TW201722588A - Fastening method for abrasive particle of diamond saw wire further shortens time of electroplating and cladding operation and enhances adhesion of abrasive particles - Google Patents

Fastening method for abrasive particle of diamond saw wire further shortens time of electroplating and cladding operation and enhances adhesion of abrasive particles Download PDF

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TW201722588A
TW201722588A TW104142618A TW104142618A TW201722588A TW 201722588 A TW201722588 A TW 201722588A TW 104142618 A TW104142618 A TW 104142618A TW 104142618 A TW104142618 A TW 104142618A TW 201722588 A TW201722588 A TW 201722588A
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core
abrasive particle
abrasive
diamond saw
abrasive particles
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TW104142618A
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Chinese (zh)
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Bing-Feng Li
Wen-Xiang Luo
jun-xian Li
Wen-Shan Xu
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Bing-Feng Li
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Abstract

A fastening method for abrasive particle of diamond saw wire comprises steps: firstly enabling a surface of an abrasive particle to form a conductive surface layer capable of being melted or light-cured or thermally cured, uniformly sucking abrasive particle on core surface through electrifying or magnetic manners, then imposing short-time heating and welding, or light-(or thermal-)curing manner to temporarily fasten the abrasive particle on a core at better attaching force, and finally imposing electroplating cladding to completely and permanently fasten the abrasive particle on the core at stronger attaching force so as to finish production of diamond saw wire. With the foregoing steps of heating welding or light-curing, the force of attaching the abrasive particle on the core can be enhanced during electroplating cladding operation so that occurrence of peeling the abrasive particle off can be greatly reduced or prevented during electroplating cladding operation. It can further improve production speed to produce diamond saw wire of abrasive particle having high retention, obvious protrusion and chip discharge space in the shortest time.

Description

鑽石鋸線之磨粒的固定方法 Method for fixing abrasive grains of diamond saw wire

本發明所涉及的是超硬磨粒固定在線芯上的方法,係先令磨粒表面進行導電表面層的形成後,該磨粒可以透過電性或磁性讓磨粒附著在線芯上後,再以短時間加熱熔焊或以光或熱固化而讓磨粒具有較高附著力的暫時性固定在線芯上,使得能以較高產速進行電鍍披覆作業,而完成磨粒明顯凸出、磨料間保有排屑空間之鑽石線的製作。 The invention relates to a method for fixing superhard abrasive grains on a wire core, which is characterized in that after the surface of the abrasive grain is formed on the surface of the conductive particles, the abrasive particles can be adhered to the wire core through electrical or magnetic properties, and then Temporarily fixed on the wire core by heating welding in a short time or curing by light or heat to make the abrasive grains have high adhesion, so that the plating coating operation can be performed at a higher production speed, and the abrasive grains are obviously convex and abrasive. The production of a diamond line with a chip space.

在整個半導體矽晶圓加工過程中,從最初的長晶、至切片、研磨、拋光、清洗等等步驟,主要在晶片的切割上,對相對製程的成本與品質佔有絕對重要的關鍵因素點,最主要在晶棒要切割成晶圓的過成中,第一就決定了產出晶圓的數量,直接影響到半導體後段製程晶片的產出量,因此目前透過鑽石鋸線的切割技術,已經能夠達到目前工業使用上所需,線鋸切割方式其應用成本較為低廉,並且不像內圓鋸一樣要顧及圓鋸片的半徑及晶圓的直徑等因素,另可使晶圓之切口損失達到最小,最短的鋸切時間並且鋸切完成的加工表面也較它種鋸切方式有較好的加工品質。 In the entire semiconductor germanium wafer processing process, from the initial crystal growth, to slicing, grinding, polishing, cleaning, etc., mainly in the cutting of the wafer, the cost and quality of the relative process occupy an absolutely important key factor. The most important thing is that in the process of cutting the wafer into wafers, the first determines the number of wafers produced, which directly affects the output of the semiconductor chip. Therefore, the cutting technology of diamond sawing wire has been used. It can meet the needs of current industrial use. The wire saw cutting method is cheaper to apply, and unlike the inner circular saw, it takes into account the radius of the circular saw blade and the diameter of the wafer, and the loss of the wafer can be reduced. The smallest, shortest sawing time and the machined surface that is sawed have better processing quality than the sawing method.

