TW201605636A - Peeling apparatus and peeling method for laminate body and manufacturing method of electronic device - Google Patents

Abstract

The present invention relates to a peeling apparatus for a laminate body, which is characterized by comprising: an inclination device for enabling a laminate body to be inclined relative to the horizontal direction, wherein the laminate body is formed by a first substrate and a second substrate peelably adhered to each other via an absorbing layer; a liquid supply device for enabling at least one lateral side at the upper end part of the inclined laminate body to be full of liquid; and a peeling device for performing a peeling operation on the interface between the first substrate and the absorbing layer in such a way that the inclined laminate body is peeled from the upper end part toward a lower end part thereof. .

Description

Stripping device and peeling method of laminated body, and manufacturing method of electronic device

The present invention relates to a peeling device and a peeling method for a laminate, and a method for manufacturing the electronic device.

In order to reduce the thickness and weight of an electronic device such as a display panel, a solar cell, or a thin film secondary battery, a thin plate of a substrate (first substrate) such as a glass plate, a resin plate, or a metal plate for the electronic device is required.

However, when the thickness of the substrate is reduced, the substrate is degraded in a rational manner. Therefore, it is difficult to form a functional layer for an electronic device on the surface of the substrate (Thin Film Transistor (TFT), color filter layer (CF: Color). Filter)).

Therefore, there has been proposed a method of manufacturing an electronic device in which a reinforcing plate (second substrate) made of glass is attached to the back surface of the substrate, and a laminate of the substrate is reinforced by the reinforcing plate, and the substrate is laminated in a state of being laminated. The surface forms a functional layer. In this manufacturing method, the substrate is rationally improved, and therefore, the functional layer can be favorably formed on the surface of the substrate. Moreover, the reinforcing plate is peeled off from the substrate after the functional layer is formed.

The peeling method of the reinforcing plate disclosed in Patent Document 1 is such that the reinforcing plate or the substrate or the two directions thereof are separated from each other by one of the two corner portions on the diagonal line of the rectangular laminated body. The direction is bent and deformed. At this time, in order to perform the peeling smoothly, a peeling start portion is formed in one of the corner portions of the laminated body. The peeling start portion is formed by piercing the peeling blade from the end surface of the laminated body to a certain amount of the interface between the substrate and the reinforcing plate.

On the other hand, Patent Document 2 discloses an interface spray between a substrate and an element forming layer. A method of stripping the element from the substrate by ionizing the liquid.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] International Publication No. 2011/024689

[Patent Document 2] Japanese Patent Laid-Open No. 2005-79553

In the peeling method of Patent Document 2, there is a problem that the liquid to be blown is not easily spread over the peeling front line, and the peeling of the element forming layer cannot be smoothly performed.

The present invention has been made in view of such a problem, and an object of the present invention is to provide a method in which a liquid is supplied to an interface between a first substrate and a second substrate while being peeled off at an interface, and the liquid can be used smoothly and in a short period of time. The peeling device and the peeling method of the peeled laminated body, and the manufacturing method of the electronic device.

In order to achieve the above object, an aspect of the apparatus for peeling a laminated body according to the present invention includes: a tilting device that laminates a first substrate and a second substrate with a pressure-sensitive adhesive layer interposed therebetween; a liquid supply device that fills a side surface of at least the upper end side of the inclined laminated body with a liquid; and a peeling device that is inclined from the upper end portion of the laminated body toward the lower end portion on the first substrate and the above The interface of the adsorption layer is peeled off.

In another aspect of the apparatus for peeling a laminated body of the present invention, in order to achieve the above object, the first substrate and the first substrate and the second substrate are attached to each other via a laminate which is detachably attached to the adsorption layer. At least one of the second substrates is bent along a peeling traveling direction from the one end side toward the other end side, and is peeled off at an interface between the first substrate and the adsorption layer, and is characterized in that it includes a peeling assembly. a first holding member that holds the first substrate, a second holding member that holds the second substrate, and a layer that surrounds the laminate a first casing of the body, wherein the space portion surrounded by the first holding member, the second holding member, and the first casing is configured as a liquid tank; and the tilting device tilts the peeling assembly with respect to a horizontal direction a liquid supply device that supplies a liquid to the liquid tank of the peeling assembly to fill a side surface of the laminated body with a liquid, and a peeling device that at least one of the first holding member and the second holding member It is curved along the peeling traveling direction from the upper end portion toward the lower end portion.

In order to achieve the above object, an aspect of the method for peeling a laminated body according to the present invention is characterized in that the step of inclining the first substrate and the second substrate with respect to the second substrate through which the adsorption layer is peeled off is a liquid supply step of filling the side surface of at least the upper end side of the inclined laminated body with a liquid; and a peeling step of tilting the upper end portion of the laminated body toward the lower end portion to the first substrate and the adsorption The interface of the layer is peeled off; and in the peeling step, the liquid is continuously supplied from the outside of the laminate, and the surface is moved downward by the gravity on the peeling surface which sequentially appears by the peeling of the interface The above-mentioned peeling surface is wetted.

In another aspect of the method for peeling a laminated body of the present invention, the first substrate and the above-mentioned first substrate and the above-mentioned first substrate and the second substrate are attached to each other via a laminate which is detachably attached to the second substrate. At least one of the second substrates is bent along a peeling traveling direction from the one end side toward the other end side and is peeled off at an interface between the first substrate and the adsorption layer, and is characterized in that a peeling assembly is used. The peeling assembly includes a first holding member that holds the first substrate, a second holding member that holds the second substrate, and a first case that surrounds the laminated body, and the first holding member and the second holding member And the space portion surrounded by the first casing is configured as a liquid tank, and the method for peeling the laminated body includes: a tilting step of inclining the peeling assembly with respect to a horizontal direction; and a liquid supply step of the peeling assembly The liquid tank supplies a liquid to fill a side surface of the laminated body with a liquid, and a peeling step of holding at least one of the first holding member and the second holding member Along the member towards the upper portion from the lower end portion of the release travel The direction is curved; and in the peeling step, the liquid is continuously supplied from the outside of the laminated body, and the peeling surface is moved downward by gravity on the peeling surface which sequentially appears by peeling of the interface The face is damp.

In order to achieve the above object, the method for producing an electronic device according to the present invention includes a functional layer forming step of laminating the first substrate and the second substrate with the adsorbing layer interposed therebetween. Forming a functional layer on the exposed surface of the first substrate; and separating the second substrate from the first substrate on which the functional layer is formed; wherein the separating step includes a tilting step of making the laminated body relatively a liquid supply step of filling the side surface of at least the upper end side of the inclined laminated body with a liquid; and a peeling step of the first substrate and the above-mentioned first substrate from the upper end portion of the laminated body from the inclined side toward the lower end portion The interface of the adsorption layer is peeled off; and in the peeling step, the liquid is continuously supplied from the outside of the laminate, and is separated by gravity from the interface between the first substrate and the adsorption layer. The peeling surface which is sequentially formed is moved downward while the peeling surface is wetted.

In order to achieve the above object, another aspect of the method for producing an electronic device of the present invention includes a functional layer forming step of laminating the first substrate and the second substrate with the adsorbing layer interposed therebetween. The exposed surface of the first substrate forms a functional layer; and the separating step separates the second substrate from the first substrate on which the functional layer is formed; wherein the separation step uses a peeling assembly, and the peeling assembly has a holding a first holding member of the first substrate, a second holding member that holds the second substrate, and a first case that surrounds the laminated body, and the first holding member, the second holding member, and the first The space portion surrounded by the casing is configured as a liquid tank, and the separating step includes a tilting step of inclining the peeling assembly with respect to a horizontal direction, and a liquid supply step of supplying a liquid to the liquid tank of the peeling assembly. The side surface of the laminated body is filled with a liquid; and a peeling step of causing at least one of the first holding member and the second holding member to be along the upper end Peeling direction of travel of the lower end portion is bent; and over In the peeling step, the liquid is continuously supplied from the outside of the laminate, and is moved downward by the gravity on the peeling surface which sequentially appears by the peeling of the interface between the first substrate and the adsorption layer. The above-mentioned peeling surface is wetted.

