TW201610036A - Composition for forming releasing layer - Google Patents

Composition for forming releasing layer Download PDF

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TW201610036A
TW201610036A TW104110261A TW104110261A TW201610036A TW 201610036 A TW201610036 A TW 201610036A TW 104110261 A TW104110261 A TW 104110261A TW 104110261 A TW104110261 A TW 104110261A TW 201610036 A TW201610036 A TW 201610036A
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release layer
forming
composition
substrate
group
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TW104110261A
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TWI669356B (en
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Kazuya Ebara
Yasuyuki Koide
Kazuya Shindo
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Nissan Chemical Ind Ltd
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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D179/00Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen, with or without oxygen, or carbon only, not provided for in groups C09D161/00 - C09D177/00
    • C09D179/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C09D179/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1067Wholly aromatic polyimides, i.e. having both tetracarboxylic and diamino moieties aromatically bound
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/18Polybenzimidazoles
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    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C09D5/20Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes for coatings strippable as coherent films, e.g. temporary coatings strippable as coherent films
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/20Diluents or solvents
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133305Flexible substrates, e.g. plastics, organic film

Abstract

The present invention provides a composition for forming a releasing layer that enables easy separation of a layer or layers from the releasing layer, said layer or layers being formed on top of the releasing layer, while preventing separation at the interface with a glass substrate by maintaining good adhesion to the glass substrate on which the releasing layer is provided. The present invention provides a composition for forming a releasing layer, which contains an organic solvent and a polyamic acid containing 50% by mole or more of a monomer unit represented by formula (1) and having a weight average molecular weight of 10,000 or more. In formula (1), X1 represents a tetravalent organic group; and Y1 represents a divalent group represented by formula (P).

Description

剝離層形成用組成物 Release layer forming composition

本發明係有關設置於玻璃基板正上方之剝離層形成用的組成物。 The present invention relates to a composition for forming a release layer provided directly above a glass substrate.

近年,電子裝置要求賦予彎曲的機能或薄型化及輕量化等的性能。因此,要求使用輕量的軟性塑膠基板取代以往重且脆弱,無法彎曲的玻璃基板。又,新世代顯示器則要求開發一種使用輕量之軟性塑膠基板的主動全彩(active full-color)TFT顯示器面板。 In recent years, electronic devices have been required to impart performance such as bending function or thinning and weight reduction. Therefore, it is required to use a lightweight soft plastic substrate instead of a glass substrate that is heavy and fragile and cannot be bent. In addition, the new generation of displays requires the development of an active full-color TFT display panel using a lightweight, flexible plastic substrate.

因此,開始檢討各種以樹脂薄膜作為基板之電子裝置的製造方法,正進行檢討可轉用既有之TFT設備的製程來製造新世代顯示器。 For this reason, we began to review various methods of manufacturing electronic devices using resin films as substrates, and we are reviewing processes that can be converted to existing TFT devices to create new generation displays.

專利文獻1、2及3揭示在玻璃基板上形成非晶矽薄膜層,該薄膜層上形成塑膠基板後,由玻璃面側照射雷射,藉由伴隨非晶矽之結晶化所產生之氫氣體,將塑膠基板由玻璃基板上剝離的方法。 Patent Documents 1, 2 and 3 disclose that an amorphous germanium film layer is formed on a glass substrate, and after forming a plastic substrate on the film layer, a laser is irradiated from the glass surface side, and hydrogen gas generated by crystallization of the amorphous germanium is formed. A method of peeling a plastic substrate from a glass substrate.

又,專利文獻4揭示使用專利文獻1~3所揭示的技術,將被剝離層(專利文獻4中,記載為「被轉印層」) 黏貼於塑膠薄膜,完成液晶顯示裝置的方法。 Moreover, in the patent document 4, the peeling layer is described using the technique disclosed by the patent documents 1-3 (patent document 4, it is described as "transfer layer"). A method of adhering to a plastic film to complete a liquid crystal display device.

但是專利文獻1~4揭示的方法,特別是專利文獻4揭示的方法,必須使用透光性高的基板,使基板通過,為了釋出非晶質矽所含的氫,而提供充分的能量,因此必須照射較大的雷射光,有對於被剝離層造成損傷的問題。又,雷射處理需要長時間,難以剝離具有大面積之被剝離層,故也有難以提高裝置製作之生產性的問題。 However, the methods disclosed in Patent Documents 1 to 4, in particular, the method disclosed in Patent Document 4, it is necessary to use a substrate having high light transmittance to pass the substrate, and to provide sufficient energy for releasing hydrogen contained in the amorphous germanium. Therefore, it is necessary to irradiate a large amount of laser light, which causes a problem of damage to the peeled layer. Further, since the laser treatment takes a long time and it is difficult to peel off the peeled layer having a large area, it is difficult to improve the productivity of the device production.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特開平10-125929號公報。 [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 10-125929.

[專利文獻2]日本特開平10-125931號公報。 [Patent Document 2] Japanese Laid-Open Patent Publication No. Hei 10-125931.

[專利文獻3]WO2005/050754號小冊子。 [Patent Document 3] WO2005/050754 pamphlet.

[專利文獻4]日本特開平10-125930號公報。 [Patent Document 4] Japanese Laid-Open Patent Publication No. Hei 10-125930.

[發明概要] [Summary of the Invention]

因此,本發明之目的係解決上述課題者。 Therefore, the object of the present invention is to solve the above problems.

具體而言,本發明之目的係提供不會對於適用於軟性電子裝置之基板造成損傷,使剝離用之剝離層形成用的組成物。 Specifically, an object of the present invention is to provide a composition for forming a release layer for peeling without causing damage to a substrate suitable for a flexible electronic device.

又,本發明之目的除上述目的,或上述目的 外,提供可維持與設置有剝離層之玻璃基板之密著性,且在與玻璃基板之界面不會產生剝離,此外,形成於比剝離層更上部之層或層群,可簡單由剝離層剝離之形成該剝離層用的組成物。 Further, the object of the present invention is in addition to the above object, or the above object In addition, it is provided that the adhesion to the glass substrate provided with the release layer can be maintained, and no peeling occurs at the interface with the glass substrate, and the layer or layer group formed above the release layer can be easily formed by the release layer. The composition for the release layer is formed by peeling.

本發明人發現以下的發明。亦即,本發明人意外發現使用具有含有50莫耳%以上之特定結構之單體單位,且重量平均分子量為一定值以上的聚醯胺酸及有機溶劑的組成物,形成剝離層時,該層具有對於被適用於軟性電子裝置等之基板,不會造成損傷,且可使剝離之較佳的特性。此層可維持與設置有剝離層之玻璃基板之密著性,且在與玻璃基板之界面不會產生剝離,此外,形成於比與玻璃基板相反側之剝離層更上部所形成之層或層群,可簡單由剝離層剝離者。本發明係依據此見解的發明。 The inventors have found the following invention. That is, the inventors have unexpectedly found that when a composition having a monomer unit having a specific structure of 50 mol% or more and a weight average molecular weight of a certain value or more is used to form a release layer, The layer has a property of being applied to a substrate suitable for a flexible electronic device or the like without causing damage and allowing peeling. This layer can maintain the adhesion to the glass substrate provided with the release layer, and does not peel off at the interface with the glass substrate, and is formed on a layer or layer formed on the upper side of the release layer opposite to the glass substrate. The group can be simply peeled off by the peeling layer. The present invention is based on the invention of this insight.

<1>一種剝離層形成用組成物,其係含有:含有50莫耳%以上之下述式(1)表示之單體單位,且重量平均分子量為10,000以上的聚醯胺酸及有機溶劑, [式中,X1表示4價有機基,Y1表示以下述式(P)表示之2價基: (式中,R表示F、Cl、碳數1~3之烷基、或苯基,m表示0~4之整數,且r表示1~4之整數)]。 <1> A composition for forming a release layer, which comprises a monomeric unit represented by the following formula (1): 50 mol% or more, and a polyamine and an organic solvent having a weight average molecular weight of 10,000 or more. [wherein, X 1 represents a tetravalent organic group, and Y 1 represents a divalent group represented by the following formula (P): (wherein R represents F, Cl, an alkyl group having 1 to 3 carbon atoms, or a phenyl group, and m represents an integer of 0 to 4, and r represents an integer of 1 to 4)].

<2>前述<1>中,前述Y1可為以下述式(P1)~(P3)之任一表示之2價基。 <2> In the above <1>, the Y 1 may be a divalent group represented by any one of the following formulae (P1) to (P3).

(式中,R1、R2、R3、R4、R5及R6可相同或相異,表示F、Cl、碳數1~3之烷基、或苯基,m1、m2、m3、m4、m5及m6可相同或相異,表示0~4之整數)。 (wherein R 1 , R 2 , R 3 , R 4 , R 5 and R 6 may be the same or different and represent F, Cl, an alkyl group having 1 to 3 carbon atoms, or a phenyl group, m1, m2, m3 , m4, m5, and m6 may be the same or different, indicating an integer from 0 to 4.

<3>前述<2>中,前述Y1可為至少含有式(P1)表示之2價基。 <3> In the above <2>, the Y 1 may contain at least a divalent group represented by the formula (P1).

<4>前述<1>~<3>之任一者中,聚醯胺酸可進一步含有下述式(2)表示之單體單位。 <4> In any one of <1> to <3>, the polyamic acid may further contain a monomer unit represented by the following formula (2).

[式中,X1係如前述<1>所定義,Y2表示下述式(P4)表示之基: (式中,R7、及R8可相同或相異,表示F、Cl、碳數1~3之烷基、或苯基,R’表示氫原子、碳數1~3之烷基、或苯基,l表示0~4之整數,且m係如前述<1>所定義)]。 [wherein X 1 is as defined in the above <1>, and Y 2 represents a group represented by the following formula (P4): (wherein R 7 and R 8 may be the same or different and each represent F, Cl, an alkyl group having 1 to 3 carbon atoms, or a phenyl group; and R' represents a hydrogen atom, an alkyl group having 1 to 3 carbon atoms, or Phenyl group, l represents an integer of 0 to 4, and m is as defined in the above <1>).

<5>前述<1>~<4>之任一者中,X1可為4價芳香族基。 <5> In any one of <1> to <4>, X 1 may be a tetravalent aromatic group.

<6>前述<5>中,前述4價芳香族基可為具有選自苯骨架、萘骨架及聯苯骨架之至少1種者。 <6> In the above <5>, the tetravalent aromatic group may be at least one selected from the group consisting of a benzene skeleton, a naphthalene skeleton, and a biphenyl skeleton.

<7>前述<1>~<6>之任一者中,前述有機溶劑可為以下述式(A)或(B)表示之溶劑。 <7> In any one of <1> to <6>, the organic solvent may be a solvent represented by the following formula (A) or (B).

(式中,Ra及Rb可相同或相異,表示碳數1~4之烷基,h表示自然數)。 (wherein R a and R b may be the same or different and each represents an alkyl group having 1 to 4 carbon atoms, and h represents a natural number).

