TW201830583A - Method and apparatus for collecting tape capable of recycling the unused elongated tape adhered to the semiconductor chip or LED - Google Patents

Abstract

Provided are a method and an apparatus for collecting tapes, capable of more highly automated recycling of the released elongated tape. After cutting the elongated waste tape Tn into single sheets in a state of being flatly expanded, the single-sheet waste tapes Tn are laminated and stored in the recovery box while maintaining the flat state. In this case, since the waste tapes Tn are stacked neatly and without any waste of space, the volume occupied by the waste tapes Tn can be minimized with respect to the storage amount of the waste tapes Tn. Because the frequency of replacement of the recovery box can be reduced, the operating efficiency of the device can be greatly improved. Moreover, since the speed at which the waste tapes Tn are deposited is fixed, it is easy to perform a plan work.

Description

   Belt recovery method and belt recovery device   

The present invention relates to a process for recovering unnecessary long tapes in the process of supplying adhesive tapes attached to various substrates such as semiconductor wafers, LEDs (light emitting diodes), and electronic circuits. Belt recovery method and belt recovery device.

A semiconductor wafer (hereinafter, appropriately referred to as a “wafer”) is a circuit pattern in which a plurality of elements are formed on the surface. For example, bumps or fine circuits are formed on the surface of the wafer. Therefore, in order to prevent contamination and damage of the circuit surface during back-grinding and transportation, an adhesive tape for protection is attached.

Here, a conventional configuration of a tape attaching device for attaching an adhesive tape to the surface of a wafer will be described. As shown in FIG. 33, the conventional tape attaching apparatus 101 includes a tape supply section 103, a separation tape peeling section 105, a holding table 107, a tape attaching section 109, a tape cutting mechanism 111, a tape recovery section 113, and a separation tape recovery. Department 115 and so on.

The tape supply unit 103 is configured to discharge and guide the adhesive tape TS from a supply bobbin filled with a raw material roll wound with an adhesive tape TS with a separation tape wound around the circuit protection. The separation tape peeling section 105 peels the separation tape S from the released adhesive tape TS. The holding table 107 sucks and holds the wafer W with the circuit formation surface facing upward. An example of the tape application part 109 is an application roller, which moves horizontally to the left in FIG. 33. With this horizontal movement, the tape attaching section 109 attaches the adhesive tape T from which the separation tape S has been peeled to the wafer W on the holding table 107.

The tape cutting mechanism 111 includes a cutter 111a, and the tape cutting mechanism 111 is rotated around a vertical axis indicated by a symbol P to cut the adhesive tape T along the outer shape of the wafer W. The unnecessary waste tape Tn that has been cut off is rolled up into a roll shape on a rewinding shaft constituting the tape recovery unit 113 and recovered. Further, the separation tape S peeled from the adhesive tape T is rolled into a roll shape on a rewinding shaft constituting the separation tape recovery unit 115 and recovered.

In such a tape attaching device, it is necessary to load the adhesive tape T in the tape supply unit 103 below a certain amount, or if the amount of the discarded tape Tn collected in the tape recovery unit 113 exceeds a certain amount, it is necessary. Replace the roller. In the case of replacing the roller in the conventional tape attaching device 101, it is necessary for the operator to perform complicated work manually.

That is, in the tape supply unit 103, it is necessary to restart a series of operations of cutting the adhesive tape T discharged from the raw material roll, replacing the raw material roll, joining the cut adhesive tape T, and releasing the adhesive tape T. . Then, in the tape recovery unit 113, a series of operations such as cutting the unnecessary tape Tn, removing the waste tape Tn recovered into a roll, joining the waste tape Tn to the rewinding shaft, and rewinding the waste tape Tn are required. It is necessary for the conventional device to interrupt the operation of the tape attaching device during such a series of operations.

In recent years, in order to avoid a decrease in the attaching efficiency due to an interruption in the operation of the tape attaching device, a roll replacement operation has been performed, and in particular, an attempt has been made to automatically engage the ends of the cut adhesive tape T with each other. As an example, there is a proposal of the following tape joining method (for example, refer to Patent Document 1). That is, the adhesive member is attached by the end of the preceding adhesive tape T with a separation tape, and the adhesive member is separated and moved with respect to the releasing direction of the adhesive tape T, so that the adhesive tape T and the separation tape S are at a predetermined length. Range peeling. The end of the adhesive tape T with the release tape is then attached to the front end portion of the subsequent adhesive tape T with the release tape supplied from a new raw material roll, so that the end of the adhesive tape T with the release tape can be attached. Automatically join each other.

Prior art literature

Patent Document 1 Japanese Patent Application Publication No. 2014-133616

However, the above conventional device has the following problems.

That is, the conventional automatic joining method is based on the premise that it is applicable to a tape supply unit, and it is difficult to apply it to a tape recovery unit, a separation tape recovery unit, and the like. In the conventional device, for example, in the tape recovery section, the long waste tape is rolled up on a shaft and recovered. In such a conventional recycling method, after cutting the waste tape, it is necessary to take out the waste tape that has been rolled back into a roll shape and collect it for each shaft and replace it with a new shaft.

Since no tape or the like is wound on the new shaft, it is difficult to apply a conventional automatic joining method. Therefore, whenever the collection amount of the waste tape becomes more than a predetermined amount, it is necessary to manually perform a series of complicated operations including removing the waste tape that has been collected into a roll. As a result, the burden on workers is increased. In addition, a series of operations such as removing a waste tape are performed after stopping the device, and the device is turned on again after the operation is completed, so the operating efficiency of the device is reduced. Furthermore, since a large-sized rewinding shaft needs to be provided in the configuration of the rewinding and recycling, there is also a concern that the adhesive tape attaching device is increased in size.

The present invention has been made in view of such circumstances, and a main object of the present invention is to provide a tape recovery method and a tape recovery device capable of more highly automated recovery of the released long tape.

In order to achieve this object, the present invention has the following configuration.

That is, the tape recycling method of the present invention is characterized by having a holding process in which a region of a predetermined length from a front end of the tape released in a long shape is held in a flat state, and a cutting process in which the aforementioned process is held in a flat state. The tape is cut into single pieces; and in the storage process, the tape cut into pieces is stored in a tape recovery box while the tape cut into pieces is maintained in a flat state.

(Operation / Effect) According to this method, an area of a predetermined length is held in a flat state from the front end of the long strip, and the flat strip is cut into a single piece. Furthermore, while maintaining this flat state, a single sheet-like tape laminate is stored in a tape recovery cassette. In this case, in the operation of recovering the tape, when the storage amount of the recovery box exceeds a predetermined amount, in addition to the operation of replacing the recovery box, most processes can be automated, so that the operating efficiency of the device can be further improved.

In addition, since the single-piece tapes stored in the tape recovery box are each neatly stacked without wasting space, the volume occupied by the tape can be minimized with respect to the storage amount of the tape. As a result, the frequency of replacement with the recovery box can be reduced, so that the operation efficiency of the device can be greatly improved. In addition, since the speed at which the single-piece tape is stacked in the tape recovery box is fixed, it is easy to perform a programmatic replacement operation.

In the above-mentioned invention, it is preferable that, in the holding process, the holding mechanism holds a region of a predetermined length from a front end of the belt in a flat state, and in the cutting process, the holding mechanism is flat. The aforementioned tape is cut into a single piece while the aforementioned tape is held, and the holding mechanism that holds the tape cut into a single piece during the storage process is induced along with the tape toward the tape recovery box.

(Operation / Effect) According to this configuration, the tape is cut into a single piece while the holding mechanism holds the tape flat, and then the cut tape is maintained in a flat state together with the holding mechanism and is stored in layers. In this case, the long belt is supplied in a series of processes up to the laminated storage in a state held by the holding mechanism. Therefore, the tape can be stacked and stored in a flat state with certainty.

In the above invention, it is preferable that the holding mechanism holds the tape in a flat state by adsorbing the tape. According to this configuration, since the holding mechanism holds the belt, it is possible to more easily and surely hold the belt in a flat state.

In order to achieve such an object, the present invention may take the following configurations.

That is, the tape recovery device of the present invention is provided with a tape holding mechanism that holds an area of a predetermined length from the front end of the tape that is released in a long shape in a flat state and a tape cutting mechanism that holds in a flat state. The aforementioned tape is cut into a single piece; a tape recovery box stores the tape cut into the aforementioned single piece; and a tape induction mechanism is configured to induce the aforementioned tape cut into the aforementioned single piece to the aforementioned tape recovery box while maintaining a flat state, and The tape stack layer cut into the single pieces is stored in the tape recovery box.

(Operation / Effect) According to this configuration, an area of a predetermined length from the front end of the long belt is held in a flat state, and the flat belt is cut into a single piece. Then, while maintaining the flat state, the single-layered tape stacking layer was stored in a tape recovery box. In this case, since most processes can be automated in addition to the operation of replacing the cassette with a recovery box, the operating efficiency of the device can be improved.

In addition, since the single-piece tapes stored in the tape recycling box are each neatly stacked without wasting space, the volume occupied by the tape can be minimized with respect to the storage amount of the tape. As a result, since the frequency of replacement with the recovery box can be reduced, the operation efficiency of the device can be greatly improved. In addition, since the speed at which the single-sheet-shaped tape is stacked in the tape recovery cassette is fixed, it is easy to perform a programmatic replacement operation.

In the above invention, it is preferable that the tape cutting mechanism cuts the tape held by the tape holding mechanism into a single piece, and the tape induction mechanism holds the tape of the tape cut into a single piece. The tape holding mechanism is guided toward the tape recovery box together with the tape.

