TW201800473A - Resin composition, resin sheet, multilayer printed wiring board, and semiconductor device - Google Patents

Resin composition, resin sheet, multilayer printed wiring board, and semiconductor device Download PDF

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TW201800473A
TW201800473A TW106117074A TW106117074A TW201800473A TW 201800473 A TW201800473 A TW 201800473A TW 106117074 A TW106117074 A TW 106117074A TW 106117074 A TW106117074 A TW 106117074A TW 201800473 A TW201800473 A TW 201800473A
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resin
resin composition
mass
compound
group
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TW106117074A
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TWI744332B (en
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喜多村慎也
鈴木卓也
四家誠司
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三菱瓦斯化學股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/42Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof
    • C08G59/4223Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof aromatic
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/32Epoxy compounds containing three or more epoxy groups
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/08Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated side groups
    • C08F290/14Polymers provided for in subclass C08G
    • C08F290/144Polymers containing more than one epoxy group per molecule
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/32Epoxy compounds containing three or more epoxy groups
    • C08G59/3218Carbocyclic compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/4007Curing agents not provided for by the groups C08G59/42 - C08G59/66
    • C08G59/4014Nitrogen containing compounds
    • C08G59/4042Imines; Imides
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/032Organic insulating material consisting of one material
    • H05K1/0326Organic insulating material consisting of one material containing O

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials Engineering (AREA)
  • Epoxy Resins (AREA)
  • Materials For Photolithography (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Macromonomer-Based Addition Polymer (AREA)

Abstract

The present invention provides a resin composition and a resin sheet with a support body that exhibit excellent coating property and heat resistance and that are also excellent in plating adhesion and developing characteristics, when used in a multilayer printed wiring board, and a multilayer printed wiring board and a semiconductor device that use the resin composition and the resin sheet. The resin composition comprises a biphenyl aralkyl type epoxy resin (A) represented by the following formula (1), a photocuring initiator (B), a compound (C) represented by the following formula (2), and a compound (D) having an ethylenically unsaturated group other than the component (C).

Description

樹脂組成物、樹脂片、多層印刷電路板及半導體裝置Resin composition, resin sheet, multilayer printed circuit board, and semiconductor device

本發明係關於樹脂組成物、使用此樹脂組成物之樹脂片、多層印刷電路板及半導體裝置。The present invention relates to a resin composition, a resin sheet using the resin composition, a multilayer printed circuit board, and a semiconductor device.

因為多層印刷電路板之小型化、高密度化,已有人積極地探討將多層印刷電路板中使用的疊層板予以薄型化。伴隨薄型化,針對絕緣層也要求薄型化,需要不含玻璃布之樹脂片。成為絕緣層之材料之樹脂組成物係以熱硬化性樹脂為主流,一般係利用雷射加工實施為了將絕緣層間予以導通之開孔。又,使用了熱硬化性樹脂之樹脂片,一般係以利用銅鍍敷形成導體電路之方法作為在絕緣層上形成導體電路之方法。Because of the miniaturization and high density of multilayer printed circuit boards, there have been active discussions to reduce the thickness of multilayer boards used in multilayer printed circuit boards. Along with the reduction in thickness, the insulation layer is also required to be reduced in thickness, and a resin sheet containing no glass cloth is required. The resin composition used as the material of the insulating layer is mainly made of a thermosetting resin, and is generally an opening for conducting between the insulating layers by laser processing. In addition, a resin sheet using a thermosetting resin generally uses a method of forming a conductor circuit by copper plating as a method of forming a conductor circuit on an insulating layer.

另一方面,利用雷射加工所為之開孔,會有越是孔數多之高密度基板則加工時間越長的問題。所以,近年來尋求藉由使用以光線等進行硬化並以顯影溶解之樹脂組成物,能以顯影步驟進行一次開孔加工之樹脂片。再者,因為係在絕緣層上利用銅鍍敷形成導體電路,故希望導體電路不剝離而對於絕緣層之銅鍍敷密合性高。On the other hand, when using laser processing to make holes, there is a problem that the higher the density of a high-density substrate, the longer the processing time. Therefore, in recent years, a resin sheet that can be subjected to a single hole-opening process in a developing step by using a resin composition that is hardened by light or the like and dissolved by development has been sought. Furthermore, since the conductor circuit is formed by copper plating on the insulating layer, it is desirable that the conductor circuit does not peel off and has high adhesion to the copper plating of the insulating layer.

如此的疊層板、樹脂片中使用的樹脂組成物中,鹼顯影類型係主流,為了能顯影,使用含有酸酐基、羧基之丙烯酸酯。此外,因為銅鍍敷密合性,使用環氧樹脂。例如專利文獻1揭示一種感光性熱硬化型樹脂組成物,包括:使雙酚型環氧樹脂與(甲基)丙烯酸反應後,將酸酐進行反應而獲得之羧基改性環氧(甲基)丙烯酸酯樹脂;聯苯型環氧樹脂;光聚合起始劑;及稀釋劑。又,專利文獻2揭示一種環氧樹脂組成物,含有環氧樹脂、硬化劑、二氧化矽粒子利用矽烷偶聯劑實施了表面處理之二氧化矽成分,不含有硬化促進劑或相對於前述環氧樹脂及前述硬化劑之合計100重量份為3.5重量份以下之含量含有硬化促進劑,前述二氧化矽粒子之平均粒徑為1μm以下,前述二氧化矽成分中,前述二氧化矽粒子每1g之前述矽烷偶聯劑之表面處理量B(g),相對於依式(X)(C(g)/二氧化矽粒子1g=[二氧化矽粒子之比表面積(m2 /g)/矽烷偶聯劑之最小被覆面積(m2 /g)]・・・式(X))算出之二氧化矽粒子每1g之値C(g),為10~80%之範圍內。 [先前技術文獻] [專利文獻]Among the resin compositions used in such laminates and resin sheets, the alkali development type is the mainstream, and in order to enable development, an acrylate containing an acid anhydride group and a carboxyl group is used. In addition, because of copper plating adhesion, epoxy resin is used. For example, Patent Document 1 discloses a photosensitive thermosetting resin composition including a carboxyl-modified epoxy (meth) acrylic acid obtained by reacting a bisphenol epoxy resin with (meth) acrylic acid and then reacting an acid anhydride. Ester resin; biphenyl epoxy resin; photopolymerization initiator; and diluent. In addition, Patent Document 2 discloses an epoxy resin composition containing an epoxy resin, a hardening agent, and silicon dioxide particles, and a silicon dioxide component surface-treated with a silane coupling agent. It does not contain a hardening accelerator or a component of the ring. The total content of the oxygen resin and the hardener is 3.5 parts by weight or less. The hardening accelerator is contained. The average particle diameter of the silicon dioxide particles is 1 μm or less. In the silicon dioxide component, each 1 g of the silicon dioxide particles The surface treatment amount B (g) of the aforementioned silane coupling agent is relative to the formula (X) (C (g) / silicon dioxide particles 1g = [specific surface area of silicon dioxide particles (m 2 / g) / silane The minimum coating area of the coupling agent (m 2 / g)] ...... Formula (X)) Calculated 値 C (g) per 1 g of the silica particles is in the range of 10 to 80%. [Prior Art Literature] [Patent Literature]

專利文獻1:日本特開2005-62450號公報 專利文獻2:日本特開2011-174082號公報Patent Document 1: Japanese Patent Application Laid-Open No. 2005-62450 Patent Document 2: Japanese Patent Application Laid-Open No. 2011-174082

[發明欲解決之課題] 但是使用了習知之環氧樹脂之硬化物無法獲得充分的物性,對於形成有高顯影性且銅鍍敷密合性高之保護膜、及層間絕緣層有極限。[Problems to be Solved by the Invention] However, hardened products using conventional epoxy resins cannot obtain sufficient physical properties, and there are limits to the formation of a protective film with high developability and high copper plating adhesion and an interlayer insulating layer.

又,從專利文獻1記載之樹脂組成物獲得之硬化物,其用途受限於印刷電路板用之蝕刻光阻、阻焊劑,雖可撓性、耐熱性優良,但用於層間絕緣層的銅鍍敷密合性不理想。In addition, the hardened material obtained from the resin composition described in Patent Document 1 is limited in its use for etching photoresist and solder resist for printed circuit boards. Although it has excellent flexibility and heat resistance, it is used for copper for interlayer insulation. The plating adhesion is not satisfactory.

從專利文獻2記載之樹脂組成物獲得之硬化物,銅鍍敷密合性優異,但是開孔限於雷射加工,無法利用顯影步驟進行一次開孔。The hardened material obtained from the resin composition described in Patent Document 2 is excellent in copper plating adhesion, but the opening is limited to laser processing, and it is impossible to make a single opening by the development step.

本發明有鑑於上述問題,提供在多層印刷電路板使用時,塗膜性及耐熱性優異,顯影性、銅鍍敷密合性優異之樹脂組成物、附設支持體之樹脂片、使用此等樹脂片之多層印刷電路板、半導體裝置。 [解決課題之方式]In view of the above problems, the present invention provides a resin composition having excellent coating properties and heat resistance, excellent developability and copper plating adhesion when used in a multilayer printed circuit board, a resin sheet with a support, and the use of these resins. Multilayer printed circuit boards, semiconductor devices. [Methods for solving problems]

本案發明人等發現藉由使用含有下式(1)表示之聯苯芳烷基型環氧樹脂(A)、光硬化起始劑(B)、下式(2)表示之化合物(C)及該(C)成分以外之具乙烯性不飽和基之化合物(D)之樹脂組成物,能夠解決上述課題,乃完成本發明。The inventors of the present case found that by using a compound (C) represented by the following formula (2) containing a biphenylaralkyl-based epoxy resin (A) represented by the following formula (1), a photohardening initiator (B), and The resin composition of the compound (D) having an ethylenically unsaturated group other than the component (C) can solve the above-mentioned problems and has completed the present invention.

[化1]

Figure TW201800473AD00001
[Chemized 1]
Figure TW201800473AD00001

式(1)中,n表示0~15之整數。In formula (1), n represents an integer of 0-15.

[化2]

Figure TW201800473AD00002
[Chemical 2]
Figure TW201800473AD00002

式(2)中,多數個R1 各自獨立地表示氫原子或甲基,且多數個R2 各自獨立地表示氫原子或也可以有取代基之碳數1~22之烴基,多數個R3 各自獨立地表示下式(3)表示之取代基、下式(4)表示之取代基或羥基;In formula (2), most of R 1 each independently represent a hydrogen atom or a methyl group, and most of R 2 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 22 carbon atoms which may have a substituent, and most of R 3 Each independently represents a substituent represented by the following formula (3), a substituent represented by the following formula (4), or a hydroxyl group;

[化3]

Figure TW201800473AD00003
[Chemical 3]
Figure TW201800473AD00003

[化4]

Figure TW201800473AD00004
[Chemical 4]
Figure TW201800473AD00004

式(4)中,R4 表示氫原子或甲基。In the formula (4), R 4 represents a hydrogen atom or a methyl group.

亦即,本發明含有以下之內容。 [1]一種樹脂組成物,含有:前述式(1)表示之聯苯芳烷基型環氧樹脂(A)、光硬化起始劑(B)、前述式(2)表示之化合物(C)、及前述式(2)表示之化合物(C)以外之具有乙烯性不飽和基之化合物(D)。 [2]如[1]之樹脂組成物,更含有馬來醯亞胺化合物(E)。 [3]如[1]或[2]之樹脂組成物,更含有填充材(F)。 [4]如[1]~[3]中任一項之樹脂組成物,更含有化合物(G),該化合物(G)係選自於由氰酸酯化合物、苯酚樹脂、氧雜環丁烷樹脂、苯并化合物、及和該(1)表示之聯苯芳烷基型環氧樹脂(A)為不同之環氧樹脂構成之群組中之任一種以上。That is, the present invention includes the following. [1] A resin composition comprising: a biphenylaralkyl-based epoxy resin (A) represented by the aforementioned formula (1), a photocuring initiator (B), and a compound (C) represented by the aforementioned formula (2) And a compound (D) having an ethylenically unsaturated group other than the compound (C) represented by the aforementioned formula (2). [2] The resin composition according to [1] further contains a maleimide compound (E). [3] The resin composition such as [1] or [2] further contains a filler (F). [4] The resin composition according to any one of [1] to [3], further containing a compound (G) selected from the group consisting of a cyanate compound, a phenol resin, and an oxetane. Resin, benzo The compound and the biphenylaralkyl-type epoxy resin (A) represented by the above (1) are any one or more selected from the group consisting of different epoxy resins.

[5]如[1]~[4]中任一項之樹脂組成物,其中,該式(2)表示之化合物(C)之酸價為30mgKOH/g以上120mgKOH/g以下。 [6]如[1]~[5]中任一項之樹脂組成物,其中,成分(A)之含量相對於樹脂組成物中之樹脂固體成分100質量份為3質量份以上50質量份以下。 [7]如[1]~[6]中任一項之樹脂組成物,其中,該具有乙烯性不飽和基之化合物(D)係具有(甲基)丙烯醯基之化合物及/或具有乙烯基之化合物。 [8]如[3]之樹脂組成物,其中,該填充材(F)係選自於由二氧化矽、軟水鋁石、硫酸鋇、聚矽氧粉末、氟樹脂系填充材、胺甲酸乙酯樹脂系填充材、丙烯酸樹脂系填充材、聚乙烯系填充材、苯乙烯・丁二烯橡膠及聚矽氧橡膠構成之群組中之任一種以上。[5] The resin composition according to any one of [1] to [4], wherein the acid value of the compound (C) represented by the formula (2) is 30 mgKOH / g or more and 120 mgKOH / g or less. [6] The resin composition according to any one of [1] to [5], wherein the content of the component (A) is 3 parts by mass or more and 50 parts by mass or less based on 100 parts by mass of the resin solid content in the resin composition. . [7] The resin composition according to any one of [1] to [6], wherein the compound (D) having an ethylenically unsaturated group is a compound having a (meth) acrylfluorenyl group and / or having ethylene Of the compound. [8] The resin composition according to [3], wherein the filler (F) is selected from the group consisting of silica, boehmite, barium sulfate, polysiloxane powder, fluororesin-based filler, and ethyl carbamate. Any one or more of the group consisting of an ester resin-based filler, an acrylic resin-based filler, a polyethylene-based filler, a styrene-butadiene rubber, and a silicone rubber.

[9]如[1]~[8]中任一項之樹脂組成物,更含有熱硬化促進劑(H)。 [10]如[1]~[9]中任一項之樹脂組成物,更含有下式(5)表示之萘型環氧樹脂;[9] The resin composition according to any one of [1] to [8], further containing a heat curing accelerator (H). [10] The resin composition according to any one of [1] to [9], further containing a naphthalene-type epoxy resin represented by the following formula (5);

[化5] [Chemical 5]

[11]如[1]~[10]中任一項之樹脂組成物,其中,該光硬化起始劑(B)含有下式(6)表示之氧化膦化合物;[11] The resin composition according to any one of [1] to [10], wherein the photohardening initiator (B) contains a phosphine oxide compound represented by the following formula (6);

[化6] [Chemical 6]

式(6)中,R5 ~R10 各自獨立地表示氫原子或碳數1~4之烷基,R11 表示碳數1~20之烷基或碳數6~20之芳基。 [12]一種樹脂片,具有支持體及配置在該支持體之表面之如[1]~[11]中任一項之樹脂組成物。 [13]一種多層印刷電路板,具有如[1]~[11]中任一項之樹脂組成物。 [14]一種半導體裝置,具有如[1]~[11]中任一項之樹脂組成物。 [發明之效果]In Formula (6), R 5 to R 10 each independently represent a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and R 11 represents an alkyl group having 1 to 20 carbon atoms or an aryl group having 6 to 20 carbon atoms. [12] A resin sheet having a support and a resin composition such as any one of [1] to [11] arranged on a surface of the support. [13] A multilayer printed circuit board having the resin composition according to any one of [1] to [11]. [14] A semiconductor device including the resin composition according to any one of [1] to [11]. [Effect of Invention]

依照本發明,可提供鍍敷密合性、塗膜性、耐熱性及顯影性優異,具有適合多層印刷電路板之物性之利用活性能量射線硬化之樹脂組成物、附設支持體之樹脂片、使用此等樹脂片之多層印刷電路板、半導體裝置。According to the present invention, it is possible to provide a resin composition hardened by active energy rays, which has excellent plating adhesion, coating properties, heat resistance, and developability, and has physical properties suitable for a multilayer printed circuit board, a resin sheet with a support, and use. These resin sheets are multilayer printed circuit boards and semiconductor devices.

以下針對本實施方式(以下稱為「本實施形態」)詳細説明。以下之本實施形態係用以說明本發明之例示,本發明不限於以下之內容。本發明可以在其要旨之範圍內適當變形並實施。Hereinafter, this embodiment (hereinafter referred to as "this embodiment") will be described in detail. The following embodiment is an example for explaining the present invention, and the present invention is not limited to the following. The present invention can be appropriately modified and implemented within the scope of the gist thereof.

又,本說明書中「(甲基)丙烯醯基」係指「丙烯醯基」及與其對應之「甲基丙烯醯基」兩者,「(甲基)丙烯酸酯」係指「丙烯酸酯」及與其對應之「甲基丙烯酸酯」兩者,「(甲基)丙烯酸」係指「丙烯酸」及與其對應之「甲基丙烯酸」兩者。又,本實施形態中,「樹脂固體成分」或「樹脂組成物中之樹脂固體成分」,若無特別指明,則係指樹脂組成物中之溶劑及填充材以外的成分,「樹脂固體成分100質量份」係指樹脂組成物中之溶劑及填充材以外成分之合計為100質量份。In this specification, "(meth) acrylfluorenyl" means both "acrylfluorenyl" and its corresponding "methacrylfluorenyl", and "(meth) acrylate" means "acrylate" and As for the corresponding "methacrylate", "(meth) acrylic acid" means both "acrylic acid" and its corresponding "methacrylic acid". In this embodiment, "resin solid content" or "resin solid content in resin composition" means components other than the solvent and filler in the resin composition unless otherwise specified, and "resin solid content 100" "Part by mass" means that the total amount of components other than the solvent and filler in the resin composition is 100 parts by mass.

本實施形態之樹脂組成物,含有前述式(1)表示之聯苯芳烷基型環氧樹脂(A)、光硬化起始劑(B)、前述式(2)表示之化合物(C)及(C)成分以外之具乙烯性不飽和基之化合物(D)。以下針對各成分説明。The resin composition of this embodiment contains a biphenylaralkyl-type epoxy resin (A) represented by the aforementioned formula (1), a photocuring initiator (B), a compound (C) represented by the aforementioned formula (2), and (C) An ethylenically unsaturated compound (D) other than the component. Each component is explained below.

<式(1)表示之聯苯芳烷基型環氧樹脂(A)> 本實施形態使用之聯苯芳烷基型環氧樹脂(A)(也稱為成分(A)),係具有前述式(1)之結構之具聯苯芳烷基骨架之化合物。含有該樹脂(A)而獲得之硬化物,具有高銅鍍敷密合性,且可理想地形成有優良的顯影性之保護膜、及層間絕緣層。<Biphenylaralkyl-type epoxy resin (A) represented by Formula (1)> The biphenylaralkyl-type epoxy resin (A) (also referred to as component (A)) used in this embodiment has the foregoing A compound having a biphenylaralkyl skeleton having a structure of formula (1). The hardened | cured material obtained by containing this resin (A) has high copper-plating adhesiveness, and can form the protective film excellent in developability, and an interlayer insulation layer.

式(1)中,n表示0~15之整數。考量顯影性之觀點,宜為0~5之整數。In formula (1), n represents an integer of 0-15. Considering the developmental viewpoint, it should be an integer from 0 to 5.

本實施形態之樹脂組成物中,成分(A)之含量不特別限定,考量增進銅鍍敷密合性之觀點,相對於成分(A)、成分(C)及成分(D)之合計含量100質量份,宜為3質量份以上較佳,4質量份以上更佳,5質量份以上更理想。又,考量充分硬化、增進耐熱性之觀點,宜為90質量份以下較佳,89質量份以下更佳,88質量份以下更理想。In the resin composition of this embodiment, the content of the component (A) is not particularly limited. Considering the viewpoint of improving the adhesion of copper plating, the content of the component (A), the component (C), and the component (D) is 100 with respect to the total. It is preferably 3 parts by mass or more, more preferably 4 parts by mass or more, and more preferably 5 parts by mass or more. From the viewpoint of sufficiently hardening and improving heat resistance, it is preferably 90 parts by mass or less, more preferably 89 parts by mass or less, and more preferably 88 parts by mass or less.

本實施形態之樹脂組成物中,成分(A)之含量不特別限定,考量銅鍍敷密合性及增進顯影性之觀點,相對於樹脂組成物中之樹脂固體成分100質量份,為3質量份以上較佳,5質量份以上更佳,10質量份以上又更佳,15質量份以上更理想。又,考量充分硬化並增進耐熱性之觀點,相對於樹脂組成物中之樹脂固體成分100質量份,為50質量份以下較佳,40質量份以下更佳,30質量份以下又更佳,28質量份以下更理想。In the resin composition of this embodiment, the content of the component (A) is not particularly limited. From the viewpoint of copper plating adhesion and improvement of developability, it is 3 masses with respect to 100 mass parts of the resin solid content in the resin composition. It is more preferably 5 parts by mass or more, more preferably 10 parts by mass or more, and more preferably 15 parts by mass or more. From the viewpoint of sufficiently hardening and improving heat resistance, it is preferably 50 parts by mass or less, more preferably 40 parts by mass or less, and 30 parts by mass or less with respect to 100 parts by mass of the resin solid content in the resin composition. It is more preferable that the content is less than mass.

樹脂(A)也可利用市售品,可列舉例如:NC3000FH(式(1)中之n=8~10)、NC3000H(式(1)中之n=2~5)、NC3000L(式(1)中之n=1~3)、NC3000(式(1)中之n=1~3)、CER3000L(式(1)中之n=0~2)(以上為商品名,日本化藥(股)製)等。可將它們中的1種單獨使用或將2種以上適當混用。As the resin (A), a commercially available product can also be used, and examples thereof include NC3000FH (n = 8 to 10 in formula (1)), NC3000H (n = 2 to 5 in formula (1)), and NC3000L (formula (1) ) (N = 1 to 3), NC3000 (n = 1 to 3 in formula (1)), CER3000L (n = 0 to 2 in formula (1)) (the above are the trade names of Nippon Kayakusho (stock) ) System) and so on. One of them can be used alone or two or more can be appropriately mixed.

<光硬化起始劑(B)> 本實施形態使用之光硬化起始劑(B)(也稱為成分(B))不特別限定,可使用一般在光硬化性樹脂組成物使用之領域中公知者。<Photocuring Initiator (B)> The photocuring initiator (B) (also referred to as component (B)) used in this embodiment is not particularly limited, and it can be used in the field generally used for photocurable resin compositions. Knowers.

例如:苯偶因、苯偶因甲醚、苯偶因乙醚、苯偶因丙醚、苯偶因異丁醚等苯偶因類、過氧化苯甲醯、過氧化月桂醯、過氧化乙醯、對氯過氧化苯甲醯、二過氧化鄰苯二甲酸二第三丁酯等例示之有機過氧化物、醯基氧化膦類、苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、1,1-二氯苯乙酮、2-羥基-2-甲基-苯基丙烷-1-酮、二乙氧基苯乙酮、1-羥基環己基苯酮、2-甲基-1-[4-(甲硫基)苯基]-2-啉代-丙烷-1-酮、2-苄基-2-二甲胺基-1-(4-啉代苯基)-丁-1-酮等苯乙酮類、2-乙基蒽醌、2-第三丁基蒽醌、2-氯蒽醌、2-戊基蒽醌等蒽醌類、2,4-二乙基噻吨酮、2-異丙基噻吨酮、2-氯噻吨酮等噻吨酮類、苯乙酮二甲基縮酮、苄基二甲基縮酮等縮酮類、二苯酮、4-苯甲醯基-4’-甲基二苯基硫醚、4,4’-雙甲胺基二苯酮等二苯酮類、2,4,6-三甲基苯甲醯基二苯基氧化膦、雙(2,4,6-三甲基苯甲醯基)-苯基氧化膦等氧化膦類、1,2-辛烷二酮,1-[4-(苯基硫)-,2-(O-苯甲醯氧肟)]等肟酯類等自由基型光硬化起始劑、氟膦酸對甲氧基苯基重氮鹽、六氟膦酸N,N-二乙胺基苯基重氮鎓鹽等路易士酸之重氮鹽、六氟膦酸二苯基錪、六氟銻酸二苯基錪等路易士酸之錪鹽、六氟膦酸三苯基鋶、六氟銻酸三苯基鋶等路易士酸之鋶鹽、六氟銻酸三苯基鏻等路易士酸之鏻鹽、其他鹵化物、三系起始劑、硼酸酯系起始劑、及其他之光酸產生劑等陽離子系光聚合起始劑。For example: benzoin, benzoin methyl ether, benzoin ether, benzoin propyl ether, benzoin isobutyl ether, benzoin peroxide, benzoin peroxide, laurel peroxide, acetamidine peroxide , Exemplified organic peroxides such as benzamidine p-chloroperoxide, di-tert-butyl diperoxyphthalate, fluorenylphosphine oxides, acetophenone, 2,2-diethoxy-2- Phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone, 2-hydroxy-2-methyl-phenylpropane-1-one, Diethoxyacetophenone, 1-hydroxycyclohexyl phenone, 2-methyl-1- [4- (methylthio) phenyl] -2-olino-propane-1-one, 2-benzyl Acetophenones such as 2-dimethylamino-1- (4-phosphonophenyl) -butan-1-one, 2-ethylanthraquinone, 2-tert-butylanthraquinone, 2-chloroanthracene Anthraquinones such as quinone, 2-pentylanthraquinone, 2,4-diethylthioxanthone, 2-isopropylthioxanthone, 2-chlorothioxanthone and other thioxanthone, acetophenone dimethyl Acetals, ketals such as benzyl dimethyl ketal, benzophenone, 4-benzylidene-4'-methyldiphenyl sulfide, 4,4'-bismethylaminobenzophenone Isobenzophenones, 2,4,6-trimethylbenzylidene diphenylphosphine oxide, bis (2, Phosphine oxides such as 4,6-trimethylbenzyl) -phenylphosphine oxide, 1,2-octanedione, 1- [4- (phenylsulfanyl)-, 2- (O-benzoyl醯 oxime)] and other oxime esters and other radical photocuring initiators, fluorophosphonic acid p-methoxyphenyldiazonium salt, hexafluorophosphonic acid N, N-diethylaminophenyldiazonium salt Diazonium salts of Lewis acid, diphenylphosphonium hexafluorophosphonate, diphenylphosphonium hexafluoroantimonate, etc., phosphonium salts of Lewis acid, triphenylphosphonium hexafluorophosphonate, triphenyl hexafluoroantimonate Pyrene salts such as rhenium acid, phosphonium salts such as hexafluoroantimonate, other halides, tertiary initiators, borate initiators, and other photoacid generators Isocationic photopolymerization initiator.