<8>前述<1>~<7>之任一者中,前述聚醯胺酸中之前述式(1)表示之單體單位之含量可為60莫耳%以 上。 <8> In any one of <1> to <7>, the content of the monomer unit represented by the above formula (1) in the polyamic acid may be 60 mol%. on.

<9>前述<1>~<8>之任一者中,本發明之剝離層形成用組成物,可為用於形成設置於玻璃基板正上方之剝離層者。 <9> In any one of the above <1> to <8>, the composition for forming a release layer of the present invention may be a layer for forming a release layer provided directly above the glass substrate.

<10>一種剝離層,其係形成於被適用於軟性電子裝置之軟性基板與基礎基板之間的剝離層,使用前述<1>~<9>之任一之剝離層形成用組成物所製作。 <10> A release layer formed on a release layer formed between the flexible substrate and the base substrate of the flexible electronic device, which is produced by using the composition for forming a release layer of any one of <1> to <9> .

<11>一種基板構造,其係適用於軟性電子裝置的基板構造,其係含有:基礎基板;在1或2以上之區域,覆蓋前述基礎基體的剝離層,且藉由如前述<1>~<9>之任一之剝離層形成用組成物所形成的剝離層;及覆蓋前述基礎基板與前述剝離層之軟性基板;前述軟性基板與前述剝離層之密著力,大於前述剝離層與前述基礎基體之密著力。 <11> A substrate structure which is applied to a substrate structure of a flexible electronic device, comprising: a base substrate; and a peeling layer covering the base substrate in a region of 1 or 2 or more, and by the above <1>~ <9> a release layer formed of the composition for forming a release layer; and a flexible substrate covering the base substrate and the release layer; and a adhesion force between the flexible substrate and the release layer is larger than the separation layer and the foundation The tightness of the substrate.

<12>前述<11>中,基礎基板可為含有玻璃者。 <12> In the above <11>, the base substrate may be glass-containing.

<13>一種剝離層之製造方法,其係使用前述<1>~<9>之任一之剝離層形成用組成物。其中一個較佳的態樣中,前述剝離層之製造方法,包含將前述剝離層形成用樹脂組成物塗佈於基板,進行加熱的步驟。 <13> A method for producing a release layer, which is the composition for forming a release layer according to any one of <1> to <9>. In a preferred embodiment, the method for producing the release layer includes a step of applying the resin composition for forming a release layer to a substrate and heating the substrate.

<14>一種製作方法,其係適用於軟性電子裝置之基板構造之製作方法,其係含有以下步驟: 準備基礎基板之步驟;使用前述<1>~<9>之任一之剝離層形成用組成物來製作在1或2以上之區域,覆蓋前述基礎基體的剝離層的步驟;及在前述基礎基板與前述剝離層上形成軟性基板的步驟;前述軟性基板與前述剝離層之密著力,大於前述剝離層與前述基礎基體之密著力。 <14> A manufacturing method, which is applied to a method of fabricating a substrate structure of a flexible electronic device, comprising the steps of: a step of preparing a base substrate; a step of forming a release layer of the base substrate in a region of 1 or 2 or more by using the composition for forming a release layer of any one of <1> to <9>; and the base substrate a step of forming a flexible substrate on the release layer; and a adhesion between the flexible substrate and the release layer is greater than a adhesion between the release layer and the base substrate.

藉由本發明可解決上述課題。 The above problems can be solved by the present invention.

具體而言,藉由本發明可提供對於被適用於軟性電子裝置等之基板,不會造成損傷,且可使剝離之剝離層形成用的組成物。 Specifically, according to the present invention, it is possible to provide a composition for forming a release layer which can be peeled off without causing damage to a substrate which is applied to a flexible electronic device or the like.

又,藉由本發明,除上述目的,或上述目的外,提供可維持與設置有剝離層之玻璃基板之密著性,且在與玻璃基板之界面不會產生剝離,此外,形成於比剝離層更上部之層或層群,可簡單由剝離層剝離之形成該剝離層用的組成物。 Moreover, according to the present invention, in addition to the above object or the above object, it is possible to provide adhesion to a glass substrate provided with a release layer, and to prevent peeling from occurring at the interface with the glass substrate, and to form a specific release layer. The upper layer or the layer group can be formed by simply peeling off the release layer to form the composition for the release layer.

[實施發明之形態] [Formation of the Invention]

以下詳細說明本發明。 The invention is described in detail below.

剝離層形成用組成物 Release layer forming composition

本發明之剝離層形成用組成物如前述,其係含有:含 有50莫耳%以上之式(1)表示之單體單位的聚醯胺酸,且其重量平均分子量為10,000以上的聚醯胺酸及有機溶劑者。 The composition for forming a release layer of the present invention is as described above, and it contains: 50% by mole or more of the monomeric polyamine acid represented by the formula (1), and a polyglycine having a weight average molecular weight of 10,000 or more and an organic solvent.

又如前述,式(1)中,X1表示4價有機基,Y1表示下述式(P)表示之2價基。 Further, in the above formula (1), X 1 represents a tetravalent organic group, and Y 1 represents a divalent group represented by the following formula (P).

又,式(P)中,R表示F、Cl、或碳數1~3之烷基、或苯基,較佳為表示F、Cl。同樣地,前述之式(P)中,m表示0~4之整數,較佳為表示0~2,更佳為表示0~1,特佳為表示0。又,前述式(P)中,r表示1~3之整數。 Further, in the formula (P), R represents F, Cl, or an alkyl group having 1 to 3 carbon atoms or a phenyl group, and preferably represents F and Cl. Similarly, in the above formula (P), m represents an integer of 0 to 4, preferably 0 to 2, more preferably 0 to 1, and particularly preferably 0. Further, in the above formula (P), r represents an integer of 1 to 3.

碳數1~3之烷基,包含甲基、乙基、n-丙基、及i-丙基,較佳為碳數1~3之烷基為甲基,更佳為甲基。 The alkyl group having 1 to 3 carbon atoms includes a methyl group, an ethyl group, an n-propyl group, and an i-propyl group. Preferably, the alkyl group having 1 to 3 carbon atoms is a methyl group, and more preferably a methyl group.

本發明使用之具有式(1)表示之單體單位之聚醯胺酸的重量平均分子量,必須為10,000以上,較佳為15,000以上、更佳為20,000以上、又更佳為30,000以 上。此外,本發明使用之聚醯胺酸之重量平均分子量的上限值,通常為2,000,000以下,但是若考慮抑制樹脂組成物之黏度變得過高或再現性良好得到柔軟性高的樹脂薄膜時,較佳為1,000,000以下、更佳為200,000以下。 The weight average molecular weight of the polyamic acid having the monomer unit represented by the formula (1) used in the present invention must be 10,000 or more, preferably 15,000 or more, more preferably 20,000 or more, still more preferably 30,000. on. In addition, the upper limit of the weight average molecular weight of the polyamic acid to be used in the present invention is usually 2,000,000 or less. However, when it is considered that the viscosity of the resin composition is too high or the reproducibility is good, a resin film having high flexibility is obtained. It is preferably 1,000,000 or less, more preferably 200,000 or less.

本發明使用之聚醯胺酸,含有50莫耳%以上、較佳為60莫耳%以上、更佳為70莫耳%以上、又更佳為80莫耳%以上、再更佳為90莫耳%以上之式(1)表示之單體單位。藉由使用這種單體單位之含量的聚醯胺酸,可再現性良好得到具有適合剝離膜之特性的樹脂薄膜。 The polyamic acid used in the present invention contains 50 mol% or more, preferably 60 mol% or more, more preferably 70 mol% or more, still more preferably 80 mol% or more, and even more preferably 90 mol. The monomer unit represented by the formula (1) above the ear %. By using the polyaminic acid in such a monomer unit content, a resin film having characteristics suitable for a release film can be obtained with good reproducibility.

依據本發明之較佳的態樣時,本發明之剝離層形成用組成物所含的聚醯胺酸係僅由式(1)表示之單體單位所構成之聚合物,亦即,式(1)表示之單體單位含有100莫耳%的聚合物。此時,這種聚醯胺酸中之單體單位,只要是式(1)表示時,可為僅特定1種,也可為2種以上。後者的情形,聚醯胺酸所含之式(1)之單體單位之數,較佳為2~4,更佳為2~3。 According to a preferred aspect of the present invention, the polylysine contained in the composition for forming a release layer of the present invention is a polymer composed only of the monomer unit represented by the formula (1), that is, a formula ( 1) The monomer unit represented contains 100 mol% of the polymer. In this case, the monomer unit in the polyamic acid may be one specific or two or more types as long as it is represented by the formula (1). In the latter case, the number of monomer units of the formula (1) contained in the polyamic acid is preferably from 2 to 4, more preferably from 2 to 3.

本發明中,式(P)表示之基,較佳為含有式(P1)~(P3)之任一表示之2價基,更佳為含有式(P1)或(P3)表示之2價基,又更佳為含有式(P3)表示之2價基。 In the present invention, the group represented by the formula (P) preferably contains a divalent group represented by any one of the formulae (P1) to (P3), and more preferably contains a divalent group represented by the formula (P1) or (P3). More preferably, it contains a divalent group represented by the formula (P3).

前述式(P1)、式(P2)及式(P3)中,R1、R2、R3、R4、R5及R6可相同或相異,表示F、Cl、碳數1~3之烷基、或苯基,較佳為表示F、或Cl。 In the above formula (P1), formula (P2) and formula (P3), R 1 , R 2 , R 3 , R 4 , R 5 and R 6 may be the same or different, and represent F, Cl, and carbon number 1-3. The alkyl group or the phenyl group preferably represents F or Cl.

同樣地,此等式中,m1、m2、m3、m4、m5及m6可相同或相異,表示0~4之整數,較佳為表示0~2,更佳為表示0~1,特佳為表示0。 Similarly, in this equation, m1, m2, m3, m4, m5, and m6 may be the same or different, and represent an integer of 0 to 4, preferably 0 to 2, more preferably 0 to 1, especially excellent. To indicate 0.

本發明使用之聚醯胺酸,除了式(1)表示之單體單位外,也可含有其他的單體單位。這種其他之單體單位的含量,必須未達50莫耳%,較佳為未達40莫耳%,更佳為未達30莫耳%,又更佳為未達20莫耳%,再更佳為未達10莫耳%。 The polyamic acid used in the present invention may contain other monomer units in addition to the monomer unit represented by the formula (1). The content of such other monomer units must be less than 50% by mole, preferably less than 40% by mole, more preferably less than 30% by mole, and even more preferably less than 20% by mole. More preferably, it is less than 10% by mole.

這種其他的單體單位,可列舉例如式(2)之單體單位。 Such other monomer unit may, for example, be a monomer unit of the formula (2).

式(2)中,X1表示4價之有機基,Y2表示前述的式(P4)表示之基。 In the formula (2), X 1 represents a tetravalent organic group, and Y 2 represents a group represented by the above formula (P4).

