TW201637779A - Cutting method and cutting device - Google Patents

Abstract

To provide a cutting method that can increase productivity or suppress degradation in quality of a work being cut, and to provide a cutting device. There is provided the cutting method for cutting a work using a cutting blade. The cutting method executes a cutting step of turning the cutting blade to cut the work while supplying a cutting water to the work (step ST1). The cutting method executes a step of spraying a mixture of a gas and a fine grain to the cutting blade during the cutting step (step ST4).

Description

Cutting method and cutting device

The present invention relates to a cutting method and a cutting device.

A rectangular substrate such as a CSP (Chip Size Package) or a QFN (Quad Flat Non-leaded package) in which a wafer having an integrated circuit such as an IC or an LSI is formed of a resin, or a glass or sapphire or the like Various substrates such as a substrate of a brittle material, and a semiconductor wafer or an optical element wafer are cut along a grid-like street that is divided for each element. Further, various substrates are divided into individual wafers (components), and the divided wafers (components) are widely used in electrical equipment or electronic components such as mobile phones and personal computers.

In the division of the workpiece such as the above-mentioned substrate, a cutting edge is used. When the cutting edge is initially used, the cutting edge can be processed while maintaining the shape of the blade tip in a specific shape. Therefore, the wafer divided by the cutting edge at the beginning of the start is cut vertically from the surface to the back surface. However, since the cutting edge is gradually consumed by the blade tip, if the workpiece is repeatedly cut, the shape of the blade edge gradually changes. Therefore, if it is processed repeatedly When the object is cut, the shape of the blade edge on which the cutting edge is transferred is generated at the divided wafer. If the change in the shape of the blade tip is too large, there is a possibility that an undesired protruding portion is formed on the back side of the divided wafer. Further, when the workpiece is repeatedly cut, the chips are adhered to the cutting edge and clogging occurs, and the substrate cannot be appropriately cut. Therefore, in the division of the workpiece, in order to shape the shape of the cutting edge of the cutting edge or to remove the clogging, it is necessary to regularly perform the trimming of the cutting edge.

Therefore, in the cutting device of the prior art, the dressing board is held at the holding portion for holding the workpiece or the holding portion for the trimming plate. In the cutting device of the prior art, the cutting edge is cut into a predetermined amount for the dressing plate, and the cutting edge is trimmed (for example, refer to Patent Document 1 and Patent Document 2).

[Previous Technical Literature]

[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2010-000588

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2006-218571

However, in the construction of the prior art cutting device, The system maintains the trimming plate and allows the cutting edge to cut a certain amount for the trimming plate to trim the cutting edge. Therefore, in the maintenance and alignment of the trimming plate, it takes time and cannot be produced. The problem of sexually adequately improving.

An object of the present invention is to solve the above problems and to provide a cutting method and a cutting apparatus capable of improving productivity or suppressing deterioration of the quality of a workpiece to be cut.

In order to solve the above problems and achieve the object, the cutting method of the present invention is a cutting method for cutting a workpiece using a cutting edge, and is characterized in that the cutting water is supplied to the workpiece and the cutting is performed. A cutting process in which the blade is rotated to cut the workpiece; and in the cutting process, a process of blowing a mixture of the fluid and the microparticles is performed on the cutting edge.

In order to solve the above problems and achieve the object, a cutting apparatus according to the present invention includes: a holding portion that holds a workpiece on a surface; and a spindle that is freely rotatable and is attached to the spindle Cutting means for cutting the upper cutting edge; and moving the holding portion relative to the mandrel in a direction perpendicular to a central axis direction of the mandrel and parallel to a surface of the holding portion And a cutting water supply unit that supplies cutting water to the workpiece, the cutting apparatus further comprising: a mixture supply of the mixture of the fluid and the fine particles toward the cutting edge during cutting of the workpiece unit.

Further, the cutting device may be configured to monitor a current flowing through the mandrel and determine whether or not to supply the mixture based on the magnitude of the current value.

Further, in the above cutting device, the fine particles may be made water-soluble.

According to the present invention, since the cutting edge of the cutting edge is trimmed by blowing a mixture of the fluid and the fine particles to the cutting edge in the cutting process, the following effects can be obtained: that is, the production can be improved. It is possible to suppress the deterioration of the quality of the workpiece.

1‧‧‧Cutting device

10‧‧‧ Keeping Department

11a‧‧‧ surface

20‧‧‧ cutting means

21‧‧‧ mandrel

22‧‧‧ cutting edge

27‧‧‧Cutting water supply nozzle (cutting water supply unit)

29, 60‧‧‧Mixed Supply Department

30‧‧‧X-axis moving means (moving means)

40‧‧‧Y-axis moving means (moving means)

50‧‧‧Z-axis moving means (moving means)

W‧‧‧Processed objects

K‧‧‧Mixture

Fig. 1 is a perspective view showing a configuration example of a cutting device according to a first embodiment.

Fig. 2 is a perspective view showing a chuck table and a workpiece of the cutting device of the first embodiment.

Fig. 3 is a perspective view showing another example of the workpiece shown in Fig. 2.

Fig. 4 is a perspective view showing still another example of the workpiece shown in Fig. 2.

FIG. 5 is a cutting of the cutting device of the first embodiment; FIG. The configuration of the means is shown as a perspective view.

Fig. 6 is a view showing a cutting edge and a mixture supply portion of the cutting device of the first embodiment.

Fig. 7(a) is a view showing a state in which the cutting chips are attached to the cutting edge of the cutting device of the first embodiment, and Fig. 7(b) is for Fig. 7(a). The state in which the chips shown are removed is shown in the figure.

Fig. 8 is a cross-sectional view showing a cutting edge of a cutting edge of the cutting device of the first embodiment.

[ Fig. 9] Fig. 9 is a cross-sectional view showing a state in which the blade supply tip of the cutting device of the first embodiment is trimmed with respect to the cutting edge of the cutting edge.

Fig. 10 (a) is an example of a flow chart showing the cutting method of the first embodiment, and Fig. 10 (b) is carried out in the cutting work shown in Fig. 10 (a). An example of the flow chart.

Fig. 11 (a) is a cross-sectional view showing the outline of the cutting edge of the cutting edge of the cutting method of the cutting method of the first embodiment, and Fig. 11 (b) is for In the cutting method of the first embodiment, a cross-sectional view showing the outline of the cutting edge of the cutting edge after the mixture is blown is shown.

Fig. 12 is a perspective view showing a mixture supply unit of the cutting device according to the second embodiment of the present invention.

Fig. 13 is a side cross-sectional view showing a state in which the mixture supply portion shown in Fig. 12 is trimmed with respect to the cutting edge.

Fig. 14 is a side view showing a cutting device and a mixture supply portion of the cutting device according to the third embodiment of the present invention.

Fig. 15 is a side view showing a cutting device and a mixture supply portion of the cutting device according to the fourth embodiment of the present invention.

[Fig. 16] Fig. 16 is a cross-sectional view showing a state in which a blade supply tip of a cutting device according to a modification of the first embodiment trims a blade edge of a cutting edge.

Fig. 17 (a) is a cross-sectional view showing the outline of the cutting edge of the cutting edge of the cutting method of the cutting method according to the modification of the first embodiment, Fig. 17 (b), A cross-sectional view showing the outline of the cutting edge of the cutting edge after the mixture is blown to the cutting method according to the modification of the first embodiment.