所謂鑽石鋸線是將超硬磨粒附著固定在一條鋼材的線芯表面上而形成者,該將磨粒固定在線芯的結合技術手法,是利用金屬結合劑或樹脂結合劑等等製成鑽石鋸線,並依使用的結合劑、以及製成方式的不同,大約可分為透過燒結、電鍍、或硬焊等方法,將超硬磨粒固定在線芯 上,其中:該樹脂燒結而成的鑽石鋸線如圖1所示,其優點是製造成本低、生產速度快、且可以縮小線徑增加取材率,但是其磨粒2附著在線芯1上的強度太小、容易剝離脫落,即使在樹脂層3的結合劑中添加入銅金屬,雖可相對降低其鑽石磨耗情形發生、或加入碳化矽創作空隙而利於鋸切的排屑,但是不管添加何種添加物進入樹脂結合劑中對超硬磨粒的附著力改善仍舊有限,一但把鋸線的加工速率提高之後,超硬磨粒鑽石脫落的程度依舊隨之明顯突出;同時樹脂燒結的形成方式,是以磨粒與塗佈層材料混合後,再進行整體塗層批覆,磨粒分散於塗佈層中,磨粒大多是超過四分之三的體積,會埋入樹脂層中,且磨粒與磨粒之間,存在連續樹脂層,無法產生有效排屑空間,進而影響了鋸切的銳利度、鋸切的速度與鋸切的效果。 The so-called diamond sawing wire is formed by attaching superhard abrasive grains to the surface of a core of a steel material. The bonding technique of fixing the abrasive grains to the wire core is to make a diamond by using a metal bonding agent or a resin bonding agent or the like. The saw wire, depending on the bonding agent used and the manner of preparation, can be roughly divided into the core of the hard abrasive by means of sintering, electroplating, or brazing. Above, wherein: the diamond saw wire sintered by the resin is as shown in FIG. 1 , which has the advantages of low manufacturing cost, high production speed, and can reduce the wire diameter to increase the material extraction rate, but the abrasive grain 2 is attached to the wire core 1 The strength is too small, and it is easy to peel off, even if copper metal is added to the binder of the resin layer 3, although the diamond wear condition may be relatively reduced, or the carbonized ruthenium creation void may be added to facilitate sawing chip removal, no matter what is added The adhesion of the additives into the resin binder is still limited to the improvement of the adhesion of the super-hard abrasive grains. Once the processing rate of the saw wire is increased, the degree of the super-hard abrasive diamonds is still prominent, and the formation of the resin is sintered. The method is that after the abrasive particles are mixed with the coating layer material, the overall coating is applied, and the abrasive particles are dispersed in the coating layer, and the abrasive grains are mostly more than three-quarters of the volume, and are buried in the resin layer, and Between the abrasive grains and the abrasive grains, there is a continuous resin layer, which cannot produce an effective chip evacuation space, thereby affecting the sharpness of the sawing, the speed of sawing and the sawing effect.

另,透過電鍍手法製成的鑽石鋸線如圖2所示,其讓超硬磨粒2固定在線芯1上的方法,是將含有鎳的電鍍液中放入超硬磨粒,利用電鍍的方式將鎳鍍在該線芯表面的同時,也令該等超硬磨粒被吸附在線芯表面上、並持續以電鍍包覆方式產生電鍍披覆4,進而達成磨粒固定的作用,該磨粒是粒粒分明、明顯凸出於線芯表面電鍍層,且很小的表面金屬鍍層厚度,令磨粒和線芯的接合力,就足以應付大多數的切割應用,同時磨粒之間具有充分足夠的排屑空間,磨粒可以充分表現凸點切割特性,切割效率、切割壽命可大幅提升,雖然較樹脂燒結法為佳,但在磨粒初期短暫分布附著在線芯上時,其附著力極弱,任何的流體或固體的碰觸,都有可能改變磨粒的分布或附著,但是電鍍過程免不了要有流體和機械式碰觸,所 以只能降低產速,讓磨粒與母線載體有足夠的結合牢固時間,再進入後續補度強化電鍍,因此電鍍速度慢而必需花費較長的時間、以及較高的生產成本等缺點。 In addition, the diamond saw wire made by electroplating method is as shown in FIG. 2, and the method for fixing the super-hard abrasive grain 2 to the wire core 1 is to put the nickel-containing plating solution into the super-hard abrasive grain by using electroplating. In the manner of nickel plating on the surface of the core, the superhard abrasive particles are adsorbed on the surface of the core, and the electroplated coating 4 is continuously formed by electroplating, thereby achieving the function of abrasive grain fixing. The granules are well-defined, clearly protruding from the core surface plating layer, and the surface metal plating thickness is small, so that the bonding force between the abrasive grains and the core is sufficient for most cutting applications, and there is With sufficient enough chip space, the abrasive particles can fully express the bump cutting characteristics, and the cutting efficiency and cutting life can be greatly improved. Although it is better than the resin sintering method, the adhesion is attached when the abrasive grains are temporarily attached to the wire core at the initial stage. Very weak, any fluid or solid touch may change the distribution or adhesion of the abrasive particles, but the plating process inevitably requires fluid and mechanical contact. In order to reduce the production speed, the abrasive particles and the bus bar carrier have sufficient bonding time, and then enter the subsequent reinforcement and strengthen the plating, so the plating speed is slow, it takes a long time, and the production cost is high.

