TW201832317A - Chuck apparatus and method for chucking - Google Patents

Abstract

The present invention provides a chuck apparatus (100) which includes a hand (10) having a chucking surface (11) for chucking a sheet (70) carried on a carrying surface (51); a rotating mechanism (21) holding the hand (10) at a predetermined angle before the hand (10) is in contact with the sheet (70) and rotatably holding the hand (10) by reducing the predetermined angle after the hand (10) is in contact with the sheet (70), in which the predetermined angle is an angle of the claiming surface (11) with respect to the carrying surface (51); and a lifting mechanism (22) used to descend the hand (10) to enable the hand (10) to clamp an end side of the sheet (70) under the circumstances of the angle of the claiming surface (11) with respect to the carrying surface (51) being maintained at the predetermined angle.

Description

   Clamping device and clamping method   

The present invention relates to a technique for holding a sheet.

Patent Document 1 discloses a device capable of attaching a sheet and a substrate. The device of Patent Document 1 includes a substrate holder holding a substrate and a sheet holder holding a sheet. Then, the substrate is attached to the substrate by moving the substrate holder and the sheet holder. Furthermore, the device of Patent Document 1 includes an elastic roller for nipping the substrate and the sheet. Therefore, the device of Patent Document 1 can attach the sheet to the substrate without air bubbles.

[Prior technical literature]

(Patent Literature)

Patent Document 1: Japanese Patent Publication No. 2004-146027.

However, the device of Patent Document 1 has a problem that the device structure size becomes large and complicated. For example, a mechanism for driving a substrate holder, a sheet holder, and an elastic roller is required. Therefore, it is difficult to simplify the structure of the device.

Such a sheet manufacturing process has a problem that when a sheet is held in a state where air bubbles have occurred, subsequent processes cannot be properly performed. Therefore, it is desirable that the sheet can be appropriately held without generating bubbles.

An object of the present invention is to provide a technique capable of appropriately holding a sheet by a simple structure in view of the above-mentioned problems.

One of the aspects of the present embodiment of the holding device includes: a hand having a holding surface for holding a sheet carried on the bearing surface; and a rotation holding mechanism for holding the hand before the hand contacts the piece, Holding the hand so that the angle of the clamping surface with respect to the bearing surface becomes a predetermined angle, and rotatably holding the hand in a manner that the predetermined angle is reduced after the hand contacts the sheet; and a lifting mechanism, In a state where the angle of the clamping surface with respect to the bearing surface is maintained at the predetermined angle, the hand is lowered so that the hand clamps one end side of the sheet. Thereby, the sheet can be appropriately clamped with a simple structure.

The clamping device may further include a control unit that controls the rotation holding mechanism and the lifting mechanism to reduce the predetermined angle while lowering the hand after the hand contacts the sheet, so that the clamping surface is reduced. Close to the other end side of the aforementioned sheet. Thereby, the sheet can be appropriately held with a simple structure.

In the above clamping device, the hand may be provided with an air hole for releasing air between the sheet and the clamping surface. Thereby, the sheet can be clamped more appropriately.

In the clamping device described above, the hand may also clamp the sheet by electrostatic clamping. This allows you to insert your hand into a small space.

One of the implementation methods of this embodiment uses a clamping device. The clamping device includes: a hand having a clamping surface for clamping a piece carried on the bearing surface; and a rotation holding mechanism. To hold the hand rotatably in such a way that the angle of the holding surface relative to the bearing surface can be changed; and a lifting mechanism for lowering the hand, the holding method includes the following steps: in the hand The step of holding the hand so that the angle of the gripping surface with respect to the load-bearing surface becomes a predetermined angle before touching the sheet; lowering the hand with the grip surface at the predetermined angle with respect to the load-bearing surface A step of clamping the one end side of the sheet by the hand; and a step of reducing the predetermined angle by rotating the hand after the hand touches one end side of the sheet. Thereby, the sheet can be appropriately clamped with a simple structure.

In the above-mentioned clamping method, the rotation holding mechanism and the lifting mechanism may be controlled to reduce the predetermined angle while lowering the hand after the hand touches the sheet, so that the clamping surface approaches the sheet On the other side. Thereby, the sheet can be appropriately clamped with a simple structure.

