TW201638136A - Carboxyl group-containing resin, photo-sensitive resin composition, dry film, printed wiring board, and manufactural method of carboxyl group-containing resin - Google Patents

Carboxyl group-containing resin, photo-sensitive resin composition, dry film, printed wiring board, and manufactural method of carboxyl group-containing resin Download PDF

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TW201638136A
TW201638136A TW105102676A TW105102676A TW201638136A TW 201638136 A TW201638136 A TW 201638136A TW 105102676 A TW105102676 A TW 105102676A TW 105102676 A TW105102676 A TW 105102676A TW 201638136 A TW201638136 A TW 201638136A
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carboxyl group
resin composition
containing resin
photosensitive resin
epoxy
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TW105102676A
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TWI740815B (en
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樋口倫也
橋本壯一
丸澤尙
田中信也
荒井貴
川里浩信
稻葉真司
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互應化學工業股份有限公司
新日鐵住金化學股份有限公司
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Priority claimed from JP2015014500A external-priority patent/JP6767090B2/en
Priority claimed from JP2015215707A external-priority patent/JP6927664B2/en
Priority claimed from JP2015215704A external-priority patent/JP2017088640A/en
Priority claimed from JP2015215705A external-priority patent/JP2017090490A/en
Priority claimed from JP2016006642A external-priority patent/JP2017125163A/en
Priority claimed from JP2016008984A external-priority patent/JP6391121B2/en
Application filed by 互應化學工業股份有限公司, 新日鐵住金化學股份有限公司 filed Critical 互應化學工業股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/02Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated end groups
    • C08F290/06Polymers provided for in subclass C08G
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/02Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated end groups
    • C08F290/06Polymers provided for in subclass C08G
    • C08F290/064Polymers containing more than one epoxy group per molecule
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/14Polycondensates modified by chemical after-treatment
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/22Di-epoxy compounds
    • C08G59/24Di-epoxy compounds carbocyclic
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/42Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/029Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061Etching masks
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/182Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
    • H05K3/184Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method using masks

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  • General Physics & Mathematics (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
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  • Polymers & Plastics (AREA)
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  • Spectroscopy & Molecular Physics (AREA)
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  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Materials For Photolithography (AREA)

Abstract

Provided is a resin containing a carboxyl group, which is suitable as a component of a photosensitive resin composition, can impart excellent developability with an alkaline aqueous solution to a photosensitive resin composition even though the resin has a fluorene skeleton, and can also impart high electric insulation properties and plating resistance to a cured product of a photosensitive resin composition. The resin containing a carboxyl group is a reaction product of an intermediate with an acid dianhydride and an acid monohydride, wherein the intermediate is a reaction product of an epoxy compound having a bisphenol fluorene skeleton represented by formula (1) with a carboxylic acid containing an unsaturated group. The degree of polydispersion of the resin containing a carboxyl group is in the range from 1.2 to 2.8.

Description

含羧基樹脂、感光性樹脂組成物、乾膜、印刷線路板及含 羧基樹脂的製造方法 Carboxyl group-containing resin, photosensitive resin composition, dry film, printed wiring board and Method for producing carboxyl resin

本發明有關一種含羧基樹脂、感光性樹脂組成物、乾膜、具備層間絕緣層之印刷線路板、具備抗焊劑層之印刷線路板、及前述含羧基樹脂的製造方法,該感光性樹脂組成物含有前述含羧基樹脂,該乾膜是前述感光性樹脂組成物的乾燥物,該層間絕緣層包含前述感光性樹脂組成物的硬化物,而該抗焊劑層包含前述感光性樹脂組成物的硬化物。 The present invention relates to a carboxyl group-containing resin, a photosensitive resin composition, a dry film, a printed wiring board having an interlayer insulating layer, a printed wiring board having a solder resist layer, and a method for producing the carboxyl group-containing resin, and the photosensitive resin composition The dry film is a dried product of the photosensitive resin composition, and the interlayer insulating layer contains a cured product of the photosensitive resin composition, and the solder resist layer contains a cured product of the photosensitive resin composition. .

過去使用電絕緣性的樹脂組成物,用以形成印刷線路板的抗焊劑層、抗鍍劑層、抗蝕刻劑層、層間絕緣層等電絕緣性層。這樣的樹脂組成物,例如是感光性樹脂組成物。 In the past, an electrically insulating resin composition was used to form an electrically insulating layer such as a solder resist layer, a plating resist layer, an etch resist layer, and an interlayer insulating layer of a printed wiring board. Such a resin composition is, for example, a photosensitive resin composition.

已提案在感光性樹脂組成物中摻和一種含羧基樹脂,用以對由感光性樹脂組成物所形成之層賦予較高 的耐熱性,該含羧基樹脂具有雙酚茀骨架。例如日本特許第4508929號揭示使用一種具備茀骨架之含羧基樹脂,該含羧基樹脂是使茀環氧(甲基)丙烯酸酯與多元羧酸或其酸酐進行反應而獲得。 It has been proposed to incorporate a carboxyl group-containing resin in a photosensitive resin composition for imparting a higher layer to a layer formed of a photosensitive resin composition. The heat resistance of the carboxyl group-containing resin has a bisphenol fluorene skeleton. For example, Japanese Patent No. 4,508, 929 discloses the use of a carboxyl group-containing resin having an anthracene skeleton obtained by reacting a fluorene epoxy (meth) acrylate with a polyvalent carboxylic acid or an anhydride thereof.

由感光性樹脂組成物所形成之層,亦要求高電絕緣性和耐鍍覆性。因此,需要增加具有雙酚茀骨架之含羧基樹脂的分子量。 The layer formed of the photosensitive resin composition also requires high electrical insulation and plating resistance. Therefore, it is necessary to increase the molecular weight of the carboxyl group-containing resin having a bisphenol fluorene skeleton.

然而,若增加具有雙酚茀骨架之含羧基樹脂的分子量,則難以藉由含有鹼金屬鹽和鹼金屬氫氧化物中的至少其中一者之鹼性水溶液,來對感光性樹脂組成物進行顯影。近年來,為了提升作業環境、減輕廢棄處處理的負擔等,逐漸在避免使用含有有機胺之顯影液,因此,強烈要求感光性樹脂組成物能夠藉由含有鹼金屬鹽和鹼金屬氫氧化物中的至少其中一者之鹼性水溶液來進行顯影。 However, if the molecular weight of the carboxyl group-containing resin having a bisphenol fluorene skeleton is increased, it is difficult to develop the photosensitive resin composition by containing an alkaline aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide. . In recent years, in order to improve the working environment and reduce the burden of disposal at the disposal site, the use of an organic amine-containing developer has been gradually avoided. Therefore, it is strongly required that the photosensitive resin composition can contain an alkali metal salt and an alkali metal hydroxide. At least one of the alkaline aqueous solutions is used for development.

本發明的目的在於提供一種含羧基樹脂、感光性樹脂組成物、乾膜、具備層間絕緣層之印刷線路板、具備抗焊劑層之印刷線路板、及含羧基樹脂的製造方法,該含羧基樹脂組成物適合作為感光性樹脂組成物的成分,且具有茀骨架,並且能夠對感光性樹脂組成物賦予優異的藉由鹼性水溶液來進行顯影之顯影性,而且能夠對感光性樹脂組成物的硬化物賦予較高的電絕緣性和耐鍍覆性,該感光性樹脂組成物含有前述含羧基樹脂,該乾膜是前述感光 性樹脂組成物的乾燥物,該層間絕緣層包含前述感光性樹脂組成物的硬化物,而該抗焊劑層包含前述感光性樹脂組成物的硬化物。 An object of the present invention is to provide a carboxyl group-containing resin, a photosensitive resin composition, a dry film, a printed wiring board having an interlayer insulating layer, a printed wiring board having a solder resist layer, and a method for producing a carboxyl group-containing resin. The composition is suitable as a component of the photosensitive resin composition, and has an anthracene skeleton, and is capable of imparting excellent developability by an aqueous alkaline solution to the photosensitive resin composition, and is capable of hardening the photosensitive resin composition. The material imparts high electrical insulation and plating resistance, and the photosensitive resin composition contains the above-mentioned carboxyl group-containing resin, and the dry film is the aforementioned photosensitive A dried product of the resin composition, wherein the interlayer insulating layer contains a cured product of the photosensitive resin composition, and the solder resist layer contains a cured product of the photosensitive resin composition.

本發明的其中一態樣的含羧基樹脂(A1),是中間體、酸二酐(a3)及酸一酐(a4)之反應物,該中間體是環氧化合物(a1)與含不飽和基羧酸(a2)之反應物,其中,前述環氧化合物(a1)具有雙酚茀骨架,前述雙酚茀骨架是以下述式(1)來表示,在下述式(1)中,R1~R8各自獨立地為氫、碳數1~5的烷基、或鹵素,並且,前述含羧基樹脂(A1)的多分散性在1.2~2.8的範圍內。 One of the carboxyl group-containing resins (A1) of the present invention is a reactant of an intermediate, an acid dianhydride (a3) and an acid anhydride (a4), which is an epoxy compound (a1) and an unsaturated group. A reaction product of the carboxylic acid (a2), wherein the epoxy compound (a1) has a bisphenol fluorene skeleton, and the bisphenol fluorene skeleton is represented by the following formula (1): in the following formula (1), R 1 ~R 8 is each independently hydrogen, an alkyl group having 1 to 5 carbon atoms, or a halogen, and the polydispersity of the carboxyl group-containing resin (A1) is in the range of 1.2 to 2.8.

本發明的其中一態樣的感光性樹脂組成物,其含有:含羧基樹脂(A);不飽和化合物(B),其於一分子中具有至少一個乙烯性不飽和鍵;光聚合起始劑(C);及,環氧化合物(D);其中,前述含羧基樹脂(A)含有含羧基樹脂(A1)。 A photosensitive resin composition of one aspect of the present invention, comprising: a carboxyl group-containing resin (A); an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule; and a photopolymerization initiator (C); and an epoxy compound (D); wherein the carboxyl group-containing resin (A) contains a carboxyl group-containing resin (A1).

本發明的其中一態樣的乾膜,其是前述感光性樹脂組成物的乾燥物。 A dry film of one aspect of the present invention is a dried product of the photosensitive resin composition.

本發明的其中一態樣的印刷線路板,其具備層間絕緣層,該層間絕緣層包含前述感光性樹脂組成物的硬化物。 A printed wiring board according to an aspect of the present invention includes an interlayer insulating layer containing a cured product of the photosensitive resin composition.

本發明的其中一態樣的印刷線路板,其具備抗焊劑層,該抗焊劑層包含前述感光性樹脂組成物的硬化物。 A printed wiring board according to one aspect of the present invention includes a solder resist layer containing a cured product of the photosensitive resin composition.

本發明的其中一態樣的製造方法,是製造多分散性在1.2~2.8的範圍內之含羧基樹脂(A1)的方法,其包含下述步驟:使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應,來獲得中間體的步驟;及,使前述中間體、酸二酐(a3)及酸一酐(a4)進行反應,來合成前述含羧基樹脂(A1)的步驟;其中,前述環氧化合物(a1)具有雙酚茀骨架,前述雙酚茀骨架是以式(1)來表示,在式(1)中,R1~R8各自獨立地為氫、碳數1~5的烷基、或鹵素。 One aspect of the production method of the present invention is a method for producing a carboxyl group-containing resin (A1) having a polydispersity in the range of 1.2 to 2.8, which comprises the steps of: making an epoxy compound (a1) and an unsaturated group. a step of reacting a carboxylic acid (a2) to obtain an intermediate; and reacting the intermediate, acid dianhydride (a3) and acid anhydride (a4) to synthesize the carboxyl group-containing resin (A1) The epoxy compound (a1) has a bisphenol fluorene skeleton, and the bisphenol fluorene skeleton is represented by the formula (1). In the formula (1), R 1 to R 8 are each independently hydrogen and carbon number. 1 to 5 alkyl groups, or halogen.

根據本發明的其中一態樣,能夠獲得一種含羧基樹脂,其適合作為感光性樹脂組成物的成分,且具有茀骨架,並且能夠對感光性樹脂組成物賦予優異的藉由鹼性水溶液來進行顯影之顯影性,而且能夠對感光性樹脂組成物的硬化物賦予較高的電絕緣性和耐鍍覆性。 According to one aspect of the present invention, it is possible to obtain a carboxyl group-containing resin which is suitable as a component of a photosensitive resin composition and which has an anthracene skeleton and which can impart an excellent alkaline aqueous solution to the photosensitive resin composition. The developability of development and the high electrical insulating property and plating resistance of the cured product of the photosensitive resin composition can be imparted.

又,根據本發明的其中一態樣,能夠獲得一種感光性樹脂組成物、乾膜、具備層間絕緣層之印刷線路板、具備抗焊劑層之印刷線路板、及前述含羧基樹脂的製造方法,該感光性樹脂組成物含有前述含羧基樹脂,該乾膜是前述感光性樹脂組成物的乾燥物,該層間絕緣層包含 前述感光性樹脂組成物的硬化物,而該抗焊劑層包含前述感光性樹脂組成物的硬化物。 Moreover, according to one aspect of the present invention, a photosensitive resin composition, a dry film, a printed wiring board having an interlayer insulating layer, a printed wiring board having a solder resist layer, and a method for producing the carboxyl group-containing resin can be obtained. The photosensitive resin composition contains the carboxyl group-containing resin, and the dry film is a dried product of the photosensitive resin composition, and the interlayer insulating layer contains A cured product of the photosensitive resin composition, and the solder resist layer contains a cured product of the photosensitive resin composition.

1‧‧‧芯材 1‧‧‧ core material

2‧‧‧絕緣層 2‧‧‧Insulation

3‧‧‧導體線路(第一導體線路) 3‧‧‧Conductor line (first conductor line)

4‧‧‧皮膜 4‧‧ ‧ film

5‧‧‧未曝光部分 5‧‧‧Unexposed parts

6‧‧‧孔 6‧‧‧ hole

7‧‧‧層間絕緣層 7‧‧‧Interlayer insulation

8‧‧‧第二導體線路 8‧‧‧Second conductor line

9‧‧‧穿孔鍍覆 9‧‧‧Perforated plating

10‧‧‧貫穿孔 10‧‧‧through holes

11‧‧‧印刷線路板 11‧‧‧Printed circuit board

第1A圖至第1E圖是表示多層印刷線路板的製造步驟之剖面圖。 1A to 1E are cross-sectional views showing a manufacturing step of a multilayer printed wiring board.

第2圖是關於由合成例A-1所獲得的含羧基樹脂(A-1)的藉由膠體滲透層析法來獲得的GPC溶析曲線。 Fig. 2 is a GPC elution curve obtained by colloidal permeation chromatography of the carboxyl group-containing resin (A-1) obtained in Synthesis Example A-1.

以下,說明本發明的其中一實施形態。再者,在以下說明中,「(甲基)丙烯酸」意指「丙烯酸」與「甲基丙烯酸」之中的至少其中一者。例如,(甲基)丙烯酸酯意指甲基丙烯酸酯與丙烯酸酯之中的至少其中一者。 Hereinafter, one embodiment of the present invention will be described. In the following description, "(meth)acrylic acid" means at least one of "acrylic acid" and "methacrylic acid". For example, (meth) acrylate means at least one of methacrylate and acrylate.

本實施形態的含羧基樹脂(A1),適合作為感光性樹脂組成物的成分。感光性樹脂組成物,其含有例如:含羧基樹脂(A);不飽和化合物(B),其於一分子中具有至少一個乙烯性不飽和鍵;光聚合起始劑(C);及,環氧化合物(D);其中,前述含羧基樹脂(A)含有含羧基樹脂(A1)。 The carboxyl group-containing resin (A1) of the present embodiment is suitable as a component of the photosensitive resin composition. a photosensitive resin composition containing, for example, a carboxyl group-containing resin (A); an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule; a photopolymerization initiator (C); An oxygen compound (D); wherein the carboxyl group-containing resin (A) contains a carboxyl group-containing resin (A1).

含羧基樹脂(A1),是中間體、酸二酐(a3)及酸一酐(a4)之反應物,該中間體是環氧化合物(a1)與含不飽和基羧酸(a2)之反應物。環氧化合物(a1)具有雙酚 茀骨架,該雙酚茀骨架是以下述式(1)來表示,且在式(1)中,R1~R8各自獨立地為氫、碳數1~5的烷基或鹵素。 The carboxyl group-containing resin (A1) is a reaction of an intermediate, an acid dianhydride (a3) and an acid anhydride (a4), and the intermediate is a reaction of an epoxy compound (a1) with an unsaturated carboxylic acid (a2). Things. The epoxy compound (a1) has a bisphenol fluorene skeleton, which is represented by the following formula (1), and in the formula (1), R 1 to R 8 are each independently hydrogen and have a carbon number of 1 to 1; 5 alkyl or halogen.

含羧基樹脂(A1),是藉由下述方式合成:使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應,然後使藉此獲得的中間體,與酸二酐(a3)和酸一酐(a4)進行反應。含羧基樹脂(A1)的多分散性(polydispersity)在1.2~2.8的範圍內。再者,多分散性,是含羧基樹脂(A1)的重量平均分子量(Mw)相對於數量平均分子量(Mn)的比值(Mw/Mn)。含羧基樹脂(A1)的多分散性,是由分子量的測定結果計算出來,該分子量的測定結果是藉由以下述條件實行膠體滲透層析法(GPC)而得。 The carboxyl group-containing resin (A1) is synthesized by reacting an epoxy compound (a1) with an unsaturated group-containing carboxylic acid (a2), and then obtaining an intermediate obtained therefrom with an acid dianhydride (a3). And react with acid anhydride (a4). The polydispersity of the carboxyl group-containing resin (A1) is in the range of 1.2 to 2.8. Further, the polydispersity is a ratio (Mw/Mn) of the weight average molecular weight (Mw) to the number average molecular weight (Mn) of the carboxyl group-containing resin (A1). The polydispersity of the carboxyl group-containing resin (A1) was calculated from the measurement results of the molecular weight, and the measurement results of the molecular weight were obtained by performing colloidal permeation chromatography (GPC) under the following conditions.

GPC裝置:昭和電工公司製造,商品名SHODEX SYSTEM 11;管柱:SHODEX KF-800P,KF-005,KF-003,KF-001之4管串聯;移動相:四氫呋喃(THF);流量:1ml/分鐘;管柱溫度:45℃;偵測器:折射率(RI)偵測器;換算:聚苯乙烯。 GPC device: manufactured by Showa Denko, trade name SHODEX SYSTEM 11; pipe column: SHODEX KF-800P, KF-005, KF-003, KF-001 4-tube series; mobile phase: tetrahydrofuran (THF); flow rate: 1ml/ Minute; column temperature: 45 ° C; detector: refractive index (RI) detector; conversion: polystyrene.

式(1)中的R1~R8,各自可以是氫,亦可以是碳數1~5的烷基或鹵素。這是因為下述緣故:即便芳香環中的氫被低分子量的烷基或鹵素取代,也不會對含羧基樹脂(A1)有不良影響,反而有時也會提升包含了含羧基樹脂(A1)之感光性樹脂組成物的硬化物的耐熱性或阻燃性。 R 1 to R 8 in the formula (1) may each be hydrogen or may be an alkyl group having 1 to 5 carbon atoms or a halogen. This is because, even if the hydrogen in the aromatic ring is replaced by a low molecular weight alkyl group or a halogen, the carboxyl group-containing resin (A1) is not adversely affected, and the carboxyl group-containing resin (A1) is sometimes promoted. The heat resistance or flame retardancy of the cured product of the photosensitive resin composition.

在本實施形態中,含羧基樹脂(A1),因為具有源自環氧化合物(a1)之雙酚茀骨架,所以能夠對含有含羧基樹脂(A1)之感光性樹脂組成物的硬化物賦予較高的耐熱性和絕緣可靠性。進一步,含羧基樹脂(A1)的多分散性在1.2~2.8的範圍內,因此能夠減少由感光性樹脂組成物所形成之皮膜的黏性,並且確保硬化物的良好絕緣可靠性和耐鍍覆性(例如無電鍍鎳/金處理時的白化耐性),同時能夠對感光性樹脂組成物賦予優異的顯影性。亦即,藉由使多分散性為1.2以上,能夠減少皮膜的黏性,並且提升絕緣可靠性和耐鍍覆性;藉由使多分散性為2.8以下,能夠提升藉由鹼性水溶液來進行顯影之顯影性。因此,也能夠獲得一種感光性樹脂組成物,其能夠藉由含有鹼金屬鹽和鹼金屬氫氧化物中的至少其中一者之鹼性水溶液來進行顯影。 In the present embodiment, since the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton derived from the epoxy compound (a1), it is possible to impart a cured product to the photosensitive resin composition containing the carboxyl group-containing resin (A1). High heat resistance and insulation reliability. Further, since the polydispersity of the carboxyl group-containing resin (A1) is in the range of 1.2 to 2.8, the viscosity of the film formed of the photosensitive resin composition can be reduced, and good insulation reliability and plating resistance of the cured product can be ensured. (for example, whitening resistance at the time of electroless nickel/gold treatment), it is possible to impart excellent developability to the photosensitive resin composition. In other words, by making the polydispersity 1.2 or more, the viscosity of the film can be reduced, and the insulation reliability and the plating resistance can be improved. By making the polydispersity 2.8 or less, the alkaline aqueous solution can be improved. Development developability. Therefore, it is also possible to obtain a photosensitive resin composition which can be developed by an aqueous alkaline solution containing at least one of an alkali metal salt and an alkali metal hydroxide.

更具體地說明含羧基樹脂(A1)。為了合成含羧基樹脂(A1),首先使環氧化合物(a1)的至少一部分的環氧基(參照式(2)),與含不飽和基羧酸(a2)進行反應,藉此合成中間體。中間體,具有下述式(3)所示的結構(S3),該結構(S3)是由環氧基與含不飽和基羧酸(a2)的開環加成反應所產生。亦即,中間體,在結構(S3)中具有二級羥基,該二級羥基是由環氧基與含不飽和基羧酸(a2)的開環加成反應所產生。在式(3)中,A是含不飽和基羧酸殘基。 The carboxyl group-containing resin (A1) is more specifically described. In order to synthesize the carboxyl group-containing resin (A1), first, an epoxy group (refer to the formula (2)) of at least a part of the epoxy compound (a1) is reacted with the unsaturated group-containing carboxylic acid (a2) to thereby synthesize an intermediate. . The intermediate has a structure (S3) represented by the following formula (3) which is produced by a ring-opening addition reaction of an epoxy group with an unsaturated group-containing carboxylic acid (a2). That is, the intermediate has a secondary hydroxyl group in the structure (S3) which is produced by a ring-opening addition reaction of an epoxy group with an unsaturated group-containing carboxylic acid (a2). In the formula (3), A is an unsaturated group-containing carboxylic acid residue.

繼而,使中間體中的二級羥基中的一部分與酸二酐(a3)進行反應,且使中間體中的二級羥基中的另一部分與酸一酐(a4)進行反應。藉此,能夠合成含羧基樹脂(A1)。因此,含羧基樹脂(A1),具有以式(1)來表示的雙酚茀骨架、下述式(4)所示的結構(S4)、及下述式(5)所示的結構(S5)。 Then, a part of the secondary hydroxyl groups in the intermediate is reacted with the acid dianhydride (a3), and another portion of the secondary hydroxyl groups in the intermediate is reacted with the acid monoanhydride (a4). Thereby, the carboxyl group-containing resin (A1) can be synthesized. Therefore, the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton represented by the formula (1), a structure (S4) represented by the following formula (4), and a structure represented by the following formula (5) (S5). ).

結構(S4),是藉由下述方式產生:中間體的結構(S3)中的二級羥基與酸一酐(a4)中的酸酐基進行反 應。在式(4)中,A是含不飽和基羧酸殘基,B是酸一酐殘基。 The structure (S4) is produced by reacting the secondary hydroxyl group in the structure (S3) of the intermediate with the acid anhydride group in the acid anhydride (a4) should. In the formula (4), A is an unsaturated group-containing carboxylic acid residue, and B is an acid-anhydride residue.

結構(S5),是藉由酸二酐(a3)中的2個酸酐基分別與中間體中的2個二級羥基進行反應來產生。亦即,結構(S5),是藉由酸二酐(a3)將2個二級羥基進行交聯來生成。再者,可能會有:存在於1個分子的中間體中的2個二級羥基彼此被交聯的情形、與分別存在於2個分子的中間體中的2個二級羥基彼此被交聯的情形。若分別存在於2個分子的中間體中的2個二級羥基彼此被交聯時,則分子量會增加。在式(5)中,A是含不飽和基羧酸殘基,D是酸二酐殘基。 The structure (S5) is produced by reacting two acid anhydride groups in the acid dianhydride (a3) with two secondary hydroxyl groups in the intermediate. That is, the structure (S5) is produced by crosslinking two secondary hydroxyl groups by acid dianhydride (a3). Furthermore, there may be a case where two secondary hydroxyl groups present in one molecule of the intermediate are cross-linked to each other, and two secondary hydroxyl groups respectively present in the intermediate of two molecules are cross-linked to each other. The situation. If two secondary hydroxyl groups respectively present in the intermediate of two molecules are cross-linked to each other, the molecular weight increases. In the formula (5), A is an unsaturated group-containing carboxylic acid residue, and D is an acid dianhydride residue.

含羧基樹脂(A1)亦可能進一步具有以下述式(6)來表示的結構(S6)。結構(S6),是藉由下述方式來產生:在酸二酐(a3)中的2個酸酐基中,僅其中1個酸酐基與中間體中的二級羥基進行反應。在式(6)中,A是含不飽和基羧酸殘基,D是酸二酐殘基。 The carboxyl group-containing resin (A1) may further have a structure (S6) represented by the following formula (6). The structure (S6) is produced by reacting only one of the two acid anhydride groups in the acid dianhydride (a3) with the secondary hydroxyl group in the intermediate. In the formula (6), A is an unsaturated group-containing carboxylic acid residue, and D is an acid dianhydride residue.

在合成中間體時,當環氧化合物(a1)中的一部分環氧基未進行反應而殘留時,含羧基樹脂(A1)可能具有如式(2)所示的結構(S2)亦即環氧基。又,當中間體中的一部分結構(S3)是未進行反應而殘留時,含羧基樹脂(A1)亦可能具有結構(S3)。 When the intermediate is synthesized, when a part of the epoxy group in the epoxy compound (a1) is left unreacted, the carboxyl group-containing resin (A1) may have a structure (S2) as shown in the formula (2). base. Further, when a part of the structure (S3) in the intermediate remains without reaction, the carboxyl group-containing resin (A1) may have a structure (S3).

然而,在本實施形態中,藉由將合成含羧基樹脂(A1)時的反應條件最佳化,來減少含羧基樹脂(A1)中的結構(S2)和結構(S6)的數量,或自含羧基樹脂(A1)將結構(S2)和結構(S6)幾乎去除。 However, in the present embodiment, the number of structures (S2) and structures (S6) in the carboxyl group-containing resin (A1) is reduced by optimizing the reaction conditions for synthesizing the carboxyl group-containing resin (A1), or The carboxyl group-containing resin (A1) almost removes the structure (S2) and the structure (S6).

根據上述,含羧基樹脂(A1),具有以式(1)來表示的雙酚茀骨架、結構(S4)、及結構(S5)。進一步,含羧基樹脂(A1),有時具有結構(S2)、結構(S3)及結構(S6)之中的至少一種。 According to the above, the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton represented by the formula (1), a structure (S4), and a structure (S5). Further, the carboxyl group-containing resin (A1) may have at least one of the structure (S2), the structure (S3), and the structure (S6).

又,當環氧化合物(a1)本身具有二級羥基時,亦即例如當後述式(7)中的n=1以上時,含羧基樹脂(A1),有時也會具有藉由下述方式產生的結構:環氧化合物(a1)中的二級羥基與酸二酐(a3)和酸一酐(a4)之中的至少其中一者進行反應。 In addition, when the epoxy compound (a1) itself has a secondary hydroxyl group, that is, for example, when n=1 or more in the following formula (7), the carboxyl group-containing resin (A1) may have the following manner. Structure produced: The secondary hydroxyl group in the epoxy compound (a1) is reacted with at least one of the acid dianhydride (a3) and the acid anhydride (a4).