式(P4)中,R7、及R8可相同或相異,表示F、Cl、碳數1~3之烷基、或苯基。R7較佳為表示F、或Cl。R8較佳為表示F、或Cl。 In the formula (P4), R 7 and R 8 may be the same or different and each represents F, Cl, an alkyl group having 1 to 3 carbon atoms, or a phenyl group. R 7 preferably represents F or Cl. R 8 preferably represents F or Cl.

R’表示氫原子、碳數1~3之烷基、或苯基,較佳為表示氫原子、或碳數1~3之烷基,更佳為表示氫原子。 R' represents a hydrogen atom, an alkyl group having 1 to 3 carbon atoms, or a phenyl group, preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, more preferably a hydrogen atom.

此外,l及m可相同或相異,表示0~4之整數,較佳為表示0~2,更佳為表示0~1,特佳為表示0。 Further, l and m may be the same or different, and represent an integer of 0 to 4, preferably 0 to 2, more preferably 0 to 1, and particularly preferably 0.

這種其他的單體單位,除前述式(2)之單體單位外,可列舉o-苯二胺、m-苯二胺、p-苯二胺、2-甲基-1,4-苯二胺、5-甲基-1,3-苯二胺、4-甲基-1,3-苯二胺、2-(三氟甲基)-1,4-苯二胺、2-(三氟甲基)-1,3-苯二胺及4-(三氟甲基)-1,3-苯二胺、聯苯胺、2,2’-二甲基聯苯胺、3,3’-二甲基聯苯胺、2,3’-二甲基聯苯胺、2,2’-雙(三氟甲基)聯苯胺、3,3’-雙(三氟甲基)聯苯胺、2,3’-雙(三氟甲基)聯苯胺、4,4’-二苯基醚、4,4’-雙(4-胺基苯氧基)聯苯、4,4’-二胺基苯甲醯苯胺(benzanilide)、5-胺基-2-(3-胺基苯基)-1H-苯並咪唑、9,9-雙(4-胺基苯基)茀等之二胺與偏苯三甲酸酐(PMDA)、2,3,6,7-萘四 羧酸二酐、4,4’-氧二鄰苯二甲酸酐、3,3’、4,4’-二苯甲酮四羧酸酐等之酸二酐所衍生之結構等。 Such other monomer units, in addition to the monomer unit of the above formula (2), may be exemplified by o-phenylenediamine, m-phenylenediamine, p-phenylenediamine, 2-methyl-1,4-benzene. Diamine, 5-methyl-1,3-phenylenediamine, 4-methyl-1,3-phenylenediamine, 2-(trifluoromethyl)-1,4-phenylenediamine, 2-(three Fluoromethyl)-1,3-phenylenediamine and 4-(trifluoromethyl)-1,3-phenylenediamine, benzidine, 2,2'-dimethylbenzidine, 3,3'-di Methyl benzidine, 2,3'-dimethylbenzidine, 2,2'-bis(trifluoromethyl)benzidine, 3,3'-bis(trifluoromethyl)benzidine, 2,3' - bis(trifluoromethyl)benzidine, 4,4'-diphenyl ether, 4,4'-bis(4-aminophenoxy)biphenyl, 4,4'-diaminobenzimidazole An amine such as benzanilide, 5-amino-2-(3-aminophenyl)-1H-benzimidazole, 9,9-bis(4-aminophenyl)anthracene or trimellitic anhydride (PMDA), 2,3,6,7-naphthalene A structure derived from an acid dianhydride such as carboxylic acid dianhydride, 4,4'-oxydiphthalic anhydride, 3,3' or 4,4'-benzophenonetetracarboxylic anhydride.

式(1)及式(2)中,如前述,X1表示4價之有機基,較佳為4價之芳香族基。 In the formulae (1) and (2), as described above, X 1 represents a tetravalent organic group, and preferably a tetravalent aromatic group.

X1可採用之4價的芳香族基,在製作本發明使用的聚醯胺酸時,藉由使用如以下的芳香族四羧酸二酐,可製作。 The tetravalent aromatic group which can be used for X 1 can be produced by using the aromatic tetracarboxylic dianhydride as follows when producing the polyamic acid used in the present invention.

亦即,偏苯三甲酸二酐、3,3’,4,4’-聯苯基四羧酸二酐、3,3’,4,4’-二苯甲酮四羧酸二酐、2,3,3’,4’-聯苯基四羧酸二酐、3,3’,4,4’-二苯基碸四羧酸二酐、1,4,5,8-萘四羧酸二酐、1,2,5,6-萘四羧酸二酐、4,4’-氧二鄰苯二甲酸酐、3,3’,4,4’-二甲基二苯基矽烷四羧酸二酐、3,3’,4,4’-四苯基矽烷四羧酸二酐、1,2,3,4-呋喃四羧酸二酐、4,4’-雙(3,4-二羧基苯氧基)二苯基丙烷二無水物、4,4’-六氟異亞丙基二苯二甲酸酐、對伸苯基二苯二甲酸二酐、2,2-雙-((3,4-二羧基苯基)-六氟丙烷二無水物、9,9-雙(3,4-二羧基苯基)茀二無水物、9,9‘-雙[4-(3,4-二羧基苯氧基)苯基]茀二無水物、3,3’,4,4’-聯苯基醚四羧酸二酐、2,3,5,6-吡啶四羧酸二酐、3,4,9,10-苝四羧酸二酐、4,4’-磺醯基二苯二甲酸二酐、對三聯苯基-3,4,3’,4’-四羧酸二酐、間三聯苯基(Meta terphenyl)-3,3’,4,4’-四羧酸二酐、3,3’,4,4’-二苯基醚四羧酸二酐、1,3-雙(3,4-二羧基苯基)-1,1,3,3-四甲基二矽氧烷二無水物、1-(2,3-二羧基苯基)-3-(3,4-二羧基苯基)-1,1,3,3-四甲基二矽氧 烷二無水物、3,3’,4,4’-氫醌二苯甲酸酯四羧酸二酐、2,2’-雙(4-羥基苯基)丙烷二苯甲酸酯-3,3’,4,4’-四羧酸等。 That is, trimellitic acid dianhydride, 3,3',4,4'-biphenyltetracarboxylic dianhydride, 3,3',4,4'-benzophenone tetracarboxylic dianhydride, 2 ,3,3',4'-biphenyltetracarboxylic dianhydride, 3,3',4,4'-diphenylphosphonium tetracarboxylic dianhydride, 1,4,5,8-naphthalenetetracarboxylic acid Dihydride, 1,2,5,6-naphthalenetetracarboxylic dianhydride, 4,4'-oxydiphthalic anhydride, 3,3',4,4'-dimethyldiphenylnonane tetracarboxylate Acid dianhydride, 3,3',4,4'-tetraphenylnonane tetracarboxylic dianhydride, 1,2,3,4-furan tetracarboxylic dianhydride, 4,4'-bis (3,4- Dicarboxyphenoxy)diphenylpropane dihydrate, 4,4'-hexafluoroisopropylidene dianhydride, p-phenylenediphthalic dianhydride, 2,2-bis-(( 3,4-Dicarboxyphenyl)-hexafluoropropane di-anhydrous, 9,9-bis(3,4-dicarboxyphenyl)phosphonium anhydrate, 9,9'-bis[4-(3,4 -Dicarboxyphenoxy)phenyl]anthracene anhydride, 3,3',4,4'-biphenyl ether tetracarboxylic dianhydride, 2,3,5,6-pyridinetetracarboxylic dianhydride, 3,4,9,10-decanetetracarboxylic dianhydride, 4,4'-sulfonyldiphthalic dianhydride, p-terphenyl--3,4,3',4'-tetracarboxylic dianhydride , meta terphenyl-3,3',4,4'-tetracarboxylic dianhydride, 3,3',4,4'-diphenyl ether tetracarboxylic dianhydride, 1,3-bis(3,4-dicarboxyphenyl)-1,1,3,3-tetramethyldioxine Alkanedihydrate, 1-(2,3-dicarboxyphenyl)-3-(3,4-dicarboxyphenyl)-1,1,3,3-tetramethyldioxine Alkanedihydrate, 3,3',4,4'-hydroquinone dibenzoate tetracarboxylic dianhydride, 2,2'-bis(4-hydroxyphenyl)propane dibenzoate-3, 3', 4, 4'-tetracarboxylic acid, and the like.

較佳為在此較佳的芳香族四羧酸二酐係選自由下述化合物群者。 Preferably, the preferred aromatic tetracarboxylic dianhydride is selected from the group consisting of the following compounds.

(式中,R3係具有至少1個芳香環之2價有機基,較佳為苯基、聯苯基、具有萘骨架之基)。 (In the formula, R 3 is a divalent organic group having at least one aromatic ring, preferably a phenyl group, a biphenyl group, or a group having a naphthalene skeleton).

因此,依據本發明之較佳態樣時,X1可採用之4價的芳香族基係具有苯骨架、萘骨架、聯苯骨架、三聯苯基骨架之任一者,更佳為具有苯骨架、萘骨架、聯苯骨架之任一者,又更佳為具有苯骨架、聯苯骨架之任一者。 Therefore, according to a preferred aspect of the present invention, the tetravalent aromatic group which X 1 may have may have any one of a benzene skeleton, a naphthalene skeleton, a biphenyl skeleton, and a terphenyl skeleton, and more preferably has a benzene skeleton. Any one of a naphthalene skeleton and a biphenyl skeleton is more preferably a benzene skeleton or a biphenyl skeleton.

依據本發明之較佳態樣時,本發明使用之聚醯胺酸係使作為酸二酐之3,3’、4,4’-聯苯基四羧酸二酐(BPDA)(式(4))與作為二胺之p-苯二胺(pPDA)(式(5))及4,4”-二胺基-p-三聯苯基(DATP)(式(6))、或作為酸二酐之偏苯三甲酸二酐(PMDA)(式(7))與作為二胺之pPDA(式(5))進行反應可得。 According to a preferred aspect of the present invention, the polyaminic acid used in the present invention is a 3,3',4,4'-biphenyltetracarboxylic dianhydride (BPDA) as an acid dianhydride (Formula (4) )) with p-phenylenediamine (pPDA) as a diamine (formula (5)) and 4,4"-diamino-p-terphenylphenyl (DATP) (formula (6)), or as acid The anhydride trimellitic acid dianhydride (PMDA) (formula (7)) is obtained by reacting with pPDA (formula (5)) as a diamine.