醯基氧化膦類可列舉雙(2,4,6-三甲基苯甲醯基)-苯基氧化膦等下式(6)表示之氧化膦化合物、2,4,6-三甲基苯甲醯基-二苯基-氧化膦等。尤其,下式(6)表示之氧化膦化合物,於長波長之UV吸收率高,會使UV光到達樹脂內部,為優異。所以能理想地和本實施形態之聯苯芳烷基型環氧樹脂(A)、化合物(C)及化合物(D)等反應,可製造耐熱性更優良之樹脂片及多層印刷電路板。Examples of the fluorenylphosphine oxides include phosphine oxide compounds represented by the following formula (6) such as bis (2,4,6-trimethylbenzylidene) -phenylphosphine oxide, and 2,4,6-trimethylbenzene Formamyl-diphenyl-phosphine oxide and the like. In particular, the phosphine oxide compound represented by the following formula (6) has a high UV absorption rate at a long wavelength, and is excellent in allowing UV light to reach the inside of the resin. Therefore, it can ideally react with the biphenylaralkyl-type epoxy resin (A), the compound (C), and the compound (D) in this embodiment, and it is possible to produce a resin sheet and a multilayer printed circuit board with better heat resistance.

[化7] [Hua 7]

式(6)中,R5 ~R10 各自獨立地表示氫原子或碳數1~4之烷基,R11 表示碳數1~20之烷基或碳數6~20之芳基。In Formula (6), R 5 to R 10 each independently represent a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and R 11 represents an alkyl group having 1 to 20 carbon atoms or an aryl group having 6 to 20 carbon atoms.

碳數1~4之烷基,例如:甲基、乙基、正丙基、正丁基、異丙基、異丁基、第二丁基、第三丁基等直鏈狀或分支狀之烷基。C1-C4 alkyl groups, for example: methyl, ethyl, n-propyl, n-butyl, isopropyl, isobutyl, second butyl, third butyl, etc. alkyl.

碳數1~20之烷基,例如:甲基、乙基、正丙基、正丁基、正戊基、正己基、異丙基、異丁基、第二丁基、第三丁基、新戊基、1,1-二甲基丙基、1,1-二乙基丙基、1-乙基-1-甲基丙基、1,1,2,2-四甲基丙基、1,1-二甲基丁基、1,1,3-三甲基丁基等直鏈狀或分支狀之烷基。C1-C20 alkyl group, for example: methyl, ethyl, n-propyl, n-butyl, n-pentyl, n-hexyl, isopropyl, isobutyl, second butyl, third butyl, Neopentyl, 1,1-dimethylpropyl, 1,1-diethylpropyl, 1-ethyl-1-methylpropyl, 1,1,2,2-tetramethylpropyl, Linear or branched alkyl groups such as 1,1-dimethylbutyl and 1,1,3-trimethylbutyl.

碳數6~20之芳基可列舉苯基、萘基、聯苯基、聯三苯、菲基、蒽基等非取代芳基;甲苯基、二甲基苯基、異丙基苯基、第三丁基苯基、二第三丁基苯基等烷基取代芳基。Examples of the aryl group having 6 to 20 carbon atoms include non-substituted aryl groups such as phenyl, naphthyl, biphenyl, bitriphenyl, phenanthryl, and anthracenyl; tolyl, dimethylphenyl, isopropylphenyl, Alkyl-substituted aryl groups such as third butylphenyl and di-third butylphenyl.

其中,考量有適合多層印刷電路板用途之反應性,對於金屬導體之可靠性高之觀點,醯基氧化膦類、2-苄基-2-二甲胺基-1-(4-啉代苯基)-丁-1-酮等苯乙酮類之自由基型光硬化起始劑較理想,如上述,考量獲得更良好之耐熱性之觀點,前述式(6)表示之氧化膦化合物更佳,雙(2,4,6-三甲基苯甲醯基)-苯基氧化膦更理想。Among them, considering the reactivity suitable for multilayer printed circuit board applications, and the viewpoint of high reliability of metal conductors, fluorenylphosphine oxides, 2-benzyl-2-dimethylamino-1- (4-phosphonobenzene A radical-type photohardening initiator such as acetophenone such as butan-1-one is preferable. As described above, considering the viewpoint of obtaining better heat resistance, the phosphine oxide compound represented by the formula (6) is more preferable. Of these, bis (2,4,6-trimethylbenzylidene) -phenylphosphine oxide is more desirable.

該等光硬化起始劑(B)可單獨使用1種或適當混用2種以上,也可以併用自由基系與陽離子系兩類起始劑。These photohardening initiators (B) may be used singly or in combination of two or more kinds as appropriate, and two types of initiators of a radical type and a cationic type may be used in combination.

又,2-苄基-2-二甲胺基-1-(4-啉代苯基)-丁酮-1、雙(2,4,6-三甲基苯甲醯基)-苯基氧化膦及2,4,6-三甲基苯甲醯基-二苯基-氧化膦也可使用市售品,分別宜使用Irgacure(註冊商標)369(BASF Japan(股)製)、Irgacure(註冊商標)819(BASF Japan(股)製)及Irgacure(註冊商標)TPO(BASF Japan(股)製)。In addition, 2-benzyl-2-dimethylamino-1- (4-phosphonophenyl) -butanone-1, bis (2,4,6-trimethylbenzyl) -phenyl oxide Phosphine and 2,4,6-trimethylbenzylidene-diphenyl-phosphine oxide can also be used commercially. Irgacure (registered trademark) 369 (manufactured by BASF Japan) and Irgacure (registered Trademark) 819 (made by BASF Japan) and Irgacure (registered trademark) TPO (made by BASF Japan).

本實施形態之樹脂組成物中,光硬化起始劑(B)之含量不特別限定,考量樹脂組成物利用活性能量射線而充分硬化、增進耐熱性之觀點,相對於樹脂組成物中之成分(A)、成分(C)及成分(D)之合計含量100質量份,為0.1質量份以上較佳,0.2質量份以上更佳,0.3質量份以上更理想。又,考量妨礙光硬化後之熱硬化並降低耐熱性之觀點,30質量份以下較佳,25質量份以下更佳,20質量份以下更理想。In the resin composition of the present embodiment, the content of the photocuring initiator (B) is not particularly limited. In consideration of the viewpoint that the resin composition is sufficiently hardened by active energy rays to improve heat resistance, the content of the resin composition ( A) The total content of component (C) and component (D) is 100 parts by mass, preferably 0.1 part by mass or more, more preferably 0.2 part by mass or more, and more preferably 0.3 part by mass or more. From the viewpoint of hindering thermal curing after photo-hardening and lowering heat resistance, 30 parts by mass or less is preferable, 25 parts by mass or less is more preferable, and 20 parts by mass or less is more preferable.

本實施形態之樹脂組成物中,光硬化起始劑(B)之含量不特別限定,相對於樹脂組成物中之樹脂固體成分100質量份,為0.1質量份以上較佳,0.2質量份以上更佳,0.3質量份以上又更佳,1質量份以上更理想,1.8質量份以上更理想。又,考量妨礙光硬化後之熱硬化並減低耐熱性之觀點,相對於樹脂組成物中之樹脂固體成分100質量份,為30質量份以下較佳,25質量份以下更佳,20質量份以下又更佳,10質量份以下更理想。The content of the photocuring initiator (B) in the resin composition of this embodiment is not particularly limited, but it is preferably 0.1 parts by mass or more, and more preferably 0.2 parts by mass or more, based on 100 parts by mass of the resin solid content in the resin composition. Good, 0.3 mass parts or more is more preferable, 1 mass part or more is more preferable, and 1.8 mass parts or more is more preferable. In addition, considering the viewpoint of hindering thermal curing after light curing and reducing heat resistance, it is preferably 30 parts by mass or less, more preferably 25 parts by mass or less, and 20 parts by mass or less based on 100 parts by mass of the resin solid content in the resin composition. Still more preferred is 10 parts by mass or less.

<化合物(C)> 本實施形態使用之化合物(C)(也稱為成分(C))係前述式(2)表示之化合物。化合物(C)可單獨使用1種,也可含有結構異構物及立體異構物等異構物,也可將結構互異之2種以上之化合物適當組合使用。<Compound (C)> The compound (C) (also referred to as component (C)) used in this embodiment is a compound represented by the aforementioned formula (2). The compound (C) may be used alone, or may include isomers such as structural isomers and stereoisomers, or two or more compounds having mutually different structures may be appropriately used in combination.

前述式(2)中,多數個R1 各自獨立地表示氫原子或甲基。其中,考量增進光硬化反應之反應性之觀點,宜含有氫原子較佳,更佳為R1 皆係氫原子。In the formula (2), a plurality of R 1 each independently represent a hydrogen atom or a methyl group. Among them, from the viewpoint of improving the reactivity of the photo-hardening reaction, it is preferable to contain a hydrogen atom, and more preferably, R 1 is a hydrogen atom.

多數個R2 各自獨立地表示氫原子或也可以有取代基之碳數1~22之烴基。A plurality of R 2 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 22 carbon atoms which may have a substituent.

烴基可列舉為碳原子數1~22,較佳為1~14,更佳為1~10之直鏈狀或分支狀之脂肪族烴基;碳原子數3~22,較佳為3~14,更佳為3~10之脂環族烴基;碳原子數6~22,較佳為6~14,更佳為6~10之芳香族烴基。脂肪族烴基,例如:甲基、乙基、正丙基、正丁基、正戊基、正己基、異丙基、異丁基、第二丁基、第三丁基、新戊基、1,1-二甲基丙基、1,1-二乙基丙基、1-乙基-1-甲基丙基、1,1,2,2-四甲基丙基、1,1-二甲基丁基、1,1,3-三甲基丁基等直鏈狀或分支狀之烷基;乙烯基、烯丙基、異丙烯基等直鏈狀或分支狀之烯基;乙炔基、炔丙基等直鏈狀或分支狀之炔基。脂環族烴基,例如:環丙基、環丁基、環戊基、環己基、1-甲基-1-環己基、金剛烷基等環狀飽和烴基;環戊二烯基、茚基、茀基等環狀不飽和烴基。芳香族烴基,例如:苯基、萘基、聯苯基、聯三苯、菲基、蒽基等非取代芳基;甲苯基、二甲基苯基、異丙基苯基、第三丁基苯基、二第三丁基苯基等烷基取代芳基;等芳基。這些烴基中也可以至少一個氫原子取代成其他烴基。至少一個氫原子取代成其他烴基之烴基,例如:苄基、異丙苯基等芳基取代烷基、環己基甲基等環狀飽和烴基取代烷基。The hydrocarbon group may be a linear or branched aliphatic hydrocarbon group having 1 to 22 carbon atoms, preferably 1 to 14, more preferably 1 to 10 carbon atoms; 3 to 22 carbon atoms, preferably 3 to 14, More preferably, it is an alicyclic hydrocarbon group of 3 to 10; 6 to 22 carbon atoms, preferably 6 to 14, and more preferably 6 to 10 aromatic hydrocarbon group. Aliphatic hydrocarbon groups, such as: methyl, ethyl, n-propyl, n-butyl, n-pentyl, n-hexyl, isopropyl, isobutyl, second butyl, third butyl, neopentyl, 1 1,1-dimethylpropyl, 1,1-diethylpropyl, 1-ethyl-1-methylpropyl, 1,1,2,2-tetramethylpropyl, 1,1-bis Linear or branched alkyl groups such as methylbutyl, 1,1,3-trimethylbutyl; linear or branched alkenyl groups such as vinyl, allyl, isopropenyl; ethynyl , Propargyl and other linear or branched alkynyl. Cycloaliphatic hydrocarbon groups, for example: cyclic saturated hydrocarbon groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, 1-methyl-1-cyclohexyl, adamantyl; cyclopentadienyl, indenyl, Cyclic unsaturated hydrocarbon groups such as fluorenyl. Aromatic hydrocarbon groups, such as: unsubstituted aryl groups such as phenyl, naphthyl, biphenyl, bitriphenyl, phenanthryl, and anthracenyl; tolyl, dimethylphenyl, isopropylphenyl, and third butyl Alkyl-substituted aryl groups such as phenyl, di-tert-butylphenyl; and other aryl groups. These hydrocarbon groups may be substituted with at least one hydrogen atom into another hydrocarbon group. At least one hydrogen atom is substituted with a hydrocarbyl group of another hydrocarbyl group, for example: an aryl-substituted alkyl group such as benzyl, cumyl, or a cyclic saturated hydrocarbon-substituted alkyl group such as cyclohexylmethyl.

也可以有取代基之碳數1~22之烴基,宜為直鏈狀或分支狀之烷基較佳。多數個R2 ,考量增進硬化物之耐熱性之觀點,宜包括甲基較佳,更佳為R2 皆係甲基。多數個R3 各自獨立地表示前述式(3)表示之取代基、前述式(4)表示之取代基或羥基。其中,考量增進耐熱性之觀點,宜包括羥基較佳。又,本實施形態中,使用多數個R3 中含有前述式(3)表示之取代基之化合物(C),考量增進顯影性之觀點,亦為理想。本實施形態中,使用多數個R3 中含前述式(4)表示之取代基之化合物(C),考量增進耐熱性之觀點亦為理想。前述式(4)中,R4 表示氫原子或甲基。其中,考量增進光硬化反應之反應性之觀點,氫原子較佳。It may also have a hydrocarbon group having 1 to 22 carbon atoms with a substituent, preferably a linear or branched alkyl group. Considering the viewpoint of improving the heat resistance of the hardened material for a plurality of R 2 , it is preferable to include a methyl group, and it is more preferable that R 2 is a methyl group. The plurality of R 3 each independently represent a substituent represented by the aforementioned formula (3), a substituent represented by the aforementioned formula (4), or a hydroxyl group. Among them, considering the viewpoint of improving heat resistance, it is preferable to include a hydroxyl group. In addition, in this embodiment, it is also preferable to use a plurality of compounds (C) in which R 3 contains a substituent represented by the formula (3) from the viewpoint of improving developability. In this embodiment, a plurality of compounds (C) containing a substituent represented by the aforementioned formula (4) in R 3 are used, and the viewpoint of improving heat resistance is also desirable. In the formula (4), R 4 represents a hydrogen atom or a methyl group. Among them, from the viewpoint of improving the reactivity of the photo-hardening reaction, a hydrogen atom is preferred.

多數個R3 ,考量增進顯影性之觀點,宜為全部R3 之取代基當中之前述式(3)表示之取代基之比率為20%以上98%以下之範圍、前述式(4)表示之取代基之比率為5%以上98%以下之範圍、羥基之比率為10%以上98%以下之範圍(此等取代基之比率之和為100%)較佳。其中,考量增進顯影性之觀點,多數個R3 中之至少一者為前述式(3)表示之取代基尤佳。Considering the viewpoint of improving the developability of a plurality of R 3 , it is preferable that the ratio of the substituents represented by the above formula (3) among all the substituents of R 3 is in a range of 20% to 98%, and the above formula (4) The ratio of the substituents is preferably in the range of 5% to 98%, and the ratio of the hydroxyl groups is in the range of 10% to 98% (the sum of the ratios of these substituents is 100%). Among these, from the viewpoint of improving the developability, it is particularly preferable that at least one of R 3 is a substituent represented by the aforementioned formula (3).

化合物(C)若含有以下之化合物(C1)~(C5)中之任一者以上,能夠增進光硬化反應之反應性、硬化物之耐熱性及顯影性,故為理想,至少含有化合物(C1)更佳,含有(C1)~(C5)中之任2種以上更理想,含有化合物(C1)及化合物(C2)~(C5)中之任1種以上又更佳。化合物(C)至少含有化合物(C2)及(C3)亦為理想。If the compound (C) contains any one or more of the following compounds (C1) to (C5), it is preferable to improve the reactivity of the photocuring reaction, the heat resistance and developability of the cured product, and therefore it is desirable to contain at least the compound (C1 ) Is more preferable, and it is more preferable to contain any two or more of (C1) to (C5), and it is more preferable to contain any one or more of compound (C1) and (C2) to (C5). It is also preferable that the compound (C) contains at least the compounds (C2) and (C3).

[化8] [Chem 8]

[化9] [Hua 9]

[化10] [Chem10]

[化11] [Chem 11]

[化12] [Hua 12]

如此的化合物也可利用市售品,例如:KAYARAD(註冊商標)ZCR-6001H、KAYARAD(註冊商標)ZCR-6002H、KAYARAD(註冊商標)ZCR-6006H、KAYARAD(註冊商標)ZCR-6007H、KAYARAD(註冊商標)ZCR-601H(以上係商品名,日本化藥(股)製)等。Such compounds can also be used commercially, for example, KAYARAD (registered trademark) ZCR-6001H, KAYARAD (registered trademark) ZCR-6002H, KAYARAD (registered trademark) ZCR-6006H, KAYARAD (registered trademark) ZCR-6007H, KAYARAD ( (Registered trademark) ZCR-601H (the above are trade names, manufactured by Nippon Kayaku Co., Ltd.), etc.

本實施形態之樹脂組成物中,化合物(C)之酸價,考量增進顯影性之觀點,為30mgKOH/g以上較佳,考量更提高顯影性之觀點,50mgKOH/g以上又更佳。又,考量防止利用活性能量射線使其硬化後因為顯影液而溶解之觀點,化合物(C)之酸價宜為120mgKOH/g以下較佳,考量更防止溶解之觀點,110mgKOH/g以下又更佳。又,本實施形態中之「酸價」,代表依循JISK0070:1992之方法測定之値。In the resin composition of the present embodiment, the acid value of the compound (C) is preferably 30 mgKOH / g or more from the viewpoint of improving developability, and from the viewpoint of improving the developability, it is more preferably 50 mgKOH / g or more. In addition, considering the viewpoint of preventing the solution from being dissolved by the developer after being hardened by the active energy ray, the acid value of the compound (C) should preferably be 120 mgKOH / g or less, and the viewpoint of preventing dissolution more preferably, it is more preferably 110 mgKOH / g or less. . In addition, the "acid value" in this embodiment represents the osmium measured according to the method of JISK0070: 1992.

本實施形態之樹脂組成物中,化合物(C)之含量不特別限定,考量使樹脂組成物利用活性能量射線硬化之觀點,相對於樹脂組成物中之成分(A)、成分(C)及成分(D)之合計含量100質量份為1質量份以上較佳,2質量份以上更佳,3質量份以上更理想。又,考量利用活性能量射線充分硬化、增進耐熱性之觀點,99質量份以下較佳,98質量份以下更佳,97質量份以下更理想。In the resin composition of this embodiment, the content of the compound (C) is not particularly limited. Considering that the resin composition is hardened by active energy rays, the content of the compound (C) is relative to the component (A), the component (C), and the component in the resin composition. (D) The total content of 100 parts by mass is preferably 1 part by mass or more, more preferably 2 parts by mass or more, and more preferably 3 parts by mass or more. Moreover, considering the viewpoint of sufficiently hardening by active energy rays to improve heat resistance, 99 parts by mass or less is more preferable, 98 parts by mass or less is more preferable, and 97 parts by mass or less is more preferable.

本實施形態之樹脂組成物中,化合物(C)之含量不特別限定,考量使樹脂組成物利用活性能量射線硬化之觀點,相對於樹脂組成物中之樹脂固體成分100質量份為1質量份以上較佳,2質量份以上更佳,3質量份以上更佳,10質量份以上更理想,25質量份以上又更理想,30質量份以上最理想。又,考量利用活性能量射線充分硬化、增進耐熱性之觀點,相對於樹脂組成物中之樹脂固體成分100質量份,為99質量份以下較佳,98質量份以下更佳,97質量份以下又更佳,90質量份以下更理想,75質量份以下更理想,72質量份以下最理想。In the resin composition of this embodiment, the content of the compound (C) is not particularly limited. Considering that the resin composition is hardened by active energy rays, it is 1 part by mass or more relative to 100 parts by mass of the resin solid content in the resin composition. Preferably, 2 parts by mass or more is preferable, 3 parts by mass or more is more preferable, 10 parts by mass or more is more preferable, 25 parts by mass or more is more preferable, and 30 parts by mass or more is most preferable. In addition, considering the viewpoint of sufficiently hardening by using active energy rays to improve heat resistance, it is preferably 99 parts by mass or less, more preferably 98 parts by mass or less, and 97 parts by mass or less with respect to 100 parts by mass of the resin solid content in the resin composition. More preferably, 90 parts by mass or less is more preferable, 75 parts by mass or less is more preferable, and 72 parts by mass or less is most preferable.

<(C)成分以外之具乙烯性不飽和基之化合物(D)> 本實施形態之樹脂組成物,為了提高對於活性能量射線(例如:紫外線)之反應性、增進耐熱性,含有(C)成分以外之具乙烯性不飽和基之化合物(D)(也稱為成分(D))。本實施形態使用之具有乙烯性不飽和基之化合物(D),只要是前述式(2)表示之化合物(C)以外且係在1分子中具有1個以上之乙烯性不飽和基之化合物即可,並不特別限定,例如:具有(甲基)丙烯醯基、乙烯基等之化合物。可將它們中的1種單獨使用或適當混用2種以上。<Ethylene unsaturated compound (D) other than (C) component> The resin composition of this embodiment contains (C) in order to improve reactivity to active energy rays (for example, ultraviolet rays) and heat resistance. Compound (D) having an ethylenically unsaturated group other than the component (also referred to as component (D)). The compound (D) having an ethylenically unsaturated group used in this embodiment is a compound other than the compound (C) represented by the aforementioned formula (2) and has one or more ethylenically unsaturated groups in one molecule. The compound may be, but is not particularly limited to, for example, a compound having a (meth) acrylfluorenyl group, a vinyl group, or the like. One of them may be used alone or two or more of them may be appropriately mixed.

作為具有(甲基)丙烯醯基之化合物,可列舉(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸月桂酯、聚乙二醇(甲基)丙烯酸酯、聚乙二醇(甲基)丙烯酸酯單甲醚、(甲基)丙烯酸苯基乙酯、(甲基)丙烯酸異莰酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸苄酯、(甲基)丙烯酸四氫呋喃甲酯、二(甲基)丙烯酸丁二醇酯、二(甲基)丙烯酸己二醇酯、二(甲基)丙烯酸新戊二醇酯、二(甲基)丙烯酸壬二醇酯、二(甲基)丙烯酸甘醇酯、二乙烯二(甲基)丙烯酸酯、聚乙二醇二(甲基)丙烯酸酯、參(甲基)丙烯醯氧基乙基異氰尿酸酯、聚丙二醇二(甲基)丙烯酸酯、己二酸環氧二(甲基)丙烯酸酯、雙酚環氧乙烷二(甲基)丙烯酸酯、氫化雙酚環氧乙烷(甲基)丙烯酸酯、雙酚二(甲基)丙烯酸酯、ε-己內酯改性羥基三甲基乙酸新戊二醇二(甲基)丙烯酸酯、ε-己內酯改性六(甲基)丙烯酸二新戊四醇酯、ε-己內酯改性聚(甲基)丙烯酸二新戊四醇酯、聚(甲基)丙烯酸二新戊四醇酯、三羥甲基丙烷三(甲基)丙烯酸酯、三羥乙基丙烷三(甲基)丙烯酸酯、及其環氧乙烷加成物、三(甲基)丙烯酸新戊四醇酯、及其環氧乙烷加成物、四(甲基)丙烯酸新戊四醇酯、六(甲基)丙烯酸二新戊四醇酯、及其環氧乙烷加成物等。Examples of the compound having a (meth) acrylfluorenyl group include methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, lauryl (meth) acrylate, and polyethylene glycol (Meth) acrylate, polyethylene glycol (meth) acrylate monomethyl ether, phenylethyl (meth) acrylate, isoamyl (meth) acrylate, cyclohexyl (meth) acrylate, ( Benzyl (meth) acrylate, tetrahydrofuran methyl (meth) acrylate, butanediol di (meth) acrylate, hexanediol di (meth) acrylate, neopentyl glycol di (meth) acrylate, Nonanediol di (meth) acrylate, glycol glycol di (meth) acrylate, diethylene di (meth) acrylate, polyethylene glycol di (meth) acrylate, ginseng (meth) acrylic acid Oxyethyl isocyanurate, polypropylene glycol di (meth) acrylate, adipic acid epoxy di (meth) acrylate, bisphenol ethylene oxide di (meth) acrylate, hydrogenated bisphenol Ethylene oxide (meth) acrylate, bisphenol di (meth) acrylate, ε-caprolactone modified hydroxytrimethylacetic acid neopentyl glycol di (meth) acrylate, ε-caprolactone Modified six (A ) Dineopentaerythryl Acrylate, ε-caprolactone modified poly (nepentaerythritol), poly (meth) acrylate Dinepentaerythritol, trimethylolpropane tris (methyl Group) acrylate, trihydroxyethylpropane tri (meth) acrylate, and its ethylene oxide adduct, neopentyl tetrakis (meth) acrylate, and its ethylene oxide adduct, Neopentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, and ethylene oxide adducts thereof.

