. In the fixed abrasive wire, abrasive grains such as diamond and cubic boron nitride (CBN) are fixed on a wire core wire through a binder (see, for example, Patent Document 1).

特に、CBNは、窒化ホウ素の分子構造の1つで、窒素のホウ素の化合物とされ、ダイヤモンドとほぼ同程度の硬さを有しながらも熱に対して優れた特徴を有し、熱反応が軽減できることから、硬質かつ難加工性のネオジム合金の金属ブロックの切断に好適である(例えば、特許文献2参照。)。   In particular, CBN is one of the molecular structures of boron nitride, and is a boron compound of nitrogen. It has almost the same hardness as diamond, but has excellent heat resistance, and has a thermal reaction. Since it can reduce, it is suitable for the cutting | disconnection of the metal block of a hard and difficult-to-work-process neodymium alloy (for example, refer patent document 2).

特開2012−152830号公報JP2012-152830A 特開2011−121161号公報JP 2011-121161 A

ところが、CBN砥粒はダイヤモンド砥粒に比べて高価であるため、加工コストの増大を引き起こす。一方、ダイヤモンド砥粒はCBN砥粒よりもヌープ硬さで約1.7倍であり、切味が良いが、アルニコ合金、フェライト合金、サマコバ合金やネオジム合金等の鉄を45%以上含有する合金の切断に用いた場合、切断中に化学反応を起こし、ダイヤモンドの摩耗が促進されるため、切味の低下が早い。   However, since CBN abrasive grains are more expensive than diamond abrasive grains, processing costs are increased. On the other hand, diamond abrasive grains have a Knoop hardness of about 1.7 times that of CBN abrasive grains and have a good sharpness, but alloys containing 45% or more of iron, such as alnico alloys, ferrite alloys, samacoba alloys and neodymium alloys. When used for cutting, a chemical reaction occurs during cutting and diamond wear is accelerated, so that the sharpness is rapidly reduced.

そこで、本発明においては、アルニコ合金、フェライト合金、サマコバ合金やネオジム合金等の鉄を45%以上含有する合金の切断に際して、切味の向上および加工コストの低減を可能にした固定砥粒ワイヤーおよびこれを用いたワイヤー加工方法を提供することを目的とする。   Therefore, in the present invention, when cutting an alloy containing 45% or more of iron such as an alnico alloy, a ferrite alloy, a samakoba alloy, a neodymium alloy, etc., a fixed abrasive wire that can improve sharpness and reduce processing costs, It aims at providing the wire processing method using this.

本発明の固定砥粒ワイヤーは、ワイヤー上に砥粒が固定され、鉄を45%以上含有する合金の切断に用いられる固定砥粒ワイヤーであって、砥粒が、ダイヤモンド砥粒およびCBN砥粒の両方を含み、ダイヤモンド砥粒とCBN砥粒との含有比率が、20:80〜70:30である固定砥粒ワイヤーである。   The fixed abrasive wire of the present invention is a fixed abrasive wire used for cutting an alloy containing 45% or more of iron, in which the abrasive grains are fixed on the wire, and the abrasive grains are diamond abrasive grains and CBN abrasive grains. These are fixed abrasive wires in which the content ratio of diamond abrasive grains and CBN abrasive grains is 20:80 to 70:30.

本発明の固定砥粒ワイヤーによれば、従来のCBN砥粒のみの固定砥粒ワイヤーよりも硬度が高いダイヤモンド砥粒が含まれることで切味が向上するとともに、従来のダイヤモンド砥粒のみの固定砥粒ワイヤーよりも切断中に化学反応を起こすダイヤモンド砥粒が少ないため、ダイヤモンド砥粒の摩耗が抑制され、切味の低下が遅くなる。そのため、本発明の固定砥粒ワイヤーは、線速500〜1200m/minで走行させて使用することが可能であり、従来のダイヤモンド砥粒のみまたはCBN砥粒のみの固定砥粒ワイヤーよりも切味指数が向上する。なお、切味指数とは、被削材を切り上げるまでに要する時間の逆数である。   According to the fixed abrasive wire of the present invention, the sharpness is improved by including diamond abrasive grains having a hardness higher than that of the conventional fixed abrasive wire including only CBN abrasive grains, and the fixing of only the conventional diamond abrasive grains is performed. Since there are fewer diamond abrasive grains that cause a chemical reaction during cutting than the abrasive wire, wear of the diamond abrasive grains is suppressed, and the reduction in sharpness is delayed. Therefore, the fixed abrasive wire of the present invention can be used by running at a linear speed of 500 to 1200 m / min, and is sharper than the conventional fixed abrasive wire of only diamond abrasive grains or CBN abrasive grains. The index is improved. The sharpness index is the reciprocal of the time required to round up the work material.