再者,硬焊是以熔融的特殊鎳合金為結合劑和超硬磨粒加以銲接而成的,其中鎳合金中含有鉻,由於鉻原子會和磨粒表面的碳形成碳化鉻,使得鎳合金與磨粒之間的介面能降低,讓磨粒被抓持的力量很大而不易脫落,但其製程因需經過一段時間的高溫硬焊(硬銲溫度約1050℃、持溫約10~30分鐘),才能將磨粒固定在線芯上,但卻也容易造成鋼材線芯發生變質、脆化,進而減低其剛性甚至造成線芯的斷裂,同時其加工的步驟大多都是先將磨粒硬焊於套筒上再焊接於線芯上,因此對於縮小硬焊鑽石鋸線的線徑不易達成。 Furthermore, brazing is performed by welding a special nickel alloy as a binder and superhard abrasive grains, wherein the nickel alloy contains chromium, and the chromium alloy forms chromium carbide and carbon on the surface of the abrasive grain, so that the nickel alloy The interface between the abrasive particles and the abrasive particles can be reduced, so that the force of the abrasive particles being grasped is large and not easy to fall off, but the process requires high-temperature brazing after a period of time (the brazing temperature is about 1050 ° C, and the holding temperature is about 10 to 30). Minutes), the abrasive particles can be fixed on the wire core, but it is also easy to cause the steel wire core to deteriorate and embrittle, thereby reducing its rigidity and even causing the core to break. At the same time, most of the processing steps are first to harden the abrasive grains. Soldering on the sleeve and soldering to the core, it is not easy to reduce the wire diameter of the hard-welded diamond saw wire.

復,亦有將有機樹酯層改為直接塗佈軟性金屬層,再以直接熔焊固定磨粒,惟超硬磨粒仍然埋沒入連續塗層中、或磨粒與磨粒無明顯排屑空間,且塗覆層與線芯底材全部接觸面為低熔點、或軟性金屬,接合特性小於耐磨金屬層也是一項重大的缺點。 In addition, the organic resin layer is also changed to directly coat the soft metal layer, and the abrasive grains are fixed by direct fusion welding, but the super hard abrasive grains are still buried in the continuous coating, or the abrasive grains and the abrasive grains have no obvious chip removal. Space, and the entire contact surface of the coating layer and the core substrate is a low melting point, or a soft metal, and the joint characteristics are smaller than the wear resistant metal layer is also a major disadvantage.

其次,尚有直接於線芯表面鍍覆一層軟性金屬層,再將磨粒壓入該金屬層中,如鍍覆層厚度與磨粒粒徑相近,則與超硬磨粒樹酯切割線有磨粒埋入連續塗覆層相同的缺失,如鍍覆層厚度不足,則因為磨粒屬細微顆粒,因實際尺寸差異,在壓合過程中,容易發生磨粒與批覆層接合不均或不良的現象。 Secondly, there is a layer of soft metal directly coated on the surface of the core, and then the abrasive grains are pressed into the metal layer. If the thickness of the plating layer is similar to the particle size of the abrasive grain, the cutting line with the super-hard abrasive resin has The same missing defects are embedded in the continuous coating layer. If the thickness of the plating layer is insufficient, the abrasive grains are fine particles. Due to the actual size difference, uneven bonding or poor bonding between the abrasive particles and the coating layer is likely to occur during the pressing process. The phenomenon.

