TW201910524A - Copper foil for flexible printed circuit board, copper clad laminate using the same, flexible printed circuit board, and electronic equipment - Google Patents

Copper foil for flexible printed circuit board, copper clad laminate using the same, flexible printed circuit board, and electronic equipment Download PDF

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TW201910524A
TW201910524A TW107121236A TW107121236A TW201910524A TW 201910524 A TW201910524 A TW 201910524A TW 107121236 A TW107121236 A TW 107121236A TW 107121236 A TW107121236 A TW 107121236A TW 201910524 A TW201910524 A TW 201910524A
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mass
copper foil
printed circuit
flexible printed
circuit board
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TWI731247B (en
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坂東慎介
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日商Jx金屬股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • C22C9/04Alloys based on copper with zinc as the next major constituent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • C22C9/02Alloys based on copper with tin as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • C22C9/06Alloys based on copper with nickel or cobalt as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/08Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of copper or alloys based thereon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • H01B1/026Alloys based on copper
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0335Layered conductors or foils
    • H05K2201/0355Metal foils

Abstract

To provide a copper foil for a flexible printed circuit board (FPCB), which is excellent in both bendability and softening resistance, a copper-clad laminate using the same, a flexible printed circuit board and an electronic device. The copper foil for FPCB is a copper foil composed of 99.0% by mass or more of Cu and the remainder being unavoidable impurities, and each of the following elements is contained alone or in combination of two or more elements: 0.0005 mass% or more and 0.03 mass% or less of P, 0.0005 mass% or more and 0.05 mass% or less of Ag, 0.0005 mass% or more and 0.14 mass% or less of Sb, 0.0005 mass% or more and 0.163 mass% or less of Sn, 0.0005 mass% or more and 0.288 mass% or less of Ni, 0.0005 mass% or more and 0.058% by mass or less of Be, 0.0005 mass% or more and 0.812% by mass or less of Zn, 0.0005 mass% or more and 0.429 mass% or less of In, and 0.0005 mass% or more and 0.149 mass% or less of Mg; the semi-softening temperature of the copper foil is 160 to 300 DEG C, when the intensity of the (200) plane obtained by the X-ray diffraction of the rolling surface is I, and the intensity obtained by the X-ray diffraction of the fine powder copper is I0, then (I/I0) is 3.0 or less.

Description

可撓性印刷基板用銅箔、使用其之覆銅積層體、可撓性印刷基板及電子機器    Copper foil for flexible printed circuit board, copper-clad laminate using the same, flexible printed circuit board, and electronic device   

本發明係關於一種適用於可撓性印刷基板等配線部件之銅箔、使用其之覆銅積層體、可撓性配線板及電子機器。 The present invention relates to a copper foil suitable for wiring members such as a flexible printed circuit board, a copper-clad laminate, a flexible wiring board, and an electronic device using the same.

可撓性印刷基板(可撓性配線板,以下稱為「FPC」)因具有可撓性,而廣泛使用於電子電路之彎折部、可動部。例如,於HDD、DVD及CD-ROM等磁碟相關機器之可動部、摺疊式攜帶電話機之彎折部等使用FPC。 Flexible printed circuit boards (flexible wiring boards, hereinafter referred to as "FPCs") are widely used in bending and moving parts of electronic circuits because of their flexibility. For example, FPCs are used in the movable parts of disk-related equipment such as HDDs, DVDs, and CD-ROMs, and in the bent parts of folding mobile phones.

FPC係對積層有銅箔與樹脂之Copper Clad Laminate(覆銅積層體,以下稱為CCL)進行蝕刻而形成配線,並於其上被覆稱為覆蓋層之樹脂層。於積層覆蓋層之前階段,作為用於提升銅箔與覆蓋層之密接性的表面改質步驟之一環,進行銅箔表面之蝕刻。又,為減小銅箔之厚度以提升彎曲性,亦有進行減薄蝕刻之情形。 FPC etches Copper Clad Laminate (copper-clad laminate, hereinafter referred to as CCL) laminated with copper foil and resin to form wiring, and covers a resin layer called a cover layer thereon. At the stage before laminating the cover layer, as a part of the surface modification step for improving the adhesion between the copper foil and the cover layer, the surface of the copper foil is etched. In addition, in order to reduce the thickness of the copper foil to improve the bendability, thinning etching may be performed.

然而,隨著電子機器之小型、薄型、高性能化,要求於該等機器之內部高密度地安裝FPC,但為進行高密度安裝,便需要將FPC彎折收納於小型化之機器之內部,即需要高彎折性。 However, with the miniaturization, thinness, and high performance of electronic devices, it is required to install FPCs inside these devices at high density. However, for high-density installation, FPCs need to be folded and housed inside miniaturized devices. That is, high bendability is required.