なお、ダイヤモンド砥粒とCBN砥粒との含有比率は、より好ましくは30:70〜60:40である。この場合、従来のダイヤモンド砥粒のみの固定砥粒ワイヤーよりも切味指数が20%以上向上した固定砥粒ワイヤーが得られる。   In addition, the content ratio of diamond abrasive grains and CBN abrasive grains is more preferably 30:70 to 60:40. In this case, a fixed abrasive wire having a sharpness index improved by 20% or more as compared with a conventional fixed abrasive wire made only of diamond abrasive grains can be obtained.

本発明の固定砥粒ワイヤーによれば、アルニコ合金、フェライト合金、サマコバ合金やネオジム合金等の鉄を45%以上含有する合金の切断の際の切味が向上する。また、従来のCBN砥粒のみの固定砥粒ワイヤーよりもCBN砥粒が少ないため、安価な固定砥粒ワイヤーが得られ、加工コストの低減が可能となる。   According to the fixed abrasive wire of the present invention, the sharpness at the time of cutting an alloy containing 45% or more of iron such as an alnico alloy, a ferrite alloy, a samakoba alloy or a neodymium alloy is improved. Moreover, since there are few CBN abrasive grains than the conventional fixed abrasive wire only of CBN abrasive grains, an inexpensive fixed abrasive wire can be obtained and processing cost can be reduced.

本発明の実施の形態におけるワイヤーソー装置の概略構成図である。It is a schematic block diagram of the wire saw apparatus in embodiment of this invention. 図1の固定砥粒ワイヤーの縦断面図である。It is a longitudinal cross-sectional view of the fixed abrasive wire of FIG. DIA砥粒とCBN砥粒の含有比率と切味指数との関係を示す図である。It is a figure which shows the relationship between the content ratio of a DIA abrasive grain and a CBN abrasive grain, and a sharpness index. 揺動角度と切味指数との関係を示す図である。It is a figure which shows the relationship between a rocking | fluctuation angle and a sharpness index | exponent.

図1は本発明の実施の形態におけるワイヤーソー装置の概略構成図、図2は図1の固定砥粒ワイヤーの平面図である。   FIG. 1 is a schematic configuration diagram of a wire saw device according to an embodiment of the present invention, and FIG. 2 is a plan view of the fixed abrasive wire of FIG.

図1において、本発明の実施の形態におけるワイヤーソー装置1は、図の奥行き方向に所定間隔で配置された複数の固定砥粒ワイヤー2をメインローラー3a,3b間で高速で移動走行させ、この走行する固定砥粒ワイヤー2に対して被削材4を押し付けて切断するものである。メインローラー3a,3bは、図示しない揺動機構によって揺動角度2θ(水平から±θ)の範囲で揺動するように構成されている。被削材4は、アルニコ合金、フェライト合金、サマコバ合金やネオジム合金等の鉄を45%以上含有する合金であり、スライス台5に保持されている。   In FIG. 1, a wire saw device 1 according to an embodiment of the present invention moves a plurality of fixed abrasive wires 2 arranged at a predetermined interval in the depth direction of the drawing at high speed between main rollers 3a and 3b. The workpiece 4 is pressed against the traveling fixed abrasive wire 2 and cut. The main rollers 3a and 3b are configured to swing within a swing angle 2θ (± θ from the horizontal) by a swing mechanism (not shown). The work material 4 is an alloy containing 45% or more of iron, such as an alnico alloy, a ferrite alloy, a samakoba alloy, or a neodymium alloy, and is held on a slice table 5.