Hereinafter, the form (embodiment) for carrying out the invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. Further, among the constituent elements described below, those who can easily estimate the facts and who are substantially the same are included. and then. The configurations described below can be suitably combined. Further, various omissions, substitutions, and changes may be made without departing from the scope of the invention.

(Embodiment 1)

The cutting method and the cutting device according to the first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a configuration example of a cutting device according to a first embodiment. 2 is a view of the cutting device of the first embodiment A three-dimensional view of the suction cup table and the processed object. Fig. 3 is a perspective view showing another example of the workpiece shown in Fig. 2. Fig. 4 is a perspective view showing still another example of the workpiece shown in Fig. 2. Fig. 5 is a perspective view showing a configuration example of a cutting device of the cutting device of the first embodiment. Fig. 6 is a view showing a cutting edge and a mixture supply portion of the cutting device of the first embodiment. Fig. 7(a) is a view showing a state in which the cutting chips are attached to the cutting edge of the cutting device of the first embodiment, and Fig. 7(b) is for the case shown in Fig. 7(a). The state in which the chips are removed is shown in the figure. Fig. 8 is a cross-sectional view showing a cutting edge of a cutting edge of the cutting device of the first embodiment. Fig. 9 is a cross-sectional view showing a state in which the tip of the cutting edge is trimmed in the mixture supply unit of the cutting device of the first embodiment.

In the cutting apparatus 1 of the first embodiment, the workpiece W is cut by relatively moving the cutting means 20 including the cutting edge 22 and the holding portion 10 holding the workpiece W. The cutting device 1 is provided with a holding portion 10 for sucking and holding the workpiece W on the surface 11a, and a cutting means 20, an input means 100, and a control means 90, as shown in Fig. 1. Further, the cutting apparatus 1 includes at least an X-axis moving means 30 (corresponding to a moving means) for moving the holding portion 10 in the X-axis direction, and moving the cutting means 20 in the Y-axis direction orthogonal to the X-axis direction. The Y-axis moving means 40 and the Z-axis moving means 50 for moving the cutting means 20 in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction are configured. Further, in the cutting device 1, a column type column portion 3 is provided on the device body 2.

Here, the workpiece W is a plate-shaped processing target that is processed by the cutting device 1. In the first embodiment, as shown in Fig. 2, the body is provided with the resin sealing portion S in each of the regions defined by the plurality of division lines L which are orthogonal to each other. The sealed element D is provided with a package substrate (for example, a QFN (Quad Flat Non-leaded Package) substrate) having an electrode (not shown) at the division planned line L. In the package substrate of the workpiece W, the holding unit 10 and the cutting tool 20 including the cutting edge 22 are relatively moved by the control means 90 of the cutting device 1, and the cutting process is applied to the dividing line L, and Divided into individual elements D.

Further, in the present invention, the workpiece W is not limited to the package substrate, and may be a functional layer on the surface of which the insulating film and the circuit are formed on the surface as shown in FIG. The disk-shaped wafer of FL may be a metal M having a dummy pattern such as TEG (Test Element Group) or CMP (Chemical Mechanical Polishing) formed at the division planned line L as shown in FIG. A disk-shaped semiconductor wafer or an optical element wafer as a base material of ruthenium, sapphire, or the like. Further, in the present invention, the workpiece W may be formed of glass, and may be a BGA (Ball Grid Array) substrate or a substrate provided with an insulating film. Further, an insulating film of the functional layer FL, as based film by a film of SiO ₂ or SiOF, BSG (SiOB), etc. The inorganic material-based, or polyimide-based, parylene (Parylene) based It is composed of a low dielectric constant insulator film (Low-k film) made of a film of an organic film of a polymer film.

The holding portion 10 is as shown in FIG. 1 and includes The holding table 11 having the surface 11a and the rotating table 19 are provided. The holding table 11 is placed on the surface 11a to carry the workpiece W, and is sucked by the suction hole 13 (shown in FIG. 2) provided on the surface 11a, and the workpiece is pressed by the negative pressure. W is attractive for retention. The suction hole 13 is provided in correspondence with the element D of the workpiece W in a one-to-one correspondence. On the surface 11a of the holding table 11, a receiving groove 15 for the cutting edge 22 corresponding to each of the planned dividing lines L is formed. When the workpiece W is divided into the respective elements D, the cutting edge 22 of the cutting means 20 intrudes into the accommodation groove 15. The turntable 19 is configured such that the holding table 11 can rotate around an axis (not shown) parallel to the Z-axis direction orthogonal to the surface 11a. Further, the holding portion 10 is provided to be movable in the X-axis direction by the X-axis moving means 30.

In the cutting means 20, the workpiece W is cut by the cutting edge 22 while supplying the cutting water (not shown) to the workpiece W held by the holding portion 10. The cutting means 20 is provided at the column portion 3 via the Y-axis moving means 40, the Z-axis moving means 50, and the like. The cutting means 20 is provided to be movable in the Y-axis direction by the Y-axis moving means 40, and is movably movable in the Z-axis direction by the Z-axis moving means 50.

The cutting means 20 is provided with a mandrel 21 which makes the central axis and the Y-axis direction (corresponding to the index (INDEX direction) coincide with each other, and the cutting which is attached to the front end of the mandrel 21, as shown in FIG. The blade 22 and the blade cover body 24. The spindle 21 is rotatably supported by the spindle housing 23 and is driven by an unillustrated blade housed in the spindle housing 23. The source is connected. The blade drive source rotates the mandrel 21 around the central axis by electric power supplied from a power source (not shown). In addition, the current that is supplied to the power at the blade drive source is referred to as a spindle current. The spindle current is detected by the spindle current detecting unit 25 shown in Fig. 5 . The spindle current detecting unit 25 outputs the detection result to the control means 90. Further, when the mandrel 21 rotates around the central axis, that is, when the cutting edge 22 cuts the workpiece W (also referred to as a load), the spindle current rises. That is, if the cutting edge 22 becomes difficult to perform cutting, the spindle current rises.

The cutting edge 22 is provided with an extremely thin cutting stone having a substantially ring shape, and is detachably attached to the mandrel 21. The cutting edge 22 is rotationally driven by a rotational force generated by a blade drive source. The cutting edge 22 is formed by electroforming, electroforming, metal bonding, resin bonding, ceramic bonding or the like as an adhesive, and by using one of the adhesives, the diamond or the like 26 is displayed. A fixed annular blade is provided in Figs. 7(a) and 7(b). Further, in the first embodiment, as shown in Figs. 5 and 6, generally, as the cutting edge 22, a base (also referred to as a hub) 22b is used and the diamond is granulated by electroforming. A fixed cutting edge.

The blade cover 24 is fixed to the front end of the mandrel housing 23, and covers the outer periphery of the cutting edge 22 except for the lower side. The blade cover 24 is provided with a cutting water supply nozzle 27 that supplies one pair of cutting water to the cutting edge 22, and a mixture supply portion 29, as shown in FIG.

The cutting water supply nozzle 27 is a cutting water supply unit that supplies cutting water to the workpiece W by supplying cutting water to the cutting edge 22 . The cutting water supply nozzle 27 is disposed on both sides of the lower end portion of the blade body 24 in the Y-axis direction with the cutting edge 22 interposed therebetween, and is used for supplying cutting water to both sides of the cutting edge 22. . The cutting water supply nozzle 27 is attached to the lower end portion of the blade cover body 24, and extends in the horizontal direction in parallel with the X-axis direction, and is formed to have a jet of jet cutting water at its side surface. The cylindrical shape of the slit 27a. The cutting water supply nozzle 27 is supplied with a cutting water supply path that is attached to the upper end portion of the blade body 24 and a cutting water supply path (not shown) formed inside the blade body 24. Cutting water from a cutting water source not shown.