此外,也可列舉同一分子內同時具有(甲基)丙烯醯基與胺甲酸乙酯鍵之胺甲酸乙酯(甲基)丙烯酸酯類、同樣在同一分子內具有(甲基)丙烯醯基與酯鍵之聚酯(甲基)丙烯酸酯、從環氧樹脂衍生且兼具(甲基)丙烯醯基之環氧(甲基)丙烯酸酯類、將該等鍵結複合地使用的反應性寡聚物等。In addition, urethane (meth) acrylates having both a (meth) acryl group and a urethane bond in the same molecule, and also having a (meth) acryl group and Responsive oligoesters which are ester-bonded polyester (meth) acrylates, epoxy (meth) acrylates derived from epoxy resins and which also have a (meth) acrylfluorenyl group, and these bonds are used in combination Polymer and so on.

上述胺甲酸乙酯(甲基)丙烯酸酯類,係含羥基之(甲基)丙烯酸酯與聚異氰酸酯、視需要使用之其他醇類之反應物。例如:使(甲基)丙烯酸羥基乙酯、(甲基)丙烯酸羥基丙酯、(甲基)丙烯酸羥基丁酯等(甲基)丙烯酸羥基烷酯類、單(甲基)丙烯酸甘油酯、二(甲基)丙烯酸甘油酯等(甲基)丙烯酸甘油酯類、二(甲基)丙烯酸新戊四醇酯、三(甲基)丙烯酸新戊四醇酯、五(甲基)丙烯酸二新戊四醇酯、六(甲基)丙烯酸二新戊四醇酯等糖醇(甲基)丙烯酸酯類,與甲苯二異氰酸酯、六亞甲基二異氰酸酯、三甲基六亞甲基二異氰酸酯、異佛爾酮二異氰酸酯、降莰烯二異氰酸酯、二甲苯二異氰酸酯、氫化二甲苯二異氰酸酯、二環己烷亞甲基二異氰酸酯、及它們的異氰尿酸酯、縮二脲反應物等聚異氰酸酯等反應,成為胺甲酸乙酯(甲基)丙烯酸酯類。The aforementioned urethane (meth) acrylates are reactants of hydroxyl-containing (meth) acrylates, polyisocyanates, and other alcohols used as needed. For example, hydroxyalkyl (meth) acrylates such as hydroxyethyl (meth) acrylate, hydroxypropyl (meth) acrylate, hydroxybutyl (meth) acrylate, glyceryl mono (meth) acrylate, Glyceryl (meth) acrylates such as glyceryl (meth) acrylate, neopentaerythritol di (meth) acrylate, neopentaerythritol tri (meth) acrylate, dineopentapenta (meth) acrylate Sugar alcohols (meth) acrylates such as tetraol esters, dipentaerythritol hexa (meth) acrylate, and toluene diisocyanate, hexamethylene diisocyanate, trimethylhexamethylene diisocyanate, iso Furone diisocyanate, norbornene diisocyanate, xylene diisocyanate, hydrogenated xylene diisocyanate, dicyclohexanemethylene diisocyanate, and polyisocyanates such as their isocyanurates and biuret reactants Wait for a reaction to become urethane (meth) acrylates.

上述聚酯(甲基)丙烯酸酯類,例如:己內酯改性(甲基)丙烯酸2-羥基乙酯、環氧乙烷及/或環氧丙烷改性鄰苯二甲酸(甲基)丙烯酸酯、環氧乙烷改性琥珀酸(甲基)丙烯酸酯、己內酯改性四氫呋喃甲基(甲基)丙烯酸酯等單官能(聚)酯(甲基)丙烯酸酯類;羥基三甲基乙酸酯新戊二醇二(甲基)丙烯酸酯、己內酯改性羥基三甲基乙酸酯新戊二醇二(甲基)丙烯酸酯、表氯醇改性鄰苯二甲酸二(甲基)丙烯酸酯等二(聚)酯(甲基)丙烯酸酯類;三羥甲基丙烷或甘油1莫耳加成了1莫耳以上之ε-己內酯、γ-丁內酯、δ-戊內酯等環狀內酯化合物而得之三元醇之單、二或三(甲基)丙烯酸酯。The polyester (meth) acrylates are, for example, caprolactone-modified 2-hydroxyethyl (meth) acrylate, ethylene oxide, and / or propylene oxide-modified phthalic acid (meth) acrylic acid Monofunctional (poly) esters (meth) acrylates such as esters, ethylene oxide-modified succinic acid (meth) acrylates, caprolactone-modified tetrahydrofuran methyl (meth) acrylates; hydroxytrimethyl Acetate neopentyl glycol di (meth) acrylate, caprolactone modified hydroxytrimethyl acetate neopentyl glycol di (meth) acrylate, epichlorohydrin modified phthalic acid di ( Di (poly) esters (meth) acrylates such as (meth) acrylates; 1 mol of trimethylolpropane or glycerol added to ε-caprolactone, γ-butyrolactone, δ -Mono, di or tri (meth) acrylates of trihydric alcohols obtained from cyclic lactone compounds such as valerolactone.

又,可列舉對於新戊四醇或二(三羥甲基)丙烷1莫耳加成了1莫耳以上之ε-己內酯、γ-丁內酯、δ-戊內酯等環狀內酯化合物而得之三元醇之單、二、三或四(甲基)丙烯酸酯、對於二新戊四醇1莫耳加成了1莫耳以上之ε-己內酯、γ-丁內酯、δ-戊內酯等環狀內酯化合物而得之三元醇之單、或聚(甲基)丙烯酸酯之三元醇、四元醇、五元醇或六元醇等多元醇之單(甲基)丙烯酸酯或聚(甲基)丙烯酸酯。In addition, cyclic internals such as ε-caprolactone, γ-butyrolactone, and δ-valerolactone such as neomolerol or bis (trimethylol) propane with 1 mol addition or more can be cited. Mono-, di-, tri-, or tetra- (meth) acrylates of triols obtained from ester compounds, ε-caprolactone, γ-butyrolactone, and 1 mol added to dipentaerythritol Monohydric alcohols derived from cyclic lactone compounds such as esters, δ-valerolactones, or polyhydric alcohols such as poly (meth) acrylates, tetrahydric alcohols, pentahydric alcohols, or hexahydric alcohols Mono (meth) acrylate or poly (meth) acrylate.

又,也可以進一步列舉(聚)乙二醇、(聚)丙二醇、(聚)四亞甲基二醇、(聚)丁二醇、3-甲基-1,5-戊二醇、己二醇等二醇成分與馬來酸、富馬酸、琥珀酸、己二酸、鄰苯二甲酸、間苯二甲酸、六氫鄰苯二甲酸、四氫鄰苯二甲酸、二聚酸、癸二酸、壬二酸、5-磺酸基間苯二甲酸鈉等多元酸、及該等之酐之反應物即聚酯多元醇之(甲基)丙烯酸酯;由前述二醇成分與多元酸及該等之酐與ε-己內酯、γ-丁內酯、δ-戊內酯等構成的環狀內酯改性聚酯二醇之(甲基)丙烯酸酯等多官能(聚)酯(甲基)丙烯酸酯類等,但不限定於此等。Furthermore, (poly) ethylene glycol, (poly) propylene glycol, (poly) tetramethylene glycol, (poly) butanediol, 3-methyl-1,5-pentanediol, and hexanediethylene glycol) Glycol components such as alcohol and maleic acid, fumaric acid, succinic acid, adipic acid, phthalic acid, isophthalic acid, hexahydrophthalic acid, tetrahydrophthalic acid, dimer acid, decyl Polyacids such as diacids, azelaic acid, sodium 5-sulfoisophthalate, and the reactants of these anhydrides are (meth) acrylates of polyester polyols; Polyfunctional (poly) esters such as (meth) acrylates of cyclic lactone-modified polyester diols composed of such anhydrides and ε-caprolactone, γ-butyrolactone, δ-valerolactone ( (Meth) acrylates and the like, but are not limited thereto.

上述環氧(甲基)丙烯酸酯類,係有環氧基之化合物與(甲基)丙烯酸之羧酸酯化合物。例如:苯酚酚醛清漆型環氧(甲基)丙烯酸酯、甲酚酚醛清漆型環氧(甲基)丙烯酸酯、參羥基苯基甲烷型環氧(甲基)丙烯酸酯、二環戊二烯苯酚型環氧(甲基)丙烯酸酯、雙酚A型環氧(甲基)丙烯酸酯、雙酚F型環氧(甲基)丙烯酸酯、聯苯酚型環氧(甲基)丙烯酸酯、雙酚A酚醛清漆型環氧(甲基)丙烯酸酯、含萘骨架之環氧(甲基)丙烯酸酯、乙二醛型環氧(甲基)丙烯酸酯、雜環族環氧(甲基)丙烯酸酯等、及該等之酸酐改性環氧丙烯酸酯等。The epoxy (meth) acrylates are epoxy compounds and carboxylate compounds of (meth) acrylic acid. For example: phenol novolac epoxy (meth) acrylate, cresol novolac epoxy (meth) acrylate, p-hydroxyphenylmethane epoxy (meth) acrylate, dicyclopentadiene phenol Type epoxy (meth) acrylate, bisphenol A type epoxy (meth) acrylate, bisphenol F type epoxy (meth) acrylate, biphenol type epoxy (meth) acrylate, bisphenol A novolac epoxy (meth) acrylate, naphthalene skeleton-containing epoxy (meth) acrylate, glyoxal epoxy (meth) acrylate, heterocyclic epoxy (meth) acrylate Etc., and these anhydride-modified epoxy acrylates.

具有乙烯基之化合物可列舉乙基乙烯醚、丙基乙烯醚、羥基乙基乙烯醚、乙二醇二乙烯醚等乙烯醚類。苯乙烯類可以列舉苯乙烯、甲基苯乙烯、乙基苯乙烯、二乙烯基苯等。其他乙烯基化合物可列舉異氰尿酸三烯丙酯、三甲基烯丙基異氰尿酸酯、雙烯丙基納迪克醯亞胺等。Examples of the compound having a vinyl group include vinyl ethers such as ethyl vinyl ether, propyl vinyl ether, hydroxyethyl vinyl ether, and ethylene glycol divinyl ether. Examples of the styrenes include styrene, methylstyrene, ethylstyrene, and divinylbenzene. Examples of other vinyl compounds include triallyl isocyanurate, trimethylallyl isocyanurate, diallyl nadicarium imine, and the like.

該等之中,考量耐熱性之觀點,選自於由四(甲基)丙烯酸新戊四醇酯、六(甲基)丙烯酸二新戊四醇酯、甲酚酚醛清漆型環氧(甲基)丙烯酸酯、雙酚A型環氧(甲基)丙烯酸酯、含萘骨架之環氧(甲基)丙烯酸酯、雙烯丙基納迪克醯亞胺構成之群組中之一種以上較佳,考量更提高耐熱性之觀點,六(甲基)丙烯酸二新戊四醇酯更佳。藉由含如此的種類的具有乙烯性不飽和基之化合物,獲得之硬化物之耐熱性有更提高的傾向。Among these, the viewpoint of considering heat resistance is selected from the group consisting of neopentyl tetrakis (meth) acrylate, dipentaerythritol hexa (meth) acrylate, cresol novolac epoxy (methyl ) Acrylic ester, bisphenol A epoxy (meth) acrylate, naphthalene skeleton-containing epoxy (meth) acrylate, and bisallyl nadic acid imine Considering the viewpoint of improving heat resistance, dineopentaerythritol (meth) acrylate is more preferable. By containing such a compound having an ethylenically unsaturated group, the heat resistance of the obtained cured product tends to be further improved.

本實施形態之樹脂組成物中,(C)成分以外之具乙烯性不飽和基之化合物(D)之含量不特別限定,考量使顯影性為良好之觀點,相對於樹脂組成物中之成分(A)、成分(C)及成分(D)之合計含量100質量份,為0.5質量份以上較佳,1.0質量份以上更佳,1.5質量份以上更理想。又,考量使硬化物之耐熱性良好之觀點,90質量份以下較佳,70質量份以下更佳,50質量份以下更理想。In the resin composition of the present embodiment, the content of the compound (D) having an ethylenically unsaturated group other than the component (C) is not particularly limited. Considering that the developability is good, the content of the component in the resin composition ( A) The total content of component (C) and component (D) is 100 parts by mass, preferably 0.5 part by mass or more, more preferably 1.0 part by mass or more, and more preferably 1.5 part by mass or more. From the viewpoint of making the heat resistance of the cured product good, 90 parts by mass or less is preferred, 70 parts by mass or less is more preferred, and 50 parts by mass or less is more preferred.

本實施形態之樹脂組成物中,化合物(D)之含量不特別限定,考量使顯影性良好之觀點,相對於樹脂組成物中之樹脂固體成分100質量份,為0.5質量份以上較佳,1.0質量份以上更佳,1.5質量份以上又更佳,5.0質量份以上更理想,10質量份以上最理想。又,考量使硬化物之耐熱性良好之觀點,相對於樹脂組成物中之樹脂固體成分100質量份,為90質量份以下較佳,70質量份以下更佳,50質量份以下又更佳,25質量份以下更理想,20質量份以下最理想。In the resin composition of this embodiment, the content of the compound (D) is not particularly limited, and considering the viewpoint of making the developability good, it is preferably 0.5 parts by mass or more relative to 100 parts by mass of the resin solid content in the resin composition, and 1.0 is preferably 1.0 More than mass parts is more preferable, more than 1.5 mass parts is more preferable, more than 5.0 mass parts is more preferable, and more than 10 mass parts is most preferable. Moreover, considering the viewpoint of making the heat resistance of the cured product good, it is preferably 90 parts by mass or less, more preferably 70 parts by mass or less, and more preferably 50 parts by mass or less with respect to 100 parts by mass of the resin solid content in the resin composition. 25 mass parts or less is more preferable, and 20 mass parts or less is most preferable.

<馬來醯亞胺化合物(E)> 本實施形態之樹脂組成物中,可使用馬來醯亞胺化合物(E)(也稱為成分(E))。以下針對馬來醯亞胺化合物(E)詳細記述。<Maleimide compound (E)> In the resin composition according to this embodiment, a maleimide compound (E) (also referred to as a component (E)) can be used. The maleimide compound (E) is described in detail below.

本實施形態使用之馬來醯亞胺化合物(E)只要是在分子中具有一個以上之馬來醯亞胺基之化合物即無特殊限制。其具體例,例如:N-苯基馬來醯亞胺、N-羥基苯基馬來醯亞胺、雙(4-馬來醯亞胺苯基)甲烷、2,2-雙{4-(4-馬來醯亞胺苯氧基)-苯基}丙烷、4,4-二苯基甲烷雙馬來醯亞胺、雙(3,5-二甲基-4-馬來醯亞胺苯基)甲烷、雙(3-乙基-5-甲基-4-馬來醯亞胺苯基)甲烷、雙(3,5-二乙基-4-馬來醯亞胺苯基)甲烷、苯基甲烷馬來醯亞胺、鄰伸苯基雙馬來醯亞胺、間伸苯基雙馬來醯亞胺、對伸苯基雙馬來醯亞胺、鄰伸苯基雙檸康醯亞胺、間伸苯基雙檸康醯亞胺、對伸苯基雙檸康醯亞胺、2,2-雙(4-(4-馬來醯亞胺苯氧基)-苯基)丙烷、3,3-二甲基-5,5-二乙基-4,4-二苯基甲烷雙馬來醯亞胺、4-甲基-1,3-伸苯基雙馬來醯亞胺、1,6-雙馬來醯亞胺-(2,2,4-三甲基)己烷、4,4-二苯醚雙馬來醯亞胺、4,4-二苯基碸雙馬來醯亞胺、1,3-雙(3-馬來醯亞胺苯氧基)苯、1,3-雙(4-馬來醯亞胺苯氧基)苯、4,4-二苯基甲烷雙檸康醯亞胺、2,2-雙[4-(4-檸康醯亞胺苯氧基)苯基]丙烷、雙(3,5-二甲基-4-檸康醯亞胺苯基)甲烷、雙(3-乙基-5-甲基-4-檸康醯亞胺苯基)甲烷、雙(3,5-二乙基-4-檸康醯亞胺苯基)甲烷、聚苯基甲烷馬來醯亞胺、酚醛清漆型馬來醯亞胺化合物、聯苯芳烷基型馬來醯亞胺化合物、下式(7)表示之馬來醯亞胺化合物、下式(8)表示之馬來醯亞胺化合物、及此等馬來醯亞胺化合物之預聚物、或馬來醯亞胺化合物與胺化合物之預聚物等。The maleimide imine compound (E) used in this embodiment is not particularly limited as long as it is a compound having one or more maleimide imine groups in the molecule. Specific examples thereof include, for example, N-phenylmaleimide, N-hydroxyphenylmaleimide, bis (4-maleimidephenyl) methane, 2,2-bisamidine4- ( 4-maleimide phenoxy) -phenylammonium propane, 4,4-diphenylmethane bismaleimide, bis (3,5-dimethyl-4-maleimide) benzene Methyl), methane, bis (3-ethyl-5-methyl-4-maleimidephenyl) methane, bis (3,5-diethyl-4-maleimidephenyl) methane, Phenylmethanemaleimide, o-phenylene bismaleimide, m-phenylene bismaleimide, p-phenylene bismaleimide, o-phenylene bismaleimide Imine, m-phenylene bis-citramene imine, p-phenylene bis-citramene imine, 2,2-bis (4- (4-maleimide phenoxy) -phenyl) propane , 3,3-dimethyl-5,5-diethyl-4,4-diphenylmethane bismaleimide, 4-methyl-1,3-phenylene bismaleimide , 1,6-bismaleimide- (2,2,4-trimethyl) hexane, 4,4-diphenyl ether bismaleimide, 4,4-diphenylpyridine Lyme imine, 1,3-bis (3-maleimide phenoxy) benzene, 1,3-bis (4-maleimide phenoxy) benzene, 4,4-diphenyl Methane Shuangkangang Imine, 2,2-bis [4- (4-citraconiminophenoxy) phenyl] propane, bis (3,5-dimethyl-4-citraconimidophenyl) methane, Bis (3-ethyl-5-methyl-4-citraconiminophenyl) methane, bis (3,5-diethyl-4-citraconiminophenyl) methane, polyphenylmethane Maleimide, novolak-type maleimide compound, biphenylaralkyl-type maleimide compound, maleimide compound represented by the following formula (7), and formula (8) Maleimide compounds, prepolymers of these maleimide compounds, or prepolymers of maleimide compounds and amine compounds, and the like.

其中,酚醛清漆型馬來醯亞胺化合物、聯苯芳烷基型馬來醯亞胺化合物尤佳。又,考量獲得良好之塗膜性、耐熱性優異之觀點,下式(7)表示之馬來醯亞胺化合物、下式(8)表示之馬來醯亞胺化合物較理想,下式(7)表示之馬來醯亞胺化合物更理想。下式(7)表示之馬來醯亞胺化合物也可以利用市售品,例如:BMI-2300(大和化成工業(股)公司製)。下式(8)表示之馬來醯亞胺化合物也可以利用市售品,例如:MIR-3000(日本化藥(股)公司製)。該等馬來醯亞胺化合物(E)可單獨使用1種或適當混用2種以上。Among them, novolac-type maleimide compounds and biphenylaralkyl-type maleimide compounds are particularly preferred. From the viewpoint of obtaining good coating properties and excellent heat resistance, a maleimide compound represented by the following formula (7) and a maleimide compound represented by the following formula (8) are preferable, and the following formula (7 The maleimide compound represented by) is more preferable. A commercially available product such as BMI-2300 (manufactured by Yamato Chemical Industry Co., Ltd.) may be used as the maleimide compound represented by the following formula (7). As the maleimide compound represented by the following formula (8), a commercially available product such as MIR-3000 (manufactured by Nippon Kayaku Co., Ltd.) can also be used. These maleimide compounds (E) can be used individually by 1 type or in mixture of 2 or more types as appropriate.

[化13] [Chemical 13]

式(7)中,多數個R5 各自獨立地表示氫原子或甲基。n1 表示1以上之整數,較佳為1~10之整數,更佳為1~5之整數。In the formula (7), a plurality of R 5 each independently represent a hydrogen atom or a methyl group. n 1 represents an integer of 1 or more, preferably an integer of 1 to 10, more preferably an integer of 1 to 5.

[化14] [Chem 14]

式(8)中,多數個R6 各自獨立地表示氫原子或甲基。n2 表示1以上之整數,較佳為1~5之整數。 該等馬來醯亞胺化合物(E)可以單獨使用1種或適當混用2種以上。In the formula (8), a plurality of R 6 each independently represent a hydrogen atom or a methyl group. n 2 represents an integer of 1 or more, and preferably an integer of 1 to 5. These maleimide compounds (E) can be used individually by 1 type or in mixture of 2 or more types as appropriate.

本實施形態之樹脂組成物中,馬來醯亞胺化合物(E)之含量不特別限定,考量使樹脂組成物充分硬化、增進耐熱性之觀點,相對於樹脂組成物中之成分(A)、成分(C)及成分(D)之合計含量100質量份,宜為0.01質量份以上較佳,0.02質量份以上更佳,0.03質量份以上更理想。又,考量使顯影性良好之觀點,50質量份以下較佳,45質量份以下更佳,40質量份以下更理想。In the resin composition of this embodiment, the content of the maleimide compound (E) is not particularly limited. Considering the viewpoint of sufficiently curing the resin composition and improving the heat resistance, the content of the resin composition (A), The total content of the component (C) and the component (D) is 100 parts by mass, preferably 0.01 part by mass or more, more preferably 0.02 part by mass or more, and more preferably 0.03 part by mass or more. From the viewpoint of making the developability good, 50 parts by mass or less is preferable, 45 parts by mass or less is more preferable, and 40 parts by mass or less is more preferable.

本實施形態之樹脂組成物中,馬來醯亞胺化合物(E)之含量無特殊限制,相對於樹脂固體成分100質量份,較佳為0.01質量份~50質量份,更佳為0.02質量份~45質量份,又更佳為0.03質量份~20質量份,更佳為0.1質量份~10質量份,最佳為1質量份~7質量份。馬來醯亞胺化合物之含量藉由為上述範圍內,硬化物之耐熱性有更提高的傾向。In the resin composition of this embodiment, the content of the maleimide compound (E) is not particularly limited, and is preferably 0.01 to 50 parts by mass, and more preferably 0.02 parts by mass relative to 100 parts by mass of the solid content of the resin. ~ 45 parts by mass, more preferably 0.03 parts by mass to 20 parts by mass, more preferably 0.1 parts by mass to 10 parts by mass, and most preferably 1 part by mass to 7 parts by mass. When the content of the maleimide compound is within the above range, the heat resistance of the cured product tends to be further improved.

<填充材(F)> 本實施形態之樹脂組成物中,為了增進塗膜性、耐熱性等各特性,也可以併用填充材(F)(也稱為成分(F))。本實施形態使用之填充材(F)只要是有絕緣性者即可,並不特別限定,例如:二氧化矽(例如天然二氧化矽、熔融二氧化矽、非晶質二氧化矽、中空二氧化矽等)、鋁化合物(例如軟水鋁石、氫氧化鋁、氧化鋁等)、鎂化合物(例如氧化鎂、氫氧化鎂等)、鈣化合物(例如碳酸鈣等)、鉬化合物(例如氧化鉬、鉬酸鋅等)、鋇化合物(例如硫酸鋇、矽酸鋇等)、滑石(例如天然滑石、煅燒滑石等)、雲母(mica)、玻璃(例如短纖維狀玻璃、球狀玻璃、微粉末玻璃(例如E玻璃、T玻璃、D玻璃等)等)、聚矽氧粉末、氟樹脂系填充材、胺甲酸乙酯樹脂系填充材、丙烯酸樹脂系填充材、聚乙烯系填充材、苯乙烯・丁二烯橡膠及聚矽氧橡膠等。其中,選自於由二氧化矽、軟水鋁石、硫酸鋇、聚矽氧粉末、氟樹脂系填充材、胺甲酸乙酯樹脂系填充材、丙烯酸樹脂系填充材、聚乙烯系填充材、苯乙烯・丁二烯橡膠及聚矽氧橡膠構成之群組中之一種以上較佳。 該等填充材(F)也可經後述矽烷偶聯劑等進行表面處理。<Filling Material (F)> In the resin composition of this embodiment, in order to improve various properties such as coating film properties and heat resistance, a filler (F) (also referred to as a component (F)) may be used in combination. The filler (F) used in this embodiment is not particularly limited as long as it has insulation properties. For example, silicon dioxide (such as natural silicon dioxide, fused silicon dioxide, amorphous silicon dioxide, and hollow silicon dioxide) Silicon oxide, etc.), aluminum compounds (such as boehmite, aluminum hydroxide, aluminum oxide, etc.), magnesium compounds (such as magnesium oxide, magnesium hydroxide, etc.), calcium compounds (such as calcium carbonate, etc.), molybdenum compounds (such as molybdenum oxide) , Zinc molybdate, etc.), barium compounds (e.g. barium sulfate, barium silicate, etc.), talc (e.g. natural talc, calcined talc, etc.), mica (mica), glass (e.g. short fibrous glass, spherical glass, fine powder) Glass (e.g. E glass, T glass, D glass, etc.), polysiloxane powder, fluororesin-based filler, urethane resin-based filler, acrylic resin-based filler, polyethylene-based filler, styrene・ Butadiene rubber and silicone rubber. Among them, it is selected from the group consisting of silicon dioxide, boehmite, barium sulfate, polysiloxane powder, fluororesin-based filler, urethane resin-based filler, acrylic resin-based filler, polyethylene-based filler, and benzene. One or more of the group consisting of ethylene butadiene rubber and silicone rubber is preferred. These fillers (F) may be surface-treated with a silane coupling agent or the like described later.

