JPS6274571A - Method of dressing grindstone and device therefor - Google Patents

Method of dressing grindstone and device therefor

Info

Publication number
JPS6274571A
JPS6274571A JP21572185A JP21572185A JPS6274571A JP S6274571 A JPS6274571 A JP S6274571A JP 21572185 A JP21572185 A JP 21572185A JP 21572185 A JP21572185 A JP 21572185A JP S6274571 A JPS6274571 A JP S6274571A
Authority
JP
Japan
Prior art keywords
grinding wheel
nozzle head
grindstone
abrasive
pressure fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21572185A
Other languages
Japanese (ja)
Inventor
Ryoji Muratsubaki
良司 村椿
Shigeru Ishikura
石倉 茂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sugino Machine Ltd
Original Assignee
Sugino Machine Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sugino Machine Ltd filed Critical Sugino Machine Ltd
Priority to JP21572185A priority Critical patent/JPS6274571A/en
Publication of JPS6274571A publication Critical patent/JPS6274571A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To greatly shorten the time required for a grindstone forming process, by applying a jet stream of high pressure fluid mixed with polishing particles for the fabrication of the grindstone. CONSTITUTION:High pressure fluid generated from a high pressure pump 4 is jetted from a water nozzle in a nozzle head 1 through a high pressure pipe line 10, and is mixed with a polishing material which has been fed from a polishing material supply device 5 through a pipe line 11, in a mixing chamber to form a mixed jet stream 9 of water and the polishing material which is directed tangentially of a grinding wheel 2 on rotation. At this time the nozzle head 1 is moved controlled by a controller in accordance with a desired shape of the grinding wheel 2 so that the mixed jet stream 9 is moved along the desired shape of the grinding wheel 2, thereby it is possible to rapidly form the contour of a grinding wheel 2 into a desired shape.

Description

【発明の詳細な説明】 [発明の技術分野] 本発明は砥石の新規なトレッシング方法と、該ドレッシ
ング方法を実施するためのドレッシング装置に係り、よ
り具体的には、研摩材混入高圧流体噴流を砥石に適用し
て行うドレッシング方法とそのH置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a novel method for dressing a grinding wheel and a dressing device for carrying out the dressing method, and more specifically, to This invention relates to a dressing method performed by applying this to a grindstone and its H positioning.

[発明の技術的背景コ 各種機械部品等の量産化が進む中で、量産品の品質の安
定と向上並びに製造コストの低減その他の理由で近年、
研削砥石として総型砥石を使用する傾向が強くなってき
ている。
[Technical Background of the Invention] With the progress of mass production of various mechanical parts, etc., in recent years, in order to stabilize and improve the quality of mass-produced products, reduce manufacturing costs, and other reasons,
There is a growing tendency to use full-sized grindstones as grinding wheels.

研削加工に使用される砥石車で、特に総型砥石車あるい
はそれに類する砥石車は、該砥石車を適用して加工され
るべき被加工物の仕上形状と相補的な輪郭形状に形成さ
れ、加工作業に供されるものである。
A grinding wheel used for grinding, especially a full-type grinding wheel or a similar one, is formed into a contour shape that is complementary to the finished shape of the workpiece to be processed by applying the grinding wheel, and the grinding wheel is It is used for work.

前記整形加工は従来、砥石車の形状と相補的な形状を有
する工具で例えば総型ブロック状ドレッサーや総型ロー
タリードレッサーを使用して行われていた。
The shaping process has conventionally been carried out using a tool having a shape complementary to that of the grinding wheel, such as a full block dresser or a full rotary dresser.

一方、高圧流体噴流を比較的軟質材に対して適用して加
工を行うウォータージェット加工法が特定の分野で有効
に利用されると共に、該ウォータージェット加工法の種
々の長所を生かしつつ更に硬質材の加工に適用するため
に高圧流体噴流に研摩材粒子を混入して噴射する加工法
が試みられている。この工法は、高圧に加圧された流体
、より具体的には水あるいは各種目的の添加剤を混入し
た水を極細の例えば直径0.1〜1.0−のノズルから
噴射し、噴射直後に研摩材粒子を噴射流体に混入させて
前記研摩材粒子を前記流体と共に高速で被加工物に衝突
させることによって、被加工物を加工するものである。
On the other hand, the water jet machining method, which processes relatively soft materials by applying a high-pressure fluid jet, is being effectively used in certain fields, and while taking advantage of the various advantages of the water jet machining method, it is also possible to process even harder materials. A machining method has been attempted in which abrasive particles are mixed into a high-pressure fluid jet and then injected into the machining process. This method involves injecting a highly pressurized fluid, more specifically water or water mixed with various purpose additives, from an ultra-fine nozzle with a diameter of, for example, 0.1 to 1.0 mm. The workpiece is machined by mixing abrasive particles into a jetted fluid and causing the abrasive particles to collide with the fluid at high speed against the workpiece.