再者,上述含羧基樹脂(A1)的結構,是依據技術常識來合理類推而得,現實上則無法藉由分析來特定出含羧基樹脂(A1)的結構。其理由如下所述。當環氧化合物(a1)本身具有二級羥基時(例如當在式(7)中n為1以上時),隨著環氧化合物(a1)中的二級羥基的數量不同,含羧基樹脂(A1)的結構會有很大變化。又,在中間體與酸二酐(a3)進行反應時,如上所述,可能會有於中間體的存在於1個分子中的2個二級羥基被酸二酐(a3)交聯的情形、與於中間體的分別存在於2個分子中的2個二級羥基被酸二酐(a3)交聯的情形。因此,最終獲得的含 羧基樹脂(A1),包含了相互結構不同之複數種分子,因而即便分析含羧基樹脂(A1),也無法特定出其結構。 Further, the structure of the carboxyl group-containing resin (A1) is rationally derived based on technical common sense, and in reality, the structure of the carboxyl group-containing resin (A1) cannot be specified by analysis. The reason is as follows. When the epoxy compound (a1) itself has a secondary hydroxyl group (for example, when n is 1 or more in the formula (7)), the carboxyl group-containing resin is different depending on the amount of the secondary hydroxyl group in the epoxy compound (a1) ( The structure of A1) will vary greatly. Further, when the intermediate is reacted with the acid dianhydride (a3), as described above, there may be a case where the two secondary hydroxyl groups present in one molecule of the intermediate are crosslinked by the acid dianhydride (a3). And the case where two secondary hydroxyl groups present in the two molecules in the intermediate are crosslinked by the acid dianhydride (a3). Therefore, the final obtained Since the carboxy resin (A1) contains a plurality of molecules having different structures from each other, even if the carboxyl group-containing resin (A1) is analyzed, the structure cannot be specified.

含羧基樹脂(A1),因為具有源自含不飽和基羧酸(a2)之乙烯性不飽和基,所以具有光反應性。因此,含羧基樹脂(A1)能夠對感光性樹脂組成物賦予感光性(具體而言是紫外線硬化性)。又,含羧基樹脂(A1),因為其具有源自酸二酐(a3)和酸一酐(a4)之羧基,所以能夠對感光性樹脂組成物賦予藉由鹼性水溶液來進行顯影之顯影性,該鹼性水溶液含有鹼金屬鹽和鹼金屬氫氧化物之中的至少其中一者。進一步,含羧基樹脂(A1)的分子量,取決於藉由酸二酐(a3)來進行之交聯的數量。因此,能夠獲得酸價與分子量經適度地調整後之含羧基樹脂(A1)。亦即,藉由控制酸二酐(a3)和酸一酐(a4)的量、以及酸一酐(a4)相對於酸二酐(a3)的量,能夠容易獲得所期望的分子量和酸價之含羧基樹脂(A1)。因此,能夠獲得多分散性在1.2~2.8的範圍內之含羧基樹脂(A1)。 The carboxyl group-containing resin (A1) has photoreactivity because it has an ethylenically unsaturated group derived from the unsaturated group-containing carboxylic acid (a2). Therefore, the carboxyl group-containing resin (A1) can impart photosensitivity (specifically, ultraviolet curability) to the photosensitive resin composition. Further, since the carboxyl group-containing resin (A1) has a carboxyl group derived from the acid dianhydride (a3) and the acid anhydride (a4), it is possible to impart developability to development of the photosensitive resin composition by an aqueous alkaline solution. The alkaline aqueous solution contains at least one of an alkali metal salt and an alkali metal hydroxide. Further, the molecular weight of the carboxyl group-containing resin (A1) depends on the amount of crosslinking by the acid dianhydride (a3). Therefore, the carboxyl group-containing resin (A1) whose acid value and molecular weight are appropriately adjusted can be obtained. That is, by controlling the amounts of the acid dianhydride (a3) and the acid anhydride (a4), and the amount of the acid anhydride (a4) relative to the acid dianhydride (a3), the desired molecular weight and acid value can be easily obtained. The carboxyl group-containing resin (A1). Therefore, the carboxyl group-containing resin (A1) having a polydispersity in the range of 1.2 to 2.8 can be obtained.

含羧基樹脂(A1)的重量平均分子量,較佳是在1000~5000的範圍內。若重量平均分子量是1000以上,則能夠進一步抑制由感光性樹脂組成物所形成之皮膜的黏性,並且能夠進一步提升硬化物的絕緣可靠性和耐鍍覆性。又,若重量平均分子量是5000以下,則能夠特別提升感光性樹脂組成物的藉由鹼性水溶液來進行顯影之顯影性。 The weight average molecular weight of the carboxyl group-containing resin (A1) is preferably in the range of from 1,000 to 5,000. When the weight average molecular weight is 1000 or more, the viscosity of the film formed of the photosensitive resin composition can be further suppressed, and the insulation reliability and plating resistance of the cured product can be further improved. In addition, when the weight average molecular weight is 5,000 or less, the developability of development of the photosensitive resin composition by an aqueous alkaline solution can be particularly improved.

較佳是:含羧基樹脂(A1)的重量平均分子量在1000~5000的範圍內,並且含羧基樹脂(A1)的GPC溶析曲線(elution curve)下的分子量200以上且小於1700的區域(AR1)的面積與GPC溶析曲線下的分子量1700以上的區域(AR2)的面積的比例在1:0.5~1:2.5的範圍內。此時,能夠進一步抑制由感光性樹脂組成物所形成之皮膜的黏性,並且確保硬化物的良好絕緣可靠性和耐鍍覆性,同時能夠對感光性樹脂組成物賦予更加優異的顯影性。亦即,當區域(AR1)的面積設為1時,藉由使區域(AR2)的面積為0.5以上,能夠抑制由感光性樹脂組成物所形成之皮膜的黏性,並且進一步提升硬化物的絕緣可靠性和耐鍍覆性。進一步,當該區域(AR1)的面積設為1時,藉由使區域(AR2)的面積為2.5以下,能夠進一步提升感光性樹脂組成物的藉由鹼性水溶液來進行顯影之顯影性。 It is preferred that the weight average molecular weight of the carboxyl group-containing resin (A1) is in the range of from 1,000 to 5,000, and the region having a molecular weight of 200 or more and less than 1700 under the GPC elution curve of the carboxyl group-containing resin (A1) (AR1) The ratio of the area to the area of the region (AR2) having a molecular weight of 1700 or more under the GPC elution curve is in the range of 1:0.5 to 1:2.5. In this case, it is possible to further suppress the viscosity of the film formed of the photosensitive resin composition, and to ensure good insulating reliability and plating resistance of the cured product, and to provide more excellent developability to the photosensitive resin composition. In other words, when the area of the region (AR1) is 1, the area of the region (AR2) is 0.5 or more, whereby the viscosity of the film formed of the photosensitive resin composition can be suppressed, and the cured product can be further improved. Insulation reliability and plating resistance. Further, when the area of the region (AR1) is 1, the area of the region (AR2) is made 2.5 or less, and the developability of the photosensitive resin composition by the alkaline aqueous solution can be further improved.

再者,GPC溶析曲線下的區域的面積,是指在GPC溶析曲線的圖表上,GPC溶析曲線與表示示差折射偵測強度(mV)=0的直線之間的區域的面積,該GPC溶析曲線的圖表是將橫軸設為溶析時間(分鐘),且縱軸設為示差折射偵測強度(mV)。使用校正曲線來將溶析時間換算成分子量。再者,含羧基樹脂(A1)的GPC溶析曲線,亦獲得自藉由膠體滲透層析法來測得的測定結果。 Furthermore, the area of the region under the GPC elution curve refers to the area of the region between the GPC elution curve and the line indicating the differential refractive detection intensity (mV) = 0 on the graph of the GPC elution curve. The graph of the GPC elution curve is such that the horizontal axis is the elution time (minutes) and the vertical axis is the differential refractive detection intensity (mV). A calibration curve is used to convert the elution time to molecular weight. Further, the GPC elution curve of the carboxyl group-containing resin (A1) was also obtained from the measurement results by colloidal permeation chromatography.

含羧基樹脂(A1)的固體成分酸價,較佳是在60~140mgKOH/g的範圍內。此時,能夠特別提升感光 性樹脂組成物的顯影性。固體成分酸價,更佳是在80~135mgKOH/g的範圍內,進一步較佳是在90~130mgKOH/g的範圍內。 The solid content acid value of the carboxyl group-containing resin (A1) is preferably in the range of 60 to 140 mgKOH/g. At this time, it is possible to enhance the sensitivity The developability of the resin composition. The solid content acid value is more preferably in the range of 80 to 135 mgKOH/g, still more preferably in the range of 90 to 130 mgKOH/g.

詳細地說明含羧基樹脂(A1)的原料及合成含羧基樹脂(A1)時的反應條件。 The raw material of the carboxyl group-containing resin (A1) and the reaction conditions when the carboxyl group-containing resin (A1) is synthesized will be described in detail.

環氧化合物(a1),具有例如下述式(7)所示的結構(S7)。式(7)中的n,例如是在0~20的範圍內的數。為了使含羧基樹脂(A1)的分子量為適當的值,n的平均,特佳是在0~1的範圍內。若n的平均在0~1的範圍內,則容易抑制由於酸二酐(a3)的加成所導致的過量的分子量增加。 The epoxy compound (a1) has a structure (S7) represented by the following formula (7), for example. n in the formula (7) is, for example, a number in the range of 0 to 20. In order to make the molecular weight of the carboxyl group-containing resin (A1) an appropriate value, the average of n is particularly preferably in the range of 0 to 1. If the average of n is in the range of 0 to 1, it is easy to suppress an excessive increase in molecular weight due to the addition of the acid dianhydride (a3).

含不飽和羧酸(a2),可含有例如於一分子中僅具有1個乙烯性不飽和基之化合物。更具體而言,含不飽和基羧酸(a2),可含有例如選自由下述所組成之群組中的至少一種化合物:丙烯酸、甲基丙烯酸、ω-羧基-聚己內酯(n≒2)單丙烯酸酯、巴豆酸、桂皮酸、琥珀酸單(2-丙烯醯基氧乙基)酯、琥珀酸單(2-甲基丙烯醯基氧 乙基)酯、鄰苯二甲酸單(2-丙烯醯基氧乙基)酯、鄰苯二甲酸單(2-甲基丙烯醯基氧乙基)酯、鄰苯二甲酸單(2-丙烯醯基氧丙基)酯、鄰苯二甲酸單(2-甲基丙烯醯基氧丙基)酯、馬來酸單(2-丙烯醯基氧乙基)酯、馬來酸單(2-甲基丙烯醯基氧乙基)酯、丙烯酸β-羧基乙酯、四氫鄰苯二甲酸單(2-丙烯醯基氧乙基)酯、四氫鄰苯二甲酸單(2-甲基丙烯醯基氧乙基)酯、六氫鄰苯二甲酸單(2-丙烯醯基氧乙基)酯、及六氫鄰苯二甲酸單(2-甲基丙烯醯基氧乙基)酯。含不飽和基羧酸(a2)較佳是含有丙烯酸。 The unsaturated carboxylic acid (a2) may contain, for example, a compound having only one ethylenically unsaturated group in one molecule. More specifically, the unsaturated group-containing carboxylic acid (a2) may contain, for example, at least one compound selected from the group consisting of acrylic acid, methacrylic acid, and ω-carboxy-polycaprolactone (n≒). 2) monoacrylate, crotonic acid, cinnamic acid, succinic acid mono(2-propenyloxyethyl) ester, succinic acid mono(2-methylpropenyloxyl) Ethyl)ester, mono(2-propenylmethoxyethyl) phthalate, mono(2-methylpropenyloxyethyl) phthalate, mono(2-propene phthalate) Mercapto oxypropyl) ester, mono(2-methylpropenyloxypropyl) phthalate, mono(2-propenyl methoxyethyl) maleate, maleic acid mono(2- Methyl propylene decyl oxyethyl ester, β-carboxyethyl acrylate, mono(2-propenyl methoxyethyl) tetrahydrophthalate, mono (2-methyl propylene) tetrahydrophthalate Mercaptooxyethyl) ester, mono(2-propenylmethoxyethyl) hexahydrophthalate, and mono(2-methylpropenyloxyethyl) hexahydrophthalate. The unsaturated carboxylic acid (a2) preferably contains acrylic acid.

在使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應時,可採用公知的方法。例如,在環氧化合物(a1)的溶劑溶液中添加含不飽和基羧酸(a2),進一步視需要而添加熱聚合抑制劑和觸媒,並加以攪拌混合,藉此獲得反應性溶液。可藉由利用常規方法,更佳是在60~150℃的溫度使該反應性溶液進行反應,特佳是在80~120℃的溫度使該反應性溶液進行反應,來獲得中間體。溶劑,可含有例如選自由下述所組成之群組中的至少一種成分:甲基乙基酮、環己酮等酮類;甲苯、二甲苯等芳香族烴類;乙酸乙酯、乙酸丁酯、賽璐蘇乙酸酯(cellosolve acetate)、丁基賽璐蘇乙酸酯、卡必醇乙酸酯(carbitol acetate)、丁基卡必醇乙酸酯、丙二醇單甲醚乙酸酯等乙酸酯類;及,二烷二醇醚類。熱聚合抑制劑,可含有例如氫醌和氫醌單甲醚之中的至少其中一者。觸媒,可含有例如選自由下述所組成之群組中的至少 一種成分:苯甲基二甲基胺、三乙基胺等三級胺類;三甲基苯甲基氯化銨、甲基三乙基氯化銨等四級銨鹽類;三苯基膦、及三苯基銻(triphenyl stibine)。 When the epoxy compound (a1) and the unsaturated group-containing carboxylic acid (a2) are reacted, a known method can be employed. For example, an unsaturated group-containing carboxylic acid (a2) is added to a solvent solution of the epoxy compound (a1), and a thermal polymerization inhibitor and a catalyst are further added as needed, and stirred and mixed, whereby a reactive solution is obtained. The reactive solution can be preferably reacted at a temperature of from 60 to 150 ° C by a conventional method, and it is particularly preferred to carry out the reaction at a temperature of from 80 to 120 ° C to obtain an intermediate. The solvent may contain, for example, at least one component selected from the group consisting of ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene and xylene; ethyl acetate and butyl acetate; , acetic acid such as cellosolve acetate, butyl cyproterone acetate, carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether acetate, etc. Esters; and, dialkyl glycol ethers. The thermal polymerization inhibitor may contain, for example, at least one of hydroquinone and hydroquinone monomethyl ether. The catalyst may contain, for example, at least one selected from the group consisting of a component: a tertiary amine such as benzyldimethylamine or triethylamine; a quaternary ammonium salt such as trimethylbenzylammonium chloride or methyltriethylammonium chloride; and triphenylphosphine And triphenyl stibine.

尤其,較佳是觸媒含有三苯基膦。亦即,較佳是:在三苯基膦的存在下,使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應。此時,能夠特別促進環氧化合物(a1)中的環氧基與含不飽和基羧酸(a2)的開環加成反應,而能夠達成95%以上、97%以上或幾乎100%的反應率(轉化率)。因此,能夠以較高的產率來獲得具有結構(S3)之中間體。又,在包含感光性樹脂組成物的硬化物之層中能夠抑制離子遷移的發生,而能夠進一步提升該層的絕緣可靠性。 In particular, it is preferred that the catalyst contains triphenylphosphine. That is, it is preferred to react the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2) in the presence of triphenylphosphine. In this case, the ring-opening addition reaction of the epoxy group in the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2) can be particularly promoted, and a reaction of 95% or more, 97% or more, or almost 100% can be achieved. Rate (conversion rate). Therefore, an intermediate having the structure (S3) can be obtained in a high yield. Further, in the layer containing the cured product of the photosensitive resin composition, the occurrence of ion migration can be suppressed, and the insulation reliability of the layer can be further improved.

在使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應時,相對於環氧化合物(a1)的1莫耳的環氧基,含不飽和基羧酸(a2)的量,較佳是在0.8~1.2莫耳的範圍內。此時,能夠獲得具有優異的感光性與保存穩定性之感光性樹脂組成物。 When the epoxy compound (a1) is reacted with the unsaturated group-containing carboxylic acid (a2), the amount of the unsaturated group-containing carboxylic acid (a2) is 1 mol of the epoxy group of the epoxy compound (a1). Preferably, it is in the range of 0.8 to 1.2 moles. At this time, a photosensitive resin composition having excellent photosensitivity and storage stability can be obtained.

亦較佳是在氣泡產生的狀態下使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應。此時,能夠抑制不飽和基的加成聚合反應,因此能夠抑制中間體的分子量的增加和中間體的溶液的膠化。又,能夠抑制最終產物也就是含羧基樹脂(A1)的過度著色。 It is also preferred to react the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2) in a state in which bubbles are generated. At this time, since the addition polymerization reaction of the unsaturated group can be suppressed, the increase in the molecular weight of the intermediate and the gelation of the solution of the intermediate can be suppressed. Further, excessive coloring of the final product, that is, the carboxyl group-containing resin (A1) can be suppressed.

以這樣的方式進行而獲得的中間體,具備羥基,該羥基是藉由環氧化合物(a1)的環氧基與含不飽和基羧酸(a2)的羧基的反應所生成。 The intermediate obtained in such a manner has a hydroxyl group which is produced by a reaction of an epoxy group of the epoxy compound (a1) with a carboxyl group of the unsaturated group-containing carboxylic acid (a2).

酸二酐(a3),是具有2個酸酐基之化合物。酸二酐(a3),可含有四羧酸的酸酐。酸二酐(a3),可含有例如選自由下述所組成之群組中的至少一種化合物:1,2,4,5-苯四甲酸二酐、二苯基酮四甲酸二酐、甲基環己烯四甲酸二酐、四甲酸二酐、萘-1,4,5,8-四甲酸二酐、乙烯四甲酸二酐、9,9’-雙(3,4-二羧基苯基)茀二酐、甘油雙(脫水偏苯三酸酯)單乙酸酯、乙二醇雙(脫水偏苯三酸酯)、3,3’,4,4’-二苯基碸四甲酸二酐、1,3,3a,4,5,9b-六氫-5(四氫-2,5-二側氧基-3-呋喃基)萘并[1,2-c]呋喃-1,3-二酮、1,2,3,4-丁烷四甲酸二酐、及3,3’,4,4’-聯苯四甲酸二酐。尤其,較佳是酸二酐(a3)含有3,3’,4,4’-聯苯四甲酸二酐。亦即,較佳是式(5)和式(6)中的D包含3,3’,4,4’-聯苯四甲酸二酐殘基。此時,能夠確保感光性樹脂組成物的良好顯影性,同時進一步抑制由感光性樹脂組成物所形成之皮膜的黏性,並且能夠進一步提升硬化物的絕緣可靠性和耐鍍覆性。相對於酸二酐(a3)整體,3,3’,4,4’-聯苯四甲酸二酐的量,較佳是在20~100莫耳%的範圍內,更佳是在40~100莫耳%的範圍內,但是不受限於這些範圍內。 The acid dianhydride (a3) is a compound having two acid anhydride groups. The acid dianhydride (a3) may contain an acid anhydride of a tetracarboxylic acid. The acid dianhydride (a3) may contain, for example, at least one compound selected from the group consisting of 1,2,4,5-benzenetetracarboxylic dianhydride, diphenyl ketone tetracarboxylic dianhydride, methyl Cyclohexene tetracarboxylic dianhydride, tetracarboxylic dianhydride, naphthalene-1,4,5,8-tetracarboxylic dianhydride, ethylene tetracarboxylic dianhydride, 9,9'-bis(3,4-dicarboxyphenyl) Sebacic anhydride, glycerol bis(hydrogen trimellitate) monoacetate, ethylene glycol bis(hydrogen trimellitate), 3,3',4,4'-diphenylphosphonium tetracarboxylic dianhydride 1,3,3a,4,5,9b-hexahydro-5(tetrahydro-2,5-di-oxy-3-furanyl)naphtho[1,2-c]furan-1,3- Diketone, 1,2,3,4-butanetetracarboxylic dianhydride, and 3,3',4,4'-biphenyltetracarboxylic dianhydride. In particular, it is preferred that the acid dianhydride (a3) contains 3,3',4,4'-biphenyltetracarboxylic dianhydride. That is, it is preferred that D in the formula (5) and the formula (6) contains a 3,3',4,4'-biphenyltetracarboxylic dianhydride residue. In this case, the good developability of the photosensitive resin composition can be ensured, and the viscosity of the film formed of the photosensitive resin composition can be further suppressed, and the insulation reliability and plating resistance of the cured product can be further improved. The amount of 3,3',4,4'-biphenyltetracarboxylic dianhydride is preferably in the range of 20 to 100 mol%, more preferably 40 to 100, based on the total of the acid dianhydride (a3). Moore% is within the scope, but is not limited to these ranges.

酸一酐(a4),是具有1個酸酐基之化合物。酸一酐(a4),可含有二羧酸的酸酐。酸一酐(a4),可含有 例如選自由下述所組成之群組中的至少一種化合物:鄰苯二甲酸酐、1,2,3,6-四氫鄰苯二甲酸酐、甲基四氫鄰苯二甲酸酐、甲基納迪克酸酐(methyl nadic acid anhydride)、六氫鄰苯二甲酸酐、甲基六氫鄰苯二甲酸酐、琥珀酸酐、甲基琥珀酸酐、馬來酸酐、檸康酸酐、戊二酸酐、環己烷-1,2,4-三羧酸-1,2-酐、及伊康酸酐。尤其,較佳是酸一酐(a4)含有1,2,3,6-四氫鄰苯二甲酸酐。亦即,較佳是式(4)中的B包含1,2,3,6-四氫鄰苯二甲酸酐殘基。此時,能夠確保感光性樹脂組成物的良好顯影性,同時進一步抑制由感光性樹脂組成物所形成之皮膜的黏性,並且能夠進一步提升硬化物的絕緣可靠性和耐鍍覆性。相對於酸一酐(a4)整體,1,2,3,6-四氫鄰苯二甲酸酐的量,較佳是在20~100莫耳%的範圍內,更佳是在40~100莫耳%的範圍內,但是不受限於這些範圍內。 The acid monoanhydride (a4) is a compound having one acid anhydride group. The acid monoanhydride (a4) may contain an acid anhydride of a dicarboxylic acid. Acidic anhydride (a4), which may contain For example, at least one compound selected from the group consisting of phthalic anhydride, 1,2,3,6-tetrahydrophthalic anhydride, methyltetrahydrophthalic anhydride, methyl Methyl nadic acid anhydride, hexahydrophthalic anhydride, methyl hexahydrophthalic anhydride, succinic anhydride, methyl succinic anhydride, maleic anhydride, citraconic anhydride, glutaric anhydride, cyclohexane Alkane-1,2,4-tricarboxylic acid-1,2-anhydride, and itaconic anhydride. In particular, it is preferred that the acid monoanhydride (a4) contains 1,2,3,6-tetrahydrophthalic anhydride. That is, it is preferred that B in the formula (4) contains a 1,2,3,6-tetrahydrophthalic anhydride residue. In this case, the good developability of the photosensitive resin composition can be ensured, and the viscosity of the film formed of the photosensitive resin composition can be further suppressed, and the insulation reliability and plating resistance of the cured product can be further improved. The amount of 1,2,3,6-tetrahydrophthalic anhydride is preferably in the range of 20 to 100 mol%, more preferably 40 to 100 mol, relative to the total acid anhydride (a4). Within the range of % of ears, but not limited to these ranges.

酸二酐(a3)與酸一酐(a4)之中的至少其中一者,可包含具有羧基並且具有脂環式骨架之酸酐(a5)。此時,能夠使含羧基樹脂(A1)中包含的羧基量增加。藉此,能夠進一步提升感光性樹脂組成物的藉由鹼性水溶液來進行顯影之顯影性。又,因為含羧基樹脂(A1)具有源自酸酐(a5)之脂環式骨架,所以能夠進一步抑制由感光性樹脂組成物所形成之皮膜的黏性,並且進一步提升耐鍍覆性和焊料耐熱性。 At least one of the acid dianhydride (a3) and the acid monohydride (a4) may include an acid anhydride (a5) having a carboxyl group and having an alicyclic skeleton. At this time, the amount of the carboxyl group contained in the carboxyl group-containing resin (A1) can be increased. Thereby, the developability of developing the photosensitive resin composition by an aqueous alkaline solution can be further improved. In addition, since the carboxyl group-containing resin (A1) has an alicyclic skeleton derived from the acid anhydride (a5), the viscosity of the film formed of the photosensitive resin composition can be further suppressed, and the plating resistance and the solder heat resistance can be further improved. Sex.

較佳是酸二酐(a4)包含酸酐(a5)。亦即,較佳是式(4)中的B包含酸酐(a5)的殘基。酸酐(a5),含有 例如下述脂環式化合物中的至少一種:環烷、環烯、二環式化合物、多環式化合物、螺環化合物等。尤其,較佳是酸酐(a5)為含有環烷之化合物。所謂環烷,例如有:環丙烷、環丁烷、環戊烷、環己烷、環庚烷、環辛烷等。進一步較佳是酸酐(a5)為含有環己烷之化合物。又,酸酐(a5),較佳是具有直接鍵結於脂環式骨架的羧基。進一步,酸酐(a5)中的酸酐基,較佳是直接鍵結於脂環式骨架。酸酐(a5)可不含芳香環。又,酸酐(a5),可以是三羧酸的酸酐。 Preferably, the acid dianhydride (a4) contains an acid anhydride (a5). That is, it is preferred that B in the formula (4) contains a residue of the acid anhydride (a5). Anhydride (a5), containing For example, at least one of the following alicyclic compounds: a cycloalkane, a cycloalkene, a bicyclic compound, a polycyclic compound, a spiro compound, and the like. In particular, it is preferred that the acid anhydride (a5) is a compound containing a cycloalkane. Examples of the naphthenes include cyclopropane, cyclobutane, cyclopentane, cyclohexane, cycloheptane, cyclooctane, and the like. Further preferably, the acid anhydride (a5) is a compound containing cyclohexane. Further, the acid anhydride (a5) preferably has a carboxyl group directly bonded to the alicyclic skeleton. Further, the acid anhydride group in the acid anhydride (a5) is preferably directly bonded to the alicyclic skeleton. The acid anhydride (a5) may not contain an aromatic ring. Further, the acid anhydride (a5) may be an acid anhydride of a tricarboxylic acid.

更佳是酸酐(a5)含有環己烷-1,2,4-三甲酸-1,2-酐。亦即,較佳是式(4)中的B包含環己烷-1,2,4-三甲酸-1,2-酐殘基。此時,結構(S4)具有2個羧基與脂環式骨架,因而能夠減少由感光性樹脂組成物所形成之皮膜的黏性,且提升硬化物的絕緣可靠性和耐鍍覆性,並且確保良好的顯影性。又,環己烷-1,2,4-三甲酸-1,2-酐的水溶性較高,且反應性亦佳,因此容易製造含羧基樹脂(A1)。 More preferably, the acid anhydride (a5) contains cyclohexane-1,2,4-tricarboxylic acid-1,2-anhydride. That is, it is preferred that B in the formula (4) contains a cyclohexane-1,2,4-tricarboxylic acid-1,2-anhydride residue. In this case, since the structure (S4) has two carboxyl groups and an alicyclic skeleton, the viscosity of the film formed of the photosensitive resin composition can be reduced, and the insulation reliability and plating resistance of the cured product can be improved and ensured. Good developability. Further, since cyclohexane-1,2,4-tricarboxylic acid-1,2-anhydride has high water solubility and good reactivity, it is easy to produce a carboxyl group-containing resin (A1).

在使中間體,與酸二酐(a3)和酸一酐(a4)進行反應時,可採用公知的方法。例如,在中間體的溶劑溶液中添加酸二酐(a3)和酸一酐(a4),進一步視需要而添加熱聚合抑制劑和觸媒,並加以攪拌混合,藉此獲得反應性溶液。可藉由利用常規方法,更佳是在60~150℃的溫度使該反應性溶液進行反應,特佳是在80~120℃的溫度使該反應性溶液進行反應,來獲得含羧基樹脂 (A1)。作為溶劑、觸媒及聚合抑制劑,可使用適當的溶劑、觸媒及聚合抑制劑,亦可直接使用合成中間體時所使用的溶劑、觸媒及聚合抑制劑。 When the intermediate is reacted with the acid dianhydride (a3) and the acid anhydride (a4), a known method can be employed. For example, acid dianhydride (a3) and acid anhydride (a4) are added to a solvent solution of the intermediate, and a thermal polymerization inhibitor and a catalyst are further added as needed, and stirred and mixed, whereby a reactive solution is obtained. The reactive solution can be reacted at a temperature of 60 to 150 ° C by a conventional method, and it is particularly preferable to carry out the reaction at a temperature of 80 to 120 ° C to obtain a carboxyl group-containing resin. (A1). As the solvent, catalyst, and polymerization inhibitor, a suitable solvent, catalyst, and polymerization inhibitor can be used, and a solvent, a catalyst, and a polymerization inhibitor used in the synthesis of the intermediate can be used as it is.