另一方面,開發出一種以IPC彎曲性為代表之高循環彎曲性得到改善的銅箔(專利文獻1)。 On the other hand, a copper foil with improved high cycle bendability typified by IPC bendability has been developed (Patent Document 1).

然而,若將經壓延之線圈於室溫長時間保管,則有時因壓延所蓄積之塑性應變會增大,半軟化溫度會降低,發生軟化。若使用已軟化之銅箔製造FPC,則會產生銅箔變形等問題,FPC之製造性顯著降低。因此,開發出一種提升壓延銅箔之彎曲性,同時提高半軟化溫度以抑制保管過程中之軟化的銅箔(專利文獻2)。 However, if the rolled coil is stored at room temperature for a long time, the plastic strain accumulated by the rolling may increase, and the semi-softening temperature may decrease, resulting in softening. If a softened copper foil is used to manufacture the FPC, problems such as deformation of the copper foil may occur, and the manufacturability of the FPC is significantly reduced. Therefore, a copper foil has been developed that improves the bendability of the rolled copper foil and increases the semi-softening temperature to suppress softening during storage (Patent Document 2).

[先前技術文獻] [Prior technical literature]

[專利文獻] [Patent Literature]

[專利文獻1]日本專利第3009383號公報 [Patent Document 1] Japanese Patent No. 3009383

[專利文獻2]日本特開2000-192172號公報 [Patent Document 2] Japanese Patent Laid-Open No. 2000-192172

然而,專利文獻2記載之銅箔之半軟化溫度為120~150℃,於東南亞等高溫環境下之保管時有時會軟化。 However, the semi-softening temperature of the copper foil described in Patent Document 2 is 120 to 150 ° C, and it may soften when stored in a high-temperature environment such as Southeast Asia.

本發明係為了解決上述課題而完成者,其目的在於提供一種彎折性及耐軟化特性均優異之可撓性印刷基板用銅箔、使用其之覆銅積層體、可撓性印刷基板及電子機器。 The present invention has been made in order to solve the above-mentioned problems, and an object thereof is to provide a copper foil for a flexible printed circuit board having excellent bendability and softening resistance, a copper-clad laminate using the same, a flexible printed circuit board, and electronics. machine.

本發明人等經各種研究後,結果發現使銅箔含有特定之添加元素,且使最後冷軋前之結晶粒徑微細化,藉此由於會使因壓延所蓄積之應變彼此牢固地相互纏繞,故可使半軟化溫度上升,保管過程中之軟化得到抑制,且使銅箔之彎曲性提升。 As a result of various studies, the present inventors have found that the copper foil contains specific additive elements and that the crystal grain size before the final cold rolling is made finer, so that the strains accumulated by rolling can be firmly entangled with each other. Therefore, the semi-softening temperature can be increased, the softening during storage can be suppressed, and the bendability of the copper foil can be improved.

即,本發明之可撓性印刷基板用銅箔係由99.0質量%以上之 Cu、剩餘部分為不可避免的雜質構成之銅箔,將0.0005質量%以上0.03質量%以下之P、0.0005~0.05質量%以下之Ag、0.0005質量%以上0.14質量%以下之Sb、0.0005質量%以上0.163質量%以下之Sn、0.0005質量%以上0.288質量%以下之Ni、0.0005質量%以上0.058質量%以下之Be、0.0005質量%以上0.812質量%以下之Zn、0.0005質量%以上0.429質量%以下之In及0.0005質量%以上0.149質量%以下之Mg分別單獨含有或含有2種以上,半軟化溫度為160~300℃,當將由壓延面之X射線繞射求出之(200)面之強度設為I,將由微粉末銅之X射線繞射求出之強度設為I0時,(I/I0)為3.0以下。 That is, the copper foil for a flexible printed circuit board of the present invention is a copper foil consisting of 99.0% by mass or more of Cu and the remainder being unavoidable impurities. P is 0.0005 to 0.05% by mass of 0.0005% by mass to 0.03% by mass. Ag below 0.005% by mass, Sb below 0.0005% by mass and 0.14% by mass, Sn by 0.0005% by mass and 0.163% by mass, Ni by 0.0005% by mass and 0.288% by mass, Be by 0.0005% by mass and 0.058% by mass, Be, 0.0005 Zn above 0.812% by mass, Zn below 0.0005% by mass and 0.429% by mass, and Mg above 0.0005% by mass and 0.149% by mass are contained individually or in combination of two or more kinds. The semi-softening temperature is 160 ~ 300 ° C. When the intensity of the (200) plane obtained from the X-ray diffraction of the rolled surface is set to I, and the intensity calculated from the X-ray diffraction of the fine powder copper is set to I 0 , (I / I 0 ) is 3.0 or less.