(Operation / Effect) According to this configuration, the tape is cut into individual pieces while the tape is held flat by the holding mechanism, and the tape system that is cut is maintained in a flat state together with the holding mechanism and is stored in layers. In this case, the long belt is supplied in a state of being held by the holding mechanism until a series of processes until it is stacked and stored. Therefore, the tape can be stacked and stored in a truly flat state.

Further, it is preferable that a plurality of the tape recovery boxes are provided, and the tape induction mechanism includes a switching mechanism that switches the tape recovery box that uses the tape cut into a single piece as an object of induction to another tape recovery box.

(Operation / Effect) According to this configuration, the tape induction mechanism switches the tape recovery box that has been cut into a single piece as an object of induction to another tape recovery box. That is, even if the amount of the tape accommodated in the tape collection box becomes a predetermined amount or more, the tape collection box can be switched, and the tape collection box having a predetermined amount can be replaced while the tape collection operation is continued. Therefore, the time for which the operation of the device is interrupted can be significantly reduced, so that the operation efficiency of the device can be further improved.

In the above invention, it is preferable that the tape holding mechanism includes a flat surface that abuts the tape, and an adsorption hole that holds the tape through the flat surface. According to this configuration, since the holding mechanism sucks the belt while abutting the belt through the flat surface, the belt can be more easily and surely held in a flat state.

According to the tape recovery method and the tape recovery device of the present invention, since most of the process of recovering the tape can be automated, the burden on the operator can be reduced. In addition, since the frequency of replacement with a recovery box can be reduced, the operation efficiency of the device can be improved. In addition, since the speed at which the single-piece tape is stacked in the tape recovery box is fixed, it is easy to perform a programmatic replacement operation.

1‧‧‧ Adhesive tape attachment device

3‧‧‧ with splicing device

5‧‧‧ holding table

7‧‧‧ with attachment unit

9‧‧‧ with cutting unit

11‧‧‧ with separation unit

13‧‧‧ with recycling department

15‧‧‧Separation zone recovery department

17‧‧‧ with supply department

19‧‧‧ Clamping tip forming unit

21‧‧‧ with splicing unit

31‧‧‧ stripping unit

33‧‧‧ Launch Component

35‧‧‧ Crimp Roller

41‧‧‧Cutter unit

43‧‧‧ holding unit

45‧‧‧ holding unit

51‧‧‧ with retaining member

53‧‧‧ with pushing member

55‧‧‧Cutter unit

57‧‧‧ with recovery unit

T‧‧‧adhesive tape

TSa‧‧‧ front band

TSb‧‧‧ behind

S‧‧‧Separation zone

F‧‧‧Recycling box

G‧‧‧Recycling box

H‧‧‧Clamp end

FIG. 1 is a front view showing a basic configuration of the adhesive tape application device of the embodiment.

FIG. 2 is a diagram showing a configuration of a tape supply unit of the embodiment.

FIG. 2 (a) is a perspective view of the tape supply section, and FIG. 2 (b) is a front view of the tape supply section.

Fig. 3 is a diagram showing a configuration of a clamp tip forming unit according to the embodiment.

FIG. 4 is a diagram showing a configuration of a tape joining unit according to the embodiment.

Fig. 5 is a diagram showing a configuration of a tape recovery unit of the embodiment.

FIG. 6 is a diagram showing a configuration of a separation belt recovery unit according to the embodiment.

Fig. 7 is a flowchart showing the operation of the adhesive tape application device of the embodiment.

FIG. 7 (a) is a flowchart showing an outline of an operation of attaching an adhesive tape to a wafer, FIG. 7 (b) is a detailed flowchart explaining the operation of step S7, and FIG. 7 (c) is a flowchart of an operation of recovering a waste tape Detailed flowchart.

FIG. 8 is a diagram showing the operation in step S2 of the embodiment.

Fig. 8 (a) is a diagram showing a state where the applicator roller is at a starting position, and Fig. 8 (b) is a diagram showing a state where the applicator roller is moved to an end position.

FIG. 9 is a diagram showing the operation of step S3 in the embodiment.

Fig. 10 is a diagram showing the operation of step S4 in the embodiment.

Fig. 11 is a diagram showing the operation of step S7-1 in the embodiment.

Fig. 12 is a diagram showing the operation of step S7-1 in the embodiment.

Fig. 13 is a diagram showing the operation of step S7-1 in the embodiment.

Fig. 14 is a diagram showing the operation of step S7-1 in the embodiment.

Fig. 15 is a diagram showing the operation of step S7-1 in the embodiment.

FIG. 16 is a diagram showing the operation of step S7-2 in the embodiment.

Fig. 17 is a diagram showing the operation of step S7-3 in the embodiment.

Fig. 18 is a diagram showing the operation of step S7-4 in the embodiment.

FIG. 18 (a) is a view showing a state before the previous tape is held, FIG. 18 (b) is a view showing a state after the previous tape is held, and FIG. 18 (c) is a view showing a state where the holding end is held .

FIG. 19 is a diagram showing the operation of step S7-5 in the embodiment.

Fig. 20 is a diagram showing the operation of step S7-6 in the embodiment.

Fig. 21 is a diagram showing the operation of step S7-7 in the embodiment.

FIG. 21 (a) is a diagram showing a state before switching the raw material roll, and FIG. 21 (b) is a diagram showing a state after switching the raw material roll.

Fig. 22 is a diagram showing the operation of step S7-8 in the embodiment.

FIG. 22 (a) is a diagram showing a state before releasing a subsequent tape, and FIG. 22 (b) is a diagram showing a state after releasing a subsequent tape.

Fig. 23 is a diagram showing the operation of step S7-9 in the embodiment.

FIG. 23 (a) is a diagram showing a state where the front end of the following tape is clamped and joined with a rear end of the preceding tape, and FIG. 23 (b) is a diagram showing a state where the joined tape is released.

Fig. 24 is a diagram showing the operation of step S5-1 in the embodiment.

Fig. 24 (a) is a diagram showing a state in which the tape holding member is moved toward the terminal position, Fig. 24 (b) is a diagram showing a state in which the tape holding member is holding the discarded tape, and Fig. 24 (c) is a state in which the tape holding member is withdrawing the discarded tape Illustration.

Fig. 25 is a diagram showing the operation of step S5-2 in the embodiment.

Fig. 26 is a diagram showing the operation of step S5-3 in the embodiment.

FIG. 26 (a) is a diagram showing the operation of the blade in the embodiment, and FIG. 26 (b) is a diagram showing a modification of the operation with respect to the blade.

Fig. 27 is a diagram showing the operation of step S5-4 in the embodiment.

Fig. 28 is a diagram showing the operation of step S5-5 in the embodiment.

Fig. 29 is a diagram showing the operation of replacing the recovery box in the embodiment.

FIG. 30 is a diagram comparing the adhesive tape bonding method of the embodiment with a conventional example.

FIG. 30 (a) is a diagram showing a state where a suction member is caused to adsorb a belt in a conventional example, and FIG. 30 (b) is a diagram showing a state where a suction member is separated in a conventional example, and FIG. 30 (c) is FIG. 30 (d) is a diagram showing a problem of a conventional example in the case where a tape having a high adhesive force is used.

FIG. 31 is a diagram comparing the adhesive tape recovery method of the embodiment with a conventional example.

FIG. 31 (a) is a diagram showing a problem of a conventional example, and FIG. 31 (b) is a diagram showing a configuration of the embodiment.

FIG. 32 is a diagram showing a configuration of an adhesive tape bonding apparatus according to a modification.

FIG. 32 (a) is a diagram showing a configuration of a tape holding member in a front end portion of an adhesive tape, and FIG. 32 (b) is a diagram showing a configuration of step S7-9 in a modification.

FIG. 33 is a diagram showing a configuration of a conventional adhesive tape bonding apparatus.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a front view showing a basic configuration of an adhesive tape application device 1 including a tape bonding device according to an embodiment. In addition, in the figure showing the adhesive tape attachment device 1, the supporting means for supporting various structures and the driving means for driving various structures are not shown in the figure.

In this embodiment, an adhesive tape T for surface protection attached to various substrates such as a semiconductor wafer (hereinafter simply referred to as a "wafer") is supplied as a long object laminated with a separation tape S. , And cut into a predetermined shape on the downstream side as an example. That is, in this embodiment, the elongated adhesive tapes are joined to each other.

In addition, "upstream" and "downstream" in this embodiment are defined as those along the release direction of the adhesive tape. That is, "upstream" means the side closer to the tape supply part mentioned later in the release direction of an adhesive tape. In addition, the adhesive tape T in a state where the separation tape S is superposed is referred to as a tape TS.

    <Explanation of the overall structure>    

As shown in FIG. 1, the adhesive tape application device 1 of the embodiment includes a tape bonding device 3, a holding table 5, a tape application unit 7, a tape cutting unit 9, a tape separation unit 11, a tape recovery unit 13, and a separation tape. Recovering department 15. The tape joining device 3 is connected to the front end of the preceding tape TS and the front end of the other tape TS. A specific configuration of the tape joining device 3 will be described later.

The holding table 5 holds and holds the wafer W with the circuit formation surface facing upward. The holding table 5 in the embodiment is a chuck table that holds and holds the wafer W, but the configuration of the holding table 5 is not limited to this. In addition, a cutter advance groove 5a is formed on the upper surface of the holding table 5 to rotate the blade 9c provided in the tape cutting unit 9 described later along the outer shape of the wafer W to cut the adhesive tape T.