尤其,較佳是觸媒含有三苯基膦。亦即,較佳是:在三苯基膦的存在下,使中間體與酸一酐(a4)和酸二酐(a3)進行反應。此時,能夠特別促進中間體中的二級羥基與酸一酐(a4)和酸二酐(a3)的反應,而能夠達成90%以上、95%以上、97%以上或幾乎100%的反應率(轉化率)。因此,能夠以較高的產率來獲得具有結構(S4)和結構(S5)之含羧基樹脂(A1)。又,在包含感光性樹脂組成物的硬化物之層中能夠抑制離子遷移的發生,而能夠進一步提升該層的絕緣可靠性。 In particular, it is preferred that the catalyst contains triphenylphosphine. That is, it is preferred to react the intermediate with the acid monoanhydride (a4) and the acid dianhydride (a3) in the presence of triphenylphosphine. In this case, the reaction of the secondary hydroxyl group in the intermediate with the acid monoanhydride (a4) and the acid dianhydride (a3) can be particularly promoted, and a reaction of 90% or more, 95% or more, 97% or more, or almost 100% can be achieved. Rate (conversion rate). Therefore, the carboxyl group-containing resin (A1) having the structure (S4) and the structure (S5) can be obtained in a high yield. Further, in the layer containing the cured product of the photosensitive resin composition, the occurrence of ion migration can be suppressed, and the insulation reliability of the layer can be further improved.

亦較佳是:在氣泡產生的狀態下,使中間體與酸一酐(a4)和酸二酐(a3)進行反應。此時,能夠抑制生成的含羧基樹脂(A1)的過量的分子量增加,因此能夠抑制多分散性的過度增加,藉此能夠特別提升感光性樹脂組成物的藉由鹼性水溶液來進行顯影之顯影性。 It is also preferred to react the intermediate with the acid monoanhydride (a4) and the acid dianhydride (a3) in a state in which bubbles are generated. In this case, it is possible to suppress an excessive increase in the molecular weight of the produced carboxyl group-containing resin (A1), and thus it is possible to suppress an excessive increase in polydispersity, whereby development of development of the photosensitive resin composition by an alkaline aqueous solution can be particularly enhanced. Sex.

在使中間體與酸一酐(a4)和酸二酐(a3)進行反應時,相對於環氧化合物(a1)的1莫耳的環氧基,酸二酐(a3)的量,較佳是在0.05~0.24莫耳的範圍內。又,相對於環氧化合物(a1)的1莫耳的環氧基,酸一酐(a4)的量,較佳是在0.3~0.7莫耳的範圍內。此時,能夠容易獲得酸價與分子量經適度地調整後之含羧基樹脂(A1)。又,能夠抑制生成的含羧基樹脂(A1)的過量的分 子量增加,因此能夠抑制多分散性的過度增加及GPC溶析曲線下的分子量1700以上的區域的面積的過度增加,藉此能夠特別提升感光性樹脂組成物的藉由鹼性水溶液來進行顯影之顯影性。 When the intermediate is reacted with the acid monoanhydride (a4) and the acid dianhydride (a3), the amount of the acid dianhydride (a3) is preferably 1 mol of the epoxy group (a1). It is in the range of 0.05~0.24 moles. Further, the amount of the acid monoanhydride (a4) is preferably in the range of 0.3 to 0.7 mol with respect to 1 mol of the epoxy group of the epoxy compound (a1). At this time, the carboxyl group-containing resin (A1) whose acid value and molecular weight are appropriately adjusted can be easily obtained. Further, it is possible to suppress an excessive amount of the generated carboxyl group-containing resin (A1). Since the amount of the particles is increased, it is possible to suppress an excessive increase in the polydispersity and an excessive increase in the area of the region having a molecular weight of 1700 or more under the GPC elution curve, whereby the development of the photosensitive resin composition by the alkaline aqueous solution can be particularly enhanced. Developability.

在使中間體、酸一酐(a4)及酸二酐(a3)進行反應時,可使中間體、酸一酐(a4)及酸二酐(a3)同時進行反應。 When the intermediate, the acid monoanhydride (a4) and the acid dianhydride (a3) are reacted, the intermediate, the acid monoanhydride (a4) and the acid dianhydride (a3) can be simultaneously reacted.

在使中間體、酸一酐(a4)及酸二酐(a3)進行反應時,可以首先藉由使中間體與酸二酐(a3)進行反應來合成生成物,再使該生成物與酸一酐(a4)進行反應。亦即,含羧基樹脂(A1)可以是生成物與酸一酐(a4)之反應物,該生成物是中間體與酸二酐(a3)之反應物。此時,中間體與酸二酐(a3)的反應,是以不與酸一酐(a4)的反應競爭的方式,來穩定地進行,因此易於穩定地生成結構(S5)。進一步,生成物中的分子彼此不易產生結構的偏差。因此,在使生成物與酸一酐(a4)進行反應而獲得的含羧基樹脂(A1)中,其分子彼此亦不易產生結構的偏差。因此,能夠穩定地製造例如具有特定分子量分佈或進一步具有特定酸價之含羧基樹脂(A1),該分子量分佈是重量平均分子量在1000~5000的範圍內,並且區域(AR1)的面積與區域(AR2)的面積的比例在1:0.5~1:2.5的範圍內。 When the intermediate, the acid monoanhydride (a4) and the acid dianhydride (a3) are reacted, the product can be first synthesized by reacting the intermediate with the acid dianhydride (a3), and the product can be synthesized with an acid. The monoanhydride (a4) is reacted. That is, the carboxyl group-containing resin (A1) may be a reactant of the product and the acid monoanhydride (a4), which is a reaction product of an intermediate and an acid dianhydride (a3). In this case, the reaction between the intermediate and the acid dianhydride (a3) proceeds stably without competing with the reaction of the acid monoanhydride (a4), so that the structure is easily formed stably (S5). Further, the molecules in the product are less likely to cause structural deviations from each other. Therefore, in the carboxyl group-containing resin (A1) obtained by reacting the product with the acid monoanhydride (a4), the molecules are less likely to cause structural deviation. Therefore, it is possible to stably produce, for example, a carboxyl group-containing resin (A1) having a specific molecular weight distribution or further having a specific acid value, which is a weight average molecular weight in the range of 1,000 to 5,000, and an area (A1) of an area (A1) The ratio of the area of AR2) is in the range of 1:0.5 to 1:2.5.

說明感光性樹脂組成物中除了含羧基樹脂(A1)以外之成分。 A component other than the carboxyl group-containing resin (A1) in the photosensitive resin composition will be described.

如上所述,感光性樹脂組成物,含有例如:含羧基樹脂(A);不飽和化合物(B),其於一分子中具有至少一個乙烯性不飽和鍵;光聚合起始劑(C);及,環氧化合物(D);其中,含羧基樹脂(A)含有含羧基樹脂(A1)。 As described above, the photosensitive resin composition contains, for example, a carboxyl group-containing resin (A); an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule; and a photopolymerization initiator (C); And an epoxy compound (D); wherein the carboxyl group-containing resin (A) contains a carboxyl group-containing resin (A1).

含羧基樹脂(A),可僅含有含羧基樹脂(A1),亦可進一步含有除了含羧基樹脂(A1)以外的含羧基樹脂(以下亦稱為含羧基樹脂(F))。 The carboxyl group-containing resin (A) may contain only the carboxyl group-containing resin (A1), and may further contain a carboxyl group-containing resin (hereinafter also referred to as a carboxyl group-containing resin (F)) other than the carboxyl group-containing resin (A1).

含羧基樹脂(F),可含有例如具有羧基但不具有光聚合性之化合物(以下稱為(F1)成分)。(F1)成分,含有例如乙烯性不飽和單體的聚合物,該乙烯性不飽和單體包含了具有羧基之乙烯性不飽和化合物。具有羧基之乙烯性不飽和化合物,可含有下述化合物:丙烯酸、甲基丙烯酸、ω-羧基-聚己內酯(n≒2)單丙烯酸酯等。具有羧基之乙烯性不飽和化合物,亦可含有季戊四醇三丙烯酸酯、季戊四醇三甲基丙烯酸酯等與二元酸酐之反應物。乙烯性不飽和單體,可進一步含有下述不具有羧基之乙烯性不飽和化合物:鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯、鄰苯二甲酸2-(甲基)丙烯醯氧基乙基-2-羥乙酯、直鏈或支鏈之脂肪族或脂環族(其中,環中可具有一部分不飽和鍵)的(甲基)丙烯酸酯等。 The carboxyl group-containing resin (F) may contain, for example, a compound having a carboxyl group but not having photopolymerization (hereinafter referred to as a component (F1)). The component (F1) contains a polymer such as an ethylenically unsaturated monomer, and the ethylenically unsaturated monomer contains an ethylenically unsaturated compound having a carboxyl group. The ethylenically unsaturated compound having a carboxyl group may contain the following compounds: acrylic acid, methacrylic acid, ω-carboxy-polycaprolactone (n≒2) monoacrylate, and the like. The ethylenically unsaturated compound having a carboxyl group may further contain a reaction product with a dibasic acid anhydride such as pentaerythritol triacrylate or pentaerythritol trimethacrylate. The ethylenically unsaturated monomer may further contain the following ethylenically unsaturated compound having no carboxyl group: 2-(meth)acryloxyethyl phthalate, 2-(methyl) propylene phthalate A (meth) acrylate or the like which is a methoxyethyl 2-hydroxyethyl ester, a linear or branched aliphatic or alicyclic group in which a ring may have a part of an unsaturated bond.

含羧基樹脂(F),可含有具有羧基和乙烯性不飽和基之化合物(以下稱為(F2)成分)。又,含羧基樹脂(F),可僅含有(F2)成分。(F2)成分,含有一種樹脂(以下稱為第一樹脂(g)),該樹脂是例如中間體與選自多元 羧酸和其酸酐的群組中的至少一種化合物(g3)之反應物,該中間體是於一分子中具有2個以上環氧基之環氧化合物(g1)與乙烯性不飽和化合物(g2)之反應物。第一樹脂(g),例如可使環氧化合物(g1)中的環氧基與乙烯性不飽和化合物(g2)中的羧基進行反應,然後對獲得的中間體加成化合物(g3)而獲得。環氧化合物(g1),可含有下述適當的環氧樹脂:甲酚酚醛清漆型環氧樹脂、苯酚酚醛清漆型環氧樹脂等。環氧化合物(g1),可含有乙烯性不飽和化合物(h)的聚合物。乙烯性不飽和化合物(h),含有例如(甲基)丙烯酸環氧丙酯等具有環氧基之化合物(h1),或進一步含有鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯等不具有環氧基之化合物(h2)。乙烯性不飽和化合物(g2),較佳是含有丙烯酸或甲基丙烯酸之中的至少其中一者。化合物(g3),含有例如選自由下述所組成之群組中的一種以上的化合物:鄰苯二甲酸、四氫鄰苯二甲酸、甲基四氫鄰苯二甲酸等多元羧酸;及,這些多元羧酸的酸酐。 The carboxyl group-containing resin (F) may contain a compound having a carboxyl group and an ethylenically unsaturated group (hereinafter referred to as a component (F2)). Further, the carboxyl group-containing resin (F) may contain only the component (F2). a component (F2) containing a resin (hereinafter referred to as a first resin (g)), which is, for example, an intermediate and a selected one a reactant of at least one compound (g3) in a group of a carboxylic acid and an anhydride thereof, the intermediate being an epoxy compound (g1) having two or more epoxy groups in one molecule and an ethylenically unsaturated compound (g2) The reactants. The first resin (g), for example, can be obtained by reacting an epoxy group in the epoxy compound (g1) with a carboxyl group in the ethylenically unsaturated compound (g2), and then adding the compound (g3) to the obtained intermediate. . The epoxy compound (g1) may contain an appropriate epoxy resin: a cresol novolac type epoxy resin, a phenol novolak type epoxy resin, or the like. The epoxy compound (g1) may contain a polymer of the ethylenically unsaturated compound (h). The ethylenically unsaturated compound (h) contains an epoxy group-containing compound (h1) such as glycidyl (meth)acrylate or further contains 2-(methyl)propenyloxyethyl phthalate. The compound (h2) which does not have an epoxy group. The ethylenically unsaturated compound (g2) preferably contains at least one of acrylic acid or methacrylic acid. The compound (g3) contains, for example, one or more compounds selected from the group consisting of polycarboxylic acids such as phthalic acid, tetrahydrophthalic acid, and methyltetrahydrophthalic acid; Anhydrides of these polycarboxylic acids.

(F2)成分,亦可含有一種樹脂(稱為第二樹脂(i)),該樹脂是例如乙烯性不飽和單體的聚合物與具有環氧基之乙烯性不飽和化合物之反應物,該乙烯性不飽和單體含有具有羧基之乙烯性不飽和化合物。乙烯性不飽和單體,可進一步含有不具有羧基之乙烯性不飽和化合物。第二樹脂(i),可藉由下述方式來獲得:使具有環氧基之乙烯性不飽和化合物,與聚合物中的一部分羧基進行反應。 乙烯性不飽和單體,可進一步含有不具有羧基之乙烯性不飽和化合物。具有羧基之乙烯性不飽和化合物,含有例如下述化合物:丙烯酸、甲基丙烯酸、ω-羧基-聚己內酯(n≒2)單丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇三甲基丙烯酸酯等。不具有羧基之乙烯性不飽和化合物,含有例如下述化合物:鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯、鄰苯二甲酸2-(甲基)丙烯醯氧基乙基-2-羥乙酯、直鏈或支鏈之脂肪族或脂環族(其中,環中可具有一部分不飽和鍵)的(甲基)丙烯酸酯等。具有環氧基之乙烯性不飽和性化合物,較佳是含有(甲基)丙烯酸環氧丙酯。 The component (F2) may further contain a resin (referred to as a second resin (i)) which is a reactant of a polymer such as an ethylenically unsaturated monomer and an ethylenically unsaturated compound having an epoxy group. The ethylenically unsaturated monomer contains an ethylenically unsaturated compound having a carboxyl group. The ethylenically unsaturated monomer may further contain an ethylenically unsaturated compound having no carboxyl group. The second resin (i) can be obtained by reacting an ethylenically unsaturated compound having an epoxy group with a part of carboxyl groups in the polymer. The ethylenically unsaturated monomer may further contain an ethylenically unsaturated compound having no carboxyl group. An ethylenically unsaturated compound having a carboxyl group, for example, the following compounds: acrylic acid, methacrylic acid, ω-carboxy-polycaprolactone (n≒2) monoacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, etc. . An ethylenically unsaturated compound having no carboxyl group, and containing, for example, the following compound: 2-(methyl)propenyloxyethyl phthalate, 2-(methyl)propenyloxyethyl phthalate- 2-hydroxyethyl ester, a linear or branched aliphatic or alicyclic (wherein the ring may have a part of an unsaturated bond) (meth) acrylate or the like. The ethylenically unsaturated compound having an epoxy group preferably contains glycidyl (meth)acrylate.

含羧基樹脂(A),僅含有含羧基樹脂(A1),或含有含羧基樹脂(A1)與含羧基樹脂(F)。含羧基樹脂(A),較佳是含有30質量%以上的含羧基樹脂(A1),更佳是含有50質量%以上,進一步較佳是含有100質量%。此時,能夠使感光性樹脂組成物的硬化物的耐熱性和絕緣可靠性特別提升。又,能夠充分減少由感光性樹脂組成物所形成之皮膜的黏性。進一步,能夠確保感光性樹脂組成物的藉由鹼性水溶液來進行顯影之顯影性。 The carboxyl group-containing resin (A) contains only the carboxyl group-containing resin (A1) or the carboxyl group-containing resin (A1) and the carboxyl group-containing resin (F). The carboxyl group-containing resin (A) preferably contains 30% by mass or more of the carboxyl group-containing resin (A1), more preferably 50% by mass or more, and still more preferably 100% by mass. In this case, the heat resistance and insulation reliability of the cured product of the photosensitive resin composition can be particularly improved. Moreover, the viscosity of the film formed from the photosensitive resin composition can be sufficiently reduced. Further, the developability of development of the photosensitive resin composition by an aqueous alkaline solution can be ensured.

不飽和化合物(B),能夠對感光性樹脂組成物賦予光硬化性。不飽和化合物(B),可含有例如選自由下述所組成之群組中的至少一種化合物:(甲基)丙烯酸2-羥乙酯等單官能(甲基)丙烯酸酯;以及,二乙二醇二(甲基)丙烯酸酯、三羥甲基丙烷二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、 季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、ε-己內酯改質季戊四醇六丙烯酸酯、三環癸烷二甲醇二(甲基)丙烯酸酯等多官能(甲基)丙烯酸酯。 The unsaturated compound (B) can impart photocurability to the photosensitive resin composition. The unsaturated compound (B) may contain, for example, at least one compound selected from the group consisting of: a monofunctional (meth) acrylate such as 2-hydroxyethyl (meth)acrylate; and, Alcohol di(meth)acrylate, trimethylolpropane di(meth)acrylate, trimethylolpropane tri(meth)acrylate, pentaerythritol tri(meth)acrylate, Pentaerythritol tetra(meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, ε-caprolactone modified pentaerythritol hexaacrylate, tricyclodecane dimethanol di(II) Poly) (meth) acrylate such as acrylate.

尤其,不飽和化合物(B),較佳是三官能化合物,亦即於一分子中具有3個不飽和鍵之化合物。此時,在對由感光性樹脂組成物所形成之皮膜進行曝光、顯影時,能夠提升解析度,同時能夠特別提升感光性樹脂組成物的藉由鹼性水溶液來進行顯影之顯影性。三官能化合物,可含有例如選自由下述所組成之群組中的至少一種化合物:三羥甲基丙烷三(甲基)丙烯酸酯、EO改質三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、乙氧基化異三聚氰酸三(甲基)丙烯酸酯、ε-己內酯改質參(2-丙烯醯氧基乙基)異三聚氰酸酯、及乙氧基化甘油三(甲基)丙烯酸酯。 In particular, the unsaturated compound (B) is preferably a trifunctional compound, that is, a compound having three unsaturated bonds in one molecule. In this case, when the film formed of the photosensitive resin composition is exposed and developed, the resolution can be improved, and the developability of the photosensitive resin composition by the alkaline aqueous solution can be particularly improved. The trifunctional compound may contain, for example, at least one compound selected from the group consisting of trimethylolpropane tri(meth)acrylate, EO-modified trimethylolpropane tri(meth)acrylate , pentaerythritol tri (meth) acrylate, ethoxylated isocyanuric acid tri(meth) acrylate, ε-caprolactone modified ginseng (2-propenyl methoxyethyl) iso-cyanuric acid Ester, and ethoxylated glycerol tri(meth) acrylate.

不飽和化合物(B),亦較佳是含有含磷化合物(含磷之不飽和化合物)。此時,能夠提升感光性樹脂組成物的硬化的阻燃性。含磷之不飽和化合物,可含有例如選自由下述所組成之群組中的至少一種化合物:磷酸2-甲基丙烯醯基氧基乙酯(作為具體例,共榮社化學股份有限公司製造的商品型號LIGHT ESTER P-1M、和LIGHT ESTER P-2M)、磷酸2-丙烯醯基氧基乙酯(作為具體例,共榮社化學股份有限公司製造的商品型號LIGHT ACRYLATE P-1A)、磷酸二苯基-2-甲基丙烯醯基氧 基乙酯(作為具體例,大八工業股份有限公司製造的商品型號MR-260)、以及昭和高分子股份有限公司製造的HFA系列(作為具體例,二季戊四醇六丙烯酸酯與HCA(9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物)的加成反應物也就是商品型號HFA-6003和HFA-6007、己內酯改質二季戊四醇六丙烯酸酯與HCA(9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物)的加成反應物也就是商品型號HFA-3003和HFA-6127等)。 The unsaturated compound (B) preferably also contains a phosphorus-containing compound (phosphorus-containing unsaturated compound). At this time, the flame retardancy of the curing of the photosensitive resin composition can be improved. The phosphorus-containing unsaturated compound may contain, for example, at least one compound selected from the group consisting of 2-methylpropenyloxyethyl phosphate (as a specific example, manufactured by Kyoeisha Chemical Co., Ltd.) Product type LIGHT ESTER P-1M, and LIGHT ESTER P-2M), 2-propenyl methoxyethyl phosphate (as a specific example, the product model LIGHT ACRYLATE P-1A manufactured by Kyoeisha Chemical Co., Ltd.), Diphenyl-2-methylpropenyloxyl phosphate Ethyl ethyl ester (commodity model MR-260 manufactured by Daiba Industry Co., Ltd.) and HFA series manufactured by Showa Polymer Co., Ltd. (as a specific example, dipentaerythritol hexaacrylate and HCA (9, 10) -Additional reactants of -dihydro-9-oxa-10-phosphaphenanthrene-10-oxide) are also commercially available models HFA-6003 and HFA-6007, caprolactone-modified dipentaerythritol hexaacrylate and HCA ( The addition reactant of 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide) is also the commercial models HFA-3003 and HFA-6127, and the like.

不飽和化合物(B),可含有預聚物。預聚物,可含有例如選自由下述所組成之群組中的至少一種化合物:先使具有乙烯性不飽和鍵之單體進行聚合,再加成乙烯性不飽和基而獲得之預聚物;以及,低聚(甲基)丙烯酸酯預聚物類。低聚(甲基)丙烯酸酯預聚物類,可含有例如選自由下述所組成之群組中的至少一種成分:環氧基(甲基)丙烯酸酯、聚酯(甲基)丙烯酸酯、胺酯(甲基)丙烯酸酯、醇酸樹脂(甲基)丙烯酸酯、矽氧樹脂(甲基)丙烯酸酯、及螺烷烴樹脂(spirane resin)(甲基)丙烯酸酯。 The unsaturated compound (B) may contain a prepolymer. The prepolymer may contain, for example, at least one compound selected from the group consisting of polymerizing a monomer having an ethylenically unsaturated bond and then adding an ethylenically unsaturated group. And, oligomeric (meth) acrylate prepolymers. The oligomeric (meth) acrylate prepolymer may contain, for example, at least one component selected from the group consisting of epoxy (meth) acrylate, polyester (meth) acrylate, Amine ester (meth) acrylate, alkyd resin (meth) acrylate, oxime resin (meth) acrylate, and spirane resin (meth) acrylate.

光聚合起始劑(C),含有例如醯基氧化膦系光聚合起始劑(C1)。亦即,感光性樹脂組成物,含有例如醯基氧化膦系光聚合起始劑(C1)。此時,儘管感光性樹脂組成物含有含羧基樹脂(A1),仍能夠對感光性樹脂組成物賦予對於紫外線的高感光性。又,在包含感光性樹脂組成物的硬化物之層中能夠抑制離子遷移的發生,而能夠進一步提升該層的絕緣可靠性。 The photopolymerization initiator (C) contains, for example, a fluorenylphosphine oxide-based photopolymerization initiator (C1). In other words, the photosensitive resin composition contains, for example, a fluorenylphosphine oxide-based photopolymerization initiator (C1). In this case, although the photosensitive resin composition contains the carboxyl group-containing resin (A1), it is possible to impart high sensitivity to ultraviolet light to the photosensitive resin composition. Further, in the layer containing the cured product of the photosensitive resin composition, the occurrence of ion migration can be suppressed, and the insulation reliability of the layer can be further improved.

又,醯基氧化膦系光聚合起始劑(C1),不易妨礙硬化物的電絕緣性。因此,藉由對感光性樹脂組成物進行曝光硬化,能夠獲得電性絕緣性優異的硬化物,且該硬化物適合作為例如抗焊劑層、抗鍍劑層、抗蝕刻劑層、層間絕緣層。 Further, the fluorenylphosphine oxide-based photopolymerization initiator (C1) is less likely to interfere with the electrical insulation of the cured product. Therefore, by subjecting the photosensitive resin composition to exposure curing, a cured product excellent in electrical insulating properties can be obtained, and the cured product is suitable as, for example, a solder resist layer, a plating resist layer, an etch resist layer, and an interlayer insulating layer.

醯基氧化膦系光聚合起始劑(C1),可含有例如選自由下述所組成之群組中的至少一種成分:2,4,6-三甲基苯甲醯基-二苯基-氧化膦、2,4,6-三甲基苯甲醯基-苯基-膦酸乙酯等單醯基氧化膦系光聚合起始劑;以及,雙-(2,6-二氯苯甲醯基)苯基氧化膦、雙-(2,6-二氯苯甲醯基)-2,5-二甲基苯基氧化膦、雙-(2,6-二氯苯甲醯基)-4-丙基苯基氧化膦、雙-(2,6-二氯苯甲醯基)-1-萘基氧化膦、雙-(2,6-二甲氧基苯甲醯基)苯基氧化膦、雙-(2,6-二甲氧基苯甲醯基)-2,4,4-三甲基戊基氧化膦、雙-(2,6-二甲氧基苯甲醯基)-2,5-二甲基苯基氧化膦、雙-(2,4,6-三甲基苯甲醯基)苯基氧化膦、(2,5,6-三甲基苯甲醯基)-2,4,4-三甲基戊基氧化膦等雙醯基氧化膦系光聚合起始劑。尤其,較佳是醯基氧化膦系光聚合起始劑(C1)含有2,4,6-三甲基苯甲醯基-二苯基-氧化膦,亦較佳是醯基氧化膦系光聚合起始劑(C1)僅含有2,4,6-三甲基苯甲醯基-二苯基-氧化膦。 The fluorenylphosphine oxide-based photopolymerization initiator (C1) may contain, for example, at least one component selected from the group consisting of 2,4,6-trimethylbenzylidene-diphenyl- Monodecylphosphine oxide photopolymerization initiator such as phosphine oxide, 2,4,6-trimethylbenzimidyl-phenyl-phosphonic acid ethyl ester; and, bis-(2,6-dichlorobenzene) Mercapto) phenylphosphine oxide, bis-(2,6-dichlorobenzhydryl)-2,5-dimethylphenylphosphine oxide, bis-(2,6-dichlorobenzhydryl)- 4-propylphenylphosphine oxide, bis-(2,6-dichlorobenzhydryl)-1-naphthylphosphine oxide, bis-(2,6-dimethoxybenzylidene)phenyl oxide Phosphine, bis-(2,6-dimethoxybenzylidene)-2,4,4-trimethylpentylphosphine oxide, bis-(2,6-dimethoxybenzylidene)- 2,5-Dimethylphenylphosphine oxide, bis-(2,4,6-trimethylbenzylidene)phenylphosphine oxide, (2,5,6-trimethylbenzylidene)- A bis-indenylphosphine oxide-based photopolymerization initiator such as 2,4,4-trimethylpentylphosphine oxide. In particular, it is preferred that the fluorenylphosphine oxide-based photopolymerization initiator (C1) contains 2,4,6-trimethylbenzylidene-diphenyl-phosphine oxide, and is preferably a fluorenylphosphine oxide-based light. The polymerization initiator (C1) contains only 2,4,6-trimethylbenzimidyl-diphenyl-phosphine oxide.

