WO2018003314A1 - Resin composition, resin sheet, multilayer printed circuit board, and semiconductor device - Google Patents

Resin composition, resin sheet, multilayer printed circuit board, and semiconductor device Download PDF

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Publication number
WO2018003314A1
WO2018003314A1 PCT/JP2017/018045 JP2017018045W WO2018003314A1 WO 2018003314 A1 WO2018003314 A1 WO 2018003314A1 JP 2017018045 W JP2017018045 W JP 2017018045W WO 2018003314 A1 WO2018003314 A1 WO 2018003314A1
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WIPO (PCT)
Prior art keywords
group
resin
resin composition
mass
compound
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PCT/JP2017/018045
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French (fr)
Japanese (ja)
Inventor
慎也 喜多村
鈴木 卓也
誠司 四家
Original Assignee
三菱瓦斯化学株式会社
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Application filed by 三菱瓦斯化学株式会社 filed Critical 三菱瓦斯化学株式会社
Priority to JP2018524943A priority Critical patent/JP6913305B2/en
Priority to KR1020187033291A priority patent/KR102324898B1/en
Priority to CN201780040875.6A priority patent/CN109415491B/en
Publication of WO2018003314A1 publication Critical patent/WO2018003314A1/en

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/32Epoxy compounds containing three or more epoxy groups
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/42Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof
    • C08G59/4223Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof aromatic
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/08Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated side groups
    • C08F290/14Polymers provided for in subclass C08G
    • C08F290/144Polymers containing more than one epoxy group per molecule
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/32Epoxy compounds containing three or more epoxy groups
    • C08G59/3218Carbocyclic compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/4007Curing agents not provided for by the groups C08G59/42 - C08G59/66
    • C08G59/4014Nitrogen containing compounds
    • C08G59/4042Imines; Imides
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/032Organic insulating material consisting of one material
    • H05K1/0326Organic insulating material consisting of one material containing O

Definitions

  • the present invention relates to a resin composition, a resin sheet using the resin composition, a multilayer printed wiring board, and a semiconductor device.
  • Thinning of a laminated board used for a multilayer printed wiring board has been actively conducted by downsizing and increasing the density of the multilayer printed wiring board.
  • the insulating layer is also required to be reduced in thickness, and a resin sheet that does not include glass cloth is required.
  • a thermosetting resin is mainly used as a resin composition as a material for the insulating layer, and a hole for obtaining conduction between insulating layers is generally performed by laser processing.
  • the method of forming a conductor circuit by copper plating is common as a method of forming a conductor circuit on an insulating layer.
  • the drilling by laser processing has a problem that the processing time becomes longer as the number of holes becomes higher. Therefore, in recent years, there has been a demand for a resin sheet that can be collectively punched in a development process by using a resin composition that is cured by light or the like and dissolved by development. Furthermore, since the conductor circuit is formed on the insulating layer by copper plating, it is required that the copper plating adherence to the insulating layer is high so that the conductor circuit is not peeled off.
  • the alkali development type is the mainstream, and acid anhydride group- or carboxyl group-containing acrylates are used to enable development.
  • epoxy resin is used for copper plating adhesion.
  • Patent Document 1 a carboxyl-modified epoxy (meth) acrylate resin obtained by reacting a bisphenol-type epoxy resin with (meth) acrylic acid and then reacting with an acid anhydride, a biphenyl-type epoxy resin, A photosensitive thermosetting resin composition containing a photopolymerization initiator and a diluent is described.
  • Patent Document 2 contains an epoxy resin, a curing agent, and a silica component whose silica particles are surface-treated with a silane coupling agent, and does not contain a curing accelerator, or the epoxy resin and the above
  • the curing accelerator is contained in a content of 3.5 parts by weight or less with respect to a total of 100 parts by weight of the curing agent, the average particle diameter of the silica particles is 1 ⁇ m or less, and the silica component per 1 g of the silica particles.
  • An epoxy resin composition in the range of 10 to 80% with respect to the value C (g) per gram of silica particles calculated by the formula (X)) is disclosed. Yes.
  • a cured product using a conventional epoxy resin does not provide sufficient physical properties, and there is a limit to the formation of a protective film and an interlayer insulating layer having high developability and high copper plating adhesion.
  • the cured product obtained from the resin composition described in Patent Document 1 is limited in use to an etching resist or a solder resist for printed wiring boards, and is excellent in flexibility and heat resistance, but is an interlayer insulating layer. As a result, the copper plating adhesion was not sufficient.
  • the present invention has been made in view of the above problems, and when used in a multilayer printed wiring board, a resin composition having excellent coating properties and heat resistance, and excellent developability and copper plating adhesion, It is an object to provide a resin sheet with a support, a multilayer printed wiring board using them, and a semiconductor device.
  • the present inventors include a biphenyl aralkyl type epoxy resin (A) represented by the following formula (1), a photocuring initiator (B), a compound (C) represented by the following formula (2), and the (C)
  • A biphenyl aralkyl type epoxy resin
  • B photocuring initiator
  • C compound represented by the following formula (2)
  • C the resin composition containing the compound (D) having an ethylenically unsaturated group other than the components
  • n represents an integer of 0 to 15).
  • a plurality of R 1 s each independently represent a hydrogen atom or a methyl group, and a plurality of R 2 s each independently have a hydrogen atom or a substituent having 1 carbon atom
  • a plurality of R 3 each independently represents a substituent represented by the following formula (3), a substituent represented by the following formula (4), or a hydroxy group.
  • R 4 represents a hydrogen atom or a methyl group
  • the present invention includes the following contents.
  • the filler (F) is silica, boehmite, barium sulfate, silicone powder, fluororesin filler, urethane resin filler, acrylic resin filler, polyethylene filler, styrene / butadiene rubber and silicone.
  • R 5 to R 10 each independently represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms
  • R 11 represents an alkyl group having 1 to 20 carbon atoms or 6 to 20 carbon atoms.
  • An aryl group of [12] A resin sheet comprising the support and the resin composition according to any one of [1] to [11] disposed on the surface of the support.
  • a multilayer printed wiring board comprising the resin composition according to any one of [1] to [11].
  • a semiconductor device comprising the resin composition according to any one of [1] to [11].
  • a resin composition that is excellent in plating adhesion, coating properties, heat resistance and developability, and is cured with active energy rays having physical properties suitable for a multilayer printed wiring board, a resin sheet with a support, and The multilayer printed wiring board and semiconductor device used can be provided.
  • the present embodiment a mode for carrying out the present invention (hereinafter referred to as “the present embodiment”) will be described in detail.
  • the following embodiments are examples for explaining the present invention, and are not intended to limit the present invention to the following contents.
  • the present invention can be appropriately modified within the scope of the gist.
  • (meth) acryloyl group means both “acryloyl group” and the corresponding “methacryloyl group”
  • “(meth) acrylate” means “acrylate” and the corresponding “methacrylate”.
  • (Meth) acrylic acid means both “acrylic acid” and the corresponding "methacrylic acid”.
  • resin solid content or “resin solid content in the resin composition” means a component in the resin composition excluding the solvent and the filler, unless otherwise specified.
  • the term “solid content of 100 parts by mass” means that the total of the components excluding the solvent and filler in the resin composition is 100 parts by mass.
  • the resin composition of this embodiment includes a biphenyl aralkyl type epoxy resin (A) represented by the formula (1), a photocuring initiator (B), a compound (C) represented by the formula (2), and ( The compound (D) which has ethylenically unsaturated groups other than C) component is contained.
  • A biphenyl aralkyl type epoxy resin
  • B photocuring initiator
  • C compound represented by the formula (2)
  • D which has ethylenically unsaturated groups other than C
  • the biphenyl aralkyl type epoxy resin (A) (also referred to as component (A)) used in the present embodiment is a compound having a structure of the above formula (1) and having a biphenyl aralkyl skeleton.
  • the cured product obtained by including the resin (A) can suitably form a protective film having excellent developability and an interlayer insulating layer while having high copper plating adhesion.
  • n represents an integer of 0 to 15.
  • it is an integer of 0 to 5 from the viewpoint of developability.
  • the content of the component (A) is not particularly limited, but from the viewpoint of improving copper plating adhesion, the total content of the component (A), the component (C) and the component (D).
  • the amount is preferably 3 parts by mass or more, more preferably 4 parts by mass or more, and still more preferably 5 parts by mass or more with respect to 100 parts by mass.
  • cure and improving heat resistance it is more preferable to set it as 89 mass parts or less, and it is still more preferable to set it as 88 mass parts or less.
  • content of the component (A) in the resin composition of this embodiment is not specifically limited, From a viewpoint of improving copper plating adhesiveness and developability, it is with respect to 100 mass parts of resin solid content in a resin composition. It is preferably 3 parts by mass or more, more preferably 5 parts by mass or more, still more preferably 10 parts by mass or more, and even more preferably 15 parts by mass or more. Further, from the viewpoint of sufficiently curing and improving heat resistance, it is preferably 50 parts by mass or less, more preferably 40 parts by mass or less, with respect to 100 parts by mass of the resin solid content in the resin composition. Preferably, it is more preferably 30 parts by mass or less, and still more preferably 28 parts by mass or less.
  • the photocuring initiator (B) (also referred to as component (B)) used in the present embodiment is not particularly limited, and those generally known in the field used in photocurable resin compositions can be used.
  • benzoins such as benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin propyl ether, benzoin isobutyl ether, benzoyl peroxide, lauroyl peroxide, acetyl peroxide, parachlorobenzoyl peroxide, di-tert-butyl-di- Organic peroxides exemplified by perphthalate, acylphosphine oxides, acetophenone, 2,2-diethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone, 2 -Hydroxy-2-methyl-phenylpropan-1-one, diethoxyacetophenone, 1-hydroxyn cyclohexyl phenyl ketone, 2-methyl-1- [4- (methylthio) phenyl Acetophenones such as -2-morpholino-propan-1-one,
  • Acylphosphine oxides include phosphine oxide compounds represented by the following formula (6) such as bis (2,4,6-trimethylbenzoyl) -phenylphosphine oxide, 2,4,6-trimethylbenzoyl-diphenyl-phos Examples include fin oxide.
  • the phosphine oxide compound represented by the following formula (6) has a high long wavelength UV absorption and is excellent in allowing UV light to reach the inside of the resin. Therefore, the biphenyl aralkyl type epoxy resin (A), the compound (C), the compound (D) and the like according to the present embodiment can be suitably reacted, and the production of a resin sheet and a multilayer printed wiring board that are superior in heat resistance can be achieved. It becomes possible.
  • R 5 to R 10 each independently represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms
  • R 11 represents an alkyl group having 1 to 20 carbon atoms or a carbon atom having 6 to 20 carbon atoms.
  • An aryl group is shown.
  • alkyl group having 1 to 4 carbon atoms examples include a straight chain such as methyl group, ethyl group, n-propyl group, n-butyl group, isopropyl group, isobutyl group, sec-butyl group, t-butyl group, etc.
  • a branched alkyl group is exemplified.
  • alkyl group having 1 to 20 carbon atoms examples include methyl, ethyl, n-propyl, n-butyl, n-pentyl, n-hexyl, isopropyl, isobutyl, sec-butyl, t-butyl group, neopentyl group, 1,1-dimethylpropyl group, 1,1-diethylpropyl group, 1-ethyl-1-methylpropyl group, 1,1,2,2-tetramethylpropyl group, 1,1 -Linear or branched alkyl groups such as dimethylbutyl group and 1,1,3-trimethylbutyl group.
  • aryl groups having 6 to 20 carbon atoms include unsubstituted aryl groups such as phenyl, naphthyl, biphenyl, terphenyl, phenanthryl, and anthracenyl groups; tolyl, dimethylphenyl, isopropylphenyl, and t-butyl.
  • alkyl group-substituted aryl groups such as a phenyl group and a di-t-butylphenyl group.
  • acylphosphine oxides 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) are suitable from the viewpoint of reactivity suitable for multilayer printed wiring board applications and high reliability for metal conductors.
  • -Butanone-1 and other radical type photocuring initiators of acetophenones are preferable, and as described above, more heat resistance is obtained, so that the phosphine oxide compound represented by the formula (6) is more preferable, and bis ( More preferred is 2,4,6-trimethylbenzoyl) -phenylphosphine oxide.
  • photocuring initiators (B) can be used alone or in combination of two or more, and both radical and cationic initiators may be used in combination.
  • 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1, bis (2,4,6-trimethylbenzoyl) -phenylphosphine oxide and 2,4,6-trimethylbenzoyl -Diphenyl-phosphine oxide may be a commercially available product, and Irgacure (registered trademark) 369 (manufactured by BASF Japan Ltd.), Irgacure (registered trademark) 819 (manufactured by BASF Japan Ltd.) and Irgacure (registered) (Trademark) TPO (manufactured by BASF Japan Ltd.) is preferably used.
  • the content of the photocuring initiator (B) in the resin composition of the present embodiment is not particularly limited. From the viewpoint of sufficiently curing the resin composition with active energy rays and improving heat resistance, the resin composition.
  • the total content of component (A), component (C) and component (D) in the content is preferably 0.1 parts by mass or more, more preferably 0.2 parts by mass or more, relative to 100 parts by mass. More preferably, the content is 0.3 parts by mass or more. Further, from the viewpoint of inhibiting heat curing after photocuring and reducing heat resistance, it is preferably 30 parts by mass or less, more preferably 25 parts by mass or less, and further preferably 20 parts by mass or less. preferable.
  • content of the photocuring initiator (B) in the resin composition of this embodiment is not specifically limited, It shall be 0.1 mass part or more with respect to 100 mass parts of resin solid content in a resin composition.
  • it is more preferably 0.2 parts by mass or more, more preferably 0.3 parts by mass or more, still more preferably 1 part by mass or more, and more preferably 1.8 parts by mass or more. Even more preferred.
  • it is preferably 30 parts by mass or less, and 25 parts by mass or less with respect to 100 parts by mass of the resin solid content in the resin composition. More preferably, it is more preferably 20 parts by mass or less, still more preferably 10 parts by mass or less.
  • Compound (C) used in the present embodiment is a compound represented by the formula (2).
  • Compound (C) may be used alone, may contain isomers such as structural isomers and stereoisomers, and may be used in combination of two or more compounds having different structures.
  • R ⁇ 1 > represents a hydrogen atom or a methyl group each independently.
  • a hydrogen atom is contained from a viewpoint of improving the reactivity of photocuring reaction, More preferably, all of R ⁇ 1 > is a hydrogen atom.
  • a plurality of R 2 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 22 carbon atoms which may have a substituent.
  • hydrocarbon group a linear or branched aliphatic hydrocarbon group having 1 to 22, preferably 1 to 14, and more preferably 1 to 10 carbon atoms; 3 to 22 carbon atoms, preferably 3 to 14 and more preferably an alicyclic hydrocarbon group having 3 to 10 carbon atoms; an aromatic hydrocarbon group having 6 to 22 carbon atoms, preferably 6 to 14 carbon atoms, and more preferably 6 to 10 carbon atoms.
  • Examples of the aliphatic hydrocarbon group include a methyl group, an ethyl group, an n-propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, an isopropyl group, an isobutyl group, a sec-butyl group, and a t-butyl group.
  • neopentyl group 1,1-dimethylpropyl group, 1,1-diethylpropyl group, 1-ethyl-1-methylpropyl group, 1,1,2,2-tetramethylpropyl group, 1,1-dimethylbutyl
  • Linear, branched alkyl group such as 1,1,3-trimethylbutyl group
  • linear or branched alkenyl group such as vinyl group, allyl group, isopropenyl group
  • ethynyl group, propargyl group etc.
  • a linear or branched alkynyl group a linear or branched alkynyl group.
  • alicyclic hydrocarbon group examples include cyclic saturated hydrocarbon groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, 1-methyl-1-cyclohexyl group and adamantyl group; cyclopentadienyl group, indenyl And cyclic unsaturated hydrocarbon groups such as a fluorenyl group.
  • aromatic hydrocarbon groups examples include unsubstituted aryl groups such as phenyl, naphthyl, biphenyl, terphenyl, phenanthryl, and anthracenyl groups; tolyl, dimethylphenyl, isopropylphenyl, and t-butylphenyl. And aryl groups such as alkyl group-substituted aryl groups such as di-t-butylphenyl group; In these hydrocarbon groups, at least one hydrogen atom may be substituted with another hydrocarbon group.
  • hydrocarbon group in which at least one hydrogen atom is substituted with another hydrocarbon group examples include aryl group-substituted alkyl groups such as benzyl group and cumyl group, and cyclic saturated hydrocarbon group-substituted alkyl groups such as cyclohexylmethyl group. Can be mentioned.
  • the hydrocarbon group having 1 to 22 carbon atoms which may have a substituent is preferably a linear or branched alkyl group.
  • the plurality of R 2 preferably contain a methyl group from the viewpoint of improving the heat resistance of the cured product, and more preferably all of R 2 are methyl groups.
  • R ⁇ 3 > represents the substituent represented by the said Formula (3), the substituent represented by the said Formula (4), or a hydroxy group each independently. Among these, it is preferable that a hydroxyl group is included from a viewpoint of improving heat resistance. Moreover, in this embodiment, it is also preferable from a viewpoint of improving developability to use the compound (C) containing the substituent represented by said Formula (3) among several R ⁇ 3 >.
  • R 4 represents a hydrogen atom or a methyl group.
  • a hydrogen atom is preferable from the viewpoint of improving the reactivity of the photocuring reaction.
  • the plurality of R 3 s are in the range where the ratio of the substituent represented by the formula (3) is 20% or more and 98% or less among all the substituents of R 3 ,
  • the ratio of the substituent represented by 4) is in the range of 5% to 98% and the ratio of the hydroxy group is in the range of 10% to 98% (the sum of the ratios of these substituents is 100%).
  • at least one of the plurality of R 3 is particularly preferably a substituent represented by the above formula (3).
  • the compound (C) preferably contains any one or more of the following compounds (C1) to (C5) because the reactivity of the photocuring reaction, the heat resistance of the cured product and the developability can be improved. More preferably, it contains at least compound (C1), more preferably any two or more of (C1) to (C5), and any one of compound (C1) and compounds (C2) to (C5). More preferably, it contains more than one species. As the compound (C), it is also preferable that at least the compounds (C2) and (C3) are included.
  • Such compounds may be commercially available, for example, KAYARAD (registered trademark) ZCR-6001H, KAYARAD (registered trademark) ZCR-6002H, KAYARAD (registered trademark) ZCR-6006H, KAYARAD (registered trademark) ZCR- 6007H, KAYARAD (registered trademark) ZCR-601H (above, trade name, manufactured by Nippon Kayaku Co., Ltd.), and the like.
  • the acid value of the compound (C) is preferably 30 mgKOH / g or more from the viewpoint of improving developability, and more preferably 50 mgKOH / g or more because developability is further improved. More preferably.
  • the acid value of the compound (A) is preferably 120 mgKOH / g or less, and more preferably 110 mgKOH / g or less because dissolution can be further prevented. More preferably.
  • the “acid value” in the present embodiment indicates a value measured by a method according to JISK 0070: 1992.
  • the content of the compound (C) is not particularly limited, but from the viewpoint of curing the resin composition with active energy rays, the component (A) and component (C) in the resin composition ) And the total content of component (D) is preferably 1 part by mass or more, more preferably 2 parts by mass or more, and still more preferably 3 parts by mass or more. Further, from the viewpoint of sufficiently curing with active energy rays and improving heat resistance, it is preferably 99 parts by mass or less, more preferably 98 parts by mass or less, and further preferably 97 parts by mass or less. preferable.
  • the content of the compound (C) is not particularly limited, but from the viewpoint of curing the resin composition with active energy rays, the resin solid content in the resin composition is 100 parts by mass. 1 part by mass or more, preferably 2 parts by mass or more, more preferably 3 parts by mass or more, still more preferably 10 parts by mass or more, even more preferably 25 parts by mass or more. It is still more preferable, and it is most preferable to set it as 30 mass parts or more. Further, from the viewpoint of sufficiently curing with active energy rays and improving heat resistance, it is preferably 99 parts by mass or less, and 98 parts by mass or less with respect to 100 parts by mass of the resin solid content in the resin composition. More preferably, it is more preferably 97 parts by mass or less, still more preferably 90 parts by mass or less, still more preferably 75 parts by mass or less, and most preferably 72 parts by mass or less. preferable.
  • the resin composition of the present embodiment is a compound (D) (component (component) having an ethylenically unsaturated group other than the component (C) in order to increase the reactivity to active energy rays (for example, ultraviolet rays) and improve heat resistance.
  • the compound (D) having an ethylenically unsaturated group used in the present embodiment is other than the compound (C) represented by the formula (2), and has one or more ethylenically unsaturated groups in one molecule.
  • it will not specifically limit if it is a compound For example, the compound which has a (meth) acryloyl group, a vinyl group, etc. is mentioned. These can be used alone or in combination of two or more.
  • a compound having a (meth) acryloyl group methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, lauryl (meth) acrylate, polyethylene glycol (meth) acrylate, polyethylene glycol (meth) acrylate monomethyl ether , Phenylethyl (meth) acrylate, isobornyl (meth) acrylate, cyclohexyl (meth) acrylate, benzyl (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, butanediol di (meth) acrylate, hexanediol di (meth) acrylate, Neopentyl glycol di (meth) acrylate, nonanediol di (meth) acrylate, glycol di (meth) acrylate, diethylenedi (meth) a Relate,
  • urethane (meth) acrylates that have (meth) acryloyl groups and urethane bonds in the same molecule
  • polyester (meth) acrylates that have (meth) acryloyl groups and ester bonds in the same molecule
  • epoxy resins Epoxy (meth) acrylates derived from the above and having a (meth) acryloyl group, and reactive oligomers in which these bonds are used in combination.
  • the urethane (meth) acrylate is a reaction product of a hydroxyl group-containing (meth) acrylate, a polyisocyanate, and other alcohols used as necessary.
  • hydroxyalkyl (meth) acrylates such as hydroxyethyl (meth) acrylate, hydroxypropyl (meth) acrylate, hydroxybutyl (meth) acrylate, glycerin (meta) such as glycerin mono (meth) acrylate, glycerin di (meth) acrylate, etc.
  • Sugars (meth) acrylates such as acrylates, pentaerythritol di (meth) acrylate, pentaerythritol tri (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, and toluene diisocyanate , Hexamethylene diisocyanate, trimethylhexamethylene diisocyanate, isophorone diisocyanate, norbornene diisocyanate, Down diisocyanate, hydrogenated xylene diisocyanate, dicyclohexane diisocyanate, and their isocyanurate, by reacting polyisocyanates such as buret reactants, the urethane (meth) acrylates.
  • polyisocyanates such as buret reactants, the urethane (meth) acrylates.
  • polyester (meth) acrylates examples include caprolactone-modified 2-hydroxyethyl (meth) acrylate, ethylene oxide and / or propylene oxide-modified phthalic acid (meth) acrylate, ethylene oxide-modified succinic acid (meth) acrylate, and caprolactone-modified.
  • Monofunctional (poly) ester (meth) acrylates such as tetrahydrofurfuryl (meth) acrylate; hydroxypivalate ester neopentyl glycol di (meth) acrylate, caprolactone-modified hydroxypivalate ester neopentyl glycol di (meth) acrylate, epichlorohydrin Di (poly) ester (meth) acrylates such as modified phthalic acid di (meth) acrylate; 1 mole of trimethylolpropane or glycerin Mol of ⁇ - caprolactone, .gamma.-butyrolactone, a triol obtained by adding a cyclic lactone compound such as ⁇ - valerolactone mono- include di- or tri (meth) acrylate.
  • triol mono, di, tri or tetra (meta) obtained by adding 1 mol or more of a cyclic lactone compound such as ⁇ -caprolactone, ⁇ -butyrolactone, ⁇ -valerolactone to 1 mol of pentaerythritol or ditrimethylolpropane.
  • a cyclic lactone compound such as ⁇ -caprolactone, ⁇ -butyrolactone, ⁇ -valerolactone
  • Triol mono or poly (meth) acrylate obtained by adding 1 mol or more of cyclic lactone compound such as ⁇ -caprolactone, ⁇ -butyrolactone, ⁇ -valerolactone to 1 mol of acrylate and dipentaerythritol
  • cyclic lactone compound such as ⁇ -caprolactone, ⁇ -butyrolactone, ⁇ -valerolactone
  • examples thereof include mono (meth) acrylate or poly (meth) acrylate of polyhydric alcohol such as all, pentaol or hexaol.
  • diol components such as (poly) ethylene glycol, (poly) propylene glycol, (poly) tetramethylene glycol, (poly) butylene glycol, 3-methyl-1,5-pentanediol, hexanediol and maleic acid , Fumaric acid, succinic acid, adipic acid, phthalic acid, isophthalic acid, hexahydrophthalic acid, tetrahydrophthalic acid, dimer acid, sebacic acid, azelaic acid, polybasic acids such as 5-sodium sulfoisophthalic acid, and anhydrides thereof (Meth) acrylate of a polyester polyol which is a reaction product with a product of a cyclic lactone-modified polyester diol composed of the diol component and a polybasic acid and their anhydrides and ⁇ -caprolactone, ⁇ -butyrolactone, ⁇ -valerolactone,
  • the above epoxy (meth) acrylates are carboxylate compounds of a compound having an epoxy group and (meth) acrylic acid.
  • phenol novolac type epoxy (meth) acrylate cresol novolac type epoxy (meth) acrylate, trishydroxyphenylmethane type epoxy (meth) acrylate, dicyclopentadienephenol type epoxy (meth) acrylate, bisphenol A type epoxy (meth) acrylate Bisphenol F type epoxy (meth) acrylate, biphenol type epoxy (meth) acrylate, bisphenol A novolak type epoxy (meth) acrylate, naphthalene skeleton-containing epoxy (meth) acrylate, glyoxal type epoxy (meth) acrylate, heterocyclic epoxy ( And (meth) acrylates and the like, and acid anhydride-modified epoxy acrylates thereof.
  • Examples of the compound having a vinyl group include vinyl ethers such as ethyl vinyl ether, propyl vinyl ether, hydroxyethyl vinyl ether, and ethylene glycol divinyl ether.
  • Examples of styrenes include styrene, methyl styrene, ethyl styrene, divinyl benzene and the like.
  • Other vinyl compounds include triallyl isocyanurate, trimethallyl isocyanurate, bisallyl nadiimide and the like.
  • the heat resistance of the resulting cured product tends to be further improved.
  • the content of the compound (D) having an ethylenically unsaturated group other than the component (C) is not particularly limited, but from the viewpoint of improving developability in the resin composition.
  • the total content of 100 parts by mass of component (A), component (C) and component (D) is preferably 0.5 parts by mass or more, more preferably 1.0 part by mass or more, More preferably, it is 1.5 parts by mass or more.
  • the content of the compound (D) is not particularly limited. However, from the viewpoint of improving the developability, the content of the compound (D) is 0.1% with respect to 100 parts by mass of the resin solid content in the resin composition. It is preferably 5 parts by mass or more, more preferably 1.0 part by mass or more, still more preferably 1.5 parts by mass or more, still more preferably 5.0 parts by mass or more, Most preferably, it is 10 parts by mass or more. Further, from the viewpoint of improving the heat resistance of the cured product, it is preferably 90 parts by mass or less, more preferably 70 parts by mass or less, with respect to 100 parts by mass of the resin solid content in the resin composition. 50 parts by mass or less, more preferably 25 parts by mass or less, and most preferably 20 parts by mass or less.
  • a maleimide compound (E) (also referred to as component (E)) can be used.
  • the maleimide compound (E) is described in detail below.
  • the maleimide compound (E) used in the present embodiment is not particularly limited as long as it is a compound having one or more maleimide groups in the molecule.
  • Specific examples thereof include, for example, N-phenylmaleimide, N-hydroxyphenylmaleimide, bis (4-maleimidophenyl) methane, 2,2-bis ⁇ 4- (4-maleimidophenoxy) -phenyl ⁇ propane, 4,4 -Diphenylmethane bismaleimide, bis (3,5-dimethyl-4-maleimidophenyl) methane, bis (3-ethyl-5-methyl-4-maleimidophenyl) methane, bis (3,5-diethyl-4-maleimidophenyl) Methane, phenylmethanemaleimide, o-phenylene bismaleimide, m-phenylene bismaleimide, p-phenylene bismaleimide, o-phenylene biscitraconimide, m-phen
  • novolac maleimide compounds and biphenylaralkyl maleimide compounds are particularly preferred.
  • a maleimide compound represented by the following formula (7) and a maleimide compound represented by the following formula (8) are preferred, and the following formula (7)
  • the maleimide compound represented by these is more preferable.
  • a commercially available product can be used as the maleimide compound represented by the following formula (7), and examples thereof include BMI-2300 (manufactured by Daiwa Kasei Kogyo Co., Ltd.).
  • maleimide compound represented by the following formula (8) examples thereof include MIR-3000 (manufactured by Nippon Kayaku Co., Ltd.). These maleimide compounds (C) can be used singly or in appropriate combination of two or more.
  • each of R 5 independently represents a hydrogen atom or a methyl group.
  • N 1 represents an integer of 1 or more, preferably an integer of 1 to 10, more preferably 1) Represents an integer of ⁇ 5).
  • each of R 6 independently represents a hydrogen atom or a methyl group.
  • N 2 represents an integer of 1 or more, preferably an integer of 1 to 5).
  • the content of the maleimide compound (E) in the resin composition of the present embodiment is not particularly limited, but from the viewpoint of sufficiently curing the resin composition and improving heat resistance, the component (A) in the resin composition.
  • the total content of component (C) and component (D) is preferably 0.01 parts by mass or more, more preferably 0.02 parts by mass or more, and 0.03 parts by mass with respect to 100 parts by mass. More preferably, the above is used.
  • the content (E) of the maleimide compound is not particularly limited, and is preferably 0.01 to 50 parts by mass, more preferably 100 parts by mass of the resin solid content. Is 0.02 parts by mass to 45 parts by mass, more preferably 0.03 parts by mass to 20 parts by mass, still more preferably 0.1 parts by mass to 10 parts by mass, and most preferably 1 part by mass. ⁇ 7 parts by mass.
  • the content of the maleimide compound is within the above range, the heat resistance of the cured product tends to be further improved.
  • a filler (F) (also referred to as component (F)) can be used in combination in order to improve various properties such as coating properties and heat resistance.
  • the filler (F) used in the present embodiment is not particularly limited as long as it has insulating properties.
  • silica for example, natural silica, fused silica, amorphous silica, hollow silica, etc.
  • an aluminum compound for example, boehmite
  • magnesium compounds eg, magnesium oxide, magnesium hydroxide, etc.
  • calcium compounds eg, calcium carbonate, etc.
  • molybdenum compounds eg, molybdenum oxide, zinc molybdate, etc.
  • barium compounds eg, barium sulfate, etc.
  • Barium silicate, etc. Barium silicate, etc.
  • Silicone powder Fluororesin filler, C Tan resin filler, an acrylic resin-based filler, polyethylene fillers, such as styrene-butadiene rubber and silicone rubber.
  • polyethylene fillers such as styrene-butadiene rubber and silicone rubber.
  • silica boehmite, barium sulfate, silicone powder, fluorine resin filler, urethane resin filler, acrylic resin filler, polyethylene filler, styrene / butadiene rubber and silicone rubber.
  • These fillers (F) may be surface-treated with a silane coupling agent described later.
  • silica is preferable and fused silica is particularly preferable from the viewpoint of improving the heat resistance of the cured product and obtaining good coating properties.
  • Specific examples of silica include SFP-130MC manufactured by Denka Corporation, SC2050-MB, SC1050-MLE, YA010C-MFN, YA050C-MJA manufactured by Admatechs Corporation.
  • These fillers (F) can be used singly or in appropriate combination of two or more.
  • the content of the filler (F) is not particularly limited, but from the viewpoint of improving the heat resistance of the cured product, the resin solid content in the resin composition is 100 parts by mass. It is preferably 5 parts by mass or more, more preferably 10 parts by mass or more, and still more preferably 20 parts by mass or more. Further, from the viewpoint of improving the developability of the resin composition, it is preferably 400 parts by mass or less, more preferably 350 parts by mass or less, with respect to 100 parts by mass of the resin solid content in the resin composition. Preferably, it is more preferably 300 parts by mass or less, still more preferably 200 parts by mass or less, and most preferably 100 parts by mass or less.
  • silane coupling agent and wetting and dispersing agent In the resin composition of the present embodiment, a silane coupling agent and / or a wet dispersant may be used in combination in order to improve the dispersibility of the filler, the polymer and / or resin, and the adhesive strength between the filler. Is possible.
  • These silane coupling agents are not particularly limited as long as they are silane coupling agents generally used for inorganic surface treatment.
  • aminosilanes such as ⁇ -aminopropyltriethoxysilane and N- ⁇ - (aminoethyl) - ⁇ -aminopropyltrimethoxysilane
  • epoxysilanes such as ⁇ -glycidoxypropyltrimethoxysilane
  • Acrylic silanes such as ⁇ -acryloxypropyltrimethoxysilane
  • cationic silanes such as N- ⁇ - (N-vinylbenzylaminoethyl) - ⁇ -aminopropyltrimethoxysilane hydrochloride
  • phenylsilane silane cups A ring agent is mentioned.
  • the content of the silane coupling agent is not particularly limited, but is usually 0.1 to 10 parts by mass with respect to 100 parts by mass of the resin composition.
  • the wetting and dispersing agent is not particularly limited as long as it is a dispersion stabilizer used for coatings. Specific examples include wet dispersing agents such as DISPERBYK (registered trademark) -110, 111, 118, 180, 161, BYK (registered trademark) -W996, W9010, and W903 manufactured by Big Chemie Japan Co., Ltd. . These wetting and dispersing agents can be used singly or in appropriate combination of two or more.
  • the content of the wetting and dispersing agent is not particularly limited, but is usually 0.1 to 10 parts by mass with respect to 100 parts by mass of the resin composition.
  • One or more compounds selected from the group consisting of a cyanate ester compound, a phenol resin, an oxetane resin, a benzoxazine compound and an epoxy resin different from the biphenylaralkyl type epoxy resin (A) represented by (1) above ( G) >
  • the compound (G) (also referred to as component (G)) used in the present embodiment is cured, which is required in the field where the resin composition is used, in addition to the copper plating adhesion obtained by using the component (A).
  • Various kinds of materials can be used according to the properties of the cured product such as flame retardancy, heat resistance, and thermal expansion properties.
  • a cyanate ester compound, a benzoxazine compound, and the like can be used, and a phenol resin, an oxetane resin, and the like can also be used.
  • cyanate ester compound is used together with biphenyl aralkyl type epoxy resin (A), photocuring initiator (B), compound (C) and compound (D), heat resistance (glass transition temperature), low thermal expansion, plating adhesion A resin composition having excellent properties and the like can be obtained.
  • it is preferable to use a cyanate ester compound in combination with a maleimide compound because a resin composition having better plating adhesion can be obtained.
  • an epoxy resin different from the epoxy resin (A) is used together with the biphenyl aralkyl type epoxy resin (A) represented by the above (1), a resin composition excellent in developability and plating adhesion can be obtained. .
  • the cyanate ester compound is not particularly limited as long as it is a resin having in its molecule an aromatic moiety substituted with at least one cyanate group (cyanate ester group).
  • Ar 1 represents a single bond of a benzene ring, a naphthalene ring or two benzene rings. When there are a plurality, they may be the same or different.
  • Each Ra is independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms, an alkoxyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 6 carbon atoms and an alkyl group having 6 to 12 carbon atoms.
  • a group to which an aryl group is bonded is shown.
  • the aromatic ring in Ra may have a substituent, and the substituent in Ar 1 and Ra can be selected at any position.
  • p represents the number of cyanato groups bonded to Ar 1 , and each independently represents an integer of 1 to 3.
  • q represents the number of Ra bonded to Ar 1, and is 4-p when Ar 1 is a benzene ring, 6-p when Ar 1 is a naphthalene ring, and 8-p when two benzene rings are a single bond.
  • . t represents an average number of repetitions and is an integer of 0 to 50, and the cyanate ester compound may be a mixture of compounds having different t.
  • a divalent organic group having 1 to 50 carbon atoms (a hydrogen atom may be substituted with a hetero atom), a divalent group having 1 to 10 nitrogen atoms.
