TW201836958A - Carrier table and carrying method including multiple flatness adjusting portions that have a bolt, a first spherical washer, a second spherical washer, an adjusting thread, and a fixing nut - Google Patents

Abstract

The present invention provides a carrier table that allows a workpiece to be carried at a desired position with high precision. The carrier table 2 of the present invention carries a rectangular workpiece and is provided with flatness adjusting portions 4a to 4x for adjusting flatness of a surface 10a of the carrier table that carries the workpiece. The flatness adjusting portions include a bolt 16 that is disposed in a through hole 28 penetrating the carrier table; a first spherical washer 18, that receives the bolt to insert therethrough and is disposed on a surface side of the carrier table at an inlet of the through hole; a second spherical washer 20, that receives the bolt to insert therethrough and is disposed on a back side of the carrier table at an outlet of the through hole; an adjusting thread 22 that is disposed on the back side of the carrier table to receive a threaded portion of the bolt; and a fixing nut 24 that fixes the adjusting thread.

Description

Mounting table and mounting method

The present invention relates to a mounting table for mounting a workpiece such as a metal mask and a mounting method for mounting a workpiece on the mounting table.

Conventionally, a glass measuring table having a flatness adjustment mechanism (flatness adjustment section) for adjusting the flatness of a glass plate on which a workpiece such as a metal mask is placed is known (for example, refer to Patent Document 1). According to this glass measuring table, a workpiece can be placed on a glass plate for inspection while the glass plate is not flexed. [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 9-033207

[Problems to be Solved by the Invention] In addition, the glass measuring table (mounting table) described in Patent Document 1 and the like has a problem that the glass plate is easily damaged because the workpiece is directly placed on the glass plate during inspection. Therefore, an inspection device is used which includes a frame-shaped mounting table made of ceramics or the like around a glass plate, and a rectangular workpiece is placed on the mounting table and inspected.

However, in order to inspect a rectangular workpiece such as a metal mask with high accuracy using the inspection device, it is necessary to place the workpiece on a mounting table without deforming the workpiece. In addition, the workpiece must be placed on the placement table in such a manner that the workpiece does not have a positional deviation or an attitude deviation with respect to the placement table.

An object of the present invention is to provide a mounting table on which a workpiece can be accurately placed at a desired position, and a mounting method for mounting a workpiece on the mounting table. [Means for solving problems]

The mounting table of the present invention mounts a rectangular workpiece, and the mounting table is characterized by including a flatness adjusting unit that adjusts the flatness of the surface of the mounting table on which the workpiece is placed, the flatness The adjusting unit includes a bolt disposed in a through hole penetrating the mounting table, a first spherical washer through which the bolt is inserted, and disposed at a surface side of the mounting table and an entrance of the through hole; a second spherical washer For the bolt to pass through, arranged on the back side of the mounting table and the exit of the through hole; adjusting the thread, arranged on the back side of the mounting table, to receive the threaded portion of the bolt; and a fixing nut, The adjustment screw is fixed.

In addition, the mounting table of the present invention mounts a rectangular workpiece, and the mounting table is characterized by including a position for adjusting a position and a posture of the workpiece on a surface of the mounting table on which the workpiece is mounted. A posture adjustment unit including a lifting pin having a mounting surface for receiving the workpiece conveyed from the outside, and the mounting surface is arranged in a direction crossing the surface of the mounting table. Lifting; a control unit that controls the movement of the workpiece placed on the placement surface within the placement surface; and a clamp unit that moves the workpiece within the placement surface and moves the workpiece Support the corners of the workpiece with the adjusted position and posture; and the control unit prohibits the workpiece from moving during the period when the lift pin is raised and lowered, and allows the workpiece to move while the clamp unit supports the workpiece. The workpiece moves.

In addition, the mounting table of the present invention mounts a rectangular workpiece, and the mounting table is characterized by comprising: a flatness adjustment unit that adjusts the flatness of the surface of the mounting table on which the workpiece is mounted; and a position An attitude adjustment unit adjusts a position and an attitude of the workpiece on a surface of the mounting table on which the workpiece is placed; the flatness adjustment unit includes a bolt disposed in a through hole penetrating the mounting table. A first spherical washer for inserting the bolt and disposed at the surface side of the mounting table and the entrance of the through hole; a second spherical washer for inserting the bolt and disposed at the back side of the mounting table and An exit of the through-hole; an adjustment thread arranged on the back side of the mounting table to receive a threaded portion of the bolt; and a fixing nut to fix the adjustment thread; the position and posture adjustment portion is provided with a lifting pin, A mounting surface for receiving the workpiece conveyed from the outside is provided, so that the mounting surface is raised and lowered in a direction intersecting with the surface of the mounting table; a control unit controls the mounting on the mounting surface; Movement of the workpiece in the placement surface on the placement surface; and a clamp unit that moves the workpiece in the placement surface to support the workpiece in a state where the position and posture of the workpiece are adjusted A corner of a work piece; and the control section prohibits the movement of the work piece at least while the lift pin is being raised and lowered, and allows the work piece while the position and posture adjustment section is adjusting the work piece position and posture mobile.