According to the above aspect of the invention, since at least the upper end side side of the inclined laminated body is filled with the liquid, when peeling starts from the state, the liquid directly flows into the peeling surface which sequentially appears by peeling at the interface. The surface of the peeling surface is directly wetted while moving downward by gravity on the peeling surface.

That is, the above aspect of the present invention includes the matter of inclining the laminated body and the fact that the side surface of the laminated body is filled with the liquid, whereby the liquid is spread over the peeling front line depending on the gravity of the liquid.

In another aspect of the invention, the peeling assembly in which the space portion surrounded by the first holding member, the second holding member, and the first casing is configured as a liquid tank is used as an interface between the first substrate and the adsorption layer. Stripped.

In this case, in the tilting step, the peeling assembly is inclined with respect to the horizontal direction. Next, in the liquid supply step, a liquid is supplied to the liquid tank of the peeling assembly, and the side surface of the laminated body is filled with the liquid. Then, in the peeling step, at least one of the first holding member and the second holding member is bent in a peeling traveling direction from the upper end portion toward the lower end portion, and is peeled off at the interface between the first substrate and the adsorption layer. In the peeling step, the liquid is directly wetted while moving downward by the gravity on the peeling surface which sequentially appears by the peeling of the interface.

In the above aspect of the invention, when the peeling front line travels from the upper end portion toward the lower end portion by the progress of the peeling action in the peeling step, the tilt is peeled off by the action of gravity due to the tilting. In addition to the liquid moving toward the peeling front line, since the peeling surface which occurs in the peeling is lower than the liquid level of the liquid filled in the liquid tank, the liquid is directly discharged along the peeling front line by the action of the gravity based on the height difference Supply to the stripping front line.

The inclined direction of the peeling assembly is preferably such that the corner portion of the upper end portion of the laminated body is disposed in The direction of the highest position. That is, the corner portion at the upper end portion of the laminated body at the beginning of peeling becomes the highest, and the corner portion at the lower end portion on the diagonal line in the corner portion becomes the lowest. When the peeling traveling direction is set from the corner portion of the upper end portion to the corner portion of the lower end portion, the peeling front line gradually becomes longer from the peeling start position to the peeling intermediate position, but the liquid also faces from the side of the laminated body The stripping front line flows in. Further, at this time, since the laminated body is inclined, the liquid on the peeling surface also flows toward the peeling front by gravity. As a result, in the vicinity of the peeling front line, the peeling was substantially performed in the liquid, and the peeling was smoothly performed.

In still another aspect of the invention, it is preferable that the liquid supply hole is provided inside the first casing.

According to still another aspect of the invention, the liquid is supplied to the liquid tank from the supply hole, the liquid tank is filled with the liquid, and the side surface of the laminated body is filled with the liquid. Preferably, the supply hole is provided in the first holding member or the second holding member, and is provided in the lower portion of the liquid tank when the peeling assembly is inclined. The supply hole from the lower portion of the liquid tank supplies the liquid to the liquid tank, and stops the supply of the liquid before the liquid overflows from the upper portion of the liquid tank or just overflows. Thereby, it can be easily confirmed that the liquid tank is filled with the liquid. Further, the liquid may be peeled off while supplying the liquid to the liquid tank.

In the above aspect of the invention, it is preferable that the peeling assembly includes a second casing that surrounds the first casing, and a drain hole is provided between the first casing and the second casing.

According to the above aspect of the invention, the liquid overflowing from the first casing is blocked by the second casing and discharged from the drain hole, so that the liquid can be prevented from being discharged from the peeling assembly to the outside. Thereby, the use environment of the peeling device can be improved, and if the liquid discharged from the drain hole is recovered, the liquid can be reused.

In the invention, it is preferable that the adsorption layer is a polyimide resin layer, and the liquid is water.

The first casing of the above aspect of the invention is preferably a sponge of independent bubbles. The first casing is sandwiched by the first holding member and the second holding member to constitute a liquid tank, but by independent gas The sponge is made to elastically abut against the first holding member and the second holding member. Thereby, the watertightness of the liquid tank is improved.

According to the peeling apparatus and the peeling method of the laminated body of the present invention, and the method of manufacturing the electronic device, the liquid is supplied to the interface at the interface between the first substrate and the adsorption layer, and the liquid can be smoothly and in a short time. Stripping.

1‧‧ ‧ laminated body

1A‧‧‧1st laminate

1B‧‧‧2nd layer body

2‧‧‧Substrate

2a‧‧‧Surface of the substrate

2b‧‧‧Back of the substrate

2A‧‧‧Substrate

2Aa‧‧‧ surface of the substrate

2B‧‧‧Substrate

2Ba‧‧‧ surface of the substrate

3‧‧‧ reinforcing plate

3a‧‧‧ Surface of the reinforcing plate

3A‧‧‧ reinforcing plate

3B‧‧‧ reinforcing plate

3Bb‧‧‧ Back of the reinforcing board

4‧‧‧ resin layer

4A‧‧‧ resin layer

4B‧‧‧ resin layer

6‧‧‧Layer

6A, 6B‧‧‧ corner

7‧‧‧ functional layer

10‧‧‧ peeling start making device

12‧‧‧ platform

14‧‧‧Support

16‧‧‧ Height adjustment device

18‧‧‧ Feeding device

20‧‧‧Liquid

22‧‧‧Liquid supply device

24‧‧‧ interface

26‧‧‧ peeling start

28‧‧‧ interface

30‧‧‧ peeling start

40‧‧‧ peeling device

42‧‧‧ Strip assembly

44‧‧‧ movable body

46‧‧‧Flexible board

46A‧‧‧ corner

46B‧‧‧ corner

48‧‧‧Flexible board

48A‧‧‧ corner

48B‧‧‧ corner

50‧‧‧ body board

52‧‧‧Porous sheets

54‧‧‧Shell

56‧‧‧ slots

58‧‧‧through holes

60‧‧‧vacuum pump

62‧‧‧Supply hole

64‧‧‧through holes

66‧‧‧ Liquid pump

68‧‧‧ liquid tank

70‧‧‧shell

71‧‧‧through holes

72‧‧‧Drainage holes

74‧‧‧ body board

76‧‧‧Porous sheets

78‧‧‧ slots

80‧‧‧through holes

82‧‧‧Vacuum pump

84‧‧‧through holes

86‧‧‧ movable device

88‧‧‧ drive

90‧‧‧ Controller

92‧‧‧ pole

94‧‧‧Ball joint

96‧‧‧Frame

98‧‧‧ cushioning members

100‧‧‧Liquid

102‧‧‧ panel

104‧‧‧Adsorption pad

106‧‧‧Transporting device

A‧‧‧ arrow

N‧‧‧ knife

Θ‧‧‧ tilt angle

Fig. 1 is an enlarged side elevational view showing an essential part of an example of a laminate which is supplied to a manufacturing step of an electronic device.

Fig. 2 is an enlarged side elevational view showing an essential part of an example of a laminate produced in the middle of the manufacturing process of the LCD.

3(A) to 3(E) are explanatory views showing a method of producing a peeling start portion of the apparatus using the peeling start portion.

Fig. 4 is a plan view showing a laminate in which a peeling start portion is formed by a method of producing a peeling starting portion.

Fig. 5 is a longitudinal sectional view showing the configuration of a peeling device of the embodiment.

Fig. 6 is a plan view schematically showing a peeling assembly of a plurality of movable bodies with respect to an arrangement position of a peeling assembly.