上述反應中,3,3’、4,4’-聯苯基四羧酸二酐(BPDA)與由p-苯二胺(pPDA)及4,4”-二胺基-p-三聯苯基(DATP)所構成之二胺、或偏苯三甲酸二酐(PMDA)與pPDA之投入比(莫耳比),考慮所望之聚 醯胺酸之分子量或單體單位之比例等,可適宜設定,但是相對於胺成分1,通常酸酐成分可設為0.7~1.3左右,較佳為0.8~1.2左右。 In the above reaction, 3,3', 4,4'-biphenyltetracarboxylic dianhydride (BPDA) and p-phenylenediamine (pPDA) and 4,4"-diamino-p-terphenyl (DATP) of the diamine, or trimesic acid dianhydride (PMDA) and pPDA ratio (Mo Erbi), consider the desired The molecular weight of the proline acid or the ratio of the monomer unit can be appropriately set. However, the acid anhydride component is usually about 0.7 to 1.3, preferably about 0.8 to 1.2, based on the amine component 1.

此外,二胺的pPDA與DATP之投入比,當DATP之物質量(m2)設定為1的情形,pPDA之物質量(m1)通常可設為1.7~20左右,較佳為2.1~20、更佳為2.2~20、又更佳為2.3~19、再更佳為2.3~18。亦即,m1與m2通常為m1/m2=1.7~20,較佳為2.1~20,更佳為2.2~20,又更佳為2.3~19,再更佳為2.3~18。 Further, in the case of the ratio of the pPDA of the diamine to the DATP, when the mass of the DATP (m 2 ) is set to 1, the mass of the pPDA (m 1 ) can be usually set to about 1.7 to 20, preferably 2.1 to 20. More preferably, it is 2.2 to 20, more preferably 2.3 to 19, and even more preferably 2.3 to 18. That is, m 1 and m 2 are usually m 1 /m 2 =1.7 to 20, preferably 2.1 to 20, more preferably 2.2 to 20, still more preferably 2.3 to 19, still more preferably 2.3 to 18.

上述反應係在有機溶劑中進行。亦即,本發明之剝離層形成用組成物含有此有機溶劑。在此可使用之有機溶劑,只要是對於前述反應不會產生不良影響者,即可使用各種溶劑。 The above reaction is carried out in an organic solvent. That is, the composition for forming a release layer of the present invention contains the organic solvent. The organic solvent which can be used herein can be used as long as it does not adversely affect the above reaction.

具體例可列舉例如m-甲酚、2-吡咯烷酮(pyrrolidone)、N-甲基-2-吡咯烷酮、N-乙基-2-吡咯烷酮、N-乙烯基-2-吡咯烷酮、N,N-二甲基乙醯胺、N,N-二甲基甲醯胺、3-甲氧基-N,N-二甲基丙基醯胺、3-乙氧基-N,N-二甲基丙基醯胺、3-丙氧基-N,N-二甲基丙基醯胺、3-異丙氧基-N,N-二甲基丙基醯胺、3-丁氧基-N,N-二甲基丙基醯胺、3-sec-丁氧基-N,N-二甲基丙基醯胺、3-tert-丁氧基-N,N-二甲基丙基醯胺、γ-丁內酯等之質子性溶劑等。此等可單獨使用或組合2種以上使用。 Specific examples thereof include m-cresol, 2-pyrrolidone, N-methyl-2-pyrrolidone, N-ethyl-2-pyrrolidone, N-vinyl-2-pyrrolidone, N,N-dimethyl Ethyl amide, N,N-dimethylformamide, 3-methoxy-N,N-dimethylpropyl decylamine, 3-ethoxy-N,N-dimethylpropyl hydrazine Amine, 3-propoxy-N,N-dimethylpropyl decylamine, 3-isopropoxy-N,N-dimethylpropyl decylamine, 3-butoxy-N,N-di Methylpropyl decylamine, 3-sec-butoxy-N,N-dimethylpropyl decylamine, 3-tert-butoxy-N,N-dimethylpropyl decylamine, γ-butyl A protic solvent such as a lactone. These may be used alone or in combination of two or more.

依據本發明之較佳態樣時,有機溶劑係以式(A)或(B)表示之溶劑。 According to a preferred embodiment of the present invention, the organic solvent is a solvent represented by the formula (A) or (B).

式(A)及式(B)中,Ra及Rb可相同或相異,表示碳數1~4之烷基,較佳為碳數1~3。在此,h表示自然數,較佳為1~3。 In the formulae (A) and (B), R a and R b may be the same or different and each represents an alkyl group having 1 to 4 carbon atoms, preferably a carbon number of 1 to 3. Here, h represents a natural number, preferably 1 to 3.

反應溫度只要在使用之溶劑的熔點至沸點為止的範圍內適宜設定即可,通常為0~100℃左右,但是為了防止所得之聚醯胺酸之醯亞胺化,維持聚醯胺酸單位之高含量時,較佳為0~70℃左右,更佳為0~60℃左右,又更佳為0~50℃左右。 The reaction temperature may be appropriately set within the range from the melting point to the boiling point of the solvent to be used, and is usually about 0 to 100 ° C. However, in order to prevent the imidization of the obtained polyglycine, the polyamine unit is maintained. When the content is high, it is preferably about 0 to 70 ° C, more preferably about 0 to 60 ° C, and even more preferably about 0 to 50 ° C.

反應時間係依存於反應溫度或原料物質之反應性,故無法一概限定,通常為1~100小時左右。 The reaction time depends on the reaction temperature or the reactivity of the starting material, and therefore cannot be uniformly defined, and is usually about 1 to 100 hours.

藉由以上說明的方法,可得到含有作為目標之聚醯胺酸的反應溶液。 According to the method described above, a reaction solution containing the target polyglycine can be obtained.

本發明通常將上述反應溶液進行過濾後,該濾液直接或經稀釋或濃縮,作為剝離層形成用組成物使用。如此,不僅可減低可能成為所得之樹脂薄膜之耐熱性、柔軟性或線膨脹係數特性惡化之原因的雜質混入,可有效率得到組成物。 In the present invention, after the above reaction solution is usually filtered, the filtrate is directly or diluted or concentrated to be used as a composition for forming a release layer. In this way, not only impurities which may cause deterioration in heat resistance, flexibility, or linear expansion coefficient characteristics of the obtained resin film can be reduced, and a composition can be obtained efficiently.

稀釋或濃縮所用的溶劑,無特別限定,可列舉例如與上述反應之反應溶劑之具體例同樣者,彼等可單獨使用或組合2種以上使用。 The solvent to be used for the dilution or concentration is not particularly limited, and examples thereof include the same as the specific examples of the reaction solvent of the above reaction, and they may be used alone or in combination of two or more.

此等之中,考慮再現性良好得到平坦性高的樹脂薄膜時,使用的溶劑,較佳為N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、N-甲基-2-吡咯烷酮、1,3-二甲基-2-咪唑啉酮、N-乙基-2-吡咯烷酮、γ-丁內酯。 Among these, when a resin film having high flatness is obtained in consideration of good reproducibility, a solvent to be used is preferably N,N-dimethylformamide, N,N-dimethylacetamide or N-methyl. Phen-2-pyrrolidone, 1,3-dimethyl-2-imidazolidinone, N-ethyl-2-pyrrolidone, γ-butyrolactone.

聚醯胺酸相對於剝離層形成用組成物總質量之濃度係考慮製作之薄膜(剝離層)之厚度或組成物黏度等,來適宜設定者,但是通常為0.5~30質量%左右,較佳為5~25質量%左右。 The concentration of the polyamine acid relative to the total mass of the composition for forming the release layer is preferably set in consideration of the thickness of the produced film (release layer) or the viscosity of the composition, but is usually about 0.5 to 30% by mass, preferably It is about 5 to 25 mass%.

又,剝離層形成用組成物之黏度也考慮製作之薄膜之厚度等,來適宜設定者,特別是再現性良好得到0.05~5μm左右之厚度之樹脂薄膜之目的時,通常於25℃下為10~10,000mPa.s左右,較佳為20~1000mPa.s左右,更佳為20~200mPa.s左右。 In addition, the viscosity of the composition for forming a release layer is appropriately set in consideration of the thickness of the film to be produced, and the like, and particularly, when the resin film having a thickness of about 0.05 to 5 μm is obtained with good reproducibility, it is usually 10 at 25 ° C. ~10,000mPa. s or so, preferably 20~1000mPa. s or so, more preferably 20~200mPa. s or so.

在此,剝離層形成用組成物之黏度,使用市售之液體之黏度測量用黏度計,例如參照JIS K7117-2所記載的步驟,剝離層形成用組成物可在溫度25℃的條件測量。較佳為黏度計使用圓錐平板型(cone-plate)迴轉黏度計,較佳為以同型的黏度計,使用標準錐形轉子(cone Rotor)1° 34‘×R24,剝離層形成用組成物可在溫度25℃之條件測量。這種迴轉黏度計,可列舉例如東機產業股份有限公司製TVE-25H。 Here, the viscosity of the composition for forming a release layer is measured using a commercially available viscosity measuring instrument for viscosity measurement of a liquid, for example, by referring to the procedure described in JIS K7117-2, and the composition for forming a release layer can be measured at a temperature of 25 °C. Preferably, the viscosity meter uses a cone-type rotary viscometer, preferably a homo-type viscometer, using a standard conical rotor (cone Rotor) 1° 34'×R24, and the composition for forming a peeling layer can be used. Measured at a temperature of 25 °C. As such a rotary viscometer, for example, TVE-25H manufactured by Toki Sangyo Co., Ltd. can be cited.

又,本發明之組成物除了聚醯胺酸與有機溶劑外,也可含有各種成分。可列舉例如交聯劑(以下也稱為交聯性化合物),但是不受此限定。 Further, the composition of the present invention may contain various components in addition to the polyamic acid and the organic solvent. For example, a crosslinking agent (hereinafter also referred to as a crosslinkable compound) is exemplified, but it is not limited thereto.

前述交聯性化合物可列舉例如含有2個以上之環氧基的化合物、具有胺基之氫原子經羥甲基、烷氧基甲基或其兩者取代之基的三聚氰胺衍生物、苯胍胺衍生物或甘脲等,但是不受此限定。 The crosslinkable compound may, for example, be a melamine derivative or a benzoguanamine containing a compound having two or more epoxy groups, a hydrogen atom having an amine group substituted with a methylol group, an alkoxymethyl group or both. A derivative or glycoluril or the like, but is not limited thereto.

以下可列舉交聯性化合物之具體例,但是不限於此。 Specific examples of the crosslinkable compound are listed below, but are not limited thereto.