このような加工法に適用し得るノズル装置について、本
願出願人は実開昭6O−3(3154号公報にて既にそ
の技術を開示している。
Regarding a nozzle device that can be applied to such a processing method, the applicant of the present application has already disclosed the technology in Japanese Utility Model Application Publication No. 3154.

そこで、本発明では、前記研摩材粒子混入高圧流体噴射
加工法を砥石車の成型加工に適用し、極めて効果的に加
工し得たものである。
Therefore, in the present invention, the abrasive particle-mixed high-pressure fluid injection processing method is applied to the molding process of a grinding wheel, and the process can be carried out extremely effectively.

[発明の目的と概要] 本発明は、砥石の成型加工に研摩材混入高圧流体噴流を
適用することによって、砥石の成型加工に要する時間を
短縮しようとするものである。
[Objective and Summary of the Invention] The present invention aims to shorten the time required for forming a grindstone by applying a jet of high-pressure fluid mixed with an abrasive to the forming process of the grindstone.

前記目的を達成するために本発明では、砥石を回転させ
ながら、該砥石に対して該砥石の回転接線方向に噴射す
る研摩材混入高所流体噴流を適用し、前記研摩材混入高
圧流体噴流を移動させることによって砥石のドレッシン
グ行うものである。
In order to achieve the above object, the present invention applies an abrasive-containing high-pressure fluid jet that is injected to the whetstone in a tangential direction to the rotation of the whetstone while rotating the whetstone, and the abrasive-containing high-pressure fluid jet is The grindstone is dressed by moving it.

そしてそのための装置として、回転駆動手段に連結され
た砥石軸と、該砥石軸の所望位置に配設した砥石固定手
段と、前記砥石軸の接線方法に研摩材混入流体を噴射す
べく噴射口を開口させたノズルヘッドと、高圧配管手段
によって前記ノズルヘッドに連結された高圧流体発生装
置と、配管手段によって前記ノズルヘッドに連結された
研摩材供給装置と、前記ノズルヘッドを移動すべく構成
され前記ノズルヘッドを係止する手段を含むノズルヘッ
ド移動H萱と、該ノズルヘッド移動装置を制御するため
の制御装置と、前記ノズルヘッドの研摩材混入高圧流体
噴射方向下流において前記研摩材混入高圧流体を受ける
受容槽とからなる砥石ドレッシング装置を提供するもの
である。
The device for this purpose includes a grindstone shaft connected to a rotation drive means, a grindstone fixing means disposed at a desired position of the grindstone shaft, and an injection port for injecting an abrasive-containing fluid tangentially to the grindstone shaft. an open nozzle head; a high-pressure fluid generator connected to the nozzle head by high-pressure piping means; an abrasive supply device connected to the nozzle head by piping means; a nozzle head moving device including a means for locking the nozzle head; a control device for controlling the nozzle head moving device; The present invention provides a grindstone dressing device comprising a receiving tank for receiving the grindstone.

[発明の実施例コ 以下において図示した好適な実施例に基づいて本発明を
更に詳細に説明する。
[Embodiments of the Invention] The present invention will be explained in more detail below based on preferred embodiments shown in the drawings.

図において、lはノズルヘッド、2は砥石車、3は砥石
軸、4は高圧流体発生装置であるところの高圧ポンプ、
5は研摩材供給装置、6はノズル・\ラド移動装置、7
は制御装置、8は受容槽である。ノズルヘッド1と高圧
ポンプ4とは高圧配管lO1好ましくは可撓性高圧配管
で連結されていて、高圧ポンプ4で発生した高圧流体を
高圧配管10を通してノズルヘッド1へ供給している。
In the figure, l is a nozzle head, 2 is a grinding wheel, 3 is a grinding wheel shaft, 4 is a high pressure fluid generator, which is a high pressure pump,
5 is an abrasive supply device, 6 is a nozzle/rad moving device, 7
is a control device, and 8 is a receiving tank. The nozzle head 1 and the high-pressure pump 4 are connected through a high-pressure pipe lO1, preferably a flexible high-pressure pipe, and the high-pressure fluid generated by the high-pressure pump 4 is supplied to the nozzle head 1 through the high-pressure pipe 10.