Moreover, the mounting base of this invention is equipped with the some leg part which supports the said mounting base, The said flatness adjustment part is arrange | positioned near the said leg part, It is characterized by the above-mentioned.

In addition, the mounting table of the present invention is characterized in that the jig portion supports four corners of the workpiece.

In addition, the mounting table of the present invention is characterized in that the workpiece is a metal mask or a metal mask frame on which a metal mask is mounted on a metal mask frame.

In addition, the mounting method of the present invention mounts a rectangular workpiece on a mounting table, and the mounting method is characterized in that it includes a first mounting step, which is arranged on a surface raised to a position higher than the mounting table. The workpiece is placed on the upper mounting surface above the lift pin; the first prohibition step prohibits the workpiece placed on the mounting surface in the first mounting step from being placed on the mounting surface. Internal movement; a step of allowing the lifting pin to descend near the surface of the mounting table and above the surface of the mounting table to allow the workpiece to move within the mounting surface; a position and posture adjustment step, Adjusting the position and posture of the workpiece in the surface of the mounting table; a second prohibiting step, forbidding the workpiece from moving within the mounting surface after the position and posture adjusting step; and a second loading step A step of lowering the lift pin lower than the surface of the mounting table, and placing the workpiece on the surface of the mounting table; and the step of adjusting the position and posture during Corner fixture , The workpiece is moved to the inner face of the mounting support at the corner of the workpiece to the workpiece position and posture of the adjusted state.

In addition, the mounting method of the present invention is characterized in that, before the first mounting step, it further comprises a flatness adjustment step for adjusting the flatness of the surface of the mounting table, and the flatness adjustment step is performed by The flatness adjusting unit adjusts the flatness. The flatness adjusting unit is composed of a bolt arranged in a through hole penetrating the mounting table, and a first spherical washer through which the bolt is inserted and arranged. On the surface side of the mounting table and the entrance of the through-hole; a second spherical washer for the bolt to pass through, arranged on the back side of the mounting table and the exit of the through-hole; adjusting the thread, and The back side of the mounting table receives a screw portion of the bolt, and a fixing nut fixes the adjustment screw.

In addition, the mounting method of the present invention is characterized in that the workpiece is a metal mask on which a metal mask is mounted on a metal mask frame or the metal mask frame. [Effect of the invention]

According to the present invention, it is possible to provide a mounting table on which a workpiece can be accurately placed at a desired position, and a mounting method for mounting a workpiece on the mounting table.

Hereinafter, a mounting table according to an embodiment of the present invention will be described with reference to the drawings. The mounting table mounts a rectangular workpiece, and in this embodiment, a metal mask is used as an example of the rectangular workpiece, and an inspection table on which the metal mask is mounted and inspected is used as an example of the mounting table. . A metal mask is manufactured by sequentially attaching both ends of a plurality of strip-shaped metal mask sheets on opposite sides constituting a frame-shaped metal mask frame using a metal mask manufacturing apparatus, and the organic It is used when the organic light emitting layer is vacuum-evaporated in the manufacturing process of an electroluminescence (EL) element.

1 is a perspective view showing a schematic configuration of an inspection table according to the embodiment. FIG. 2 is a plan view showing a schematic configuration of the inspection table according to the embodiment. FIG. 3 is a front view showing a schematic configuration of the inspection table according to the embodiment. A right side view of a schematic configuration of the inspection table of the embodiment. In the following description, the XYZ orthogonal coordinate system shown in FIG. 1 is set, and the positional relationship of each member and the like will be described while referring to the orthogonal coordinate system. The XY plane is a plane that is set parallel to the horizontal plane on which the inspection table is placed, and the Z axis is set in the vertical direction.

As shown in FIG. 1 to FIG. 4, the inspection table 2 includes a glass plate 8, a table portion 10, a plurality of (24 in this embodiment) leg portions 12 a to 12 w, and leg portions (not shown) and a base 14. Multiple flatness adjustment mechanisms (flatness adjustment unit) 4a to multiple (24 in this embodiment) Flatness adjustment mechanisms (flatness adjustment unit) 4x, multiple (10 in this embodiment) lift pins 5a To lifting pins 5j and a plurality of (four in this embodiment) jigs 6a to 6d. The glass plate 8 is disposed at the center portion, and the frame-shaped stage portion 10 is disposed around the glass plate 8. The stage portion 10 is made of ceramics or the like, and a metal mask as an object to be inspected is placed thereon. The legs 12a to 12w and the foot support table 10 (not shown) are provided. The legs 12a to 12c are provided on the + Y direction side of the table 10, and the feet 12d to 12h are provided on the table. In the -Y direction side of 10, the leg portions 12i to 12p are provided on the + X direction side of the table portion 10, and the leg portions 12q to 12w and the unillustrated leg portions are provided in the -X direction of the table portion 10. side.