光聚合起始劑(C),較佳是:除了醯基氧化膦系光聚合起始劑(C1)以外,還含有羥基酮系光聚合起始劑(C2)。亦即,感光性樹脂組成物,較佳是含有羥基酮 系光聚合起始劑(C2)。此時,相較於不含有羥基酮系光聚合起始劑(C2)的情形,能夠對感光性樹脂組成物賦予進一步較高的感光性。藉此,當對由感光性樹脂組成物所形成之塗膜照射紫外性來使其硬化時,能夠使塗膜自其表面以至深部皆充分硬化。作為羥基酮系光聚合起始劑(C2),可列舉例如:1-羥基-環己基-苯基-酮、苯基乙醛酸甲酯、1-[4-(2-羥基乙氧基)-苯基]-2-羥基-2-甲基-1-丙-1-酮、2-羥基-1-{4-[4-(2-羥基-2-甲基-丙醯基)-苯甲基]苯基}-2-甲基-丙-1-酮、及2-羥基-2-甲基-1-苯基-丙-1-酮。 The photopolymerization initiator (C) preferably contains a hydroxyketone-based photopolymerization initiator (C2) in addition to the fluorenylphosphine oxide-based photopolymerization initiator (C1). That is, the photosensitive resin composition preferably contains a hydroxyketone A photopolymerization initiator (C2). In this case, it is possible to impart further high photosensitivity to the photosensitive resin composition as compared with the case where the hydroxyketone-based photopolymerization initiator (C2) is not contained. Thereby, when the coating film formed from the photosensitive resin composition is irradiated with ultraviolet light to be cured, the coating film can be sufficiently cured from the surface to the deep portion. Examples of the hydroxyketone-based photopolymerization initiator (C2) include 1-hydroxy-cyclohexyl-phenyl-ketone, methyl phenylglyoxylate, and 1-[4-(2-hydroxyethoxy). -phenyl]-2-hydroxy-2-methyl-1-propan-1-one, 2-hydroxy-1-{4-[4-(2-hydroxy-2-methyl-propenyl)-benzene Methyl]phenyl}-2-methyl-propan-1-one, and 2-hydroxy-2-methyl-1-phenyl-propan-1-one.

醯基氧化膦系光聚合起始劑(C1)與羥基酮系光聚合起始劑(C2)的質量比,較佳是在1:0.01~1:10的範圍內。此時,能夠使在由感光性樹脂組成物所形成之塗膜的表面附近的硬化性與在深部的硬化性均衡地提升。 The mass ratio of the fluorenylphosphine oxide-based photopolymerization initiator (C1) to the hydroxyketone-based photopolymerization initiator (C2) is preferably in the range of 1:0.01 to 1:10. In this case, the hardenability in the vicinity of the surface of the coating film formed of the photosensitive resin composition and the hardenability in the deep portion can be uniformly adjusted.

光聚合起始劑(C),亦較佳是含有雙(二乙基胺基)二苯基酮(C3)。亦即,亦較佳是:感光性樹脂組成物含有醯基氧化膦系光聚合起始劑(C1)和雙(二乙基胺基)二苯基酮(C3),或感光性樹脂組成物含有感光性樹脂組成物含有醯基氧化膦系光聚合起始劑(C1)、羥基酮系光聚合起始劑(C2)及雙(二乙基胺基)二苯基酮(C3)。此時,當先對由感光性樹脂組成物所形成之塗膜進行部分曝光,再進行顯影時,因為沒有被曝光的部分的硬化受到抑制,所以使解析度變特別高。因此,能夠形成非常微細圖 案之感光性樹脂組成物的硬化物。尤其,當由感光性樹脂組成物製作多層印刷線路板的層間絕緣層,並且以光刻法(photolithography)來在該層間絕緣層設置用於貫穿孔的小徑的孔時(參照第1圖),能夠精密且容易形成小徑的孔。 The photopolymerization initiator (C) preferably also contains bis(diethylamino)diphenyl ketone (C3). In other words, the photosensitive resin composition preferably contains a fluorenylphosphine oxide-based photopolymerization initiator (C1) and bis(diethylamino)diphenyl ketone (C3), or a photosensitive resin composition. The photosensitive resin composition contains a mercaptophosphine oxide photopolymerization initiator (C1), a hydroxyketone photopolymerization initiator (C2), and bis(diethylamino)diphenyl ketone (C3). At this time, when the coating film formed of the photosensitive resin composition is partially exposed and developed, the hardening of the portion which is not exposed is suppressed, so that the resolution is particularly high. Therefore, it is possible to form a very fine map A cured product of the photosensitive resin composition. In particular, when an interlayer insulating layer of a multilayer printed wiring board is produced from a photosensitive resin composition, and a hole having a small diameter for a through hole is provided in the interlayer insulating layer by photolithography (see FIG. 1) It is possible to form a hole with a small diameter precisely and easily.

相對於醯基氧化膦系光聚合起始劑(C1),雙(二乙基胺基)二苯基酮(C3)的量,較佳是在0.5~20質量%的範圍內。相對於醯基氧化膦系光聚合起始劑(C1),若雙(二乙基胺基)二苯基酮(C3)的量是0.5質量%以上,則使解析度變特別高。又,相對於醯基氧化膦系光聚合起始劑(C1),若雙(二乙基胺基)二苯基酮(C3)的量是20質量%以下,則雙(二乙基胺基)二苯基酮(C3)不易妨礙感光性樹脂組成物的硬化物的電絕緣性。 The amount of bis(diethylamino)diphenyl ketone (C3) is preferably in the range of 0.5 to 20% by mass based on the fluorenylphosphine oxide-based photopolymerization initiator (C1). When the amount of bis(diethylamino)diphenyl ketone (C3) is 0.5% by mass or more with respect to the fluorenylphosphine oxide-based photopolymerization initiator (C1), the resolution is particularly high. In addition, when the amount of bis(diethylamino)diphenyl ketone (C3) is 20% by mass or less based on the fluorenyl phosphine oxide-based photopolymerization initiator (C1), bis(diethylamino group) Diphenyl ketone (C3) does not easily impede the electrical insulation of the cured product of the photosensitive resin composition.

感光性樹脂組成物,可進一步含有公知的光聚合促進劑、敏化劑(sensitizer)等。感光性樹脂組成物,可含有例如選自由下述所組成之群組中的至少一種成分:安息香與其烷基醚類;苯乙酮、苯偶醯二甲基縮酮等苯乙酮類;2-甲基蒽醌等蒽醌類;2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、2-異丙基噻噸酮、4-異丙基噻噸酮、2,4-二異丙基噻噸酮等噻噸酮(thioxanthone)類;二苯基酮、4-苯甲醯基-4’-甲基二苯基硫醚等二苯基酮類;2,4-二異丙基呫噸酮等呫噸酮類(xanthone);以及,2-羥基-2-甲基-1-苯基-丙-1-酮等α-羥基酮類;2-甲基-1-[4-(甲硫基)苯基]-2-(N-嗎啉基)-1-丙酮等 含氮原子之化合物。感光性樹脂組成物,除了光聚合起始劑(C)以外,還可含有對二甲基安息香酸乙酯、對二甲基胺基安息香酸異戊酯、苯甲酸2-二甲基胺基乙酯等三級胺系等公知的光聚合促進劑或敏化劑等。感光性樹脂組成物,可視需要而含有用於可見光曝光的光聚合起始劑和用於近紅外線曝光的光聚合起始劑之中的至少一種。感光性樹脂組成物,除了光聚合起始劑(C)以外,還可含有用於雷射曝光法的敏化劑也就是7-二乙基胺基-4-甲基香豆素等香豆素衍生物、羰花青(carbocyanine)色素系、呫噸(xanthene)色素系等。 The photosensitive resin composition may further contain a known photopolymerization accelerator, a sensitizer, or the like. The photosensitive resin composition may contain, for example, at least one component selected from the group consisting of benzoin and its alkyl ethers; acetophenones such as acetophenone and benzoin dimethyl ketal; - anthracene such as methyl hydrazine; 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-isopropylthioxanthone, 4-isopropylthioxanthone, a thioxanthone such as 2,4-diisopropylthioxanthone; a diphenyl ketone such as diphenyl ketone or 4-benzylidene-4'-methyldiphenyl sulfide; , xanthone such as 4-diisopropylxanthone; and α-hydroxyketones such as 2-hydroxy-2-methyl-1-phenyl-propan-1-one; 2-A Keto-1-[4-(methylthio)phenyl]-2-(N-morpholinyl)-1-propanone, etc. A compound containing a nitrogen atom. The photosensitive resin composition may contain, in addition to the photopolymerization initiator (C), ethyl p-dimethylbenzoate, p-dimethylamino benzoic acid isoamyl ester, and 2-dimethylamino benzoate. A known photopolymerization accelerator or sensitizer such as a tertiary amine such as ethyl ester. The photosensitive resin composition may contain at least one of a photopolymerization initiator for visible light exposure and a photopolymerization initiator for near-infrared exposure, as needed. The photosensitive resin composition may contain, in addition to the photopolymerization initiator (C), a sensitizer for laser exposure, that is, coumarin such as 7-diethylamino-4-methylcoumarin A derivative, a carbocyanine pigment, a xanthene pigment, or the like.

環氧化合物(D),能夠對感光性樹脂組成物賦予熱硬化性。環氧化合物(D),較佳是於一分子中具有至少2個環氧基。環氧化合物(D),可以是難溶於溶劑之環氧化合物,亦可以是廣泛使用的可溶於溶劑之環氧化合物。環氧化合物(D),較佳是含有例如選自由下述所組成之群組中的一種以上的成分:苯酚酚醛清漆型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON N-775)、甲酚酚醛清漆型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON N-695)、雙酚A酚醛清漆型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON N-865)、雙酚A型環氧樹脂(作為具體例,三菱化學股份有限公司製造的商品型號jER1001)、雙酚F型環氧樹脂(作為具體例,三菱化學股份有限公司製造的商品型號 jER4004P)、雙酚S型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON EXA-1514)、雙酚AD型環氧樹脂、聯苯型環氧樹脂(作為具體例,三菱化學股份有限公司製造的商品型號YX4000)、聯苯酚醛清漆型環氧樹脂(作為具體例,日本化藥股份有限公司製造的商品型號NC-3000)、氫化雙酚A型環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品型號ST-4000D)、萘型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON HP-4032、EPICLON HP-4700、EPICLON HP-4770)、氫醌型環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品型號YDC-1312)、三級丁基鄰苯二酚型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON HP-820)、雙環戊二烯型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON HP-7200)、金剛烷型環氧樹脂(作為具體例,出光興產股份有限公司製造的商品型號ADAMANTATE X-E-201)、雙酚型環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品型號YSLV-80XY)、二苯基醚型環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品型號YSLV-80DE)、肆(羥苯基)乙烷型環氧樹脂(作為具體例,日本化藥股份有限公司製造的商品型號GTR-1800)、具有雙酚茀骨架之環氧樹脂(作為具體例,具有結構(S7)之環氧樹脂)、橡膠狀核殼聚合物 改質雙酚A型環氧樹脂(作為具體例,KANEKA CORPORATION製造的商品型號MX-156)、橡膠狀核殼聚合物改質雙酚F型環氧樹脂(作為具體例,KANEKA CORPORATION製造的商品型號MX-136)、以及特殊二官能型環氧樹脂(作為具體例,三菱化學股份有限公司製造的商品型號YL7175-500、及YL7175-1000;DIC股份有限公司製造的商品型號EPICLON TSR-960、EPICLON TER-601、EPICLON TSR-250-80BX、EPICLON 1650-75MPX、EPICLON EXA-4850、EPICLON EXA-4816、EPICLON EXA-4822、及EPICLON EXA-9726;新日鐵住金化學股份有限公司製造的商品型號YSLV-120TE)。 The epoxy compound (D) can impart thermosetting properties to the photosensitive resin composition. The epoxy compound (D) preferably has at least 2 epoxy groups in one molecule. The epoxy compound (D) may be an epoxy compound which is insoluble in a solvent, or a solvent-soluble epoxy compound which is widely used. The epoxy compound (D) preferably contains, for example, one or more components selected from the group consisting of phenol novolak-type epoxy resins (as a specific example, the product model EPICLON N manufactured by DIC Corporation) -775), a cresol novolac type epoxy resin (a specific example, a product model EPICLON N-695 manufactured by DIC Corporation), and a bisphenol A novolac type epoxy resin (as a specific example, manufactured by DIC Corporation) Product model EPICLON N-865), bisphenol A type epoxy resin (as a specific example, product type jER1001 manufactured by Mitsubishi Chemical Corporation), bisphenol F type epoxy resin (as a specific example, Mitsubishi Chemical Corporation Manufactured product model jER4004P), bisphenol S type epoxy resin (as a specific example, product model EPICLON EXA-1514 manufactured by DIC Corporation), bisphenol AD type epoxy resin, biphenyl type epoxy resin (as a specific example, Mitsubishi Chemical Product model YX4000) manufactured by Co., Ltd., biphenyl aldehyde varnish type epoxy resin (as a specific example, product type NC-3000 manufactured by Nippon Kayaku Co., Ltd.), hydrogenated bisphenol A type epoxy resin (as a specific example) , product type ST-4000D manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd., and naphthalene type epoxy resin (as a specific example, the product model EPICLON HP-4032, EPICLON HP-4700, EPICLON HP-4770 manufactured by DIC Corporation) ), hydroquinone type epoxy resin (as a specific example, the product model YDC-1312 manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.), and tertiary catechol epoxide type epoxy resin (as a specific example, DIC shares are limited) The company's product model EPICLON HP-820), dicyclopentadiene type epoxy resin (as a specific example, DIC Corporation's product model EPICLON HP-7200), adamantane type epoxy resin (as a specific example, light Product model: ADAMANTATE XE-201), bisphenol epoxy resin (as a specific example, the product model YSLV-80XY manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.), diphenyl ether epoxy resin (As a specific example, the product model YSLV-80DE manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.) and bismuth (hydroxyphenyl) ethane type epoxy resin (as a specific example, the product model GTR manufactured by Nippon Kayaku Co., Ltd.) -1800), epoxy resin having a bisphenol fluorene skeleton (as a specific example, an epoxy resin having a structure (S7)), a rubbery core-shell polymer A modified bisphenol A type epoxy resin (a specific example, a product model MX-156 manufactured by KANEKA CORPORATION) and a rubbery core-shell polymer modified bisphenol F type epoxy resin (as a specific example, a product manufactured by KANEKA CORPORATION) Model MX-136), and special difunctional epoxy resin (as a specific example, the product model YL7175-500 manufactured by Mitsubishi Chemical Corporation, and YL7175-1000; the product model EPICLON TSR-960 manufactured by DIC Corporation, EPICLON TER-601, EPICLON TSR-250-80BX, EPICLON 1650-75MPX, EPICLON EXA-4850, EPICLON EXA-4816, EPICLON EXA-4822, and EPICLON EXA-9726; YSLV-120TE).

環氧化合物(D),較佳是含有結晶性環氧樹脂。此時,能夠使感光性樹脂組成物的顯影性提升。再者,結晶性環氧樹脂,是指具有熔點之環氧樹脂。結晶性環氧樹脂,可含有例如選自由下述所組成之群組中的至少一種成分:異三聚氰酸三環氧丙酯(1,3,5-參(2,3-環氧丙基)-1,3,5-三-2,4,6(1H,3H,5H)-三酮)、氫醌型結晶性環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品名YDC-1312)、聯苯型結晶性環氧樹脂(作為具體例,三菱化學股份有限公司製造的商品名YX-4000)、二苯基醚型結晶性環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品型號YSLV-80DE)、雙酚型結晶性環氧樹脂(作為具體例, 新日鐵住金化學股份有限公司製造的商品名YSLV-80XY)、肆(羥苯基)乙烷型結晶性環氧樹脂(作為具體例,日本化藥股份有限公司製造的商品型號GTR-1800)、雙酚茀型結晶性環氧樹脂(作為具體例,具有結構(S7)之環氧樹脂)。 The epoxy compound (D) preferably contains a crystalline epoxy resin. At this time, the developability of the photosensitive resin composition can be improved. Further, the crystalline epoxy resin means an epoxy resin having a melting point. The crystalline epoxy resin may contain, for example, at least one component selected from the group consisting of triglycidyl isocyanurate (1,3,5-para (2,3-epoxypropyl) Base)-1,3,5-three -2,4,6(1H,3H,5H)-trione), hydroquinone-type crystalline epoxy resin (as a specific example, trade name YDC-1312 manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.), biphenyl A crystalline epoxy resin (a specific name, YX-4000, manufactured by Mitsubishi Chemical Corporation), and a diphenyl ether-type crystalline epoxy resin (as a specific example, manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.) Product model YSLV-80DE), bisphenol type crystalline epoxy resin (for example, YSLV-80XY, manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.), bismuth (hydroxyphenyl) ethane type crystalline epoxy Resin (for example, a product model GTR-1800 manufactured by Nippon Kayaku Co., Ltd.) and a bisphenol fluorene-type crystalline epoxy resin (having an epoxy resin having a structure (S7) as a specific example).

相對於環氧化合物(D),結晶性環氧樹脂的量,較佳是在10~100質量%的範圍內,更佳是在30~100質量%的範圍內,進一步較佳是在35~100質量%的範圍內。此時,在至感光性樹脂組成物的熱硬化前為止的步驟中,能夠抑制含羧基樹脂與環氧樹脂的熱硬化反應,而使顯影性提升。 The amount of the crystalline epoxy resin is preferably in the range of 10 to 100% by mass, more preferably in the range of 30 to 100% by mass, even more preferably in the range of 35 to 100% by mass based on the epoxy compound (D). Within the range of 100% by mass. In this case, in the step up to the thermal curing of the photosensitive resin composition, the thermosetting reaction of the carboxyl group-containing resin and the epoxy resin can be suppressed, and the developability can be improved.

尤其,結晶性環氧樹脂,較佳是含有熔點110℃以下的結晶性環氧樹脂。亦即,環氧化合物(D),較佳是含有熔點110℃以下的結晶性環氧樹脂。此時,能夠特別提升感光性樹脂組成物的藉由鹼性水溶液來進行顯影之顯影性。熔點110℃以下的結晶性環氧樹脂,可含有例如選自由下述所組成之群組中的至少一種成分:聯苯型環氧樹脂(作為具體例,三菱化學股份有限公司製造的商品型號YX4000)、二苯基醚型環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品型號YSLV-80DE)、及雙酚型環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品型號YSLV-80XY)。 In particular, the crystalline epoxy resin preferably contains a crystalline epoxy resin having a melting point of 110 ° C or lower. That is, the epoxy compound (D) preferably contains a crystalline epoxy resin having a melting point of 110 ° C or lower. In this case, the developability of development of the photosensitive resin composition by an aqueous alkaline solution can be particularly enhanced. The crystalline epoxy resin having a melting point of 110 ° C or less may contain, for example, at least one component selected from the group consisting of biphenyl type epoxy resins (for example, a model number YX4000 manufactured by Mitsubishi Chemical Corporation) ), diphenyl ether type epoxy resin (as a specific example, the product model YSLV-80DE manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.), and bisphenol type epoxy resin (as a specific example, Nippon Steel & Sumitomo Chemical Co., Ltd.) The product model manufactured by the company is YSLV-80XY).

環氧化合物(D),可含有異三聚氰酸三環氧丙酯。尤其,異三聚氰酸三環氧丙酯,較佳是較佳是β體,該β體具有3個環氧基鍵結在相對於S-三環骨架面為同一方向上而成的結構;或者,較佳是該β體與α體之混合物,該α體具有1個環氧基鍵結在相對於S-三環骨架面為與其他2個環氧基不同的方向上而成的結構。 The epoxy compound (D) may contain triglycidyl isocyanurate. In particular, triglycidyl isocyanurate, preferably a beta body, has three epoxy linkages relative to S-three. The ring skeleton surface is a structure formed in the same direction; or, preferably, a mixture of the β body and the α body, the α body having one epoxy bond in relation to the S-three The ring skeleton surface has a structure different from the other two epoxy groups.

結晶性環氧樹脂,亦較佳是含有熔點小於100℃的結晶性環氧樹脂。亦即,環氧化合物(D),亦較佳是含有熔點小於100℃的結晶性環氧樹脂。此時,能夠使感光性樹脂組成物的顯影性進一步提升。又,熔點小於100℃的結晶性環氧樹脂,與感光性樹脂組成物中的除了環氧樹脂(D)以外之成分或溶劑等相溶性較高,因此易於分散在感光性樹脂組成物中而均勻化。進一步,若感光性樹脂組成物含有熔點小於100℃的結晶性環氧樹脂,則即便在低溫時也不易發生結晶化。因此,能夠對感光性樹脂組成物賦予較高的保存穩定性。進一步,在低溫時能夠抑制感光性樹脂組成物中的羧基與環氧基的交聯反應,因此能夠維持感光性樹脂組成物的良好顯影性,同時能夠對感光性樹脂組成物賦予較高的保存穩定性。 The crystalline epoxy resin preferably also contains a crystalline epoxy resin having a melting point of less than 100 °C. That is, the epoxy compound (D) is also preferably a crystalline epoxy resin having a melting point of less than 100 °C. At this time, the developability of the photosensitive resin composition can be further improved. In addition, since the crystalline epoxy resin having a melting point of less than 100° C. has a high compatibility with a component other than the epoxy resin (D) or a solvent in the photosensitive resin composition, it is easily dispersed in the photosensitive resin composition. Homogenize. Further, when the photosensitive resin composition contains a crystalline epoxy resin having a melting point of less than 100 ° C, crystallization does not easily occur even at a low temperature. Therefore, it is possible to impart high storage stability to the photosensitive resin composition. Further, since the crosslinking reaction between the carboxyl group and the epoxy group in the photosensitive resin composition can be suppressed at a low temperature, it is possible to maintain high developability of the photosensitive resin composition and to impart high preservation to the photosensitive resin composition. stability.

熔點小於100℃的結晶性環氧樹脂,可含有例如選自由下述所組成之群組中的至少一種成分:、二苯基醚型環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品型號YSLV-80DE)、及雙酚型環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品 型號YSLV-80XY)、具有雙酚茀骨架之環氧樹脂(作為具體例,具有結構(S7)之環氧樹脂)。 The crystalline epoxy resin having a melting point of less than 100 ° C may contain, for example, at least one component selected from the group consisting of: diphenyl ether type epoxy resin (as a specific example, Nippon Steel & Sumitomo Chemical Co., Ltd. The product model YSLV-80DE manufactured by the company, and the bisphenol epoxy resin (as a specific example, the product manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd. Model YSLV-80XY), an epoxy resin having a bisphenol fluorene skeleton (as a specific example, an epoxy resin having a structure (S7)).

當環氧化合物(D)含有熔點小於100℃的結晶性環氧樹脂時,熔點小於100℃的結晶性環氧樹脂中包含的環氧基的當量,相對於含羧基樹脂(A)中包含的1當量的羧基,若在0.2~2.0的範圍內則較佳,若在0.25~1.7的範圍內則更佳,若在0.3~1.5的範圍內則進一步較佳。 When the epoxy compound (D) contains a crystalline epoxy resin having a melting point of less than 100 ° C, the equivalent of the epoxy group contained in the crystalline epoxy resin having a melting point of less than 100 ° C is contained with respect to the carboxyl group-containing resin (A). One equivalent of the carboxyl group is preferably in the range of 0.2 to 2.0, more preferably in the range of 0.25 to 1.7, and even more preferably in the range of 0.3 to 1.5.

環氧化合物(D),可含有含磷環氧樹脂。此時,能夠提升感光性樹脂組成物的硬化物的阻燃性。含磷環氧樹脂,例如是:磷酸改質雙酚F型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICRON EXA-9726、及EPICRON EXA-9710)、新日鐵住金化學股份有限公司製造的商品型號EPOTORT FX-305等。 The epoxy compound (D) may contain a phosphorus-containing epoxy resin. At this time, the flame retardancy of the cured product of the photosensitive resin composition can be improved. Phosphorus-containing epoxy resin, for example, phosphoric acid-modified bisphenol F-type epoxy resin (as a specific example, DIC Corporation's product model EPICRON EXA-9726, and EPICRON EXA-9710), Nippon Steel & Sumitomo Chemical Co., Ltd. The product model EPOTORT FX-305 manufactured by the company.

感光性樹脂組成物,可含有三聚氰胺。感光性樹脂組成物,可含有成分(E),該成分(E)含有三聚氰胺與三聚氰胺衍生物之中的至少其中一者。此時,能夠使感光性樹脂組成物的硬化物與銅等金屬之間的黏合性較高。因此,感光性樹脂組成物,特別適合作為用於印刷線路板的絕緣材料。又,能夠提升感光性樹脂組成物的硬化物的耐鍍覆性,亦即無電鍍鎳/金處理時的白化耐性。 The photosensitive resin composition may contain melamine. The photosensitive resin composition may contain a component (E) containing at least one of melamine and a melamine derivative. In this case, the adhesion between the cured product of the photosensitive resin composition and a metal such as copper can be made high. Therefore, the photosensitive resin composition is particularly suitable as an insulating material for a printed wiring board. Moreover, the plating resistance of the cured product of the photosensitive resin composition can be improved, that is, the whitening resistance at the time of electroless nickel/gold treatment.

三聚氰胺,是2,4,6-三胺基-1,3,5-三,且可自一般市售的化合物取得。又,三聚氰胺衍生物,只 要是於其一分子中具有1個三環與胺基之化合物即可。作為三聚氰胺衍生物,可列舉例如:胍胺(guanamine);甲基胍胺;苯基胍胺;2,4-二胺基-6-甲基丙烯醯基氧乙基-S-三、2-乙烯基-4,6-二胺基-S-三、2-乙烯基-4,6-二胺基-S-三/異三聚氰酸加成物、2,4-二胺基-6-甲基丙烯醯基氧乙基-S-三/異三聚氰酸加成物等S-三衍生物;以及,三聚氰胺-四氫鄰苯二甲酸鹽等三聚氰胺與酸酐之反應物。作為三聚氰胺衍生物的更詳細的具體例,可列舉:四國化成工業股份有限公司的產品名VD-1、產品名VD-2、產品名VD-3。 Melamine is 2,4,6-triamino-1,3,5-three And can be obtained from generally commercially available compounds. Further, the melamine derivative has one of three in one molecule thereof. The compound of the ring and the amine group may be used. As the melamine derivative, for example, guanamine; methyl decylamine; phenyl decylamine; 2,4-diamino-6-methylpropenyl oxyethyl-S-III 2-vinyl-4,6-diamino-S-three 2-vinyl-4,6-diamino-S-three /Iso-cyanuric acid adduct, 2,4-diamino-6-methylpropenyloxyethyl-S-three /Iso-cyanuric acid adducts, etc. S-three a derivative; and a reaction of melamine with an anhydride such as melamine-tetrahydrophthalic acid. More specific examples of the melamine derivative include the product name VD-1 of Shikoku Chemical Industry Co., Ltd., the product name VD-2, and the product name VD-3.

感光性樹脂組成物,可含有有機溶劑。有機溶劑,是基於下述目的而使用:感光性樹脂組成物的液狀化或清漆化、黏度的調整、塗佈性的調整、成膜性的調整等。 The photosensitive resin composition may contain an organic solvent. The organic solvent is used for liquidification or varnishing of a photosensitive resin composition, adjustment of viscosity, adjustment of coatability, adjustment of film formability, and the like.

有機溶劑,可含有例如選自由下述所組成之群組中的至少一種化合物:乙醇、丙醇、異丙醇、己醇、乙二醇等直鏈、支鏈、2級或多元醇類;甲基乙基酮、環己酮等酮類;甲苯、二甲苯等芳香族烴類;Swasol系列(丸善石油化學公司製造)、Solvesso系列(埃克森美孚化學公司(ExxonMobil Chemical Company)製造)等石油系芳香族系混合溶劑;賽璐蘇、丁基賽璐蘇等賽璐蘇類;卡必醇、丁基卡必醇等卡必醇類;丙二醇甲基醚等丙二醇烷基醚類;二丙二醇甲基醚等聚丙二醇烷基醚類;乙酸乙酯、乙酸丁酯、賽璐蘇乙酸酯、卡必醇乙酸酯等乙酸酯類;以及,二烷二醇醚類。 The organic solvent may contain, for example, at least one compound selected from the group consisting of: linear, branched, quaternary or polyhydric alcohols such as ethanol, propanol, isopropanol, hexanol, ethylene glycol; Ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene and xylene; Swasol series (manufactured by Maruzen Petrochemical Co., Ltd.), Solvesso series (manufactured by ExxonMobil Chemical Company), etc. Petroleum aromatic mixed solvent; celecoxib, butyl acesulfame, etc.; carbitol, carbitol, propylene glycol methyl ether and other propylene glycol alkyl ether; a polypropylene glycol alkyl ether such as propylene glycol methyl ether; an acetate such as ethyl acetate, butyl acetate, celecoxib acetate or carbitol acetate; and a dialkyl glycol ether.

適當調整感光性樹脂組成物中的成分的量,使得感光性樹脂組成物具有光硬化性且能夠藉由鹼性溶液來進行顯影。 The amount of the component in the photosensitive resin composition is appropriately adjusted so that the photosensitive resin composition has photocurability and can be developed by an alkaline solution.