The tape attaching unit 7 attaches the adhesive tape T to the circuit surface of the wafer W which is placed on the holding table 5 and is sucked and held. As shown in FIG. 1, the tape attachment unit 7 includes a movable table 7 a that reciprocates horizontally along a track (not shown), and an application roller supported by a bracket connected to the movable table 7 a. 7b.

The belt cutting unit 9 is attached to a lower portion of a movable table 9a capable of driving up and down, and the device is provided with a support arm 9b that can be driven to rotate about a longitudinal axis P located on the center of the holding table 5. A cutter 9c having a downwardly pointed blade is attached to the free end side of the support arm 9b. That is, the support arm 9b is configured to rotate around the vertical axis P as a rotation center, so that the cutter 9c moves along the outer periphery of the wafer W to cut the adhesive tape T.

The tape separating unit 11 separates the adhesive tape Tw cut by the cutter 9c and attached to the surface of the wafer W from the unnecessary waste tape Tn after being cut. The belt separating unit 11 includes a guide roller 11 a and a nip roller 12 that maintain the tension of the unnecessary waste tape Tn. The nip roller 12 is composed of a pinch roller 12a that can be moved up and down and a feed roller 12b that is driven by a motor. The belt separating unit 11 is configured to reciprocate horizontally along left and right along a track (not shown).

    <Structure with Bonding Device>    

Here, the configuration of the tape joining device 3 will be described. As shown in Fig. 1, the tape joining device 3 includes a tape supply unit 17, a clamp tip forming unit 19, and a tape joining unit 21. The configuration of the tape supply unit 17 will be described using the drawings of FIG. 2. FIG. 2 (a) is a perspective view of the lace supply unit 17, and FIG. 2 (b) is a front view of the lace supply unit 17. FIG.

As shown in FIG. 2 (a), the tape supply unit 17 is configured such that a plurality of bobbin 25 standing upright are provided on the rotating plate 23, and each of the bobbins 25 is filled with a raw material roller 28 with a TS. In the embodiment, it is assumed that two bobbins 25A and 25B are erected on the rotating plate 23. The raw material roll loaded in the bobbin 25A is given the symbol 28A, and the raw material roll loaded in the bobbin 25B is given the symbol 28B to distinguish the two.

The rotating plate 23 is configured to rotate around the axis of the central shaft 26 by the driving mechanism 24. By the rotation of the rotary plate 23, each bobbin 25 can be mutually moved between a supply position and a standby position. Each figure in FIG. 2 shows a state where the bobbin 25A is arranged at the supply position and the bobbin 25B is arranged at the standby position.

The raw material roller 28 arranged in the standby position is configured to be able to be taken out of the adhesive tape application device 1 through an opening and closing door (not shown). The operator can take out the raw material roller 28 and set a new raw material roller 28 at the standby position. In addition, in the tape supply unit 17, the standby position is configured to be shifted from the central portion of the adhesive tape application device 1 compared to the supply position. Generally, a high-temperature structure, a cutter, a movable portion, and the like are mostly provided in a central portion of the adhesive tape application device 1. Therefore, it is possible to avoid a situation in which the operator approaches the high-temperature portion or the movable portion when replacing the original roller 28 that has been switched to the standby position.

Each bobbin 25 is provided with a belt holding member 27 and a guide roller 29. The leading end of the tape TS drawn from the raw material roller 28 loaded in the bobbin 25 is guided to the tape holding member 27 by the guide roller 29 while maintaining tension. An example of the tape holding member 27 is a two-piece plate-like member, and each of the plate-like members has a tape TS interposed therebetween.

As shown in FIG. 3, the nip tip forming unit 19 includes a peeling unit 31, a pushing-out member 33, and a pressure-contact roller 35. The peeling unit 31 peels the tape TS into an adhesive tape T and a separation tape S. The peeling unit 31 is composed of a guide roller 37 and a feed roller 39.

The guide roller 37 maintains the tension of the tape TS and the adhesive tape T after peeling. The feed roller 39 is configured to be capable of reciprocating horizontally to the left and right. The peeled separation tape S is wound around a feed roller 39 and guided toward the separation tape recovery unit 15.

The push-out member 33 is configured to be drivable in a direction R (direction y in FIG. 3) substantially perpendicular to the release direction L of the adhesive tape T, and includes an exterior portion 33 a and a protruding portion 33 b. The protruding portion 33b is disposed on the upper surface of the inner plate 33c, and the inner plate 33c is connected to the bottom surface of the exterior portion 33a via the elastic member 33d. The exterior portion 33a and the inner plate 33c are configured to be independently pushed up in the direction R. In addition, the inner plate 33c is pushed up so that the protruding portion 33b protrudes to the outside of the exterior portion 33a.

When the pushing member 33 is driven in the direction R, a part of the adhesive tape T protrudes in the direction R by the contact of the protruding portion 33b. The crimping roller 35 is configured to crimp the pressure-sensitive adhesive tapes T protruding in the direction R and pressure-bond the protruding pressure-sensitive adhesive tapes T to form a clamping end H. The specific operation of the pushing-out member 33 and the crimping roller 35 and the forming process of the holding end H will be described later.

As shown in FIG. 4, the tape joining unit 21 includes a cutter unit 41, a holding unit 43, and a holding unit 45. The cutter unit 41 includes a movable table 41a and a blade 41b.

The movable table 41a can be driven in the direction R by a driving mechanism (not shown). The movable stage 41a is configured to be driven in the width direction of the tape TS (z direction in FIG. 4). A blade 41b is provided at a front end portion of the movable table 41a. The blade 41b is at a predetermined position shown by the symbol C, and cuts the tape TS in the width direction. The leading tape TS is cut through the blade 41c, so that the end portion used for joining the following tape TS is formed in the leading tape TS.

An example of the holding unit 43 is that it can be driven in the direction R, and is configured to abut the tape TS from the separation tape S side by this driving. The holding unit 43 has a gap portion 44, and the cutter unit 41 is configured to approach the tape TS via the gap portion 44, and can cut the tape TS at a predetermined position C.

The holding unit 45 can be driven in the direction R. The grip unit 45 is configured to abut on the tape TS from the side of the adhesive tape T by being driven in the direction R. In other words, the holding unit 43 and the holding unit 45 are driven to sandwich the tape TS and hold the tape TS in a stable manner. In addition, each of the holding unit 43 and the holding unit 45 is preferably configured to be capable of performing vacuum suction. In such a case, the tape TS can be held relatively stably by performing vacuum suction after contacting the tape TS.

The holding unit 45 is composed of a plurality of members juxtaposed in the release direction L, and has at least one gap portion 46 between the plurality of members. In the embodiment, the holding unit 45 is provided with two members 45a and 45b, and a gap portion 46 is formed between the members 45a and 45b.

The members 45a and 45b are configured to be driven synchronously in the same direction as each other in the direction R, and can be driven in opposite directions to each other in the release direction L. When the member is driven in the opposite direction, the gripping unit 45 stably grips the gripping tip H formed by the gripping tip forming unit 19. With the configuration in which the holding end H is formed on the adhesive tape T and the holding unit 45 holds the holding end H, even if the adhesive force of the adhesive tape T is strong, the adhesive tape T can also be used at the rear end of the tape TS. T and separation tape S are surely separated.

    <Structure of Recycling Section>    

Next, the configuration of the tape recovery unit 13 will be described. As shown in FIG. 5, the tape recovery unit 13 includes a tape holding member 51, a tape pressing member 53, a cutter unit 55, and a tape recovery unit 57.

The belt holding member 51 includes a movable table 51a and a holding member 51b. The movable table 51a is configured to reciprocate in a horizontal direction. The holding member 51b is connected to the movable table 51a. The holding member 51b is movable in the thickness direction of the unnecessary waste tape Tn, thereby sandwiching and holding the waste tape Tn from both sides of the back surface. The holding member 51b is not limited to a structure that holds the waste tape Tn, and a structure that sucks and holds the waste tape Tn or the like may be used. The holding member 51b holds the discarded tape Tn and the movable table 51a moves to the right as shown in FIG. 5 so that the discarded tape Tn guided by the guide roller 50 toward the tape recovery unit 13 is pulled out in a horizontal direction. The bottom is held steadily.

The belt pressing member 53 includes a movable table 53a and a pressing plate 53b. The movable table 53a is configured to be reciprocally movable up and down between the standby position shown in Fig. 5 and a recovery position of a recovery box F to be described later. The pressing plate 53b is connected to the movable table 53a, and the back surface (lower side in the figure) is flat. On the other hand, at least a suction portion of the flat back surface is provided with suction holes. That is, the waste tape Tn drawn out by the tape holding member 51 is stably sucked and held in a flat state spreading in a horizontal direction through the flat surface of the pressing plate 53b.

Then, after the waste tape Tn is cut by a cutter unit 55 described later, the movable table 53a is moved toward the collection box F arranged at the collection position, so that the waste tape Tn cut into a single piece is stored in a flat state that is horizontally expanded. Recycling box.

The cutter unit 55 includes a movable table 55a and a blade 55b. The movable table 55a is configured to be driven in the width direction and the thickness direction of the waste tape Tn, respectively. The blade edge 55b is connected to the front end of the movable table 55a, and the blade edge faces the waste tape Tn. That is, with the driving of the movable table 55a, the blade 55b cuts the waste tape Tn in the width direction. That is, the waste tape Tn is stably held in a state where it is expanded in the horizontal direction by the holding member 51b and the pressing plate 53b, and is cut into a single piece by the blade 55b while maintaining the state.