  • An organic group eg, —N—R—N— (where R represents an organic group)
  • a carbonyl group (—CO—), a carboxy group (—C ( ⁇ O) O—), a carbonyl dioxide group ( —OC ( ⁇ O) O—), a sulfonyl group (—SO 2 —), a divalent sulfur atom or a divalent oxygen atom.
  • the alkyl group in Ra in the general formula (9) may have any of a linear or branched chain structure and a cyclic structure (for example, a cycloalkyl group).
  • the hydrogen atom in the alkyl group in the general formula (9) and the aryl group in Ra is substituted with a halogen atom such as a fluorine atom or a chlorine atom, an alkoxyl group such as a methoxy group or a phenoxy group, or a cyano group. Also good.
  • alkyl group examples include methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group, n-pentyl group, 1-ethylpropyl group, 2,2-dimethylpropyl group.
  • aryl group examples include phenyl group, xylyl group, mesityl group, naphthyl group, phenoxyphenyl group, ethylphenyl group, o-, m- or p-fluorophenyl group, dichlorophenyl group, dicyanophenyl group, trifluorophenyl. Group, methoxyphenyl group, and o-, m- or p-tolyl group.
  • alkoxyl group examples include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, an n-butoxy group, an isobutoxy group, and a tert-butoxy group.
  • divalent organic group having 1 to 50 carbon atoms in X in the general formula (9) include a methylene group, an ethylene group, a trimethylene group, a cyclopentylene group, a cyclohexylene group, a trimethylcyclohexylene group, and biphenylyl.
  • examples include a methylene group, a dimethylmethylene-phenylene-dimethylmethylene group, a fluorenediyl group, and a phthalidodiyl group.
  • the hydrogen atom in the divalent organic group may be substituted with a halogen atom such as a fluorine atom or a chlorine atom, an alkoxyl group such as a methoxy group or a phenoxy group, a cyano group, or the like.
  • a halogen atom such as a fluorine atom or a chlorine atom
  • an alkoxyl group such as a methoxy group or a phenoxy group
  • a cyano group or the like.
  • Examples of the divalent organic group having 1 to 10 nitrogen atoms in X of the general formula (9) include an imino group and a polyimide group.
  • examples of the organic group of X in the general formula (9) include those having a structure represented by the following general formula (10) or the following general formula (11).
  • Ar 2 represents a benzenetetrayl group, a naphthalenetetrayl group or a biphenyltetrayl group, and when u is 2 or more, they may be the same as or different from each other.
  • Rb, Rc, Rf, and Rg are each independently an aryl having at least one hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms, a trifluoromethyl group, or a phenolic hydroxy group. Indicates a group.
  • Rd and Re are each independently selected from any one of a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms, an alkoxyl group having 1 to 4 carbon atoms, and a hydroxy group.
  • . u represents an integer of 0 to 5.
  • Ar 3 represents a benzene tetracarboxylic yl group, naphthalene tetracarboxylic yl group or a biphenyl tetracarboxylic yl group, when v is 2 or more, may be the same or different from each other.
  • Ri and Rj are each independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms, a benzyl group, an alkoxyl group having 1 to 4 carbon atoms, a hydroxy group, a trifluoromethyl group, Or an aryl group substituted with at least one cyanato group.
  • v represents an integer of 0 to 5, but may be a mixture of compounds having different v.
  • examples of X in the general formula (9) include a divalent group represented by the following formula.
  • z represents an integer of 4 to 7.
  • Rk independently represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.
  • Specific examples of Ar 2 in the general formula (10) and Ar 3 in the general formula (11) include two carbon atoms represented by the general formula (10) or two oxygen atoms represented by the general formula (11).
  • a benzenetetrayl group bonded to the 1,4-position or the 1,3-position, the two carbon atoms or the two oxygen atoms are 4,4′-position, 2,4′-position, 2,2′-position, 2 , 3′-position, 3,3′-position, or 3,4′-position, and the above two carbon atoms or two oxygen atoms are in the 2,6-position, 1,5-position , 1,6-position, 1,8-position, 1,3-position, 1,4-position, or 2,7-position.
  • the alkyl group and aryl group in Ri and Rj in the general formula (11) have the same meanings as those in the general formula (9).
  • cyanato-substituted aromatic compound represented by the general formula (9) include cyanatobenzene, 1-cyanato-2-, 1-cyanato-3-, or 1-cyanato-4-methylbenzene, 1 -Cyanato-2-, 1-cyanato-3-, or 1-cyanato-4-methoxybenzene, 1-cyanato-2,3-, 1-cyanato-2,4-, 1-cyanato-2,5-, 1-cyanato-2,6-, 1-cyanato-3,4- or 1-cyanato-3,5-dimethylbenzene, cyanatoethylbenzene, cyanatobutylbenzene, cyanatooctylbenzene, cyanatononylbenzene, 2- (4-cyanaphenyl) -2-phenylpropane (cyanate of 4- ⁇ -cumylphenol), 1-cyanato-4-cyclohexylbenzene, 1-cyanato-4-vinylben 1-cyana
  • cyanate ester compounds can be used singly or in combination of two or more.
  • phenol novolac resins and cresol novolac resins include phenol novolac resins and cresol novolac resins (phenol, alkyl-substituted phenol or halogen-substituted phenol, formalin, A product obtained by reacting a formaldehyde compound such as paraformaldehyde in an acidic solution), a trisphenol novolak resin (a product obtained by reacting hydroxybenzaldehyde and phenol in the presence of an acidic catalyst), a fluorene novolac resin (9 , 9-bis (hydroxyaryl) fluorenes in the presence of an acidic catalyst), phenol aralkyl resin, cresol aralkyl resin, naphthol aralkyl resin and biphenyl aralkyl resin (known methods) More, Ar 4 - (CH 2 Y ) 2 (.
  • Ar 4 represents a phenyl group
  • Y represents a halogen atom and the same in this paragraph.
  • bishalogenomethyl compounds represented by the phenol compound An acid catalyst or non-catalyzed reaction, a bis (alkoxymethyl) compound represented by Ar 4 — (CH 2 OR) 2 and a phenol compound in the presence of an acidic catalyst, or A product obtained by reacting a bis (hydroxymethyl) compound represented by Ar 4 — (CH 2 OH) 2 and a phenol compound in the presence of an acidic catalyst, or an aromatic aldehyde compound, an aralkyl compound and a phenol compound.
  • phenol novolac type cyanate ester compound naphthol aralkyl type cyanate ester compound, biphenyl aralkyl type cyanate ester compound, naphthylene ether type cyanate ester compound, xylene resin type cyanate ester compound, adamantane skeleton type cyanate ester A compound is preferable, and a naphthol aralkyl-type cyanate ester compound is particularly preferable because excellent plating adhesion can be obtained while maintaining excellent heat resistance.
  • the method for producing these cyanate ester compounds is not particularly limited, and a known method can be used. Examples of such production methods include a method of obtaining or synthesizing a hydroxy group-containing compound having a desired skeleton, and modifying the hydroxy group by a known method to form cyanate. Examples of the method for cyanating a hydroxy group include the methods described in Ian Hamerton, “Chemistry and Technology of Cyanate Ester Resins,” “Blackie Academic & Professional”.
  • the cured resin using these cyanate ester compounds has excellent properties such as glass transition temperature, low thermal expansion, and plating adhesion.
  • the content of the cyanate ester compound is not particularly limited, but is preferably based on 100 parts by mass of the resin solid content from the viewpoint of obtaining superior plating adhesion and heat resistance. Is 0.01 part by weight to 50 parts by weight, more preferably 0.05 part by weight to 40 parts by weight, still more preferably 0.1 part by weight to 20 parts by weight, and still more preferably 0.2 parts by weight. Parts by mass to 5 parts by mass.
  • phenol resin a generally known resin can be used as long as it is a phenol resin having two or more hydroxyl groups in one molecule.
  • phenol resin a generally known resin can be used as long as it is a phenol resin having two or more hydroxyl groups in one molecule.
  • bisphenol A type phenol resin bisphenol E type phenol resin, bisphenol F type phenol resin, bisphenol S type phenol resin, phenol novolac resin, bisphenol A novolac type phenol resin, glycidyl ester type phenol resin, aralkyl novolac type phenol resin, biphenyl Aralkyl type phenolic resin, cresol novolac type phenolic resin, polyfunctional phenolic resin, naphthol resin, naphthol novolac resin, polyfunctional naphthol resin, anthracene type phenolic resin, naphthalene skeleton modified novolak type phenolic resin, phenolaralkyl type phenolic resin, naphthol aralkyl type
  • phenol resins biphenyl aralkyl type phenol resins, naphthol aralkyl type phenol resins, phosphorus-containing phenol resins, and hydroxyl group-containing silicone resins are preferable in terms of flame retardancy. These phenol resins can be used alone or in admixture of two or more.
  • the content of the phenolic resin is not particularly limited, and is preferably 0.1 to 50 parts by mass, more preferably 0.2 to 45 parts by mass with respect to 100 parts by mass of the resin solid content. .
  • the heat resistance tends to be further improved.
  • oxetane resin generally known oxetane resins can be used.
  • the content of the oxetane resin is not particularly limited, and is preferably 0.1 to 50 parts by mass, more preferably 0.2 to 45 parts by mass with respect to 100 parts by mass of the resin solid content. .
  • the heat resistance tends to be further improved.
  • benzoxazine compound generally known compounds can be used as long as they have two or more dihydrobenzoxazine rings in one molecule.
  • bisphenol A type benzoxazine BA-BXZ (trade name, manufactured by Konishi Chemical) bisphenol F type benzoxazine BF-BXZ (trade name, manufactured by Konishi Chemical), bisphenol S type benzoxazine BS-BXZ (trade name, manufactured by Konishi Chemical) ), Phenolphthalein type benzoxazine and the like, but not particularly limited.
  • BA-BXZ trade name, manufactured by Konishi Chemical
  • bisphenol F type benzoxazine BF-BXZ (trade name, manufactured by Konishi Chemical)
  • bisphenol S type benzoxazine BS-BXZ (trade name, manufactured by Konishi Chemical)
  • Phenolphthalein type benzoxazine and the like but not particularly limited. These can be used alone or in combination of two or more.
  • the content of the benzoxazine compound is not particularly limited, and is preferably 0.1 to 50 parts by mass, more preferably 0.2 to 45 parts by mass with respect to 100 parts by mass of the resin solid content. is there.
  • the content of the benzoxazine compound is within the above range, the heat resistance tends to be further improved.
  • an epoxy resin different from the biphenyl aralkyl type epoxy resin (A) represented by (1) can be used in combination.
  • an epoxy resin is not particularly limited as long as it is a compound having two or more epoxy groups in one molecule.
  • Specific examples thereof include, for example, bisphenol A type epoxy resin, bisphenol E type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bisphenol A novolac type epoxy resin, biphenyl type epoxy resin, phenol novolac type epoxy resin, Cresol novolak type epoxy resin, xylene novolak type epoxy resin, polyfunctional phenol type epoxy resin, naphthalene type epoxy resin, naphthalene skeleton modified novolak type epoxy resin, naphthylene ether type epoxy resin, phenol aralkyl type epoxy resin, anthracene type epoxy resin, Trifunctional phenolic epoxy resin, tetrafunctional phenolic epoxy resin, triglycidyl isocyanurate, glycidyl ester epoxy resin, alicyclic Poxy resin, dicyclopentadiene novolak type epoxy resin, biphenyl novolak type epoxy resin, phenol aralkyl novolak type epoxy resin, naphthol aralkyl novolak type epoxy resin
  • naphthalene type epoxy resin it is preferable that it is 1 or more types selected from the group which consists of a naphthylene ether type epoxy resin, a polyfunctional phenol type epoxy resin, and a naphthalene type epoxy resin, and a naphthalene type epoxy resin is more preferable.
  • the naphthalene type epoxy resin it is preferable to use a resin represented by the following formula (5) because developability and plating adhesion are further improved.
  • this epoxy resin a commercially available product can be used, and HP-4710 (trade name) manufactured by DIC Corporation is exemplified.
  • the naphthalene type epoxy resin represented by the following formula (5) has a low molecular weight and is multifunctional, and therefore has excellent solubility in a developer. Therefore, it is thought that the resin composition which is excellent also in developability can be obtained by using together with a biphenyl aralkyl type epoxy resin (A).
  • epoxy resins can be used singly or in appropriate combination of two or more.
  • the content of the epoxy resin is not particularly limited, but from the viewpoint of further improving developability, the epoxy resin (A), the epoxy resin (A), and the epoxy resin (A) with respect to 100 parts by mass of the resin solid content in the resin composition
  • the total amount with different epoxy resins is preferably 3 parts by mass or more, more preferably 5 parts by mass or more, still more preferably 10 parts by mass or more, and even more preferably 15 parts by mass or more. preferable.
  • the total of the epoxy resin (A) and the epoxy resin different from the epoxy resin (A) is preferably 50 parts by mass or less, more preferably 40 parts by mass or less, further preferably 30 parts by mass or less, and further preferably 28 parts by mass or less.
  • the ratio of the epoxy resin (A) to the epoxy resin different from the epoxy resin (A) is not particularly limited, but is preferably 1 to 10: 1 to 3 from the viewpoint of plating adhesion, and 2 to 4: 1. ⁇ 2 is more preferred.
  • thermosetting accelerator (H) In the resin composition of the present embodiment, a thermosetting accelerator (H) (also referred to as component (H)) can be used as long as the characteristics of the present embodiment are not impaired.
  • the thermosetting accelerator (H) used in the present embodiment is not particularly limited.
  • Organic peroxides such as azobisnitrile; N, N-dimethylbenzylamine, N, N-dimethylaniline, N, N-dimethyltoluidine, 2-N-ethylanilinoethanol, tri -Tertiary amines such as n-butylamine, pyridine, quinoline, N-methylmorpholine, triethanolamine, triethylenediamine, tetramethylbutanediamine, N-methylpiperidine; phenols such as phenol, xylenol, cresol, resorcin, catechol Class: Naphthenes Organometallic salts such as lead, lead stearate, zinc naphthenate, zinc octylate, tin oleate, dibutyl
  • imidazole compounds such as 2-ethyl-4-methylimidazole, 1,2-dimethylimidazole, 1-benzyl-2-phenylimidazole, and triphenylimidazole (TPIZ) are preferable from the viewpoint of heat resistance.
  • TPIZ triphenylimidazole
  • -4-Methylimidazole is more preferable because it has high reactivity with the biphenyl aralkyl type epoxy resin (A), the compound (C), and the compound (D), and more excellent heat resistance can be obtained.
  • thermosetting accelerators can be used singly or in appropriate combination of two or more.
  • the content of the thermosetting accelerator (H) is not particularly limited, but is usually 0.01 to 10 parts by mass with respect to 100 parts by mass of the resin solid content in the resin composition. And preferably 0.05 to 5 parts by mass.
  • the resin composition of the present embodiment may contain a solvent as necessary.
  • a solvent for example, when an organic solvent is used, the viscosity at the time of preparing the resin composition can be adjusted.
  • the kind of solvent will not be specifically limited if it can melt
  • These organic solvents can be used alone or in combination of two or more.
  • thermosetting resins thermoplastic resins and oligomers thereof, elastomers, etc.
  • Flame retardant compound not mentioned so far; combined use of additives and the like is also possible. These are not particularly limited as long as they are generally used.
  • flame retardant compounds include nitrogen-containing compounds such as melamine and benzoguanamine, oxazine ring-containing compounds, phosphate compounds of phosphorus compounds, aromatic condensed phosphate esters, and halogen-containing condensed phosphate esters.
  • Additives include UV absorbers, antioxidants, fluorescent brighteners, photosensitizers, dyes, pigments, thickeners, lubricants, antifoaming agents, surface conditioners, brighteners, polymerization inhibitors, etc. It is done. These components can be used alone or in appropriate combination of two or more. In the resin composition of the present embodiment, the content of other components is not particularly limited, but is usually 0.1 to 10 parts by mass with respect to 100 parts by mass of the resin composition.
  • the resin composition of this embodiment includes a biphenyl aralkyl type epoxy resin (A) represented by the formula (1), a photocuring initiator (B), a compound (C) represented by the formula (2), and ( C) Prepared by appropriately mixing the compound (D) having an ethylenically unsaturated group other than the component and, if necessary, the maleimide compound (E), the filler (F), the compound (G) and other components. Is done.
  • the resin composition of this embodiment can be used suitably as a varnish at the time of producing the resin sheet of this invention mentioned later.
  • the method for producing the resin composition of the present embodiment is not particularly limited, and examples thereof include a method in which the above-described components are sequentially mixed in a solvent and sufficiently stirred.
  • a known process for uniformly dissolving or dispersing each component can be performed as necessary.
  • the dispersibility of the inorganic filler (G) in the resin composition can be improved by performing the stirring and dispersing treatment using a stirring tank provided with a stirrer having an appropriate stirring ability.
  • the stirring, mixing, and kneading processes described above are, for example, a stirring device for dispersion such as an ultrasonic homogenizer, a device for mixing such as a three-roll, ball mill, bead mill, and sand mill, or a revolving or rotating type.
  • an organic solvent can be used as needed.
  • the type of the organic solvent is not particularly limited as long as it can dissolve the resin in the resin composition, and specific examples thereof are as described above.
  • the resin composition of the present embodiment can be used for applications where an insulating resin composition is required, and is not particularly limited, but includes an insulating resin sheet such as a photosensitive film, a photosensitive film with a support, and a prepreg. It can be used for applications such as circuit boards (for laminated boards, multilayer printed wiring boards, etc.), solder resists, underfill materials, die bonding materials, semiconductor encapsulants, hole-filling resins, component-filling resins, and the like. Especially, it can be conveniently used as a resin composition for insulating layers of a multilayer printed wiring board or a solder resist.
  • the resin sheet of the present embodiment includes a support and a resin composition layer formed on the surface of the support and including the resin composition of the present embodiment. It is the resin sheet with a support body apply
  • the resin sheet can be produced by applying the resin composition on a support and drying it.
  • the support used in the resin sheet of the present embodiment is not particularly limited, but a known one can be used, and a resin film is preferable.
  • the resin film include polyimide film, polyamide film, polyester film, polyethylene terephthalate (PET) film, polybutylene terephthalate (PBT) film, polypropylene (PP) film, polyethylene (PE) film, polyethylene naphthalate film, and polyvinyl alcohol.
  • resin films such as films and triacetyl acetate films. Among these, a PET film is preferable.
  • the resin film having a release agent coated on the surface thereof can be suitably used in order to facilitate peeling from the resin composition layer.
  • the thickness of the resin film is preferably in the range of 5 ⁇ m to 100 ⁇ m, and more preferably in the range of 10 ⁇ m to 50 ⁇ m. If the thickness is less than 5 ⁇ m, the support tends to be broken when the support is peeled off before development, and if the thickness exceeds 100 ⁇ m, the resolution when exposed from the support tends to decrease. is there.
  • the resin film has excellent transparency.
  • the resin composition layer may be protected with a protective film.
  • a protective film By protecting the resin composition layer side with a protective film, it is possible to prevent adhesion or scratches of dust or the like to the surface of the resin composition layer.
  • a protective film a film made of the same material as the above resin film can be used.
  • the thickness of the protective film is not particularly limited, but is preferably in the range of 1 ⁇ m to 50 ⁇ m, and more preferably in the range of 5 ⁇ m to 40 ⁇ m. When the thickness is less than 1 ⁇ m, the handleability of the protective film tends to be lowered, and when it exceeds 50 ⁇ m, the inexpensiveness tends to be inferior.
  • the protective film preferably has a smaller adhesive force between the resin composition layer and the protective film than the adhesive force between the resin composition layer and the support.
  • a resin sheet is manufactured by apply
  • the method of doing is mentioned.
  • the coating can be performed by a known method using, for example, a roll coater, comma coater, gravure coater, die coater, bar coater, lip coater, knife coater, squeeze coater, or the like.
  • the drying can be performed, for example, by a method of heating in a dryer at 60 to 200 ° C. for 1 to 60 minutes.
  • the amount of the remaining organic solvent in the resin composition layer is preferably 5% by mass or less with respect to the total mass of the resin composition layer from the viewpoint of preventing diffusion of the organic solvent in the subsequent step.
  • the thickness of the resin composition layer with respect to the support is preferably 1.0 ⁇ m or more in terms of the resin composition layer thickness of the resin sheet from the viewpoint of improving the handleability. Further, from the viewpoint of improving the transmittance and improving the developability, the thickness is preferably 300 ⁇ m or less.
  • the resin sheet of this embodiment can be used as an interlayer insulating layer of a multilayer printed wiring board.
  • the multilayer printed wiring board of the present embodiment includes an interlayer insulating layer containing the resin composition of the present embodiment, and can be obtained, for example, by stacking and curing one or more of the above-described resin sheets. Specifically, it can be produced by the following method.
  • the resin composition layer side of the resin sheet of this embodiment is laminated on one side or both sides of a circuit board using a vacuum laminator.
  • the circuit board include a glass epoxy board, a metal board, a ceramic board, a silicon board, a semiconductor sealing resin board, a polyester board, a polyimide board, a BT resin board, and a thermosetting polyphenylene ether board.
  • the circuit board refers to a board on which a conductor layer (circuit) patterned on one or both sides of the board is formed.
  • a substrate having a conductor layer (circuit) in which one or both surfaces of the outermost layer of the printed wiring board are patterned is also here. It is included in the circuit board.
  • the surface of the conductor layer may be previously roughened by blackening, copper etching, or the like.
  • the laminating step when the resin sheet has a protective film, the protective film is peeled and removed, and then the resin sheet and the circuit board are preheated as necessary, while the resin composition layer is pressed and heated. Crimp to circuit board.
  • a method of laminating on a circuit board under reduced pressure by a vacuum laminating method is suitably used.
  • the conditions for the laminating step are not particularly limited.
  • the pressure bonding temperature (laminating temperature) is preferably 50 ° C. to 140 ° C.
  • the pressure bonding pressure is preferably 1 kgf / cm 2 to 15 kgf / cm 2
  • the pressure bonding time Is preferably 5 seconds to 300 seconds
  • lamination is performed under reduced pressure so that the air pressure is 20 mmHg or less.
  • the laminating step may be a batch type or a continuous type using a roll.
  • the vacuum laminating method can be performed using a commercially available vacuum laminator. As a commercially available vacuum laminator, for example, a 2-stage build-up laminator manufactured by Nikko Materials Co., Ltd. can be exemplified.
  • an exposure process is performed in which a predetermined portion of the resin composition layer is irradiated with active energy rays to cure the resin composition layer of the irradiated portion.
  • the active energy ray may be irradiated through a mask pattern or a direct drawing method in which an active energy ray is directly irradiated.
  • Examples of active energy rays include ultraviolet rays, visible rays, electron beams, X-rays and the like, and ultraviolet rays are particularly preferable.
  • the irradiation amount of ultraviolet rays is about 10 mJ / cm 2 to 1000 mJ / cm 2 .
  • the support body exists on a resin composition layer, you may expose from a support body and may expose after a support body peels.
  • the developer is not particularly limited as long as it selectively elutes an unexposed portion, but a developer such as an alkaline aqueous solution, an aqueous developer, or an organic solvent is used. .
  • a development step using an alkaline aqueous solution is particularly preferable.
  • These developers can be used alone or in combination of two or more.
  • a developing method it can carry out by well-known methods, such as spraying, rocking immersion, brushing, and scraping, for example.
  • the alkaline aqueous solution used as the developer is not particularly limited.
  • potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, 4-sodium borate, ammonia And amines are examples of potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, 4-sodium borate, ammonia And amines.
  • the concentration of the alkaline aqueous solution is preferably 0.1% by mass to 60% by mass with respect to the total amount of the developer. Moreover, the temperature of aqueous alkali solution can be adjusted according to developability. Furthermore, these aqueous alkali solutions can be used alone or in combination of two or more.
  • development methods include a dip method, a paddle method, a spray method, a high-pressure spray method, brushing, and slapping, and the high-pressure spray method is suitable for improving the resolution.
  • the spray pressure when the spray method is employed is preferably 0.02 MPa to 0.5 MPa.
  • a post-bake step is performed to form an insulating layer (cured product).
  • the post-bake process include an ultraviolet irradiation process using a high-pressure mercury lamp and a heating process using a clean oven, and these can be used in combination. Case of ultraviolet irradiation can adjust its dose optionally, the irradiation can be carried out, for example 0.05J / cm 2 ⁇ 10J / cm 2 of about dose.
  • the heating conditions may be appropriately selected according to the type and content of the resin component in the resin composition, but preferably 150 ° C. to 220 ° C. for 20 minutes to 180 minutes, more preferably 160 ° C. It is selected in the range of 30 minutes to 150 minutes at ⁇ 200 ° C.
  • a conductor layer is formed on the surface of the insulating layer by dry plating or wet plating.
  • dry plating known methods such as vapor deposition, sputtering, and ion plating can be used.
  • vapor deposition method vacuum vapor deposition method
  • a metal film can be formed on the insulating layer by placing the support in a vacuum vessel and evaporating the metal by heating.
  • sputtering method for example, the support is placed in a vacuum vessel, an inert gas such as argon is introduced, a direct current voltage is applied, the ionized inert gas is made to collide with the target metal, and the struck metal is used.
  • a metal film can be formed on the insulating layer.
  • the surface of the insulating layer is roughened by performing swelling treatment with a swelling liquid, roughening treatment with an oxidizing agent, and neutralization treatment with a neutralizing liquid in this order.
  • the swelling treatment with the swelling liquid is performed by immersing the insulating layer in the swelling liquid at 50 to 80 ° C. for 1 to 20 minutes.
  • the swelling liquid include an alkaline solution, and examples of the alkaline solution include a sodium hydroxide solution and a potassium hydroxide solution.
  • Examples of commercially available swelling liquids include Updes (registered trademark) MDS-37 manufactured by Uemura Kogyo Co., Ltd.
  • the roughening treatment with an oxidizing agent is performed by immersing the insulating layer in an oxidizing agent solution at 60 to 80 ° C. for 5 to 30 minutes.
  • the oxidizing agent include alkaline permanganate solution in which potassium permanganate and sodium permanganate are dissolved in an aqueous solution of sodium hydroxide, dichromate, ozone, hydrogen peroxide / sulfuric acid, nitric acid and the like. it can.
  • the concentration of permanganate in the alkaline permanganate solution is preferably 5% by mass to 10% by mass.
  • Examples of commercially available oxidizing agents include alkaline permanganate solutions such as Updes (registered trademark) MDE-40 and Updes (registered trademark) ELC-SH manufactured by Uemura Kogyo Co., Ltd.
  • the neutralization treatment with the neutralizing solution is performed by immersing in the neutralizing solution at 30 to 50 ° C. for 1 to 10 minutes.
  • the neutralizing solution is preferably an acidic aqueous solution, and a commercially available product is Updes (registered trademark) MDN-62 manufactured by Uemura Kogyo Co., Ltd.
  • a conductor layer is formed by combining electroless plating and electrolytic plating.
  • a plating resist having a pattern opposite to that of the conductor layer can be formed, and the conductor layer can be formed only by electroless plating.
  • a pattern formation method thereafter for example, a subtractive method, a semi-additive method, or the like can be used.
  • the semiconductor device of this embodiment includes an interlayer insulating layer containing the resin composition of this embodiment, and can be specifically manufactured by the following method.
  • a semiconductor device can be manufactured by mounting a semiconductor chip in a conductive portion of the multilayer printed wiring board of the present embodiment.
  • the conduction location is a location for transmitting an electrical signal in the multilayer printed wiring board, and the location may be the surface or an embedded location.
  • the semiconductor chip is not particularly limited as long as it is an electric circuit element made of a semiconductor.
  • the semiconductor chip mounting method for manufacturing the semiconductor device of the present embodiment is not particularly limited as long as the semiconductor chip functions effectively.
  • the wire bonding mounting method, the flip chip mounting method, and the bump are used. Examples include a mounting method using a none buildup layer (BBUL), a mounting method using an anisotropic conductive film (ACF), and a mounting method using a non-conductive film (NCF).
  • BBUL none buildup layer
  • ACF anisotropic conductive film
  • NCF non-conductive film
  • a semiconductor device can be manufactured by laminating the resin sheet of this embodiment on a semiconductor chip. After lamination, it can be produced by using the same method as the above multilayer printed wiring board.
  • the reaction was completed by stirring at the same temperature for 30 minutes. Thereafter, the reaction solution was allowed to stand to separate an organic phase and an aqueous phase.
  • the organic phase obtained was washed 5 times with 1300 g of water.
  • the electric conductivity of the waste water in the fifth washing with water was 5 ⁇ S / cm, and it was confirmed that the ionic compounds that could be removed were sufficiently removed by washing with water.
  • the organic phase after washing with water was concentrated under reduced pressure, and finally concentrated to dryness at 90 ° C. for 1 hour to obtain 331 g of the desired naphthol aralkyl-type cyanate ester compound (SNCN) (orange viscous product).
  • the obtained SNCN had a mass average molecular weight Mw of 600. Further, the IR spectrum of SNCN showed absorption of 2250 cm ⁇ 1 (cyanate group) and did not show absorption of a hydroxy group.
  • Example 1 (Production of resin composition and resin sheet)
  • a biphenyl aralkyl type epoxy resin (n in the formula (1) is 1 to 3. NC3000L (trade name), Nippon Kayaku Co., Ltd.
  • the KAYARAD (registered trademark) ZCR-6007H is a mixture containing at least one of the compound (C1) and the compounds (C2) to (C5).
  • the obtained laminate is subjected to an exposure step of irradiating with 200 mJ / cm 2 of ultraviolet light, peeled off the support, developed with a 1% by mass sodium carbonate aqueous solution, and further irradiated with 1000 mJ / cm 2 of ultraviolet light. Then, a post-baking process in which heat treatment was performed at 180 ° C. for 120 minutes was performed, and then a laminate for evaluation was obtained.
  • the resin sheet is irradiated with 200 mJ / cm 2 of ultraviolet light, further subjected to an exposure process of irradiating 1000 mJ / cm 2 of ultraviolet light, subjected to a post-baking process of heating at 180 ° C. for 120 minutes, and then the support is peeled off.
  • the cured product was evaluated.
  • Example 2 As component (A), 21.9 parts by mass of biphenyl aralkyl type epoxy resin (NC3000L (trade name), manufactured by Nippon Kayaku Co., Ltd.) and as photocuring initiator (B), 2-benzyl-2-dimethylamino- 6.5 parts by mass of 1- (4-morpholinophenyl) -butanone-1 (Irgacure (registered trademark) 369, manufactured by BASF Japan Ltd.), as a compound (C), a PGMEA solution of a TrisP-PA epoxy acrylate compound ( KAYARAD (registered trademark) ZCR-6007H, nonvolatile content 65% by mass, acid value: 70 mgKOH / g, manufactured by Nippon Kayaku Co., Ltd.) 77.5 parts by mass (50.4 parts by mass in terms of nonvolatile content), (C) As a compound (D) having an ethylenically unsaturated group other than the components, dipentaerythritol
  • Example 3 As component (A), 21.9 parts by mass of biphenyl aralkyl type epoxy resin (NC3000L (trade name), manufactured by Nippon Kayaku Co., Ltd.) and 2,4,6-trimethylbenzoyl- as photocuring initiator (B) 6.5 parts by mass of diphenyl-phosphine oxide (Irgacure (registered trademark) 819, manufactured by BASF Japan KK), as a compound (C), PGMEA solution of TrisP-PA epoxy acrylate compound (KAYARAD (registered trademark) ZCR-6007H) , 65% by mass of non-volatile content, acid value: 70 mg KOH / g, manufactured by Nippon Kayaku Co., Ltd.) 77.5 parts by mass (50.4 parts by mass in terms of non-volatile content), ethylenically unsaturated groups other than component (C) Dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA, Japan)
  • Example 4 As component (A), biphenylaralkyl type epoxy resin (NC3000L (trade name), manufactured by Nippon Kayaku Co., Ltd.) 15.8 parts by mass, as component (G), naphthalene type epoxy resin (HP-4710 (trade name)) (Manufactured by DIC Corporation) 6.1 parts by mass, 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide (Irgacure (registered trademark) 819, BASF Japan Ltd.) as a photocuring initiator (B) (Product) 6.5 parts by mass, as a compound (C), PGMEA solution of TrisP-PA epoxy acrylate compound (KAYARAD (registered trademark) ZCR-6007H, nonvolatile content 65% by mass, acid value: 70 mgKOH / g, Nippon Kayaku ( Co., Ltd.) 77.5 parts by mass (50.4 parts by mass in terms of nonvolatile content), having an ethylenically unsaturated
  • Example 5 As component (A), biphenylaralkyl type epoxy resin (NC3000L (trade name), manufactured by Nippon Kayaku Co., Ltd.) 15.8 parts by mass, as component (G), naphthalene type epoxy resin (HP-4710 (trade name)) (Manufactured by DIC Corporation) 6.1 parts by mass, 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide (Irgacure (registered trademark) 819, BASF Japan Ltd.) as a photocuring initiator (B) (Product) 6.5 parts by mass, as a compound (C), PGMEA solution of TrisP-PA epoxy acrylate compound (KAYARAD (registered trademark) ZCR-6007H, nonvolatile content 65% by mass, acid value: 70 mgKOH / g, Nippon Kayaku ( Co., Ltd.) 77.5 parts by mass (50.4 parts by mass in terms of nonvolatile content), having an ethylenically unsaturated
  • KAYARAD registered trademark ZFR-1553H does not have the structure represented by the above formula (2).
  • Example 2 A varnish was prepared in the same manner as in Example 1 except that 22.4 parts by mass of a naphthalene type epoxy resin (HP-4710 (trade name), manufactured by DIC Corporation) was used instead of the component (A). A sheet, a laminate for evaluation, and a cured product for evaluation were obtained.
  • a naphthalene type epoxy resin HP-4710 (trade name), manufactured by DIC Corporation
  • Example 3 A varnish was prepared in the same manner as in Example 1 except that 22.4 parts by mass of a polyfunctional epoxy resin (1031S (trade name), manufactured by Mitsubishi Chemical Corporation) was used instead of the component (A), and the resin A sheet, a laminate for evaluation, and a cured product for evaluation were obtained.
  • a polyfunctional epoxy resin 1031S (trade name), manufactured by Mitsubishi Chemical Corporation
  • the multifunctional epoxy resin (1031S (trade name), manufactured by Mitsubishi Chemical Corporation) has the following structural formula (12).
  • a finger was lightly pressed against the resin surface edge of each A4-sized resin sheet with a support, and the degree of sticking to the finger was evaluated according to the following criteria.
  • Sticking to the finger is hardly recognized. Although the edge part of the resin sheet with a support body sticks to a finger
  • X Sticking to the finger is recognized. The edge part of the resin sheet with a support body sticks to a finger
  • ⁇ Developability> The development surface of the evaluation laminate was visually measured for the time from the start of the development process until the residue disappeared, and then observed with a scanning electron microscope (SEM) (magnification 1000 times). Evaluated by criteria.
  • SEM scanning electron microscope
  • Double-circle The time until the visual development residue disappears is 50 sec or less, and there is no development residue in the range of 30 mm square even after SEM observation, and the developability is very excellent.
  • Although the time until the visual development residue disappears exceeds 50 sec, there is no development residue in the 30 mm square area even after SEM observation, and the developability is excellent.
  • X There is a development residue in the range of 30 mm square, and the developability is inferior.
  • Examples 1 to 5 have excellent plating adhesion.
  • Examples 2 to 5 have good heat resistance and plating adhesion, and Examples 3 to 5 are particularly excellent in heat resistance and plating adhesion. Furthermore, Examples 4 and 5 are excellent in developability.
  • Comparative Examples 1 to 3 have insufficient plating adhesion. Therefore, according to the present invention, a resin composition excellent in plating adhesion, heat resistance and developability, a resin sheet using the resin composition, a multilayer printed wiring board, and a semiconductor device can be obtained.

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Abstract

Provided is a resin composition that, when used in a multilayer printed circuit board, exhibits superior heat resistance and coating, and exhibits superior plating adhesion and developability. Also provided are a resin sheet with a support body, and a multilayer printed circuit board and a semiconductor device that use said resin composition and said resin sheet with a support body. The resin composition includes a biphenyl aralkyl-type epoxy resin (A) expressed by formula (1), a photocuring initiator (B), a compound (C) expressed by formula (2), and a compound (D) that has an ethylenically unsaturated group other than the (C) component.