Fig. 7(A) is a plan view showing a flexible plate constituting a peeling assembly, and Fig. 7(B) is a side cross-sectional view of the flexible plate taken along line C-C of Fig. 7(A).

Fig. 8(A) is a bottom view of the flexible plate constituting the peeling assembly, and Fig. 8(B) is a side cross-sectional view of the flexible plate taken along the line D-D of Fig. 8(A).

Fig. 9(A) is a side cross-sectional view showing the correspondence between the flexible plate and the laminated body, and Fig. 9(B) is a side cross-sectional view showing the laminated body held by the flexible plate.

Fig. 10 is a side cross-sectional view showing a state in which the peeling assembly is inclined to a peeling start posture.

11(A) to (D) show the steps of holding the laminated body in the peeling assembly, and peeling off The operation of the step of inclining the assembly at an angle θ and the step of filling the liquid tank with a liquid.

12(A) to (E) are explanatory views showing the operation of the step of bending the lower flexible plate and peeling the lower reinforcing plate.

Fig. 13 (A) to (D) are explanatory views showing the operation of the step of carrying out the reinforcing plate on the side under peeling.

14(A) to 14(D) are explanatory views showing the operation of the step of bending and deforming the upper flexible plate and peeling off the upper reinforcing plate.

15(A) to 15(D) are diagrams showing the operation of the step of carrying out the reinforcing plate on the upper side and the step of carrying out the panel.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

Hereinafter, a case where the peeling device and the peeling method of the laminated body of the present invention are used in the manufacturing steps of the electronic device will be described.

The electronic device refers to an electronic component such as a display panel, a solar cell, or a thin film secondary battery. As the display panel, a liquid crystal display (LCD) panel, a plasma display panel (PDP: Plasma Display Panel), and an organic EL display (OELD: Organic Electro Luminescence Display) panel can be exemplified.

[Manufacturing procedure of electronic device]

The electronic device is manufactured by forming a functional layer for an electronic device (in the case of an LCD, a thin film transistor (TFT) or a color filter layer (CF)) on the surface of a substrate made of glass, resin, or metal.

The substrate is formed as a laminate before being attached to the reinforcing plate before forming the functional layer. Thereafter, a functional layer is formed on the surface of the substrate in a state of a laminate. Further, after the functional layer is formed, the reinforcing plate is peeled off from the substrate.

That is, in the manufacturing step of the electronic device, the substrate is provided in a state of a laminate The functional layer forming step of forming a functional layer on the surface and the separating step of separating the reinforcing plate from the substrate on which the functional layer is formed. A peeling device and a peeling method of the laminated body of the present invention are applied in the separating step.

[Layer 1]

Fig. 1 is an enlarged side elevational view showing an essential part of an example of the laminated body 1.

The laminated body 1 includes a substrate (first substrate) 2 that forms a functional layer, and a reinforcing plate (second substrate) 3 that reinforces the substrate 2. Further, the reinforcing plate 3 is provided with a resin layer 4 as an adsorption layer on the surface 3a, and a back surface 2b of the substrate 2 is attached to the resin layer 4. In other words, the substrate 2 is detachably attached to the reinforcing plate 3 via the resin layer 4 by the van der Waals force acting on the resin layer 4 or the adhesive force of the resin layer 4.

[Substrate 2]

The substrate 2 is formed on its surface 2a to form a functional layer. The substrate 2 can be exemplified by a glass substrate, a ceramic substrate, a resin substrate, a metal substrate, and a semiconductor substrate. Among these substrates, the glass substrate is excellent in chemical resistance and moisture permeability resistance, and has a small coefficient of linear expansion. Therefore, it is preferable as the substrate 2 for an electronic device. Moreover, it also has the advantage that as the coefficient of linear expansion becomes smaller, the pattern of the functional layer formed at a high temperature is less likely to shift upon cooling.

Examples of the glass of the glass substrate include alkali-free glass, borosilicate glass, soda lime glass, high cerium oxide glass, and other oxide-based glass containing cerium oxide as a main component. The oxide-based glass is preferably a glass having a cerium oxide content of 40 to 90% by mass in terms of an acid compound.

Preferably, the glass of the glass substrate is selected and used as a glass suitable for the type of electronic device to be manufactured, and a glass suitable for the manufacturing steps thereof. For example, a glass substrate for a liquid crystal panel is preferably a glass (alkali-free glass) which does not substantially contain an alkali metal component.

The thickness of the substrate 2 is set according to the type of the substrate 2. For example, when the substrate 2 is made of a glass substrate, the thickness of the electronic device is preferably set to 0.7 mm or less, more preferably 0.3 mm or less, and further preferably set to 0.1 in order to reduce the weight and thickness of the electronic device. Below mm. When the thickness is 0.3 mm or less, good flexibility can be imparted to the glass substrate. Further, when the thickness is 0.1 mm or less, the glass substrate can be wound into a roll shape. However, from the viewpoint of the production of the glass substrate and the operation of the glass substrate, the thickness thereof is preferably 0.03 mm or more. .

Furthermore, in FIG. 1, the substrate 2 includes one substrate, but the substrate 2 may include a plurality of substrates. That is, the substrate 2 may include a laminate in which a plurality of substrates are laminated. In this case, the total thickness of all the substrates constituting the substrate 2 is the thickness of the substrate 2.

[Reinforcing plate 3]

The reinforcing plate 3 can be exemplified by a glass substrate, a ceramic substrate, a resin substrate, a metal substrate, and a semiconductor substrate.

The thickness of the reinforcing plate 3 is set to 0.7 mm or less, and is set according to the type, thickness, and the like of the reinforcing substrate 2. Further, the thickness of the reinforcing plate 3 may be thicker or thinner than the substrate 2, but it is preferably 0.4 mm or more for reinforcing the substrate 2.

Further, in the present embodiment, the reinforcing plate 3 includes one substrate, but the reinforcing plate 3 may include a laminated body in which a plurality of substrates are laminated. In this case, the total thickness of all the substrates constituting the reinforcing plate 3 is the thickness of the reinforcing plate 3.

[Resin layer 4]

As the resin layer 4, in order to prevent peeling between the resin layer 4 and the reinforcing plate 3, the bonding force with the reinforcing plate 3 is set to be higher than the bonding force with the substrate 2. Thereby, in the peeling step, the interface between the resin layer 4 and the substrate 2 is peeled off.

The resin constituting the resin layer 4 is not particularly limited, and examples thereof include a polyimide resin, an acrylic resin, a polyolefin resin, a polyurethane resin, an anthrone resin, and a polyamidoxime resin. Several types of resins can also be used in combination. Among them, from the viewpoint of heat resistance and peelability, a polyimide resin, a polyamidoxime resin, and an anthrone resin are preferable. In the embodiment, a polyimine resin layer is exemplified as the resin layer 4.

The thickness of the resin layer 4 is not particularly limited, but is preferably set to 1 to 50 μm, more preferably It is set to 4~20μm. When the thickness of the resin layer 4 is 1 μm or more, when bubbles or foreign matters are mixed between the resin layer 4 and the substrate 2, the thickness of the bubbles or foreign matter can be absorbed by the deformation of the resin layer 4. On the other hand, by setting the thickness of the resin layer 4 to 50 μm or less, the formation time of the resin layer 4 can be shortened, and since the resin of the resin layer 4 is not excessively used, it is economical.

Further, the outer shape of the resin layer 4 is preferably the same as the outer shape of the reinforcing plate 3 in such a manner that the reinforcing plate 3 can support the entirety of the resin layer 4, or is smaller than the outer shape of the reinforcing plate 3. Further, the outer shape of the resin layer 4 is preferably the same as or larger than the outer shape of the substrate 2 so that the resin layer 4 can be in close contact with the entire substrate 2.