The flatness adjustment mechanism (flatness adjustment unit) 4a to the flatness adjustment mechanism (flatness adjustment unit) 4c are respectively arranged on the + Y direction side of the table portion 10 and in the vicinity of each of the leg portions 12a to 12c. Similarly, the flatness adjustment mechanism (flatness adjustment unit) 4d to the flatness adjustment mechanism (flatness adjustment unit) 4h are arranged in the -Y direction side of the table portion 10 and in the vicinity of each of the leg portions 12d to 12h, The flatness adjustment mechanism (flatness adjustment unit) 4i to the flatness adjustment mechanism (flatness adjustment unit) 4p are arranged on the + X direction side of the table portion 10 and near the feet 12i to 12p, respectively, for flatness adjustment. The mechanism (flatness adjustment unit) 4q to the flatness adjustment mechanism (flatness adjustment unit) 4x are respectively arranged on the -X direction side of the table portion 10, and the leg portions 12q to 12w and the vicinity of the leg portions (not shown) are in the vicinity. . The flatness adjustment mechanism (flatness adjustment unit) 4a to the flatness adjustment mechanism (flatness adjustment unit) 4x adjust the flatness of the surface of the table portion 10, that is, the mounting surface 10a of the table portion 10.

FIG. 5 is a central vertical cross-sectional view showing the configuration of a flatness adjustment mechanism (flatness adjustment unit) 4h. As shown in FIG. 5, the flatness adjusting mechanism (flatness adjusting section) 4 h includes a bolt 16, a first spherical washer 18, a second spherical washer 20, an adjustment thread 22, and a fixing nut 24. The bolt 16 is disposed in a recessed portion 26 provided on the mounting surface 10 a of the stage portion 10 and a through hole 28 penetrating the stage portion 10 from the recessed portion 26 in the Z direction. The first spherical washer 18 is inserted through the bolt 16, and is disposed on the mounting surface 10 a side (+ Z direction side) of the table portion 10 and at the entrance of the through hole 28. That is, the first spherical washer 18 is disposed between the head of the bolt 16 and the bottom of the recessed portion 26. The second spherical washer 20 is inserted through the bolt 16, and is disposed on the back surface side (−Z direction side) of the table portion 10 and at the exit of the through hole 28. In the support portion of the leg portion 12h supporting the base portion 10, a through hole penetrating in the Z direction is provided, and the second spherical washer 20 is an entrance of the through hole provided in the back portion of the base portion 10 and the leg portion (+ Z direction side).

The adjustment screw 22 is arranged in a through hole in the leg portion 12 h on the back side of the table portion 10. A receiving portion 22 a for receiving a screw portion on the −Z direction side of the bolt 16 is formed at an end portion on the + Z direction side of the adjustment screw 22. By rotating the adjustment screw 22 to one side to tighten the bolt 16, the flatness of the mounting surface 10a of the table portion 10 changes. In addition, by rotating the adjustment screw 22 to the other side to loosen the bolt 16, the flatness of the mounting surface 10 a of the table portion 10 changes. The fixing nut 24 fixes the adjustment thread 22. The first spherical washer 18 and the second spherical washer 20 absorb the inclination around the flatness adjusting mechanism (flatness adjusting portion) of the table portion 10 in the XY plane around 4h. In addition, the flatness adjustment mechanism (flatness adjustment unit) 4a to the flatness adjustment mechanism (flatness adjustment unit) 4g and the flatness adjustment mechanism (flatness adjustment unit) 4i to the flatness adjustment mechanism (flatness adjustment unit) 4x Since the configuration is the same as the configuration of the flatness adjustment mechanism (flatness adjustment unit) 4h, the description is omitted.