Description

樹脂組成物、樹脂シート、多層プリント配線板及び半導体装置Resin composition, resin sheet, multilayer printed wiring board, and semiconductor device
 本発明は、樹脂組成物、それを用いた樹脂シート、多層プリント配線板及び半導体装置に関する。 The present invention relates to a resin composition, a resin sheet using the resin composition, a multilayer printed wiring board, and a semiconductor device.
 多層プリント配線板の小型化、高密度化により、多層プリント配線板に用いられる積層板を薄型化する検討が盛んに行なわれている。薄型化に伴い、絶縁層についても薄型化が求められ、ガラスクロスを含まない樹脂シートが求められている。絶縁層の材料となる樹脂組成物は熱硬化性樹脂が主流であり、絶縁層間で導通を得るための穴あけは一般的にレーザー加工にて行われている。また、熱硬化性樹脂を用いた樹脂シートでは、絶縁層上に導体回路を形成する方法として、銅めっきで導体回路を形成する方法が一般的である。 2. Description of the Related Art Thinning of a laminated board used for a multilayer printed wiring board has been actively conducted by downsizing and increasing the density of the multilayer printed wiring board. As the thickness is reduced, the insulating layer is also required to be reduced in thickness, and a resin sheet that does not include glass cloth is required. A thermosetting resin is mainly used as a resin composition as a material for the insulating layer, and a hole for obtaining conduction between insulating layers is generally performed by laser processing. Moreover, in the resin sheet using a thermosetting resin, the method of forming a conductor circuit by copper plating is common as a method of forming a conductor circuit on an insulating layer.
 一方、レーザー加工による穴あけは、穴数が多い高密度基板になるほど加工時間が長くなるという問題がある。そのため、近年は光線等により硬化し、現像で溶解する樹脂組成物を用いることにより、現像工程で一括穴あけ加工することが可能となる樹脂シートが求められている。さらに、絶縁層上に銅めっきで導体回路を形成するため、導体回路が剥がれないよう絶縁層に対して銅めっき密着性が高いことが求められている。 On the other hand, the drilling by laser processing has a problem that the processing time becomes longer as the number of holes becomes higher. Therefore, in recent years, there has been a demand for a resin sheet that can be collectively punched in a development process by using a resin composition that is cured by light or the like and dissolved by development. Furthermore, since the conductor circuit is formed on the insulating layer by copper plating, it is required that the copper plating adherence to the insulating layer is high so that the conductor circuit is not peeled off.
 このような積層板や樹脂シートに用いられる樹脂組成物においては、アルカリ現像タイプが主流であり、現像を可能にするために酸無水物基やカルボキシル基含有のアクリレートが使用されている。加えて、銅めっき密着性のためエポキシ樹脂が使用されている。たとえば、特許文献1には、ビスフェノール型エポキシ樹脂と(メタ)アクリル酸とを反応させた後、酸無水物を反応させて得られるカルボキシル変性エポキシ(メタ)アクリレート樹脂と、ビフェニル型エポキシ樹脂と、光重合開始剤と、希釈剤とを含有する感光性熱硬化型樹脂組成物が記載されている。また、特許文献2には、エポキシ樹脂と、硬化剤と、シリカ粒子がシランカップリング剤により表面処理されているシリカ成分とを含有し、硬化促進剤を含有しないか、又は前記エポキシ樹脂及び前記硬化剤の合計100重量部に対して硬化促進剤を3.5重量部以下の含有量で含有し、前記シリカ粒子の平均粒子径が1μm以下であり、前記シリカ成分における前記シリカ粒子1g当たりの前記シランカップリング剤の表面処理量B(g)が、式(X)(C(g)/シリカ粒子1g=[シリカ粒子の比表面積(m2/g)/シランカップリング剤の最小被覆面積(m2/g)]・・・式(X))により算出されるシリカ粒子1g当たりの値C(g)に対して10~80%の範囲内にある、エポキシ樹脂組成物が開示されている。 In resin compositions used for such laminates and resin sheets, the alkali development type is the mainstream, and acid anhydride group- or carboxyl group-containing acrylates are used to enable development. In addition, epoxy resin is used for copper plating adhesion. For example, in Patent Document 1, a carboxyl-modified epoxy (meth) acrylate resin obtained by reacting a bisphenol-type epoxy resin with (meth) acrylic acid and then reacting with an acid anhydride, a biphenyl-type epoxy resin, A photosensitive thermosetting resin composition containing a photopolymerization initiator and a diluent is described. Patent Document 2 contains an epoxy resin, a curing agent, and a silica component whose silica particles are surface-treated with a silane coupling agent, and does not contain a curing accelerator, or the epoxy resin and the above The curing accelerator is contained in a content of 3.5 parts by weight or less with respect to a total of 100 parts by weight of the curing agent, the average particle diameter of the silica particles is 1 μm or less, and the silica component per 1 g of the silica particles. The surface treatment amount B (g) of the silane coupling agent is the formula (X) (C (g) / silica particle 1 g = [specific surface area of silica particle (m 2 / g) / minimum coverage area of the silane coupling agent] (M 2 / g)]... An epoxy resin composition in the range of 10 to 80% with respect to the value C (g) per gram of silica particles calculated by the formula (X)) is disclosed. Yes.
特開2005-62450号公報Japanese Patent Laid-Open No. 2005-62450 特開2011-174082号公報JP 2011-174082 A
 しかしながら、従来のエポキシ樹脂を用いた硬化物では十分な物性が得られず、高い現像性を有しつつ、銅めっき密着性の高い保護膜、及び層間絶縁層の形成には限界があった。 However, a cured product using a conventional epoxy resin does not provide sufficient physical properties, and there is a limit to the formation of a protective film and an interlayer insulating layer having high developability and high copper plating adhesion.
 また、特許文献1に記載の樹脂組成物から得られる硬化物は、その用途はプリント配線板用のエッチングレジストやソルダーレジストに限られており、可とう性、耐熱性には優れるが層間絶縁層として用いるには銅めっき密着性が十分ではなかった。 Further, the cured product obtained from the resin composition described in Patent Document 1 is limited in use to an etching resist or a solder resist for printed wiring boards, and is excellent in flexibility and heat resistance, but is an interlayer insulating layer. As a result, the copper plating adhesion was not sufficient.
 特許文献2に記載の樹脂組成物から得られる硬化物では、銅めっき密着性に優れるものの、穴あけはレーザー加工に限るため、現像工程による一括穴あけができないものとなっている。 Although the cured product obtained from the resin composition described in Patent Document 2 is excellent in adhesion to copper plating, since drilling is limited to laser processing, batch drilling by a development process cannot be performed.
 そこで、本発明は、上記問題点に鑑みてなされたものであり、多層プリント配線板に用いた際に、塗膜性及び耐熱性に優れ、現像性、銅めっき密着性に優れる樹脂組成物、支持体付き樹脂シート、それらを用いた多層プリント配線板、半導体装置を提供することにある。 Therefore, the present invention has been made in view of the above problems, and when used in a multilayer printed wiring board, a resin composition having excellent coating properties and heat resistance, and excellent developability and copper plating adhesion, It is an object to provide a resin sheet with a support, a multilayer printed wiring board using them, and a semiconductor device.
 本発明者らは、下記式(1)で表されるビフェニルアラルキル型エポキシ樹脂(A)、光硬化開始剤(B)、下記式(2)で表される化合物(C)及び該(C)成分以外のエチレン性不飽和基を有する化合物(D)を含有する樹脂組成物を用いることにより、上記課題を解決できることを見出し、本発明を完成するに至った。 The present inventors include a biphenyl aralkyl type epoxy resin (A) represented by the following formula (1), a photocuring initiator (B), a compound (C) represented by the following formula (2), and the (C) By using the resin composition containing the compound (D) having an ethylenically unsaturated group other than the components, it was found that the above problems can be solved, and the present invention has been completed.
Figure JPOXMLDOC01-appb-C000007
Figure JPOXMLDOC01-appb-C000007
 (式(1)中、nは0~15の整数を示す。)。 (In formula (1), n represents an integer of 0 to 15).
Figure JPOXMLDOC01-appb-C000008
Figure JPOXMLDOC01-appb-C000008
 (式(2)中、複数のR1は、各々独立に、水素原子又はメチル基を表し、複数のR2は、各々独立に、水素原子又は置換基を有していてもよい炭素数1~22の炭化水素基を表し、複数のR3は、各々独立に、下記式(3)で表される置換基、下記式(4)で表される置換基又はヒドロキシ基を表す。)。 (In Formula (2), a plurality of R 1 s each independently represent a hydrogen atom or a methyl group, and a plurality of R 2 s each independently have a hydrogen atom or a substituent having 1 carbon atom) And a plurality of R 3 each independently represents a substituent represented by the following formula (3), a substituent represented by the following formula (4), or a hydroxy group.
Figure JPOXMLDOC01-appb-C000009
Figure JPOXMLDOC01-appb-C000009
Figure JPOXMLDOC01-appb-C000010
Figure JPOXMLDOC01-appb-C000010
 (式(4)中、R4は、水素原子又はメチル基を表す。)。 (In formula (4), R 4 represents a hydrogen atom or a methyl group).
 すなわち、本発明は以下の内容を含む。
 〔1〕前記式(1)で表されるビフェニルアラルキル型エポキシ樹脂(A)、光硬化開始剤(B)、前記式(2)で表される化合物(C)及び前記式(2)で表される化合物(C)以外のエチレン性不飽和基を有する化合物(D)を含有する、樹脂組成物。
 〔2〕マレイミド化合物(E)を更に含有する、〔1〕に記載の樹脂組成物。
 〔3〕充填材(F)を更に含む、〔1〕又は〔2〕に記載の樹脂組成物。
 〔4〕シアン酸エステル化合物、フェノール樹脂、オキセタン樹脂、ベンゾオキサジン化合物及び前記(1)で表されるビフェニルアラルキル型エポキシ樹脂(A)と異なるエポキシ樹脂からなる群から選択されるいずれか一種以上の化合物(G)を更に含有する、〔1〕~〔3〕のいずれか一項に記載の樹脂組成物。
That is, the present invention includes the following contents.
[1] Biphenyl aralkyl type epoxy resin (A) represented by formula (1), photocuring initiator (B), compound (C) represented by formula (2), and formula (2) The resin composition containing the compound (D) which has ethylenically unsaturated groups other than the compound (C) made.
[2] The resin composition according to [1], further containing a maleimide compound (E).
[3] The resin composition according to [1] or [2], further including a filler (F).
[4] Any one or more selected from the group consisting of a cyanate ester compound, a phenol resin, an oxetane resin, a benzoxazine compound and an epoxy resin different from the biphenyl aralkyl type epoxy resin (A) represented by the above (1) The resin composition according to any one of [1] to [3], further comprising a compound (G).
 〔5〕前記式(2)で表される化合物(C)の酸価が、30mgKOH/g以上120mgKOH/g以下である、〔1〕~〔4〕のいずれか一項に記載の樹脂組成物。
 〔6〕成分(A)の含有量が、樹脂組成物中の樹脂固形分100質量部に対して、3質量部以上50質量部以下である、〔1〕~〔5〕のいずれか一項に記載の樹脂組成物。
 〔7〕前記エチレン性不飽和基を有する化合物(D)が、(メタ)アクリロイル基を有する化合物及び/又はビニル基を有する化合物である、〔1〕~〔6〕のいずれか一項に記載の樹脂組成物。
 〔8〕前記充填材(F)が、シリカ、ベーマイト、硫酸バリウム、シリコーンパウダー、フッ素樹脂系充填材、ウレタン樹脂系充填材、アクリル樹脂系充填材、ポリエチレン系充填材、スチレン・ブタジエンゴム及びシリコーンゴムからなる群から選択されるいずれか一種類以上である、〔3〕に記載の樹脂組成物。
[5] The resin composition according to any one of [1] to [4], wherein the acid value of the compound (C) represented by the formula (2) is 30 mgKOH / g or more and 120 mgKOH / g or less. .
[6] Any one of [1] to [5], wherein the content of the component (A) is 3 parts by mass or more and 50 parts by mass or less with respect to 100 parts by mass of the resin solid content in the resin composition. The resin composition described in 1.
[7] The compound according to any one of [1] to [6], wherein the compound (D) having an ethylenically unsaturated group is a compound having a (meth) acryloyl group and / or a compound having a vinyl group. Resin composition.
[8] The filler (F) is silica, boehmite, barium sulfate, silicone powder, fluororesin filler, urethane resin filler, acrylic resin filler, polyethylene filler, styrene / butadiene rubber and silicone. The resin composition according to [3], which is at least one selected from the group consisting of rubber.
 〔9〕熱硬化促進剤(H)を更に含有する、〔1〕~〔8〕のいずれか一項に記載の樹脂組成物。
 〔10〕
 下記式(5)で表されるナフタレン型エポキシ樹脂を更に含有する、〔1〕~〔9〕のいずれか一項に記載の樹脂組成物。
[9] The resin composition according to any one of [1] to [8], further containing a thermosetting accelerator (H).
[10]
The resin composition according to any one of [1] to [9], further containing a naphthalene type epoxy resin represented by the following formula (5).
Figure JPOXMLDOC01-appb-C000011
Figure JPOXMLDOC01-appb-C000011
 〔11〕
 前記光硬化開始剤(B)が、下記式(6)で表されるホスフィンオキサイド化合物を含有する、〔1〕~〔10〕のいずれか一項に記載の樹脂組成物。
[11]
The resin composition according to any one of [1] to [10], wherein the photocuring initiator (B) contains a phosphine oxide compound represented by the following formula (6).
Figure JPOXMLDOC01-appb-C000012
Figure JPOXMLDOC01-appb-C000012
 (式(6)中、R5~R10は、各々独立に、水素原子又は炭素数1~4のアルキル基を示し、R11は、炭素数1~20のアルキル基又は炭素数6~20のアリール基を示す。)。
 〔12〕支持体及び該支持体の表面に配された、〔1〕~〔11〕のいずれか一項に記載の樹脂組成物を有する、樹脂シート。
 〔13〕〔1〕~〔11〕のいずれか一項に記載の樹脂組成物を有する、多層プリント配線板。
 〔14〕〔1〕~〔11〕のいずれか一項に記載の樹脂組成物を有する、半導体装置。
(In the formula (6), R 5 to R 10 each independently represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and R 11 represents an alkyl group having 1 to 20 carbon atoms or 6 to 20 carbon atoms. An aryl group of
[12] A resin sheet comprising the support and the resin composition according to any one of [1] to [11] disposed on the surface of the support.
[13] A multilayer printed wiring board comprising the resin composition according to any one of [1] to [11].
[14] A semiconductor device comprising the resin composition according to any one of [1] to [11].
 本発明によれば、めっき密着性、塗膜性、耐熱性及び現像性に優れ、多層プリント配線板に好適な物性を有する活性エネルギー線で硬化する樹脂組成物、支持体付き樹脂シート、それらを用いた多層プリント配線板、半導体装置を提供することができる。 According to the present invention, a resin composition that is excellent in plating adhesion, coating properties, heat resistance and developability, and is cured with active energy rays having physical properties suitable for a multilayer printed wiring board, a resin sheet with a support, and The multilayer printed wiring board and semiconductor device used can be provided.
 以下、本発明を実施するための形態(以下、「本実施形態」という。)について詳細に説明する。以下の本実施形態は、本発明を説明するための例示であり、本発明を以下の内容に限定する趣旨ではない。本発明はその要旨の範囲内で、適宜に変形して実施できる。 Hereinafter, a mode for carrying out the present invention (hereinafter referred to as “the present embodiment”) will be described in detail. The following embodiments are examples for explaining the present invention, and are not intended to limit the present invention to the following contents. The present invention can be appropriately modified within the scope of the gist.
 なお、本明細書における「(メタ)アクリロイル基」とは「アクリロイル基」及びそれに対応する「メタクリロイル基」の両方を意味し、「(メタ)アクリレート」とは「アクリレート」及びそれに対応する「メタクリレート」の両方を意味し、「(メタ)アクリル酸」とは「アクリル酸」及びそれに対応する「メタクリル酸」の両方を意味する。また、本実施形態において、「樹脂固形分」又は「樹脂組成物中の樹脂固形分」とは、特に断りのない限り、樹脂組成物における、溶剤及び充填材を除いた成分をいい、「樹脂固形分100質量部」とは、樹脂組成物における、溶剤及び充填材を除いた成分の合計が100質量部であることをいうものとする。 In the present specification, “(meth) acryloyl group” means both “acryloyl group” and the corresponding “methacryloyl group”, and “(meth) acrylate” means “acrylate” and the corresponding “methacrylate”. "(Meth) acrylic acid" means both "acrylic acid" and the corresponding "methacrylic acid". Further, in this embodiment, “resin solid content” or “resin solid content in the resin composition” means a component in the resin composition excluding the solvent and the filler, unless otherwise specified. The term “solid content of 100 parts by mass” means that the total of the components excluding the solvent and filler in the resin composition is 100 parts by mass.
 本実施形態の樹脂組成物は、前記式(1)で表されるビフェニルアラルキル型エポキシ樹脂(A)、光硬化開始剤(B)、前記式(2)で表される化合物(C)及び(C)成分以外のエチレン性不飽和基を有する化合物(D)を含有する。以下、各成分について説明する。 The resin composition of this embodiment includes a biphenyl aralkyl type epoxy resin (A) represented by the formula (1), a photocuring initiator (B), a compound (C) represented by the formula (2), and ( The compound (D) which has ethylenically unsaturated groups other than C) component is contained. Hereinafter, each component will be described.
 <式(1)で表されるビフェニルアラルキル型エポキシ樹脂(A)>
 本実施形態に用いるビフェニルアラルキル型エポキシ樹脂(A)(成分(A)とも称す)は、前記式(1)の構造を有する、ビフェニルアラルキル骨格を有する化合物である。該樹脂(A)を含んで得られる硬化物は、高い銅めっき密着性を有しつつ、優れた現像性を有する保護膜、及び層間絶縁層を好適に形成することができる。
<Biphenylaralkyl type epoxy resin (A) represented by Formula (1)>
The biphenyl aralkyl type epoxy resin (A) (also referred to as component (A)) used in the present embodiment is a compound having a structure of the above formula (1) and having a biphenyl aralkyl skeleton. The cured product obtained by including the resin (A) can suitably form a protective film having excellent developability and an interlayer insulating layer while having high copper plating adhesion.
 式(1)中、nは0~15の整数を示す。好ましくは、現像性の点から、0~5の整数である。 In the formula (1), n represents an integer of 0 to 15. Preferably, it is an integer of 0 to 5 from the viewpoint of developability.
 本実施形態の樹脂組成物において、成分(A)の含有量は特に限定されないが、銅めっき密着性を向上させるという観点から、成分(A)、成分(C)及び成分(D)の合計含有量100質量部に対し、3質量部以上とすることが好ましく、4質量部以上とすることがより好ましく、5質量部以上とすることが更に好ましい。また、十分に硬化させ、耐熱性を向上させるという観点から90質量部以下とすることが好ましく、89質量部以下とすることがより好ましく、88質量部以下とすることが更に好ましい。 In the resin composition of the present embodiment, the content of the component (A) is not particularly limited, but from the viewpoint of improving copper plating adhesion, the total content of the component (A), the component (C) and the component (D). The amount is preferably 3 parts by mass or more, more preferably 4 parts by mass or more, and still more preferably 5 parts by mass or more with respect to 100 parts by mass. Moreover, it is preferable to set it as 90 mass parts or less from a viewpoint of making it fully harden | cure and improving heat resistance, it is more preferable to set it as 89 mass parts or less, and it is still more preferable to set it as 88 mass parts or less.
 本実施形態の樹脂組成物における成分(A)の含有量は、特に限定されないが、銅めっき密着性及び現像性を向上させるという観点から、樹脂組成物中の樹脂固形分100質量部に対して、3質量部以上とすることが好ましく、5質量部以上とすることがより好ましく、10質量部以上とすることが更に好ましく、15質量部以上とすることが更により好ましい。また、十分に硬化させ、耐熱性を向上させるという観点から、樹脂組成物中の樹脂固形分100質量部に対して、50質量部以下とすることが好ましく、40質量部以下とすることがより好ましく、30質量部以下とすることが更に好ましく、28質量部以下とすることが更により好ましい。 Although content of the component (A) in the resin composition of this embodiment is not specifically limited, From a viewpoint of improving copper plating adhesiveness and developability, it is with respect to 100 mass parts of resin solid content in a resin composition. It is preferably 3 parts by mass or more, more preferably 5 parts by mass or more, still more preferably 10 parts by mass or more, and even more preferably 15 parts by mass or more. Further, from the viewpoint of sufficiently curing and improving heat resistance, it is preferably 50 parts by mass or less, more preferably 40 parts by mass or less, with respect to 100 parts by mass of the resin solid content in the resin composition. Preferably, it is more preferably 30 parts by mass or less, and still more preferably 28 parts by mass or less.
 樹脂(A)は、市販品を利用することもでき、例えば、NC3000FH(式(1)中のn=8~10)、NC3000H(式(1)中のn=2~5)、NC3000L(式(1)中のn=1~3)、NC3000(式(1)中のn=1~3)、CER3000L(式(1)中のn=0~2)(以上、商品名、日本化薬(株)製)などが挙げられる。
 これらは、1種単独又は2種以上を適宜混合して使用することも可能である。
As the resin (A), a commercially available product can be used. For example, NC3000FH (n = 8 to 10 in the formula (1)), NC3000H (n = 2 to 5 in the formula (1)), NC3000L (formula N = 1-3 in (1), NC3000 (n = 1-3 in formula (1)), CER3000L (n = 0-2 in formula (1)) (above, trade name, Nippon Kayaku Etc.).
These can be used alone or in combination of two or more.
 <光硬化開始剤(B)>
 本実施形態に用いる光硬化開始剤(B)(成分(B)とも称す)は、特に限定されないが、一般に光硬化性樹脂組成物で用いられる分野で公知のものを使用することができる。
<Photocuring initiator (B)>
The photocuring initiator (B) (also referred to as component (B)) used in the present embodiment is not particularly limited, and those generally known in the field used in photocurable resin compositions can be used.
 例えば、ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインプロピルエーテル、ベンゾインイソブチルエーテル等のベンゾイン類、過酸化ベンゾイル、ラウロイルパーオキサイド、アセチルパーオキサイド、パラクロロベンゾイルパーオキサイド、ジ-tert-ブチル-ジ-パーフタレート等で例示される有機過酸化物、アシルフォスフィンオキサイド類、アセトフェノン、2,2-ジエトキシ-2-フェニルアセトフェノン、2,2-ジエトキシ-2-フェニルアセトフェノン、1,1-ジクロロアセトフェノン、2-ヒドロキシ-2-メチル-フェニルプロパン-1-オン、ジエトキシアセトフェノン、1-ヒドロキシンクロヘキシルフェニルケトン、2-メチル-1-[4-(メチルチオ)フェニル]-2-モルフォリノ-プロパン-1-オン、2-ベンジル-2-ジメチルアミノ-1-(4-モルフォリノフェニル)-ブタノン-1等のアセトフェノン類、2-エチルアントラキノン、2-t-ブチルアントラキノン、2-クロロアントラキノン、2-アミルアントラキノン等のアントラキノン類、2,4-ジエチルチオキサントン、2-イソプロピルチオキサントン、2-クロロチオキサントン等のチオキサントン類、アセトフェノンジメチルケタール、ベンジルジメチルケタール等のケタール類、ベンゾフェノン、4-ベンゾイル-4’-メチルジフェニルサルファイド、4,4’-ビスメチルアミノベンゾフェノン等のベンゾフェノン類、2,4,6-トリメチルベンゾイルジフェニルホスフィンオキサイド、ビス(2,4,6-トリメチルベンゾイル)-フェニルホスフィンオキサイド等のホスフィンオキサイド類、1,2-オクタンジオン,1-[4-(フェニルチオ)-,2-(O-ベンゾイルオキシム)]等のオキシムエステル類等のラジカル型光硬化開始剤や、p-メトキシフェニルジアゾニウムフロロホスホネート、N,N-ジエチルアミノフェニルジアゾニウムヘキサフロロホスホネート等のルイス酸のジアゾニウム塩、ジフェニルヨードニウムヘキサフロロホスホネート、ジフェニルヨードニウムヘキサフロロアンチモネート等のルイス酸のヨードニウム塩、トリフェニルスルホニウムヘキサフロロホスホネート、トリフェニルスルホニウムヘキサフロロアンチモネート等のルイス酸のスルホニウム塩、トリフェニルホスホニウムヘキサフロロアンチモネート等のルイス酸のホスホニウム塩、その他のハロゲン化物、トリアジン系開始剤、ボーレート系開始剤、及びその他の光酸発生剤等のカチオン系光重合開始剤が挙げられる。 For example, benzoins such as benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin propyl ether, benzoin isobutyl ether, benzoyl peroxide, lauroyl peroxide, acetyl peroxide, parachlorobenzoyl peroxide, di-tert-butyl-di- Organic peroxides exemplified by perphthalate, acylphosphine oxides, acetophenone, 2,2-diethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone, 2 -Hydroxy-2-methyl-phenylpropan-1-one, diethoxyacetophenone, 1-hydroxyn cyclohexyl phenyl ketone, 2-methyl-1- [4- (methylthio) phenyl Acetophenones such as -2-morpholino-propan-1-one, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1, 2-ethylanthraquinone, 2-t-butylanthraquinone, Anthraquinones such as 2-chloroanthraquinone and 2-amylanthraquinone, thioxanthones such as 2,4-diethylthioxanthone, 2-isopropylthioxanthone and 2-chlorothioxanthone, ketals such as acetophenone dimethyl ketal and benzyl dimethyl ketal, benzophenone, 4 Benzophenones such as benzoyl-4'-methyldiphenyl sulfide, 4,4'-bismethylaminobenzophenone, 2,4,6-trimethylbenzoyldiphenylphosphine oxide, bis (2,4,6- Radical light such as phosphine oxides such as limethylbenzoyl) -phenylphosphine oxide, oxime esters such as 1,2-octanedione, 1- [4- (phenylthio)-, 2- (O-benzoyloxime)] Curing initiator, Lewis acid diazonium salt such as p-methoxyphenyldiazonium fluorophosphonate, N, N-diethylaminophenyldiazonium hexafluorophosphonate, iodonium salt of Lewis acid such as diphenyliodonium hexafluorophosphonate, diphenyliodonium hexafluoroantimonate , Sulfonium salts of Lewis acids such as triphenylsulfonium hexafluorophosphonate, triphenylsulfonium hexafluoroantimonate, triphenylphosphonium hexafluoroantimonate Examples include phosphonium salts of Lewis acids such as carbonates, other halides, triazine-based initiators, borate-based initiators, and other cationic photopolymerization initiators such as photoacid generators.
 アシルフォスフィンオキサイド類としては、ビス(2,4,6-トリメチルベンゾイル)-フェニルフォスフィンオキサイドなど下記式(6)で表されるホスフィンオキサイド化合物、2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイドなどが挙げられる。特に、下記式(6)で表されるホスフィンオキサイド化合物は、長波長のUV吸収率が高く、樹脂内部までUV光を到達させることに優れている。そのため、本実施形態にかかる、ビフェニルアラルキル型エポキシ樹脂(A)、化合物(C)及び化合物(D)などを好適に反応させることができ、耐熱性により優れる樹脂シート及び多層プリント配線板の製造が可能となる。 Acylphosphine oxides include phosphine oxide compounds represented by the following formula (6) such as bis (2,4,6-trimethylbenzoyl) -phenylphosphine oxide, 2,4,6-trimethylbenzoyl-diphenyl-phos Examples include fin oxide. In particular, the phosphine oxide compound represented by the following formula (6) has a high long wavelength UV absorption and is excellent in allowing UV light to reach the inside of the resin. Therefore, the biphenyl aralkyl type epoxy resin (A), the compound (C), the compound (D) and the like according to the present embodiment can be suitably reacted, and the production of a resin sheet and a multilayer printed wiring board that are superior in heat resistance can be achieved. It becomes possible.
Figure JPOXMLDOC01-appb-C000013
Figure JPOXMLDOC01-appb-C000013
 式(6)中、R5~R10は、各々独立に、水素原子又は炭素数1~4のアルキル基を示し、R11は、炭素数1~20のアルキル基又は炭素数6~20のアリール基を示す。 In formula (6), R 5 to R 10 each independently represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and R 11 represents an alkyl group having 1 to 20 carbon atoms or a carbon atom having 6 to 20 carbon atoms. An aryl group is shown.
 炭素数1~4のアルキル基としては、例えば、メチル基、エチル基、n-プロピル基、n-ブチル基、イソプロピル基、イソブチル基、sec-ブチル基、t-ブチル基などの直鎖状または分岐状のアルキル基が挙げられる。 Examples of the alkyl group having 1 to 4 carbon atoms include a straight chain such as methyl group, ethyl group, n-propyl group, n-butyl group, isopropyl group, isobutyl group, sec-butyl group, t-butyl group, etc. A branched alkyl group is exemplified.
 炭素数1~20のアルキル基としては、例えば、メチル基、エチル基、n-プロピル基、n-ブチル基、n-ペンチル基、n-ヘキシル基、イソプロピル基、イソブチル基、sec-ブチル基、t-ブチル基、ネオペンチル基、1,1-ジメチルプロピル基、1,1-ジエチルプロピル基、1-エチル-1-メチルプロピル基、1,1,2,2-テトラメチルプロピル基、1,1-ジメチルブチル基、1,1,3-トリメチルブチル基などの直鎖状または分岐状のアルキル基が挙げられる。 Examples of the alkyl group having 1 to 20 carbon atoms include methyl, ethyl, n-propyl, n-butyl, n-pentyl, n-hexyl, isopropyl, isobutyl, sec-butyl, t-butyl group, neopentyl group, 1,1-dimethylpropyl group, 1,1-diethylpropyl group, 1-ethyl-1-methylpropyl group, 1,1,2,2-tetramethylpropyl group, 1,1 -Linear or branched alkyl groups such as dimethylbutyl group and 1,1,3-trimethylbutyl group.
 炭素数6~20のアリール基としては、フェニル基、ナフチル基、ビフェニル基、ターフェニル基、フェナントリル基、アントラセニル基などの非置換アリール基;トリル基、ジメチルフェニル基、イソプロピルフェニル基、t-ブチルフェニル基、ジ-t-ブチルフェニル基などのアルキル基置換アリール基が挙げられる。 Examples of aryl groups having 6 to 20 carbon atoms include unsubstituted aryl groups such as phenyl, naphthyl, biphenyl, terphenyl, phenanthryl, and anthracenyl groups; tolyl, dimethylphenyl, isopropylphenyl, and t-butyl. Examples include alkyl group-substituted aryl groups such as a phenyl group and a di-t-butylphenyl group.
 その中でも、多層プリント配線板用途に適した反応性があり、金属導体に対する信頼性が高いという観点から、アシルフォスフィンオキサイド類、2-ベンジル-2-ジメチルアミノ-1-(4-モルフォリノフェニル)-ブタノン-1等のアセトフェノン類のラジカル型光硬化開始剤が好ましく、前述のとおり、より耐熱性が得られることから、前記式(6)で表されるホスフィンオキサイド化合物がより好ましく、ビス(2,4,6-トリメチルベンゾイル)-フェニルフォスフィンオキサイドが更に好ましい。 Among them, acylphosphine oxides, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) are suitable from the viewpoint of reactivity suitable for multilayer printed wiring board applications and high reliability for metal conductors. ) -Butanone-1 and other radical type photocuring initiators of acetophenones are preferable, and as described above, more heat resistance is obtained, so that the phosphine oxide compound represented by the formula (6) is more preferable, and bis ( More preferred is 2,4,6-trimethylbenzoyl) -phenylphosphine oxide.
 これらの光硬化開始剤(B)は、1種単独又は2種以上を適宜混合して使用することも可能であり、ラジカル系とカチオン系の双方の開始剤を併せて用いても良い。 These photocuring initiators (B) can be used alone or in combination of two or more, and both radical and cationic initiators may be used in combination.
 また、2-ベンジル-2-ジメチルアミノ-1-(4-モルフォリノフェニル)-ブタノン-1、ビス(2,4,6-トリメチルベンゾイル)-フェニルフォスフィンオキサイド及び2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイドは市販品を使用することもでき、それぞれIrgacure(登録商標)369(BASFジャパン(株)製)、Irgacure(登録商標)819(BASFジャパン(株)製)及びIrgacure(登録商標)TPO(BASFジャパン(株)製)が好適に使用される。 Also, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1, bis (2,4,6-trimethylbenzoyl) -phenylphosphine oxide and 2,4,6-trimethylbenzoyl -Diphenyl-phosphine oxide may be a commercially available product, and Irgacure (registered trademark) 369 (manufactured by BASF Japan Ltd.), Irgacure (registered trademark) 819 (manufactured by BASF Japan Ltd.) and Irgacure (registered) (Trademark) TPO (manufactured by BASF Japan Ltd.) is preferably used.
 本実施形態の樹脂組成物における光硬化開始剤(B)の含有量は、特に限定されないが、樹脂組成物を活性エネルギー線で十分に硬化させ、耐熱性を向上させるという観点から、樹脂組成物中の成分(A)、成分(C)及び成分(D)の合計含有量100質量部に対し、0.1質量部以上とすることが好ましく、0.2質量部以上とすることがより好ましく、0.3質量部以上とすることが更に好ましい。また、光硬化後の熱硬化を阻害し耐熱性を低下させるという観点から、30質量部以下とすることが好ましく、25質量部以下とすることがより好ましく、20質量部以下とすることが更に好ましい。 The content of the photocuring initiator (B) in the resin composition of the present embodiment is not particularly limited. From the viewpoint of sufficiently curing the resin composition with active energy rays and improving heat resistance, the resin composition. The total content of component (A), component (C) and component (D) in the content is preferably 0.1 parts by mass or more, more preferably 0.2 parts by mass or more, relative to 100 parts by mass. More preferably, the content is 0.3 parts by mass or more. Further, from the viewpoint of inhibiting heat curing after photocuring and reducing heat resistance, it is preferably 30 parts by mass or less, more preferably 25 parts by mass or less, and further preferably 20 parts by mass or less. preferable.
 本実施形態の樹脂組成物における光硬化開始剤(B)の含有量は、特に限定されないが、樹脂組成物中の樹脂固形分100質量部に対して、0.1質量部以上とすることが好ましく、0.2質量部以上とすることがより好ましく、0.3質量部以上とすることが更に好ましく、1質量部以上とすることが更により好ましく、1.8質量部以上とすることが更により好ましい。また、光硬化後の熱硬化を阻害し耐熱性を低下させるという観点から、樹脂組成物中の樹脂固形分100質量部に対して、30質量部以下とすることが好ましく、25質量部以下とすることがより好ましく、20質量部以下とすることが更に好ましく、10質量部以下とすることが更により好ましい。 Although content of the photocuring initiator (B) in the resin composition of this embodiment is not specifically limited, It shall be 0.1 mass part or more with respect to 100 mass parts of resin solid content in a resin composition. Preferably, it is more preferably 0.2 parts by mass or more, more preferably 0.3 parts by mass or more, still more preferably 1 part by mass or more, and more preferably 1.8 parts by mass or more. Even more preferred. Further, from the viewpoint of inhibiting heat curing after photocuring and reducing heat resistance, it is preferably 30 parts by mass or less, and 25 parts by mass or less with respect to 100 parts by mass of the resin solid content in the resin composition. More preferably, it is more preferably 20 parts by mass or less, still more preferably 10 parts by mass or less.
 <化合物(C)>
 本実施形態に用いる化合物(C)(成分(C)とも称す)は、前記式(2)で表される化合物である。化合物(C)は、1種単独で用いてもよく、構造異性体および立体異性体などの異性体を含んでいてもよく、互いに構造が異なる化合物を2種以上適宜組み合わせて用いてもよい。
<Compound (C)>
The compound (C) (also referred to as component (C)) used in the present embodiment is a compound represented by the formula (2). Compound (C) may be used alone, may contain isomers such as structural isomers and stereoisomers, and may be used in combination of two or more compounds having different structures.
 前記式(2)中、複数のR1は、各々独立に、水素原子又はメチル基を表す。その中でも、光硬化反応の反応性を向上させる観点から水素原子を含むことが好ましく、より好ましくはR1の全てが水素原子である。 In said formula (2), several R < 1 > represents a hydrogen atom or a methyl group each independently. Among these, it is preferable that a hydrogen atom is contained from a viewpoint of improving the reactivity of photocuring reaction, More preferably, all of R < 1 > is a hydrogen atom.