尤其,考量增進硬化物之耐熱性、獲得良好塗膜性之觀點,二氧化矽較理想,熔融二氧化矽特別理想。二氧化矽之具體例可以列舉電化(股)製之SFP-130MC等、Admatechs(股)製之SC2050―MB、SC1050-MLE、YA010C-MFN、YA050C-MJA等。該等填充材(F)可以單獨使用1種或適當混用2種以上。In particular, from the viewpoint of improving the heat resistance of the cured product and obtaining good coating properties, silicon dioxide is preferable, and fused silicon dioxide is particularly preferable. Specific examples of the silicon dioxide include SFP-130MC made by Denka Co., Ltd., SC2050-MB made by Admatechs Co., Ltd., SC1050-MLE, YA010C-MFN, and YA050C-MJA. These fillers (F) can be used individually by 1 type or in mixture of 2 or more types suitably.

本實施形態之樹脂組成物中,填充材(F)之含量不特別限定,考量增進硬化物之耐熱性之觀點,相對於樹脂組成物中之樹脂固體成分100質量份,為5質量份以上較佳,10質量份以上更佳,20質量份以上更理想。又,考量使樹脂組成物之顯影性良好之觀點,相對於樹脂組成物中之樹脂固體成分100質量份,為400質量份以下較佳,350質量份以下更佳,300質量份以下又更佳,200質量份以下更理想,100質量份以下最理想。In the resin composition of this embodiment, the content of the filler (F) is not particularly limited. From the viewpoint of improving the heat resistance of the cured product, it is 5 parts by mass or more relative to 100 parts by mass of the resin solid content in the resin composition. Good, more preferably 10 parts by mass or more, and more preferably 20 parts by mass or more. Furthermore, considering the viewpoint of making the developability of the resin composition good, it is preferably 400 parts by mass or less, more preferably 350 parts by mass or less, and even more preferably 300 parts by mass or less with respect to 100 parts by mass of the resin solid content in the resin composition. , 200 mass parts or less is more desirable, and 100 mass parts or less is most desirable.

<矽烷偶聯劑及濕潤分散劑> 本實施形態之樹脂組成物中,為了增進填充材之分散性、聚合物及/或樹脂與填充材之黏著強度,也可以併用矽烷偶聯劑及/或濕潤分散劑。該等矽烷偶聯劑只要是一般使用在無機物之表面處理之矽烷偶聯劑即無特殊限制。具體例,例如:γ-胺基丙基三乙氧基矽烷、N-β-(胺基乙基)-γ-胺基丙基三甲氧基矽烷等胺基矽烷系;γ-環氧丙氧基丙基三甲氧基矽烷等環氧矽烷系;γ-丙烯醯氧基丙基三甲氧基矽烷等丙烯酸基矽烷系;N-β-(N-乙烯基苄胺基乙基)-γ-胺基丙基三甲氧基矽烷鹽酸鹽等陽離子矽烷系;苯基矽烷系之矽烷偶聯劑。該等矽烷偶聯劑可單獨使用1種或將2種以上適當組合使用。<Silane coupling agent and wetting and dispersing agent> In the resin composition of this embodiment, in order to improve the dispersibility of the filler and the adhesion strength between the polymer and / or the resin and the filler, a silane coupling agent and / or Wetting dispersant. These silane coupling agents are not particularly limited as long as they are silane coupling agents generally used for the surface treatment of inorganic substances. Specific examples, for example: amine silane based on γ-aminopropyltriethoxysilane, N-β- (aminoethyl) -γ-aminopropyltrimethoxysilane; γ-glycidyloxy Silyl epoxy systems such as propyltrimethoxysilane; acrylate silane systems such as γ-propenyloxypropyltrimethoxysilane; N-β- (N-vinylbenzylaminoethyl) -γ-amine Cationic silanes such as propyltrimethoxysilane hydrochloride; silane coupling agents of phenylsilane. These silane coupling agents can be used individually by 1 type or in combination of 2 or more types as appropriate.

本實施形態之樹脂組成物中,矽烷偶聯劑之含量不特別限定,通常相對於樹脂組成物100質量份為0.1~10質量份。濕潤分散劑只要是在塗料用途使用之分散安定劑即無特殊限制。具體例,例如:BYK Chemie Japan(股)製之DISPERBYK(註冊商標)-110、111、118、180、161、BYK(註冊商標)-W996、W9010、W903等濕潤分散劑。該等濕潤分散劑可以單獨使用1種或適當混用2種以上。本實施形態之樹脂組成物中,濕潤分散劑之含量不特別限定,通常相對於樹脂組成物100質量份為0.1~10質量份。The content of the silane coupling agent in the resin composition of this embodiment is not particularly limited, but is usually 0.1 to 10 parts by mass based on 100 parts by mass of the resin composition. Wetting and dispersing agents are not particularly limited as long as they are dispersing stabilizers used in coating applications. Specific examples include, for example, wetting and dispersing agents such as DISPERBYK (registered trademark) -110, 111, 118, 180, 161, BYK (registered trademark) -W996, W9010, and W903 manufactured by BYK Chemie Japan. These wetting and dispersing agents may be used singly or in combination of two or more kinds as appropriate. The content of the wetting and dispersing agent in the resin composition of this embodiment is not particularly limited, but is usually 0.1 to 10 parts by mass based on 100 parts by mass of the resin composition.

<選自於由氰酸酯化合物、苯酚樹脂、氧雜環丁烷樹脂、苯并化合物及和前述(1)表示之聯苯芳烷基型環氧樹脂(A)不同之環氧樹脂構成之群組中之任一種以上之化合物(G)> 本實施形態使用之化合物(G)(也稱為成分(G)),可因應藉由使用成分(A)獲得之銅鍍敷密合性等以外,樹脂組成物使用之領域中要求硬化之硬化物之阻燃性、耐熱性、熱膨脹特性等特性,而使用各種種類成分。例如:要求耐熱性時,可使用例如氰酸酯化合物、苯并化合物等,此外,也可使用苯酚樹脂、氧雜環丁烷樹脂等。若同時使用聯苯芳烷基型環氧樹脂(A)、光硬化起始劑(B)、化合物(C)及化合物(D)、以及氰酸酯化合物,可獲得耐熱性(玻璃轉移溫度)、低熱膨脹性、鍍敷密合性等優異之樹脂組成物。再者,若併用氰酸酯化合物和馬來醯亞胺化合物,可獲得鍍敷密合性更優良之樹脂組成物,故為理想。若同時使用前述(1)表示之聯苯芳烷基型環氧樹脂(A)以及和該環氧樹脂(A)不同之環氧樹脂,可獲得顯影性及鍍敷密合性特別優異之樹脂組成物。<Choose from cyanate ester compound, phenol resin, oxetane resin, benzo Compound and any one or more compounds (G) in the group consisting of an epoxy resin different from the biphenylaralkyl-type epoxy resin (A) represented by the above (1)> Compound (G) used in this embodiment (Also referred to as component (G)), in addition to the copper plating adhesion obtained by using component (A), the flame retardance, heat resistance, hardness Various properties are used for characteristics such as thermal expansion characteristics. For example, when heat resistance is required, cyanate compounds, benzo Compounds and the like may be used in addition to phenol resins and oxetane resins. When a biphenylaralkyl-type epoxy resin (A), a light curing initiator (B), a compound (C) and a compound (D), and a cyanate compound are used together, heat resistance (glass transition temperature) can be obtained Resin composition with excellent low thermal expansion and plating adhesion. Furthermore, it is preferable to use a cyanate ester compound and a maleimide compound together to obtain a resin composition having more excellent plating adhesion. If the biphenylaralkyl-type epoxy resin (A) represented by the above (1) and an epoxy resin different from the epoxy resin (A) are used together, a resin having particularly excellent developability and plating adhesion can be obtained.组合 物。 Composition.

又,可將它們中的1種單獨使用或將2種以上適當混用。以下針對該等化合物及/或樹脂(G)之詳情説明。One of them may be used alone or two or more thereof may be appropriately mixed. Details of these compounds and / or resins (G) are described below.

<氰酸酯化合物> 氰酸酯化合物只要是在分子內具有經至少1個氰氧基(氰酸酯基)取代之芳香族部分之樹脂即無特殊限制。<Cyanate Compound> The cyanate compound is not particularly limited as long as it is a resin having an aromatic moiety substituted with at least one cyano group (cyanate group) in the molecule.

例如通式(9)表示者。For example, it is represented by general formula (9).

[化15] [Chemized 15]

式(9)中,Ar1 代表苯環、萘環或2個苯環以單鍵鍵結而得者。有多數個時,彼此可相同也可不同。Ra各自獨立地表示氫原子、碳數1~6之烷基、碳數6~12之芳基、碳數1~4之烷氧基、碳數1~6之烷基與碳數6~12之芳基鍵結而得之基。Ra中之芳香環也可以有取代基,Ar1 及Ra 中之取代基可選擇任意位置。p代表鍵結於Ar1 之氰氧基之數目,各自獨立地為1~3之整數。q表示鍵結於Ar1 之Ra之數目,Ar1 為苯環時代表4-p,為萘環時代表6-p,為2個苯環以單鍵鍵結者時為8-p。t代表平均重複數,為0~50之整數,氰酸酯化合物也可為t不同之化合物之混合物。X有多數個時,各自獨立地表示單鍵、碳數1~50之2價有機基(氫原子也可取代成雜原子。)、氮數1~10之2價有機基(例如-N-R-N-(在此R代表有機基。))、羰基(-CO-)、羧基(-C(=O)O-)、二氧化羰基(-OC(=O)O-)、磺醯基(-SO2 -)、2價硫原子或2價氧原子中之任一者。In the formula (9), Ar 1 represents a benzene ring, a naphthalene ring, or two benzene rings obtained by a single bond. When there are many, they may be the same or different. Ra independently represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, an alkyl group having 1 to 6 carbon atoms, and 6 to 12 carbon atoms The aryl group is obtained by bonding. Ra in the aromatic ring may have a substituent, Ar 1, and R a group in the optionally substituted at any position. p represents the number of cyanooxy groups bonded to Ar 1 and each independently represents an integer of 1 to 3. q represents the number of Ra bonded to Ar 1; when Ar 1 is a benzene ring, it represents 4-p, when it is a naphthalene ring, it represents 6-p, and when two benzene rings are bonded by a single bond, it is 8-p. t represents the average number of repeats and is an integer from 0 to 50. The cyanate ester compound may also be a mixture of compounds having different t. When there are a plurality of X, each independently represents a single bond, a divalent organic group having 1 to 50 carbon atoms (a hydrogen atom may be substituted with a hetero atom.), And a divalent organic group having 1 to 10 nitrogen atoms (for example, -NRN- (Here R represents an organic group.)), A carbonyl group (-CO-), a carboxyl group (-C (= O) O-), a carbonyl dioxide (-OC (= O) O-), and a sulfonyl group (-SO 2- ), a divalent sulfur atom, or a divalent oxygen atom.

通式(9)之Ra之烷基,也可有直鏈或分枝之鏈狀結構、及環狀結構(例如環烷基等)中任一者。又,通式(9)中之烷基及Ra中之芳基中之氫原子,也可取代成氟原子、氯原子等鹵素原子、甲氧基、苯氧基等烷氧基、或氰基等。 烷基之具體例可列舉甲基、乙基、丙基、異丙基、正丁基、異丁基、第三丁基、正戊基、1-乙基丙基、2,2-二甲基丙基、環戊基、己基、環己基、及三氟甲基等。 芳基之具體例可列舉苯基、二甲苯基、均三甲苯基、萘基、苯氧基苯基、乙基苯基、鄰,間或對氟苯基、二氯苯基、二氰基苯基、三氟苯基、甲氧基苯基、及鄰,間或對甲苯基等。又,烷氧基可列舉例如:甲氧基、乙氧基、丙氧基、異丙氧基、正丁氧基、異丁氧基、及第三丁氧基等。The alkyl group of Ra in the general formula (9) may have any of a linear or branched chain structure and a cyclic structure (such as a cycloalkyl group). The hydrogen atom in the alkyl group in the general formula (9) and the aryl group in Ra may be substituted with a halogen atom such as a fluorine atom, a chlorine atom, an alkoxy group such as a methoxy group or a phenoxy group, or a cyano group. Wait. Specific examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a third butyl group, an n-pentyl group, a 1-ethylpropyl group, and a 2,2-dimethyl group. Propyl, cyclopentyl, hexyl, cyclohexyl, and trifluoromethyl. Specific examples of the aryl group include phenyl, xylyl, mesityl, naphthyl, phenoxyphenyl, ethylphenyl, ortho, m- or p-fluorophenyl, dichlorophenyl, and dicyano Phenyl, trifluorophenyl, methoxyphenyl, ortho, m- or p-tolyl, etc. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, an n-butoxy group, an isobutoxy group, and a third butoxy group.

通式(9)中之X之碳數1~50之2價有機基之具體例可列舉亞甲基、伸乙基、三亞甲基、伸環戊基、伸環己基、三甲基伸環己基、聯苯基亞甲基、二甲基亞甲基-伸苯基-二甲基亞甲基、茀二基、及酞內酯二基等。該2價有機基中之氫原子也可取代為氟原子、氯原子等鹵素原子、甲氧基、苯氧基等烷氧基、氰基等。通式(9)中之X之氮數1~10之2價有機基,可列舉亞胺基、聚醯亞胺基等。Specific examples of the divalent organic group having 1 to 50 carbon atoms of X in the general formula (9) include methylene, ethylene, trimethylene, cyclopentyl, cyclohexyl, and trimethyl ring. Hexyl, biphenylmethylene, dimethylmethylene-phenylene-dimethylmethylene, fluorene diyl, and phthalone diyl. The hydrogen atom in the divalent organic group may be substituted with a halogen atom such as a fluorine atom, a chlorine atom, an alkoxy group such as a methoxy group or a phenoxy group, a cyano group, or the like. Examples of the divalent organic group having 1 to 10 nitrogen atoms of X in the general formula (9) include an imine group and a polyfluoreneimide group.

又,通式(9)中之X之有機基例如:下列通式(10)或下列通式(11)表示之結構。The organic group of X in the general formula (9) is, for example, a structure represented by the following general formula (10) or the following general formula (11).

[化16] [Hua 16]

式(10)中,Ar2 表示苯四基、萘四基或聯苯四基,u為2以上時,彼此可相同也可不同。Rb、Rc、Rf、及Rg各自獨立地表示氫原子、碳數1~6之烷基、碳數6~12之芳基、三氟甲基、或有至少1個苯酚性羥基之芳基。Rd及Re各自獨立地選自氫原子、碳數1~6之烷基、碳數6~12之芳基、碳數1~4之烷氧基、或羥基中任一種。u表示0~5之整數。In formula (10), Ar 2 represents a benzenetetrayl group, a naphthalenetetrayl group, or a biphenyltetrayl group, and when u is 2 or more, they may be the same as or different from each other. Rb, Rc, Rf, and Rg each independently represent a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms, a trifluoromethyl group, or an aryl group having at least one phenolic hydroxyl group. Rd and Re are each independently selected from a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or a hydroxyl group. u represents an integer from 0 to 5.

[化17] [Hua 17]

式(11)中,Ar3 表示苯四基、萘四基或聯苯四基,v為2以上時,彼此可相同也可不同。Ri、及Rj各自獨立地表示氫原子、碳數1~6之烷基、碳數6~12之芳基、苄基、碳數1~4之烷氧基、羥基、三氟甲基、或經至少1個氰氧基取代之芳基。v表示0~5之整數,但也可為v不同之化合物之混合物。In formula (11), Ar 3 represents a benzenetetrayl group, a naphthalenetetrayl group, or a biphenyltetrayl group, and when v is 2 or more, they may be the same as or different from each other. Ri and Rj each independently represent a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms, a benzyl group, an alkoxy group having 1 to 4 carbon atoms, a hydroxyl group, a trifluoromethyl group, or Aryl substituted with at least 1 cyanooxy group. v represents an integer from 0 to 5, but may be a mixture of compounds having different v values.

再者,通式(9)中之X可列舉下式表示之2價基。Examples of X in the general formula (9) include a divalent group represented by the following formula.

[化18] [Hua 18]

在此,式中,z表示4~7之整數。Rk各自獨立地表示氫原子或碳數1~6之烷基。通式(10)之Ar2 及通式(11)之Ar3 之具體例可列舉通式(10)所示之2個碳原子、或通式(11)所示之2個氧原子鍵結於1,4位或1,3位之苯四基、上述2個碳原子或2個氧原子鍵結於4,4’位、2,4’位、2,2’位、2,3’位、3,3’位、或3,4’位之聯苯四基、及上述2個碳原子或2個氧原子鍵結於2,6位、1,5位、1,6位、1,8位、1,3位、1,4位、或2,7位之萘四基。 通式(10)中之Rb、Rc、Rd、Re、Rf及Rg、及通式(11)中之Ri、Rj之烷基及芳基,和上述通式(9)中之定義相同。Here, z represents an integer of 4-7. Rk each independently represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Specific examples of Ar 2 of general formula (10) and Ar 3 of general formula (11) include two carbon atoms represented by general formula (10), or two oxygen atoms represented by general formula (11). Phenyltetrayl at position 1, 4 or 1, 3, the above 2 carbon atoms or 2 oxygen atoms are bonded at 4, 4 'position, 2, 4' position, 2, 2 'position, 2, 3' Biphenyl tetrayl at the 3, 3 ', or 3, 4' position, and the above 2 carbon atoms or 2 oxygen atoms are bonded to the 2, 6, 1, 5, 1, 6, and 1 Naphthalene tetrayl at the 8-, 1, 3-, 1, 4-, or 2, 7-position. Rb, Rc, Rd, Re, Rf, and Rg in the general formula (10), and alkyl and aryl groups of Ri and Rj in the general formula (11) are the same as defined in the general formula (9).