緣是,為了改善前述已知將磨粒固定在線芯上的不同方法, 各有其易脫落與排屑空間少、或製程耗費時間、或線芯易受焊固磨粒的高溫而脆化等缺失之問題,本發明即提供一種令表面先行形成一導電表面層的磨粒,以電性或磁性手法使其附著在線芯上後,再施以短時間的加熱或光照,讓磨粒熔焊或固化而暫時性的固定在線芯上,藉此製程所得之磨粒產生之較大的暫時性附著力,讓後續電鍍披覆作業執行過程中,可以大幅降低或甚至避免因電鍍液或機械導送機構的阻力,所造成之磨粒脫落現象的發生,進而使能提昇電鍍披覆作業的產速,而產生出品質與性能優異的鑽石鋸線。 The reason is that in order to improve the aforementioned different methods of fixing the abrasive particles on the wire core, The invention has the problems that the surface is easy to fall off and the chip evacuation space is small, or the process takes time, or the core is susceptible to the high temperature and embrittlement of the welded solid particles, and the present invention provides a grinding machine for forming a conductive surface layer on the surface. After the particles are attached to the wire core by electrical or magnetic means, and then applied for a short time of heating or illumination, the abrasive grains are welded or solidified and temporarily fixed on the wire core, thereby producing the abrasive grains obtained by the process. The large temporary adhesion allows the subsequent plating and coating operation to greatly reduce or even avoid the resistance of the plating solution or the mechanical guiding mechanism, resulting in the occurrence of abrasive falling off, thereby enabling the lifting The speed of electroplating and coating work produces a diamond saw wire with excellent quality and performance.

本發明解決其技術問題所採用的技術方案是:將超硬磨粒透過電鍍披覆使其固定在線芯上,其方法:是先令超硬磨粒表面形成一導電表面層,而透過電性或磁性令磨粒吸附在線芯上,復令磨粒的導電表面層與線芯之間進行暫時性結合,最後施以電鍍披覆固定住磨粒。 The technical solution adopted by the present invention to solve the technical problem is that the super-hard abrasive grains are fixed on the wire core through electroplating, by first forming a conductive surface layer on the surface of the super-hard abrasive grains, and transmitting electricity. Or magnetically causes the abrasive particles to be adsorbed on the wire core, and the conductive surface layer of the abrasive particles is temporarily combined with the wire core, and finally the abrasive grains are fixed by electroplating coating.

上述方案中,磨粒的導電表面層可為銅、銀、錫、鈀、鎳、或低熔點金屬的可被熔焊的表面層,使施以短時間加熱熔焊而令磨粒與線芯之間暫時性的結合在一起。 In the above solution, the conductive surface layer of the abrasive particles may be a surface layer of copper, silver, tin, palladium, nickel, or a low melting point metal that can be welded, so that the welding and the core are applied for a short time. Temporarily combined.

上述方案中,磨粒的表面層為具導電性的可光或熱固化的表面層,使施以光或熱產生固化反應而令磨粒與線芯之間暫時性的結合在一起。 In the above solution, the surface layer of the abrasive particles is a conductive photocurable or heat-curable surface layer, such that light or heat is applied to cause a curing reaction to temporarily bond the abrasive particles to the core.

是以,透過上述本發明的磨粒表面形成的具熔焊性或可光(或熱)固化性的導電表面層,讓磨粒透過電性或磁性手法而吸附在線芯上後,再施以短時間的加熱或光照,令磨粒暫時性的固定在線芯上後,再透過電鍍披覆手法而使磨粒永久性的固定在線芯上,讓電鍍披覆作業過程 中,電鍍液或導送機構讓磨粒脫落的阻力之影響,降至最低、或甚至可以避免,進而可讓電鍍披覆作業的時程能夠縮短、並提高磨粒的附著率。 Therefore, the conductive surface layer having a weldability or a light (or heat) curable property formed on the surface of the abrasive grain of the present invention is applied to the wire core through an electrical or magnetic method, and then applied. Short-time heating or light, so that the abrasive particles are temporarily fixed on the wire core, and then the abrasive particles are permanently fixed on the wire core through the plating coating method, so that the plating coating operation process In the middle, the plating solution or the guiding mechanism minimizes the influence of the resistance of the abrasive particles falling off, or even avoids it, thereby shortening the time course of the plating coating operation and increasing the adhesion rate of the abrasive grains.