於本發明之可撓性印刷基板用銅箔,當由以320℃退火30分鐘後之壓延面之X射線繞射求出之(200)面之強度設為I,將由微粉末銅之X射線繞射求出之強度設為I0時,(I/I0)較佳為3.0以下。 In the copper foil for a flexible printed substrate of the present invention, when the intensity of the (200) plane obtained from the X-ray diffraction of the rolled surface after annealing at 320 ° C for 30 minutes is set to I, the X-rays of finely powdered copper are used. When the intensity obtained by the diffraction is set to I 0 , (I / I 0 ) is preferably 3.0 or less.

本發明之覆銅積層體係將上述可撓性印刷基板用銅箔及樹脂層積層而成。 The copper-clad laminated system of the present invention is formed by laminating the above-mentioned copper foil for a flexible printed circuit board and a resin.

本發明之可撓性印刷基板係於上述覆銅積層體中之該銅箔形成電路而成。 The flexible printed circuit board of the present invention is formed by forming a circuit from the copper foil in the copper-clad laminate.

本發明之電子機器係使用上述可撓性印刷基板而成。 The electronic device of the present invention is formed using the flexible printed circuit board.

根據本發明,可獲得彎折性及耐軟化特性均優異之可撓性印刷基板用銅箔。 According to the present invention, it is possible to obtain a copper foil for a flexible printed circuit board which is excellent in bending properties and softening resistance.

以下,對本發明之銅箔之實施形態進行說明。再者,於本發明中只要未特別說明,則%係表示質量%。 Hereinafter, embodiments of the copper foil of the present invention will be described. In the present invention, unless otherwise specified,% means mass%.

<組成> <Composition>

本發明之銅箔係由99.0質量%以上之Cu、剩餘部分為不可避免的雜質構成,將0.0005質量%以上0.03質量%以下之P、0.0005~0.05質量%以下之Ag、0.0005質量%以上0.14質量%以下之Sb、0.0005質量%以上0.163質量%以下之Sn、0.0005質量%以上0.288質量%以下之Ni、0.0005質量%以上0.058質量%以下之Be、0.0005質量%以上0.812質量%以下之Zn、0.0005質量%以上0.429質量%以下之In及0.0005質量%以上0.149質量%以下之Mg分別單獨含有或含有2種以上。 The copper foil of the present invention is composed of 99.0 mass% or more of Cu, and the remainder is unavoidable impurities. P is 0.0005 mass% or more and 0.03 mass% or less, P, 0.0005 to 0.05 mass% or less, Ag, 0.0005 mass% or more, and 0.14 mass. % Sb or less, 0.0005 mass% or more and 0.163 mass% or less Sn, 0.0005 mass% or more and 0.288 mass% or less Ni, 0.0005 mass% or more and 0.058 mass% or less Be, 0.0005 mass% or more and 0.812 mass% or less Zn, 0.0005 Each of In is 0.4 mass% or more and 0.429 mass% or less, and Mg of 0.0005 mass% or more and 0.149 mass% or less is contained alone or in two or more kinds.

P、Ag、Sb、Sn、Ni、Be、Zn、In及Mg(以下稱為添加元素)於冷軋時由於會增加差排相互纏繞之頻度,故而不僅可容易地提高再結晶後之拉伸強度,且可使銅箔之再結晶溫度上升而提高半軟化溫度。 P, Ag, Sb, Sn, Ni, Be, Zn, In, and Mg (hereinafter referred to as additive elements) will increase the frequency of differential intertwining during cold rolling, so it can not only easily increase the stretch after recrystallization Strength, and can increase the recrystallization temperature of copper foil and increase the semi-softening temperature.

若P超過0.03質量%,Ag超過0.05質量%,Sb超過0.14質量%,Sn超過0.163質量%,Ni超過0.288質量%,Be超過0.058質量%,Zn超過0.812質量%,In超過0.429質量%或者Mg超過0.149質量%,則導電率會下降,而不適合作為可撓性基板用銅箔。 If P exceeds 0.03% by mass, Ag exceeds 0.05% by mass, Sb exceeds 0.14% by mass, Sn exceeds 0.163% by mass, Ni exceeds 0.288% by mass, Be exceeds 0.058% by mass, Zn exceeds 0.812% by mass, and In exceeds 0.429% by mass or Mg When it exceeds 0.149% by mass, the electrical conductivity is decreased, which is not suitable as a copper foil for a flexible substrate.

P、Sb、Sn、Ni、Be、Zn、In及Mg之含量於各元素均小於0.0005質量%時,工業上難以使半軟化溫度上升,故而將各元素之含量之下限設為0.0005質量%。 When the content of P, Sb, Sn, Ni, Be, Zn, In, and Mg is less than 0.0005 mass% for each element, it is industrially difficult to increase the semi-softening temperature, so the lower limit of the content of each element is set to 0.0005 mass%.