The mixture supply unit 29 supplies the mixture K of the fluid and the fine particles (shown in FIG. 9) toward the cutting edge 22 during the cutting of the workpiece W. The mixture supply portion 29 removes the cutting chips CW (shown in Fig. 7(a)) from the cutting edge 22a by blowing a mixture K of the fluid and fine particles to the cutting edge 22a of the cutting edge 22, and The blade edge 22a of the cutting edge 22 is trimmed, and the blade edge 22a is formed in parallel with the Y-axis direction at the cross section.

The mixture supply portion 29 is provided in the blade body 24, and as shown in Fig. 9, is formed in a straight line parallel to both side faces of the cutting edge 22. The mixture supply unit 29 is provided with a mixture discharge port 29a that faces the blade edge 22a of the cutting edge 22 (shown in Figs. 6 and 7). The mixture supply unit 29 is such that the center of the mixture discharge port 29a faces the center of the cutting edge 22 in the thickness direction. Also, in this implementation In the first aspect, since the cutting edge 22 is provided with the base 22b, the mixture supply unit 29 is disposed so that the mixture K blown from the mixture discharge port 29a to the blade edge 22a is not attached to the base. The direction at station 22b. Further, in the present invention, when the cutting edge 22 is a so-called hubless blade that does not include the base 22a, the mixture supply portion 29 is disposed so as not to be attached from the mixture discharge port 29a. The mixture K at the blade tip 22a is blown to the direction in which the cutting edge 22 is attached to the nut on the front end of the mandrel 21.

The mixture supply unit 29 is supplied with the mixture K of the pressurized fluid and the fine particles from the mixture supply source 29b, and supplies the supplied mixture K toward the cutting edge 22a of the cutting edge 22 and the cutting edge 22 The two sides are blown in parallel. Further, in the first embodiment, as the fluid to be pressurized, a gas composed of an inert gas such as air or nitrogen of 0.1 MPa (gauge pressure) to 0.6 MPa (gauge pressure) is used as the gas. The microparticles are used as a water-soluble baking soda (sodium hydrogencarbonate). Baking soda, when it is dissolved in water, becomes weakly alkaline. Baking soda, which is generally available to purchasers, for example, can be used by (3) and the company. In the first embodiment, the average particle size of baking soda is about 40 μm.

Further, in the first embodiment, as shown in Fig. 9, the width H1 of the mixture K which is directly blown from the mixture discharge port 29a to the blade edge 22a of the cutting edge 22 becomes a relatively cutting edge. The thickness T of 22 is smaller to form the mixture discharge port 29a. The blade tip 22a directly attached to the cutting edge 22 from the mixture discharge port 29a The width H1 of the mixture K at the place is a width in the Y-axis direction of the mixture K which directly collides with the blade tip 22a of the cutting edge 22 from the mixture discharge port 29a. Therefore, in the mixture supply unit 29 of the first embodiment, if the mixture K is blown to the blade edge 22a of the cutting edge 22 which is parallel to the Y-axis direction in the cross section shown in Fig. 8, it is as shown in Fig. 9. Generally, the center edge of the blade edge 22a of the cutting edge 22 is consumed in the Y-axis direction. Further, in the present invention, the cutting edge 22 is generally such that the thickness T of the blade edge 22a is about 30 μm to 1 mm, and the diameter of the mixture discharge port 29a is also equal to the thickness of the blade edge 22a of the cutting edge 22. Ideal.

Further, in the present invention, as the fluid, a pure liquid which is a liquid or a mixture of a liquid such as pure water and an inert gas such as air or nitrogen (so-called two fluids) may be used. In the present invention, as the fluid, a gas composed of an inert gas such as air or nitrogen, or a gas composed of a liquid such as pure water or an inert gas such as air or nitrogen may be used. a mixture (so-called 2 fluids), one of these. Further, in the present invention, as the fine particles, those having an average particle diameter of 10 μm to 100 μm may be used as water-soluble particles, and when they are dissolved in water, they may be slightly acidic, slightly alkaline or neutral, or may be Non-water soluble such as plastic. Further, the fine particles may be alumina (Al ₂ O ₃ ) or a resin containing a calcium oxide powder or a nylon (polyamide) formed by pulverizing a shell. Further, the average particle diameter of the fine particles is preferably from 5 μm to 50 μm. The type and size of the microparticles are suitably selected in accordance with the adhesive of the cutting edge 22. For example, if fine particles composed of alumina having a large particle diameter are used, the impact on the cutting edge 22 is large, the dressing speed is fast, and the amount of dressing per unit time is increased. When a fine particle composed of a light resin or the like is used, the impact on the cutting edge 22 can be made small, and the dressing speed and the amount of dressing per unit time can be suppressed. Further, when pure water is used as the fluid and a water-soluble substance such as baking soda is used as the fine particles, it is preferably in the vicinity of the cutting edge 22, that is, at a position close to the cutting edge 22. To mix fluids and particles. In this case, it is preferable that the supply pipe for supplying the fluid and the supply pipe for supplying the fine particles are merged in the vicinity of the cutting edge 22, that is, immediately before reaching the cutting edge 22, and the mixture K is formed.

The X-axis moving means 30 is a relative movement of the holding portion 10 with respect to the mandrel 21 in a direction perpendicular to the central axis direction of the mandrel 21 and parallel to the surface 11a of the holding portion 10. .

The input means 100 is connected to the control means 90 and is provided at the display means 101 for displaying the state of the machining operation. The display means 101 is constituted by a display panel or the like such as a liquid crystal display or an organic EL display. The display means 101 displays information such as characters, graphics, portraits, and the like in response to signals input from the control means 90. The input means 100 is configured to allow a worker to perform a button operation, and is configured by a touch panel or the like provided on the display surface of the display means 101. The input means 100 inputs a signal corresponding to the accepted operation to the control means 90.

The control means 90 is a controller for each of the above-described constituent elements constituting the cutting device 1. The control means 90 is a method in which the cutting device 1 performs a machining operation on the workpiece W, that is, the cutting method of the first embodiment. In addition, the control means 90 is constituted by, for example, an arithmetic processing device including a CPU or the like, or a microprocessor (not shown) including a ROM or a RAM. The control means 90 is connected to the display means 101 and the input means 100 used when the operator registers the processed content information or the like.

Next, the processing operation of the cutting apparatus 1 of the first embodiment, that is, the cutting method of the first embodiment will be described. The cutting method according to the first embodiment is a cutting method in which the workpiece W is cut using the cutting edge 22. Fig. 10 (a) is an example of a flow chart showing the cutting method of the first embodiment, and Fig. 10 (b) is a flow chart executed in the cutting work shown in Fig. 10 (a). One of them. Fig. 11 (a) is a cross-sectional view showing the outline of the cutting edge of the cutting edge of the cutting method of the cutting method of the first embodiment, and Fig. 11 (b) is for the first embodiment. A cross-sectional view showing the outline of the cutting edge of the cutting edge after the mixture is blown by the cutting method.