In the above clamping method, the hand may be provided with an air hole for releasing air between the sheet and the clamping surface. Thereby, the sheet can be clamped more appropriately.

In the clamping method described above, the hand may also clamp the sheet by electrostatic clamping. This allows you to insert your hand into a small space.

The present invention can provide a technique for appropriately holding a sheet with a simple structure.

10, 10A, 10B‧‧‧Hand

11, 11A‧‧‧Clamping surface

12‧‧‧air hole

13‧‧‧ electrode hole

20, 20A, 20B‧‧‧arm mechanism

21‧‧‧rotating mechanism

21a, 22a‧‧‧ Actuators

22‧‧‧Lifting mechanism

25‧‧‧Control Department

26‧‧‧ Ontology

27‧‧‧arm

28‧‧‧ wrist

50, 50A‧‧‧

51‧‧‧bearing surface

70, 70A, 70B‧‧‧

100, 100B‧‧‧Clamping device

B‧‧‧ Arrow

FIG. 1 is a view showing an XZ plane of the structure of the holding device of the first embodiment.

FIG. 2 is a view showing a YZ plane of the structure of the holding device of the first embodiment.

FIG. 3 is a view showing an XY plane of a structure of a hand of the holding device of the first embodiment.

FIG. 4 is a view showing an XZ plane of the operation of the clamping device according to the first embodiment.

Fig. 5 is a view showing an XZ plane of the operation of the holding device of the first embodiment.

FIG. 6 is a view showing an XZ plane of the operation of the clamping device according to the first embodiment.

FIG. 7 is a view showing an XY plane of a structure of a hand portion having an air hole.

FIG. 8 is a perspective view showing the operation of the clamping device according to the second embodiment.

FIG. 9 is a view showing an XZ plane of a structure of a holding device according to a second embodiment.

Fig. 10 is a perspective view showing a structure of a holding device according to a third embodiment.

Hereinafter, an example of an embodiment of the present invention will be described with reference to the drawings. The following description shows the preferred embodiments of the present invention, and the technical scope of the present invention is not limited to the following embodiments.

(First implementation type)

The clamping device of the embodiment can clamp a chip-shaped secondary battery that is a chip-shaped device. Hereinafter, a clamp device according to this embodiment will be described with reference to FIGS. 1 to 3. In addition, in order to make the description clearer, the XYZ three-dimensional orthogonal coordinate system is indicated in the figure. The Z direction is the vertical direction, and the XY plane is the horizontal direction. The sheet 70 is parallel to the XY plane. FIG. 1 is a view showing an XZ plane of the structure of the holding device 100. FIG. 2 is a view showing a YZ plane of the structure of the holding device 100. Fig. 3 is a view showing the structure of the hand 10 of the holding device 100 in the XY plane. In addition, the square-shaped sheet 70 is carried so that its edges are parallel to the X direction and the Y direction.

The holding device 100 includes a hand portion 10 and an arm mechanism 20. The sheet 70 to be clamped is placed on a stage 50. The bearing surface 51 of the stage 50 is parallel to the XY plane. Therefore, the sheet 70 is arranged on the stage 50 in a state parallel to the XY plane. The sheet 70 includes a charging layer and the like provided on a base sheet. The base sheet is made of a metal material such as aluminum.

The hand 10 is used to clamp the sheet 70 carried on the bearing surface 51. Therefore, the lower surface of the hand 10 becomes the clamping surface 11. The clamping surface 11 is formed as a flat surface. The hand 10 may be, for example, a parallel flat plate type member.

Specifically, the hand 10 holds the sheet 70 by electrostatic clamping or vacuum clamping. In the case of electrostatic clamping, the hand 10 includes ceramics and electrodes. By applying a voltage to the electrodes built in the ceramic, a Coulomb force for holding the sheet 70 can be generated. In the case of vacuum clamping, the sheet 70 is sucked by exhausting the air provided in the suction hole provided on the gripping surface 11. In addition, it is possible to reduce the thickness of the hand 10 by using an electrostatic clamp rather than using a vacuum clamp. Therefore, when the electrostatic grip is used, the hand 10 can be inserted into a narrower space.