 複数のR2は、各々独立に、水素原子又は置換基を有していてもよい炭素数1~22の炭化水素基を表す。 A plurality of R 2 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 22 carbon atoms which may have a substituent.
 炭化水素基としては、炭素原子数1~22、好ましくは1~14、さらに好ましくは1~10の直鎖状または分岐状の脂肪族炭化水素基;炭素原子数3~22、好ましくは3~14、さらに好ましくは3~10の脂環族炭化水素基;炭素原子数6~22、好ましくは6~14、さらに好ましくは6~10の芳香族炭化水素基が挙げられる。
 脂肪族炭化水素基としては、例えば、メチル基、エチル基、n-プロピル基、n-ブチル基、n-ペンチル基、n-ヘキシル基、イソプロピル基、イソブチル基、sec-ブチル基、t-ブチル基、ネオペンチル基、1,1-ジメチルプロピル基、1,1-ジエチルプロピル基、1-エチル-1-メチルプロピル基、1,1,2,2-テトラメチルプロピル基、1,1-ジメチルブチル基、1,1,3-トリメチルブチル基などの直鎖状または分岐状のアルキル基;ビニル基、アリル基、イソプロペニル基などの直鎖状または分岐状のアルケニル基;エチニル基、プロパルギル基などの直鎖状または分岐状のアルキニル基が挙げられる。
 脂環族炭化水素基としては、例えば、シクロプロピル基、シクロブチル基、シクロペンチル基、シクロヘキシル基、1-メチル-1-シクロヘキシル基、アダマンチル基などの環状飽和炭化水素基;シクロペンタジエニル基、インデニル基、フルオレニル基などの環状不飽和炭化水素基が挙げられる。
 芳香族炭化水素基としては、例えば、フェニル基、ナフチル基、ビフェニル基、ターフェニル基、フェナントリル基、アントラセニル基などの非置換アリール基;トリル基、ジメチルフェニル基、イソプロピルフェニル基、t-ブチルフェニル基、ジ-t-ブチルフェニル基などのアルキル基置換アリール基;などのアリール基が挙げられる。
 これら炭化水素基は、少なくとも一つの水素原子が他の炭化水素基で置換されていてもよい。少なくとも一つの水素原子が他の炭化水素基で置換された炭化水素基としては、例えば、ベンジル基、クミル基などのアリール基置換アルキル基、シクロヘキシルメチル基などの環状飽和炭化水素基置換アルキル基が挙げられる。
As the hydrocarbon group, a linear or branched aliphatic hydrocarbon group having 1 to 22, preferably 1 to 14, and more preferably 1 to 10 carbon atoms; 3 to 22 carbon atoms, preferably 3 to 14 and more preferably an alicyclic hydrocarbon group having 3 to 10 carbon atoms; an aromatic hydrocarbon group having 6 to 22 carbon atoms, preferably 6 to 14 carbon atoms, and more preferably 6 to 10 carbon atoms.
Examples of the aliphatic hydrocarbon group include a methyl group, an ethyl group, an n-propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, an isopropyl group, an isobutyl group, a sec-butyl group, and a t-butyl group. Group, neopentyl group, 1,1-dimethylpropyl group, 1,1-diethylpropyl group, 1-ethyl-1-methylpropyl group, 1,1,2,2-tetramethylpropyl group, 1,1-dimethylbutyl Linear, branched alkyl group such as 1,1,3-trimethylbutyl group; linear or branched alkenyl group such as vinyl group, allyl group, isopropenyl group; ethynyl group, propargyl group, etc. And a linear or branched alkynyl group.
Examples of the alicyclic hydrocarbon group include cyclic saturated hydrocarbon groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, 1-methyl-1-cyclohexyl group and adamantyl group; cyclopentadienyl group, indenyl And cyclic unsaturated hydrocarbon groups such as a fluorenyl group.
Examples of aromatic hydrocarbon groups include unsubstituted aryl groups such as phenyl, naphthyl, biphenyl, terphenyl, phenanthryl, and anthracenyl groups; tolyl, dimethylphenyl, isopropylphenyl, and t-butylphenyl. And aryl groups such as alkyl group-substituted aryl groups such as di-t-butylphenyl group;
In these hydrocarbon groups, at least one hydrogen atom may be substituted with another hydrocarbon group. Examples of the hydrocarbon group in which at least one hydrogen atom is substituted with another hydrocarbon group include aryl group-substituted alkyl groups such as benzyl group and cumyl group, and cyclic saturated hydrocarbon group-substituted alkyl groups such as cyclohexylmethyl group. Can be mentioned.
 置換基を有していてもよい炭素数1~22の炭化水素基としては、直鎖状または分岐状のアルキル基が好ましい。
 複数のR2は、硬化物の耐熱性を向上させる観点からメチル基を含むことが好ましく、より好ましくはR2の全てがメチル基である。
 複数のR3は、各々独立に、前記式(3)で表される置換基、前記式(4)で表される置換基又はヒドロキシ基を表す。その中でも、耐熱性を向上させる観点から、ヒドロキシル基を含むことが好ましい。また、本実施形態では、複数のR3のうち、前記式(3)で表される置換基を含む化合物(C)を用いることも、現像性を向上させる観点から、好ましい。本実施形態では、複数のR3のうち、前記式(4)で表される置換基を含む化合物(C)を用いることも、耐熱性を向上させる観点から、好ましい。前記式(4)中、R4は水素原子又はメチル基を表す。その中でも、光硬化反応の反応性を向上させる観点から、水素原子であることが好ましい。
The hydrocarbon group having 1 to 22 carbon atoms which may have a substituent is preferably a linear or branched alkyl group.
The plurality of R 2 preferably contain a methyl group from the viewpoint of improving the heat resistance of the cured product, and more preferably all of R 2 are methyl groups.
Several R < 3 > represents the substituent represented by the said Formula (3), the substituent represented by the said Formula (4), or a hydroxy group each independently. Among these, it is preferable that a hydroxyl group is included from a viewpoint of improving heat resistance. Moreover, in this embodiment, it is also preferable from a viewpoint of improving developability to use the compound (C) containing the substituent represented by said Formula (3) among several R < 3 >. In this embodiment, it is also preferable to use the compound (C) containing a substituent represented by the formula (4) among the plurality of R 3 from the viewpoint of improving heat resistance. In the formula (4), R 4 represents a hydrogen atom or a methyl group. Among these, a hydrogen atom is preferable from the viewpoint of improving the reactivity of the photocuring reaction.
 複数のR3は、現像性を向上させる観点から、全てのR3の置換基のうち、前記式(3)で表される置換基の比率が20%以上98%以下の範囲、前記式(4)で表される置換基の比率が5%以上98%以下の範囲、ヒドロキシ基の比率が10%以上98%以下の範囲(これら置換基の比率の和が100%である)となることが好ましい。その中でも、現像性を向上させる観点から複数のR3のうち少なくとも一つが前記式(3)で表される置換基となることが特に好ましい。 From the viewpoint of improving developability, the plurality of R 3 s are in the range where the ratio of the substituent represented by the formula (3) is 20% or more and 98% or less among all the substituents of R 3 , The ratio of the substituent represented by 4) is in the range of 5% to 98% and the ratio of the hydroxy group is in the range of 10% to 98% (the sum of the ratios of these substituents is 100%). Is preferred. Among these, from the viewpoint of improving developability, at least one of the plurality of R 3 is particularly preferably a substituent represented by the above formula (3).
 化合物(C)としては、以下の化合物(C1)~(C5)のいずれか一種以上を含むことが、光硬化反応の反応性、硬化物の耐熱性および現像性を向上させることができるため好ましく、少なくとも化合物(C1)を含むことがより好ましく、(C1)~(C5)のいずれか2種以上を含むこともより好ましく、化合物(C1)および化合物(C2)~(C5)のいずれか1種以上を含むことがさらに好ましい。化合物(C)としては、少なくとも化合物(C2)及び(C3)を含むことも好ましい。 The compound (C) preferably contains any one or more of the following compounds (C1) to (C5) because the reactivity of the photocuring reaction, the heat resistance of the cured product and the developability can be improved. More preferably, it contains at least compound (C1), more preferably any two or more of (C1) to (C5), and any one of compound (C1) and compounds (C2) to (C5). More preferably, it contains more than one species. As the compound (C), it is also preferable that at least the compounds (C2) and (C3) are included.
Figure JPOXMLDOC01-appb-C000014
Figure JPOXMLDOC01-appb-C000014
Figure JPOXMLDOC01-appb-C000015
Figure JPOXMLDOC01-appb-C000015
Figure JPOXMLDOC01-appb-C000016
Figure JPOXMLDOC01-appb-C000016
Figure JPOXMLDOC01-appb-C000017
Figure JPOXMLDOC01-appb-C000017
Figure JPOXMLDOC01-appb-C000018
Figure JPOXMLDOC01-appb-C000018
 このような化合物は市販品を利用することもでき、例えば、KAYARAD(登録商標)ZCR-6001H、KAYARAD(登録商標)ZCR-6002H、KAYARAD(登録商標)ZCR-6006H、KAYARAD(登録商標)ZCR-6007H、KAYARAD(登録商標)ZCR-601H(以上、商品名、日本化薬(株)製)などが挙げられる。 Such compounds may be commercially available, for example, KAYARAD (registered trademark) ZCR-6001H, KAYARAD (registered trademark) ZCR-6002H, KAYARAD (registered trademark) ZCR-6006H, KAYARAD (registered trademark) ZCR- 6007H, KAYARAD (registered trademark) ZCR-601H (above, trade name, manufactured by Nippon Kayaku Co., Ltd.), and the like.
 本実施形態の樹脂組成物において、化合物(C)の酸価は、現像性を向上させる観点から30mgKOH/g以上とすることが好ましく、より現像性が向上することから、50mgKOH/g以上であることがさらに好ましい。また、活性エネルギー線で硬化させた後に現像液による溶解を防止する観点から、化合物(A)の酸価は、120mgKOH/g以下とすることが好ましく、より溶解を防止できることから、110mgKOH/g以下であることがさらに好ましい。なお、本実施形態における「酸価」は、JISK 0070:1992に準じた方法で測定される値を示す。 In the resin composition of the present embodiment, the acid value of the compound (C) is preferably 30 mgKOH / g or more from the viewpoint of improving developability, and more preferably 50 mgKOH / g or more because developability is further improved. More preferably. In addition, from the viewpoint of preventing dissolution by a developer after curing with active energy rays, the acid value of the compound (A) is preferably 120 mgKOH / g or less, and more preferably 110 mgKOH / g or less because dissolution can be further prevented. More preferably. The “acid value” in the present embodiment indicates a value measured by a method according to JISK 0070: 1992.
 本実施形態の樹脂組成物において、化合物(C)の含有量は、特に限定されないが、樹脂組成物を活性エネルギー線で硬化させるという観点から、樹脂組成物中の成分(A)、成分(C)及び成分(D)の合計含有量100質量部に対し、1質量部以上とすることが好ましく、2質量部以上とすることがより好ましく、3質量部以上とすることが更に好ましい。また、活性エネルギー線で十分に硬化させ、耐熱性を向上させるという観点から、99質量部以下とすることが好ましく、98質量部以下とすることがより好ましく、97質量部以下とすることが更に好ましい。 In the resin composition of the present embodiment, the content of the compound (C) is not particularly limited, but from the viewpoint of curing the resin composition with active energy rays, the component (A) and component (C) in the resin composition ) And the total content of component (D) is preferably 1 part by mass or more, more preferably 2 parts by mass or more, and still more preferably 3 parts by mass or more. Further, from the viewpoint of sufficiently curing with active energy rays and improving heat resistance, it is preferably 99 parts by mass or less, more preferably 98 parts by mass or less, and further preferably 97 parts by mass or less. preferable.
 本実施形態の樹脂組成物において、化合物(C)の含有量は、特に限定されないが、樹脂組成物を活性エネルギー線で硬化させるという観点から、樹脂組成物中の樹脂固形分100質量部に対して、1質量部以上とすることが好ましく、2質量部以上とすることがより好ましく、3質量部以上とすることが更に好ましく、10質量部以上とすることが更により好ましく、25質量部以上とすることが更により好ましく、30質量部以上とすることが最も好ましい。また、活性エネルギー線で十分に硬化させ、耐熱性を向上させるという観点から、樹脂組成物中の樹脂固形分100質量部に対して、99質量部以下とすることが好ましく、98質量部以下とすることがより好ましく、97質量部以下とすることが更に好ましく、90質量部以下とすることが更により好ましく、75質量部以下とすることが更により好ましく、72質量部以下とすることが最も好ましい。 In the resin composition of the present embodiment, the content of the compound (C) is not particularly limited, but from the viewpoint of curing the resin composition with active energy rays, the resin solid content in the resin composition is 100 parts by mass. 1 part by mass or more, preferably 2 parts by mass or more, more preferably 3 parts by mass or more, still more preferably 10 parts by mass or more, even more preferably 25 parts by mass or more. It is still more preferable, and it is most preferable to set it as 30 mass parts or more. Further, from the viewpoint of sufficiently curing with active energy rays and improving heat resistance, it is preferably 99 parts by mass or less, and 98 parts by mass or less with respect to 100 parts by mass of the resin solid content in the resin composition. More preferably, it is more preferably 97 parts by mass or less, still more preferably 90 parts by mass or less, still more preferably 75 parts by mass or less, and most preferably 72 parts by mass or less. preferable.
 <(C)成分以外のエチレン性不飽和基を有する化合物(D)>
 本実施形態の樹脂組成物は、活性エネルギー線(例えば、紫外線)に対する反応性を高め、耐熱性を向上させるために、(C)成分以外のエチレン性不飽和基を有する化合物(D)(成分(D)とも称す)を含有する。本実施形態に用いるエチレン性不飽和基を有する化合物(D)は、前記式(2)で表される化合物(C)以外であり、1分子中に1個以上のエチレン性不飽和基を有する化合物であれば、特に限定されないが、例えば、(メタ)アクリロイル基、ビニル基等を有する化合物が挙げられる。これらは、1種単独又は2種以上を適宜混合して使用することも可能である。
<Compound (D) having an ethylenically unsaturated group other than component (C)>
The resin composition of the present embodiment is a compound (D) (component (component) having an ethylenically unsaturated group other than the component (C) in order to increase the reactivity to active energy rays (for example, ultraviolet rays) and improve heat resistance. (Also referred to as (D)). The compound (D) having an ethylenically unsaturated group used in the present embodiment is other than the compound (C) represented by the formula (2), and has one or more ethylenically unsaturated groups in one molecule. Although it will not specifically limit if it is a compound, For example, the compound which has a (meth) acryloyl group, a vinyl group, etc. is mentioned. These can be used alone or in combination of two or more.
 (メタ)アクリロイル基を有する化合物としては、メチル(メタ)アクリレート、エチル(メタ)アクリレート、ブチル(メタ)アクリレート、ラウリル(メタ)アクリレート、ポリエチレングリコール(メタ)アクリレート、ポリエチレングリコール(メタ)アクリレートモノメチルエーテル、フェニルエチル(メタ)アクリレート、イソボルニル(メタ)アクリレート、シクロヘキシル(メタ)アクリレート、ベンジル(メタ)アクリレート、テトラヒドロフルフリル(メタ)アクリレート、ブタンジオールジ(メタ)アクリレート、ヘキサンジオールジ(メタ)アクリレート、ネオペンチルグリコールジ(メタ)アクリレート、ノナンジオールジ(メタ)アクリレート、グリコールジ(メタ)アクリレート、ジエチレンジ(メタ)アクリレート、ポリエチレングリコールジ(メタ)アクリレート、トリス(メタ)アクリロイルオキシエチルイソシアヌレート、ポリプロピレングリコールジ(メタ)アクリレート、アジピン酸エポキシジ(メタ)アクリレート、ビスフェノールエチレンオキサイドジ(メタ)アクリレート、水素化ビスフェノールエチレンオキサイド(メタ)アクリレート、ビスフェノールジ(メタ)アクリレート、ε-カプロラクトン変性ヒドロキシピバリン酸ネオペングリコールジ(メタ)アクリレート、ε-カプロラクトン変性ジペンタエリスリトールヘキサ(メタ)アクリレート、ε-カプロラクトン変性ジペンタエリスリトールポリ(メタ)アクリレート、ジペンタエリスリトールポリ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、トリエチロールプロパントリ(メタ)アクリレート、及びそのエチレンオキサイド付加物、ペンタエリスリトールトリ(メタ)アクリレート、及びそのエチレンオキサイド付加物、ペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、及びそのエチレンオキサイド付加物等が挙げられる。 As a compound having a (meth) acryloyl group, methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, lauryl (meth) acrylate, polyethylene glycol (meth) acrylate, polyethylene glycol (meth) acrylate monomethyl ether , Phenylethyl (meth) acrylate, isobornyl (meth) acrylate, cyclohexyl (meth) acrylate, benzyl (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, butanediol di (meth) acrylate, hexanediol di (meth) acrylate, Neopentyl glycol di (meth) acrylate, nonanediol di (meth) acrylate, glycol di (meth) acrylate, diethylenedi (meth) a Relate, polyethylene glycol di (meth) acrylate, tris (meth) acryloyloxyethyl isocyanurate, polypropylene glycol di (meth) acrylate, adipic acid epoxy di (meth) acrylate, bisphenol ethylene oxide di (meth) acrylate, hydrogenated bisphenol ethylene oxide (Meth) acrylate, bisphenol di (meth) acrylate, ε-caprolactone modified hydroxypivalic acid neopent glycol di (meth) acrylate, ε-caprolactone modified dipentaerythritol hexa (meth) acrylate, ε-caprolactone modified dipentaerythritol poly ( (Meth) acrylate, dipentaerythritol poly (meth) acrylate, trimethylolpropane tri (meth) a Relate, triethylolpropane tri (meth) acrylate, and its ethylene oxide adduct, pentaerythritol tri (meth) acrylate, and its ethylene oxide adduct, pentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, And ethylene oxide adducts thereof.
 この他にも、(メタ)アクリロイル基とウレタン結合を同一分子内に併せ持つウレタン(メタ)アクリレート類、同様に(メタ)アクリロイル基とエステル結合を同一分子内に併せ持つポリエステル(メタ)アクリレート、エポキシ樹脂から誘導され、(メタ)アクリロイル基を併せ持つエポキシ(メタ)アクリレート類、これらの結合が複合的に用いられている反応性オリゴマー等も挙げられる。 In addition, urethane (meth) acrylates that have (meth) acryloyl groups and urethane bonds in the same molecule, polyester (meth) acrylates that have (meth) acryloyl groups and ester bonds in the same molecule, and epoxy resins Epoxy (meth) acrylates derived from the above and having a (meth) acryloyl group, and reactive oligomers in which these bonds are used in combination.
 上記ウレタン(メタ)アクリレート類とは、水酸基含有(メタ)アクリレートとポリイソシアネート、必要に応じて用いられるその他アルコール類との反応物である。例えば、ヒドロキシエチル(メタ)アクリレート、ヒドロキシプロピル(メタ)アクリレート、ヒドロキシブチル(メタ)アクリレート等のヒドロキシアルキル(メタ)アクリレート類、グリセリンモノ(メタ)アクリレート、グリセリンジ(メタ)アクリレート等のグリセリン(メタ)アクリレート類、ペンタエリスリトールジ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ジペンタエリスリトールペンタ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート等の糖アルコール(メタ)アクリレート類と、トルエンジイソシアネート、ヘキサメチレンジイソシアネート、トリメチルヘキサメチレンジイソシアネート、イソホロンジイソシアネート、ノルボルネンジイソシアネート、キシレンジイソシアネート、水添キシレンジイソシアネート、ジシクロヘキサンメチレンジイソシアネート、及びそれらのイソシアヌレート、ビュレット反応物等のポリイソシアネート等を反応させ、ウレタン(メタ)アクリレート類となる。 The urethane (meth) acrylate is a reaction product of a hydroxyl group-containing (meth) acrylate, a polyisocyanate, and other alcohols used as necessary. For example, hydroxyalkyl (meth) acrylates such as hydroxyethyl (meth) acrylate, hydroxypropyl (meth) acrylate, hydroxybutyl (meth) acrylate, glycerin (meta) such as glycerin mono (meth) acrylate, glycerin di (meth) acrylate, etc. ) Sugars (meth) acrylates such as acrylates, pentaerythritol di (meth) acrylate, pentaerythritol tri (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, and toluene diisocyanate , Hexamethylene diisocyanate, trimethylhexamethylene diisocyanate, isophorone diisocyanate, norbornene diisocyanate, Down diisocyanate, hydrogenated xylene diisocyanate, dicyclohexane diisocyanate, and their isocyanurate, by reacting polyisocyanates such as buret reactants, the urethane (meth) acrylates.
 上記ポリエステル(メタ)アクリレート類とは、例えば、カプロラクトン変性2-ヒドロキシエチル(メタ)アクリレート、エチレンオキサイド及び/又はプロピレンオキサイド変性フタル酸(メタ)アクリレート、エチレンオキサイド変性コハク酸(メタ)アクリレート、カプロラクトン変性テトラヒドロフルフリル(メタ)アクリレート等の単官能(ポリ)エステル(メタ)アクリレート類;ヒドロキシピバリン酸エステルネオペンチルグリコールジ(メタ)アクリレート、カプロラクトン変性ヒドロキシピバリン酸エステルネオペンチルグリコールジ(メタ)アクリレート、エピクロルヒドリン変性フタル酸ジ(メタ)アクリレート等のジ(ポリ)エステル(メタ)アクリレート類;トリメチロールプロパン又はグリセリン1モルに1モル以上のε-カプロラクトン、γ-ブチロラクトン、δ-バレロラクトン等の環状ラクトン化合物を付加して得たトリオールのモノ、ジ又はトリ(メタ)アクリレートが挙げられる。 Examples of the polyester (meth) acrylates include caprolactone-modified 2-hydroxyethyl (meth) acrylate, ethylene oxide and / or propylene oxide-modified phthalic acid (meth) acrylate, ethylene oxide-modified succinic acid (meth) acrylate, and caprolactone-modified. Monofunctional (poly) ester (meth) acrylates such as tetrahydrofurfuryl (meth) acrylate; hydroxypivalate ester neopentyl glycol di (meth) acrylate, caprolactone-modified hydroxypivalate ester neopentyl glycol di (meth) acrylate, epichlorohydrin Di (poly) ester (meth) acrylates such as modified phthalic acid di (meth) acrylate; 1 mole of trimethylolpropane or glycerin Mol of ε- caprolactone, .gamma.-butyrolactone, a triol obtained by adding a cyclic lactone compound such as δ- valerolactone mono- include di- or tri (meth) acrylate.
 更には、ペンタエリスリトール又はジトリメチロールプロパン1モルに1モル以上のε-カプロラクトン、γ-ブチロラクトン、δ-バレロラクトン等の環状ラクトン化合物を付加して得たトリオールのモノ、ジ、トリ又はテトラ(メタ)アクリレート、ジペンタエリスリトール1モルに1モル以上のε-カプロラクトン、γ-ブチロラクトン、δ-バレロラクトン等の環状ラクトン化合物を付加して得たトリオールのモノ、又はポリ(メタ)アクリレートのトリオール、テトラオール、ペンタオール又はヘキサオール等の多価アルコールのモノ(メタ)アクリレート又はポリ(メタ)アクリレートが挙げられる。 Further, triol mono, di, tri or tetra (meta) obtained by adding 1 mol or more of a cyclic lactone compound such as ε-caprolactone, γ-butyrolactone, δ-valerolactone to 1 mol of pentaerythritol or ditrimethylolpropane. ) Triol mono or poly (meth) acrylate obtained by adding 1 mol or more of cyclic lactone compound such as ε-caprolactone, γ-butyrolactone, δ-valerolactone to 1 mol of acrylate and dipentaerythritol Examples thereof include mono (meth) acrylate or poly (meth) acrylate of polyhydric alcohol such as all, pentaol or hexaol.
 そしてまた更には、(ポリ)エチレングリコール、(ポリ)プロピレングリコール、(ポリ)テトラメチレングリコール、(ポリ)ブチレングリコール、3-メチル-1,5-ペンタンジオール、ヘキサンジオール等のジオール成分とマレイン酸、フマル酸、コハク酸、アジピン酸、フタル酸、イソフタル酸、ヘキサヒドロフタル酸、テトラヒドロフタル酸、ダイマー酸、セバチン酸、アゼライン酸、5-ナトリウムスルホイソフタル酸等の多塩基酸、及びこれらの無水物との反応物であるポリエステルポリオールの(メタ)アクリレート;前記ジオール成分と多塩基酸及びこれらの無水物とε-カプロラクトン、γ-ブチロラクトン、δ-バレロラクトン等からなる環状ラクトン変性ポリエステルジオールの(メタ)アクリレート等の多官能(ポリ)エステル(メタ)アクリレート類等を挙げることができるが、これらに限定されるものではない。 Still further, diol components such as (poly) ethylene glycol, (poly) propylene glycol, (poly) tetramethylene glycol, (poly) butylene glycol, 3-methyl-1,5-pentanediol, hexanediol and maleic acid , Fumaric acid, succinic acid, adipic acid, phthalic acid, isophthalic acid, hexahydrophthalic acid, tetrahydrophthalic acid, dimer acid, sebacic acid, azelaic acid, polybasic acids such as 5-sodium sulfoisophthalic acid, and anhydrides thereof (Meth) acrylate of a polyester polyol which is a reaction product with a product of a cyclic lactone-modified polyester diol composed of the diol component and a polybasic acid and their anhydrides and ε-caprolactone, γ-butyrolactone, δ-valerolactone, etc. Many officials such as (meth) acrylate Can be mentioned (poly) ester (meth) acrylates such as, but not limited thereto.
 上記エポキシ(メタ)アクリレート類とは、エポキシ基を有する化合物と(メタ)アクリル酸とのカルボキシレート化合物である。例えば、フェノールノボラック型エポキシ(メタ)アクリレート、クレゾールノボラック型エポキシ(メタ)アクリレート、トリスヒドロキシフェニルメタン型エポキシ(メタ)アクリレート、ジシクロペンタジエンフェノール型エポキシ(メタ)アクリレート、ビスフェノールA型エポキシ(メタ)アクリレート、ビスフェノールF型エポキシ(メタ)アクリレート、ビフェノール型エポキシ(メタ)アクリレート、ビスフェノールAノボラック型エポキシ(メタ)アクリレート、ナフタレン骨格含有エポキシ(メタ)アクリレート、グリオキサール型エポキシ(メタ)アクリレート、複素環式エポキシ(メタ)アクリレート等、及びこれらの酸無水物変性エポキシアクリレート等が挙げられる。 The above epoxy (meth) acrylates are carboxylate compounds of a compound having an epoxy group and (meth) acrylic acid. For example, phenol novolac type epoxy (meth) acrylate, cresol novolac type epoxy (meth) acrylate, trishydroxyphenylmethane type epoxy (meth) acrylate, dicyclopentadienephenol type epoxy (meth) acrylate, bisphenol A type epoxy (meth) acrylate Bisphenol F type epoxy (meth) acrylate, biphenol type epoxy (meth) acrylate, bisphenol A novolak type epoxy (meth) acrylate, naphthalene skeleton-containing epoxy (meth) acrylate, glyoxal type epoxy (meth) acrylate, heterocyclic epoxy ( And (meth) acrylates and the like, and acid anhydride-modified epoxy acrylates thereof.
 ビニル基を有する化合物としては、エチルビニルエーテル、プロピルビニルエーテル、ヒドロキシエチルビニルエーテル、エチレングリコールジビニルエーテル等のビニルエーテル類が挙げられる。スチレン類としては、スチレン、メチルスチレン、エチルスチレン、ジビニルベンゼン等が挙げられる。その他ビニル化合物としてはトリアリルイソシアヌレート、トリメタアリルイソシアヌレート、ビスアリルナジイミド等が挙げられる。 Examples of the compound having a vinyl group include vinyl ethers such as ethyl vinyl ether, propyl vinyl ether, hydroxyethyl vinyl ether, and ethylene glycol divinyl ether. Examples of styrenes include styrene, methyl styrene, ethyl styrene, divinyl benzene and the like. Other vinyl compounds include triallyl isocyanurate, trimethallyl isocyanurate, bisallyl nadiimide and the like.
 これらの中でも、耐熱性の点から、ペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、クレゾールノボラック型エポキシ(メタ)アクリレート、ビスフェノールA型エポキシ(メタ)アクリレート、ナフタレン骨格含有エポキシ(メタ)アクリレート、ビスアリルナジイミドからなる群より選択される一種以上であることが好ましく、より耐熱性が向上する点から、ジペンタエリスリトールヘキサ(メタ)アクリレートであることがより好ましい。このような種類のエチレン性不飽和基を有する化合物を含むことにより、得られる硬化物の耐熱性がより向上する傾向にある。 Among these, from the viewpoint of heat resistance, pentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, cresol novolac type epoxy (meth) acrylate, bisphenol A type epoxy (meth) acrylate, naphthalene skeleton-containing epoxy ( One or more selected from the group consisting of (meth) acrylates and bisallylnadiimides are preferred, and dipentaerythritol hexa (meth) acrylates are more preferred from the viewpoint of further improving heat resistance. By including the compound having such an ethylenically unsaturated group, the heat resistance of the resulting cured product tends to be further improved.
 本実施形態の樹脂組成物において、(C)成分以外のエチレン性不飽和基を有する化合物(D)の含有量は、特に限定されないが、現像性を良好にするという観点から、樹脂組成物中の成分(A)、成分(C)及び成分(D)の合計含有量100質量部に対し、0.5質量部以上とすることが好ましく、1.0質量部以上とすることがより好ましく、1.5質量部以上とすることが更に好ましい。また、硬化物の耐熱性を良好にするという観点から、90質量部以下とすることが好ましく、70質量部以下とすることがより好ましく、50質量部以下とすることが更に好ましい。 In the resin composition of the present embodiment, the content of the compound (D) having an ethylenically unsaturated group other than the component (C) is not particularly limited, but from the viewpoint of improving developability in the resin composition. The total content of 100 parts by mass of component (A), component (C) and component (D) is preferably 0.5 parts by mass or more, more preferably 1.0 part by mass or more, More preferably, it is 1.5 parts by mass or more. Moreover, from a viewpoint of making the heat resistance of hardened | cured material favorable, it is preferable to set it as 90 mass parts or less, It is more preferable to set it as 70 mass parts or less, It is still more preferable to set it as 50 mass parts or less.
 本実施形態の樹脂組成物において、化合物(D)の含有量は、特に限定されないが、現像性を良好にするという観点から、樹脂組成物中の樹脂固形分100質量部に対して、0.5質量部以上とすることが好ましく、1.0質量部以上とすることがより好ましく、1.5質量部以上とすることが更に好ましく、5.0質量部以上とすることが更により好ましく、10質量部以上とすることが最も好ましい。また、硬化物の耐熱性を良好にするという観点から、樹脂組成物中の樹脂固形分100質量部に対して、90質量部以下とすることが好ましく、70質量部以下とすることがより好ましく、50質量部以下とすることが更に好ましく、25質量部以下とすることが更により好ましく、20質量部以下とすることが最も好ましい。 In the resin composition of the present embodiment, the content of the compound (D) is not particularly limited. However, from the viewpoint of improving the developability, the content of the compound (D) is 0.1% with respect to 100 parts by mass of the resin solid content in the resin composition. It is preferably 5 parts by mass or more, more preferably 1.0 part by mass or more, still more preferably 1.5 parts by mass or more, still more preferably 5.0 parts by mass or more, Most preferably, it is 10 parts by mass or more. Further, from the viewpoint of improving the heat resistance of the cured product, it is preferably 90 parts by mass or less, more preferably 70 parts by mass or less, with respect to 100 parts by mass of the resin solid content in the resin composition. 50 parts by mass or less, more preferably 25 parts by mass or less, and most preferably 20 parts by mass or less.
 <マレイミド化合物(E)>
 本実施形態の樹脂組成物においては、マレイミド化合物(E)(成分(E)とも称す)を用いることができる。以下にマレイミド化合物(E)について詳細に述べる。
<Maleimide compound (E)>
In the resin composition of this embodiment, a maleimide compound (E) (also referred to as component (E)) can be used. The maleimide compound (E) is described in detail below.
 本実施形態に用いるマレイミド化合物(E)は、分子中に一個以上のマレイミド基を有する化合物であれば、特に限定されるものではない。その具体例としては、例えば、N-フェニルマレイミド、N-ヒドロキシフェニルマレイミド、ビス(4-マレイミドフェニル)メタン、2,2-ビス{4-(4-マレイミドフェノキシ)-フェニル}プロパン、4,4-ジフェニルメタンビスマレイミド、ビス(3,5-ジメチル-4-マレイミドフェニル)メタン、ビス(3-エチル-5-メチル-4-マレイミドフェニル)メタン、ビス(3,5-ジエチル-4-マレイミドフェニル)メタン、フェニルメタンマレイミド、o-フェニレンビスマレイミド、m-フェニレンビスマレイミド、p-フェニレンビスマレイミド、o-フェニレンビスシトラコンイミド、m-フェニレンビスシトラコンイミド、p-フェニレンビスシトラコンイミド、2,2-ビス(4-(4-マレイミドフェノキシ)-フェニル)プロパン、3,3-ジメチル-5,5-ジエチル-4,4-ジフェニルメタンビスマレイミド、4-メチル-1,3-フェニレンビスマレイミド、1,6-ビスマレイミド-(2,2,4-トリメチル)ヘキサン、4,4-ジフェニルエーテルビスマレイミド、4,4-ジフェニルスルフォンビスマレイミド、1,3-ビス(3-マレイミドフェノキシ)ベンゼン、1,3-ビス(4-マレイミドフェノキシ)ベンゼン、4,4-ジフェニルメタンビスシトラコンイミド、2,2-ビス[4-(4-シトラコンイミドフェノキシ)フェニル]プロパン、ビス(3,5-ジメチル-4-シトラコンイミドフェニル)メタン、ビス(3-エチル-5-メチル-4-シトラコンイミドフェニル)メタン、ビス(3,5-ジエチル-4-シトラコンイミドフェニル)メタン、ポリフェニルメタンマレイミド、ノボラック型マレイミド化合物、ビフェニルアラルキル型マレイミド化合物、下記式(7)で表されるマレイミド化合物、下記式(8)で表されるマレイミド化合物、及びこれらマレイミド化合物のプレポリマー、又はマレイミド化合物とアミン化合物のプレポリマー等が挙げられる。 The maleimide compound (E) used in the present embodiment is not particularly limited as long as it is a compound having one or more maleimide groups in the molecule. Specific examples thereof include, for example, N-phenylmaleimide, N-hydroxyphenylmaleimide, bis (4-maleimidophenyl) methane, 2,2-bis {4- (4-maleimidophenoxy) -phenyl} propane, 4,4 -Diphenylmethane bismaleimide, bis (3,5-dimethyl-4-maleimidophenyl) methane, bis (3-ethyl-5-methyl-4-maleimidophenyl) methane, bis (3,5-diethyl-4-maleimidophenyl) Methane, phenylmethanemaleimide, o-phenylene bismaleimide, m-phenylene bismaleimide, p-phenylene bismaleimide, o-phenylene biscitraconimide, m-phenylene biscitraconimide, p-phenylene biscitraconimide, 2,2-bis (4- (4-Maleimido Noxy) -phenyl) propane, 3,3-dimethyl-5,5-diethyl-4,4-diphenylmethane bismaleimide, 4-methyl-1,3-phenylenebismaleimide, 1,6-bismaleimide- (2,2 , 4-trimethyl) hexane, 4,4-diphenyl ether bismaleimide, 4,4-diphenylsulfone bismaleimide, 1,3-bis (3-maleimidophenoxy) benzene, 1,3-bis (4-maleimidophenoxy) benzene, 4,4-diphenylmethane biscitraconimide, 2,2-bis [4- (4-citraconimidophenoxy) phenyl] propane, bis (3,5-dimethyl-4-citraconimidophenyl) methane, bis (3-ethyl- 5-methyl-4-citraconimidophenyl) methane, bis (3,5-die Ru-4-citraconimidophenyl) methane, polyphenylmethanemaleimide, novolac-type maleimide compound, biphenylaralkyl-type maleimide compound, maleimide compound represented by the following formula (7), maleimide compound represented by the following formula (8), And prepolymers of these maleimide compounds, or prepolymers of maleimide compounds and amine compounds.