上述通式(9)表示之氰氧基取代芳香族化合物之具體例可列舉氰氧基苯、1-氰氧基-2-,1-氰氧基-3-,或1-氰氧基-4-甲基苯、1-氰氧基-2-,1-氰氧基-3-,或1-氰氧基-4-甲氧基苯、1-氰氧基-2,3-,1-氰氧基-2,4-,1-氰氧基-2,5-,1-氰氧基-2,6-,1-氰氧基-3,4-或1-氰氧基-3,5-二甲基苯、氰氧基乙基苯、氰氧基丁基苯、氰氧基辛基苯、氰氧基壬基苯、2-(4-氰氧基苯基)-2-苯基丙烷(4-α-異丙苯基苯酚之氰酸酯)、1-氰氧基-4-環己基苯、1-氰氧基-4-乙烯基苯、1-氰氧基-2-或1-氰氧基-3-氯苯、1-氰氧基-2,6-二氯苯、1-氰氧基-2-甲基-3-氯苯、氰氧基硝基苯、1-氰氧基-4-硝基-2-乙基苯、1-氰氧基-2-甲氧基-4-烯丙基苯(丁香酚(eugenol)之氰酸酯)、甲基(4-氰氧基苯基)硫醚、1-氰氧基-3-三氟甲基苯、4-氰氧基聯苯、1-氰氧基-2-或1-氰氧基-4-乙醯基苯、4-氰氧基苯甲醛、4-氰氧基苯甲酸甲酯、4-氰氧基苯甲酸苯酯、1-氰氧基-4-乙醯胺基苯、4-氰氧基二苯酮、1-氰氧基-2,6-二-第三丁基苯、1,2-二氰氧基苯、1,3-二氰氧基苯、1,4-二氰氧基苯、1,4-二氰氧基-2-第三丁基苯、1,4-二氰氧基-2,4-二甲基苯、1,4-二氰氧基-2,3,4-二甲基苯、1,3-二氰氧基-2,4,6-三甲基苯、1,3-二氰氧基-5-甲基苯、1-氰氧基或2-氰氧基萘、1-氰氧基4-甲氧基萘、2-氰氧基-6-甲基萘、2-氰氧基-7-甲氧基萘、2,2’-二氰氧基-1,1’-聯萘、1,3-,1,4-,1,5-,1,6-,1,7-,2,3-,2,6-或2,7-二氰氧基萘、2,2’-或4,4’-二氰氧基聯苯、4,4’-二氰氧基八氟聯苯、2,4’-或4,4’-二氰氧基二苯基甲烷、雙(4-氰氧基-3,5-二甲基苯基)甲烷、1,1-雙(4-氰氧基苯基)乙烷、1,1-雙(4-氰氧基苯基)丙烷、2,2-雙(4-氰氧基苯基)丙烷、2,2-雙(4-氰氧基-3-甲基苯基)丙烷、2,2-雙(2-氰氧基-5-聯苯基)丙烷、2,2-雙(4-氰氧基苯基)六氟丙烷、2,2-雙(4-氰氧基-3,5-二甲基苯基)丙烷、1,1-雙(4-氰氧基苯基)丁烷、1,1-雙(4-氰氧基苯基)異丁烷、1,1-雙(4-氰氧基苯基)戊烷、1,1-雙(4-氰氧基苯基)-3-甲基丁烷、1,1-雙(4-氰氧基苯基)-2-甲基丁烷、1,1-雙(4-氰氧基苯基)-2,2-二甲基丙烷、2,2-雙(4-氰氧基苯基)丁烷、2,2-雙(4-氰氧基苯基)戊烷、2,2-雙(4-氰氧基苯基)己烷、2,2-雙(4-氰氧基苯基)-3-甲基丁烷、2,2-雙(4-氰氧基苯基)-4-甲基戊烷、2,2-雙(4-氰氧基苯基)-3,3-二甲基丁烷、3,3-雙(4-氰氧基苯基)己烷、3,3-雙(4-氰氧基苯基)庚烷、3,3-雙(4-氰氧基苯基)辛烷、3,3-雙(4-氰氧基苯基)-2-甲基戊烷、3,3-雙(4-氰氧基苯基)-2-甲基己烷、3,3-雙(4-氰氧基苯基)-2,2-二甲基戊烷、4,4-雙(4-氰氧基苯基)-3-甲基庚烷、3,3-雙(4-氰氧基苯基)-2-甲基庚烷、3,3-雙(4-氰氧基苯基)-2,2-二甲基己烷、3,3-雙(4-氰氧基苯基)-2,4-二甲基己烷、3,3-雙(4-氰氧基苯基)-2,2,4-三甲基戊烷、2,2-雙(4-氰氧基苯基)-1,1,1,3,3,3-六氟丙烷、雙(4-氰氧基苯基)苯基甲烷、1,1-雙(4-氰氧基苯基)-1-苯基乙烷、雙(4-氰氧基苯基)聯苯甲烷、1,1-雙(4-氰氧基苯基)環戊烷、1,1-雙(4-氰氧基苯基)環己烷、2,2-雙(4-氰氧基-3-異丙基苯基)丙烷、1,1-雙(3-環己基-4-氰氧基苯基)環己烷、雙(4-氰氧基苯基)二苯基甲烷、雙(4-氰氧基苯基)-2,2-二氯乙烯、1,3-雙[2-(4-氰氧基苯基)-2-丙基]苯、1,4-雙[2-(4-氰氧基苯基)-2-丙基]苯、1,1-雙(4-氰氧基苯基)-3,3,5-三甲基環己烷、4-[雙(4-氰氧基苯基)甲基]聯苯、4,4-二氰氧基二苯酮、1,3-雙(4-氰氧基苯基)-2-丙烯-1-酮、雙(4-氰氧基苯基)醚、雙(4-氰氧基苯基)硫醚、雙(4-氰氧基苯基)碸、4-氰氧基苯甲酸-4-氰氧基苯酯(4-氰氧基苯基-4-氰氧基苯甲酸酯)、雙-(4-氰氧基苯基)碳酸酯、1,3-雙(4-氰氧基苯基)金剛烷、1,3-雙(4-氰氧基苯基)-5,7-二甲基金剛烷、3,3-雙(4-氰氧基苯基)異苯并呋喃-1(3H)-酮(苯酚酚酞之氰酸酯)、3,3-雙(4-氰氧基-3-甲基苯基)異苯并呋喃-1(3H)-酮(鄰甲酚酚酞之氰酸酯)、9,9’-雙(4-氰氧基苯基)茀、9,9-雙(4-氰氧基-3-甲基苯基)茀、9,9-雙(2-氰氧基-5-聯苯基)茀、參(4-氰氧基苯基)甲烷、1,1,1-參(4-氰氧基苯基)乙烷、1,1,3-參(4-氰氧基苯基)丙烷、α,α,α’-參(4-氰氧基苯基)-1-乙基-4-異丙基苯、1,1,2,2-肆(4-氰氧基苯基)乙烷、肆(4-氰氧基苯基)甲烷、2,4,6-參(N-甲基-4-氰氧基苯胺基)-1,3,5-三、2,4-雙(N-甲基-4-氰氧基苯胺基)-6-(N-甲基苯胺基)-1,3,5-三、雙(N-4-氰氧基-2-甲基苯基)-4,4’-氧基二鄰苯二甲醯亞胺、雙(N-3-氰氧基-4-甲基苯基)-4,4’-氧基二鄰苯二甲醯亞胺、雙(N-4-氰氧基苯基)-4,4’-氧基二鄰苯二甲醯亞胺、雙(N-4-氰氧基-2-甲基苯基)-4,4’-(六氟異亞丙基)二鄰苯二甲醯亞胺、參(3,5-二甲基-4-氰氧基苄基)異氰尿酸酯、2-苯基-3,3-雙(4-氰氧基苯基)苄甲內醯胺、2-(4-甲基苯基)-3,3-雙(4-氰氧基苯基)苄甲內醯胺、2-苯基-3,3-雙(4-氰氧基-3-甲基苯基)苄甲內醯胺、1-甲基-3,3-雙(4-氰氧基苯基)吲哚啉-2-酮、及2-苯基-3,3-雙(4-氰氧基苯基)吲哚啉-2-酮。Specific examples of the cyanooxy-substituted aromatic compound represented by the general formula (9) include cyanobenzene, 1-cyano-2-, 1-cyano-3-, and 1-cyano- 4-methylbenzene, 1-cyanooxy-2-, 1-cyanooxy-3-, or 1-cyanooxy-4-methoxybenzene, 1-cyanooxy-2,3-, 1 -Cyanooxy-2,4-, 1-cyanooxy-2,5-, 1-cyanooxy-2,6-, 1-cyanooxy-3,4- or 1-cyanooxy-3 , 5-Dimethylbenzene, cyanoethylbenzene, cyanobutylbenzene, cyanooctylbenzene, cyanononylbenzene, 2- (4-cyanophenyl) -2- Phenylpropane (cyanoester of 4-α-cumylphenol), 1-cyanooxy-4-cyclohexylbenzene, 1-cyanooxy-4-vinylbenzene, 1-cyanooxy-2 -Or 1-cyanooxy-3-chlorobenzene, 1-cyanooxy-2,6-dichlorobenzene, 1-cyanooxy-2-methyl-3-chlorobenzene, cyanooxynitrobenzene, 1-cyanooxy-4-nitro-2-ethylbenzene, 1-cyanooxy-2-methoxy-4-allylbenzene (cyanate of eugenol), methyl ( 4-cyanooxyphenyl) sulfide, 1-cyanooxy-3-trifluoromethylbenzene, 4-cyanooxybiphenyl, 1-cyanooxy-2- or 1-cyano-4- Ethyl benzene, 4-cyanooxybenzaldehyde, methyl 4-cyanooxybenzoate, 4-cyanooxybenzoic acid Ester, 1-cyanooxy-4-acetamidobenzene, 4-cyanobenzophenone, 1-cyanooxy-2,6-di-third-butylbenzene, 1,2-dicyanoxy Benzene, 1,3-dicyanooxybenzene, 1,4-dicyanooxybenzene, 1,4-dicyanooxy-2-third butylbenzene, 1,4-dicyanooxy-2 , 4-dimethylbenzene, 1,4-dicyanooxy-2,3,4-dimethylbenzene, 1,3-dicyanooxy-2,4,6-trimethylbenzene, 1, 3-dicyanooxy-5-methylbenzene, 1-cyanooxy or 2-cyanonaphthalene, 1-cyanooxy4-methoxynaphthalene, 2-cyano-6-methylnaphthalene, 2-cyano-7-methoxynaphthalene, 2,2'-dicyanooxy-1,1'-binaphthalene, 1,3-, 1,4-, 1,5-, 1,6- , 1,7-, 2,3-, 2,6- or 2,7-dicyanooxynaphthalene, 2,2'- or 4,4'-dicyanooxybiphenyl, 4,4'-di Cyanoxy octafluorobiphenyl, 2,4'- or 4,4'-dicyanooxydiphenylmethane, bis (4-cyanooxy-3,5-dimethylphenyl) methane, 1, 1-bis (4-cyanooxyphenyl) ethane, 1,1-bis (4-cyanoxyphenyl) propane, 2,2-bis (4-cyanoxyphenyl) propane, 2,2 -Bis (4-cyanooxy-3-methylphenyl) propane, 2,2-bis (2-cyanoxy-5-biphenyl) propane, 2,2-bis (4-cyanoxybenzene Hexafluoropropane, 2,2-bis (4-cyanooxy-3,5-dimethylbenzene) ) Propane, 1,1-bis (4-cyanooxyphenyl) butane, 1,1-bis (4-cyanoxyphenyl) isobutane, 1,1-bis (4-cyanoxybenzene) ) Pentane, 1,1-bis (4-cyanooxyphenyl) -3-methylbutane, 1,1-bis (4-cyanoxyphenyl) -2-methylbutane, 1 , 1-bis (4-cyanooxyphenyl) -2,2-dimethylpropane, 2,2-bis (4-cyanooxyphenyl) butane, 2,2-bis (4-cyanooxy Phenyl) pentane, 2,2-bis (4-cyanooxyphenyl) hexane, 2,2-bis (4-cyanoxyphenyl) -3-methylbutane, 2,2- Bis (4-cyanooxyphenyl) -4-methylpentane, 2,2-bis (4-cyanooxyphenyl) -3,3-dimethylbutane, 3,3-bis (4 -Cyanooxyphenyl) hexane, 3,3-bis (4-cyanoxyphenyl) heptane, 3,3-bis (4-cyanoxyphenyl) octane, 3,3-bis ( 4-cyanoxyphenyl) -2-methylpentane, 3,3-bis (4-cyanoxyphenyl) -2-methylhexane, 3,3-bis (4-cyanoxybenzene) Yl) -2,2-dimethylpentane, 4,4-bis (4-cyanoxyphenyl) -3-methylheptane, 3,3-bis (4-cyanoxyphenyl)- 2-methylheptane, 3,3-bis (4-cyanoxyphenyl) -2,2-dimethylhexane, 3,3-bis (4-cyanoxyphenyl) -2,4 -Dimethylhexane, 3,3-bis (4-cyanooxyphenyl) -2,2,4-trimethylpentane, 2,2-bis (4-cyanooxybenzene) ) -1,1,1,3,3,3-hexafluoropropane, bis (4-cyanooxyphenyl) phenylmethane, 1,1-bis (4-cyanoxyphenyl) -1- Phenylethane, bis (4-cyanooxyphenyl) biphenylmethane, 1,1-bis (4-cyanooxyphenyl) cyclopentane, 1,1-bis (4-cyanoxyphenyl) ) Cyclohexane, 2,2-bis (4-cyanooxy-3-isopropylphenyl) propane, 1,1-bis (3-cyclohexyl-4-cyanoxyphenyl) cyclohexane, Bis (4-cyanooxyphenyl) diphenylmethane, bis (4-cyanooxyphenyl) -2,2-dichloroethylene, 1,3-bis [2- (4-cyanoxyphenyl) ) -2-propyl] benzene, 1,4-bis [2- (4-cyanoxyphenyl) -2-propyl] benzene, 1,1-bis (4-cyanoxyphenyl) -3 , 3,5-trimethylcyclohexane, 4- [bis (4-cyanoxyphenyl) methyl] biphenyl, 4,4-dicyanobenzophenone, 1,3-bis (4 -Cyanooxyphenyl) -2-propen-1-one, bis (4-cyanooxyphenyl) ether, bis (4-cyanooxyphenyl) sulfide, bis (4-cyanoxyphenyl) ) 碸, 4-cyanooxybenzoic acid-4-cyanooxyphenyl ester (4-cyanooxyphenyl-4-cyanooxybenzoate), bis- (4-cyanooxyphenyl) carbonic acid Ester, 1,3-bis (4-cyanooxyphenyl) adamantane, 1,3-bis (4-cyanooxyphenyl) -5,7-dimethyladamantane, 3,3-bis ( 4-cyanooxyphenyl) isobenzofuran- 1 (3H) -one (cyanoester of phenolphenolphthalein), 3,3-bis (4-cyanooxy-3-methylphenyl) isobenzofuran-1 (3H) -one (o-cresolphenolphthalein Cyanate ester), 9,9'-bis (4-cyanooxyphenyl) fluorene, 9,9-bis (4-cyanoxy-3-methylphenyl) fluorene, 9,9-bis ( 2-cyanooxy-5-biphenyl) pyrene, ginseng (4-cyanooxyphenyl) methane, 1,1,1-ginseng (4-cyanoxyphenyl) ethane, 1,1,3 -Ginseng (4-cyanooxyphenyl) propane, α, α, α'-Ginseng (4-cyanooxyphenyl) -1-ethyl-4-isopropylbenzene, 1,1,2,2 -4- (4-cyanooxyphenyl) ethane, 4- (4-cyanooxyphenyl) methane, 2,4,6-ginseng (N-methyl-4-cyanooxyaniline) -1, 3,5-tri, 2,4-bis (N-methyl-4-cyanoanilide) -6- (N-methylaniline) -1,3,5-tri, bis (N-4 -Cyanooxy-2-methylphenyl) -4,4'-oxydiphthalimide, bis (N-3-cyanooxy-4-methylphenyl) -4,4 '-Oxydiphthalimide, bis (N-4-cyanoxyphenyl) -4,4'-oxydiphthalimide, bis (N-4-cyanooxy Methyl-2-methylphenyl) -4,4 '-(hexafluoroisopropylidene) diphthalimidine, ginseng (3,5-dimethyl-4-cyanooxybenzyl) Isocyanurate, 2-phenyl-3,3-bis (4-cyanooxyphenyl) benzyl Lactamamine, 2- (4-methylphenyl) -3,3-bis (4-cyanooxyphenyl) benzylmethamamine, 2-phenyl-3,3-bis (4-cyanooxy Methyl-3-methylphenyl) benzamidine, 1-methyl-3,3-bis (4-cyanooxyphenyl) indololin-2-one, and 2-phenyl-3, 3-bis (4-cyanooxyphenyl) indololin-2-one.

該等氰酸酯化合物可單獨使用1種或混用2種以上。These cyanate ester compounds can be used individually by 1 type or in mixture of 2 or more types.

又,上述通式(9)表示之氰酸酯化合物之另一具體例可列舉:苯酚酚醛清漆樹脂及甲酚酚醛清漆樹脂(依照公知之方法使苯酚、烷基取代苯酚或鹵素取代苯酚與福馬林、三聚甲醛等甲醛化合物在酸性溶液中反應而得)、參苯酚酚醛清漆樹脂(使羥基苯甲醛與苯酚在酸性觸媒存在下反應而得)、茀酚醛清漆樹脂(使茀酮化合物與9,9-雙(羥基芳基)茀類在酸性觸媒存在下反應而得)、苯酚芳烷基樹脂、甲酚芳烷基樹脂、萘酚芳烷基樹脂及聯苯芳烷基樹脂(依照公知之方法,使Ar4 -(CH2 Y)2 (Ar4 代表苯基,Y代表鹵素原子。以下在此段落中為同樣。)表示之雙鹵代甲基化合物與苯酚化合物於酸性觸媒或無觸媒反應而得、使Ar4 -(CH2 OR)2 表示之雙(烷氧基甲基)化合物與苯酚化合物在酸性觸媒存在下反應而得、或使Ar4 -(CH2 OH)2 表示之雙(羥基甲基)化合物與苯酚化合物於酸性觸媒存在下反應而得、或使芳香族醛化合物、芳烷基化合物與苯酚化合物進行縮聚而得)、苯酚改性二甲苯甲醛樹脂(依照公知之方法,使二甲苯甲醛樹脂與苯酚化合物於酸性觸媒存在下反應而得)、改性萘甲醛樹脂(依照公知之方法,使萘甲醛樹脂與羥基取代芳香族化合物於酸性觸媒存在下反應而得)、苯酚改性二環戊二烯樹脂、具聚伸萘醚結構之苯酚樹脂(依照公知之方法,使在1分子中有2個以上之苯酚性羥基之多價羥基萘化合物於鹼性觸媒存在下進行脱水縮合而得者)等苯酚樹脂,利用和上述同樣的方法進行氰酸酯化而得者等、及該等之預聚物等。它們並無特殊限制。該等氰酸酯化合物可單獨使用1種或混用2種以上。Moreover, as another specific example of the cyanate compound represented by the said General formula (9), a phenol novolak resin and a cresol novolak resin (Phenol, an alkyl-substituted phenol, or a halogen-substituted phenol and a formalin may be substituted according to a well-known method. Formaldehyde compounds such as forest and paraformaldehyde are obtained by reaction in an acidic solution), phenol novolac resin (made by reacting hydroxybenzaldehyde and phenol in the presence of an acidic catalyst), novolac resin (made by using a fluorenone compound with 9,9-bis (hydroxyaryl) fluorenes obtained by reaction in the presence of acid catalysts), phenolaralkyl resins, cresol aralkyl resins, naphthol aralkyl resins and biphenylaralkyl resins ( According to a known method, Ar 4- (CH 2 Y) 2 (Ar 4 represents a phenyl group, and Y represents a halogen atom. The same applies to the following paragraphs.) The dihalomethyl compound and phenol compound represented by acid contact Obtained by reaction with or without catalyst, by reacting a bis (alkoxymethyl) compound represented by Ar 4- (CH 2 OR) 2 with a phenol compound in the presence of an acidic catalyst, or by making Ar 4- (CH 2 OH) 2 represented by the bis (hydroxymethyl) compound and a phenol compound in an acidic catalyst It is obtained by the following reaction, or obtained by polycondensing an aromatic aldehyde compound, an aralkyl compound, and a phenol compound), and a phenol-modified xylene formaldehyde resin (according to a known method, the xylene formaldehyde resin and the phenol compound are reacted in an acidic catalyst. Obtained by reacting in the presence of), modified naphthalene formaldehyde resin (obtained by reacting naphthalene formaldehyde resin with a hydroxy-substituted aromatic compound in the presence of an acidic catalyst in accordance with a known method), phenol-modified dicyclopentadiene resin, Phenol resins with a poly (naphthalene ether) structure (obtained by dehydration condensation of a polyvalent hydroxynaphthalene compound having two or more phenolic hydroxyl groups in one molecule in the presence of a basic catalyst according to a known method) And obtained by performing cyanation with the same method as above, and the prepolymers and the like. They are not particularly limited. These cyanate ester compounds can be used individually by 1 type or in mixture of 2 or more types.

其中,苯酚酚醛清漆型氰酸酯化合物、萘酚芳烷基型氰酸酯化合物、聯苯芳烷基型氰酸酯化合物、伸萘醚型氰酸酯化合物、二甲苯樹脂型氰酸酯化合物、金剛烷骨架型氰酸酯化合物較理想,萘酚芳烷基型氰酸酯化合物,於維持優良的耐熱性且獲得優良之鍍敷密合性之觀點特別理想。Among them, phenol novolac type cyanate compound, naphthol aralkyl type cyanate compound, biphenylaralkyl type cyanate compound, naphthyl ether type cyanate compound, xylene resin type cyanate compound 2. An adamantane skeleton type cyanate compound is preferable, and a naphthol aralkyl type cyanate compound is particularly preferable in terms of maintaining excellent heat resistance and obtaining excellent plating adhesion.

該等氰酸酯化合物之製造方法不特別限定,可使用公知之方法。該製法之例,可列舉取得或合成有所望骨架之含羥基之化合物,將該羥基利用公知之方法修飾而氰酸酯化之方法。將羥基予以氰酸酯化之方法,例如:Ian Hamerton, “Chemistry and Technology of Cyanate Ester Resins,” Blackie Academic & Professional記載的方法。The manufacturing method of these cyanate ester compounds is not specifically limited, A well-known method can be used. Examples of this production method include a method of obtaining or synthesizing a hydroxyl-containing compound having a desired skeleton, and modifying the hydroxyl group by a known method to form a cyanate. A method for cyanating a hydroxy group, for example, a method described in Ian Hamerton, "Chemistry and Technology of Cyanate Ester Resins," Blackie Academic & Professional.

使用了該等氰酸酯化合物之樹脂硬化物,有玻璃轉移溫度、低熱膨脹性、鍍敷密合性等優異之特性。The hardened resin using these cyanate compounds has excellent characteristics such as glass transition temperature, low thermal expansion, and plating adhesion.

本實施形態之樹脂組成物中,氰酸酯化合物之含量不特別限定,考量獲得更優良之鍍敷密合性、耐熱性之觀點,相對於樹脂固體成分100質量份,較佳為0.01質量份~50質量份,更佳為0.05質量份~40質量份,又更佳為0.1質量份~20質量份,更佳為0.2質量份~5質量份。The content of the cyanate ester compound in the resin composition of this embodiment is not particularly limited, and considering the viewpoint of obtaining better plating adhesion and heat resistance, it is preferably 0.01 parts by mass relative to 100 parts by mass of the resin solid content. ~ 50 parts by mass, more preferably 0.05 parts by mass to 40 parts by mass, still more preferably 0.1 parts by mass to 20 parts by mass, and even more preferably 0.2 parts by mass to 5 parts by mass.

<苯酚樹脂> 苯酚樹脂若為在1分子中具有2個以上之羥基之苯酚樹脂即可,可使用一般公知者。例如:雙酚A型苯酚樹脂、雙酚E型苯酚樹脂、雙酚F型苯酚樹脂、雙酚S型苯酚樹脂、苯酚酚醛清漆樹脂、雙酚A酚醛清漆型苯酚樹脂、環氧丙酯型苯酚樹脂、芳烷基酚醛清漆型苯酚樹脂、聯苯芳烷基型苯酚樹脂、甲酚酚醛清漆型苯酚樹脂、多官能苯酚樹脂、萘酚樹脂、萘酚酚醛清漆樹脂、多官能萘酚樹脂、蒽型苯酚樹脂、萘骨架改性酚醛清漆型苯酚樹脂、苯酚芳烷基型苯酚樹脂、萘酚芳烷基型苯酚樹脂、二環戊二烯型苯酚樹脂、聯苯型苯酚樹脂、脂環族苯酚樹脂、多元醇型苯酚樹脂、含磷之苯酚樹脂、含聚合性不飽和烴基之苯酚樹脂及含羥基之聚矽氧樹脂類等,並無特殊限制。該等苯酚樹脂之中,聯苯芳烷基型苯酚樹脂、萘酚芳烷基型苯酚樹脂、含磷之苯酚樹脂、含羥基之聚矽氧樹脂於阻燃性之觀點為較理想。該等苯酚樹脂可以單獨使用1種或適當混用2種以上。<Phenol resin> A phenol resin may be a phenol resin having two or more hydroxyl groups in one molecule, and generally known ones can be used. For example: bisphenol A-type phenol resin, bisphenol E-type phenol resin, bisphenol F-type phenol resin, bisphenol S-type phenol resin, phenol novolac resin, bisphenol A novolac phenol resin, propylene oxide phenol Resin, aralkyl novolac phenol resin, biphenylaralkyl phenol resin, cresol novolac phenol resin, polyfunctional phenol resin, naphthol resin, naphthol novolac resin, polyfunctional naphthol resin, anthracene Phenol resin, naphthalene skeleton modified novolac phenol resin, phenol aralkyl phenol resin, naphthol aralkyl phenol resin, dicyclopentadiene phenol resin, biphenyl phenol resin, alicyclic phenol There are no particular restrictions on resins, polyol-type phenol resins, phosphorus-containing phenol resins, phenol resins containing polymerizable unsaturated hydrocarbon groups, and hydroxyl-containing silicone resins. Among these phenol resins, biphenylaralkyl-type phenol resin, naphthol-aralkyl-type phenol resin, phosphorus-containing phenol resin, and hydroxyl-containing silicone resin are preferable from the viewpoint of flame retardancy. These phenol resins can be used individually by 1 type or in mixture of 2 or more types as appropriate.

苯酚樹脂之含量無特殊限制,相對於樹脂固體成分100質量份較佳為0.1質量份~50質量份,更佳為0.2質量份~45質量份。苯酚樹脂之含量藉由為上述範圍內,耐熱性有更提高的傾向。The content of the phenol resin is not particularly limited, but it is preferably from 0.1 to 50 parts by mass, more preferably from 0.2 to 45 parts by mass, with respect to 100 parts by mass of the solid content of the resin. When the content of the phenol resin is within the above range, the heat resistance tends to be further improved.

<氧雜環丁烷樹脂> 氧雜環丁烷樹脂可使用一般公知者。例如:氧雜環丁烷、2-甲基氧雜環丁烷、2,2-二甲基氧雜環丁烷、3-甲基氧雜環丁烷、3,3-二甲基氧雜環丁烷等烷基氧雜環丁烷、3-甲基-3-甲氧基甲基氧雜環丁烷、3,3-二(三氟甲基)全氟氧雜環丁烷、2-氯甲基氧雜環丁烷、3,3-雙(氯甲基)氧雜環丁烷、聯苯型氧雜環丁烷、OXT-101(東亞合成製、商品名)、OXT-121(東亞合成製、商品名)等,無特殊限制。可使用它們中的1種或將2種以上適當混用。<Oxetane resin> As the oxetane resin, generally known ones can be used. For example: oxetane, 2-methyloxetane, 2,2-dimethyloxetane, 3-methyloxetane, 3,3-dimethyloxetane Alkyloxetane such as cyclobutane, 3-methyl-3-methoxymethyloxetane, 3,3-bis (trifluoromethyl) perfluorooxetane, 2 -Chloromethyloxetane, 3,3-bis (chloromethyl) oxetane, biphenyl-type oxetane, OXT-101 (manufactured by East Asia Synthetic, trade name), OXT-121 (East Asia Synthetic System, trade name), etc., without special restrictions. One of them may be used or two or more of them may be appropriately mixed.

氧雜環丁烷樹脂之含量無特殊限制,相對於樹脂固體成分100質量份較佳為0.1質量份~50質量份,更佳為0.2質量份~45質量份。氧雜環丁烷樹脂之含量藉由為上述範圍內,耐熱性有更提升的傾向。The content of the oxetane resin is not particularly limited, but it is preferably from 0.1 to 50 parts by mass, more preferably from 0.2 to 45 parts by mass, with respect to 100 parts by mass of the resin solid content. When the content of the oxetane resin is within the above range, the heat resistance tends to be further improved.

<苯并化合物> 苯并化合物只要是在1分子中有2個以上之二氫苯并環之化合物即可,可使用一般公知者。例如:雙酚A型苯并BA-BXZ(小西化學製、商品名)雙酚F型苯并BF-BXZ(小西化學製、商品名)、雙酚S型苯并BS-BXZ(小西化學製、商品名)、苯酚酚酞型苯并等,但無特殊限制。可將它們中的1種單獨使用或適當混用2種以上。<Benzo Compounds> Benzo As long as the compound is two or more dihydrobenzo in one molecule A ring compound is sufficient, and generally known ones can be used. Example: Bisphenol A benzo BA-BXZ (manufactured by Konishi Chemical Co., Ltd.) bisphenol F type benzo BF-BXZ (manufactured by Konishi Chemical, trade name), bisphenol S benzo BS-BXZ (manufactured by Konishi Chemical, trade name), phenol-phenolphthalein type benzo Etc., but without special restrictions. One of them may be used alone or two or more of them may be appropriately mixed.

苯并化合物之含量無特殊限制,相對於樹脂固體成分100質量份,較佳為0.1質量份~50質量份,更佳為0.2質量份~45質量份。苯并化合物之含量藉由為上述範圍內,耐熱性有更提升的傾向。Benzo The content of the compound is not particularly limited, and is preferably 0.1 to 50 parts by mass, and more preferably 0.2 to 45 parts by mass, with respect to 100 parts by mass of the resin solid content. Benzo When the content of the compound is within the above range, the heat resistance tends to be further improved.

<環氧樹脂> 本實施形態之樹脂組成物中,為了增進硬化物之耐熱性,也可併用和前述(1)表示之聯苯芳烷基型環氧樹脂(A)不同的環氧樹脂。 如此的環氧樹脂和前述環氧樹脂(A)不同,且只要是在1分子中具有2個以上之環氧基之化合物即無特殊限制。其具體例,例如:雙酚A型環氧樹脂、雙酚E型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、雙酚A酚醛清漆型環氧樹脂、聯苯型環氧樹脂、苯酚酚醛清漆型環氧樹脂、甲酚酚醛清漆型環氧樹脂、二甲苯酚醛清漆型環氧樹脂、多官能苯酚型環氧樹脂、萘型環氧樹脂、萘骨架改性酚醛清漆型環氧樹脂、伸萘醚型環氧樹脂、苯酚芳烷基型環氧樹脂、蒽型環氧樹脂、3官能苯酚型環氧樹脂、4官能苯酚型環氧樹脂、三環氧丙基異氰尿酸酯、環氧丙酯型環氧樹脂、脂環族環氧樹脂、二環戊二烯酚醛清漆型環氧樹脂、聯苯酚醛清漆型環氧樹脂、苯酚芳烷基酚醛清漆型環氧樹脂、萘酚芳烷基酚醛清漆型環氧樹脂、芳烷基酚醛清漆型環氧樹脂、萘酚芳烷基型環氧樹脂、二環戊二烯型環氧樹脂、多元醇型環氧樹脂、含磷之環氧樹脂、環氧丙胺、將丁二烯等的雙鍵予以環氧化而得之化合物、利用含羥基之聚矽氧樹脂類與表氯醇之反應獲得之化合物、及該等之鹵化物。<Epoxy resin> In the resin composition of this embodiment, in order to improve the heat resistance of a hardened | cured material, you may use together the epoxy resin different from the biphenyl aralkyl type epoxy resin (A) shown by said (1). Such an epoxy resin is different from the aforementioned epoxy resin (A), and is not particularly limited as long as it is a compound having two or more epoxy groups in one molecule. Specific examples thereof include, for example, bisphenol A epoxy resin, bisphenol E epoxy resin, bisphenol F epoxy resin, bisphenol S epoxy resin, bisphenol A novolac epoxy resin, biphenyl Epoxy resin, phenol novolac epoxy resin, cresol novolac epoxy resin, xylenol novolac epoxy resin, polyfunctional phenol epoxy resin, naphthalene epoxy resin, naphthalene skeleton modified phenolic Varnish-type epoxy resin, naphthyl ether-type epoxy resin, phenol aralkyl-type epoxy resin, anthracene-type epoxy resin, trifunctional phenol-type epoxy resin, 4-functional phenol-type epoxy resin, triglycidyl Isocyanurate, propylene oxide epoxy resin, alicyclic epoxy resin, dicyclopentadiene novolac epoxy resin, biphenol novolac epoxy resin, phenol aralkyl novolac epoxy resin Epoxy resin, naphthol aralkyl novolac epoxy resin, aralkyl novolac epoxy resin, naphthol aralkyl epoxy resin, dicyclopentadiene epoxy resin, polyol ring Oxygen resins, phosphorus-containing epoxy resins, propylene oxide amines, and double bonds such as butadiene Compounds obtained by oxidation, compounds obtained by the reaction of hydroxyl-containing silicone resins with epichlorohydrin, and halides of these.