Further, in FIG. 1, the resin layer 4 includes one layer, but the resin layer 4 may include two or more layers. In this case, the total thickness of all the layers constituting the resin layer 4 becomes the thickness of the resin layer 4. Moreover, in this case, the kind of the resin which comprises each layer may differ.

Further, in the embodiment, the resin layer 4 as the organic film is used as the adsorption layer, but an inorganic layer may be used instead of the resin layer 4. The inorganic film constituting the inorganic layer contains, for example, at least one selected from the group consisting of metal halides, nitrides, carbides, and carbonitrides.

Further, the laminated body 1 of Fig. 1 includes the resin layer 4, but the resin layer 4 may be removed to form the substrate 2 and the reinforcing plate 3. In this case, the substrate 2 and the reinforcing plate 3 are detachably attached by a van der Waals force or the like acting between the substrate 2 and the reinforcing plate 3. Further, when the substrate 2 and the reinforcing plate 3 are glass substrates, it is preferable to form an inorganic thin film on the surface 3a of the reinforcing plate 3 so that the substrate 2 and the reinforcing plate 3 are not prevented from being heated by the high temperature.

[Forming a laminated body with a functional layer 6]

The functional layer is formed on the surface 2a of the substrate 2 of the laminated body 1 by the functional layer forming step. As a method of forming the functional layer, a vapor deposition method such as a CVD (Chemical Vapor Deposition) method or a PVD (Physical Vapor Deposition) method or a sputtering method is used. The functional layer is formed into a specific image by photolithography and etching. case.

Fig. 2 is an enlarged side elevational view showing an essential part of an example of a rectangular laminated body 6 produced in the middle of the manufacturing process of the LCD.

The laminated body 6-based reinforcing plate 3A, the resin layer 4A, the substrate 2A, the functional layer 7, the substrate 2B, the resin layer 4B, and the reinforcing plate 3B are sequentially laminated. That is, the laminated body 6 of FIG. 2 corresponds to the laminated body in which the laminated body 1 shown in FIG. 1 is symmetrically arranged via the functional layer 7. Hereinafter, the laminated body including the substrate 2A, the resin layer 4A, and the reinforcing plate 3A is referred to as a first laminated body 1A, and the laminated body including the substrate 2B, the resin layer 4B, and the reinforcing plate 3B is referred to as a second laminated body 1B.

A thin film transistor (TFT) as the functional layer 7 is formed on the surface 2Aa of the substrate 2A of the first laminated body 1A, and a color filter layer (CF) as the functional layer 7 is formed on the surface 2Ba of the substrate 2B of the second laminated body 1B. ).

The first layered body 1A and the second layered body 1B are superposed on each other by overlapping the surfaces 2Aa and 2Ba of the substrates 2A and 2B. In this way, the laminated body 6 having the structure in which the first laminated body 1A and the second laminated body 1B are symmetrically arranged with the functional layer 7 interposed therebetween is manufactured.

The laminated body 6 is formed by peeling the starting portion by a knife in the peeling start portion forming step of the separating step, and sequentially peeling the reinforcing plates 3A, 3B in the peeling step of the separating step, and thereafter, mounting the polarizing plate and the backlight device The LCD is manufactured as a product.

[Peeling start making device 10]

3(A) to 3(E) are explanatory views showing a method of producing the peeling starting portion of the apparatus 10 by the peeling start portion, and Fig. 3(A) is a view showing the positional relationship between the laminated body 6 and the knife N. 3(B) is an explanatory view in which the peeling start portion 26 is formed by the knife N at the interface 24, and FIG. 3(C) is an explanatory view showing a state immediately before the peeling start portion 30 is formed at the interface 28. 3(D) is an explanatory view in which the peeling start portion 30 is formed by the blade N at the interface 28, and FIG. 3(E) is an explanatory view in which the laminated body 6 of the peeling start portions 26, 30 is formed. Further, Fig. 4 is a plan view of the laminated body 6 in which the peeling start portions 26 and 30 are formed.

When the peeling start portions 26, 30 are formed, as shown in FIG. 3(A), the reinforcement of the laminated body 6 The back surface 3Bb of the plate 3B is held by the stage 12 and supported horizontally (in the X-axis direction in the drawing).

The knife N is horizontally supported by the holder 14 such that the blade edge faces the end surface of the corner portion 6A of the laminated body 6. Further, the knife N is adjusted in the height direction (the Z-axis direction in the drawing) by the height adjusting device 16. Further, the blade N and the laminated body 6 are relatively moved in the horizontal direction by the feeding device 18 such as a ball screw device. The feed device 18 only needs to move at least one of the blade N and the stage 12 in the horizontal direction. In the embodiment, the knife N is moved. Further, the liquid supply device 22 that supplies the liquid 20 to the upper surface of the blade N before or during the piercing is disposed above the blade N.

[Method of making peeling start portion]

In the method for producing the peeling starting portion by the peeling start portion forming device 10, the piercing position of the blade N is set to the corner portion 6A of the laminated body 6 and overlapped in the thickness direction of the laminated body 6, and The amount of penetration of the knife N is set differently for the interfaces 24 and 28, respectively.

The order in which they are made will be described.

In the initial state, the blade edge of the blade N is present at a position shifted in the height direction (Z-axis direction) with respect to the interface 24 between the substrate 2B and the resin layer 4B as the first piercing position. Therefore, first, as shown in FIG. 3(A), the blade N is moved in the height direction, and the height of the blade edge of the blade N is set to the height of the interface 24.

Thereafter, as shown in FIG. 3(B), the blade N is horizontally moved toward the corner portion 6A of the laminated body 6, and the blade N is inserted into the interface 24 by a specific amount. Further, the liquid 20 is supplied from the liquid supply device 22 to the upper surface of the blade N at the time of the piercing of the blade N or before the piercing. Thereby, the substrate 2B of the corner portion 6A is peeled off from the resin layer 4B. Therefore, the peeling start portion 26 having a triangular shape in plan view as shown in FIG. 4 is formed at the interface 24. Further, although it is not necessary to supply the liquid 20, if the liquid 20 is used, the liquid 20 can remain in the peeling start portion 26 even after the blade N is removed, so that the peeling start portion which can no longer be attached can be obtained. 26.

Next, the knife N is removed from the corner portion 6A in the horizontal direction, and as shown in Fig. 3(C), the blade edge of the blade N is set to be the height of the interface 28 between the substrate 2A and the resin layer 4A as the second piercing position. degree.

Thereafter, as shown in FIG. 3(D), the blade N is horizontally moved toward the laminated body 6, and the blade N is pierced to the interface 28 by a specific amount. Similarly, the liquid 20 is supplied from the liquid supply device 22 to the upper surface of the blade N. Thereby, as shown in FIG. 3(E), the peeling start portion 30 is formed at the interface 28. Here, the amount of penetration of the knife N relative to the interface 28 is less than the amount of penetration relative to the interface 24. The above is the method of making the peeling start portion. Furthermore, the amount of penetration of the knife N relative to the interface 24 can be made less than the amount of penetration relative to the interface 28.

The layered body 6 on which the peeling start portions 26 and 30 are formed is taken out from the peeling start portion forming device 10, and conveyed to a peeling device, and the reinforcing plates 3B, 3A are provided at the interfaces 24 and 28 by the peeling device. Stripped in sequence.

The details of the peeling method will be described later, but as shown by the arrow A in Fig. 4, the peeling start portion is bent by bending the laminated body 6 from the corner portion 6A toward the corner portion 6B opposed to the corner portion 6A. The peeling start portion 26 of the interface 24 having a large area of 26 is first peeled off from the starting point. Thereby, the reinforcing plate 3B is peeled off together with the resin layer 4B. Thereafter, the laminated body 6 is further bent from the corner portion 6A toward the corner portion 6B, and peeling is performed starting from the peeling start portion 30 of the interface 28 having a small area of the peeling start portion 30. Thereby, the reinforcing plate 3A is peeled off together with the resin layer 4A.