 この中でも、ノボラック型マレイミド化合物、ビフェニルアラルキル型マレイミド化合物が特に好ましい。また、良好な塗膜性が得られ、耐熱性に優れるという観点から、下記式(7)で表されるマレイミド化合物、下記式(8)で表されるマレイミド化合物が好ましく、下記式(7)で表されるマレイミド化合物がより好ましい。下記式(7)で表されるマレイミド化合物としては、市販品を利用することもでき、例えば、BMI-2300(大和化成工業(株)社製)が挙げられる。下記式(8)で表されるマレイミド化合物としては、市販品を利用することもでき、例えば、MIR-3000(日本化薬(株)社製)が挙げられる。
 これらのマレイミド化合物(C)は1種単独又は2種以上を適宜混合して使用することも可能である。
Of these, novolac maleimide compounds and biphenylaralkyl maleimide compounds are particularly preferred. Further, from the viewpoint of obtaining good coating properties and excellent heat resistance, a maleimide compound represented by the following formula (7) and a maleimide compound represented by the following formula (8) are preferred, and the following formula (7) The maleimide compound represented by these is more preferable. A commercially available product can be used as the maleimide compound represented by the following formula (7), and examples thereof include BMI-2300 (manufactured by Daiwa Kasei Kogyo Co., Ltd.). A commercially available product may be used as the maleimide compound represented by the following formula (8), and examples thereof include MIR-3000 (manufactured by Nippon Kayaku Co., Ltd.).
These maleimide compounds (C) can be used singly or in appropriate combination of two or more.
Figure JPOXMLDOC01-appb-C000019
Figure JPOXMLDOC01-appb-C000019
 (式(7)中、複数のR5は、各々独立に、水素原子又はメチル基を表す。n1は、1以上の整数を表し、好ましくは1~10の整数を表し、より好ましくは1~5の整数を表す。)。 (In Formula (7), each of R 5 independently represents a hydrogen atom or a methyl group. N 1 represents an integer of 1 or more, preferably an integer of 1 to 10, more preferably 1) Represents an integer of ~ 5).
Figure JPOXMLDOC01-appb-C000020
Figure JPOXMLDOC01-appb-C000020
 (式(8)中、複数のR6は、各々独立に、水素原子又はメチル基を表す。n2は、1以上の整数を表し、好ましくは1~5の整数を表す。)。
 これらのマレイミド化合物(E)は、1種単独又は2種以上を適宜混合して使用することも可能である。
(In the formula (8), each of R 6 independently represents a hydrogen atom or a methyl group. N 2 represents an integer of 1 or more, preferably an integer of 1 to 5).
These maleimide compounds (E) can be used singly or in appropriate combination of two or more.
 本実施形態の樹脂組成物におけるマレイミド化合物(E)の含有量は、特に限定されないが、樹脂組成物を十分に硬化させ、耐熱性を向上させるという観点から、樹脂組成物中の成分(A)、成分(C)及び成分(D)の合計含有量100質量部に対し、0.01質量部以上とすることが好ましく、0.02質量部以上とすることがより好ましく、0.03質量部以上とすることが更に好ましい。また、現像性を良好にするという観点から、50質量部以下とすることが好ましく、45質量部以下とすることがより好ましく、40質量部以下とすることが更に好ましい。 The content of the maleimide compound (E) in the resin composition of the present embodiment is not particularly limited, but from the viewpoint of sufficiently curing the resin composition and improving heat resistance, the component (A) in the resin composition. The total content of component (C) and component (D) is preferably 0.01 parts by mass or more, more preferably 0.02 parts by mass or more, and 0.03 parts by mass with respect to 100 parts by mass. More preferably, the above is used. Moreover, from a viewpoint of making developability favorable, it is preferable to set it as 50 mass parts or less, It is more preferable to set it as 45 mass parts or less, It is still more preferable to set it as 40 mass parts or less.
 本実施形態の樹脂組成物において、マレイミド化合物の含有量(E)は、特に制限されず、樹脂固形分100質量部に対して、好ましくは0.01質量部~50質量部であり、より好ましくは0.02質量部~45質量部であり、更に好ましくは0.03質量部~20質量部であり、更により好ましくは0.1質量部~10質量部であり、最も好ましくは1質量部~7質量部である。マレイミド化合物の含有量が上記範囲内であることにより、硬化物の耐熱性がより向上する傾向にある。 In the resin composition of the present embodiment, the content (E) of the maleimide compound is not particularly limited, and is preferably 0.01 to 50 parts by mass, more preferably 100 parts by mass of the resin solid content. Is 0.02 parts by mass to 45 parts by mass, more preferably 0.03 parts by mass to 20 parts by mass, still more preferably 0.1 parts by mass to 10 parts by mass, and most preferably 1 part by mass. ~ 7 parts by mass. When the content of the maleimide compound is within the above range, the heat resistance of the cured product tends to be further improved.
 <充填材(F)>
 本実施形態の樹脂組成物には、塗膜性や耐熱性等の諸特性を向上させるために、充填材(F)(成分(F)とも称す)を併用することも可能である。本実施形態に用いる充填材(F)は、絶縁性を有するものであれば、特に限定されないが、例えば、シリカ(例えば天然シリカ、溶融シリカ、アモルファスシリカ、中空シリカ等)、アルミニウム化合物(例えばベーマイト、水酸化アルミニウム、アルミナ等)、マグネシウム化合物(例えば酸化マグネシウム、水酸化マグネシウム等)、カルシウム化合物(例えば炭酸カルシウム等)、モリブデン化合物(例えば酸化モリブデン、モリブデン酸亜鉛等)、バリウム化合物(例えば硫酸バリウム、ケイ酸バリウム等)、タルク(例えば天然タルク、焼成タルク等)、マイカ(雲母)、ガラス(例えば短繊維状ガラス、球状ガラス、微粉末ガラス(例えばEガラス、Tガラス、Dガラス等)等)、シリコーンパウダー、フッ素樹脂系充填材、ウレタン樹脂系充填材、アクリル樹脂系充填材、ポリエチレン系充填材、スチレン・ブタジエンゴム及びシリコーンゴムなどが挙げられる。
 その中でも、シリカ、ベーマイト、硫酸バリウム、シリコーンパウダー、フッ素樹脂系充填材、ウレタン樹脂系充填材、アクリル樹脂系充填材、ポリエチレン系充填材、スチレン・ブタジエンゴム及びシリコーンゴムからなる群から選択される一種以上であることが好ましい。
 これらの充填材(F)は、後述のシランカップリング剤などで表面処理されていてもよい。
<Filler (F)>
In the resin composition of this embodiment, a filler (F) (also referred to as component (F)) can be used in combination in order to improve various properties such as coating properties and heat resistance. The filler (F) used in the present embodiment is not particularly limited as long as it has insulating properties. For example, silica (for example, natural silica, fused silica, amorphous silica, hollow silica, etc.), an aluminum compound (for example, boehmite). , Aluminum hydroxide, alumina, etc.), magnesium compounds (eg, magnesium oxide, magnesium hydroxide, etc.), calcium compounds (eg, calcium carbonate, etc.), molybdenum compounds (eg, molybdenum oxide, zinc molybdate, etc.), barium compounds (eg, barium sulfate, etc.) , Barium silicate, etc.), talc (eg, natural talc, calcined talc, etc.), mica (mica), glass (eg, short fiber glass, spherical glass, fine powder glass (eg, E glass, T glass, D glass, etc.), etc. ), Silicone powder, Fluororesin filler, C Tan resin filler, an acrylic resin-based filler, polyethylene fillers, such as styrene-butadiene rubber and silicone rubber.
Among them, it is selected from the group consisting of silica, boehmite, barium sulfate, silicone powder, fluorine resin filler, urethane resin filler, acrylic resin filler, polyethylene filler, styrene / butadiene rubber and silicone rubber. One or more are preferred.
These fillers (F) may be surface-treated with a silane coupling agent described later.
 特に、硬化物の耐熱性を向上させ、また良好な塗膜性が得られるという観点から、シリカが好ましく、溶融シリカがとりわけ好ましい。シリカの具体例としては、デンカ(株)製のSFP-130MC等、(株)アドマテックス製のSC2050―MB、SC1050-MLE、YA010C-MFN、YA050C-MJA等が挙げられる。
 これらの充填材(F)は、1種単独又は2種以上を適宜混合して使用することも可能である。
In particular, silica is preferable and fused silica is particularly preferable from the viewpoint of improving the heat resistance of the cured product and obtaining good coating properties. Specific examples of silica include SFP-130MC manufactured by Denka Corporation, SC2050-MB, SC1050-MLE, YA010C-MFN, YA050C-MJA manufactured by Admatechs Corporation.
These fillers (F) can be used singly or in appropriate combination of two or more.
 本実施形態の樹脂組成物において、充填材(F)の含有量は、特に限定されないが、硬化物の耐熱性を向上させるという観点から、樹脂組成物中の樹脂固形分100質量部に対して、5質量部以上とすることが好ましく、10質量部以上とすることがより好ましく、20質量部以上とすることが更に好ましい。また、樹脂組成物の現像性を良好にするという観点から、樹脂組成物中の樹脂固形分100質量部に対して、400質量部以下とすることが好ましく、350質量部以下とすることがより好ましく、300質量部以下とすることが更に好ましく、200質量部以下とすることが更により好ましく、100質量部以下とすることが最も好ましい。 In the resin composition of the present embodiment, the content of the filler (F) is not particularly limited, but from the viewpoint of improving the heat resistance of the cured product, the resin solid content in the resin composition is 100 parts by mass. It is preferably 5 parts by mass or more, more preferably 10 parts by mass or more, and still more preferably 20 parts by mass or more. Further, from the viewpoint of improving the developability of the resin composition, it is preferably 400 parts by mass or less, more preferably 350 parts by mass or less, with respect to 100 parts by mass of the resin solid content in the resin composition. Preferably, it is more preferably 300 parts by mass or less, still more preferably 200 parts by mass or less, and most preferably 100 parts by mass or less.
 <シランカップリング剤及び湿潤分散剤>
 本実施形態の樹脂組成物には、充填材の分散性、ポリマー及び/又は樹脂と、充填材との接着強度を向上させるために、シランカップリング剤及び/又は湿潤分散剤を併用することも可能である。
 これらのシランカップリング剤としては、一般に無機物の表面処理に使用されているシランカップリング剤であれば、特に限定されるものではない。具体例としては、例えば、γ-アミノプロピルトリエトキシシラン、N-β-(アミノエチル)-γ-アミノプロピルトリメトキシシラン等のアミノシラン系;γ-グリシドキシプロピルトリメトキシシラン等のエポキシシラン系;γ-アクリロキシプロピルトリメトキシシラン等のアクリルシラン系;N-β-(N-ビニルベンジルアミノエチル)-γ-アミノプロピルトリメトキシシラン塩酸塩等のカチオニックシラン系;フェニルシラン系のシランカップリング剤が挙げられる。これらのシランカップリング剤は、1種単独又は2種以上を適宜組み合わせて使用することも可能である。
<Silane coupling agent and wetting and dispersing agent>
In the resin composition of the present embodiment, a silane coupling agent and / or a wet dispersant may be used in combination in order to improve the dispersibility of the filler, the polymer and / or resin, and the adhesive strength between the filler. Is possible.
These silane coupling agents are not particularly limited as long as they are silane coupling agents generally used for inorganic surface treatment. Specific examples include, for example, aminosilanes such as γ-aminopropyltriethoxysilane and N-β- (aminoethyl) -γ-aminopropyltrimethoxysilane; epoxysilanes such as γ-glycidoxypropyltrimethoxysilane Acrylic silanes such as γ-acryloxypropyltrimethoxysilane; cationic silanes such as N-β- (N-vinylbenzylaminoethyl) -γ-aminopropyltrimethoxysilane hydrochloride; phenylsilane silane cups A ring agent is mentioned. These silane coupling agents can be used alone or in combination of two or more.
 本実施形態の樹脂組成物において、シランカップリング剤の含有量は、特に限定されないが、通常、樹脂組成物100質量部に対して、0.1~10質量部である。
 湿潤分散剤としては、塗料用に使用されている分散安定剤であれば、特に限定されるものではない。具体例としては、例えば、ビッグケミー・ジャパン(株)製のDISPERBYK(登録商標)-110、111、118、180、161、BYK(登録商標)-W996、W9010、W903等の湿潤分散剤が挙げられる。これらの湿潤分散剤は、1種単独又は2種以上を適宜混合して使用することも可能である。
 本実施形態の樹脂組成物において、湿潤分散剤の含有量は、特に限定されないが、通常、樹脂組成物100質量部に対して、0.1~10質量部である。
In the resin composition of the present embodiment, the content of the silane coupling agent is not particularly limited, but is usually 0.1 to 10 parts by mass with respect to 100 parts by mass of the resin composition.
The wetting and dispersing agent is not particularly limited as long as it is a dispersion stabilizer used for coatings. Specific examples include wet dispersing agents such as DISPERBYK (registered trademark) -110, 111, 118, 180, 161, BYK (registered trademark) -W996, W9010, and W903 manufactured by Big Chemie Japan Co., Ltd. . These wetting and dispersing agents can be used singly or in appropriate combination of two or more.
In the resin composition of the present embodiment, the content of the wetting and dispersing agent is not particularly limited, but is usually 0.1 to 10 parts by mass with respect to 100 parts by mass of the resin composition.
 <シアン酸エステル化合物、フェノール樹脂、オキセタン樹脂、ベンゾオキサジン化合物及び前記(1)で表されるビフェニルアラルキル型エポキシ樹脂(A)と異なるエポキシ樹脂からなる群から選択されるいずれか一種以上の化合物(G)>
 本実施形態に用いる化合物(G)(成分(G)とも称す)は、成分(A)を用いることにより得られる銅めっき密着性等に加え、樹脂組成物が用いられる分野で求められる、硬化した硬化物の難燃性、耐熱性、熱膨張特性等の特性に応じて、様々な種類のものを用いることができる。例えば、耐熱性を求められる場合には、シアン酸エステル化合物、ベンゾオキサジン化合物等が挙げられ、他にフェノール樹脂、オキセタン樹脂等も用いることができる。ビフェニルアラルキル型エポキシ樹脂(A)、光硬化開始剤(B)、化合物(C)及び化合物(D)と共に、シアン酸エステル化合物を用いると、耐熱性(ガラス転移温度)、低熱膨張性、めっき密着性等に優れる樹脂組成物を得ることができる。さらに、シアン酸エステル化合物をマレイミド化合物と併用すると、めっき密着性により優れる樹脂組成物を得ることができるため、好ましい。前記(1)で表されるビフェニルアラルキル型エポキシ樹脂(A)と共に、該エポキシ樹脂(A)と異なるエポキシ樹脂を用いると、特に、現像性及びめっき密着性に優れる樹脂組成物を得ることができる。
<One or more compounds selected from the group consisting of a cyanate ester compound, a phenol resin, an oxetane resin, a benzoxazine compound and an epoxy resin different from the biphenylaralkyl type epoxy resin (A) represented by (1) above ( G) >
The compound (G) (also referred to as component (G)) used in the present embodiment is cured, which is required in the field where the resin composition is used, in addition to the copper plating adhesion obtained by using the component (A). Various kinds of materials can be used according to the properties of the cured product such as flame retardancy, heat resistance, and thermal expansion properties. For example, when heat resistance is required, a cyanate ester compound, a benzoxazine compound, and the like can be used, and a phenol resin, an oxetane resin, and the like can also be used. When cyanate ester compound is used together with biphenyl aralkyl type epoxy resin (A), photocuring initiator (B), compound (C) and compound (D), heat resistance (glass transition temperature), low thermal expansion, plating adhesion A resin composition having excellent properties and the like can be obtained. Furthermore, it is preferable to use a cyanate ester compound in combination with a maleimide compound because a resin composition having better plating adhesion can be obtained. When an epoxy resin different from the epoxy resin (A) is used together with the biphenyl aralkyl type epoxy resin (A) represented by the above (1), a resin composition excellent in developability and plating adhesion can be obtained. .
 また、これらは、1種単独又は2種以上を適宜混合して使用することも可能である。
 以下、これらの化合物及び/又は樹脂(G)の詳細について説明する。
Moreover, these can also be used individually by 1 type or in mixture of 2 or more types as appropriate.
Hereinafter, the detail of these compounds and / or resin (G) is demonstrated.
 <シアン酸エステル化合物>
 シアン酸エステル化合物としては、シアナト基(シアン酸エステル基)が少なくとも1個置換された芳香族部分を分子内に有する樹脂であれば特に限定されるものではない。
<Cyanate ester compound>
The cyanate ester compound is not particularly limited as long as it is a resin having in its molecule an aromatic moiety substituted with at least one cyanate group (cyanate ester group).
 例えば一般式(9)で表されるものが挙げられる。 For example, what is represented by General formula (9) is mentioned.
Figure JPOXMLDOC01-appb-C000021
Figure JPOXMLDOC01-appb-C000021
 式(9)中、Ar1は、ベンゼン環、ナフタレン環又は2つのベンゼン環が単結合したものを表す。複数ある場合は互いに同一であっても異なっていても良い。Raは各々独立に水素原子、炭素数1~6のアルキル基、炭素数6~12のアリール基、炭素数1~4のアルコキシル基、炭素数1~6のアルキル基と炭素数6~12のアリール基とが結合された基を示す。Raにおける芳香環は置換基を有していてもよく、Ar1及びRaにおける置換基は任意の位置を選択できる。pはAr1に結合するシアナト基の数を示し、各々独立に1~3の整数である。qはAr1に結合するRaの数を示し、Ar1がベンゼン環の時は4-p、ナフタレン環の時は6-p、2つのベンゼン環が単結合したものの時は8-pである。tは平均繰り返し数を示し、0~50の整数であり、シアン酸エステル化合物は、tが異なる化合物の混合物であってもよい。Xは、複数ある場合は各々独立に、単結合、炭素数1~50の2価の有機基(水素原子がヘテロ原子に置換されていてもよい。)、窒素数1~10の2価の有機基(例えば-N-R-N-(ここでRは有機基を示す。))、カルボニル基(-CO-)、カルボキシ基(-C(=O)O-)、カルボニルジオキサイド基(-OC(=O)O-)、スルホニル基(-SO2-)、2価の硫黄原子又は2価の酸素原子のいずれかを示す。 In formula (9), Ar 1 represents a single bond of a benzene ring, a naphthalene ring or two benzene rings. When there are a plurality, they may be the same or different. Each Ra is independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms, an alkoxyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 6 carbon atoms and an alkyl group having 6 to 12 carbon atoms. A group to which an aryl group is bonded is shown. The aromatic ring in Ra may have a substituent, and the substituent in Ar 1 and Ra can be selected at any position. p represents the number of cyanato groups bonded to Ar 1 , and each independently represents an integer of 1 to 3. q represents the number of Ra bonded to Ar 1, and is 4-p when Ar 1 is a benzene ring, 6-p when Ar 1 is a naphthalene ring, and 8-p when two benzene rings are a single bond. . t represents an average number of repetitions and is an integer of 0 to 50, and the cyanate ester compound may be a mixture of compounds having different t. When there are a plurality of Xs, each independently represents a single bond, a divalent organic group having 1 to 50 carbon atoms (a hydrogen atom may be substituted with a hetero atom), a divalent group having 1 to 10 nitrogen atoms. An organic group (eg, —N—R—N— (where R represents an organic group)), a carbonyl group (—CO—), a carboxy group (—C (═O) O—), a carbonyl dioxide group ( —OC (═O) O—), a sulfonyl group (—SO 2 —), a divalent sulfur atom or a divalent oxygen atom.
 一般式(9)のRaにおけるアルキル基は、直鎖もしくは分枝の鎖状構造、及び、環状構造(例えばシクロアルキル基等)いずれを有していてもよい。
 また、一般式(9)におけるアルキル基及びRaにおけるアリール基中の水素原子は、フッ素原子、塩素原子等のハロゲン原子、メトキシ基、フェノキシ基等のアルコキシル基、又はシアノ基等で置換されていてもよい。
 アルキル基の具体例としては、メチル基、エチル基、プロピル基、イソプロピル基、n-ブチル基、イソブチル基、tert-ブチル基、n-ペンチル基、1-エチルプロピル基、2,2-ジメチルプロピル基、シクロペンチル基、ヘキシル基、シクロヘキシル基、及びトリフルオロメチル基等が挙げられる。
 アリール基の具体例としては、フェニル基、キシリル基、メシチル基、ナフチル基、フェノキシフェニル基、エチルフェニル基、o-,m-又はp-フルオロフェニル基、ジクロロフェニル基、ジシアノフェニル基、トリフルオロフェニル基、メトキシフェニル基、及びo-,m-又はp-トリル基等が挙げられる。更にアルコキシル基としては、例えば、メトキシ基、エトキシ基、プロポキシ基、イソプロポキシ基、n-ブトキシ基、イソブトキシ基、及びtert-ブトキシ基等が挙げられる。
The alkyl group in Ra in the general formula (9) may have any of a linear or branched chain structure and a cyclic structure (for example, a cycloalkyl group).
In addition, the hydrogen atom in the alkyl group in the general formula (9) and the aryl group in Ra is substituted with a halogen atom such as a fluorine atom or a chlorine atom, an alkoxyl group such as a methoxy group or a phenoxy group, or a cyano group. Also good.
Specific examples of the alkyl group include methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group, n-pentyl group, 1-ethylpropyl group, 2,2-dimethylpropyl group. Group, cyclopentyl group, hexyl group, cyclohexyl group, trifluoromethyl group and the like.
Specific examples of the aryl group include phenyl group, xylyl group, mesityl group, naphthyl group, phenoxyphenyl group, ethylphenyl group, o-, m- or p-fluorophenyl group, dichlorophenyl group, dicyanophenyl group, trifluorophenyl. Group, methoxyphenyl group, and o-, m- or p-tolyl group. Further, examples of the alkoxyl group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, an n-butoxy group, an isobutoxy group, and a tert-butoxy group.
 一般式(9)のXにおける炭素数1~50の2価の有機基の具体例としては、メチレン基、エチレン基、トリメチレン基、シクロペンチレン基、シクロヘキシレン基、トリメチルシクロヘキシレン基、ビフェニルイルメチレン基、ジメチルメチレン-フェニレン-ジメチルメチレン基、フルオレンジイル基、及びフタリドジイル基等が挙げられる。該2価の有機基中の水素原子は、フッ素原子、塩素原子等のハロゲン原子、メトキシ基、フェノキシ基等のアルコキシル基、シアノ基等で置換されていてもよい。
 一般式(9)のXにおける窒素数1~10の2価の有機基としては、イミノ基、ポリイミド基等が挙げられる。
Specific examples of the divalent organic group having 1 to 50 carbon atoms in X in the general formula (9) include a methylene group, an ethylene group, a trimethylene group, a cyclopentylene group, a cyclohexylene group, a trimethylcyclohexylene group, and biphenylyl. Examples include a methylene group, a dimethylmethylene-phenylene-dimethylmethylene group, a fluorenediyl group, and a phthalidodiyl group. The hydrogen atom in the divalent organic group may be substituted with a halogen atom such as a fluorine atom or a chlorine atom, an alkoxyl group such as a methoxy group or a phenoxy group, a cyano group, or the like.
Examples of the divalent organic group having 1 to 10 nitrogen atoms in X of the general formula (9) include an imino group and a polyimide group.
 また、一般式(9)中のXの有機基として、例えば、下記一般式(10)又は下記一般式(11)で表される構造であるものが挙げられる。 Further, examples of the organic group of X in the general formula (9) include those having a structure represented by the following general formula (10) or the following general formula (11).
Figure JPOXMLDOC01-appb-C000022
Figure JPOXMLDOC01-appb-C000022
 式(10)中、Ar2はベンゼンテトライル基、ナフタレンテトライル基又はビフェニルテトライル基を示し、uが2以上の場合、互いに同一であっても異なっていてもよい。Rb、Rc、Rf、及びRgは各々独立に、水素原子、炭素数1~6のアルキル基、炭素数6~12のアリール基、トリフルオロメチル基、又はフェノール性ヒドロキシ基を少なくとも1個有するアリール基を示す。Rd及び、Reは各々独立に、水素原子、炭素数1~6のアルキル基、炭素数6~12のアリール基、炭素数1~4のアルコキシル基、又はヒドロキシ基のいずれか一種から選択される。uは0~5の整数を示す。 In formula (10), Ar 2 represents a benzenetetrayl group, a naphthalenetetrayl group or a biphenyltetrayl group, and when u is 2 or more, they may be the same as or different from each other. Rb, Rc, Rf, and Rg are each independently an aryl having at least one hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms, a trifluoromethyl group, or a phenolic hydroxy group. Indicates a group. Rd and Re are each independently selected from any one of a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms, an alkoxyl group having 1 to 4 carbon atoms, and a hydroxy group. . u represents an integer of 0 to 5.
Figure JPOXMLDOC01-appb-C000023
Figure JPOXMLDOC01-appb-C000023
 式(11)中、Ar3はベンゼンテトライル基、ナフタレンテトライル基又はビフェニルテトライル基を示し、vが2以上の場合、互いに同一であっても異なっていてもよい。Ri、及びRjは各々独立に、水素原子、炭素数1~6のアルキル基、炭素数6~12のアリール基、ベンジル基、炭素数1~4のアルコキシル基、ヒドロキシ基、トリフルオロメチル基、又はシアナト基が少なくとも1個置換されたアリール基を示す。vは0~5の整数を示すが、vが異なる化合物の混合物であってもよい。 Wherein (11), Ar 3 represents a benzene tetracarboxylic yl group, naphthalene tetracarboxylic yl group or a biphenyl tetracarboxylic yl group, when v is 2 or more, may be the same or different from each other. Ri and Rj are each independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms, a benzyl group, an alkoxyl group having 1 to 4 carbon atoms, a hydroxy group, a trifluoromethyl group, Or an aryl group substituted with at least one cyanato group. v represents an integer of 0 to 5, but may be a mixture of compounds having different v.
 さらに、一般式(9)中のXとしては、下記式で表される2価の基が挙げられる。 Furthermore, examples of X in the general formula (9) include a divalent group represented by the following formula.
Figure JPOXMLDOC01-appb-C000024
Figure JPOXMLDOC01-appb-C000024
 ここで式中、zは4~7の整数を示す。Rkは各々独立に、水素原子又は炭素数1~6のアルキル基を示す。
 一般式(10)のAr2及び一般式(11)のAr3の具体例としては、一般式(10)に示す2個の炭素原子、又は一般式(11)に示す2個の酸素原子が、1,4位又は1,3位に結合するベンゼンテトライル基、上記2個の炭素原子又は2個の酸素原子が4,4’位、2,4’位、2,2’位、2,3’位、3,3’位、又は3,4’位に結合するビフェニルテトライル基、及び、上記2個の炭素原子又は2個の酸素原子が、2,6位、1,5位、1,6位、1,8位、1,3位、1,4位、又は2,7位に結合するナフタレンテトライル基が挙げられる。
 一般式(10)のRb、Rc、Rd、Re、Rf及びRg、並びに一般式(11)のRi、Rjにおけるアルキル基及びアリール基は、上記一般式(9)におけるものと同義である。
In the formula, z represents an integer of 4 to 7. Each Rk independently represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.
Specific examples of Ar 2 in the general formula (10) and Ar 3 in the general formula (11) include two carbon atoms represented by the general formula (10) or two oxygen atoms represented by the general formula (11). A benzenetetrayl group bonded to the 1,4-position or the 1,3-position, the two carbon atoms or the two oxygen atoms are 4,4′-position, 2,4′-position, 2,2′-position, 2 , 3′-position, 3,3′-position, or 3,4′-position, and the above two carbon atoms or two oxygen atoms are in the 2,6-position, 1,5-position , 1,6-position, 1,8-position, 1,3-position, 1,4-position, or 2,7-position.
Rb, Rc, Rd, Re, Rf and Rg in the general formula (10), and the alkyl group and aryl group in Ri and Rj in the general formula (11) have the same meanings as those in the general formula (9).