含有2個以上之環氧基的化合物,可列舉例如Epolead GT-401、Epolead GT-403、Epolead GT-301、Epolead GT-302、Celloxide 2021、Celloxide 3000(以上為股份公司Daicel製)等具有環氧環己烯結構之環氧化合物;Epikote 1001、Epikote 1002、Epikote 1003、Epikote 1004、Epikote 1007、Epikote 1009、Epikote 1010、Epikote 828(以上為Japan Epoxy Resin(股)製(現:三菱化學股份公司製、jER(註冊商標)系列))等之雙酚A型環氧化合物;Epikote 807(Japan Epoxy Resin(股)製)等之雙酚F型環氧化合物;Epikote 152、Epikote 154(以上為Japan Epoxy Resin(股)製)、EPPN201、EPPN202(以上為日本化藥(股)製)等之酚醛清漆型環氧化合物;EOCN-102、EOCN-103S、EOCN-104S、EOCN-1020、EOCN-1025、EOCN-1027(以上為日本化藥(股)製)、Epikote 180S75(Japan Epoxy Resin(股)(現:三菱化學股份公司製、jER(註冊商標)系列))製)等之酚醛清漆型環氧化合物;V8000-C7(DIC股份公司製)等之萘型環氧化合物;Denacol EX-252 (NagaseChemtex(股)製)、CY175、CY177、CY179、Araldite CY-182、Araldite CY-192、Araldite CY-184(以上為BASF公司製)、Epiclon 200、Epiclon 400(以上為DIC(股)製)、Epikote 871、Epikote 872(以上為Japan Epoxy Resin(股)製(現:三菱化學股份公司製、jER(註冊商標)系列))製)、ED-5661、ED-5662(以上為Celanese coating(股)製)等之脂環式環氧化合物;Denacol EX-611、Denacol EX-612、Denacol EX-614、Denacol EX-622、Denacol EX-411、Denacol EX-512、Denacol EX-522、Denacol EX-421、Denacol EX-313、Denacol EX-314、Denacol EX-312(以上為NagaseChemtex(股)製)等之脂肪族聚縮水甘油醚化合物。 Examples of the compound containing two or more epoxy groups include Epolead GT-401, Epolead GT-403, Epolead GT-301, Epolead GT-302, Celloxide 2021, and Celloxide 3000 (the above is manufactured by Daicel Co., Ltd.). Oxygen cyclohexene structure epoxy compound; Epikote 1001, Epikote 1002, Epikote 1003, Epikote 1004, Epikote 1007, Epikote 1009, Epikote 1010, Epikote 828 (above: Japan Epoxy Resin) (now: Mitsubishi Chemical Corporation) Bisphenol A type epoxy compound such as JER (registered trademark) series); bisphenol F type epoxy compound such as Epikote 807 (made by Japan Epoxy Resin Co., Ltd.); Epikote 152, Epikote 154 (above Japan) Epoxy Resin Co., Ltd., EPPN201, EPPN202 (above, Nippon Chemical Co., Ltd.), etc.; EOCN-102, EOCN-103S, EOCN-104S, EOCN-1020, EOCN-1025 Novolac-type ring of EOCN-1027 (the above is manufactured by Nippon Kayaku Co., Ltd.) and Epikote 180S75 (Japan Epoxy Resin (produced by Mitsubishi Chemical Corporation, jER (registered trademark) series)) Oxygen compound; naphthalene type epoxy such as V8000-C7 (made by DIC Corporation) Compound; Denacol EX-252 (NagaseChemtex), CY175, CY177, CY179, Araldite CY-182, Araldite CY-192, Araldite CY-184 (above, BASF), Epiclon 200, Epiclon 400 (above DIC) , Epikote 871, Epikote 872 (above is made by Japan Epoxy Resin Co., Ltd. (currently: manufactured by Mitsubishi Chemical Corporation, jER (registered trademark) series)), ED-5661, ED-5662 (the above is Celanese coating) An alicyclic epoxy compound such as exe); Denacol EX-611, Denacol EX-612, Denacol EX-614, Denacol EX-622, Denacol EX-411, Denacol EX-512, Denacol EX-522, Denacol EX- 421. An aliphatic polyglycidyl ether compound such as Denacol EX-313, Denacol EX-314, and Denacol EX-312 (manufactured by Nagase Chemtex Co., Ltd.).

具有胺基之氫原子經羥甲基、烷氧基甲基或其兩者取代之基的三聚氰胺衍生物、苯胍胺衍生物或甘脲,可列舉例如1個三嗪環中,經甲氧基甲基平均3.7個取代的MX-750、1個三嗪環中,經甲氧基甲基平均5.8個取代的MW-30(以上為股份公司三和化學製);Cymel 300、Cymel 301、Cymel 303、Cymel 350、Cymel 370、Cymel 771、Cymel 325、Cymel 327、Cymel 703、Cymel 712等之甲氧基甲基化三聚氰胺;Cymel 235、Cymel 236、Cymel 238、Cymel 212、Cymel 253、Cymel 254等之甲氧基甲基化丁氧基甲基化三聚氰胺;Cymel 506、Cymel 508等之丁氧基甲基化三聚氰胺;如Cymel 1141之 含有羧基之甲氧基甲基化異丁氧基甲基化三聚氰胺;如Cymel 1123之甲氧基甲基化乙氧基甲基化苯胍胺;如Cymel 1123-10之甲氧基甲基化丁氧基甲基化苯胍胺;如Cymel 1128之丁氧基甲基化苯胍胺;如Cymel 1125-80之含有羧基之甲氧基甲基化乙氧基甲基化苯胍胺;如Cymel 1170之丁氧基甲基化甘脲;如Cymel 1172之羥甲基化甘脲(以上為三井Cyanamid股份有限公司製(現:日本CytecIndustries股份公司)等。 A melamine derivative, a benzoguanamine derivative or a glycoluril having a hydrogen atom of an amine group substituted with a methylol group, an alkoxymethyl group or both, and, for example, a triazine ring, a methoxy group The average methyl group of 3.7 substituted MX-750, one triazine ring, MW-30 substituted by an average of 5.8 methoxymethyl groups (above is the joint company Sanhe Chemical); Cymel 300, Cymel 301 Methoxymethylated melamine of Cymel 303, Cymel 350, Cymel 370, Cymel 771, Cymel 325, Cymel 327, Cymel 703, Cymel 712, etc.; Cymel 235, Cymel 236, Cymel 238, Cymel 212, Cymel 253, Cymel 254 Methoxymethylated butoxymethylated melamine; butoxymethylated melamine of Cymel 506, Cymel 508, etc.; such as Cymel 1141 a methoxymethylated isobutoxymethylated melamine containing a carboxyl group; a methoxymethylated ethoxymethylated benzoguanamine such as Cymel 1123; a methoxymethylation of Cymel 1123-10 Butoxymethylated benzoguanamine; butoxymethylated benzoguanamine such as Cymel 1128; methoxymethylated ethoxymethyl benzoguanamine containing a carboxyl group such as Cymel 1125-80; Butyloxymethylated glycoluril of Cymel 1170; hydroxymethylated glycoluril such as Cymel 1172 (above, manufactured by Mitsui Cyanamid Co., Ltd. (present: Japan Cytec Industries Co., Ltd.).

將以上說明之本發明之剝離層形成用組成物塗佈於基體,藉由加熱可得到由具有高的耐熱性、適度的柔軟性、適度的線膨脹係數之聚醯亞胺所構成的薄膜(剝離層)。 The composition for forming a release layer of the present invention described above is applied to a substrate, and a film composed of polyimine having high heat resistance, moderate flexibility, and a moderate coefficient of linear expansion can be obtained by heating ( Peel layer).

基礎基體(基材)可列舉例如玻璃、塑膠(聚碳酸酯、聚甲基丙烯酸酯、聚苯乙烯、聚酯、聚烯烴、環氧、三聚氰胺、三乙醯基纖維素、ABS、AS、降莰烯系樹脂等)、金屬(矽晶圓等)、木材、紙、石棉等。 Examples of the base substrate (substrate) include glass and plastic (polycarbonate, polymethacrylate, polystyrene, polyester, polyolefin, epoxy, melamine, triethyl cellulose, ABS, AS, and lower). Terpene resin, etc., metal (such as silicon wafer), wood, paper, asbestos, and the like.

塗佈的方法無特別限定,可列舉例如澆鑄塗佈法、旋轉塗佈法、刮刀塗佈法、浸漬塗佈法、輥塗法、棒塗法、模具塗佈法、噴墨法、印刷法(凸版、凹版、平版、網版印刷等)等。 The method of coating is not particularly limited, and examples thereof include a casting coating method, a spin coating method, a knife coating method, a dip coating method, a roll coating method, a bar coating method, a die coating method, an inkjet method, and a printing method. (embossing, gravure, lithography, screen printing, etc.), etc.

又,使本發明之剝離層形成用組成物中所含有的聚醯胺酸產生醯亞胺化的方法,可列舉例如將塗佈於基板上之組成物直接加熱的熱醯亞胺化、及在組成物中添加觸媒,進行加熱的觸媒醯亞胺化。 In addition, the method of producing a ruthenium imidization by the polyglycine contained in the composition for forming a release layer of the present invention may, for example, be a hydrazine imidization in which the composition coated on the substrate is directly heated, and A catalyst is added to the composition, and the heated catalyst is imidized.

聚醯胺酸之觸媒醯亞胺化係在本發明之剝離層形成用組成物中,添加觸媒,藉由調製觸媒添加組成物後,塗佈於基板,藉由加熱可得到樹脂薄膜(剝離層)。觸媒的量為醯胺酸基之0.1~30莫耳倍,較佳為1~20莫耳倍。又,觸媒添加組成物中,可添加作為脫水劑的乙酸酐等,其量為醯胺酸基之1~50莫耳倍、較佳為3~30莫耳倍。 In the composition for forming a release layer of the present invention, a catalyst is added to the composition for forming a release layer of the present invention, and a composition is added by a modulation catalyst, and then applied to a substrate, and a resin film can be obtained by heating. (peeling layer). The amount of the catalyst is 0.1 to 30 moles, preferably 1 to 20 moles, of the valerine group. Further, in the catalyst addition composition, acetic anhydride or the like as a dehydrating agent may be added in an amount of from 1 to 50 moles, preferably from 3 to 30 moles, per mole of the amidate group.

醯亞胺化觸媒,較佳為使用三級胺。三級胺較佳為吡啶、取代吡啶類、咪唑、取代咪唑類、甲基吡啶(picoline)、喹啉、異喹啉等。 The ruthenium imidization catalyst preferably uses a tertiary amine. The tertiary amine is preferably pyridine, substituted pyridine, imidazole, substituted imidazole, picoline, quinoline, isoquinoline or the like.

熱醯亞胺化及觸媒醯亞胺化時之加熱溫度,較佳為450℃以下。超過450℃時,所得之樹脂薄膜變脆,有時無法得到適合目的之用途的樹脂薄膜的情形。 The heating temperature in the case of the heat imidization and the imidization of the catalyst is preferably 450 ° C or lower. When the temperature exceeds 450 ° C, the obtained resin film becomes brittle, and a resin film suitable for the intended purpose may not be obtained.

又,考慮所得之樹脂薄膜之耐熱性與線膨脹係數特性時,將塗佈後的組成物,於50℃~100℃下加熱5分鐘~2小時後,該狀態下,階段性加熱使溫度上昇,最終以超過375℃~450℃下加熱30分鐘~4小時為佳。 Further, in consideration of heat resistance and linear expansion coefficient characteristics of the obtained resin film, the composition after coating is heated at 50 ° C to 100 ° C for 5 minutes to 2 hours, and in this state, the stepwise heating causes the temperature to rise. It is better to heat for more than 30 minutes to 4 hours at temperatures above 375 ° C to 450 ° C.