相對於感光性樹脂組成物的固體成分量,含羧基樹脂(A)的量,若在5~85質量%的範圍內則較佳,若在10~75質量%的範圍內則更佳,若在30~60質量%的範圍內則進一步較佳。 The amount of the carboxyl group-containing resin (A) is preferably in the range of 5 to 85% by mass, more preferably in the range of 10 to 75% by mass, based on the solid content of the photosensitive resin composition. It is further preferably in the range of 30 to 60% by mass.

相對於含羧基樹脂(A),不飽和化合物(B)的量,若在1~50質量%的範圍內則較佳,若在10~45質量%的範圍內則更佳,若在21~40質量%的範圍內則進一步較佳。尤其,若相對於含羧基樹脂(A),不飽和化合物(B)的量在21~40質量%的範圍內,則能夠對感光性樹脂組成物賦予優異的光硬化性,同時能夠使感光性樹脂組成物的顯影性進一步提升,並且進一步減少由感光性樹脂組成物所形成之皮膜的黏性。亦即,若相對於含羧基樹脂(A),不飽和化合物(B)的量是21質量%以上,則能夠使感光性樹脂組成物的光硬化性提升,同時使感光性樹脂組成的顯影性進一步提升。又,若相對於含羧基樹脂(A),不飽和化合物(B)的量是40質量%以下,則能夠進一步減少由感光性樹脂組成物所形成之皮膜的黏性。 The amount of the unsaturated compound (B) is preferably in the range of 1 to 50% by mass based on the carboxyl group-containing resin (A), and more preferably in the range of 10 to 45% by mass. Further preferably, it is in the range of 40% by mass. In particular, when the amount of the unsaturated compound (B) is in the range of 21 to 40% by mass based on the carboxyl group-containing resin (A), it is possible to impart excellent photocurability to the photosensitive resin composition and to provide photosensitivity. The developability of the resin composition is further improved, and the viscosity of the film formed of the photosensitive resin composition is further reduced. In other words, when the amount of the unsaturated compound (B) is 21% by mass or more based on the carboxyl group-containing resin (A), the photocurability of the photosensitive resin composition can be improved and the developability of the photosensitive resin composition can be improved. Further improvement. In addition, when the amount of the unsaturated compound (B) is 40% by mass or less based on the carboxyl group-containing resin (A), the viscosity of the film formed of the photosensitive resin composition can be further reduced.

相對於含羧基樹脂(A),光聚合起始劑(C)的量,較佳是在0.1~30質量%的範圍內,若在1~25質量%的範圍內則進一步較佳。 The amount of the photopolymerization initiator (C) is preferably in the range of 0.1 to 30% by mass based on the carboxyl group-containing resin (A), and more preferably in the range of 1 to 25% by mass.

有關環氧化合物(D)的量,相對於含羧基樹脂(A)中包含的1當量的羧基,較佳是環氧化合物(D)中包含的環氧基的當量的合計量在0.7~2.5的範圍內,若在0.7~2.3的範圍內則更佳,若在0.7~2.0的範圍內則進一步較佳。 The amount of the epoxy compound (D) is preferably 0.7 to 2.5 in terms of the equivalent amount of the epoxy group contained in the epoxy compound (D) with respect to 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A). In the range of 0.7 to 2.3, it is more preferably in the range of 0.7 to 2.0, and further preferably in the range of 0.7 to 2.0.

當感光性樹脂組成物含有三聚氰胺時,相對於含羧基樹脂(A),三聚氰胺的量,較佳是在0.1~10質量%的範圍內,若在0.5~5質量%的範圍內則進一步較佳。 When the photosensitive resin composition contains melamine, the amount of melamine is preferably in the range of 0.1 to 10% by mass based on the carboxyl group-containing resin (A), and further preferably in the range of 0.5 to 5% by mass. .

當感光性樹脂組成物含有成分(E),該成分(E)含有三聚氰胺及三聚氰胺衍生物之中的至少其中一者時,相對於含羧基樹脂(A),成分(E)的量,較佳是在0.1~10質量%的範圍內,若在0.5~5質量%的範圍內則進一步較佳。 When the photosensitive resin composition contains the component (E) containing at least one of the melamine and the melamine derivative, the amount of the component (E) is preferably the amount of the carboxyl group-containing resin (A). It is in the range of 0.1 to 10% by mass, and more preferably in the range of 0.5 to 5% by mass.

當感光性樹脂組成物含有有機溶劑時,有機溶劑的量,較佳是:以在使由感光性樹脂組成物所形成之塗膜乾燥時有機溶劑能夠迅速地揮發而消失的方式,亦即以有機溶劑不殘留在乾燥膜中的方式,來進行調整。尤其,相對於感光性樹脂組成物整體,有機溶劑的量,較佳是在0~99.5質量%的範圍內,若在15~60質量%的範圍內則進一步較佳。再者,有機溶劑的適當比例,會隨著塗佈方法等而不同,因此,較佳是視塗佈方法來適當調節比例。 When the photosensitive resin composition contains an organic solvent, the amount of the organic solvent is preferably such that the organic solvent can be quickly volatilized and disappeared when the coating film formed of the photosensitive resin composition is dried, that is, The organic solvent is adjusted in such a manner that it does not remain in the dried film. In particular, the amount of the organic solvent is preferably in the range of 0 to 99.5% by mass, and more preferably in the range of 15 to 60% by mass, based on the entire photosensitive resin composition. Further, the appropriate ratio of the organic solvent varies depending on the coating method and the like. Therefore, it is preferred to appropriately adjust the ratio depending on the coating method.

再者,固體成分量,是指從感光性樹脂組成物將溶劑等揮發性成分去除後餘留的所有成分的合計量。 In addition, the solid content amount is a total amount of all the components remaining after the volatile component such as a solvent is removed from the photosensitive resin composition.

只要在不妨礙本實施形態的功效的範圍內,感光性樹脂組成物,可進一步含有上述成分以外之成分。 The photosensitive resin composition may further contain components other than the above components within a range that does not impair the effects of the embodiment.

例如,感光性樹脂組成物可含有無機填充材。此時,能夠減少由感光性樹脂組成物所形成之膜硬化收縮的情形。無機填充材,可含有例如選自由下述所組成之群組中的至少一種材料:硫酸鋇、結晶性二氧化矽、奈米二氧化矽、奈米碳管(carbon nanotube)、滑石、膨潤土、氫氧化鋁、氫氧化鎂、及二氧化鈦。可藉由使感光性樹脂組成物含有二氧化鈦、氧化鋅等白色材料,來使感光性樹脂組成物和其硬化物白色化。感光性樹脂組成物中的無機填充材的比例,可適當設定,相對含羧基樹脂(A),無機填充材的量,較佳是在0~300質量%的範圍內。 For example, the photosensitive resin composition may contain an inorganic filler. At this time, it is possible to reduce the hardening and shrinkage of the film formed of the photosensitive resin composition. The inorganic filler may contain, for example, at least one material selected from the group consisting of barium sulfate, crystalline cerium oxide, nano cerium oxide, carbon nanotube, talc, bentonite, Aluminum hydroxide, magnesium hydroxide, and titanium dioxide. The photosensitive resin composition contains a white material such as titanium oxide or zinc oxide to whiten the photosensitive resin composition and the cured product. The ratio of the inorganic filler in the photosensitive resin composition can be appropriately set, and the amount of the inorganic filler is preferably in the range of 0 to 300% by mass based on the carboxyl group-containing resin (A).

感光性樹脂組成物,可含有選自由下述所組成之群組中的至少一種樹脂:經以己內醯胺、肟、丙二酸酯等封閉後之甲苯二異氰酸酯系、嗎啉二異氰酸酯系、異佛酮二異氰酸酯系及六亞甲基二異氰酸酯系封閉異氰酸酯;三聚氰胺樹脂、正丁基化三聚氰胺樹脂、異丁基化三聚氰胺樹脂、丁基化尿素樹脂、丁基化三聚氰胺尿素共縮合樹脂、苯胍胺(benzoguanamine)系共縮合樹脂等胺基樹脂;前述以外的各種熱硬化性樹脂;紫外線硬化性環氧基(甲基)丙烯酸酯;將(甲基)丙烯酸加成在雙酚A型、苯酚酚醛清漆型、甲酚酚醛清漆型、脂環型等環氧樹脂而獲得之樹脂;以及,鄰苯二甲酸二烯丙酯樹脂、苯氧樹脂、胺酯樹脂、氟樹脂等高分子化合物。 The photosensitive resin composition may contain at least one resin selected from the group consisting of toluene diisocyanate and morpholine diisocyanate which are blocked with caprolactam, hydrazine, malonate or the like. , isophorone diisocyanate and hexamethylene diisocyanate blocked isocyanate; melamine resin, n-butyl melamine resin, isobutylated melamine resin, butylated urea resin, butylated melamine urea co-condensation resin, An amide-based resin such as a benzoguanamine-based co-condensation resin; a thermosetting resin other than the above; an ultraviolet curable epoxy (meth) acrylate; and a (meth)acrylic acid in a bisphenol A type a resin obtained by an epoxy resin such as a phenol novolak type, a cresol novolac type, or an alicyclic type; and a polymer compound such as a diallyl phthalate resin, a phenoxy resin, an amine ester resin, or a fluororesin .

感光性樹脂組成物,可含有用來使環氧化合物(D)硬化的硬化劑。硬化劑,可含有例如選自由下述所組成之群組中的至少一種成分:咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰乙基-2-苯基咪唑、1-(2-氰乙基)-2-乙基-4-甲基咪唑等咪唑衍生物;雙氰胺、苯甲基二甲基胺、4-(二甲胺基)-N,N-二甲基苯甲基胺、4-甲氧基-N,N-二甲基苯甲基胺、4-甲基-N,N-二甲基苯甲基胺等胺化合物;己二醯肼、癸二醯肼等醯肼化合物;三苯基膦等磷化合物;酸酐;酚;硫醇;路易斯酸胺錯合物;及,鎓鹽。這些成分的市售品,例如有:四國化成股份有限公司製造的2MZ-A、2MZ-OK、2PHZ、2P4BHZ、2P4MHZ(皆為咪唑系化合物的商品名);San-Apro股份有限公司製造的U-CAT3503N、U-CAT3502T(皆為二甲基胺的封閉異氰酸酯化合物的商品名);DBU、DBN、U-CATSA102、U-CAT5002(皆為二環式脒化合物及其鹽)。 The photosensitive resin composition may contain a curing agent for curing the epoxy compound (D). The hardener may contain, for example, at least one component selected from the group consisting of imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenyl Imidazole derivatives such as imidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-(2-cyanoethyl)-2-ethyl-4-methylimidazole; dicyandiamide, benzene Methyl dimethylamine, 4-(dimethylamino)-N,N-dimethylbenzylamine, 4-methoxy-N,N-dimethylbenzylamine, 4-methyl -N,N-dimethylbenzylamine and other amine compounds; ruthenium compounds such as hexamethylenedifluoride and ruthenium dioxime; phosphorus compounds such as triphenylphosphine; acid anhydride; phenol; thiol; Lewis acid amine And; 鎓 salt. Commercial products of these components include, for example, 2MZ-A, 2MZ-OK, 2PHZ, 2P4BHZ, and 2P4MHZ manufactured by Shikoku Chemicals Co., Ltd. (all trade names of imidazole compounds); manufactured by San-Apro Co., Ltd. U-CAT3503N, U-CAT3502T (trade names of blocked isocyanate compounds of dimethylamine); DBU, DBN, U-CATSA102, U-CAT5002 (all of which are bicyclic guanidine compounds and salts thereof).

感光性樹脂組成物,可含有除了成分(E)以外的黏合性賦予劑。黏合性賦予劑,例如是:胍胺;甲基胍胺;苯基胍胺;以及,2,4-二胺基-6-甲基丙烯醯基氧乙基-S-三、2-乙烯基-4,6-二胺基-S-三、2-乙烯基-4,6-二胺基-S-三/異三聚氰酸加成物、2,4-二胺基-6-甲基丙烯醯基氧乙基-S-三/異三聚氰酸加成物等S-三衍生物。 The photosensitive resin composition may contain an adhesiveness imparting agent other than the component (E). The adhesion imparting agent is, for example, decylamine; methyl decylamine; phenyl decylamine; and 2,4-diamino-6-methylpropenyl oxyethyl-S-three 2-vinyl-4,6-diamino-S-three 2-vinyl-4,6-diamino-S-three /Iso-cyanuric acid adduct, 2,4-diamino-6-methylpropenyloxyethyl-S-three /Iso-cyanuric acid adducts, etc. S-three derivative.

感光性樹脂組成物,可含有選自由下述所組成之群組中的至少一種成分:硬化促進劑;著色劑;聚矽氧、丙烯酸酯等的共聚物;塗平劑(leveling agent);矽烷耦合劑等黏合性賦予劑;搖變劑(thixotropic agent);聚合抑制劑;防光暈劑;阻燃劑;消泡劑;抗氧化劑;界面活性劑;以及,高分子分散劑。 The photosensitive resin composition may contain at least one component selected from the group consisting of a curing accelerator; a colorant; a copolymer of polyfluorene oxide, acrylate, etc.; a leveling agent; Cohesive imparting agent such as a coupling agent; a thixotropic agent; a polymerization inhibitor; an antihalation agent; a flame retardant; an antifoaming agent; an antioxidant; a surfactant; and a polymer dispersing agent.

感光性樹脂組成物中的胺化合物的含量,以盡可能減少為佳。若以這樣的方式進行,則不易損及由感光性樹脂組成物的硬化物所構成之層的電絕緣性。尤其,相對於含羧基樹脂(A),胺化合物的量,較佳是6質量%以下,若是4質量%以下則進一步較佳。 The content of the amine compound in the photosensitive resin composition is preferably as small as possible. When it is carried out in this manner, the electrical insulation of the layer composed of the cured product of the photosensitive resin composition is not easily impaired. In particular, the amount of the amine compound is preferably 6% by mass or less based on the carboxyl group-containing resin (A), and more preferably 4% by mass or less.

可藉由下述方式來調製感光性樹脂組成物:調配如上所述之感光性樹脂組成物的原料,並藉由使用例如三輥研磨機(three-roll mill)、球磨機(ball mill)、砂磨機(sand mill)等之公知的揉合方法來進行揉合。當感光性樹脂組成物的原料中包含液狀成分、黏度較低的成分等時,可藉由下述方式來調配感光性樹脂組成物:首先將原料中除了液狀成分、黏度較低的成分以外的部分進行揉合,然後在獲得的混合物中,添加液狀成分、黏度較低的成分等並加以混合。 The photosensitive resin composition can be prepared by blending a raw material of the photosensitive resin composition as described above, and by using, for example, a three-roll mill, a ball mill, and a sand. A well-known kneading method such as a sand mill is used for kneading. When the raw material of the photosensitive resin composition contains a liquid component or a component having a low viscosity, the photosensitive resin composition can be prepared by first adding a component having a low viscosity in addition to a liquid component in the raw material. The other portions are kneaded, and then a liquid component, a component having a low viscosity, and the like are added to the obtained mixture and mixed.

考慮到保存穩定性等,可藉由將感光性樹脂組成物的一部分成分混合來調製第一劑,並藉由將其餘成分混合來調製第二劑。亦即,感光性樹脂組成物可具備第一劑與第二劑。此時,例如,可藉由將感光性樹脂組成物的 成分中的不飽和化合物(B)、一部分有機溶劑及熱硬化性成分,預先混合並加以分散來調製第一劑,並藉由將感光性樹脂組成物的成分中的其餘成分混合並加以分散來調製第二劑。此時,可適時將需要量之第一劑與第二劑混合來調製混合液,並使該混合液硬化來獲得硬化物。 In consideration of storage stability and the like, the first agent can be prepared by mixing a part of components of the photosensitive resin composition, and the second agent can be prepared by mixing the remaining components. That is, the photosensitive resin composition may have a first agent and a second agent. At this time, for example, by using a photosensitive resin composition The unsaturated compound (B), a part of the organic solvent, and the thermosetting component in the component are mixed and dispersed in advance to prepare a first agent, and the remaining components of the components of the photosensitive resin composition are mixed and dispersed. Modulate the second dose. At this time, the required amount of the first agent and the second agent may be mixed at appropriate to prepare a mixed solution, and the mixed solution is hardened to obtain a cured product.

本實施形態的感光性樹脂組成物,適合於用於印刷線路板的電絕緣性材料。尤其,感光性樹脂組成物,適合於抗焊劑層、抗鍍劑層、抗蝕刻劑層、層間絕緣層等電絕緣性層的材料。 The photosensitive resin composition of this embodiment is suitable for an electrically insulating material used for a printed wiring board. In particular, the photosensitive resin composition is suitable for a material such as a solder resist layer, a plating resist layer, an etch resist layer, or an interlayer insulating layer.

本實施形態的感光性樹脂組成物,較佳是具有如下所述之性質:即便是厚度25μm的皮膜,也能夠藉由碳酸鈉水溶液來進行顯影。此時,能夠藉由光刻法,由感光性樹脂組成物來製作充分厚的電絕緣性層,因此,能夠將感光性樹脂組成物廣泛地應用於製作印刷線路板中的層間絕緣層、抗焊劑層等。當然,亦能夠由感光性樹脂組成物來製作比厚度25μm更薄的電絕緣性層。 The photosensitive resin composition of the present embodiment preferably has a property of being developed by an aqueous solution of sodium carbonate even in the case of a film having a thickness of 25 μm. In this case, since a sufficiently thick electrically insulating layer can be produced from the photosensitive resin composition by photolithography, the photosensitive resin composition can be widely applied to the production of an interlayer insulating layer in a printed wiring board. Flux layer, etc. Of course, it is also possible to produce an electrically insulating layer thinner than the thickness of 25 μm from the photosensitive resin composition.

可藉由下述方法來確認厚度25μm的皮膜是否可藉由碳酸鈉水溶液來進行顯影。藉由在適當的基材上塗佈感光性樹脂組成物,來形成濕潤塗膜,然後以80℃對該濕潤塗膜加熱40分鐘,藉此形成厚度25μm的皮膜。在將負型光罩直接地緊貼於該皮膜上的狀態下,以500mJ/cm2的條件對皮膜照射紫外線,來實行曝光,該負型光罩具有使紫外線穿透之曝光部、及遮蔽紫外線之非曝光部。在曝光後,實行下述處理:先以0.2MPa的噴射 壓力來對皮膜噴射30℃的1%碳酸鈉(Na2CO3)水溶液90秒,再以0.2MPa的噴射壓力來噴射純水90秒。在該處理後觀察皮膜,結果皮膜中的對應於非曝光部的部分被去除且無法確認到殘渣時,則可判斷厚度25μm的皮膜可藉由碳酸鈉水溶液來進行顯影。 Whether or not the film having a thickness of 25 μm can be developed by an aqueous solution of sodium carbonate can be confirmed by the following method. The wet coating film was formed by coating a photosensitive resin composition on a suitable substrate, and then the wet coating film was heated at 80 ° C for 40 minutes to form a film having a thickness of 25 μm. Exposure was carried out by irradiating the film with ultraviolet rays at a condition of 500 mJ/cm 2 in a state in which the negative mask was directly adhered to the film, and the negative mask had an exposure portion for blocking ultraviolet rays and shielding. Non-exposure part of ultraviolet light. After the exposure, the following treatment was carried out: a 1% sodium carbonate (Na 2 CO 3 ) aqueous solution at 30 ° C was sprayed on the film at an injection pressure of 0.2 MPa for 90 seconds, and then pure water was sprayed at a spray pressure of 0.2 MPa for 90 seconds. . When the film was observed after the treatment, and the portion corresponding to the non-exposed portion in the film was removed and the residue could not be confirmed, it was confirmed that the film having a thickness of 25 μm could be developed by an aqueous solution of sodium carbonate.

以下,參照第1A圖至第1E圖,來說明印刷線路板的製造方法的一例,該印刷線路板具備由本實施形態的感光性樹脂組成物所形成之層間絕緣層。在本方法中,是藉由光刻法來在層間絕緣層上形成貫穿孔。 Hereinafter, an example of a method of manufacturing a printed wiring board having an interlayer insulating layer formed of the photosensitive resin composition of the present embodiment will be described with reference to FIGS. 1A to 1E. In the method, a through hole is formed on the interlayer insulating layer by photolithography.

首先,如第1A圖所示,準備芯材1。芯材1,具備例如至少一絕緣層2與至少一導體線路3。設置在芯材1的其中一面上的導體線路3,以下稱為第一導體線路3。如第1B圖所示,在芯材1的其中一面上,由感光性樹脂組成物形成皮膜4。皮膜4的形成方法,例如有塗佈法與乾膜法。 First, as shown in Fig. 1A, the core material 1 is prepared. The core material 1 is provided with, for example, at least one insulating layer 2 and at least one conductor line 3. The conductor line 3 provided on one side of the core material 1 is hereinafter referred to as a first conductor line 3. As shown in Fig. 1B, a film 4 is formed on one surface of the core material 1 from a photosensitive resin composition. The method of forming the film 4 includes, for example, a coating method and a dry film method.

在塗佈法中,例如在芯材1上塗佈感光性樹脂組成物,來形成濕潤薄膜。感光性樹脂組成物的塗佈方法,可選自公知的方法,例如由下述方法所組成之群組:浸漬法、噴霧法、旋轉塗佈法、輥塗佈法、簾幕式塗佈法(curtain coating)、及網版印刷法。繼而,為了使感光性樹脂組成物中的有機溶劑揮發,例如在60~120℃的範圍內的溫度下,使濕潤塗膜乾燥,藉此能夠獲得皮膜4。 In the coating method, for example, a photosensitive resin composition is applied onto the core material 1 to form a wet film. The coating method of the photosensitive resin composition may be selected from known methods, for example, a group consisting of a dipping method, a spray method, a spin coating method, a roll coating method, and a curtain coating method. (curtain coating), and screen printing. Then, in order to volatilize the organic solvent in the photosensitive resin composition, for example, the wet coating film is dried at a temperature in the range of 60 to 120 ° C, whereby the film 4 can be obtained.

在乾膜法中,首先在由聚酯等所作成的適當的支撐體上塗佈感光性樹脂組成物,再進行乾燥,藉此在支撐體上形成感光性樹脂組成物的乾燥物也就是乾膜。藉此,獲得一種積層體,其具備乾膜與用來支撐乾膜的支撐體。先將該積層體中的乾膜疊合於芯材1上,再對乾膜與芯材1施加壓力,繼而自乾膜將支撐體剝離,藉此自支撐體上將乾膜轉印至芯材1上。藉此,在芯材1上設置由乾膜所構成之皮膜4。 In the dry film method, first, a photosensitive resin composition is applied onto a suitable support made of polyester or the like, and dried, whereby a dried product of a photosensitive resin composition is formed on the support, that is, dried. membrane. Thereby, a laminated body having a dry film and a support for supporting the dry film is obtained. First, the dry film in the laminate is superposed on the core material 1, and then the dry film is pressed against the core material 1, and then the support is peeled off from the dry film, thereby transferring the dry film to the core from the support. On the material 1. Thereby, the film 4 composed of the dry film is provided on the core material 1.

如第1C圖所示,藉由對皮膜4進行曝光,來使皮膜4部分硬化。因此,例如先將負型光罩緊貼於皮膜4上,再對皮膜4照射紫外線。負型光罩具備使紫外線穿透之曝光部、及遮蔽紫外線之非曝光部,且非曝光部是設置在與貫穿孔10的位置一致的位置。負型光罩,例如是遮罩膜(mask film)或乾板(dry plate)等曝光用具(photo tool)。紫外線的光源,可選自由例如下述所組成之群組:化學燈(chemical lamp)、低壓水銀燈、中壓水銀燈、高壓水銀燈、超高壓水銀燈、氙氣燈、及金屬鹵素燈。 As shown in Fig. 1C, the film 4 is partially cured by exposure to the film 4. Therefore, for example, the negative mask is attached to the film 4, and the film 4 is irradiated with ultraviolet rays. The negative photomask includes an exposure portion that allows ultraviolet rays to pass through, and a non-exposure portion that blocks ultraviolet rays, and the non-exposed portion is provided at a position that coincides with the position of the through hole 10. The negative mask is, for example, a photo tool such as a mask film or a dry plate. The ultraviolet light source may be selected from the group consisting of a chemical lamp, a low pressure mercury lamp, a medium pressure mercury lamp, a high pressure mercury lamp, an ultra high pressure mercury lamp, a xenon lamp, and a metal halide lamp.

再者,曝光方法,可以是使用負型光罩之方法以外的方法。例如,可藉由直接描繪法來對皮膜4進行曝光,該直接描繪法是將自光源發出的紫外線僅照射在皮膜4的所欲曝光的部分。適用於直接描繪法的光源,可選自由例如下述所組成之群組:高壓水銀燈、超高壓水銀燈、 金屬鹵素燈、g線(436nm)、h線(405nm)、I線(365nm);以及,g線、h線及I線之中的2種以上的組合。 Further, the exposure method may be a method other than the method using a negative mask. For example, the film 4 can be exposed by a direct drawing method in which ultraviolet rays emitted from a light source are irradiated only on the portion of the film 4 to be exposed. The light source suitable for the direct drawing method can be selected, for example, as a group consisting of a high pressure mercury lamp, an ultra high pressure mercury lamp, Metal halide lamp, g line (436 nm), h line (405 nm), I line (365 nm); and a combination of two or more of the g line, the h line, and the I line.

又,在乾膜法中,可先將該積層體的乾膜疊合於芯材1上,然後在不剝離支撐體的情形下,透過支撐體來對由乾膜所構成之皮膜4照射紫外線,藉此對皮膜4進行曝光,繼而在顯影處理前自皮膜4剝離支撐體。 Further, in the dry film method, the dry film of the laminate may be laminated on the core material 1, and then the film 4 composed of the dry film may be irradiated with ultraviolet rays through the support without peeling off the support. Thereby, the film 4 is exposed, and then the support is peeled off from the film 4 before the development process.

繼而,藉由對皮膜4實施顯影處理,來去除第1C圖所示的皮膜4的未曝光部分5,藉此,以第1D圖所示的方式,來在要形成貫穿孔10的位置上設置孔6。在顯影處理中,可視感光性樹脂組成物的組成而使用適當的顯影液。顯影液,例如是鹼性水溶液或有機胺,該鹼性水溶液含有鹼金屬鹽和鹼金屬氫氧化物之中的至少其中一者。鹼性水溶液,更具體而言,含有例如選自由下述所組成之群組中的至少一種成分:碳酸鈉、碳酸鉀、碳酸銨、碳酸氫鈉、碳酸氫鉀、碳酸氫銨、氫氧化鈉、氫氧化鉀、氫氧化銨、氫氧化四甲基銨、及氫氧化鋰。鹼性水溶液中的溶劑,可僅為水,亦可為水與低級醇類等親水性有機溶劑的混合物。有機胺,可含有例如選自由下述所組成之群組中的至少一種成分:單乙醇胺、二乙醇胺、三乙醇胺、單異丙醇胺、二異丙醇胺、及三異丙醇胺。 Then, the unexposed portion 5 of the film 4 shown in FIG. 1C is removed by performing development processing on the film 4, whereby the through hole 10 is formed at a position as shown in FIG. 1D. Hole 6. In the development treatment, an appropriate developer can be used depending on the composition of the photosensitive resin composition. The developing solution is, for example, an alkaline aqueous solution or an organic amine containing at least one of an alkali metal salt and an alkali metal hydroxide. The alkaline aqueous solution, more specifically, contains, for example, at least one component selected from the group consisting of sodium carbonate, potassium carbonate, ammonium carbonate, sodium hydrogencarbonate, potassium hydrogencarbonate, ammonium hydrogencarbonate, sodium hydroxide , potassium hydroxide, ammonium hydroxide, tetramethylammonium hydroxide, and lithium hydroxide. The solvent in the alkaline aqueous solution may be only water or a mixture of water and a hydrophilic organic solvent such as a lower alcohol. The organic amine may contain, for example, at least one component selected from the group consisting of monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine, and triisopropanolamine.

顯影液,較佳是含有鹼金屬鹽和鹼金屬氫氧化物中的至少其中一者之鹼性水溶液,特佳是碳酸鈉水溶液。此時,能夠達成作業環境的提升和廢棄物處理的負擔減少。 The developer is preferably an aqueous alkaline solution containing at least one of an alkali metal salt and an alkali metal hydroxide, and particularly preferably an aqueous sodium carbonate solution. At this time, it is possible to achieve an increase in the working environment and a reduction in the burden of waste disposal.