Here, an example in which the hand 10 uses an electrostatic clamp will be described. The sheet 70 is formed into a square of 300 mm × 300 mm. As shown in FIG. 3, the electrostatic clamping range of the hand 10 is a square of 310 mm × 310 mm. Therefore, the clamping surface 11 is larger than the sheet 70.

The arm mechanism 20 is, for example, a robot arm for moving the hand 10. The arm mechanism 20 movably holds the hand 10. The arm mechanism 20 holds the hand 10 above the stage 50. The arm mechanism 20 includes a rotation mechanism 21, a lifting mechanism 22, and a control unit 25.

The rotation mechanism 21 is attached to the upper surface of the hand 10. The rotation mechanism 21 holds the hand 10. The rotation mechanism 21 includes an actuator 21 a such as a motor. The rotation axis of the rotation mechanism 21 is parallel to the Y direction. That is, the rotation axis of the rotation mechanism 21 is parallel to the edge of the sheet 70. By driving the actuator 21a, the hand 10 is rotated around the Y axis. Driven by the rotation mechanism 21, the inclination of the gripping surface 11 of the hand 10 changes. The rotation mechanism 21 rotates the hand 10 to change the inclination of the gripping surface 11 with respect to the sheet 70.

The lifting mechanism 22 lifts and lowers the hand 10. The lifting mechanism 22 includes an actuator 22 a such as a motor. The lifting mechanism 22 holds the rotation mechanism 21. When the actuator 22 a is driven, the rotation mechanism 21 moves in the up-down direction (Z direction). Thereby, the hand part 10 can be moved to an up-down direction.

The control unit 25 includes a processor, a memory, and the like, and controls the rotation mechanism 21 and the lifting mechanism 22. For example, the control unit 25 generates a control signal for controlling the actuator 21a and the actuator 22a. The actuators 21a and 22a are servomotors and the like, and can be driven by a driving amount corresponding to a driving signal from the control unit 25. Thereby, the amount of rotation of the rotation mechanism 21 and the amount of movement of the lifting mechanism 22 can be controlled. That is, the control unit 25 can control the angle of the gripping surface 11 of the hand 10 and the Z-direction position of the hand 10.

Next, a clamping method using the clamping device 100 will be described with reference to FIGS. 1, 4 to 6. FIG. 1, FIG. 4 to FIG. 6 are views on the XZ plane for explaining the operation of the holding device 100. However, the operation of the rotation mechanism 21 and the lifting mechanism 22 of the clamp device 100 described below is controlled by the control unit 25.

FIG. 1 shows a state in which the hand 10 is in a standby position before the start of clamping. As shown in FIG. 1, the hand 10 is not in contact with the sheet 70 in a state before the clamping is started. That is, the hand part 10 is arrange | positioned above the sheet | seat 70 apart. The clamping surface 11 is inclined with respect to the sheet 70. Specifically, compared to the other end side (+ X side) of the sheet 70, the distance between the sheet 70 and the clamping surface 11 in the Z direction on one end side (−X side) of the sheet 70 is smaller. That is, the clamping surface 11 has a predetermined angle with respect to the bearing surface 51. In this embodiment, the end of the -X side of the sheet 70 is one end of the sheet 70, and the end of the sheet 70 + X side is the other end of the sheet 70. One end of the sheet 70 is closer to the clamping surface 11 than the other end.

When the lifting mechanism 22 lowers the hand 10 from the state shown in FIG. 1, it will be in the state shown in FIG. 4. FIG. 4 shows a descending state in which the hand 10 descends. In FIG. 4, as shown in FIG. 1, the clamping surface 11 is inclined with respect to the sheet 70. That is, the lifting mechanism 22 lowers the hand 10 in a state where the gripping surface 11 is inclined with respect to the sheet 70.