1‧‧‧線芯 1‧‧‧core

2‧‧‧磨粒 2‧‧‧ abrasive grain

21‧‧‧導電表面層 21‧‧‧ Conductive surface layer

4‧‧‧電鍍披覆 4‧‧‧Electroplating

下面結合附圖和實施例對本發明進一步說明。 The invention will now be further described with reference to the drawings and embodiments.

圖1是習知樹脂燒結固定磨粒而製成的鑽石鋸線構造示意圖。 Fig. 1 is a schematic view showing the construction of a diamond saw wire prepared by sintering a fixed abrasive grain by a conventional resin.

圖2是習知電鍍固定磨粒而製成的鑽石鋸線構造示意圖。 2 is a schematic view showing the construction of a diamond saw wire prepared by electroplating fixed abrasive grains.

圖3是本發明的固定磨粒在線芯上的方法示意圖。 Fig. 3 is a schematic view showing the method of fixing the abrasive grains on the wire core of the present invention.

請參閱圖3所示,本發明是鑽石鋸線之超硬磨粒固定在線芯上的製造方法,其方法是:先令磨粒2的表面進行一具有導電性的導電表面層21的形成,而該導電表面層21可為銅、銀、錫、鈀、鎳、或低熔點金屬而可進行加熱的熔焊的一表面層、亦或是為具導電性而能施以光照或加熱而使固化的一表面層。 Referring to FIG. 3, the present invention is a method for manufacturing a superabrasive fixed wire core of a diamond saw wire by first forming a conductive conductive surface layer 21 on the surface of the abrasive grain 2. The conductive surface layer 21 may be copper, silver, tin, palladium, nickel, or a low melting point metal, and may be heated to be welded to a surface layer, or may be electrically conductive and capable of being irradiated or heated. A surface layer that is cured.

復,透過電性或磁性的手法,讓磨粒2可以均勻分佈的吸附在線芯1表面上後,再施以短時間的加熱,讓磨粒2的導電表面層21熔焊在線芯1上,或施以光或熱讓導電表面層21可以固化與線芯1結合,即令磨粒2與線芯1之間產生具有足夠後續作業之附著力的暫時性的結合。 Further, through the electrical or magnetic means, the abrasive grains 2 can be uniformly distributed on the surface of the wire core 1 and then heated for a short time, so that the conductive surface layer 21 of the abrasive grains 2 is welded to the wire core 1 Or applying light or heat to allow the conductive surface layer 21 to be cured to bond with the core 1, i.e., to create a temporary bond between the abrasive particles 2 and the core 1 with sufficient adhesion for subsequent operations.

進而,再進行電鍍披覆4的作業,讓磨粒2永久性的固定在線芯1上,而完成鑽石鋸線製作的作業。 Further, the operation of plating the coating 4 is performed, and the abrasive grains 2 are permanently fixed to the core 1 to complete the operation of the diamond sawing.