固定砥粒ワイヤー2は、ワイヤー芯線上にNiなどの金属めっきによる下地(下地層)が施されたワイヤー6の外周面に、電着によって複数のダイヤモンド(以下、「DIA」と称す。)砥粒7およびCBN砥粒8が固定されたものである。なお、本実施形態における固定砥粒ワイヤー2では、DIA砥粒7とCBN砥粒8との含有比率は20:80〜70:30としているが、より好ましくは30:70〜60:40とする。   The fixed abrasive wire 2 has a plurality of diamond (hereinafter referred to as “DIA”) abrasives by electrodeposition on the outer peripheral surface of a wire 6 on which a base (base layer) by metal plating such as Ni is applied on a wire core wire. The grains 7 and the CBN abrasive grains 8 are fixed. In addition, in the fixed abrasive wire 2 in this embodiment, although the content ratio of the DIA abrasive grain 7 and the CBN abrasive grain 8 is 20: 80-70: 30, More preferably, it is set to 30: 70-60: 40. .

ワイヤー芯線は、ピアノ線やアラミド繊維線等の線材であり、線径(芯線径)dはφ60μm〜φ300μmである。また、前述のDIA砥粒7およびCBN砥粒8のサイズ(平均粒径)は、芯線径dの15%以上30%以下としている。本実施形態においては、DIA砥粒7およびCBN砥粒8の平均粒径の測定は、レーザー回折原理を用いた測定器を使用する。なお、本実施形態において、ワイヤー芯線の断面形状は円形であるが、多角形とすることもできる。   The wire core wire is a wire such as a piano wire or an aramid fiber wire, and the wire diameter (core wire diameter) d is φ60 μm to φ300 μm. The size (average particle diameter) of the DIA abrasive grains 7 and the CBN abrasive grains 8 is 15% or more and 30% or less of the core wire diameter d. In this embodiment, the measurement of the average particle diameter of the DIA abrasive grains 7 and the CBN abrasive grains 8 uses a measuring instrument using the laser diffraction principle. In addition, in this embodiment, although the cross-sectional shape of a wire core wire is circular, it can also be made into a polygon.

DIA砥粒7およびCBN砥粒8は、非導電体であるDIAおよびCBNを電着するため、Niなどの導電性金属により被覆(コーティング)されたものである。なお、Ni以外にも、Cu、Cr、Ti、Fe、ZnまたはAlの1種または2種以上からなるもの等を用いることが可能である。また、本実施形態においては、電着によってDIA砥粒7およびCBN砥粒8を固定しているが、レジンボンド等の樹脂接着剤により固定することも可能である。   The DIA abrasive grains 7 and the CBN abrasive grains 8 are coated (coated) with a conductive metal such as Ni in order to electrodeposit DIA and CBN which are non-conductors. In addition to Ni, it is possible to use one or more of Cu, Cr, Ti, Fe, Zn, or Al. Moreover, in this embodiment, although the DIA abrasive grain 7 and the CBN abrasive grain 8 are fixed by electrodeposition, it can be fixed by a resin adhesive such as resin bond.

上記構成のワイヤーソー装置1によるワイヤー加工方法では、固定砥粒ワイヤー2がDIA砥粒7およびCBN砥粒8の両方を含み、DIA砥粒7とCBN砥粒8との含有比率が20:80〜70:30であることから、従来のCBN砥粒8のみの固定砥粒ワイヤーよりも硬度が高いDIA砥粒7が含まれることで、鉄を45%以上含有する合金の切断の際の切味が向上するとともに、従来のDIA砥粒7のみの固定砥粒ワイヤーよりも切断中に化学反応を起こすDIA砥粒7が少ないため、DIA砥粒7の摩耗が抑制され、切味の低下が遅くなる。   In the wire processing method by the wire saw device 1 having the above configuration, the fixed abrasive wire 2 includes both the DIA abrasive grain 7 and the CBN abrasive grain 8, and the content ratio of the DIA abrasive grain 7 and the CBN abrasive grain 8 is 20:80. Since it is ˜70: 30, the DIA abrasive grains 7 having higher hardness than the conventional fixed abrasive wire with only the CBN abrasive grains 8 are included, so that the cutting when cutting an alloy containing 45% or more of iron is performed. As the taste improves, since there are fewer DIA abrasive grains 7 that cause a chemical reaction during cutting than the conventional fixed abrasive wire of only DIA abrasive grains 7, the wear of DIA abrasive grains 7 is suppressed, and the sharpness is reduced. Become slow.