 上記一般式(9)で表されるシアナト置換芳香族化合物の具体例としては、シアナトベンゼン、1-シアナト-2-,1-シアナト-3-,又は1-シアナト-4-メチルベンゼン、1-シアナト-2-,1-シアナト-3-,又は1-シアナト-4-メトキシベンゼン、1-シアナト-2,3-,1-シアナト-2,4-,1-シアナト-2,5-,1-シアナト-2,6-,1-シアナト-3,4-又は1-シアナト-3,5-ジメチルベンゼン、シアナトエチルベンゼン、シアナトブチルベンゼン、シアナトオクチルベンゼン、シアナトノニルベンゼン、2-(4-シアナフェニル)-2-フェニルプロパン(4-α-クミルフェノールのシアネート)、1-シアナト-4-シクロヘキシルベンゼン、1-シアナト-4-ビニルベンゼン、1-シアナト-2-又は1-シアナト-3-クロロベンゼン、1-シアナト-2,6-ジクロロベンゼン、1-シアナト-2-メチル-3-クロロベンゼン、シアナトニトロベンゼン、1-シアナト-4-ニトロ-2-エチルベンゼン、1-シアナト-2-メトキシ-4-アリルベンゼン(オイゲノールのシアネート)、メチル(4-シアナトフェニル)スルフィド、1-シアナト-3-トリフルオロメチルベンゼン、4-シアナトビフェニル、1-シアナト-2-又は1-シアナト-4-アセチルベンゼン、4-シアナトベンズアルデヒド、4-シアナト安息香酸メチルエステル、4-シアナト安息香酸フェニルエステル、1-シアナト-4-アセトアミノベンゼン、4-シアナトベンゾフェノン、1-シアナト-2,6-ジ-tert-ブチルベンゼン、1,2-ジシアナトベンゼン、1,3-ジシアナトベンゼン、1,4-ジシアナトベンゼン、1,4-ジシアナト-2-tert-ブチルベンゼン、1,4-ジシアナト-2,4-ジメチルベンゼン、1,4-ジシアナト-2,3,4-ジメチルベンゼン、1,3-ジシアナト-2,4,6-トリメチルベンゼン、1,3-ジシアナト-5-メチルベンゼン、1-シアナト又は2-シアナトナフタレン、1-シアナト4-メトキシナフタレン、2-シアナト-6-メチルナフタレン、2-シアナト-7-メトキシナフタレン、2,2’-ジシアナト-1,1’-ビナフチル、1,3-,1,4-,1,5-,1,6-,1,7-,2,3-,2,6-又は2,7-ジシアナトシナフタレン、2,2’-又は4,4’-ジシアナトビフェニル、4,4’-ジシアナトオクタフルオロビフェニル、2,4’-又は4,4’-ジシアナトジフェニルメタン、ビス(4-シアナト-3,5-ジメチルフェニル)メタン、1,1-ビス(4-シアナトフェニル)エタン、1,1-ビス(4-シアナトフェニル)プロパン、2,2-ビス(4-シアナトフェニル)プロパン、2,2-ビス(4-シアナト-3-メチルフェニル)プロパン、2,2-ビス(2-シアナト-5-ビフェニルイル)プロパン、2,2-ビス(4-シアナトフェニル)ヘキサフルオロプロパン、2,2-ビス(4-シアナト-3,5-ジメチルフェニル)プロパン、1,1-ビス(4-シアナトフェニル)ブタン、1,1-ビス(4-シアナトフェニル)イソブタン、1,1-ビス(4-シアナトフェニル)ペンタン、1,1-ビス(4-シアナトフェニル)-3-メチルブタン、1,1-ビス(4-シアナトフェニル)-2-メチルブタン、1,1-ビス(4-シアナトフェニル)-2,2-ジメチルプロパン、2,2-ビス(4-シアナトフェニル)ブタン、2,2-ビス(4-シアナトフェニル)ペンタン、2,2-ビス(4-シアナトフェニル)ヘキサン、2,2-ビス(4-シアナトフェニル)-3-メチルブタン、2,2-ビス(4-シアナトフェニル)-4-メチルペンタン、2,2-ビス(4-シアナトフェニル)-3,3-ジメチルブタン、3,3-ビス(4-シアナトフェニル)ヘキサン、3,3-ビス(4-シアナトフェニル)ヘプタン、3,3-ビス(4-シアナトフェニル)オクタン、3,3-ビス(4-シアナトフェニル)-2-メチルペンタン、3,3-ビス(4-シアナトフェニル)-2-メチルヘキサン、3,3-ビス(4-シアナトフェニル)-2,2-ジメチルペンタン、4,4-ビス(4-シアナトフェニル)-3-メチルヘプタン、3,3-ビス(4-シアナトフェニル)-2-メチルヘプタン、3,3-ビス(4-シアナトフェニル)-2,2-ジメチルヘキサン、3,3-ビス(4-シアナトフェニル)-2,4-ジメチルヘキサン、3,3-ビス(4-シアナトフェニル)-2,2,4-トリメチルペンタン、2,2-ビス(4-シアナトフェニル)-1,1,1,3,3,3-ヘキサフルオロプロパン、ビス(4-シアナトフェニル)フェニルメタン、1,1-ビス(4-シアナトフェニル)-1-フェニルエタン、ビス(4-シアナトフェニル)ビフェニルメタン、1,1-ビス(4-シアナトフェニル)シクロペンタン、1,1-ビス(4-シアナトフェニル)シクロヘキサン、2,2-ビス(4-シアナト-3-イソプロピルフェニル)プロパン、1,1-ビス(3-シクロヘキシル-4-シアナトフェニル)シクロヘキサン、ビス(4-シアナトフェニル)ジフェニルメタン、ビス(4-シアナトフェニル)-2,2-ジクロロエチレン、1,3-ビス[2-(4-シアナトフェニル)-2-プロピル]ベンゼン、1,4-ビス[2-(4-シアナトフェニル)-2-プロピル]ベンゼン、1,1-ビス(4-シアナトフェニル)-3,3,5-トリメチルシクロヘキサン、4-[ビス(4-シアナトフェニル)メチル]ビフェニル、4,4-ジシアナトベンゾフェノン、1,3-ビス(4-シアナトフェニル)-2-プロペン-1-オン、ビス(4-シアナトフェニル)エーテル、ビス(4-シアナトフェニル)スルフィド、ビス(4-シアナトフェニル)スルホン、4-シアナト安息香酸-4-シアナトフェニルエステル(4-シアナトフェニル-4-シアナトベンゾエート)、ビス-(4-シアナトフェニル)カーボネート、1,3-ビス(4-シアナトフェニル)アダマンタン、1,3-ビス(4-シアナトフェニル)-5,7-ジメチルアダマンタン、3,3-ビス(4-シアナトフェニル)イソベンゾフラン-1(3H)-オン(フェノールフタレインのシアネート)、3,3-ビス(4-シアナト-3-メチルフェニル)イソベンゾフラン-1(3H)-オン(o-クレゾールフタレインのシアネート)、9,9’-ビス(4-シアナトフェニル)フルオレン、9,9-ビス(4-シアナト-3-メチルフェニル)フルオレン、9,9-ビス(2-シアナト-5-ビフェニルイル)フルオレン、トリス(4-シアナトフェニル)メタン、1,1,1-トリス(4-シアナトフェニル)エタン、1,1,3-トリス(4-シアナトフェニル)プロパン、α,α,α’-トリス(4-シアナトフェニル)-1-エチル-4-イソプロピルベンゼン、1,1,2,2-テトラキス(4-シアナトフェニル)エタン、テトラキス(4-シアナトフェニル)メタン、2,4,6-トリス(N-メチル-4-シアナトアニリノ)-1,3,5-トリアジン、2,4-ビス(N-メチル-4-シアナトアニリノ)-6-(N-メチルアニリノ)-1,3,5-トリアジン、ビス(N-4-シアナト-2-メチルフェニル)-4,4’-オキシジフタルイミド、ビス(N-3-シアナト-4-メチルフェニル)-4,4’-オキシジフタルイミド、ビス(N-4-シアナトフェニル)-4,4’-オキシジフタルイミド、ビス(N-4-シアナト-2-メチルフェニル)-4,4’-(ヘキサフルオロイソプロピリデン)ジフタルイミド、トリス(3,5-ジメチル-4-シアナトベンジル)イソシアヌレート、2-フェニル-3,3-ビス(4-シアナトフェニル)フタルイミジン、2-(4-メチルフェニル)-3,3-ビス(4-シアナトフェニル)フタルイミジン、2-フェニル-3,3-ビス(4-シアナト-3-メチルフェニル)フタルイミジン、1-メチル-3,3-ビス(4-シアナトフェニル)インドリン-2-オン、及び、2-フェニル-3,3-ビス(4-シアナトフェニル)インドリン-2-オンが挙げられる。 Specific examples of the cyanato-substituted aromatic compound represented by the general formula (9) include cyanatobenzene, 1-cyanato-2-, 1-cyanato-3-, or 1-cyanato-4-methylbenzene, 1 -Cyanato-2-, 1-cyanato-3-, or 1-cyanato-4-methoxybenzene, 1-cyanato-2,3-, 1-cyanato-2,4-, 1-cyanato-2,5-, 1-cyanato-2,6-, 1-cyanato-3,4- or 1-cyanato-3,5-dimethylbenzene, cyanatoethylbenzene, cyanatobutylbenzene, cyanatooctylbenzene, cyanatononylbenzene, 2- (4-cyanaphenyl) -2-phenylpropane (cyanate of 4-α-cumylphenol), 1-cyanato-4-cyclohexylbenzene, 1-cyanato-4-vinylben 1-cyanato-2- or 1-cyanato-3-chlorobenzene, 1-cyanato-2,6-dichlorobenzene, 1-cyanato-2-methyl-3-chlorobenzene, cyanatonitrobenzene, 1-cyanato-4- Nitro-2-ethylbenzene, 1-cyanato-2-methoxy-4-allylbenzene (eugenol cyanate), methyl (4-cyanatophenyl) sulfide, 1-cyanato-3-trifluoromethylbenzene, 4-cyanatobiphenyl 1-cyanato-2- or 1-cyanato-4-acetylbenzene, 4-cyanatobenzaldehyde, 4-cyanatobenzoic acid methyl ester, 4-cyanatobenzoic acid phenyl ester, 1-cyanato-4-acetaminobenzene, 4 -Cyanatobenzophenone, 1-cyanato-2,6-di-ter t-butylbenzene, 1,2-dicyanatobenzene, 1,3-dicyanatobenzene, 1,4-dicyanatobenzene, 1,4-dicyanato-2-tert-butylbenzene, 1,4-dicyanato-2, 4-dimethylbenzene, 1,4-dicyanato-2,3,4-dimethylbenzene, 1,3-dicyanato-2,4,6-trimethylbenzene, 1,3-dicyanato-5-methylbenzene, 1-cyanato or 2-cyanatonaphthalene, 1-cyanato-4-methoxynaphthalene, 2-cyanato-6-methylnaphthalene, 2-cyanato-7-methoxynaphthalene, 2,2′-dicyanato-1,1′-binaphthyl, 1,3- , 1,4-, 1,5-, 1,6-, 1,7-, 2,3-, 2,6- or 2,7-dicyanatosinaphthalene, 2,2'- or 4,4 ' -The Anatobiphenyl, 4,4′-dicyanatooctafluorobiphenyl, 2,4′- or 4,4′-dicyanatodiphenylmethane, bis (4-cyanato-3,5-dimethylphenyl) methane, 1,1-bis ( 4-cyanatophenyl) ethane, 1,1-bis (4-cyanatophenyl) propane, 2,2-bis (4-cyanatophenyl) propane, 2,2-bis (4-cyanato-3-methylphenyl) ) Propane, 2,2-bis (2-cyanato-5-biphenylyl) propane, 2,2-bis (4-cyanatophenyl) hexafluoropropane, 2,2-bis (4-cyanato-3,5- Dimethylphenyl) propane, 1,1-bis (4-cyanatophenyl) butane, 1,1-bis (4-cyanatophenyl) isobutane, 1,1-bis (4-cyanato) Enyl) pentane, 1,1-bis (4-cyanatophenyl) -3-methylbutane, 1,1-bis (4-cyanatophenyl) -2-methylbutane, 1,1-bis (4-cyanatophenyl) -2,2-dimethylpropane, 2,2-bis (4-cyanatophenyl) butane, 2,2-bis (4-cyanatophenyl) pentane, 2,2-bis (4-cyanatophenyl) hexane, 2,2-bis (4-cyanatophenyl) -3-methylbutane, 2,2-bis (4-cyanatophenyl) -4-methylpentane, 2,2-bis (4-cyanatophenyl) -3, 3-dimethylbutane, 3,3-bis (4-cyanatophenyl) hexane, 3,3-bis (4-cyanatophenyl) heptane, 3,3-bis (4-cyanatophenyl) octane, 3,3 -Bis (4-shear Natophenyl) -2-methylpentane, 3,3-bis (4-cyanatophenyl) -2-methylhexane, 3,3-bis (4-cyanatophenyl) -2,2-dimethylpentane, 4,4- Bis (4-cyanatophenyl) -3-methylheptane, 3,3-bis (4-cyanatophenyl) -2-methylheptane, 3,3-bis (4-cyanatophenyl) -2,2-dimethyl Hexane, 3,3-bis (4-cyanatophenyl) -2,4-dimethylhexane, 3,3-bis (4-cyanatophenyl) -2,2,4-trimethylpentane, 2,2-bis ( 4-cyanatophenyl) -1,1,1,3,3,3-hexafluoropropane, bis (4-cyanatophenyl) phenylmethane, 1,1-bis (4-cyanatophenyl) -1-phenyl Ethane, screw ( -Cyanatophenyl) biphenylmethane, 1,1-bis (4-cyanatophenyl) cyclopentane, 1,1-bis (4-cyanatophenyl) cyclohexane, 2,2-bis (4-cyanato-3-isopropyl) Phenyl) propane, 1,1-bis (3-cyclohexyl-4-cyanatophenyl) cyclohexane, bis (4-cyanatophenyl) diphenylmethane, bis (4-cyanatophenyl) -2,2-dichloroethylene, 1,3 -Bis [2- (4-cyanatophenyl) -2-propyl] benzene, 1,4-bis [2- (4-cyanatophenyl) -2-propyl] benzene, 1,1-bis (4-si Anatophenyl) -3,3,5-trimethylcyclohexane, 4- [bis (4-cyanatophenyl) methyl] biphenyl, 4,4-dicyanato Nzophenone, 1,3-bis (4-cyanatophenyl) -2-propen-1-one, bis (4-cyanatophenyl) ether, bis (4-cyanatophenyl) sulfide, bis (4-cyanatophenyl) ) Sulfone, 4-cyanatobenzoic acid-4-cyanatophenyl ester (4-cyanatophenyl-4-cyanatobenzoate), bis- (4-cyanatophenyl) carbonate, 1,3-bis (4-cyanato) Phenyl) adamantane, 1,3-bis (4-cyanatophenyl) -5,7-dimethyladamantane, 3,3-bis (4-cyanatophenyl) isobenzofuran-1 (3H) -one (for phenolphthalein) Cyanate), 3,3-bis (4-cyanato-3-methylphenyl) isobenzofuran-1 (3H) -one (o-cresol phthalate) Rain's cyanate), 9,9'-bis (4-cyanatophenyl) fluorene, 9,9-bis (4-cyanato-3-methylphenyl) fluorene, 9,9-bis (2-cyanato-5-biphenyl) Yl) fluorene, tris (4-cyanatophenyl) methane, 1,1,1-tris (4-cyanatophenyl) ethane, 1,1,3-tris (4-cyanatophenyl) propane, α, α, α'-tris (4-cyanatophenyl) -1-ethyl-4-isopropylbenzene, 1,1,2,2-tetrakis (4-cyanatophenyl) ethane, tetrakis (4-cyanatophenyl) methane, 2 , 4,6-Tris (N-methyl-4-cyanatoanilino) -1,3,5-triazine, 2,4-bis (N-methyl-4-cyanatoanilino) -6- (N-methylaniline) ) -1,3,5-triazine, bis (N-4-cyanato-2-methylphenyl) -4,4′-oxydiphthalimide, bis (N-3-cyanato-4-methylphenyl) -4,4 '-Oxydiphthalimide, bis (N-4-cyanatophenyl) -4,4'-oxydiphthalimide, bis (N-4-cyanato-2-methylphenyl) -4,4'-(hexafluoroisopropylidene ) Diphthalimide, tris (3,5-dimethyl-4-cyanatobenzyl) isocyanurate, 2-phenyl-3,3-bis (4-cyanatophenyl) phthalimidine, 2- (4-methylphenyl) -3, 3-bis (4-cyanatophenyl) phthalimidine, 2-phenyl-3,3-bis (4-cyanato-3-methylphenyl) phthalimidine, 1-methyl-3,3 Bis (4-cyanatophenyl) indolin-2-one, and 2-phenyl-3,3-bis (4-cyanatophenyl) include indolin-2-one.
 これらのシアン酸エステル化合物は、1種単独又は2種以上混合して用いることができる。 These cyanate ester compounds can be used singly or in combination of two or more.
 また、上記一般式(9)で表されるシアン酸エステル化合物の別の具体例としては、フェノールノボラック樹脂及びクレゾールノボラック樹脂(公知の方法により、フェノール、アルキル置換フェノール又はハロゲン置換フェノールと、ホルマリンやパラホルムアルデヒドなどのホルムアルデヒド化合物とを、酸性溶液中で反応させたもの)、トリスフェノールノボラック樹脂(ヒドロキシベンズアルデヒドとフェノールとを酸性触媒の存在下に反応させたもの)、フルオレンノボラック樹脂(フルオレノン化合物と9,9-ビス(ヒドロキシアリール)フルオレン類とを酸性触媒の存在下に反応させたもの)、フェノールアラルキル樹脂、クレゾールアラルキル樹脂、ナフトールアラルキル樹脂及びビフェニルアラルキル樹脂(公知の方法により、Ar4-(CH2Y)2(Ar4はフェニル基を示し、Yはハロゲン原子を示す。以下、この段落において同様。)で表されるようなビスハロゲノメチル化合物とフェノール化合物とを酸性触媒若しくは無触媒で反応させたもの、Ar4-(CH2OR)2で表されるようなビス(アルコキシメチル)化合物とフェノール化合物とを酸性触媒の存在下に反応させたもの、又は、Ar4-(CH2OH)2で表されるようなビス(ヒドロキシメチル)化合物とフェノール化合物を酸性触媒の存在下に反応させたもの、あるいは、芳香族アルデヒド化合物とアラルキル化合物とフェノール化合物とを重縮合させたもの)、フェノール変性キシレンホルムアルデヒド樹脂(公知の方法により、キシレンホルムアルデヒド樹脂とフェノール化合物とを酸性触媒の存在下に反応させたもの)、変性ナフタレンホルムアルデヒド樹脂(公知の方法により、ナフタレンホルムアルデヒド樹脂とヒドロキシ置換芳香族化合物を酸性触媒の存在下に反応させたもの)、フェノール変性ジシクロペンタジエン樹脂、ポリナフチレンエーテル構造を有するフェノール樹脂(公知の方法により、フェノール性ヒドロキシ基を1分子中に2つ以上有する多価ヒドロキシナフタレン化合物を、塩基性触媒の存在下に脱水縮合させたもの)等のフェノール樹脂を、上述と同様の方法によりシアネート化したもの等、並びにこれらのプレポリマー等が挙げられる。これらは、特に制限されるものではない。これらのシアン酸エステル化合物は、1種単独又は2種以上混合して用いることができる。 Further, other specific examples of the cyanate ester compound represented by the general formula (9) include phenol novolac resins and cresol novolac resins (phenol, alkyl-substituted phenol or halogen-substituted phenol, formalin, A product obtained by reacting a formaldehyde compound such as paraformaldehyde in an acidic solution), a trisphenol novolak resin (a product obtained by reacting hydroxybenzaldehyde and phenol in the presence of an acidic catalyst), a fluorene novolac resin (9 , 9-bis (hydroxyaryl) fluorenes in the presence of an acidic catalyst), phenol aralkyl resin, cresol aralkyl resin, naphthol aralkyl resin and biphenyl aralkyl resin (known methods) More, Ar 4 - (CH 2 Y ) 2 (. Ar 4 represents a phenyl group, Y represents a halogen atom and the same in this paragraph.) And bishalogenomethyl compounds represented by the phenol compound An acid catalyst or non-catalyzed reaction, a bis (alkoxymethyl) compound represented by Ar 4 — (CH 2 OR) 2 and a phenol compound in the presence of an acidic catalyst, or A product obtained by reacting a bis (hydroxymethyl) compound represented by Ar 4 — (CH 2 OH) 2 and a phenol compound in the presence of an acidic catalyst, or an aromatic aldehyde compound, an aralkyl compound and a phenol compound. Polycondensed), phenol-modified xylene formaldehyde resin (by known methods, xylene formaldehyde resin and phenol compound) In the presence of an acidic catalyst), modified naphthalene formaldehyde resin (reacted naphthalene formaldehyde resin and hydroxy-substituted aromatic compound in the presence of an acidic catalyst by a known method), phenol-modified dicyclo Pentadiene resin, phenol resin having polynaphthylene ether structure (by polyhydric hydroxynaphthalene compound having two or more phenolic hydroxy groups in one molecule by dehydration condensation in the presence of a basic catalyst And the like, and those prepolymers obtained by cyanating a phenol resin such as) by the same method as described above. These are not particularly limited. These cyanate ester compounds can be used alone or in combination of two or more.
 この中でも、フェノールノボラック型シアン酸エステル化合物、ナフトールアラルキル型シアン酸エステル化合物、ビフェニルアラルキル型シアン酸エステル化合物、ナフチレンエーテル型シアン酸エステル化合物、キシレン樹脂型シアン酸エステル化合物、アダマンタン骨格型シアン酸エステル化合物が好ましく、ナフトールアラルキル型シアン酸エステル化合物が、優れた耐熱性を維持しながら、優れためっき密着性が得られる点から、特に好ましい。 Among them, phenol novolac type cyanate ester compound, naphthol aralkyl type cyanate ester compound, biphenyl aralkyl type cyanate ester compound, naphthylene ether type cyanate ester compound, xylene resin type cyanate ester compound, adamantane skeleton type cyanate ester A compound is preferable, and a naphthol aralkyl-type cyanate ester compound is particularly preferable because excellent plating adhesion can be obtained while maintaining excellent heat resistance.
 これらのシアン酸エステル化合物の製造方法としては、特に限定されず、公知の方法を用いることができる。かかる製法の例としては、所望の骨格を有するヒドロキシ基含有化合物を入手又は合成し、当該ヒドロキシ基を公知の手法により修飾してシアネート化する方法が挙げられる。ヒドロキシ基をシアネート化する手法としては、例えば、Ian Hamerton,“Chemistry and Technology of Cyanate Ester Resins,”Blackie Academic & Professionalに記載の手法が挙げられる。 The method for producing these cyanate ester compounds is not particularly limited, and a known method can be used. Examples of such production methods include a method of obtaining or synthesizing a hydroxy group-containing compound having a desired skeleton, and modifying the hydroxy group by a known method to form cyanate. Examples of the method for cyanating a hydroxy group include the methods described in Ian Hamerton, “Chemistry and Technology of Cyanate Ester Resins,” “Blackie Academic & Professional”.
 これらのシアン酸エステル化合物を用いた樹脂硬化物は、ガラス転移温度、低熱膨張性、めっき密着性等に優れた特性を有する。 The cured resin using these cyanate ester compounds has excellent properties such as glass transition temperature, low thermal expansion, and plating adhesion.
 本実施形態の樹脂組成物において、シアン酸エステル化合物の含有量は、特に限定されないが、より優れためっき密着性及び耐熱性が得られるという観点から、樹脂固形分100質量部に対して、好ましくは0.01質量部~50質量部であり、より好ましくは0.05質量部~40質量部であり、更に好ましくは0.1質量部~20質量部であり、更により好ましくは0.2質量部~5質量部である。 In the resin composition of the present embodiment, the content of the cyanate ester compound is not particularly limited, but is preferably based on 100 parts by mass of the resin solid content from the viewpoint of obtaining superior plating adhesion and heat resistance. Is 0.01 part by weight to 50 parts by weight, more preferably 0.05 part by weight to 40 parts by weight, still more preferably 0.1 part by weight to 20 parts by weight, and still more preferably 0.2 parts by weight. Parts by mass to 5 parts by mass.
 <フェノール樹脂>
 フェノール樹脂としては、1分子中に2個以上のヒドロキシル基を有するフェノール樹脂であれば、一般に公知のものを使用できる。例えば、ビスフェノールA型フェノール樹脂、ビスフェノールE型フェノール樹脂、ビスフェノールF型フェノール樹脂、ビスフェノールS型フェノール樹脂、フェノールノボラック樹脂、ビスフェノールAノボラック型フェノール樹脂、グリシジルエステル型フェノール樹脂、アラルキルノボラック型フェノール樹脂、ビフェニルアラルキル型フェノール樹脂、クレゾールノボラック型フェノール樹脂、多官能フェノール樹脂、ナフトール樹脂、ナフトールノボラック樹脂、多官能ナフトール樹脂、アントラセン型フェノール樹脂、ナフタレン骨格変性ノボラック型フェノール樹脂、フェノールアラルキル型フェノール樹脂、ナフトールアラルキル型フェノール樹脂、ジシクロペンタジエン型フェノール樹脂、ビフェニル型フェノール樹脂、脂環式フェノール樹脂、ポリオール型フェノール樹脂、リン含有フェノール樹脂、重合性不飽和炭化水素基含有フェノール樹脂及び水酸基含有シリコーン樹脂類等が挙げられるが、特に制限されるものではない。これらのフェノール樹脂の中では、ビフェニルアラルキル型フェノール樹脂、ナフトールアラルキル型フェノール樹脂、リン含有フェノール樹脂、水酸基含有シリコーン樹脂が難燃性の点で好ましい。これらのフェノール樹脂は、1種単独又は2種以上を適宜混合して使用することも可能である。
<Phenolic resin>
As the phenol resin, a generally known resin can be used as long as it is a phenol resin having two or more hydroxyl groups in one molecule. For example, bisphenol A type phenol resin, bisphenol E type phenol resin, bisphenol F type phenol resin, bisphenol S type phenol resin, phenol novolac resin, bisphenol A novolac type phenol resin, glycidyl ester type phenol resin, aralkyl novolac type phenol resin, biphenyl Aralkyl type phenolic resin, cresol novolac type phenolic resin, polyfunctional phenolic resin, naphthol resin, naphthol novolac resin, polyfunctional naphthol resin, anthracene type phenolic resin, naphthalene skeleton modified novolak type phenolic resin, phenolaralkyl type phenolic resin, naphthol aralkyl type Phenol resin, dicyclopentadiene type phenol resin, biphenyl type phenol resin Alicyclic phenolic resins, polyol-type phenolic resin, a phosphorus-containing phenol resin, a polymerizable unsaturated hydrocarbon of the group containing phenolic resin and hydroxyl-containing silicone resins and the like, but is not particularly limited. Among these phenol resins, biphenyl aralkyl type phenol resins, naphthol aralkyl type phenol resins, phosphorus-containing phenol resins, and hydroxyl group-containing silicone resins are preferable in terms of flame retardancy. These phenol resins can be used alone or in admixture of two or more.
 フェノール樹脂の含有量は、特に制限されず、樹脂固形分100質量部に対して、好ましくは0.1質量部~50質量部であり、より好ましくは0.2質量部~45質量部である。フェノール樹脂の含有量が上記範囲内であることにより、耐熱性がより向上する傾向にある。 The content of the phenolic resin is not particularly limited, and is preferably 0.1 to 50 parts by mass, more preferably 0.2 to 45 parts by mass with respect to 100 parts by mass of the resin solid content. . When the content of the phenol resin is within the above range, the heat resistance tends to be further improved.
 <オキセタン樹脂>
 オキセタン樹脂としては、一般に公知のものを使用できる。例えば、オキセタン、2-メチルオキセタン、2,2-ジメチルオキセタン、3-メチルオキセタン、3,3-ジメチルオキセタン等のアルキルオキセタン、3-メチル-3-メトキシメチルオキセタン、3,3-ジ(トリフルオロメチル)パーフルオキセタン、2-クロロメチルオキセタン、3,3-ビス(クロロメチル)オキセタン、ビフェニル型オキセタン、OXT-101(東亞合成製、商品名)、OXT-121(東亞合成製、商品名)等が挙げられる、特に制限されるものではない。これらは、1種又は2種以上を適宜混合して使用することも可能である。
<Oxetane resin>
As the oxetane resin, generally known oxetane resins can be used. For example, oxetane, 2-methyloxetane, 2,2-dimethyloxetane, 3-methyloxetane, alkyloxetane such as 3,3-dimethyloxetane, 3-methyl-3-methoxymethyloxetane, 3,3-di (trifluoro Methyl) perfluoxetane, 2-chloromethyloxetane, 3,3-bis (chloromethyl) oxetane, biphenyl-type oxetane, OXT-101 (product name), OXT-121 (product name) And the like are not particularly limited. These can be used alone or in combination of two or more.
 オキセタン樹脂の含有量は、特に制限されず、樹脂固形分100質量部に対して、好ましくは0.1質量部~50質量部であり、より好ましくは0.2質量部~45質量部である。オキセタン樹脂の含有量が上記範囲内であることにより、耐熱性がより向上する傾向にある。 The content of the oxetane resin is not particularly limited, and is preferably 0.1 to 50 parts by mass, more preferably 0.2 to 45 parts by mass with respect to 100 parts by mass of the resin solid content. . When the content of the oxetane resin is within the above range, the heat resistance tends to be further improved.
 <ベンゾオキサジン化合物>
 ベンゾオキサジン化合物としては、1分子中に2個以上のジヒドロベンゾオキサジン環を有する化合物であれば、一般に公知のものを用いることができる。例えば、ビスフェノールA型ベンゾオキサジンBA-BXZ(小西化学製、商品名)ビスフェノールF型ベンゾオキサジンBF-BXZ(小西化学製、商品名)、ビスフェノールS型ベンゾオキサジンBS-BXZ(小西化学製、商品名)、フェノールフタレイン型ベンゾオキサジン等が挙げられるが、特に制限されるものではない。これらは、1種単独又は2種以上を適宜混合して使用することも可能である。
<Benzoxazine compound>
As the benzoxazine compound, generally known compounds can be used as long as they have two or more dihydrobenzoxazine rings in one molecule. For example, bisphenol A type benzoxazine BA-BXZ (trade name, manufactured by Konishi Chemical) bisphenol F type benzoxazine BF-BXZ (trade name, manufactured by Konishi Chemical), bisphenol S type benzoxazine BS-BXZ (trade name, manufactured by Konishi Chemical) ), Phenolphthalein type benzoxazine and the like, but not particularly limited. These can be used alone or in combination of two or more.
 ベンゾオキサジン化合物の含有量は、特に制限されず、樹脂固形分100質量部に対して、好ましくは0.1質量部~50質量部であり、より好ましくは0.2質量部~45質量部である。ベンゾオキサジン化合物の含有量が上記範囲内であることにより、耐熱性がより向上する傾向にある。 The content of the benzoxazine compound is not particularly limited, and is preferably 0.1 to 50 parts by mass, more preferably 0.2 to 45 parts by mass with respect to 100 parts by mass of the resin solid content. is there. When the content of the benzoxazine compound is within the above range, the heat resistance tends to be further improved.
 <エポキシ樹脂>
 本実施形態の樹脂組成物には、硬化物の耐熱性を向上させるために、前記(1)で表されるビフェニルアラルキル型エポキシ樹脂(A)と異なるエポキシ樹脂を併用することも可能である。
 このようなエポキシ樹脂は、前記エポキシ樹脂(A)と異なり、1分子中に2個以上のエポキシ基を有する化合物であれば、特に限定されない。その具体例としては、例えば、ビスフェノールA型エポキシ樹脂、ビスフェノールE型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ビスフェノールS型エポキシ樹脂、ビスフェノールAノボラック型エポキシ樹脂、ビフェニル型エポキシ樹脂、フェノールノボラック型エポキシ樹脂、クレゾールノボラック型エポキシ樹脂、キシレンノボラック型エポキシ樹脂、多官能フェノール型エポキシ樹脂、ナフタレン型エポキシ樹脂、ナフタレン骨格変性ノボラック型エポキシ樹脂、ナフチレンエーテル型エポキシ樹脂、フェノールアラルキル型エポキシ樹脂、アントラセン型エポキシ樹脂、3官能フェノール型エポキシ樹脂、4官能フェノール型エポキシ樹脂、トリグリシジルイソシアヌレート、グリシジルエステル型エポキシ樹脂、脂環式エポキシ樹脂、ジシクロペンタジエンノボラック型エポキシ樹脂、ビフェニルノボラック型エポキシ樹脂、フェノールアラルキルノボラック型エポキシ樹脂、ナフトールアラルキルノボラック型エポキシ樹脂、アラルキルノボラック型エポキシ樹脂、ナフトールアラルキル型エポキシ樹脂、ジシクロペンタジエン型エポキシ樹脂、ポリオール型エポキシ樹脂、リン含有エポキシ樹脂、グリシジルアミン、ブタジエンなどの二重結合をエポキシ化した化合物、水酸基含有シリコーン樹脂類とエピクロルヒドリンとの反応により得られる化合物、及びこれらのハロゲン化物が挙げられる。
<Epoxy resin>
In the resin composition of this embodiment, in order to improve the heat resistance of the cured product, an epoxy resin different from the biphenyl aralkyl type epoxy resin (A) represented by (1) can be used in combination.
Unlike the epoxy resin (A), such an epoxy resin is not particularly limited as long as it is a compound having two or more epoxy groups in one molecule. Specific examples thereof include, for example, bisphenol A type epoxy resin, bisphenol E type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bisphenol A novolac type epoxy resin, biphenyl type epoxy resin, phenol novolac type epoxy resin, Cresol novolak type epoxy resin, xylene novolak type epoxy resin, polyfunctional phenol type epoxy resin, naphthalene type epoxy resin, naphthalene skeleton modified novolak type epoxy resin, naphthylene ether type epoxy resin, phenol aralkyl type epoxy resin, anthracene type epoxy resin, Trifunctional phenolic epoxy resin, tetrafunctional phenolic epoxy resin, triglycidyl isocyanurate, glycidyl ester epoxy resin, alicyclic Poxy resin, dicyclopentadiene novolak type epoxy resin, biphenyl novolak type epoxy resin, phenol aralkyl novolak type epoxy resin, naphthol aralkyl novolak type epoxy resin, aralkyl novolak type epoxy resin, naphthol aralkyl type epoxy resin, dicyclopentadiene type epoxy resin, Examples thereof include compounds obtained by epoxidizing double bonds such as polyol-type epoxy resins, phosphorus-containing epoxy resins, glycidylamine, and butadiene, compounds obtained by the reaction of hydroxyl group-containing silicone resins and epichlorohydrin, and halides thereof.
 その中でも、ナフチレンエーテル型エポキシ樹脂、多官能フェノール型エポキシ樹脂、ナフタレン型エポキシ樹脂からなる群より選択される一種以上であることが好ましく、ナフタレン型エポキシ樹脂がより好ましい。このような種類のエポキシ樹脂を含むことにより、現像性およびめっき密着性がより向上する傾向にある。
 ナフタレン型エポキシ樹脂としては、下記式(5)で表される樹脂を用いることが、現像性およびめっき密着性がより向上するため、好ましい。このエポキシ樹脂としては、市販品を利用することができ、DIC(株)社製HP-4710(商品名)が挙げられる。下記式(5)で表されるナフタレン型エポキシ樹脂は、低分子でありかつ多官能であるため、現像液への溶解性に優れる。そのため、ビフェニルアラルキル型エポキシ樹脂(A)との併用により、現像性にも優れる樹脂組成物を得ることができると考えられる。
Among these, it is preferable that it is 1 or more types selected from the group which consists of a naphthylene ether type epoxy resin, a polyfunctional phenol type epoxy resin, and a naphthalene type epoxy resin, and a naphthalene type epoxy resin is more preferable. By including such kind of epoxy resin, the developability and plating adhesion tend to be further improved.
As the naphthalene type epoxy resin, it is preferable to use a resin represented by the following formula (5) because developability and plating adhesion are further improved. As this epoxy resin, a commercially available product can be used, and HP-4710 (trade name) manufactured by DIC Corporation is exemplified. The naphthalene type epoxy resin represented by the following formula (5) has a low molecular weight and is multifunctional, and therefore has excellent solubility in a developer. Therefore, it is thought that the resin composition which is excellent also in developability can be obtained by using together with a biphenyl aralkyl type epoxy resin (A).
Figure JPOXMLDOC01-appb-C000025
Figure JPOXMLDOC01-appb-C000025
 これらのエポキシ樹脂は、1種単独又は2種以上を適宜混合して使用することも可能である。 These epoxy resins can be used singly or in appropriate combination of two or more.
 エポキシ樹脂の含有量は、特に制限されないが、現像性をより向上させるという観点から、樹脂組成物中の樹脂固形分100質量部に対して、前記エポキシ樹脂(A)とエポキシ樹脂(A)と異なるエポキシ樹脂との合計で、3質量部以上とすることが好ましく、5質量部以上とすることがより好ましく、10質量部以上とすることが更に好ましく、15質量部以上とすることが更により好ましい。また、銅めっき密着性をより向上させるという観点から、樹脂組成物中の樹脂固形分100質量部に対して、前記エポキシ樹脂(A)とエポキシ樹脂(A)と異なるエポキシ樹脂との合計で、50質量部以下とすることが好ましく、40質量部以下とすることがより好ましく、30質量部以下とすることが更に好ましく、28質量部以下とすることが更に好ましい。
 また、前記エポキシ樹脂(A)とエポキシ樹脂(A)と異なるエポキシ樹脂との比率は、特に制限されないが、めっき密着性の点から、1~10:1~3が好ましく、2~4:1~2がより好ましい。
The content of the epoxy resin is not particularly limited, but from the viewpoint of further improving developability, the epoxy resin (A), the epoxy resin (A), and the epoxy resin (A) with respect to 100 parts by mass of the resin solid content in the resin composition The total amount with different epoxy resins is preferably 3 parts by mass or more, more preferably 5 parts by mass or more, still more preferably 10 parts by mass or more, and even more preferably 15 parts by mass or more. preferable. Moreover, from the viewpoint of further improving the copper plating adhesion, with respect to 100 parts by mass of the resin solid content in the resin composition, the total of the epoxy resin (A) and the epoxy resin different from the epoxy resin (A), It is preferably 50 parts by mass or less, more preferably 40 parts by mass or less, further preferably 30 parts by mass or less, and further preferably 28 parts by mass or less.
The ratio of the epoxy resin (A) to the epoxy resin different from the epoxy resin (A) is not particularly limited, but is preferably 1 to 10: 1 to 3 from the viewpoint of plating adhesion, and 2 to 4: 1. ~ 2 is more preferred.
 <熱硬化促進剤(H)>
 本実施形態の樹脂組成物においては、本実施形態の特性が損なわれない範囲において、熱硬化促進剤(H)(成分(H)とも称す)を用いることも可能である。本実施形態に用いる熱硬化促進剤(H)としては、特に限定されないが、例えば、過酸化ベンゾイル、ラウロイルパーオキサイド、アセチルパーオキサイド、パラクロロベンゾイルパーオキサイド、ジ-tert-ブチル-ジ-パーフタレート等で例示される有機過酸化物;アゾビスニトリル等のアゾ化合物;N,N-ジメチルベンジルアミン、N,N-ジメチルアニリン、N,N-ジメチルトルイジン、2-N-エチルアニリノエタノール、トリ-n-ブチルアミン、ピリジン、キノリン、N-メチルモルホリン、トリエタノールアミン、トリエチレンジアミン、テトラメチルブタンジアミン、N-メチルピペリジンなどの第3級アミン類;フェノール、キシレノール、クレゾール、レゾルシン、カテコールなどのフェノール類;ナフテン酸鉛、ステアリン酸鉛、ナフテン酸亜鉛、オクチル酸亜鉛、オレイン酸錫、ジブチル錫マレート、ナフテン酸マンガン、ナフテン酸コバルト、アセチルアセトン鉄などの有機金属塩;これら有機金属塩をフェノール、ビスフェノールなどの水酸基含有化合物に溶解してなるもの;塩化錫、塩化亜鉛、塩化アルミニウムなどの無機金属塩;ジオクチル錫オキサイド、その他のアルキル錫、アルキル錫オキサイドなどの有機錫化合物;2-エチル-4-メチルイミダゾール、1,2-ジメチルイミダゾール、1-ベンジル-2-フェニルイミダゾール、トリフェニルイミダゾール(TPIZ)等のイミダゾール化合物などが挙げられる。中でも、2-エチル-4-メチルイミダゾール、1,2-ジメチルイミダゾール、1-ベンジル-2-フェニルイミダゾール、トリフェニルイミダゾール(TPIZ)等のイミダゾール化合物が、耐熱性の点から、好ましく、2-エチル-4-メチルイミダゾールが、ビフェニルアラルキル型エポキシ樹脂(A)、化合物(C)及び化合物(D)との反応性が高く、より優れた耐熱性が得られる点から、より好ましい。
<Thermosetting accelerator (H)>
In the resin composition of the present embodiment, a thermosetting accelerator (H) (also referred to as component (H)) can be used as long as the characteristics of the present embodiment are not impaired. The thermosetting accelerator (H) used in the present embodiment is not particularly limited. For example, benzoyl peroxide, lauroyl peroxide, acetyl peroxide, parachlorobenzoyl peroxide, di-tert-butyl-di-perphthalate Organic peroxides such as azobisnitrile; N, N-dimethylbenzylamine, N, N-dimethylaniline, N, N-dimethyltoluidine, 2-N-ethylanilinoethanol, tri -Tertiary amines such as n-butylamine, pyridine, quinoline, N-methylmorpholine, triethanolamine, triethylenediamine, tetramethylbutanediamine, N-methylpiperidine; phenols such as phenol, xylenol, cresol, resorcin, catechol Class: Naphthenes Organometallic salts such as lead, lead stearate, zinc naphthenate, zinc octylate, tin oleate, dibutyltin malate, manganese naphthenate, cobalt naphthenate and acetylacetone iron; these organometallic salts contain hydroxyl groups such as phenol and bisphenol Inorganic compounds such as tin chloride, zinc chloride and aluminum chloride; Dioctyl tin oxide, other organic tin compounds such as alkyl tin and alkyl tin oxide; 2-ethyl-4-methylimidazole, 1 , 2-dimethylimidazole, 1-benzyl-2-phenylimidazole, imidazole compounds such as triphenylimidazole (TPIZ), and the like. Of these, imidazole compounds such as 2-ethyl-4-methylimidazole, 1,2-dimethylimidazole, 1-benzyl-2-phenylimidazole, and triphenylimidazole (TPIZ) are preferable from the viewpoint of heat resistance. -4-Methylimidazole is more preferable because it has high reactivity with the biphenyl aralkyl type epoxy resin (A), the compound (C), and the compound (D), and more excellent heat resistance can be obtained.
 これら熱硬化促進剤は、1種単独又は2種以上を適宜混合して使用することも可能である。
 本実施形態の樹脂組成物において、熱硬化促進剤(H)の含有量は、特に限定されないが、通常、樹脂組成物中の樹脂固形分100質量部に対して、0.01~10質量部であり、好ましくは0.05~5質量部である。
These thermosetting accelerators can be used singly or in appropriate combination of two or more.
In the resin composition of the present embodiment, the content of the thermosetting accelerator (H) is not particularly limited, but is usually 0.01 to 10 parts by mass with respect to 100 parts by mass of the resin solid content in the resin composition. And preferably 0.05 to 5 parts by mass.
 <有機溶剤>
 本実施形態の樹脂組成物には、必要に応じて溶剤を含有していてもよい。例えば、有機溶剤を用いると、樹脂組成物の調製時における粘度を調整することができる。溶剤の種類は、樹脂組成物中の樹脂の一部又は全部を溶解可能なものであれば、特に限定されない。その具体例としては、特に限定されないが、例えば、アセトン、メチルエチルケトン、メチルセルソルブ等のケトン類;トルエン、キシレン等の芳香族炭化水素類;ジメチルホルムアミド等のアミド類;プロピレングリコールモノメチルエーテル及びそのアセテートが挙げられる。
 これら有機溶剤は、1種単独又は2種以上を適宜混合して使用することも可能である。
<Organic solvent>
The resin composition of the present embodiment may contain a solvent as necessary. For example, when an organic solvent is used, the viscosity at the time of preparing the resin composition can be adjusted. The kind of solvent will not be specifically limited if it can melt | dissolve part or all of resin in a resin composition. Specific examples thereof include, but are not particularly limited to, for example, ketones such as acetone, methyl ethyl ketone, and methyl cellosolve; aromatic hydrocarbons such as toluene and xylene; amides such as dimethylformamide; propylene glycol monomethyl ether and acetate thereof Is mentioned.