In the cutting method, first, the operator registers the processed content information in the control means 90, and places the workpiece W on the holding portion 10 separated from the cutting means 20, and when there is a slave worker When the start of the machining operation is instructed, the cutting device 1 starts the machining operation. In the machining operation, the control means 90 sucks and holds the workpiece W placed on the holding portion 10, and causes the workpiece W to be processed. The holding portion 10 that has been suctioned and held moves to the lower side of the cutting means 20.

Further, after the alignment is performed, the control means 90 supplies the cutting water to the cutting edge 22 from the cutting water supply nozzle 27 based on the machining content information, and rotates the cutting edge 22 while holding the holding portion 10 and The cutting edge 22 is relatively moved along the division planned line L to perform cutting work for cutting the workpiece W (step ST1). The control means 90 determines whether or not the cutting process is completed based on the machining content information (step ST2), and if it is determined that the cutting process has not been completed (step ST2: NO), the cutting process is repeatedly executed. When the control means 90 determines that the cutting process is completed (step ST2: YES), the cutting means 20 is separated from the workpiece W by the Z-axis moving means 50. The holding portion 10 is separated from the lower side of the cutting means 20 by the X-axis moving means 50. After that, when the holding unit 10 is separated from the lower side of the cutting unit 20, the control unit 90 releases the suction and holding of the holding unit 10, and the worker removes the workpiece W that has been subjected to the cutting process on the holding unit 10, and The workpiece W before the cutting is placed on the holding portion 10. This type of work is repeated, and the cutting device 1 performs cutting on the workpiece W.

In the cutting method of the first embodiment, due to the combination between the cutting edge 22 and the workpiece W, as shown in Fig. 11(a), in the cutting process, the tip 22a of the cutting edge 22 is mainly Both ends of the Y-axis direction are consumed. The control means 90 determines whether or not the central axis current is equal to or greater than a specific value in the cutting process (step ST1) (step ST3). Further, this so-called specific value is preferably set as the adhesion to the cutting edge CW of the cutting edge 22a of the cutting edge 22 or the cutting edge 22a of the cutting edge 22. The value of the consumption will have an adverse effect on the cutting process.

When the control means 90 determines that the spindle current system is equal to or greater than a specific value (step ST3: YES), the mixture supply source 29b is operated or maintained in the operating state, and the mixture supply unit is executed in the cutting process. 29, the process of blowing the mixture K of the gas and the fine particles to the blade edge 22a of the cutting edge 22 (step ST4), and returning to step ST3. As a result, as shown in FIG. 11(a), the mixture K is mainly blown to the center of the Y-axis direction of the blade edge 22a of the cutting edge 22, and as shown in FIG. 7(b), The chips CW are removed, and the center of the blade edge 22a in the Y-axis direction is trimmed. The fine particles of the mixture K, which are removed by the cuttings CW and trimmed to the cutting edge 22a, are dissolved in the cutting water and pass through the unillustrated row together with the cutting water because the body is water-soluble baking soda. The outlet is discharged to the outside of the cutting device 1. In the cutting method of the first embodiment, when the mandrel current system is equal to or greater than a specific value, the workpiece W is cut while the workpiece W is being cut, and the cutting edge 22 is trimmed.

When the control means 90 determines that the spindle current system is not equal to or greater than the specific value (step ST3: NO), the mixture supply source 29b is stopped or maintained in the stopped state (step ST5), and the process returns to step ST3. In this manner, the control means 90 monitors the mandrel current flowing at the mandrel 21 in the cutting process, and determines whether or not the mixture K is to be supplied based on the magnitude of the mandrel current value. As a result, as shown in FIG. 11(b), the blade edge 22a of the cutting edge 22 is formed in parallel with the Y-axis direction.

As described above, according to the cutting method and the cutting apparatus 1 of the first embodiment, the mixture K of the gas and the fine particles is blown to the cutting edge 22a of the cutting edge 22 in the cutting process, and the cutting edge 22a of the cutting edge 22 is performed. trim. Therefore, it is possible to remove the cuttings CW from the cutting edge 22a of the cutting edge 22 in the cutting process, and to maintain the cutting edge 22a parallel to the Y-axis direction at the cross section. Therefore, according to the cutting method and the cutting apparatus 1 of the first embodiment, it is possible to suppress the deterioration of the quality of the workpiece W to be cut. Further, since the cutting edge 22a of the cutting edge 22 is trimmed during the cutting process, it is not necessary to provide a dedicated project for trimming. Therefore, according to the cutting method and the cutting apparatus 1 of the first embodiment, it is possible to achieve the efficiency of the trimming work and improve the productivity.

Further, according to the cutting method and the cutting apparatus 1 of the first embodiment, a dummy pattern (false pad) for TEG or CMP is formed on the package substrate at the planned dividing line L as the workpiece W. When the semiconductor wafer or the optical element wafer of the metal M is cut, it is possible to suppress clogging of the cutting edge 22 of the metal M. According to the cutting method and the cutting apparatus 1 of the first embodiment, when the workpiece W is cut as the workpiece W, it is worn by the trimming by the mixture K. The granules 26 fall off and can suppress the debris. According to the cutting method and the cutting apparatus 1 of the first embodiment, when the BGA substrate is cut as the workpiece W, the blade edge 22a of the cutting edge 22 can be maintained flat in the horizontal direction. According to the cutting method and cutting device 1 of the first embodiment, When the substrate having the insulating film is cut as the workpiece W, clogging of the resin of the cutting edge 22 can be suppressed. According to the cutting method and the cutting apparatus 1 of the first embodiment, when the wafer W having the functional layer FL laminated on the surface is cut as the workpiece W, the functional layer FL can be used. Peeling is suppressed.

Further, according to the cutting method and the cutting apparatus 1, since the mixture supply unit 29 trims the center of the blade edge 22a in the Y-axis direction, it is possible to consume both ends in the Y-axis direction during the cutting process. The blade edge 22a of the cutting edge 22 is maintained at a cross section parallel to the Y-axis direction. Further, according to the cutting method and the cutting apparatus 1, the width H1 of the mixture K directly blown from the blade edge 22a of the cutting edge 22 from the mixture supply portion 29 is smaller than the thickness T of the cutting edge 22, so that it is smaller. The mixture supply unit 29 can trim the center of the cutting edge 22 in the Y-axis direction.

According to the cutting method and the cutting apparatus 1, the mixture supply portion 29 extends linearly in parallel with both side faces of the cutting edge 22, and the center of the mixture discharge port 29a and the cutting edge 22a of the cutting edge 22 Since the center opposing surface in the Y-axis direction is such that the cutting edge 22a of the cutting edge 22 can be held parallel to the Y-axis direction at the cross section. Further, according to the cutting method and the cutting apparatus 1, since the mixture supply unit 29 is provided in the blade body 24, it is possible to perform the trimming surely in the cutting process.

Further, according to the cutting method and the cutting device 1, If the spindle current becomes a specific value or more and the cutting edge 22 becomes difficult to perform cutting, the mixture K is blown to the cutting edge 22a of the cutting edge 22, so that it can be trimmed at the necessary timing without There is a case where the mixture K is wasted or the cutting edge 22 is trimmed more than necessary and the life thereof is shortened.