又,若於冷軋時之初期僅進行一次再結晶退火,以後不再進行再結晶退火(例如按照冷軋、再結晶退火、去除氧化銹皮、冷軋之順序進行),則藉由冷軋可增加差排之相互纏繞,大量導入加工應變,而使軟化溫度上升,進而200方位之(I/I0)變小,因而可進一步提高彎折性。 In addition, if recrystallization annealing is performed only once at the beginning of cold rolling, and then recrystallization annealing is not performed (for example, in the order of cold rolling, recrystallization annealing, scale removal, and cold rolling), cold rolling is used. The intertwining of the differential rows can be increased, and a large amount of processing strain is introduced, so that the softening temperature is increased, and the (I / I 0 ) of the 200 orientation is reduced, so that the bendability can be further improved.

又,為了使銅箔之軟化溫度上升,且提高彎折性,較佳將最後冷軋前(於重複退火與壓延之步驟整體之中,在最後退火後進行之精加工壓延前)之結晶粒徑設為5~30μm。 In addition, in order to increase the softening temperature of the copper foil and improve the bendability, it is preferable to crystallize the grains before the final cold rolling (in the entire process of repeating annealing and rolling, and before the finishing rolling after the final annealing). The diameter is set to 5 to 30 μm.

於最後冷軋前之結晶粒徑大於30μm之情形時,加工時之差排相互纏繞之頻度變小,應變之蓄積變少,故而有軟化溫度下降,且200方位之(I/I0)變大而彎折性下降之傾向。於最後冷軋前之結晶粒徑小於5μm之情形時,僅加工時之差排之相互纏繞會飽和,壓延負載變高,降低軟化溫度之效果飽和。因此,將最後冷軋前之結晶粒徑之下限設為5μm。 When the crystal grain size before the final cold rolling is larger than 30 μm, the frequency of the differential rows intertwined during processing becomes smaller, and the accumulation of strain becomes smaller, so the softening temperature decreases, and the (I / I 0 ) of the 200 orientation changes. Large and tend to decrease the bendability. In the case where the crystal grain size before the final cold rolling is less than 5 μm, only the intertwining of the differential rows during processing will be saturated, the rolling load becomes high, and the effect of reducing the softening temperature is saturated. Therefore, the lower limit of the crystal grain size before the last cold rolling is set to 5 μm.

如上述般,藉由使銅箔含有上述添加元素、且將最後冷軋前之結晶粒徑微細化,可增加冷軋時之差排相互纏繞之頻度,使軟化溫度上升,且可減小再結晶後之200方位之(I/I0)而提高彎折性。此處,於增加冷軋中之差排之相互纏繞而大量導入加工應變之情形時,不易產生200方位之優先成長,200方位之I/I0變小。200方位之I/I0越小,200方位與其他方位之彎折時之塑性變形舉動之差引起之龜裂越不易產生,故而彎折性提高。 As mentioned above, by making the copper foil contain the above-mentioned additive elements and miniaturizing the crystal grain size before the last cold rolling, the frequency of the differential rows intertwined during cold rolling can be increased, the softening temperature can be increased, and the 200% of the orientation (I / I 0 ) after crystallization improves the bendability. Here, in the case of increasing the intertwining of the differential rows in cold rolling and introducing a large amount of processing strain, it is not easy to cause the preferential growth of the 200 orientation, and the I / I 0 of the 200 orientation becomes small. The smaller the I / I 0 of the 200 orientation, the less likely it is that cracks caused by the difference in plastic deformation behavior between the 200 orientation and other orientations are bent, so the bendability is improved.

因此,於本發明中,當將由壓延面之X射線繞射求出之(200)面之強度設為I,將由微粉末銅之X射線繞射求出之強度設為I0時,將(I/I0)規定為3.0以下。 Therefore, in the present invention, when the intensity of the (200) plane obtained from the X-ray diffraction of the rolled surface is set to I, and the intensity obtained from the X-ray diffraction of the fine powder copper is set to I 0 , ( I / I 0 ) is specified to be 3.0 or less.

本發明之銅箔可藉由使例如依據JIS-H3100(C1100)規格之精銅(TPC)或JIS-H3100(C1020)之無氧銅(OFC)含有上述添加元素而獲得。 The copper foil of the present invention can be obtained by containing, for example, refined copper (TPC) according to JIS-H3100 (C1100) standard or oxygen-free copper (OFC) of JIS-H3100 (C1020) containing the above-mentioned additive element.

<半軟化溫度> <Semi-softening temperature>

銅箔之半軟化溫度為160~300℃。若半軟化溫度未達160℃,則有於高溫環境下之保管時發生軟化之虞。若半軟化溫度超過300℃,則於FPC之製造步驟中不會再結晶,故而彎折性變差。 The semi-softening temperature of copper foil is 160 ~ 300 ℃. If the semi-softening temperature does not reach 160 ° C, there is a possibility that softening may occur during storage in a high-temperature environment. If the semi-softening temperature exceeds 300 ° C, recrystallization will not occur in the manufacturing steps of FPC, so the bendability will be deteriorated.