因此,透過上述本發明之先令磨粒2表面形成一導電表面層21,除了讓磨粒得以吸附在線芯1上外,更提供可與線芯1之間進行暫時性的結合作用,且該結合磨粒2與線芯1之一的熔焊方式,由於加熱時間短, 所以不會對線芯1造成脆化或變質的影響,亦或結合磨粒2與線芯1之二的光固化方式,同樣也不會對線芯1材質有任何不良影響,不但可以保持線芯原本優異的強度以外,更提供磨粒2以較好的附著力,暫時性的固定在線芯1上,目的是讓後續的電鍍披覆4作業過程中,令暫時附著有磨粒2的線芯1,在電鍍液內移送過程中的流體阻力作用、以及機械機構導送過程中的機械阻力作用,都可以透過前述磨粒2以熱熔焊、或光(或熱)固化方式所得到的較強附著力道,令磨粒2不易發生脫落、或甚至避免脫落,讓磨粒2在線芯1可以保持均勻的分佈、以及令電鍍披覆作業的產速可以大幅提升、進而增加產能,最後製成具高附著力且明顯凸出磨粒2、以及磨粒2與磨粒2之間具有充足排屑空間的鑽石鋸線。 Therefore, a conductive surface layer 21 is formed on the surface of the abrasive grain 2 of the present invention by the above-mentioned invention, and in addition to allowing the abrasive particles to be adsorbed on the core 1, a temporary bonding action with the core 1 is provided, and In combination with the welding method of the abrasive grain 2 and one of the cores 1, since the heating time is short, Therefore, it will not cause embrittlement or deterioration of the core 1, or combine the light curing method of the abrasive grain 2 and the core 1 and also has no adverse effect on the core 1 material, and the wire can be maintained. In addition to the excellent strength of the core, the abrasive grain 2 is further provided with a good adhesion, and is temporarily fixed on the wire core 1 for the purpose of allowing the wire to be temporarily adhered during the subsequent plating and coating operation. The core 1, the fluid resistance during the transfer in the plating solution, and the mechanical resistance during the mechanical mechanism transfer can be obtained by heat fusion welding or light (or heat) curing of the abrasive particles 2 Strong adhesion, so that the abrasive particles 2 are not easy to fall off, or even avoid falling off, so that the abrasive core 2 can maintain a uniform distribution of the core 1, and the production speed of the plating coating operation can be greatly increased, thereby increasing the production capacity, and finally A diamond saw wire having a high adhesion and clearly protruding abrasive grains 2, and a sufficient chip evacuation space between the abrasive grains 2 and the abrasive grains 2.

1‧‧‧線芯 1‧‧‧core

2‧‧‧磨粒 2‧‧‧ abrasive grain

21‧‧‧導電表面層 21‧‧‧ Conductive surface layer

4‧‧‧電鍍披覆 4‧‧‧Electroplating

Claims (3)

一種鑽石鋸線之磨粒的固定方法,是將超硬磨粒透過電鍍披覆而使其固定在線芯上,其方法為:先令磨粒表面形成一導電表面層,使透過電性或磁性而使磨粒吸附在線芯上,再令磨粒的導電表面層與線芯進行暫時性結合,最後再施以電鍍披覆固定住磨粒。 A method for fixing abrasive grains of a diamond saw wire is to fix the super-hard abrasive grains on the wire core by electroplating, by first forming a conductive surface layer on the surface of the abrasive grains to make the electrical or magnetic properties transparent. The abrasive particles are adsorbed on the wire core, and the conductive surface layer of the abrasive particles is temporarily combined with the wire core, and finally the abrasive grains are fixed by electroplating coating. 依請求項1所述的鑽石鋸線之磨粒的固定方法,其中磨粒的導電表面層可為銅、銀、錫、鈀、鎳、或低熔點金屬,使施以短時間的加熱熔焊而令磨粒與線芯之間暫時性的結合在一起。 The method for fixing abrasive grains of a diamond saw wire according to claim 1, wherein the conductive surface layer of the abrasive particles is copper, silver, tin, palladium, nickel, or a low melting point metal, so that a short time heating welding is performed. The temporary combination of the abrasive particles and the core is combined. 依請求項1所述的鑽石鋸線之磨粒的固定方法,其中磨粒的導電表面層可為具導電性之導電UV膠、導電銀膠,使施以光或熱的照射產生固化反應,而令磨粒與線芯之間暫時性的結合在一起。 The method for fixing abrasive grains of a diamond saw wire according to claim 1, wherein the conductive surface layer of the abrasive particles is a conductive conductive UV adhesive or a conductive silver paste, which causes a curing reaction by applying light or heat. The abrasive particles are temporarily combined with the core.
TW104142618A 2015-12-18 2015-12-18 Fastening method for abrasive particle of diamond saw wire further shortens time of electroplating and cladding operation and enhances adhesion of abrasive particles TW201722588A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI634976B (en) * 2017-11-22 2018-09-11 財團法人石材暨資源產業研究發展中心 Diamond cable saw for cutting stone and preparation method thereof
TWI655044B (en) * 2018-03-14 2019-04-01 國立臺北科技大學 Abrasive wire and method and system for forming abrasive wire

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI634976B (en) * 2017-11-22 2018-09-11 財團法人石材暨資源產業研究發展中心 Diamond cable saw for cutting stone and preparation method thereof
TWI655044B (en) * 2018-03-14 2019-04-01 國立臺北科技大學 Abrasive wire and method and system for forming abrasive wire

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