そのため、本実施形態における固定砥粒ワイヤー2は、ワイヤーソー装置1により線速500〜1200m/minで走行させて使用することが可能であり、従来のDIA砥粒7のみまたはCBN砥粒8のみの固定砥粒ワイヤーよりも切味指数が向上する。また、従来のCBN砥粒8のみの固定砥粒ワイヤーよりもCBN砥粒8が少ないため、安価な固定砥粒ワイヤー2が得られ、加工コストの低減が可能となっている。   Therefore, the fixed abrasive wire 2 in the present embodiment can be used while being run at a linear speed of 500 to 1200 m / min by the wire saw device 1, and only the conventional DIA abrasive grains 7 or only the CBN abrasive grains 8 are used. The sharpness index is improved as compared with the fixed abrasive wire. Moreover, since there are few CBN abrasive grains 8 rather than the conventional fixed abrasive wire only of CBN abrasive grains 8, the cheap fixed abrasive wire 2 is obtained and the processing cost can be reduced.

上記構成のワイヤーソー装置1により、ネオジムの切断試験を行った。本実施例において、芯線径dが0.18mm、DIA砥粒7およびCBN砥粒8のサイズ(平均粒径)が30〜40μm(芯線径dに対して16.7〜22.2%)(Niコート有)の電着固定ワイヤーを使用し、DIA砥粒7とCBN砥粒8の含有比率を変えて試験した。試験結果を図3および図4に示す。   A neodymium cutting test was performed with the wire saw device 1 having the above-described configuration. In this example, the core wire diameter d is 0.18 mm, and the size (average particle diameter) of the DIA abrasive grains 7 and the CBN abrasive grains 8 is 30 to 40 μm (16.7 to 22.2% with respect to the core wire diameter d) ( Using an electrodeposition fixing wire with Ni coating), the content ratio of DIA abrasive grains 7 and CBN abrasive grains 8 was changed and tested. The test results are shown in FIG. 3 and FIG.

図3はDIA砥粒7とCBN砥粒8の含有比率と切味指数との関係を示している。なお、切味指数は、CBN砥粒8を100%とした固定砥粒ワイヤーにより線速300〜500m/minで切断した場合を100%とした。図3から分かるように、DIA砥粒7とCBN砥粒8との含有比率が20:80〜70:30では、線速500〜1200m/minで使用して、従来のCBN砥粒のみの固定砥粒ワイヤーよりも切味指数が向上している。特に、線速700〜1200m/minで使用した場合、含有比率が30:70〜60:40では20%以上向上しており、最大30%向上している。   FIG. 3 shows the relationship between the content ratio of the DIA abrasive grains 7 and the CBN abrasive grains 8 and the sharpness index. The sharpness index was 100% when the CBN abrasive grains 8 were cut at a linear speed of 300 to 500 m / min with a fixed abrasive wire. As can be seen from FIG. 3, when the content ratio of DIA abrasive grains 7 and CBN abrasive grains 8 is 20:80 to 70:30, it is used at a linear speed of 500 to 1200 m / min, and only conventional CBN abrasive grains are fixed. The sharpness index is improved compared to the abrasive wire. In particular, when it is used at a linear speed of 700 to 1200 m / min, the content ratio is improved by 20% or more at 30:70 to 60:40, which is improved by 30% at the maximum.

また、図4は揺動角度θでメインローラー3a,3bを揺動させた場合の揺動角度と切味指数との関係を示している。なお、DIA砥粒7とCBN砥粒8との含有比率は、図3で最大の切味指数が得られた50:50としている。図4から分かるように、メインローラー3a,3bを揺動させながら被削材4を切断することで、被削材4との接触弧が小さくなるため、切味指数が最大30%向上しており、図3に示した効果と合わせると最大60%の切味向上が図れる。   FIG. 4 shows the relationship between the swing angle and the sharpness index when the main rollers 3a and 3b are swung at the swing angle θ. In addition, the content ratio of the DIA abrasive grains 7 and the CBN abrasive grains 8 is 50:50 at which the maximum sharpness index is obtained in FIG. As can be seen from FIG. 4, by cutting the work material 4 while swinging the main rollers 3a and 3b, the contact arc with the work material 4 is reduced, so that the sharpness index is improved by up to 30%. Therefore, when combined with the effect shown in FIG. 3, the sharpness can be improved by up to 60%.