半軟化溫度之測量係將銅箔於非氧化性環境中以特定溫度進行30分鐘退火後進行拉伸試驗,求出相對於熱處理條件之強度(拉伸強度)。將退火後之強度成為壓延完成(退火前)之強度與完全軟化(於400℃退火30分鐘)後之狀態之強度之中間值的退火溫度設為半軟化溫度。若半軟化溫度為160~300℃之範圍,則判斷具有合適的軟化特性。 The measurement of the semi-softening temperature is performed by subjecting a copper foil to annealing at a specific temperature for 30 minutes in a non-oxidizing environment, and then performing a tensile test to determine the strength (tensile strength) relative to the heat treatment conditions. The annealing temperature is set to a semi-softening temperature which is an intermediate value between the strength after the rolling is completed (before annealing) and the strength after being completely softened (annealed at 400 ° C. for 30 minutes). If the semi-softening temperature is in the range of 160 to 300 ° C, it is judged that it has appropriate softening characteristics.

<I/I0> <I / I 0 >

當將由壓延面之X射線繞射求出之(200)面之強度設為I,將由微粉末銅之X射線繞射求出之強度設為I0時,(I/I0)為3.0以下。 When the intensity of the (200) plane obtained from the X-ray diffraction of the rolled surface is set to I and the intensity obtained from the X-ray diffraction of the fine powder copper is set to I 0 , (I / I 0 ) is 3.0 or less .

如上述般,再結晶後之200方位之(I/I0)越小,越能提高彎折性,故而將(I/I0)規定為3.0以下。 As described above, the smaller the (I / I 0 ) of the 200 orientation after recrystallization, the more the bendability can be improved. Therefore, (I / I 0 ) is set to 3.0 or less.

<於320℃ 30分鐘之熱處理> <Heat treatment at 320 ° C for 30 minutes>

本案之請求項1之銅箔係規定「成為與樹脂積層後之覆銅積層體後,經過樹脂之硬化熱處理後之狀態的銅箔」。因此,即便為未對銅箔進行320℃ 30分鐘之熱處理之狀態,亦表現出經過與此同等之樹脂之硬化熱處理後的200方位之(I/I0)。 The copper foil in claim 1 of the present case stipulates "a copper foil in a state of being a copper-clad laminate after being laminated with a resin, and being subjected to a hardening heat treatment of the resin". Therefore, even if the copper foil is not heat-treated at 320 ° C. for 30 minutes, it shows the 200-direction (I / I 0 ) after the heat treatment of the equivalent resin.

本案之請求項2之銅箔係規定「與樹脂積層前之銅箔的狀態」。並且,於320℃ 30分鐘之熱處理係於CCL之積層時模擬將樹脂硬化熱處理之溫度條件者。因此,於請求項2中,係藉由規定「於非氧化性環境以320℃進行30分鐘熱處理後之銅箔其200方位的(I/I0)」,再現「成為與樹脂積層後之覆銅積層體後,經過樹脂之硬化熱處理後之狀態的銅箔」。再者,該熱處理之升溫速度處於100~300℃/min之間即可。 The copper foil of claim 2 of the present case provides "the state of the copper foil before lamination with resin". In addition, the heat treatment at 320 ° C for 30 minutes is a simulation of the temperature conditions of the hardening heat treatment of the resin when the CCL is laminated. Therefore, in claim 2, the "I / I 0 of the 200 orientation of the copper foil after heat treatment at 320 ° C for 30 minutes in a non-oxidizing environment" was specified to reproduce "the coating after being laminated with the resin A copper foil in the state after the copper laminate is cured and heat-treated with resin. " Moreover, the heating rate of the heat treatment may be between 100 and 300 ° C / min.

本發明之銅箔例如可用如下方式製造。首先,向銅鑄錠添加特定之元素並熔解、鑄造之後,進行熱軋,並進行冷軋及退火,於冷軋時之初期進行再結晶退火,且進行上述之最後冷軋,藉此可製造箔。 The copper foil of this invention can be manufactured as follows, for example. First, a specific element is added to a copper ingot, and after melting and casting, hot rolling, cold rolling, and annealing are performed, recrystallization annealing is performed at the initial stage of cold rolling, and the last cold rolling is performed. Foil.