また、ノズルヘッド1と研摩材供給装置5とは配管II
、好ましくは可撓性配管で連結されていて、研摩材供給
装Ft5に蓄えられた研摩材を配管11を通してノズル
ヘッドlへ供給している。砥石軸3は、受容槽8に係止
された回転駆動手段であるところのモータ12に連結さ
れ、適宜軸受13゜13’・・・・によって受容槽8に
係止されると共に、砥石車2を固定するための固定手段
が配設されている。ノズルヘッド1は係IL部材15に
よってノズルヘッド移動装置6に係止されている。受容
槽8には適宜、流体飛散防止カバー16や研摩材排出装
置14が配設され得る。
Further, the nozzle head 1 and the abrasive supply device 5 are connected to a pipe II.
, preferably connected by a flexible pipe, and supplies the abrasive stored in the abrasive supply device Ft5 to the nozzle head l through the pipe 11. The grinding wheel shaft 3 is connected to a motor 12, which is a rotational driving means, which is locked to the receiving tank 8, and is locked to the receiving tank 8 by suitable bearings 13, 13', etc., and the grinding wheel 2 A fixing means is provided for fixing the. The nozzle head 1 is locked to the nozzle head moving device 6 by a locking IL member 15. The receiving tank 8 may be provided with a fluid scattering prevention cover 16 and an abrasive discharge device 14 as appropriate.

さて、図示のような装置において、まず砥石軸3に砥石
車2を取付けなければならない。砥石軸3と砥石車2を
固定することによって、モータ12て回転駆動された砥
石軸3と一体的に砥石車2が回転するものである。砥石
軸3に砥石車2を固定する固定手段としては種々の構成
が可能である。
Now, in the illustrated apparatus, the grinding wheel 2 must first be attached to the grinding wheel shaft 3. By fixing the grinding wheel 2 to the grinding wheel 2, the grinding wheel 2 rotates integrally with the grinding wheel 3 which is rotationally driven by the motor 12. Various configurations are possible as a fixing means for fixing the grinding wheel 2 to the grinding wheel shaft 3.

例えば作業性は悪いが簡便で安価な構成としては、第4
図に示すように砥石軸3の所定位置にフランジ21を固
設し、該フランジ21に対向して押えフランジ22を砥
石軸3に遊嵌すると共に、砥石軸3に形成したネジ23
にナツト24を係止して成るものであり、フランジ21
と押えフランジ22との間に砥石車2を挾持しナツト2
4で固定して砥石軸3と砥石車2を固定するものである
。砥石車2を着脱するにはナツト24を砥石軸3から取
り外すと共に押えフランジ22も砥石軸3から取り外し
て、しかる後に砥石車2を砥石軸3に対して着脱する。
For example, as a simple and inexpensive configuration that has poor workability, the fourth
As shown in the figure, a flange 21 is fixed at a predetermined position on the whetstone shaft 3, a presser flange 22 is loosely fitted to the whetstone shaft 3 facing the flange 21, and a screw 23 is formed on the whetstone shaft 3.
A nut 24 is engaged with the flange 21.
The grinding wheel 2 is held between the presser flange 22 and the nut 2.
4 to fix the grinding wheel shaft 3 and the grinding wheel 2. To attach and detach the grinding wheel 2, the nut 24 is removed from the grinding wheel shaft 3, and the presser flange 22 is also removed from the grinding wheel shaft 3, and then the grinding wheel 2 is attached to and detached from the grinding wheel shaft 3.