Further, the amount of penetration of the blade N is preferably set to 7 mm or more, and more preferably set to about 15 to 20 mm, depending on the size of the laminated body 6.

[Peeling device 40]

5 is a longitudinal cross-sectional view showing the configuration of the peeling device 40 of the embodiment, and FIG. 6 is a plan view schematically showing the peeling assembly 42 of the plurality of movable bodies 44 with respect to the arrangement position of the peeling assembly 42 of the peeling device 40. 5 corresponds to a cross-sectional view taken along line B-B of FIG. 6, and in FIG. 6, the laminated body 6 is indicated by a solid line. Further, the movable body 44 is disposed in a lattice shape with respect to the peeling assembly 42.

[Paste assembly 42]

Fig. 7(A) is a plan view of a flexible plate (first holding member) 46 constituting the peeling assembly 42, and Fig. 7(B) is a side of the flexible plate 46 along the CC line of Fig. 7(A). Cutaway view. 8(A) is a bottom view of the flexible plate (second holding member) 48 constituting the peeling assembly 42, and FIG. 8(B) is a flexible plate along the DD line of FIG. 8(A). Side view of section 48. Further, Fig. 9(A) is a side cross-sectional view showing the correspondence relationship between the flexible sheets 46, 48 and the laminated body 6 (which may also be the laminated body 1), and Fig. 9(B) is by the flexible sheets 46, 48. A side cross-sectional view of the laminated body 6 is maintained.

[Flexible plate 46]

As shown in FIG. 7 and FIG. 9, the flexible plate 46 has a rectangular main body plate 50 having a larger size than the laminated body 6, and a rectangular plate of the reinforcing plate 3B (see FIG. 2: first substrate) that adsorbs and holds the laminated body 6. The porous sheet 52 made of rubber is attached to the upper surface of the main body plate 50 with a porous sheet 52 attached thereto.

The thickness of the porous sheet 52 is preferably 2 mm or less, preferably 1 mm or less, for the purpose of lowering the tensile stress generated in the reinforcing sheet 3B at the time of peeling.

A casing (first casing) 54 that surrounds the laminated body 6 adsorbed and held by the porous sheet 52 is attached to the upper surface of the main body plate 50. The case 54 is, for example, a sponge of independent bubbles having a Shore E hardness of 20 degrees or more and 50 degrees or less, and is set to a height protruding from the upper surface (the reinforcing plate 3A) of the layered body 6 held by the porous sheet 52. (Refer to Fig. 9(B)).

The porous sheet 52 surrounded by the casing 54 is provided with a frame-shaped groove 56. The groove 56 is connected to the vacuum pump 60 shown in FIG. 5 via a plurality of through holes 58 provided in the main body plate 50.

Therefore, when the vacuum pump 60 is driven, the air passing through the through holes 58 and the grooves 56 is sucked, and the reinforcing plate 3B of the laminated body 6 is vacuum-sucked and held by the porous sheet 52. Thereby, the reinforcing plate 3B of the laminated body 6 is supported by the main body plate 50.

Further, as shown in Fig. 7, a liquid (for example, water or an organic solvent) is provided at a corner portion of the porous sheet 52 surrounded by the casing 54, and water is preferably used when the resin layer 4 is made of polyimide. a supply hole 62). The supply hole 62 communicates with the through hole 64 of the body plate 50, and the through hole 64 is connected to the liquid supply pump (liquid supply device) 66 of FIG. Therefore, when the liquid feed pump 66 is driven, The liquid is supplied to the liquid tank 68 surrounded by the casing 54 through the through hole 64 and the supply hole 62. When the supply hole 62 is inclined at the peeling step, it is preferably disposed at the lowermost portion in the liquid tank 68.

As shown in FIGS. 7 and 9, a casing (second casing) 70 that surrounds the casing 54 and the flexible plate 48 is attached to the upper surface of the main body plate 50. The casing 70 is set higher than the casing 54 in order to block the liquid overflowing from the casing 54 at the time of the peeling step. Further, the casing 70 also includes a sponge of independent bubbles as in the case of the casing 54.

The porous sheet 52 located between the casing 54 and the casing 70 is provided with a plurality of through holes 71. The main body plate 50 includes a plurality of drain holes 72 that communicate with the through holes 71. That is, the liquid blocked by the casing 70 is discharged to the outside of the apparatus of the peeling device 40 through the through hole 71 and the drain hole 72.

The bending stiffness of the body plate 50 is higher than that of the porous sheet 52 and the casings 54, 70. The bending stiffness of the body plate 50 governs the bending stiffness of the flexible plate 46. The bending rigidity per unit width (1 mm) of the flexible plate 46 is preferably from 1,000 to 40,000 N ‧ mm ² /mm. For example, in the portion where the width of the flexible plate 46 is 100 mm, the bending rigidity becomes 100,000 to 4,000,000 N ‧ mm ² . By setting the bending rigidity of the flexible plate 46 to 1000 N ‧ mm ² /mm or more, it is possible to prevent the bending of the reinforcing plate 3B held by the flexible plate 46 by suction. Moreover, by setting the bending rigidity of the flexible plate 46 to 40000 N ‧ mm ² /mm or less, the reinforcing plate 3B adsorbed and held by the flexible plate 46 can be appropriately bent and deformed. The main body plate 50 is exemplified by a resin member such as a polycarbonate resin, a polyvinyl chloride (PVC) resin, an acrylic resin, or a polyacetal (POM) resin, and a metal member.

[Flexible Plate 48]

As shown in FIGS. 8 and 9, the flexible plate 48 includes a main body plate 74 having a size larger than that of the laminated body 6 and having a smaller size than the main body plate 50, and a reinforcing plate 3A for adsorbing and holding the laminated body 6 (refer to FIG. 2: A porous sheet 76 made of a rectangular rubber of 2 substrates), and a porous sheet 76 is attached to the lower surface of the main body plate 74.

The thickness of the porous sheet 76 is also 2 mm, preferably 1 mm or less, similar to the thickness of the porous sheet 52.

The porous sheet 76 is provided with a frame-shaped groove 78. The groove 78 is connected to the vacuum pump 82 shown in FIG. 5 via a plurality of through holes 80 provided in the main body plate 74.

Therefore, when the vacuum pump 82 is driven, the air in the through hole 80 and the groove 78 is sucked, and the reinforcing plate 3A of the laminated body 6 is vacuum-sucked and held by the porous sheet 76. Thereby, the reinforcing plate 3A of the laminated body 6 is supported by the main body plate 74.

In other words, as shown in FIG. 9(B), the laminated body 6 is supported by the peeling assembly 42 by adsorbing and holding the reinforcing plate 3B on the flexible plate 46 and sucking and holding the reinforcing plate 3A on the flexible plate 48. Moreover, the lower surface of the body plate 74 is pressed to the upper surface of the casing 54. Thereby, the liquid tank 68 shown in FIG. 7(A) is a liquid tank which is sealed by the upper and lower flexible plates 48 and 46 and the casing 54. Therefore, the side surface of the laminated body 6 is filled by the liquid supplied from the supply hole 62 into the liquid tank 68.

Further, as shown in FIG. 8, the main body plate 74 is provided with a through hole 84 for discharging the air in the liquid tank 68. The through hole 84 is disposed at a position on the diagonal line with respect to the supply hole 62 shown in FIG. 7 and at the uppermost portion in the liquid tank 68 when the peeling assembly 42 is inclined. Thereby, the liquid tank 68 can be filled with the liquid, and when the liquid overflows from the through hole 84 at the time of liquid filling, or immediately before the overflow, the supply of the liquid is stopped, whereby the liquid tank 68 can be easily confirmed to be liquid. full.

Since the configuration and function of the main body plate 74 are the same as those of the main body plate 50, description thereof will be omitted.