本発明の固定砥粒ワイヤーおよびワイヤー加工方法は、アルニコ合金、フェライト合金、サマリウムコバルト合金やネオジム合金等の鉄を45%以上含有する合金の切断に有用である。   The fixed abrasive wire and the wire processing method of the present invention are useful for cutting alloys containing 45% or more of iron such as alnico alloys, ferrite alloys, samarium cobalt alloys and neodymium alloys.

1 ワイヤーソー装置
2 固定砥粒ワイヤー
3a,3b メインローラー
4 被削材
5 スライス台
6 ワイヤー
7 ダイヤモンド(DIA)砥粒
8 CBN砥粒
DESCRIPTION OF SYMBOLS 1 Wire saw apparatus 2 Fixed abrasive wire 3a, 3b Main roller 4 Work material 5 Slice stand 6 Wire 7 Diamond (DIA) abrasive grain 8 CBN abrasive grain

Claims (4)

ワイヤー上に砥粒が固定され、鉄を45%以上含有する合金の切断に用いられる固定砥粒ワイヤーであって、
前記砥粒は、ダイヤモンド砥粒およびCBN砥粒の両方を含み、
前記ダイヤモンド砥粒と前記CBN砥粒との含有比率が、20:80〜70:30である固定砥粒ワイヤー。
Abrasive grains are fixed on the wire and are fixed abrasive wires used for cutting alloys containing 45% or more of iron,
The abrasive grains include both diamond abrasive grains and CBN abrasive grains,
The fixed abrasive wire whose content ratio of the said diamond abrasive grain and the said CBN abrasive grain is 20: 80-70: 30.
線速500〜1200m/minで走行させて使用される請求項1記載の固定砥粒ワイヤー。   The fixed abrasive wire according to claim 1, wherein the fixed abrasive wire is used while being run at a linear speed of 500 to 1200 m / min. ワイヤー上に砥粒が固定され、鉄を45%以上含有する合金の切断に用いられる固定砥粒ワイヤーであって、前記砥粒が、ダイヤモンド砥粒およびCBN砥粒の両方を含み、前記ダイヤモンド砥粒と前記CBN砥粒との含有比率が、20:80〜70:30である固定砥粒ワイヤーを、線速500〜1200m/minで走行させて被削材を切断するワイヤー加工方法。   A fixed abrasive wire used for cutting an alloy containing 45% or more of iron, in which abrasive grains are fixed on the wire, wherein the abrasive grains include both diamond abrasive grains and CBN abrasive grains, and the diamond abrasive A wire processing method in which a fixed abrasive wire having a content ratio of grains and the CBN abrasive grains of 20:80 to 70:30 is run at a linear speed of 500 to 1200 m / min to cut the work material. 前記固定砥粒ワイヤーを揺動させて前記被削材を切断する請求項3記載のワイヤー加工方法。   The wire processing method according to claim 3, wherein the workpiece is cut by swinging the fixed abrasive wire.
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CN107913849A (en) * 2017-11-17 2018-04-17 天津水泥工业设计研究院有限公司 A kind of centripetal high-efficient powder concentrator and powder concentrator design method
CN111015985A (en) * 2020-01-03 2020-04-17 天津市环欧半导体材料技术有限公司 Method for cutting fine-lined silicon wafer
US10875152B2 (en) 2016-03-24 2020-12-29 A.L.M.T. Corp. Super-abrasive grinding wheel
CN112705793A (en) * 2020-12-16 2021-04-27 成都银河磁体股份有限公司 Method for multi-wire cutting of samarium cobalt magnet by using diamond wire
US11123841B2 (en) 2016-05-27 2021-09-21 A.L.M.T. Corp. Super-abrasive grinding wheel

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Publication number Priority date Publication date Assignee Title
US10875152B2 (en) 2016-03-24 2020-12-29 A.L.M.T. Corp. Super-abrasive grinding wheel
US11123841B2 (en) 2016-05-27 2021-09-21 A.L.M.T. Corp. Super-abrasive grinding wheel
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CN111015985A (en) * 2020-01-03 2020-04-17 天津市环欧半导体材料技术有限公司 Method for cutting fine-lined silicon wafer
CN112705793A (en) * 2020-12-16 2021-04-27 成都银河磁体股份有限公司 Method for multi-wire cutting of samarium cobalt magnet by using diamond wire

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