繼而,藉由對皮膜4進行加熱來使其硬化。加熱的條件,例如,加熱溫度是在120~200℃的範圍內,加熱時間是在30~120分鐘的範圍內。若以這樣的方式進行來使皮膜4進行熱硬化,則能夠提升層間絕緣層7的強度、硬度、耐化學藥品性等性能。 Then, the film 4 is hardened by heating it. The heating conditions, for example, the heating temperature is in the range of 120 to 200 ° C, and the heating time is in the range of 30 to 120 minutes. When the film 4 is thermally cured in this manner, the properties such as strength, hardness, and chemical resistance of the interlayer insulating layer 7 can be improved.

可視需要而在加熱前或加熱後、或在加熱前與加熱後,對皮膜4進一步照射紫外線。此時,能夠使皮膜4的光硬化進一步進行。 The film 4 is further irradiated with ultraviolet rays before or after heating, or before and after heating, as needed. At this time, the photocuring of the film 4 can be further performed.

根據以上所述,能夠在芯材1上設置層間絕緣層7,該層間絕緣層7是由感光性樹脂組成物的硬化物所構成。可藉由加成法等公知的方法,來在該層間絕緣層7上設置第二導體線路8和穿孔鍍覆9。藉此,如第1E圖所示,能夠獲得印刷線路板11,其具備:第一導體線路3;第二導體線路8;層間絕緣層7,其介於第一導體線路3與第二導體線路8之間;以及,貫穿孔10,其將第一導體線路3與第二導體線路8進行電性連接。再者,在第1E圖中,穿孔鍍覆9具有將孔6的內面被覆之筒狀的形狀,但是亦可在孔6的內側整體填充有穿孔鍍覆9。 According to the above, the interlayer insulating layer 7 can be provided on the core material 1, and the interlayer insulating layer 7 is composed of a cured product of a photosensitive resin composition. The second conductor line 8 and the perforated plating 9 may be provided on the interlayer insulating layer 7 by a known method such as an additive method. Thereby, as shown in FIG. 1E, a printed wiring board 11 having the first conductor line 3, the second conductor line 8, and the interlayer insulating layer 7 interposed between the first conductor line 3 and the second conductor line can be obtained. 8 , and a through hole 10 electrically connecting the first conductor line 3 and the second conductor line 8 . Further, in the first E-figure, the perforated plating 9 has a tubular shape in which the inner surface of the hole 6 is covered, but the perforated plating 9 may be entirely filled inside the hole 6.

說明製造印刷線路板的方法的一例,該印刷線路板具備由本實施形態的感光性樹脂組成物所形成之抗焊劑層。 An example of a method of manufacturing a printed wiring board comprising a solder resist layer formed of the photosensitive resin composition of the present embodiment will be described.

首先,準備芯材。芯材,具備例如至少一絕緣層與至少一導體線路。在芯材的設置有導體線路的面上,由感光性樹脂組成物形成皮膜。作為皮膜的形成方法,可 列舉塗佈法與乾膜法。作為塗佈法與乾膜法,可採用與上述形成層間絕緣層時相同的方法。藉由對皮膜進行曝光來使部分進行硬化。曝光方法,亦可採用與上述形成層間絕緣層時相同的方法。繼而,藉由對皮膜實施顯影處理,來去除皮膜的未曝光部分,藉此,皮膜的曝光後的部分殘留於芯材上。繼而,藉由對芯材上的皮膜進行加熱,來使其進行熱硬化。顯影方法和加熱方法,亦可採用與上述形成層間絕緣層時相同的方法。在加熱前或加熱後、或在加熱前與加熱後,對皮膜進一步照射紫外線。此時,能夠使皮膜的光硬化進一步進行。 First, prepare the core material. The core material is provided with, for example, at least one insulating layer and at least one conductor line. A film is formed from a photosensitive resin composition on a surface of the core material on which the conductor line is provided. As a method of forming a film, The coating method and the dry film method are listed. As the coating method and the dry film method, the same method as in the case of forming the interlayer insulating layer described above can be employed. The portion is hardened by exposing the film. The exposure method may be the same as the above-described method of forming the interlayer insulating layer. Then, the unexposed portion of the film is removed by subjecting the film to development treatment, whereby the exposed portion of the film remains on the core material. Then, the film on the core material is thermally hardened by heating it. The developing method and the heating method may be the same as those in the case of forming the interlayer insulating layer described above. The film is further irradiated with ultraviolet rays before or after heating, or before and after heating. At this time, the photocuring of the film can be further performed.

根據以上所述,能夠在芯材上設置抗焊劑層,該抗焊劑層是由感光性樹脂組成物的硬化物所構成。藉此,能夠獲得一種印刷線路板,其具備:芯材,其具備絕緣層與其上的導體線路;以及,抗焊劑層,其部分地包覆了芯材的設置有導體線路的面。 According to the above, the solder resist layer can be provided on the core material, and the solder resist layer is composed of a cured product of the photosensitive resin composition. Thereby, it is possible to obtain a printed wiring board comprising: a core material having an insulating layer and a conductor line thereon; and a solder resist layer partially covering the surface of the core material on which the conductor line is provided.

[實施例] [Examples]

(1-1)合成例A-1~A-24和B-1~B-6的合成 (1-1) Synthesis of Synthesis Examples A-1 to A-24 and B-1 to B-6

以下述方式進行,來調配合成例A-1~A-24和B-1~B-6。 The synthesis examples A-1 to A-24 and B-1 to B-6 were prepared in the following manner.

在安裝有回流冷卻器、溫度計、空氣吹入管及攪拌機之四頸燒瓶內,添加表1~3中的「第一反應」欄中所示的原料成分,並在有氣泡產生的狀態下攪拌這些原料成分,藉此調配混合物。於四頸燒瓶內,在有氣泡產生的狀 態下一面攪拌該混合物,一面以「第一反應」欄的「反應條件」欄中所示的反應溫度和反應時間來進行加熱。藉此,調配中間體的溶液。 In a four-necked flask equipped with a reflux condenser, a thermometer, an air blowing tube, and a stirrer, the raw material components shown in the "first reaction" column in Tables 1 to 3 are added, and these are stirred in the presence of bubbles. Raw material ingredients, thereby blending the mixture. In a four-necked flask, in the presence of bubbles While stirring the mixture, the mixture was heated at the reaction temperature and reaction time shown in the "Reaction conditions" column of the "First reaction" column. Thereby, a solution of the intermediate is formulated.

繼而,在四頸燒瓶內的中間體的溶液中,投入表1~3的「第二反應」欄中所示的原料成分,並在有氣泡產生的狀態下一面攪拌四頸燒瓶內的溶液,一面以「第二反應」欄的「反應條件(1)」欄中所示的反應溫度和反應時間來進行加熱。繼而,除了合成例A-17、A-18、B-1、B-4、B-5及B-6以外,其餘則在有氣泡產生的狀態下一面攪拌四頸燒瓶內的溶液,一面以「第二反應」欄的「反應條件(2)」欄中所示的反應溫度和反應時間來進行加熱。藉此,獲得含羧基樹脂的65質量%溶液(其中,合成例B-4則是57%溶液)。含羧基樹脂的重量平均分子量、多分散性及酸價,如表1~3所示。成分間的莫耳比亦表示於表1~3中。 Then, the raw material components shown in the "second reaction" column of Tables 1 to 3 were placed in the solution of the intermediate in the four-necked flask, and the solution in the four-necked flask was stirred while the bubbles were generated. The heating was carried out by the reaction temperature and the reaction time shown in the column of "Reaction conditions (1)" in the "second reaction" column. Then, in addition to the synthesis examples A-17, A-18, B-1, B-4, B-5, and B-6, the solution in the four-necked flask was stirred while the bubbles were generated. The reaction temperature and the reaction time shown in the column of "reaction conditions (2)" in the "second reaction" column are heated. Thereby, a 65 mass% solution of a carboxyl group-containing resin was obtained (wherein, the synthesis example B-4 was a 57% solution). The weight average molecular weight, polydispersity and acid value of the carboxyl group-containing resin are shown in Tables 1 to 3. The molar ratio between the components is also shown in Tables 1-3.

(1-2)合成例A-25的合成 (1-2) Synthesis of Synthesis Example A-25

在安裝有回流冷卻器、溫度計、空氣吹入管及攪拌機之四頸燒瓶內,添加250質量份的下述環氧化合物1、72質量份的丙烯酸、60質量份的丙二醇單甲基醚乙酸酯、140質量份的二乙二醇單乙基醚乙酸酯、0.2質量份的甲基氫醌、1.5質量份的三苯基膦,並在有氣泡產生的狀態攪拌這些原料成分,藉此調配混合物。於四頸燒瓶內,在有氣泡產生的狀態下一面攪拌該混合物,一面以115℃進行加熱12小時。藉此,調配中間體的溶液。 250 parts by mass of the following epoxy compound 1, 72 parts by mass of acrylic acid, and 60 parts by mass of propylene glycol monomethyl ether acetate were placed in a four-necked flask equipped with a reflux condenser, a thermometer, an air blowing tube, and a stirrer. 140 parts by mass of diethylene glycol monoethyl ether acetate, 0.2 parts by mass of methylhydroquinone, 1.5 parts by mass of triphenylphosphine, and agitating these raw materials in a state in which bubbles are generated, thereby blending mixture. The mixture was stirred at 115 ° C for 12 hours while stirring the mixture in a four-necked flask. Thereby, a solution of the intermediate is formulated.

繼而,在四頸燒瓶內的中間體的溶液中,投入58.8質量份的3,3’,4,4’-聯苯四甲酸二酐、20質量份的丙二醇單甲基醚乙酸酯,並在有氣泡產生的狀態下一面攪拌該等,一面以115℃進行加熱3小時。 Then, 58.8 parts by mass of 3,3',4,4'-biphenyltetracarboxylic dianhydride and 20 parts by mass of propylene glycol monomethyl ether acetate were charged into the solution of the intermediate in the four-necked flask, and The mixture was stirred at 115 ° C for 3 hours while stirring the bubbles.

繼而,在四頸燒瓶內的中間體的溶液中,投入60.8質量份的1,2,3,6-四氫鄰苯二甲酸酐、18.7質量份的丙二醇單甲基醚乙酸酯,並在有氣泡產生的狀態下一面攪拌這些原料成分,一面以115℃進行加熱3小時,繼而在有氣泡產生的狀態下一面攪拌這些原料成分,一面以80℃進行加熱1小時。 Then, 60.8 parts by mass of 1,2,3,6-tetrahydrophthalic anhydride and 18.7 parts by mass of propylene glycol monomethyl ether acetate were charged into the solution of the intermediate in the four-necked flask, and In the state in which the bubbles were generated, the raw material components were stirred while heating at 115 ° C for 3 hours, and then the raw material components were stirred while being bubbled, and the mixture was heated at 80 ° C for 1 hour.

藉此,獲得含羧基樹脂的65質量%溶液。該含羧基樹脂的重量平均分子量是2758,酸價是105,多分散性是1.76。 Thereby, a 65 mass% solution of the carboxyl group-containing resin was obtained. The weight average molecular weight of the carboxyl group-containing resin was 2758, the acid value was 105, and the polydispersity was 1.76.

關於由合成例A-1所獲得的含羧基樹脂,將藉由膠體滲透層析法來獲得的GPC溶析曲線表示於第2圖。在該GPC溶析曲線中,溶析時間27.363的波峰面積,是對應於GPC溶析曲線下的分子量205~1617的區域的面積,且該波峰面積的比例是46.5229%。溶析時間26.017的波峰面積,是對應於GPC溶析曲線下的分子量1747~3341的區域的面積,且該波峰面積的比例是30.8301%。溶析時間25.471的波峰面積,是對應於GPC溶析曲線下的分子量3524~11576的區域的面積,且該波峰面積的比例是22.5309%。由該GPC溶析 曲線求出區域(AR1)的面積與區域(AR2)的面積的面積比,結果為1:1.2。 Regarding the carboxyl group-containing resin obtained in Synthesis Example A-1, a GPC elution curve obtained by colloidal permeation chromatography is shown in Fig. 2 . In the GPC elution curve, the peak area of the elution time of 27.363 is the area corresponding to the molecular weight of 205 to 1617 under the GPC elution curve, and the ratio of the peak area is 46.5229%. The peak area of the elution time of 26.017 is the area corresponding to the molecular weight of 1747 to 3341 under the GPC elution curve, and the ratio of the peak area is 30.8301%. The peak area of the elution time of 25.471 is the area corresponding to the molecular weight of 3524 to 11576 under the GPC elution curve, and the ratio of the peak area is 22.530%. Solubilized by the GPC The area ratio of the area of the region (AR1) to the area of the region (AR2) was obtained, and the result was 1:1.2.

關於合成例B-1、B-2、B-3及B-4,求出區域(AR1)的面積與區域(AR2)的面積的面積比,結果分別為1:0、1:2.8、1:1及1:3.6。 With respect to Synthesis Examples B-1, B-2, B-3, and B-4, the area ratio of the area of the region (AR1) to the area of the region (AR2) was obtained, and the results were 1:0, 1:2.8, and 1, respectively. :1 and 1:3.6.

再者,表1~3中的(a1)欄中所示的成分的詳細內容如下所述。 The details of the components shown in the column (a1) in Tables 1 to 3 are as follows.

‧環氧化合物1:環氧當量250g/eq的雙酚茀型環氧化合物,其以式(7)來表示,且式(7)中的R1~R8皆為氫。 ‧Epoxy compound 1: A bisphenol fluorene type epoxy compound having an epoxy equivalent of 250 g/eq, which is represented by the formula (7), and all of R 1 to R 8 in the formula (7) are hydrogen.

‧環氧化合物2:環氧當量279g/eq的雙酚茀型環氧化合物,其以式(7)來表示,且式(7)中的R1和R5皆為甲基,R2~R4及R6~R8皆為氫。 ‧Epoxy compound 2: a bisphenol fluorene type epoxy compound having an epoxy equivalent of 279 g/eq, which is represented by the formula (7), and R 1 and R 5 in the formula (7) are each a methyl group, R 2 ~ R 4 and R 6 to R 8 are all hydrogen.

‧環氧化合物3:環氧當量650g/eq的雙酚茀型環氧化合物,其以式(7)來表示,且式(7)中的R1~R8皆為氫,R2~R4及R6~R8皆為氫。 ‧Epoxy compound 3: a bisphenol fluorene type epoxy compound having an epoxy equivalent of 650 g/eq, which is represented by the formula (7), and R 1 to R 8 in the formula (7) are all hydrogen, R 2 to R 4 and R 6 to R 8 are all hydrogen.

‧甲酚酚醛清漆型環氧樹脂:環氧當量203g/eq的甲酚酚醛清漆型環氧樹脂。 ‧ Cresol novolac type epoxy resin: cresol novolac type epoxy resin having an epoxy equivalent of 203 g/eq.

(2)調配感光性樹脂組成物 (2) Dispensing a photosensitive resin composition

以下述方式進行,來調配實施例1~97和比較例1~6。 Examples 1 to 97 and Comparative Examples 1 to 6 were prepared in the following manner.

先以三輥研磨機來揉合後述表4~表14的「組成」欄中所示的成分,再於燒瓶內攪拌並混合這些成分,藉此獲得感光性樹脂組成物。再者,成分的詳細內容如下所述。 The components shown in the "composition" column of Tables 4 to 14 described later were blended in a three-roll mill, and the components were stirred and mixed in a flask to obtain a photosensitive resin composition. Furthermore, the details of the components are as follows.

‧不飽和化合物A:三羥甲基丙烷三丙烯酸酯。 ‧ Unsaturated Compound A: Trimethylolpropane triacrylate.

‧不飽和化合物B:三羥甲基丙烷三甲基丙烯酸酯。 ‧ Unsaturated Compound B: Trimethylolpropane trimethacrylate.

‧不飽和化合物C:二季戊四醇六丙烯酸酯,日本化藥股份有限公司製造,商品型號KAYARAD DPHA。 ‧Unsaturated Compound C: Dipentaerythritol hexaacrylate, manufactured by Nippon Kayaku Co., Ltd., product model KAYARAD DPHA.

‧不飽和化合物D:二官能脂肪族胺酯丙烯酸酯,DAICEL-ALLNEX LTD.製造,商品型號EBECRYL 8402。 ‧ Unsaturated Compound D: Difunctional aliphatic amine ester acrylate, manufactured by DAICEL-ALLNEX LTD., product model EBECRYL 8402.

‧不飽和化合物E:ε-己內酯改質二季戊四醇六丙烯酸酯,日本化藥股份有限公司製造,商品型號DPCA-60。 ‧ Unsaturated compound E: ε-caprolactone modified dipentaerythritol hexaacrylate, manufactured by Nippon Kayaku Co., Ltd., product model DPCA-60.

‧不飽和化合物F:三環癸烷二甲醇二丙烯酸酯,新中村化學工業股份有限公司製造,商品型號A-DCP。 ‧ Unsaturated compound F: Tricyclodecane dimethanol diacrylate, manufactured by Shin-Nakamura Chemical Co., Ltd., product type A-DCP.

‧光聚合起始劑A:2,4,6-三甲基苯甲醯基-二苯基-氧化膦,巴斯夫公司製造,商品型號Irgacure TPO。 ‧Photopolymerization initiator A: 2,4,6-trimethylbenzylidene-diphenyl-phosphine oxide, manufactured by BASF Corporation, trade name Irgacure TPO.

‧光聚合起始劑B:1-羥基-環己基-苯基-酮,巴斯夫公司製造,商品型號Irgacure 184。 ‧Photopolymerization initiator B: 1-hydroxy-cyclohexyl-phenyl-ketone, manufactured by BASF Corporation, trade name Irgacure 184.

‧光聚合起始劑C:4,4’-雙(二乙基胺基)二苯基酮。 ‧ Photopolymerization initiator C: 4,4'-bis(diethylamino)diphenyl ketone.

‧光聚合起始劑D:2-甲基-1-(4-甲基硫苯基)-2-(N-嗎啉基)丙-1-酮,巴斯夫公司製造,商品型號Irgacure 907。 ‧Photopolymerization initiator D: 2-methyl-1-(4-methylthiophenyl)-2-(N-morpholinyl)propan-1-one, manufactured by BASF Corporation, trade name Irgacure 907.

‧光聚合起始劑E:2,4-二乙基噻噸-9-酮。 ‧Photopolymerization initiator E: 2,4-diethylthioxan-9-one.

‧光聚合起始劑F:雙(2,4,6-三甲基苯甲醯基)苯基氧化膦,巴斯夫公司製造,商品型號Irgacure 819。 ‧Photopolymerization initiator F: bis(2,4,6-trimethylbenzylidene)phenylphosphine oxide, manufactured by BASF Corporation, trade name Irgacure 819.

‧光聚合起始劑G:2-羥基-2-甲基-1-苯基-丙-1-酮,巴斯夫公司製造,商品型號Irgacure 1173。 ‧Photopolymerization initiator G: 2-hydroxy-2-methyl-1-phenyl-propan-1-one, manufactured by BASF Corporation, product model Irgacure 1173.

‧結晶性環氧樹脂A:聯苯型結晶性環氧樹脂,三菱化學股份有限公司製造,商品型號YX4000,熔點105℃,環氧當量187g/eq。 ‧ Crystalline Epoxy Resin A: Biphenyl type crystalline epoxy resin, manufactured by Mitsubishi Chemical Corporation, product type YX4000, melting point 105 ° C, epoxy equivalent 187 g / eq.

‧非晶性環氧樹脂B:含長鏈碳鏈之雙酚A型環氧樹脂,DIC股份有限公司製造,商品型號EPICLON EXA-4816,液狀樹脂,環氧當量410g/eq。 ‧ Amorphous epoxy resin B: bisphenol A type epoxy resin containing a long chain carbon chain, manufactured by DIC Corporation, product model EPICLON EXA-4816, liquid resin, epoxy equivalent 410 g / eq.

‧非晶性環氧樹脂B的溶液:以溶劑二乙二醇單乙基醚乙酸酯來將非晶性環氧樹脂B溶解成固體成分90%後的溶液。 ‧ A solution of amorphous epoxy resin B: A solution obtained by dissolving amorphous epoxy resin B in a solvent of diethylene glycol monoethyl ether acetate to a solid content of 90%.

‧結晶性環氧樹脂C:雙酚型結晶性環氧樹脂,新日鐵住金化學股份有限公司製造,商品型號YSLV-80XY,熔點75~85℃,環氧當量192g/eq。 ‧ Crystalline Epoxy Resin C: Bisphenol type crystalline epoxy resin, manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd., product model YSLV-80XY, melting point 75-85 ° C, epoxy equivalent 192 g/eq.

‧非晶性環氧樹脂D的溶液:以溶劑二乙二醇單乙基醚乙酸酯來將甲酚酚醛清漆型環氧樹脂(DIC股份有限公司製造,商品型號EPICLON N-695,軟化點90~100℃,環氧當量214g/eq)溶解成固體成分75%後的溶液。 ‧A solution of amorphous epoxy resin D: a cresol novolac type epoxy resin (manufactured by DIC Co., Ltd., product model EPICLON N-695, softening point) with solvent diethylene glycol monoethyl ether acetate A solution obtained by dissolving in a solid content of 75% at 90 to 100 ° C and an epoxy equivalent of 214 g/eq.

‧結晶性環氧樹脂E:1,3,5-參(2,3-環氧丙基)-1,3,5-三-2,4,6(1H,3H,5H)-三酮(高熔點型),熔點150~158℃,環氧當量99g/eq。 ‧Crystalline epoxy resin E: 1,3,5-parade (2,3-epoxypropyl)-1,3,5-three -2,4,6(1H,3H,5H)-trione (high melting point), melting point 150-158 ° C, epoxy equivalent 99 g / eq.

‧結晶性環氧樹脂F:氫醌型結晶性環氧樹脂,新日鐵化學股份有限公司製造的商品型號YDC-1312,熔點138~145℃,環氧當量176g/eq。 ‧ Crystalline Epoxy Resin F: Hydroquinone-type crystalline epoxy resin, manufactured by Nippon Steel Chemical Co., Ltd., model number YDC-1312, melting point 138-145 ° C, epoxy equivalent 176 g / eq.

‧結晶性環氧樹脂G:二苯基醚型結晶性環氧樹脂,新日鐵住金化學股份有限公司製造的商品型號YSLV-80DE,熔點80~90℃,環氧當量163g/eq。 ‧ Crystalline epoxy resin G: Diphenyl ether type crystalline epoxy resin, product model YSLV-80DE manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd., melting point 80 to 90 ° C, epoxy equivalent 163 g / eq.

‧非晶性環氧樹脂H:橡膠狀核殼聚合物改質雙酚A型環氧樹脂,KANEKA CORPORATION製造,商品型號MX-120,液狀樹脂,環氧當量243g/eq。 ‧ Amorphous epoxy resin H: Rubber-like core-shell polymer modified bisphenol A epoxy resin, manufactured by KANEKA CORPORATION, product model MX-120, liquid resin, epoxy equivalent 243 g/eq.

‧非晶性環氧樹脂I的溶液:以固體成分為80%的方式,將非晶性聯苯酚醛清漆型環氧樹脂(日本化藥股份有限公司製造的商品名NC-3000,軟化點53~63℃,環氧當量280g/eq)溶於二乙二醇單乙基醚乙酸酯而得的溶液(以固體成分80%來換算的環氧當量是350g/eq)。 ‧A solution of amorphous epoxy resin I: Amorphous biphenyl aldehyde varnish type epoxy resin (trade name NC-3000, manufactured by Nippon Kayaku Co., Ltd., softening point 53) is 80% solid content ~63 ° C, epoxy equivalent: 280 g / eq) A solution obtained by dissolving diethylene glycol monoethyl ether acetate (the epoxy equivalent in terms of 80% solid content is 350 g / eq).

‧非晶性環氧樹脂J:含橡膠粒子之雙酚F型環氧樹脂,KANEKA CORPORATION製造,商品型號Kane Ace MX-130。 ‧ Amorphous epoxy resin J: bisphenol F-type epoxy resin containing rubber particles, manufactured by KANEKA CORPORATION, model number Kane Ace MX-130.

‧三聚氰胺:日產化學工業股份有限公司製造,三聚氰胺微粉。 ‧ Melamine: Made by Nissan Chemical Industry Co., Ltd., melamine micropowder.

‧三聚氰胺分散清漆:日產化學工業股份有限公司製造,三聚氰胺微粉的分散清漆。以珠磨機(bead mill)將1.5份的三聚氰胺微粉、3.5份的不飽和化合物三羥甲基丙烷三丙烯酸酯進行分散而得。 ‧ Melamine dispersion varnish: Dispersed varnish made of Nissan Chemical Industry Co., Ltd., melamine micropowder. 1.5 parts of melamine fine powder and 3.5 parts of unsaturated compound trimethylolpropane triacrylate were dispersed by a bead mill.

‧三聚氰胺衍生物:三聚氰胺與1,2,3,6-四氫鄰苯二酸酐之反應物也就是三聚氰胺-四氫鄰苯二甲酸鹽。 ‧ Melamine Derivative: The reaction of melamine with 1,2,3,6-tetrahydrophthalic anhydride is also melamine-tetrahydrophthalate.

‧抗氧化劑:受阻酚系抗氧化劑,巴斯夫公司製造,商品型號IRGANOX 1010。 ‧Antioxidant: A hindered phenolic antioxidant, manufactured by BASF, under the trade designation IRGANOX 1010.

‧藍色顏料:酞花青藍(phthalocyanine blue)。 ‧ Blue pigment: phthalocyanine blue.

‧黃色顏料:1,1’-[(6-苯基-1,3,5-三-2,4-二基)二亞胺基]雙(9,10-蒽二酮)。 ‧Yellow pigment: 1,1'-[(6-phenyl-1,3,5-three -2,4-diyl)diimido]bis(9,10-nonanedione).

‧硫酸鋇:堺化學工業股份有限公司製造,商品型號BARIACE B31。 ‧ Barium sulfate: manufactured by 堺Chemical Industries Co., Ltd., product model BARIACE B31.

‧滑石:日本滑石公司製造,商品型號SG-2000。 ‧ Talc: Made by Japan Talc, product model SG-2000.

‧膨潤土:有機膨潤土,Rheox,Inc.製造,商品型號BENTONE SD-2。 ‧ Bentonite: Organic bentonite, manufactured by Rheox, Inc., model number BENTONE SD-2.

‧消泡劑:信越矽利光股份有限公司製造,商品型號KS-66。 ‧ Defoamer: manufactured by Shin-Etsu Lee Co., Ltd., product model KS-66.

‧界面活性劑A:DIC股份有限公司製造,商品型號MEGAFACE F-477。 ‧ Surfactant A: Manufactured by DIC Corporation, product model MEGAFACE F-477.

‧界面活性劑B:DIC股份有限公司製造,商品型號MEGAFACE F-556。 ‧ Surfactant B: manufactured by DIC Corporation, product model MEGAFACE F-556.

‧流變調節劑:BYK Japan KK製造,商品型號BYK-430。 ‧ Rheology regulator: manufactured by BYK Japan KK, product model BYK-430.

‧溶劑A:二乙二醇單乙基醚乙酸酯。 ‧ Solvent A: Diethylene glycol monoethyl ether acetate.

‧溶劑B:甲基乙基酮。 ‧ Solvent B: methyl ethyl ketone.

(3)製作測試片 (3) Making test films

除了實施例17、35、56、88及97以外的實施例和比較例,以下述方式進行來製作測試片。 Except for the examples and comparative examples other than Examples 17, 35, 56, 88 and 97, test pieces were produced in the following manner.