特別是塗佈後的組成物,在50℃~100℃下加熱5分鐘~2小時後,於超過100℃~200℃下加熱5分鐘~2小時,接著,以超過200℃~375℃下加熱5分鐘~2小時,最後於超過375℃~450℃下,加熱30分鐘~4小時較佳。 In particular, the coated composition is heated at 50 ° C ~ 100 ° C for 5 minutes to 2 hours, then heated at more than 100 ° C ~ 200 ° C for 5 minutes to 2 hours, and then heated at more than 200 ° C ~ 375 ° C 5 minutes to 2 hours, and finally more than 375 ° C ~ 450 ° C, heating for 30 minutes to 4 hours is preferred.

加熱所用的器具,可列舉例如加熱板、烤箱等。加熱環境可為空氣下,也可為惰性氣體下,又可為常壓下,或減壓下。 Examples of the means for heating include a hot plate, an oven, and the like. The heating environment can be under air, under inert gas, under normal pressure, or under reduced pressure.

樹脂薄膜之厚度,特別是作為剝離層使用的情形,通常為0.01~10μm左右,較佳為0.05~5μm左右,調整加熱前之塗膜的厚度,形成所望之厚度的樹脂薄膜。 The thickness of the resin film is usually about 0.01 to 10 μm, preferably about 0.05 to 5 μm, in the case of being used as a release layer, and the thickness of the coating film before heating is adjusted to form a resin film having a desired thickness.

以上說明的薄膜,最適合作為對於適用於軟性電子裝置的基板不會造成損傷而使其剝離用的剝離層使用。 The film described above is most suitably used as a release layer for peeling off a substrate applied to a flexible electronic device without causing damage.

藉由本案之組成物,可形成被設置於適用於軟性電子裝置之軟性基板與基礎基板之間的剝離層。基礎基板較佳為含有玻璃或矽晶圓者,更佳為含有玻璃者。 With the composition of the present invention, a release layer provided between a flexible substrate suitable for a flexible electronic device and a base substrate can be formed. The base substrate is preferably one containing glass or tantalum wafer, more preferably glass.

例如在玻璃基板上,藉由以往公知的手法塗佈本案之組成物,將所得之塗佈膜藉由以特定的溫度加熱,可形成剝離層。 For example, on the glass substrate, the composition of the present invention is applied by a conventionally known method, and the obtained coating film is heated at a specific temperature to form a release layer.

又,被剝離體層可形成於剝離層上。被剝離體層可為一層,也可為複數層。製作各種裝置時,現實上為複數層者。 Further, the peeled body layer may be formed on the peeling layer. The layer to be peeled off may be one layer or a plurality of layers. When making various devices, it is actually a plurality of layers.

被剝離體層之中,剝離層正上方的層係依存於使用的剝離層,但是可使用與該剝離層之剝離性較佳者,換言之,與使用之剝離層之密著性不佳者。 Among the peeled body layers, the layer directly above the peeling layer depends on the peeling layer to be used, but the peeling property with the peeling layer is preferably used, in other words, the adhesion to the peeling layer to be used is not good.

本案之其他方面為提供被剝離體之製造方法。 Another aspect of the present invention is to provide a method of manufacturing a stripped body.

該方法為藉由具有下述步驟可得到被剝離體。 This method can obtain a peeled body by having the following steps.

a)將本案之組成物塗佈於玻璃基板上後,形成剝離層的步驟;b)於該剝離層上形成被剝離體的步驟;及 c)在剝離層與被剝離體之界面,將被剝離體剝離的步驟;b)步驟中,「被剝離體」可為一層,也可為複數層。 a) a step of forming a release layer after applying the composition of the present invention on a glass substrate; b) a step of forming a peeled body on the release layer; c) a step of peeling off the object to be peeled off at the interface between the peeling layer and the object to be peeled; and in the step b), the layer to be peeled may be one layer or a plurality of layers.

又,「被剝離體」之中,剝離層正上方的層係依存於使用的剝離層,但是可使用與該剝離層之剝離性較佳者,換言之,與使用之剝離層之密著性不佳者。 Further, in the "exfoliated body", the layer directly above the release layer depends on the peeling layer to be used, but the peeling property with the peeling layer can be preferably used, in other words, the adhesion to the peeling layer to be used is not Good.

依據本發明之其他之較佳態樣時,可提供一種基板構造,其係適用於軟性電子裝置的基板構造,其係含有:基礎基板;在1或2以上之區域內,覆蓋前述基礎基體的剝離層,且藉由本發明之剝離層形成用組成物所形成的剝離層;及覆蓋前述基礎基板與前述剝離層之軟性基板,前述軟性基板與前述剝離層之密著力,大於前述剝離層與前述基礎基體之密著力。在此所謂的密著力之大小,例如可藉由本案之實施例所示之方格試驗來確認。 According to another preferred aspect of the present invention, there is provided a substrate structure suitable for a substrate structure of a flexible electronic device, comprising: a base substrate; covering the base substrate in a region of 1 or more a release layer formed of the composition for forming a release layer of the present invention; and a flexible substrate covering the base substrate and the release layer, wherein the adhesion between the flexible substrate and the release layer is greater than the release layer and the The adhesion of the foundation matrix. The magnitude of the so-called adhesion force can be confirmed, for example, by the square test shown in the examples of the present invention.

以下依據實施例說明本發明,但是本發明不限於該實施例者。 The invention is described below based on the examples, but the invention is not limited to the examples.

[實施例] [Examples]

本實施例所用的簡稱,列舉如下並說明。 The abbreviations used in this embodiment are listed below and explained.

<溶劑> <solvent>

NMP:N-甲基吡咯烷酮。 NMP: N-methylpyrrolidone.

<胺類> <amines>

p-PDA:p-苯二胺。 p-PDA: p-phenylenediamine.

APAB:2-(3-胺基苯基)-5-胺基苯並咪唑。 APAB: 2-(3-Aminophenyl)-5-aminobenzimidazole.

DATP:4,4’-二胺基-p-三聯苯。 DATP: 4,4'-diamino-p-terphenyl.

6FAP:2,2-雙(3-胺基-4-羥基苯基)六氟丙烷。 6FAP: 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane.

<酸二酐> <acid dianhydride>

BPDA:3,3’-4,4’-聯苯基四羧酸二酐。 BPDA: 3,3'-4,4'-biphenyltetracarboxylic dianhydride.

BA-TME:4,4-亞聯苯基(Biphenylene)雙(苯均四酸單酯酸酐)。 BA-TME: 4,4-biphenylene bis(benzenetetracarboxylic acid monoester anhydride).

PMDA:偏苯三甲酸二酐。 PMDA: trimellitic acid dianhydride.

<醛> <aldehyde>

IPHA:間苯二甲醛(isophthalaldehyde)。 IPHA: isophthalaldehyde.

[數平均分子量及重量平均分子量之測量] [Measurement of number average molecular weight and weight average molecular weight]

聚合物之重量平均分子量(以下簡稱「Mw」)與分子量分布,使用日本分光股份有限公司製GPC裝置(Shodex(註冊商標)管柱KF803L及KF805L),在作為溶出溶劑之二甲基甲醯胺,以流量1ml/分鐘、管柱溫度 50℃的條件下進行測量。又,Mw為聚苯乙烯換算值。 The weight average molecular weight of the polymer (hereinafter referred to as "Mw") and the molecular weight distribution, using a GPC apparatus (Shodex (registered trademark) column KF803L and KF805L) manufactured by JASCO Corporation, in the dimethylformamide as a dissolution solvent , with a flow rate of 1 ml / min, column temperature The measurement was carried out at 50 °C. Further, Mw is a value in terms of polystyrene.

<合成例> <Synthesis Example>

<合成例1 聚醯亞胺前驅物P1之合成> <Synthesis Example 1 Synthesis of Polyimine Precursor P1>

BPDA(98)//p-PDA(90)/DATP(10) BPDA(98)//p-PDA(90)/DATP(10)

將p-PDA 17.8g(0.164莫耳)、DATP 2.38g(0.009莫耳)及APAB 2.05g(0.009莫耳)溶解於NMP 425g中,同時添加BPDA 52.8g(0.179莫耳)後,再度添加NMP 7.4g,在氮環境下,使於23℃反應24小時。所得之聚醯亞胺前驅物P1之Mw為63000、分子量分布為9.9。 17.8g (0.164 mol), DATP 2.38g (0.009 mol) and APAB 2.05g (0.009 mol) of p-PDA were dissolved in NMP 425g, and BPDA 52.8g (0.179 mol) was added, and NMP was added again. 7.4 g was reacted at 23 ° C for 24 hours under a nitrogen atmosphere. The obtained polyimine precursor P1 had a Mw of 63,000 and a molecular weight distribution of 9.9.

<合成例2 聚醯亞胺前驅物P2之合成> <Synthesis Example 2 Synthesis of Polyimine Precursor P2>

BPDA(98)/DATP(100) BPDA(98)/DATP(100)

使DATP 30.8g(0.118莫耳)溶解於NMP 425g中,同時添加BPDA 34.1g(0.116莫耳)後,再度添加NMP10g,氮環境下,使於23℃反應24小時。所得之聚醯亞胺前驅物P2之Mw為70700、分子量分布為9.7。 30.8 g of DATP (0.118 mol) was dissolved in 425 g of NMP, and 34.1 g (0.116 mol) of BPDA was added thereto, and 10 g of NMP was further added thereto, and the mixture was reacted at 23 ° C for 24 hours in a nitrogen atmosphere. The obtained polyimine precursor P2 had a Mw of 70,700 and a molecular weight distribution of 9.7.

<合成例3 聚醯亞胺前驅物P3之合成> <Synthesis Example 3 Synthesis of Polyimine Precursor P3>

PMDA(98)/p-PDA(80)/DATP(20) PMDA(98)/p-PDA(80)/DATP(20)

使p-PDA 20.261g(0.1875莫耳)與TPDA 12.206g(0.0469莫耳)溶解於NMP 617.4g中,冷卻至15℃後,添加PMDA 50.112g(0.2298莫耳),氮環境下,使於50℃反應48小時。所得之聚醯亞胺前驅物P3之Mw為 82,100、分子量分布為2.7。 P-PDA 20.261g (0.1875 mol) and TPDA 12.206g (0.0469 mol) were dissolved in NMP 617.4g, cooled to 15 ° C, added PMDA 50.112g (0.2298 mol), under nitrogen, to 50 The reaction was carried out at ° C for 48 hours. The Mw of the obtained polyimine precursor P3 is 82,100, molecular weight distribution is 2.7.