Here, as the cutting edge 22, in order to cut the hard workpiece W, a blade which is firmly fixed by a metal (a bonding material made of a metal) is used, and an electroforming blade is firmly fixed. . If the cutting is continued, the diamond granules will be worn. However, since the metal retaining force is large, the worn diamond granules are hard to fall off. Here, according to the cutting method and the cutting apparatus 1, by kneading and trimming the mixture K with respect to the blade edge 22a of the cutting edge 22, it is easy to cause the diamond granules to fall off from the metal, and it is possible to The worn diamond particles are properly cut. Further, although not limited to the case of metal follow-up, the mixture K resulting from the high pressure is sprayed to the subsequent portion of the cutting edge 22, as shown in Fig. 7(b), the subsequent portion of the cutting edge 22 is Eroded into a concave shape. By the concave portion due to the erosion, the cuttings CW are easily discharged from the cutting edge 22, and the worn granules 26 can be easily detached.

According to the cutting method of the first embodiment and the cutting device 1, since the water-soluble baking soda is used as the fine particles constituting the mixture K, even if the mixture K is blown to the rotating cutting edge 22, the mixture K The microparticles also become rapidly dissolved in the cutting water. Therefore, even in the cutting project, the mixture K is blown and repaired. In addition, it is also possible to suppress the case where the mixture K is scattered to the periphery. Further, since the fine particles of the mixture K can be recovered together with the cutting water, there is no need to additionally provide a means for recycling.

[Embodiment 2]

The cutting method and the cutting device 1 according to the second embodiment of the present invention will be described with reference to the drawings. Fig. 12 is a perspective view showing a mixture supply unit of the cutting device according to the second embodiment of the present invention. Fig. 13 is a side cross-sectional view showing a state in which the mixture supply portion shown in Fig. 12 is trimmed to the cutting edge. In FIGS. 12 and 13 , the same components as those in the first embodiment are denoted by the same reference numerals, and their description is omitted.

In the cutting device 1 of the second embodiment, as shown in FIG. 12, the blade cover 24 of the cutting device 20 is not provided with the mixture supply portion 29, but is provided with an interruption period during the cutting of the workpiece W. The mixture supply unit 60 of the mixture K is supplied toward the cutting edge 22 . The mixture supply unit 60, as shown in Fig. 13, is provided with a trimming portion 61 fixed to the vicinity of the chuck table 10, and a mixture K supplied from the mixture supply source 29b to the trimming portion 61. The supply pipe 62, and the suction unit 63 that sucks the mixture K in the trimming portion 61, and the discharge pipe 64 that guides the mixture K in the trimming portion 61 to the suction unit 63. Further, in the second embodiment, the trimming portion 61 of the mixture supply unit 60 is fixed to the vicinity of the chuck table 10. However, in the present invention, the mixture is not limited thereto, and the mixture supply unit may be used. 60 trimming unit 61 adjacent Set up on the suction table 10. Further, in the present invention, the dressing portion 61 of the mixture supply portion 60 may be provided in the device body 2 of the cutting device 1.

The trimming portion 61 is formed in a box shape in which the supply pipe 62 is connected to one end in the longitudinal direction and the discharge pipe 64 is connected to the other end. The trimming portion 61 is disposed such that the longitudinal direction thereof is parallel to the X-axis direction, and the passage 61b that flows from the supply pipe 62 toward the discharge pipe 64 in the X-axis direction is provided inside. . The trimming portion 61 is provided with an intrusion hole 65 extending in the X-axis direction and invading the blade edge of the cutting edge 22 at an upper surface 61a opposed to the cutting edge 22.

The mixture supply unit 60 blows the mixture K supplied from the mixture supply source 29b in parallel with the X-axis direction to the blade edge 22a of the cutting edge 22 that intrudes into the intrusion hole 65, and for cutting The blade 22 is trimmed. Further, the mixture supply unit 60 blows the mixture K toward the opposite direction to the rotation direction R of the cutting edge 22 of the cutting edge 22 in the intrusion hole 65 (to change the relative speed of one point of the cutting edge 22 and the mixture K). The big way to do it is to blow it up, but ideal.) The mixture supply unit 60 can increase the speed of the dressing by blowing the mixture K in the opposite direction to the rotation direction R of the cutting edge 22 of the cutting edge 22 in the intrusion hole 65. The mixture supply unit 60 is configured to blow the mixture K in parallel with the X-axis direction and to restrict the blowing of the mixture K to the workpiece W.

The cutting device 1 of the second embodiment is used with the cutting edge 22 The cutting method for cutting the workpiece W includes a cutting process in which the cutting water is supplied to the workpiece W, and the cutting edge 22 is rotated to cut the workpiece W; and during the interruption of the cutting, The cutting edge 22 is blown with a work of a mixture K of a gas and a fine particle as a fluid. Specifically, the control device 90 of the cutting device 1 drives the X-axis moving means 30, the Y-axis moving means 40, and the Z-axis movement every time one line is cut or a plurality of lines are cut for the dividing line L. The means 50 moves the cutting edge 22 and causes the cutting edge of the cutting edge 22 to intrude into the intrusion hole 65, and the mixture K is blown for a specific time with respect to the cutting edge of the cutting edge 22 for trimming. Further, the cutting device 1 of the second embodiment may be cut before the workpiece W is finished and exchanged for the workpiece W before cutting, that is, by the workpiece W. In the interruption period, the X-axis moving means 30, the Y-axis moving means 40, and the Z-axis moving means 50 are driven to move the cutting edge 22, and the cutting edge of the cutting edge 22 intrudes into the intrusion hole 65, and for the cutting edge 22 The blade K is used to blow the mixture K at a specific time for trimming. Further, the control means 90 of the cutting apparatus 1 according to the second embodiment can monitor the current flowing through the mandrel 21 in the same manner as in the first embodiment, and determine whether or not to perform trimming based on the magnitude of the current value. The cutting device 1 of the second embodiment is the same as the first embodiment, and the fluid is made of a gas composed of an inert gas such as air or nitrogen, or may be used without being limited to a gas. A liquid such as water or a mixture of a liquid such as pure water and an inert gas such as air or nitrogen (so-called 2 fluid).

As described above, according to the cutting method of the second embodiment and the cutting device 1, the mixture K of the fluid and the fine particles is blown to the cutting edge 22a of the cutting edge 22 during the interruption of the cutting, and the cutting edge of the cutting edge 22 is applied. 22a is trimmed. Therefore, it is possible to remove the cuttings CW from the cutting edge 22a of the cutting edge 22 during the interruption of the cutting, and to keep the cutting edge 22a parallel to the Y direction at the cross section. Therefore, according to the cutting method and the cutting apparatus 1 of the second embodiment, the same as in the first embodiment, it is possible to suppress the deterioration of the quality of the workpiece W to be cut.

Further, according to the cutting method and the cutting apparatus 1 of the second embodiment, since the cutting edge 22a of the cutting edge 22 is trimmed during the cutting interruption period, it is not necessary to provide a dedicated project for trimming. Further, the mixture K does not have an influence on the workpiece W. Therefore, according to the cutting method and the cutting apparatus 1 of the first embodiment, it is possible to achieve the efficiency of the trimming work and improve the productivity, and it is possible to suppress the deterioration of the quality of the workpiece W. Further, since the mixture supply unit 60 includes the trimming unit 61, the supply tube 62, and the discharge tube 63, it is possible to suppress the diffusion of the mixture K to the outside.

Further, according to the cutting method and the cutting device 1 of the second embodiment, the blade edge 22a of the cutting edge 22 is infiltrated into the trimming portion 61 formed in the mixture supply portion 60 provided adjacent to the chuck table 10. Since the inside of the hole 65 is intruded and trimmed, it is not necessary to precisely position the cutting edge 22 during dressing. Again, depending on the implementation In the cutting method of the second embodiment and the cutting device 1, the blade edge 22a of the cutting edge 22 is caused to enter the intrusion hole 65 formed in the trimming portion 61 of the mixture supply portion 60 provided adjacent to the chuck table 10, And trimming is performed, so that it is possible to suppress the case where the mixture K is blown to the workpiece W and causes the workpiece W to be damaged.