其中,選自於由伸萘醚型環氧樹脂、多官能苯酚型環氧樹脂、萘型環氧樹脂構成之群組中之一種以上較佳,萘型環氧樹脂更理想。藉由含有如此的種類之環氧樹脂,顯影性及鍍敷密合性有更提升的傾向。 萘型環氧樹脂若使用下式(5)表示之樹脂的話,顯影性及鍍敷密合性會更提升,故較理想。此環氧樹脂可利用市售品,可列舉DIC(股)公司製HP-4710(商品名)。下式(5)表示之萘型環氧樹脂係低分子且多官能,因此對於顯影液之溶解性優異。所以據認為藉由和聯苯芳烷基型環氧樹脂(A)併用,可獲得顯影性也優良的樹脂組成物。Among them, one or more selected from the group consisting of a naphthalene-type epoxy resin, a polyfunctional phenol-type epoxy resin, and a naphthalene-type epoxy resin is preferred, and a naphthalene-type epoxy resin is more preferred. By containing such a type of epoxy resin, developability and plating adhesion tend to be further improved. If a naphthalene-type epoxy resin uses a resin represented by the following formula (5), the developability and plating adhesion are further improved, which is preferable. A commercially available product can be used for this epoxy resin, and HP-4710 (trade name) manufactured by DIC Corporation is mentioned. Since the naphthalene-type epoxy resin represented by the following formula (5) is low-molecular and multifunctional, it has excellent solubility in a developing solution. Therefore, it is considered that a resin composition excellent in developability can be obtained by using it in combination with a biphenylaralkyl-type epoxy resin (A).

[化19] [Hua 19]

該等環氧樹脂可以單獨使用1種或適當混用2種以上。These epoxy resins can be used individually by 1 type or in mixture of 2 or more types suitably.

環氧樹脂之含量無特殊限制,考量使顯影性更提升之觀點,相對於樹脂組成物中之樹脂固體成分100質量份、前述環氧樹脂(A)與和環氧樹脂(A)不同之環氧樹脂之合計宜為3質量份以上較佳,5質量份以上更佳,10質量份以上又更佳,15質量份以上更理想。又,考量使銅鍍敷密合性更提升之觀點,相對於樹脂組成物中之樹脂固體成分100質量份、前述環氧樹脂(A)與和環氧樹脂(A)不同之環氧樹脂之合計宜為50質量份以下較佳,40質量份以下更佳,30質量份以下又更佳,28質量份以下更理想。又,前述環氧樹脂(A)與和環氧樹脂(A)不同之環氧樹脂之比率無特殊限制,但考量鍍敷密合性之觀點,1~10:1~3較理想,2~4:1~2更理想。The content of the epoxy resin is not particularly limited. Considering the viewpoint of improving the developability, the epoxy resin (A) is different from the epoxy resin (A) in terms of 100 parts by mass of the resin solid content in the resin composition. The total amount of the oxygen resin is preferably 3 parts by mass or more, more preferably 5 parts by mass or more, more preferably 10 parts by mass or more, and more preferably 15 parts by mass or more. In addition, considering the viewpoint of improving the adhesion of copper plating, the epoxy resin (A) is different from the epoxy resin (A) in an amount of 100 parts by mass based on the resin solid content in the resin composition. The total is preferably 50 parts by mass or less, more preferably 40 parts by mass or less, even more preferably 30 parts by mass or less, and more preferably 28 parts by mass or less. In addition, the ratio of the epoxy resin (A) and the epoxy resin different from the epoxy resin (A) is not particularly limited, but considering the adhesion of the plating, 1 to 10: 1 to 3 are preferable, and 2 to 4: 1 ~ 2 is more ideal.

<熱硬化促進劑(H)> 本實施形態之樹脂組成物中,在無損本實施形態之特性之範圍內也可使用熱硬化促進劑(H)(也稱為成分(H))。本實施形態使用之熱硬化促進劑(H)不特別限定,例如:過氧化苯甲醯、過氧化月桂醯、過氧化乙醯、對氯過氧化苯甲醯、二過氧化鄰苯二甲酸二第三丁酯等所例示之有機過氧化物;偶氮雙腈等偶氮化合物;N,N-二甲基苄胺、N,N-二甲基苯胺、N,N-二甲基甲苯胺、2-N-乙基苯胺基乙醇、三正丁胺、吡啶、喹啉、N-甲基啉、三乙醇胺、三乙二胺、四甲基丁烷二胺、N-甲基哌啶等三級胺類;苯酚、二甲酚、甲酚、間苯二酚、兒茶酚等苯酚類;環烷酸鉛、硬脂酸鉛、環烷酸鋅、辛酸鋅、油酸錫、蘋果酸二丁基錫、環烷酸錳、環烷酸鈷、乙醯基丙酮鐵等有機金屬鹽;將此等有機金屬鹽溶於苯酚、雙酚等含羥基之化合物而成者;氯化錫、氯化鋅、氯化鋁等無機金屬鹽;二辛基氧化錫、其他之烷基錫、烷基氧化錫等有機錫化合物;2-乙基-4-甲基咪唑、1,2-二甲基咪唑、1-苄基-2-苯基咪唑、三苯基咪唑(TPIZ)等咪唑化合物等。其中,2-乙基-4-甲基咪唑、1,2-二甲基咪唑、1-苄基-2-苯基咪唑、三苯基咪唑(TPIZ)等咪唑化合物於耐熱性之觀點較理想,2-乙基-4-甲基咪唑,與聯苯芳烷基型環氧樹脂(A)、化合物(C)及化合物(D)之反應性高,於獲得更優良的耐熱性之觀點更理想。<Thermal hardening accelerator (H)> In the resin composition of this embodiment, a thermal hardening accelerator (H) (also referred to as a component (H)) may be used within a range that does not impair the characteristics of this embodiment. The heat curing accelerator (H) used in this embodiment is not particularly limited, and examples thereof include benzamidine peroxide, laurel peroxide, acetamidine peroxide, p-chloropermanium peroxide, and diperoxyphthalate. Examples of organic peroxides such as tert-butyl esters; azo compounds such as azobisnitrile; N, N-dimethylbenzylamine, N, N-dimethylaniline, N, N-dimethyltoluidine , 2-N-ethylaniline ethanol, tri-n-butylamine, pyridine, quinoline, N-methylline, triethanolamine, triethylenediamine, tetramethylbutanediamine, N-methylpiperidine, etc. Tertiary amines; phenols such as phenol, xylenol, cresol, resorcinol, catechol, etc .; lead naphthenate, lead stearate, zinc naphthenate, zinc caprylate, tin oleate, malic acid Organometallic salts such as dibutyltin, manganese naphthenate, cobalt naphthenate, iron acetoacetate; those organic metal salts dissolved in hydroxy-containing compounds such as phenol and bisphenol; tin chloride, chloride Inorganic metal salts such as zinc and aluminum chloride; dioctyltin oxide, other alkyltin, alkyltin oxide and other organic tin compounds; 2-ethyl-4-methylimidazole, 1,2-dimethylimidazole 1-benzyl Imidazole compounds such as 2-phenylimidazole and triphenylimidazole (TPIZ). Among them, imidazole compounds such as 2-ethyl-4-methylimidazole, 1,2-dimethylimidazole, 1-benzyl-2-phenylimidazole, and triphenylimidazole (TPIZ) are preferable in terms of heat resistance. , 2-ethyl-4-methylimidazole has high reactivity with biphenylaralkyl-type epoxy resin (A), compound (C), and compound (D), and it is more desirable to obtain better heat resistance. ideal.

此等熱硬化促進劑可以單獨使用1種或適當混用2種以上。本實施形態之樹脂組成物中,熱硬化促進劑(H)之含量不特別限定,通常相對於樹脂組成物中之樹脂固體成分100質量份為0.01~10質量份,較佳為0.05~5質量份。These thermosetting accelerators can be used individually by 1 type or in mixture of 2 or more types suitably. The content of the thermosetting accelerator (H) in the resin composition of this embodiment is not particularly limited, but is usually 0.01 to 10 parts by mass, preferably 0.05 to 5 parts by mass based on 100 parts by mass of the resin solid content in the resin composition. Serving.

<有機溶劑> 本實施形態之樹脂組成物中視需要也可以含有溶劑。例如:若使用有機溶劑,可調整樹脂組成物製備時之黏度。溶劑之種類只要可溶解樹脂組成物中之樹脂之一部分或全部即可,並無特殊限制。其具體例不特別限定,例如:丙酮、甲乙酮、甲基賽珞蘇等酮類;甲苯、二甲苯等芳香族烴類;二甲基甲醯胺等醯胺類;丙二醇單甲醚及其乙酸酯。此等有機溶劑可以單獨使用1種或適當混用2種以上。<Organic solvent> The resin composition of this embodiment may contain a solvent as needed. For example, if an organic solvent is used, the viscosity of the resin composition can be adjusted. The type of the solvent is not particularly limited as long as it dissolves part or all of the resin in the resin composition. Specific examples thereof are not particularly limited, for example: ketones such as acetone, methyl ethyl ketone, methylcythreon; aromatic hydrocarbons such as toluene and xylene; fluorenamines such as dimethylformamide; propylene glycol monomethyl ether and its ethyl Acid ester. These organic solvents may be used singly or in combination of two or more kinds as appropriate.

<其他成分> 本實施形態之樹脂組成物中,在無損本實施形態之特性之範圍內,也可以併用至今未列舉之熱硬化性樹脂、熱塑性樹脂及其寡聚物、彈性體類等各種高分子化合物;至今未列舉之阻燃性化合物;添加劑等。它們只要是一般使用者即可,無特殊限制。例如:阻燃性化合物可列舉三聚氰胺、苯胍胺等含氮化合物、含環之化合物、及磷系化合物之磷酸酯化合物、芳香族縮合磷酸酯、含鹵素縮合磷酸酯等。添加劑可列舉紫外線吸收劑、抗氧化劑、螢光增白劑、光增感劑、染料、顏料、增黏劑、潤滑劑、消泡劑、表面調整劑、光澤劑、聚合抑制劑等。該等成分可以單獨使用1種或適當混用2種以上。 本實施形態之樹脂組成物中,其他成分之含量不特別限定,通常相對於樹脂組成物100質量份各為0.1~10質量份。<Other components> In the resin composition of this embodiment, various properties such as thermosetting resins, thermoplastic resins and oligomers, elastomers, etc., which have not been listed so far, can be used in a range that does not impair the characteristics of this embodiment. Molecular compounds; flame retardant compounds not listed so far; additives, etc. They are not limited as long as they are general users. Examples of flame retardant compounds include nitrogen-containing compounds such as melamine and benzoguanamine, Ring compounds, phosphoric acid ester compounds of phosphorus compounds, aromatic condensed phosphates, halogen-containing condensed phosphates, and the like. Examples of the additives include ultraviolet absorbers, antioxidants, fluorescent brighteners, light sensitizers, dyes, pigments, tackifiers, lubricants, defoamers, surface modifiers, gloss agents, and polymerization inhibitors. These components can be used individually by 1 type or in mixture of 2 or more types suitably. The content of the other components in the resin composition of this embodiment is not particularly limited, but is usually 0.1 to 10 parts by mass with respect to 100 parts by mass of the resin composition.

<樹脂組成物之製造方法> 本實施形態之樹脂組成物,係藉由將前述式(1)表示之聯苯芳烷基型環氧樹脂(A)、光硬化起始劑(B)、前述式(2)表示之化合物(C)及(C)成分以外之具乙烯性不飽和基之化合物(D)、及視需要之馬來醯亞胺化合物(E)、填充材(F)、化合物(G)及其他成分予以適當混合以製備。本實施形態之樹脂組成物,適合使用在作為製造後述本發明之樹脂片時之清漆。<The manufacturing method of a resin composition> The resin composition of this embodiment is a biphenyl aralkyl-type epoxy resin (A) represented by the said Formula (1), a light hardening initiator (B), the said Compounds (D) with ethylenically unsaturated groups other than the compounds (C) and (C) components represented by formula (2), and optionally maleimide compounds (E), fillers (F), compounds (G) and other ingredients are appropriately mixed to prepare. The resin composition of this embodiment is suitably used as a varnish when manufacturing the resin sheet of the present invention described later.

本實施形態之樹脂組成物之製造方法不特別限定,例如:將上述各成分按順序摻合於溶劑並充分攪拌之方法。The manufacturing method of the resin composition of this embodiment is not specifically limited, For example, the method of mixing each said component with a solvent in order and fully stirring.

樹脂組成物製造時,可視需要實施為了將各成分均勻溶解或分散之公知之處理(攪拌、混合、混練處理等)。具體而言,藉由使用附設有適當攪拌能力之攪拌機的攪拌槽並進行攪拌分散處理,能使無機填充材(G)對於樹脂組成物之分散性改善。上述攪拌、混合、混練處理,例如可使用超音波均質機等以分散為目的之攪拌裝置、三輥、球磨機、珠磨機、砂磨機等以混合為目的之裝置、或公轉或自轉型之混合裝置等公知之裝置適當進行。又,本實施形態之樹脂組成物製備時,視需要可使用有機溶劑。有機溶劑之種類只要可溶解樹脂組成物中之樹脂即可,並不特別限定,其具體例如上所述。When manufacturing a resin composition, if necessary, a well-known process (stirring, mixing, kneading process, etc.) is performed for dissolving or dispersing each component uniformly. Specifically, the dispersibility of the inorganic filler (G) with respect to the resin composition can be improved by using a stirring tank equipped with a stirrer having an appropriate stirring ability and performing a stirring dispersion treatment. For the above stirring, mixing, and kneading processes, for example, a stirring device such as an ultrasonic homogenizer for dispersing purpose, a three-roller, a ball mill, a bead mill, or a sand mill may be used for mixing purpose, or a revolution or self-transformation A known device such as a mixing device is appropriately used. Moreover, when preparing the resin composition of this embodiment, an organic solvent can be used as needed. The type of the organic solvent is not particularly limited as long as it dissolves the resin in the resin composition, and specific examples thereof are as described above.

<用途> 本實施形態之樹脂組成物可使用在需要絕緣性樹脂組成物之用途,並不特別限定,可使用在感光性薄膜、附支持體之感光性薄膜、預浸體等絕緣樹脂片、電路基板(疊層板用途、多層印刷電路板用途等)、阻焊劑、底層填充(underfill)材、黏晶材、半導體密封材、孔填埋樹脂、零件填埋樹脂等用途。其中,適合使用在多層印刷電路板之絕緣層用樹脂組成物、阻焊劑。<Applications> The resin composition of this embodiment can be used for applications requiring an insulating resin composition, and is not particularly limited. It can be used for insulating films such as photosensitive films, photosensitive films with a support, and prepregs, Circuit board (laminate board application, multilayer printed circuit board application, etc.), solder resist, underfill material, die-bonding material, semiconductor sealing material, hole landfill resin, parts landfill resin, etc. Among them, a resin composition and a solder resist for an insulating layer of a multilayer printed circuit board are suitably used.

<樹脂片> 本實施形態之樹脂片,具備支持體,及形成在該支持體之表面且含有本實施形態之樹脂組成物之樹脂組成物層,係將上述樹脂組成物塗佈在支持體之單面或兩面而得之附設支持體之樹脂片。樹脂片可藉由將樹脂組成物塗佈在支持體上並乾燥而製造。<Resin sheet> The resin sheet of this embodiment includes a support and a resin composition layer formed on the surface of the support and containing the resin composition of this embodiment. The resin composition is coated on the support. Resin sheet with support on one or both sides. The resin sheet can be produced by coating a resin composition on a support and drying it.

本實施形態之樹脂片使用之支持體不特別限定,可使用公知品,宜為樹脂薄膜較佳。樹脂薄膜,例如:聚醯亞胺薄膜、聚醯胺薄膜、聚酯薄膜、聚對苯二甲酸乙二醇酯(PET)薄膜、聚對苯二甲酸丁二醇酯(PBT)薄膜、聚丙烯(PP)薄膜、聚乙烯(PE)薄膜、聚萘二甲酸乙二酯薄膜、聚乙烯醇薄膜、三乙醯基乙酸酯薄膜等樹脂薄膜。其中PET薄膜為較佳。The support used for the resin sheet of this embodiment is not particularly limited, and a known product can be used, and a resin film is preferred. Resin film, such as: polyimide film, polyimide film, polyester film, polyethylene terephthalate (PET) film, polybutylene terephthalate (PBT) film, polypropylene (PP) film, polyethylene (PE) film, polyethylene naphthalate film, polyvinyl alcohol film, resin film such as triethylacetate film. Among them, PET film is preferred.

上述樹脂薄膜為了容易從樹脂組成物層剝離,宜使用表面塗有剝離劑者。樹脂薄膜之厚度宜為5μm~100μm之範圍較佳,10μm~50μm之範圍更佳。其厚度若未達5μm,顯影前進行之支持體剝離容易有支持體破裂的傾向,厚度若超過100μm,從支持體上曝光時之解像度有降低的傾向。In order that the said resin film may peel easily from a resin composition layer, it is suitable to use the surface coated with the release agent. The thickness of the resin film is preferably in a range of 5 μm to 100 μm, and more preferably in a range of 10 μm to 50 μm. If the thickness is less than 5 μm, peeling of the support before development tends to tend to break the support, and if the thickness exceeds 100 μm, the resolution when exposed from the support tends to decrease.

又,為了減少利用紫外線等活性能量射線進行曝光時之光之散射,樹脂薄膜宜為透明性優異者較佳。In addition, in order to reduce the scattering of light during exposure using active energy rays such as ultraviolet rays, it is preferable that the resin film is excellent in transparency.

再者,本實施形態中之樹脂片中,其樹脂組成物層也可利用保護薄膜保護。樹脂組成物層側藉由以保護薄膜保護,可防止樹脂組成物層表面附著污垢等附著、或防止有傷痕。保護薄膜可使用由和上述樹脂薄膜同樣的材料構成之薄膜。保護薄膜之厚度不特別限定,1μm~50μm之範圍較佳,5μm~40μm之範圍更佳。厚度未達1μm時,保護薄膜之操作性有降低之傾向,若超過50μm,則有廉價性差的傾向。又,保護薄膜,宜為相對於樹脂組成物層與支持體之黏著力,樹脂組成物層與保護薄膜之黏著力較小者為佳。Furthermore, the resin composition layer of the resin sheet in this embodiment may be protected by a protective film. The resin composition layer side is protected by a protective film to prevent dirt or the like from adhering to the surface of the resin composition layer, or to prevent scratches. As the protective film, a film made of the same material as the resin film can be used. The thickness of the protective film is not particularly limited, and a range of 1 μm to 50 μm is preferable, and a range of 5 μm to 40 μm is more preferable. When the thickness is less than 1 μm, the handleability of the protective film tends to decrease, and when it exceeds 50 μm, the inexpensiveness tends to be poor. In addition, the protective film is preferably relative to the adhesive force between the resin composition layer and the support, and the adhesive force between the resin composition layer and the protective film is preferably smaller.

本實施形態之樹脂片之製造方法不特別限定,例如:將本實施形態之樹脂組成物塗佈於PET薄膜等支持體並以乾燥去除有機溶劑,以製造樹脂片之方法等。上述塗佈可利用使用例如輥塗機、缺角輪塗佈機(comma coater)、凹版印刷塗佈機、模塗機、桿塗機、唇口塗佈機(lip coater)、刀塗機、壓擠塗佈機等之公知方法進行。上述乾燥可利用例如在60~200℃之乾燥機中加熱1~60分鐘之方法等進行。樹脂組成物層中之殘存有機溶劑量,考量防止在之後之步驟之有機溶劑之擴散之觀點,相對於樹脂組成物層之總質量為5質量%以下較佳。樹脂組成物層相對於支持體之厚度,考量增進操作性之觀點,按樹脂片之樹脂組成物層厚宜為1.0μm以上較佳。又,考量提升透過率並使顯影性良好之觀點,300μm以下較佳。The manufacturing method of the resin sheet of this embodiment is not particularly limited, for example, a method of manufacturing a resin sheet by applying the resin composition of this embodiment to a support such as a PET film and removing the organic solvent by drying. The coating can be performed using, for example, a roll coater, a comma coater, a gravure coater, a die coater, a rod coater, a lip coater, a knife coater, A known method such as a squeeze coater is used. The drying can be performed by, for example, a method of heating in a dryer at 60 to 200 ° C. for 1 to 60 minutes. The amount of the residual organic solvent in the resin composition layer is considered to be 5 mass% or less relative to the total mass of the resin composition layer in consideration of preventing the diffusion of the organic solvent in a subsequent step. Considering the thickness of the resin composition layer with respect to the support, from the viewpoint of improving the operability, the thickness of the resin composition layer of the resin sheet is preferably 1.0 μm or more. In addition, considering the viewpoint of improving transmittance and improving developability, 300 μm or less is preferable.

本實施形態之樹脂片可作為多層印刷電路板之層間絕緣層使用。The resin sheet of this embodiment can be used as an interlayer insulation layer of a multilayer printed circuit board.

<多層印刷電路板> 本實施形態之多層印刷電路板具備含有本實施形態之樹脂組成物之層間絕緣層,例如可將上述樹脂片重疊1片以上並硬化而得。具體而言可依以下方法製造。<Multilayer printed wiring board> The multilayer printed wiring board of this embodiment is provided with the interlayer insulation layer containing the resin composition of this embodiment, For example, the said resin sheet can be superimposed and hardened. Specifically, it can be manufactured by the following method.

(層合步驟) 將本實施形態之樹脂片之樹脂組成物層側使用真空層合機而層合在電路基板之單面或兩面。電路基板,例如:玻璃環氧基板、金屬基板、陶瓷基板、矽基板、半導體密封樹脂基板、聚酯基板、聚醯亞胺基板、BT樹脂基板、熱硬化型聚伸苯醚基板等。又,在此,電路基板係指在如上述基板之單面或兩面形成了經圖案加工之導體層(電路)的基板。又,導體層與絕緣層交替疊層而成之多層印刷電路板中,該印刷電路板之最外層之單面或兩面經圖案加工之導體層(電路)的基板,也包括於在此所指之電路基板。又,也可以對於導體層表面利用黑化處理、銅蝕刻等預先實施粗糙化處理。層合步驟中,樹脂片具有保護薄膜時,係將該保護薄膜剝離除去後,視需要將樹脂片及電路基板預熱,邊將樹脂組成物層加壓及加熱邊壓接於電路基板。本實施形態之樹脂片中,宜使用利用真空層合法於減壓下層合於電路基板之方法。(Laminating step) The resin composition layer side of the resin sheet of this embodiment is laminated on one or both sides of a circuit board using a vacuum laminator. Circuit substrates include, for example, glass epoxy substrates, metal substrates, ceramic substrates, silicon substrates, semiconductor sealing resin substrates, polyester substrates, polyimide substrates, BT resin substrates, and thermosetting polyphenylene ether substrates. Here, the circuit board refers to a board in which a patterned conductive layer (circuit) is formed on one or both sides of the substrate as described above. In addition, in a multilayer printed circuit board in which a conductor layer and an insulating layer are alternately laminated, a substrate of a conductor layer (circuit) on one side or both sides of which is the outermost layer of the printed circuit board and subjected to pattern processing is also included herein. Circuit board. The surface of the conductor layer may be roughened in advance by blackening treatment, copper etching, or the like. In the laminating step, when the resin sheet has a protective film, the protective film is peeled off and removed, and the resin sheet and the circuit board are preheated if necessary, and the resin composition layer is pressed and heated to the circuit board while being pressed. In the resin sheet of this embodiment, it is preferable to use a method of laminating on a circuit board under reduced pressure by using a vacuum layer method.

層合步驟之條件無特殊限制,例如:壓接溫度(層合溫度)較佳為50℃~140℃,壓接壓力較佳為1kgf/cm2 ~15kgf/cm2 ,壓接時間較佳為5秒~300秒,空氣壓力為20mmHg以下之減壓下進行層合較佳。又,層合步驟可為批式也可為使用輥之連續式。真空層合法可使用市售之真空層合機進行。市售真空層合機,例如:Nikko-Materials(股)製2階段增建層合機等。The conditions of the lamination step are not particularly limited. For example, the crimping temperature (laminating temperature) is preferably 50 ° C to 140 ° C, the crimping pressure is preferably 1kgf / cm 2 to 15kgf / cm 2 , and the crimping time is preferably It is preferable to perform lamination under a reduced pressure of 5 seconds to 300 seconds and an air pressure of 20 mmHg or less. The lamination step may be a batch method or a continuous method using a roller. The vacuum layer method can be performed using a commercially available vacuum laminator. Commercially available vacuum laminators, such as Nikko-Materials (shares) two-stage additional laminators.

(曝光步驟) 利用層合步驟在電路基板上設置樹脂片後,對於樹脂組成物層之預定部分照射活性能量射線,進行使照射部之樹脂組成物層硬化之曝光步驟。活性能量射線之照射可通過遮罩圖案,也可使用直接照射活性能量射線之直接描繪法。(Exposure Step) After the resin sheet is provided on the circuit board in the lamination step, a predetermined portion of the resin composition layer is irradiated with active energy rays, and an exposure step is performed to harden the resin composition layer in the irradiation portion. Active energy rays can be irradiated through a mask pattern, or a direct drawing method that directly irradiates active energy rays can be used.

活性能量射線,例如:紫外線、可見光線、電子束、X射線等,尤其紫外線為較佳。紫外線之照射量大約為10mJ/cm2 ~1000mJ/cm2 。通過遮罩圖案之曝光方法有:使遮罩圖案密合於多層印刷電路板而進行之接觸曝光法,及不密合而使用平行光線進行曝光之非接觸曝光法,皆可使用。又,樹脂組成物層上有支持體存在時,可以從支持體上曝光,也可將支持體剝離後進行曝光。Active energy rays, such as ultraviolet rays, visible rays, electron beams, X-rays, etc., especially ultraviolet rays are preferred. The amount of ultraviolet radiation is approximately 10 mJ / cm 2 to 1000 mJ / cm 2 . Exposure methods using a mask pattern include a contact exposure method in which a mask pattern is closely adhered to a multilayer printed circuit board, and a non-contact exposure method in which the light is not closely adhered and exposed using parallel light rays. When a support is present on the resin composition layer, the support may be exposed from the support, or the support may be peeled and exposed.