The lift pin 5 a is provided on the + X direction side of the table portion 10 and is between the flatness adjustment mechanism (flatness adjustment unit) 4 i and the flatness adjustment mechanism (flatness adjustment unit) 4 j. The lift pin 5 b is provided on the table portion 10. Between the flatness adjustment mechanism (flatness adjustment unit) 4j and the flatness adjustment mechanism (flatness adjustment unit) 4k of the + X direction side, the lifting pin 5c is provided on the + X direction side of the table portion 10 and the flatness adjustment Between the mechanism (flatness adjustment section) 4l and the flatness adjustment mechanism (flatness adjustment section) 4m, the lift pin 5d is provided on the + X direction side of the table section 10 and the flatness adjustment mechanism (flatness adjustment section) 4n and Between the flatness adjustment mechanism (flatness adjustment unit) 4o, the lift pin 5e is provided on the + X direction side of the table portion 10 and the flatness adjustment mechanism (flatness adjustment unit) 4o and the flatness adjustment mechanism (flatness adjustment unit) ) Between 4p. In addition, the lift pin 5f is provided on the -X direction side of the table portion 10 between the flatness adjustment mechanism (flatness adjustment unit) 4q and the flatness adjustment mechanism (flatness adjustment unit) 4r, and the lift pin 5g is provided on the table Between the -X direction side of the section 10 and the flatness adjustment mechanism (flatness adjustment section) 4r and the flatness adjustment mechanism (flatness adjustment section) 4s, the lifting pin 5h is provided on the -X direction side and flat of the table section 10 Between the flatness adjustment mechanism (flatness adjustment unit) 4t and the flatness adjustment mechanism (flatness adjustment unit) 4u, the lift pin 5i is provided on the -X direction side of the table portion 10 and the flatness adjustment mechanism (flatness adjustment unit) Between 4v and the flatness adjustment mechanism (flatness adjustment unit) 4w, the lift pin 5j is provided on the -X direction side of the table portion 10 and the flatness adjustment mechanism (flatness adjustment unit) 4w and the flatness adjustment mechanism (flatness Adjustment section) between 4x.

The lift pins 5 a to 5 j are standby positions (see FIGS. 1 to 4) that can be lowered from the table portion 10 (-Z direction) and near the upper side (+ Z direction side) of the base 14 (see FIGS. 1 to 4). The notch portion of the table portion 10 provided with each of the pins 5 a to the lift pins 5 j is configured to move to a workpiece receiving position (see FIG. 6) above the table portion 10 (+ Z direction). That is, the lift pins 5a to 5j are raised and lowered in the Z direction. In addition, the lift pins 5 a to 5 j have a mounting surface that receives a metal mask that is transported from the outside to the inspection table 2 at a workpiece receiving position. The lift pins 5 a to 5 j receive metal masks which are transported from the outside to the table part 10 at the workpiece receiving position, and are moved in the -Z direction to place the metal mask on the mounting surface 10 a of the table part 10. The lift pin 5 a includes a centering unit (not shown) that controls the movement of the metal mask placed on the placement surface (XY plane). Similarly, each of the lift pins 5b to 5j includes a centering unit (not shown) that controls the movement of the metal mask placed on the placement surface (XY plane).

The jigs 6a to 6d are arranged on the four corners of the table 10, respectively, and the metal masks placed on the mounting surfaces of the lifting pins 5a to 5j are moved within the mounting surfaces. FIG. 7 is an enlarged view of a member surrounded by a circle A shown in FIG. 2. As shown in FIG. 7, the jig 6 a includes an L-shaped fixing member 30 fixed to the table portion 10, an X-direction movable member 32 movable in the ± X direction with respect to the fixing member 30, and a fixed member 30 The Y-direction movable member 34 that moves in the ± Y direction. The front end portion 32a of the X-direction movable member 32 and the front end portion 34a of the Y-direction movable member 34 are formed of rotatable balls. The X-direction movable member 32 moves in the -X direction, and the Y-direction movable member 34 moves in the -Y direction. The front end portion 32a and the front end portion 34a contact the corners of the metal mask. When the front end portion 32a and the front end portion 34a contact the corners of the metal mask, the metal mask moves within the mounting surface (XY plane) of the lift pins 5a to 5j, and the position and posture of the metal mask are adjusted. In addition, the X-direction movable member 32 and the Y-direction movable member 34 of the jig 6a support the corners of the metal mask in a state where the position and posture of the metal mask are adjusted.

The configuration of the jig 6 b is the same as the configuration of the jig 6 a shown in FIG. 7 with the center line in the short-side direction (X direction) of the table 10 as a line of symmetry. The configuration of the jig 6 c is the same as the configuration of the jig 6 a shown in FIG. 7 with the center line in the longitudinal direction (Y direction) of the table portion 10 as a symmetry line. The configuration of the jig 6d is the same as the configuration of the jig 6a shown in FIG. 7 with the center of the stage 10 as a point of symmetry. Each of the jigs 6a to 6d supports the corners of the metal mask, thereby supporting the four corners of the metal mask. In addition, the lift pins 5 a to 5 j and the clamps 6 a to 6 d constitute a position and posture adjusting device (position and posture adjusting section) that adjusts the position and posture of the metal mask in the mounting surface 10 a of the table portion 10.