Further, the cutting apparatus 1 of the second embodiment can be provided with a blade wear detecting means (not shown) that detects the amount of wear of the cutting edge 22, similarly to the fourth embodiment shown below. The blade wear detecting means is the same as that of the fourth embodiment, and includes a light-emitting element and a light-receiving element that sandwich the cutting edge 22, and detects the amount of wear of the cutting edge 22 by detecting the amount of light received by the light-receiving element. And outputting the detection result to the control means 90. In the case where the cutting tool 1 of the second embodiment is provided with the edge wear detecting means, the cutting amount of the cutting edge 22 can be detected, and the Z axis moving means 50 can be controlled to be trimmed. At the same time, the position of the cutting edge 22 in the Z-axis direction is controlled to obtain a certain trim width. In this case, a moving means (not shown) for moving the trimming portion 61 of the mixture supply unit 60 in the Z-axis direction may be provided, and the Z-axis moving means 50 or/and a moving means not shown may be controlled. And the control of the position of the cutting edge 22 in the Z-axis direction at the time of dressing is performed.

According to the second embodiment, the following cutting method and cutting device 1 can be obtained.

(Note 1)

A cutting method is a cutting method for cutting a workpiece W using the cutting edge 22, and is characterized in that the cutting water is supplied to the workpiece W, and the cutting edge 22 is rotated to cut the The cutting work of the workpiece W; and the engineering of blowing the mixture K of the fluid and the fine particles for the cutting edge 22 during the interruption of the cutting work.

(Note 2)

A cutting apparatus 1 comprising: a holding portion 10 that holds a workpiece W on a surface thereof; and a spindle 21 that is freely rotatable and a cutting edge 22 that is attached to the spindle 21 The cutting means 20; and the X-axis direction which is the direction of the central axis of the mandrel 21, and the X-axis direction which is perpendicular to the Y-axis direction and which is parallel to the surface 11a of the holding portion 10, and The X-axis moving means 30 and the Y-axis moving means 40 for relatively moving the cutting edge 22 with respect to the holding portion 10 in the Z-axis direction perpendicular to the Y-axis direction and the surface 11a of the holding portion 10 The Z-axis moving means 50 and the cutting water supply unit 27 for supplying the cutting water to the workpiece W, the cutting apparatus 1 is provided adjacent to the holding unit 10, and is provided in the workpiece W In the interruption period of the cutting, the mixture K of the fluid and the fine particles is supplied to the mixture supply portion 60 which is supplied to the cutting edge 22.

(Note 3)

The cutting device 1 according to the second aspect, wherein the current flowing at the mandrel 21 is monitored and based on the current value Small, and decide whether to supply the mixture K.

[Embodiment 3]

The cutting method and the cutting device 1 according to the third embodiment of the present invention will be described with reference to the drawings. Fig. 14 is a side view showing a cutting device and a mixture supply portion of the cutting device according to the third embodiment of the present invention. In FIG. 14 , the same components as those in the first embodiment and the second embodiment are denoted by the same reference numerals, and their description is omitted.

In the cutting device 1 of the third embodiment, as shown in FIG. 14, the blade cover 24 of the cutting device 20 is provided with the mixture supply portion 29. The mixture supply unit 29 of the third embodiment is provided with a dressing portion 29c fixed to the blade body 24 and a mixture K supplied from the mixture supply source 29b to the dressing portion as shown in Fig. 14 . The supply pipe 62 at 29c, and the suction unit 63 that sucks the mixture K in the trimming portion 29c, and the mixture K in the trimming portion 29c are guided to the discharge pipe 64 at the suction unit 63.

The trimming portion 29c is formed in a tubular shape in which the supply pipe 62 is connected to one end in the longitudinal direction and the discharge pipe 64 is connected to the other end. The trimming portion 29c is disposed such that the longitudinal direction thereof is parallel to the tangent of the blade edge 22a of the cutting edge 22, and the mixture K supplied from the supply pipe 62 is disposed inside the discharge pipe 64 to be cut along the inside. A passage 29d through which the cutting edge 22a of the blade 22 flows. The trimming portion 29c is provided with an intrusion hole 29e for constantly invading the blade edge 22a of the cutting edge 22. The trimming portion 29c is formed by making the cutting edge 22 of the cutting edge 22 opposite to the mandrel 21 Further, the inside of the workpiece W is intruded into the intrusion hole 29e, and the mixture K flows along the tangential direction of the cutting edge 22a of the cutting edge 22, and the mixture K is blown to the workpiece W. limit.

The mixture supply unit 60 blows the mixture K supplied from the mixture supply source 29b to the blade edge 22a of the cutting edge 22 that has entered the intrusion hole 29e, and trims the cutting edge 22. Further, the mixture supply unit 60 blows the mixture K in the opposite direction to the rotation direction R of the cutting edge 22 of the cutting edge 22 which intrudes into the intrusion hole 29e (to change the relative speed of one point of the cutting edge 22 and the mixture K). The big way to do it is to blow it up, but ideal.) The mixture supply unit 60 can blow the mixture K in the opposite direction to the rotation direction R of the cutting edge 22 of the cutting edge 22, thereby improving the speed of dressing.

The cutting device 1 of the third embodiment is configured to cut the workpiece W by using the cutting edge 22, and to supply the cutting water to the workpiece W, and to rotate the cutting edge 22 to cut the workpiece W. The cutting process; and in the cutting process, the cutting edge 22 is blown with a mixture of gas and fine particles K as a fluid. Further, the control means 90 of the cutting apparatus 1 of the third embodiment can monitor the current flowing through the mandrel 21 in the same manner as in the first embodiment, and determine whether or not to perform trimming based on the magnitude of the current value. The cutting device 1 of the third embodiment is the same as the first embodiment, and a gas composed of an inert gas such as air or nitrogen is used as the fluid, or may be used without being limited to a gas. a liquid such as water or a gas composed of pure water or an inert gas such as air or nitrogen Mixture (so called 2 fluids).

As described above, according to the cutting method of the third embodiment and the cutting apparatus 1, the mixture K of the gas and the fine particles is blown to the cutting edge 22a of the cutting edge 22 in the cutting process, and the cutting edge 22a of the cutting edge 22 is performed. trim. Therefore, it is possible to remove the cuttings CW from the cutting edge 22a of the cutting edge 22 in the cutting process, and to maintain the cutting edge 22a parallel to the Y-axis direction at the cross section. Therefore, according to the cutting method and the cutting apparatus 1 of the third embodiment, as in the first embodiment and the second embodiment, it is possible to suppress the deterioration of the quality of the workpiece W to be cut.