また、砥石車2の着脱を自動化するには第5図に示すよ
うな自動化に適した構成を採用すべきであろう、すなわ
ち、砥石軸30所定位置にフランジ21を固設すると共
に、砥石軸3と同一軸線上に押圧軸3゛を配設し該押圧
軸3′の前記フランジ211Nを円錐状に形成して砥石
車2の中心孔25に進入可能に成し、かつ該押圧軸3°
の前記フランジ21に対抗する位置に押えフランジ22
を弾圧的に係止する。前記押圧軸3′は支持部材26に
回転可能に支持され、支持部材26は推進手段で例えば
流体圧シリンダ27に固定され、流体圧シリンダ27は
受容槽8に固定されている。砥石軸3が回転すると押圧
軸3′によって砥石軸3の中心に押圧されフランジ21
および押えフランジ22で挾持された砥石車2が砥石軸
3と一体的に回転するものである。このように砥石軸3
に取付けられた砥石車2はモータ12によって砥石軸3
を介して回転駆動される。
Furthermore, in order to automate the attachment and detachment of the grinding wheel 2, it is necessary to adopt a configuration suitable for automation as shown in FIG. A pressing shaft 3' is disposed on the same axis as the pressing shaft 3', and the flange 211N of the pressing shaft 3' is formed into a conical shape so that it can enter the center hole 25 of the grinding wheel 2.
A presser flange 22 is provided at a position opposite to the flange 21 of
to be restrained oppressively. The pressing shaft 3' is rotatably supported by a support member 26, the support member 26 is fixed to a propelling means, for example, a fluid pressure cylinder 27, and the fluid pressure cylinder 27 is fixed to the receiving tank 8. When the whetstone shaft 3 rotates, the pressing shaft 3' presses the center of the whetstone shaft 3 and the flange 21
The grinding wheel 2 held by the presser flange 22 rotates integrally with the grinding wheel shaft 3. In this way, the grinding wheel shaft 3
The grinding wheel 2 attached to the
Rotationally driven through.

一方、ノズルヘッドlについて見ると、その構造は実開
昭6−0−36154号公報で詳細に開示されている通
りでありその構造の一例を第6図に示す。そこで高圧ポ
ンプ4で発生した高圧水は高圧配管10を経てノズルヘ
ッド1の水ノズル17から噴出し、研摩材供給装置5か
゛ら配管11を経て供給される研摩材と混合室19で混
合されて水と研摩材との混合噴流9として混合ノズル2
0 b)ら高速で噴射される。該混合噴流9を第7図に
示すように砥石車2を回転させながら砥石車2の接線方
向に適用し、砥石車2の外形を整形加工するものである
On the other hand, regarding the nozzle head l, its structure is as disclosed in detail in Japanese Utility Model Application No. 6-0-36154, and an example of the structure is shown in FIG. The high-pressure water generated by the high-pressure pump 4 passes through the high-pressure pipe 10 and is ejected from the water nozzle 17 of the nozzle head 1, and is mixed with the abrasive material supplied from the abrasive material supply device 5 through the pipe 11 in the mixing chamber 19. Mixing nozzle 2 as a mixed jet 9 of and abrasive
0 b) is injected at high speed. The mixed jet 9 is applied in the tangential direction of the grinding wheel 2 while rotating the grinding wheel 2, as shown in FIG. 7, to shape the outer shape of the grinding wheel 2.

砥石車2を所望形状に加工するには砥石車2に適用する
混合噴流9を前記形状に沿って移動させる必要がある。
In order to process the grinding wheel 2 into a desired shape, it is necessary to move the mixed jet 9 applied to the grinding wheel 2 along the shape.

すなわちノズルヘッドlを前記所望形状に従って移動さ
せるのであるが、ノズルヘッド1を移動させるための移
動装置6とその制御装置7については従来公知の各種手
段が効果的に使用可能である。例えば直交形移動装置と
数値制御によるル制御装置、あるいは市販のロボットと
称される搬送装置とその制御装置等、いずれも有効に使
用し得る。ノズルヘッドlは移動装置6に係止部材15
によって係止され、制御装置7で移動制御されて所望の
形状に沿って移動する移動装置6と共に混合噴流9を噴
射しながら移動する。
That is, the nozzle head 1 is moved according to the desired shape, and various conventionally known means can be effectively used for the moving device 6 and its control device 7 for moving the nozzle head 1. For example, an orthogonal moving device and a numerically controlled control device, or a commercially available transfer device called a robot and its control device, etc., can all be effectively used. The nozzle head l is attached to the moving device 6 by the locking member 15.
It moves together with the moving device 6 which is controlled by the control device 7 and moves along the desired shape while ejecting the mixed jet 9.