FIG. 8 is a block diagram showing a system configuration of the inspection table 2. As shown in FIG. 8, the inspection table 2 includes a control unit 36 that controls each section of the inspection table 2 in a unified manner, in particular, each of the lift pins 5 a to 5 j and the clamps 6 a to 6 d. A lift pin driving portion 38 of the lift pin 5 a is connected to the control portion 36. The control unit 36 controls the driving of the lift pin driving unit 38, and the lift pin driving unit 38 drives the lift pin 5a. That is, the control unit 36 moves the lift pin 5a in the ± Z direction via the lift pin driving unit 38.

In addition, the control portion 36 is connected to a lock portion 40 of the lift pin 5a. The lock section 40 controls the lock and release of the centering unit of the lift pin 5 a in accordance with the control of the control section 36. That is, the control unit 36 locks the centering unit of the lift pin 5a via the lock portion 40 at least during the period when the lift pins 5a to 5j are raised and lowered, thereby preventing the metal mask from moving within the placement surface of the lift pin 5a. In addition, the control unit 36 releases the lock of the centering unit of the lift pin 5a via the lock unit 40 while adjusting the position and posture of the metal mask in the position and orientation adjustment device (position and orientation adjustment unit), thereby, The metal mask is allowed to move within the mounting surface of the lift pin 5a.

In addition, the lifting pins 5b to 5j also include a lifting pin driving portion (not shown) and a locking portion (not shown), and the lifting pin driving portion and the locking portion of the lifting pin 5b to 5j are connected to the control, respectively.部 36。 36. The configurations of the lift pin driving section and the lock section of the lift pins 5 b to 5 j are the same as those of the lift pin driving section 38 and the lock section 40.

The X-side jig driving unit 42 and the Y-side jig driving unit 44 of the jig 6 a are connected to the control unit 36. The control section 36 controls the driving of the X-side jig driving section 42, and the X-side jig driving section 42 controls the driving of the X-direction movable member 32. That is, the control unit 36 moves the X-direction movable member 32 in the ± X direction via the X-side jig driving unit 42. The control unit controls the driving of the Y-side jig driving unit 44, and the Y-side jig driving unit 44 controls the driving of the Y-direction movable member 34. That is, the control unit 36 moves the Y-direction movable member 34 in the ± Y direction via the Y-side clamp driving unit 44.

The clamps 6b to 6d also include X-side clamp driving portions (not shown) and Y-side clamp driving portions (not shown), and X-side clamp driving portions and Y-side clamp driving portions of the clamps 6b to 6d. Don't connect to the control unit 36. The configurations of the X-side jig driving section and the Y-side jig driving section of the jigs 6b to 6d are the same as those of the X-side jig driving section 42 and the Y-side jig driving section 44.

A memory unit 46 and an input unit 48 are connected to the control unit 36. Information related to the size of various metal masks is stored in the storage unit 46, and the control unit 36 obtains information related to the metal mask to be inspected, which is input through the input unit 48, and reads in based on the acquired information. Information related to the size of the metal mask to be inspected is stored in the storage unit 46. The control unit 36 controls the driving of the X-side jig driving unit 42 and the Y-side jig driving unit 44 of the jig 6a, and the X-side jig driving unit and the Y-side jig driving unit of the jigs 6b to 6d based on the read information.

Next, a method of placing a metal mask on the inspection table 2 (the table portion 10) in the inspection table 2 of the present embodiment will be described with reference to the drawings. FIG. 9 is a flowchart for explaining processing when a metal mask is placed on the stage portion 10 in the inspection table 2.

First, the control unit 36 adjusts the flatness of the mounting surface 10 a of the stage portion 10 (step S1). Specifically, the control unit 36 instructs to obtain a flatness measurement result of the mounting surface 10a measured by a flatness measuring device (not shown), and outputs the obtained result to an output unit (not shown). The user refers to the flatness measurement result output in the output section, and uses the flatness adjustment mechanism (flatness adjustment unit) 4a to the flatness adjustment mechanism (flatness adjustment unit) 4x to adjust the flatness. Specifically, the flatness of the table portion 10 is adjusted by tightening or loosening the bolt 16 by rotating the adjustment thread 22 or other adjustment threads clockwise or counterclockwise. The flatness of the table portion 10 is gradually improved by repeatedly measuring and adjusting the flatness of the table portion 10.

Then, after the flatness of the table section 10 is adjusted in step S1, the control section 36 raises the lifting pins 5a to 5j from the standby position (see FIG. 1) to the position shown in FIG. The mounting surface 10a is further above (step S2). Specifically, the control unit 36 controls the driving of the lift pin driving unit 38 and other lift pin driving units, thereby raising the lift pins 5 a to 5 j by a predetermined distance in the + Z direction.