Further, according to the cutting method and the cutting apparatus 1 of the third embodiment, since the cutting edge 22a of the cutting edge 22 is trimmed during the cutting process, it is not necessary to provide a dedicated project for trimming. Therefore, according to the cutting method and the cutting apparatus 1 of the third embodiment, the efficiency of the trimming operation can be improved and the productivity can be improved. Further, according to the cutting method and the cutting device 1 of the third embodiment, since the blade cover 24 of the cutting device 20 is provided with the mixture supply portion 29, it can be used in the cutting process (or not After cutting one line or a plurality of lines when the workpiece W is cut by the cutting edge 22 (as in the second embodiment, the cutting edge 22 is generally not moved to the trim portion 61) The supply of the mixture K is started and trimmed. Therefore, the cutting method and the cutting apparatus 1 of the third embodiment can be caused by the time required for the movement of the cutting edge 22 and the alignment with the trimming portion 61. Further, the cutting of the third embodiment In the cutting device 1 , since the blade cover 24 of the cutting device 20 is provided with the mixture supply portion 29 and can be trimmed other than in the cutting process, the cutting edge 22 can be fed in the Y-axis direction. The time is trimmed for use.

Further, according to the cutting method and the cutting apparatus 1 of the third embodiment, the mixture supply unit 29 intrudes the blade edge 22a of the cutting edge 22 from the position away from the workpiece W to the position of the workpiece W. The inside of the hole 29e is intruded and trimmed, so that it is possible to suppress the case where the mixture K is blown to the workpiece W and the workpiece W is damaged. According to the cutting method and the cutting apparatus 1 of the third embodiment, since the blade cover 24 of the cutting device 20 is provided with the mixture supply unit 29, it is not necessary to provide the trimming article around the chuck table 10, so that it is not necessary to provide the trimming article around the chuck table 10. It is possible to save space around the suction table 10.

[Embodiment 4]

The cutting method and the cutting device 1 according to the fourth embodiment of the present invention will be described with reference to the drawings. Fig. 15 is a side view showing a cutting device and a mixture supply portion of the cutting device according to the fourth embodiment of the present invention. In FIG. 15 , the same components as those in the first embodiment, the second embodiment, and the third embodiment are denoted by the same reference numerals, and the description thereof is omitted.

In addition to the mixture supply unit 29 of the third embodiment, the cutting apparatus 1 of the fourth embodiment further includes a blade wear detecting means 29f and a supply unit moving means 29g. Blade wear The detecting means 29f includes a light-emitting element and a light-receiving element that sandwich the cutting edge 22, and detects the amount of wear of the cutting edge 22 by detecting the amount of light received by the light-receiving element, and outputs the detection result to the control. At 90.

The supply unit moving means 29g moves the mixture supply unit 29 in the radial direction of the cutting edge 22 in accordance with an instruction from the control means 90. The supply unit moving means 29g moves the mixture supply unit 29 in the radial direction of the cutting edge 22 by expanding and contracting the rod of the air cylinder.

The cutting device 1 of the fourth embodiment is configured to cut the workpiece W by using the cutting edge 22, and to supply the cutting water to the workpiece W, and to rotate the cutting edge 22 to cut the workpiece W. The cutting process; and in the cutting process, the process of blowing a mixture K of fluid (liquid and/or gas) and fine particles for the cutting edge 22. Further, in the control means 90 of the cutting apparatus 1 of the fourth embodiment, the current flowing through the mandrel 21 can be monitored in the same manner as in the first embodiment, and whether or not trimming is to be performed based on the magnitude of the current value can be determined. The cutting device 1 of the fourth embodiment is the same as the first embodiment, and a gas composed of an inert gas such as air or nitrogen is used as the fluid, or may be used without being limited to a gas. A liquid such as water or a mixture of a liquid such as pure water and an inert gas such as air or nitrogen (so-called 2 fluid).

Further, the control means 90 of the cutting apparatus 1 according to the fourth embodiment is based on the detection result of the edge wear detecting means 29f so that the mixture K supplied from the mixture supply portion 29 and the cutting edge 22a of the cutting edge 22 In a conflicting manner, the supply portion moving means 29g is controlled, and the relative position between the cutting edge 22 and the mixture supply portion 29 is adjusted in accordance with the degree of consumption of the cutting edge 22. Specifically, in the supply unit moving means 29g, since the diameter of the blade is reduced as the wear of the cutting edge 22 progresses, the mixture supply portion 29 is relatively oriented toward the center of the cutting edge 22 (parallel). mobile. Further, in the present invention, the supply unit moving means 29g may be adjusted with respect to the inclination of the horizontal plane of the mixture supply unit 29 (the angle at which the mixture K is supplied with respect to the cutting edge 22). That is, in the present invention, the supply portion moving means 29 may be adjusted for the relative position between the cutting edge 22 and the mixture supply portion 29 in the radial direction of the cutting edge 22, or may be directed to the mixture supply portion. The inclination of the horizontal plane of 29 is adjusted, and the relative position between the cutting edge 22 and the mixture supply portion 29 in the radial direction of the cutting edge 22 and the inclination with respect to the horizontal plane of the mixture supply portion 29 can be adjusted.

As described above, according to the cutting method of the fourth embodiment and the cutting device 1, the mixture of the gas or the liquid and the fine particles K is blown to the cutting edge 22a of the cutting edge 22 in the cutting process, and the cutting edge of the cutting edge 22 is used. 22a is trimmed. Therefore, it is possible to remove the cuttings CW from the cutting edge 22a of the cutting edge 22 in the cutting process, and to maintain the cutting edge 22a parallel to the Y-axis direction at the cross section. Therefore, according to the cutting method and the cutting apparatus 1 of the fourth embodiment, it is possible to suppress the deterioration of the quality of the workpiece W to be cut, similarly to the first to third embodiments.

Moreover, according to the cutting method and the cutting device of the fourth embodiment When set to 1, the cutting edge 22a of the cutting edge 22 is trimmed in the cutting process, so that it is not necessary to provide a dedicated project for trimming. Therefore, according to the cutting method and the cutting apparatus 1 of the fourth embodiment, it is possible to achieve the efficiency of the trimming work and improve the productivity. Further, according to the cutting method and the cutting device 1 of the fourth embodiment, since the blade cover 24 of the cutting device 20 is provided with the mixture supply portion 29, it can be used in the cutting process (or not After cutting one line or a plurality of lines when the workpiece W is cut by the cutting edge 22 (as in the second embodiment, the cutting edge 22 is generally not moved to the trim portion 61) The supply of the mixture K is started and trimmed. Therefore, the cutting method and the cutting apparatus 1 of the third embodiment can be caused by the time required for the movement of the cutting edge 22 and the alignment with the trimming portion 61. Further, in the cutting method and the cutting device 1 of the third embodiment, since the blade cover body 24 of the cutting device 20 is provided with the mixture supply portion 29, it can be trimmed other than in the cutting process, so that the cutting edge can be used for the cutting edge The time taken by the 22 toward the Y-axis direction is used for trimming.

Further, according to the cutting method and the cutting apparatus 1 of the fourth embodiment, the mixture supply unit 29 intrudes the blade edge 22a of the cutting edge 22 from the place where the workpiece W is further away from the spindle 21 The inside of the hole 29e is intruded and trimmed, so that it is possible to suppress the case where the mixture K is blown to the workpiece W and the workpiece W is damaged. According to the cutting method and the cutting apparatus 1 of the fourth embodiment, the blade cover 24 of the cutting device 20 is provided with the mixture supply unit. Therefore, it is not necessary to provide an article for trimming around the chuck table 10, so that it is possible to save space around the chuck table 10.

Further, according to the cutting method and the cutting device 1 of the fourth embodiment, the supply unit moving means 29 is controlled and positioned to supply the mixture K supplied from the mixture supply unit 29 based on the detection result of the edge wear detecting means 29f. It will be at a position that conflicts with the cutting edge 22a of the cutting edge 22, and therefore, it can be surely trimmed during cutting.