The tape recovery unit 57 includes a turntable 58 and a plurality of recovery boxes F. In the embodiment, two recovery boxes F1 and F2 are provided. The turntable 58 is configured to rotate about the axis of the central axis V. By the rotation of the turntable 58, each of the recovery boxes F is mutually moved between the recovery position and the standby position. FIG. 5 shows a state where the recovery box F1 is disposed at the recovery position, and the recovery box F2 is disposed at the standby position.

The collection position is located directly below the belt pressing member 53, and the waste tape Tn cut into a single piece is stored in a collection box F arranged at the collection position. In addition, the standby position is configured to be farther away from the center of the tape attaching device 1 than the collection position, and the collection box F arranged in the standby position can be stuck toward the opening and closing door 59 shown in FIG. 1. The outside of the tape attachment device 1 is taken out.

    <Configuration of Separation Belt Recovery Section>    

The configuration of the separation belt recovery unit 15 is the same as that of the belt recovery unit 13. That is, as shown in FIG. 6, the separation belt recovery unit 15 includes a separation belt holding member 61, a separation belt pressing member 63, a cutter unit 65, and a separation belt recovery unit 67.

The separation belt holding member 61 includes a movable table 61a and a holding member 61b. The separation member S is held by the holding member 61b and the movable table 61a is moved to the left as shown in FIG. 6 so that the separation band S guided by the guide roller 60 toward the separation band recovery unit 15 is pulled out in the horizontal direction. It is stably maintained in the state.

The separation belt pressing member 63 includes a movable table 63a and a pressing plate 63b. The movable table 63a is configured to reciprocate in the vertical direction. The pressing plate 63b is provided with suction holes in at least the separation belt suction portion of the flat back surface, and the separation belt S drawn out by the separation belt holding member 61 is sucked and held by the pressing plate 63b in a flat state spreading in the horizontal direction.

The cutter unit 65 includes a movable table 65a and a blade 65b. The movable table 65a is configured to be driven in the width direction and the thickness direction of the separation belt S, respectively. The blade 55b is connected to the front end of the movable table 55a, and cuts the separation tape S into a single piece in the width direction.

The separation belt recovery unit 67 includes a rotary table 68 and a plurality of recovery boxes G. In the embodiment, two recovery boxes G1 and G2 are provided. The turntable 68 is configured to rotate about the axis of the central axis W. By the rotation of the rotary table 68, each of the recovery boxes G is mutually moved between the recovery position Gc and the standby position Gs.

FIG. 6 shows a state where the recovery box G1 is disposed at the recovery position Gc and the recovery box G2 is disposed at the standby position Gs. The separation tape S cut into individual pieces is stored in a recovery box G arranged at a recovery position. The recovery box G arranged in the standby position Gs can be taken out of the adhesive tape attachment device 1 through the opening and closing door 69 shown in FIG. 1.

    <Overview of Attachment Action>    

Here, a series of basic operations for attaching the adhesive tape T for circuit surface protection to the wafer W using the adhesive tape attaching apparatus 1 is demonstrated. FIG. 7 (a) is a flowchart illustrating a process of attaching the protective adhesive tape T to the wafer W. FIG.

When the attaching instruction is issued, the wafer W stored in the predetermined storage section is aligned with the alignment table, and then placed on the holding table 5 by a wafer transfer mechanism (not shown). The wafer W placed on the holding table 5 is rotated, and is sucked and held in an aligned state so that the center of the wafer W is above the center of the holding table 5. (Step S1).

At this time, each of the tape attaching unit 7, the tape cutting unit 9, and the tape peeling unit 11 moves to the starting position shown in FIG. 8 (a). That is, the tape attaching unit 9 moves to the right of the holding table 5, and the tape peeling unit 11 moves to the left of the holding table 5. The tape cutting unit 9 stands by above the holding table 5.

Further, the raw material roll 28A loaded in the supply position of the tape supply unit 17 is discharged downstream and supplied with an adhesive tape TS with a separation tape, and the tape TS is peeled by the peeling unit 31 into an adhesive tape T and a separation tape S. Then, the adhesive tape T is guided to the tape attaching unit 7 and the tape peeling unit 11.

Next, as shown in FIG. 8 (b), the application roller 7b of the application unit 7 rotates the adhesive tape T forward (on the left in FIG. 8) on the wafer W while pushing the adhesive tape T downward, Move from the starting position shown by the dotted line to the end position shown by the solid line. Accordingly, the adhesive tape T is attached to the entire surface of the wafer W (step S2).

After the adhesive tape T is attached to the wafer W, as shown in FIG. 9, the tape cutting unit 9 waiting above is lowered, and moves from the starting position shown by the dotted line to the cutting position shown by the solid line. Then, the tape cutting unit 9 is lowered toward the cutting position, so that the cutter 9c penetrates the adhesive tape T in the cutter advancing groove 5a of the holding table 5.

After the cutter 9c is stuck into the adhesive tape T, the support arm 9b rotates with the longitudinal axis P as the rotation center. In accordance with the above-mentioned operation, the cutter 9c is rotated while sliding along the outer periphery of the wafer, so that the adhesive tape T is cut along the outer shape of the wafer (step S3).

When the operation of cutting the adhesive tape T along the outer shape of the wafer is completed, the tape cutting unit 9 is raised to the original standby position. Then, the tape attaching unit 7 is reset from the end position toward the starting position. While the attachment unit 17 is reset to the initial position, as shown in FIG. 10, the tape peeling unit 11 is moved forward (to the right in FIG. 10). That is, the tape peeling unit 11 moves to the right from the starting position shown by the dotted line in FIG. 10 to the terminal position shown by the solid line.

The tape peeling unit 11 rolls up and peels the discarded tape Tn remaining on the wafer W by cutting and cutting out of the adhesive tape T while moving toward the end position (step S4). In addition, a part Tw of the adhesive tape T attached to the surface of the wafer W is given a symbol Tw to distinguish it from the discarded tape Tn.

When the peeling unit 21 reaches the end position of the peeling operation, the tape peeling unit 11 is reset from the end position to the starting position. At this time, the discarded tape Tn is taken up and guided toward the tape recovery unit 13 to be recovered, and a certain amount of tape TS is discharged from the tape supply unit 17 (step S5).

When each process up to step S5 ends, the adsorption on the holding table 5 is released. After the suction is released, the wafer W with the adhesive tape Tw attached thereto is transferred by a wafer transfer mechanism and recovered to a wafer recovery unit (not shown) (step S6). This completes the adhesive tape application process once.

In addition, after the completion of the adhesive tape attaching process, the following steps are divided according to the loading amount of the raw material roller 28 (supply tape) of the tape TS disposed at the supply position of the tape supply section 13. When the loading amount of the supply tape is equal to or less than a predetermined predetermined amount, the tape TS is automatically replaced (step S7). By using various sensors and the like to confirm that the loading amount of the supply tape is equal to or greater than a predetermined amount, the above-mentioned operations are sequentially repeated below.

    <Explanation of the belt replacement process>    

Here, the process of automatically replacing the tape TS related to step S7 will be described. When the amount of the supply tape is equal to or less than a predetermined amount, the belt replacement step in step S7 is as shown in the flowchart of FIG. 7 (b), accompanied by the steps from step S7-1 to step 7-8 And proceed. Through the process shown in FIG. 7 (b), the raw material roller 28 arranged at the supply position of the belt supply unit 17 is replaced with a new raw material roller 28, and at the same time, the new (upstream) release from the new raw material roller 28 The front end of the (TS) tape TS is automatically engaged with the rear end of the preceding (downstream) tape TS.

Further, in the embodiment with the supply unit 17, the bobbin 25A and the raw material roller 28A are arranged at the beginning of the supply position, and the raw material roller 28A with a filling amount of less than a predetermined value is replaced with a new raw material roller 28B The situation is described as an example.

Step S7-1 (formation of the clamping tip)

When the tape is replaced, a process of forming a gripping tip on the adhesive tape T by the gripping tip forming unit 19 is performed. For each configuration of the clamping tip forming unit 19, the starting position is shown in FIG. That is, the tape TS peels the separation tape S by the peeling unit 31, and exposes the adhesive surface of the adhesive tape T. The pushing-out member 33 is disposed on the adhesive surface side of the adhesive tape T, and the pressure contact roller 35 is disposed on the non-adhesive surface side of the adhesive tape T.

In step S7-1, first, as shown in FIG. 11, the inner plate 33c is moved in the direction R independently of the exterior portion 33a, and the protruding portion 33b is pushed up. When the protruding portion 33b is pushed up by the inner plate 33c, the front end portion of the protruding portion 33b is pushed out from the exterior portion 33a.

Next, in a state where the front end portion of the protruding portion 33b is pushed out more than the exterior portion 33a, the pushing member 33 moves in the direction R. As a result, as shown in FIG. 12, a part of the adhesive tape T (adhesive tape Tp) is pushed out by the protruding portion 33 b in a direction substantially perpendicular to the release direction L, that is, the direction R.

In a state where the protruding portion 33b pushes out the adhesive tape Tp in the direction R, the exterior portion 33a abuts the adhesive tape T extending in the direction L. Therefore, it is possible to prevent the position where the protruding portion 33b is pushed up from deviating to the direction R. Further, it is preferable that the adhesive tape T released in the direction L is held in the state where the protruding portion 33b pushes the adhesive tape Tp in the direction R so as to be sandwiched by the exterior portion 33a and the pressure contact roller 35.