Next, the control unit 36 locks the lift pins 5a to the lift when it confirms that the metal mask that has been carried from the outside to the inspection table 2 is placed on the mounting surface disposed on the lift pins 5a to 5j (step S3). The centering unit of the pin 5j prohibits the metal mask from moving within the mounting surfaces of the lift pins 5a to 5j (step S4). Specifically, the control unit 36 confirms, for example, that a metal mask to be inspected has been placed by receiving a confirmation signal inputted through the input unit or a confirmation signal transmitted from a detection sensor (not shown). On the mounting surfaces of the lifting pins 5a to 5j. Then, the control unit 36 instructs the locking unit 40 and other locking units to lock the centering units of the lifting pins 5a to 5j, and the locking unit 40 and other locking units each lock the centering units of the lifting pins 5a to 5j. By locking the centering unit of the lift pins 5a to 5j, the metal mask is fixed in the mounting surface of the lift pins 5a to 5j.

Then, the control unit 36 lowers the lift pins 5a to 5j from the positions shown in FIG. 6 to the vicinity of the mounting surface 10a of the table 10 and above the mounting surface 10a, that is, slightly above the mounting surface 10a. Further up (step S5). Specifically, the control unit 36 controls the driving of the lift pin driving unit 38 and other lift pin driving units, thereby lowering the lift pins 5a to 5j by a predetermined distance in the -Z direction.

Then, the control unit 36 unlocks the centering units of the lift pins 5a to 5j, and allows the metal mask to move within the mounting surfaces of the lift pins 5a to 5j (step S6). Specifically, the control section 36 instructs the lock section 40 and other lock sections to release the locking of the centering unit of the lift pins 5a to 5j, and each of the lock sections 40 and other lock sections releases the respective lock pins 5a to 5j. Locking of the heart unit. By unlocking the centering units of the lift pins 5a to 5j, the metal mask can be moved within the mounting surfaces of the lift pins 5a to 5j.

Then, the control unit 36 adjusts the position and posture of the metal mask on the mounting surface 10 a of the stage unit 10 (step S7). Specifically, the control unit 36 obtains information related to the metal mask input through the input unit 48 and reads information related to the size of the metal mask stored in the memory unit 46 based on the obtained information. Then, the control section 36 controls the driving of the X-side jig driving section 42 and the Y-side jig driving section 44 of the jig 6a, and the X-side jig driving section and the Y-side jig driving section of the jigs 6b to 6d based on the read information. . The X-side jig driving unit 42 and other X-side jig driving units each move the X-direction movable member 32 of the jig 6a and the X-direction movable members of the jig 6b to the jig 6d by a predetermined distance in the X direction. Similarly, each of the Y-side jig driving unit 44 and the other Y-side jig driving units moves the Y-direction movable member 34 of the jig 6a and the Y-direction movable members of the jig 6b to the jig 6d by a predetermined distance in the Y direction. When the X-direction movable member 32, other X-direction movable members, Y-direction movable members 34, and other Y-direction movable members move, the metal mask moves in the XY plane. Then, in a state where the position and posture of the metal mask with respect to the mounting surface 10a are adjusted, the four corners of the metal mask are supported by the jigs 6a to 6d.

After the control unit 36 finishes adjusting the position and posture of the metal mask in step S7, the control unit 36 locks the centering units of the lifting pins 5a to 5j, and prohibits the metal mask from being placed on the mounting surfaces of the lifting pins 5a to 5j. Move inside (step S8). That is, the control unit 36 instructs the locking unit 40 and other locking units to lock the centering unit of the lifting pins 5a to 5j, and the locking unit 40 and other locking units each lock the centering units of the lifting pins 5a to 5j. Then, the control section 36 controls the driving of the lift pin driving section 38 and other lift pin driving sections, thereby lowering the lift pins 5 a to 5 j to a position lower than the mounting surface 10 a of the table section 10 (step S9), The metal mask is placed on the placement surface 10 a of the stage portion 10. After the metal mask is placed on the mounting surface 10a of the stage 10, the lift pins 5a to 5j are lowered to the standby position.

According to the inspection table 2 of this embodiment, since the flatness adjustment mechanism (flatness adjustment section) 4a to the flatness adjustment mechanism (flatness adjustment section) 4x are provided, the placement surface 10a of the table section 10 can be maintained with high accuracy. The flatness allows the metal mask to be placed on the mounting surface 10 a of the stage portion 10 without being deformed. In addition, since the position and posture adjusting device (position and posture adjusting unit) including the lifting pins 5a to 5j and the clamps 6a to 6d is provided, the position and posture of the metal mask relative to the table portion 10 can be adjusted, and the metal can be adjusted. The mask is placed at a desired position on the placement surface 10 a of the stage portion 10.