The gripping is started from the portion where the hand 10 is close to the sheet 70. Compared to the other end side of the sheet 70, the hand 10 first clamps the one end side of the sheet 70. In FIG. 4, the hand 10 only clamps one end side of the sheet 70 and does not clamp the other end side. Since the distance between the sheet 70 and the clamping surface 11 is shorter at the one end side of the sheet 70 than at the other end side, only one end side of the sheet 70 is clamped by the Coulomb force held by the electrostatic. At the time point when the clamping is started, one end side of the sheet 70 is in contact with the clamping surface 11, and the other end side is not in contact. Therefore, as the inclination of the gripping surface 11 is reduced, the sheet 70 is held on the bearing surface 51 and its one end side is gradually deformed while being gripped by the hand 10.

As described above, in a state where the clamping surface 11 is inclined with respect to the sheet 70, the lifting mechanism 22 lowers the hand 10 so that the hand 10 clamps one end side of the sheet 70. However, between FIGS. 1 to 4, the rotation angle of the rotation mechanism 21 does not change and is constant.

Next, once the state shown in FIG. 4 is reached, the control unit 25 controls the rotation mechanism 21 and the lifting mechanism 22 to change the inclination of the gripping surface 11 while lowering the hand 10 to bring the gripping surface 11 closer to the sheet 70 on the other side. Specifically, the control unit 25 controls the actuator 21 a and the actuator 22 a so that the lowering by the lifting mechanism 22 and the rotation by the rotating mechanism 21 are performed in synchronization. Thereby, the hand 10 is rotated in the direction of the arrow A while descending in the direction of the arrow B so that the other end side of the sheet 70 approaches the clamping surface 11.

As shown in FIG. 5, the rotating mechanism 21 rotates the hand 10 until the gripping surface 11 is parallel to the XY plane. FIG. 5 shows a state where the lowering of the hand 10 is completed. The rotating mechanism 21 rotates the hand 10 until the gripping surface 11 is horizontal. Next, at the time point when the gripping surface 11 becomes horizontal, the lowering of the hand 10 by the lifting mechanism 22 ends. Thereby, the gripping surface 11 and the bearing surface 51 of the stage 50 become parallel, and the whole of the piece 70 is gripped by the hand 10. In addition, a mechanical stopper may be provided in the rotation mechanism 21 so that the rotation amount of the actuator 21a is not excessive.

As described above, while the hand 10 is being lowered, the rotation mechanism 21 gradually changes the inclination of the gripping surface 11. Therefore, the hand 10 gently clamps the sheet 70 from one end of the sheet 70 toward the other end. Thereby, when the sheet 70 is clamped, the air between the sheet 70 and the clamping surface 11 can be released from the other end side of the sheet 70. It is possible to prevent air bubbles from being generated between the sheet 70 and the holding surface 11. Therefore, the hand 10 can hold the sheet 70 without causing the sheet 70 to wrinkle. Moreover, since the clamping surface 11 is parallel to the bearing surface 51 of the stage 50, the sheet | seat 70 is clamped flatly.

When holding the entire sheet 70 of the hand 10, as shown in FIG. 6, the lifting mechanism 22 raises the hand 10. That is, the hand 10 is away from the table 50. In addition, when the hand 10 moves away from the table 50, the hand 10 is rotated by the rotation mechanism 21, and the clamping surface 11 returns to the original inclination. That is, in the state shown in Fig. 6, the holding surface 11 is parallel to the holding surface 11 shown in Fig. 1. However, the inclination of the holding surface 11 after the holding piece 70 is held by the hand 10 is not particularly limited.

This prevents air bubbles from being generated between the sheet 70 and the holding surface 11. It is possible to improve the yield of the sheet 70 without wrinkles remaining. Therefore, with a simple configuration, the holding device 100 can process the sheet 70 without wrinkles.

In order to perform the next procedure on the sheet 70, the arm mechanism 20 carries the sheet 70 to another device (not shown). In other devices, since the program is applied in a state where there is no air bubble in the sheet 70, the processing of the sheet 70 can be appropriately performed.