<覆銅積層體及可撓性印刷基板> <Copper-clad laminate and flexible printed circuit board>

又,於本發明之銅箔(1)流延樹脂前驅物(例如被稱為清漆之聚醯亞胺前驅物)並加熱使其聚合、(2)使用與基底膜相同種類之熱塑性接著劑將基底膜層壓於本發明之銅箔,藉此可獲得由銅箔與樹脂基材之2層構成的覆銅積層體(CCL)。又,於本發明之銅箔層壓塗佈有接著劑之基底膜,藉此可獲得由銅箔、樹脂基材及其間之接著層之3層構成的覆銅積層體(CCL)。於製造該等CCL時對銅箔進行熱處理而再結晶化。 The copper foil of the present invention (1) is cast with a resin precursor (for example, a polyimide precursor called varnish) and heated to polymerize it. (2) a thermoplastic adhesive of the same kind as the base film is used The base film is laminated on the copper foil of the present invention, whereby a copper-clad laminate (CCL) composed of two layers of a copper foil and a resin substrate can be obtained. Furthermore, a base film coated with an adhesive is laminated on the copper foil of the present invention, whereby a copper-clad laminate (CCL) composed of three layers of a copper foil, a resin substrate, and an adhesive layer therebetween can be obtained. When these CCLs are manufactured, the copper foil is heat-treated and recrystallized.

使用光蝕刻法(photolithography)技術將電路形成於該等,並視需要對電路實施鍍敷,層壓覆蓋膜,藉此可獲得可撓性印刷基板(可撓性配線板)。 A photolithography technique is used to form a circuit in these, and the circuit is plated as necessary, and a cover film is laminated to obtain a flexible printed circuit board (flexible wiring board).

因此,本發明之覆銅積層體係將銅箔及樹脂層積層而成。又,本發明之可撓性印刷基板係於覆銅積層體之銅箔形成電路而成。 Therefore, the copper-clad laminated system of the present invention is formed by laminating copper foil and resin. The flexible printed circuit board of the present invention is formed by forming a circuit on a copper foil of a copper-clad laminate.

作為樹脂層,可列舉PET(聚對酞酸乙二酯)、PI(聚醯亞胺)、LCP(液晶聚合物)、PEN(聚萘二甲酸乙二酯(polyethylene naphthalate)),但並不限定於此。又,作為樹脂層,亦可使用該等之樹脂膜。 Examples of the resin layer include PET (polyethylene terephthalate), PI (polyimide), LCP (liquid crystal polymer), and PEN (polyethylene naphthalate). Limited to this. As the resin layer, such a resin film may be used.

作為樹脂層與銅箔之積層方法,亦可於銅箔表面塗佈作為樹脂層之材料並進行加熱成膜。又,亦可使用樹脂膜作為樹脂層,於樹脂膜與銅箔之間亦可使用以下之接著劑,亦可不使用接著劑而將樹脂膜熱壓接於銅箔。惟,根據不對樹脂膜施加多餘熱之方面而言,較佳使用接著劑。 As a method for laminating a resin layer and a copper foil, the surface of the copper foil may be coated with a material as a resin layer and heated to form a film. Further, a resin film may be used as the resin layer, and the following adhesive may be used between the resin film and the copper foil, or the resin film may be thermally compression-bonded to the copper foil without using an adhesive. However, it is preferable to use an adhesive from the point that unnecessary heat is not applied to the resin film.

於使用膜作為樹脂層之情形時,可將該膜經由接著劑層而積層於銅箔。於該情形時,較佳使用與膜相同成分之接著劑。例如,於使用聚醯亞胺膜作為樹脂層之情形時,較佳為接著劑層亦使用聚醯亞胺系接著劑。再者,此處所謂之聚醯亞胺接著劑係指含有醯亞胺鍵之接著劑,亦包含聚醚醯亞胺等。 When using a film as a resin layer, this film can be laminated | stacked on a copper foil through an adhesive layer. In this case, it is preferable to use an adhesive having the same composition as the film. For example, in the case where a polyimide film is used as the resin layer, it is preferable to use a polyimide-based adhesive in the adhesive layer. The polyfluorene imine adhesive here refers to an adhesive containing a fluorene imine bond, and also includes polyether fluorene imine and the like.

再者,本發明並不限定於上述實施形態。又,只要實現本發明 之作用效果,上述實施形態之銅合金亦可含有其他成分。又,亦可為電解銅箔。 The present invention is not limited to the embodiments described above. In addition, as long as the effect of the present invention is achieved, the copper alloy of the above embodiment may contain other components. Moreover, it may be electrolytic copper foil.

例如,亦可於銅箔表面實施粗化處理、防銹處理、耐熱處理或該等之組合之表面處理。 For example, the surface of the copper foil may be subjected to roughening treatment, rust prevention treatment, heat treatment, or a combination of these.