According to the third embodiment and the fourth embodiment, the following cutting device 1 can be obtained.

(Note 4)

A cutting apparatus 1 comprising: a holding portion 10 that holds a workpiece W on a surface thereof; and a spindle 21 that is freely rotatable and a cutting edge 22 that is attached to the spindle 21 The cutting means 20 and the cutting water supply unit 27 that supplies the cutting water to the workpiece W, the cutting apparatus 1 is provided to be attached to the cutting means 20, and in the cutting of the workpiece W, The mixture K of the fluid and the fine particles is supplied to the mixture supply portion 29 along the tangent to the cutting edge 22a of the cutting edge 22.

(Note 5)

The cutting device 1 according to the fourth aspect of the invention includes the blade wear detecting means 29f and the base for detecting the amount of wear of the cutting edge 22. The supply unit moving means 29g for adjusting the position of the mixture supply unit 29 by the detection result of the blade wear detecting means 29f.

[Modification]

The cutting method and the cutting device 1 according to the modifications of the first to fourth embodiments of the present invention will be described with reference to the drawings. Fig. 16 is a cross-sectional view showing a state in which the tip of the cutting edge is trimmed in the mixture supply unit of the cutting device according to the modification of the first to fourth embodiments. Fig. 17 (a) is a cross-sectional view showing the outline of the cutting edge of the cutting edge of the cutting method of the cutting method according to the modification of the first to fourth embodiments, Fig. 17 (b), A cross-sectional view showing the outline of the cutting edge of the cutting edge after the mixture is blown to the cutting method according to the modification of the first to fourth embodiments. In the same manner as in the above-described first to fourth embodiments, the same reference numerals will be given to the same portions as those in the first embodiment to the fourth embodiment, and the description thereof will be omitted.

In the modification, as shown in Fig. 16, the width H2 of the mixture K which is directly blown from the mixture discharge port 29a to the blade edge 22a of the cutting edge 22 becomes the thickness T of the cutting edge 22. In a larger way, a mixture discharge port 29a is formed. Therefore, in the mixture supply portion 29 of the modification, if the mixture K is blown to the blade edge 22a of the cutting edge 22 which is parallel to the Y-axis direction in the cross section, as shown in Fig. 16, the cutting is performed. Both ends of the blade tip 22a in the Y-axis direction are consumed.

Moreover, in the cutting method of the modification, the cutting edge is caused The combination between 22 and the workpiece W is as shown in Fig. 17 (a), and in the cutting process, the tip end 22a of the cutting edge 22 is mainly consumed in the center of the Y-axis direction. Therefore, in the cutting method of the modification, when the mandrel current is greater than or equal to a specific value in the cutting process, the mixture K is blown to the blade edge 22a of the cutting edge 22, and Y to the blade edge 22a of the cutting edge 22 Both ends of the axial direction are trimmed. Therefore, in the cutting method of the modified example, the cutting edge 22a of the cutting edge 22 which is consumed in the center of the Y-axis direction during the cutting process can be generally at the cross section as shown in Fig. 17 (b). Keep parallel to the Y-axis direction. Further, according to the cutting method and the cutting apparatus 1 according to the modification, it is possible to improve productivity and reduce the deterioration of the quality of the workpiece, and to supply the mixture from the mixture, in the same manner as in the first to fourth embodiments. The width H2 of the mixture K directly blown by the blade edge 22a of the cutting edge 22 is larger than the thickness T of the cutting edge 22, so that the mixture supply portion 29 can be two in the Y-axis direction of the cutting edge 22. The ends are trimmed.

In the first to fourth embodiments and the modifications described above, the mixture supply unit 29 is provided in the blade cover 24 and is configured to be trimmed simultaneously with the cutting process. However, in the present invention, The mixture supply portion 29 may not be provided at the blade cover 24. In this case, it is preferable that the mixture supply portion 29 is provided at a specific position of the cutting device 1 separated from the holding portion 10, for example, and the blade K is attached to the cutting edge 22 outside the cutting process. The work at the tip 22a.

Further, in the above-described first to fourth embodiments and changes In the example, the mixture supply portion 29 is provided at the blade cover body 24, and if the mandrel current is equal to or higher than a specific value, the mixture K is blown to the blade edge 22a of the cutting edge 22. However, in the present invention, the mixture supply portion 29 may be provided at the blade cover body 24, and the mixture K is constantly attached to the blade edge 22a of the cutting edge 22 in the cutting process without the mandrel current. At the office.

In the first to fourth embodiments and the modifications described above, the present invention is applied to the cutting device 1 including only one cutting device 20. However, in the present invention, it is also applicable to a so-called double-cut type cutting device including two cutting means 20. Further, in the case of being applied to a double-cut type cutting device, the mixture supply portion 29 may be provided at the blade cover body 24 or at a specific position separated from the holding portion 10. Further, in the double-cut type cutting device, when the mixture supply portion 29 is provided at a specific position separated from the holding portion 10, at least one of the mixture supply portions 29 may be provided. Further, in the cutting apparatus 1 of the present invention, the mixture supply unit 29 may be attached to the blade body 24, or the mixture supply source 29 may supply the mixture K to the cutting edge of the cutting edge 22 in parallel with the X-axis direction. 22a.

Further, in the first embodiment, the third embodiment, and the fourth embodiment, the mixture K may be supplied to the blade edge 22a at the center of the Z-axis direction of the cutting edge 22 in parallel with the X-axis direction. Further, in the first to fourth embodiments, in addition to monitoring the current flowing at the mandrel and determining whether or not to supply the mixture K based on the magnitude of the current value, it is also possible to perform the alignment. Camera not shown The means is to photograph the state of the cutting groove (the size of the chip or the like) at a constant timing or at a specific timing, and according to the imaging result, when the state of the cutting groove is not within the allowable range, the trimming is performed. In addition, the specific timing may be determined based on at least one of the number of workpieces W to be subjected to the cutting process, the size of the workpiece W, and the drive integration time of the cutting edge 22. Further, in the first to fourth embodiments, the number of workpieces W that have been subjected to the cutting process and the workpiece W can be imaged without using the imaging means for the state of the cutting groove. Trimming is performed at a specific timing determined by at least one of the size and the drive integration time of the cutting edge 22.

Further, the present invention is not limited to the above-described embodiments and modifications. In other words, various modifications and improvements can be made without departing from the spirit and scope of the invention.

Claims (4)

A cutting method is a cutting method for cutting a workpiece using a cutting edge, and is characterized in that the cutting water is supplied to the workpiece, and the cutting edge is rotated to cut the workpiece. Engineering; and in the cutting process, the engineering of the mixture of fluid and microparticles is blown to the cutting edge. A cutting device characterized by comprising: a holding portion for holding a workpiece on a surface; and a cutting device having a freely rotatable spindle and a cutting edge mounted on the spindle; and a moving means for relatively moving the holding portion with respect to the mandrel in a direction perpendicular to a central axis direction of the mandrel and parallel to a surface of the holding portion; and for facing the workpiece The cutting water supply unit for cutting water includes a mixture supply unit that supplies a mixture of a fluid and fine particles toward the cutting edge during cutting of the workpiece. The cutting device according to claim 2, wherein the current flowing through the mandrel is monitored, and whether or not the mixture is to be supplied is determined based on the magnitude of the current value. The cutting device according to claim 2, wherein the fine particles are water-soluble.