The rotation shaft system of the rotation mechanism 21 is arranged along the Y direction. The rotation axis system of the rotation mechanism 21 is parallel to the sheet 70 before being clamped. Therefore, by the rotation of the rotation mechanism 21, the sheet 70 is gradually held by the edge of the -X side of the sheet 70 toward the edge of the + X side. Therefore, it is possible to more effectively prevent bubbles from being generated between the sheet 70 and the holding surface 11.

Furthermore, an air hole may be provided in the hand 10 for releasing air between the clamping surface 11 and the sheet 70. FIG. 7 shows an example of the structure of the hand 10 having the air hole 12. FIG. 7 is a view of the XY plane that schematically shows the clamping range of the hand 10.

The air holes 12 are provided in the hand 10 at regular intervals. The air hole 12 is a hole penetrating the hand 10. Here, the air holes 12 are arranged in the X direction and the Y direction at intervals of 30 mm. 10 air holes in the X direction and 10 air holes in the Y direction are arranged in an array type. The diameter of the air hole 12 is 1 mm. The hand 10 may be provided with two electrode holes 13. The electrode hole 13 is provided for connection with a clamping electrode which is electrostatically clamped. The electrode hole 13 is disposed at a position that does not overlap the air hole 12.

In this way, since the hand 10 is provided with an air hole 12 for releasing air, the generation of air bubbles can be effectively prevented. Therefore, the sheet 70 can be clamped more appropriately.

Furthermore, in this embodiment, the rotation axis of the rotation mechanism 21 may not be a driving axis but a driven axis. That is, the actuator 21 a may not be provided in the rotation mechanism 21. In this case, the rotation mechanism 21 becomes a rotation holding mechanism that holds the hand 10 at a predetermined angle before the hand 10 contacts the piece 70, and when an external force is applied to the hand 10, the hand 10 rotates about the Y axis. The control section 25 only controls the lifting mechanism 22, and it is not necessary to control the rotating mechanism 21. That is, the control unit 25 only needs to raise and lower the lifting mechanism 22 with a stroke.

Specifically, the rotation mechanism 21 holds the hand 10 so that the angle of the clamping surface 11 with respect to the bearing surface 51 is a predetermined angle before the hand 10 contacts the piece 70. That is, before the hand 10 contacts the sheet 70, the angle between the bearing surface 51 and the clamping surface 11 becomes a predetermined angle other than 0 degrees. Next, the lifting mechanism 22 lowers the hand 10. When the hand 10 contacts the sheet 70, the angle between the clamping surface 11 and the bearing surface 51 will gradually decrease as the hand 10 descends. When the angle between the clamping surface 11 and the bearing surface 51 is 0 degrees, that is, when the clamping surface 11 and the bearing surface 51 become parallel, the lifting mechanism 22 ends descending. The rotation angle of the clamping surface 11 can also be specified by a mechanical stopper or the like.

The clamping device of the present embodiment has a rotation holding mechanism that holds the hand 10 such that the angle of the clamping surface 11 with respect to the bearing surface 51 is a predetermined angle before the contact piece 70 of the hand 10. After the hand 10 contacts the sheet 70, the hand 10 is rotatably held so as to reduce a predetermined angle. In addition, the holding device is a state in which the holding surface 11 maintains a predetermined angle with respect to the bearing surface 51, and the lifting mechanism 22 lowers the hand 10 to hold the one end of the sheet 70 on the hand 10. After the sheet 70 is in contact with the clamping surface 11, the angle between the bearing surface 51 and the clamping surface 11 gradually decreases in accordance with the rotation of the hand 10.

The clamping method of the present embodiment includes the steps of holding the hand 10 such that the angle of the clamping surface 11 with respect to the bearing surface 51 becomes a predetermined angle before the hand 10 contacts the sheet 70; A step of lowering the hand 10 and holding the one end side of the sheet 70 with the hand 10 in a state where the surface 11 is at a predetermined angle with respect to the bearing surface 51; 10 rotation step to reduce the predetermined angle.

(Second embodiment type)

A clamp device according to this embodiment will be described with reference to FIGS. 8 and 9. FIG. 8 is a perspective view schematically showing an arm mechanism 20A of the clamping device according to this embodiment. FIG. 9 is a side view showing a hand portion 10A attached to the arm mechanism 20A. However, since the structure and operation other than the arm mechanism 20A are the same as those of the first embodiment, the description thereof is appropriately omitted.