[實施例] [Example]

其次,舉實施例對本發明更詳細地進行說明,但本發明並不限定於該等實施例。向純度99.0%以上之電解銅中分別添加表1、表2所示之添加元素,於Ar環境中鑄造而獲得鑄塊。鑄塊中之氧含量未達15ppm。將該鑄塊以900℃均質化退火後,進行熱軋,然後進行冷軋,接著進行一次再結晶退火。再結晶退火之條件係作預先調查後調整為最後冷軋前之結晶粒徑變成5~30μm。然後,將表面產生之氧化銹皮去除,以表1、表2所示之加工度η進行最後冷軋獲得目標之最後厚度的銅箔。於非氧化性環境對獲得之銅箔施加320℃×30分鐘之熱處理,獲得銅箔樣品。 Next, the present invention will be described in more detail with examples, but the present invention is not limited to these examples. Adding the additional elements shown in Tables 1 and 2 to electrolytic copper with a purity of 99.0% or more, and casting in an Ar environment to obtain an ingot. The oxygen content in the ingot did not reach 15 ppm. This ingot was homogenized and annealed at 900 ° C, followed by hot rolling, cold rolling, and then recrystallization annealing. The recrystallization annealing conditions are adjusted in advance so that the crystal grain size before final cold rolling becomes 5 to 30 μm. Then, the oxidized scale on the surface was removed, and the final cold-rolling was performed at the processing degree η shown in Tables 1 and 2 to obtain a copper foil having a target final thickness. The obtained copper foil was heat-treated at 320 ° C for 30 minutes in a non-oxidizing environment to obtain a copper foil sample.

<評估> <Evaluation>

1.最後冷軋前之結晶粒徑 1. Crystal grain size before final cold rolling

使用SEM(Scanning Electron Microscope)觀察上述熱處理前且最後冷軋前(最後退火後)之各樣品,基於JIS H 0501求出平均粒徑。其中,雙晶視作不同之晶粒進行測量。使測量區域為與壓延方向平行之剖面的400μm×400μm。 Each sample was observed with a SEM (Scanning Electron Microscope) before the heat treatment and before the last cold rolling (after the last annealing), and the average particle diameter was determined based on JIS H 0501. Among them, twin crystals are regarded as different crystal grains for measurement. The measurement area was 400 μm × 400 μm in a cross section parallel to the rolling direction.

2.半軟化溫度 2.Semi-softening temperature

半軟化溫度之測量係如上述般進行。 The measurement of the semi-softening temperature is performed as described above.

3.200方位之I/I0 3.200 I / I 0

針對上述熱處理後之各銅箔樣品,求出由壓延面之X射線繞射求出之(200)面強度的積分值(I)。將該值除以預先測量之微粉末銅之(200)面強度的積分值(I0),計算I/I0之值。 For each copper foil sample after the heat treatment, an integrated value (I) of the (200) plane strength obtained from the X-ray diffraction of the rolled surface was obtained. Divide this value by the integral value (I 0 ) of the (200) plane strength of the finely powdered copper measured in advance to calculate the value of I / I 0 .

4.導電率 4.Conductivity

針對上述熱處理後之各銅箔樣品,基於JIS H 0505利用4端子法測量25℃之導電率(%IACS)。 For each copper foil sample after the heat treatment described above, the electrical conductivity (% IACS) at 25 ° C. was measured by the 4-terminal method based on JIS H 0505.

導電率若大於75%IACS,則導電性良好。 When the electrical conductivity is greater than 75% IACS, the electrical conductivity is good.

5.銅箔之彎折性(MIT耐折性) 5.Bendability of copper foil (MIT resistance)

針對上述熱處理後之各銅箔樣品,基於JIS P 8115測量MIT耐折次數(往返彎折次數)。其中,彎折夾具之R為0.38mm,負載為250g。 For each copper foil sample after the heat treatment, the number of times of MIT resistance (number of round trips) was measured based on JIS P 8115. Among them, the bending fixture has an R of 0.38 mm and a load of 250 g.

MIT耐折次數若為75次以上,則銅箔之彎折性為良好。 If the MIT folding resistance number is 75 or more, the bendability of the copper foil is good.

將獲得之結果示於表1、表2。 The obtained results are shown in Tables 1 and 2.

如從表1、表2清楚可知,於以特定量之範圍內含有特定添加元素,並經以最後冷軋前之結晶粒徑成為5~30μm的方式再結晶退火後之各實施例之情形時,半軟化溫度較高,320℃×30min熱處理後之200方位的I/I0為3以下,彎折性優異。 As is clear from Tables 1 and 2, when each specific example contains specific additive elements in a specific amount range and is recrystallized and annealed so that the crystal grain size before final cold rolling becomes 5 to 30 μm, The semi-softening temperature is high, and the I / I 0 at the 200 orientation of 320 ° C × 30min after the heat treatment is 3 or less, and the bendability is excellent.

再者,於各實施例中,再結晶退火溫度較高者其最後冷軋前之結晶粒徑較大。 Furthermore, in each of the examples, the higher the recrystallization annealing temperature, the larger the crystal grain size before the final cold rolling.