<合成例4 聚醯亞胺前驅物P4之合成> <Synthesis Example 4 Synthesis of Polyimine Precursor P4>

BP-TME(98)//p-PDA(95)/APAB(5) BP-TME(98)//p-PDA(95)/APAB(5)

使p-PDA 9.66g(0.089莫耳)與APAB 1.05g(0.005莫耳)溶解於NMP 440g中,添加BP-TME 49.2g(0.092莫耳),氮環境下,使於室溫反應24小時。所得之聚醯亞胺前驅物P4之Mw為57000、分子量分布為9.3。 9.66 g (0.089 mol) of p-PDA and 1.05 g (0.005 mol) of APAB were dissolved in NMP 440 g, and BP-TME 49.2 g (0.092 mol) was added, and the mixture was allowed to react at room temperature for 24 hours under a nitrogen atmosphere. The obtained polyimine precursor P4 had a Mw of 57,000 and a molecular weight distribution of 9.3.

<合成例5 聚醯亞胺前驅物P5之合成> <Synthesis Example 5 Synthesis of Polyimine Precursor P5>

BPDA(98)//p-PDA(100) BPDA(98)//p-PDA(100)

使p-PDA 3.176g(0.02937莫耳)溶解於NMP 88.2g中,添加BPDA 8.624g(0.02931莫耳)後,氮環境下,使於23℃反應24小時。所得之聚醯亞胺前驅物P5之Mw為107,300、分子量分布為4.6。 3.176 g (0.02937 mol) of p-PDA was dissolved in 88.2 g of NMP, and 8.624 g (0.02931 mol) of BPDA was added, and then reacted at 23 ° C for 24 hours in a nitrogen atmosphere. The obtained polybendimimine precursor P5 had a Mw of 107,300 and a molecular weight distribution of 4.6.

<合成例6 聚苯并噁唑前驅物(P6)之合成> <Synthesis Example 6 Synthesis of Polybenzoxazole Precursor (P6)>

IHPA(98)//6FAP(100) IHPA(98)//6FAP(100)

使6FAP 3.18g(0.059莫耳)溶解於NMP 70g中,添加IPHA 7.92g(0.060莫耳)後,氮環境下,使於23℃反應24小時。所得之聚合物之Mw為107,300、分子量分布為4.6。 6.18 g (0.059 mol) of 6FAP was dissolved in 70 g of NMP, and 7.92 g (0.060 mol) of IPHA was added, and then reacted at 23 ° C for 24 hours under a nitrogen atmosphere. The obtained polymer had a Mw of 107,300 and a molecular weight distribution of 4.6.

<合成例7 聚醯亞胺前驅物P7之合成> <Synthesis Example 7 Synthesis of Polyimine Precursor P7>

PMDA(98)//p-PDA(100) PMDA(98)//p-PDA(100)

使p-PDA 10.078g(93mmol)溶解於NMP 220.0g中。所得之溶液中添加PMDA 19.922g(91mmol),氮環境下,使於23℃反應24小時。所得之聚合物之Mw為55,900、分子量分布為3.1。 10.078 g (93 mmol) of p-PDA was dissolved in 220.0 g of NMP. To the obtained solution, 19.922 g (91 mmol) of PMDA was added, and the mixture was reacted at 23 ° C for 24 hours under a nitrogen atmosphere. The obtained polymer had a Mw of 55,900 and a molecular weight distribution of 3.1.

<剝離層基板之製作> <Production of peeling layer substrate>

將上述合成例1~7所得之P1~P7,以NMP稀釋成4wt%,使用旋轉塗佈機塗佈於100mm×100mm之玻璃基板(OA-10G無鹼玻璃)或矽晶圓上後,於硬化條件A~C下,以烤箱進行燒成,製作剝離層。 P1 to P7 obtained in the above Synthesis Examples 1 to 7 were diluted to 4 wt% with NMP, and applied onto a 100 mm × 100 mm glass substrate (OA-10G alkali-free glass) or a tantalum wafer using a spin coater, and then In the curing conditions A to C, the mixture was fired in an oven to prepare a release layer.

硬化條件A:120℃下,維持30分鐘→昇溫→300℃下,維持60分鐘→昇溫→400℃下,維持60分鐘。又,昇溫速度為10℃/分鐘。 Hardening condition A: maintained at 120 ° C for 30 minutes → temperature rise → 300 ° C, maintained for 60 minutes → temperature rise → 400 ° C, maintained for 60 minutes. Further, the temperature increase rate was 10 ° C / min.

硬化條件B:120℃下,維持30分鐘→昇溫→180℃下,維持20分鐘→昇溫→240℃下,維持20分鐘→昇溫→300℃下,維持20分鐘→昇溫→400℃下,維持20分鐘→昇溫→450℃下,維持60分鐘。又,昇溫速度為10℃/分鐘。 Hardening condition B: maintained at 120 ° C for 30 minutes → temperature rise → 180 ° C, maintained for 20 minutes → temperature rise → 240 ° C, maintained for 20 minutes → temperature rise → 300 ° C, maintained for 20 minutes → temperature rise → 400 ° C, maintain 20 Minutes → warming → 450 ° C, maintained for 60 minutes. Further, the temperature increase rate was 10 ° C / min.

硬化條件C:80℃下,維持10分鐘→昇溫→300℃下,維持30分鐘→昇溫→400℃下,維持30分鐘。又,昇溫速度為10℃/分鐘。 Hardening condition C: maintained at 80 ° C for 10 minutes → temperature rise → 300 ° C, maintained for 30 minutes → temperature rise → 400 ° C, maintained for 30 minutes. Further, the temperature increase rate was 10 ° C / min.

所得之塗佈膜之膜厚係使用接觸式膜厚測量器(股份公司ULVAC製Dektak 3ST)進行測量。 The film thickness of the obtained coating film was measured using a contact film thickness measuring instrument (Dektak 3ST, manufactured by the company ULVAC).

表1表示使用之P1~P7之前驅物、塗佈基板、硬化條件、及製作之剝離層之膜厚。 Table 1 shows the film thickness of the P1 to P7 precursor, the coated substrate, the curing conditions, and the produced release layer.

<方格試驗(Cross-cut test)I> <Cross-cut test I>

對於表1所示之實施例1~5及比較例1~3之具備剝離層的基板,以方格試驗I確認基板(玻璃或矽晶圓)/剝離層之密著力。 With respect to the substrates having the release layers of Examples 1 to 5 and Comparative Examples 1 to 3 shown in Table 1, the adhesion of the substrate (glass or germanium wafer)/release layer was confirmed by the check test I.

方格試驗I係如下述進行。 The checker test I was carried out as follows.

(1)薄膜上製作100個1mm四方的正方形。 (1) 100 squares of 1 mm square were produced on the film.

(2)然後,以黏著膠帶(賽路玢膠帶(註冊商標))黏貼於上述正方形,然後進行剝離步驟。 (2) Then, it is adhered to the above square with an adhesive tape (赛路玢 tape (registered trademark)), and then a peeling step is performed.

(3)剝離步驟後,計算殘存於基板之上述正方形。 (3) After the stripping step, the square remaining on the substrate is calculated.

<方格試驗I之結果的指標> <Indicators of the results of the square test I>

以下述指標表示方格試驗之結果、剝離之程度。 The results of the square test and the degree of peeling are indicated by the following indicators.

5B:未剝離。 5B: Not peeled off.

4B:5%以下之剝離。 4B: Peeling of 5% or less.

3B:5~15%之剝離。 3B: 5~15% peeling.

2B:15~35%之剝離。 2B: 15~35% peeling.

1B:35~65%之剝離。 1B: 35~65% peeling.

0B:65%~80%之剝離。 0B: 65% to 80% peeling.

B:80%~95%之剝離。 B: 80% to 95% peeling.

A:95%~未達100%之剝離。 A: 95%~ not 100% off.

AA:100%之剝離。 AA: 100% stripping.

與上述方格試驗I不同,針對表1所示之實施例1~5及比較例1~3之具備剝離層的基板,測量構成該剝離層之成分之特性、亦即,(1)顯示加熱時之重量變化減少1%重量的溫度、(2)於波長1000nm之折射率、(3)於波長1000nm之雙折射、及(4)表面能量。又,各特性之測量條件等如以下所示。 Unlike the above-described checker test I, the properties of the components constituting the peeling layer were measured for the substrates having the peeling layers of Examples 1 to 5 and Comparative Examples 1 to 3 shown in Table 1, that is, (1) showing heating The weight change is reduced by a temperature of 1% by weight, (2) a refractive index at a wavelength of 1000 nm, (3) a birefringence at a wavelength of 1000 nm, and (4) a surface energy. Moreover, the measurement conditions of each characteristic are as follows.

<(1)顯示加熱時之重量變化減少1%重量的溫度> <(1) shows a change in weight change by 1% by weight when heated>

使用bruker股份有限公司製TD-DTA2000ST,氮環境下進行熱重量(TG)測量,求重量減少1%的溫度。 The TD-DTA2000ST manufactured by Bruker Co., Ltd. was used to measure the thermal weight (TG) in a nitrogen atmosphere, and the temperature was reduced by 1%.

<(2)於波長1000nm之折射率及(3)雙折射率> <(2) Refractive index at a wavelength of 1000 nm and (3) birefringence>

使用高速分光橢圓測厚儀M-2000(J.A.Woollam Japan股份公司製),測量折射率及雙折射率。又,折射率係1000nm之值之面內折射率,而雙折射率為面內折射率與面外折射率之差。 The refractive index and birefringence were measured using a high-speed spectroscopic thickness gauge M-2000 (manufactured by J.A. Woollam Japan Co., Ltd.). Further, the refractive index is an in-plane refractive index of a value of 1000 nm, and the birefringence is a difference between an in-plane refractive index and an out-of-plane refractive index.

<(4)表面能量> <(4) Surface energy>

使用全自動接觸角計DM-701(共和界面科學股份公司製),測量各構件之表面能量。又,測量所用的溶劑為水與碘化亞甲基,由此等之溶劑的接觸角計算得到。 The surface energy of each member was measured using a fully automatic contact angle meter DM-701 (manufactured by Kyowa Interface Science Co., Ltd.). Further, the solvent used for the measurement was water and a methylene iodide, and the contact angle of the solvent was calculated.

<被剝離體之形成與其剝離試驗(方格試驗II)> <Formation of the peeled body and peeling test (square test II)>

於實施例1~5及比較例1~3之具備有剝離層之基板上,形成被剝離體,以方格試驗II確認其剝離的程度。 On the substrates having the release layers of Examples 1 to 5 and Comparative Examples 1 to 3, the object to be peeled off was formed, and the degree of peeling was confirmed by the square test II.

<<被剝離體層之製作>> <<Production of peeled body layer>>

於具備有剝離層之基板之該剝離層上,形成作為被剝離體之聚醯亞胺層。 On the release layer of the substrate having the release layer, a polyimide layer as a release body is formed.