(顯影步驟) 曝光步驟後,樹脂組成物層上有支持體存在時,將此支持體除去後以濕顯影去除未光硬化之部分(未曝光部)並顯影,可形成絕緣層之圖案。(Developing step) When a support is present on the resin composition layer after the exposure step, the support is removed by wet development to remove uncured portions (unexposed portions) and developed to form a pattern of an insulating layer.

上述濕顯影的情形,顯影液只要是可選擇性地溶出未曝光部分者即可,無特殊限制,可使用鹼性水溶液、水系顯影液、有機溶劑等顯影液。本實施形態中,尤其宜為利用鹼性水溶液進行顯影步驟較佳。該等顯影液可單獨使用或將2種以上組合使用。又,顯影方法,例如可利用噴塗、搖動浸漬、塗刷、刮削(scrapping)等公知之方法進行。In the case of the above-mentioned wet development, the developing solution is not particularly limited as long as it can selectively dissolve the unexposed portion, and a developing solution such as an alkaline aqueous solution, an aqueous developing solution, or an organic solvent can be used. In this embodiment, it is particularly preferable to perform the development step using an alkaline aqueous solution. These developers can be used alone or in combination of two or more. The development method can be performed by a known method such as spray coating, shaking dipping, brushing, and scraping.

作為顯影液使用之鹼水溶液無特殊限制,例如:氫氧化鉀、氫氧化鈉、碳酸鈉、碳酸鉀、磷酸鈉、矽酸鈉、4-硼酸鈉、氨、胺類等。The alkaline aqueous solution used as the developing solution is not particularly limited, for example, potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, sodium 4-borate, ammonia, amines, and the like.

上述鹼水溶液之濃度相對於顯影液全量宜為0.1質量%~60質量%較佳。又,鹼水溶液之溫度可以配合顯影性調整。再者,該等鹼水溶液可單獨使用或組合2種以上使用。The concentration of the alkaline aqueous solution is preferably 0.1% by mass to 60% by mass relative to the entire amount of the developing solution. The temperature of the alkaline aqueous solution can be adjusted in accordance with the developability. In addition, these alkaline aqueous solutions can be used individually or in combination of 2 or more types.

本實施形態之圖案形成中,視需要也可以併用上述2種以上之顯影方法。顯影的方式有浸漬方式、浸置方式、噴灑方式、高壓噴灑方式、塗刷、刮削等,高壓噴灑方式因為可改善解像度,故為理想。採用噴灑方式時之噴灑壓力,宜為0.02MPa~0.5MPa較佳。In the pattern formation of this embodiment, if necessary, two or more of the above-mentioned development methods may be used in combination. The development methods include immersion method, immersion method, spray method, high-pressure spray method, brushing, scraping, etc. The high-pressure spray method is ideal because it can improve the resolution. The spraying pressure when the spraying method is adopted should preferably be 0.02MPa ~ 0.5MPa.

(後烘烤步驟) 上述顯影步驟結束後進行後烘烤步驟,形成絕緣層(硬化物)。後烘烤步驟可列舉利用高壓水銀燈進行紫外線照射步驟、使用潔淨烘箱之加熱步驟等,也可以將它們併用。照射紫外線時,可視需要調整其照射量,例如可以利用0.05J/cm2 ~10J/cm2 程度之照射量進行照射。又,加熱之條件可因應樹脂組成物中之樹脂成分之種類、含量等適當選擇,較佳為在150℃~220℃進行20分鐘~180分鐘之範圍,更佳為在160℃~200℃進行30分鐘~150分鐘之範圍內選擇。(Post-baking step) A post-baking step is performed after the development step described above to form an insulating layer (hardened material). The post-baking step may include an ultraviolet irradiation step using a high-pressure mercury lamp, a heating step using a clean oven, or the like, and they may be used in combination. When irradiating ultraviolet rays, the irradiation amount can be adjusted as needed. For example, irradiation can be performed with an irradiation amount of about 0.05 J / cm 2 to 10 J / cm 2 . The heating conditions can be appropriately selected according to the type and content of the resin component in the resin composition, and it is preferably performed at 150 ° C to 220 ° C for 20 minutes to 180 minutes, and more preferably at 160 ° C to 200 ° C. Select from 30 minutes to 150 minutes.

(鍍敷步驟) 然後利用乾式鍍敷或濕式鍍敷在絕緣層表面形成導體層。乾式鍍敷可使用蒸鍍法、濺鍍法、離子鍍法等公知之方法。蒸鍍法(真空蒸鍍法),例如可將支持體裝入到真空容器內,使金屬加熱蒸發而在絕緣層上形成金屬膜。濺鍍法,例如也可將支持體裝入到真空容器內,導入氬氣等鈍性氣體,施加直流電壓,並使已游離的鈍性氣體碰撞靶材金屬,利用打出的金屬在絕緣層上形成金屬膜。(Plating Step) Then, a conductive layer is formed on the surface of the insulating layer by dry plating or wet plating. For the dry plating, a known method such as a vapor deposition method, a sputtering method, or an ion plating method can be used. In the vapor deposition method (vacuum vapor deposition method), for example, a support can be placed in a vacuum container, and the metal can be heated and evaporated to form a metal film on the insulating layer. In the sputtering method, for example, a support can be placed in a vacuum container, a passive gas such as argon can be introduced, a DC voltage can be applied, and the free passive gas can collide with the target metal, and the punched metal can be used on the insulating layer. A metal film is formed.

濕式鍍敷的情形,係對於形成之絕緣層之表面,按順序實施利用膨潤液所為之膨潤處理、利用氧化劑所為之粗糙化處理及利用中和液所為之中和處理,以將絕緣層表面進行粗糙化。利用膨潤液所為之膨潤處理,係藉由將絕緣層於50℃~80℃浸於膨潤液1分鐘~20分鐘以進行。膨潤液可列舉鹼溶液,該鹼溶液可列舉氫氧化鈉溶液、氫氧化鉀溶液等。市售之膨潤液,例如:上村工業(股)製之Appdes(註冊商標)MDS-37等。In the case of wet plating, the surface of the formed insulating layer is sequentially subjected to a swelling treatment using a swelling liquid, a roughening treatment using an oxidizing agent, and a neutralizing treatment using a neutralizing solution to sequentially surface the insulating layer. Roughening. The swelling treatment using the swelling liquid is performed by immersing the insulating layer in the swelling liquid at 50 ° C to 80 ° C for 1 minute to 20 minutes. Examples of the swelling solution include an alkaline solution, and examples of the alkaline solution include a sodium hydroxide solution and a potassium hydroxide solution. Commercially available swelling liquids include, for example, Appdes (registered trademark) MDS-37 manufactured by Uemura Industries Co., Ltd. and the like.

利用氧化劑所為之粗糙化處理,係藉由將絕緣層於60℃~80℃浸於氧化劑溶液中5分鐘~30分鐘以進行。氧化劑,例如過錳酸鉀、過錳酸鈉溶於氫氧化鈉之水溶液而得之鹼性過錳酸溶液、重鉻酸鹽、臭氧、過氧化氫/硫酸、硝酸等。又,鹼性過錳酸溶液中,過錳酸鹽之濃度宜為5質量%~10質量%較佳。市售氧化劑,例如:上村工業(股)製Appdes(註冊商標)MDE-40、Appdes(註冊商標)ELC-SH等鹼性過錳酸溶液。利用中和液所為之中和處理係藉由在30℃~50℃浸於中和液1分鐘~10分鐘以進行。中和液宜為酸性之水溶液較理想,市售品可列舉上村工業(股)製之Appdes(註冊商標)MDN-62。The roughening treatment by the oxidant is performed by immersing the insulating layer in the oxidant solution at 60 ° C to 80 ° C for 5 minutes to 30 minutes. Oxidizing agents, such as alkaline permanganate solution obtained by dissolving potassium permanganate, sodium permanganate in aqueous sodium hydroxide solution, dichromate, ozone, hydrogen peroxide / sulfuric acid, nitric acid, etc. The concentration of permanganate in the alkaline permanganic acid solution is preferably 5 to 10% by mass. Commercially available oxidants include, for example, alkaline permanganic acid solutions such as Appdes (registered trademark) MDE-40, Appdes (registered trademark) manufactured by Uemura Industries, Ltd. The neutralization treatment using the neutralization solution is performed by immersing in the neutralization solution at 30 ° C to 50 ° C for 1 minute to 10 minutes. The neutralizing solution is preferably an acidic aqueous solution. Commercial products include Appdes (registered trademark) MDN-62 manufactured by Uemura Industries.

其次將無電解鍍敷與電解鍍敷組合而形成導體層。又,導體層也可形成逆圖案之鍍敷光阻,並僅以無電解鍍敷形成導體層。之後之圖案形成的方法,例如可使用減去法、半加成法等。Next, electroless plating and electrolytic plating are combined to form a conductor layer. In addition, the conductive layer may form a plating resist in a reverse pattern, and the conductive layer may be formed only by electroless plating. For the subsequent pattern formation method, for example, a subtractive method and a semi-additive method can be used.

<半導體裝置> 本實施形態之半導體裝置具備含有本實施形態之樹脂組成物之層間絕緣層,具體而言可依以下之方法製造。可藉由在本實施形態之多層印刷電路板之導通處安裝半導體晶片,以製造半導體裝置。在此,導通處係在多層印刷電路板中傳送電訊號之處,其位置可在表面也可在填埋處。又,半導體晶片只要是以半導體作為材料之電氣電路元件即可,並無特殊限制。<Semiconductor Device> The semiconductor device of this embodiment includes an interlayer insulating layer containing the resin composition of this embodiment, and can be specifically manufactured by the following method. A semiconductor device can be manufactured by mounting a semiconductor wafer at a conducting position of the multilayer printed circuit board of this embodiment. Here, the conducting point is where the electric signal is transmitted in the multilayer printed circuit board, and its position can be on the surface or in the landfill. The semiconductor wafer is not particularly limited as long as it is an electric circuit element using a semiconductor as a material.

製造本實施形態之半導體裝置時之半導體晶片之安裝方法只要是半導體晶片會有效作用即可,不特別限定,具體而言可列舉打線安裝方法、覆晶晶片安裝方法、利用無凸塊之增建層(BBUL)所為之安裝方法、利用異向性導電薄膜(ACF)所為之安裝方法、利用非導電性薄膜(NCF)所為之安裝方法等。The method for mounting a semiconductor wafer when manufacturing the semiconductor device of this embodiment is not particularly limited as long as the semiconductor wafer will function effectively. Specific examples include wire bonding methods, flip-chip mounting methods, and bumpless additions. Mounting method using a layer (BBUL), mounting method using an anisotropic conductive film (ACF), mounting method using a non-conductive film (NCF), and the like.

又,也可藉由將本實施形態之樹脂片層合於半導體晶片以製造半導體裝置。層合後也可使用和前述多層印刷電路板同樣的方法製造。 [實施例]Moreover, a semiconductor device can also be manufactured by laminating the resin sheet of this embodiment on a semiconductor wafer. After lamination, it can be manufactured by the same method as the aforementioned multilayer printed wiring board. [Example]

以下依實施例對於本發明更具體説明,但本發明不限於該等實施例。Hereinafter, the present invention will be described more specifically according to examples, but the present invention is not limited to these examples.

[合成例1] (氰酸酯化合物之合成) 使1-萘酚芳烷基樹脂(新日鐵住金化學(股)公司製)300g(OH基換算1.28mol)及三乙胺194.6g(1.92mol)(相對於羥基1mol為1.5mol)溶於二氯甲烷1800g,命為溶液1。 將氯化氰125.9g(2.05mol)(相對於羥基1mol為1.6mol)、二氯甲烷293.8g、36%鹽酸194.5g(1.92mol)(相對於羥基1莫耳為1.5莫耳)、水1205.9g於攪拌下保持在液溫-2~-0.5℃,費時30分鐘加注溶液1。溶液1加注結束後,於同溫度攪拌30分鐘後,費時10分鐘加注使三乙胺65g(0.64mol)(相對於羥基1mol為0.5mol)溶於二氯甲烷65g而得之溶液(溶液2)。溶液2加注結束後,於同溫度攪拌30分鐘,完成反應。 之後將反應液靜置,分離為有機相與水相。將獲得之有機相以水1300g清洗5次。水洗第5次廢水之導電度為5μS/cm,確認藉由以水清洗,已將要除去之離子性化合物充分除去。將水洗後之有機相於減壓下濃縮,最終於90℃進行1小時濃縮乾固,獲得目的之萘酚芳烷基型之氰酸酯化合物(SNCN)(橙色黏性物)331g。獲得之SNCN之質量平均分子量Mw為600。又,SNCN之IR光譜顯示2250cm-1 (氰酸酯基)之吸收,且未顯示羥基之吸收。[Synthesis Example 1] (Synthesis of cyanate ester compound) 300 g (1.28 mol based on OH group) and 194.6 g (1.92 of triethylamine) of 1-naphthol aralkyl resin (produced by Nippon Steel & Sumikin Chemical Co., Ltd.) mol) (1.5 mol with respect to 1 mol of hydroxyl group) was dissolved in 1800 g of methylene chloride, and was designated as solution 1. 125.9 g (2.05 mol) of cyanogen chloride (1.6 mol relative to 1 mol of hydroxyl group), 293.8 g of dichloromethane, 194.5 g (1.92 mol) of 36% hydrochloric acid (1.5 mol relative to 1 mol of hydroxyl group), and 1205.9 water g Keep the liquid temperature at -2 ~ -0.5 ℃ under stirring, and take solution 1 for 30 minutes. After the solution 1 was added, the solution was stirred at the same temperature for 30 minutes, and the solution was obtained by dissolving 65 g (0.64 mol) of triethylamine (0.5 mol relative to 1 mol of hydroxyl group) in 65 g of dichloromethane over 10 minutes. 2). After the solution 2 was added, it was stirred at the same temperature for 30 minutes to complete the reaction. After that, the reaction solution was left to stand and separated into an organic phase and an aqueous phase. The obtained organic phase was washed 5 times with 1300 g of water. The conductivity of the 5th water washing wastewater was 5 μS / cm. It was confirmed that the ionic compounds to be removed were sufficiently removed by washing with water. The washed organic phase was concentrated under reduced pressure, and finally concentrated and dried at 90 ° C for 1 hour to obtain 331 g of the desired naphthol aralkyl cyanate compound (SNCN) (orange sticky substance). The mass average molecular weight Mw of the obtained SNCN was 600. The IR spectrum of SNCN shows an absorption of 2250 cm -1 (cyanate ester group), and does not show an absorption of a hydroxyl group.

[實施例1] (樹脂組成物及樹脂片之製作) 將作為式(1)表示之聯苯芳烷基型環氧樹脂(A)之聯苯芳烷基型環氧樹脂(式(1)中之n為1~3。NC3000L(商品名)、日本化藥(股)製)22.4質量份、作為光硬化起始劑(B)之2-苄基-2-二甲胺基-1-(4-啉代苯基)-丁酮-1(Irgacure(註冊商標)369、BASF Japan(股)製)6.5質量份、作為化合物(C)之TrisP-PA環氧丙烯酸酯化合物之丙二醇單甲醚乙酸酯(以下有時簡稱PGMEA)溶液(KAYARAD(註冊商標)ZCR-6007H、不揮發成分65質量%、酸價:70mgKOH/g、日本化藥(股)製)77.5質量份(按不揮發成分換算,為50.4質量份)、作為(C)成分以外之具乙烯性不飽和基之化合物(D)之六丙烯酸二新戊四醇酯(KAYARAD(註冊商標)DPHA、日本化藥(股)製)17.4質量份、作為馬來醯亞胺化合物(E)之馬來醯亞胺化合物(BMI-2300(商品名)、大和化成工業(股)製)3.3質量份、作為填充材(F)之環氧矽烷處理二氧化矽之甲乙酮(以下有時簡稱MEK)漿液(SC2050MB(商品名)、平均粒徑0.5μm、不揮發成分70質量%、Admatechs(股)製)71.4質量份(按不揮發成分換算,為50質量份)進行摻合,以超音波均質機攪拌,獲得清漆(樹脂組成物之溶液)。將該等清漆使用自動塗佈裝置(PI-1210、Tester sangyo(股)製)塗佈在厚度38μm之PET薄膜(Unipeel(註冊商標)TR1-38、Unitika(股)製、商品名)上,於80℃進行7分鐘加熱乾燥,獲得以PET薄膜作為支持體且樹脂組成物層之厚度為30μm之樹脂片。[Example 1] (Production of resin composition and resin sheet) A biphenylaralkyl type epoxy resin (A) represented by the formula (1) was used as a biphenylaralkyl type epoxy resin (formula (1) N in the formula is 1 to 3. 22.4 parts by mass of NC3000L (trade name), manufactured by Nippon Kayaku Co., Ltd., and 2-benzyl-2-dimethylamino-1- as a light curing initiator (B) 6.5 parts by mass of (4-phosphonophenyl) -butanone-1 (Irgacure (registered trademark) 369, manufactured by BASF Japan (stock)), a propylene glycol monomethyl ester of TrisP-PA epoxy acrylate compound as compound (C) Ether acetate (hereinafter sometimes referred to as PGMEA) solution (KAYARAD (registered trademark) ZCR-6007H, 65% by mass of non-volatile content, acid value: 70mgKOH / g, manufactured by Nippon Kayaku Co., Ltd.) Volatile component conversion: 50.4 parts by mass), and dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA, Nippon Kayakusho (stock)) as the ethylenically unsaturated compound (D) other than (C) component )) 17.4 parts by mass, 3.3 parts by mass as a maleimide compound (BMI-2300 (trade name), manufactured by Daiwa Chemical Industry Co., Ltd.) as a maleimide compound (E), as a filler (F ) Siloxane-treated silica (Hereinafter sometimes referred to as MEK) slurry (SC2050MB (trade name), average particle size 0.5 μm, non-volatile content 70% by mass, manufactured by Admatechs (stock)) 71.4 parts by mass (in terms of non-volatile content, 50 parts by mass) Blend and stir with an ultrasonic homogenizer to obtain a varnish (solution of resin composition). These varnishes were coated on a PET film (Unipeel (registered trademark) TR1-38, Unitika (trade name), trade name)) with a thickness of 38 μm using an automatic coating device (PI-1210, manufactured by Tester Sangyo). It heat-dried at 80 degreeC for 7 minutes, and obtained the resin sheet which used PET film as a support and the thickness of the resin composition layer was 30 micrometers.

又,前述KAYARAD(註冊商標)ZCR-6007H,係含有上述化合物(C1)及上述化合物(C2)~(C5)中之任一種以上之混合物。The KAYARAD (registered trademark) ZCR-6007H is a mixture containing one or more of the compound (C1) and the compounds (C2) to (C5).

(內層電路基板之製作) 將已形成內層電路之玻璃布基材BT樹脂兩面覆銅疊層板(銅箔厚度18μm、厚度0.2mm、三菱瓦斯化學(股)製CCL(註冊商標)-HL832NS)之兩面以Mec(股)製CZ8100進行銅表面之粗糙化處理,獲得內層電路基板。(Production of the inner layer circuit board) The glass cloth substrate BT resin on which the inner layer circuit has been formed is a copper-clad laminated board (copper foil thickness 18 μm, thickness 0.2 mm, CCL (registered trademark) made by Mitsubishi Gas Chemical Co., Ltd.)- Both sides of HL832NS) were roughened with a copper surface made of Mec (strand) CZ8100 to obtain an inner-layer circuit board.

(評價用疊層體之製作) 將前述樹脂片之樹脂面配置在內層電路基板上,使用真空層合機(Nikko Materials(股)製)抽真空30秒(5.0MPa以下)後,以壓力10kgf/cm2 、溫度70℃進行30秒之疊層成形。再以壓力10kgf/cm2 、溫度70℃進行60秒之疊層成形,以獲得內層電路基板、樹脂組成物層、及支持體疊層而得的疊層體。實施對於獲得之疊層體照射200mJ/cm2 之紫外線之曝光步驟,剝下支持體,以1質量%之碳酸鈉水溶液顯影,再實施照射1000mJ/cm2 之紫外線之曝光步驟,實施180℃、120分鐘加熱處理之後烘烤步驟後,作為評價用疊層體。(Production of laminated body for evaluation) The resin surface of the resin sheet was placed on an inner-layer circuit board, and vacuum was applied for 30 seconds (5.0 MPa or less) using a vacuum laminator (manufactured by Nikko Materials), and then the pressure was applied. 10 kgf / cm 2 was laminated for 30 seconds at a temperature of 70 ° C. Then, lamination was performed at a pressure of 10 kgf / cm 2 and a temperature of 70 ° C. for 60 seconds to obtain a laminate obtained by laminating an inner circuit board, a resin composition layer, and a support. An exposure step of irradiating the obtained laminate with 200 mJ / cm 2 of ultraviolet rays was performed, the support was peeled off, developed with a 1% by mass sodium carbonate aqueous solution, and then an exposure step of irradiating with 1000 mJ / cm 2 of ultraviolet rays was performed. After the 120-minute heat treatment, after the baking step, it was used as an evaluation laminate.

(評價用硬化物之製作) 對於前述樹脂片照射200mJ/cm2 之紫外線,再實施照射1000mJ/cm2 之紫外線之曝光步驟,實施180℃、120分鐘加熱處理之後烘烤步驟後,剝下支持體,作為評價用硬化物。(Production of hardened material for evaluation) The resin sheet was irradiated with 200 mJ / cm 2 of ultraviolet rays, and then exposed to 1000 mJ / cm 2 of ultraviolet rays. The heating step was performed at 180 ° C for 120 minutes, and the support was peeled off. Body as a hardened body for evaluation.

[實施例2] 將作為成分(A)之聯苯芳烷基型環氧樹脂(NC3000L(商品名)、日本化藥(股)製)21.9質量份、作為光硬化起始劑(B)之2-苄基-2-二甲胺基-1-(4-啉代苯基)-丁酮-1(Irgacure(註冊商標)369、BASF Japan(股)製)6.5質量份、作為化合物(C)之TrisP-PA環氧丙烯酸酯化合物之PGMEA溶液(KAYARAD(註冊商標)ZCR-6007H、不揮發成分65質量%、酸價:70mgKOH/g、日本化藥(股)製)77.5質量份(按不揮發成分換算,為50.4質量份)、作為(C)成分以外之具有乙烯性不飽和基之化合物(D)之六丙烯酸二新戊四醇酯(KAYARAD(註冊商標)DPHA、日本化藥(股)製)17.4質量份、作為馬來醯亞胺化合物(E)之馬來醯亞胺化合物(BMI-2300(商品名)、大和化成工業(股)製)3.3質量份、作為填充材(F)之環氧矽烷處理二氧化矽之MEK漿液(SC2050MB(商品名)、平均粒徑0.5μm、不揮發成分70質量%、Admatechs(股)製)71.4質量份(按不揮發成分換算,為50質量份)、作為化合物(G)之合成例1獲得之氰酸酯化合物SNCN0.5質量份進行摻合,以超音波均質機進行攪拌,獲得清漆(樹脂組成物之溶液)。將該等清漆使用自動塗佈裝置(PI-1210、Tester sangyo(股)製)塗佈在厚度38μm之PET薄膜(Unipeel(註冊商標)TR1-38、Unitika(股)製、商品名)上,於80℃進行7分鐘加熱乾燥,獲得以PET薄膜作為支持體,樹脂組成物層之厚度為30μm之樹脂片。使用此樹脂片,和實施例1同樣進行,獲得評價用疊層體及評價用硬化物。[Example 2] As a component (A), 21.9 parts by mass of a biphenylaralkyl-type epoxy resin (NC3000L (trade name), manufactured by Nippon Kayaku Co., Ltd.) was used as a photocuring initiator (B). 6.5 parts by mass of 2-benzyl-2-dimethylamino-1- (4-phosphonophenyl) -butanone-1 (Irgacure (registered trademark) 369, manufactured by BASF Japan (stock)) as a compound (C ) TrisP-PA epoxy acrylate compound PGMEA solution (KAYARAD (registered trademark) ZCR-6007H, non-volatile content 65% by mass, acid value: 70mgKOH / g, manufactured by Nippon Kayaku Co., Ltd.) 77.5 parts by mass (according to 50.4 parts by mass in terms of non-volatile content), and dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA, Nippon Kadaku (Japanese Chemicals) (Manufactured by the company) 17.4 parts by mass, 3.3 parts by mass of the maleimide compound (BMI-2300 (trade name), manufactured by Daiwa Chemical Industry Co., Ltd.) as the maleimide compound (E), as a filler ( F) 71.4 parts by mass of MEK slurry (SC2050MB (trade name), average particle size 0.5 μm, non-volatile content 70% by mass, manufactured by Admatechs (stock)) of silicon dioxide treated with silicon dioxide (equivalent to non-volatile content) 50 quality ), As Synthesis Example Compound (G) of an isocyanate compound to obtain the SNCN0.5 parts by mass was blended, stirred with ultrasonic homogenizer, to obtain a varnish (resin solution of the composition). These varnishes were coated on a PET film (Unipeel (registered trademark) TR1-38, Unitika (trade name), trade name)) with a thickness of 38 μm using an automatic coating device (PI-1210, manufactured by Tester Sangyo). Heat drying was performed at 80 ° C. for 7 minutes to obtain a resin sheet having a PET film as a support and a resin composition layer having a thickness of 30 μm. Using this resin sheet, it carried out similarly to Example 1, and obtained the laminated body for evaluation, and the hardened | cured material for evaluation.