In addition, according to the mounting method of the metal mask of this embodiment, the flatness adjustment mechanism (flatness adjustment unit) 4a to the flatness adjustment mechanism (flatness adjustment unit) 4x of the mounting surface 10a of the adjustment table portion 10 are used. The flatness can maintain the flatness of the mounting surface 10 a with high accuracy, and the metal mask can be placed on the mounting surface 10 a of the stage portion 10 without deformation. In addition, since the position and posture adjustment device (position and posture adjustment unit) composed of the lifting pins 5a to 5j and the clamps 6a to 6d is used to adjust the position and posture of the metal mask with respect to the table portion 10, the metal mask can be masked. The mold is placed at a desired position on the placement surface 10 a of the table portion 10.

In addition, the embodiment includes both a flatness adjustment device (flatness adjustment section) and a position and posture adjustment device (position and posture adjustment section), and may include a flatness adjustment device (flatness adjustment section) only or a position only. Configuration of posture adjustment device (position and posture adjustment unit).

In the above-mentioned embodiment, a case where a metal mask is placed is described as an example, but the present invention can also be applied to a case where a rectangular workpiece (such as a metal mask frame) other than the metal mask is placed. . In addition, in the embodiment described above, the inspection table provided in the inspection device is described as an example, but the present invention can also be applied to a mounting table provided in a device other than the inspection device (for example, a metal mask manufacturing device).

In addition, the above-mentioned embodiment includes 24 flatness adjusting mechanisms (flatness adjusting sections), but as long as the flatness of the inspection table (mounting table) can be adjusted well, the flatness adjusting mechanism (flatness adjusting section) The number is not limited. In addition, the flatness adjusting mechanism (flatness adjusting unit) is disposed at the positions shown in FIGS. 1 to 4, but may be disposed at other positions as long as the flatness of the inspection table (mounting table) can be adjusted well. In addition, although the above embodiment includes ten lift pins, the number of lift pins is not limited as long as the metal mask (workpiece) can be well supported. In addition, in the embodiment described above, four jigs each supporting the four corners of the metal mask are provided, but as long as the corners of the metal mask can be supported well, the number of jigs is not limited.

2‧‧‧ Inspection Desk

4a ～ 4x‧‧‧‧Flatness adjustment mechanism (flatness adjustment section)

5a ～ 5j‧‧‧ lifting pin

6a ～ 6d‧‧‧Jig

8‧‧‧ glass plate

10‧‧‧ Taiwan

10a‧‧‧mounting surface

12a ～ 12w‧‧‧foot

14‧‧‧ abutment

16‧‧‧ Bolt

18‧‧‧The first spherical washer

20‧‧‧Second spherical washer

22‧‧‧ Adjust the thread

22a‧‧‧Acceptance Department

24‧‧‧ fixed nut

26‧‧‧ Recess

28‧‧‧through hole

30‧‧‧Fixed components

32‧‧‧X-direction movable member

32a, 34a ‧‧‧ front end

34‧‧‧Y-direction movable member

36‧‧‧Control Department

38‧‧‧Lift Pin Drive Unit

40‧‧‧Lock

42‧‧‧X side jig driving unit

44‧‧‧Y-side fixture driving unit

46‧‧‧Memory Department

48‧‧‧Input Department

S1 ～ S9‧‧‧‧ steps

A‧‧‧circle

FIG. 1 is a perspective view showing a schematic configuration of an inspection table according to the embodiment. FIG. 2 is a plan view showing a schematic configuration of an inspection table according to the embodiment. 3 is a front view showing a schematic configuration of an inspection table according to the embodiment. Fig. 4 is a right side view showing a schematic configuration of the inspection table according to the embodiment. FIG. 5 is a central vertical cross-sectional view showing the configuration of a flatness adjusting mechanism (flatness adjusting unit) according to the embodiment. FIG. 6 is a diagram showing a state in which the lift pin is raised in the embodiment. FIG. 7 is an enlarged view for explaining a configuration of a jig of the embodiment. FIG. 8 is a block diagram showing a system configuration of an inspection table according to the embodiment. FIG. 9 is a flowchart for explaining a method of placing a metal mask using the inspection table of the embodiment.