準備具備厚度35μm銅箔之玻璃環氧覆銅積層板(FR-4型)。在該玻璃環氧覆銅積層板上,以減去法來形成作為導體線路的梳型電極,藉此獲得芯材,該梳型 電極的線寬/間距為50μm/50μm。若為實施例90~97和比較例5~6時,以蝕刻劑(MEC Co.,Ltd.製造的有機酸系蝕刻劑,商品型號CZ-8100),來溶解並去除芯材的導體線路的厚度1μm左右的表層部分,藉此對導體線路進行粗糙化。在該芯材的其中一面的整個面上,以網版印刷法來塗佈感光性樹脂組成物,藉此形成濕潤塗膜。以80℃對該濕潤塗膜加熱40分鐘(實施例90~96和比較例5~6則為30分鐘),來進行預備乾燥,藉此形成膜厚25μm的皮膜。在將具有非曝光部之負型光罩直接與該皮膜接觸的狀態下,以500mJ/cm2的條件對皮膜照射紫外線來實行曝光,該非曝光部具有包含直徑50μm的圓形形狀(若為實施例27~36和62~83時,則是50μm和70μm的圓形形狀)之圖案。對曝光後的皮膜實施顯影處理。在顯影處理時,以0.2MPa的噴射壓力對皮膜噴射30℃的1%碳酸鈉水溶液90秒。繼而,藉由以0.2MPa的噴射壓力對皮膜噴射純水90秒,來清洗皮膜。藉此,去除皮膜的未曝光部分,並形成孔。繼而,若為實施例1~16、18~26、比較例1~4、實施例37~55、57~61、84~87、89~96及比較例5、6時,先以1000mJ/cm2的條件來對皮膜照射紫外線,再以160℃進行加熱60分鐘。然而,若為不含有顏料之實施例16和87時,則將曝光時的紫外線設為300mJ/cm2的條件。若為實施例27~34、36及62~83時,則先以160℃對皮膜加熱60分鐘,再以1000mJ/cm2的條件來對皮膜照射紫外線。藉此,在芯 材上形成由感光性樹脂組成物所構成之層。藉此獲得測試片。 A glass epoxy copper clad laminate (FR-4 type) having a copper foil having a thickness of 35 μm was prepared. On the glass epoxy-clad laminate, a comb-shaped electrode as a conductor line was formed by subtraction, whereby a core material having a line width/pitch of 50 μm/50 μm was obtained. In the case of Examples 90 to 97 and Comparative Examples 5 to 6, an etchant (organic acid-based etchant manufactured by MEC Co., Ltd., product model CZ-8100) was used to dissolve and remove the conductor wiring of the core material. The surface layer portion having a thickness of about 1 μm is used to roughen the conductor line. A photosensitive resin composition is applied onto the entire surface of one side of the core material by a screen printing method to form a wet coating film. The wet coating film was heated at 80 ° C for 40 minutes (Examples 90 to 96 and Comparative Examples 5 to 6 were 30 minutes), and preliminary drying was carried out to form a film having a film thickness of 25 μm. In a state where the negative mask having the non-exposed portion is directly in contact with the film, the film is irradiated with ultraviolet rays under conditions of 500 mJ/cm 2 to perform exposure, and the non-exposed portion has a circular shape including a diameter of 50 μm (if implemented) In the cases of Examples 27 to 36 and 62 to 83, the patterns are circular shapes of 50 μm and 70 μm. The developed film is subjected to development treatment. At the time of development processing, a 1% sodium carbonate aqueous solution of 30 ° C was sprayed on the film at an ejection pressure of 0.2 MPa for 90 seconds. Then, the film was washed by spraying pure water on the film at an ejection pressure of 0.2 MPa for 90 seconds. Thereby, the unexposed portion of the film is removed and a hole is formed. Then, in the case of Examples 1 to 16, 18 to 26, Comparative Examples 1 to 4, Examples 37 to 55, 57 to 61, 84 to 87, 89 to 96, and Comparative Examples 5 and 6, the first was 1000 mJ/cm. The film was irradiated with ultraviolet rays under the conditions of 2 , and then heated at 160 ° C for 60 minutes. However, in the case of Examples 16 and 87 which did not contain a pigment, the ultraviolet ray at the time of exposure was set to the condition of 300 mJ/cm<2> . In the case of Examples 27 to 34, 36 and 62 to 83, the film was first heated at 160 ° C for 60 minutes, and then the film was irradiated with ultraviolet rays at a condition of 1000 mJ/cm 2 . Thereby, a layer composed of a photosensitive resin composition is formed on the core material. Thereby a test piece is obtained.

實施例17、35、56、88及97,以下述方式進行來製作測試片。 Examples 17, 35, 56, 88 and 97 were produced in the following manner to prepare test pieces.

先以塗敷器(applicator)將感光性樹脂組成物塗佈在聚對苯二甲酸乙二酯製的薄膜上,再藉由以95℃進行加熱25分鐘,來使其乾燥,藉此在薄膜上形成厚度25μm的乾膜。 First, the photosensitive resin composition was applied onto a film made of polyethylene terephthalate by an applicator, and then dried by heating at 95 ° C for 25 minutes, thereby drying the film. A dry film having a thickness of 25 μm was formed thereon.

準備具備厚度35μm銅箔之玻璃環氧覆銅積層板(FR-4型)。在該玻璃環氧覆銅積層板上,以減去法來形成作為導體線路的梳型電極,藉此獲得芯材,該梳型電極的線寬/間距為50μm/50μm。若為實施例35和97時,以蝕刻劑(MEC Co.,Ltd.製造的有機酸系蝕刻劑,商品型號CZ-8100),來溶解並去除芯材的導體線路的厚度1μm左右的表層部分,藉此對導體線路進行粗糙化。以真空層合機對該芯材進行加熱層合,來在芯材的其中一面的整個面上形成乾膜。加熱層合的條件,是0.5MPa、80℃、1分鐘。藉此,在芯材上形成由乾膜所構成之厚度25μm的皮膜。若為實施例17、56、88及97時,則以與在實施例1時相同的條件對該皮膜實施曝光、顯影及紫外線照射的處理;若為實施例35時,則以與在實施例27時相同的條件對該皮膜實施曝光、顯影及紫外線照射的處理。再者,在曝光後、顯影前,自乾膜(皮膜)剝離聚對苯二甲酸乙二酯製的薄膜。藉此,在芯材上形成由感光性樹 脂組成物的硬化物(亦可稱為乾膜的硬化物)所構成之層。藉此獲得測試片。 A glass epoxy copper clad laminate (FR-4 type) having a copper foil having a thickness of 35 μm was prepared. On the glass epoxy-clad laminate, a comb-shaped electrode as a conductor line was formed by subtraction, whereby a core material having a line width/pitch of 50 μm/50 μm was obtained. In the case of Examples 35 and 97, an etchant (organic acid-based etchant manufactured by MEC Co., Ltd., product model CZ-8100) was used to dissolve and remove the surface portion of the conductor line having a thickness of about 1 μm. Thereby, the conductor line is roughened. The core material was heated and laminated by a vacuum laminator to form a dry film on the entire surface of one of the core materials. The conditions for heating the lamination were 0.5 MPa, 80 ° C, and 1 minute. Thereby, a film having a thickness of 25 μm composed of a dry film was formed on the core material. In the case of Examples 17, 56, 88, and 97, the film was subjected to exposure, development, and ultraviolet irradiation treatment under the same conditions as in Example 1. In the case of Example 35, The film was subjected to exposure, development, and ultraviolet irradiation treatment under the same conditions at 27 o'clock. Further, a film made of polyethylene terephthalate was peeled off from the dry film (film) after exposure and before development. Thereby, a photosensitive tree is formed on the core material A layer of a cured product of a lipid composition (also referred to as a cured product of a dry film). Thereby a test piece is obtained.

(4)評估試驗 (4) Evaluation test

(4-1)黏性 (4-1) Viscosity

除了實施例17、35、56、88及97以外的實施例和比較例,在製作測試片時,於皮膜曝光後自皮膜取下負型光罩時的皮膜的黏性程度,是以下述方式進行評估。 In addition to the examples and comparative examples other than Examples 17, 35, 56, 88 and 97, in the preparation of the test piece, the degree of viscosity of the film when the negative mask was removed from the film after exposure of the film was as follows. to evaluate.

A:在自皮膜取下負型光罩時沒有抗性的感覺,且在取下負型光罩後的皮膜上,無法確認到黏貼的痕跡。 A: There was no feeling of resistance when the negative mask was removed from the film, and the adhesion was not confirmed on the film after the negative mask was removed.

B:在自皮膜取下負型光罩時有抗性的感覺,且在取下負型光罩後的皮膜上,確認到黏貼的痕跡。 B: A feeling of resistance was obtained when the negative mask was removed from the film, and a mark of adhesion was confirmed on the film after the negative mask was removed.

C:難以自皮膜取下負型光罩,且若強行取下負型光罩,則皮膜破損。 C: It is difficult to remove the negative mask from the film, and if the negative mask is forcibly removed, the film is broken.

再者,關於黏性評估為C之比較例1和6,並未實行(4-3)~(4-7)的評估。 Further, regarding Comparative Examples 1 and 6 in which the viscosity evaluation was C, the evaluation of (4-3) to (4-7) was not performed.

(4-2)顯影性 (4-2) developability

除了實施例17、35、56、88、90~97及比較例5、6以外的實施例和比較例,在印刷線路板的其中一面的整個面上,以網版印刷塗佈法來塗佈感光性樹脂組成物,藉此形成濕潤塗膜。以80℃對該濕潤塗膜加熱40分鐘或60分鐘,藉此形成膜厚25μm的皮膜。在不進行曝光的情形下,對皮膜實施顯影處理。在顯影處理時,先以0.2MPa的噴射壓力對皮膜噴射30℃的1%碳酸鈉水溶液90秒,再 以0.2MPa的噴射壓力噴射純水90秒。觀察處理後的印刷線路板,並以下述方式評估其結果。 Examples and comparative examples other than Examples 17, 35, 56, 88, 90-97 and Comparative Examples 5 and 6 were coated by screen printing on the entire surface of one side of the printed wiring board. A photosensitive resin composition is thereby formed into a wet coating film. The wet coating film was heated at 80 ° C for 40 minutes or 60 minutes to form a film having a film thickness of 25 μm. The development treatment is performed on the film without performing exposure. In the development treatment, the film was sprayed with a 1% sodium carbonate aqueous solution at 30 ° C for 90 seconds at a spray pressure of 0.2 MPa, and then Pure water was sprayed at a jet pressure of 0.2 MPa for 90 seconds. The treated printed wiring board was observed and the results were evaluated in the following manner.

A:在濕潤塗膜的加熱時間為40分鐘、60分鐘的任一情形,皆是全部皮膜被去除。 A: In any case where the heating time of the wet coating film was 40 minutes and 60 minutes, all the film was removed.

B:當濕潤薄膜的加熱時間為40分鐘時,皮膜全部被去除,但是60分鐘則有一部分皮膜殘留在印刷線路板上。 B: When the heating time of the wet film was 40 minutes, the film was completely removed, but at 60 minutes, a part of the film remained on the printed wiring board.

C:在濕潤塗膜的加熱時間為40分鐘、60分鐘的任一情形,皆有一部分皮膜殘留在印刷線路板上。 C: In any case where the heating time of the wet coating film was 40 minutes and 60 minutes, a part of the film remained on the printed wiring board.

實施例1和比較例2,亦針對變更顯影處理的條件後的情形實行評估。亦即,實施例1和比較例2,亦針對下述情形實行評估:於顯影處理時,在將皮膜浸泡於28℃的1.2%氫氧化四甲基銨溶液中的狀態下,先使皮膜振動60秒,再以0.2MPa的噴射壓力噴射純水90秒。在表5中,使用1%碳酸鈉水溶液時的評估表示於左側,使用1.2%氫氧化四甲基銨溶液時的評估表示於右側。 In Example 1 and Comparative Example 2, evaluation was also performed for the case where the conditions of the development treatment were changed. That is, Example 1 and Comparative Example 2 were also evaluated for the case where the film was first immersed in a 1.2% tetramethylammonium hydroxide solution at 28 ° C during development treatment. For 60 seconds, pure water was sprayed at a spray pressure of 0.2 MPa for 90 seconds. In Table 5, the evaluation when using a 1% aqueous sodium carbonate solution is shown on the left side, and the evaluation when using a 1.2% tetramethylammonium hydroxide solution is shown on the right side.

再者,顯影性的評估為C之比較例3和4,並未實行下述(4-3)~(4-7)的評估。比較例2,亦因為使用1%碳酸鈉水溶液時的評估為C,所以當使用1%碳酸鈉水溶液時,並未進行下述(4-3)~(4-7)的評估。 Further, in Comparative Examples 3 and 4 in which the developability was evaluated as C, the evaluations of the following (4-3) to (4-7) were not carried out. In Comparative Example 2, since the evaluation when using a 1% sodium carbonate aqueous solution was C, when the 1% sodium carbonate aqueous solution was used, the following evaluations of (4-3) to (4-7) were not performed.

再者,實施例17、35、56、88、90~97及比較例5,在製作測試片時的曝光後的顯影步驟中,並無問題而能夠顯影。 Further, in Examples 17, 35, 56, 88, 90 to 97 and Comparative Example 5, development was possible without any problem in the development step after the exposure of the test piece.

(4-3)解析度 (4-3) Resolution

針對實施例和比較例,觀察在測試片中的由硬化物所構成之層上形成的孔,並以下述方式評估其結果。 For the examples and comparative examples, the pores formed in the layer composed of the cured product in the test piece were observed, and the results were evaluated in the following manner.

A:孔的底部的直徑是40μm以上。 A: The diameter of the bottom of the hole is 40 μm or more.

B:孔的底部的直徑是25μm以上但小於40μm。 B: The diameter of the bottom of the hole is 25 μm or more but less than 40 μm.

C:孔的底部的直徑小於25μm、或無法形成明確的孔。 C: The diameter of the bottom of the hole is less than 25 μm, or a clear hole cannot be formed.

其中,實施例27~36和62~83,是以下述方式評估解析度。 Among them, Examples 27 to 36 and 62 to 83 evaluate the resolution in the following manner.

A:50μm的圓形形狀的非曝光部已開口。 A: A non-exposed portion of a circular shape of 50 μm has been opened.

B:70μm的圓形形狀的非曝光部已開口,但是50μm的圓形形狀的非曝光部並未開口。 B: The non-exposed portion of a circular shape of 70 μm was opened, but the non-exposed portion of a circular shape of 50 μm was not opened.

C:70μm的圓形形狀的非曝光部和50μm的圓形形狀的非曝光部兩者皆未開口。 C: Both the non-exposed portion of a circular shape of 70 μm and the non-exposed portion of a circular shape of 50 μm were not opened.

實施例1和比較例2,亦針對下述情形實行評估:於製作測試片時的顯影處理時,在將皮膜浸泡於28℃的1.2%氫氧化四甲基銨溶液中的狀態下,先使皮膜振動60秒,再以0.2MPa的噴射壓力噴射純水90秒。在表5中,使用1%碳酸鈉水溶液時的評估表示於左側,使用1.2%氫氧化四甲基銨溶液時的評估表示於右側。 In Example 1 and Comparative Example 2, evaluation was also carried out in the following cases: in the development treatment at the time of producing the test piece, in the state where the film was immersed in a 1.2% tetramethylammonium hydroxide solution at 28 ° C, The film was vibrated for 60 seconds, and pure water was sprayed at a spray pressure of 0.2 MPa for 90 seconds. In Table 5, the evaluation when using a 1% aqueous sodium carbonate solution is shown on the left side, and the evaluation when using a 1.2% tetramethylammonium hydroxide solution is shown on the right side.

(4-4)耐鍍覆性 (4-4) Plating resistance

先在實施例和比較例的測試片的導體線路中的露出於外部的部分上,使用市售的無電鍍鎳浴來形成鍍鎳層,再使用市售的無電鍍金浴來形成鍍金層。藉此,形成由鍍鎳層和鍍金層所構成之金屬層。以目視觀察由硬化物所構 成之層和金屬層。又,對於由硬化物所構成之層實行玻璃紙黏著膠帶剝離試驗。以下述方式評估其結果。 First, on the exposed portions of the conductor traces of the test pieces of the examples and the comparative examples, a commercially available electroless nickel bath was used to form a nickel plating layer, and a commercially available electroless gold bath was used to form a gold plating layer. Thereby, a metal layer composed of a nickel plating layer and a gold plating layer is formed. Visually observed by the hardened material Layer and metal layer. Further, a cellophane adhesive tape peeling test was carried out on the layer composed of the cured product. The results were evaluated in the following manner.

A:由硬化物所構成之層和金屬層的外觀無法確認到異常,且沒有發生由於玻璃紙黏著膠帶剝離試驗導致金屬層剝離的情形。 A: The appearance of the layer composed of the cured product and the metal layer could not be confirmed to be abnormal, and the peeling of the metal layer due to the cellophane adhesive tape peeling test did not occur.

B:在由硬化物所構成之層確認到變色,但是沒有發生由於玻璃紙黏著膠帶剝離試驗導致金屬層剝離的情形。 B: Discoloration was confirmed in the layer composed of the cured product, but the peeling of the metal layer due to the cellophane adhesive tape peeling test did not occur.

C:確認到由硬化物所構成之層浮起,且發生由於玻璃紙黏著膠帶剝離試驗導致金屬層剝離的情形 C: It was confirmed that the layer composed of the cured product floated, and the peeling of the metal layer due to the peeling test of the cellophane adhesive tape occurred.

關於實施例1和比較例2,亦針對下述情形實行評估:於製作測試片時的顯影處理時,在將皮膜浸泡於28℃的1.2%氫氧化四甲基銨溶液中的狀態下,先使皮膜振動60秒,再以0.2MPa的噴射壓力噴射純水90秒。在表5中,使用1%碳酸鈉水溶液時的評估表示於左側,使用1.2%氫氧化四甲基銨溶液時的評估表示於右側。 With respect to Example 1 and Comparative Example 2, evaluation was also carried out in the following cases: in the state of developing treatment at the time of producing a test piece, the film was immersed in a 1.2% tetramethylammonium hydroxide solution at 28 ° C, first The film was vibrated for 60 seconds, and pure water was sprayed at a spray pressure of 0.2 MPa for 90 seconds. In Table 5, the evaluation when using a 1% aqueous sodium carbonate solution is shown on the left side, and the evaluation when using a 1.2% tetramethylammonium hydroxide solution is shown on the right side.

(4-5)線間絕緣性 (4-5) Insulation between wires

一面對實施例和比較例的測試片中的導體線路(梳型電極)施加直流(DC)30V的偏電壓(bias voltage),一面將印刷線路板暴露在121℃、97%的相對溼度(R.H.)的試驗環境下150小時(若為實施例27~36、90~97、比較例5時則是100小時)。在該試驗環境下持續測定由硬化物所構成之層的梳型電極間的電阻值,並依據下述評估基準來評估其結果。 A conductor circuit (comb electrode) in the test piece of the embodiment and the comparative example was applied with a direct current (DC) bias voltage of 30 V, and the printed wiring board was exposed to 121 ° C and a relative humidity of 97% ( The test environment of RH) was 150 hours (100 hours for Examples 27 to 36, 90 to 97, and Comparative Example 5). The resistance value between the comb-shaped electrodes of the layer composed of the cured product was continuously measured in this test environment, and the results were evaluated in accordance with the following evaluation criteria.

A:自試驗開始時至經過150小時(若為實施例27~36、90~97、比較例5時則是100小時)為止之間,電阻值一直維持在106Ω以上。 A: The resistance value was maintained at 10 6 Ω or more from the start of the test to 150 hours (100 hours in the case of Examples 27 to 36, 90 to 97, and Comparative Example 5).

B:自試驗開始時至經過100小時(若為實施例27~36、90~97、比較例5時則是80小時)為止之間,電阻值一直維持在106Ω以上,但是自試驗開始時至經過150小時(若為實施例27~36時則是100小時)前,電阻值已小於106Ω。 B: The resistance value was maintained at 10 6 Ω or more from the start of the test to the lapse of 100 hours (80 hours for the examples 27 to 36, 90 to 97, and the comparative example 5), but the test was started. The resistance value was less than 10 6 Ω until 150 hours (100 hours for the examples 27 to 36).

C:自試驗開始時至經過100小時(若為實施例27~36、90~97、比較例5時則是80小時)前,電阻值已小於106Ω。 C: The resistance value was less than 10 6 Ω from the start of the test to 100 hours (in the case of Examples 27 to 36, 90 to 97, and 80 hours in Comparative Example 5).

實施例1和比較例2,亦針對下述情形實行評估:於製作測試片時的顯影處理時,在將皮膜浸泡於28℃的1.2%氫氧化四甲基銨溶液中的狀態下,先使皮膜振動60秒,再以0.2MPa的噴射壓力噴射純水90秒。在表5中,使用1%碳酸鈉水溶液時的評估表示於左側,使用1.2%氫氧化四甲基銨溶液時的評估表示於右側。 In Example 1 and Comparative Example 2, evaluation was also carried out in the following cases: in the development treatment at the time of producing the test piece, in the state where the film was immersed in a 1.2% tetramethylammonium hydroxide solution at 28 ° C, The film was vibrated for 60 seconds, and pure water was sprayed at a spray pressure of 0.2 MPa for 90 seconds. In Table 5, the evaluation when using a 1% aqueous sodium carbonate solution is shown on the left side, and the evaluation when using a 1.2% tetramethylammonium hydroxide solution is shown on the right side.

(4-6)層間絕緣性 (4-6) interlayer insulation

在實施例和比較例的測試片中的由硬化物所構成之層上,黏貼導電膠帶。一面對該導電膠帶施加DC100V的偏電壓,一面將印刷線路板暴露在121℃、97%R.H.的試驗環境下60小時(若為實施例27~36、90~97、比較例5時則是50小時)。在該試驗環境下持續測定由硬化 物所構成之層的導體線路與導電膠帶之間的電阻值,並依據下述評估基準來評估其結果。 Conductive tape was adhered to the layer composed of the cured material in the test pieces of the examples and the comparative examples. While applying a bias voltage of DC 100 V to the conductive tape, the printed wiring board was exposed to a test environment of 121 ° C and 97% RH for 60 hours (in the case of Examples 27 to 36, 90 to 97, and Comparative Example 5, 50 hours). Continuous measurement in the test environment by hardening The resistance value between the conductor line of the layer formed by the object and the conductive tape was evaluated according to the following evaluation criteria.

A:自試驗開始時至經過60小時(若為實施例27~36、90~97、比較例5時則是40小時)為止之間,電阻值一直維持在106Ω以上。 A: The resistance value was maintained at 10 6 Ω or more from the start of the test to the lapse of 60 hours (40 hours in the case of Examples 27 to 36, 90 to 97, and Comparative Example 5).

B:自試驗開始時至經過50小時(若為實施例27~36、90~97、比較例5時則是30小時)為止之間,電阻值一直維持在106Ω以上,但是自試驗開始時至經過60小時(若為實施例27~36則是40小時)前,電阻值已小於106Ω。 B: The resistance value was maintained at 10 6 Ω or more from the start of the test until 50 hours (in the case of Examples 27 to 36, 90 to 97, and 30 hours in Comparative Example 5), but the test was started. The resistance value was less than 10 6 Ω until 60 hours (40 hours for Examples 27 to 36).

C:自試驗開始時至經過50小時(若為實施例27~36、90~97、比較例5時則是30小時)前,電阻值已小於106Ω。 C: The resistance value was less than 10 6 Ω from the start of the test to 50 hours (30 hours in the case of Examples 27 to 36, 90 to 97, and Comparative Example 5).

關於實施例1和比較例2,亦針對下述情形實行評估:於製作測試片時的顯影處理時,在將皮膜浸泡於28℃的1.2%氫氧化四甲基銨溶液中的狀態下,先使皮膜振動60秒,再以0.2MPa的噴射壓力噴射純水90秒。在表5中,使用1%碳酸鈉水溶液時的評估表示於左側,使用1.2%氫氧化四甲基銨溶液時的評估表示於右側。 With respect to Example 1 and Comparative Example 2, evaluation was also carried out in the following cases: in the state of developing treatment at the time of producing a test piece, the film was immersed in a 1.2% tetramethylammonium hydroxide solution at 28 ° C, first The film was vibrated for 60 seconds, and pure water was sprayed at a spray pressure of 0.2 MPa for 90 seconds. In Table 5, the evaluation when using a 1% aqueous sodium carbonate solution is shown on the left side, and the evaluation when using a 1.2% tetramethylammonium hydroxide solution is shown on the right side.

(4-7)壓力鍋試驗(pressure cooker test,PCT) (4-7) Pressure cooker test (PCT)

將實施例和比較例的測試片放置在121℃、100%R.H.的環境下100小時(若為實施例27~36時則是50小時),之後依據下述評估基準來評估由硬化物所構成之層的外觀。 The test pieces of the examples and the comparative examples were placed in an environment of 121 ° C and 100% RH for 100 hours (50 hours for the cases of Examples 27 to 36), and then evaluated by the hardened materials according to the following evaluation criteria. The appearance of the layer.

A:在由硬化物所構成之層無法觀察到異常。 A: No abnormality was observed in the layer composed of the cured product.

B:在由硬化物所構成之層觀察到變色。 B: Discoloration was observed in the layer composed of the cured product.

C:在由硬化物所構成之層觀察到大幅的變色,且發生一部份膨脹。 C: A large discoloration was observed in the layer composed of the cured product, and a part of the expansion occurred.

實施例1和比較例2,亦針對下述情形實行評估:於製作測試片時的顯影處理時,在將皮膜浸泡於28℃的1.2%氫氧化四甲基銨溶液中的狀態下,先使皮膜振動60秒,再以0.2MPa的噴射壓力噴射純水90秒。在表5中,使用1%碳酸鈉水溶液時的評估表示於左側,使用1.2%氫氧化四甲基銨溶液時的評估表示於右側。 In Example 1 and Comparative Example 2, evaluation was also carried out in the following cases: in the development treatment at the time of producing the test piece, in the state where the film was immersed in a 1.2% tetramethylammonium hydroxide solution at 28 ° C, The film was vibrated for 60 seconds, and pure water was sprayed at a spray pressure of 0.2 MPa for 90 seconds. In Table 5, the evaluation when using a 1% aqueous sodium carbonate solution is shown on the left side, and the evaluation when using a 1.2% tetramethylammonium hydroxide solution is shown on the right side.

(4-8)焊料耐熱性 (4-8) Solder heat resistance

在實施例27~36的測試片上塗佈水溶性助焊劑(倫敦化學公司製造,商品型號LONCO 3355-11),繼而將該測試片浸漬於260℃的熔融焊料浴中10秒鐘,繼而進行水洗。反覆進行此一連串操作3次,之後觀察測試片中的由硬化物所構成之層(抗焊劑層)的外觀,並依據下述評估基準來進行評估。 A water-soluble flux (manufactured by London Chemical Co., Ltd., trade name LONCO 3355-11) was applied to the test pieces of Examples 27 to 36, and the test piece was then immersed in a molten solder bath at 260 ° C for 10 seconds, followed by washing with water. . This series of operations was repeated three times, and then the appearance of the layer (the solder resist layer) composed of the cured material in the test piece was observed, and evaluated according to the following evaluation criteria.

A:無法觀察到異常。 A: No abnormality can be observed.

B:能夠觀察到由硬化物所構成之層變色。 B: Discoloration of the layer composed of the cured product can be observed.

C:能夠觀察到由硬化物所構成之層剝離。 C: It was observed that the layer composed of the cured product was peeled off.

(4-9)低溫穩定性 (4-9) low temperature stability

將實施例62~83的感光性樹脂組成物保管在3℃7天。自開始保管,在經過1天時、經過5天時、經過7天時確認感光性樹脂中的結晶性環氧樹脂有無結晶化的情形,並依據下述評估基準來進行評估。 The photosensitive resin compositions of Examples 62 to 83 were stored at 3 ° C for 7 days. When the storage was started, it was confirmed whether or not the crystalline epoxy resin in the photosensitive resin was crystallized after passing through the weather for one day, and the evaluation was carried out in accordance with the following evaluation criteria.

A:在經過7天時,無法確認到結晶性環氧樹脂結晶化的情形,且感光性樹脂組成物保持均勻的狀態。 A: When the crystallization of the crystalline epoxy resin was not confirmed, the photosensitive resin composition was kept in a uniform state.

B:在經過1天時,無法確認到結晶性環氧樹脂結晶化的情形,且感光性樹脂組成物保持均勻的狀態,但是在經過5天時,確認到結晶化的情形,且感光性樹脂組成物已變成不均勻的狀態。 B: When the crystallization of the crystalline epoxy resin was not observed, the photosensitive resin composition was kept in a uniform state, but the crystallization was confirmed after 5 days, and the photosensitive resin was observed. The composition has become uneven.

C:在3℃經過1天時,確認到結晶化的情形,且感光性樹脂組成物已變成不均勻的狀態。 C: When one day passed at 3 ° C, crystallization was confirmed, and the photosensitive resin composition had become uneven.