另一方面,於不含有添加元素之比較例1之情形時,半軟化溫度未達160℃,耐軟化特性差。 On the other hand, in the case of Comparative Example 1 not containing an additive element, the semi-softening temperature did not reach 160 ° C, and the softening resistance was poor.

又,於經以最後冷軋前之結晶粒徑超過30μm的方式進行一次再結晶退火後之比較例2之情形時,由於半軟化溫度未達160℃且200方位之I/I0大於3,故彎折性差。 Also, in the case of Comparative Example 2 after recrystallization annealing was performed once with a crystal grain size of more than 30 μm before the final cold rolling, the semi-softening temperature did not reach 160 ° C. and the I / I 0 at the 200 orientation was greater than 3, Therefore, the bending property is poor.

又,於P之添加量超過0.03%之比較例3之情形時,導電性差。 In addition, in the case of Comparative Example 3 in which the amount of P added exceeds 0.03%, the conductivity is poor.

Claims (5)

一種可撓性印刷基板用銅箔,係由99.0質量%以上之Cu、剩餘部分為不可避免的雜質構成,將0.0005質量%以上0.03質量%以下之P、0.0005~0.05質量%以下之Ag、0.0005質量%以上0.14質量%以下之Sb、0.0005質量%以上0.163質量%以下之Sn、0.0005質量%以上0.288質量%以下之Ni、0.0005質量%以上0.058質量%以下之Be、0.0005質量%以上0.812質量 %以下之Zn、0.0005質量%以上0.429質量%以下之In及0.0005質量%以上0.149質量%以下之Mg分別單獨含有或者含有2種以上,半軟化溫度為160~300℃,當將由壓延面之X射線繞射求出之(200)面之強度設為I,將由微粉末銅之X射線繞射求出之強度設為I 0時,(I/I 0)為3.0以下。 A copper foil for a flexible printed circuit board is composed of 99.0% by mass or more of Cu, and the remainder is unavoidable impurities. P is 0.0005% by mass or more and 0.03% by mass or less, Ag is 0.0005 to 0.05% by mass, or 0.0005. Sb above 0.14% by mass, Sn above 0.0005% by mass and 0.163% by mass, Ni above 0.0005% by mass and 0.288% by mass, Be at 0.0005% by mass and 0.058% by mass, Be above 0.0005% by mass and 0.812 % by mass The following Zn, 0.0005 mass% to 0.429 mass%, In, and 0.0005 mass% to 0.149 mass%, Mg are contained separately or two or more kinds, and the semi-softening temperature is 160 to 300 ° C. When the intensity of the (200) plane obtained by the diffraction is set to I, and when the intensity obtained from the X-ray diffraction of the fine powder copper is set to I 0 , (I / I 0 ) is 3.0 or less. 如請求項1所述之可撓性印刷基板用銅箔,其中,當由以320℃退火30分鐘後之壓延面之X射線繞射求出之(200)面之強度設為I,將由微粉末銅之X射線繞射求出之強度設為I 0時,(I/I 0)為3.0以下。 The copper foil for a flexible printed circuit board according to claim 1, wherein when the strength of the (200) plane obtained from X-ray diffraction of the rolled surface after annealing at 320 ° C for 30 minutes is set to I, When the intensity obtained by X-ray diffraction of powder copper is set to I 0 , (I / I 0 ) is 3.0 or less. 一種覆銅積層體,其係將請求項1或2所述之可撓性印刷基板用銅箔及樹脂層積層而成。     A copper-clad laminate comprising a copper foil for flexible printed circuit board and a resin as described in claim 1 or 2.     一種可撓性印刷基板,其係於請求項3所述之覆銅積層體中之該銅箔形成電路而成。     A flexible printed circuit board is formed by forming a circuit from the copper foil in the copper-clad laminate according to claim 3.     一種電子機器,其使用有請求項4所述之可撓性印刷基板。     An electronic device using the flexible printed circuit board according to claim 4.    
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JP2011148192A (en) * 2010-01-21 2011-08-04 Jx Nippon Mining & Metals Corp Method of manufacturing copper-clad laminated sheet, copper foil used therefor, and laminator of the copper-clad laminated sheet
JP6294257B2 (en) * 2015-03-30 2018-03-14 Jx金属株式会社 Copper alloy foil for flexible printed circuit board, copper-clad laminate using the same, flexible printed circuit board, and electronic device
JP6663712B2 (en) * 2015-12-25 2020-03-13 Jx金属株式会社 Rolled copper foil, copper-clad laminate using the same, flexible printed circuit board, and electronic device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI747330B (en) * 2019-07-10 2021-11-21 日商Jx金屬股份有限公司 Copper foil for flexible printed circuit boards

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TWI731247B (en) 2021-06-21
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KR20190015108A (en) 2019-02-13
CN109385556A (en) 2019-02-26
KR102115086B1 (en) 2020-05-25

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