In this case, when the protrusion 33b pushes the adhesive tape Tp in the direction R, it is possible to prevent the extending direction of the adhesive tape T other than the adhesive tape Tp from deviating from the direction L. Therefore, it is possible to avoid occurrence of a later-described formation error of the clamping end portion H or a situation where the shape and size of the clamping end portion H are different from those originally assumed.

After the adhesive tape Tp is pushed out in the direction R by the pushing member 33, the pushed-out adhesive tape Tp is crimped by the crimping roller 35 to form a clamping end H. Specifically, first, as shown in FIG. 13, each of the crimping rollers 35 moves toward the opposite direction in the discharge direction L so as to approach each other. As a result, the non-adhesive surface of the adhesive tape Tp pushed out in the direction R is sandwiched from both sides by the pressure contact roller 35.

When the adhesive tape Tp is pinched by the crimping roller 35, as shown in FIG. 14, the push-up of the protruding portion 33b through the inner plate 33c is released, and the extended elastic member 33d returns to the original position so that the protruding portion 33b is stored in the exterior The inside of the portion 33a.

Since the protruding portion 33b is accommodated and the protruding portion 33b is separated from the adhesive tape T, the adhesive tape Tp can be crimped. That is, as shown in FIG. 15, the crimping roller 35 is further crimped from both sides of the adhesive tape Tp. Further, the pressure-sensitive adhesive tape Tp is crimped, and the pushing member 33 is separated from the adhesive tape T. As a result, the adhesive faces of the adhesive tape Tp are crimped to each other to form the clamping tip H.

In this manner, the adhesive tape Tp is protruded in the predetermined direction R at the predetermined clamping tip formation position Tf, and then the adhesive tapes Tp are sandwiched and pressed against each other in the releasing direction L from each other to form a clamping tip. As a result, the shape of the clamping tip H is a shape which protrudes toward the direction R by the length Pb in the region of the length Pa in the adhesive tape T released in the direction L. Further, the length Pa in the release direction L is set to a short length that is approximately the thickness of the adhesive tape T. On the other hand, the length Pb in the direction R that is substantially perpendicular to the direction L can be adapted to the shape of the protrusion 33b. Set an arbitrary length.

Step S7-2 (Re-stacking of separation belts)

After the clamping ends are formed, re-lamination of the separation tape is performed. That is, as shown in FIG. 16, the feed roller 39 that winds the separation tape S is rotated forward (to the left of FIG. 16) in the release direction L of the adhesive tape T. At this time, the feed roller 39 is configured to rotate past a predetermined position Tf at which the nip end H is formed on the adhesive tape T.

The feed roller 39 is rotated from the starting position shown by the dotted line to the end position shown by the solid line, so that the separation tape S is overlapped with a predetermined length of the adhesive tape T including the base end including the clamping end H. . By laminating the separation tape S at the base end portion of the clamping tip H, it is possible to prevent the adhesive surfaces of the adhesive tape T forming the clamping tip H from peeling from each other. As a result, it is possible to prevent the clamping ends H from being collapsed due to the peeling of the adhesive surfaces of the adhesive tape T from each other, and it is possible to maintain the clamping ends H relatively stably.

Step S7-3 (feeding out the clamping end)

After the re-bonding of the separation tapes is completed, the clamping ends are sent out. That is, the tape end H is sent out to the tape joining unit 21 by releasing the tape TS. Since the embodiment is configured to cut and join the tape TS at a position closer to the raw material roller 28, the position of the tape joining unit 21 is configured to be a position upstream from the clamping end forming position Tf (FIG. 1) ). Then, as shown in FIG. 17, by reversely releasing the tape TS from the direction L to the direction Lr, the gripping tip H is sent upstream from the forming position Tf and moved to the tape bonding unit 21.

Step S7-4 (holding of the clamping end)

As shown in FIG. 18 (a), the gripping tip H sent from the gripping tip forming unit 19 toward the belt bonding unit 21 is moved to the position of the gap portion 46 formed by the gripping unit 45. After the gripping tip H is sent out to the tape joining unit 21, the gripping tip is held. That is, as shown in FIG. 18 (b), the holding unit 43 and the holding unit 45 are moved in the direction R, so that the holding unit 43 and the holding unit 45 hold the tape TS. By holding each unit, the tape TS is prevented from shifting in the release direction L. At this time, the holding unit 43 sucks and holds the separation tape S.

The holding unit 45 is configured to suck and hold the adhesive tape T. By this adsorption and holding, the tape TS can be held more stably. Next, the clamping with the TS is performed, and the clamping tip H is held by the holding unit 45. That is, as shown in FIG. 18 (c), the member 45 a and the member 45 b are moved in opposite directions from each other in the release direction L, and are gripped so that the gap end 46 sandwiches the clamping end H. Since the holding end protrudes by a predetermined length in a direction substantially perpendicular to the direction H and the release direction L, the holding unit 45 can hold the adhesive tape T more stably by holding the holding end.

Step S7-5 (cutting of the previous belt)

After holding the clamping end, the preceding tape is cut. The previous belt means a tape TS released from a raw material roller 28 (a raw material roller 28A in the embodiment) arranged at a supply position. That is, as shown in FIG. 19, the movable table 41a of the cutter unit 41 is driven in the direction R, and the blade edge 41b is inserted into the tape TS.

Next, by driving the movable table 41a in the width direction of the tape TS, the blade 41b is tied to a predetermined position shown by the symbol C, and the preceding tape TS is cut in the width direction. The preceding tape is cut by the blade 41b, so that the preceding tape TS is cut off from the original roll 28A. Next, the end portion to be engaged with the tape released from the new original roll 28 is formed at the rear end of the preceding tape TS.

Step S7-6 (front stripping with rear end)

After the preceding tape is cut, the leading end of the leading tape is peeled off. That is, as shown in FIG. 20, the holding unit 43 that holds and holds the separation tape S and the holding unit 45 that holds and holds the adhesive tape T and the holding end H are separated from each other in the direction R in the opposite direction. The two units are separated while maintaining the holding state, and the adhesive tape T and the separation tape S are peeled off at the rear end Ba of the preceding tape TS.

Different from the conventional configuration in which the one side of the tape TS is adsorbed and peeled off, in the embodiment, a clamping tip H is formed to protrude in a direction substantially perpendicular to the surface of the tape TS, and the holding unit 45 holds the clamping tip. Composition. The structure holding and holding the clamping tip H protruding in a substantially vertical direction can hold the tape TS more stably than the structure holding and holding one side. Therefore, in the configuration of the embodiment, even if the adhesive force between the adhesive tape T and the separation tape S is strong, the adhesive tape T and the separation tape S can be reliably peeled off at the rear end of the preceding tape.

Step S7-7 (switching of raw material roller)

After the rear end of the preceding belt is peeled off, the raw material roll is switched. That is, as shown in each figure of FIG. 21, the rotating plate 23 of the tape supply part 17 is rotated suitably, and the raw material roller 28 arrange | positioned at a supply position is switched. Through the rotation of the rotating plate 23, the raw material roller 28 arranged at the supply position is switched from the raw material roller 28A (FIG. 21 (a)) with a reduced loading amount to a raw material roller 28B (FIG. 21 ( b)).

In addition, after FIG. 21, a symbol 27A is added to the belt holding member 27 arranged on the bobbin 25A, and a symbol 27B is added to the belt holding member 27 arranged on the bobbin 25B to distinguish the two. In FIGS. 22 and 23, the symbol a is appended to the tape TS, the adhesive tape T, and the separation tape S about the preceding tape, and the tape TS and the adhesive tape T to the following tape, respectively. And the separation band S, the symbol b is appended to distinguish the two.

Step S7-8 (Release of the following tape)

After the switching of the raw material roll is completed, the subsequent tape is discharged. When the raw material roller at the supply position is switched to the raw material roller 28B, the leading end of the subsequent tape TSb is held by the tape holding member 27B (FIG. 22 (a)). Then, in order to join the preceding tape TSa and the following tape TSb, the following tape TSb is released from the original roll 28B via the tape holding member 27B (FIG. 22 (b)). As a result, the front end Fw of the following tape TSb is released to a position where it can be engaged with the rear end Ba of the preceding tape TSa.

Step S7-9 (bonding of the belt)

After the subsequent tape is fully released, the tape is joined. That is, as shown in FIG. 23 (a), the holding unit 43 of the adsorption holding separation tape Sa and the holding unit 45 of the adsorption holding adhesive tape Ta are moved in the direction R, and the front end Fw of the following tape TSb is moved forward by The adhesive tape Ta and the separation tape Sa are sandwiched. After the sandwiching is performed, the front tape TSa and the rear tape are completed by joining the rear end of the adhesive tape Ta and the front end of the adhesive tape Tb, and the rear end of the separation tape Sa and the front end of the separation tape Sb. TSb junction.

As shown in each figure of FIG. 22, the Example has the structure which pre-attached the adhesive material g which uses the double-sided tape as an example to the front-end | tip of the tape TS. Therefore, the rear end of the adhesive tape Ta and the front end of the adhesive tape Tb, and the rear end of the separation tape Sa and the front end of the separation tape Sb are pressed by the holding unit 43 and the holding unit 45 and are bonded via the adhesive material g.

After the joining of the front tape TSa and the following tape TSb is completed, as shown in FIG. 23 (b), the holding unit 43 and the holding unit 45 are reset toward the starting positions shown by the solid lines. Next, the joined two tapes are released in the direction L. The above completes a series of actions related to step S7. That is, the replacement of the raw material roll 28B from the raw material roll 28A, and the end of the tape TSa discharged from the raw material roll 28A and the end of the tape TSb discharged from the raw material roll 28B are automatically performed.