Next, returning to Fig. 5, a movable device (inclination device, peeling device) 86 of the peeling device 40 will be described.

[movable device 86]

The movable device 86 is disposed vertically above the peeling assembly 42. Since one of the upper and lower arrangements has the same configuration for the movable devices 86 and 86, the movable device 86 disposed on the lower side of FIG. 5 will be described here, and the same reference numerals will be given to the movable device 86 disposed on the upper side, and the description will be omitted. .

The movable device 86 includes a plurality of movable bodies 44, a plurality of driving devices 88 that move the movable body 44 up and down for each movable body 44, a controller 90 that controls the driving device 88 for each driving device 88, and the like.

A plurality of movable bodies 44 are fixed to the lower surface of the main body plate 50 in a lattice shape as shown in FIG. The movable body 44 is fixed to the main body plate 50 by a fastening member such as a bolt, but may be fixed next to the bolt. The movable bodies 44 are independently moved up and down by the drive unit 88 that is driven and controlled by the controller 90.

That is, the controller 90 can control the driving device 88 to incline the peeling assembly 42 from the horizontal posture of FIG. 5 to the inclined posture of the peeling start position shown in FIG. Further, the controller 90 sequentially lowers the movable body 44 on the side of the corner portion 6A of the laminated body 6 in Fig. 6 to the movable body 44 on the side of the corner portion 6B in the peeling traveling direction indicated by the arrow A. By this operation, the interface 24 of the laminated body 6 is peeled off starting from the peeling start portion 26 (see FIG. 4). Further, the layered body 6 shown in Figs. 5 and 10 is formed into a layered body 6 of the peeling start portions 26 and 30 by the method of producing the peeling starting portion described in Fig. 3 .

The drive unit 88 includes, for example, a rotary servo motor, a ball screw mechanism, and the like. The rotary motion of the servo motor is converted into a linear motion by the ball screw mechanism and transmitted to the rod 92 of the ball screw mechanism. A movable body 44 is provided at the front end of the rod 92 via the ball joint 94. Thereby, the movable body 44 is tilted following the bending deformation of the flexible plate 46. Thereby, the flexible plate 46 can be bent and deformed from the corner portion 6A toward the corner portion 6B without applying excessive force to the flexible plate 46. Further, the drive unit 88 is not limited to the rotary servo motor and the ball screw mechanism, and may be a linear servo motor or a fluid pressure cylinder (for example, a pneumatic cylinder). Further, the bending deformation direction of the flexible plate 46 may be a diagonal line from the corner portion 6A toward the corner portion 6B, or may be a direction 45 degrees with respect to the side adjacent to the corner portion 6A.

Preferably, a plurality of drive units 88 are mounted to the elevating frame 96 via a cushioning member 98. The cushioning member 98 is elastically deformed in such a manner as to follow the bending deformation of the flexible plate 46. Thereby, the rod 92 is tilted relative to the frame 96.

The controller 90 is configured as a computer including a CPU (Central Processing Unit), a ROM (Read Only Memory), and a RAM (Random Access Memory). The controller 90 controls the up and down movement of the plurality of movable bodies 44 by causing the CPU to execute the program recorded on the recording medium to control each of the plurality of driving devices 88.

[Separation method of reinforcing plates 3A and 3B by peeling device 40]

Figure 11 (A) ~ (D) ~ Figure 12 (A) ~ (E) ~ Figure 13 (A) ~ (D) ~ Figure 14 (A) ~ (D) ~ Figure 15 (A) ~ (D) The peeling method of the laminated body 6 of the peeling start parts 26 and 30 is formed in the corner part 6A by the peeling start part preparation method demonstrated in FIG. Moreover, in these figures, the peeling method of the reinforcing plates 3A and 3B of the peeling laminated body 6 is shown in time series.

That is, the steps of holding the laminated body 6 in the peeling assembly 42, the step of inclining the peeling assembly 42 at an oblique angle of θ with respect to the horizontal direction, and the liquid 100 are sequentially shown in FIGS. 11(A) to 11(D). The step of filling into the liquid tank 68.

Further, in FIGS. 12(A) to (E), the step of bending and deforming the flexible plate 46 to peel off the reinforcing plate 3B is shown.

Further, the step of carrying out the peeling of the reinforcing plate 3B is shown in Figs. 13(A) to (D).

Further, in FIGS. 14(A) to 14(D), the peeling assembly 42 is inclined at an angle θ with respect to the horizontal direction, the liquid 100 is filled in the liquid tank 68, and the flexible plate 48 is bent and deformed. The step of peeling the reinforcing plate 3A.

Further, the step of carrying out the panel 102 and the step of carrying out the peeling of the reinforcing plate 3A are sequentially shown in Figs. 15(A) to 15(D).

The carrying-in operation of the laminated body 6 of the peeling assembly 42 and the unloading of the reinforcing plates 3A and 3B and the panel 102 are performed by the conveying device 106 having the adsorption pad 104 shown in Fig. 11(A) and the like. In addition, in FIGS. 11 to 15, in order to avoid the complication of the drawings, the illustration of the movable device 86 is omitted. Further, the panel 102 is a product panel in which the functional layer 7 is attached with the substrate 2A and the substrate 2B from which the reinforcing plates 3A and 3B are removed.

Hereinafter, the peeling method will be described in order.

As shown in Fig. 11(A), the flexible plates 46, 48 before the start of peeling are positioned in the horizontal direction by the movable device 86, and the flexible plate 48 is retracted above the flexible plate 46. . In this initial state, the laminated body 6 is conveyed above the flexible plate 46 by the conveying device 106, and the reinforcing sheet 3B of the laminated body 6 is sucked and held by the porous sheet 52 of the flexible plate 46, and then The flexible plate 48 is moved downward, and as shown in Fig. 11(B), the reinforcing plate 3A of the laminated body 6 is sucked and held by the porous sheet 76 of the flexible plate 48. Thereby, the laminated body 6 is arrange|positioned in the liquid tank 68.

Next, as shown in Fig. 11(C), the peeling assembly 42 is inclined at an angle θ with respect to the horizontal direction (inclination step). As described above, the inclined posture of the peeling assembly 42 is set to a posture in which the supply hole 62 (Fig. 7(A)) is located at the lowermost portion of the liquid tank 68, and the through hole 84 (Fig. 8(A)) is located at the liquid tank 68. The uppermost part. Thereby, in the liquid tank 68, the corner portion 6A of Fig. 6 of the laminated body 6 is located at the highest position, and the corner portion 6B is at the lowest position.

Further, the inclination angle θ of the peeling assembly 42 is such that the flexible sheet 46 when the flexible sheets 46 and 48 are bent is moved in such a manner that the liquid 100 moves toward the peeling front line generated by the action of gravity by the action of gravity. The radius of curvature of 48 is determined. In the embodiment, the radius of curvature of the flexible plates 46 and 48 is set to 1000 mm, and the inclination angle θ of the peeling assembly 42 is set to 1 to 4 degrees (preferably 2 degrees).

Next, as shown in Fig. 11(D), the liquid 100 is supplied from the supply hole 62 to the liquid tank 68 by the liquid supply pump 66 (refer to Fig. 5) as indicated by the arrow. Thereby, all the sides of the laminated body 6 are filled with the liquid 100 (liquid supply step).

Next, as shown in FIGS. 12(A) to (D), the flexible plate 46 is bent downward and the peeling of the reinforcing plate 3B is started. The bending direction of the flexible plate 46 is the direction of the arrow A from the corner portion 46A of the flexible plate 46 toward the corner portion 46B in Fig. 6 . Thereby, the reinforcing plate 3B is peeled off while being bent and deformed from the corner portion 6A toward the corner portion 6B.