(4-10)玻璃轉化溫度 (4-10) Glass transition temperature

實施例90~97和比較例5,在鐵氟龍(註冊商標)製的構件上形成由硬化物所構成之層。由硬化物所構成之層的形成方法,設為與在形成測試片中的由硬化物所構成之層時相同。先自構件剝離由硬化物所構成之層,再藉由熱機械分析(Thermal Mechanical Analysis,TMA)來測定該層的玻璃轉化溫度。 In Examples 90 to 97 and Comparative Example 5, a layer composed of a cured product was formed on a member made of Teflon (registered trademark). The method of forming the layer composed of the cured product is the same as that in the case of forming a layer composed of a cured product in the test piece. The layer composed of the cured material was first peeled off from the member, and the glass transition temperature of the layer was measured by Thermal Mechanical Analysis (TMA).

將以上的評估測試的結果表示於下述表4~14中。 The results of the above evaluation tests are shown in Tables 4 to 14 below.

再者,表11和表12中的「熔點小於100℃的結晶性環氧E/A」,是相對於含羧基樹脂(A),熔點小於100℃的結晶性環氧樹脂中包含的環氧基的當量;「熔點100℃以上的結晶性環氧E/A」,是相對於含羧基樹脂(A),熔點100℃以上的結晶性環氧樹脂中包含的環氧基的當量;「環氧整體E/A」,是相對於含羧基樹脂(A),環氧化合物(D)中包含的環氧基的當量。 In addition, the "crystalline epoxy E/A having a melting point of less than 100 ° C" in Tables 11 and 12 is an epoxy resin contained in a crystalline epoxy resin having a melting point of less than 100 ° C with respect to the carboxyl group-containing resin (A). The equivalent of the base; the "crystalline epoxy E/A having a melting point of 100 ° C or higher" is equivalent to the epoxy group contained in the crystalline epoxy resin having a melting point of 100 ° C or higher with respect to the carboxyl group-containing resin (A); The oxygen overall E/A" is an equivalent of the epoxy group contained in the epoxy compound (D) with respect to the carboxyl group-containing resin (A).

[表1] [Table 1]

[表2] [Table 2]

[表3] [table 3]

[表4] [Table 4]

[表5] [table 5]

[表6] [Table 6]

[表7] [Table 7]

[表8] [Table 8]

[表9] [Table 9]

[表10] [Table 10]

[表11] [Table 11]

[表12] [Table 12]

[表13] [Table 13]

[表14] [Table 14]

由以上所述的實施形態可知,第一態樣的含羧基樹脂(A1),是中間體、酸二酐(a3)及酸一酐(a4)之反應物,該中間體是環氧化合物(a1)與含不飽和基羧酸(a2)之反應物,其中,環氧化合物(a1)具有雙酚茀骨架,雙酚茀骨架是以下述式(1)來表示,在式(1)中,R1~R8各自獨立地為氫、碳數1~5的烷基、或鹵素,並且,含羧基樹脂的多分散性在1.2~2.8的範圍內。 According to the above-described embodiment, the carboxyl group-containing resin (A1) of the first aspect is a reactant of an intermediate, an acid dianhydride (a3) and an acid anhydride (a4), and the intermediate is an epoxy compound ( A1) a reaction product with an unsaturated carboxylic acid (a2), wherein the epoxy compound (a1) has a bisphenol fluorene skeleton, and the bisphenol fluorene skeleton is represented by the following formula (1), in the formula (1) R 1 to R 8 are each independently hydrogen, an alkyl group having 1 to 5 carbon atoms, or a halogen, and the polydispersity of the carboxyl group-containing resin is in the range of 1.2 to 2.8.

在第二態樣的含羧基樹脂(A1)中,針對第一態樣,前述含羧基樹脂的重量平均分子量在1000~5000的範圍內。 In the carboxyl group-containing resin (A1) of the second aspect, for the first aspect, the weight average molecular weight of the carboxyl group-containing resin is in the range of 1,000 to 5,000.

在第一或第二態樣中,含羧基樹脂(A1)的固體成分酸價,較佳是在60~140mgKOH/g的範圍內。 In the first or second aspect, the solid content acid value of the carboxyl group-containing resin (A1) is preferably in the range of 60 to 140 mgKOH/g.

第三態樣的含羧基樹脂(A1),針對第二態樣,該含羧基樹脂具有下述分子量分佈:GPC溶析曲線下的分子量200以上且小於1700的區域的面積與GPC溶析曲線下的分子量1700以上的區域的面積的比例,在1:0.5~1:2.5的範圍內。 The carboxyl group-containing resin (A1) of the third aspect, the carboxyl group-containing resin having the following molecular weight distribution for the second aspect: the area of the region having a molecular weight of 200 or more and less than 1700 under the GPC elution curve and the GPC elution curve The ratio of the area of the region having a molecular weight of 1700 or more is in the range of 1:0.5 to 1:2.5.

在第四態樣的含羧基樹脂(A1)中,針對第一至第三態樣中的任一態樣,前述酸一酐(a4)含有1,2,3,6-四氫鄰苯二甲酸酐。 In the carboxyl group-containing resin (A1) of the fourth aspect, the acid anhydride (a4) contains 1,2,3,6-tetrahydroortylene for any of the first to third aspects. Formic anhydride.

在第五態樣的含羧基樹脂(A1)中,針對第一至第四態樣中的任一態樣,前述酸二酐(a3)含有3,3’,4,4’-聯苯四甲酸二酐。 In the carboxyl group-containing resin (A1) of the fifth aspect, the acid dianhydride (a3) contains 3,3',4,4'-biphenyl IV for any of the first to fourth aspects. Formic acid dianhydride.

在第六態樣的含羧基樹脂(A1)中,針對第一至第五態樣中的任一態樣,相對於環氧化合物(a1)的1莫耳的環氧基,酸一酐(a4)的量在0.3~0.7莫耳的範圍內。 In the carboxyl group-containing resin (A1) of the sixth aspect, for any of the first to fifth aspects, the acid anhydride is relative to 1 mol of the epoxy group of the epoxy compound (a1) ( The amount of a4) is in the range of 0.3 to 0.7 mol.

在第七態樣的含羧基樹脂(A1)中,針對第一至第六態樣中的任一態樣,相對於環氧化合物(a1)的1莫耳的環氧基,酸二酐(a3)的量在0.05~0.24莫耳的範圍內。 In the carboxyl group-containing resin (A1) of the seventh aspect, for any of the first to sixth aspects, the acid dianhydride is (1 mol) with respect to the epoxy compound (a1). The amount of a3) is in the range of 0.05 to 0.24 moles.

第八態樣的感光性樹脂組成物,其含有:含羧基樹脂(A);不飽和化合物(B),其於一分子中具有至少一個乙烯性不飽和鍵;光聚合起始劑(C);及,環氧化合物(D);其中,含羧基樹脂(A),含有第一至第七態樣中的任一態樣的含羧基樹脂(A1)。 An eighth aspect of the photosensitive resin composition comprising: a carboxyl group-containing resin (A); an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule; and a photopolymerization initiator (C) And an epoxy compound (D); wherein the carboxyl group-containing resin (A) contains the carboxyl group-containing resin (A1) in any of the first to seventh aspects.

第九態樣的感光性樹脂組成物,針對第八態樣,前述感光性樹脂組成物具有如下所述的性質:厚度25μm的感光性樹脂組成物的皮膜可藉由碳酸鈉水溶液來進行顯影。 In the ninth aspect, the photosensitive resin composition has the property that the photosensitive resin composition having a thickness of 25 μm can be developed by an aqueous solution of sodium carbonate.

在第十態樣的感光性樹脂組成物中,針對第八或第九態樣,前述不飽和化合物(B)含有於一分子中具有3個不飽和鍵之化合物。 In the photosensitive resin composition of the tenth aspect, in the eighth or ninth aspect, the unsaturated compound (B) contains a compound having three unsaturated bonds in one molecule.

在第十一態樣的感光性樹脂組成物中,針對第八至第十態樣中的任一態樣,前述環氧化合物(D)含有結晶性環氧樹脂。 In the photosensitive resin composition of the eleventh aspect, the epoxy compound (D) contains a crystalline epoxy resin in any of the eighth to tenth aspects.

在第十一態樣中,相對於含羧基樹脂(A),不飽和化合物(B)的含量可在21~40質量%的範圍內。 In the eleventh aspect, the content of the unsaturated compound (B) may be in the range of 21 to 40% by mass based on the carboxyl group-containing resin (A).

在第十二態樣的感光性樹脂組成中,針對第十一態樣,前述結晶性環氧樹脂含有熔點110℃以下的結晶性環氧樹脂。 In the photosensitive resin composition of the twelfth aspect, in the eleventh aspect, the crystalline epoxy resin contains a crystalline epoxy resin having a melting point of 110 ° C or lower.

在第十一或第十二態樣中,結晶性環氧樹脂可含有熔點小於100℃的結晶性環氧樹脂。 In the eleventh or twelfth aspect, the crystalline epoxy resin may contain a crystalline epoxy resin having a melting point of less than 100 °C.

在第十三態樣的感光性樹脂組成物中,針對第八至第十二態樣中的任一態樣,前述光聚合起始劑(C)含有醯基氧化膦系光聚合起始劑(C1)。 In the photosensitive resin composition of the thirteenth aspect, the photopolymerization initiator (C) contains a mercaptophosphine oxide-based photopolymerization initiator for any of the eighth to twelfth aspects. (C1).

在第十四態樣的感光性樹脂組成物中,針對第十三態樣,前述光聚合起始劑(C)含有羥基酮系光聚合起始劑(C2)。 In the photosensitive resin composition of the fourteenth aspect, in the thirteenth aspect, the photopolymerization initiator (C) contains a hydroxyketone photopolymerization initiator (C2).

在第十五態樣的感光性樹脂組成物中,針對第十三或第十四態樣,前述光聚合起始劑(C)含有雙(二乙基胺基)二苯基酮(C3)。 In the photosensitive resin composition of the fifteenth aspect, the photopolymerization initiator (C) contains bis(diethylamino)diphenyl ketone (C3) for the thirteenth or fourteenth aspect. .

在第十四或第十五態樣中,醯基氧化膦系光聚合起始劑(C1)與含有羥基酮系光聚合起始劑(C2)的質量比,可在1:0.01~1:10的範圍內。 In the fourteenth or fifteenth aspect, the mass ratio of the fluorenylphosphine oxide-based photopolymerization initiator (C1) to the hydroxyketone-based photopolymerization initiator (C2) may be from 1:0.01 to 1: Within the scope of 10.

第十六態樣的感光性樹脂組成物,針對第八至第十五態樣中的任一態樣,前述感光性樹脂組成物含有成分(E),該成分(E)含有三聚氰胺與三聚氰胺衍生物之中的至少其中一者。 In a sixteenth to fifteenth aspect, the photosensitive resin composition contains the component (E) containing melamine and melamine derived, in any one of the eighth to fifteenth aspects. At least one of the things.

第十七態樣的乾膜,是第八至第十六態樣中的任一態樣的感光性樹脂組成物的乾燥物。 The dry film of the seventeenth aspect is a dried matter of the photosensitive resin composition of any of the eighth to sixteenth aspects.

第十八態樣的印刷線路板,其具備層間絕緣層,該層間絕緣層包含第八至第十六態樣中的任一態樣的感光性樹脂組成物的硬化物。 An eighteenth aspect of the printed wiring board comprising an interlayer insulating layer comprising a cured product of the photosensitive resin composition of any of the eighth to sixteenth aspects.

第十九態樣的印刷線路板,其具備抗焊劑層,該抗焊劑層包含第八至第十六態樣中的任一態樣的感光性樹脂組成物的硬化物。 A printed wiring board according to a nineteenth aspect, comprising: a solder resist layer comprising a cured product of the photosensitive resin composition of any of the eighth to sixteenth aspects.

第二十態樣的製造方法,是製造多分散性在1.2~2.8的範圍內之含羧基樹脂(A1)的方法,其包含下述步驟:使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應,來獲得中間體的步驟;及,使中間體、酸二酐(a3)及酸一酐(a4)進行反應,來合成含羧基樹脂(A1)的步驟;其中,環氧化合物(a1)具有雙酚茀骨架,雙酚茀骨架是以式(1)來表示,在式(1)中,R1~R8各自獨立地為氫、碳數1~5的烷基、或鹵素。 The twentieth aspect manufacturing method is a method for producing a carboxyl group-containing resin (A1) having a polydispersity in the range of 1.2 to 2.8, which comprises the steps of: bringing an epoxy compound (a1) and an unsaturated group-containing carboxyl group a step of obtaining an intermediate by reacting an acid (a2); and a step of synthesizing the intermediate, the acid dianhydride (a3) and the acid anhydride (a4) to synthesize a carboxyl group-containing resin (A1); wherein the ring The oxygen compound (a1) has a bisphenol fluorene skeleton, and the bisphenol fluorene skeleton is represented by the formula (1). In the formula (1), R 1 to R 8 are each independently hydrogen and an alkyl group having 1 to 5 carbon atoms. Or halogen.

在第二十一態樣的含羧基樹脂的製造方法中,針對第二十態樣,前述含羧基樹脂(A1)的重量平均分子量在1000~5000的範圍內。 In the method for producing a carboxyl group-containing resin according to the twenty first aspect, the weight average molecular weight of the carboxyl group-containing resin (A1) in the twentieth aspect is in the range of 1,000 to 5,000.

在第二十二態樣的含羧基樹脂的製造方法中,針對第二十或第二十一的態樣,前述含羧基樹脂,具有下述分子量分佈:GPC溶析曲線下的分子量200以上且小於1700的區域的面積與GPC溶析曲線下的分子量1700以上的區域的面積的比例,在1:0.5~1:2.5的範圍內。 In the method for producing a carboxyl group-containing resin according to the twenty-second aspect, in the twentieth or twenty-first aspect, the carboxyl group-containing resin has a molecular weight distribution having a molecular weight of 200 or more under a GPC elution curve and The ratio of the area of the region of less than 1700 to the area of the region having a molecular weight of 1700 or more under the GPC elution curve is in the range of 1:0.5 to 1:2.5.

在第二十三態樣的含羧基樹脂的製造方法中,針對第二十至第二十二態樣中的任一態樣,相對於環氧化合物(a1)的1莫耳的環氧基,酸一酐(a4)的量在0.3~0.7莫耳的範圍內。 In the method for producing a carboxyl group-containing resin according to the twenty-third aspect, for any of the twentieth to twelfth aspects, the 1 mol of the epoxy group relative to the epoxy compound (a1) The amount of the acid anhydride (a4) is in the range of 0.3 to 0.7 mol.

在第二十四態樣的含羧基樹脂的製造方法中,針對第二十至第二十三態樣中的任一態樣,相對於環氧化合物(a1)的1莫耳的環氧基,酸二酐(a3)的量在0.05~0.24莫耳的範圍內。 In the method for producing a carboxyl group-containing resin according to the twenty-fourth aspect, for any of the twentieth to twenty-third aspect, the 1 mol of the epoxy group relative to the epoxy compound (a1) The amount of the acid dianhydride (a3) is in the range of 0.05 to 0.24 moles.

在第二十五態樣的含羧基樹脂的製造方法中,針對第二十至第二十四態樣中的任一態樣,前述環氧化合物(a1)與含不飽和基羧酸(a2)的反應,是在三苯基膦的存在下實行。 In the method for producing a carboxyl group-containing resin according to the twenty-fifth aspect, the epoxy compound (a1) and the unsaturated carboxylic acid (a2) are used in any one of the twentieth to twenty-fourth aspects. The reaction is carried out in the presence of triphenylphosphine.

在第二十六態樣的含羧基樹脂的製造方法中,針對第二十至第二十五態樣中的任一態樣,前述中間體、酸二酐(a3)及酸一酐(a4)的反應,是在三苯基膦的存在下實行。 In the method for producing a carboxyl group-containing resin according to the twenty-sixth aspect, the intermediate, the acid dianhydride (a3), and the acid anhydride (a4) are used in any one of the twentieth to twenty-fifth aspect. The reaction is carried out in the presence of triphenylphosphine.

1‧‧‧芯材 1‧‧‧ core material

2‧‧‧絕緣層 2‧‧‧Insulation

3‧‧‧導體線路(第一導體線路) 3‧‧‧Conductor line (first conductor line)

4‧‧‧皮膜 4‧‧ ‧ film

5‧‧‧未曝光部分 5‧‧‧Unexposed parts

6‧‧‧孔 6‧‧‧ hole

7‧‧‧層間絕緣層 7‧‧‧Interlayer insulation

8‧‧‧第二導體線路 8‧‧‧Second conductor line

9‧‧‧穿孔鍍覆 9‧‧‧Perforated plating

10‧‧‧貫穿孔 10‧‧‧through holes

11‧‧‧印刷線路板 11‧‧‧Printed circuit board

Claims (26)

一種含羧基樹脂,是中間體、酸二酐(a3)及酸一酐(a4)之反應物,該中間體是環氧化合物(a1)與含不飽和基羧酸(a2)之反應物,其中,前述環氧化合物(a1)具有雙酚茀骨架,前述雙酚茀骨架是以下述式(1)來表示,下述式(1)中,R1~R8各自獨立地為氫、碳數1~5的烷基、或鹵素,並且,前述含羧基樹脂的多分散性在1.2~2.8的範圍內, a carboxyl group-containing resin which is a reactant of an intermediate, an acid dianhydride (a3) and an acid anhydride (a4), which is a reaction product of an epoxy compound (a1) and an unsaturated group-containing carboxylic acid (a2). The epoxy compound (a1) has a bisphenol fluorene skeleton, and the bisphenol fluorene skeleton is represented by the following formula (1): in the following formula (1), R 1 to R 8 are each independently hydrogen and carbon. a number of 1 to 5 alkyl groups or halogens, and the polydispersity of the carboxyl group-containing resin is in the range of 1.2 to 2.8, 如請求項1所述之含羧基樹脂,其中,該含羧基樹脂具有1000~5000的範圍內的重量平均分子量。 The carboxyl group-containing resin according to claim 1, wherein the carboxyl group-containing resin has a weight average molecular weight in the range of from 1,000 to 5,000. 如請求項2所述之含羧基樹脂,其中,該含羧基樹脂具有下述分子量分佈:GPC溶析曲線下的分子量200以上且小於1700的區域的面積與GPC溶析曲線下的分子量1700以上的區域的面積的比例,在1:0.5 ~1:2.5的範圍內。 The carboxyl group-containing resin according to claim 2, wherein the carboxyl group-containing resin has a molecular weight distribution: an area of a region having a molecular weight of 200 or more and less than 1700 under a GPC elution curve and a molecular weight of 1700 or more under a GPC elution curve. The ratio of the area of the area is 1:0.5 ~1:2.5 in the range. 如請求項1或2所述之含羧基樹脂,其中,前述酸一酐(a4)含有1,2,3,6-四氫鄰苯二甲酸酐。 The carboxyl group-containing resin according to claim 1 or 2, wherein the acid monoanhydride (a4) contains 1,2,3,6-tetrahydrophthalic anhydride. 如請求項1或2所述之含羧基樹脂,其中,前述酸二酐(a3)含有3,3’,4,4’-聯苯四甲酸二酐。 The carboxyl group-containing resin according to claim 1 or 2, wherein the acid dianhydride (a3) contains 3,3',4,4'-biphenyltetracarboxylic dianhydride. 如請求項1或2所述之含羧基樹脂,其中,相對於前述環氧化合物(a1)的1莫耳的環氧基,前述酸一酐(a4)的量在0.3~0.7莫耳的範圍內。 The carboxyl group-containing resin according to claim 1 or 2, wherein the amount of the acid anhydride (a4) is in the range of 0.3 to 0.7 mol with respect to 1 mol of the epoxy group of the epoxy compound (a1). Inside. 如請求項1或2所述之含羧基樹脂,其中,相對於前述環氧化合物(a1)的1莫耳的環氧基,前述酸二酐(a3)的量在0.05~0.24莫耳的範圍內。 The carboxyl group-containing resin according to claim 1 or 2, wherein the amount of the acid dianhydride (a3) is in the range of 0.05 to 0.24 mol with respect to 1 mol of the epoxy group of the epoxy compound (a1). Inside. 一種感光性樹脂組成物,其含有:含羧基樹脂(A);不飽和化合物(B),其於一分子中具有至少一個乙烯性不飽和鍵;光聚合起始劑(C);及,環氧化合物(D);其中,前述含羧基樹脂(A),含有如請求項1~7中任一項所述之含羧基樹脂(A1)。 A photosensitive resin composition comprising: a carboxyl group-containing resin (A); an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule; a photopolymerization initiator (C); The oxygen-containing compound (D), wherein the carboxyl group-containing resin (A) contains the carboxyl group-containing resin (A1) according to any one of claims 1 to 7. 如請求項8所述之感光性樹脂組成物,其中,該感光性樹脂組成物具有如下所述的性質:厚度25μm的感光性樹脂組成物的皮膜可藉由碳酸鈉水溶液來進行 顯影。 The photosensitive resin composition according to claim 8, wherein the photosensitive resin composition has a property that a film of a photosensitive resin composition having a thickness of 25 μm can be subjected to an aqueous solution of sodium carbonate. development. 如請求項8或9所述之感光性樹脂組成物,其中,前述不飽和化合物(B)含有於一分子中具有3個不飽和鍵之化合物。 The photosensitive resin composition according to claim 8 or 9, wherein the unsaturated compound (B) contains a compound having three unsaturated bonds in one molecule. 如請求項8或9所述之感光性樹脂組成物,其中,前述環氧化合物(D)含有結晶性環氧樹脂。 The photosensitive resin composition according to claim 8 or 9, wherein the epoxy compound (D) contains a crystalline epoxy resin. 如請求項11所述之感光性樹脂組成,其中,前述結晶性環氧樹脂含有熔點110℃以下的結晶性環氧樹脂。 The photosensitive resin composition according to claim 11, wherein the crystalline epoxy resin contains a crystalline epoxy resin having a melting point of 110 ° C or lower. 如請求項8或9所述之感光性樹脂組成物,其中,前述光聚合起始劑(C)含有醯基氧化膦系光聚合起始劑(C1)。 The photosensitive resin composition according to claim 8 or 9, wherein the photopolymerization initiator (C) contains a fluorenylphosphine oxide-based photopolymerization initiator (C1). 如請求項13所述之感光性樹脂組成物,其中,前述光聚合起始劑(C)含有羥基酮系光聚合起始劑(C2)。 The photosensitive resin composition according to claim 13, wherein the photopolymerization initiator (C) contains a hydroxyketone photopolymerization initiator (C2). 如請求項13或14所述之感光性樹脂組成物,其中,前述光聚合起始劑(C)含有雙(二乙基胺基)二苯基酮(C3)。 The photosensitive resin composition according to claim 13 or 14, wherein the photopolymerization initiator (C) contains bis(diethylamino)diphenyl ketone (C3). 如請求項8或9所述之感光性樹脂組成物,其中,該感光性樹脂組成物進一步含有成分(E),該成分(E)含有三聚氰胺與三聚氰胺衍生物之中的至少其中一者。 The photosensitive resin composition according to claim 8 or 9, wherein the photosensitive resin composition further contains a component (E) containing at least one of melamine and a melamine derivative. 一種乾膜,其是如請求項8~16中任一項所述之感光性樹脂組成物的乾燥物。 A dry film which is a dried product of the photosensitive resin composition according to any one of claims 8 to 16. 一種印刷線路板,其具備層間絕緣層,該層間絕緣層包含如請求項8~16中任一項所述之感光性樹脂組成物的硬化物。 A printed wiring board comprising an interlayer insulating layer, wherein the interlayer insulating layer comprises a cured product of the photosensitive resin composition according to any one of claims 8 to 16. 一種印刷線路板,其具備抗焊劑層,該抗焊劑層包含如請求項8~16中任一項所述之感光性樹脂組成物的硬化物。 A printed wiring board comprising a solder resist layer, wherein the solder resist layer contains a cured product of the photosensitive resin composition according to any one of claims 8 to 16. 一種含羧基樹脂的製造方法,是製造多分散性在1.2~2.8的範圍內之含羧基樹脂(A1)的方法,其包含下述步驟:使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應,來獲得中間體的步驟;及,使前述中間體、酸二酐(a3)及酸一酐(a4)進行反應,來合成前述含羧基樹脂(A1)的步驟;其中,前述環氧化合物(a1)具有雙酚茀骨架,並且,前述雙酚茀骨架是以下述式(1)來表示,且在下述式(1)中,R1~R8各自獨立地為氫、碳數1~5的烷基、或鹵素, A method for producing a carboxyl group-containing resin, which is a method for producing a carboxyl group-containing resin (A1) having a polydispersity in the range of 1.2 to 2.8, which comprises the steps of: an epoxy compound (a1) and an unsaturated carboxylic acid-containing compound (a2) a step of reacting to obtain an intermediate; and a step of reacting the intermediate, the acid dianhydride (a3) and the acid anhydride (a4) to synthesize the carboxyl group-containing resin (A1); The epoxy compound (a1) has a bisphenol fluorene skeleton, and the bisphenol fluorene skeleton is represented by the following formula (1), and in the following formula (1), R 1 to R 8 are each independently hydrogen, An alkyl group having 1 to 5 carbon atoms, or a halogen, 如請求項20所述之含羧基樹脂的製造方法,其中,前述含羧基樹脂(A1)的重量平均分子量在1000~5000的範圍內。 The method for producing a carboxyl group-containing resin according to claim 20, wherein the carboxyl group-containing resin (A1) has a weight average molecular weight of from 1,000 to 5,000. 如請求項20或21所述之含羧基樹脂的製造方法,其中,前述含羧基樹脂具有下述分子量分佈:GPC溶析曲線下的分子量200以上且小於1700的區域的面積與GPC溶析曲線下的分子量1700以上的區域的面積的比例,在1:0.5~1:2.5的範圍內。 The method for producing a carboxyl group-containing resin according to claim 20, wherein the carboxyl group-containing resin has a molecular weight distribution: an area of a region having a molecular weight of 200 or more and less than 1700 under a GPC elution curve and a GPC elution curve. The ratio of the area of the region having a molecular weight of 1700 or more is in the range of 1:0.5 to 1:2.5. 如請求項20或21所述之含羧基樹脂的製造方法,其中,前述相對於環氧化合物(a1)的1莫耳的環氧基,前述酸一酐(a4)的量在0.3~0.7莫耳的範圍內。 The method for producing a carboxyl group-containing resin according to claim 20, wherein the amount of the acid anhydride (a4) is from 0.3 to 0.7 mol with respect to 1 mol of the epoxy group of the epoxy compound (a1). Within the range of the ear. 如請求項20或21所述之含羧基樹脂的製造方法,其中,相對於前述環氧化合物(a1)的1莫耳的環氧基,前述酸二酐(a3)的量在0.05~0.24莫耳的範圍內。 The method for producing a carboxyl group-containing resin according to claim 20, wherein the amount of the acid dianhydride (a3) is 0.05 to 0.24 mol with respect to 1 mol of the epoxy group of the epoxy compound (a1). Within the range of the ear. 如請求項20或21所述之含羧基樹脂的製 造方法,其中,前述環氧化合物(a1)與前述含不飽和基羧酸(a2)的反應,是在三苯基膦的存在下實行。 The preparation of the carboxyl group-containing resin as described in claim 20 or 21 In the method, the reaction of the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2) is carried out in the presence of triphenylphosphine. 如請求項20或21所述之含羧基樹脂的製造方法,其中,前述中間體、前述酸二酐(a3)及前述酸一酐(a4)的反應,是在三苯基膦的存在下實行。 The method for producing a carboxyl group-containing resin according to claim 20, wherein the reaction of the intermediate, the acid dianhydride (a3) and the acid anhydride (a4) is carried out in the presence of triphenylphosphine. .
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TWI776873B (en) * 2017-03-28 2022-09-11 日商昭和電工材料股份有限公司 Transfer type photosensitive film, method for forming a cured film pattern, cured film, and touch panel
TWI830081B (en) * 2020-11-16 2024-01-21 日商互應化學工業股份有限公司 Method for producing interlayer insulating film and interlayer insulating film

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KR20170109621A (en) 2017-09-29
CN107250198A (en) 2017-10-13
KR102493938B1 (en) 2023-01-30
CN107250198B (en) 2020-02-21
WO2016121394A1 (en) 2016-08-04

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