具體而言,如表1所示,於實施例1~5及比較例1~3之具備剝離層之基板之剝離層上,以塗佈棒塗佈上述合成例5或合成例1所得之前驅物P5或P1。然後,以烤箱在120℃下,維持30分鐘→昇溫→180℃下,維持20分鐘→昇溫→240℃/維持20分鐘→昇溫→300℃下,維持20分鐘→昇溫→400℃下,維持20分鐘→昇溫→450℃下,維持60分鐘(任一的昇溫速度為10℃/分鐘)進行硬化,製作由聚醯亞胺所構成之膜厚15μm的被剝離體層。 Specifically, as shown in Table 1, the precursors obtained in the above Synthesis Example 5 or Synthesis Example 1 were coated on the release layer of the substrate having the release layer of Examples 1 to 5 and Comparative Examples 1 to 3 with a coating bar. P5 or P1. Then, in an oven at 120 ° C for 30 minutes → temperature rise → 180 ° C, maintained for 20 minutes → temperature rise → 240 ° C / maintain 20 minutes → temperature rise → 300 ° C, maintained for 20 minutes → temperature rise → 400 ° C, maintain 20 In the minute → temperature rise → 450 ° C, the film was cured for 60 minutes (any temperature increase rate was 10 ° C / minute), and a peeled body layer made of polyimide polyimide having a film thickness of 15 μm was produced.

<<方格試驗II>> <<square test II>>

對於上述所得之具備被剝離體層及剝離層之基板,以 方格試驗II確認被剝離體層/剝離層間之密著力。 The substrate having the peeled body layer and the peeled layer obtained as described above is The check test II confirmed the adhesion between the peeled body layer/release layer.

方格試驗II係與方格試驗I同樣進行。 The checker test II was carried out in the same manner as the checker test I.

表2中表示(1)表示加熱時之重量變化之減少1%重量的溫度(表2中,「以(1)」表示)、(2)波長1000nm之折射率(表2中,「以(2)」表示)、(3)該(2)之折射率與雙折射之差(表2中,「以(3)」表示)、(4)表面能量(表2中,以「(4)」表示。但是單位為dyne/cm)、被剝離體層使用的聚醯亞胺前驅物、及方格試驗I及II之結果。 Table 2 shows (1) the temperature at which the weight change during heating is reduced by 1% by weight (in Table 2, "indicated by (1)"), and (2) the refractive index at a wavelength of 1000 nm (in Table 2, "I" 2)" indicates), (3) the difference between the refractive index and the birefringence of (2) (in Table 2, "indicated by (3)"), and (4) the surface energy (in Table 2, "(4) "Yes, but the unit is dyne/cm), the polyimide precursor used in the stripped layer, and the results of the checkers I and II.

由表2得知以下的情形。實施例1~5之剝離層之試驗I的結果為5B,故得知剝離層不會自基板剝離,而試驗II之結果為AA,因此,得知僅被剝離體層自 剝離層剝離。換言之,得知由本發明之剝離層用組成物所形成的剝離層,產生所期望的剝離結果。 The following cases are known from Table 2. The result of the test I of the peeling layers of Examples 1 to 5 was 5B, so that the peeling layer was not peeled off from the substrate, and the result of the test II was AA, and therefore, it was found that only the peeled body layer was self-exposed. The peeling layer is peeled off. In other words, it was found that the release layer formed of the composition for a release layer of the present invention produced a desired peeling result.

另外,比較例1及比較例3之試驗I的結果為AA,故得知剝離層可自基板剝離。換言之,得知比較例1及比較例3無法得到所期望的剝離結果。又,比較例2之試驗I及試驗II均為5B,故得知即使在剝離層與基板之界面,或剝離層與被剝離體層之界面,也不會剝離,也無法得到所期望之剝離結果。 Further, the results of Test I of Comparative Example 1 and Comparative Example 3 were AA, and it was found that the release layer was peeled off from the substrate. In other words, it was found that Comparative Example 1 and Comparative Example 3 failed to obtain a desired peeling result. Further, in Tests 1 and II of Comparative Example 2, both of them were 5B. Therefore, even if the interface between the release layer and the substrate or the interface between the release layer and the release layer was not peeled off, the desired peeling result could not be obtained. .

Claims (14)

一種剝離層形成用組成物,其係含有:含有50莫耳%以上之下述式(1)表示之單體單位,且重量平均分子量為10,000以上的聚醯胺酸及有機溶劑, [式中,X1表示4價有機基,Y1表示以下述式(P)表示之2價基: (式中,R表示F、Cl、碳數1~3之烷基、或苯基,m表示0~4之整數,且r表示1~4之整數)]。 A composition for forming a release layer, comprising: a monomeric unit represented by the following formula (1): 50 mol% or more, and a polyglycine and an organic solvent having a weight average molecular weight of 10,000 or more. [wherein, X 1 represents a tetravalent organic group, and Y 1 represents a divalent group represented by the following formula (P): (wherein R represents F, Cl, an alkyl group having 1 to 3 carbon atoms, or a phenyl group, and m represents an integer of 0 to 4, and r represents an integer of 1 to 4)]. 如申請專利範圍第1項之剝離層形成用組成物,其中前述Y1為以下述式(P1)~(P3)之任一表示之2價基, (式中,R1、R2、R3、R4、R5及R6可相同或相異,表示 F、Cl、碳數1~3之烷基、或苯基,m1、m2、m3、m4、m5及m6可相同或相異,表示0~4之整數)。 The composition for forming a release layer according to the first aspect of the invention, wherein the Y 1 is a divalent group represented by any one of the following formulae (P1) to (P3), (wherein R 1 , R 2 , R 3 , R 4 , R 5 and R 6 may be the same or different and represent F, Cl, an alkyl group having 1 to 3 carbon atoms, or a phenyl group, m1, m2, m3 , m4, m5, and m6 may be the same or different, indicating an integer from 0 to 4. 如申請專利範圍第2項之剝離層形成用組成物,其中前述Y1至少含有式(P1)表示之2價基。 The composition for forming a release layer according to the second aspect of the invention, wherein the Y 1 contains at least a divalent group represented by the formula (P1). 如申請專利範圍第1~3項中任一項之剝離層形成用組成物,其中前述聚醯胺酸,進一步含有下述式(2)表示之單體單位, [式中,X1係如申請專利範圍第1項所定義,Y2表示下述式(P4)表示之基: (式中,R7、及R8可相同或相異,表示F、Cl、碳數1~3之烷基、或苯基,R’表示氫原子、碳數1~3之烷基、或苯基,l表示0~4之整數,且m係如申請專利範圍第1項所定義)]。 The composition for forming a release layer according to any one of claims 1 to 3, wherein the polyamic acid further contains a monomer unit represented by the following formula (2). [wherein, X 1 is as defined in the first item of the patent application scope, and Y 2 represents a base represented by the following formula (P4): (wherein R 7 and R 8 may be the same or different and each represent F, Cl, an alkyl group having 1 to 3 carbon atoms, or a phenyl group; and R' represents a hydrogen atom, an alkyl group having 1 to 3 carbon atoms, or Phenyl, l represents an integer from 0 to 4, and m is as defined in item 1 of the patent application). 如申請專利範圍第1~4項中任一項之剝離層形成用組成物,其中前述X1為4價芳香族基。 The composition for forming a release layer according to any one of claims 1 to 4, wherein the X 1 is a tetravalent aromatic group. 如申請專利範圍第5項之剝離層形成用組成物,其中前述4價芳香族基具有選自苯骨架、萘骨架及聯苯骨架之至少1種。 The composition for forming a release layer according to claim 5, wherein the tetravalent aromatic group has at least one selected from the group consisting of a benzene skeleton, a naphthalene skeleton, and a biphenyl skeleton. 如申請專利範圍第1~6項中任一項之剝離層形成用組成物,其中前述有機溶劑為以下述式(A)或(B)表示之溶劑, (式中,Ra及Rb可相同或相異,表示碳數1~4之烷基,h表示自然數)。 The composition for forming a release layer according to any one of claims 1 to 6, wherein the organic solvent is a solvent represented by the following formula (A) or (B). (wherein R a and R b may be the same or different and each represents an alkyl group having 1 to 4 carbon atoms, and h represents a natural number). 如申請專利範圍第1~7項中任一項之剝離層形成用組成物,其中前述聚醯胺酸中之前述式(1)表示之單體單位之含量為60莫耳%以上。 The composition for forming a release layer according to any one of the items 1 to 7, wherein the content of the monomer unit represented by the above formula (1) in the polyamic acid is 60 mol% or more. 如申請專利範圍第1~8項中任一項之剝離層形成用組成物,其係用於形成設置於玻璃基板正上方之剝離層。 The composition for forming a release layer according to any one of claims 1 to 8, which is for forming a release layer provided directly above the glass substrate. 一種剝離層,其係形成於被適用於軟性電子裝置之軟性基板與基礎基板之間的剝離層,使用如申請專利範圍第1~9項中任一項之剝離層形成用組成物所製作。 A peeling layer which is formed on a peeling layer which is applied between a flexible substrate and a base substrate of a flexible electronic device, and which is produced by using the composition for forming a release layer according to any one of claims 1 to 9. 一種基板構造,其係適用於軟性電子裝置的基板構造,其係含有: 基礎基板;在1或2以上之區域,覆蓋前述基礎基體的剝離層,且藉由如申請專利範圍第1~9項中任一項之剝離層形成用組成物所形成的剝離層;及覆蓋前述基礎基板與前述剝離層之軟性基板,前述軟性基板與前述剝離層之密著力,大於前述剝離層與前述基礎基體之密著力。 A substrate structure suitable for a substrate structure of a flexible electronic device, comprising: a base substrate; a release layer formed by covering the release layer of the base substrate in a region of 1 or 2 or more, and a release layer forming composition according to any one of claims 1 to 9; and covering In the flexible substrate of the base substrate and the release layer, the adhesion between the flexible substrate and the release layer is greater than the adhesion between the release layer and the base substrate. 如申請專利範圍第11項之基板構造,其中基礎基板含有玻璃。 The substrate structure of claim 11, wherein the base substrate contains glass. 一種剝離層之製造方法,其係使用如申請專利範圍第1~9項中任一項之剝離層形成用組成物。 A method for producing a release layer, which is a composition for forming a release layer according to any one of claims 1 to 9. 一種製作方法,其係適用於軟性電子裝置之基板構造之製作方法,其係含有以下步驟:準備基礎基板的步驟;使用如申請專利範圍第1~9項中任一項之剝離層形成用組成物來製作在1或2以上之區域,覆蓋前述基礎基體的剝離層的步驟;及在前述基礎基板與前述剝離層上形成軟性基板的步驟;前述軟性基板與前述剝離層之密著力,大於前述剝離層與前述基礎基體之密著力。 A manufacturing method for a substrate structure for a flexible electronic device, comprising the steps of: preparing a base substrate; and using the composition for forming a release layer according to any one of claims 1 to 9. a step of forming a peeling layer covering the base substrate in a region of 1 or 2 or more; and a step of forming a flexible substrate on the base substrate and the peeling layer; and the adhesion between the flexible substrate and the peeling layer is greater than The adhesion of the release layer to the aforementioned base substrate.
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