In addition, the raw material roller 28A switched from the supply position to the standby position in step S7-7 can be removed to the outside of the adhesive tape application device 1 through an opening and closing door (not shown). The worker can remove the raw material roller 28A and place a new raw material roller 28C in the standby position. When the loading amount of the raw material roller 28B is reduced, the steps TS7 of the raw material roller 28B can be automatically executed to switch the tape TS of the raw material roller 28C by repeating each step of step S7. As a result, the work of the operator can be significantly reduced.

    <Explanation with recycling process>    

Next, in step S5 and the like, a specific operation of the tape recovery unit 13 for recovering the discarded tape Tn will be described. FIG. 7 (c) is a flowchart illustrating each operation of the tape recovery process in which the tape recovery unit 13 recovers the waste tape Tn. The starting positions of the respective components included in the tape recovery unit 13 are those shown in FIG. 5. In the tape recovery unit 57, it is assumed that the recovery box F1 is disposed at the recovery position Fc, and the recovery box F2 is disposed at the standby position Fs.

Step S5-1 (withdrawal)

In the tape recovery step of the example, the tape is first drawn out. That is, the waste tape Tn guided by the guide roller 50 toward the tape recovery part 13 is drawn out by a predetermined length. Specifically, as shown in FIG. 24 (a), the belt holding member 51 moves from the starting position shown by the dotted line to the end position shown by the solid line. The end position may be appropriately set as long as the waste tape Tn is released.

The tape holding member 51 that moves toward the end position holds the waste tape Tn guided to the tape recovery unit 13. As shown in FIG. 24 (b), in the embodiment, the penetrating and holding member 51b is movable in the thickness direction of the waste tape Tn so that the waste tape Tn is sandwiched and held from both sides of the back surface. If the tape holding member 51 has a structure capable of stably holding the waste tape Tn, it is not limited to a structure to be held by the holding member 51b, and the tape holding member 51 may be a structure that holds and holds the waste tape Tn.

Next, as shown in FIG. 24 (c), the tape holding member 51 is reset from the end position to the home position while the discard tape Tn is held. The penetrating tape holding member 51 is reset toward the starting position, so that the discarded tape Tn is extracted in the direction indicated by the symbol M by an amount of a predetermined length K from the terminal position to the starting position. In the embodiment, the direction M is a horizontal direction, but the direction M may be appropriately changed.

Step S5-2 (hold the tape in a flat state)

After the waste tape Tn of a predetermined length is drawn out, the drawn waste tape Tn is held in a flat state. That is, as shown in FIG. 25, the belt pressing member 53 moves from the starting position shown by the broken line to the suction position shown by the solid line.

Next, the belt pressing member 53 sucks and holds the extracted waste tape Tn through the flat entire back surface of the pressing plate 53b. At this time, the waste tape Tn is held so as to be flat in the discharge direction and the width direction. In addition, the configuration in which the waste tape Tn is held flat may be appropriately changed. As an example, the configuration in which the waste tape Tn is adsorbed and held on the outer peripheral portion of the flat back surface of the pressing plate 53b may be applied.

Step S5-3 (cutting the tape into single pieces)

After the waste tape Tn is held in a flat state, the tape is cut into a single piece. That is, as shown in FIG. 26 (a), the cutter unit 55 moves from the starting position shown by the dotted line toward the cutting position shown by the solid line in the thickness direction of the waste tape Tn. The blade 55b then penetrates the waste tape Tn at the cutting position. After that, the movable table 55a moves in the width direction (z direction in the figure) of the discarded tape Tn, so that the blade 55b cuts the discarded tape Tn into a single piece. In addition, it is not limited to a configuration in which the blade 55b is moved in the R direction and is moved in the width direction after being penetrated into the waste tape Tn. As an example, as shown in FIG. 26 (b), by moving the blade 55b waiting on the side of the waste tape Tn to the width direction of the waste tape Tn, the blade edge 55b can cut the waste tape Tn into Monolithic composition. In such a case, the configuration in which the movable table 55a moves in the direction R can be omitted.

Step S5-4 (single piece storage)

The waste tape Tn is drawn out, and the extracted part is cut into a single piece, and then the single piece tape is stored. First, the cutter unit 55 is returned toward the starting position, and the holding of the waste tape Tn by the tape holding member 51 is released. Then, as shown in FIG. 27, the tape pressing member 53 is lowered again while the waste tape Tn cut into individual pieces is sucked and held.

The lowered pressing member 53 is moved from the suction position shown by the broken line to the vicinity of the bottom surface of the recovery box F1 shown by the solid line. Then, the holding of the waste tape Tn is released near the bottom surface of the recovery box F1. The waste tape Tn that has been desorbed and held is stored in a flat state on the bottom surface of the recovery box F1 or on the waste tape Tna already stored in the recovery box F1.

Since the flat waste tape Tn is released from being held near the bottom surface of the collection box F1 or near the upper surface of the completed waste tape Tna, the waste tapes Tn cut into individual pieces can be stacked and stored in a flat state. That is, during the period from the release of the holding of the adsorption to the storage of the laminate, it is possible to avoid the deformation of the single piece of the waste tape Tn from being bent.

In addition, if the waste tapes Tn can be laminated in a flat state, it is not limited to a configuration in which the adsorption and holding are released near the bottom surface of the recovery box F1 and the like. That is, it is more preferable that the suction holding is released in a state where the lowered tape pressing member 53 presses the held waste tape Tn against the bottom surface of the recovery box F1 or the surface of the stored waste tape Tna. After the waste tape Tn cut into individual pieces is stacked and stored in the collection box, the tape pressing member 53 is raised and returned to the starting position.

Thereafter, the steps are divided depending on whether the amount of the waste tape Tn stored in the recovery box F1 disposed in the recovery position Fc is equal to or more than a predetermined predetermined amount. If it is lower than the predetermined amount, it returns to step S5-1 and repeats a series of operations from step S5-1 to step S5-4 and continues to recover the waste tape Tn. In the case of a predetermined amount or more, the process proceeds to step S5-5, and the recovery box F is switched.

Step S5-5 (switching of the recycling box)

As shown in FIG. 28, when the recovery box F is switched, the turntable 58 on which each recovery box F is placed is rotated about the axis of the central axis V. By the rotation of the turntable 58, the collection box F1 storing the waste tape Tn of a predetermined amount or more is moved from the collection position Fc to the standby position Fs. Conversely, the empty recovery box F2 moves from the standby position Fs toward the recovery position Fc.

By switching the collection box F arranged at the collection position Fc from the collection box F1 to the collection box F2, a single piece of waste tape Tn can be stored in the collection box F2. That is, when the recovery box F arranged at the recovery position Fc is switched to an empty recovery box F2, the process returns to step S5-1 and the recovery process of the discarded tape Tn can be restarted.

Next, in the embodiment, the recovery box F exceeding the allowable amount can be replaced while the recovery process of the discarded tape Tn is restarted. That is, as shown in FIG. 29, the recovery box F1 moved to the standby position is taken out by the operator to open the opening and closing door 59 to the outside of the adhesive tape attachment device 1. Then, the operator places the empty new collection box F3 in the standby position Fs in the turntable 58 instead of the collection box F1.

The standby position Fs is configured to be located further away from the center of the tape attaching device 1 than the recovery position Fc. Therefore, when removing and replacing the recovery box F that has been moved to the standby position Fs, it is possible to prevent the operator from approaching the high-temperature section or the movable section.

Furthermore, the recovery box F2 is moved toward the recovery position Fc, and the recovery box F1 can be replaced with the recovery box F3 in a state where the recovery of the waste tape Tn is resumed. That is, it is not necessary to stop the operation of the belt recovery unit 13 except for the process of rotating the turntable 58, so that the operation efficiency of the belt recovery unit 13 can be improved.

    <Description of the operation of the separation belt recovery section>    

Here, the operation of the separation belt recovery unit 15 will be described. The configuration of the separation tape recovery unit 15 shown in FIG. 6 is the same as that of the tape recovery unit 13 shown in FIG. 5. The operation of the separation tape recovery unit 15 is also the same as the operation of the tape recovery unit 13.

That is, the separation tape S peeled from the adhesive tape T by the peeling unit 31 is guided to the separation tape recovery unit 15 through the guide roller 60. The separation band holding member 61 grips the end of the guided separation band S, and draws the end of the separation band S in a predetermined direction (left of FIG. 6 in the embodiment) by a predetermined length.

After the separation band S is pulled out, the separation band pressing member 63 is lowered. Then, the extracted separation tape S is sucked and held in a flat state through the entire flat surface of the pressing plate 63b. The blade 65b of the cutter unit 65 cuts the separation tape S held in a flat state into a single piece.

The separation belt pressing member 63 is further lowered in a state where the separation belt S cut into a single piece is adsorbed and moved to the vicinity of the bottom surface of the recovery box G1 disposed at the recovery position Gc. Then, the separation-belt pressing member 63 is attached to the vicinity of the bottom surface of the recovery box F1 to release the adsorption and holding of the separation belt S. The separation belt S that has been desorbed and held is stored in the recovery box G1 in a state where a plurality of flat separation belts S are stacked on each other.

After the separation tape S is stored in the recovery box G1 in a flat state, the cutter unit 65 and the separation tape pressing member 63 are reset to their initial positions. The following is repeated cutting the separation tape S into a single piece and stacked and stored in a flat state.的 OPERATIONS. When the storage amount of the separation tape of the recovery box G arranged at the recovery position Gc becomes a predetermined value or more, after the rotary table 68 is rotated about the axis of the central axis W and the recovery box G2 is moved toward the recovery position Gc, the separation tape is restarted. S recovery process.