As shown in FIG. 8, the arm mechanism 20A is configured as a six-axis robotic arm. The arm mechanism 20A includes an S-axis, an L-axis, a U-axis, an R-axis, a T-axis, and a B-axis. Each shaft system is a joint mechanism provided with an actuator such as a servo motor. The arm mechanism 20A includes a main body 26, an arm portion 27, and a wrist portion 28. As shown in FIG. 9, a hand 10A (illustration omitted in FIG. 8) shown in the first embodiment is attached to the front end of the wrist portion 28. The body 26 holds the arm portion 27 in a movable manner. The arm portion 27 holds the wrist portion 28 in a movable manner.

The S-axis is a rotation axis that rotates the body 26 of the arm mechanism 20A. The L-axis is a rotation axis that moves the body 26 of the arm mechanism 20A back and forth. The U-axis system is a rotating shaft that moves the arm portion 27 up and down. The R-axis system is a rotation axis that rotates the arm portion 27. The T-axis is a rotation axis that rotates the wrist 28. The B-axis is a rotation axis that swings the wrist 28 up and down.

The T-axis system of the arm mechanism 20A corresponds to the rotation mechanism 21 of the first embodiment. As shown in FIG. 9, by the T axis of the driving arm mechanism 20A, the hand 10A is rotated in the direction of the arrow A in FIG. 9. Thereby, the inclination of the clamping surface 11A of the hand 10A changes. The U-axis corresponds to the lifting mechanism 22 of the first embodiment. By the U axis of the driving arm mechanism 20A, the hand 10A moves in the direction of the arrow B in FIG. 9.

The sheet 70A is carried on a stage 50A. Similar to the first embodiment, the U-axis lowers the hand 10A in a state where the clamping surface 11A is inclined with respect to the sheet 70A. Thereby, the hand 10A grips one end side of the piece 70A. Next, while the U-axis lowers the hand 10A, the T-axis changes the inclination of the clamping surface 11A, whereby the clamping surface 11A approaches the other end side of the sheet 70A.

In this way, with the six-axis arm mechanism 20A, the hand 10A can be operated similarly to the first embodiment. Thereby, similarly to the first embodiment, the sheet 70A can be appropriately clamped. The clamped sheet 70A can be moved to an arbitrary position by the arm mechanism 20A. Therefore, handling of the sheet 70A becomes easy. Of course, the number of rotation axes of the arm mechanism 20A is not limited to six axes. In addition, the above-mentioned system only drives the U-axis to move the hand 10A up and down, but it is also possible to drive the hand 10A up-and-down by driving the other rotation shaft together with the U-axis.

(Third embodiment)

FIG. 10 is a perspective view schematically showing a structure of an important part of a clamping device 100B according to a third embodiment. Only the front end portion of the arm mechanism 20B is shown in FIG. 10. The third embodiment uses a six-axis arm mechanism 20B similarly to the arm mechanism 20A shown in the second embodiment. Therefore, the arm mechanism 20B includes an S-axis, an L-axis, a U-axis, an R-axis, a T-axis, and a B-axis. In addition, since the basic structure and operation of the clamping device 100B of the third embodiment are the same as those of the first and second embodiments, the description thereof is appropriately omitted.

In this embodiment, the rotation mechanism is constituted by two axes, a B axis and a T axis. Thereby, the hand 10A is rotated about the rotation axis along the diagonal of the sheet 70B. That is, the rotation axis of the rotation mechanism is different from that of the first embodiment. The rotation axis of the rotation mechanism 21 is not parallel to the edge of the sheet 70. The U-axis constitutes a lifting mechanism. The corner portions of the sheet 70B and the hand 10B on the + X side and the + Y side of the sheet 70B are the closest, and the corner portions on the -X side and the -Y side are the farthest away.