[實施例3] 將作為成分(A)之聯苯芳烷基型環氧樹脂(NC3000L(商品名)、日本化藥(股)製)21.9質量份、作為光硬化起始劑(B)之雙(2,4,6-三甲基苯甲醯基)-苯基氧化膦(Irgacure(註冊商標)819、BASF Japan(股)製)6.5質量份、作為化合物(C)之TrisP-PA環氧丙烯酸酯化合物之PGMEA溶液(KAYARAD(註冊商標)ZCR-6007H、不揮發成分65質量%、酸價:70mgKOH/g、日本化藥(股)製)77.5質量份(按不揮發成分換算,為50.4質量份)、作為(C)成分以外之具乙烯性不飽和基之化合物(D)之六丙烯酸二新戊四醇酯(KAYARAD(註冊商標)DPHA、日本化藥(股)製)17.4質量份、作為馬來醯亞胺化合物(E)之馬來醯亞胺化合物(BMI-2300(商品名)、大和化成工業(股)製)3.3質量份、作為填充材(F)之環氧矽烷處理二氧化矽之MEK漿液(SC2050MB(商品名)、平均粒徑0.5μm、不揮發成分70質量%、Admatechs(股)製)71.4質量份(按不揮發成分換算,為50質量份)、作為化合物(G)之合成例1獲得之氰酸酯化合物SNCN0.5質量份進行摻合,以超音波均質機攪拌,獲得清漆(樹脂組成物之溶液)。將該等清漆使用自動塗佈裝置(PI-1210、Tester sangyo(股)製)塗佈在厚度38μm之PET薄膜(Unipeel(註冊商標)TR1-38、Unitika(股)製、商品名)上,於80℃進行7分鐘加熱乾燥,獲得以PET薄膜作為支持體,樹脂組成物層之厚度為30μm之樹脂片。使用此樹脂片和實施例1同樣進行,獲得評價用疊層體及評價用硬化物。[Example 3] As a component (A), 21.9 parts by mass of a biphenylaralkyl-type epoxy resin (NC3000L (trade name), manufactured by Nippon Kayaku Co., Ltd.) was used as a photocuring initiator (B). 6.5 parts by mass of bis (2,4,6-trimethylbenzylidene) -phenylphosphine oxide (Irgacure (registered trademark) 819, manufactured by BASF Japan (stock)) as a TrisP-PA ring of compound (C) 77.5 parts by mass of a PGMEA solution of an oxyacrylate compound (KAYARAD (registered trademark) ZCR-6007H, 65% by mass of nonvolatile matter, acid value: 70mgKOH / g, manufactured by Nippon Kayaku Co., Ltd.) 50.4 parts by mass), and dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA, manufactured by Nippon Kayakusho Co., Ltd.) as an ethylenically unsaturated compound (D) other than (C) component 17.4 mass Parts, 3.3 parts by mass of a maleimide compound (BMI-2300 (trade name), manufactured by Daiwa Chemical Industry Co., Ltd.) as a maleimide compound (E), and a silane oxide as a filler (F) 71.4 parts by mass of MEK slurry (SC2050MB (trade name) with silicon dioxide, average particle diameter of 0.5 μm, non-volatile content of 70% by mass, manufactured by Admatechs (stock), 50 parts by mass of non-volatile content), 0.5 part by mass of the cyanate compound SNCN obtained as Synthesis Example 1 of the compound (G) was blended and stirred with an ultrasonic homogenizer to obtain a varnish (a solution of a resin composition). These varnishes were coated on a PET film (Unipeel (registered trademark) TR1-38, Unitika (trade name), trade name)) with a thickness of 38 μm using an automatic coating device (PI-1210, manufactured by Tester Sangyo). Heat drying was performed at 80 ° C. for 7 minutes to obtain a resin sheet having a PET film as a support and a resin composition layer having a thickness of 30 μm. Using this resin sheet, it carried out similarly to Example 1, and obtained the laminated body for evaluation, and the hardened | cured material for evaluation.

[實施例4] 將作為成分(A)之日本化藥(股)製)15.8質量份、作為成分(G)之萘型環氧樹脂(HP-4710(商品名)、DIC(股)公司製)6.1質量份、作為光硬化起始劑(B)之2,4,6-三甲基苯甲醯基-二苯基-氧化膦(Irgacure(註冊商標)819、BASF Japan(股)製)6.5質量份、作為化合物(C)之TrisP-PA環氧丙烯酸酯化合物之PGMEA溶液(KAYARAD(註冊商標)ZCR-6007H、不揮發成分65質量%、酸價:70mgKOH/g、日本化藥(股)製)77.5質量份(按不揮發成分換算,為50.4質量份)、作為(C)成分以外之具乙烯性不飽和基之化合物(D)之六丙烯酸二新戊四醇酯(KAYARAD(註冊商標)DPHA、日本化藥(股)製)17.4質量份、作為馬來醯亞胺化合物(E)之馬來醯亞胺化合物(BMI-2300(商品名)、大和化成工業(股)製)3.3質量份、作為填充材(F)之環氧矽烷處理二氧化矽之MEK漿液(SC2050MB(商品名)、平均粒徑0.5μm、不揮發成分70質量%、Admatechs(股)製)71.4質量份(按不揮發成分換算,為50質量份)、作為化合物(G)之合成例1獲得之氰酸酯化合物SNCN0.5質量份進行摻合,利用超音波均質機進行攪拌,獲得清漆(樹脂組成物之溶液)。將該等清漆使用自動塗佈裝置(PI-1210、Tester sangyo(股)製)塗佈在厚度38μm之PET薄膜(Unipeel(註冊商標)TR1-38、Unitika(股)製、商品名)上,於80℃進行7分鐘加熱乾燥,獲得以PET薄膜作為支持體,樹脂組成物層之厚度為30μm之樹脂片。使用此樹脂片和實施例1同樣進行,獲得評價用疊層體及評價用硬化物。[Example 4] Naphthalene-type epoxy resin (HP-4710 (trade name), manufactured by DIC (Korea) Co., Ltd.) was used as a component (A) of 15.8 parts by mass of Nippon Kayaku Co., Ltd. 6.1 parts by mass of 2,4,6-trimethylbenzylidene-diphenyl-phosphine oxide (Irgacure (registered trademark) 819, manufactured by BASF Japan) as a light curing initiator (B) 6.5 parts by mass of a PGMEA solution of TrisP-PA epoxy acrylate compound (KAYARAD (registered trademark) ZCR-6007H, 65% by mass of non-volatile content, acid value: 70 mgKOH / g, compound (C)) )) 77.5 parts by mass (50.4 parts by mass in terms of non-volatile content), as a compound other than (C), having ethylenically unsaturated compounds (D), dineopentaerythritol hexaacrylate (KAYARAD (registered (Trademark) DPHA, Nippon Kayaku Co., Ltd.) 17.4 parts by mass of a maleimide compound (BMI-2300 (trade name), Yamato Chemical Industry Co., Ltd.) as the maleimide compound (E) 3.3 parts by mass of MEK slurry (SC2050MB (trade name), silicon dioxide-treated silica) as filler (F), average particle diameter of 0.5 μm, 70% by mass of non-volatile content, manufactured by Admatechs (stock), 71.4 parts by mass (Press no 50 parts by mass in terms of hair ingredient conversion), 0.5 parts by mass of the cyanate compound SNCN obtained in Synthesis Example 1 of compound (G) was blended and stirred with an ultrasonic homogenizer to obtain a varnish (solution of resin composition) ). These varnishes were coated on a PET film (Unipeel (registered trademark) TR1-38, Unitika (trade name), trade name)) with a thickness of 38 μm using an automatic coating device (PI-1210, manufactured by Tester Sangyo). Heat drying was performed at 80 ° C. for 7 minutes to obtain a resin sheet having a PET film as a support and a resin composition layer having a thickness of 30 μm. Using this resin sheet, it carried out similarly to Example 1, and obtained the laminated body for evaluation, and the hardened | cured material for evaluation.

[實施例5] 將作為成分(A)之聯苯芳烷基型環氧樹脂(NC3000L(商品名)、日本化藥(股)製)15.8質量份、作為成分(G)之萘型環氧樹脂(HP-4710(商品名)、DIC(股)公司製)6.1質量份、作為光硬化起始劑(B)之2,4,6-三甲基苯甲醯基-二苯基-氧化膦(Irgacure(註冊商標)819、BASF Japan(股)製)6.5質量份、作為化合物(C)之TrisP-PA環氧丙烯酸酯化合物之PGMEA溶液(KAYARAD(註冊商標)ZCR-6007H、不揮發成分65質量%、酸價:70mgKOH/g、日本化藥(股)製)77.5質量份(按不揮發成分換算,為50.4質量份)、作為(C)成分以外之具有乙烯性不飽和基之化合物(D)之六丙烯酸二新戊四醇酯(KAYARAD(註冊商標)DPHA、日本化藥(股)製)17.4質量份、作為馬來醯亞胺化合物(E)之馬來醯亞胺化合物(BMI-2300(商品名)、大和化成工業(股)製)3.3質量份、作為填充材(F)之環氧矽烷處理二氧化矽之MEK漿液(SC2050MB(商品名)、平均粒徑0.5μm、不揮發成分70質量%、Admatechs(股)製)71.4質量份(按不揮發成分換算,為50質量份)、作為化合物(G)之合成例1獲得之氰酸酯化合物SNCN0.5質量份、作為熱硬化促進劑(H)之2-乙基-4-甲基咪唑(2E4MZ(商品名)、四國化成(股)製)0.2質量份進行摻合,利用超音波均質機進行攪拌,獲得清漆(樹脂組成物之溶液)。將該等清漆使用自動塗佈裝置(PI-1210、Tester sangyo(股)製)塗佈在厚度38μm之PET薄膜(Unipeel(註冊商標)TR1-38、Unitika(股)製、商品名)上,於80℃進行7分鐘加熱乾燥,獲得以PET薄膜作為支持體,樹脂組成物層之厚度為30μm之樹脂片。使用此樹脂片和實施例1同樣進行,獲得評價用疊層體及評價用硬化物。[Example 5] As a component (A), 15.8 parts by mass of a biphenylaralkyl-type epoxy resin (NC3000L (trade name), manufactured by Nippon Kayaku Co., Ltd.), and a naphthalene-type epoxy as a component (G) 6.1 parts by mass of a resin (HP-4710 (trade name), manufactured by DIC Corporation), 2,4,6-trimethylbenzyl-diphenyl-oxidation as a light curing initiator (B) 6.5 parts by mass of phosphine (Irgacure (registered trademark) 819, manufactured by BASF Japan (stock)), a PGMEA solution of a TrisP-PA epoxy acrylate compound (CYARAD (registered trademark) ZCR-6007H, non-volatile content) as a compound (C) 65% by mass, acid value: 70mgKOH / g, manufactured by Nippon Kayaku Co., Ltd. 77.5 parts by mass (50.4 parts by mass in terms of non-volatile content), as a compound having an ethylenically unsaturated group other than the component (C) (D) 17.4 parts by mass of dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA, manufactured by Nippon Kayaku Co., Ltd.) as a maleimide compound (E) as a maleimide compound (E) 3.3 parts by mass of BMI-2300 (trade name), manufactured by Yamato Chemical Industry Co., Ltd., MEK slurry (SC2050MB (trade name)) of siloxane-treated silica as a filler (F), average particle diameter of 0.5 μm, Non-volatile 70% by mass, manufactured by Admatechs (stock) 71.4 parts by mass (50 parts by mass in terms of nonvolatile content), 0.5 parts by mass of the cyanate compound SNCN obtained as Synthesis Example 1 of the compound (G), 0.2 parts by mass of 2-ethyl-4-methylimidazole (2E4MZ (trade name), manufactured by Shikoku Chemical Co., Ltd.) of the hardening accelerator (H) was blended, and the mixture was stirred with an ultrasonic homogenizer to obtain a varnish ( Resin composition solution). These varnishes were coated on a PET film (Unipeel (registered trademark) TR1-38, Unitika (trade name), trade name)) with a thickness of 38 μm using an automatic coating device (PI-1210, manufactured by Tester Sangyo). Heat drying was performed at 80 ° C. for 7 minutes to obtain a resin sheet having a PET film as a support and a resin composition layer having a thickness of 30 μm. Using this resin sheet, it carried out similarly to Example 1, and obtained the laminated body for evaluation, and the hardened | cured material for evaluation.

[比較例1] 將化合物(C)替換為使用雙酚F型環氧丙烯酸酯(KAYARAD(註冊商標)ZFR-1553H、不揮發成分68質量%、酸價:70mgKOH/g、日本化藥(股)製)74.1質量份(按不揮發成分換算,為50.4質量份),除此以外和實施例1同樣進行,製備清漆,並獲得樹脂片、評價用疊層體及評價用硬化物。[Comparative Example 1] Compound (C) was replaced with bisphenol F-type epoxy acrylate (KAYARAD (registered trademark) ZFR-1553H, 68% by mass of non-volatile content, acid value: 70 mgKOH / g, Nippon Kayaku Co., Ltd. Manufacture) 74.1 parts by mass (50.4 parts by mass in terms of non-volatile content), except that the same procedure as in Example 1 was performed to prepare a varnish, and obtain a resin sheet, a laminate for evaluation, and a cured product for evaluation.

又,KAYARAD(註冊商標)ZFR-1553H不具有前述式(2)表示之結構。In addition, KAYARAD (registered trademark) ZFR-1553H does not have a structure represented by the aforementioned formula (2).

[比較例2] 將成分(A)替換為使用萘型環氧樹脂(HP-4710(商品名)、DIC(股)製)22.4質量份,除此以外和實施例1同樣進行,製備清漆,並獲得樹脂片、評價用疊層體及評價用硬化物。[Comparative Example 2] A varnish was prepared in the same manner as in Example 1 except that component (A) was replaced with 22.4 parts by mass of naphthalene-type epoxy resin (HP-4710 (trade name), manufactured by DIC (Stock)). Then, a resin sheet, a laminate for evaluation, and a cured product for evaluation were obtained.

[比較例3] 將成分(A)替換為使用多官能型環氧樹脂(1031S(商品名)、三菱化學(股)製)22.4質量份,除此以外和實施例1同樣進行,製備清漆,獲得樹脂片、評價用疊層體及評價用硬化物。[Comparative Example 3] A varnish was prepared in the same manner as in Example 1 except that the component (A) was replaced with 22.4 parts by mass of a polyfunctional epoxy resin (1031S (trade name), manufactured by Mitsubishi Chemical Corporation). A resin sheet, a laminate for evaluation, and a cured product for evaluation were obtained.

又,前述多官能型環氧樹脂(1031S(商品名)、三菱化學(股)製)具有以下之結構式(12)。The polyfunctional epoxy resin (1031S (trade name), manufactured by Mitsubishi Chemical Corporation) has the following structural formula (12).

[化20] [Hua 20]

[物性測定評價] 依以下的方法測定樹脂片、評價用疊層體及評價用硬化物並評價。它們的結果示於表1。[Physical property evaluation] The resin sheet, the laminate for evaluation, and the hardened material for evaluation were measured and evaluated by the following methods. The results are shown in Table 1.

<塗膜性> 以手指輕輕按壓A4尺寸之各附支持體之樹脂片之樹脂表面端部,依以下的基準評價與手指黏附的程度。 ○:幾乎未與手指黏附。附支持體之樹脂片之端部黏附於手指,但於未達高度30mm時從手指剝落。 ×:與手指黏附。附支持體之樹脂片之端部黏附於手指,浮起高度30mm以上。<Paintability> The resin surface end of each resin sheet with a support of A4 size was gently pressed with a finger, and the degree of adhesion to the finger was evaluated according to the following criteria. ○: Hardly adhered to fingers. The end of the resin sheet with a support is adhered to a finger, but peels off from the finger when the height is less than 30 mm. ×: Adhesion to fingers. The end of the resin sheet with a support is adhered to a finger, and the floating height is 30 mm or more.

<耐熱性(玻璃轉移溫度)> 使用DMA裝置(TA INSTRUMENT公司製動態黏彈性測定裝置DMAQ800(商品名))將評價用硬化物以10℃/分升溫,定義Loss Modulus之峰部位置為玻璃轉移溫度(Tg、℃)。<Heat resistance (glass transition temperature)> A DMA device (Dynamic Viscoelasticity Measurement Device DMAQ800 (trade name) manufactured by TA Instruments Co., Ltd.) was used to heat the evaluation hardened material at 10 ° C / min, and the position of the peak of Loss Modulus was defined as glass transition. Temperature (Tg, ° C).

<顯影性> 測定評價用疊層體之顯影面從顯影步驟開始起算到以目視沒有看到殘渣為止之時間後,以SEM(掃描電子顯微鏡)觀察(倍率1000倍),並以下列基準評價是否有殘渣。 ◎:直到目視沒有看到顯影殘渣為止之時間為50sec以下,SEM觀察後在30mm四方之範圍內沒有顯影殘渣,顯影性非常優異。 ○:直到目視沒有看到顯影殘渣為止之時間為超過50sec,但SEM觀察後在30mm四方之範圍內沒有顯影殘渣,顯影性優良。 ×:在30mm四方之範圍內有顯影殘渣,顯影性不佳。<Developability> After the development surface of the laminated body for measurement and evaluation is counted from the start of the development step until no residue is visually observed, it is observed with a SEM (scanning electron microscope) (1000 times magnification), and it is evaluated whether There are residues. :: The time until visually observing the developing residue is 50 sec or less, and there is no developing residue within 30 mm square after SEM observation, and the developability is very excellent. ○: The time until the development residue was not visually observed was more than 50 sec. However, after the SEM observation, there was no development residue within a range of 30 mm square, and the developability was excellent. ×: Development residues exist within a 30 mm square, and the developability is not good.

評價用硬化物之濕式粗糙化處理與導體層鍍敷: 將實施例1~5及比較例1~3獲得之多層印刷電路板以上村工業製之無電解銅鍍敷處理(使用藥液名:MCD-PL、MDP-2、MAT-SP、MAB-4-C、MEL-3-APEAver.2)實施約0.8μm之無電解銅鍍敷,並於130℃實施1小時之乾燥。然後實施電解銅鍍敷,使鍍敷銅之厚度成為18μm,於180℃進行1小時之乾燥。以此方式製作絕緣層上已形成厚度18μm之導體層(鍍敷銅)之樣本,供以下之評價。Wet roughening treatment of conductive hardened material for evaluation and conductor layer plating: The multilayered printed circuit boards obtained in Examples 1 to 5 and Comparative Examples 1 to 3 were electroless copper plating treatments (manufactured by chemical name) : MCD-PL, MDP-2, MAT-SP, MAB-4-C, MEL-3-APEAver. 2) Electroless copper plating of about 0.8 μm is performed, and drying is performed at 130 ° C. for 1 hour. Then, electrolytic copper plating was performed so that the thickness of the plated copper was 18 μm, and drying was performed at 180 ° C. for 1 hour. In this way, a sample having a conductor layer (plated copper) having a thickness of 18 μm formed on the insulating layer was prepared for the following evaluations.

<鍍敷密合性(kN/m)> 使用依上述程序製作之樣本,依據JISC6481測定鍍敷銅之黏著力3次,並求平均値。針對因為電解銅鍍敷後之乾燥而隆起的樣本,使用未隆起的部分進行評價。<Plating adhesion (kN / m)> Using the sample prepared according to the above procedure, the adhesion of plated copper was measured three times in accordance with JISC6481, and the average 値 was calculated. The samples that were raised due to the drying after electrolytic copper plating were evaluated using the non-raised portions.

【表1】 【Table 1】

由表1可知,實施例1~5,鍍敷密合性及耐熱性優良。其中,實施例2~5耐熱性及鍍敷密合性良好,尤其實施例3~5的耐熱性及鍍敷密合性顯著優異。再者,實施例4及5的顯影性亦為優良。反觀比較例1~3鍍敷密合性不足。因此依照本發明可獲得鍍敷密合性優異、耐熱性及顯影性也優異之樹脂組成物、使用此組成物之樹脂片、多層印刷電路板及半導體裝置。As can be seen from Table 1, Examples 1 to 5 are excellent in plating adhesion and heat resistance. Among them, Examples 2 to 5 have good heat resistance and plating adhesion, and Examples 3 to 5 are particularly excellent in heat resistance and plating adhesion. The developability of Examples 4 and 5 was also excellent. In contrast, Comparative Examples 1 to 3 had insufficient plating adhesion. Therefore, according to the present invention, a resin composition having excellent plating adhesion, excellent heat resistance and developability, a resin sheet using the composition, a multilayer printed circuit board, and a semiconductor device can be obtained.

no

Claims (14)

一種樹脂組成物,含有:下式(1)表示之聯苯芳烷基型環氧樹脂(A)、光硬化起始劑(B)、下式(2)表示之化合物(C)、及下式(2)表示之化合物(C)以外之具有乙烯性不飽和基之化合物(D); [化1]式(1)中,n表示0~15之整數; [化2]式(2)中,多數個R1 各自獨立地表示氫原子或甲基,且多數個R2 各自獨立地表示氫原子或也可以有取代基之碳數1~22之烴基,多數個R3 各自獨立地表示下式(3)表示之取代基、下式(4)表示之取代基或羥基; [化3][化4]式(4)中,R4 表示氫原子或甲基。A resin composition comprising a biphenylaralkyl-type epoxy resin (A) represented by the following formula (1), a photohardening initiator (B), a compound (C) represented by the following formula (2), and the following Compound (D) having an ethylenically unsaturated group other than compound (C) represented by formula (2); In formula (1), n represents an integer from 0 to 15; [化 2] In formula (2), most of R 1 each independently represent a hydrogen atom or a methyl group, and most of R 2 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 22 carbon atoms which may have a substituent, and most of R 3 Each independently represents a substituent represented by the following formula (3), a substituent represented by the following formula (4), or a hydroxyl group; [Chemical 4] In the formula (4), R 4 represents a hydrogen atom or a methyl group. 如申請專利範圍第1項之樹脂組成物,更含有馬來醯亞胺化合物(E)。For example, the resin composition of the scope of application for a patent further contains a maleimide compound (E). 如申請專利範圍第1項之樹脂組成物,更含有填充材(F)。For example, the resin composition in the scope of patent application 1 further contains a filler (F). 如申請專利範圍第1項之樹脂組成物,更含有化合物(G),該化合物(G)係選自於由氰酸酯化合物、苯酚樹脂、氧雜環丁烷樹脂、苯并化合物、及和該(1)表示之聯苯芳烷基型環氧樹脂(A)為不同之環氧樹脂構成之群組中之任一種以上。For example, the resin composition in the first patent application range further contains a compound (G) selected from the group consisting of a cyanate compound, a phenol resin, an oxetane resin, and a benzo The compound and the biphenylaralkyl-type epoxy resin (A) represented by the above (1) are any one or more selected from the group consisting of different epoxy resins. 如申請專利範圍第1項之樹脂組成物,其中,該式(2)表示之化合物(C)之酸價為30mgKOH/g以上120mgKOH/g以下。For example, the resin composition of the scope of application for patent No. 1 wherein the acid value of the compound (C) represented by the formula (2) is 30 mgKOH / g or more and 120 mgKOH / g or less. 如申請專利範圍第1項之樹脂組成物,其中,成分(A)之含量相對於樹脂組成物中之樹脂固體成分100質量份為3質量份以上50質量份以下。For example, the resin composition of the first patent application range, wherein the content of the component (A) is 3 parts by mass or more and 50 parts by mass or less with respect to 100 parts by mass of the resin solid content in the resin composition. 如申請專利範圍第1項之樹脂組成物,其中,該具有乙烯性不飽和基之化合物(D)係具有(甲基)丙烯醯基之化合物及/或具有乙烯基之化合物。For example, the resin composition according to item 1 of the application, wherein the compound (D) having an ethylenically unsaturated group is a compound having a (meth) acrylfluorenyl group and / or a compound having a vinyl group. 如申請專利範圍第3項之樹脂組成物,其中,該填充材(F)係選自於由二氧化矽、軟水鋁石、硫酸鋇、聚矽氧粉末、氟樹脂系填充材、胺甲酸乙酯樹脂系填充材、丙烯酸樹脂系填充材、聚乙烯系填充材、苯乙烯・丁二烯橡膠及聚矽氧橡膠構成之群組中之任一種以上。For example, the resin composition of claim 3, wherein the filler (F) is selected from the group consisting of silicon dioxide, boehmite, barium sulfate, polysiloxane powder, fluororesin-based filler, and ethyl carbamate. Any one or more of the group consisting of an ester resin-based filler, an acrylic resin-based filler, a polyethylene-based filler, a styrene-butadiene rubber, and a silicone rubber. 如申請專利範圍第1項之樹脂組成物,更含有熱硬化促進劑(H)。For example, the resin composition of the scope of application for a patent further contains a thermosetting accelerator (H). 如申請專利範圍第1項之樹脂組成物,更含有下式(5)表示之萘型環氧樹脂; [化5]For example, the resin composition of the first patent application scope further contains a naphthalene-type epoxy resin represented by the following formula (5); . 如申請專利範圍第1項之樹脂組成物,其中,該光硬化起始劑(B)含有下式(6)表示之氧化膦化合物; [化6]式(6)中,R5 ~R10 各自獨立地表示氫原子或碳數1~4之烷基,R11 表示碳數1~20之烷基或碳數6~20之芳基。For example, the resin composition of the scope of application for a patent, wherein the photohardening initiator (B) contains a phosphine oxide compound represented by the following formula (6); In Formula (6), R 5 to R 10 each independently represent a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and R 11 represents an alkyl group having 1 to 20 carbon atoms or an aryl group having 6 to 20 carbon atoms. 一種樹脂片,具有支持體及配置在該支持體之表面之如申請專利範圍第1項之樹脂組成物。A resin sheet has a support and a resin composition as set forth in the scope of patent application No. 1 on the surface of the support. 一種多層印刷電路板,具有如申請專利範圍第1項之樹脂組成物。A multilayer printed circuit board having a resin composition as described in the first patent application. 一種半導體裝置,具有如申請專利範圍第1項之樹脂組成物。A semiconductor device having the resin composition as described in the first patent application.
TW106117074A 2016-06-29 2017-05-24 Resin composition, resin sheet, multilayer printed wiring board, and semiconductor device TWI744332B (en)

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