The operator opens the opening / closing door 69 to take out the recovery box G1 moving from the recovery position Gc to the standby position Gs, and arranges a new recovery box G toward the standby position Gs. In the recovery process of this embodiment, it is not necessary to stop the operation of the separation belt recovery unit 15 except for the process of rotating the rotary table 68. That is, the operation of the separation belt recovery unit 15 can be continued even when the recovery box that has exceeded the prescribed value of the storage amount is replaced, so that the operation efficiency of the separation belt recovery unit 15 can be improved.

    <Effects of the structure according to the embodiment>    

In the embodiment, a part of the front adhesive tape is protruded in a direction substantially perpendicular to the releasing direction of the adhesive tape to form a clamping end, and a portion on the rear end side of the clamping end is cut. Then, with the holding end held in place, the adhesive tape and the separation tape are moved in the direction in which the adhesive tape and the separation tape are separated from each other at the rear portion of the preceding tape to peel them off. Finally, the front portion of the rear tape is moved between the peeled front adhesive tape and the separation tape, and the front adhesive tape and the separation tape sandwiches and joins the front portion of the rear tape.

A conventional method for automatically joining different bands to each other may be exemplified as follows. That is, as shown in FIG. 30 (a), first, the adhesive tape Ta is adsorbed by the adsorption member J in the front. Then, as shown in FIG. 30 (b), the separation tape Sa and the adhesive tape Ta are separated by moving the preceding separation tape Sa and the adsorption member J apart. Finally, the rear part of the peeled adhesive tape Ta and the rear part of the separation tape Sa are sandwiched and joined by the front part of the rear tape TSb.

However, in such a conventional automatic joining method, the adhesive force of the adhesive tape Ta is strong, and the adhesion force between the adhesive tape Ta and the separation tape Sa may exceed the adsorption force of the adsorption member J. In such a case, as shown in FIG. 30 (c), even if the adsorption member J is separated and moved, the rear portion of the adhesive tape Ta and the rear portion of the separation tape Sa cannot be peeled off, so the leading tape TSa and the trailing tape TSb cannot be separated. The joining becomes difficult.

With respect to such a conventional method, as shown in FIG. 30 (d), in the embodiment, the holding member N moves separately while holding the holding end H. Since the clamping tip H is a part of the adhesive tape Ta, even if the holding member N is separated and moved, the clamping tip H can be prevented from being broken from the adhesive tape Ta.

In addition, the shape of the clamping tip H is a shape that protrudes only in the direction R by the length Pb in the region of the length Pa of the adhesive tape T released in the direction L. The length Pa is a length that is as short as the thickness of the adhesive tape T. Therefore, by holding the holding end H through the holding member N and moving it in the direction R, a strong traction force can be applied to a narrower range Pa in the releasing direction L. As a result, the magnitude of the force per unit area can be drastically increased at the interface between the adhesive tape Ta and the separation tape Sa. Therefore, the adhesive tape Ta and the separation tape Sa can be reliably peeled off at the rear end Ba of the preceding tape TSa.

On the other hand, regarding the length Pb in the direction R, the shape of the protruding portion 33b pushed out by the adhesive tape T can be set to an arbitrary length. That is, since the length Pb is set to be sufficiently long, the holding member N can hold the clamping tip H securely and firmly. As a result, it is possible to more reliably avoid the occurrence of a peeling error at the rear end Ba of the preceding tape as shown in FIG. 30 (c).

In addition, since the clamping tip H has a shape that protrudes in the direction R with a sufficient length, it can be applied to various configurations as the holding member N. As an example, a configuration such as a robot arm can be applied. Therefore, the holding member N can hold the holding end H more stably, and at the same time, can perform a complicated and precise operation on the adhesive tape T while holding the holding end H.

Furthermore, a simple operation of pushing a part of the adhesive tape T toward the direction R at a predetermined position Tf and crimping a part of the pushed-out adhesive tape T from the opposite direction in the releasing direction L can be performed at the predetermined position. A clamping end H is formed. Therefore, the positional accuracy of the formation position Tf of the clamping tip can be improved.

In the embodiment, when the unnecessary adhesive tape or separation tape is recovered, the long adhesive tape or the like is cut into a single piece with a predetermined length. The cut single piece of adhesive tape is then laminated and stored in an expanded flat state.

In the conventional recycling method as shown in FIG. 33, a long waste tape or the like is rolled up on a shaft and recovered in a tape recovery unit. In such a conventional configuration, when the amount of the waste tape that has been rolled back and recovered exceeds a certain amount, the operation of the device is stopped first, then the waste tape is cut, and the waste is rolled into a roll shape and recovered. The belt is taken out with the shaft and replaced with a new shaft. Next, the upstream waste tape is wound on a new shaft and connected, and the operation is resumed.

In the conventional configuration, a series of complicated operations need to be performed manually, which increases the burden on the operator. In addition, it is difficult to improve the work efficiency because it is necessary to stop the operation of the device for a long time. In addition, in the configuration for rewinding and collecting, it is necessary to provide a large rewinding shaft, so there is also a concern that the adhesive tape attaching device is increased in size.

Regarding a configuration for recovering a long waste tape or the like without using a rewinding shaft, a method of cutting the long tape into a single piece and dropping the single piece tape into a collection box and storing the tape can be considered. However, in the configuration of such a comparative example, since the recovery frequency is increased, there is a concern that the work efficiency is lowered.

As a result of repeated reviews of such problems, it is understood that the deformation of the strip cut into a single piece is the reason. That is, since the elongated tape is wound and guided by a plurality of guide rollers or the like, when the elongated tape is cut into a single piece, the single-piece belt sheet system is easily deformed into a curved shape. Therefore, as shown in FIG. 31 (a), when a single piece of waste tape Tn is dropped and collected in the recovery box F, the waste tape Tn in the inside of the recovery box F may become various shapes such as a curl In this shape, a plurality of discarded tapes Tn are stored in a messy state.

In such a case, the height Hn of the accumulation of the waste tape Tn stored in the collection box F rises relatively early. That is, with respect to the storage amount of the waste tape Tn, since the volume occupied by the waste tape Tn is large, the replacement frequency of the recovery box F is increased, and as a result, the operating efficiency of the device is reduced. Moreover, since the shape of each waste tape Tn is not fixed, the speed at which the stacked height Hn rises is not constant. Therefore, it becomes difficult to predict the timing at which the recovery box F is to be taken out for replacement, and it becomes extremely difficult to perform planned work.

On the one hand, as shown in FIG. 31 (b), in the present invention, after the long waste tape Tn is cut into a single piece in a state of flat expansion, the single piece of waste tape Tn is laminated while maintaining the flat state. And stored in a recycling box. In the configuration of the invention of the present invention, since the waste tape Tn is layered neatly without wasting space, the volume occupied by the waste tape Tn can be kept to a minimum with respect to the storage amount of the waste tape Tn. Since the frequency of replacement of the recovery box F can be reduced, the operation efficiency of the device can be greatly improved. In addition, since the rising speed Hn of the height at which the waste tape Tn accumulates is constant, it is easy to perform planned work.

This invention is not limited to the said embodiment, It can deform | transform and implement as follows.

(1) In the embodiment, the process of holding the adhesive tape T formed with the clamping end, appropriately peeling the adhesive tape T and the separation tape S at the rear end portion, and joining the ends of the tape TS to each other as an example was taken as an example. Instructions. However, the method of using the adhesive tape T having the clamped ends is not limited to the adhesive tape joining method. That is, a variety of adhesive tape treatment methods, such as a method of transporting the released long adhesive tape to a predetermined position, can be applied to the step of forming the clamping end H on the adhesive tape T. The "conveying" here is not limited to the operation of conveying the entire adhesive tape, and is intended to include the operation of moving a part of the adhesive tape including the clamping end to a predetermined position.

The process of conveying the adhesive tape to a predetermined position through the clamping end is as follows. First, a part of the adhesive tape Tp released in the release direction L is protruded in a direction R substantially perpendicular to the direction L (refer to FIG. 12). Next, a part of the adhesive tape Tp protruding in the direction R is crimped from the direction L and the direction opposite to the direction L by the crimping roller 53 (see FIGS. 13 and 14). As a result of this crimping, a clamping tip H having a shape in which a part of the adhesive tape T protrudes in the direction R is formed (see FIG. 15). Then, by holding the holding end H (see FIG. 18 (c)), the adhesive tape T is transported to a predetermined position (see FIG. 20).

As shown in FIG. 15 and FIG. 30 (c), the clamping tip H is formed at a predetermined clamping tip forming position Tf and has a shape protruding in a direction R substantially perpendicular to the releasing direction of the adhesive tape T. The protruding length Pb in the direction R can be preset to an arbitrary and sufficient length, so that the clamping end H can be easily and firmly held. Furthermore, in the elongated adhesive tape T extending in the direction L, the clamping tip H protruding in the direction R can be easily and reliably confirmed as a target of the treatment target area. Therefore, the position where the treatment is actually performed in the elongated adhesive tape T can be reliably prevented from deviating from the predetermined position.

On the one hand, the length Pa of the clamping tip H in the release direction L is as short as the thickness of the adhesive tape T. In addition, by appropriately setting the position of the pushing-out member 33, the position accuracy of the clamping tip formation position Tf can be further improved. Therefore, various configurations are carried out on the adhesive tape T by holding the holding end H to make a wide member abut and the adhesive tape T is adsorbed or the configuration of picking up the long adhesive tape T extending in the direction L is directly picked. By comparison, it can be precisely set in the long adhesive tape T and in the area of the treatment operation.

