TW201803832A - 燒結體及圓筒形濺鍍靶材 - Google Patents

燒結體及圓筒形濺鍍靶材 Download PDF

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Publication number
TW201803832A
TW201803832A TW106122152A TW106122152A TW201803832A TW 201803832 A TW201803832 A TW 201803832A TW 106122152 A TW106122152 A TW 106122152A TW 106122152 A TW106122152 A TW 106122152A TW 201803832 A TW201803832 A TW 201803832A
Authority
TW
Taiwan
Prior art keywords
sintered body
cylindrical
porosity
region
precursor
Prior art date
Application number
TW106122152A
Other languages
English (en)
Chinese (zh)
Inventor
武富雄一
金丸守賀
Original Assignee
鋼臂功科研股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 鋼臂功科研股份有限公司 filed Critical 鋼臂功科研股份有限公司
Publication of TW201803832A publication Critical patent/TW201803832A/zh

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/48—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides
    • H01M4/52—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of nickel, cobalt or iron
    • H01M4/525—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of nickel, cobalt or iron of mixed oxides or hydroxides containing iron, cobalt or nickel for inserting or intercalating light metals, e.g. LiNiO2, LiCoO2 or LiCoOxFy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Powder Metallurgy (AREA)
TW106122152A 2016-07-27 2017-07-03 燒結體及圓筒形濺鍍靶材 TW201803832A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016147264A JP6307121B2 (ja) 2016-07-27 2016-07-27 ＬｉＣｏＯ２を含有する焼結体および円筒形スパッタリングターゲット
JP2016-147264 2016-07-27

Publications (1)

Publication Number Publication Date
TW201803832A true TW201803832A (zh) 2018-02-01

Family

ID=61016982

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106122152A TW201803832A (zh) 2016-07-27 2017-07-03 燒結體及圓筒形濺鍍靶材

Country Status (3)

Country Link
JP (1) JP6307121B2 (fr)
TW (1) TW201803832A (fr)
WO (1) WO2018020908A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020044798A1 (fr) * 2018-08-27 2020-03-05 三菱マテリアル株式会社 Cible de pulvérisation en oxyde et procédé de production de cible de pulvérisation en oxyde

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4762062B2 (ja) * 2006-06-22 2011-08-31 出光興産株式会社 焼結体、膜及び有機エレクトロルミネッセンス素子
WO2011086649A1 (fr) * 2010-01-15 2011-07-21 株式会社アルバック Procédé de fabrication pour un corps fritté de licoo2 et cible de pulvérisation fabriquée à partir de celui-ci
KR101726117B1 (ko) * 2013-03-13 2017-04-11 가부시키가이샤 코베루코 카겐 LiCoO2 함유 소결체 및 스퍼터링 타깃, 및 LiCoO2 함유 소결체의 제조 방법

Also Published As

Publication number Publication date
WO2018020908A1 (fr) 2018-02-01
JP6307121B2 (ja) 2018-04-04
JP2018016512A (ja) 2018-02-01

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