These organic solvents can be used alone or in combination of two or more.
 <その他の成分>
 本実施形態の樹脂組成物には、本実施形態の特性が損なわれない範囲において、これまでに挙げられていない熱硬化性樹脂、熱可塑性樹脂及びそのオリゴマー、エラストマー類等の種々の高分子化合物;これまでに挙げられていない難燃性の化合物;添加剤等の併用も可能である。これらは一般に使用されているものであれば、特に限定されるものではない。例えば、難燃性の化合物では、メラミンやベンゾグアナミン等の窒素含有化合物、オキサジン環含有化合物、及びリン系化合物のホスフェート化合物、芳香族縮合リン酸エステル、含ハロゲン縮合リン酸エステル等が挙げられる。添加剤としては、紫外線吸収剤、酸化防止剤、蛍光増白剤、光増感剤、染料、顔料、増粘剤、滑剤、消泡剤、表面調整剤、光沢剤、重合禁止剤等が挙げられる。これらの成分は、1種単独又は2種以上を適宜混合して使用することも可能である。
 本実施形態の樹脂組成物において、その他の成分の含有量は、特に限定されないが、通常、樹脂組成物100質量部に対して、それぞれ0.1~10質量部である。
<Other ingredients>
In the resin composition of the present embodiment, various polymer compounds such as thermosetting resins, thermoplastic resins and oligomers thereof, elastomers, etc., which have not been mentioned so far, as long as the characteristics of the present embodiment are not impaired. Flame retardant compound not mentioned so far; combined use of additives and the like is also possible. These are not particularly limited as long as they are generally used. Examples of flame retardant compounds include nitrogen-containing compounds such as melamine and benzoguanamine, oxazine ring-containing compounds, phosphate compounds of phosphorus compounds, aromatic condensed phosphate esters, and halogen-containing condensed phosphate esters. Additives include UV absorbers, antioxidants, fluorescent brighteners, photosensitizers, dyes, pigments, thickeners, lubricants, antifoaming agents, surface conditioners, brighteners, polymerization inhibitors, etc. It is done. These components can be used alone or in appropriate combination of two or more.
In the resin composition of the present embodiment, the content of other components is not particularly limited, but is usually 0.1 to 10 parts by mass with respect to 100 parts by mass of the resin composition.
 <樹脂組成物の製造方法>
 本実施形態の樹脂組成物は、前記式(1)で表されるビフェニルアラルキル型エポキシ樹脂(A)、光硬化開始剤(B)、前記式(2)で表される化合物(C)及び(C)成分以外のエチレン性不飽和基を有する化合物(D)と、必要に応じて、マレイミド化合物(E)、充填材(F)や化合物(G)及びその他の成分を適宜混合することにより調製される。本実施形態の樹脂組成物は、後述する本発明の樹脂シートを作製する際のワニスとして、好適に使用することができる。
<Method for producing resin composition>
The resin composition of this embodiment includes a biphenyl aralkyl type epoxy resin (A) represented by the formula (1), a photocuring initiator (B), a compound (C) represented by the formula (2), and ( C) Prepared by appropriately mixing the compound (D) having an ethylenically unsaturated group other than the component and, if necessary, the maleimide compound (E), the filler (F), the compound (G) and other components. Is done. The resin composition of this embodiment can be used suitably as a varnish at the time of producing the resin sheet of this invention mentioned later.
 本実施形態の樹脂組成物の製造方法は、特に限定されず、例えば、上述した各成分を順次溶剤に配合し、十分に攪拌する方法が挙げられる。 The method for producing the resin composition of the present embodiment is not particularly limited, and examples thereof include a method in which the above-described components are sequentially mixed in a solvent and sufficiently stirred.
 樹脂組成物の製造時には、必要に応じて各成分を均一に溶解又は分散させるための公知の処理(攪拌、混合、混練処理等)を行うことができる。具体的には、適切な攪拌能力を有する攪拌機を付設した攪拌槽を用いて攪拌分散処理を行うことにより、樹脂組成物に対する無機充填材(G)の分散性を向上させることができる。上記の攪拌、混合、混練処理は、例えば、超音波ホモジナイザー等の分散を目的とした攪拌装置、三本ロール、ボールミル、ビーズミル、サンドミル等の混合を目的とした装置、又は、公転又は自転型の混合装置等の公知の装置を用いて適宜行うことができる。また、本実施形態の樹脂組成物の調製時においては、必要に応じて有機溶剤を使用することができる。有機溶剤の種類は、樹脂組成物中の樹脂を溶解可能なものであれば、特に限定されず、その具体例は、上述したとおりである。 In the production of the resin composition, a known process (such as stirring, mixing, and kneading process) for uniformly dissolving or dispersing each component can be performed as necessary. Specifically, the dispersibility of the inorganic filler (G) in the resin composition can be improved by performing the stirring and dispersing treatment using a stirring tank provided with a stirrer having an appropriate stirring ability. The stirring, mixing, and kneading processes described above are, for example, a stirring device for dispersion such as an ultrasonic homogenizer, a device for mixing such as a three-roll, ball mill, bead mill, and sand mill, or a revolving or rotating type. It can carry out suitably using well-known apparatuses, such as a mixing apparatus. Moreover, when preparing the resin composition of this embodiment, an organic solvent can be used as needed. The type of the organic solvent is not particularly limited as long as it can dissolve the resin in the resin composition, and specific examples thereof are as described above.
 <用途>
 本実施形態の樹脂組成物は、絶縁性の樹脂組成物が必要とされる用途に使用することができ、特に限定されないが、感光性フィルム、支持体付き感光性フィルム、プリプレグ等の絶縁樹脂シート、回路基板(積層板用途、多層プリント配線板用途等)、ソルダーレジスト、アンダーフィル材、ダイボンディング材、半導体封止材、穴埋め樹脂、部品埋め込み樹脂等の用途に使用することができる。なかでも、多層プリント配線板の絶縁層用樹脂組成物やソルダーレジストとして好適に使用することができる。
<Application>
The resin composition of the present embodiment can be used for applications where an insulating resin composition is required, and is not particularly limited, but includes an insulating resin sheet such as a photosensitive film, a photosensitive film with a support, and a prepreg. It can be used for applications such as circuit boards (for laminated boards, multilayer printed wiring boards, etc.), solder resists, underfill materials, die bonding materials, semiconductor encapsulants, hole-filling resins, component-filling resins, and the like. Especially, it can be conveniently used as a resin composition for insulating layers of a multilayer printed wiring board or a solder resist.
 <樹脂シート>
 本実施形態の樹脂シートは、支持体と、該支持体の表面に形成され、本実施形態の樹脂組成物を含む樹脂組成物層とを備える、上述の樹脂組成物を支持体の片面又は両面に塗布した支持体付き樹脂シートである。樹脂シートは、樹脂組成物を支持体上に塗布、及び乾燥して製造することができる。
<Resin sheet>
The resin sheet of the present embodiment includes a support and a resin composition layer formed on the surface of the support and including the resin composition of the present embodiment. It is the resin sheet with a support body apply | coated to. The resin sheet can be produced by applying the resin composition on a support and drying it.
 本実施形態の樹脂シートにおいて使用される支持体は、特に限定されないが、公知のものを使用することができ、樹脂フィルムであることが好ましい。樹脂フィルムとしては、例えば、ポリイミドフィルム、ポリアミドフィルム、ポリエステルフィルム、ポリエチレンテレフタレート(PET)フィルム、ポリブチレンテレフタレート(PBT)フィルム、ポリプロピレン(PP)フィルム、ポリエチレン(PE)フィルム、ポリエチレンナフタレートフィルム、ポリビニルアルコールフィルム、トリアセチルアセテートフィルム等の樹脂フィルムが挙げられる。その中でもPETフィルムが好ましい。 The support used in the resin sheet of the present embodiment is not particularly limited, but a known one can be used, and a resin film is preferable. Examples of the resin film include polyimide film, polyamide film, polyester film, polyethylene terephthalate (PET) film, polybutylene terephthalate (PBT) film, polypropylene (PP) film, polyethylene (PE) film, polyethylene naphthalate film, and polyvinyl alcohol. Examples thereof include resin films such as films and triacetyl acetate films. Among these, a PET film is preferable.
 上記樹脂フィルムは、樹脂組成物層からの剥離を容易にするため、剥離剤を表面に塗布してあるものが好適に使用できる。樹脂フィルムの厚さは、5μm~100μmの範囲であることが好ましく、10μm~50μmの範囲であることがより好ましい。この厚さが5μm未満では、現像前に行う支持体剥離の際に支持体が破れやすくなる傾向があり、厚さが100μmを超えると、支持体上から露光する際の解像度が低下する傾向がある。 The resin film having a release agent coated on the surface thereof can be suitably used in order to facilitate peeling from the resin composition layer. The thickness of the resin film is preferably in the range of 5 μm to 100 μm, and more preferably in the range of 10 μm to 50 μm. If the thickness is less than 5 μm, the support tends to be broken when the support is peeled off before development, and if the thickness exceeds 100 μm, the resolution when exposed from the support tends to decrease. is there.
 また、紫外線等の活性エネルギー線による露光時の光の散乱を低減するため、樹脂フィルムは透明性に優れるものが好ましい。 Also, in order to reduce light scattering during exposure by active energy rays such as ultraviolet rays, it is preferable that the resin film has excellent transparency.
 さらに、本実施形態における樹脂シートにおいて、その樹脂組成物層は、保護フィルムで保護されていてもよい。
 樹脂組成物層側を保護フィルムで保護することにより、樹脂組成物層表面へのゴミ等の付着やキズを防止することができる。保護フィルムとしては上記の樹脂フィルムと同様の材料により構成されたフィルムを用いることができる。保護フィルムの厚さは特に限定されないが、1μm~50μmの範囲であることが好ましく、5μm~40μmの範囲であることがより好ましい。厚さが1μm未満では、保護フィルムの取り扱い性が低下する傾向があり、50μmを超えると廉価性に劣る傾向がある。なお、保護フィルムは、樹脂組成物層と支持体との接着力に対して、樹脂組成物層と保護フィルムとの接着力の方が小さいものが好ましい。
Furthermore, in the resin sheet in the present embodiment, the resin composition layer may be protected with a protective film.
By protecting the resin composition layer side with a protective film, it is possible to prevent adhesion or scratches of dust or the like to the surface of the resin composition layer. As the protective film, a film made of the same material as the above resin film can be used. The thickness of the protective film is not particularly limited, but is preferably in the range of 1 μm to 50 μm, and more preferably in the range of 5 μm to 40 μm. When the thickness is less than 1 μm, the handleability of the protective film tends to be lowered, and when it exceeds 50 μm, the inexpensiveness tends to be inferior. The protective film preferably has a smaller adhesive force between the resin composition layer and the protective film than the adhesive force between the resin composition layer and the support.
 本実施形態の樹脂シートの製造方法は、特に限定されないが、例えば、本実施形態の樹脂組成物をPETフィルムなどの支持体に塗布して有機溶剤を乾燥により除去することにより、樹脂シートを製造する方法などが挙げられる。
 上記塗布は、例えば、ロールコーター、コンマコーター、グラビアコーター、ダイコーター、バーコーター、リップコーター、ナイフコーター、スクイズコーター等を用いた公知の方法で行うことができる。上記乾燥は、例えば、60~200℃の乾燥機中で、1~60分加熱させる方法などにより行うことができる。
 樹脂組成物層中の残存有機溶剤量は、後の工程での有機溶剤の拡散を防止する観点から、樹脂組成物層の総質量に対して5質量%以下とすることが好ましい。支持体に対する樹脂組成物層の厚みは、取り扱い性を向上させるという観点から、樹脂シートの樹脂組成物層厚で1.0μm以上とすることが好ましい。また、透過率を向上させて現像性を良好にするという観点から、300μm以下とすることが好ましい。
Although the manufacturing method of the resin sheet of this embodiment is not specifically limited, For example, a resin sheet is manufactured by apply | coating the resin composition of this embodiment to support bodies, such as PET film, and removing an organic solvent by drying. The method of doing is mentioned.
The coating can be performed by a known method using, for example, a roll coater, comma coater, gravure coater, die coater, bar coater, lip coater, knife coater, squeeze coater, or the like. The drying can be performed, for example, by a method of heating in a dryer at 60 to 200 ° C. for 1 to 60 minutes.
The amount of the remaining organic solvent in the resin composition layer is preferably 5% by mass or less with respect to the total mass of the resin composition layer from the viewpoint of preventing diffusion of the organic solvent in the subsequent step. The thickness of the resin composition layer with respect to the support is preferably 1.0 μm or more in terms of the resin composition layer thickness of the resin sheet from the viewpoint of improving the handleability. Further, from the viewpoint of improving the transmittance and improving the developability, the thickness is preferably 300 μm or less.
 本実施形態の樹脂シートは、多層プリント配線板の層間絶縁層として使用することができる。 The resin sheet of this embodiment can be used as an interlayer insulating layer of a multilayer printed wiring board.
 <多層プリント配線板>
 本実施形態の多層プリント配線板は、本実施形態の樹脂組成物を含む層間絶縁層を備え、例えば、上述の樹脂シートを1枚以上重ねて硬化して得ることもできる。具体的には以下の方法により製造することができる。
<Multilayer printed wiring board>
The multilayer printed wiring board of the present embodiment includes an interlayer insulating layer containing the resin composition of the present embodiment, and can be obtained, for example, by stacking and curing one or more of the above-described resin sheets. Specifically, it can be produced by the following method.
 (ラミネート工程)
 本実施形態の樹脂シートの樹脂組成物層側を、真空ラミネーターを用いて回路基板の片面又は両面にラミネートする。回路基板としては、例えば、ガラスエポキシ基板、金属基板、セラミック基板、シリコン基板、半導体封止樹脂基板、ポリエステル基板、ポリイミド基板、BTレジン基板、熱硬化型ポリフェニレンエーテル基板等が挙げられる。なお、ここで回路基板とは、上記のような基板の片面又は両面にパターン加工された導体層(回路)が形成された基板をいう。また、導体層と絶縁層とを交互に積層してなる多層プリント配線板において、該プリント配線板の最外層の片面又は両面がパターン加工された導体層(回路)となっている基板も、ここでいう回路基板に含まれる。なお導体層表面には、黒化処理、銅エッチング等により予め粗化処理が施されていてもよい。ラミネート工程において、樹脂シートが保護フィルムを有している場合には該保護フィルムを剥離除去した後、必要に応じて樹脂シート及び回路基板をプレヒートし、樹脂組成物層を加圧及び加熱しながら回路基板に圧着する。本実施形態の樹脂シートにおいては、真空ラミネート法により減圧下で回路基板にラミネートする方法が好適に用いられる。
(Lamination process)
The resin composition layer side of the resin sheet of this embodiment is laminated on one side or both sides of a circuit board using a vacuum laminator. Examples of the circuit board include a glass epoxy board, a metal board, a ceramic board, a silicon board, a semiconductor sealing resin board, a polyester board, a polyimide board, a BT resin board, and a thermosetting polyphenylene ether board. Here, the circuit board refers to a board on which a conductor layer (circuit) patterned on one or both sides of the board is formed. Further, in a multilayer printed wiring board in which conductor layers and insulating layers are alternately laminated, a substrate having a conductor layer (circuit) in which one or both surfaces of the outermost layer of the printed wiring board are patterned is also here. It is included in the circuit board. The surface of the conductor layer may be previously roughened by blackening, copper etching, or the like. In the laminating step, when the resin sheet has a protective film, the protective film is peeled and removed, and then the resin sheet and the circuit board are preheated as necessary, while the resin composition layer is pressed and heated. Crimp to circuit board. In the resin sheet of the present embodiment, a method of laminating on a circuit board under reduced pressure by a vacuum laminating method is suitably used.
 ラミネート工程の条件は、特に限定されるものではないが、例えば、圧着温度(ラミネート温度)を好ましくは50℃~140℃とし、圧着圧力を好ましくは1kgf/cm2~15kgf/cm2、圧着時間を好ましくは5秒間~300秒間とし、空気圧を20mmHg以下とする減圧下でラミネートするのが好ましい。また、ラミネート工程は、バッチ式であってもロールを用いる連続式であってもよい。真空ラミネート法は、市販の真空ラミネーターを使用して行うことができる。市販の真空ラミネーターとしては、例えば、ニッコー・マテリアルズ(株)製2ステージビルドアップラミネーター等を挙げることができる。 The conditions for the laminating step are not particularly limited. For example, the pressure bonding temperature (laminating temperature) is preferably 50 ° C. to 140 ° C., the pressure bonding pressure is preferably 1 kgf / cm 2 to 15 kgf / cm 2 , and the pressure bonding time. Is preferably 5 seconds to 300 seconds, and lamination is performed under reduced pressure so that the air pressure is 20 mmHg or less. The laminating step may be a batch type or a continuous type using a roll. The vacuum laminating method can be performed using a commercially available vacuum laminator. As a commercially available vacuum laminator, for example, a 2-stage build-up laminator manufactured by Nikko Materials Co., Ltd. can be exemplified.
 (露光工程)
 ラミネート工程により、回路基板上に樹脂シートが設けられた後、樹脂組成物層の所定部分に活性エネルギー線を照射し、照射部の樹脂組成物層を硬化させる露光工程を行う。活性エネルギー線の照射は、マスクパターンを通してもよいし、直接活性エネルギー線を照射する直接描画法を用いてもよい。
(Exposure process)
After the resin sheet is provided on the circuit board by the laminating process, an exposure process is performed in which a predetermined portion of the resin composition layer is irradiated with active energy rays to cure the resin composition layer of the irradiated portion. The active energy ray may be irradiated through a mask pattern or a direct drawing method in which an active energy ray is directly irradiated.
 活性エネルギー線としては、例えば、紫外線、可視光線、電子線、X線等が挙げられ、特に紫外線が好ましい。紫外線の照射量はおおむね10mJ/cm2~1000mJ/cm2である。マスクパターンを通す露光方法にはマスクパターンを多層プリント配線板に密着させて行う接触露光法と、密着させずに平行光線を使用して露光する非接触露光法とがあるが、どちらを用いてもかまわない。また、樹脂組成物層上に支持体が存在している場合は、支持体上から露光してもよいし、支持体を剥離後に露光してもよい。 Examples of active energy rays include ultraviolet rays, visible rays, electron beams, X-rays and the like, and ultraviolet rays are particularly preferable. The irradiation amount of ultraviolet rays is about 10 mJ / cm 2 to 1000 mJ / cm 2 . There are two types of exposure methods that pass through the mask pattern: a contact exposure method in which the mask pattern is brought into close contact with the multilayer printed wiring board, and a non-contact exposure method in which exposure is carried out using parallel light rays without being brought into close contact. It doesn't matter. Moreover, when the support body exists on a resin composition layer, you may expose from a support body and may expose after a support body peels.
 (現像工程)
 露光工程後、樹脂組成物層上に支持体が存在している場合にはその支持体を除去した後、ウエット現像で、光硬化されていない部分(未露光部)を除去して現像することにより、絶縁層のパターンを形成することができる。
(Development process)
After the exposure step, if a support is present on the resin composition layer, the support is removed, and then development is performed by removing the uncured portion (unexposed portion) by wet development. Thus, the pattern of the insulating layer can be formed.
 上記ウエット現像の場合、現像液としては、未露光部分を選択的に溶出するものであれば、特に限定されるものではないが、アルカリ性水溶液、水系現像液、有機溶剤等の現像液が用いられる。本実施形態においては、特にアルカリ性水溶液による現像工程が好ましい。これらの現像液は単独で又は2種類以上を組み合わせて用いることができる。また、現像方法としては、例えば、スプレー、揺動浸漬、ブラッシング、スクラッピング等の公知の方法で行うことができる。 In the case of the above-described wet development, the developer is not particularly limited as long as it selectively elutes an unexposed portion, but a developer such as an alkaline aqueous solution, an aqueous developer, or an organic solvent is used. . In the present embodiment, a development step using an alkaline aqueous solution is particularly preferable. These developers can be used alone or in combination of two or more. Moreover, as a developing method, it can carry out by well-known methods, such as spraying, rocking immersion, brushing, and scraping, for example.
 現像液として使用されるアルカリ水溶液は、特に限定されるものではないが、例えば、水酸化カリウム、水酸化ナトリウム、炭酸ナトリウム、炭酸カリウム、リン酸ナトリウム、ケイ酸ナトリウム、4-ホウ酸ナトリウム、アンモニア、アミン類等が挙げられる。 The alkaline aqueous solution used as the developer is not particularly limited. For example, potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, 4-sodium borate, ammonia And amines.
 上記アルカリ水溶液の濃度は、現像液全量に対して0.1質量%~60質量%であることが好ましい。また、アルカリ水溶液の温度は、現像性にあわせて調節することができる。さらに、これらのアルカリ水溶液は、単独で又は2種類以上を組み合わせて用いることができる。 The concentration of the alkaline aqueous solution is preferably 0.1% by mass to 60% by mass with respect to the total amount of the developer. Moreover, the temperature of aqueous alkali solution can be adjusted according to developability. Furthermore, these aqueous alkali solutions can be used alone or in combination of two or more.
 本実施形態のパターン形成においては、必要に応じて、上記した2種類以上の現像方法を併用して用いてもよい。現像の方式には、ディップ方式、パドル方式、スプレー方式、高圧スプレー方式、ブラッシング、スラッピング等があり、高圧スプレー方式が解像度向上のためには好適である。スプレー方式を採用する場合のスプレー圧としては、0.02MPa~0.5MPaが好ましい。 In the pattern formation of this embodiment, two or more kinds of development methods described above may be used in combination as necessary. Development methods include a dip method, a paddle method, a spray method, a high-pressure spray method, brushing, and slapping, and the high-pressure spray method is suitable for improving the resolution. The spray pressure when the spray method is employed is preferably 0.02 MPa to 0.5 MPa.
 (ポストベーク工程)
 上記現像工程終了後、ポストベーク工程を行い、絶縁層(硬化物)を形成する。ポストベーク工程としては、高圧水銀ランプによる紫外線照射工程やクリーンオーブンを用いた加熱工程等が挙げられ、これらを併用することも可能である。紫外線を照射させる場合は必要に応じてその照射量を調整することができ、例えば0.05J/cm2~10J/cm2程度の照射量で照射を行うことができる。また加熱の条件は、樹脂組成物中の樹脂成分の種類、含有量などに応じて適宜選択すればよいが、好ましくは150℃~220℃で20分間~180分間の範囲、より好ましくは160℃~200℃で30分間~150分間の範囲で選択される。
(Post bake process)
After the development step, a post-bake step is performed to form an insulating layer (cured product). Examples of the post-bake process include an ultraviolet irradiation process using a high-pressure mercury lamp and a heating process using a clean oven, and these can be used in combination. Case of ultraviolet irradiation can adjust its dose optionally, the irradiation can be carried out, for example 0.05J / cm 2 ~ 10J / cm 2 of about dose. The heating conditions may be appropriately selected according to the type and content of the resin component in the resin composition, but preferably 150 ° C. to 220 ° C. for 20 minutes to 180 minutes, more preferably 160 ° C. It is selected in the range of 30 minutes to 150 minutes at ˜200 ° C.
 (めっき工程)
 次に、乾式めっき又は湿式めっきにより絶縁層表面に導体層を形成する。乾式めっきとしては、蒸着法、スパッタリング法、イオンプレーティング法等の公知の方法を使用することができる。蒸着法(真空蒸着法)は、例えば、支持体を真空容器内に入れ、金属を加熱蒸発させることにより絶縁層上に金属膜形成を行うことができる。スパッタリング法も、例えば、支持体を真空容器内に入れ、アルゴン等の不活性ガスを導入し、直流電圧を印加して、イオン化した不活性ガスをターゲット金属に衝突させ、叩き出された金属により絶縁層上に金属膜形成を行うことができる。
(Plating process)
Next, a conductor layer is formed on the surface of the insulating layer by dry plating or wet plating. As the dry plating, known methods such as vapor deposition, sputtering, and ion plating can be used. In the vapor deposition method (vacuum vapor deposition method), for example, a metal film can be formed on the insulating layer by placing the support in a vacuum vessel and evaporating the metal by heating. In the sputtering method, for example, the support is placed in a vacuum vessel, an inert gas such as argon is introduced, a direct current voltage is applied, the ionized inert gas is made to collide with the target metal, and the struck metal is used. A metal film can be formed on the insulating layer.
 湿式めっきの場合は、形成された絶縁層の表面に対して、膨潤液による膨潤処理、酸化剤による粗化処理及び中和液による中和処理をこの順に行うことによって絶縁層表面を粗化する。膨潤液による膨潤処理は、絶縁層を50℃~80℃で1分間~20分間膨潤液に浸漬させることで行われる。膨潤液としてはアルカリ溶液が挙げられ、該アルカリ溶液としては、水酸化ナトリウム溶液、水酸化カリウム溶液等が挙げられる。市販されている膨潤液としては、例えば、上村工業(株)製のアップデス(登録商標)MDS-37等を挙げることができる。 In the case of wet plating, the surface of the insulating layer is roughened by performing swelling treatment with a swelling liquid, roughening treatment with an oxidizing agent, and neutralization treatment with a neutralizing liquid in this order. . The swelling treatment with the swelling liquid is performed by immersing the insulating layer in the swelling liquid at 50 to 80 ° C. for 1 to 20 minutes. Examples of the swelling liquid include an alkaline solution, and examples of the alkaline solution include a sodium hydroxide solution and a potassium hydroxide solution. Examples of commercially available swelling liquids include Updes (registered trademark) MDS-37 manufactured by Uemura Kogyo Co., Ltd.
 酸化剤による粗化処理は、絶縁層を60℃~80℃で5分間~30分間酸化剤溶液に浸漬させることで行われる。酸化剤としては、例えば、水酸化ナトリウムの水溶液に過マンガン酸カリウムや過マンガン酸ナトリウムを溶解したアルカリ性過マンガン酸溶液、重クロム酸塩、オゾン、過酸化水素/硫酸、硝酸等を挙げることができる。また、アルカリ性過マンガン酸溶液における過マンガン酸塩の濃度は5質量%~10質量%とするのが好ましい。市販されている酸化剤としては、例えば、上村工業(株)製アップデス(登録商標)MDE-40、アップデス(登録商標)ELC-SH等のアルカリ性過マンガン酸溶液が挙げられる。中和液による中和処理は、30℃~50℃で1分間~10分間中和液に浸漬させることで行われる。中和液としては、酸性の水溶液が好ましく、市販品としては、上村工業(株)製のアップデス(登録商標)MDN-62が挙げられる。 The roughening treatment with an oxidizing agent is performed by immersing the insulating layer in an oxidizing agent solution at 60 to 80 ° C. for 5 to 30 minutes. Examples of the oxidizing agent include alkaline permanganate solution in which potassium permanganate and sodium permanganate are dissolved in an aqueous solution of sodium hydroxide, dichromate, ozone, hydrogen peroxide / sulfuric acid, nitric acid and the like. it can. The concentration of permanganate in the alkaline permanganate solution is preferably 5% by mass to 10% by mass. Examples of commercially available oxidizing agents include alkaline permanganate solutions such as Updes (registered trademark) MDE-40 and Updes (registered trademark) ELC-SH manufactured by Uemura Kogyo Co., Ltd. The neutralization treatment with the neutralizing solution is performed by immersing in the neutralizing solution at 30 to 50 ° C. for 1 to 10 minutes. The neutralizing solution is preferably an acidic aqueous solution, and a commercially available product is Updes (registered trademark) MDN-62 manufactured by Uemura Kogyo Co., Ltd.
 次いで、無電解めっきと電解めっきとを組み合わせて導体層を形成する。また導体層とは逆パターンのメッキレジストを形成し、無電解めっきのみで導体層を形成することもできる。その後のパターン形成の方法として、例えば、サブトラクティブ法、セミアディティブ法などを用いることができる。 Next, a conductor layer is formed by combining electroless plating and electrolytic plating. Alternatively, a plating resist having a pattern opposite to that of the conductor layer can be formed, and the conductor layer can be formed only by electroless plating. As a pattern formation method thereafter, for example, a subtractive method, a semi-additive method, or the like can be used.
 <半導体装置>
 本実施形態の半導体装置は、本実施形態の樹脂組成物を含む層間絶縁層を備え、具体的には以下の方法により製造することができる。本実施形態の多層プリント配線板の導通箇所に、半導体チップを実装することにより半導体装置を製造することができる。ここで、導通箇所とは、多層プリント配線板における電気信号を伝える箇所のことであって、その場所は表面であっても、埋め込まれた箇所であってもいずれでも構わない。また、半導体チップは半導体を材料とする電気回路素子であれば特に限定されない。
<Semiconductor device>
The semiconductor device of this embodiment includes an interlayer insulating layer containing the resin composition of this embodiment, and can be specifically manufactured by the following method. A semiconductor device can be manufactured by mounting a semiconductor chip in a conductive portion of the multilayer printed wiring board of the present embodiment. Here, the conduction location is a location for transmitting an electrical signal in the multilayer printed wiring board, and the location may be the surface or an embedded location. The semiconductor chip is not particularly limited as long as it is an electric circuit element made of a semiconductor.
 本実施形態の半導体装置を製造する際の半導体チップの実装方法は、半導体チップが有効に機能しさえずれば、特に限定されないが、具体的には、ワイヤボンディング実装方法、フリップチップ実装方法、バンプなしビルドアップ層(BBUL)による実装方法、異方性導電フィルム(ACF)による実装方法、非導電性フィルム(NCF)による実装方法、などが挙げられる。 The semiconductor chip mounting method for manufacturing the semiconductor device of the present embodiment is not particularly limited as long as the semiconductor chip functions effectively. Specifically, the wire bonding mounting method, the flip chip mounting method, and the bump are used. Examples include a mounting method using a none buildup layer (BBUL), a mounting method using an anisotropic conductive film (ACF), and a mounting method using a non-conductive film (NCF).
 また、本実施形態の樹脂シートを半導体チップにラミネートすることによっても、半導体装置を製造することができる。ラミネート後は前述の多層プリント配線板と同様の方法を用いて製造することができる。 Also, a semiconductor device can be manufactured by laminating the resin sheet of this embodiment on a semiconductor chip. After lamination, it can be produced by using the same method as the above multilayer printed wiring board.
 以下、実施例により本発明を更に具体的に説明するが、本発明はこれらの実施例になんら限定されるものではない。 Hereinafter, the present invention will be described more specifically with reference to examples. However, the present invention is not limited to these examples.
 〔合成例1〕
 (シアン酸エステル化合物の合成)
 1-ナフトールアラルキル樹脂(新日鉄住金化学株式会社製)300g(OH基換算1.28mol)及びトリエチルアミン194.6g(1.92mol)(ヒドロキシ基1molに対して1.5mol)をジクロロメタン1800gに溶解させ、これを溶液1とした。
 塩化シアン125.9g(2.05mol)(ヒドロキシ基1molに対して1.6mol)、ジクロロメタン293.8g、36%塩酸194.5g(1.92mol)(ヒドロキシ基1モルに対して1.5モル)、水1205.9gを、撹拌下、液温-2~-0.5℃に保ちながら、溶液1を30分かけて注下した。溶液1注下終了後、同温度にて30分撹拌した後、トリエチルアミン65g(0.64mol)(ヒドロキシ基1molに対して0.5mol)をジクロロメタン65gに溶解させた溶液(溶液2)を10分かけて注下した。溶液2注下終了後、同温度にて30分撹拌して反応を完結させた。
 その後反応液を静置して有機相と水相を分離した。得られた有機相を水1300gで5回洗浄した。水洗5回目の廃水の電気伝導度は5μS/cmであり、水による洗浄により、除けるイオン性化合物は十分に除けられたことを確認した。
 水洗後の有機相を減圧下で濃縮し、最終的に90℃で1時間濃縮乾固させて目的とするナフトールアラルキル型のシアン酸エステル化合物(SNCN)(橙色粘性物)を331g得た。得られたSNCNの質量平均分子量Mwは600であった。また、SNCNのIRスペクトルは2250cm-1(シアン酸エステル基)の吸収を示し、且つ、ヒドロキシ基の吸収は示さなかった。
[Synthesis Example 1]
(Synthesis of cyanate ester compound)
300 g of 1-naphthol aralkyl resin (manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.) (1.28 mol in terms of OH group) and 194.6 g (1.92 mol) of triethylamine (1.5 mol with respect to 1 mol of hydroxy group) were dissolved in 1800 g of dichloromethane. This was designated as Solution 1.
125.9 g (2.05 mol) of cyanogen chloride (1.6 mol with respect to 1 mol of hydroxy group), 293.8 g of dichloromethane, 194.5 g (1.92 mol) of 36% hydrochloric acid (1.5 mol with respect to 1 mol of hydroxy group) ), 1205.9 g of water was poured over 30 minutes with stirring while maintaining the liquid temperature at -2 to -0.5 ° C. After the completion of the pouring of solution 1, after stirring at the same temperature for 30 minutes, a solution (solution 2) in which 65 g (0.64 mol) of triethylamine (0.5 mol with respect to 1 mol of hydroxy group) was dissolved in 65 g of dichloromethane was added for 10 minutes. Over time. After the end of pouring the solution 2, the reaction was completed by stirring at the same temperature for 30 minutes.
Thereafter, the reaction solution was allowed to stand to separate an organic phase and an aqueous phase. The organic phase obtained was washed 5 times with 1300 g of water. The electric conductivity of the waste water in the fifth washing with water was 5 μS / cm, and it was confirmed that the ionic compounds that could be removed were sufficiently removed by washing with water.
The organic phase after washing with water was concentrated under reduced pressure, and finally concentrated to dryness at 90 ° C. for 1 hour to obtain 331 g of the desired naphthol aralkyl-type cyanate ester compound (SNCN) (orange viscous product). The obtained SNCN had a mass average molecular weight Mw of 600. Further, the IR spectrum of SNCN showed absorption of 2250 cm −1 (cyanate group) and did not show absorption of a hydroxy group.
 〔実施例1〕
 (樹脂組成物及び樹脂シートの作成)
 式(1)で表されるビフェニルアラルキル型エポキシ樹脂(A)として、ビフェニルアラルキル型エポキシ樹脂(式(1)中のnは、1~3である。NC3000L(商品名)、日本化薬(株)製)22.4質量部、光硬化開始剤(B)として、2-ベンジル-2-ジメチルアミノ-1-(4-モルフォリノフェニル)-ブタノン-1(Irgacure(登録商標)369、BASFジャパン(株)製)6.5質量部、化合物(C)として、TrisP-PAエポキシアクリレート化合物のプロピレングリコールモノメチルエーテルアセテート(以下、PGMEAと略す場合がある)溶液(KAYARAD(登録商標)ZCR-6007H、不揮発分65質量%、酸価:70mgKOH/g、日本化薬(株)製)77.5質量部(不揮発分換算で50.4質量部)、(C)成分以外のエチレン性不飽和基を有する化合物(D)として、ジペンタエリスリトールヘキサアクリレート(KAYARAD(登録商標)DPHA、日本化薬(株)製)17.4質量部、マレイミド化合物(E)として、マレイミド化合物(BMI-2300(商品名)、大和化成工業(株)製)3.3質量部、充填材(F)として、エポキシシラン処理シリカのメチルエチルケトン(以下、MEKと略す場合がある)スラリー(SC2050MB(商品名)、平均粒径0.5μm、不揮発分70質量%、(株)アドマテックス製)71.4質量部(不揮発分換算で50質量部)を配合し、超音波ホモジナイザーで攪拌してワニス(樹脂組成物の溶液)を得た。これらのワニスを厚さ38μmのPETフィルム(ユニピール(登録商標)TR1-38、ユニチカ(株)製、商品名)上に自動塗工装置(PI-1210、テスター産業(株)製)を用いて塗布し、80℃で7分間加熱乾燥して、PETフィルムを支持体とし樹脂組成物層の厚さが30μmである樹脂シートを得た。
[Example 1]
(Production of resin composition and resin sheet)
As the biphenyl aralkyl type epoxy resin (A) represented by the formula (1), a biphenyl aralkyl type epoxy resin (n in the formula (1) is 1 to 3. NC3000L (trade name), Nippon Kayaku Co., Ltd. 22.4 parts by mass, as a photocuring initiator (B), 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1 (Irgacure (registered trademark) 369, BASF Japan Co., Ltd.) 6.5 parts by mass, as compound (C), propylene glycol monomethyl ether acetate (hereinafter sometimes abbreviated as PGMEA) solution of TrisP-PA epoxy acrylate compound (KAYARAD (registered trademark) ZCR-6007H, Nonvolatile content 65% by mass, acid value: 70 mg KOH / g, Nippon Kayaku Co., Ltd.) 77.5 parts by mass (nonvolatile content) As a compound (D) having an ethylenically unsaturated group other than the component (C) (50.4 parts by mass), dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA, manufactured by Nippon Kayaku Co., Ltd.) 17 .4 parts by mass, as maleimide compound (E), maleimide compound (BMI-2300 (trade name), manufactured by Daiwa Kasei Kogyo Co., Ltd.) 3.3 parts by mass, and as filler (F), methyl ethyl ketone of epoxysilane-treated silica (Hereinafter sometimes abbreviated as MEK) Slurry (SC2050MB (trade name), average particle size 0.5 μm, non-volatile content 70% by mass, manufactured by Admatex Co., Ltd.) 71.4 parts by mass (non-volatile equivalent 50 mass) Part) was mixed and stirred with an ultrasonic homogenizer to obtain a varnish (resin composition solution). Using these varnishes on a 38 μm thick PET film (Unipeel® TR1-38, manufactured by Unitika Ltd., trade name) using an automatic coating apparatus (PI-1210, manufactured by Tester Sangyo Co., Ltd.) This was applied and dried by heating at 80 ° C. for 7 minutes to obtain a resin sheet having a PET film as a support and a resin composition layer having a thickness of 30 μm.