In particular, the configuration of the clamping tip of this embodiment is particularly advantageous when various treatments are performed on a single-sided tape having an adhesive layer on one side. That is, as shown in FIG. 12, the non-adhesive surface side (upper side in FIG. 12) of the long adhesive tape T released in the releasing direction L is protruded in the direction R by using the pressing member 33 or the like. Next, a part of the protruding adhesive tape Tp is clamped from the non-adhesive surface side by the crimping roller 53 and crimped to form a clamping end H.

At this time, since the pressure-bonding roller 53 is pressure-bonded to the non-adhesive surface of the adhesive tape T, the pressure-bonding roller 53 can be prevented from sticking to the adhesive tape T without performing non-adhesive treatment on the pressure-bonding roller 53. Since the crimping roller 53 is crimped from the release direction L to a direction opposite to the direction L, the nip end H has a shape that appropriately projects in a direction R substantially perpendicular to the direction L.

Next, after forming the holding end H, the holding end H is held by the holding unit 45 or the like, and various treatments such as conveyance, cutting, and peeling of the adhesive tape T are performed (FIGS. 19 and 20). Since the clamping tip H protrudes in the direction R such that the non-adhesive surface of the adhesive tape T becomes an outer side, the gripping units 45 all grip the non-adhesive surface of the adhesive tape. Therefore, without performing the non-adhesive treatment, the holding unit 45 can be prevented from adhering to the adhesive tape T.

In addition, a configuration may be adopted in which the holding end H is formed by holding the holding end H, and the holding unit 45 is provided only on one side of the adhesive tape T. Generally, when holding an adhesive tape for conveyance etc., it is necessary to provide a holding mechanism on both the front side and the back side of an adhesive tape, and to clamp an adhesive tape from a front surface and a back surface. As a result, from the viewpoints of the width of the occupied portion, etc., it is related to restrictions such as the structure and purpose of the holding mechanism.

On the one hand, in the present invention, since the holding unit can be provided only on the side where the holding end protrudes, the portion occupied by the holding unit 45 can be made smaller, and the structure of the holding unit 45 can be simplified. In addition, the adhesive tape T can be firmly held from one side thereof, and a strong force can be applied to the adhesive tape T in a predetermined direction.

Therefore, the present configuration can be suitably applied to a step of peeling an adhesive tape attached to a wafer or a step of changing the shape of a line from which a long tape is discharged. In such a case, by approaching the gripping unit from one side of the belt with the tape forming the gripping tip and gripping the gripping tip, the portion of the tape containing at least the gripping tip is moved to an arbitrary position, Each of the above steps can be performed as appropriate.

(2) In the embodiments and the modifications, the tape joining device and the tape recovery device of the present invention have been described using the adhesive tape attaching device. However, the tape joining device and the tape recovery device of the present invention are not only the tape attaching device but also the tape attaching device. Can be applied to a variety of belt processing devices. Examples of the tape processing device include a tape peeling device that peels various tapes attached to a wafer, or a mounting device (mounter) for mounting a wafer on a ring frame.

(3) In the embodiment and each modification, in the step of forming the clamping tip H, a part of the adhesive tape T is protruded in the direction R by pushing out the adhesive tape T with the protrusion 33b, but it is used to form the clamping The configuration of the tip H is not limited to this. That is, a part of the adhesive tape T can also be protruded in the direction R by pulling out a part of the adhesive tape T to the outside. Examples of the extracted configuration include a configuration in which a part of the adhesive tape T is held and pulled out by using a magic hand-shaped member, and a configuration in which a part of the adhesive tape T is sucked out and extracted using a vacuum device or the like.

(4) In the embodiments and the modifications, the number of the raw material rollers 28 arranged on the belt supply unit 17 is not limited to two, and three or more may be provided. Further, three or more recovery boxes F for the recovery box F of the belt recovery section 13 and recovery box G of the separation belt supply section 15 may be provided.

(5) In the embodiment and each modification, the holding end H is made to protrude the adhesive tape T after peeling, but the place where the holding end H is formed is not limited to the side T of the adhesive tape T. That is, the separation tape S after peeling may protrude, and the clamping end H may be formed in the side of the separation tape S.

Regarding the configuration in which the clamping end H is formed on the side of the separation tape S, for example, the separation tape S protruding in the direction R is crimped from the opposite direction, and heat, ultrasound, etc. are applied to join the protruding separation tapes S to each other. Method (see Fig. 12 (b)). As another method, for example, a method in which the separation belts S protruding in the direction R are mutually adhered, and a method in which a bonding material such as a stapler needle is driven by a stapler to join them. Moreover, the clamping end H may be formed in the tape TS on both the adhesive tape T side and the separation tape S side.

(6) In the examples and the modifications, in each of the steps S5-2 to S5-4 of the tape recovery step, the waste tape Tn is entirely adsorbed by the flat surface of the pressing plate 53b. However, as long as the waste tape Tn can be held in a flatly expanded state, it is not limited to such a configuration. As another example, there may be mentioned a configuration in which suction holes are provided at four corners of the flat surface of the pressing plate 53b, and the waste tape Tn is sucked and held at the four corners. Moreover, it is not limited to the structure which performs adsorption | suction holding, It is applicable also to the structure which clamps the waste tape Tn by using a mechanical structure, and holds the waste tape Tn in a flat state, etc.

(7) In the embodiment and each modification, the step of joining the preceding tape TSa and the following tape TSb in step S7-9 is not limited to holding the tape as shown in FIG. 22 (b). The structure in which the position of the member 27 is fixed allows the front end Fw of the subsequent tape TSb to be released. That is, the trailing tape TSb may be released while maintaining the front end Fw of the trailing tape TSb held by the tape holding member 27.

(8) In the examples and the modifications, the configuration in which the leading end of the tape TS attached to the new raw material roll 28 is sandwiched by two tape holding members 27 as shown in FIG. 22 (a) is not limited thereto. this. That is, as shown in FIG. 32 (a), it is more preferable that a part of the front end of the tape TS is peeled into the separation tape S and the adhesive tape T in advance, and the peeled adhesive tape T is wound by a tape holding member 27, and The separated separation tape S is wound by another tape holding member 27.

In such a modified example, as shown in FIG. 32 (b), when the rear part of the front tape TSa and the front part of the rear tape TSb are joined, the belt is held by the front end Fw of the rear tape TSb. The member 27 moves in the release direction together with the front end Fw. Then, the rear part of the front adhesive tape Ta and the front part of the subsequent adhesive tape Tb are joined, and the rear part of the front separating tape Sa and the front of the rear separating tape Sb are joined.

In the joining process of such a modification, since the area where the preceding tape TSa and the following tape TSb can be made wider, the two tapes can be firmly joined. Moreover, since the adhesive surface in the rear tape TSb is exposed to the outside, by sandwiching the front end of the rear tape TSb with the front tape TSa, the exposed adhesive face of the rear tape TSb and the front tape TSb are exposed. The adhesive surface with TSa just touched. As a result, the force for joining the two belts can be further increased.

(9) In the embodiment and each modification, the step of joining the preceding tape TSa and the following tape TSb in step S7-9 is not limited to the use of an adhesive material as shown in FIG. 23 (a). g Push the joint from both sides. Examples of other methods include a configuration in which the holding unit 43 or another configuration is provided with a heater to heat and join the two, and a configuration in which both are ultrasonically bonded using an ultrasonic generator.

Claims (7)

    A method for recovering a belt, comprising: a holding process in which an area of a predetermined length from a front end of a long-released belt is held in a flat state; and in a cutting process, the aforementioned belt held in a flat state is cut into individual pieces. And a storage process in which the tape cut into individual pieces is stored in a tape recovery box while the tape cut into individual pieces is maintained in a flat state.         The belt recycling method of claim 1, wherein during the holding process, the holding mechanism holds a predetermined length of area from the front end of the belt in a flat state, and during the cutting process, the holding mechanism will be flat. The tape is cut into individual pieces while the tape is held, and the holding mechanism that holds the tape cut into individual pieces during the storage process is induced toward the tape recovery box together with the tape.         The belt recovery method according to claim 1 or 2, wherein the holding mechanism holds the belt in a flat state by adsorbing the belt.         A tape recovery device comprising: a tape holding mechanism that holds an area of a predetermined length from a front end of a long-released tape in a flat state; and a tape cutting mechanism that cuts the aforementioned tape held in a flat state. Into a single piece; a tape recovery box that stores the aforementioned tape cut into the aforementioned single piece; and a tape induction mechanism that induces the aforementioned tape cut into the aforementioned tape recycling box while maintaining the flat state while maintaining the flat state, and cuts into the aforementioned tape The single sheet of the tape stack is stored in the tape recovery box.         As for the tape recovery device of claim 4, wherein the tape cutting mechanism cuts the tape held by the tape holding mechanism into a single piece, and the tape induction mechanism cuts the tape holding the tape cut into a single piece The holding mechanism is guided toward the aforementioned tape recovery box together with the aforementioned tape.         For example, if the tape recovery device of claim 4 or 5 is provided, a plurality of the aforementioned tape recovery boxes are provided, and the aforementioned tape induction mechanism is provided with a switching mechanism, and the aforementioned tape recovery box that takes the aforementioned tape cut into a single piece as an induction target is switched to another One of the foregoing with a recycling box.         The belt recovery device according to claim 4 or 5, wherein the belt holding mechanism includes: a flat surface contacting the belt; and an adsorption hole for holding the belt through the flat surface.