Claims (9)

A mounting table on which a rectangular workpiece is mounted, and the mounting table is characterized by comprising a flatness adjustment unit that adjusts the flatness of the surface of the mounting table on which the workpiece is placed, and the flatness adjustment The part is provided with: a bolt disposed in a through hole penetrating the mounting table; a first spherical washer through which the bolt is inserted and disposed at a surface side of the mounting table and an entrance of the through hole; a second spherical washer, The bolt is inserted and arranged on the back side of the mounting table and the exit of the through hole; an adjustment thread is arranged on the back side of the mounting table to receive the threaded portion of the bolt; The adjustment thread is fixed. A mounting table on which a rectangular workpiece is mounted, and the mounting table is characterized in that it includes a position and posture adjustment unit that adjusts the position and posture of the workpiece on the surface of the mounting table on which the workpiece is mounted. The position and posture adjustment unit includes: a lifting pin having a mounting surface for receiving the workpiece conveyed from the outside to raise and lower the mounting surface in a direction that intersects with the surface of the mounting table; control Part to control the movement of the workpiece placed on the placement surface within the placement surface; and a gripper portion to move the workpiece within the placement surface, to the position of the workpiece and The corner of the workpiece is supported in a state where the posture is adjusted; and the control unit prohibits the movement of the workpiece at least during the lifting period of the lift pin, and adjusts the position of the workpiece in the position and posture adjustment unit and The workpiece is allowed to move during the period of the posture. A mounting table on which a rectangular workpiece is mounted, and the mounting table is characterized by comprising: a flatness adjusting unit that adjusts the flatness of the surface of the mounting table on which the workpiece is placed; and a position and attitude adjusting unit Adjusting the position and posture of the workpiece within the surface of the mounting table on which the workpiece is mounted; the flatness adjusting section includes: a bolt disposed in a through hole penetrating the mounting table; first A spherical washer through which the bolt is inserted and arranged at the surface side of the mounting table and the entrance of the through hole; a second spherical washer through which the bolt is inserted and is arranged on the back side of the mounting table and the through An outlet of the hole; an adjustment thread is arranged on the back side of the mounting table to receive the threaded portion of the bolt; and a fixing nut fixes the adjustment thread; the position and posture adjustment portion is provided with: a lift pin having a receiving load Placing the mounting surface of the workpiece conveyed from the outside to raise and lower the mounting surface in a direction intersecting with the surface of the mounting table; a control unit that controls the mounting on the mounting surface Movement of the workpiece in the placement surface on the placement surface; and a clamp unit that moves the workpiece in the placement surface to support the workpiece in a state where the position and posture of the workpiece are adjusted A corner of the workpiece; and the control unit prohibits the workpiece from moving during the period when the lift pin is raised and lowered, and allows the workpiece to move while the clamp portion supports the workpiece. The mounting base according to item 1 or 3 of the scope of patent application includes a plurality of leg portions supporting the mounting base, and the flatness adjusting portion is disposed near the leg portions. The mounting table according to claim 2 or claim 3, wherein the jig portion supports four corners of the workpiece. The mounting table according to any one of claims 1 to 5, wherein the workpiece is a metal mask on which a metal mask is mounted on a metal mask frame or the metal mask frame. A mounting method, wherein a rectangular workpiece is placed on a mounting table, and the mounting method is characterized in that it includes: a first mounting step, which is arranged above the surface of the mounting table after being raised up; The workpiece is placed on the mounting surface above the lifting pin; a first prohibiting step forbidding the workpiece placed on the mounting surface in the first mounting step from moving within the mounting surface; A step of allowing the lifting pin to be lowered near the surface of the mounting table and above the surface of the mounting table to allow the workpiece to move within the mounting surface; Adjusting the position and posture of the workpiece in the surface of the mounting table; a second prohibiting step, forbidding the workpiece from moving within the mounting surface after the position and posture adjusting step; and a second mounting step, Lowering the lift pin lower than the surface of the mounting table, and placing the workpiece on the surface of the mounting table; and the position and posture adjustment step is at a jig arranged at a corner of the workpiece Ministry minister The workpiece moves within the mounting surface, and supports corners of the workpiece in a state where the position and posture of the workpiece are adjusted. The mounting method according to item 7 of the scope of patent application, wherein before the first mounting step, it further comprises a flatness adjustment step of adjusting the flatness of the surface of the mounting table, and the flatness adjustment The step is to adjust the flatness by a flatness adjusting portion, which is composed of the following components: a bolt is disposed in a through hole penetrating the mounting table; and a first spherical washer for the bolt The second spherical washer for the bolt to be inserted and disposed on the back side of the mounting table and the exit of the through hole; adjusting the thread, It is arranged on the back side of the mounting table to receive the screw portion of the bolt; and a fixing nut to fix the adjustment screw. The mounting method according to item 7 or item 8 of the scope of patent application, wherein the workpiece is a metal mask on which a metal mask is mounted on a metal mask frame or the metal mask frame.