At this time, the reinforcing plate 3B of the laminated body 6 is formed by the peeling start portion 26 (refer to FIG. 4) of the interface 24. The starting point begins to peel off. That is, in the plurality of movable bodies 44 of the flexible plate 46 on the lower side shown in FIG. 10, the movable body 44 on the side of the corner portion 46A of the flexible plate 46 is moved to the movable body 44 on the side of the corner portion 46B. Move down in sequence. Thereby, since the reinforcing plate 3B is bent and deformed downward, the interface 24 is peeled off from the corner portion 6A toward the corner portion 6B (peeling step). Further, as shown in Fig. 12(E), the reinforcing plate 3B is completely peeled off.

Further, in the peeling of the reinforcing plate 3B, the liquid 100 overflowing from the casing 54 is blocked by the casing 70, and is discharged from the drain hole 72 to the outside of the peeling assembly 42. Thereby, the use environment of the peeling device 40 is not contaminated by the liquid 100, and if the liquid 100 discharged from the drain hole 72 is recovered, the liquid 100 can be reused.

In the peeling step shown in Figs. 12(A) to (D), the side surface of the inclined laminated body 6 is filled with the liquid 100, and therefore, when peeling starts from this state, the liquid 100 directly flows into the peeling by the interface 24. On the other hand, the peeling surface (peeling front line) which appears in order is moved downward by gravity, and the peeling surface is directly wetted. At the same time as the liquid 100 flows in by gravity, a new space is formed along with the progress of the peeling. This space is surrounded by the substrate and the liquid 100, and the liquid 100 is pressed by the atmospheric pressure, so that the peeling surface is directly wetted by the liquid 100. When the peeling starts from this state, since the water surface of the liquid around the laminated body 6 is higher than the peeling surface, the liquid 100 directly flows by gravity to the peeling surface which sequentially appears due to the peeling in the interface 24 (peeling front line) ), and the peeling surface is directly damp.

In other words, the peeling device 40 tilts the laminated body 6 and fills the side surface of the laminated body 6 with the liquid. Therefore, the liquid 100 can be continuously supplied from the side surface of the laminated body (outside the laminated body) depending on the gravity of the liquid 100. Spread the front line throughout.

As a state in which the liquid 100 is continuously supplied and spread over the peeling front line, there is a method in which the liquid feeding pump 66 is also driven in the peeling step to sufficiently fill the side surface of the laminated body with the liquid; and the driving by the liquid feeding pump 66 is used. The supply of the liquid is only at the stage shown in Fig. 11(D). In the peeling step, the driving of the liquid feeding pump 66 is stopped, and the liquid continuously supplied to the peeling front line is set to the liquid 100 which is filled on the side surface of the laminated body.

The former method is suitable for the case where, with respect to the size (width) of the peeling surface, it is difficult to continuously carry the liquid from the outside of the laminated body only by the amount of the liquid which fills the side of the laminated body at the stage shown in FIG. 11(D). Supply to the stripping front line.

The latter case is suitable for the case where the amount of the liquid which is filled on the side of the laminated body at the stage shown in Fig. 11(D) can be peeled off from the outside of the laminated body with respect to the size (width) of the peeling surface. The liquid is continuously supplied continuously.

In the peeling state of the reinforcing plate 3B shown in FIG. 12(E), the peeled reinforcing plate 3B is vacuum-sucked and held by the porous sheet 52 of the flexible plate 46, and the laminated body 6 of the reinforcing plate 3B is removed (including The laminated body of the reinforcing plate 3A and the panel 102 is vacuum-sucked and held by the porous sheet 76 of the flexible plate 48. Further, the bending deformation of the flexible plate 46 is released.

Next, as shown in FIG. 13(A), after the postures of the flexible plates 46 and 48 are changed to the horizontal direction, the flexible plate 48 is retracted from the flexible plate 46 as shown in FIG. 13(B). To the top.

Next, after the adsorption holding of the reinforcing plate 3B is released, the reinforcing plate 3B is sucked by the adsorption pad 104 of the conveying device 106, and the reinforcing plate 3B is taken out from the peeling assembly 42 by the conveying device 106 (FIG. 13(C)).

Thereafter, the peeling of the reinforcing plate 3A is started.

First, the flexible plate 48 is moved downward toward the flexible plate 46, and as shown in Fig. 13(D), the substrate 2B is adsorbed and held by the porous sheet 52 of the flexible plate 46.

Next, as shown in FIG. 14(A), the peeling assembly 42 is similarly inclined at an inclination angle θ, and then the liquid 100 is filled into the liquid tank 68.

Next, as shown in FIGS. 14(B) to (C), the flexible plate 48 is bent and deformed upward, and peeling of the reinforcing plate 3A is started. The bending direction of the flexible plate 48 is the direction of the arrow A from the corner 48A of the flexible plate 48 in FIG. 6 toward the corner 48B. Thereby, the reinforcing plate 3A is bent and deformed from the corner portion 6A toward the corner portion 6B, and is peeled off.

At this time, the reinforcing plate 3A of the laminated body 6 is the peeling start portion 30 (refer to FIG. 4) of the interface 28 as The starting point begins to peel off. That is, in the plurality of movable bodies 44 of the flexible plate 48 shown in Fig. 10, the movable body 44 located on the side of the corner portion 46A of the flexible plate 46 to the movable body 44 on the side of the corner portion 46B is sequentially raised. mobile. Thereby, since the reinforcing plate 3A is bent and deformed upward, the interface 28 is peeled off from the corner portion 6A toward the corner portion 6B (peeling step). Further, as shown in Fig. 14(D), the reinforcing plate 3A is completely peeled off.

In the peeling step shown in Figs. 14(B) to (C), the side surface of the inclined laminated body 6 is filled with the liquid 100, and therefore, when peeling starts from this state, the liquid surface of the liquid around the laminated body 6 is high. On the peeling surface, the liquid 100 directly flows into the peeling surface (peeling front line) which sequentially appears due to peeling in the interface 28, and directly moves the peeling surface while moving downward by gravity on the peeling surface. When the peeling starts from this state, since the water surface of the liquid around the laminated body 6 is higher than the peeling surface, the liquid 100 directly flows into the peeling surface (peeling front line) which sequentially appears due to the peeling in the interface 28 by gravity. And directly wet the peeling surface. In other words, the peeling device 40 tilts the laminated body 6 and fills the side surface of the layer body 6 with the liquid. Therefore, the liquid 100 can be continuously supplied from the side surface of the laminated body (outside the laminated body) depending on the gravity of the liquid 100. Spread the front line throughout.

In the peeling state of the reinforcing plate 3A shown in FIG. 14(D), the peeled reinforcing plate 3A is vacuum-sucked and held by the porous sheet 76 of the flexible plate 48, and the panel 102 is vacuum-adsorbed and held on the flexible plate. A porous sheet 52 of 46. Further, the bending deformation of the flexible plate 48 is released.

Next, as shown in Fig. 15(A), after the postures of the flexible plates 46 and 48 are changed to the horizontal direction, the flexible plate 48 is made up with respect to the flexible plate 46 as shown in Fig. 15(B). Party retreat.

Next, after the suction holding of the panel 102 is released, the panel 102 is sucked by the adsorption pad 104 of the conveying device 106, and the panel 102 is taken out from the peeling assembly 42 by the conveying device 106.

Finally, as shown in Fig. 15(C), the reinforcing plate 3A is suction-held by the adsorption pad 104 of the transfer device 106, and thereafter, the reinforcing plate 3A of the flexible plate 48 is released. The reinforcing plate 3A is taken out from the peeling assembly 42 (Fig. 15 (D)).