 なお、前記KAYARAD(登録商標)ZCR-6007Hは、上記化合物(C1)および上記化合物(C2)~(C5)のいずれか一種以上を含む混合物である。 The KAYARAD (registered trademark) ZCR-6007H is a mixture containing at least one of the compound (C1) and the compounds (C2) to (C5).
 (内層回路基板の作成)
 内層回路を形成したガラス布基材BT樹脂両面銅張積層板(銅箔厚さ18μm、厚み0.2mm、三菱ガス化学(株)製CCL(登録商標)-HL832NS)の両面をメック(株)製CZ8100にて銅表面の粗化処理を行い内層回路基板を得た。
(Creation of inner layer circuit board)
Both sides of glass cloth base material BT resin double-sided copper-clad laminate (copper foil thickness 18μm, thickness 0.2mm, Mitsubishi Gas Chemical Co., Ltd. CCL (registered trademark) -HL832NS) on which inner layer circuit is formed MEC A copper surface was roughened with CZ8100 manufactured to obtain an inner layer circuit board.
 (評価用積層体の作製)
 前記樹脂シートの樹脂面を内層回路基板上に配置し、真空ラミネーター(ニッコー・マテリアルズ(株)製)を用いて、30秒間真空引き(5.0MPa以下)を行った後、圧力10kgf/cm2、温度70℃で30秒間の積層成形を行った。さらに圧力10kgf/cm2、温度70℃で60秒間の積層成形を行うことで内層回路基板と樹脂組成物層と支持体が積層された積層体を得た。得られた積層体に200mJ/cm2の紫外線を照射する露光工程を施し、支持体をはがし取って、1質量%の炭酸ナトリウム水溶液で現像し、さらに1000mJ/cm2の紫外線を照射する露光工程を施し、180℃、120分間加熱処理するポストベーク工程を施した後、評価用積層体とした。
(Preparation of evaluation laminate)
The resin surface of the resin sheet was placed on the inner layer circuit board, vacuumed for 30 seconds (5.0 MPa or less) using a vacuum laminator (Nikko Materials Co., Ltd.), and then pressure 10 kgf / cm. 2. Laminate molding was performed at a temperature of 70 ° C. for 30 seconds. Furthermore, the laminated body by which the inner-layer circuit board, the resin composition layer, and the support body were laminated | stacked by performing lamination molding for 60 second at a pressure of 10 kgf / cm < 2 > and temperature of 70 degreeC was obtained. The obtained laminate is subjected to an exposure step of irradiating with 200 mJ / cm 2 of ultraviolet light, peeled off the support, developed with a 1% by mass sodium carbonate aqueous solution, and further irradiated with 1000 mJ / cm 2 of ultraviolet light. Then, a post-baking process in which heat treatment was performed at 180 ° C. for 120 minutes was performed, and then a laminate for evaluation was obtained.
 (評価用硬化物の作製)
 前記樹脂シートに200mJ/cm2の紫外線を照射し、さらに1000mJ/cm2の紫外線を照射する露光工程を施し、180℃、120分間加熱処理するポストベーク工程を施した後、支持体をはがし取って評価用硬化物とした。
(Production of cured product for evaluation)
The resin sheet is irradiated with 200 mJ / cm 2 of ultraviolet light, further subjected to an exposure process of irradiating 1000 mJ / cm 2 of ultraviolet light, subjected to a post-baking process of heating at 180 ° C. for 120 minutes, and then the support is peeled off. The cured product was evaluated.
 〔実施例2〕
 成分(A)として、ビフェニルアラルキル型エポキシ樹脂(NC3000L(商品名)、日本化薬(株)製)21.9質量部、光硬化開始剤(B)として、2-ベンジル-2-ジメチルアミノ-1-(4-モルフォリノフェニル)-ブタノン-1(Irgacure(登録商標)369、BASFジャパン(株)製)6.5質量部、化合物(C)として、TrisP-PAエポキシアクリレート化合物のPGMEA溶液(KAYARAD(登録商標)ZCR-6007H、不揮発分65質量%、酸価:70mgKOH/g、日本化薬(株)製)77.5質量部(不揮発分換算で50.4質量部)、(C)成分以外のエチレン性不飽和基を有する化合物(D)として、ジペンタエリスリトールヘキサアクリレート(KAYARAD(登録商標)DPHA、日本化薬(株)製)17.4質量部、マレイミド化合物(E)として、マレイミド化合物(BMI-2300(商品名)、大和化成工業(株)製)3.3質量部、充填材(F)として、エポキシシラン処理シリカのMEKスラリー(SC2050MB(商品名)、平均粒径0.5μm、不揮発分70質量%、(株)アドマテックス製)71.4質量部(不揮発分換算で50質量部)、化合物(G)として、合成例1で得られたシアン酸エステル化合物SNCN0.5質量部を配合し、超音波ホモジナイザーで攪拌してワニス(樹脂組成物の溶液)を得た。これらのワニスを厚さ38μmのPETフィルム(ユニピール(登録商標)TR1-38、ユニチカ(株)製、商品名)上に自動塗工装置(PI-1210、テスター産業(株)製)を用いて塗布し、80℃で7分間加熱乾燥して、PETフィルムを支持体とし樹脂組成物層の厚さが30μmである樹脂シート得た。これを用いて、実施例1と同様にして、評価用積層体及び評価用硬化物を得た。
[Example 2]
As component (A), 21.9 parts by mass of biphenyl aralkyl type epoxy resin (NC3000L (trade name), manufactured by Nippon Kayaku Co., Ltd.) and as photocuring initiator (B), 2-benzyl-2-dimethylamino- 6.5 parts by mass of 1- (4-morpholinophenyl) -butanone-1 (Irgacure (registered trademark) 369, manufactured by BASF Japan Ltd.), as a compound (C), a PGMEA solution of a TrisP-PA epoxy acrylate compound ( KAYARAD (registered trademark) ZCR-6007H, nonvolatile content 65% by mass, acid value: 70 mgKOH / g, manufactured by Nippon Kayaku Co., Ltd.) 77.5 parts by mass (50.4 parts by mass in terms of nonvolatile content), (C) As a compound (D) having an ethylenically unsaturated group other than the components, dipentaerythritol hexaacrylate (KAYARAD (registered trademark)) 17.4 parts by mass of PHA (Nippon Kayaku Co., Ltd.), maleimide compound (E) as maleimide compound (BMI-2300 (trade name), Daiwa Kasei Kogyo Co., Ltd.) 3.3 parts by mass, filler As (F), 71.4 parts by mass of MEK slurry of epoxysilane-treated silica (SC2050MB (trade name), average particle size 0.5 μm, nonvolatile content 70% by mass, manufactured by Admatechs Co., Ltd.) As a compound (G), 0.5 part by mass of the cyanate ester compound SNCN obtained in Synthesis Example 1 was blended and stirred with an ultrasonic homogenizer to obtain a varnish (resin composition solution). Using these varnishes on a 38 μm thick PET film (Unipeel® TR1-38, manufactured by Unitika Ltd., trade name) using an automatic coating apparatus (PI-1210, manufactured by Tester Sangyo Co., Ltd.) It was applied and dried by heating at 80 ° C. for 7 minutes to obtain a resin sheet having a PET film as a support and a resin composition layer having a thickness of 30 μm. Using this, in the same manner as in Example 1, an evaluation laminate and an evaluation cured product were obtained.
 〔実施例3〕
 成分(A)として、ビフェニルアラルキル型エポキシ樹脂(NC3000L(商品名)、日本化薬(株)製)21.9質量部、光硬化開始剤(B)として、2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイド(Irgacure(登録商標)819、BASFジャパン(株)製)6.5質量部、化合物(C)として、TrisP-PAエポキシアクリレート化合物のPGMEA溶液(KAYARAD(登録商標)ZCR-6007H、不揮発分65質量%、酸価:70mgKOH/g、日本化薬(株)製)77.5質量部(不揮発分換算で50.4質量部)、(C)成分以外のエチレン性不飽和基を有する化合物(D)として、ジペンタエリスリトールヘキサアクリレート(KAYARAD(登録商標)DPHA、日本化薬(株)製)17.4質量部、マレイミド化合物(E)として、マレイミド化合物(BMI-2300(商品名)、大和化成工業(株)製)3.3質量部、充填材(F)として、エポキシシラン処理シリカのMEKスラリー(SC2050MB(商品名)、平均粒径0.5μm、不揮発分70質量%、(株)アドマテックス製)71.4質量部(不揮発分換算で50質量部)、化合物(G)として、合成例1で得られたシアン酸エステル化合物SNCN0.5質量部を配合し、超音波ホモジナイザーで攪拌してワニス(樹脂組成物の溶液)を得た。これらのワニスを厚さ38μmのPETフィルム(ユニピール(登録商標)TR1-38、ユニチカ(株)製、商品名)上に自動塗工装置(PI-1210、テスター産業(株)製)を用いて塗布し、80℃で7分間加熱乾燥して、PETフィルムを支持体とし樹脂組成物層の厚さが30μmである樹脂シート得た。これを用いて、実施例1と同様にして、評価用積層体及び評価用硬化物を得た。
Example 3
As component (A), 21.9 parts by mass of biphenyl aralkyl type epoxy resin (NC3000L (trade name), manufactured by Nippon Kayaku Co., Ltd.) and 2,4,6-trimethylbenzoyl- as photocuring initiator (B) 6.5 parts by mass of diphenyl-phosphine oxide (Irgacure (registered trademark) 819, manufactured by BASF Japan KK), as a compound (C), PGMEA solution of TrisP-PA epoxy acrylate compound (KAYARAD (registered trademark) ZCR-6007H) , 65% by mass of non-volatile content, acid value: 70 mg KOH / g, manufactured by Nippon Kayaku Co., Ltd.) 77.5 parts by mass (50.4 parts by mass in terms of non-volatile content), ethylenically unsaturated groups other than component (C) Dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA, Japan) As a maleimide compound (E), maleimide compound (BMI-2300 (trade name), manufactured by Daiwa Kasei Kogyo Co., Ltd.) 3.3 parts by weight, and as a filler (F) , MEK slurry of epoxysilane-treated silica (SC2050MB (trade name), average particle size 0.5 μm, nonvolatile content 70% by mass, manufactured by Admatechs) 71.4 parts by mass (50 parts by mass in terms of nonvolatile content), As the compound (G), 0.5 part by mass of the cyanate ester compound SNCN obtained in Synthesis Example 1 was blended and stirred with an ultrasonic homogenizer to obtain a varnish (solution of resin composition). Using these varnishes on a 38 μm thick PET film (Unipeel® TR1-38, manufactured by Unitika Ltd., trade name) using an automatic coating apparatus (PI-1210, manufactured by Tester Sangyo Co., Ltd.) It was applied and dried by heating at 80 ° C. for 7 minutes to obtain a resin sheet having a PET film as a support and a resin composition layer having a thickness of 30 μm. Using this, in the same manner as in Example 1, an evaluation laminate and an evaluation cured product were obtained.
 〔実施例4〕
 成分(A)として、ビフェニルアラルキル型エポキシ樹脂(NC3000L(商品名)、日本化薬(株)製)15.8質量部、成分(G)として、ナフタレン型エポキシ樹脂(HP-4710(商品名)、DIC(株)社製)6.1質量部、光硬化開始剤(B)として、2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイド(Irgacure(登録商標)819、BASFジャパン(株)製)6.5質量部、化合物(C)として、TrisP-PAエポキシアクリレート化合物のPGMEA溶液(KAYARAD(登録商標)ZCR-6007H、不揮発分65質量%、酸価:70mgKOH/g、日本化薬(株)製)77.5質量部(不揮発分換算で50.4質量部)、(C)成分以外のエチレン性不飽和基を有する化合物(D)として、ジペンタエリスリトールヘキサアクリレート(KAYARAD(登録商標)DPHA、日本化薬(株)製)17.4質量部、マレイミド化合物(E)として、マレイミド化合物(BMI-2300(商品名)、大和化成工業(株)製)3.3質量部、充填材(F)として、エポキシシラン処理シリカのMEKスラリー(SC2050MB(商品名)、平均粒径0.5μm、不揮発分70質量%、(株)アドマテックス製)71.4質量部(不揮発分換算で50質量部)、化合物(G)として、合成例1で得られたシアン酸エステル化合物SNCN0.5質量部を配合し、超音波ホモジナイザーで攪拌してワニス(樹脂組成物の溶液)を得た。これらのワニスを厚さ38μmのPETフィルム(ユニピール(登録商標)TR1-38、ユニチカ(株)製、商品名)上に自動塗工装置(PI-1210、テスター産業(株)製)を用いて塗布し、80℃で7分間加熱乾燥して、PETフィルムを支持体とし樹脂組成物層の厚さが30μmである樹脂シート得た。これを用いて、実施例1と同様にして、評価用積層体及び評価用硬化物を得た。
Example 4
As component (A), biphenylaralkyl type epoxy resin (NC3000L (trade name), manufactured by Nippon Kayaku Co., Ltd.) 15.8 parts by mass, as component (G), naphthalene type epoxy resin (HP-4710 (trade name)) (Manufactured by DIC Corporation) 6.1 parts by mass, 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide (Irgacure (registered trademark) 819, BASF Japan Ltd.) as a photocuring initiator (B) (Product) 6.5 parts by mass, as a compound (C), PGMEA solution of TrisP-PA epoxy acrylate compound (KAYARAD (registered trademark) ZCR-6007H, nonvolatile content 65% by mass, acid value: 70 mgKOH / g, Nippon Kayaku ( Co., Ltd.) 77.5 parts by mass (50.4 parts by mass in terms of nonvolatile content), having an ethylenically unsaturated group other than component (C) As compound (D), dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA, manufactured by Nippon Kayaku Co., Ltd.) 17.4 parts by mass, as maleimide compound (E), maleimide compound (BMI-2300 (trade name) ), 3.3 parts by mass of Daiwa Kasei Kogyo Co., Ltd., as filler (F), MEK slurry of epoxysilane-treated silica (SC2050MB (trade name), average particle size 0.5 μm, nonvolatile content 70% by mass, 71.4 parts by mass (manufactured by Admatechs Co., Ltd.) (50 parts by mass in terms of nonvolatile content), compound (G) is blended with 0.5 parts by mass of the cyanate ester compound SNCN obtained in Synthesis Example 1, and ultrasonic waves The mixture was stirred with a homogenizer to obtain a varnish (resin composition solution). Using these varnishes on a 38 μm thick PET film (Unipeel® TR1-38, manufactured by Unitika Ltd., trade name) using an automatic coating apparatus (PI-1210, manufactured by Tester Sangyo Co., Ltd.) It was applied and dried by heating at 80 ° C. for 7 minutes to obtain a resin sheet having a PET film as a support and a resin composition layer having a thickness of 30 μm. Using this, in the same manner as in Example 1, an evaluation laminate and an evaluation cured product were obtained.
 〔実施例5〕
 成分(A)として、ビフェニルアラルキル型エポキシ樹脂(NC3000L(商品名)、日本化薬(株)製)15.8質量部、成分(G)として、ナフタレン型エポキシ樹脂(HP-4710(商品名)、DIC(株)社製)6.1質量部、光硬化開始剤(B)として、2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイド(Irgacure(登録商標)819、BASFジャパン(株)製)6.5質量部、化合物(C)として、TrisP-PAエポキシアクリレート化合物のPGMEA溶液(KAYARAD(登録商標)ZCR-6007H、不揮発分65質量%、酸価:70mgKOH/g、日本化薬(株)製)77.5質量部(不揮発分換算で50.4質量部)、(C)成分以外のエチレン性不飽和基を有する化合物(D)として、ジペンタエリスリトールヘキサアクリレート(KAYARAD(登録商標)DPHA、日本化薬(株)製)17.4質量部、マレイミド化合物(E)として、マレイミド化合物(BMI-2300(商品名)、大和化成工業(株)製)3.3質量部、充填材(F)として、エポキシシラン処理シリカのMEKスラリー(SC2050MB(商品名)、平均粒径0.5μm、不揮発分70質量%、(株)アドマテックス製)71.4質量部(不揮発分換算で50質量部)、化合物(G)として、合成例1で得られたシアン酸エステル化合物SNCN0.5質量部、熱硬化促進剤(H)として、2-エチル-4-メチルイミダゾール(2E4MZ(商品名)、四国化成(株)製)0.2質量部を配合し、超音波ホモジナイザーで攪拌してワニス(樹脂組成物の溶液)を得た。これらのワニスを厚さ38μmのPETフィルム(ユニピール(登録商標)TR1-38、ユニチカ(株)製、商品名)上に自動塗工装置(PI-1210、テスター産業(株)製)を用いて塗布し、80℃で7分間加熱乾燥して、PETフィルムを支持体とし樹脂組成物層の厚さが30μmである樹脂シート得た。これを用いて、実施例1と同様にして、評価用積層体及び評価用硬化物を得た。
Example 5
As component (A), biphenylaralkyl type epoxy resin (NC3000L (trade name), manufactured by Nippon Kayaku Co., Ltd.) 15.8 parts by mass, as component (G), naphthalene type epoxy resin (HP-4710 (trade name)) (Manufactured by DIC Corporation) 6.1 parts by mass, 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide (Irgacure (registered trademark) 819, BASF Japan Ltd.) as a photocuring initiator (B) (Product) 6.5 parts by mass, as a compound (C), PGMEA solution of TrisP-PA epoxy acrylate compound (KAYARAD (registered trademark) ZCR-6007H, nonvolatile content 65% by mass, acid value: 70 mgKOH / g, Nippon Kayaku ( Co., Ltd.) 77.5 parts by mass (50.4 parts by mass in terms of nonvolatile content), having an ethylenically unsaturated group other than component (C) As compound (D), dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA, manufactured by Nippon Kayaku Co., Ltd.) 17.4 parts by mass, as maleimide compound (E), maleimide compound (BMI-2300 (trade name) ), 3.3 parts by mass of Daiwa Kasei Kogyo Co., Ltd., as filler (F), MEK slurry of epoxysilane-treated silica (SC2050MB (trade name), average particle size 0.5 μm, nonvolatile content 70% by mass, (Made by Admatechs) 71.4 parts by mass (50 parts by mass in terms of non-volatile content), 0.5 parts by mass of the cyanate ester compound SNCN obtained in Synthesis Example 1 as a compound (G), a thermosetting accelerator ( H), 0.2 parts by mass of 2-ethyl-4-methylimidazole (2E4MZ (trade name), manufactured by Shikoku Kasei Co., Ltd.) is blended, and an ultrasonic homogenizer is used. Stirring gave a varnish (resin composition solution). Using these varnishes on a 38 μm thick PET film (Unipeel® TR1-38, manufactured by Unitika Ltd., trade name) using an automatic coating apparatus (PI-1210, manufactured by Tester Sangyo Co., Ltd.) It was applied and dried by heating at 80 ° C. for 7 minutes to obtain a resin sheet having a PET film as a support and a resin composition layer having a thickness of 30 μm. Using this, in the same manner as in Example 1, an evaluation laminate and an evaluation cured product were obtained.
 〔比較例1〕
 化合物(C)の代わりに、ビスフェノールF型エポキシアクリレート(KAYARAD(登録商標)ZFR-1553H、不揮発分68質量%、酸価:70mgKOH/g、日本化薬(株)製)74.1質量部(不揮発分換算で50.4質量部)を用いた以外は実施例1と同様にしてワニスを調製し、樹脂シート、評価用積層体及び評価用硬化物を得た。
[Comparative Example 1]
Instead of the compound (C), 74.1 parts by mass of bisphenol F type epoxy acrylate (KAYARAD (registered trademark) ZFR-1553H, non-volatile content 68% by mass, acid value: 70 mgKOH / g, manufactured by Nippon Kayaku Co., Ltd.) A varnish was prepared in the same manner as in Example 1 except that 50.4 parts by mass in terms of non-volatile content was used to obtain a resin sheet, an evaluation laminate, and an evaluation cured product.
 なお、KAYARAD(登録商標)ZFR-1553Hは、前記式(2)で表される構造を有さない。 KAYARAD (registered trademark) ZFR-1553H does not have the structure represented by the above formula (2).
 〔比較例2〕
 成分(A)の代わりに、ナフタレン型エポキシ樹脂(HP-4710(商品名)、DIC(株)製)22.4質量部を用いた以外は実施例1と同様にしてワニスを調製し、樹脂シート、評価用積層体及び評価用硬化物を得た。
[Comparative Example 2]
A varnish was prepared in the same manner as in Example 1 except that 22.4 parts by mass of a naphthalene type epoxy resin (HP-4710 (trade name), manufactured by DIC Corporation) was used instead of the component (A). A sheet, a laminate for evaluation, and a cured product for evaluation were obtained.
 〔比較例3〕
 成分(A)の代わりに、多官能型エポキシ樹脂(1031S(商品名)、三菱化学(株)製)22.4質量部を用いた以外は実施例1と同様にしてワニスを調製し、樹脂シート、評価用積層体及び評価用硬化物を得た。
[Comparative Example 3]
A varnish was prepared in the same manner as in Example 1 except that 22.4 parts by mass of a polyfunctional epoxy resin (1031S (trade name), manufactured by Mitsubishi Chemical Corporation) was used instead of the component (A), and the resin A sheet, a laminate for evaluation, and a cured product for evaluation were obtained.
 なお、前記多官能型エポキシ樹脂(1031S(商品名)、三菱化学(株)製)は、以下の構造式(12)を有する。 The multifunctional epoxy resin (1031S (trade name), manufactured by Mitsubishi Chemical Corporation) has the following structural formula (12).
Figure JPOXMLDOC01-appb-C000026
Figure JPOXMLDOC01-appb-C000026
 〔物性測定評価〕
 樹脂シート、評価用積層体及び評価用硬化物を、以下の方法により測定し、評価した。それらの結果を表1に示す。
(Measurement of physical properties)
The resin sheet, the evaluation laminate and the evaluation cured product were measured and evaluated by the following methods. The results are shown in Table 1.
 <塗膜性>
 A4サイズの各支持体付き樹脂シートの樹脂表面端部に指を軽く押し付け、指に対する張り付き程度を以下の基準で評価した。
 ○:指に対する張り付きがほとんど認められない。支持体付き樹脂シートの端部が指に張り付くが、高さ30mm未満で指から剥がれて落下する。
 ×:指に対する張り付きが認められる。支持体付き樹脂シートの端部が指に張り付き、高さ30mm以上浮き上がる。
<Coating properties>
A finger was lightly pressed against the resin surface edge of each A4-sized resin sheet with a support, and the degree of sticking to the finger was evaluated according to the following criteria.
○: Sticking to the finger is hardly recognized. Although the edge part of the resin sheet with a support body sticks to a finger | toe, it peels off from a finger | toe and falls by less than 30 mm in height.
X: Sticking to the finger is recognized. The edge part of the resin sheet with a support body sticks to a finger | toe, and 30 mm or more in height rises.
 <耐熱性(ガラス転移温度)>
 評価用硬化物をDMA装置(TAインスツルメント社製動的粘弾性測定装置DMAQ800(商品名))を用いて10℃/分で昇温し、LossModulusのピーク位置をガラス転移温度(Tg、℃)とした。
<Heat resistance (glass transition temperature)>
The cured product for evaluation was heated at 10 ° C./min using a DMA device (Dynamic Viscoelasticity Measuring Device DMAQ800 (trade name) manufactured by TA Instruments), and the peak position of Loss Modulus was measured at the glass transition temperature (Tg, ° C. ).
 <現像性>
 評価用積層体の現像面を、現像工程が開始してから目視で残渣が無くなるまでの時間を測定した後、SEM(走査電子顕微鏡)にて観察(倍率1000倍)し、残渣の有無を下記基準で評価した。
 ◎:目視での現像残渣がなくなるまでの時間が50sec以下であり、SEM観察後も30mm角の範囲に現像残渣はなく、現像性が非常に優れている。
 ○:目視での現像残渣がなくなるまでの時間が50secを超えるが、SEM観察後も30mm角の範囲に現像残渣はなく、現像性が優れている。
 ×:30mm角の範囲に現像残渣があり、現像性が劣っている。
<Developability>
The development surface of the evaluation laminate was visually measured for the time from the start of the development process until the residue disappeared, and then observed with a scanning electron microscope (SEM) (magnification 1000 times). Evaluated by criteria.
(Double-circle): The time until the visual development residue disappears is 50 sec or less, and there is no development residue in the range of 30 mm square even after SEM observation, and the developability is very excellent.
◯: Although the time until the visual development residue disappears exceeds 50 sec, there is no development residue in the 30 mm square area even after SEM observation, and the developability is excellent.
X: There is a development residue in the range of 30 mm square, and the developability is inferior.
 評価用硬化物の湿式粗化処理と導体層めっき:
 実施例1~5及び比較例1~3で得られた多層プリント配線板を、上村工業製の無電解銅めっきプロセス(使用薬液名:MCD-PL、MDP-2、MAT-SP、MAB-4-C、MEL-3-APEA
 ver.2)にて、約0.8μmの無電解銅めっきを施し、130℃で1時間の乾燥を行った。続いて、電解銅めっきをめっき銅の厚みが18μmになるように施し、180℃で1時間の乾燥を行った。こうして、絶縁層上に厚さ18μmの導体層(めっき銅)が形成されたサンプルを作製し、以下の評価に供した。
Wet roughening treatment and conductor layer plating of cured product for evaluation:
The multilayer printed wiring boards obtained in Examples 1 to 5 and Comparative Examples 1 to 3 were subjected to an electroless copper plating process manufactured by Uemura Kogyo (names of chemicals used: MCD-PL, MDP-2, MAT-SP, MAB-4). -C, MEL-3-APEA
ver. In 2), about 0.8 μm of electroless copper plating was applied, and drying was performed at 130 ° C. for 1 hour. Subsequently, electrolytic copper plating was performed so that the thickness of the plated copper was 18 μm, and drying was performed at 180 ° C. for 1 hour. In this way, a sample in which a conductor layer (plated copper) having a thickness of 18 μm was formed on the insulating layer was prepared and subjected to the following evaluation.
 <めっき密着性(kN/m)>
 上記手順により作製されたサンプルを用い、めっき銅の接着力をJIS
 C6481に準じて3回測定し、平均値を求めた。電解銅めっき後の乾燥で膨れたサンプルに関しては、膨れていない部分を用いて評価を行った。
<Plating adhesion (kN / m)>
Using the sample prepared by the above procedure, the adhesive strength of plated copper was measured according to JIS.
Measurement was performed three times according to C6481, and an average value was obtained. About the sample swollen by the drying after electrolytic copper plating, it evaluated using the part which is not swollen.
Figure JPOXMLDOC01-appb-T000027
Figure JPOXMLDOC01-appb-T000027
 表1から明らかなように、実施例1~5はめっき密着性が優れている。その中でも、実施例2~5は耐熱性及びめっき密着性が良好であり、特に、実施例3~5は、耐熱性及びめっき密着性が顕著に優れている。さらに、実施例4及び5は、現像性にも優れている。これに対し、比較例1~3はめっき密着性が不十分である。従って、本発明によれば、めっき密着性に優れ、耐熱性及び現像性にも優れた樹脂組成物、それを用いた樹脂シート、多層プリント配線板及び半導体装置が得られる。 As is apparent from Table 1, Examples 1 to 5 have excellent plating adhesion. Among them, Examples 2 to 5 have good heat resistance and plating adhesion, and Examples 3 to 5 are particularly excellent in heat resistance and plating adhesion. Furthermore, Examples 4 and 5 are excellent in developability. On the other hand, Comparative Examples 1 to 3 have insufficient plating adhesion. Therefore, according to the present invention, a resin composition excellent in plating adhesion, heat resistance and developability, a resin sheet using the resin composition, a multilayer printed wiring board, and a semiconductor device can be obtained.

Claims (14)

  1.  下記式(1)で表されるビフェニルアラルキル型エポキシ樹脂(A)、光硬化開始剤(B)、下記式(2)で表される化合物(C)及び下記式(2)で表される化合物(C)以外のエチレン性不飽和基を有する化合物(D)を含有する、樹脂組成物。
    Figure JPOXMLDOC01-appb-C000001
     (式(1)中、nは0~15の整数を示す。)
    Figure JPOXMLDOC01-appb-C000002
     (式(2)中、複数のR1は、各々独立に、水素原子又はメチル基を表し、複数のR2は、各々独立に、水素原子又は置換基を有していてもよい炭素数1~22の炭化水素基を表し、複数のR3は、各々独立に、下記式(3)で表される置換基、下記式(4)で表される置換基又はヒドロキシ基を表す。)。
    Figure JPOXMLDOC01-appb-C000003
    Figure JPOXMLDOC01-appb-C000004
     (式(4)中、R4は、水素原子又はメチル基を表す。)。
    Biphenyl aralkyl type epoxy resin (A) represented by the following formula (1), photocuring initiator (B), compound (C) represented by the following formula (2) and compound represented by the following formula (2) A resin composition containing a compound (D) having an ethylenically unsaturated group other than (C).
    Figure JPOXMLDOC01-appb-C000001
    (In the formula (1), n represents an integer of 0 to 15)
    Figure JPOXMLDOC01-appb-C000002
    (In Formula (2), a plurality of R 1 s each independently represent a hydrogen atom or a methyl group, and a plurality of R 2 s each independently have a hydrogen atom or a substituent having 1 carbon atom) And a plurality of R 3 each independently represents a substituent represented by the following formula (3), a substituent represented by the following formula (4), or a hydroxy group.
    Figure JPOXMLDOC01-appb-C000003
    Figure JPOXMLDOC01-appb-C000004
    (In formula (4), R 4 represents a hydrogen atom or a methyl group).
  2.  マレイミド化合物(E)を更に含有する、請求項1に記載の樹脂組成物。 The resin composition according to claim 1, further comprising a maleimide compound (E).
  3.  充填材(F)を更に含有する、請求項1又は2に記載の樹脂組成物。 The resin composition according to claim 1 or 2, further comprising a filler (F).
  4.  シアン酸エステル化合物、フェノール樹脂、オキセタン樹脂、ベンゾオキサジン化合物及び前記(1)で表されるビフェニルアラルキル型エポキシ樹脂(A)と異なるエポキシ樹脂からなる群から選択されるいずれか一種以上の化合物(G)を更に含有する、請求項1~3のいずれか一項に記載の樹脂組成物。 Any one or more compounds selected from the group consisting of a cyanate ester compound, a phenol resin, an oxetane resin, a benzoxazine compound and an epoxy resin different from the biphenylaralkyl type epoxy resin (A) represented by (1) above (G The resin composition according to any one of claims 1 to 3, further comprising:
  5.  前記式(2)で表される化合物(C)の酸価が、30mgKOH/g以上120mgKOH/g以下である、請求項1~4のいずれか一項に記載の樹脂組成物。 The resin composition according to any one of claims 1 to 4, wherein an acid value of the compound (C) represented by the formula (2) is 30 mgKOH / g or more and 120 mgKOH / g or less.
  6.  成分(A)の含有量が、樹脂組成物中の樹脂固形分100質量部に対して、3質量部以上50質量部以下である、請求項1~5のいずれか一項に記載の樹脂組成物。 The resin composition according to any one of claims 1 to 5, wherein the content of the component (A) is 3 parts by mass or more and 50 parts by mass or less with respect to 100 parts by mass of the resin solid content in the resin composition. object.
  7.  前記エチレン性不飽和基を有する化合物(D)が、(メタ)アクリロイル基を有する化合物及び/又はビニル基を有する化合物である、請求項1~6のいずれか一項に記載の樹脂組成物。 The resin composition according to any one of claims 1 to 6, wherein the compound (D) having an ethylenically unsaturated group is a compound having a (meth) acryloyl group and / or a compound having a vinyl group.
  8.  前記充填材(F)が、シリカ、ベーマイト、硫酸バリウム、シリコーンパウダー、フッ素樹脂系充填材、ウレタン樹脂系充填材、アクリル樹脂系充填材、ポリエチレン系充填材、スチレン・ブタジエンゴム及びシリコーンゴムからなる群から選択されるいずれか一種類以上である、請求項3に記載の樹脂組成物。 The filler (F) is composed of silica, boehmite, barium sulfate, silicone powder, fluororesin filler, urethane resin filler, acrylic resin filler, polyethylene filler, styrene / butadiene rubber and silicone rubber. The resin composition according to claim 3, which is at least one selected from the group.
  9.  熱硬化促進剤(H)を更に含有する、請求項1~8のいずれか一項に記載の樹脂組成物。 The resin composition according to any one of claims 1 to 8, further comprising a thermosetting accelerator (H).
  10.  下記式(5)で表されるナフタレン型エポキシ樹脂を更に含有する、請求項1~9のいずれか一項に記載の樹脂組成物。
    Figure JPOXMLDOC01-appb-C000005
    The resin composition according to any one of claims 1 to 9, further comprising a naphthalene type epoxy resin represented by the following formula (5).
    Figure JPOXMLDOC01-appb-C000005
  11.  前記光硬化開始剤(B)が、下記式(6)で表されるホスフィンオキサイド化合物を含有する、請求項1~10のいずれか一項に記載の樹脂組成物。
    Figure JPOXMLDOC01-appb-C000006
     (式(6)中、R5~R10は、各々独立に、水素原子又は炭素数1~4のアルキル基を示し、R11は、炭素数1~20のアルキル基又は炭素数6~20のアリール基を示す。)
    The resin composition according to any one of claims 1 to 10, wherein the photocuring initiator (B) contains a phosphine oxide compound represented by the following formula (6).
    Figure JPOXMLDOC01-appb-C000006
    (In the formula (6), R 5 to R 10 each independently represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and R 11 represents an alkyl group having 1 to 20 carbon atoms or 6 to 20 carbon atoms. An aryl group of
  12.  支持体及び該支持体の表面に配された、請求項1~11のいずれか一項に記載の樹脂組成物を有する、樹脂シート。 A resin sheet comprising the support and the resin composition according to any one of claims 1 to 11 disposed on the surface of the support.
  13.  請求項1~11のいずれか一項に記載の樹脂組成物を有する、多層プリント配線板。 A multilayer printed wiring board comprising the resin composition according to any one of claims 1 to 11.
  14.  請求項1~11のいずれか一項に記載の樹脂組成物を有する、半導体装置。
     
    A semiconductor device comprising the resin composition according to any one of claims 1 to 11.
PCT/JP2017/018045 2016-06-29 2017-05-12 Resin composition, resin sheet, multilayer printed circuit board, and semiconductor device WO2018003314A1 (en)

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