As already described in the first embodiment, the arm mechanism 20B changes the inclination of the gripping surface while lowering the hand 10B. Specifically, the U-axis lowers the hand 10B in a state where the grip surface is inclined with respect to the sheet 70B, and the hand 10B grips one end side of the sheet 70. After that, while the U-axis lowers the hand 10B, the inclination of the gripping surface is changed while bringing the gripping surface closer to the other end side of the sheet 70. In addition, in this embodiment, one end of the sheet 70B is a corner portion on the + X side and the + Y side, and the other end side of the sheet 70B is a corner portion on the -X side and -Y side.

Thereby, the hand 10B gradually clamps the sheet 70B from the corner portions on the + X and + Y sides of the sheet 70B toward the corner portions on the -X and -Y sides. Therefore, as in the first embodiment, the generation of bubbles can be prevented. Thereby, the sheet | seat 70B can be clamped appropriately. In addition, the elevating mechanism may be constituted by a double shaft.

The above-mentioned holding device is suitable for holding a sheet-shaped secondary battery manufactured in a roll-to-roll manner. Of course, in this embodiment, the clamping target of the clamping device is not limited to the sheet-shaped secondary battery, but may be a sheet-shaped element other than the secondary battery. For example, a charging layer or an electrode layer is formed on one or both sides of a substrate in a roll-to-roll manner, thereby manufacturing a component on a sheet. A roll formed with a sheet-like element can be manufactured in a roll-to-roll manner. Then, the roll of the sheet-like element is cut and held by a holding device. The gripper moves the sheet to the next step and executes the procedure. The object to be clamped is not limited to a sheet-like element, and may be a film or a sheet for various purposes. The planar shape of the clip 70 is not limited to a square, and may be other shapes such as a rectangle or a circle.

The example of the embodiment of the present invention has been described above, but the present invention includes various appropriate changes without departing from the purpose or advantages of the present invention, and is not limited to the above-mentioned embodiment.

This application claims priority based on the Japanese application (Japanese Patent Application No. 2017-11363) filed on January 25, 2017, and the disclosure of the priority basis is incorporated in this application.

Claims (8)

    A clamping device includes: a hand having a clamping surface for clamping a sheet carried on a bearing surface; and a rotation holding mechanism for using the clamping surface with respect to the bearing before the hand contacts the sheet. The hand is held so that the angle of the face becomes a predetermined angle, and the hand is rotatably held in a manner that the predetermined angle is reduced after the hand contacts the sheet; and a lifting mechanism is provided on the clamping surface with respect to the load The angle of the face is maintained in the state of the predetermined angle to lower the hand so that the hand grips one end side of the sheet.         The clamping device according to claim 1, further comprising a control unit for controlling the rotation holding mechanism and the lifting mechanism to reduce the predetermined angle while lowering the hand after the hand touches the sheet, The clamping surface is brought closer to the other end side of the sheet.         The clamping device described in claim 1 or claim 2, wherein the hand is provided with an air hole for releasing air between the sheet and the clamping surface.         The holding device described in claim 1 or claim 2, wherein the hand is used to hold the sheet by electrostatic clamping.         A clamping method uses a clamping device. The clamping device includes: a hand having a clamping surface for clamping a piece carried on a bearing surface; and a rotation holding mechanism to change the clamping surface with respect to the foregoing. The angle of the bearing surface rotatably holds the hand; and a lifting mechanism for lowering the hand. The clamping method includes the following steps: before the hand touches the sheet, the clamping surface is phased. And a step of holding the hand so that the angle of the load-bearing surface becomes a predetermined angle; in a state where the grip surface is at the predetermined angle with respect to the load-bearing surface, the hand is lowered and the hand grips the sheet. A step of one end side; and a step of reducing the predetermined angle by rotating the hand after the hand touches one end side of the sheet.         The clamping method according to claim 5, wherein the rotation holding mechanism and the lifting mechanism are controlled so that after the hand touches the sheet, the predetermined angle is reduced while the hand is lowered to make the clamping The surface is close to the other end side of the aforementioned sheet.         The clamping method described in claim 5 or claim 6, wherein the hand is provided with an air hole for releasing air between the sheet and the clamping surface.         The clamping method described in claim 5 or claim 6, wherein the aforementioned hand is configured to clamp the sheet by electrostatic clamping.