The peeling method is the peeling method of the laminated body 6 shown in FIG. 2, but even if it is the laminated body 1 shown in FIG. 1, the reinforcing board 3 can be peeled off using the same peeling apparatus 40. In this case, the reinforcing plate 3 is held by the flexible plate 46, and the substrate 2 is held by the flexible plate 48. Next, the peeling assembly 42 is inclined at an angle θ with respect to the horizontal direction. Next, the liquid 100 is filled into the liquid tank 68, and the side surface of the laminated body 1 is filled with the liquid 100. Then, the flexible board 46 is bent and deformed as shown in Figs. 12(A) to (D). Thereby, the reinforcing plate 3 can be peeled off.

In the above-mentioned peeling step, the side surface of the inclined laminated body 1 is also filled with the liquid 100. Therefore, when peeling starts from this state, the liquid 100 directly flows into the peeling surface which sequentially appears due to the peeling on the interface, and is peeled off on one side. The surface is moved downward by gravity, and the peeling surface is directly wetted. Thereby, the peeling operation by the liquid 100 can be performed smoothly and in a short time.

The present invention has been described in detail with reference to the specific embodiments of the invention. It is understood that various changes and modifications may be made without departing from the spirit and scope of the invention.

The present application is based on Japanese Patent Application No. 2014-114644, filed on Jun. 3, 2014, the content of which is hereby incorporated by reference.

3B‧‧‧ reinforcing plate

6‧‧‧Layer

24‧‧‧ interface

42‧‧‧ Strip assembly

46‧‧‧Flexible board

46A‧‧‧ corner

46B‧‧‧ corner

48‧‧‧Flexible board

52‧‧‧Porous sheets

54‧‧‧Shell

64‧‧‧through holes

70‧‧‧shell

72‧‧‧Drainage holes

76‧‧‧Porous sheets

100‧‧‧Transporting device

Claims (15)

A peeling device for a laminated body, comprising: a tilting device that tilts a laminate in which a first substrate and a second substrate are separated from each other by an adsorption layer with respect to a horizontal direction; and a liquid supply device The side surface of at least the upper end side of the inclined laminated body is filled with a liquid, and the peeling means is peeled off from the upper end portion of the laminated body from the inclined side toward the lower end portion at the interface between the first substrate and the adsorption layer. A layered body peeling device which laminates a first substrate and a second substrate with a pressure-sensitive adhesive layer and which is detachably attached to each other, and at least one of the first substrate and the second substrate The one end side is bent toward the other end side in the peeling traveling direction, and the interface between the first substrate and the adsorption layer is peeled off, and the peeling assembly includes a first holding member that holds the first substrate. And holding the second holding member of the second substrate and the first case surrounding the laminated body, and forming a space portion surrounded by the first holding member, the second holding member, and the first case as a liquid a tilting device that inclines the peeling assembly with respect to a horizontal direction; a liquid supply device that supplies a liquid to the liquid tank of the peeling assembly to fill a side surface of the laminated body with a liquid; and a peeling device that causes the above At least one of the first holding member and the second holding member is curved in the peeling traveling direction from the upper end portion toward the lower end portion. A peeling device for a laminated body according to claim 2, wherein the liquid supply hole is provided inside the first casing. The peeling device of the laminated body according to claim 2 or 3, wherein the peeling assembly includes a second casing surrounding the first casing, and a drain hole is provided between the first casing and the second casing . A peeling device for a laminate according to any one of claims 1 to 4, wherein the liquid is water. A method for peeling a laminated body, comprising the step of inclining a laminate in which a first substrate and a second substrate are detachably attached to each other via an adsorption layer, with respect to a horizontal direction; and a liquid supply step a side surface of the laminated body that is inclined at least on the upper end side is filled with a liquid, and a peeling step of peeling off from an upper end portion of the laminated body toward the lower end portion at an interface between the first substrate and the adsorption layer; In the peeling step, the liquid is continuously supplied from the outside of the laminated body, and the peeling surface is wetted while moving downward by the gravity on the peeling surface which sequentially appears due to peeling of the interface. A method for peeling a laminated body, wherein a laminated body in which a first substrate and a second substrate are adhered to each other with an adsorption layer interposed therebetween, and at least one of the first substrate and the second substrate The one end side is bent toward the other end side in the peeling traveling direction, thereby peeling off the interface between the first substrate and the adsorption layer, and is characterized in that a peeling assembly is provided, and the peeling assembly includes the first substrate holding the first substrate a holding member, a second holding member that holds the second substrate, and a first casing that surrounds the laminated body, and that constitutes a space portion surrounded by the first holding member, the second holding member, and the first casing a liquid tank, and the peeling method of the laminated body includes the following steps: a tilting step of tilting the peeling assembly relative to a horizontal direction; a liquid supply step of supplying a liquid to the liquid tank of the peeling assembly to fill a side surface of the laminated body with a liquid; and a peeling step of causing at least one of the first holding member and the second holding member to follow The peeling traveling direction is curved from the upper end portion toward the lower end portion; and in the peeling step, the liquid is continuously supplied from the outside of the laminated body, and sequentially appears by gravity due to peeling of the interface. The peeling surface is moved downward while the peeling surface is wetted. The peeling method of the laminated body according to claim 7, wherein the liquid supply hole is provided inside the first casing, and the liquid is supplied from the supply hole to the liquid tank. The peeling method of the laminated body according to claim 7 or 8, wherein the peeling assembly includes a second casing surrounding the first casing, and a drain hole is provided between the first casing and the second casing; The liquid overflowing from the first housing is discharged from the drain hole. The method for peeling a laminate according to any one of claims 6 to 9, wherein the adsorption layer is a polyimide resin layer, and the liquid is water. A method of manufacturing an electronic device, comprising: a functional layer forming step of forming a laminate which is detachably attached to a first substrate and a second substrate via an adsorption layer, and is formed on an exposed surface of the first substrate a functional layer; and a separating step of separating the second substrate from the first substrate on which the functional layer is formed; wherein the separating step includes a tilting step of tilting the laminated body with respect to a horizontal direction; a supply step of filling the side surface of at least the upper end side of the inclined laminated body with a liquid; and a peeling step of tilting the upper end portion of the laminated body toward the lower end portion The interface between the first substrate and the adsorption layer is peeled off; and in the peeling step, the liquid is continuously supplied from the outside of the laminate, and the interface between the first substrate and the adsorption layer is by gravity The peeling surface which is peeled off and sequentially appears to move downward, and the peeling surface is wetted. A method of manufacturing an electronic device, comprising: a functional layer forming step of attaching a laminate to which a first substrate and a second substrate are detachably attached to each other, and forming a layer on the exposed surface of the first substrate And a separating step of separating the second substrate from the first substrate on which the functional layer is formed; wherein in the separating step, a peeling assembly is used, and the peeling assembly includes the first substrate a first holding member, a second holding member holding the second substrate, and a first casing surrounding the laminated body, and a space surrounded by the first holding member, the second holding member, and the first casing The portion is configured as a liquid tank, and the separating step includes a step of inclining the peeling assembly with respect to a horizontal direction, and a liquid supply step of supplying a liquid to the liquid tank of the peeling assembly to form the laminated body a side surface filled with a liquid; and a peeling step of causing at least one of the first holding member and the second holding member to move from the upper end toward the lower end The peeling traveling direction is curved; and in the peeling step, the liquid is continuously supplied from the outside of the laminated body, and sequentially appears by gravity due to peeling of the interface between the first substrate and the adsorbing layer. The peeling surface is moved downward while the peeling surface is wetted. The method of manufacturing an electronic device according to claim 12, wherein the inside of the first casing is inside A supply hole for the liquid is provided, and a liquid is supplied to the liquid tank from the supply hole. The method of manufacturing an electronic device according to claim 12, wherein the peeling assembly includes a second casing surrounding the first casing, and a drain hole is provided between the first casing and the second casing. The liquid overflowing from the first casing is discharged from the drain hole. The method of manufacturing an electronic device according to any one of claims 11 to 14, wherein the adsorption layer is a polyimide resin layer, and the liquid is water.