ノズルヘッド1から噴射された混合噴流9は砥石車2の
外周に高速で衝突し、砥石車2をえぐり取る。砥石車2
を連続的に回転させることによって外周全周にわたフて
加工することができる。砥石車2に衝突し、砥石車2の
外周をえぐり取った混合噴流9はそのまま直進し、下流
に設けた受容槽8へ投射される。受容槽8には水を張っ
ておくのが効果的である。そうすれば、受容槽8内に投
射された混合噴流9は水に向かって投射されることにな
り、投射水および研摩材が周囲に飛散することなく効果
的に水中に捕捉することができるものである。
The mixed jet stream 9 injected from the nozzle head 1 collides with the outer periphery of the grinding wheel 2 at high speed and gouges out the grinding wheel 2. Grinding wheel 2
By continuously rotating the wafer, it is possible to process the entire outer periphery. The mixed jet 9 that collides with the grinding wheel 2 and scoops out the outer periphery of the grinding wheel 2 travels straight as it is and is projected into the receiving tank 8 provided downstream. It is effective to fill the receiving tank 8 with water. In this way, the mixed jet 9 projected into the receiving tank 8 will be projected toward the water, and the projected water and abrasive material can be effectively captured in the water without scattering to the surroundings. It is.

水中に投射された研摩材は重力の関係で水底に沈み、こ
れを受容槽8の下部に設けた研摩材排出装置14によっ
て排出し、研摩材の種類によって廃棄あるいは再使用の
ための分級・選別に供される。
The abrasives projected into the water sink to the bottom of the water due to gravity, and are discharged by an abrasive discharge device 14 installed at the bottom of the receiving tank 8, where they are classified and sorted for disposal or reuse depending on the type of abrasive. served.

別の使用態様として、従来のドレッサー等で形成する際
に初期の成形加工に要する時間とドレッサーの摩耗が大
きいので該初期の成形加工、所謂荒加工を本発明の加工
法で行った後仕上げ加工を従来法による加工で精度を上
げるようにすれば効果的である。
Another usage mode is that when forming with a conventional dresser, etc., the time required for the initial forming process and the wear of the dresser are large, so the initial forming process, so-called rough processing, is performed using the processing method of the present invention, and then finishing processing is performed. It is effective to improve the accuracy by processing using conventional methods.

[発明の効果]  。[Effect of the invention] .

以上において詳細に開示したように、本発明によれば、
ノズルヘッドの移動を制御装置によって制御するだけで
あらゆる形状に対して柔軟にかつ迅速に対応できるため
砥石成型加工に要する時間を大幅に短縮でき、しかも従
来のドレッサのような摩耗による形状の変化が無く、長
期にわたって所望の形状を得ることができる効果を有す
るものである。
As disclosed above in detail, according to the present invention,
By simply controlling the movement of the nozzle head using a control device, it can respond flexibly and quickly to any shape, which greatly reduces the time required for grindstone forming, and also eliminates shape changes due to wear unlike conventional dressers. This has the effect of allowing a desired shape to be obtained over a long period of time.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係る装置の好適な一実施態様を示す外
観図、第2図は砥石車の形状を示す図、第3図は第1図
の要部を拡大して示した図、第4図は砥石車の係上部を
拡大して示した図、第5図は砥石車の係上部の別の態様
を示した図、第6図はノズルヘッドの一例を示す縦断側
面図、第7図は本発明による加工状態を示す図である。 l:ノズルヘッド  2:M石車 3:砥石軸     4:超高圧ポンプ5:研摩材供給
袋a  6:移動装置 7:制御装置    8:受容槽 lO:高圧配管   11:配管 12:モータ    15:係止部材 特許出願人 株式会社スギツマシン 第2図 (d)             (bン第3図 第4図
FIG. 1 is an external view showing a preferred embodiment of the device according to the present invention, FIG. 2 is a view showing the shape of the grinding wheel, FIG. 3 is an enlarged view of the main part of FIG. 1, FIG. 4 is an enlarged view of the engaging part of the grinding wheel, FIG. 5 is a diagram showing another aspect of the engaging part of the grinding wheel, and FIG. 6 is a longitudinal side view showing an example of the nozzle head. FIG. 7 is a diagram showing a processing state according to the present invention. l: Nozzle head 2: M stone wheel 3: Grinding wheel shaft 4: Ultra-high pressure pump 5: Abrasive material supply bag a 6: Transfer device 7: Control device 8: Receiving tank lO: High pressure piping 11: Piping 12: Motor 15: Section Stopping member patent applicant Sugitsu Machine Co., Ltd. Fig. 2 (d) (b) Fig. 3 Fig. 4

