TW201731749A - 吸附裝置 - Google Patents

吸附裝置 Download PDF

Info

Publication number
TW201731749A
TW201731749A TW106107610A TW106107610A TW201731749A TW 201731749 A TW201731749 A TW 201731749A TW 106107610 A TW106107610 A TW 106107610A TW 106107610 A TW106107610 A TW 106107610A TW 201731749 A TW201731749 A TW 201731749A
Authority
TW
Taiwan
Prior art keywords
adsorption
suction
opening
wall surface
closing valve
Prior art date
Application number
TW106107610A
Other languages
English (en)
Chinese (zh)
Inventor
Tsuyoshi Nomoto
Akihiro Ukita
Original Assignee
Sumitomo Heavy Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries filed Critical Sumitomo Heavy Industries
Publication of TW201731749A publication Critical patent/TW201731749A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00—Check valves
    • F16K15/14—Check valves with flexible valve members
    • F16K15/16—Check valves with flexible valve members with tongue-shaped laminae

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Manipulator (AREA)
  • Check Valves (AREA)
TW106107610A 2016-03-10 2017-03-08 吸附裝置 TW201731749A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016047043A JP2017159411A (ja) 2016-03-10 2016-03-10 吸着装置

Publications (1)

Publication Number Publication Date
TW201731749A true TW201731749A (zh) 2017-09-16

Family

ID=59789380

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106107610A TW201731749A (zh) 2016-03-10 2017-03-08 吸附裝置

Country Status (3)

Country Link
JP (1) JP2017159411A (ja)
TW (1) TW201731749A (ja)
WO (1) WO2017154881A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI638759B (zh) * 2018-04-17 2018-10-21 威光自動化科技股份有限公司 異形薄片物件的負壓吸附器
GB2605818B (en) 2021-04-14 2023-12-06 Agfa Nv A substrate support system for a conveyor printer
GB2605814B (en) * 2021-04-14 2023-10-04 Agfa Nv Vacuum aperture valve array

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08193575A (ja) * 1995-01-13 1996-07-30 Sanden Corp 弁板装置
JP2004019735A (ja) * 2002-06-14 2004-01-22 Ckd Corp ダイアフラム構造
WO2016157422A1 (ja) * 2015-03-31 2016-10-06 株式会社メイコー 基板吸着装置及び基板吸着方法

Also Published As

Publication number Publication date
JP2017159411A (ja) 2017-09-14
WO2017154881A1 (ja) 2017-09-14

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