Claims (2)

【特許請求の範囲】[Claims] (1)砥石を回転させながら、該砥石に対して該砥石の
回転接線方向に噴射する研摩材混入高圧流体噴流を適用
し、前記研摩材混入高圧流体噴流を移動させることによ
って行うことを特徴とする砥石ドレッシング方法。
(1) While the grindstone is being rotated, a jet of high-pressure fluid containing an abrasive is applied to the grindstone in a direction tangential to the rotation of the grindstone, and the jet of high-pressure fluid containing the abrasive is moved. How to dress the whetstone.
(2)回転駆動手段に連結された砥石軸と、該砥石軸の
所望位置に配設した砥石固定手段と、前記砥石軸の接線
方法に研摩材混入流体を噴射すべく噴射口を開口させた
ノズルヘッドと、高圧配管手段によって前記ノズルヘッ
ドに連結された高圧流体発生装置と、配管手段によって
前記ノズルヘッドに連結された研摩材供給装置と、前記
ノズルヘッドを移動すべく構成され前記ノズルヘッドを
係止する手段を含むノズルヘッド移動装置と、該ノズル
ヘッド移動装置を制御するための制御装置と、前記ノズ
ルヘッドの研摩材混入高圧流体噴射方向下流において前
記研摩材混入高圧流体を受ける受容槽とからなることを
特徴とする砥石ドレッシング装置。
(2) A grindstone shaft connected to a rotational drive means, a grindstone fixing means disposed at a desired position of the grindstone shaft, and an injection port opened to inject an abrasive-containing fluid tangentially to the grindstone shaft. a nozzle head; a high-pressure fluid generator connected to the nozzle head by high-pressure piping means; an abrasive supply device connected to the nozzle head by piping means; and configured to move the nozzle head; a nozzle head moving device including a locking means; a control device for controlling the nozzle head moving device; and a receiving tank for receiving the abrasive-containing high-pressure fluid downstream of the nozzle head in a jetting direction of the abrasive-containing high-pressure fluid. A grindstone dressing device comprising:
JP21572185A 1985-09-28 1985-09-28 Method of dressing grindstone and device therefor Pending JPS6274571A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21572185A JPS6274571A (en) 1985-09-28 1985-09-28 Method of dressing grindstone and device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21572185A JPS6274571A (en) 1985-09-28 1985-09-28 Method of dressing grindstone and device therefor

Publications (1)

Publication Number Publication Date
JPS6274571A true JPS6274571A (en) 1987-04-06

Family

ID=16677078

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21572185A Pending JPS6274571A (en) 1985-09-28 1985-09-28 Method of dressing grindstone and device therefor

Country Status (1)

Country Link
JP (1) JPS6274571A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6332833B1 (en) * 1996-08-08 2001-12-25 Naoetsu Electronics Company Method for fabricating silicon semiconductor discrete wafer
CN105751391A (en) * 2015-01-05 2016-07-13 株式会社迪思科 Cutting method and cutting device
JP2016128202A (en) * 2015-01-05 2016-07-14 株式会社ディスコ Cutting method and cutting device
JP2018075662A (en) * 2016-11-09 2018-05-17 株式会社ディスコ Cutting method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5028478U (en) * 1973-07-10 1975-04-01
JPS5397694A (en) * 1977-02-07 1978-08-26 Toshiba Corp Process for dressing a diamond grindstone

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5028478U (en) * 1973-07-10 1975-04-01
JPS5397694A (en) * 1977-02-07 1978-08-26 Toshiba Corp Process for dressing a diamond grindstone

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6332833B1 (en) * 1996-08-08 2001-12-25 Naoetsu Electronics Company Method for fabricating silicon semiconductor discrete wafer
CN105751391A (en) * 2015-01-05 2016-07-13 株式会社迪思科 Cutting method and cutting device
JP2016128202A (en) * 2015-01-05 2016-07-14 株式会社ディスコ Cutting method and cutting device
CN105751391B (en) * 2015-01-05 2019-11-29 株式会社迪思科 Cutting process and cutting apparatus
JP2018075662A (en) * 2016-11-09 2018-05-17 株式会社ディスコ Cutting method

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